TW201329661A - Pressure control system and method - Google Patents

Abstract

The present invention discloses a test pressure control system and method, and particularly discloses a test pressure control system and method capable of transferring the test pressure into vacuum (or negative pressure) and transferring the test pressure into positive pressure. The test pressure control system comprises a vacuum control module for providing vacuum and a positive pressure control module for providing positive pressure. Therefore, the test pressure control system has both functions of providing vacuum to test device (or area) and providing positive pressure to test device (or area). The test pressure control system is cheaper than the conventional test pressure control system because both of vacuum control module and positive pressure control module are fabricated by the cheap components, for example electrically-controlled proportioning valve and solenoid valve. Therefore, the cost of testing is decreased significantly by the test pressure control system.

Description

Test pressure control system and method

The present invention provides a test pressure control system and method, and more particularly to a test pressure control system and method that can be switched between vacuum (or negative pressure) and positive pressure.

With the rapid development of integrated circuit components (ICs) and microelectromechanical components (MEMS), more and more ICs and MEMS with different functions and types have been designed and developed, and the required test environments and conditions are also coming. The more diverse and complex. In particular, the test pressures required for different types of ICs or MEMS are different. Some need to be tested under vacuum, and some need to be tested under high pressure, but the general test machine often only provides a specific pressure. Test, such as vacuum, or a specific positive pressure, but can not control the vacuum or positive pressure, and can not switch between vacuum and positive pressure, so it can not provide the same test machine different The test pressure (vacuum and positive pressure) is tested on the component to be tested, so that the traditional test machine can not combine the test under vacuum and the test under positive pressure.

In view of this, it has been developed to test different vacuum or positive pressure test machines in stages, and provide different vacuum or positive pressure to test various ICs and MEMS, but such test machines often need High-cost and complex vacuum pumps or pressure control systems can achieve segmental control of vacuum or positive pressure. These expensive equipment are a heavy burden for test costs and reduce test costs today ( The cost down) requirements are mutually exclusive. Secondly, such test machines are still unable to switch between vacuum and positive pressure on the same machine, and cannot simultaneously provide vacuum for testing and positive pressure for testing, but only for vacuum. Segmentation control, or segmentation control only for positive pressure. However, for many ICs or MEMS, it is necessary to test under vacuum and positive pressure. In particular, some pressure sensors or pressure sensing components need to be tested under several different test pressures. In particular, it is necessary to test under vacuum and positive pressure at the same time. Therefore, it is often necessary to test on different test machines. The time required for these expensive test machines to be converted between machines with different test pressure tests, Not only increases the time and cost of testing, but also reduces the productivity of the test.

Therefore, there is a need for a test pressure control system that can be structurally and simply assembled, can be switched between vacuum (or negative pressure) and positive pressure, while providing vacuum for testing and positive pressure testing, and a low-cost test pressure control system. Test the cost and time and increase the capacity of the test.

It is an object of the present invention to provide a test pressure control system that is simple in construction and assembly, and low in cost, and can be switched between vacuum (or negative pressure) and positive pressure while providing vacuum test and positive pressure to the same test machine. The function of the test, and the vacuum and positive pressure can be segmented.

It is an object of the present invention to provide a test pressure control method which can provide vacuum (or negative pressure) and positive pressure to the same test machine pair IC or MEMS by a simple and low-cost test pressure control system. (Pressure sensor or pressure sensing element) is tested and segmented control of vacuum and positive pressure.

According to an aspect of the present invention, there is provided a test pressure control system comprising: a vacuum control mechanism coupled to a test zone for controlling a vacuum or a negative pressure of a test component to be tested; and a positive pressure The control mechanism is connected to the test area for controlling the positive pressure during the test area of the test component, wherein the test pressure control system can be in accordance with the type of the component to be tested and the required test pressure (vacuum and positive pressure) in the vacuum The control mechanism is switched between the control mechanism and the positive pressure control mechanism to provide the vacuum (or negative pressure) and pressure (or positive pressure) required for testing the component to be tested in the test zone. When testing under vacuum (or negative pressure), the vacuum control mechanism communicates with the test zone to provide a predetermined degree of vacuum (or negative pressure), and the positive pressure control mechanism is closed without communicating with the test zone. Avoid interference with the vacuum in the test area. When testing under positive pressure, the positive pressure control mechanism will communicate with the test zone to provide a predetermined positive pressure, and the vacuum control mechanism will be closed without communicating with the test zone to avoid interference with the pressure in the test zone. Since the vacuum control mechanism and the positive pressure control mechanism are assembled according to a special design configuration of the low-cost proportional valve and the electromagnetic valve, the test pressure control system is not only inexpensive, easy to assemble, but also provides vacuum (or Negative pressure) and positive pressure test function.

According to another aspect of the present invention, the present invention provides a test pressure control system, the steps comprising: (1) providing a test pressure system, wherein the test pressure control system comprises a pumping pump, a vacuum proportional valve, and a vacuum control mechanism composed of a low-cost and simple-assembled component such as a vacuum solenoid valve, and a positive pressure supply source, at least a positive pressure proportional valve, a first positive pressure solenoid valve, and a second positive pressure electromagnetic a positive pressure control mechanism consisting of a valve and other components that are inexpensive and simple to assemble; (2) a vacuum control step that controls the test zone to reach a predetermined degree of vacuum by pumping a test zone; (3) positive pressure a control step of controlling the test zone to reach a predetermined positive pressure by pumping the test zone with a positive pressure supply; and (4) a pressure relief step of connecting the test zone to the outside atmosphere by opening the second positive pressure solenoid valve Let the test area balance with the external atmospheric pressure. Wherein, the test pressure control system tests the preset vacuum or negative pressure of the test zone by the vacuum control step of step (2), and converts to perform the step (3) positive pressure control step to provide a preset positive pressure to the test zone. Before the test, the step (4) pressure relief step is required to avoid excessively rapid airing or inflation when the vacuum (or negative pressure) is converted into a positive pressure to cause damage to the component to be tested in the test area. Similarly, the test pressure control system tests the test zone with a preset positive pressure by the step (3) positive pressure control step, and converts it into a step (2) vacuum control step to provide a preset vacuum or negative pressure to the test zone. Before performing the test, the step (4) pressure relief step is required to avoid excessively rapid pumping of the device under test to cause damage to the component to be tested in the test zone when the positive pressure is converted into a vacuum (or a negative pressure). The vacuum control mechanism and the positive pressure control mechanism configured by the low-cost proportional valve and the solenoid valve constitute a test pressure control system, so that the same test machine (or test zone) can be under vacuum (negative pressure) and positive pressure The test pressure control method is freely convertible, and it is tested under vacuum (negative pressure) and tested under positive pressure.

Accordingly, the present invention provides a test pressure control system and method that provides a test machine that can be free between vacuum (negative pressure) and positive pressure by a combination of a low cost and simple configuration of a proportional valve and a solenoid valve. Conversion, and both provide and control vacuum (negative pressure) for testing and provide control and control of positive pressure for testing, thereby reducing test cost and time, and increasing test yield.

Some embodiments of the invention are described in detail below. However, the present invention may be widely practiced in other embodiments in addition to the detailed description. That is, the scope of the present invention is not limited by the embodiments of the present invention, and the scope of the patent application proposed by the present invention shall prevail. In the following, when the elements or steps in the embodiments of the present invention are described in a single element or step description, the present invention should not be construed as limiting, that is, the following description does not particularly emphasize the numerical limitation. The spirit and scope of application can be derived from the structure and method in which many components or structures coexist. In addition, in the present specification, the various parts of the elements are not drawn in full accordance with the dimensions, and some dimensions may be exaggerated or simplified compared to other related dimensions to provide a clearer description to enhance the understanding of the present invention. The prior art of the present invention, which is used in the prior art, is only referred to herein by reference.

Referring to the first figure, which is a simplified schematic diagram of a test pressure control system 100 in accordance with one embodiment of the present invention. The test pressure control system 100 is coupled to a test station or test area 400 on a test machine by a conduit. The test pressure control system 100 includes a vacuum control mechanism 200 for providing a vacuum or negative pressure for measuring the component to be tested in the test zone 400, and a positive pressure control mechanism 300 for providing and controlling the test zone 400. The positive pressure of the measuring component is measured. Therefore, the test pressure control system 100 can switch between the vacuum control mechanism 200 and the positive pressure control mechanism 300, and provide the test zone 400 to be tested according to the required test vacuum (or negative pressure) and pressure (positive pressure). The degree of vacuum (or negative pressure) and pressure (positive pressure) required for component testing, in particular, the provision of a pressure sensor or pressure sensing element from vacuum (or negative pressure) to positive pressure (or high pressure). Wherein, the vacuum control mechanism 200 and the positive pressure control mechanism 300 can be connected to the test zone 400 (or the test machine) by the same pipeline, and respectively provide the test zone 400 (or test machine) vacuum (or negative pressure) and positive Pressing (or high pressure) for testing, as shown in the first figure, but the vacuum control mechanism and the positive pressure control mechanism can also be connected to the test area (or test machine) by different pipes, respectively, and the test areas are respectively provided. Or test machine) vacuum (or negative pressure) and positive pressure (or high pressure) for testing.

Referring to the second figure, it is a schematic diagram of a detailed configuration of the test pressure control system 100. The vacuum control mechanism 200 in the test pressure control system 100 includes a pumping pump 202 for pumping the test zone 400 to provide the vacuum (or negative pressure) required for the test zone 400, a vacuum proportional valve 204, For adjusting the pumping amount of the pumping pump 202 to the test zone 400, and adjusting the vacuum degree (or negative pressure) in the control test zone 400, and a vacuum solenoid valve 206 for controlling whether the pumping pump 202 is tested and tested. The zone 400 is in communication and the vacuum control mechanism 200 (or the pumping pump 202) is controlled to evacuate the test zone 400. The pumping pump 202 and the vacuum proportional valve 204 are connected to each other by a pipeline. The vacuum solenoid valve 206 is interposed between the vacuum proportional valve 204 and the test zone 400, and is connected to the vacuum proportional valve 204 and the test zone 400 by a pipeline, respectively.

When the test zone 400 requires vacuum or negative pressure for testing, the vacuum proportional valve 204 and the vacuum solenoid valve 206 are opened, so that the pumping pump 202 is in communication with the test zone 400, and the gas in the test zone 400 can be withdrawn and passed via The vacuum proportional valve 204 adjusts the amount of pumping and pumping rate of the pumping pump 202 to the test zone 400, and can accurately bring the test zone 400 to a preset vacuum or negative pressure. Therefore, the use of a pumping pump which is generally inexpensive and can achieve a degree of vacuum, such as a vacuum pump which generally cannot control different degrees of vacuum or a generally simple vacuum pump, can provide different vacuum or negative pressure in the test zone 400, There is no need to use a special (vacuum) pump that is expensive and structurally complex to achieve different vacuum or negative pressure, as is the case with conventional test pressure control systems. The vacuum proportional valve 204 is an electronically controlled proportional valve, and the vacuum degree control range is about -101.3kpa-0kpa, but not limited thereto, but can be electronically controlled according to design and requirements. Proportional valve.

In addition, the vacuum control mechanism 200 further includes a vacuum filter 208 disposed between the vacuum solenoid valve 206 and the test zone 400, and connected to the vacuum solenoid valve 206 and the test zone 400, respectively, for use in the test zone. 400 extracted gas is filtered, and the gas to be extracted will remove the damage caused by the vacuum control mechanism 200, so as to prevent the substances from causing damage to the pumping pump 202, the vacuum proportional valve 204 or the vacuum solenoid valve 206. .

The positive pressure control mechanism 300 in the test pressure control system 100 includes a positive pressure supply source 302 for providing gas to the test zone 400 to provide positive pressure, and a plurality of positive pressure proportional valves 308a, 308b, 308c for controlling different A positive pressure range, a first positive pressure solenoid valve 312 for controlling whether the test zone 400 is electrically connected to the positive pressure proportional valve 308a, 308b, or 308c, and a second positive pressure solenoid valve 314 for controlling the first positive Whether the pressure solenoid valve 312 is electrically connected to the test zone 400. The positive pressure proportional valves 308a, 308b, and 308c are disposed in parallel with each other to provide a positive pressure supply source 302 and a first positive pressure solenoid valve 312, and the pipelines are respectively connected to the positive pressure supply source 302 and the first positive pressure solenoid valve 312. connection. The first positive pressure solenoid valve 312 is disposed between the positive pressure proportional valves 308a, 308b, 308c and the test zone 400 connected in parallel with each other, and is respectively connected with the positive pressure proportional valves 308a, 308b, 308c and the test zone 400 in parallel. connection. The first positive pressure solenoid valve 312 causes the positive pressure proportional valves 308a, 308b, 308c to communicate with the test zone 400 when opened, and when closed, the test zone 400 communicates with the outside atmosphere, ie, the first positive pressure solenoid valve 312 is When connected, it will connect to the outside atmosphere. A second positive pressure solenoid valve 314 is disposed between the first positive pressure solenoid valve 312 and the test zone 400, and is connected to the first positive pressure solenoid valve 312 and the test zone 400 by a pipeline.

In the embodiment shown in the second figure, the positive pressure control mechanism 300 has three positive pressure proportional valves connected in parallel with each other, such as a first positive pressure proportional valve 308a, a second positive pressure proportional valve 308b, and a third positive pressure proportional valve 308c. The three have different pressure ranges, wherein the positive pressure control range of the first positive pressure proportional valve 308a is between 0 kPa and 100 kPa, and the positive pressure control range of the second positive pressure proportional valve 308b is between 0 kPa and 500 kPa. And the positive pressure control range of the third positive pressure proportional valve 308c is between 0 kPa and 900 kPa, and the range of the positive pressure supply source 302 to the inflation rate and the inflation rate of the test zone 400 can be separately controlled to segment The manner of regulation allows the test zone 400 to reach a range of positive or high pressures, and can be adapted to the different test pressures required to test the pressure sensing components and the test pressure requirements of the different types of components to be tested. The pressure range of the first positive pressure proportional valve 308a, the second positive pressure proportional valve 308b, and the third positive pressure proportional valve 308c exemplified above is described. For example, the component to be tested needs to be tested at a pressure of 50 kPa. When the required test pressure falls within the pressure range of the first positive pressure proportional valve 308a 0kpa-100kpa, that is, the first positive pressure proportional valve 308a whose opening pressure ranges from 0kpa to 100kpa, and the second positive pressure proportional valve 308b The third positive pressure proportional valve 308c is closed, and the first positive pressure proportional valve 308a adjusts the inflation amount and the inflation rate of the positive pressure supply source 302 to the test zone 400, so that the positive pressure supply source 302 is fixed. The amount of inflation and the rate of inflation rate the test zone 400 while maintaining the pressure within the test zone 400 at a pressure of 50 kPa. Similarly, when the required test pressure falls within the positive pressure control range of the second positive pressure proportional valve 308b 0kpa-500kpa, the second positive pressure proportional valve 308b is opened for pressure regulation, and the first positive pressure proportional valve is closed. 308a and the third positive pressure proportional valve 308c, and when the required test pressure falls within the positive pressure control range of the third positive pressure proportional valve 308c 0kpa-900kpa, that is, the third positive pressure proportional valve 308c is opened for pressure regulation, The first positive pressure proportional valve 308a and the second positive pressure proportional valve 308b are closed.

However, the number of positive pressure proportional valves in the positive pressure control mechanism is not limited to the embodiment shown in the second figure, but the number of positive pressure proportional valves can be reduced according to requirements, for example, one or two. However, the positive pressure control mechanism has at least one positive pressure proportional valve, or can also increase the number of positive pressure proportional valves, for example, four, five, six or even more, so that the positive pressure control mechanism can carry more segments. Positive pressure control, in theory, can increase the pressure control range of positive pressure control mechanism 300 (or pressure control system 100) as the positive pressure proportional valve with a higher positive pressure or pressure control range is continuously increased. In addition, these positive pressure proportional valves having different positive pressure control ranges are not limited to the above-described positive pressure control range combination, but other combinations of positive pressure control ranges may be adopted as required.

When the test zone 400 requires a positive pressure or a high pressure for testing, a positive pressure proportional valve 308a, 308b or 308c having a suitable pressure range is selected and opened according to the positive pressure or high pressure required by the test zone 400, and The other positive pressure proportional valves are closed and the first positive pressure solenoid valve 312 and the second positive pressure solenoid valve 314 are opened such that the positive pressure supply source 302 is in communication with the test zone 400 and the test zone 400 is infused or inflated. By controlling the positive pressure proportional valve 308a, 308b or 308c to control the amount of inflation and inflation of the positive pressure supply source 302 to the test zone 400, the test zone 400 can be accurately tested to a predetermined positive or high pressure.

In addition, a positive pressure filter 304 is disposed between the positive pressure supply source 302 and the positive pressure proportional valves 308a, 308b, and 308c, and is connected to the positive pressure supply source 302 and the positive pressure proportional valves 308a, 308b, and 308c, respectively. The gas supplied by the positive pressure supply source 302 is filtered to prevent harmful substances in the gas from entering the test zone 400 and components in the positive pressure control mechanism 300, such as positive pressure proportional valves 308a, 308b, 308c, first positive pressure The solenoid valve 312, the second positive pressure solenoid valve 314, and the like cause damage to the components to be tested in the test zone and the components in the positive pressure control mechanism 300. The positive pressure control mechanism 300 further includes a regulating valve 306 disposed between the positive pressure supply source 302 and the positive pressure proportional valves 308a, 308b, 308c, that is, disposed in the positive pressure filter 304 and the positive pressure proportional valve 308a, Between 308b and 308c, the gas supplied from the positive pressure supply source 302 is adjusted, and the positive pressure supply source 302 stably inputs the gas to the test zone 400. A check valve 310a, 310b, 310c is disposed between each of the positive pressure proportional valves 308a, 308b, 308c and the first electromagnetic valve 312, and the positive pressure proportional valves 308a, 308b, 308c and the first electromagnetic valve 312 are respectively connected. The gas for preventing the test zone 400 is prevented from being poured into the positive pressure proportional valves 308a, 308b, 308c, and the gas returning from the positive pressure supply source 302 to the test zone 400 is prevented from being poured into the positive pressure proportional valves 308a, 308b, 308c.

The positive pressure supply source 302 is a gas supply source, which may be a factory gas supply system or a pumping pump, or may be combined with a factory gas supply system and a pumping pump under the demand of providing higher test pressure. Test to provide the required high pressure. The test pressure control system 100 further includes a controller (not shown) for controlling all actions of the test pressure control system 100, for example, for controlling the vacuum control mechanism 200 to perform vacuum degree control, and controlling the positive pressure control mechanism 300. The control of the positive pressure and the switching between the vacuum control mechanism 200 and the positive pressure control mechanism 300 are controlled. The controller can be a computer, processor, or application that can control all of the actuation of the test pressure control system 100. Next, the test pressure control system 100 further includes a pressure gauge 316 disposed between the vacuum control mechanism 200, the positive pressure control mechanism 300, and the test zone 400 for detecting the pressure in the test zone 400. The detected pressure value in the test zone 400 is transmitted back to the controller for the controller to determine, correct, and adjust the test pressure in the test zone 400. The pressure gauge 316 is a positive and negative pressure gauge or a pressure sensor that can measure positive and negative pressures.

The test pressure control system 100 provides and controls the positive pressure or the high pressure in the test zone 400 by the positive pressure control mechanism 300 by the vacuum control mechanism 200 therein and the vacuum or negative pressure in the control test zone 400, respectively. By switching between the vacuum control mechanism 200 and the positive pressure control mechanism 300, the test pressure in the test zone 400 (or test machine) can be switched between vacuum (or negative pressure) and positive pressure, allowing the component to be tested (eg pressure sensor or pressure sensing element) can be tested under vacuum (or negative pressure) in the same test area 400 (or test machine) and tested under positive pressure, and test area 400 (or test) The machine can be tested under vacuum (or negative pressure) and tested under positive pressure to meet the test pressure requirements of different components to be tested, so it is not necessary to prepare various test machines with different test pressures. Tests with different test pressures can be achieved with a single test machine in conjunction with the test pressure control system 100, which can significantly reduce the cost of testing for the purchase of test machines with different test pressures, and Slightly different because of the traditional test machine pressure testing time costs caused by the need to convert different test machine it takes, thus increasing the yield of the test significantly.

In addition, the vacuum control mechanism 200 in the test pressure control system 100 is assembled from components such as an air pump, an electronically controlled proportional valve, and a solenoid valve which are inexpensive and simple to assemble, and the positive pressure control mechanism 300 is also inexpensive. And assembled with simple adjustment valve, electronically controlled proportional valve, check valve and solenoid valve, etc., that is, the test pressure control system 100 is made of these inexpensive and simple assembly parts, according to the special assembly and Combined with the test, the cost control mechanism or system relative to the traditional test machine is not only low cost but also provides the test machine vacuum (or negative pressure) and positive pressure (or high pressure). The function of the test, which is not possible with the traditional test machine.

In addition, the present invention provides a vacuum control mechanism 200 comprising a pumping pump 202, a vacuum proportional valve 204, and a vacuum solenoid valve 206, and a positive pressure supply source 302, at least one positive pressure ratio A test pressure control system 100 of positive pressure control mechanism 300, consisting of valves 308a, 308b, 308c, a first positive pressure solenoid valve 312, and a second positive pressure solenoid valve 314, further provides a method of controlling the test pressure. The operation of the test pressure control system 100 and the method of controlling the test pressure provided by providing the test pressure control system 100 will be described in detail below. Please refer to the second, third, fourth, and fifth figures for the following description. And the sixth picture.

First, please refer to the second figure and the third figure. The third figure is a flowchart of a method for controlling the test pressure according to an embodiment of the present invention. The method comprises the following steps: (1) providing a test pressure control system 100 as shown in the second figure and connecting to a test station 400 in a test machine or test machine (step 500); (2) vacuum control In the step, by starting the vacuum control mechanism 200 of the test pressure control system 100, the pumping pump 202 is connected to the test zone 400, and the test zone 400 is evacuated to control the test zone 400 to reach a predetermined vacuum or negative pressure (steps) 600); (3) a positive pressure control step, by starting the positive pressure control mechanism 200 of the test pressure control system 100, the positive pressure supply source 302 is connected to the test zone 400, and the test zone 400 is inflated or pumped to control the test zone. 400 reaches a predetermined positive pressure (step 700); and (4) a pressure relief step, by opening a second positive pressure solenoid valve in the positive pressure control mechanism 200, causing the test zone 400 to communicate with the outside atmosphere, and allowing the test zone 400 is balanced with external atmospheric pressure (step 800). In addition to the step (1), the method of providing a test pressure control system 100 (step 500) must be performed before the subsequent steps (2) vacuum control step (step 600) and step (3) positive pressure control step (step 700). And step (4) pressure relief step (step 800), and there is no certain order that needs to be performed first, but according to the test pressure required in the test area 400 at that time, the execution step (2) vacuum control step is selected. (Step 600) or Step (3) Positive Pressure Control Step (Step 700). In other words, after the test pressure control system 100 is provided, if the component to be tested of the test zone 400 needs to be performed under vacuum or negative pressure, the step (2) vacuum control step (step 600) is performed first, and if the test zone 400 is to be The measuring element needs to be performed at a positive pressure, and then the step (3) positive pressure control step (step 700) is performed first. However, it should be noted that this method of controlling the test pressure can be switched between the step (2) vacuum control step (step 600) and the step (3) positive pressure control step (step 700) in response to the test requirement, and the test will be performed. The pressure in zone 400 is converted to a positive pressure by vacuum or negative pressure, or by a positive pressure to vacuum or negative pressure, but is switched from step (2) vacuum control step (step 600) to step ( 3) Positive pressure control step (step 700), or step (3) positive pressure control step (step 700) switch to step (2) vacuum control step (step 600), both need to perform step (4) pressure relief first Step (step 800), preventing excessively rapid airing or pumping of the test zone 400, causing too much gas to be poured into the test zone 400 or extracted by the test zone 400 for a time to avoid pressure increase or decrease too fast for the test zone 400 The component under test causes damage.

The actuation of the test pressure control system 100 also includes three steps (or actuations) of a vacuum control step (step 600), a positive pressure control step (step 700), and a pressure relief step (step 800). Similarly, when the test pressure control system 100 performs a switching between the vacuum control step (step 600) and the positive pressure control step (step 700), the pressure relief step (step 800) is first performed to avoid pressure increase or decrease. Too fast to cause damage to the component under test in the test zone 400. The operation of the test pressure control system 100, that is, the vacuum control step (step 600), the positive pressure control step (step 700), and the pressure relief step (step 800), as well as the method of controlling the test pressure of the present invention, will be hereinafter described. Steps (2), (3), and (4) are described in detail.

First, please refer to the second and fourth figures at the same time, and the fourth figure is a flow chart of the aforementioned vacuum (or negative pressure) control step (step 600). First, when the test area 400 needs to establish a vacuum or a negative pressure to test the component to be tested, the controller of the test pressure control system 100 sends a signal to the vacuum control mechanism 200 to start to open the vacuum proportional valve 204, and is ready to provide and control. The test pressure within test zone 400 reaches a predetermined vacuum or negative pressure (step 602). Next, the vacuum proportional valve 204 is opened and adjusted to open a certain ratio in accordance with the required degree of vacuum, and a predetermined (or desired) degree of vacuum or negative pressure is applied to the test zone 400 (step 602). The controller then checks if the first positive pressure solenoid valve 312 in the vacuum control mechanism 200 has been closed (step 606). If the first positive pressure solenoid valve 312 is not closed, the controller will close the first positive pressure solenoid valve 312 (step 608) to prevent the positive pressure supply source 302 (positive pressure control mechanism 300) from communicating with the test zone 400. The test zone 400 is inflated resulting in failure to achieve a predetermined vacuum or negative pressure. Next, it is checked again whether the second positive pressure solenoid valve 314 has been closed (step 610). Conversely, in step 606, confirming that the first positive pressure solenoid valve 312 has been closed, the controller will directly check if the second positive pressure solenoid valve 314 has been closed (step 610).

In step 610, it is checked that if the second positive pressure solenoid valve 314 is not closed, the controller will close the second positive pressure solenoid valve 314 (step 612) to prevent the positive pressure supply source 302 (positive pressure control mechanism 300). The test zone 400 is inflated in communication with the test zone 400 to cause a predetermined vacuum or negative pressure to be reached, and the external atmosphere is prevented from communicating with the test zone 400, resulting in the test zone 400 failing to reach a predetermined vacuum or negative pressure. On the other hand, if it is confirmed in step 610 that the second positive pressure solenoid valve 314 has been closed, the controller will directly open the vacuum solenoid valve 206 (step 614), so that the test zone 400 is connected to the pumping pump 202 (vacuum control mechanism 200). The pumping pump 202 is adjusted by the vacuum proportional valve 204 to the pumping amount and the pumping rate of the test zone 400, and the test zone 400 is evacuated so that the test zone 400 can accurately reach the required (or preset). Vacuum or negative pressure.

Next, referring to the second and fifth figures, the fifth figure is a flowchart of the aforementioned positive pressure control step (step 700). First, when the test zone 400 needs to be tested under positive pressure (or high pressure), the controller of the test pressure control system 100 selects one of the positive pressure control mechanisms 300 according to the required or set pressure. A positive pressure proportional valve 308a, 308b, or 308c having a suitable positive pressure control range (step 702), and signaling a signal and opening the selected positive pressure proportional valve 308a, 308b, or 308c to open in accordance with the desired positive pressure A certain ratio is applied to the test zone 400 for a predetermined (or desired) positive pressure control (step 704).

Next, the controller checks if the vacuum solenoid valve 206 in the vacuum control mechanism 200 has been closed (step 706). If the vacuum solenoid valve 206 has not been closed, the controller will close the vacuum solenoid valve 206 (step 708) to prevent the vacuum control mechanism 200 (or the pumping pump 202) from communicating with the test zone 400, resulting in simultaneous testing of the test zone 400. Pumping and aeration causes the test zone 400 to fail to achieve the desired (or preset) positive pressure. After the vacuum solenoid valve 206 is closed (step 708), the controller opens the first positive pressure solenoid valve 312 such that the first positive pressure solenoid valve 312 is disconnected from the outside atmosphere (step 710). On the other hand, in step 706, if it is confirmed that the vacuum solenoid valve 206 has been closed, the controller directly opens the first positive pressure solenoid valve 312, causing the first positive pressure solenoid valve 312 to be disconnected from the outside atmosphere (step 710).

Finally, after the first positive pressure solenoid valve 312 is opened (step 710), the controller opens the second positive pressure solenoid valve 314 to cause the test zone 400 to communicate with the positive pressure control mechanism 300 (or the positive pressure supply source 302). The positive pressure supply source 302 regulates the amount of pumping and pumping rate to the test zone 400 via the positive pressure proportional valve 308a, 308b, or 308c, and inflates or inflates the test zone 400 to accurately achieve the desired test zone 400 ( Or preset) positive pressure.

Next, referring to the second and sixth figures, the sixth figure is a flow chart of the aforementioned pressure relief step (step 800). When the test pressure in the test zone 400 needs to be converted from vacuum (or negative pressure) to positive pressure for testing, or when it needs to be converted from positive pressure to vacuum (or negative pressure) for testing, the controller checks the positive pressure control. Whether the first positive pressure solenoid valve 312 in the mechanism 300 is closed (step 802). If the first positive pressure solenoid valve 312 is not closed, the controller closes the first positive pressure solenoid valve in the positive pressure control mechanism 300 (step 804) such that the first positive pressure solenoid valve 312 is connected to the outside atmosphere. In step 802, if it is confirmed that the first positive pressure solenoid valve 312 is closed, the controller directly checks whether the second positive pressure solenoid valve 314 is open (step 806). If the second positive pressure solenoid valve 314 is not open, the controller will open the second positive pressure solenoid valve 314 (step 808), so that the test zone 400 communicates with the external atmosphere through the first positive pressure solenoid valve 312, so that the test zone 400 The internal pressure is balanced with the external atmosphere, i.e., the pressure in the test zone 400 is returned to atmospheric pressure. In this step, if the test zone 400 is originally vacuum or negative pressure, the external atmosphere will inflate the test zone 400 until the test zone 400 reaches a pressure balance with the external atmosphere, if the test zone 400 is originally a positive pressure greater than the external atmosphere. The test zone 400 will pass gas into the outside atmosphere until the test zone 400 reaches a pressure balance with the outside atmosphere. In addition, if the second positive pressure solenoid valve 314 is originally open, when the first positive pressure solenoid valve 312 is closed in step 804, the test zone 400 is directly connected to the outside atmosphere to perform pressure relief.

By the above actions and steps, the test pressure control system of the present invention and the method for controlling the test pressure of the present invention can provide vacuum (or negative pressure) and positive pressure to the same test machine or test zone for testing, and The test pressure control system has a vacuum control mechanism and a positive pressure control mechanism respectively controlling the degree of vacuum and pressure in the test machine (or test zone), so that it can be freely switched between vacuum (or negative pressure) and positive pressure to cope with Different test pressures and vacuum requirements. Therefore, it is not necessary to prepare a variety of test machines with different test pressures, and only a single test machine with a test pressure control system can achieve different test pressure tests, and can greatly reduce the purchase of test machines with different test pressures. The increased test cost of the station and the omission of the time cost of the traditional test machine due to the different test pressures required to convert different test machines, thereby greatly increasing the test yield. In addition, since the test pressure control system (vacuum control mechanism and positive pressure control mechanism) of the present invention is assembled according to a special design configuration of the low-cost proportional valve and the electromagnetic valve, the test pressure control system is compared with Traditional test pressure control systems are not only inexpensive but also easy to assemble, so they can significantly reduce test costs.

100. . . Test pressure control system

200. . . Vacuum control mechanism

202. . . Pumping pump

204. . . Vacuum proportional valve

206. . . Vacuum solenoid valve

208. . . Vacuum filter

300. . . Positive pressure control mechanism

302. . . Positive pressure supply

304. . . Positive pressure filter

306. . . Regulating valve

308, 308a, 308b, 308c. . . Positive pressure proportional valve

310, 310a, 310b, 310c. . . Check valve

312. . . First positive pressure solenoid valve

314. . . Second positive pressure solenoid valve

316. . . pressure gauge

400. . . Test area

500. . . Provide a test pressure control system step

600. . . Vacuum control step

602-616. . . Steps in the vacuum control step

700. . . Positive pressure control step

702-712. . . Each step in the positive pressure control step

800. . . Pressure relief step

802-808. . . Steps in the pressure relief step

The first figure is a simplified schematic diagram of a test pressure control system in accordance with one embodiment of the present invention.

The second figure is a schematic diagram of a detailed configuration of a test pressure control system according to an embodiment of the present invention.

3 is a flow chart of a method of testing a pressure control system and a method of testing a pressure control system in accordance with an embodiment of the present invention.

The fourth figure is a flow chart of the vacuum (or negative pressure) control step of the present invention.

The fifth figure is a flow chart of the positive pressure control step of the present invention.

Figure 6 is a flow chart of the pressure relief step of the present invention.

100. . . Test pressure control system

200. . . Vacuum control mechanism

300. . . Positive pressure control mechanism

400. . . Test area

Claims (20)

A test pressure control system comprising:
a vacuum control mechanism is coupled to a test zone for providing a vacuum or a negative pressure for controlling the component to be tested in the test zone; and a positive pressure control mechanism is coupled to the test zone for providing and controlling the test The positive pressure during the measurement of the component to be tested, wherein the test pressure control system can switch between the vacuum control mechanism and the positive pressure control mechanism according to the required test vacuum and pressure, and provide the test zone to treat Measure the vacuum and pressure required for component testing. The test pressure control system of claim 1, wherein the vacuum control mechanism comprises:
a pumping pump for pumping the test area to provide the vacuum required for the test area;
a vacuum proportional valve is connected to the pumping pump for controlling the degree of vacuum; and a vacuum solenoid valve is interposed between the vacuum proportional valve and the test zone, and the vacuum proportional valve is respectively connected to the test zone, To control whether the test area is evacuated. The test pressure control system of claim 2, wherein the vacuum control mechanism further comprises a vacuum filter disposed between the vacuum solenoid valve and the test zone for performing gas extracted by the test zone. filter. The test pressure control system of claim 1, wherein the positive pressure control mechanism comprises:
a positive pressure supply source for providing gas to the test zone to provide a positive pressure;
a plurality of positive pressure proportional valves are connected in parallel to the positive pressure supply source for controlling different ranges of positive pressures;
a first positive pressure solenoid valve interposed between the positive pressure proportional valve and the test zone, and connected to the positive pressure proportional valve and the test zone for controlling whether the test zone is electrically connected to the positive pressure proportional valve; And a second positive pressure solenoid valve between the first positive pressure solenoid valve and the test zone, and connecting the first positive pressure solenoid valve and the test zone for controlling whether the first positive pressure solenoid valve is Conducted with the test area. The test pressure control system of claim 4, wherein the positive pressure control mechanism further comprises a positive pressure filter disposed between the positive pressure supply source and the positive pressure proportional valve, respectively A positive pressure supply source and the positive pressure proportional valves are coupled to filter the gas supplied by the positive pressure supply. The test pressure control system of claim 5, wherein the positive pressure control mechanism further comprises a regulating valve disposed between the positive pressure filter and the positive pressure proportional valve for adjusting the positive pressure supply. The gas supplied by the source. The test pressure control system of claim 4, wherein each of the positive pressure proportional valve and the first electromagnetic valve is provided with a check valve, and the positive pressure proportional valve and the first are respectively connected A solenoid valve is used to prevent gas in the test zone from being poured into the positive pressure proportional valves. The test pressure control system of claim 4, wherein the positive pressure proportional valve comprises a first positive pressure proportional valve, a second positive pressure proportional valve, and a third positive pressure proportional valve, respectively controlled Different ranges of positive pressure. The test pressure control system of claim 1, wherein the test pressure control system further comprises a pressure gauge disposed between the vacuum control mechanism, the positive pressure control mechanism, and the test zone for detecting The pressure in the test zone was measured. The test pressure control system of claim 9, wherein the pressure gauge is a positive and negative pressure gauge or a pressure sensor capable of measuring positive pressure and negative pressure. The test pressure control system of claim 1, wherein the test pressure control system further comprises a controller for controlling the vacuum control mechanism to perform vacuum degree control, and the positive pressure control mechanism performs positive pressure control. And switching between the vacuum control mechanism and the positive pressure control mechanism. A method of controlling test pressure comprising:
(1) providing a test pressure system, the test pressure control system comprising a vacuum control mechanism consisting of a pumping pump, a vacuum proportional valve, and a vacuum solenoid valve, and a positive pressure supply source, at least one a positive pressure proportional control valve, a first positive pressure solenoid valve, and a second positive pressure solenoid valve comprising a positive pressure control mechanism;
(2) a vacuum control step of controlling the test zone to a predetermined degree of vacuum by pumping a test zone by the pumping pump;
(3) a positive pressure control step of controlling the test zone to reach a predetermined positive pressure by pumping the test zone by the positive pressure supply; and (4) a pressure relief step by opening the second positive pressure solenoid valve, The test zone is connected to the outside atmosphere, and the test zone is balanced with the external atmospheric pressure. The method for controlling test pressure as described in claim 12, wherein the step (2) comprises:
Adjusting the vacuum proportional valve to perform a preset vacuum or negative pressure control;
Closing the first positive pressure solenoid valve and the second positive pressure solenoid valve to prevent the positive pressure control mechanism and the external atmosphere from communicating with the test zone; and opening the vacuum solenoid valve to connect the test zone to the pumping pump And the test zone is evacuated to reach a preset vacuum or negative pressure. The method for controlling the test pressure as described in claim 13 wherein the step (2) further comprises the step of issuing a signal to notify the vacuum proportional valve to perform a predetermined vacuum or negative pressure control. The method of controlling test pressure as described in claim 13 wherein the step (2) further comprises the step of checking whether the first positive pressure solenoid valve and the second positive pressure solenoid valve have been closed. The method for controlling test pressure as described in claim 12, wherein the step (3) comprises:
Selecting a positive pressure proportional valve and adjusting the positive pressure proportional valve to perform a predetermined positive pressure control;
Closing the vacuum solenoid valve to prevent the vacuum control mechanism from communicating with the test zone;
Opening the first positive pressure solenoid valve to disconnect the first positive pressure solenoid valve from the external atmosphere; and opening the second positive pressure solenoid valve to connect the test zone with the positive pressure supply source, and performing the test Pump up to reach the preset positive pressure. The method for controlling the test pressure as described in claim 16 wherein the step (3) further comprises the step of issuing a signal to notify the selected positive pressure proportional valve to perform a predetermined positive pressure control. A method of controlling a test pressure as described in claim 16 wherein the step (3) further comprises the step of checking whether the vacuum solenoid valve has been closed. The method for controlling test pressure as described in claim 12, wherein the step (4) comprises:
Checking whether the first positive pressure solenoid valve is closed, if otherwise closing the first positive pressure solenoid valve; and checking whether the second positive pressure solenoid valve is open, if the first positive pressure solenoid valve is otherwise opened, the test area is The first positive pressure solenoid valve and the second positive pressure solenoid valve are in communication with the outside atmosphere to balance the test zone with the outside atmosphere. The method for controlling the test pressure described in claim 12, wherein when the step (2) is switched to the step (3), and the step (3) is switched to the step (2), Perform step (4) to avoid injury caused by rapid airing or pumping to the component under test in the test area.