TW201415659A - LED with good electrical contact reflector - Google Patents

LED with good electrical contact reflector Download PDF

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TW201415659A
TW201415659A TW101136310A TW101136310A TW201415659A TW 201415659 A TW201415659 A TW 201415659A TW 101136310 A TW101136310 A TW 101136310A TW 101136310 A TW101136310 A TW 101136310A TW 201415659 A TW201415659 A TW 201415659A
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semiconductor layer
type semiconductor
light
electrical contact
emitting diode
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TW101136310A
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Chinese (zh)
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TWI452725B (en
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Fu-Bang Chen
Wei-Yu Yan
zhi-song Zhang
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High Power Optoelectronics Inc
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Abstract

This invention relates to an LED with a good electrical contact reflector applicable to an LED. The LED comprises sequentially stacked an N-type electrode, an N-type semiconductor layer, a light emitting layer and a P-type semiconductor layer, a reflector, a buffer layer, a combination layer, a permanent substrate, and one P-type electrode. Between the P-type semiconductor layer and the reflector is an intrinsic semiconductor layer, and the intrinsic semiconductor layer is diffused by the doping element of the P-type semiconductor layer and the material element of the reflector. Accordingly, the invention uses the intrinsic semiconductor layer diffused with the doping element of the P-type semiconductor layer and the material element of the reflector to form ohmic contact, so that the reflector and the P-type semiconductor layer form good electrical contact to enhance illumination efficiency and satisfy user demands.

Description

具良好電性接觸反射鏡的發光二極體Light-emitting diode with good electrical contact mirror

本發明係有關發光二極體,特別是指具良好電性接觸反射鏡的發光二極體。
The invention relates to a light-emitting diode, in particular to a light-emitting diode having a good electrical contact mirror.

發光二極體(Light Emitting Diode;LED),具有輕薄短小、省電等特性,已廣泛的應用於照明、交通號誌、廣告招牌等等,其主要由半導體材料多重磊晶堆疊而成,以藍光發光二極體為例,其主要是氮化鎵基(GaN-based)磊晶薄膜組成。Light Emitting Diode (LED), which has the characteristics of lightness, thinness, power saving, etc., has been widely used in lighting, traffic signs, advertising signs, etc., which is mainly composed of multiple epitaxial stacking of semiconductor materials. For example, a blue light-emitting diode is mainly composed of a gallium nitride-based (GaN-based) epitaxial film.

請參閱「圖1」所示,為一種習知垂直式發光二極體,其包含組成三明治結構的一N型半導體層1、一發光層2與一P型半導體層3,該P型半導體層3之下依序設置一反射鏡4(Mirror layer)、一緩衝層5(buffer layer )、一結合層6、一矽基板7與一P型電極8,而該N型半導體層1的表面可以粗化處理以增加光出射率,並供設置一N型電極9,據此於該N型電極9與該P型電極8施予電壓後,該N型半導體層1提供電子,而該P型半導體層3提供電洞,該電子與該電洞於該發光層2結合後即可產生光。Please refer to FIG. 1 , which is a conventional vertical light-emitting diode comprising an N-type semiconductor layer 1 , a light-emitting layer 2 and a P-type semiconductor layer 3 constituting a sandwich structure, and the P-type semiconductor layer. 3, a mirror layer 4, a buffer layer 5, a bonding layer 6, a germanium substrate 7 and a P-type electrode 8 are disposed in sequence, and the surface of the N-type semiconductor layer 1 may be a roughening process to increase the light emission rate, and an N-type electrode 9 is provided. Accordingly, after the N-type electrode 9 and the P-type electrode 8 are applied with a voltage, the N-type semiconductor layer 1 supplies electrons, and the P-type The semiconductor layer 3 provides a hole, and the electrons are combined with the hole in the light-emitting layer 2 to generate light.

且為了增加光取出率,可以讓該N型半導體層1的表面粗化處理而形成一不規則表面1A,而該N型電極9為直接形成於該不規則表面1A上,據此即可避免全反射的產生。In order to increase the light extraction rate, the surface of the N-type semiconductor layer 1 may be roughened to form an irregular surface 1A, and the N-type electrode 9 is directly formed on the irregular surface 1A, thereby avoiding The generation of total reflection.

又習知發光層2所產生的激發光,是沒有方向性的,因此為了增加亮度,需導引激發光朝同一方向射出,習知反射鏡4的設置即可達成此一目標,然而習知藉由設置反射鏡4的雖可達到導引激發光的目標,然而習知反射鏡4的材質為銀所製成,銀與該P型半導體層3的電性接觸不佳,會導致接觸阻抗升高,而降低發光效率,且習之技術於製作反射鏡層時使用濺鍍的方式,而濺鍍使用高能電漿的方式將預鍍金屬游離並沾附到目標物上,此時使用的高能電漿會破壞氮化鎵與鎂的鍵結因而導致接觸阻抗升高,而降低發光效率。It is also known that the excitation light generated by the luminescent layer 2 has no directionality. Therefore, in order to increase the brightness, it is necessary to guide the excitation light to be emitted in the same direction. Conventionally, the arrangement of the mirror 4 can achieve this goal. By setting the mirror 4, the target for guiding the excitation light can be achieved. However, the material of the mirror 4 is made of silver, and the electrical contact between the silver and the P-type semiconductor layer 3 is poor, which may result in contact resistance. Raise, and reduce the luminous efficiency, and the technique used to use the sputtering method in the production of the mirror layer, and the sputtering uses the high-energy plasma to disperse and adhere the pre-plated metal to the target. High-energy plasma destroys the bond between gallium nitride and magnesium, resulting in increased contact resistance and reduced luminous efficiency.

請再一併參閱「圖2」所示,習知為了解決此一問題,會於該反射鏡4與該P型半導體層3之間設置一層薄薄的鎳層3A,其可以形成歐姆接觸,而解決接觸阻抗升高的問題,然而鎳層3A具有吸光的特性,其會直接吸收激發光,而導致亮度降低,同樣會導致降低發光效率。
Please refer to FIG. 2 again. In order to solve this problem, a thin layer of nickel 3A is formed between the mirror 4 and the P-type semiconductor layer 3, which can form an ohmic contact. While solving the problem of an increase in contact resistance, the nickel layer 3A has a light absorbing property, which directly absorbs the excitation light, resulting in a decrease in luminance, which also causes a decrease in luminous efficiency.

本發明之主要目的在於揭露一種具良好電性接觸反射鏡的發光二極體,以降低接觸抵抗,提高發光效率。The main object of the present invention is to disclose a light-emitting diode having a good electrical contact mirror to reduce contact resistance and improve luminous efficiency.

本發明為一種具良好電性接觸反射鏡的發光二極體,應用於一發光二極體,該發光二極體含依序堆疊的一N型電極、一N型半導體層、一發光層、一P型半導體層、一反射鏡、一緩衝層、一結合層、一永久基板與一P型電極,且該P型半導體層與該反射鏡之間設置一本質半導體層,且該本質半導體層擴散有該P型半導體層的摻雜元素與該反射鏡的材料元素。The invention relates to a light-emitting diode with a good electrical contact mirror, which is applied to a light-emitting diode. The light-emitting diode comprises an N-type electrode, an N-type semiconductor layer and a light-emitting layer which are sequentially stacked. a P-type semiconductor layer, a mirror, a buffer layer, a bonding layer, a permanent substrate and a P-type electrode, and an intrinsic semiconductor layer is disposed between the P-type semiconductor layer and the mirror, and the intrinsic semiconductor layer The doping element of the P-type semiconductor layer and the material element of the mirror are diffused.

據此,藉由擴散有該P型半導體層的摻雜元素與該反射鏡的材料元素的該本質半導體層可以於該P型半導體層與該反射鏡之間形成歐姆接觸,亦即可以讓該反射鏡與該P型半導體層之間具良好電性接觸,其可以提升發光效率,而滿足使用上的需求。
According to this, the intrinsic semiconductor layer diffused with the doping element of the P-type semiconductor layer and the material element of the mirror can form an ohmic contact between the P-type semiconductor layer and the mirror, that is, the The mirror has good electrical contact with the P-type semiconductor layer, which can improve the luminous efficiency and meet the requirements for use.

茲有關本發明的詳細內容及技術說明,現以實施例來作進一步說明,但應瞭解的是,該等實施例僅為例示說明之用,而不應被解釋為本發明實施之限制。The detailed description of the present invention and the technical description of the present invention are further illustrated by the accompanying drawings, but it should be understood that these embodiments are merely illustrative and not to be construed as limiting.

請參閱「圖3」所示,為本發明的實施例,本發明為一種具良好電性接觸反射鏡的發光二極體,應用於一發光二極體100,該發光二極體100包含依序堆疊的一N型電極10、一N型半導體層20、一發光層30、一P型半導體層40、一反射鏡50、一緩衝層60、一結合層70、一永久基板80與一P型電極90。Referring to FIG. 3, which is an embodiment of the present invention, the present invention is a light-emitting diode having a good electrical contact mirror, which is applied to a light-emitting diode 100, and the light-emitting diode 100 includes An N-type electrode 10, an N-type semiconductor layer 20, a light-emitting layer 30, a P-type semiconductor layer 40, a mirror 50, a buffer layer 60, a bonding layer 70, a permanent substrate 80 and a P Type electrode 90.

請再一併參閱「圖4A」與「圖4B」所示,其中該P型半導體層40與該反射鏡50之間設置一本質半導體層45,且該本質半導體層45擴散有該P型半導體層40的摻雜元素41與該反射鏡50的材料元素51,其中該本質半導體層45可以選用氮化銦鎵(InGaN),而該P型半導體層40的摻雜元素41可以選用鎂(Mg),該反射鏡50的材料元素51則可以選用銀(Ag)。Please refer to FIG. 4A and FIG. 4B together, wherein an intrinsic semiconductor layer 45 is disposed between the P-type semiconductor layer 40 and the mirror 50, and the P-type semiconductor is diffused from the intrinsic semiconductor layer 45. The doping element 41 of the layer 40 and the material element 51 of the mirror 50, wherein the intrinsic semiconductor layer 45 may be selected from indium gallium nitride (InGaN), and the doping element 41 of the P-type semiconductor layer 40 may be selected from magnesium (Mg The material element 51 of the mirror 50 may be silver (Ag).

且該P型半導體層40可以為氮化鎵(GaN)摻雜鎂(Mg),且包含一第一P型半導體層401與一第二P型半導體層402,並該第一P型半導體層401摻雜鎂元素的原子數目為1E18;而該第二P型半導體層402摻雜鎂元素的原子數目為1E20。The P-type semiconductor layer 40 may be gallium nitride (GaN) doped with magnesium (Mg), and include a first P-type semiconductor layer 401 and a second P-type semiconductor layer 402, and the first P-type semiconductor layer The atomic number of the 401-doped magnesium element is 1E18; and the number of atoms of the second P-type semiconductor layer 402 doped with the magnesium element is 1E20.

又要讓該P型半導體層40的摻雜元素41與該反射鏡50的材料元素51擴散至該本質半導體層45的技術手段,其中之一可以選用高溫回火的方式,其讓該本質半導體層45與該反射鏡50依序堆疊至該P型半導體層40後,藉由加熱升溫至500℃~800℃,並持續60分鐘(min),如此,該P型半導體層40的摻雜元素41與該反射鏡50的材料元素51即會慢慢擴散至該本質半導體層45,而讓該本質半導體層45擴散有該P型半導體層40的摻雜元素41與該反射鏡50的材料元素51(如「圖4B」所示)。Further, a technical means for diffusing the doping element 41 of the P-type semiconductor layer 40 and the material element 51 of the mirror 50 to the intrinsic semiconductor layer 45 is used, and one of them may be selected by a high temperature tempering method, which allows the intrinsic semiconductor After the layer 45 and the mirror 50 are sequentially stacked on the P-type semiconductor layer 40, the temperature is raised to 500 ° C to 800 ° C by heating for 60 minutes (min), thus, the doping element of the P-type semiconductor layer 40 41 and the material element 51 of the mirror 50 are slowly diffused to the intrinsic semiconductor layer 45, and the intrinsic semiconductor layer 45 is diffused with the doping element 41 of the P-type semiconductor layer 40 and the material element of the mirror 50. 51 (as shown in Figure 4B).

又該N型半導體層20可以包含一第一N型半導體層21與一第二N型半導體層22,該第一N型半導體層21與該第二N型半導體層22具不同的摻雜濃度,以減少長晶過程中所產生的缺陷。且其中該緩衝層60可以為選自鈦、鎢、鉑、鎳、鋁與鉻所組成的群組製成,而具相當的緻密性,可用於高溫製程時,阻擋離子擴散而可避免離子擴散破壞其他薄膜結構,同時可做為應力緩衝而釋放應力。The N-type semiconductor layer 20 may include a first N-type semiconductor layer 21 and a second N-type semiconductor layer 22, and the first N-type semiconductor layer 21 and the second N-type semiconductor layer 22 have different doping concentrations. To reduce defects in the process of crystal growth. And wherein the buffer layer 60 can be made of a group consisting of titanium, tungsten, platinum, nickel, aluminum and chromium, and has a relatively compact nature, can be used for blocking ion diffusion and avoiding ion diffusion during high temperature processing. Destroy other film structures while releasing stress as a stress buffer.

該結合層70可以為選自金錫合金、金銦合金與金鉛合金的任一種製成,用於黏結該緩衝層60與該永久基板80。該永久基板80可以為選自矽基板、銅基板、銅鎢基板、氮化鋁基板與氮化鈦基板的任一種製成,其選擇散熱良好且不吸光的材質,而可降低發光時的溫度,並提供光取出效率。The bonding layer 70 may be made of any one selected from the group consisting of a gold-tin alloy, a gold-indium alloy, and a gold-lead alloy for bonding the buffer layer 60 and the permanent substrate 80. The permanent substrate 80 may be made of any one selected from the group consisting of a germanium substrate, a copper substrate, a copper tungsten substrate, an aluminum nitride substrate, and a titanium nitride substrate, and selects a material that has good heat dissipation and does not absorb light, and can reduce the temperature during light emission. And provide light extraction efficiency.

如上所述,本發明透過讓該本質半導體層45擴散有該P型半導體層40的摻雜元素41與該反射鏡50的材料元素51之技術手段,可讓該本質半導體層45於該P型半導體層40與該反射鏡50之間形成歐姆接觸,因而可大幅降低其接觸阻抗,亦即可以讓該反射鏡50與該P型半導體層40之間具良好電性接觸,其可以提升發光效率而滿足使用上的需求。As described above, the present invention allows the intrinsic semiconductor layer 45 to be diffused with the doping element 41 of the P-type semiconductor layer 40 and the material element 51 of the mirror 50 to allow the intrinsic semiconductor layer 45 to be in the P-type. An ohmic contact is formed between the semiconductor layer 40 and the mirror 50, so that the contact resistance thereof can be greatly reduced, that is, the mirror 50 can be in good electrical contact with the P-type semiconductor layer 40, which can improve the luminous efficiency. And meet the needs of use.

惟上述僅為本發明之較佳實施例而已,並非用來限定本發明實施之範圍。即凡依本發明申請專利範圍所做的均等變化與修飾,皆為本發明專利範圍所涵蓋。
The above are only the preferred embodiments of the present invention and are not intended to limit the scope of the embodiments of the present invention. That is, the equivalent changes and modifications made by the scope of the patent application of the present invention are covered by the scope of the invention.

習知Conventional knowledge

1...N型半導體層1. . . N-type semiconductor layer

1A...不規則表面1A. . . Irregular surface

2...發光層2. . . Luminous layer

3...P型半導體層3. . . P-type semiconductor layer

3A...鎳層3A. . . Nickel layer

4...反射鏡4. . . Reflector

5...緩衝層5. . . The buffer layer

6...結合層6. . . Bonding layer

7...矽基板7. . .矽 substrate

8...P型電極8. . . P-type electrode

9...N型電極9. . . N-type electrode

本發明this invention

100...發光二極體100. . . Light-emitting diode

10...N型電極10. . . N-type electrode

20...N型半導體層20. . . N-type semiconductor layer

21...第一N型半導體層twenty one. . . First N-type semiconductor layer

22...第二N型半導體層twenty two. . . Second N-type semiconductor layer

30...發光層30. . . Luminous layer

40...P型半導體層40. . . P-type semiconductor layer

401...第一P型半導體層401. . . First P-type semiconductor layer

402...第二P型半導體層402. . . Second P-type semiconductor layer

41...摻雜元素41. . . Doping element

45...本質半導體層45. . . Intrinsic semiconductor layer

50...反射鏡50. . . Reflector

51...材料元素51. . . Material element

60...緩衝層60. . . The buffer layer

70...結合層70. . . Bonding layer

80...永久基板80. . . Permanent substrate

90...P型電極90. . . P-type electrode

圖1,為習知發光二極體結構圖。
圖2,為習知另一發光二極體結構圖。
圖3,為本發明二極體結構圖。
圖4A,為本發明本質半導體層擴散前示意圖。
圖4B,為本發明本質半導體層擴散後示意圖。
FIG. 1 is a structural diagram of a conventional light emitting diode.
FIG. 2 is a structural diagram of another light-emitting diode.
Fig. 3 is a structural view of a diode of the present invention.
4A is a schematic view of the intrinsic semiconductor layer before diffusion according to the present invention.
4B is a schematic view showing the diffusion of the intrinsic semiconductor layer of the present invention.

100...發光二極體100. . . Light-emitting diode

10...N型電極10. . . N-type electrode

20...N型半導體層20. . . N-type semiconductor layer

21...第一N型半導體層twenty one. . . First N-type semiconductor layer

22...第二N型半導體層twenty two. . . Second N-type semiconductor layer

30...發光層30. . . Luminous layer

40...P型半導體層40. . . P-type semiconductor layer

401...第一P型半導體層401. . . First P-type semiconductor layer

402...第二P型半導體層402. . . Second P-type semiconductor layer

45...本質半導體層45. . . Intrinsic semiconductor layer

50...反射鏡50. . . Reflector

60...緩衝層60. . . The buffer layer

70...結合層70. . . Bonding layer

80...永久基板80. . . Permanent substrate

90...P型電極90. . . P-type electrode

Claims (9)

 一種具良好電性接觸反射鏡的發光二極體,應用於一發光二極體,該發光二極體包含依序堆疊的一N型電極、一N型半導體層、一發光層、一P型半導體層、一反射鏡、一緩衝層、一結合層、一永久基板與一P型電極,其特徵在於:
該P型半導體層與該反射鏡之間設置一本質半導體層,且該本質半導體層擴散有該P型半導體層的摻雜元素與該反射鏡的材料元素。
A light-emitting diode with a good electrical contact mirror is applied to a light-emitting diode comprising an N-type electrode, an N-type semiconductor layer, a light-emitting layer and a P-type stacked in sequence a semiconductor layer, a mirror, a buffer layer, a bonding layer, a permanent substrate and a P-type electrode, wherein:
An intrinsic semiconductor layer is disposed between the P-type semiconductor layer and the mirror, and the intrinsic semiconductor layer diffuses a doping element of the P-type semiconductor layer and a material element of the mirror.
如申請專利範圍第1項之具良好電性接觸反射鏡的發光二極體,其中該P型半導體層為氮化鎵摻雜鎂,且該P型半導體層包含一第一P型半導體層與一第二P型半導體層。A light-emitting diode having a good electrical contact mirror according to claim 1, wherein the P-type semiconductor layer is gallium nitride-doped magnesium, and the P-type semiconductor layer comprises a first P-type semiconductor layer and A second P-type semiconductor layer. 如申請專利範圍第2項之具良好電性接觸反射鏡的發光二極體,其中該第一P型半導體層摻雜鎂元素的原子數目為1E18,而該第二P型半導體層摻雜鎂元素的原子數目為1E20。A light-emitting diode having a good electrical contact mirror according to claim 2, wherein the first P-type semiconductor layer is doped with magnesium having an atomic number of 1E18, and the second P-type semiconductor layer is doped with magnesium The atomic number of the element is 1E20. 如申請專利範圍第1項之具良好電性接觸反射鏡的發光二極體,其中該反射鏡使用銀。A light-emitting diode having a good electrical contact mirror as claimed in claim 1 wherein the mirror uses silver. 如申請專利範圍第1項之具良好電性接觸反射鏡的發光二極體,其中該N型半導體層包含一第一N型半導體層與一第二N型半導體層。A light-emitting diode having a good electrical contact mirror according to claim 1, wherein the N-type semiconductor layer comprises a first N-type semiconductor layer and a second N-type semiconductor layer. 如申請專利範圍第1項之具良好電性接觸反射鏡的發光二極體,其中該緩衝層為選自鈦、鎢、鉑、鎳、鋁與鉻所組成的群組製成。A light-emitting diode having a good electrical contact mirror according to claim 1, wherein the buffer layer is made of a group selected from the group consisting of titanium, tungsten, platinum, nickel, aluminum and chromium. 如申請專利範圍第1項之具良好電性接觸反射鏡的發光二極體,其中該結合層為選自金錫合金、金銦合金與金鉛合金的任一種製成。A light-emitting diode having a good electrical contact mirror according to claim 1, wherein the bonding layer is made of any one selected from the group consisting of a gold-tin alloy, a gold-indium alloy, and a gold-lead alloy. 如申請專利範圍第1項之具良好電性接觸反射鏡的發光二極體,其中該永久基板為選自矽基板、銅基板、銅鎢基板、氮化鋁基板與氮化鈦基板的任一種製成。A light-emitting diode having a good electrical contact mirror according to claim 1, wherein the permanent substrate is any one selected from the group consisting of a germanium substrate, a copper substrate, a copper tungsten substrate, an aluminum nitride substrate, and a titanium nitride substrate. production. 如申請專利範圍第1項之具良好電性接觸反射鏡的發光二極體,其中該本質半導體層為氮化銦鎵,該P型半導體層的摻雜元素為鎂,而該反射鏡的材料元素為銀。A light-emitting diode having a good electrical contact mirror according to claim 1, wherein the intrinsic semiconductor layer is indium gallium nitride, the doping element of the P-type semiconductor layer is magnesium, and the material of the mirror The element is silver.
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