TW201411755A - Diffusion apparatus - Google Patents

Abstract

A diffusion apparatus is described. The diffusion apparatus includes a furnace tube, a furnace door and a protective cover. The furnace tube includes an opening and a first surface around the opening. The furnace door includes a second surface corresponding to the first surface, in which the second surface can contact with the first surface mutually. The protective cover is disposed on at least one of the first surface and the second surface.

Description

Diffusion machine

This invention relates to a semiconductor process machine and, more particularly, to a diffusion machine.

In a typical diffusion process, a reaction gas is usually introduced into a furnace tube, and the reaction gas diffuses in the furnace tube to produce a desired reaction with the surface of the substrate. However, due to insufficient sealing of the interface between the furnace door and the furnace tube, part of the reaction gas is driven to the interface between the furnace door and the furnace tube, and these reaction gases are easily condensed at the junction of the furnace door and the furnace tube, and at this junction Formation of liquid or even solid residue.

The residues of liquids and solids in these processes are highly susceptible to corrosion of the quartz at the junction of the furnace door and the furnace tube, which damages the furnace door and the furnace tube. After the furnace door and the furnace nozzle are damaged, the maintenance personnel need to disassemble the furnace tube and the furnace door. However, due to the disassembly and installation of the furnace tube and the furnace door, it takes more than two working days. Even if the furnace tube is sent for repair, the entire maintenance time is more than two weeks, which seriously affects the production or experiment.

Because the disassembly and installation of the furnace tube and the furnace door is too time-consuming, at present, during the maintenance of the diffusion machine, the furnace tube and the furnace door are not disassembled, but the deionized water is introduced at a high temperature. Water vapor is formed to clean. However, the cleaning of deionized water cannot effectively remove the residual process liquid and solids at the junction of the furnace door and the furnace nozzle, so that the junction between the furnace door and the furnace nozzle is still susceptible to corrosion by the process liquid and solid.

Accordingly, one aspect of the present invention is to provide a diffusion machine having a cover at the opening of the furnace tube and/or the furnace door to protect the furnace tube and the furnace door. Therefore, the removal and replacement time of the furnace tube and the furnace door can be greatly reduced, thereby increasing the output.

Another aspect of the present invention is to provide a diffusion machine which can effectively avoid damage to the furnace tube, thereby eliminating the need to repair the furnace tube or reducing the number of repairs, thereby avoiding production or experimental interruption, and greatly reducing the machine table. Downtime.

According to the above object of the present invention, a diffusion machine is proposed. The diffusion machine comprises a furnace tube, a furnace door and a cover. The furnace tube includes an opening and a first surface, the first surface being located at an outer periphery of the opening. The oven door includes a second surface corresponding to the first surface, wherein the second surface is in contact with the first surface. The cover is disposed on at least one of the first surface and the second surface.

According to an embodiment of the invention, the cover is disposed on the first surface.

According to another embodiment of the present invention, the cover has two extensions that extend perpendicular to the first surface and extend in the same direction.

According to still another embodiment of the present invention, the two extensions respectively contact the inner tube wall and the outer tube wall at the opening of the furnace tube.

According to still another embodiment of the present invention, the cover is disposed on the second surface.

According to still another embodiment of the present invention, the cover includes a first unit and a second unit, the first unit is disposed on the first surface, and the second unit is disposed on the second surface.

According to still another embodiment of the present invention, the material of the cover comprises stone English.

According to still another embodiment of the present invention, when the furnace door is closed to the opening of the furnace tube, the first surface, the cover and the second surface are in contact with each other in sequence.

According to still another embodiment of the present invention, when the furnace door is closed to the opening of the furnace tube, the first surface and the second surface are parallel to each other.

1 and 2 are respectively a schematic cross-sectional view showing a diffusion machine according to an embodiment of the present invention, and a partial enlarged view of the diffusion machine of FIG. 1 . In the present embodiment, the diffusion machine 100 may mainly include a furnace tube 102, a furnace door 108, and a cover 114. In an embodiment, the diffusion machine 100 can be adapted to perform a diffusion process of a solar cell. Since the reaction temperature of the diffusion process is generally quite high, the material of the furnace tube 102, the furnace door 108 and the cover 114 may comprise quartz.

The furnace tube 102 has a hollow tubular body with a reaction chamber 136 inside. As shown in Fig. 1, one end of the furnace tube 102 has an opening 104, and the substrate to be subjected to diffusion treatment can be loaded on the wafer boat, and then enters the reaction chamber 136 of the furnace tube 102 from the opening 104 to perform diffusion treatment. The opposite end of the furnace tube 102 has an air inlet 106. This gas inlet 106 is provided for the gas nozzle and ejects the reaction gas over the substrate to be treated in the reaction chamber 136. As shown in FIG. 2, the outer periphery of the opening 104 of the furnace tube 102 further includes a first surface 116.

The furnace door 108 is movably disposed on the opening 104 of the furnace tube 102 to open or close the opening 104 of the furnace tube 102. As shown in FIG. 2, the oven door 108 includes a second surface 118. Wherein the second surface 118 of the furnace door 108 and the furnace tube The first surface 116 of 102 corresponds to, and as the oven door 108 is closed and opened, the second surface 118 can be in close contact with or away from the first surface 116 of the furnace tube 102.

In an embodiment, as shown in FIG. 2, the cover 114 may include a first unit 110 and a second unit 112. The materials of the first unit 110 and the second unit 112 may each comprise quartz. The first unit 110 can be annularly disposed on the first surface 116 of the furnace tube 102 to completely shield the first surface 116. Referring to FIG. 3 together, in conjunction with the shape of the first surface 116 of the furnace tube 102, the first unit 110 may have an annular structure.

In an exemplary embodiment, as shown in FIG. 2, the first unit 110 of the cover 114 may include a protection portion 128 and two extension portions 120 and 122. The two extensions 120 and 122 can be respectively disposed on opposite sides of the protection portion 128 and can vertically extend the protection portion 128 and extend in the same direction. Therefore, in the exemplary embodiment, the cross-sectional shape of the first unit 110 formed by the protecting portion 128 and the two extending portions 120 and 122 may have a C-like structure.

When the first unit 110 of the cover 114 is disposed on the first surface 116 of the furnace tube 102, the protective portion 128 can contact the first surface 116 of the furnace tube 102 to cover the entire first surface 116. On the other hand, the extensions 120 and 122 respectively contact the outer tube wall 126 and the inner tube wall 124 at the opening 104 of the furnace tube 102. In an example, the extensions 120 and 122 of the first unit 110 can each be perpendicular to the first surface 116 of the furnace tube 102.

Referring again to FIG. 2, the second unit 112 may be annularly disposed on the second surface 118 of the oven door 108 to completely shield the second surface 118 or only be in contact with the first surface 116. The scope of the. Please refer to FIG. 4 together with the shape of the second surface 118 of the oven door 108, second Unit 112 can be a toroidal structure. In an exemplary embodiment, as shown in FIG. 2, the second unit 112 of the cover 114 may include a protection portion 130, a plurality of extensions 132, and a hook 134. In the second unit 112, the protection portion 130 and the hook 134 are respectively disposed on opposite sides of the extending portion 132 and extend in the same direction, wherein the hook 134 protrudes only a small distance from the side of the extending portion 132. .

When the second unit 112 of the cover 114 is disposed on the second surface 118 of the oven door 108, the protection portion 130 can contact the second surface 118 of the oven door 108 to cover the entire second surface 118. In addition, the extension 132 contacts the outer side 138 of the oven door 108, and the hook 134 contacts the bottom surface 140 of the oven door 108 to more securely position the entire second unit 112 on the oven door 108. In another embodiment, the second unit 112 may not include the hook 134, and the second unit 112 may be stably disposed in the oven door 108 by the tight fit between the protection portion 130 and the extension portion 132 and the oven door 108. Above, as shown in Figure 4.

Referring again to FIG. 2, when the furnace door 108 is closed at the opening 104 of the furnace tube 102, the first surface 116 of the furnace tube 102, the first unit 110 and the second unit 112 of the cover 114, and the furnace door 108 The two surfaces 118 are in contact with each other in sequence. In one embodiment, the first surface 116 of the furnace tube 102 may be parallel to the second surface 118 of the furnace door 108 when the furnace door 108 is closed to the opening 104 of the furnace tube 102.

By the arrangement of the first unit 110 and the second unit 112 of the cover 114, not only the degree of sealing at the junction of the furnace tube 102 and the furnace door 108 but also the first surface 116 and the furnace door of the furnace tube 102 can be separately protected. The second surface 118 of 108. In this way, the process reactants can be greatly reduced to the furnace tube 102 and the furnace door. Corrosion at the junction of 108. Moreover, when the diffusion machine 100 is being repaired and maintained, the cover 114 can be directly removed for cleaning or replacement, and it is no longer necessary to disassemble or replace the furnace tube 102 and the furnace door 108, and it is not necessary to send the furnace tube 102. As a result, production costs can be reduced, and production and experimental downtime can be significantly reduced, effectively increasing production capacity.

In other embodiments of the present invention, the cover 114 may have only one unit, and the cover 114 may be disposed only on at least one of the first surface 116 of the furnace tube 102 or the second surface 118 of the oven door 108. . For example, the cover 114 has only the first unit 110 and the cover 114 is now disposed on the first surface 116 of the furnace tube 102. In another example, the cover 114 has only the second unit 112, while the cover 114 is disposed on the second surface 118 of the oven door 108.

It can be seen from the above embodiments that one of the advantages of the present invention is that the furnace tube and the furnace door can be protected because a cover is provided at the opening of the furnace tube of the diffusion machine and/or the furnace door. Therefore, the removal and replacement time of the furnace tube and the furnace door can be greatly reduced, thereby increasing the output.

It can be seen from the above embodiments that another advantage of the present invention is that the cover can effectively avoid the damage of the furnace tube, so that it is not necessary to send the furnace tube or reduce the number of repairs, thereby avoiding production or experimental interruption, and greatly reducing the machine. Downtime of the station.

While the present invention has been described above by way of example, it is not intended to be construed as a limitation of the scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

100‧‧‧Diffuser Machine

102‧‧‧ furnace tube

104‧‧‧ openings

106‧‧‧air inlet

108‧‧‧ furnace door

110‧‧‧ first unit

112‧‧‧Second unit

114‧‧‧ Cover

116‧‧‧ first surface

118‧‧‧ second surface

120‧‧‧Extension

122‧‧‧Extension

124‧‧‧ inner wall

126‧‧‧ outer wall

128‧‧‧Protection Department

130‧‧‧Protection Department

132‧‧‧Extension

134‧‧‧ hook

136‧‧‧Reaction chamber

138‧‧‧ outside side

140‧‧‧ bottom

The above and other objects, features, advantages and embodiments of the present invention will become more <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; schematic diagram.

Fig. 2 is a partially enlarged view showing the diffusion machine of Fig. 1.

3 is a perspective view of a first unit of a cover in accordance with an embodiment of the present invention.

4 is a perspective view of a second unit of a cover in accordance with an embodiment of the present invention.

100‧‧‧Diffuser Machine

102‧‧‧ furnace tube

104‧‧‧ openings

106‧‧‧air inlet

108‧‧‧ furnace door

110‧‧‧ first unit

112‧‧‧Second unit

114‧‧‧ Cover

136‧‧‧Reaction chamber

Claims (9)

A diffusion machine includes: a furnace tube including an opening and a first surface, the first surface being located outside the opening; a furnace door including a second surface corresponding to the first surface, wherein the The second surface is in contact with the first surface; and a cover is disposed on at least one of the first surface and the second surface. The diffusion machine of claim 1, wherein the cover is disposed on the first surface. The diffusion machine of claim 2, wherein the cover has two extensions that extend perpendicular to the first surface and extend in the same direction. The diffusion machine of claim 3, wherein the two extensions respectively contact the inner tube wall and the outer tube wall at the opening of the furnace tube. The diffusion machine of claim 1, wherein the cover is disposed on the second surface. The diffusion machine of claim 1, wherein the cover comprises a first unit and a second unit, the first unit is disposed on the first surface, and the second unit is disposed on the second surface. The diffusion machine of any one of claims 1 to 6, wherein the material of the cover comprises quartz. The diffusion machine of claim 1, wherein the first surface, the cover and the second surface are in contact with each other in sequence when the furnace door is closed to the opening of the furnace tube. The diffusion machine of claim 1, wherein the first surface and the second surface are parallel to each other when the furnace door is closed to the opening of the furnace tube.