TW201336643A - Handling robot - Google Patents
Handling robot Download PDFInfo
- Publication number
- TW201336643A TW201336643A TW101140134A TW101140134A TW201336643A TW 201336643 A TW201336643 A TW 201336643A TW 101140134 A TW101140134 A TW 101140134A TW 101140134 A TW101140134 A TW 101140134A TW 201336643 A TW201336643 A TW 201336643A
- Authority
- TW
- Taiwan
- Prior art keywords
- joint portion
- unit
- transport robot
- link
- horizontal arm
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
- B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Manipulator (AREA)
Abstract
Description
本發明所揭示之實施形態是關於搬運機器人。 The embodiment disclosed in the present invention relates to a transport robot.
先前，已知有要將液晶用之玻璃基板或半導體晶圓等薄板狀工件針對保管盒等搬出入的搬運機器人。 Conventionally, a transfer robot in which a thin plate-shaped workpiece such as a glass substrate for a liquid crystal or a semiconductor wafer is carried in and out of a storage case or the like is known.
例如：專利文獻1中，就提案有構成為可使一對腳部單元動作藉此使配置在上部的手臂單元上下移動，利用該手臂單元對薄板工件進行搬運的機器人。 For example, in Patent Document 1, there is proposed a robot configured to move a pair of leg units so that an arm unit disposed at an upper portion moves up and down, and the sheet unit is transported by the arm unit.
[專利文獻1]日本專利第4466785號公報 [Patent Document 1] Japanese Patent No. 4466785
然而，先前技術的搬運機器人，其致動器或馬達等驅動部是設置成與一對腳部單元相同的構造，因此從減輕重量或降低成本的觀點來看時尚有改善的餘地。 However, in the prior art handling robot, the driving portion such as the actuator or the motor is provided in the same configuration as the pair of leg units, and thus there is room for improvement in terms of weight reduction or cost reduction.
本發明實施形態之一形態，是有鑑於上述觀點而為的發明，目的在於提供一種能夠實現構造的簡略化，並且能夠抑制裝置有關之製造成本及重量的搬運機器人。 In view of the above, an object of the present invention is to provide a transport robot that can simplify the structure and can suppress the manufacturing cost and weight of the device.
本發明實施形態之一形態相關的搬運機器人，具備：搬運物保持用的水平手臂單元；及一對腳部單元。一對腳部單元，各具有基端側連結成以第1關節部的旋轉軸為中心形成可旋轉的第1連桿。再加上，一對腳部單元，各具有基端側連結成以設置在上述第1連桿前端側之第2關節部的旋轉軸為中心形成可旋轉的另一方面，於前端側透過第3關節部的旋轉軸可旋轉地支撐有上述水平手臂單元的第2連桿。此外，搬運機器人，是構成為在上述關節部當中的任一關節部設有數量要比設置在上述一對腳部單元之關節部總數還少的驅動源。 A transport robot according to one embodiment of the present invention includes a horizontal arm unit for holding a carrier and a pair of leg units. The pair of leg units each have a proximal end side connected so as to form a rotatable first link around the rotation axis of the first joint portion. In addition, each of the pair of leg units is connected to the base end side so as to be rotatable about the rotation axis of the second joint portion provided on the distal end side of the first link, and is transmitted through the distal end side. The rotation axis of the joint portion rotatably supports the second link of the horizontal arm unit. Further, the transport robot is configured such that any one of the joint portions is provided with a drive source that is smaller than the total number of joint portions provided in the pair of leg units.
根據本發明實施形態之一形態時，是能夠實現搬運機器人構造的簡略化並且能夠抑制裝置有關的製造成本及重量。 According to one aspect of the embodiment of the present invention, it is possible to simplify the structure of the transport robot and to suppress the manufacturing cost and weight associated with the apparatus.
以下，參照附圖對本申請專利所揭示之搬運機器人的實施形態進行詳細說明。另，以下所示之實施形態並不造成本發明的限定。 Hereinafter, embodiments of the transport robot disclosed in the present patent application will be described in detail with reference to the accompanying drawings. Further, the embodiments shown below are not intended to limit the invention.
首先，使用第1圖針對第1實施形態相關的搬運機器 人10進行說明。第1圖為第1實施形態相關之搬運機器人10的說明圖。另，第1圖中，為了容易說明是將一部份的形狀單純化圖示。此外，以下說明中是適當使用第1圖右上所示的座標軸進行說明，將垂直向上的方向為Z軸方向。 First, the transporting machine according to the first embodiment will be described with reference to Fig. 1. Person 10 explains. Fig. 1 is an explanatory view of the transfer robot 10 according to the first embodiment. In addition, in Fig. 1, for the sake of easy explanation, a part of the shape is simplistically shown. In the following description, the coordinate axis shown in the upper right of Fig. 1 is used as appropriate, and the direction in the vertical direction is the Z-axis direction.
如第1圖所示，第1實施形態相關的搬運機器人10，具備基台11、基部12、主腳部單元13、副腳部單元14及水平手臂單元15。 As shown in FIG. 1, the transport robot 10 according to the first embodiment includes a base 11, a base 12, a main leg unit 13, a sub-foot unit 14, and a horizontal arm unit 15.
主腳部單元13，又具備支柱21、第1關節部22、第1連桿23、第2關節部24、第2連桿25及第3關節部26。此外，副腳部單元14，又具備支柱31、第4關節部32、第3連桿33、第5關節部34、第4連桿35及第6關節部36。 The main leg unit 13 further includes a support 21, a first joint portion 22, a first link 23, a second joint portion 24, a second link 25, and a third joint portion 26. Further, the auxiliary leg unit 14 further includes a support 31, a fourth joint portion 32, a third link 33, a fifth joint portion 34, a fourth link 35, and a sixth joint portion 36.
如第1圖所示，基部12，是由：可旋繞地安裝在基台11的旋繞部12a；及從旋繞部12a兩端朝水平方向延伸的延伸部12b、12c所構成，構成為以垂直於基台11之旋繞軸P1為中心形成旋繞。接著，隨著基座12的旋繞，主腳部單元13、副腳部單元14及水平手臂單元15都會以旋繞軸P1為中心形成旋繞。 As shown in Fig. 1, the base portion 12 is composed of a winding portion 12a that is rotatably attached to the base 11, and extension portions 12b and 12c that extend in the horizontal direction from both ends of the winding portion 12a, and is configured to be vertical. A winding is formed around the winding axis P1 of the base 11. Next, as the susceptor 12 is wound, the main leg unit 13, the sub-foot unit 14, and the horizontal arm unit 15 are all wound around the winding axis P1.
再加上，搬運機器人10，是藉由驅動指定的關節部使水平手臂單元15昇降，使要設有工件把持用之手部的水平手臂單元15朝Y軸的正負方向移動。此外，搬運機器人10可使手部朝X軸的正負方向直線移動。 Further, the transport robot 10 moves the horizontal arm unit 15 up and down by driving the designated joint portion, and moves the horizontal arm unit 15 to which the hand for holding the workpiece is held in the positive and negative directions of the Y-axis. Further, the transport robot 10 can linearly move the hand toward the positive and negative directions of the X-axis.
藉由上述的動作，搬運機器人10會執行工件的把持 或移置。另，針對搬運機器人10及水平手臂單元15的形狀細節將使用第2圖於下述進行說明。 By the above action, the transport robot 10 performs the grip of the workpiece. Or displacement. The details of the shape of the transport robot 10 and the horizontal arm unit 15 will be described below using FIG. 2 .
不過，先前技術的搬運機器人，當其利用2個腳部單元支撐水平手臂單元時，是構成為可使2個腳部單元成對稱地內藏有致動器或馬達等驅動源。 However, in the prior art transport robot, when the horizontal arm unit is supported by the two leg units, the two leg units are symmetrically incorporated with a drive source such as an actuator or a motor.
具體而言，先前技術的搬運機器人為第1圖所示之搬運機器人時，驅動源是對各腳部單元13、14各設有2個，形成為第1關節部22、第2關節部24、第4關節部32及第5關節部34之合計4處設置的構成。 Specifically, when the transport robot of the prior art is the transport robot shown in FIG. 1 , the drive source is provided for each of the leg units 13 and 14 and is formed as the first joint portion 22 and the second joint portion 24 . The total number of the fourth joint portion 32 and the fifth joint portion 34 is four.
但是，先前技術的搬運機器人，從減輕重量或降低成本的觀點來看時尚有改善的餘地。於是，本發明第1實施形態相關的搬運機器人10就構成為具備有要執行水平手臂單元15定位用之最小限度的驅動源。 However, prior art handling robots have room for improvement in terms of weight reduction or cost reduction. Then, the transport robot 10 according to the first embodiment of the present invention is configured to include a minimum drive source for performing positioning of the horizontal arm unit 15.
具體而言，搬運機器人10，是在第1關節部22、第2關節部24及第6關節部36的3個軸端部分別設置驅動源，藉此驅動該3個關節部的驅動軸。另一方面，第3關節部26、第4關節部32及第5關節部34的旋轉軸，是屬於自由軸利用軸支撐成旋轉自如。 Specifically, the transport robot 10 is provided with a drive source for each of the three axial end portions of the first joint portion 22, the second joint portion 24, and the sixth joint portion 36, thereby driving the drive shafts of the three joint portions. On the other hand, the rotation axes of the third joint portion 26, the fourth joint portion 32, and the fifth joint portion 34 are rotatably supported by the shaft.
另，第1圖中，各關節部當中，做為驅動軸的位置以黑圓表示，做為自由軸的位置以白圓表示。搬運機器人10，是藉由驅動3個驅動軸來執行水平手臂單元15之Y座標及Z座標的定位。 In addition, in Fig. 1, among the joint parts, the position as the drive shaft is indicated by a black circle, and the position as a free axis is indicated by a white circle. The transport robot 10 performs the positioning of the Y coordinate and the Z coordinate of the horizontal arm unit 15 by driving the three drive shafts.
此外，主腳部單元13，是支撐著水平手臂單元15的重量，副腳部單元14，是在要執行水平手臂單元15之定 位時對水平手臂單元15形成支撐。 Further, the main foot unit 13 is the weight supporting the horizontal arm unit 15, and the auxiliary leg unit 14 is to be executed by the horizontal arm unit 15. The horizontal arm unit 15 is supported in position.
於是，就在第1實施形態相關的搬運機器人10中，將副腳部單元14形成為要比主腳部單元13還細的構造。基於此，搬運機器人10就能夠達到輕型化。 Then, in the transfer robot 10 according to the first embodiment, the sub-foot unit 14 is formed to be thinner than the main leg unit 13. Based on this, the transfer robot 10 can be made lighter.
此外，先前技術的搬運機器人，其要連接至設置在2個腳部單元之驅動源或水平手臂單元的纜線是沿著各腳部單元的側面形成配線。因此，該纜線有時就會和各關節部所要連結之連桿或水平手臂單元等形成彼此干涉，以致成為搬運機器人動作的障礙。 Further, in the prior art transport robot, the cable to be connected to the drive source or the horizontal arm unit provided in the two foot units is formed along the side surface of each leg unit. Therefore, the cable sometimes interferes with the link or the horizontal arm unit to be connected to each joint portion, and thus becomes an obstacle to the movement of the transport robot.
於是，就在第1實施形態相關的搬運機器人10中，將來自於設置在2個腳部單元13、14之驅動源或水平手臂單元15的纜線37內包在副腳部單元14。 Then, in the transfer robot 10 according to the first embodiment, the cable 37 from the drive source or the horizontal arm unit 15 provided in the two leg units 13 and 14 is wrapped in the sub-foot unit 14.
基於上述的構成，第1實施形態相關的搬運機器人10就能夠達到構造的簡略化並且能夠抑制裝置有關的製造成本及重量。 According to the configuration described above, the transfer robot 10 according to the first embodiment can achieve a simplified structure and can suppress the manufacturing cost and weight of the device.
其次，使用第2圖對第1實施形態相關之搬運機器人10及水平手臂單元15的形狀細節進行說明。第2圖為第1實施形態相關之搬運機器人10的模式透視圖。如第2圖所示，搬運機器人10，具備基台11、基部12、主腳部單元13、副腳部單元14及水平手臂單元15。 Next, the details of the shape of the transport robot 10 and the horizontal arm unit 15 according to the first embodiment will be described using FIG. Fig. 2 is a schematic perspective view of the transport robot 10 according to the first embodiment. As shown in FIG. 2, the transport robot 10 includes a base 11, a base 12, a main leg unit 13, a sub-foot unit 14, and a horizontal arm unit 15.
基部12，是可旋繞地安裝在基台11，構成為以垂直於基台11的旋繞軸P1為中心形成旋繞。接著，隨著基座12的旋繞，主腳部單元13、副腳部單元14及水平手臂單元15都會以旋繞軸P1為中心形成旋繞。 The base portion 12 is rotatably attached to the base 11, and is configured to be wound around a winding axis P1 perpendicular to the base 11. Next, as the susceptor 12 is wound, the main leg unit 13, the sub-foot unit 14, and the horizontal arm unit 15 are all wound around the winding axis P1.
主腳部單元13，又具備支柱21、第1關節部22、第1連桿23、第2關節部24、第2連桿25及第3關節部26。此外，副腳部單元14，又具備支柱31、第4關節部32、第3連桿33、第5關節部34、第4連桿35及第6關節部36。 The main leg unit 13 further includes a support 21, a first joint portion 22, a first link 23, a second joint portion 24, a second link 25, and a third joint portion 26. Further, the auxiliary leg unit 14 further includes a support 31, a fourth joint portion 32, a third link 33, a fifth joint portion 34, a fourth link 35, and a sixth joint portion 36.
支柱21、31，是從基部12的各前端部豎立設置成分別垂直向上。主腳部單元13形成用的第1連桿23，是透過第1關節部22使基端部連結在支柱21的前端部並且X軸的負方向側。如此一來，第1連桿23就會構成為以平行於X軸之第1關節部22的旋轉軸為中心形成可旋轉地支撐在支柱21的前端部。 The pillars 21 and 31 are erected from the front end portions of the base portion 12 so as to be vertically upward. The first link 23 for forming the main leg unit 13 is connected to the distal end portion of the strut 21 through the first joint portion 22 and on the negative side of the X-axis. In this manner, the first link 23 is configured to be rotatably supported at the distal end portion of the strut 21 around the rotation axis of the first joint portion 22 that is parallel to the X-axis.
第2連桿25，是透過第2關節部24使基端部連結在第1連桿23的前端部並且X軸的負方向側。如此一來，第2連桿25就會構成為以平行於X軸之第2關節部24的旋轉軸為中心形成可旋轉地支撐在第1連桿23的前端部。 The second link 25 is connected to the distal end portion of the first link 23 via the second joint portion 24 and on the negative side of the X-axis. In this manner, the second link 25 is configured to be rotatably supported at the distal end portion of the first link 23 around the rotation axis of the second joint portion 24 that is parallel to the X-axis.
副腳部單元14形成用的第3連桿33，是透過第4關節部32使基端部連結在支柱31的前端部並且X軸的負方向側。如此一來，第3連桿33就會構成為以平行於X軸之第4關節部32的旋轉軸為中心形成可旋轉地支撐在支柱31的前端部。 The third link 33 for forming the auxiliary leg unit 14 is connected to the distal end portion of the strut 31 through the fourth joint portion 32 and on the negative side of the X-axis. In this manner, the third link 33 is configured to be rotatably supported at the distal end portion of the strut 31 around the rotation axis of the fourth joint portion 32 that is parallel to the X-axis.
第4連桿35，是透過第5關節部34使基端部連結在第3連桿33的前端部並且X軸的負方向側。如此一來，第4連桿35就會構成為以平行於X軸之第5關節部34的 旋轉軸為中心形成可旋轉地支撐在第3連桿33的前端部。 The fourth link 35 is connected to the distal end portion of the third link 33 through the fifth joint portion 34 and on the negative side of the X-axis. In this way, the fourth link 35 is configured to be parallel to the fifth joint portion 34 of the X-axis. The rotating shaft is rotatably supported at the front end portion of the third link 33.
水平手臂單元15，是透過第3關節26連結在第2連桿25的前端部。如此一來，水平手臂單元15就會構成為以平行於X軸之第3關節26的旋轉軸為中心形成可旋轉地支撐在第2連桿25的前端部。 The horizontal arm unit 15 is coupled to the distal end portion of the second link 25 via the third joint 26 . In this manner, the horizontal arm unit 15 is configured to be rotatably supported at the distal end portion of the second link 25 around the rotation axis of the third joint 26 parallel to the X-axis.
此外，水平手臂單元15，是透過第6關節部36連結在第4連桿35的前端部。如此一來，水平手臂單元15就會構成為以平行於X軸的第6關節部36的旋轉軸為中心形成可旋轉地支撐在第4連桿35的前端部。 Further, the horizontal arm unit 15 is coupled to the distal end portion of the fourth link 35 via the sixth joint portion 36. In this manner, the horizontal arm unit 15 is configured to be rotatably supported at the distal end portion of the fourth link 35 around the rotation axis of the sixth joint portion 36 parallel to the X-axis.
再加上，搬運機器人10，是在第1關節部22、第2關節部24及第6關節部36的軸端部設有致動器或馬達等驅動源(未圖示)，以該3個關節部的旋轉軸為驅動軸。 Further, in the transport robot 10, drive sources (not shown) such as an actuator or a motor are provided at the shaft end portions of the first joint portion 22, the second joint portion 24, and the sixth joint portion 36, and the three are provided. The rotation axis of the joint portion is a drive shaft.
搬運機器人10，是驅動該3個驅動軸藉此改變第1連桿23或第2連桿25的姿勢改變。如此一來，搬運機器人10就能夠執行水平手臂單元15的定位。 The transport robot 10 drives the three drive shafts to change the posture of the first link 23 or the second link 25. In this way, the transport robot 10 can perform the positioning of the horizontal arm unit 15.
此外，於副腳部單元14，是內包有要連接至水平手臂單元15的纜線(未圖示)。如此一來，搬運機器人10就能夠在纜線不會纏繞其他構件的狀態下使水平手臂單元15動作順暢。另，所謂要連接至水平手臂單元15的纜線，例如是指工件吸附用的空氣用配管或要連接至檢測吸附用之感測器的感測線。 Further, the auxiliary leg unit 14 is provided with a cable (not shown) to be connected to the horizontal arm unit 15. In this way, the transport robot 10 can make the horizontal arm unit 15 operate smoothly without the cable being wound around other members. The cable to be connected to the horizontal arm unit 15 is, for example, an air pipe for workpiece suction or a sensing wire to be connected to a sensor for detecting adsorption.
水平手臂單元15，具備上側手臂單元15a及下側手臂單元15b。配備在下側手臂單元15b的下側支撐構件50， 其一方是由第2連桿25的前端部支撐成可繞著第3關節部26的關節軸旋轉，其另一方是由第4連桿35的前端部支撐成可繞著第6關節部36的關節軸旋轉。 The horizontal arm unit 15 includes an upper arm unit 15a and a lower arm unit 15b. The lower side support member 50 provided on the lower arm unit 15b, One of them is supported by the distal end portion of the second link 25 so as to be rotatable about the joint axis of the third joint portion 26, and the other is supported by the distal end portion of the fourth link 35 so as to be rotatable around the sixth joint portion 36. The joint axis rotates.
另，因為上側手臂單元15a和下側手臂單元15b是形成為相同的構成，所以於此就只針對上側手臂單元15a進行說明。上側手臂單元15a，具備：要載置被搬運對象物即工件用的手部46；以前端部支撐該手部46的手臂部47；及上側支撐構件40。 Further, since the upper arm unit 15a and the lower arm unit 15b are formed in the same configuration, only the upper arm unit 15a will be described here. The upper arm unit 15a includes a hand 46 for placing a workpiece to be transported, a arm portion 47 for supporting the hand 46 at the distal end portion, and an upper support member 40.
手臂部47，具備基端側手臂42及前端側手臂44。基端側手臂42，是以平行於Z軸之基端側關節部41的旋轉軸為中心形成可旋轉地支撐在上側支撐構件40。 The arm portion 47 includes a proximal end side arm 42 and a distal end side arm 44. The proximal end side arm 42 is rotatably supported by the upper side support member 40 centering on the rotation axis of the proximal end side joint portion 41 parallel to the Z axis.
前端側手臂44，是以平行於Z軸之前端側關節部43的旋轉軸為中心形成可旋轉地支撐在基端側手臂42的前端部。手部46，是以平行於Z軸之手臂關節部45的旋轉軸為中心形成可旋轉地支撐在前端側手臂44的前端部。 The distal end side arm 44 is a distal end portion that is rotatably supported by the proximal end side arm 42 around a rotation axis parallel to the Z-axis front end side joint portion 43. The hand 46 is rotatably supported at the distal end portion of the distal end side arm 44 around the rotation axis of the arm joint portion 45 parallel to the Z axis.
此外，手部46，是構成為藉由該等基端側手臂42和前端側手臂44的旋轉動作使手臂部47伸縮朝與第3關節部26之旋轉軸平行的方向直線移動。例如：搬運機器人10的旋繞位置為第2圖所示之狀態時，X軸的正負方向就是手部46的移動方向及手臂部47的伸縮方向。 Further, the hand 46 is configured such that the arm portion 47 expands and contracts linearly in a direction parallel to the rotation axis of the third joint portion 26 by the rotation operation of the proximal end side arm 42 and the distal end side arm 44. For example, when the winding position of the transport robot 10 is in the state shown in FIG. 2, the positive and negative directions of the X-axis are the moving direction of the hand 46 and the stretching direction of the arm portion 47.
另，於此，雖然是利用上側手臂單元15a和下側手臂單元15b構成水平手臂單元15，但也可只利用上側手臂單元15a或下側手臂單元15b構成水平手臂單元15。 Here, although the horizontal arm unit 15 is configured by the upper arm unit 15a and the lower arm unit 15b, the horizontal arm unit 15 may be configured only by the upper arm unit 15a or the lower arm unit 15b.
其次，使用第3圖針對第1實施形態相關之搬運機器 人10的水平手臂單元15位於最低位置時的形狀進行說明。第3圖為第1實施形態相關之搬運機器人10的正面模式圖。 Next, using the third drawing, the conveying machine according to the first embodiment will be described. The shape of the horizontal arm unit 15 of the person 10 when it is at the lowest position will be described. Fig. 3 is a front schematic view showing the transfer robot 10 according to the first embodiment.
搬運機器人10，是以第1關節部22、第2關節部24及第6關節部36的旋轉軸為驅動軸，且以第3關節部26、第4關節部32及第5關節部34的旋轉軸為自由軸。 In the transport robot 10, the rotation axes of the first joint portion 22, the second joint portion 24, and the sixth joint portion 36 are the drive shafts, and the third joint portion 26, the fourth joint portion 32, and the fifth joint portion 34 are used. The axis of rotation is a free axis.
因此，如第3圖所示，搬運機器人10，是藉由驅動第1關節部22的驅動軸來改變第1連桿23的姿勢，藉由驅動第2關節部24的驅動軸來改變第2連桿25的姿勢。 Therefore, as shown in FIG. 3, the transport robot 10 changes the posture of the first link 23 by driving the drive shaft of the first joint portion 22, and changes the second drive shaft of the second joint portion 24 to change the second position. The posture of the link 25.
再加上，搬運機器人10，是藉由驅動第6關節部36的驅動軸來改變第4連桿35的姿勢就能夠使水平手臂單元15下降至最低位置。 Further, the transport robot 10 can lower the horizontal arm unit 15 to the lowest position by changing the posture of the fourth link 35 by driving the drive shaft of the sixth joint portion 36.
另外，於此，搬運機器人10，是會下降達到水平手臂單元15所設置之手部46的下面與基部12之上面不接觸的程度。如此一來，搬運機器人10就能夠在不干涉到2個腳部單元13、14的狀態下移動水平手臂單元15。 Further, here, the transport robot 10 is lowered to such an extent that the lower surface of the hand 46 provided by the horizontal arm unit 15 does not contact the upper surface of the base portion 12. In this way, the transport robot 10 can move the horizontal arm unit 15 without interfering with the two leg units 13 and 14.
又加上，副腳部單元14，為了不具剛性是形成為比主腳部單元13還細的構成。因此，水平手臂單元15即使位於最低位置，但第3連桿33及第4連桿35都不會干涉到水平手臂單元15，基於此就不會妨礙到水平手臂單元15的動作。 Further, the auxiliary leg unit 14 is formed to be thinner than the main leg unit 13 so as not to be rigid. Therefore, even if the horizontal arm unit 15 is at the lowest position, the third link 33 and the fourth link 35 do not interfere with the horizontal arm unit 15, and thus the movement of the horizontal arm unit 15 is not hindered.
如以上所述，第1實施形態中，搬運機器人，其水平手臂單元支撐用的2個腳部單元為非對稱的構成。具體而言，第1實施形態相關的搬運機器人，是構成為於主腳部 單元設置2個驅動源，於副腳部單元設置1個驅動源。 As described above, in the first embodiment, the transport robot has a configuration in which the two leg units for supporting the horizontal arm unit are asymmetric. Specifically, the transport robot according to the first embodiment is configured as a main leg Two drive sources are provided in the unit, and one drive source is provided in the sub-foot unit.
此外，第1實施形態相關的搬運機器人，是構成為副腳部單元比主腳部單元還細，在副腳部單元內包有纜線等。基於此，第1實施形態相關的搬運機器人就能夠實現構造的簡略化並且能夠抑制裝置有關之製造成本及重量。 Further, in the transport robot according to the first embodiment, the sub-foot unit is thinner than the main leg unit, and a cable or the like is housed in the sub-leg unit. According to this, the transfer robot according to the first embodiment can simplify the structure and can suppress the manufacturing cost and weight of the device.
不過，上述是第1實施形態相關的搬運機器人10，雖然是構成為在第1關節部22、第2關節部24及第6關節部36設置驅動源，但並不限於此。於是，以下所示之第2實施形態中，是針對其與第1實施形態相關的搬運機器人10不同的構成進行說明。 However, the transport robot 10 according to the first embodiment is configured such that the drive source is provided in the first joint portion 22, the second joint portion 24, and the sixth joint portion 36, but the present invention is not limited thereto. In the second embodiment, which will be described below, a configuration different from that of the transport robot 10 according to the first embodiment will be described.
第4A圖及第4B圖為第2實施形態相關之搬運機器人10A的正面模式圖其一及其二。第2實施形態相關之搬運機器人10A，是驅動源設置位置與第1實施形態不同。 4A and 4B are first and second schematic views of the transport robot 10A according to the second embodiment. In the transfer robot 10A according to the second embodiment, the drive source installation position is different from that of the first embodiment.
另，針對搬運機器人10A的構成，除了驅動源設置位置不同以外其他構成都是和第1圖及第2圖相同，所以於此針對構成的說明就予以省略。 In addition, the configuration of the transport robot 10A is the same as that of the first and second figures except that the drive source installation position is different. Therefore, the description of the configuration will be omitted.
首先，如第4A圖所示，搬運機器人10A，是構成為在第1關節部22、第2關節部24及第5關節部34的軸端部分別設置驅動源，該3個關節部的旋轉軸為驅動軸。另一方面，第3關節部26、第4關節部32及第6關節部36的旋轉軸為自由軸利用軸支撐成旋轉自如。 First, as shown in FIG. 4A, the transport robot 10A is configured such that a drive source is provided at the axial end portions of the first joint portion 22, the second joint portion 24, and the fifth joint portion 34, and the three joint portions are rotated. The shaft is the drive shaft. On the other hand, the rotation axes of the third joint portion 26, the fourth joint portion 32, and the sixth joint portion 36 are rotatably supported by the shaft.
另，第4A圖中，各關節部當中，做為驅動軸的位置 以黑圓表示，做為自由軸的位置以白圓表示。搬運機器人10A，是藉由驅動該3個驅動軸來執行水平手臂單元15之Y座標及Z座標的定位。 In addition, in Fig. 4A, among the joint parts, as the position of the drive shaft Expressed in black circles, the position as a free axis is indicated by a white circle. The transport robot 10A performs positioning of the Y coordinate and the Z coordinate of the horizontal arm unit 15 by driving the three drive shafts.
第5關節部34之驅動軸的動力，是藉由驅動該驅動軸以對第4關節部32和第6關節部36的連接線成垂直方向的運作。其結果，第5關節部34的驅動軸就會朝Z軸的正負方向產生力。 The power of the drive shaft of the fifth joint portion 34 is a vertical direction of the connection line between the fourth joint portion 32 and the sixth joint portion 36 by driving the drive shaft. As a result, the drive shaft of the fifth joint portion 34 generates a force in the positive and negative directions of the Z-axis.
不過，如第4B圖所示，當第4關節部32及第6關節部36的高度為相同時，該2個關節部32、36之產生力(第4B圖的箭頭符號)的方向就會成為水平方向(Y軸的正負方向)。 However, as shown in FIG. 4B, when the heights of the fourth joint portion 32 and the sixth joint portion 36 are the same, the directions of the force generated by the two joint portions 32 and 36 (the arrow symbol of FIG. 4B) are It becomes the horizontal direction (positive and negative direction of the Y axis).
因此，第5關節部34的驅動軸，就無法朝朝Z軸的正負方向產生力，其結果，水平手臂單元15就無法昇降。 Therefore, the drive shaft of the fifth joint portion 34 cannot generate a force in the positive and negative directions of the Z-axis, and as a result, the horizontal arm unit 15 cannot move up and down.
於是，搬運機器人10A，就構成為利用第1關節部22及第2關節部24之驅動軸的動力控制成第4關節部32及第6關節部36的高度不會相同。如此一來，搬運機器人10A就能夠使水平手臂單元15順利昇降。 Then, the transport robot 10A is configured such that the heights of the fourth joint portion 32 and the sixth joint portion 36 are not the same by the power of the drive shafts of the first joint portion 22 and the second joint portion 24. In this way, the transport robot 10A can smoothly raise and lower the horizontal arm unit 15.
如以上所述，第2實施形態中，搬運機器人，其水平手臂單元支撐用的2個腳部單元為非對稱的構成。具體而言，第2實施形態相關的搬運機器人，是與第1實施形態相同構成為於主腳部單元設置2個驅動源，於副腳部單元設置1個驅動源。基於此，第2實施形態相關的搬運機器人就能夠實現構造的簡略化並且能夠抑制裝置有關之製造 成本及重量。 As described above, in the second embodiment, the transport robot has a configuration in which the two leg units for supporting the horizontal arm unit are asymmetric. Specifically, the transport robot according to the second embodiment is configured such that two drive sources are provided in the main leg unit and one drive source is provided in the sub-leg unit in the same manner as in the first embodiment. According to this, the transfer robot according to the second embodiment can simplify the structure and can suppress the manufacture of the device. Cost and weight.
接著，使用第5A圖及第5B圖針對第3實施形態相關之搬運機器人10B進行說明。第5A圖及第5B圖為第3實施形態相關之搬運機器人10B的正面模式圖其一及其二。 Next, the transfer robot 10B according to the third embodiment will be described with reference to FIGS. 5A and 5B. FIGS. 5A and 5B are first and second front views of the transfer robot 10B according to the third embodiment.
第3實施形態相關之搬運機器人10B，是驅動源設置位置與第1實施形態及第2實施形態不同。另，針對搬運機器人10B的構成，除了驅動源設置位置不同以外其他構成都是和第1圖及第2圖相同，所以於此針對構成的說明就予以省略。 The transport robot 10B according to the third embodiment differs from the first embodiment and the second embodiment in the drive source installation position. In addition, the configuration of the transport robot 10B is the same as that of the first and second figures except that the drive source installation position is different. Therefore, the description of the configuration will be omitted.
首先，如第5A圖所示，搬運機器人10B，是構成為在第1關節部22、第2關節部24及第4關節部32的軸端部分別設置驅動源，該3個關節部的旋轉軸為驅動軸。另一方面，第3關節部26、第5關節部34及第6關節部36的旋轉軸為自由軸利用軸支撐成旋轉自如。 First, as shown in FIG. 5A, the transport robot 10B is configured such that a drive source is provided at the axial end portions of the first joint portion 22, the second joint portion 24, and the fourth joint portion 32, and the rotation of the three joint portions is performed. The shaft is the drive shaft. On the other hand, the rotation axes of the third joint portion 26, the fifth joint portion 34, and the sixth joint portion 36 are rotatably supported by the shaft.
另，第5A圖中，各關節部當中，做為驅動軸的位置以黑圓表示，做為自由軸的位置以白圓表示。搬運機器人10B，是藉由驅動該3個驅動軸來執行水平手臂單元15的定位。 In addition, in Fig. 5A, among the joint portions, the position as the drive shaft is indicated by a black circle, and the position as a free axis is indicated by a white circle. The transport robot 10B performs positioning of the horizontal arm unit 15 by driving the three drive shafts.
接著，如第5B圖所示，當水平手臂單元15位於最低位置時，為了要讓第6關節部36上昇，則搬運機器人10B有必要對第6關節部36從Y軸的正方向及Y軸的負 方向施加力量。 Next, as shown in FIG. 5B, when the horizontal arm unit 15 is at the lowest position, in order to raise the sixth joint portion 36, it is necessary for the transport robot 10B to have the sixth joint portion 36 from the positive direction of the Y-axis and the Y-axis. Negative Apply force to the direction.
此時，當水平方向(Y軸的正負方向)和第4連桿35形成的角度為θ1時，該角度θ1愈大則對第6關節部36從Y軸之正方向施加的力量就可愈小。於是，搬運機器人10B就會使第4連桿35下降達到斜線所示之基台11和第4連桿35不干涉的程度。 At this time, when the angle formed by the horizontal direction (positive and negative direction of the Y-axis) and the fourth link 35 is θ 1 , the larger the angle θ 1 is, the stronger the force applied to the sixth joint portion 36 from the positive direction of the Y-axis is. The smaller it can be. Then, the transport robot 10B lowers the fourth link 35 to such an extent that the base 11 and the fourth link 35 indicated by oblique lines do not interfere.
如此一來，搬運機器人10B就能夠將驅動軸的負荷抑制成最小限度並且能夠使水平手臂單元15順利上昇。 In this way, the transport robot 10B can suppress the load of the drive shaft to a minimum and can smoothly raise the horizontal arm unit 15.
如以上所述，第3實施形態中，搬運機器人，其水平手臂單元支撐用的2個腳部單元為非對稱的構成。具體而言，第3實施形態相關的搬運機器人，是與第1實施形態及第2實施形態相同構成為於主腳部單元設置2個驅動源，於副腳部單元設置1個驅動源。基於此，第3實施形態相關的搬運機器人就能夠實現構造的簡略化並且能夠抑制裝置有關之製造成本及重量。 As described above, in the third embodiment, the transport robot has a configuration in which the two leg units for supporting the horizontal arm unit are asymmetric. Specifically, in the transport robot according to the third embodiment, in the same manner as in the first embodiment and the second embodiment, two drive sources are provided in the main leg unit, and one drive source is provided in the sub leg unit. According to this, the transfer robot according to the third embodiment can simplify the structure and can suppress the manufacturing cost and weight of the device.
其次，使用第6A圖及第6B圖針對第4實施形態相關之搬運機器人10C進行說明。第6A圖及第6B圖為第4實施形態相關之搬運機器人10C的正面模式圖其一及其二。 Next, the transfer robot 10C according to the fourth embodiment will be described with reference to FIGS. 6A and 6B. 6A and 6B are first and second front views of the transport robot 10C according to the fourth embodiment.
第4實施形態相關之搬運機器人10C，其與第1實施形態、第2實施形態及第3實施形態不同之處是在於只在主腳部單元13設置驅動源。另，針對搬運機器人10C的 構成，除了驅動源設置位置不同以外其他構成都是和第1圖及第2圖相同，所以於此針對構成的說明就予以省略。 The transfer robot 10C according to the fourth embodiment differs from the first embodiment, the second embodiment, and the third embodiment in that a drive source is provided only in the main leg unit 13. In addition, for the handling robot 10C The configuration is the same as that of the first and second figures except that the drive source installation position is different. Therefore, the description of the configuration will be omitted.
首先，如第6A圖所示，搬運機器人10C，是構成為只在主腳部單元13所具備的關節部，即，第1關節部22、第2關節部24及第3關節部26的軸端部分別設有驅動源，該3個關節部的旋轉軸為驅動軸。另一方面，副腳部單元14所具備的第4關節部32、第5關節部34及第6關節部36的旋轉軸是屬於自由軸利用軸支撐成旋轉自如。 First, as shown in FIG. 6A, the transport robot 10C is configured as a joint portion provided only in the main leg unit 13, that is, the axes of the first joint portion 22, the second joint portion 24, and the third joint portion 26 The end portions are respectively provided with drive sources, and the rotation axes of the three joint portions are drive shafts. On the other hand, the rotation axes of the fourth joint portion 32, the fifth joint portion 34, and the sixth joint portion 36 of the auxiliary leg unit 14 are rotatably supported by the shaft.
另，第6A圖中，各關節部當中，做為驅動軸的位置以黑圓表示，做為自由軸的位置以白圓表示。搬運機器人10C，是藉由驅動該3個驅動軸來執行水平手臂單元15的定位。 In addition, in Fig. 6A, among the joint portions, the position as the drive shaft is indicated by a black circle, and the position as a free axis is indicated by a white circle. The transport robot 10C performs positioning of the horizontal arm unit 15 by driving the three drive shafts.
於此，如以上所述副腳部單元14側之3個關節部32、34、36的旋轉軸為自由軸。因此，當搬運機器人10C昇降水平手臂單元15時，如第6A圖所示，恐怕第5關節34會朝副腳部單元14的外側(Y軸的正方向)彎曲。 Here, as described above, the rotation axes of the three joint portions 32, 34, and 36 on the side of the auxiliary leg unit 14 are free axes. Therefore, when the transport robot 10C raises and lowers the horizontal arm unit 15, as shown in FIG. 6A, the fifth joint 34 is likely to be bent toward the outer side (the positive direction of the Y-axis) of the auxiliary leg unit 14.
於是，如第6B圖所示，當第3連桿33和第4連桿35之外側(Y軸的正方向)形成的角度為θ2時，搬運機器人10C，就需構成為具備有指定的構件藉此避免θ2成為180°以上(未圖示)。 Thus, as shown on FIG 6B, when the angle of the outer link 4 (the positive direction of the Y axis) of the third link 33 and 35 is formed of θ 2, the transfer robot 1OC, there would need to include a specific configuration The member thereby prevents θ 2 from becoming 180° or more (not shown).
例如：搬運機器人10C可構成為在第3連桿33和第4連桿35之間具備有伸直防止用的彈簧。如此一來，即使構成為只在主腳部單元13設有驅動源的形態，但搬運機 器人10C在昇降水平手臂單元15時，就能夠將水平手臂單元15保持成水平。 For example, the transport robot 10C may be configured to include a spring for preventing the straightening between the third link 33 and the fourth link 35. In this way, even if the drive unit is provided only in the main leg unit 13, the transporter is provided. When the person 10C lifts the horizontal arm unit 15, the horizontal arm unit 15 can be kept horizontal.
如以上所述，第4實施形態中，搬運機器人，是構成為只在主腳部單元設有驅動源，其水平手臂單元支撐用的2個腳部單元為非對稱的構成。基於此，第4實施形態相關的搬運機器人就能夠實現構造的簡略化並且能夠抑制裝置有關之製造成本及重量。 As described above, in the fourth embodiment, the transport robot is configured such that only the main foot unit is provided with a drive source, and the two leg units for supporting the horizontal arm unit are asymmetric. According to this, the transfer robot according to the fourth embodiment can simplify the structure and can suppress the manufacturing cost and weight of the device.
本發明更進一步的效果或變形例，該當業者都能夠容易導出。因此，本發明更為廣泛的形態，就不限於以上所表達並且所記述之特定的細部及代表性的實施形態。基於此，只要不脫離申請專利範圍及其均等物所定義之總結性發明的概念精神或範圍，是可加以各式各樣的變更。 Further effects or modifications of the present invention can be easily derived by the practitioner. Therefore, the present invention is not limited to the specific details and representative embodiments described above. Based on this, various changes can be made without departing from the spirit and scope of the invention as defined by the scope of the claims and the equivalents thereof.
10、10A、10B、10C‧‧‧搬運機器人 10, 10A, 10B, 10C‧‧‧ handling robot
11‧‧‧基台 11‧‧‧Abutment
12‧‧‧基部 12‧‧‧ base
12a‧‧‧旋繞部 12a‧‧‧Winding
12b、12c‧‧‧延伸部 12b, 12c‧‧‧ extension
13‧‧‧主腳部單元 13‧‧‧Main foot unit
14‧‧‧副腳部單元 14‧‧‧Auxiliary foot unit
15‧‧‧水平手臂單元 15‧‧‧ horizontal arm unit
15a‧‧‧上側手臂單元 15a‧‧‧Upper arm unit
15b‧‧‧下側手臂單元 15b‧‧‧Bottom arm unit
21‧‧‧支柱 21‧‧‧ pillar
22‧‧‧第1關節部 22‧‧‧1st joint
23‧‧‧第1連桿 23‧‧‧1st link
24‧‧‧第2關節部 24‧‧‧2nd Joint
25‧‧‧第2連桿 25‧‧‧2nd link
26‧‧‧第3關節部 26‧‧‧3rd Joint
31‧‧‧支柱 31‧‧‧ pillar
32‧‧‧第4關節部 32‧‧‧4th Joint Department
33‧‧‧第3連桿 33‧‧‧3rd link
34‧‧‧第5關節部 34‧‧‧5th Joint
35‧‧‧第4連桿 35‧‧‧4th link
36‧‧‧第6關節部 36‧‧‧6th Joint
37‧‧‧纜線 37‧‧‧ Cable
40‧‧‧上側支撐構件 40‧‧‧Upper support member
41‧‧‧基端側關節部 41‧‧‧ proximal end joints
42‧‧‧基端側手臂 42‧‧‧Based side arm
43‧‧‧前端側關節部 43‧‧‧ front end joint
44‧‧‧前端側手臂 44‧‧‧ front side arm
45‧‧‧手臂關節部 45‧‧‧arm joints
46‧‧‧手部 46‧‧‧Hands
47‧‧‧臂部 47‧‧‧arm
50‧‧‧下側支撐構件 50‧‧‧Bottom support member
P1‧‧‧旋繞軸 P1‧‧‧Spinning shaft
第1圖為第1實施形態相關之搬運機器人的說明圖。 Fig. 1 is an explanatory view of a transport robot according to the first embodiment.
第2圖為第1實施形態相關之搬運機器人的模式透視圖。 Fig. 2 is a schematic perspective view of the transport robot according to the first embodiment.
第3圖為第1實施形態相關之搬運機器人的正面模式圖。 Fig. 3 is a front schematic view showing the transport robot according to the first embodiment.
第4A圖為第2實施形態相關之搬運機器人的正面模式圖其一。 Fig. 4A is a front view showing the conveyance robot according to the second embodiment.
第4B圖為第2實施形態相關之搬運機器人的正面模式圖其二。 Fig. 4B is a front view showing the second embodiment of the transport robot according to the second embodiment.
第5A圖為第3實施形態相關之搬運機器人的正面模 式圖其一。 Fig. 5A is a front view of the transport robot related to the third embodiment. The figure is one.
第5B圖為第3實施形態相關之搬運機器人的正面模式圖其二。 Fig. 5B is a front view showing the second embodiment of the transport robot according to the third embodiment.
第6A圖為第4實施形態相關之搬運機器人的正面模式圖其一。 Fig. 6A is a front view showing the conveyance robot according to the fourth embodiment.
第6B圖為第4實施形態相關之搬運機器人的正面模式圖其二。 Fig. 6B is a front view showing the second embodiment of the transport robot according to the fourth embodiment.
10‧‧‧搬運機器人 10‧‧‧Handling robot
11‧‧‧基台 11‧‧‧Abutment
12‧‧‧基部 12‧‧‧ base
12a‧‧‧旋繞部 12a‧‧‧Winding
12b、12c‧‧‧延伸部 12b, 12c‧‧‧ extension
13‧‧‧主腳部單元 13‧‧‧Main foot unit
14‧‧‧副腳部單元 14‧‧‧Auxiliary foot unit
15‧‧‧水平手臂單元 15‧‧‧ horizontal arm unit
21‧‧‧支柱 21‧‧‧ pillar
22‧‧‧第1關節部 22‧‧‧1st joint
23‧‧‧第1連桿 23‧‧‧1st link
24‧‧‧第2關節部 24‧‧‧2nd Joint
25‧‧‧第2連桿 25‧‧‧2nd link
26‧‧‧第3關節部 26‧‧‧3rd Joint
31‧‧‧支柱 31‧‧‧ pillar
32‧‧‧第4關節部 32‧‧‧4th Joint Department
33‧‧‧第3連桿 33‧‧‧3rd link
34‧‧‧第5關節部 34‧‧‧5th Joint
35‧‧‧第4連桿 35‧‧‧4th link
36‧‧‧第6關節部 36‧‧‧6th Joint
37‧‧‧纜線 37‧‧‧ Cable
P1‧‧‧旋繞軸 P1‧‧‧Spinning shaft
Claims (9)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011239446A JP5459292B2 (en) | 2011-10-31 | 2011-10-31 | Transfer robot |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201336643A true TW201336643A (en) | 2013-09-16 |
Family
ID=48198443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101140134A TW201336643A (en) | 2011-10-31 | 2012-10-30 | Handling robot |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5459292B2 (en) |
| KR (1) | KR20130047668A (en) |
| CN (1) | CN103085063A (en) |
| TW (1) | TW201336643A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI814941B (en) * | 2018-12-21 | 2023-09-11 | 日商達誼恆股份有限公司 | Multi-segment arm and handling robot with the same |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10202573A (en) * | 1997-01-14 | 1998-08-04 | Fujitsu Ltd | Robot arm device |
| JP4479034B2 (en) * | 2000-02-04 | 2010-06-09 | シンフォニアテクノロジー株式会社 | Wafer carrier transfer device in load port device |
| JP4482818B2 (en) * | 2005-10-03 | 2010-06-16 | 株式会社日本自動車部品総合研究所 | Biped robot |
| JP5146641B2 (en) * | 2007-06-06 | 2013-02-20 | 株式会社安川電機 | Substrate transfer robot and control method of substrate transfer robot |
| WO2009034854A1 (en) * | 2007-09-13 | 2009-03-19 | Kabushiki Kaisha Yaskawa Denki | Transfer robot, transfer method and control method |
| JP5471399B2 (en) * | 2009-12-17 | 2014-04-16 | 株式会社安川電機 | Transfer robot |
| JP5446896B2 (en) * | 2010-01-14 | 2014-03-19 | 株式会社安川電機 | Substrate transfer device |
-
2011
- 2011-10-31 JP JP2011239446A patent/JP5459292B2/en not_active Expired - Fee Related
-
2012
- 2012-10-30 CN CN2012104247216A patent/CN103085063A/en active Pending
- 2012-10-30 TW TW101140134A patent/TW201336643A/en unknown
- 2012-10-30 KR KR1020120121465A patent/KR20130047668A/en not_active Application Discontinuation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI814941B (en) * | 2018-12-21 | 2023-09-11 | 日商達誼恆股份有限公司 | Multi-segment arm and handling robot with the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013094896A (en) | 2013-05-20 |
| KR20130047668A (en) | 2013-05-08 |
| JP5459292B2 (en) | 2014-04-02 |
| CN103085063A (en) | 2013-05-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5532110B2 (en) | Substrate transfer robot and substrate transfer method | |
| JP5387622B2 (en) | Transfer robot | |
| JP6051021B2 (en) | Industrial robot and control method for industrial robot | |
| TWI546172B (en) | Industrial robots | |
| JP6148025B2 (en) | Delivery position teaching method, delivery position teaching apparatus, and substrate processing apparatus | |
| JP6649768B2 (en) | Industrial robot | |
| KR101514142B1 (en) | Robot arm and robot | |
| JP2015013356A (en) | Suction structure, robot hand, and robot | |
| TW201603977A (en) | Transfer system and operation correction method of transfer robot | |
| JP2010030744A (en) | Plate-like work transfer installation and method | |
| TWI558522B (en) | Industrial robots | |
| JP5553065B2 (en) | Substrate transfer hand and substrate transfer robot | |
| WO2016189565A1 (en) | Horizontal articulated robot | |
| JP2019209458A (en) | End effector and device | |
| JP2016107378A (en) | Industrial robot and teaching method of industrial robot | |
| JP2014100744A (en) | Robot arm, robot, and operation method for robot | |
| JP2014159076A (en) | Substrate transport robot | |
| TW201336643A (en) | Handling robot | |
| KR20170084388A (en) | Robot for transferring substrate | |
| JP2015013360A (en) | Suction structure, robot hand, and robot | |
| KR20170084389A (en) | Robot for transferring substrate | |
| JP2008254138A (en) | Articulated robot | |
| JP2009208174A (en) | Industrial robot | |
| TW202120278A (en) | Industrial robot | |
| JP2020070154A (en) | Article transfer facility |