TW201335443A - Mold for silicon casting, method for silicon casting, silicon material, and manufacturing method for solar cell - Google Patents

Mold for silicon casting, method for silicon casting, silicon material, and manufacturing method for solar cell Download PDF

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TW201335443A
TW201335443A TW101148492A TW101148492A TW201335443A TW 201335443 A TW201335443 A TW 201335443A TW 101148492 A TW101148492 A TW 101148492A TW 101148492 A TW101148492 A TW 101148492A TW 201335443 A TW201335443 A TW 201335443A
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mold
casting
additive
tantalum
ingot
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TWI458863B (en
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Ryuichi Oishi
Kimihiko Kojimoto
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Sharp Kk
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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/02Silicon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
    • H01L31/182Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/546Polycrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Silicon Compounds (AREA)
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Abstract

The present invention discloses a mold for silicon casting, characterized by solidifying a silicon melt and disposing a mold release layer containing an additive having an average particle diameter of 0.1 to 3.0 mm at least on the top surface of the bottom plate of the inner walls of the mold for silicon casting.

Description

矽鑄造用鑄型、矽鑄造方法、矽材料及太陽能電池之製造方法 Casting mold for tantalum casting, tantalum casting method, tantalum material, and method for manufacturing solar battery

本發明係關於一種矽鑄造用鑄型、使用其之矽鑄造方法、矽材料及太陽能電池之製造方法。 The present invention relates to a casting mold for casting, a casting method using the same, a crucible material, and a method for producing a solar battery.

作為對地球環境造成各種問題之石油等之替代品,自然能源之利用受到關注。其中,太陽能電池由於無需較大之設備,且運轉時不產生噪音等,在日本或歐洲等地尤其被積極地引入。 As an alternative to petroleum and other problems that cause various problems in the global environment, the use of natural energy is attracting attention. Among them, solar cells are particularly actively introduced in Japan or Europe because they do not require a large device and do not generate noise during operation.

使用碲化鎘等化合物半導體之太陽能電池亦一部分實用化,但就物質本身之安全性或迄今為止之實績,又,成本效率之方面而言,使用結晶矽基板之太陽能電池占較大比例,其中使用多晶矽基板之太陽能電池(多晶矽太陽能電池)占較大比例。 Solar cells using compound semiconductors such as cadmium telluride are also practical, but solar cells using crystalline germanium substrates account for a large proportion of the safety of the materials themselves or the performance so far, and cost efficiency. Solar cells (polycrystalline solar cells) using polycrystalline germanium substrates account for a large proportion.

作為多晶矽太陽能電池之基板通常所廣泛使用之多晶矽晶圓係將藉由於鑄型內使熔融矽單向凝固而獲得較大之多晶矽晶錠之被稱作澆鑄法之方法所製造之晶錠切割成塊,藉由切片進行晶圓化而成者。 A polycrystalline silicon wafer which is widely used as a substrate of a polycrystalline silicon solar cell is obtained by cutting a crystal ingot which is obtained by a method called casting by a unidirectional solidification of a molten crucible in a mold to obtain a large polycrystalline germanium ingot. A block that is waferized by slicing.

藉由澆鑄法所製造之多晶矽晶圓根據晶錠或塊內之高度方向之位置,通常具有如圖3所示之太陽能電池之輸出特性之分佈。 The polycrystalline silicon wafer produced by the casting method generally has a distribution of output characteristics of the solar cell as shown in FIG. 3 depending on the position of the height direction in the ingot or the block.

圖3之特性分佈產生之原因通常如以下般進行說明。 The reason why the characteristic distribution of Fig. 3 is generated is generally explained as follows.

首先,於單向凝固之初期之區域I中,由於自鑄型擴散之雜質之影響而引起特性降低。於其上部側之區域II中, 由偏析所引起之原料中之雜質之朝結晶中之收進或結晶缺陷之產生較少,故而塊中特性最良好。進而於上部側之區域III中,除結晶中所收進之雜質量逐漸增加以外,結晶缺陷之產生增加,較區域II特性降低。進而於上部側之區域IV中,除與區域III同樣地結晶中所收進之雜質量或結晶缺陷之產生進而增加以外,晶錠至最後凝固之後,自最上部表面部分所產生之雜質之高濃度部分引起雜質之逆擴散,進而雜質量增加,故而較區域III進一步特性顯著降低。 First, in the region I at the initial stage of unidirectional solidification, the characteristics are degraded due to the influence of impurities diffused from the mold. In the area II on the upper side, The impurities in the raw material caused by the segregation are less likely to be generated in the crystal or the crystal defects are generated, so that the characteristics in the block are the best. Further, in the region III on the upper side, in addition to the gradual increase in the amount of impurities absorbed in the crystallization, the generation of crystal defects increases, and the characteristics of the region II decrease. Further, in the region IV on the upper side, in addition to the generation of the impurity or crystal defects which are absorbed in the crystal in the same manner as in the region III, the impurity generated from the uppermost surface portion after the ingot is finally solidified The concentration portion causes a reverse diffusion of impurities, and the amount of impurities increases, so that further characteristics are significantly lower than those of the region III.

上述說明中,考慮了原料中之雜質或自鑄型所溶出之雜質之影響,但即便於假設無該等影響之情形時,於區域III及IV中,由於隨著朝向上部而成為少數載子捕獲之結晶缺陷逐漸增加,因此有太陽能電池之特性降低之傾向。 In the above description, the influence of the impurities in the raw material or the impurities eluted from the mold is considered, but even in the case where it is assumed that there is no such influence, in the regions III and IV, the minority carriers are formed toward the upper portion. The crystal defects caught are gradually increased, so there is a tendency that the characteristics of the solar cell are lowered.

認為結晶缺陷產生之原因在於晶錠中之溫度分佈所致之應力,就抑制其之觀點而言,提出有以下2個方法。 The reason for the occurrence of crystal defects is the stress due to the temperature distribution in the ingot, and the following two methods have been proposed from the viewpoint of suppressing the viewpoint.

第1,例如,日本專利特開2005-152985號公報(專利文獻1)中,提出有於單向凝固(澆鑄)時,使用中心部之熱通量大於周邊者作為設置於鑄型下部之鑄型固持器之方法。 In Japanese Patent Laid-Open Publication No. 2005-152985 (Patent Document 1), it is proposed that in the case of unidirectional solidification (casting), the heat flux at the center portion is larger than that of the periphery as the casting at the lower portion of the mold. The method of the type of holder.

第2,例如,國際公開第2005/092791(專利文獻2)中,提出有藉由使受熱(熱交換)面積成為可變之構造,於晶錠成長之中途進行熱流控制之方法。 In the second embodiment, for example, the method of controlling the heat flow in the middle of the growth of the ingot by the structure in which the heat-receiving (heat exchange) area is variable is proposed in International Publication No. 2005/092791 (Patent Document 2).

又,作為與上述方法不同之多晶矽晶錠之品質提高對策,提出有以大粒徑化為目的之方法。 Moreover, as a measure for improving the quality of the polycrystalline germanium ingot different from the above method, a method for increasing the particle size has been proposed.

例如,日本專利第4203603號公報(專利文獻3)及日本專利特開2005-132671號公報(專利文獻4)中,提出有藉由將 鑄型底部進行急冷而於晶錠底部(於凝固初期)作為結晶核使樹枝狀結晶產生,使結晶粒粗大化之方法。 For example, Japanese Patent No. 4,204, 363 (Patent Document 3) and Japanese Patent Laid-Open Publication No. 2005-132671 (Patent Document 4) The bottom of the mold is rapidly cooled to form a dendrite as a crystal nucleus at the bottom of the ingot (in the initial stage of solidification) to coarsen the crystal grains.

又,日本專利第4054873號公報(專利文獻5)中,提出有使於矽原料之熔解步驟中所殘留之結晶片(熔解殘餘)成長且使結晶粒變肥大,從而獲得偽單晶之方法。 Japanese Patent No. 4,054,873 (Patent Document 5) proposes a method of obtaining a pseudo single crystal by growing a crystal piece (melting residue) remaining in the melting step of the ruthenium raw material and increasing the crystal grain.

進而,日本專利第4569957號公報(專利文獻6)中,提出有自於鑄型底將晶體方位統一而配置之SiC等之晶種使矽異質磊晶成長,從而獲得偽單晶之方法。 Furthermore, Japanese Patent No. 4569957 (Patent Document 6) proposes a method in which a seed crystal of SiC or the like which is arranged in a uniform shape of a mold bottom is used to cause epitaxial growth of germanium in a heterogeneous manner to obtain a pseudo single crystal.

先前技術文獻Prior technical literature 專利文獻Patent literature

專利文獻1:日本專利特開2005-152985號公報 Patent Document 1: Japanese Patent Laid-Open Publication No. 2005-152985

專利文獻2:國際公開第2005/092791 Patent Document 2: International Publication No. 2005/092791

專利文獻3:日本專利特開第4203603號公報 Patent Document 3: Japanese Patent Laid-Open No. 4203603

專利文獻4:日本專利特開2005-132671號公報 Patent Document 4: Japanese Patent Laid-Open Publication No. 2005-132671

專利文獻5:日本專利第4054873號公報 Patent Document 5: Japanese Patent No. 4054883

專利文獻6:日本專利第4569957號公報 Patent Document 6: Japanese Patent No. 4569957

專利文獻1之方法中,尤其於如加熱器位於鑄型旁邊之情形時,有成為使固液界面之形狀更變差之結果,無法獲得降低結晶缺陷密度或防止破裂等效果之課題。 In the method of Patent Document 1, in particular, when the heater is placed beside the mold, there is a problem that the shape of the solid-liquid interface is further deteriorated, and the effect of reducing the crystal defect density or preventing cracking cannot be obtained.

專利文獻2之方法中,雖然可提高自鑄型側壁之冷卻之控制性,但有裝置構成非常複雜,且高溫之可動部分較多,裝置之成本增加或故障增加之課題。 In the method of Patent Document 2, although the controllability of cooling from the side wall of the mold can be improved, there is a problem that the device configuration is very complicated, and the movable portion at a high temperature is large, and the cost of the device is increased or the failure is increased.

專利文獻3~5之方法中,藉由結晶粒之粗大化可抑制由晶界所導致之特性降低,尤其是於晶錠尺寸較小之情形時,有由溫度分佈所導致之應力較小,晶錠之上部側所導入之結晶缺陷亦一定程度受到抑制之優點。然而,由於與晶錠尺寸變大之同時上部側之結晶缺陷增加,因此雖然可看到底部側之特性提高,但依然殘留有於上部側所製作之太陽能電池中之特性降低之課題。 In the methods of Patent Documents 3 to 5, the deterioration of the characteristics caused by the grain boundaries can be suppressed by the coarsening of the crystal grains, and particularly when the size of the ingot is small, the stress caused by the temperature distribution is small. The crystal defects introduced on the upper side of the ingot are also suppressed to some extent. However, since the crystal defects on the upper side increase as the size of the ingot increases, the characteristics of the bottom side are improved, but the characteristics of the solar cell produced on the upper side are still reduced.

專利文獻6之方法中,認為自相鄰之SiC等之晶種所成長之矽結晶於相觸之邊界部分形成缺陷,晶錠係即便粗略一看為單晶亦電性地包含較多之缺陷者。又,關於上部側,與晶錠尺寸變大之同時上部側之結晶缺陷密度變高,依然殘留有於上部側所製作之太陽能電池中之特性降低之課題。 In the method of Patent Document 6, it is considered that the germanium crystal grown from the seed crystal of the adjacent SiC or the like forms a defect at the boundary portion of the contact, and the ingot system electrically contains a large number of defects even if it is a single crystal. By. In addition, as for the upper side, the crystal defect density of the upper side is increased while the size of the ingot is increased, and the problem of lowering the characteristics of the solar cell produced on the upper side remains.

本發明之課題在於提供一種可抑制晶錠之上部側之結晶缺陷密度,且可製造成本效率較高之太陽能電池之矽鑄造用鑄型、矽鑄造方法、矽材料之製造方法及太陽能電池之製造方法。 An object of the present invention is to provide a mold for casting a tantalum, a method for producing a tantalum material, a method for producing a tantalum material, and a solar cell, which are capable of suppressing a crystal defect density on an upper portion of an ingot, and which are capable of producing a solar cell having high cost efficiency. method.

本發明者等人為解決上述課題反覆進行銳意研究,結果發現藉由於鑄型內將矽熔融液自底部朝上部單向凝固而製造矽晶錠時,於鑄型之至少底板部上表面部設置包含粒徑0.1~3.0 mm之添加物之脫模材料層,可解決上述課題,從而完成本發明。 In order to solve the above problems, the inventors of the present invention have conducted intensive studies. As a result, it has been found that at least the upper surface portion of the bottom plate portion of the mold is provided by the unidirectional solidification of the ruthenium melt from the bottom toward the upper portion in the mold. The above-mentioned problem can be solved by the release material layer of the additive having a particle diameter of 0.1 to 3.0 mm, and the present invention has been completed.

如此,根據本發明,提供一種矽鑄造用鑄型,其係使矽 熔融液凝固者,且於上述矽鑄造用鑄型之內壁之至少底板部上表面設置有包含平均粒徑0.1~3.0 mm之添加物之脫模材料層。 Thus, according to the present invention, there is provided a casting mold for casting, which is made by The melt is solidified, and at least the upper surface of the bottom plate portion of the inner wall of the casting mold is provided with a release material layer containing an additive having an average particle diameter of 0.1 to 3.0 mm.

又,根據本發明,提供一種矽鑄造方法,其特徵在於:於上述之矽鑄造用鑄型內使矽熔融液凝固;一種矽材料之製造方法,其使用藉由該矽鑄造方法所鑄造之矽獲得矽材料;及一種太陽能電池之製造方法,其將該矽材料用作基板而獲得太陽能電池。 Moreover, according to the present invention, there is provided a method of casting a tantalum, characterized in that: a tantalum melt is solidified in the above-mentioned cast casting mold; and a niobium material is produced by using the niobium casting method. A germanium material is obtained; and a method of manufacturing a solar cell, which uses the germanium material as a substrate to obtain a solar cell.

根據本發明,可提供一種可抑制晶錠之上部側之結晶缺陷密度,且可製造成本效率較高之太陽能電池之矽鑄造用鑄型、矽鑄造方法、矽材料之製造方法及太陽能電池之製造方法。 According to the present invention, it is possible to provide a mold for casting, a tantalum casting method, a method for producing a tantalum material, and a solar cell for manufacturing a solar cell capable of suppressing a crystal defect density on an upper portion of an ingot. method.

本發明之矽鑄造用鑄型於脫模材料層僅設置於底板部上表面之情形時,於矽鑄造用鑄型包含以石墨或石英(二氧化矽)為主成分之材質之情形時,於添加物以選自氮化矽、碳化矽、氧化矽及石墨中之至少1者為主成分之情形時,及於脫模材料層於其表面以面密度0.2~8.5個/cm2包含添加物之情形時,進一步發揮上述之效果。 In the case where the mold for casting is provided only on the upper surface of the bottom plate portion, the mold for casting in the case of casting contains a material mainly composed of graphite or quartz (cerium oxide). When the additive is at least one selected from the group consisting of tantalum nitride, tantalum carbide, niobium oxide, and graphite as the main component, and the release material layer contains the additive at an areal density of 0.2 to 8.5/cm 2 on the surface thereof. In the case of the above, the above effects are further exerted.

於本說明書中,所謂「晶錠之上部」意指使矽鑄造用鑄型內之矽熔融液自底部朝上部單向凝固而製造之矽晶錠之上部,即凝固步驟結束之側之矽晶錠。另一方面,將以同樣之方式所製造之矽晶錠之下部,即凝固步驟開始之側之矽晶錠稱作「晶錠之底部」。 In the present specification, the term "upper part of the ingot" means the upper part of the twin ingot which is produced by solidifying the tantalum melt in the casting mold from the bottom to the upper side, that is, the side of the solidification step. . On the other hand, the lower portion of the twin ingot produced in the same manner, that is, the side of the solidification step, is referred to as "the bottom of the ingot".

又,所謂「矽材料」意指「矽晶錠」、自矽晶錠加工成角柱狀之「矽塊」及將矽塊進行切片加工而成之「矽晶圓」。 In addition, the term "矽" means "矽", "矽" which is processed into a columnar shape from a tantalum ingot, and "矽 wafer" which is obtained by slicing a block.

進而,所謂「矽太陽能電池」意指構成最小組件之「矽太陽能電池單元」及將其複數個電性連接之「太陽能電池模組」。 Further, the term "a solar cell" means a "tank solar cell" which constitutes a minimum component, and a "solar cell module" which electrically connects the plurality of cells.

本發明之矽鑄造用鑄型之特徵在於:其為使矽熔融液凝固者,且於上述矽鑄造用鑄型之內壁之至少底板部上表面設置有包含平均粒徑0.1~3.0 mm之添加物之脫模材料層。 The casting mold for casting of the present invention is characterized in that the crucible melt is solidified, and at least the upper surface of the bottom plate portion of the inner wall of the casting mold is provided with an addition of an average particle diameter of 0.1 to 3.0 mm. a layer of release material.

本發明者等人對於鑄型內單向凝固之多個矽晶錠進行了結晶缺陷之評價、分析及研究,結果發現作為降低晶錠之上部側之結晶缺陷密度之方法,除先前以來被認為有效並且常用之藉由溫度分佈之抑制之應力降低以外確實有其他方法。 The present inventors have evaluated, analyzed, and studied the crystal defects of a plurality of twin ingots which are unidirectionally solidified in a mold, and as a result, have found that the method of lowering the density of crystal defects on the upper side of the ingot has been considered as There are other methods that are effective and commonly used to reduce stress by suppression of temperature distribution.

具體而言,本發明者等人以與藉由結晶粒之粗大化抑制由晶界所導致之特性降低之專利文獻3~6中所記載之技術完全相反之想法,發現結晶粒徑較小之多晶矽晶錠與結晶粒徑較大者相比,應力較強,結晶缺陷難以產生。 Specifically, the inventors of the present invention found that the crystal grain size is small in the contrary to the technique described in Patent Documents 3 to 6 which suppresses the deterioration of the properties caused by the grain boundary by the coarsening of crystal grains. The polycrystalline germanium ingot is more stressful than the crystal grain size, and crystal defects are hard to occur.

根據本發明者等人之見解,(1)多晶矽晶錠內即便相鄰很近之部分,結晶粒徑較大之粒與較小之粒中導入至內部之結晶缺陷密度亦有較大差異;(2)晶錠之結晶粒徑與其上部側之結晶缺陷密度之間有相互關聯;(3)雖然有例外,但結晶粒徑越小,晶錠之上部側之結晶缺陷密度越低。由於 難以認為晶錠內之相鄰之部分中,晶錠成長時所受之熱應力有較大差別,故而認為結晶粒徑較小之部分係藉由晶界部分之滑動等而結晶粒內所受之應力緩和,結果朝結晶粒內之結晶缺陷導入受到抑制者。 According to the findings of the present inventors, (1) even in the vicinity of the polycrystalline germanium ingot, the crystal defect density of the particles having a larger crystal grain size and the smaller particles being introduced into the interior is largely different; (2) There is a correlation between the crystal grain size of the ingot and the crystal defect density on the upper side; (3) Although there are exceptions, the smaller the crystal grain size, the lower the crystal defect density on the upper side of the ingot. due to It is difficult to think that in the adjacent portion of the ingot, the thermal stress received by the ingot grows greatly, and it is considered that the portion having a smaller crystal grain size is crystallized in the grain by sliding of the grain boundary portion or the like. The stress is alleviated, and as a result, the introduction of crystal defects into the crystal grains is suppressed.

因此,於使鑄型中之矽熔融液單向凝固而鑄造矽晶錠時,藉由促進鑄型底部之結晶核之產生而使結晶粒徑變小,可降低矽晶錠之上部側之結晶缺陷。 Therefore, when the tantalum melt is unidirectionally solidified in the mold to cast the twin ingot, the crystal grain size is reduced by promoting the generation of the crystal nucleus at the bottom of the mold, and the crystal on the upper side of the twin ingot can be reduced. defect.

為了降低矽晶錠之上部側之結晶缺陷,在此之前,考慮有必需固液界面之平坦化等、施加於晶錠之熱應力之降低,與此相對,本發明中,僅藉由使結晶粒徑變小之結晶粒徑之控制即可降低多晶矽晶錠之上部側之結晶缺陷。藉由使用本發明之鑄型,可將結晶粒徑控制為較小。 In order to reduce the crystal defects on the upper side of the twin ingot, the thermal stress applied to the ingot is reduced in consideration of the flattening of the solid-liquid interface or the like, and in the present invention, only by crystallization The control of the crystal grain size in which the particle diameter becomes small can reduce the crystal defects on the upper side of the polycrystalline twin ingot. By using the mold of the present invention, the crystal grain size can be controlled to be small.

(矽鑄造用鑄型) (矽 casting mold)

本發明之矽鑄造用鑄型於矽鑄造用鑄型之內壁之至少底板部上表面,設置有包含平均粒徑0.1~3.0 mm之添加物之脫模材料層。 In the casting mold for casting of the present invention, at least the upper surface of the bottom plate portion of the inner wall of the casting mold is provided with a release material layer containing an additive having an average particle diameter of 0.1 to 3.0 mm.

本發明之矽鑄造用鑄型若為可獲得本發明之效果之範圍,則其材質並無特別限定,可使用先前以來所使用之材質之鑄型。 In the mold for casting of the present invention, the material of the present invention is not particularly limited as long as the effect of the present invention is obtained, and a mold of the material used in the prior art can be used.

考慮到自鑄型朝矽熔融液及矽晶錠之混入雜質之影響、成本、耐熱性等,本發明之矽鑄造用鑄型較佳為包含以石墨或石英(二氧化矽)為主成分之材質。 The casting mold for casting of the present invention preferably contains graphite or quartz (cerium oxide) as a main component in consideration of the influence of the impurities, the cost, the heat resistance, and the like of the mold-incorporated melt and the twin ingot. Material.

鑄型之形狀及尺寸若為可獲得本發明之效果之範圍,則並無特別限定,例如,矩形、圓筒形中任一者均可,只要 為具有可保持矽熔融液及凝固之矽晶錠之尺寸形狀即可。具體而言,可列舉試驗例中所使用之鑄型。 The shape and size of the mold are not particularly limited as long as the effect of the present invention can be obtained. For example, any of a rectangular shape and a cylindrical shape may be used as long as It is sufficient to have a size and shape of a twin ingot which can maintain the mash melt and solidify. Specifically, the mold used in the test examples can be cited.

矽鑄造用鑄型中,通常,為了矽鑄造後自鑄型取出矽晶錠而設置有脫模材料層,本發明中,脫模材料層包含具有特定之平均粒徑之添加物。 In the mold for casting, generally, a mold release material layer is provided for taking out the twin ingot from the mold after casting, and in the present invention, the mold release material layer contains an additive having a specific average particle diameter.

根據本發明者等人之研究,可知於脫模材料層中存在有特定之添加物之位置於矽熔融液凝固時,成為核(結晶核)產生位置之機率高於其他部分。將鑄型內之矽熔融液自其底板部朝向上部單向凝固而獲得矽晶錠係大部分。因此,藉由至少於最初核產生開始之鑄型之底板部上表面部分之脫模材料層中導入特定之添加物,可提高核產生之機率,使結晶粒徑變小,又,作為其結果,可抑制矽晶錠之上部側之結晶缺陷。 According to the study by the inventors of the present invention, it has been found that the position where a specific additive exists in the release material layer is higher than the other portions when the ruthenium melt solidifies, and the position of the core (crystal nucleus) is higher. The bismuth melt in the mold is solidified unidirectionally from the bottom plate portion toward the upper portion to obtain a majority of the twin crystal system. Therefore, by introducing a specific additive into the release material layer of the upper surface portion of the bottom plate portion of the mold in which the initial nuclear generation is started, the probability of occurrence of nuclei can be increased, and the crystal grain size can be made small, and as a result It can suppress crystal defects on the upper side of the twin ingot.

為了有效地獲得上述效果,本發明之矽鑄造用鑄型之脫模材料層較佳為僅設置於矽鑄造用鑄型之內壁之底板部上表面。即,於鑄型之內壁之側面部,較佳為設置有不含添加物之脫模材料層。 In order to obtain the above effects effectively, the release material layer of the casting mold of the present invention is preferably provided only on the upper surface of the bottom plate portion of the inner wall of the casting mold. That is, it is preferable to provide a release material layer containing no additive on the side surface portion of the inner wall of the mold.

於鑄型之內壁之側面部亦設置有包含特定之添加物之脫模材料層之情形時,有於側面部核產生之機率亦變高,於側面部核產生之結晶於自側面分離之方向上成長,結晶晶界相對於晶錠之上下方向傾斜之情況。此種結晶狀態之矽晶錠之周邊部不為作為太陽能電池用較佳之圓柱狀結晶。 When the side wall portion of the inner wall of the mold is also provided with a layer of the release material containing a specific additive, the probability of occurrence of the side core is also high, and the crystal generated at the side core is separated from the side. Growing in the direction, the crystal grain boundary is inclined with respect to the upper and lower directions of the ingot. The peripheral portion of the crystal ingot in such a crystalline state is not preferably a cylindrical crystal for solar cells.

添加物若為可獲得本發明之效果之範圍,則其材質並無特別限定,但考慮到自添加物朝矽熔融液及矽晶錠之混入 雜質之影響、成本、耐熱性等,較佳為以選自氮化矽、碳化矽、氧化矽及石墨中至少一者為主成分。 The material to be added is not particularly limited as long as it is in the range in which the effect of the present invention can be obtained, but it is considered that the self-additive is mixed into the bismuth melt and the bismuth ingot. The influence of impurities, cost, heat resistance, and the like is preferably at least one selected from the group consisting of tantalum nitride, tantalum carbide, niobium oxide, and graphite.

添加物之平均粒徑為0.1~3.0 mm。 The average particle size of the additive is 0.1 to 3.0 mm.

添加物之平均粒徑若為上述之範圍,則可期待使用利用本發明之矽鑄造用鑄型所製造之矽晶錠所製作之矽太陽能電池之輸出提高。此情況意味矽晶錠內之結晶之狀態良好,意味可提供一種不僅可用於太陽能電池亦可較佳地用於其他用途之矽晶錠。更佳之範圍為0.3~2.8 mm,進而較佳之範圍為0.8~2.2 mm。 When the average particle diameter of the additive is within the above range, it is expected that the output of the tantalum solar cell produced by using the twin ingot produced by the casting mold of the present invention is improved. This case means that the state of the crystals in the ingot is good, meaning that a twin ingot which can be used not only for a solar cell but also for other purposes is provided. A more preferred range is from 0.3 to 2.8 mm, and a preferred range is from 0.8 to 2.2 mm.

具體的之添加物之平均粒徑(mm)為0.1、0.2、0.3、0.4、0.5、0.6、0.7、0.8、0.9、1.0、1.5、2.0、2.5、3.0。 The specific particle diameter (mm) of the specific additive is 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1.0, 1.5, 2.0, 2.5, 3.0.

脫模材料層較佳為於其表面以面密度0.2~8.5個/cm2包含添加物。 The release material layer preferably contains an additive at a surface density of 0.2 to 8.5 /cm 2 on the surface thereof.

若面密度未達0.2個/cm2,則有矽之結晶粒徑控制之效果降低之情形。另一方面,若面密度超過8.5個/cm2,則矽之結晶粒徑變得過小,雖然可將晶錠上部之結晶缺陷密度抑制為較低,但有成為電子電洞對之再鍵結中心之結晶晶界變得過多之情況。此種矽晶錠就太陽能電池之轉換效率之觀點而言欠佳,上述添加物之面密度之範圍於最佳值之範圍內,更佳之範圍為2.0~6.5個/cm2,進而較佳為之範圍為2.5~6.0個/cm2If the areal density is less than 0.2/cm 2 , the effect of controlling the crystal grain size of the crucible is lowered. On the other hand, when the areal density exceeds 8.5/cm 2 , the crystal grain size of the crucible becomes too small, and although the crystal defect density in the upper portion of the ingot can be suppressed to be low, there is a re-bonding of the electron hole pair. The crystal grain boundary of the center becomes excessive. Such a crystal ingot is inferior in terms of conversion efficiency of the solar cell, and the surface density of the additive is in the range of an optimum value, more preferably in the range of 2.0 to 6.5 / cm 2 , and further preferably The range is 2.5~6.0/cm 2 .

具體的之面密度(個/cm2)為2.0、2.5、3.0、3.5、4.0、4.5、5.0、5.5、6.0。 The specific areal density (pieces/cm 2 ) is 2.0, 2.5 , 3.0, 3.5, 4.0, 4.5, 5.0, 5.5, 6.0.

本發明之矽鑄造用鑄型可藉由公知之方法製造,並無特別限定,但例如可以如下之方式製造。 The cast mold for casting of the present invention can be produced by a known method, and is not particularly limited. For example, it can be produced in the following manner.

即,使脫模材料層之主要材料與上述添加物分散於溶劑中而調製固形物濃度1~5%左右之漿料,將所獲得之漿料塗佈於鑄型之內面,使所獲得之塗膜乾燥.焙燒,獲得脫模材料層。 In other words, the main material of the release material layer and the additive are dispersed in a solvent to prepare a slurry having a solid concentration of about 1 to 5%, and the obtained slurry is applied onto the inner surface of the mold to obtain the obtained slurry. The film is dry. Calcination to obtain a layer of release material.

主要材料之粉末及添加物之粉末之量以脫模材料層之表面中之添加物之面密度成為上述之範圍之方式適當設定即可。 The powder of the main material and the amount of the powder of the additive may be appropriately set so that the surface density of the additive in the surface of the release material layer is within the above range.

作為脫模材料層之主要材料,可使用公知之脫模材料之材料,例如,可列舉平均粒徑0.1~60 μm之氮化矽、氧化矽及該等之混合物之粉末。 As the main material of the release material layer, a material of a known release material can be used, and examples thereof include a tantalum nitride having an average particle diameter of 0.1 to 60 μm, ruthenium oxide, and a powder of the mixture.

具體之平均粒徑(μm)為0.1、0.5、1.0、1.5、2.0、2.5、3.0、3.5、4.0、4.5、5.0、5.5、6.0、6.5、7.0、7.5、8.0、8.5、9.0、9.5、10、15、20、25、30、35、40、45、50、55、60。 The specific average particle diameter (μm) is 0.1, 0.5, 1.0, 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, 5.0, 5.5, 6.0, 6.5, 7.0, 7.5, 8.0, 8.5, 9.0, 9.5, 10 15, 20, 25, 30, 35, 40, 45, 50, 55, 60.

作為溶劑,若為於焙燒步驟中消失且不對脫模材料層產生不良影響者,則無特別限定,例如,可列舉聚乙烯醇。 The solvent is not particularly limited as long as it disappears in the baking step and does not adversely affect the release material layer. For example, polyvinyl alcohol is exemplified.

塗佈、乾燥及焙燒步驟可藉由公知之方法適當設定條件而實施,為了獲得特定之膜厚之脫模材料層,亦可反覆進行複數次塗佈及乾燥步驟。 The coating, drying and calcining steps can be carried out by appropriately setting conditions by a known method, and in order to obtain a release layer of a specific film thickness, a plurality of coating and drying steps can be repeated.

焙燒溫度及其時間亦根據所使用之材料或所形成之脫模材料層之膜厚等條件而定,為800~1100℃左右及1~8小時左右。 The calcination temperature and the time are also determined depending on the material to be used or the film thickness of the layer of the release material to be formed, and are about 800 to 1,100 ° C and about 1 to 8 hours.

具體之焙燒溫度(℃)為800、825、850、875、900、925、950、975、1000、1025、1050、1075、1100,具體之焙燒時間(時間)為1、1.5、2、2.5、3、3.5、4、4.5、5、5.5、6、6.5、7、7.5、8。 The specific calcination temperature (°C) is 800, 825, 850, 875, 900, 925, 950, 975, 1000, 1025, 1050, 1075, 1100, and the specific calcination time (time) is 1, 1.5, 2, 2.5, 3, 3.5, 4, 4.5, 5, 5.5, 6, 6.5, 7, 7.5, 8.

脫模材料層之膜厚為150~600 μm左右。 The film thickness of the release material layer is about 150 to 600 μm.

於脫模材料層之膜厚薄於添加物之粒徑之情形時,顯著地易獲得本發明之效果。相反,於脫模材料層之膜厚厚於添加物之粒徑之情形時,添加物埋入脫模材料層之內部,脫模材料層之表面形狀不由添加物之形狀反映,成為核產生部位之添加物之凸部之密度減少,因此顯著地難以獲得本發明之效果。 When the film thickness of the release material layer is thinner than the particle diameter of the additive, the effects of the present invention are remarkably obtained. On the contrary, when the film thickness of the release material layer is thicker than the particle diameter of the additive, the additive is buried inside the release material layer, and the surface shape of the release material layer is not reflected by the shape of the additive, and becomes a nuclear generating site. The density of the convex portion of the additive is reduced, so that it is remarkably difficult to obtain the effects of the present invention.

具體之膜厚(μm)為150、175、200、225、250、275、300、325、350、375、400、425、450、475、500、525、550、575、600。 The specific film thickness (μm) is 150, 175, 200, 225, 250, 275, 300, 325, 350, 375, 400, 425, 450, 475, 500, 525, 550, 575, 600.

因此,為了一面確保作為脫模材料層之膜厚一面獲得本發明之效果,亦可僅塗佈包含添加物之漿料而形成特定之膜厚之脫模材料層,但亦可藉由於塗佈不包含添加物而僅包含主要材料之漿料之後,塗佈包含添加物之漿料而形成包含複數種之層之脫模材料層。 Therefore, in order to obtain the effect of the present invention while ensuring the film thickness of the release material layer, it is also possible to apply only the slurry containing the additive to form a release material layer having a specific film thickness, but it may also be coated by coating. After the slurry containing only the main material is not contained, the slurry containing the additive is applied to form a release material layer containing a plurality of layers.

如上述般,矽太陽能電池用之矽晶錠中,由於自鑄型之側面核產生就其電池特性之方面而言欠佳,因此脫模材料層較佳為僅設置於鑄型之底板部上表面。於此種情形時,僅於鑄型之底板部上表面形成包含添加物之脫模材料層,於鑄型之側面形成不含添加物之脫模材料層即可。 As described above, in the tantalum ingot for solar cells, since the side core of the mold is poor in terms of battery characteristics, the release material layer is preferably provided only on the bottom plate portion of the mold. surface. In this case, a release material layer containing an additive may be formed only on the upper surface of the bottom plate portion of the mold, and a release material layer containing no additive may be formed on the side surface of the mold.

(矽鑄造方法) (矽 casting method)

本發明之矽鑄造方法之特徵在於:於本發明之矽鑄造用鑄型內,使矽熔融液凝固。根據該方法,可製造一種適用於成本效率較高之太陽能電池之矽晶錠。 The tantalum casting method of the present invention is characterized in that the tantalum melt is solidified in the tantalum casting mold of the present invention. According to this method, a twin ingot suitable for a cost-effective solar cell can be manufactured.

矽鑄造用鑄型內之矽熔融液可於鑄型內使固體之矽原料熔解,或亦可使矽熔融液流入鑄型中。 The crucible melt in the casting mold can melt the solid crucible material in the mold or can flow the crucible melt into the mold.

又,矽熔融液之凝固若為可獲得本發明之效果之範圍內,則其形態並無特別限定,根據所使用之裝置設定適當條件即可。 Further, the solidification of the cerium melt is not particularly limited as long as it is within the range in which the effects of the present invention can be obtained, and appropriate conditions may be set depending on the apparatus to be used.

本發明之矽鑄造方法例如可使用如圖4所示之公知之裝置而實施,但本發明並不限定於該實施形態。 The tantalum casting method of the present invention can be carried out, for example, by using a known apparatus as shown in Fig. 4, but the present invention is not limited to the embodiment.

圖4係表示本發明之矽鑄造方法可應用之鑄造裝置之一例的概略剖面圖。 Fig. 4 is a schematic cross-sectional view showing an example of a casting apparatus to which the crucible casting method of the present invention is applicable.

該裝置通常係為了鑄造多晶矽晶錠而使用,具有構成電阻加熱爐之腔室(密閉容器)7。 This apparatus is generally used for casting a polycrystalline germanium ingot, and has a chamber (closed container) 7 constituting a resistance heating furnace.

於腔室7之內部,配置有石墨製、石英(SiO2)製等之鑄型1,可將腔室7內部之環境保持為密閉狀態。 A mold 1 made of graphite or quartz (SiO 2 ) or the like is disposed inside the chamber 7, and the environment inside the chamber 7 can be kept in a sealed state.

於收納有鑄型1之腔室7內,配置有支撐鑄型1之石墨製之鑄型台3。鑄型台3藉由升降驅動機構12可升降,於其內部使冷卻槽11內之冷媒(冷卻水)循環。 A mold base 3 made of graphite supporting the mold 1 is disposed in the chamber 7 in which the mold 1 is housed. The casting table 3 is lifted and lowered by the elevation drive mechanism 12, and the refrigerant (cooling water) in the cooling tank 11 is circulated inside.

於鑄型台3之上部,配置有石墨製等之外鑄型2,於其中配置有鑄型1。亦可配置如包圍鑄型1之石墨製等之外罩來代替外鑄型2。 A mold 2 other than graphite or the like is disposed on the upper portion of the mold table 3, and a mold 1 is disposed therein. Instead of the outer mold 2, an outer cover such as a graphite made of a mold 1 may be disposed.

以包圍外鑄型2之方式,配置如石墨加熱器之電阻加熱 體10,進而以自上方覆蓋該等之方式配置隔熱材料8。 Arranging resistance heating such as graphite heater in a manner of surrounding the outer mold 2 The body 10 is further provided with the heat insulating material 8 so as to cover the above.

電阻加熱體10可自鑄型1之周圍加熱而使鑄型1內之矽原料4熔解。此處,作為發熱體,可列舉電阻加熱方式,但亦可為感應加熱方式。 The electric resistance heating body 10 can be heated from the periphery of the mold 1 to melt the crucible material 4 in the mold 1. Here, the heating element is a resistance heating method, but may be an induction heating method.

為了檢測鑄型1之底面之溫度,而分別於鑄型1下表面中央附近配置鑄型下熱電偶5,於外鑄型下表面之中央附近配置外鑄型下熱電偶6,將該等之輸出輸入至控制裝置9,控制藉由電阻加熱體10之加熱狀態。上述熱電偶以外亦可配置用於檢測溫度之熱電偶或放射溫度計,又,上述熱電偶設置位置亦並無特別限定。 In order to detect the temperature of the bottom surface of the mold 1, the mold lower thermocouple 5 is placed near the center of the lower surface of the mold 1, and the outer mold type lower thermocouple 6 is placed near the center of the lower surface of the outer mold. The output is input to the control device 9, and the heating state of the heating body 10 is controlled by the electric resistance. A thermocouple or a radiation thermometer for detecting temperature may be disposed in addition to the thermocouple, and the thermocouple installation position is not particularly limited.

腔室7能夠以不使外部之氧氣、氮氣等流入之方式將其內部保持為密閉狀態,通常,於投入多晶矽等矽原料之後且其熔融之前,使腔室7內成為真空,其後導入氬氣等惰性氣體,保持為惰性之環境。 The chamber 7 can maintain the inside of the chamber 7 in a sealed state without flowing external oxygen, nitrogen, or the like. Usually, after the raw material such as polycrystalline germanium is introduced and before it is melted, the inside of the chamber 7 is evacuated, and then argon is introduced. An inert gas such as gas remains in an inert environment.

藉由此種構成之裝置,基本上藉由如下之步驟鑄造多晶矽晶錠:朝鑄型1之矽原料4之填充、藉由脫氣(真空化)及惰性氣體之導入而進行之腔室7內之氣體置換、藉由加熱而進行之矽原料4之熔融、熔融確認與其保持、藉由溫度控制及升降驅動機構12之動作而進行之凝固開始、固化結束確認及退火以及晶錠取出。再者,此處列舉了將矽原料於鑄型內進行加熱、熔融之類型之裝置之例,但此外亦可利用於與矽鑄造用鑄型不同之坩堝等中將矽原料加熱熔融,將矽熔融液注入矽鑄造用鑄型中之類型之裝置等。 With such a device, the polycrystalline germanium ingot is basically cast by the following steps: filling of the raw material 4 of the mold 1, filling by degassing (vacuumization), and introduction of an inert gas. The internal gas replacement, the melting of the raw material 4 by heating, the confirmation of the melting, the holding, the solidification start by the temperature control and the operation of the elevation drive mechanism 12, the completion of the curing, the annealing, and the ingot removal. In addition, although an example of a device in which a raw material of a tantalum is heated and melted in a mold is exemplified here, the niobium raw material may be heated and melted in a crucible or the like different from the mold for casting, and the niobium is heated and melted. The melt is injected into a device of the type used in the casting mold, and the like.

(矽材料) (矽 material)

本發明之矽材料係藉由本發明之矽鑄造方法而製造。 The tantalum material of the present invention is produced by the tantalum casting method of the present invention.

即,本發明之矽材料例如意指藉由使本發明之矽鑄造用鑄型內之矽熔融液凝固而製造之「多晶矽晶錠」、將該「多晶矽晶錠」切割成角柱狀而成之「多晶矽塊」及將該「多晶矽塊」加工成切片而成之「多晶矽晶圓」。該等矽材料適用於成本效果較高之太陽能電池之材料。 In other words, the crucible material of the present invention is, for example, a "polycrystalline ingot" produced by solidifying a crucible melt in a casting mold of the present invention, and cutting the "polycrystalline ingot" into a prismatic shape. "Polycrystalline germanium block" and "polycrystalline germanium wafer" obtained by processing the "polycrystalline germanium block" into a slice. These materials are suitable for materials of solar cells with higher cost effectiveness.

「多晶矽塊」例如可藉由使用帶鋸等公知之裝置,將上述之「多晶矽晶錠」加工成角柱狀、所需之尺寸而獲得。 The "polycrystalline germanium block" can be obtained, for example, by processing the above-mentioned "polycrystalline germanium ingot" into a prismatic shape and a desired size by using a known device such as a band saw.

加工時,可切割有鑄型材料等之雜質擴散之虞之多晶矽晶錠之表面部分,亦可視需要研磨加工多晶矽塊之表面。 During processing, the surface portion of the polycrystalline germanium ingot in which the impurities such as the mold material are diffused may be cut, and the surface of the polycrystalline germanium block may be polished as needed.

「多晶矽晶圓」例如可藉由使用多線切割機等公知之裝置,將上述「多晶矽塊」切片加工成所需之厚度而獲得。 The "polycrystalline germanium wafer" can be obtained, for example, by slicing the above-mentioned "polycrystalline germanium block" into a desired thickness by using a known device such as a multi-wire cutting machine.

現狀下,通常為厚度170~200 μm左右,但作為傾向,有為了成本削減而薄型化之傾向。又,亦可視需要研磨加工多晶矽晶圓之表面。 In the current situation, the thickness is usually about 170 to 200 μm, but there is a tendency to reduce the thickness in order to reduce the cost. Moreover, the surface of the polysilicon wafer can also be polished as needed.

(矽太陽能電池) (矽 solar battery)

本發明之矽太陽能電池係將本發明之矽材料(多晶矽晶圓)用作基板而製造。 The tantalum solar cell of the present invention is produced by using the tantalum material (polycrystalline silicon wafer) of the present invention as a substrate.

矽太陽能電池中存在各種構造者,該等可使用本發明之矽晶圓,藉由公知之太陽能電池製程而製造。例如,於摻雜有p型雜質之矽晶圓之情形時,使n型雜質(例如磷)自表面擴散(摻雜)而形成n型層而形成pn接面,形成表面電極及背面電極而獲得多晶矽太陽能電池單元。同樣地,於摻雜有n型雜質之矽晶圓之情形時,使p型雜質(例如硼)自表面 擴散(摻雜)而形成p型層而形成pn接面,形成表面電極及背面電極而獲得多晶矽太陽能電池單元。或者,除該等利用矽彼此之pn接面者以外,亦有夾持較薄之絕緣層且蒸鍍金屬等之MIS(Metal Insulator Semiconductor,金屬絕緣半導體)型太陽能電池,例如有製造與矽晶圓相反之導電型之非晶質等之矽薄膜,利用不同之構造之p型、n型矽異質接合者等。又,藉由將其複數個電性連接,而獲得多晶矽太陽能電池模組。 There are various constructs in the solar cell, which can be fabricated by the known solar cell process using the germanium wafer of the present invention. For example, in the case of a germanium wafer doped with a p-type impurity, an n-type impurity (for example, phosphorus) is diffused (doped) from the surface to form an n-type layer to form a pn junction, and a surface electrode and a back electrode are formed. A polycrystalline solar cell unit is obtained. Similarly, in the case of a germanium wafer doped with an n-type impurity, a p-type impurity (for example, boron) is self-surfaced. Diffusion (doping) forms a p-type layer to form a pn junction, and a surface electrode and a back surface electrode are formed to obtain a polycrystalline silicon solar cell. Alternatively, in addition to the pn junctions of the ruthenium, there is also a MIS (Metal Insulator Semiconductor) type solar cell which is formed by sandwiching a thin insulating layer and vapor-deposited metal, for example, manufacturing and twinning. A thin film of amorphous or the like having the opposite conductivity type is a p-type or n-type germanium heterojunction having a different structure. Moreover, a polycrystalline germanium solar cell module is obtained by electrically connecting a plurality of them.

如上述般,本說明書中,作為包含「太陽能電池單元」與「太陽能電池模組」之概念,簡稱為「太陽能電池」。因此,例如,若有記載為「多晶矽太陽能電池」者,則其為包含「多晶矽太陽能電池單元」及「多晶矽太陽能電池模組」之含義。 As described above, in the present specification, the concept of "solar battery unit" and "solar battery module" is simply referred to as "solar battery". Therefore, for example, if it is described as "polycrystalline solar cell", it means "polycrystalline solar cell" and "polycrystalline solar cell module".

[實施例] [Examples]

以下根據試驗例具體地說明本發明,但並非藉由該等試驗例限定本發明。 Hereinafter, the present invention will be specifically described based on the test examples, but the present invention is not limited by the test examples.

(試驗例1)關於脫模材料層中所含之添加物之平均粒徑之研究 (Test Example 1) Study on the average particle diameter of the additive contained in the release material layer

使用僅於鑄型底板部上表面塗佈形成有包含具有特定之平均粒徑之各種材質之添加物之脫模材料層之石英製之矽鑄造用鑄型1,製造多晶矽晶錠,自所獲得之晶錠加工多晶矽晶圓,使用所獲得之晶圓製作矽太陽能電池,評價所獲得之太陽能電池之輸出與添加物之平均粒徑之關係。 A polycrystalline germanium ingot is produced by coating a casting mold 1 made of quartz, which is formed of a release material layer containing an additive of various materials having a specific average particle diameter, on the upper surface of the mold base portion. The ingot is processed into a polycrystalline silicon wafer, and a solar cell is fabricated using the obtained wafer, and the relationship between the output of the obtained solar cell and the average particle diameter of the additive is evaluated.

將作為脫模材料層之主要材料之粒徑1~60 μm之氮化矽 粉末與3%聚乙烯醇水溶液以重量比成為1:1之方式混合,添加表1所示之添加物之粉末且使其分散而獲得漿料A。 Niobium nitride having a particle diameter of 1 to 60 μm as a main material of the release material layer The powder was mixed with a 3% polyvinyl alcohol aqueous solution in a weight ratio of 1:1, and the powder of the additive shown in Table 1 was added and dispersed to obtain a slurry A.

再者,添加物之粉末之量係如下述般以添加物之面密度成為約3.0個/cm2之方式適當設定。 In addition, the amount of the powder of the additive is appropriately set so that the surface density of the additive becomes about 3.0 / cm 2 as follows.

同樣地,將氮化矽粉末與3%聚乙烯醇水溶液以重量比成為1:1之方式混合,且使其分散而獲得漿料B。 Similarly, the tantalum nitride powder and the 3% polyvinyl alcohol aqueous solution were mixed at a weight ratio of 1:1, and dispersed to obtain a slurry B.

鑄型之側面部僅塗佈漿料B而於約50℃下使其乾燥,將所獲得之塗膜於900℃下焙燒2小時,於鑄型之側面部形成膜厚約250 μm之脫模材料層。 The side surface of the mold was coated with only the slurry B and dried at about 50 ° C, and the obtained coating film was baked at 900 ° C for 2 hours to form a release film having a film thickness of about 250 μm on the side surface portion of the mold. Material layer.

表1中將塗佈方法表示為「表層」之脫模材料層包括不含添加物之下層與包含添加物之上層,以如下之方式形成。 The release material layer in which the coating method is referred to as "surface layer" in Table 1 includes a layer containing no additive and a layer containing an additive, and is formed in the following manner.

將所獲得之漿料B僅於鑄型之底板部上表面塗佈且於約50℃下使其乾燥,繼而將所獲得之漿料A僅於鑄型之底板部上表面塗佈且於約50℃下使其乾燥,將所獲得之塗膜於900℃下焙燒2小時,形成添加物之面密度約3.0個/cm2、膜厚約250 μm之脫模材料層。 The obtained slurry B is applied only to the upper surface of the bottom plate portion of the mold and dried at about 50 ° C, and then the obtained slurry A is applied only to the upper surface of the bottom plate portion of the mold and is about The film was dried at 50 ° C, and the obtained coating film was baked at 900 ° C for 2 hours to form a release material layer having an areal density of about 3.0 /cm 2 and a film thickness of about 250 μm.

另一方面,表1中將塗佈方法表示為「混合」之脫模材料層由包含添加物之層組成,以如下方式形成。 On the other hand, the release material layer in which the coating method is shown as "mixing" in Table 1 is composed of a layer containing an additive, and is formed in the following manner.

將所獲得之漿料A僅於鑄型之底板部上表面塗佈且於約50℃下使其乾燥,將所獲得之塗膜於900℃下焙燒2小時,形成添加物之面密度約3.0個/cm2、膜厚約250 μm之脫模材料層。 The obtained slurry A was applied only to the upper surface of the bottom plate portion of the mold and dried at about 50 ° C, and the obtained coating film was baked at 900 ° C for 2 hours to form an areal density of about 3.0. A release material layer of /cm 2 and a film thickness of about 250 μm.

再者,為了獲得特定之膜厚,而適當反覆進行漿料之塗佈與乾燥。 Further, in order to obtain a specific film thickness, the slurry is applied and dried in an appropriate manner.

又,上述焙燒係鑄型側面及底板部上表面之塗膜同時進行。 Further, the coating film on the side surface of the baking mold and the upper surface of the bottom plate portion are simultaneously performed.

又,本試驗例中,使用包含作為主要材料之氮化矽粉末與添加物之漿料A,但亦可同樣地使用僅包含添加物之漿料。 Further, in the test example, the slurry A containing the tantalum nitride powder as the main material and the additive was used, but a slurry containing only the additive may be used in the same manner.

又,此處表示了使用氮化矽作為脫模材料之主要材料之例,但本發明並不限定於氮化矽,即便係其他材料或氮化矽與氧化矽之複數之層構造等,只要為於可獲得本發明之效果之範圍內即可。 Further, although an example in which tantalum nitride is used as a main material of a mold release material is shown here, the present invention is not limited to tantalum nitride, and even if it is another material or a layer structure of tantalum nitride and tantalum oxide, It suffices that the effect of the present invention can be obtained.

於圖4所示之鑄造裝置內之由隔熱材料8包圍之石墨製之鑄型台3(880 mm×880 mm×厚度200 mm)上,設置石墨製之外鑄型2(內部尺寸:900 mm×900 mm×高度460 mm、底板壁厚及側面壁厚20 mm),於其中設置石英製之鑄型1(內部尺寸:830 mm×830 mm×420 mm、底板壁厚及側面壁厚22 mm)。又,將溫度測定用之熱電偶5及6分別設置於鑄型1下表面中央附近及外鑄型2下表面中央附近之2處。 On the graphite casting table 3 (880 mm × 880 mm × thickness 200 mm) surrounded by the heat insulating material 8 in the casting apparatus shown in Fig. 4, a cast outer mold 2 is provided (internal size: 900) Mm × 900 mm × height 460 mm, wall thickness of the bottom plate and side wall thickness 20 mm), in which the mold 1 made of quartz is provided (internal size: 830 mm × 830 mm × 420 mm, floor thickness and side wall thickness 22 Mm). Moreover, the thermocouples 5 and 6 for temperature measurement were respectively provided in the vicinity of the center of the lower surface of the mold 1 and the vicinity of the center of the lower surface of the outer mold 2, respectively.

繼而,將以晶錠之比電阻成為約1.4 Ωcm之方式調整硼之濃度而得之矽原料4之420 kg裝入鑄型1中後,將裝置之腔室7內進行真空處理,以氬氣進行置換。其後,作為裝置之加熱構件,使用位於鑄型旁邊之電阻加熱體(石墨加熱器)10及控制裝置9將矽原料4熔解,確認所有原料之熔解之後,使用控制裝置9及具備冷卻槽11之升降驅動機構 12,以特定之條件(凝固速度約8 mm/小時)使矽單向凝固。 Then, the concentration of boron is adjusted so that the specific resistance of the ingot is about 1.4 Ωcm, and 420 kg of the raw material 4 is placed in the mold 1, and the chamber 7 of the apparatus is vacuum-treated with argon gas. Perform the replacement. Thereafter, as a heating member of the apparatus, the crucible raw material 4 is melted by using a resistance heating body (graphite heater) 10 and a control device 9 located beside the mold, and after confirming melting of all the raw materials, the control device 9 and the cooling tank 11 are used. Lifting drive mechanism 12. The crucible is solidified in one direction under specific conditions (solidification speed of about 8 mm/hour).

使用帶鋸將所獲得之各者之多晶矽晶錠加工成多晶矽塊(156 mm×156 mm×200 mm)25個,進而使用線鋸進行切片,獲得多晶矽晶圓(156 mm×156 mm×厚度0.18 mm)約12,000片。 Each of the obtained polycrystalline germanium ingots was processed into a polycrystalline germanium block (156 mm × 156 mm × 200 mm) using a band saw, and then sliced using a wire saw to obtain a polycrystalline germanium wafer (156 mm × 156 mm × thickness 0.18). Mm) About 12,000 pieces.

將所獲得之多晶矽晶圓投入通常之太陽能電池單元製程,每1個晶錠製作約12,000個太陽能電池單元(外形156 mm×156 mm×厚度0.18 mm),測定其輸出(W)。以各晶錠為單位算出輸出之平均值,將標準化之結果示於表1中。 The obtained polycrystalline silicon wafer was put into a usual solar cell process, and about 12,000 solar cells (outer shape: 156 mm × 156 mm × thickness 0.18 mm) were produced for each ingot, and the output (W) thereof was measured. The average value of the output was calculated in units of each ingot, and the results of the standardization are shown in Table 1.

標準化係使用自藉由形成有不含添加物之脫模材料層之鑄型所鑄造之晶錠所獲得之太陽能電池單元之平均輸出,算出將其設為100時之以各晶錠為單位所算出之輸出之平均值。 The standardization system uses the average output of the solar battery cells obtained from the ingot obtained by forming the mold having the release material layer containing no additive, and calculates the ingot unit in the case where it is set to 100. The average of the calculated outputs.

認為1個晶錠內太陽能電池之輸出降低之原因之大部分係於矽原料作為太陽能電池用充分地高純度之情形時,晶錠之上部側之結晶缺陷、及自晶錠之底部側之鑄型及脫模材料之雜質擴散中之任一者。因此,於特定之條件下單向凝固之晶錠中,由於凝固時間大致固定,因此晶錠之底部側之雜質擴散無較大差別,可藉由比較自各晶錠所獲得之太陽能電池單元之輸出平均而評價晶錠上部側之結晶缺陷。 It is considered that most of the causes of the decrease in the output of the solar cell in one ingot are in the case where the raw material of the crucible is sufficiently high-purity for the solar cell, the crystal defect on the upper side of the ingot, and the casting on the bottom side of the ingot. Any of the types and diffusion of impurities of the release material. Therefore, in the ingot which solidifies unidirectionally under specific conditions, since the solidification time is substantially fixed, there is no significant difference in impurity diffusion on the bottom side of the ingot, and the output of the solar battery cell obtained by comparing each ingot can be compared. The crystal defects on the upper side of the ingot were evaluated on average.

又,於脫模材料層中所含之添加物之粒徑較大之情形時,多晶矽晶錠之塊加工時,於底部側產生認為係應力所 致之破裂。該破裂之有無亦示於表1中。 Further, when the particle diameter of the additive contained in the release material layer is large, when the block of the polycrystalline germanium ingot is processed, the stress is considered to be on the bottom side. Caused by the breakdown. The presence or absence of this rupture is also shown in Table 1.

進而,圖1中,表示矽鑄造用鑄型之脫模材料層中所含之添加物之粒徑與太陽能電池單元之平均輸出之關係。 Further, Fig. 1 shows the relationship between the particle diameter of the additive contained in the release material layer of the casting mold for casting and the average output of the solar battery cells.

自表1及圖1之結果可知,太陽能電池單元之平均輸出與添加物之材質為碳化矽、氧化矽、氮化矽還是石墨無關,依賴於添加物之平均粒徑。即,於添加物之平均粒徑為0.1~3.0 mm之範圍內之情形時,較僅形成有不含添加物之脫模材料層之情形平均輸出提高。尤其是於添加物之平均 粒徑為0.3~2.8 mm之範圍內之情形時,相對之平均輸出之提高率為0.5%以上,於添加物之平均粒徑為0.8~2.2 mm之範圍內之情形時,成為相對之平均輸出之提高率為1.0%以上之較佳之結果。因此,可知使用如此平均輸出提高之太陽能電池單元所製作之太陽能電池模組之輸出提高。 From the results of Table 1 and Figure 1, it can be seen that the average output of the solar cell is independent of whether the material of the additive is tantalum carbide, tantalum oxide, tantalum nitride or graphite, depending on the average particle diameter of the additive. That is, in the case where the average particle diameter of the additive is in the range of 0.1 to 3.0 mm, the average output is improved as compared with the case where the release material layer containing no additive is formed. Especially for the average of additives When the particle size is in the range of 0.3 to 2.8 mm, the relative average output is increased by 0.5% or more, and when the average particle diameter of the additive is in the range of 0.8 to 2.2 mm, it becomes a relative average output. The improvement rate is preferably 1.0% or more. Therefore, it is understood that the output of the solar cell module fabricated using the solar cell having such an average output is improved.

又,於添加物之平均粒徑於0.1~3.0 mm之範圍之情形時,無矽塊之底部側之破裂,較良好。 Further, in the case where the average particle diameter of the additive is in the range of 0.1 to 3.0 mm, the crack on the bottom side of the flawless block is good.

(試驗例2)關於脫模材料層中所含之添加物之面密度之研究 (Test Example 2) Study on the areal density of the additive contained in the release material layer

使用僅於鑄型底板部上表面塗佈形成有具有特定之添加物之面密度且包含平均粒徑0.8 mm之各種材質之添加物之脫模材料層之石英製之矽鑄造用鑄型1,以與試驗例1同樣之方式,製造多晶矽晶錠,自所獲得之晶錠加工多晶矽晶圓,使用所獲得之晶圓製作矽太陽能電池,評價所獲得之太陽能電池之輸出與添加物之面密度之關係。 A casting mold 1 made of quartz, which is formed of a release material layer having an additive surface material having an additive surface density of a specific additive and having an average particle diameter of 0.8 mm, is applied only to the upper surface of the mold base portion. In the same manner as in Test Example 1, a polycrystalline germanium ingot was produced, a polycrystalline silicon wafer was processed from the obtained ingot, and a solar cell was fabricated using the obtained wafer, and the surface density of the output of the obtained solar cell and the additive was evaluated. Relationship.

將所獲得之結果示於表2及圖2中。圖2中,表示矽鑄造用鑄型之脫模材料層中所含之添加物之面密度與太陽能電池單元之平均輸出之關係。 The results obtained are shown in Table 2 and Figure 2. Fig. 2 shows the relationship between the areal density of the additive contained in the release material layer of the casting mold for casting and the average output of the solar battery cells.

自表2及圖2之結果可知,太陽能電池單元之平均輸出與添加物之材質及脫模材料層之塗佈方法無關,依賴於添加物之面密度。即,於添加物之面密度為0.2~8.5個/cm2之範圍內之情形時,較僅形成有不含添加物之脫模材料層之情形平均輸出提高。尤其是於添加物之面密度為2.0~6.5個/cm2之範圍內之情形時,相對之平均輸出之提高率為0.5%以上,於添加物之面密度為2.5~6.0個/cm2之範圍內之情形時,成為相對之平均輸出之提高率為1.0%以上之較佳之結果。因此,可知使用如此平均輸出提高之太陽能電池單元所製作之太陽能電池模組之輸出提高。 From the results of Table 2 and Figure 2, it is known that the average output of the solar cell unit is independent of the material of the additive and the coating method of the release material layer, depending on the areal density of the additive. That is, in the case where the surface density of the additive is in the range of 0.2 to 8.5 /cm 2 , the average output is improved as compared with the case where the release material layer containing no additive is formed. In particular, when the surface density of the additive is in the range of 2.0 to 6.5/cm 2 , the increase rate of the average output is 0.5% or more, and the surface density of the additive is 2.5 to 6.0 pieces/cm 2 . In the case of the range, it is a preferable result that the increase rate of the average output is 1.0% or more. Therefore, it is understood that the output of the solar cell module fabricated using the solar cell having such an average output is improved.

再者,試驗例2中,由於使用平均粒徑0.8 mm之比較細小之添加物,因此無矽塊之底部側之破裂,較良好。 Further, in Test Example 2, since a relatively small additive having an average particle diameter of 0.8 mm was used, the crack on the bottom side of the non-twisted block was excellent.

1‧‧‧鑄型 1‧‧‧ casting

2‧‧‧外鑄型 2‧‧‧Outer mold

3‧‧‧鑄型台 3‧‧‧ cast table

4‧‧‧矽原料 4‧‧‧矽 Raw materials

5‧‧‧鑄型下熱電偶 5‧‧‧Moulding thermocouple

6‧‧‧外鑄型下熱電偶 6‧‧‧Outer mold thermocouple

7‧‧‧腔室 7‧‧‧ chamber

8‧‧‧隔熱材料 8‧‧‧Insulation materials

9‧‧‧控制裝置 9‧‧‧Control device

10‧‧‧電阻加熱體(石墨加熱器) 10‧‧‧Resistive heating body (graphite heater)

11‧‧‧冷卻槽 11‧‧‧Cooling trough

12‧‧‧升降驅動機構 12‧‧‧ Lifting drive mechanism

圖1係表示矽鑄造用鑄型之脫模材料層中所含之添加物 之粒徑與太陽能電池單元之平均輸出之關係的圖(試驗例1)。 Figure 1 is a view showing an additive contained in a release material layer of a casting mold for casting. Graph of the relationship between the particle diameter and the average output of the solar cell (Test Example 1).

圖2係表示矽鑄造用鑄型之脫模材料層中所含之添加物之面密度與太陽能電池單元之平均輸出之關係的圖(試驗例2)。 Fig. 2 is a graph showing the relationship between the areal density of the additive contained in the release material layer of the casting mold for casting and the average output of the solar battery cells (Test Example 2).

圖3係表示藉由矽熔融液之單向凝固所製造之通常之多晶矽晶錠之高度方向之位置與所製作之太陽能電池單元之平均輸出之關係的概念圖。 Fig. 3 is a conceptual diagram showing the relationship between the position of the height direction of a usual polycrystalline germanium ingot produced by unidirectional solidification of a crucible melt and the average output of the produced solar cell.

圖4係表示本發明之矽鑄造方法可應用之鑄造裝置之一例的概略剖面圖。 Fig. 4 is a schematic cross-sectional view showing an example of a casting apparatus to which the crucible casting method of the present invention is applicable.

Claims (8)

一種矽鑄造用鑄型,其係使矽熔融液凝固者,且於上述矽鑄造用鑄型之內壁之至少底板部上表面設置有包含平均粒徑0.1~3.0 mm之添加物之脫模材料層。 A casting mold for casting a crucible, wherein a mold release material containing an additive having an average particle diameter of 0.1 to 3.0 mm is provided on at least an upper surface of an inner wall of the inner wall of the casting mold. Floor. 如請求項1之矽鑄造用鑄型,其中上述脫模材料層僅設置於上述底板部上表面。 The casting mold according to claim 1, wherein the release material layer is provided only on the upper surface of the bottom plate portion. 如請求項1之矽鑄造用鑄型,其中上述矽鑄造用鑄型包含以石墨或石英(二氧化矽)為主成分之材質。 The mold for casting according to claim 1, wherein the mold for casting the tantalum includes a material mainly composed of graphite or quartz (cerium oxide). 如請求項1之矽鑄造用鑄型,其中上述添加物係以選自氮化矽、碳化矽、氧化矽及石墨中之至少一者為主成分。 The casting mold according to claim 1, wherein the additive is mainly composed of at least one selected from the group consisting of tantalum nitride, tantalum carbide, niobium oxide, and graphite. 如請求項1之矽鑄造用鑄型,其中上述脫模材料層之表面以面密度0.2~8.5個/cm2包含上述添加物。 The mold for casting according to claim 1, wherein the surface of the release material layer contains the above additive at an areal density of 0.2 to 8.5 /cm 2 . 一種矽鑄造方法,其係於如請求項1之矽鑄造用鑄型內使矽熔融液凝固。 A tantalum casting method for solidifying a tantalum melt in a casting mold as claimed in claim 1. 一種矽材料之製造方法,其係使用藉由如請求項6之矽鑄造方法所鑄造之矽獲得矽材料。 A method of producing a tantalum material obtained by using a tantalum cast by a tantalum casting method as claimed in claim 6. 一種太陽能電池之製造方法,其係將藉由如請求項7之製造方法所製造之矽材料用作基板而獲得太陽能電池。 A method of manufacturing a solar cell, which is obtained by using a tantalum material manufactured by the manufacturing method of claim 7 as a substrate.
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