JPH06229829A - Photoreceptor element array - Google Patents
Photoreceptor element arrayInfo
- Publication number
- JPH06229829A JPH06229829A JP1741493A JP1741493A JPH06229829A JP H06229829 A JPH06229829 A JP H06229829A JP 1741493 A JP1741493 A JP 1741493A JP 1741493 A JP1741493 A JP 1741493A JP H06229829 A JPH06229829 A JP H06229829A
- Authority
- JP
- Japan
- Prior art keywords
- light
- element array
- receiving element
- light receiving
- shielding mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 108091008695 photoreceptors Proteins 0.000 title abstract 2
- 239000011521 glass Substances 0.000 abstract description 46
- 230000001681 protective effect Effects 0.000 abstract description 28
- 230000003595 spectral effect Effects 0.000 abstract description 22
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000000126 substance Substances 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000002835 absorbance Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000012742 biochemical analysis Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- BOPGDPNILDQYTO-NNYOXOHSSA-N nicotinamide-adenine dinucleotide Chemical compound C1=CCC(C(=O)N)=CN1[C@H]1[C@H](O)[C@H](O)[C@@H](COP(O)(=O)OP(O)(=O)OC[C@@H]2[C@H]([C@@H](O)[C@@H](O2)N2C3=NC=NC(N)=C3N=C2)O)O1 BOPGDPNILDQYTO-NNYOXOHSSA-N 0.000 description 1
- 229930027945 nicotinamide-adenine dinucleotide Natural products 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0262—Constructional arrangements for removing stray light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1213—Filters in general, e.g. dichroic, band
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えば、自動化学分析
装置の多波長分光光度計に備えられ、分散した単色光の
光量を測定する受光素子アレイに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light-receiving element array provided in a multi-wavelength spectrophotometer of an automatic chemical analyzer, for measuring the amount of dispersed monochromatic light.
【０００２】[0002]
【従来の技術】例えば、自動化学分析装置の多波長分光
光度計には図７に示すような受光素子アレイ１が備えら
れている。この受光素子アレイ１においては、矩形な受
光面を有するフォトダイオ−ド２…が単色光の分散方向
に沿って複数配列されている。そして、フォトダイオ−
ド２…として、Ｓ／Ｎ比が良くダイナミックレンジの大
きいものが採用されている。2. Description of the Related Art For example, a multi-wavelength spectrophotometer of an automatic chemical analyzer is provided with a light receiving element array 1 as shown in FIG. In this light receiving element array 1, a plurality of photodiodes 2 ... Having a rectangular light receiving surface are arranged along the direction of dispersion of monochromatic light. And Photodio
As the drive No. 2, ..., those having a good S / N ratio and a large dynamic range are adopted.
【０００３】図８（ａ）に示すように、分光のために凹
面回折格子３を用いた場合、分散光４は受光素子アレイ
１上に、波長λ1 〜λn の連続光として集光される。つ
まり、分散した特定波長λk の単色光が受光素子アレイ
１の対応するフォトダイオ−ド２に入射する。As shown in FIG. 8 (a), when the concave diffraction grating 3 is used for spectroscopy, the dispersed light 4 is condensed on the light receiving element array 1 as continuous light of wavelengths λ 1 to λ n. It That is, the dispersed monochromatic light of the specific wavelength λ k is incident on the corresponding photodiode 2 of the light receiving element array 1.
【０００４】しかし、凹面回折格子１の性能や光路系に
おける多重反射等を原因として、各フォトダイ−ド２…
には、特定波長λk 以外の波長成分が入射する。迷光量
をＩλs とし、波長λk の光量をＩλk とすると、迷光
成分Ｒstray は以下のように表される。However, due to the performance of the concave diffraction grating 1 and the multiple reflection in the optical path system, each photodiode 2 ...
A wavelength component other than the specific wavelength λ k is incident on. When the stray light amount is I λs and the light amount of the wavelength λ k is I λk , the stray light component R stray is expressed as follows.
【０００５】Ｒstray ＝Ｉλs ／Ｉλk （％） この迷光成分は測光量に測定誤差として加わり、特に、
340nm近辺の短波長領域の信号成分の少ない波長で測光
性能の劣化が見られる。R stray = I λs / I λk (%) This stray light component adds to the photometric amount as a measurement error, and in particular,
Deterioration of photometric performance is observed at wavelengths with few signal components in the short wavelength region around 340 nm.
【０００６】従って一般には、迷光除去のために色ガラ
スフィルタ（分光フィルタ）が利用されている。色ガラ
スフィルタはフォトダイオ−ドの前段に配置され、高次
光等の迷光を吸収し除去している。色ガラスフィルタを
用いることにより、特定波長λk 以外の光は信号成分と
して取出されず、迷光量Ｉλs が最小限に抑えられる。
具体的には、図９に示すように、色ガラスフィルタ５…
は短冊状に切断されており、それぞれ対応するフォトダ
イオ−ド２…に対向している。Therefore, a colored glass filter (spectral filter) is generally used to remove stray light. The colored glass filter is arranged in front of the photodiode and absorbs and removes stray light such as high-order light. By using the colored glass filter, light other than the specific wavelength λ k is not extracted as a signal component, and the stray light amount I λs can be minimized.
Specifically, as shown in FIG. 9, the colored glass filters 5 ...
Are cut into strips and face the corresponding photodiodes 2 ,.
【０００７】なお、このような受光素子アレイは、例え
ば特開昭５８−１０５０２４号公報に開示されている。Such a light receiving element array is disclosed, for example, in Japanese Patent Laid-Open No. 58-105024.
【０００８】また、迷光除去のために、図１２及び図１
３に示すような遮光マスク６を用いたものも在る。この
遮光マスク６は複数のスリット８…を有しており、これ
らスリット８…が光透過領域として利用される。そし
て、遮光マスク６は、フォトダイ−ド２…に受光されな
い光を遮断し、多重反射光の発生を防止する。Further, in order to eliminate stray light, FIG. 12 and FIG.
There is also one using a light shielding mask 6 as shown in FIG. The light-shielding mask 6 has a plurality of slits 8 ... And these slits 8 ... Are used as light transmitting regions. The light-shielding mask 6 blocks light that is not received by the photodiodes 2 ... And prevents generation of multiple reflected light.
【０００９】[0009]
【発明が解決しようとする課題】ところで、近年は、自
動化学分析装置の設置環境が制限されているため、多波
長分光光度計の小型化が強く望まれている。例えば、図
８（ｂ）に示すように凹面回折格子３´の焦点距離を短
くすれば、光路長が短くなるため、多波長分光光度計の
小型化が可能である。しかし、この場合には単色光の分
散範囲が狭まるため、受光素子アレイ１´の小型化が必
要である。By the way, in recent years, since the installation environment of the automatic chemical analyzer is limited, downsizing of the multi-wavelength spectrophotometer is strongly desired. For example, as shown in FIG. 8B, if the focal length of the concave diffraction grating 3'is shortened, the optical path length is shortened, so that the multi-wavelength spectrophotometer can be downsized. However, in this case, since the dispersion range of monochromatic light is narrowed, it is necessary to downsize the light receiving element array 1 '.
【００１０】凹面回折格子３´においては、焦点距離を
短くするために回折格子自体の設計が制限されるので、
回折格子の迷光成分の除去性能が悪くなる。したがっ
て、受光素子アレイ１自体の迷光除去対策が更に重要に
なる。In the concave diffraction grating 3 ', the design of the diffraction grating itself is limited in order to shorten the focal length.
The stray light component removal performance of the diffraction grating becomes poor. Therefore, it is even more important to take measures against stray light in the light receiving element array 1 itself.
【００１１】図９に示すように複数の色ガラスフィルタ
５…を使用した受光素子アレイを小型化する場合、色ガ
ラスフィルタ５…も微細化されるので、接合面の加工精
度の要求が厳しくなるとともに、色ガラスフィルタ５…
どうしの貼り付けが困難になる。As shown in FIG. 9, when a light receiving element array using a plurality of colored glass filters 5 ... Is miniaturized, the colored glass filters 5 ... Together with the colored glass filter 5 ...
It becomes difficult to paste each other.
【００１２】また、図１０（ａ）及び（ｂ）に示すよう
に、フォトダイオ−ド２と色ガラスフィルタ５との平行
度を保つことも困難である。フォトダイオ−ド２と色ガ
ラスフィルタ５との平行度の設定が不十分な場合には、
高次の迷光を効率よくカットすることが難しい。Further, as shown in FIGS. 10A and 10B, it is difficult to maintain the parallelism between the photodiode 2 and the colored glass filter 5. If the parallelism between the photo diode 2 and the colored glass filter 5 is insufficiently set,
It is difficult to efficiently cut high-order stray light.
【００１３】さらに、色ガラスフィルタ５…の枚数が増
えると、機械的強度が低下する。また、各色ガラスフィ
ルタ５…毎に透過率が決まっているため、保護ガラスの
代用として色ガラスフィルタ５…を用いる場合には各色
ガラスフィルタ５…の肉厚を各波長に合せて変化させる
必要がある。しかし、微小な色ガラスフィルタの肉厚を
一枚づつ異ならせることは、製造上困難である。Further, as the number of the colored glass filters 5 increases, the mechanical strength decreases. Further, since the transmittance is determined for each colored glass filter 5, ... When using the colored glass filter 5 as a substitute for the protective glass, it is necessary to change the wall thickness of each colored glass filter 5 according to each wavelength. is there. However, it is difficult in manufacturing to make the thicknesses of the minute colored glass filters different one by one.
【００１４】一方、不連続な波長の分散光を測定する場
合、図１１に示すように保護ガラス７での多重反射を原
因として迷光が生じることが分かっている。そして、こ
の迷光を除去するために、図１２に示すような遮光マス
ク６が用いられる場合がある。しかし、この遮光マスク
６を用いた場合にも、単色光の分散範囲が狭まれば、遮
光マスク６と受光素子アレイ１との位置合せが困難にな
る。On the other hand, when measuring dispersed light having discontinuous wavelengths, it is known that stray light is generated due to multiple reflection on the protective glass 7, as shown in FIG. Then, in order to remove this stray light, a light shielding mask 6 as shown in FIG. 12 may be used. However, even when this light-shielding mask 6 is used, if the dispersion range of monochromatic light is narrowed, it becomes difficult to align the light-shielding mask 6 and the light-receiving element array 1.
【００１５】本発明の目的とするところは、迷光を効率
よく除去できるとともに、製造の容易な受光素子アレイ
を提供することにある。An object of the present invention is to provide a light receiving element array which can remove stray light efficiently and is easy to manufacture.
【００１６】[0016]
【課題を解決するための手段および作用】上記目的を達
成するために本発明は、分散した複数の単色光を透過さ
せる光透過部材と、この光透過部材を透過した単色光を
受光する受光素子とを有する受光素子アレイにおいて、
迷光除去手段を備え、この迷光除去手段を光透過部材に
一体に形成したことにある。In order to achieve the above object, the present invention provides a light transmitting member for transmitting a plurality of dispersed monochromatic light, and a light receiving element for receiving the monochromatic light transmitted through the light transmitting member. In a light receiving element array having
The stray light removing means is provided, and the stray light removing means is formed integrally with the light transmitting member.
【００１７】こうすることによって本発明は、迷光を効
率よく除去できるとともに、受光素子アレイを容易に製
造できるようにしたことにある。Thus, the present invention is capable of efficiently removing stray light and facilitating manufacture of the light receiving element array.
【００１８】本発明は、吸光度分析を行う装置のいずれ
にも有効に適用できるが、特に生化学分析における吸光
度の高いものに対する測定に対してより有効である。例
えば、 GOT、GPT などの測定項目でNADHから NADへの化
学変化の際の吸光度変化をとらえる場合などが挙げられ
る。The present invention can be effectively applied to any device for performing absorbance analysis, but is particularly effective for measurement of a substance having high absorbance in biochemical analysis. For example, it is possible to use the measurement items such as GOT and GPT to detect the change in absorbance during a chemical change from NADH to NAD.
【００１９】[0019]
【実施例】以下、本発明の各実施例を図１〜図６に基づ
いて説明する。Embodiments of the present invention will be described below with reference to FIGS.
【００２０】図１は本発明の第１実施例の要部を示して
おり、図中の符号１１は受光素子アレイである。この受
光素子アレイ１１はパッケ−ジ本体１２を有しており、
このパッケ−ジ本体１２には凹陥部１３が形成されてい
る。凹陥部１３はパッケ−ジ本体１２の上面に開口して
おり、凹陥部１３内には受光素子としてのフォトダイオ
−ドアレイチップ１４が収容されている。FIG. 1 shows an essential part of a first embodiment of the present invention, and the reference numeral 11 in the drawing is a light receiving element array. The light receiving element array 11 has a package body 12,
A recess 13 is formed in the package body 12. The recessed portion 13 is open on the upper surface of the package body 12, and a photodiode array chip 14 as a light receiving element is accommodated in the recessed portion 13.
【００２１】凹陥部１３の底部の形状はフォトダイオ−
ドアレイチップ１４の形状に合せて成形されており、フ
ォトダイオ−ドアレイチップ１４はパッケ−ジ本体１２
に係合している。The shape of the bottom of the recess 13 is a photodiode.
The photodiode array chip 14 is molded to match the shape of the package array chip 12, and the photodiode array chip 14 is a package body 12.
Is engaged with.
【００２２】フォトダイオ−ドアレイチップ１４の表面
には複数の受光部１５…が形成されており、これら受光
部１５…は、測定対象の単色光の分散方向に沿って並ん
でいる。ここで、フォトダイオ−ドアレイチップ１４と
しては、一般的なものを採用することが可能である。ま
た、図示しないが、フォトダイオ−ドアレイチップ１４
に接続されたリ−ド端子がパッケ−ジ本体１２の外側に
導出されている。A plurality of light receiving portions 15 ... Are formed on the surface of the photodiode array chip 14, and these light receiving portions 15 ... Are arranged along the dispersion direction of the monochromatic light to be measured. Here, as the photodiode array chip 14, a general one can be adopted. Although not shown, the photodiode array chip 14
A lead terminal connected to is led to the outside of the package body 12.
【００２３】パッケ−ジ本体１２の内周縁部には段差部
１６が形成されており、この段差部１６は下側で狭まっ
ている。光透過部材としての板状の保護ガラス１７がこ
の段差部１６に上方から係合しており、保護ガラス１７
の周縁部が段差部１６に当接している。そして、保護ガ
ラス１７はパッケ−ジ本体１２に例えば接着等の手段に
よって固定されており、凹陥部１３は保護ガラス１７に
よって気密的に閉じられている。A step portion 16 is formed on the inner peripheral edge of the package body 12, and the step portion 16 is narrowed on the lower side. A plate-shaped protective glass 17 as a light transmitting member is engaged with the step portion 16 from above, and the protective glass 17
The peripheral edge portion of the contact portion is in contact with the step portion 16. The protective glass 17 is fixed to the package body 12 by means such as adhesion, and the recess 13 is hermetically closed by the protective glass 17.
【００２４】保護ガラス１７の内側面には、迷光除去手
段としての黒色の遮光マスク１８が形成されている。遮
光マスク１８は薄膜であり、図２に示すように、複数の
光透過領域１９…を残して保護ガラス１７の内側面を覆
っている。光透過領域１９…は、受光部１５…の形状に
合わせて、矩形なスリット状に開口している。そして、
光透過領域１９…の配置は受光部１５…の配置に合せて
設定されており、光透過領域１９…は受光部１５…に対
向している。On the inner surface of the protective glass 17, a black light shielding mask 18 is formed as a stray light removing means. The light-shielding mask 18 is a thin film, and as shown in FIG. 2, covers the inner surface of the protective glass 17 leaving a plurality of light-transmitting regions 19 ... The light transmissive regions 19 ... Are opened in a rectangular slit shape in accordance with the shape of the light receiving portions 15. And
The arrangement of the light transmitting regions 19 ... Is set in accordance with the arrangement of the light receiving units 15 ..., and the light transmitting regions 19 ...
【００２５】遮光マスク１８の作製の際には、例えば黒
色顔料を混ぜられた感光性樹脂が、保護ガラス１７に塗
布された後、露光・現像される。このパタ−ニングの結
果、保護ガラス１７に遮光マスク１８が積層される。遮
光マスク１８の作製には、いわゆる半導体製造のための
フォトリソグラフィ工程と同様の方法を適用することが
可能であるため、１μｍ以下のパタ−ン精度を実現でき
る。When the light-shielding mask 18 is produced, for example, a photosensitive resin mixed with a black pigment is applied to the protective glass 17 and then exposed and developed. As a result of this patterning, the light shielding mask 18 is laminated on the protective glass 17. Since the same method as the so-called photolithography process for manufacturing a semiconductor can be applied to the fabrication of the light-shielding mask 18, a pattern accuracy of 1 μm or less can be realized.
【００２６】一部の光透過領域１９…には迷光除去手段
としての分光フィルタ２０ａ、２０ｂ、…が形成されて
いる。各分光フィルタ２０ａ、２０ｂ、…も遮光マスク
１８と同様に薄膜であり、保護ガラス１７の内側面に積
層されている。そして、各分光フィルタ２０ａ、２０
ｂ、…は、特定波長の単色光以外の光を遮断できるよ
う、それぞれ異なる分光特性を有している。Spectral filters 20a, 20b, ... As stray light removing means are formed in some of the light transmitting regions 19. Each of the spectral filters 20a, 20b, ... Is also a thin film like the light shielding mask 18, and is laminated on the inner side surface of the protective glass 17. Then, each spectral filter 20a, 20
b, ... Have different spectral characteristics so as to block light other than monochromatic light of a specific wavelength.
【００２７】各分光フィルタ２０ａ、２０ｂ……の作製
の際には、所望の分光特性を有する顔料が感光性樹脂に
混ぜられ、この感光性樹脂が保護ガラス１７に塗布され
て露光・現像される。つまり、分光フィルタ２０ａ、２
０ｂ…も遮光マスク１８と同様の手順によって作製する
ことが可能である。At the time of manufacturing each of the spectral filters 20a, 20b, ... . That is, the spectral filters 20a, 2
0b ... Can also be manufactured by the same procedure as the light shielding mask 18.
【００２８】ここで、図１中においては、遮光マスク１
８や分光フィルタ２０ａ、２０ｂ…の厚さの比率は、説
明が容易になるよう、実際よりも大きく示されている。
また、図１中の符号２１ａ、２１ｂ、…は入射光を示し
ている。Here, in FIG. 1, the light-shielding mask 1
8 and the thickness ratio of the spectral filters 20a, 20b ... Are shown larger than they are for the sake of easy description.
Reference numerals 21a, 21b, ... In FIG. 1 indicate incident light.
【００２９】前記光透過領域１９…と受光部１５…との
位置合せは、保護ガラス１７の取付けによって達成され
る。つまり、保護ガラス１７の取付けの際には、パッケ
−ジ本体１２に保護ガラス１７が組合され、保護ガラス
１７の周縁部がパッケ−ジ本体１２の段差部１６に押当
てられる。そして、保護ガラス１７がパッケ−ジ本体１
２に係合し、光透過領域１９…と受光部１５…とが対向
する。この様な方法により、0.1 mm程度の位置精度が容
易に得られる。The alignment of the light transmitting areas 19 and the light receiving portions 15 is achieved by attaching the protective glass 17. That is, when the protective glass 17 is attached, the protective glass 17 is combined with the package body 12, and the peripheral edge of the protective glass 17 is pressed against the step portion 16 of the package body 12. The protective glass 17 is the package body 1
2, and the light transmitting regions 19 and the light receiving portions 15 face each other. With such a method, a positional accuracy of about 0.1 mm can be easily obtained.
【００３０】すなわち、上述のような受光素子アレイ１
１においては、遮光マスク１８と分光フィルタ２０ａ、
２０ｂ、…とが保護ガラス１７に直接形成されているの
で、保護ガラス１７とフォトダイオ−ドアレイチップ１
４とを近接して配置することが可能になる。そして、受
光素子アレイ１１の小型化が可能になる。また、フォト
ダイオ−ドアレイチップ１４の受光部１５…と遮光マス
ク１８の光透過領域１９…との位置合せを容易に且つ高
精度に行うことができる。そして、受光素子アレイ１１
を小型化しても、充分な位置精度を確保できる。さら
に、遮光マスク１８と分光フィルタ２０ａ、２０ｂ、…
が保護ガラス１７に積層されているので、遮光マスク１
８と分光フィルタ２０、２０ｂ、…の作製が容易であ
る。That is, the light receiving element array 1 as described above
1, the shading mask 18 and the spectral filter 20a,
.. are directly formed on the protective glass 17, the protective glass 17 and the photodiode array chip 1 are formed.
4 and 4 can be arranged close to each other. Then, the light receiving element array 11 can be downsized. Further, the light receiving portions 15 of the photodiode array chip 14 and the light transmitting regions 19 of the light shielding mask 18 can be easily and accurately aligned with each other. Then, the light receiving element array 11
Even if the size is reduced, sufficient position accuracy can be secured. Further, the light-shielding mask 18 and the spectral filters 20a, 20b, ...
Is laminated on the protective glass 17, the light-shielding mask 1
8 and the spectral filters 20, 20b, ... Can be easily manufactured.
【００３１】また、分光フィルタ２０ａ、２０ｂ…が薄
膜であるので、分光特性は材料の種類や量によって調節
される。このため、分光特性の調節が容易である。Further, since the spectral filters 20a, 20b ... Are thin films, the spectral characteristics are adjusted by the kind and amount of the material. Therefore, it is easy to adjust the spectral characteristics.
【００３２】したがって、迷光成分を効率よく遮断で
き、多重反射を防止できる。さらに、分光フィルタ２０
ａ、２０ｂ、…の設計の自由度が高まり、高次光の迷光
の遮断を効率よく行うことができる。Therefore, stray light components can be efficiently blocked and multiple reflections can be prevented. Further, the spectral filter 20
The degree of freedom in designing a, 20b, ... Is increased, and stray light of high-order light can be efficiently blocked.
【００３３】分光フィルタ２０ａ、２０ｂ、…は遮光マ
スク１８によって囲まれており、分光２０ａ、２０ｂ、
…の外側に遮光マスク１８が位置しているので、高次の
迷光も効率よく除去できる。したがって、微細な離散的
波長領域の迷光を除去できる。The spectral filters 20a, 20b, ... Are surrounded by a light shielding mask 18, and the spectral filters 20a, 20b ,.
Since the light-shielding mask 18 is located outside the ..., High-order stray light can be efficiently removed. Therefore, stray light in a fine discrete wavelength region can be removed.
【００３４】そして、これらの結果として、測定精度を
低下させることなく、小型で安価な分光光度計を提供す
ることが可能になる。As a result, it is possible to provide a small-sized and inexpensive spectrophotometer without lowering the measurement accuracy.
【００３５】なお、本発明は上述の実施例に限られるこ
となく、種々に変更することが可能である。例えば、保
護ガラスをプラスチックに変えるなどのように構成部材
の材料の変更が可能であることはもちろん、遮光マスク
１８や分光フィルタ２０ａ，２０ｂ、…の製法を変えて
実施することも可能である。The present invention is not limited to the above embodiment, but can be variously modified. For example, the material of the constituent members can be changed by changing the protective glass to plastic, and the manufacturing method of the light shielding mask 18 and the spectral filters 20a, 20b, ... Can be changed.
【００３６】さらに、図３に示すように遮光マスク１８
と分光フィルタ２０ａ、２０ｂ…とを保護ガラス１７の
外側面に形成してもよく、或いは、図４に示すように遮
光マスク１８と分光フィルタ２０ａ、２０ｂ、…との形
成面を逆に設定してもよい。Further, as shown in FIG. 3, the light shielding mask 18
, And the spectral filters 20a, 20b, ... May be formed on the outer surface of the protective glass 17, or, as shown in FIG. 4, the formation surfaces of the light shielding mask 18 and the spectral filters 20a, 20b ,. May be.
【００３７】つぎに、本発明の第２実施例を図５に基づ
いて説明する。なお、第１実施例と同様な部分について
は同一番号を付し、その説明は省略する。Next, a second embodiment of the present invention will be described with reference to FIG. The same parts as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.
【００３８】多波長分光光度計に用いられる受光素子ア
レイにとっては、入射光を外へ反射させないことも大切
である。受光素子アレイの外へ反射した光は、回折格子
をはじめとする分光光学系の構成部材で反射し、再び受
光素子アレイに戻る。このような戻り光は迷光成分とな
る。For the light receiving element array used in the multi-wavelength spectrophotometer, it is important not to reflect incident light to the outside. The light reflected to the outside of the light receiving element array is reflected by the constituent elements of the spectroscopic optical system such as the diffraction grating and returns to the light receiving element array again. Such return light becomes a stray light component.
【００３９】本発明の第２実施例の受光素子アレイ３１
は、保護ガラス１７の表面での反射を抑制するように工
夫したものである。The light receiving element array 31 of the second embodiment of the present invention.
Is designed to suppress reflection on the surface of the protective glass 17.
【００４０】図５に示すように、保護ガラス１７の表面
には反射防止膜３２が形成されている。この反射防止膜
３２は、例えばＡｌ2 Ｏ3 やＭｇＦ2 等を蒸着すること
により形成されている。この反射防止膜３２が入射光の
反射を低減させ、戻り光を抑制する。As shown in FIG. 5, an antireflection film 32 is formed on the surface of the protective glass 17. The antireflection film 32 is formed by vapor-depositing Al 2 O 3 or MgF 2 , for example. The antireflection film 32 reduces reflection of incident light and suppresses return light.
【００４１】図６は本発明の第３実施例を示している。
図６の受光素子アレイ４１においては、保護ガラス１７
の表面にも黒色の遮光マスク４２が形成されている。遮
光マスク４２には、入射光の透過を許すように、光透過
領域４３…が形成されている。そして、遮光マスク４２
は保護ガラス１７の表面での反射を抑制する。FIG. 6 shows a third embodiment of the present invention.
In the light receiving element array 41 of FIG.
A black light shielding mask 42 is also formed on the surface of the. Light-transmitting regions 43 ... Are formed in the light-shielding mask 42 so as to allow transmission of incident light. Then, the light shielding mask 42
Suppresses reflection on the surface of the protective glass 17.
【００４２】第２実施例の反射防止膜３２においては波
長毎に反射率が変化するが、このように遮光マスク４２
を形成した場合には、広い波長範囲に亘って反射率を小
さい値に抑制できる。In the antireflection film 32 of the second embodiment, the reflectance changes depending on the wavelength.
In the case of forming, the reflectance can be suppressed to a small value over a wide wavelength range.
【００４３】[0043]
【発明の効果】以上説明したように本発明は、分散した
複数の単色光を透過させる光透過部材と、この光透過部
材を透過した単色光を受光する受光素子とを有する受光
素子アレイにおいて、迷光除去手段を備え、この迷光除
去手段を光透過部材に一体に形成したものである。As described above, the present invention provides a light receiving element array having a light transmitting member for transmitting a plurality of dispersed monochromatic light and a light receiving element for receiving the monochromatic light transmitted through the light transmitting member. Stray light removing means is provided, and the stray light removing means is formed integrally with the light transmitting member.
【００４４】したがって本発明は、迷光を効率よく除去
できるとともに、受光素子アレイを容易に製造できると
いう効果がある。Therefore, the present invention has an effect that stray light can be removed efficiently and a light receiving element array can be easily manufactured.
【図１】本発明の第１実施例の受光素子アレイの要部を
示す断面図。FIG. 1 is a sectional view showing a main part of a light-receiving element array according to a first embodiment of the present invention.
【図２】保護ガラスを示す平面図。FIG. 2 is a plan view showing a protective glass.
【図３】第１実施例の受光素子アレイの変形例を示す断
面図。FIG. 3 is a sectional view showing a modified example of the light receiving element array of the first embodiment.
【図４】第１実施例の受光素子アレイの他の変形例を示
す断面図。FIG. 4 is a cross-sectional view showing another modification of the light receiving element array of the first embodiment.
【図５】本発明の第２実施例の受光素子アレイの要部を
示す断面図。FIG. 5 is a sectional view showing a main part of a light-receiving element array according to a second embodiment of the present invention.
【図６】本発明の第３実施例の受光素子アレイの要部を
示す断面図。FIG. 6 is a sectional view showing a main part of a light receiving element array according to a third embodiment of the present invention.
【図７】一般の受光素子アレイを示す斜視図。FIG. 7 is a perspective view showing a general light receiving element array.
【図８】（ａ）及び（ｂ）はそれぞれ凹面回折格子の焦
点距離が異なる分光光学系を概略的に示す説明図。8A and 8B are explanatory views schematically showing spectroscopic optical systems in which the concave diffraction gratings have different focal lengths.
【図９】分割された色ガラスフィルタを有する受光素子
アレイを一部省略して示す説明図。FIG. 9 is an explanatory view showing a light receiving element array having a divided colored glass filter with a part thereof omitted.
【図１０】（ａ）及び（ｂ）は色ガラスフィルタとフォ
トダイオ−ドの平行度を説明する図。10A and 10B are views for explaining the parallelism between a colored glass filter and a photodiode.
【図１１】保護ガラスでの多重反射を説明する図。FIG. 11 is a diagram illustrating multiple reflection on a protective glass.
【図１２】従来の遮光フィルタを備えた受光素子を一部
省略して示す平面図。FIG. 12 is a plan view showing a light receiving element including a conventional light blocking filter with a part thereof omitted.
【図１３】従来の遮光フィルタを備えた受光素子を一部
省略して示す側断面図。FIG. 13 is a side sectional view showing a light receiving element including a conventional light shielding filter with a part thereof omitted.
１１…受光素子アレイ、１４…フォトダイオ−ドアレイ
チップ（受光素子）、１７…保護ガラス（光透過部
材）、１８…遮光マスク（迷光除去手段）、２０ａ、２
０ｂ、…分光フィルタ（迷光除去手段）。11 ... Light receiving element array, 14 ... Photodiode array chip (light receiving element), 17 ... Protective glass (light transmitting member), 18 ... Shading mask (stray light removing means), 20a, 2
0b, ... Spectral filter (stray light removing means).
Claims (1)
過部材と、この光透過部材を透過した上記単色光を受光
する受光素子とを有する受光素子アレイにおいて、迷光
除去手段を備え、この迷光除去手段を上記光透過部材に
一体に形成したことを特徴とする受光素子アレイ。1. A stray light removing device comprising a light-transmitting member for transmitting a plurality of dispersed monochromatic lights, and a light-receiving element for receiving the monochromatic light transmitted through the light-transmitting member, the stray light removing means being provided. A light receiving element array, wherein the removing means is formed integrally with the light transmitting member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1741493A JPH06229829A (en) | 1993-02-04 | 1993-02-04 | Photoreceptor element array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1741493A JPH06229829A (en) | 1993-02-04 | 1993-02-04 | Photoreceptor element array |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06229829A true JPH06229829A (en) | 1994-08-19 |
Family
ID=11943351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1741493A Pending JPH06229829A (en) | 1993-02-04 | 1993-02-04 | Photoreceptor element array |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06229829A (en) |
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| WO2017005404A1 (en) * | 2015-07-09 | 2017-01-12 | Robert Bosch Gmbh | Sensor device for measuring a fluid concentration, and use of the sensor device |
| CN107835939A (en) * | 2015-07-09 | 2018-03-23 | 罗伯特·博世有限公司 | For measuring the sensor device of fluid concentrations and the application of the sensor device |
| US10914675B2 (en) | 2015-07-09 | 2021-02-09 | Robert Bosch Gmbh | Sensor device for measuring a fluid concentration, and use of the sensor device |
| WO2018193572A1 (en) * | 2017-04-20 | 2018-10-25 | 株式会社島津製作所 | Spectrophotometer |
| JPWO2018193572A1 (en) * | 2017-04-20 | 2019-12-12 | 株式会社島津製作所 | Spectrophotometer |
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