TW201345135A - Bending transducer and micropump comprising a bending transducer - Google Patents

Abstract

Bending transducer (2) for deflecting a pumping diaphragm in a diaphragm pump, which transducer has a layered structure (4) comprises a carrier (6), which carrier extends in the longitudinal direction up to a deflecting end (12) and on which there is an applied piezoelectric layer (8a, b), which piezoelectric layer is contacted via electrical contact elements (28a, b), wherein a link holder (14) is fastened to the deflecting end (12) and wherein an actuator (16) is held in the link holder (14), wherein, in the final mounted state in the diaphragm pump, the actuator (16) is connectable to the diaphragm.

Description

Bending converter and micropump including bending converter

The invention relates in particular to a bending converter for deflecting a pumping diaphragm for a micropump and to a micropump comprising one of the bending transducers.

Bending converters are used in a variety of technical fields that use the piezoelectric effect (the internal generation of charge by a applied mechanical force) to generate energy. Further fields of application can be developed by reversing the piezoelectric effect (generated internally by one of the mechanical tensions caused by an applied electric field) such that the bend transducer can act as an actuator for applying the adjustment movement. The invention relates to one of the applications of the inverse piezoelectric effect.

In particular, the bend converter is characterized by its compact type of construction, which allows for use in confined spaces in small devices and is particularly suitable for miniaturization.

Bending transducers are also used in the medical field, for example for nebulizers and also for micropumps, by means of which the medicament is dispensed. In particular, in the case where a patient must be continuously supplied with a medicament (for example, insulin), the use of a micropump that is continuously carried by the patient is known. In order to achieve the maximum possible comfort of the patient, it is desirable to provide a micropump as small as possible. It is also desirable to provide as much energy consumption as possible to ensure continuous dispensing of the agent over as long as possible. Here, it is also important to make the administration extremely precise (i.e., it is necessary to continuously maintain a predetermined administration rate with high precision).

Against this background, the present invention is based on the object of providing a bending transducer for a small unit, in particular a membrane micropump, which makes high precision, continuous administration possible with low energy consumption.

This object is achieved according to the invention by a bend converter having the features of claim 1. The bend converter extends in the longitudinal direction up to a deflecting end on which the actuator is mounted, the actuator being connected (and preferably connected in the mounted state) to a membrane of a diaphragm micropump The sheet is then deflected periodically. In this case, the bend converter has a layered structure comprising a carrier layer having at least one piezoelectric layer that can be formed from a piezoelectric ceramic. Preferably, a piezoelectric ceramic (particularly, a piezoelectric ceramic) is disposed on each of the two sides of the carrier layer as a piezoelectric layer. Additionally, contact elements are provided for electrically contacting the piezoelectric layers. These contact elements can preferably be mechanically fastened to the layered structure by means of a solder.

To ensure accurate positioning of the actuator relative to the later mounted position and thus relative to the diaphragm, the actuator is secured to one of the link holders disposed at the deflecting end of the carrier layer. The link holder is a separate, separate component that is coupled to the carrier layer at its deflecting end and the link holder holds the actuator. In particular, the link holder has a prefabricated structural unit of one of the integrated actuators, the unit being secured to the carrier layer or to the layered structure, in particular by viscous bonding.

The actuator is held stationary by the link holder and is located at a defined position. In particular, in this case, the actuator is oriented at an angle of 90° with respect to the plane defined by the layered structure. The actuator itself is preferably Flexural elasticity and in particular is formed by a metal that is preferably a simple straight strip. The actuator suitably has a hole or other gap at the end that allows a rigid connection to an adhesive, by means of which it can be attached to the diaphragm in the final mounting position. Indirect fastening of the actuator to the deflecting end of the bend converter by means of a link holder results in improved accuracy in the alignment of the actuator, in particular in terms of the setting of its vertical position in terms of height may.

The link holder is suitably formed of a material different from one of the actuators and is specifically formed as a plastic injection molded part. The actuator is preferably embedded therein. The plastic thus surrounds the actuator in a fastening region. In this case, the actuator is preferably positioned with a high degree of precision within the link holder. This is accomplished during the injection molding process by suitable measures in which the engagement surface of the actuator relative to the link holder is positioned highly accurately within one of the molds of the link holder by means of the alignment elements. During the injection molding process, in order to ensure a high degree of precision positioning and to maintain the actuator in a defined position, it is expedient to stipulate that the actuator penetrates the link holder so that it can be held, for example, by means of the mold itself On both sides. Thus, the actuator projects from the link holder on the opposite side. One end of the protrusion of the link holder can then be removed on one side.

The link holder is fastened to the deflecting end with an actuator embedded therein. In order to ensure a high-precision positioning, it is provided that the link holder has a stop edge with which the end of the layered structure abuts at the deflected end. The stop edge is preferably formed by a groove base formed in one of the grooves on the link holder. As an alternative to the groove, in principle, there is also a stepped step. Capability. The deflecting end is received in this recess.

The carrier layer overlies in the longitudinal direction at the deflecting end (in a preferred configuration) the two piezoelectric layers suitably protrude and only the carrier layer is received by the recess. In this way, a total height of the total link holder as small as possible is achieved, since the grooves engage only around the carrier layer.

In order to position the link holder in a manner that is as simple and reliable as possible, it extends suitably over the entire width of the layered structure and thus, in particular, is flush with the layered structure on both sides.

The connection of the actuator to the diaphragm of the diaphragm pump occurs during installation of the diaphragm pump in a pump housing. Here, a high precision alignment of the entire bend converter with respect to the diaphragm is required for a defined pumping result. In particular, the actuator ends with a fastening end at a first vertical position in height in a defined manner to ensure defined deflection of the diaphragm. In a preferred configuration, at least one positioning aid extending in the direction of the actuator and having a support surface is provided on the link holder to achieve this high positioning requirement. With this aid, the entire bend converter is supported during installation of the bend converter on, for example, a designated mounting surface formed by an auxiliary mounting plate. Thus, the first vertical position of the fastening end of the actuator in terms of height is highly accurately positioned relative to the support surface. In this case, the positioning aid is in particular formed in the form of a spacer cylinder having a flat surface at the end as a support surface. For example, in order to hinder the tilting, at least two positioning aids are preferably arranged here, in particular on the opposite ends of the link holder, respectively. After precise positioning of the actuator, for example after fastening the actuator to the pumping diaphragm, The designated mounting surface is removed to effect a free movement of the bend converter in response to an applied electric field.

Suitable electrical contact is always required for the electrical activation of the piezoelectric ceramic layer. In a preferred configuration, by means of the structure preferably provided herein, a bimorphous bend converter having a carrier layer and one of the piezoelectric layers respectively disposed on each side The carrier layer is electrically conductive and thus forms one common electrode of two piezoelectric layers (eg two piezoelectric ceramics). For this purpose, the carrier layer is preferably formed as a CRP (carbon fiber reinforced plastic) carrier layer. The carrier layer is contacted by means of a first contact element, for which purpose a contact area is formed at one end of the carrier layer opposite the deflecting end. In this contact region, the carrier layer protrudes beyond the piezoelectric layer and defines a contact area between the end of the carrier layer opposite the deflecting end and the piezoelectric layer. At the same time, a metal layer (specifically, a copper foil) is preferably applied to the contact area to achieve contact of the carrier layer over a large area. On the metal layer, the first contact element is fastened in an electrical contact. Preferably, the contact region is formed only on one side of the carrier layer, and the piezoelectric layer is completely passed over the end of the carrier layer (ie, the end of the carrier layer opposite the deflecting end) on the opposite side so as to The possible length of available length is optimized.

For electrical contact of the piezoelectric layers, the individual piezoelectric ceramics are preferably metallized on each of the two sides to form a contact layer. In particular, the contact layer is applied by sputtering. In this case, the layer thickness is preferably only about 150 nm to 250 nm, and in particular about 180 nm. In this case, the contact layer is preferably characterized by a chromium-nickel-gold layered structure, the individual layer thicknesses being preferably substantially the same and are, for example, 60 nanometers. In this situation The chromium layer is a layer facing the piezoelectric ceramic, the nickel layer is an intermediate layer, and the gold layer is an outer layer.

The contact layer is contacted by means of a second contact element which, in a preferred configuration, is formed in an L-shaped manner and in particular is formed as a metal curved strip. In this case, one of the L sides is guided along the side of the layered structure, in particular a longitudinal side, which maintains an insulating spacing with respect to the side of the layered structure. This spacing is suitably in the range from 0.1 mm to 0.3 mm. This reliably avoids electrical shorting of the layers of the layered structure. At the same time, it makes it possible to guide all electrical terminal contacts to one side. In view of reliable insulation, a bonding material of an insulating material is preferably introduced into the insulating pitch. The first contact element is suitably formed and configured in the same manner.

The two contact elements are intended to be positioned with a high degree of precision in a defined vertical position in the height of the pump housing. In order to make this possible, the contact element is mechanically fastened and electrically contacted to a fastening point by its L-edge (fastening edge), which is held at a distance from one of the side edges of the layered structure At the office. This makes it possible that during installation, the L-shaped contact element bends slightly upwards and thus has an overall elastic yielding effect. In this case, the contact element is preferably formed in the form of a resilient metal curved strip. In this case, in each case of the upper plane of one of the layers of the reference bending converter, the positioning accuracy with respect to the vertical position in terms of height is, for example, in the range from 0.02 mm to 0.05 mm. in. The "free" ends of the two contact elements are preferably located at the same height.

In a preferred configuration, the electrical contact elements are specifically soldered to the piezoelectric layer by means of a thermother soldering process. Considering extremely thin A conventional soldering process is not suitable for the contact layer on the sputter. This will result in damage to the layer. At the same time, however, this welding process provides simple and reliable process control during the production of the bend converter. Hot die welding is a temperature controlled welding in which a soldering tip is placed at a point to be soldered and then controlled for temperature. In particular, the welded joint is placed on cooling and then subjected to a defined weld volume curve. The solder joint is removed again in the cooled state only after the solder has solidified.

In particular, for this process, it is expedient in this case to provide that the contact element is provided with a pre-tinization as a solder prior to the soldering operation and no additional solder is applied during the actual soldering process. In particular, this enables efficient and reliable soldering while ensuring extremely gentle handling of thin contact layers.

This object is also achieved according to the invention by a micropump having one of the bending converters.

The accompanying technical solution contains a partially self-evident inventive aspect. The right to submit a split application for such independent inventive aspects regardless of the configuration of the link holder is retained. In particular, this applies to: the configuration of the preferred L-shaped contact element according to the features of claims 10 to 13, the contact element (specifically) by means of a hot-die welding process according to claim 14 The soldering on the contact layer and the use of the pre-tinned contact element (in particular) in combination with the hot-die welding according to claim 15.

An exemplary embodiment of the present invention is explained in more detail based on the drawings. These figures are shown in simplified form.

In the figures, components that function in the same manner are provided with the same numerical designations.

The bending converter 2 presented in the figure is formed as a double piezoelectric bending converter 2 with its preferred configuration variant. The bimorph flexural converter 2 has a central carrier layer 6 and is provided on both sides of the carrier layer. The piezoelectric layers 8a, 8b are formed into a layered structure. The piezoelectric layers 8a, 8b are formed as piezoelectric ceramic plates. The thickness of the entire layered structure 4 is typically below 1 mm, for example in the range of 0.8 mm. In the exemplary embodiment, the three layers (i.e., carrier layer 6 and two piezoelectric layers 8) each have the same thickness. The carrier layer preferably has a conductive fiber composite, in particular a CRP carrier layer. The bending converter 2 extends in a longitudinal direction 10 from a contact end to a deflecting end 12. At the deflecting end 12, an individual component, referred to as a link holder 14, is specifically secured to the layered structure 4 by viscous engagement. The link holder carries an actuator 16. In the exemplary embodiment, the link retainer 14 is formed as a one-piece plastic injection molded component into which the actuator 16 is embedded. The link holder 14 has a recess 18 extending over the entire link holder 14. The link holder 14 in turn extends over the entire width of the layered structure 4. Positioning aids 20 in the form of support cylinders are formed at opposite end sides of the link holder 14, and the free end faces of the positioning aids 20 form a support surface 22.

The actuator 16 is disposed just in the middle between the two positioning aids 20. In this case, it is located on a center line which combines the center points of the positioning aids 20 with each other. The actuator 16 is formed as a flexible elastic strip, in particular a metal curved sheet. In the exemplary embodiment, the actuator 16 has two apertures 24 at the ends (on a fastening end 23). The actuator 16 passes completely from the bottom side of the link holder 14 to the upper side. Actuator 16 is highly refined It is surely embedded in the link holder 14. This means that it is exactly aligned with the distance from the side surface in both the longitudinal direction 10 and in the direction transverse to it. Here, the alignment of the actuator 16 is just as important as the alignment of the first vertical position H1 with respect to the height defined by the support surface 22. During installation, the bend converter is placed by means of the support surface 22 onto a defined mounting plate and subsequently secured in a position defined thereby in height so that the actuator 16 is in terms of height One of the exact positions is aligned with its fastening end 23. The actuator 16 is oriented at an angle of 90° with respect to the layered structure 4 and thus with respect to the longitudinal direction 10. In general, the actuator protrudes beyond the support surface 22 in a transverse direction perpendicular to the longitudinal direction 10 by a first vertical position H1 in height. In this case, the projections are, for example, about 0.5 mm and the length of the positioning aid 20 is slightly more than 1 mm.

The entire bend converter 2 comprising the link holder 14 has a length of, for example, 10 mm to 20 mm, in particular one of 15 mm. The entirety is formed approximately as a rectangle having a width corresponding to approximately one-third of the length. In this case, in the case of one of 15 mm, the width corresponds to, for example, about 10 mm.

For the electrical activation of the bend converter 2, it has two contact elements 28a, 28b fastened to the contact end of the bend converter 2 opposite the link holder 14. The first inner contact element 28a serves for electrical contact towards the inner side of the piezoelectric layers 8a, 8b of the carrier layer 6. In this case, when a metal (e.g., copper) foil 30 formed as a strip is interposed between the carrier layer and the first contact member 28a, the first contact member 28a is in electrical contact with the carrier layer 6. The metal foil 30 thereby defines a two-dimensional contact area. Metal foil 30 in the longitudinal direction 10 The upper end portion abuts the upper piezoelectric layer 8a, and the upper piezoelectric layer 8a thus ends at a distance from the end of the carrier layer 6. The carrier layer 6 is itself electrically conductive, so that the two inner sides of the piezoelectric layers 8a, 8b can be activated by means of this first inner contact element 28a. A second outer contact element 28b has been applied to the outer side of the upper shorter piezoelectric layer 8a. During installation in a pump housing, the outer side of the lower piezoelectric layer 8b is in particular in electrical contact with one of the contact elements provided there by means of a conductive adhesive.

In the exemplary embodiment, both contact elements are formed in an L-shaped form and preferably from a curved metal strip. One L-edge (longer in the exemplary embodiment) is for electrical contact connection and has an optional elongated opening. The second (shorter) L edge is angled away from approximately 90° and extends parallel to the side edge 31 of the layered structure 4.

In order to reliably avoid undesired electrical shorts of several layers, the second L-edge is maintained at a distance from the layered structure 4 by an insulating pitch A. The spacing is in the range of, for example, 0.2 mm. In this case, the gap is preferably filled with a non-conductive adhesive 32 (refer to Fig. 4).

The electrical contact of the contact elements 28a, 28b (which simultaneously defines their mechanical fastening) occurs at a distance from the side edge 31 of the bend converter 2 (specifically precisely one of the surfaces of the contact elements 28a, 28b) In the area). Therefore, there is a possibility that during installation, the shorter L-arm can yield in a flexural elastic manner and adopt a position that is exactly as desired in terms of height. Independently of this, the second L-edge of the contact elements 28a, 28b is oriented relative to the fastening end 26 of the actuator 16 in a common second vertical position H2 in terms of height. Furthermore, the two contact elements 28a, 28b are exactly defined Both the position in the longitudinal direction 10 and its position in the direction transverse thereto. Here, the tolerance is less than 0.1 mm.

In general, the bend converter 2 is characterized in a highly accurate form, in particular defining the exact relative position of the actuator 16 relative to the support surface 22 (first height position H1) and additionally relative to the contact elements 28a, 28b Relative position (second position H2 in terms of height).

The bend converter 2 is also characterized by its extremely small total height. In order to achieve this, in an exemplary embodiment, it is also specified in particular that the carrier layer 6 projects beyond the two piezoelectric layers 8a, 8b at the deflecting end 12 in the longitudinal direction 10 by an insertion portion. With this insertion portion, the carrier layer 6 is engaged in the recess 18. It is fastened therein by means of an adhesive 32 (cf. Fig. 4). In this case, the insertion end has a length of about 1 mm in the longitudinal direction 10.

For the electrical contact of at least the outer, second contact element 28b, it is contemplated that one of the welding operations is conventionally known as hot die welding. In the case of this soldering process, a solder joint is typically placed in a cold state onto the component to be soldered and subsequently subjected to a defined temperature profile. The weld head is removed again only after cooling. This welding process allows for particularly gentle welding. In a preferred configuration, therefore, it is also provided that the second contact element 28b is soldered directly to a metallization layer 34. The metallization layer 34 is a layer that is sputtered, in particular, a layered structure that is sputtered.

The entire metallization layer 34 has a thickness that is typically less than 250 nm and specifically less than about 200 nm. The layered structure preferably consists of a sequence of chromium-nickel-gold layers to which the chromium layer has been applied and the gold layer forms the outer layer that is in contact. In this case, the three layers typically have the same layer thickness.

In this case, the soldering of the contact elements 28a, 28b is performed by means of a solder paste 35, and the solder paste 35 is applied to the contact elements or the bend converter 2 before the soldering operation.

As an alternative to this, prior to the soldering operation, the contact elements 28a, 28b are preferably pre-tinned at least in the region of their contact area such that they have a thin tin layer by means of which the thin tin layer contacts the element 28a, 28b becomes located on the metallization layer 34 or on the metal foil 30. Subsequent soldering operations are then performed without additional solder. In this case, the electrical contact is preferably exclusively performed by means of the tin layer and is therefore also mechanically fastened. By this contact variant, the loading of the metallization layer 34 is further reduced in an advantageous manner.

From the decomposition shown in Fig. 4, the entire structure of the bending converter 2 can be fully understood again. As such, each of the piezoelectric layers 8a, 8b is provided on each of the two sides of a sputtered metallization layer 34.

Details of the link holder 14 are presented in accordance with FIGS. 5 through 7. As can be seen in particular from Figure 5, the link holder 14 has two gaps 36 on its upper side opposite the positioning aid 20, which in the exemplary embodiment is approximately U-shaped and arrives from the side edges The approximately half of the link holder 14 is intermediate. Preferably, a further adhesive bond for the link holder can be introduced into the gaps.

As can be seen from the representations of Figures 6a and 6b, the recess 18 is provided with a lead-in bevel 38 to enable easy introduction of the carrier layer 6. The fact that only the carrier layer 6 rather than the entire layered structure 4 is received in the recess 18 means that the link holder 14 preferably does not (or only barely) protrude beyond the layered structure 4. The material thickness of the link holder 14 on both sides of the groove thus substantially corresponds to the piezoelectric layers 8a, 8b and The thickness of the metallization layer 34 is applied. As can be seen in particular from the side of Figure 3, in this case the link holder 14 is exactly sized in such a way that its upper side is flush with the upper side of the second contact element 28b. On the other hand, the bottom side of the link holder 14 is directly terminated by the lower piezoelectric layer 8b. To achieve this, the link holder 14 has a material thickness that is slightly larger above the groove 18 than below the groove - as can be seen from Figures 6A, 6B.

The bending converter 2 explained with respect to Figs. 1 to 4 is used in one of the micropumps 40 shown in Figs. 8 and 9. In particular, the pump is used to administer a medicament (eg, insulin) over a substantial period of time, particularly over a sustained period of time.

The micropump has a housing composed of a lower case 42A and an upper case 42B. The lower housing 42A is secured to a fastening plate 44 that is configured proximate to the patient's body during use. The main components of the micropump 40 are: an actual pumping unit 46 having a bend converter 2 provided thereon, a medicament container 48, a printed circuit board loaded with electronic components as the electronic unit 50, and for supplying energy. A battery 52.

In this case, the bending converter 2 is in particular fastened to one of the carrier plates 54 of the pumping unit 46 by viscous engagement. The actuator 16 of the bend converter 2 is guided through a gap in the carrier plate 54 to the opposite side and from one to the pumping diaphragm 56. This diaphragm acts on a line 58 which is connected to the medicament container 48 on the suction side and to the outside to a drug delivery opening 60 on the pumping side. A number of suitable valves are disposed in line 58 such that pumping occurs in the direction of drug delivery opening 60 when one of the diaphragms is moved.

The medicament container 48 has a volume sufficient to dispense the medicament for a few days. Followed by A new container replaces the medicament container 48. The pumping unit 46 with the integrated bend converter 2 is exchanged in the same manner as the medicament container 48 in the form of a disposable item.

The bend converters described herein are characterized by a number of aspects that interact in an advantageous manner with respect to the preferred intended application for use in a micro-diaphragm pump. This is the case: a) the configuration of the link holder in which the actuator 16 is embedded and the positioning aid 20 installed, b) the configuration and configuration of the contact element, in particular its bending configuration ( In particular, the L-shaped configuration), one L-arm is used for fastening and contact, and the other arm is guided along the side edge 31 of the layered structure 4 while maintaining a distance provided by the insulation spacing A, c In particular, the contact of the contact elements formed by means of hot die welding on a sputtered layer, d) the contact and fastening of the contact elements at a fastening point at a distance from the side edges, e Pre-tinning of the contact elements, in particular in combination with the hot mold welding.

Regardless of the particular configuration of the bend converter with the link holder claimed in claim 1, the individual state samples are considered to be independent inventive aspects. The right to file a split application for each of these aspects or combinations thereof is reserved.

2‧‧‧Bend converter

4‧‧‧Layered structure

6‧‧‧bearing layer

8a‧‧‧Upper piezoelectric layer

8b‧‧‧lower piezoelectric layer

10‧‧‧ longitudinal direction

12‧‧‧ deflecting end

14‧‧‧Link retainer

16‧‧‧Actuator

18‧‧‧ Groove

20‧‧‧ Positioning aids

22‧‧‧Support surface

23‧‧‧ fastening end

24‧‧‧ hole

28a‧‧‧First contact element

28b‧‧‧Second contact element

30‧‧‧metal foil

31‧‧‧ side edge

32‧‧‧Binder

34‧‧‧metallization

35‧‧‧ solder paste

36‧‧‧ gap

38‧‧‧Introduction of bevel

A‧‧‧Insulation spacing

H1‧‧‧ in terms of height, the first vertical position

H2‧‧‧ second vertical position in terms of height

Figure 1 is a perspective view of the upper side of the bend converter, Figure 2 is a perspective view of the bottom side of the bend converter of Figure 1, Figure 3 is a side view of one of the bending converters of Figures 1 and 2, Figure 4 is a perspective exploded view of one of the bending converters, Figure 5 is a perspective view of one of the link holders, Figures 6A, 6B are worn in different positions Figure 7 is a cross-sectional view of the rod holder according to Figure 5, Figure 7 is a simplified end view of one of the micro-diaphragm pumps of a bending converter according to Figure 5, and Figure 9 is based on Figure 8 is a cross-sectional view of a micro-diaphragm pump.

2‧‧‧Bend converter

4‧‧‧Layered structure

6‧‧‧bearing layer

8a‧‧‧Upper piezoelectric layer

8b‧‧‧lower piezoelectric layer

10‧‧‧ longitudinal direction

12‧‧‧ deflecting end

14‧‧‧Link retainer

16‧‧‧Actuator

20‧‧‧ Positioning aids

28a‧‧‧First contact element

28b‧‧‧Second contact element

30‧‧‧metal foil

31‧‧‧ side edge

Claims (19)

A bending transducer (2) for deflecting a pumping diaphragm in a diaphragm pump, the converter having a layered structure (4) comprising a carrier layer (6) in the longitudinal direction Extending up to a deflecting end (12) and presenting an applied piezoelectric layer (8a, 8b) on the carrier layer, contacting the piezoelectric layer via electrical contact elements (28a, 28b), wherein a link holder ( 14) fastened to the deflecting end (12) and wherein an actuator (16) is retained in the link holder (14), wherein in the final mounted state of the diaphragm pump, the actuator (16) Can be attached to the diaphragm. A bending transducer (2) according to claim 1, wherein the link holder (14) is formed as a plastic injection molding member and the actuator is embedded therein. A bend converter (2) according to claim 1 or 2, wherein the link holder (14) has a recess (18) in which the deflecting end (12) is received. The bend converter (2) of claim 3, wherein at the deflecting end (12), the carrier layer (6) projects beyond the piezoelectric layer (28a, 28b) in the longitudinal direction (10) and only The carrier layer (6) is received by the recess (18). A bend converter (2) according to claim 1 or 2, wherein the link holder (14) extends over the entire width of the carrier layer (6). A bending transducer (2) according to claim 1 or 2, comprising at least one positioning aid (20) extending in the direction of the actuator (16) and having a support surface (22) at which the bending During installation of the converter (2), the at least one positioning aid is supported on a designated mounting surface and disposed on the link holder (14), wherein one of the actuators (16) is fastened (23) In terms of height, the first vertical position (H1) is higher relative to the support surface (22) Degree is accurately positioned. The bending converter (2) of claim 6, wherein one of the positioning aids (20) formed as a spacer cylinder is disposed on each of the two sides of the actuator (16). Preferably, in each case at the end of the link holder (14). A bending transducer (2) according to claim 1 or 2, wherein the link holder (14) extends over the entire width of the carrier layer (6); and at least one positioning aid (20) at which The actuator (16) extends in the direction and has a support surface (22) during which the at least one positioning aid is supported on a designated mounting surface and disposed On the link holder (14), wherein the first vertical position (H1) of one of the fastening ends (23) of the actuator (16) is highly accurate with respect to the support surface (22) Positioning. The bending converter (2) of claim 8, wherein one of the positioning aids (20) formed as a spacer cylinder is disposed on each of the two sides of the actuator (16). Preferably, in each case at the end of the link holder (14). The bend converter (2) of claim 1, wherein at the end opposite the deflecting end (12), the carrier layer (6) protrudes beyond the piezoelectric layer (28a) and is preferably applied A metal layer (30) in a protruding region and contacting a first contact element (28a) thereon defines a contact region there. The bend converter (2) of claim 10, wherein the carrier layer (6) is electrically conductive and one of the piezoelectric layers (8a, 8b) is disposed on both sides of the carrier layer (6), wherein the contact region Formed only on one side of the carrier layer (6), and Wherein on the other side of the carrier layer (6), the piezoelectric layer (8b) extends up to the end of the carrier layer (6). The bend converter (2) of claim 1, wherein the piezoelectric layer (8a, 8b) is metallized on an outer side thereof opposite to the carrier layer (6) to form a contact layer (34), one of which The second contact element (28b) is in contact with the contact layer. The bend converter (2) of any one of claims 10 to 12, wherein at least one of the contact elements (28a, 28b) is L-shaped, wherein one of the at least one L-shaped contact element is fastened At a fastening point of one contact area or a contact layer and the other arm is guided along a side edge (31) of the layered structure (4), wherein an insulation pitch (A) is located at the side edge ( 31) is between the other arm and preferably in the range from 0.1 mm to 0.3 mm. A bending transducer (2) according to claim 13, wherein a non-conductive adhesive (32) is inserted into the insulating pitch (A). The bend converter (2) of any one of claims 10 to 12, wherein at least one of the contact elements (28a, 28b) is fastened to a fastening point on the contact layer, the fastening Pointing such that a second vertical position (H2) of one of the ends of the contact element (28a, 28b) is relative to the actuation by elastic yielding of one of the contact elements (28a, 28b) One of the means (16) settings is maintained at a distance from one of the side edges (31) of the layered structure (4). A bending transducer (2) according to any one of claims 10 to 12, wherein the contact elements (28a, 28b) are in particular welded by means of a hot die welding process. A bend converter (2) according to any one of claims 10 to 12, wherein in contact Previously, the contact elements (28a, 28b) were provided with a pre-tinning as the solder, and the contact elements (28a, 28b) were soldered without any other solder. The bend converter (2) of any one of claims 10 to 12, wherein at least one of the contact elements (28a, 28b) is L-shaped, wherein one of the at least one L-shaped contact element is fastened At a fastening point of one contact area or a contact layer and the other arm is guided along a side edge (31) of the layered structure (4), wherein an insulation pitch (A) is located at the side edge ( 31) between the other arm and preferably in a range from 0.1 mm to 0.3 mm; and at least one of the contact elements (28a, 28b) is fastened to the contact layer At the fixing point, the fastening point is such that one of the contact elements (28a, 28b) is one of the second vertical positions (H2) in height, by means of one of the contact elements (28a, 28b) The elastic yield is maintained at a distance from one of the side edges (31) of the layered structure (4) relative to the manner in which the actuator (16) is set. A micropump having a bender (2) according to any one of claims 1 to 18, the micropump being disposed in a pump housing.