TW201321727A - Spectrum measurement systems and methods for spectrum measurement - Google Patents

Spectrum measurement systems and methods for spectrum measurement Download PDF

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TW201321727A
TW201321727A TW100141748A TW100141748A TW201321727A TW 201321727 A TW201321727 A TW 201321727A TW 100141748 A TW100141748 A TW 100141748A TW 100141748 A TW100141748 A TW 100141748A TW 201321727 A TW201321727 A TW 201321727A
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grating
focusing module
light
lens
incident light
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TW100141748A
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TWI426248B (en
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Fu-Cheng Yang
Kai-Ping Chuang
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Ind Tech Res Inst
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Abstract

A spectrum measurement system is provided, includes a first afocal system, a first grating, a second grating and a second afocal system. The first afocal system receives an incident light from the object to parallel the incident light with a system normal light. The first grating diffracts the incident light to different wavelength lights with different emergent angles. The second afocal system sifts a predetermined wavelength from the lights outputted from the first grating to output a diffractive light having the predetermined wavelength. The second grating eliminates optical path difference made from the first grating. The third afocal system receives the diffractive light from the second grating to output a monochromatic light parallel with the system normal light.

Description

光譜量測系統與光譜量測方法Spectral measurement system and spectral measurement method

本揭露係有關於光譜量測系統,特別係有關於一種全域式光譜量測系統。The disclosure relates to a spectral measurement system, and more particularly to a global spectral measurement system.

由於工業上的進步,工業產品越來越多樣化,使得量測產品的光譜不再只能限於單點量測。舉例來說,由於發光二極體(LED)具有耐用、壽命長、輕巧、低耗電並且不含有害物質(例如汞)的特性,因此使用發光二極體之照明技術已經變成照明產業與半導體產業未來非常重要的發展方向。一般而言,發光二極體係廣泛地應用於白光照明裝置、指示燈、車用信號燈、車用大燈、閃光燈、液晶顯示器之背光模組、投影機之光源、戶外顯示單元…等等。Due to industrial advances, industrial products are becoming more diverse, making the spectrum of measurement products no longer limited to single-point measurements. For example, because of the durability, long life, light weight, low power consumption and the absence of harmful substances (such as mercury), lighting technology using light-emitting diodes has become a lighting industry and semiconductor. The future of the industry is a very important development direction. In general, the light-emitting diode system is widely used in white light illumination devices, indicator lights, vehicle signal lights, automotive headlights, flashlights, backlight modules for liquid crystal displays, light sources for projectors, outdoor display units, and the like.

由於發光二極體的光學檢測技術大多採用單點量測,所以採用全域式光譜量測技術時,習知技術係使用液晶可調型濾波片(liquid-crystal tunable filter,LCTF)或腦斷層影像光譜儀(computed tomographic imaging spectrometer,CTIS),但以上兩者技術皆具有光譜解析度不足的問題。因此亟需一種光譜量測系統與光譜量測方法,兼顧光譜解析度與全域式取像的特點,來量測待測物的光譜。Since the optical detection technology of the light-emitting diode mostly adopts single-point measurement, when the global spectrum measurement technology is adopted, the conventional technique uses a liquid-crystal tunable filter (LCTF) or a brain tomography image. Computed tomographic imaging spectrometer (CTIS), but both of them have the problem of insufficient spectral resolution. Therefore, there is a need for a spectral measurement system and a spectral measurement method that take into account the spectral resolution and the characteristics of the global image acquisition to measure the spectrum of the analyte.

有鑑於此,本揭露提供一種光譜量測系統,包括:一第一無聚焦模組,用以接收一待測物所發出的一入射光,使得入射光平行於一系統法線;一第一光柵,用以將不同波長的入射光繞射成不同的出射角度;一第二無聚焦模組,從第一光柵;以及一第二無聚焦模組,用以接收從第二光柵所輸出之繞射光,以便輸出與系統法線平行之一單色光。In view of the above, the present disclosure provides a spectral measurement system, including: a first non-focusing module for receiving an incident light emitted by an object to be tested, such that the incident light is parallel to a system normal; a grating for diffracting incident light of different wavelengths into different exit angles; a second non-focusing module from the first grating; and a second non-focusing module for receiving output from the second grating The light is diffracted to output a monochromatic light parallel to the normal of the system.

本揭露亦提供一種光譜量測方法,適用於一光譜量測系統,光譜量測系統包括一第一無聚焦模組、一第二無聚焦模組、一第三無聚焦模組、一第一光柵與一第二光柵,光譜量測方法包括:藉由第一無聚焦模組接收一待測物所發出的一入射光,使得入射光平行於一系統法線;藉由第一光柵與第二無聚焦模組,從第一無聚焦模組所輸出之入射光中篩選出一特定波長,使得第二無聚焦模組只輸出具有特定波長的一繞射光;藉由第一光柵、第二光柵和第二無聚焦模組消除第一光柵所造成的光程差;以及藉由第三無聚焦模組接收從第二光柵所輸出之繞射光,以便輸出與系統法線平行之一單色光。The disclosure also provides a spectral measurement method, which is suitable for a spectral measurement system. The spectral measurement system includes a first non-focusing module, a second non-focusing module, a third non-focusing module, and a first The grating and the second grating, the spectral measurement method comprises: receiving, by the first non-focusing module, an incident light emitted by the object to be tested, so that the incident light is parallel to a system normal; by the first grating and the first The second non-focusing module selects a specific wavelength from the incident light output by the first non-focusing module, so that the second non-focusing module outputs only one diffracted light having a specific wavelength; and the first grating and the second The grating and the second non-focusing module eliminate the optical path difference caused by the first grating; and receive the diffracted light output from the second grating by the third non-focusing module, so that the output is parallel to the system normal Light.

為了讓本發明之上述和其他目的、特徵、和優點能更明顯易懂,下文特舉一較佳實施例,並配合所附圖式,作詳細說明如下:The above and other objects, features and advantages of the present invention will become more apparent and understood.

第1圖是本揭露之光譜量測系統之一實施例。如第1圖所示,光譜量測系統100包括無聚焦模組(afocal system)110、120與130、光柵G1與G2和面形光偵測器140。舉例來說,無聚焦模組110用以接收一待測物150所發出的一入射光C1,使得入射光C1平行於系統法線(normal line)NL。光柵G1用以將入射光C1不同波長的光繞射成不同的角度,並且經由透鏡L3及光圈A2篩選出一特定波長,以便只輸出具有特定波長的繞射光C2。光柵G1、G2及透鏡L3、L4和L5用以消除來自點P1、P2及P3不同位置之繞射光C2間的光程差,舉例來說,光柵G2轉動的方向與角度與光柵G1改變的方向與角度相同,以便補償光柵G1所造成的光程差。無聚焦模組120用以接收從光柵G2所輸出之繞射光C2,以便輸出與系統法線NL平行之一單色光C3。無聚焦模組130(包含光圈A2和透鏡L3、L4和L5)設置在光柵G1與G2之間,用以改變來自點P1、P2及P3不同位置之光跡路徑並用光圈A2提高光譜解析度。Figure 1 is an embodiment of the spectral measurement system of the present disclosure. As shown in FIG. 1, the spectral measurement system 100 includes afocal systems 110, 120, and 130, gratings G1 and G2, and a planar light detector 140. For example, the non-focusing module 110 is configured to receive an incident light C1 emitted by the object to be tested 150 such that the incident light C1 is parallel to the normal line NL of the system. The grating G1 is used to diffract light of different wavelengths of the incident light C1 to different angles, and filters a specific wavelength through the lens L3 and the aperture A2 to output only the diffracted light C2 having a specific wavelength. The gratings G1, G2 and the lenses L3, L4 and L5 are used to eliminate the optical path difference between the diffracted lights C2 from different positions of the points P1, P2 and P3, for example, the direction and angle of rotation of the grating G2 and the direction in which the grating G1 changes. Same as the angle to compensate for the optical path difference caused by the grating G1. The non-focusing module 120 is configured to receive the diffracted light C2 output from the grating G2 to output a monochromatic light C3 parallel to the system normal NL. The non-focusing module 130 (including the aperture A2 and the lenses L3, L4 and L5) is disposed between the gratings G1 and G2 for changing the track paths from different positions of the points P1, P2 and P3 and increasing the spectral resolution by the aperture A2.

控制單元160設置在面形光偵測器140,用以控制光柵G1,使得入射光C1與光柵G1的入射角對應於特定波長。控制單元160亦控制光柵G2,使得光柵G2轉動的角度與光柵G1改變的角度相同,以便經由透鏡L3、L4和L5補償來自點P1、P2及P3的繞射光C2間的光程差。在某些實施例中,控制單元亦可設置在光偵測器140之外,但不限於此。在本揭露實施例中,光柵G1與G2互為平行,即使光柵G1和G2轉動之後,光柵G1與G2仍為平行。面形光偵測器140用以接收單色光C3,以便紀錄單色光C3的強度。在本揭露實施例中,面形光偵測器140可以是電荷耦合元件(Charge-coupled Device,CCD),利用快照的方式,把待測物150的不同波長影像分別取像並紀錄,以供使用者分析。The control unit 160 is disposed in the planar light detector 140 for controlling the grating G1 such that the incident angle of the incident light C1 and the grating G1 corresponds to a specific wavelength. The control unit 160 also controls the grating G2 such that the angle at which the grating G2 rotates is the same as the angle at which the grating G1 changes, so as to compensate the optical path difference between the diffracted lights C2 from the points P1, P2 and P3 via the lenses L3, L4 and L5. In some embodiments, the control unit may also be disposed outside of the photodetector 140, but is not limited thereto. In the disclosed embodiment, the gratings G1 and G2 are parallel to each other, and the gratings G1 and G2 are parallel even after the gratings G1 and G2 are rotated. The planar light detector 140 is configured to receive the monochromatic light C3 to record the intensity of the monochromatic light C3. In the embodiment of the disclosure, the surface light detector 140 may be a charge-coupled device (CCD), and the different wavelength images of the object to be tested 150 are imaged and recorded by a snapshot. User analysis.

詳細而言,無聚焦模組110包括一透鏡L1與L2和光圈A1。透鏡L1用以接收入射光C1,而透鏡L2用以將入射光C1平行射出。光圈A1設置在透鏡L1與L1之間,用以提高光譜解析度,以避免串音雜訊(cross talk)。In detail, the non-focusing module 110 includes a lens L1 and L2 and an aperture A1. The lens L1 is for receiving incident light C1, and the lens L2 is for emitting incident light C1 in parallel. Aperture A1 is disposed between lenses L1 and L1 to improve spectral resolution to avoid cross talk.

無聚焦模組130設置在光柵G1與G2之間,用以改變來自點P1、P2及P3不同位置之光跡路徑並用光圈A2提高光譜解析度。無聚焦模組130包括透鏡L3、L4和L5與光圈A2。透鏡L3用以接收繞射光C2。透鏡L4用以改變繞射光C2的光跡。光圈A2設置在透鏡L3與L4之間,用以提高光譜解析度。透鏡L5用以將繞射光C2平行輸出。The non-focusing module 130 is disposed between the gratings G1 and G2 for changing the track paths from different positions of the points P1, P2 and P3 and increasing the spectral resolution by the aperture A2. The non-focusing module 130 includes lenses L3, L4, and L5 and an aperture A2. The lens L3 is for receiving the diffracted light C2. The lens L4 is used to change the trace of the diffracted light C2. Aperture A2 is disposed between lenses L3 and L4 to improve spectral resolution. The lens L5 is for outputting the diffracted light C2 in parallel.

無聚焦模組120包括透鏡L6與L7。透鏡L6用以接收繞射光C2,而透鏡L7用以改變繞射光C2的光跡。在某些實施例中,無聚焦模組120亦具有光圈A3(未繪出),設置在透鏡L6與L7之間,用以提高光譜解析度。The non-focusing module 120 includes lenses L6 and L7. The lens L6 is for receiving the diffracted light C2, and the lens L7 is for changing the trace of the diffracted light C2. In some embodiments, the non-focusing module 120 also has an aperture A3 (not shown) disposed between the lenses L6 and L7 for improved spectral resolution.

第2圖是本揭露之光柵G1之一示意圖。如第2圖所示,光柵G1用以將入射光C1篩選出特定波長的光,其中θi為入射角,θd為繞射角,△θ為繞射光C2與系統法線NL的夾角。θi與θd間的關係可以由公式1與公式2所表示:Figure 2 is a schematic diagram of one of the gratings G1 of the present disclosure. As shown in Fig. 2, the grating G1 is used to filter the incident light C1 by a specific wavelength of light, where θi is the incident angle, θd is the diffraction angle, and Δθ is the angle between the diffracted light C2 and the system normal NL. The relationship between θi and θd can be expressed by Equation 1 and Equation 2:

θd=Δθ-θi ----公式2θ d =Δθ-θ i ----Form 2

其中d為光柵條紋間距,角度△θ與d為定值。因此,藉由改變入射角θi,即可篩選出特定波長λ的光。Where d is the grating stripe pitch, and the angles Δθ and d are constant values. Therefore, by changing the incident angle θi, it is possible to filter out light of a specific wavelength λ.

第3圖係本揭露之入射角θi、繞射角θd和角度△θ之間的關係圖。如第3圖所示,在量測待測物150的可見光影像(波長為374nm至781nm)並且將角度△θ維持在一定值(例如40度)時,光譜量測系統100的入射角θi與繞射角θd均未偏轉超過90°,因此在可見光的範圍內,本揭露實施例可充分量測到待測物150的每個波長之影像。Fig. 3 is a graph showing the relationship between the incident angle θi, the diffraction angle θd, and the angle Δθ of the present disclosure. As shown in FIG. 3, when the visible light image of the test object 150 (wavelength is 374 nm to 781 nm) is measured and the angle Δθ is maintained at a certain value (for example, 40 degrees), the incident angle θi of the spectral measurement system 100 is The diffraction angle θd is not deflected by more than 90°, so that in the visible light range, the disclosed embodiment can sufficiently measure the image of each wavelength of the object to be tested 150.

第4圖係本揭露實施例之一影像,用以說明利用光譜量測系統100取得待測物150的影像。如第4圖所示,影像400相當銳利且無像差,因此光譜量測系統100非常適合量測大面積的待測物。FIG. 4 is an image of an embodiment of the present disclosure for illustrating an image of the object to be tested 150 obtained by the spectral measurement system 100. As shown in FIG. 4, the image 400 is quite sharp and has no aberrations, so the spectral measurement system 100 is well suited for measuring large areas of the object to be tested.

第5圖係本揭露之光譜量測方法之一流程圖,如圖所示,光譜量測方法包括下列步驟。Figure 5 is a flow chart of one of the spectral measurement methods of the present disclosure. As shown in the figure, the spectral measurement method includes the following steps.

於步驟S51,藉由無聚焦模組110接收待測物150所發出的入射光C1,使得入射光C1平行於系統法線NL。於步驟S52,藉由光柵G1將入射光C1不同波長的光繞射成不同的角度,經由透鏡L3及光圈A2篩選出具有一特定波長之繞射光C2。於步驟S53,藉由光柵G1、G2及無聚焦模組130(例如透鏡L3、L4和L5)消除相同平面不同位置之繞射光的光程差(例如同一平面上分別來自點P1、P2和P3的光)。於步驟S54,藉由無聚焦模組120接收繞射光C2,以便輸出與系統法線NL平行之單色光C3。In step S51, the incident light C1 emitted by the object to be tested 150 is received by the non-focusing module 110 such that the incident light C1 is parallel to the system normal NL. In step S52, the light of different wavelengths of the incident light C1 is diffracted into different angles by the grating G1, and the diffracted light C2 having a specific wavelength is filtered through the lens L3 and the aperture A2. In step S53, the optical path differences of the diffracted lights at different positions of the same plane are eliminated by the gratings G1, G2 and the non-focusing module 130 (for example, the lenses L3, L4, and L5) (for example, the same planes are from points P1, P2, and P3, respectively). Light). In step S54, the diffracted light C2 is received by the non-focusing module 120 to output monochromatic light C3 parallel to the system normal NL.

綜上所述,藉由無聚焦模組110、120和130及光柵G1和G2,可使得遠離光軸中心點P1之點P2、P3(如第1圖所示)可毫無偏差地平行入射點P5、P6(如第1圖所示),並且待測物150在點P2與P3的影像不會產生變形,因此達到全域式取像的效果。In summary, by means of the non-focusing modules 110, 120 and 130 and the gratings G1 and G2, the points P2, P3 (as shown in Fig. 1) away from the optical axis center point P1 can be made to be incident parallel without deviation. Points P5 and P6 (as shown in Fig. 1), and the image of the object to be tested 150 at the points P2 and P3 is not deformed, so that the effect of the global image capturing is achieved.

以上敘述許多實施例的特徵,使所屬技術領域中具有通常知識者能夠清楚理解本說明書的形態。所屬技術領域中具有通常知識者能夠理解其可利用本發明揭示內容為基礎以設計或更動其他製程及結構而完成相同於上述實施例的目的及/或達到相同於上述實施例的優點。所屬技術領域中具有通常知識者亦能夠理解不脫離本發明之精神和範圍的等效構造可在不脫離本發明之精神和範圍內作任意之更動、替代與潤飾。The features of many embodiments are described above to enable those of ordinary skill in the art to clearly understand the form of the specification. Those having ordinary skill in the art will appreciate that the objectives of the above-described embodiments and/or advantages consistent with the above-described embodiments can be accomplished by designing or modifying other processes and structures based on the present disclosure. It is also to be understood by those skilled in the art that <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt;

100...光譜量測系統100. . . Spectral measurement system

G1~G2...光柵G1~G2. . . Grating

L1~L7...透鏡L1~L7. . . lens

110、120、130...無聚焦模組110, 120, 130. . . No focus module

140...面形光偵測器140. . . Surface light detector

150...待測物150. . . Analyte

160...控制單元160. . . control unit

C1...入射光C1. . . Incident light

C2...繞射光C2. . . Diffracted light

C3...單色光C3. . . monochromatic light

A1、A2...光圈A1, A2. . . aperture

P1~P6...點P1~P6. . . point

NL...系統法線NL. . . System normal

θi...入射角Θi. . . Incident angle

θd...繞射角Θd. . . Diffraction angle

△θ...角度△θ. . . angle

400...影像400. . . image

第1圖是本揭露之光譜量測系統之一實施例;Figure 1 is an embodiment of the spectral measurement system of the present disclosure;

第2圖是本揭露之光柵G1之一示意圖;Figure 2 is a schematic view of one of the gratings G1 of the present disclosure;

第3圖係本揭露之入射角θi、繞射角θd和角度△θ之間的關係圖;Figure 3 is a diagram showing the relationship between the incident angle θi, the diffraction angle θd, and the angle Δθ of the present disclosure;

第4圖係本揭露實施例之一影像,用以說明利用光譜量測系統100取得待測物150的影像;以及FIG. 4 is an image of an embodiment of the present disclosure for illustrating obtaining an image of the object to be tested 150 by using the spectral measurement system 100;

第5圖係本揭露之光譜量測方法之一流程圖。Figure 5 is a flow chart of one of the spectral measurement methods disclosed herein.

100...光譜量測系統100. . . Spectral measurement system

G1~G2...光柵G1~G2. . . Grating

L1~L7...透鏡L1~L7. . . lens

110、120、130...無聚焦模組110, 120, 130. . . No focus module

140...面形光偵測器140. . . Surface light detector

150...待測物150. . . Analyte

160...控制單元160. . . control unit

C1...入射光C1. . . Incident light

C2...繞射光C2. . . Diffracted light

C3...單色光C3. . . monochromatic light

A1、A2...光圈A1, A2. . . aperture

P1~P6...點P1~P6. . . point

NL...系統法線NL. . . System normal

Claims (10)

一種光譜量測系統,包括:一第一無聚焦模組,用以接收一待測物所發出的一入射光,使得上述入射光平行於一系統法線;一第一光柵,用以將不同波長的上述入射光繞射成不同的出射角度;一第二無聚焦模組,從上述第一光柵所輸出的上述入射光中篩選出一特定波長,使得上述第二無聚焦模組只輸出具有上述特定波長的一繞射光至第二光柵;一第二光柵及一無聚焦模組,用以消除上述繞射光的光程差;以及一第三無聚焦模組,用以接收從上述第二光柵所輸出之上述繞射光,以便輸出與上述系統法線平行之一單色光。A spectral measurement system includes: a first non-focusing module for receiving an incident light emitted by a test object such that the incident light is parallel to a system normal; a first grating for different The incident light of the wavelength is diffracted into different exit angles; a second non-focusing module filters a specific wavelength from the incident light output by the first grating, so that the second non-focusing module only outputs a diffracted light of the specific wavelength to the second grating; a second grating and a non-focusing module for eliminating the optical path difference of the diffracted light; and a third non-focusing module for receiving the second The diffracted light output by the grating is such that a monochromatic light parallel to the normal of the above system is output. 如申請專利範圍第1項所述之光譜量測系統,包括一控制單元,用以調整上述第一光柵,使得從上述第一無聚焦模組所輸出的上述入射光與上述第一光柵的入射角對應於上述特定波長。The spectral measurement system of claim 1, comprising a control unit for adjusting the first grating such that the incident light output from the first non-focusing module and the first grating are incident. The angle corresponds to the specific wavelength described above. 如申請專利範圍第2項所述之光譜量測系統,其中上述控制單元控制上述第二光柵,使得上述第二光柵轉動的方向與角度與上述第一光柵改變的方向與角度相同,以便補償上述第一光柵所造成的光程差。The spectral measuring system of claim 2, wherein the control unit controls the second grating such that a direction and an angle of rotation of the second grating are the same as a direction and an angle of the first grating to compensate for The optical path difference caused by the first grating. 如申請專利範圍第3項所述之光譜量測系統,包括一面形光偵測器,用以接收上述單色光,以便紀錄上述單色光的強度。The spectral measuring system of claim 3, comprising a one-sided photodetector for receiving the monochromatic light to record the intensity of the monochromatic light. 如申請專利範圍第4項所述之光譜量測系統,其中上述第一無聚焦模組包括:一第一透鏡,用以接收上述入射光;一第二透鏡,用以將上述入射光平行輸出至上述第一光柵;以及一第一光圈,設置在上述第一透鏡與上述第二透鏡之間,用以提高光譜解析度。The spectral measurement system of claim 4, wherein the first non-focusing module comprises: a first lens for receiving the incident light; and a second lens for outputting the incident light in parallel. And the first grating; and a first aperture disposed between the first lens and the second lens for improving spectral resolution. 如申請專利範圍第5項所述之光譜量測系統,更包括一第三無聚焦模組,設置在上述第一光柵與上述第二光柵之間,其中上述第三無聚焦模組包括:一第三透鏡,用以接收從上述第一光柵所輸出之上述繞射光;一第四透鏡,用以改變從上述第三透鏡所輸出之上述繞射光的光跡;一第二光圈,設置在上述第三透鏡與上述第四透鏡之間,用以提高光譜解析度,其中上述第三透鏡與上述第二光圈從上述第一光柵所輸出的光篩選出一特定波長,以便只輸出具有上述特定波長的上述繞射光;以及一第五透鏡,用以將上述繞射光平行輸出至上述第二光柵。The spectral measurement system of claim 5, further comprising a third non-focusing module disposed between the first grating and the second grating, wherein the third non-focusing module comprises: a third lens for receiving the diffracted light outputted from the first grating; a fourth lens for changing a trace of the diffracted light outputted from the third lens; a second aperture disposed at the Between the third lens and the fourth lens, the spectral resolution is improved, wherein the third lens and the second aperture filter a specific wavelength from the light output by the first grating, so as to output only the specific wavelength. The diffracted light; and a fifth lens for outputting the diffracted light in parallel to the second grating. 如申請專利範圍第6項所述之光譜量測系統,其中上述第三無聚焦模組包括:一第六透鏡,用以接收從上述第二光柵所輸出之上述繞射光;以及一第七透鏡,用以改變從上述第六透鏡所輸出之上述繞射光的光跡,以便輸出與上述系統法線平行之上述單色光至上述面形光偵測器。The spectral measurement system of claim 6, wherein the third non-focusing module comprises: a sixth lens for receiving the diffracted light outputted from the second grating; and a seventh lens And a track for changing the diffracted light outputted from the sixth lens to output the monochromatic light parallel to the normal of the system to the planar photodetector. 一種光譜量測方法,適用於一光譜量測系統,上述光譜量測系統包括一第一無聚焦模組、一第二無聚焦模組、一第三無聚焦模組、一第一光柵與一第二光柵,上述光譜量測方法包括:藉由上述第一無聚焦模組接收一待測物所發出的一入射光,使得上述入射光平行於一系統法線;藉由上述第一光柵與上述第二無聚焦模組,從上述第一無聚焦模組所輸出之上述入射光中篩選出一特定波長,使得上述第二無聚焦模組只輸出具有上述特定波長的一繞射光;藉由上述第二光柵和上述第二無聚焦模組消除上述第一光柵所造成的光程差;以及藉由上述第三無聚焦模組接收從上述第二光柵所輸出之上述繞射光,以便輸出與上述系統法線平行之一單色光。A spectral measurement method is applicable to a spectral measurement system, wherein the spectral measurement system comprises a first non-focusing module, a second non-focusing module, a third non-focusing module, a first grating and a The second grating, the spectral measurement method includes: receiving, by the first non-focusing module, an incident light emitted by a test object, so that the incident light is parallel to a system normal; by using the first grating The second non-focusing module selects a specific wavelength from the incident light output by the first non-focusing module, so that the second non-focusing module outputs only one diffracted light having the specific wavelength; The second grating and the second non-focusing module cancel the optical path difference caused by the first grating; and receive the diffracted light outputted from the second grating by the third non-focusing module to output and The above system normal is parallel to one of the monochromatic lights. 如申請專利範圍第8項所述之光譜量測方法,更包括:調整上述第一光柵,使得上述入射光與上述第一光柵的入射角對應於上述特定波長;以及調整上述第二光柵,使得上述第二光柵轉動的角度和方向與上述第一光柵轉動的角度和方向相同,以便補償上述第一光柵所造成的光程差。The method for measuring a spectrum according to claim 8, further comprising: adjusting the first grating such that an incident angle of the incident light and the first grating corresponds to the specific wavelength; and adjusting the second grating so that The angle and direction of rotation of the second grating are the same as the angle and direction of rotation of the first grating to compensate for the optical path difference caused by the first grating. 如申請專利範圍第9項所述之光譜量測方法,更包括藉由一面形光偵測器接收上述單色光,以便分析上述待測物的影像。The method for measuring a spectrum according to claim 9 further includes receiving the monochromatic light by a one-side photodetector to analyze an image of the object to be tested.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104034419A (en) * 2014-05-05 2014-09-10 中国科学院长春光学精密机械与物理研究所 Imaging spectrometer system capable of correcting bending of spectral line and correction method thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106872034B (en) * 2017-01-13 2018-11-13 清华大学 Quick three-dimensional muti-spectrum imaging system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4995724A (en) * 1988-08-18 1991-02-26 Anritsu Corporation Optical spectrum analyzer with high performance measurement function
TW588156B (en) * 2002-12-24 2004-05-21 Ind Tech Res Inst Real time infrared chemical imaging spectrometry
TWI245114B (en) * 2004-10-11 2005-12-11 Ind Tech Res Inst Apparatus for measuring imaging spectrograph
TWI259902B (en) * 2004-10-20 2006-08-11 Ind Tech Res Inst Double-pass optical spectrum measuring apparatus and method of eliminating polarization dependence for the same
TWI292030B (en) * 2006-01-13 2008-01-01 Ind Tech Res Inst High density multi-channel detecting device
TWI340237B (en) * 2007-10-02 2011-04-11 Ind Tech Res Inst Multi-channel apparatus and method for retardation analysis
TW201024690A (en) * 2008-12-23 2010-07-01 Ind Tech Res Inst Apparatus and method for measuring optical spectrum distribution
CN101551271B (en) * 2009-05-25 2010-08-25 哈尔滨工业大学 An optical spectrometer based on swinging reflector and transmission grating

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104034419A (en) * 2014-05-05 2014-09-10 中国科学院长春光学精密机械与物理研究所 Imaging spectrometer system capable of correcting bending of spectral line and correction method thereof
CN104034419B (en) * 2014-05-05 2017-04-05 中国科学院长春光学精密机械与物理研究所 The imaging spectral instrument system of recoverable Spectral line bend and its bearing calibration

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