TW201320831A - Single matching network, construction method thereof, and radio frequency power source system of the matching network - Google Patents

Abstract

The present invention provides a single matching network suitable for at least two frequency inputs, which is used to selectively provide radio frequency power match to a plasma load for any one of the two frequencies. The single matching network comprises an input terminal connected to the multi-frequency input and an output terminal connected to the plasma load. There are capacitors and inductors connected in series between the input terminal and the output terminal, and the capacitors and inductors constitute a branch. The capacitance of the capacitor is C0, and the inductance of the inductor is L0, wherein the capacitance C0 and the inductance L0 satisfy the following relations: j<omega>1L0+1/j<omega>1C0=jy1 and j<omega>2L0+1/j<omega>2C0=jy2, where <omega>1=2<pi>f1, <omega>2=2<pi>f2, f1 and f2 are magnitudes of the two frequencies, respectively, y1 is the impedance of the branch required for achieving the matching state under frequency f1, and y2 is the impedance of the branch required for achieving the matching state under frequency f2.

Description

Single matching network, its construction method and the matching network RF power source system

The present invention relates to a radio frequency power source and matching network for a plasma processing chamber, and more particularly to a matching network capable of implementing a multi-frequency RF power selection application, a method of constructing the same, and an RF power source system using the matching network.

Plasma processing chambers utilizing two or more radio frequency frequencies are well known in the art. Generally, a plasma processing chamber having a dual frequency input receives RF bias power having a frequency of less than about 15 MHz and RF source power having a slightly higher frequency (about 27-200 MHz). As used herein, radio frequency bias power generally refers to radio frequency power used to control ion energy and ion energy distribution; radio frequency source power generally refers to radio frequency power used to control plasma ion dissociation or plasma density. As some specific embodiments, the plasma processing chamber typically operates at a radio frequency offset frequency of, for example, 100 MHz, 2 MHz, 2.2 MHz, or 13.56 MHz, and an RF source frequency operating at 13.56 MHz, 27 MHz, 60 MHz, 100 MHz, or higher.

Recently, the industry has proposed plasma processing chambers operating at one RF bias frequency and two RF source frequencies. For example, a plasma etching machine operating at a frequency offset frequency of 2 MHz and two RF source frequencies of 27 MHz and 60 MHz, respectively, has been proposed in the industry. In this way, the dissociation of various ion species can be controlled using two source RF frequencies. Regardless of the foregoing structural arrangement, in the prior art, each RF frequency is provided by a single RF power source, and each of the single power sources is coupled to a single matching network.

1 shows a block diagram of a prior art plasma processing chamber having multiple frequency inputs with a radio frequency bias power supply (or power generator) and two RF source power supplies (or power generators). More specifically, the upper electrode 105, the lower electrode 110, and the plasma 120 generated between the two electrodes are schematically illustrated in the plasma processing chamber 100 of FIG. As is well known, the electrode 105 is typically implanted in the top surface of the chamber, the lower electrode 110 is typically implanted in the lower cathode, and a process member (eg, a semiconductor wafer) is placed in the lower cathode. on. As shown in FIG. 1, the RF bias power supply 125 provides RF power to the processing chamber 100 through the matching network 140. The frequency of the RF bias power is f1, which is typically 2 MHz or 13 MHz (more precisely, should be 13.56 MHz), and the RF bias power of the frequency f1 is applied to the lower electrode 110. Figure 1 also shows two RF source power supplies 130 and 135 operating at frequencies f2 and f3, respectively. For example, f2 can be set to 27 MHz and f3 can be set to 60 MHz. The RF source power supplies 130 and 135 provide RF power to the processing chamber 110 via respective matching networks 145 and 150, respectively. The RF source power may be applied to the lower electrode 110 or the upper electrode 105. It should be noted that in all of the illustrations of this patent, the output of the matching network is shown in combination as a single arrow pointing to the processing chamber. The arrow represents a symbolic representation for the purpose of covering any type of connection between the matching network and the plasma, whether through the lower electrode, through the top electrode, or through an inductively coupled coil. For example, the RF bias power can be coupled to the processing chamber through the lower electrode 110, and the RF source power is coupled to the processing chamber through an electrode 105 or an inductive coil in the gas showerhead. Conversely, the RF bias power and RF source power may be coupled to the processing chamber through the lower electrode 110.

2 shows the structure of another multi-frequency plasma processing chamber having two RF bias powers switchable and one RF source power and connected to respective RF matching networks. In FIG. 2, two RF bias power supplies 225 and 255 provide switchable RF bias powers f1 and f2 to the processing chamber 200 via switch 232. The switches 232 are connected to matching networks 240 and 245, respectively. The operating frequency f1 of the RF bias power is typically 2 MHz or 2.2 MHz, and the operating frequency f2 of the RF bias power is typically 13 MHz (more precisely, 13.56 MHz). Both of the above RF bias powers are typically applied to the lower electrode 210. Figure 2 also shows a radio frequency source power supply 235 that operates at frequency f3, e.g., 27 MHz, 60 MHz, 100 MHz, and the like. The power of the RF source power supply 235 is transferred to the processing chamber 220 through the matching network 250 and applied to the lower electrode 210. The source power is used to control the plasma density, ie, ion detachment of the plasma.

The structure shown in Figure 2 enables a dual application in which power having a frequency of f1/f3 or f2/f3 can be applied to the processing chamber. For example, f1 may be 400 kHz to 5 MHz; f2 may be 10 MHz to 20 MHz, but is typically less than 15 MHz; f3 may be 27 MHz to 100 MHz or higher. In one embodiment, f1 is 2 MHz, f2 is 13.56 MHz, and f3 is 60 MHz. Such a configuration makes it very easy to run process recipes that require switching between high and low frequency bias powers.

As shown in Figure 2, switch 232 has one input and two selectable outputs. The inputs are coupled to RF bias power supplies 225 and 255. One output of switch 232 is coupled to matching network 240 and the other output is coupled to matching network 245. The controller 262 is configured to control the switch 232 such that when the RF bias power supply 225 operates and provides its output to the switch 232, the controller 262 indicates the switch 232 and the matching network 240 The output is coupled; the controller 262 instructs the switch to be coupled to the output of the matching network 245 when the RF bias power supply 255 is operational. It should be noted that in this system, a single switch is used to connect one of the two frequencies to one of the two matching networks. The switch can be a radio frequency power vacuum relay or a PIN diode.

As can be understood from the above examples, each power source requires a matching network to work in accordance with its output frequency. Then the entire system requires multiple matching networks, which increases the complexity and cost of the system. If cost and system reliability are considered, people prefer to use a single matching network to work with multiple RF frequencies, and such settings do not reduce the efficiency of RF coupling.

This summary provides a basic understanding of certain aspects and features of the invention. This summary is not an extensive overview of the invention, and is not intended to Its sole purpose is to present some concepts of the invention in a

The present invention provides a single matching network suitable for at least two frequency inputs for selectively providing radio frequency power matching to a plasma load for any of the two frequencies, the single matching network comprising An input coupled to the multi-frequency input and an output coupled to the plasma load, including a capacitor and an inductor connected in series between the input and the output, and the capacitor and the inductor form a a branch, a capacitance value of the capacitor is C ₀ , and an inductance value of the inductor is L ₀ , wherein the capacitance value C ₀ and the inductance value L ₀ satisfy the following relationship:

Jω ₁ L ₀ +1/jω ₁ C ₀ =jy1

Jω ₂ L ₀ +1/jω ₂ C ₀ =jy2

Where ω ₁ = 2πf1, ω ₂ = 2πf2, the f1 and f2 are the frequency magnitudes of the two frequencies, respectively, y1 is the impedance required to reach the matching state at the frequency f1, and y2 is the frequency The impedance required to reach the branch in the matching state is reached under f2.

The matching network is an L-type or T-type or π-type network, or any combination and modification of the above.

The input of the single matching network is connected to a single RF power supply device, and the single RF power supply device selectively outputs one of the frequencies f1 or f2 for a certain period of time.

The plasma load is a plasma processing chamber.

The plasma processing chamber includes an upper electrode and a lower electrode, and an output of the single matching network is coupled to the upper electrode or the lower electrode.

The matching network further includes a variable element coupled between the branch and the ground.

The variable element is a variable capacitor or a variable inductor or a combination of a variable capacitor and a variable inductor.

The present invention also provides an RF power source system for switchably coupling one of at least two frequencies f1 and f2 to an electrode of a plasma processing chamber, the RF source power system comprising: an RF power source device For optionally outputting one of the frequencies f1 and f2; a matching network having an input connected to the RF power source device and an output connected to the electrode, the matching network The capacitor includes a capacitor having a capacitance value of C ₀ and an inductor having an inductance value of L ₀ , wherein the capacitor and the inductor are connected in series to each other to form a branch; and wherein the capacitor value C ₀ and the inductor value L ₀ satisfy the following relationship :

Jω ₁ L ₀ +1/jω ₁ C ₀ =jy1

Jω ₂ L ₀ +1/jω ₂ C ₀ =jy2

Where ω ₁ = 2πf1, ω ₂ = 2πf2, the f1 and f2 are the frequency magnitudes of the two frequencies, respectively, y1 is the impedance required to reach the matching state at the frequency f1, and y2 is the frequency The impedance required to reach the branch in the matching state is reached under f2.

The matching network is an L-type or T-type or π-type network, or any combination and modification of the above.

The electrode is an upper or lower electrode of the plasma processing chamber.

The RF power source system further includes a variable component connected between the branch and the ground.

Further, the present invention also provides a method of constructing a matching network for coupling radio frequency energy from an RF power source device to a plasma load, the RF power source device optionally providing operation Power output at frequency f1 or frequency f2, the method comprising the steps of: selecting a capacitor and an inductor in the matching network according to the following formula, the capacitor and the inductor being connected in series to each other and forming a path, the capacitance of the capacitor The value of the inductance of the inductor is C _{0 '} L ₀ :

Jω ₁ L ₀ +1/jω ₁ C ₀ =jy1

Jω ₂ L ₀ +1/jω ₂ C ₀ =jy2

Where ω ₁ = 2πf1, ω ₂ = 2πf2, the f1 and f2 are the frequency magnitudes of the two frequencies, respectively, y1 is the impedance required to reach the matching state at the frequency f1, and y2 is the frequency Reaching the impedance required to match the branch under f2; connecting the capacitor and the inductor in series to obtain the matching network, and connecting the matching network to the RF power source device and the plasma in series Between body loads.

The matching network is constructed as an L-type or T-type or π-type network, or any combination and variation of the above.

Further, the present invention also provides a single matching network suitable for at least two frequency inputs for selectively providing radio frequency power matching to a plasma load for any of the two frequencies, the single The matching network includes an input connected to the multi-frequency input and an output connected to the plasma load, including capacitance and inductance connected in parallel with each other between the input and the output, and the mutual The capacitors and inductors connected in parallel form a path, the capacitance value of the capacitor is C ₄ , and the inductance value of the inductor is L ₄ , wherein the capacitance value C ₄ and the inductance value L ₄ satisfy the following relationship:

1/jω ₁ L ₄ +jω ₁ C ₄ =1/jy1

1/jω ₂ L ₄ +jω ₂ C ₄ =1/jy2

Where ω ₁ = 2πf1, ω ₂ = 2πf2, the f1 and f2 are the frequency magnitudes of the two frequencies, respectively, y1 is the impedance required to reach the matching state at the frequency f1, and y2 is the frequency The impedance required to reach the branch in the matching state is reached under f2.

The matching network is an L-type or T-type or π-type network, or any combination and modification of the above.

The input of the single matching network is connected to a single RF power supply device, and the single RF power supply device selectively outputs one of the frequencies f1 or f2 for a certain period of time.

The plasma load is a plasma processing chamber.

The plasma processing chamber includes an upper electrode and a lower electrode, and an output of the single matching network is coupled to the upper electrode or the lower electrode.

Further, the present invention also provides an RF power source system for switchably coupling one of at least two frequencies f1 and f2 to an electrode of a plasma processing chamber, the RF source power system comprising: a radio frequency a power source device for selectively outputting one of the frequencies f1 and f2; a matching network having an input coupled to the RF power source device and an output coupled to the electrode, The matching network includes a capacitor having a capacitance value of C ₄ and an inductor having an inductance value of L ₄ , the capacitor and the inductor being connected in parallel with each other, and the mutually parallel capacitors and inductors constitute a branch; and the capacitance value C ₄ and the inductance value L ₄ satisfy the following relationship:

1/jω ₁ L ₄ +jω ₁ C ₄ =1/jy1

1/jω ₂ L ₄ +jω ₂ C ₄ =1/jy2

Where ω ₁ = 2πf1, ω ₂ = 2πf2, the f1 and f2 are the frequency magnitudes of the two frequencies, respectively, y1 is the impedance required to reach the matching state at the frequency f1, and y2 is the frequency The impedance required to reach the branch in the matching state is reached under f2.

The matching network is an L-type or T-type or π-type network, or any combination and modification of the above.

The electrode is an upper or lower electrode of the plasma processing chamber.

Still further, the present invention also provides a method of constructing a matching network for coupling radio frequency energy from an RF power source device to a plasma load, the RF power source device optionally providing operation The power output at frequency f1 or frequency f2, the method comprising the steps of: selecting a capacitor and an inductor in the matching network according to the following formula, the capacitor and the inductor being connected in parallel to each other and forming a path, the capacitor The capacitance value is C _{4 '} The inductance value of the inductor is L ₄ :

1/jω ₁ L ₄ +jω ₁ C ₄ =1/jy1

1/jω ₂ L ₄ +jω ₂ C ₄ =1/jy2

Where ω ₁ = 2πf1, ω ₂ = 2πf2, the f1 and f2 are the frequency magnitudes of the two frequencies, respectively, y1 is the impedance required to reach the matching state at the frequency f1, and y2 is the frequency Reaching the impedance required to match the branch under f2; paralleling the capacitor and the inductor to obtain the matching network, and connecting the matching network to the RF power source device and the plasma in series Between body loads.

The matching network is constructed as an L-type or T-type or π-type network, or any combination and variation of the above.

The method also includes connecting a variable shunt capacitor or a variable shunt inductor to the ground and the matching network.

The frequency f1 or f2 is selected from one of the following frequencies: 2 MHz, 13.56 MHz, 27 MHz, 60 MHz, 100 MHz, and 120 MHz. .

3 shows a schematic diagram of a plasma processing chamber in accordance with an embodiment of the present invention in which a single matching network HF1 is used to provide radio frequency matching for any of a plurality of switchable RF source powers. As shown in FIG. 3, the plasma processing chamber has a switchable RF bias power and a switchable RF source power. In this embodiment, the frequency of the first RF bias power is set to 0.5-10 MHz, and the frequency of the second RF bias power is set to 10-30 MHz. Similarly, the frequency of the first RF source power is set to 40-100 MHz, such as 60 MHz, and the frequency of the second RF source power is set to 80-200 MHz, such as 120 MHz. Such a plasma processing chamber enables better plasma density and ion energy control, thereby enhancing flexibility. The left part of Figure 3 shows an element 300 for providing a switchable plurality of radio frequency bias powers (i.e., low frequency portions), and the right part of Figure 3 shows a plurality of radio frequency source powers for providing switchability ( That is, the element 310 of the high frequency portion). The bold arrows shown schematically illustrate the coupling of radio frequency bias power and source power to the plasma processing chamber in any known conventional manner, including capacitive coupling, inductive coupling, spiral mode coupling, and the like.

In the present embodiment, a single RF power supply device 300 and 310 is used to generate one of a plurality of available frequencies, which in this embodiment is one of two available frequencies. It should be understood that although various designs may be used to construct such RF power supply devices to produce a plurality of available frequencies, the switchable RF bias power or low frequency power generator 300 shown herein includes a direct type. A digital frequency synthesizer (DDS) 302 that provides a radio frequency signal having one of a plurality of available frequencies. Based on design choices, the RF signal is then amplified by an amplification stage 304 through a wide band amplifier or two narrow band amplifiers. The output of the amplification stage 304 is coupled to a switch 305 that is based on the frequency output of a direct digital synthesizer (DDS) 302, either connected to a low frequency filter (LF1 filter) 306 or to a low frequency filter ( LF2 filter) 308. The output of the power generator 300 is coupled to an input of a switch 311 that can switch connections between any of the matching networks LF1 and LF2. Based on this configuration, the matching network LF1 can be optimized to transmit power at one of two switchable frequencies, while the matching network LF2 is optimized to transmit power at another frequency of the two switchable frequencies. . An output of one of the matching networks described above is applied to the plasma processing chamber.

In the present embodiment, the RF source power or switchable high frequency power generator 310 is used to generate one of a plurality of available frequencies. As an embodiment, it may be a "mirror" of the aforementioned generator 300, including a direct digital synthesizer (DDS) 312 that provides a radio frequency signal having a frequency selected from one of a plurality of available frequencies. Based on design choices, the signal is amplified by amplification stage 314 by a wideband amplifier or two narrowband amplifiers. The output of the amplification stage 314 is coupled to the switch 315, which outputs either the high frequency filter (HF1 filter) 316 or the high frequency filter (HF2 filter) according to the frequency output of the DDS 312. Any one of 318). Regardless of the output frequency of power generator 310, the output of power generator 310 is coupled to a single matching network HF1. An output of the matching network HF1 is coupled to the plasma processing chamber.

It should be understood that although the offset frequency portion is illustrated in FIG. 3 as having two matching networks LF1 and LF2, and the source frequency portion is illustrated as having only one matching network HF1, this is merely for highlighting by way of example. Features of the invention. That is, the specific configuration described above helps to highlight the differences in utilizing two matching networks or a single matching network. However, in practical applications, the bias power portion can be set to mimic the source power portion, i.e., it can also be configured to have only a single matching network in accordance with the spirit of the present invention. Also, in accordance with the spirit of the present invention, a single matching network can be constructed to operate for switchable bias power, using only a single source power. Conversely, a single matching network can be constructed to operate for switchable source power, using only a single bias power.

As shown in FIG. 3, as an embodiment of the present invention, a single matching network HF1 is used to operate for two high frequency RF source powers. According to a feature of the invention, the single matching network HF1 is arranged to enable efficient energy coupling to any of a plurality of switchable frequencies. How to set such a matching network HF1 will be explained below.

Assuming the target frequencies are f1 (for example, 60 MHz) and f2 (for example, 120 MHz), please refer to FIG. 4 and FIG. 5. FIG. 4 is a Smith Chart showing how to form at the target frequency f1 (60 MHz). Matching; Figure 5 is a Smith chart showing how a match is formed at the target frequency f2 (120 MHz). The single matching network HF1 has a series branch S and a parallel branch P (shown in FIG. 6) under the condition of frequency f1, wherein the target impedance of the series branch S is j*y ₁ at the frequency. The single matching network HF1 has a series branch S and a parallel branch P under the condition f2, wherein the target impedance of the series branch S is j*y ₂ . As an embodiment, the series branch S of the matching network HF1 has a capacitor element and an inductor element connected in series to match the power, and the capacitance value and the inductance value are C ₀ and L _{0 , respectively} . In order to meet the impedance matching requirements of frequencies f1 and f2, the values of C ₀ and L ₀ should be set to satisfy the following formula:

Jω ₁ L ₀ +1/jω ₁ C ₀ =jy ₁

Jω ₂ L ₀ +1/jω ₂ C ₀ =jy ₂

Where ω ₁ = 2πf1 and ω ₂ = 2πf2.

To clarify how to set the parameters of a single matching network HF1 to operate at two different frequencies f1 and f2, please refer to the high frequency portion of the embodiment shown in FIG. Assume that the target frequency is f1=60MHz and f2=120MHz. The single matching network HF1 has a series branch S and a parallel branch P at a frequency f1, wherein the target impedance of the series branch S is j*y ₁ and the single matching network HF1 has a series branch at the frequency f2 The road S and a parallel branch P, wherein the target impedance of the series branch S is j*y ₂ . As can be seen from the specific embodiment shown in FIG. 3, C ₀ and L ₀ should satisfy:

Jω ₁ L ₀ +1/jω ₁ C ₀ =jy ₁

Jω ₂ L ₀ +1/jω ₂ C ₀ =jy ₂

Where ω ₁ = 2πf1 and ω ₂ = 2πf2.

Therefore, we need to determine the values C ₀ and L ₀ so that the above-mentioned single matching network HF1 portion can satisfy the matching conditions of f1 and f2. Referring again to Figure 4, assume that the load impedance is Z _L60 = 21.9 + 164.0 * i at a frequency of 60 MHz. As an example, assuming that the single matching network HF1 is designed as an L-type matching network, it requires a capacitance C _s60 = 19 pf in the series branch S and a capacitance C _p60 = 60 pf in the parallel branch P. Then, y ₁ = 1 / ω ₁ C _s60 = -139.6 Ω. Referring again to Figure 5, assume that the load impedance Z _L120 = 3.3 + 25.4 * i at a frequency of 120 MHz. Then the L-type matching requires the capacitance C _s120 = 102 pf in the series branch S and the capacitance C _p120 = 100 pf in the parallel branch P, so y ₂ = 1 / ω ₂ C _s120 = -13.0 Ω. Solve the following equations:

Jω ₁ L ₀ +1/jω ₁ C ₀ =jy ₁ =-139.6*jΩ

Jω ₂ L ₀ +1/jω ₂ C ₀ =jy ₂ =-13.0*jΩ

Where ω ₁ = 2πf1, ω ₂ = 2πf2

Then L ₀ = 100 nH and C ₀ = 15 pf.

Thus, using the method of the present invention may be constructed as shown in FIG derived single matching network shown in 6800, which is L-shaped, which utilizes a 100nH inductor value L ₀ is the inductance and capacitance values of the capacitance C ₀ is 15pf Connected in series to the series branch S. A variable capacitor Cp is connected to the parallel branch P, set to 60 pf at 60 MHz and set to 100 pf at 120 MHz. Thus, a single matching network as shown in Figure 6 can be used for systems with two switchable frequencies.

The variable capacitor Cp shown in FIG. 6 is a variable element or an adjustable element connected between the series branch S and the ground, and the value is adjustable to satisfy a single matching network. 800 meets the matching requirements at different frequencies f1 or f2. The connection relationship of the variable capacitor Cp can be variously modified. For example, the variable capacitor Cp can be connected between the ground terminal and one of the following: the input end of the matching network 800, the capacitor The midpoint between the inductor and the output, or the output of the matching network 800. Furthermore, since the single matching network of the present invention may be an L-type, a π-type or a T-type, or a combination of any two of the L-type, T-type, and π-type combinations or combinations thereof (described later in detail), The variable capacitor Cp is connected to one end of the series branch S and may also have a corresponding connection manner. This connection should be well known to those skilled in the art, and thus will not be described in detail herein. It should be understood that the variable element may be a variable capacitor, a variable inductor, or a combination of a variable capacitor and a variable inductor.

As described above, the present invention is not limited to the specific embodiment as shown in FIG. One skilled in the art can design a single matching network to provide radio frequency matching for any switchable frequency in accordance with the teachings of the present invention. Figure 7 illustrates another embodiment in which the plasma processing chamber includes switchable RF bias power and switchable RF source power. The RF source power portion is constructed similarly to the bias power portion shown in FIG. 3, that is, has two matching networks HF1 and HF2, each of which operates in conjunction with a matching network. However, the RF bias power portion or the low frequency power portion of Figure 3 is set in accordance with the method of the present invention. The switchable power generator 700 is coupled to a single matching network LF1. The power generator 700 includes a direct digital synthesizer (DDS) 702 for providing a radio frequency signal having a frequency selected from a plurality of frequencies available. The amplification stage 704 then uses a wideband amplifier or two narrowband amplifiers to amplify the RF signal, depending on design choices. The output of the amplification stage 704 is coupled to a switch 705 that is based on the frequency output of a direct digital synthesizer (DDS) 702 that is either connected to a low frequency filter (LF1 filter) 706 or to a low frequency filter. (LF2 filter) 708. The output of the power generator 700 is coupled to a single matching network LF1. The selection of the parameter values of the capacitive element and the inductive element of the single matching network LF1 is the same as the selection of the corresponding parameter value of the aforementioned high frequency portion. An output of the single matching network LF1 is coupled to the plasma processing chamber.

As previously mentioned, the single matching network of the present invention shown in FIG. 6 is L-shaped, which includes a capacitor C ₀ and an inductance L _{0 in} series with each other. It should be understood that the single matching network of the present invention may also be various equivalent variants of the matching network shown in FIG. 6, such as transforming the L-shape shown in FIG. 6 into: π-type or T-type, or the aforementioned L-type, A combination or combination of any two of the T-type and the π-type.

For example, FIG. 8 illustrates another embodiment of a single matching network in accordance with the present invention. The single matching network 820 is a T-type matching network for any of the switchable offset frequencies f1 or f2. One provides impedance matching. In the matching network 820, the values of the inductance L and the capacitance C should both satisfy the matching requirements of the impedance at the two specific frequencies f1 or f2, that is, the impedance y _{f1_1 of the} series branch S1 at the frequency f1, series branch impedance _y f1_2 S2 and S1 of the series branch impedance at the frequency f2 _y f2_1, the impedance of the series branch S2 _y f2_2. Setting such a matching network is similar to the setting process of the L-type network shown in FIG. 6 described above. If the frequency is f1, the load impedance is Z _f1 . T-type matching series inductor _L s1f1 need of branch S1, S2 series branch and an inductance _L s2f1 P on the capacitance C _pf1 parallel branch. Then y _{f1_1} = ω ₁ L _s1f1 , y _{f1_2} = ω ₁ L _s2f1 . When the frequency is f2, the load impedance is Z _f2 . T-type matching series inductor _L s1f2 need of branch S1, S2 series branch and an inductance _L s2f2 P on the capacitance C _pf2 parallel branch. Then y _{f2_1} = ω ₂ L _s1f2 , y _{f2_2} = ω ₂ L _s2f2 . Solve the following two equations separately:

Jω ₁ L ₁ +1/jω ₁ C ₁ =jy _{f1_1}

Jω ₂ L ₁ +1/jω ₂ C ₁ =jy _{f2_1}

with

Jω ₁ L ₂ +1/jω ₁ C ₂ =jy _{f1_2}

Jω ₂ L ₂ +1/jω ₂ C ₂ =jy _{f2_2}

Where ω ₁ = 2πf1, ω ₂ = 2πf2

Series available, C _2, L ₂ value on the L _1, C _1, and the series branch S2 branch S1.

Figure 9 illustrates another embodiment of a single matching network in accordance with the present invention. The single matching network 830 is a π-type matching network for providing impedance to any of the switchable source frequencies f1 or f2. match. Similarly, if the frequency is f1, the load impedance is Z _f1 . The π-type matching requires that the inductance on the series branch S is L _f1 , the capacitance on the parallel branch P1 is C _{p1_f1} and the capacitance on the parallel branch P2 is C _{p2_f1} , then y _f1 = ω ₁ L _f1 . When the frequency is f2, the load impedance is Z _f2 . The π-type matching requires that the inductance on the series branch S is L _f2 , the capacitance on the parallel branch P1 is C _{p1_f2} and the capacitance on the parallel branch P2 is C _{p2_f2} , then y _f2 = ω ₂ L _f2 . Solve the following equations:

Jω ₁ L ₃ +1/jω ₁ C ₃ =jy _f1

Jω ₂ L ₃ +1/jω ₂ C ₃ =jy _f2

Where ω ₁ = 2πf1, ω ₂ = 2πf2

Then the values of L ₃ and C ₃ can be obtained.

Figures 10, 11 and 12 illustrate an embodiment variant of another single matching network of the present invention that can match the frequency f1 or f2. They differ from the matching networks shown in Figures 6, 8 and 9 above in that the capacitors and inductors in the matching network shown in Figures 6, 8 and 9 are connected in series, while Figures 10, 11 and 12 The capacitors and inductors in the matching network shown are in parallel.

As shown in FIG. 10, the inductor L ₄ and the capacitor C ₄ are connected in parallel, and the matching network is L-shaped. If the frequency is f1, the load impedance is Z _f1 . The L-type matching requires the inductance L _f1 on the series branch S and the capacitance C _f1 on the parallel branch P, then y _f1 = ω ₁ L _f1 . When the frequency is f2, the load impedance is Z _f2 . The L-type matching requires the inductance L _f2 on the series branch S and the capacitance C _f2 on the parallel branch P, then y _f2 = ω ₂ L _f2 . The capacitor C4 value and the inductor L4 value should be set to satisfy the following formula:

1/jω ₁ L ₄ +jω ₁ C ₄ =1/jy _f1

1/jω ₂ L ₄ +jω ₂ C ₄ =1/jy _f2

Where ω ₁ = 2πf1, ω ₂ = 2πf2

Then the values of L ₄ and C ₄ can be obtained.

As shown, L ₅ and a capacitor C ₅ of FIG shunt inductance, L _6, and C ₆ in parallel 11, and T-shaped matching network. If the frequency is f1, the load impedance is Z _f1 . The T-type matching requires that the inductance of the series branch S1 is L _s1f1 , the inductance of the series branch S2 is L _s2f1 and the capacitance of the parallel branch P is C _pf1 . Then y _{f1_1} = ω ₁ L _s1f1 , y _{f1_2} = ω ₁ L _s2f1 . When the frequency is f2, the load impedance is Z _f2 . The T-type matching requires the inductance of the series branch S1 to be L _s1f2 , the inductance of the series branch S2 is L _s2f2 and the capacitance of the parallel branch P is C _pf2 . Then y _{f2_1} = ω ₂ L _s1f2 , y _{f2_2} = ω ₂ L _s2f2 . The capacitance C ₅ value and the inductance L ₅ value should be set to satisfy the following formula:

1/jω ₁ L ₅ +jω ₁ C ₅ =1/jy _{f1_1}

1/jω ₂ L ₅ +jω ₂ C ₅ =1/jy _{f2_1}

The capacitance C ₆ value and the inductance L ₆ value should be set to satisfy the following formula:

1/jω ₁ L ₆ +jω ₁ C ₆ =1/jy _{f1_2}

1/jω ₂ L ₆ +jω ₂ C ₆ =1/jy _{f2_2}

Where ω ₁ = 2πf1, ω ₂ = 2πf2

The values of L ₅ , C ₅ and L ₆ , C ₆ are obtained.

As shown in FIG. 12, the inductor L ₇ and the capacitor C ₇ are connected in parallel, and the matching network is π-type. If the frequency is f1, the load impedance is Z _f1 . π-type matching needs in the series branch S inductor L _f1, the capacitance _C p1_f1 parallel branch P1 and P2 on the capacitor _C p2_f1 parallel branch. Then y _f1 = ω ₁ L _f1 . When the frequency is f2, the load impedance is Z _f2 . The π-type matching requires the inductance of the series branch S to be L _f2 , the capacitance of the parallel branch P1 is C _{p1_f2} and the capacitance of the parallel branch P2 is C _{p2_f2} . Then y _f2 = ω ₂ L _f2 . The capacitance C ₇ value and the inductance L ₇ value should be set to satisfy the following formula:

1/jω ₁ L ₇ +jω ₁ C ₇ =1/jy _f1

1/jω ₂ L ₇ +jω ₂ C ₇ =1/jy _f2

Where ω ₁ = 2πf1, ω ₂ = 2πf2

Then the values of L ₇ and C ₇ can be obtained.

Moreover, in accordance with the spirit and essence of the present invention, the present invention also provides a method of constructing a matching network for coupling radio frequency energy from a radio frequency power source device to a plasma load, the radio frequency power The source device optionally provides a power output operating at frequency f1 or frequency f2, the method comprising the steps of: selecting a capacitor and an inductor in the matching network according to the following formula, the capacitor and the inductor being connected in series to each other and forming a The branch, the capacitance value of the capacitor is C _{0 '} the inductance value of the inductor is L ₀ :

Jω ₁ L ₀ +1/jω ₁ C ₀ =jy1

Jω ₂ L ₀ +1/jω ₂ C ₀ =jy2

Where ω ₁ = 2πf1, ω ₂ = 2πf2, the f1 and f2 are the frequency magnitudes of the two frequencies, respectively, y1 is the impedance required to reach the matching state at the frequency f1, and y2 is the frequency Reaching the impedance required to match the branch under f2; connecting the capacitor and the inductor in series to obtain the matching network, and connecting the matching network to the RF power source device and the plasma in series Between body loads.

The matching network can be constructed as an L-type or T-type or π-type network, or any combination and variation of the above.

In the present invention, including all embodiments described in this patent, the frequency f1 or f2 may be any one of the frequencies, preferably, may be selected from one of the following frequencies: 2MHZ, 13.56MHZ, 27MHz, 60MHz, 100MHz and 120 MHz.

Further, the foregoing method may further include connecting a variable element between the branch and the ground to meet the requirement that the matching network meets the matching at different frequencies f1 or f2. The variable component can be a variable capacitor, a variable inductor, or a combination of a variable capacitor and a variable inductor.

Further, in accordance with the spirit and essence of the present invention, the present invention also provides a method of constructing a matching network for coupling radio frequency energy from a radio frequency power source device to a plasma load, the radio frequency The power source device optionally provides a power output operating at frequency f1 or frequency f2, the method comprising the steps of: selecting a capacitor and an inductor in the matching network according to the following formula, the capacitor and the inductor being connected in parallel and forming One way, the capacitance value of the capacitor is C _{4 '} the inductance value of the inductor is L ₄ :

1/jω ₁ L ₄ +jω ₁ C ₄ =1/jy1

1/jω ₂ L ₄ +jω ₂ C ₄ =1/jy2

Where ω ₁ = 2πf1, ω ₂ = 2πf2, the f1 and f2 are the frequency magnitudes of the two frequencies, respectively, y1 is the impedance required to reach the matching state at the frequency f1, and y2 is the frequency Reaching the impedance required to match the branch under f2; paralleling the capacitor and the inductor to obtain the matching network, and connecting the matching network to the RF power source device and the plasma in series Between body loads.

The matching network can be constructed as an L-type or T-type or π-type network, or any combination and variation of the above.

The frequency f1 or f2 may be any one of the frequencies, and preferably may be selected from one of the following frequencies: 2 MHz, 13.56 MHz, 27 MHz, 60 MHz, 100 MHz, and 120 MHz.

Further, the foregoing method may further include connecting a variable element between the branch and the ground to meet the requirement that the matching network meets the matching at different frequencies f1 or f2. The variable component can be a variable capacitor, a variable inductor, or a combination of a variable capacitor and a variable inductor.

Finally, it should be understood that the processes and techniques described herein are not directly related to any particular device and that it can be implemented in any suitable combination of components. Moreover, various types of general purpose devices can be applied in accordance with the teachings of the present invention. Specialized equipment can also be manufactured to implement the method steps described in this patent, and has certain advantages. The present invention has been described with reference to the specific embodiments thereof, which are intended to be illustrative and not restrictive. Those skilled in the art will appreciate that different combinations of hardware, software, and firmware are suitable for use in practicing the present invention.

The present invention has been described with reference to the preferred embodiments thereof, but all aspects are intended to be illustrative and not restrictive. Those skilled in the art will appreciate that many different combinations of hardware, software, and firmware are suitable for use in practicing the present invention. Further embodiments of the invention will be apparent to those skilled in the art from this disclosure. Various aspects and/or elements described herein may be used singly or in any combination in the related art of plasma processing chambers. The features and embodiments of the present invention are to be understood as illustrative only, and the true scope and spirit of the invention are defined by the following claims.

300, 310. . . RF power supply device

302, 312, 702. . . Direct digital synthesizer

304, 314, 704. . . Magnification level

305, 315, 311, 705. . . switch

306, 308, 706, 708. . . Low frequency filter

310. . . RF source power

LF1, LF2, HF1, 800, 820, 830. . . Matching network

316, 318. . . High frequency filter

F1, f2. . . frequency

S, S1, S2. . . Series branch

P, P1, P2. . . Parallel branch

Cp. . . Variable capacitance

700. . . Power generator

L, L ₄ , L _f1 , L _f2 , L ₅ , L _s1f1 , L _s1f2 , L ₇ . . . inductance

C, C ₄ , C _f1 , C _f2 , C ₅ , C _pf1 , C _pf2 , C ₇ , C _{p1_f1} , C _{p2_f2} , C ₇ . . . capacitance

1 is a schematic diagram of the structure of a prior art multi-frequency plasma processing chamber having a radio frequency bias power generator and two RF source power generators.

2 is a schematic diagram of the structure of a prior art multi-frequency plasma processing chamber having a RF source power generator and a switchable RF bias power generator.

3 is a block diagram of a plasma processing chamber in accordance with an embodiment of the present invention in which a single matching network HF1 is used to provide radio frequency matching for any of the switchable RF source powers.

Figure 4 is a Smith Chart showing how a match is formed at the first frequency (60 MHz).

Figure 5 is a Smith chart showing how a match is formed at a second frequency (120 MHz).

6 is a single matching network capable of matching a first frequency (60 MHz) and a second frequency (120 MHz) provided by the present invention, which is an L-type matching network.

Figure 7 shows a specific embodiment of the invention in which a single matching network LF1 is used to match any of a plurality of switchable offset frequencies, and the other two matching networks HF1 and HF2 are used for matching. Any of a plurality of source frequencies that can be switched.

Figure 8 illustrates another embodiment of the present invention that is capable of matching a single matching network of frequencies f1 or f2, which is a T-type matching network.

Figure 9 illustrates another embodiment of the present invention that is capable of matching a single matching network of frequencies f1 or f2, which is a π-type matching network.

Figure 10 illustrates another embodiment of the present invention that is capable of matching a single matching network of frequencies f1 or f2, which is an L-type matching network in which the capacitance and inductance are connected in parallel.

Figure 11 shows an embodiment of another single matching network of the present invention that can match the frequency f1 or f2, which is a T-type matching network in which the capacitor and the inductor are connected in parallel.

Figure 12 illustrates another embodiment of the present invention that is capable of matching a single matching network of frequencies f1 or f2, which is a π-type matching network in which the capacitance and inductance are connected in parallel.

300, 310. . . RF power supply device

302, 312. . . Direct digital synthesizer

304, 314. . . Magnification level

305, 315, 311. . . switch

306, 308. . . Low frequency filter

310. . . RF source power

LF1, LF2, HF1. . . Matching network

316, 318. . . High frequency filter

F1, f2. . . frequency

Claims (28)

A single matching network suitable for at least two frequency inputs for selectively providing RF power matching to a plasma load for any of the two frequencies, the single matching network including a connection to An input end of the multi-frequency input and an output connected to the plasma load, including a capacitor and an inductor connected in series between the input end and the output end, and the capacitor and the inductor form a path. The capacitance value of the capacitor is C ₀ , and the inductance value of the inductor is L ₀ , wherein the capacitance value C ₀ and the inductance value L ₀ satisfy the following relationship: jω ₁ L ₀ +1/jω ₁ C ₀ =jy1jω ₂ L ₀ +1/jω ₂ C ₀ =jy2 where ω ₁ =2πf1, ω ₂ =2πf2, the f1 and f2 are the frequency magnitudes of the two frequencies, respectively, and y1 is the matching state at the frequency f1 The impedance required for the branch, y2, is the impedance required to reach the matched state at frequency f2. The single matching network according to claim 1, wherein the matching network is an L-type or a T-type or a π-type network, or any combination and modification of the foregoing. The single matching network of claim 1, wherein the input of the single matching network is connected to a single RF power supply device, and the single RF is in a certain period of time. The power supply device selectively outputs one of the frequencies f1 or f2. The single matching network of claim 1, wherein the plasma load is a plasma processing chamber. The single matching network of claim 4, wherein the plasma processing chamber comprises an upper electrode and a lower electrode, and an output end of the single matching network and the upper electrode or the lower electrode Connected. A single matching network as described in claim 1, wherein a variable component is further connected between the branch and the ground. A single matching network as described in claim 6, wherein the variable element is a variable capacitor or a variable inductor or a combination of a variable capacitor and a variable inductor. An RF power source system for switchably coupling one of at least two frequencies f1 and f2 to an electrode of a plasma processing chamber, the RF source power system comprising: an RF power source device for Selectively outputting one of the frequencies f1 and f2; a matching network having an input connected to the RF power source device and an output connected to the electrode, the matching network including a capacitance value a capacitance of C ₀ and an inductance having an inductance value L ₀ , the capacitance and the inductance being connected in series to each other and forming a branch; and wherein the capacitance value C ₀ and the inductance value L ₀ satisfy the following relationship: jω ₁ L ₀ +1/jω ₁ C ₀ =jy1jω ₂ L ₀ +1/jω ₂ C ₀ =jy2 where ω ₁ =2πf1, ω ₂ =2πf2, and f1 and f2 are the frequency magnitudes of the two frequencies, respectively. Y1 is the impedance required to reach the branch in the matching state at frequency f1, and y2 is the impedance required to reach the matching state at frequency f2. The radio frequency power source system of claim 8, wherein the matching network is an L-type or a T-type or a π-type network, or any combination and modification of the above. The RF power source system of claim 8, wherein the electrode is an upper electrode or a lower electrode of the plasma processing chamber. The RF power source system of claim 8, wherein a variable component is further coupled between the branch and the ground. A method of constructing a matching network for coupling radio frequency energy from an RF power source device to a plasma load, the RF power source device optionally providing operation at frequency f1 or frequency f2 Power output, the method comprising the steps of: selecting a capacitor and an inductor in the matching network according to the following formula, the capacitor and the inductor being connected in series to each other and forming a path, the capacitance value of the capacitor being C _{0 '} The inductance value of the inductance is L ₀ :jω ₁ L ₀ +1/jω ₁ C ₀ =jy1jω ₂ L ₀ +1/jω ₂ C ₀ =jy2 where ω ₁ =2πf1, ω ₂ =2πf2, the f1 and f2 Respectively the frequency magnitudes of the two frequencies, y1 is the impedance required to reach the matching state at frequency f1, and y2 is the impedance required to reach the matching state at frequency f2; A capacitor and the inductor are used to obtain the matching network, and the matching network is connected in series between the RF power source device and the plasma load. The method of claim 12, wherein the matching network is constructed as an L-type or T-type or π-type network, or any combination and variation of the above. The method of claim 12, further comprising connecting a variable element between the branch and the ground. A single matching network suitable for at least two frequency inputs for selectively providing RF power matching to a plasma load for any of the two frequencies, the single matching network including a connection to An input end of the multi-frequency input and an output connected to the plasma load include a capacitor and an inductor connected in parallel with each other between the input end and the output end, and the mutually parallel capacitors and inductors form a a branch, the capacitance value of the capacitor is C ₄ , and the inductance value of the inductor is L ₄ , wherein the capacitance value C ₄ and the inductance value L ₄ satisfy the following relationship: 1/jω ₁ L ₄ +jω ₁ C ₄ =1/jy11/jω ₂ L ₄ +jω ₂ C ₄ =1/jy2 where ω ₁ = 2πf1, ω ₂ = 2πf2, the f1 and f2 are the frequency magnitudes of the two frequencies, respectively, y1 is The impedance required to reach the branch in the matching state at frequency f1, y2 is the impedance required to reach the matching state at frequency f2. The single matching network according to claim 15, wherein the matching network is an L-type or a T-type or a π-type network, or any combination and modification of the foregoing. The single matching network of claim 15, wherein the input of the single matching network is connected to a single radio frequency power supply device, and the single radio frequency is within a certain period of time. The power supply device selectively outputs one of the frequencies f1 or f2. A single matching network as described in claim 15 wherein the plasma load is a plasma processing chamber. The single matching network of claim 18, wherein the plasma processing chamber includes an upper electrode and a lower electrode, and an output end of the single matching network and the upper electrode or the lower electrode Connected. The single matching network of claim 15, wherein a variable component is further connected between the branch and the ground. An RF power source system for switchably coupling one of at least two frequencies f1 and f2 to an electrode of a plasma processing chamber, the RF source power system comprising: an RF power source device for Selectively outputting one of the frequencies f1 and f2; a matching network having an input connected to the RF power source device and an output connected to the electrode, the matching network including a capacitance value a capacitor of C ₄ and an inductor having an inductance value of L ₄ , the capacitor and the inductor being connected in parallel with each other, and the mutually parallel capacitors and inductors constitute a branch; and the capacitance value C ₄ and the inductance value L ₄ The following relationship is satisfied: 1/jω ₁ L ₄ +jω ₁ C ₄ =1/jy11/jω ₂ L ₄ +jω ₂ C ₄ =1/jy2 where ω ₁ = 2πf1, ω ₂ = 2πf2, the f1 and f2 Respectively the frequency magnitudes of the two frequencies, y1 is the impedance required to reach the matching state at frequency f1, and y2 is the impedance required to reach the matching state at frequency f2. The radio frequency power source system of claim 21, wherein the matching network is an L-type or a T-type or a π-type network, or any combination and modification of the above. The RF power source system of claim 21, wherein the electrode is an upper electrode or a lower electrode of the plasma processing chamber. A single matching network as described in claim 21, further comprising a variable element connected between the branch and the ground. A method of constructing a matching network for coupling radio frequency energy from an RF power source device to a plasma load, the RF power source device optionally providing operation at frequency f1 or frequency f2 Power output, the method comprising the steps of: selecting a capacitor and an inductor in the matching network according to the following formula, the capacitor and the inductor being connected in parallel to each other and forming a path, the capacitance value of the capacitor being C _{4 '} The inductance value of the inductor is L ₄ :1/jω ₁ L ₄ +jω ₁ C ₄ =1/jy11/jω ₂ L ₄ +jω ₂ C ₄ =1/jy2 where ω ₁ =2πf1, ω ₂ =2πf2, Let f1 and f2 be the frequency magnitudes of the two frequencies, y1 is the impedance required to reach the matching state at frequency f1, and y2 is the impedance required to reach the matching state at frequency f2. The capacitor and the inductor are connected in parallel to obtain the matching network, and the matching network is connected in series between the RF power source device and the plasma load. The method of claim 25, wherein the matching network is constructed as an L-type or a T-type or a π-type network, or any combination and variation of the above. The method of claim 25, wherein the method further comprises connecting a variable shunt capacitor or a variable shunt inductor to the ground and the matching network. The method of claim 25, wherein the frequency f1 or f2 is selected from one of the following frequencies: 2 MHz, 13.56 MHz, 27 MHz, 60 MHz, 100 MHz, and 120 MHz.