TW201318197A - Method for fabricating p-type semiconductor substrate, solar cell and method for fabricating thereof - Google Patents
Method for fabricating p-type semiconductor substrate, solar cell and method for fabricating thereof Download PDFInfo
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
Description
本發明是有關於一種半導體基板的製造方法、電池及其製造方法,且特別是有關於一種P型半導體基板的製造方法、太陽能電池及其製造方法。 The present invention relates to a method of manufacturing a semiconductor substrate, a battery, and a method of manufacturing the same, and more particularly to a method of manufacturing a P-type semiconductor substrate, a solar cell, and a method of manufacturing the same.
石化燃料的能源供應日漸匱乏,且燃燒石化燃料會帶來環境及空氣污染。核能發電雖能供應高電力密度,卻有核輻射與核廢料儲存方面的安全顧慮。前述兩者都有增加社會成本的問題,因此,在開源節流和發展無污染/低污染新能源工業技術的考量與需求下,可再生能源逐漸受到重視,各國都在積極研究將可再生能源作為替代能源的可行性。 The energy supply of fossil fuels is becoming scarcer and the burning of fossil fuels will bring environmental and air pollution. Although nuclear power generation can supply high power density, it has safety concerns about nuclear radiation and nuclear waste storage. Both of them have the problem of increasing social costs. Therefore, under the consideration and demand of open source and energy saving and development of non-polluting/low-pollution new energy industrial technologies, renewable energy is gradually gaining importance. Countries are actively studying the use of renewable energy as an alternative. The feasibility of energy.
在上述可再生能源中,太陽能電池可將太陽光轉換為電力,目前太陽能已成為替代能源的主流之一。依現今太陽能電池的技術而言,大致可分為單晶矽(single crystal silicon)、多晶矽(polycrystal silicon)太陽能電池、非晶矽(amorphous silicon,a-Si)薄膜太陽能電池、III-V族太陽能電池以及有機太陽能電池。以多晶矽太陽能電池而言,其製程步驟繁瑣,包括酸鹼蝕刻、高溫爐管擴散、電漿輔助化學氣相沉積、電極網印以及燒結。上述之製程需耗費大量之器材、能源及時間成本,而使得此類型之太陽能電池的成本無法大幅降低。更詳細地說,習知多晶矽太陽能電池包括P型半導體基板。P型半導體基板上之多晶矽層的 造價佔整個多晶矽太陽能電池造價的一半以上。主因是,P型半導體基板在進行切片及研磨拋光的過程中有將近90%的多晶矽材料被浪費掉了,而使得習知多晶矽太陽能電池的成本無法大幅降低。 Among the above renewable energy sources, solar cells can convert sunlight into electricity, and solar energy has become one of the mainstream energy sources. According to the current solar cell technology, it can be roughly classified into single crystal silicon, polycrystalline silicon solar cell, amorphous silicon (a-Si) thin film solar cell, and III-V solar energy. Battery and organic solar cells. In the case of polycrystalline germanium solar cells, the process steps are cumbersome, including acid-base etching, high-temperature furnace tube diffusion, plasma-assisted chemical vapor deposition, electrode screen printing, and sintering. The above processes require a large amount of equipment, energy and time costs, and the cost of this type of solar cell cannot be greatly reduced. In more detail, conventional polycrystalline germanium solar cells include a P-type semiconductor substrate. Polycrystalline germanium layer on P-type semiconductor substrate The cost accounts for more than half of the total polycrystalline silicon solar cell cost. The main reason is that nearly 90% of the polycrystalline germanium material is wasted during the slicing and polishing process of the P-type semiconductor substrate, so that the cost of the conventional polycrystalline silicon solar cell cannot be greatly reduced.
本發明提供一種P型半導體基板的製造方法,其可降低P型半導體基板的製造成本。 The present invention provides a method of manufacturing a P-type semiconductor substrate, which can reduce the manufacturing cost of a P-type semiconductor substrate.
本發明提供一種太陽能電池的製造方法,其可降低太陽能電池的製造成本。 The present invention provides a method of manufacturing a solar cell, which can reduce the manufacturing cost of the solar cell.
本發明提供一種P型半導體基板的製造方法,其包括下列步驟。提供載體,此載體包括Ⅲ-V族化合物半導體層以及位於Ⅲ-V族化合物半導體層上之Ⅲ族元素層。將矽粉末置於載體之Ⅲ族元素層上。加熱載體,而使矽粉末與載體之Ⅲ族元素層形成P型多晶矽層。 The present invention provides a method of manufacturing a P-type semiconductor substrate, which comprises the following steps. A carrier is provided which includes a III-V compound semiconductor layer and a Group III element layer on the III-V compound semiconductor layer. The tantalum powder is placed on the layer III element layer of the carrier. The carrier is heated to form a P-type polycrystalline germanium layer with the cerium powder and the group III element layer of the carrier.
本發明提供一種太陽能電池的製造方法,其包括下列步驟。提供載體,此載體包括Ⅲ-V族化合物半導體層以及位於Ⅲ-V族化合物半導體層上之Ⅲ族元素層。將矽粉末置於載體之Ⅲ族元素層上。加熱載體,而使矽粉末與載體之Ⅲ族元素層形成P型多晶矽層。在P型多晶矽層上形成N型半導體層。 The present invention provides a method of manufacturing a solar cell comprising the following steps. A carrier is provided which includes a III-V compound semiconductor layer and a Group III element layer on the III-V compound semiconductor layer. The tantalum powder is placed on the layer III element layer of the carrier. The carrier is heated to form a P-type polycrystalline germanium layer with the cerium powder and the group III element layer of the carrier. An N-type semiconductor layer is formed on the P-type polysilicon layer.
本發明提供一種太陽能電池,其包括載體、P型多晶矽層以及N型半導體層。載體包括Ⅲ-V族化合物半導體層。P型多晶矽層位於Ⅲ-V族化合物半導體層上。P型多晶矽層位於N型半導體層與載體之間。 The present invention provides a solar cell comprising a carrier, a P-type polysilicon layer, and an N-type semiconductor layer. The carrier includes a III-V compound semiconductor layer. The p-type polysilicon layer is on the III-V compound semiconductor layer. The p-type polysilicon layer is between the N-type semiconductor layer and the carrier.
在本發明之一實施例中,上述之提供載體的方法包括下列步驟。提供Ⅲ族元素基底。將V族元素粉末置於Ⅲ族元素基底上。加熱Ⅲ族元素基底而使部份的Ⅲ族元素基底與V族元素粉末形成Ⅲ-V族化合物層,而Ⅲ-V族化合物層上殘留另一部份的Ⅲ族元素基底。加熱Ⅲ族元素基底至Ⅲ族元素的熔點,而使另一部份的Ⅲ族元素基底的其中一部份與Ⅲ-V族化合物層形成Ⅲ-V族化合物半導體層,且另一部份的Ⅲ族元素基底的另一部份即為Ⅲ族元素層。 In one embodiment of the invention, the above method of providing a carrier comprises the following steps. A group III element substrate is provided. The group V element powder is placed on the group III element substrate. The group III element substrate is heated such that a portion of the group III element substrate forms a III-V compound layer with the group V element powder, and another portion of the group III element substrate remains on the group III-V compound layer. Heating the base of the group III element to the melting point of the group III element, and forming a portion of the portion of the group III element substrate with the group III-V compound to form a group III-V compound semiconductor layer, and the other portion Another portion of the Group III element substrate is the Group III element layer.
在本發明之一實施例中,上述之將V族元素粉末置於Ⅲ族元素基底上的方法包括下列步驟。將V族元素粉末與溶劑混合成混合液。將此混合液均勻地噴灑於Ⅲ族元素基底上。 In one embodiment of the invention, the above method of placing a Group V element powder on a Group III element substrate comprises the following steps. The group V element powder is mixed with a solvent to form a mixed solution. This mixture was sprayed evenly onto the group III element substrate.
在本發明之一實施例中,上述之將矽粉末置於載體之Ⅲ族元素層上的方法包括下列步驟。將矽粉末與溶劑混合成混合液。將此混合液噴灑於載體之Ⅲ族元素層上。 In one embodiment of the invention, the above method of placing the tantalum powder on the Group III element layer of the support comprises the following steps. The cerium powder is mixed with a solvent to form a mixed solution. This mixture was sprayed onto the Group III element layer of the carrier.
在本發明之一實施例中,上述之加熱載體,而使矽粉末與載體之Ⅲ族元素層形成P型多晶矽層之步驟為:加熱載體至1400℃以上,而使矽粉末與載體之Ⅲ族元素層形成P型多晶矽層。 In one embodiment of the present invention, the step of heating the carrier to form the P-type polycrystalline germanium layer between the tantalum powder and the group III element layer of the carrier is: heating the carrier to 1400 ° C or higher, and causing the tantalum powder and the carrier group III The element layer forms a P-type polycrystalline germanium layer.
在本發明之一實施例中,上述之提供載體的的方法包括下列步驟。提供Ⅲ族元素基底。將V族元素植入Ⅲ族元素基底。活化V族元素,而使V族元素與Ⅲ族元素基底形成載體。 In one embodiment of the invention, the above method of providing a carrier comprises the following steps. A group III element substrate is provided. A group V element is implanted into the group III element substrate. The group V element is activated, and the group V element forms a carrier with the group III element substrate.
在本發明之一實施例中,上述之活化V族元素之方法 包括:利用感應加熱(induction heating)、電磁波或光學地加熱而活化V族元素。 In an embodiment of the invention, the method for activating a group V element Including: activation of group V elements by induction heating, electromagnetic waves or optical heating.
在本發明之一實施例中,在形成上述之P型多晶矽層後,可選擇性地除去Ⅲ-V族化合物半導體層。 In one embodiment of the present invention, the III-V compound semiconductor layer can be selectively removed after forming the P-type polysilicon layer described above.
在本發明之一實施例中,上述之P型半導體基板的製造方法可進一步包括:令P型多晶矽層分成多個子P型多晶矽層。 In an embodiment of the invention, the method for fabricating the P-type semiconductor substrate may further include: dividing the P-type polysilicon layer into a plurality of sub-P-type polysilicon layers.
在本發明之一實施例中,上述之P型半導體基板的製造方法可進一步包括:對子P型多晶矽層進行退火製程。 In an embodiment of the invention, the method for fabricating the P-type semiconductor substrate may further include: performing an annealing process on the sub-P-type polysilicon layer.
在本發明之一實施例中,上述之Ⅲ-V族化合物半導體層包括P型磷化鋁層、P型砷化鋁層、P型銻化鋁層或P型氮化鋁層,而Ⅲ族元素層包括鋁元素層。 In an embodiment of the invention, the III-V compound semiconductor layer comprises a P-type aluminum phosphide layer, a P-type aluminum arsenide layer, a P-type aluminum telluride layer or a P-type aluminum nitride layer, and the III group The element layer includes a layer of aluminum element.
在本發明之一實施例中,上述之N型半導體層之材質包括:N型一氧化矽(n+-Si/O)超晶(surperlattice) In an embodiment of the invention, the material of the N-type semiconductor layer comprises: N-type germanium oxide (n + -Si/O) supercrystal (surperlattice)
在本發明之一實施例中,上述之太陽能電池的製造方法可進一步包括下列步驟。在N型半導體層上形成透明導電電極,而N型半導體層位於P型多晶矽層與透明導電電極之間。 In an embodiment of the invention, the above method for manufacturing a solar cell may further include the following steps. A transparent conductive electrode is formed on the N-type semiconductor layer, and the N-type semiconductor layer is between the P-type polysilicon layer and the transparent conductive electrode.
在本發明之一實施例中,上述之太陽能電池的製造方法可進一步包括下列步驟。在P型多晶矽層上形成反射膜。P型多晶矽層位於反射膜與N型半導體層之間。 In an embodiment of the invention, the above method for manufacturing a solar cell may further include the following steps. A reflective film is formed on the P-type polysilicon layer. The P-type polysilicon layer is between the reflective film and the N-type semiconductor layer.
在本發明之一實施例中,上述之太陽能電池可進一步包括透明導電電極。N型半導體層位於P型多晶矽層與透明導電電極之間。 In an embodiment of the invention, the solar cell described above may further comprise a transparent conductive electrode. The N-type semiconductor layer is between the P-type polysilicon layer and the transparent conductive electrode.
在本發明之一實施例中,上述之太陽能電池可進一步包括反射膜。P型多晶矽層位於反射膜與N型半導體層之間。 In an embodiment of the invention, the solar cell described above may further comprise a reflective film. The P-type polysilicon layer is between the reflective film and the N-type semiconductor layer.
基於上述,在本發明一實施例之P型半導體基板及太陽能電池的製程中,將矽粉末置於Ⅲ族元素層上,並加熱載體,而使矽粉末與Ⅲ族元素層形成P型多晶矽層。因此,相較於習知技術,本發明一實施例之P型半導體基板及太陽能電池的製程不需鋸切和磨去大量的多晶矽層,而可減少大量多晶矽材料的浪費,進而大幅降低P型半導體基板及太陽能電池的製造成本。 Based on the above, in the process of the P-type semiconductor substrate and the solar cell according to an embodiment of the present invention, the tantalum powder is placed on the group III element layer, and the carrier is heated, so that the tantalum powder and the group III element layer form a P-type polycrystalline layer. . Therefore, compared with the prior art, the process of the P-type semiconductor substrate and the solar cell according to an embodiment of the present invention does not require sawing and grinding a large number of polycrystalline germanium layers, thereby reducing the waste of a large amount of polycrystalline germanium materials, thereby greatly reducing the P-type. Manufacturing costs of semiconductor substrates and solar cells.
為讓本發明之上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。 The above described features and advantages of the present invention will be more apparent from the following description.
圖1為本發明一實施例之P型半導體基板的製造流程圖。請參照圖1,本實施例之P型半導體基板的製造方法包括下列步驟。提供載體,此載體包括Ⅲ-V族化合物半導體層以及位於Ⅲ-V族化合物半導體層上之Ⅲ族元素層(步驟S100)。將矽粉末置於載體的Ⅲ族元素層上(步驟S200)。加熱載體,而使矽粉末與載體之Ⅲ族元素層形成P型多晶矽層(步驟300)。以下將配合圖示,詳細地說明本發明一實施例之P型半導體基板的製造過程。 1 is a flow chart showing the manufacture of a P-type semiconductor substrate according to an embodiment of the present invention. Referring to FIG. 1, a method of manufacturing a P-type semiconductor substrate of the present embodiment includes the following steps. A carrier is provided which includes a III-V compound semiconductor layer and a group III element layer on the III-V compound semiconductor layer (step S100). The tantalum powder is placed on the group III element layer of the carrier (step S200). The carrier is heated to form a P-type polysilicon layer with the cerium powder and the Group III element layer of the carrier (step 300). Hereinafter, the manufacturing process of the P-type semiconductor substrate according to an embodiment of the present invention will be described in detail with reference to the drawings.
圖2為本發明一實施例之P型半導體基板的製造流程示意圖。圖3A至圖3F為對應圖2之半導體基板的製造流 程剖面示意圖。請參照圖2,首先,提供載體110。載體110包括Ⅲ-V族化合物半導體層(圖2中未標示)以及位於Ⅲ-V族化合物半導體層上之Ⅲ族元素層(圖2中未標示)。載體110之Ⅲ-V族化合物半導體層具有良好之耐熱性,而使載體110在P型半導體基板的製程中可做為一良好的載體。 2 is a schematic view showing a manufacturing process of a P-type semiconductor substrate according to an embodiment of the present invention. 3A to 3F are manufacturing flows corresponding to the semiconductor substrate of FIG. Schematic diagram of the section. Referring to FIG. 2, first, a carrier 110 is provided. The carrier 110 includes a III-V compound semiconductor layer (not shown in FIG. 2) and a group III element layer (not shown in FIG. 2) on the III-V compound semiconductor layer. The III-V compound semiconductor layer of the carrier 110 has good heat resistance, and the carrier 110 can be used as a good carrier in the process of the P-type semiconductor substrate.
以下配合圖2以及圖3A至圖3C,詳細說明本發明一實施例之提供載體的方法。請參照圖2的步驟1及圖3A,首先,提供Ⅲ族元素基底102。接著,Ⅲ族元素基底102上形成石墨纖維傳送帶(graphite fiber belt)G。請參照圖2的步驟2及圖3B,接著,將V族元素104噴灑(implanted)Ⅲ族元素基底102。請參照圖2的步驟3及圖3C,接著,加熱活化(activate)V族元素104,而使V族元素104與Ⅲ族元素基底102形成載體110。詳言之,如圖3C所示,在V族元素104被活化後,部份的Ⅲ族元素基底102會與V族元素104形成載體110之Ⅲ-V族化合物半導體層106,而另一部份的Ⅲ族元素基底102即為位於Ⅲ-V族化合物半導體層106上之Ⅲ族元素層108。在本實施例中,Ⅲ-V族化合物半導體層106例如為P型磷化鋁層、P型砷化鋁層或P型氮化鋁層,而Ⅲ族元素層108例如為鋁元素層。但,本發明不以此為限。 Hereinafter, a method of providing a carrier according to an embodiment of the present invention will be described in detail with reference to FIG. 2 and FIG. 3A to FIG. 3C. Referring to step 1 of FIG. 2 and FIG. 3A, first, a group III element substrate 102 is provided. Next, a graphite fiber belt G is formed on the group III element substrate 102. Referring to step 2 of FIG. 2 and FIG. 3B, next, the group V element 104 is implanted with the group III element substrate 102. Referring to step 3 and FIG. 3C of FIG. 2, then, the group V element 104 is heated and activated, and the group V element 104 and the group III element substrate 102 are formed into the carrier 110. In detail, as shown in FIG. 3C, after the group V element 104 is activated, a portion of the group III element substrate 102 forms a group III-V compound semiconductor layer 106 of the carrier 110 with the group V element 104, and the other portion. The portion of the group III element substrate 102 is the group III element layer 108 on the group III-V compound semiconductor layer 106. In the present embodiment, the III-V compound semiconductor layer 106 is, for example, a P-type aluminum phosphide layer, a P-type aluminum arsenide layer or a P-type aluminum nitride layer, and the III-element layer 108 is, for example, an aluminum element layer. However, the invention is not limited thereto.
如圖2的步驟3及圖3C所示,在本實施例中,可藉由感應加熱(induction heating)而活化V族元素104。具體而言,可利用感應加熱線圈(induction heating coil)200活化V 族元素104。在本實施例中,V族元素104可在一腔體A(chamber)中被加熱至300度。然而,本發明不限於此,在其他實施例中,亦可利用電磁波或光學地加熱,而活化V族元素104。 As shown in step 3 of FIG. 2 and FIG. 3C, in the present embodiment, the group V element 104 can be activated by induction heating. Specifically, the induction heating coil 200 can be used to activate the V. Family element 104. In the present embodiment, the group V element 104 can be heated to 300 degrees in a chamber A. However, the present invention is not limited thereto, and in other embodiments, the group V element 104 may be activated by electromagnetic waves or optical heating.
需說明的是,本發明之提供N/P載體的方法並不限於上段(圖2及圖3A至圖3C)所述,在其他實施例中亦可採用其他方法提供N/載體。以下配合圖4A至圖4D,舉例說明之。 It should be noted that the method for providing an N/P carrier of the present invention is not limited to the above (Fig. 2 and Fig. 3A to Fig. 3C), and other methods may be used to provide an N/carrier in other embodiments. The following is exemplified in conjunction with FIGS. 4A to 4D.
圖4A至圖4D示出本發明另一實施例之提供載體的方法。請參照圖4A,首先,提供Ⅲ族元素基底102。請參照圖4B,接著,將V族元素粉末104置於Ⅲ族元素基底102上。詳言之,在本實施例中,V族元素粉末104置於Ⅲ族元素基底102上的方法包括下列步驟。首先,將V族元素粉末104與溶劑103混合成混合液101。接著,將混合液101均勻地噴灑於Ⅲ族元素基底102上。藉由此方法,V族元素粉末104可均勻地配置於Ⅲ族元素基底102上,且噴灑於Ⅲ族元素基底102上的溶劑103可在接下來的加熱製程中揮發。 4A through 4D illustrate a method of providing a carrier in accordance with another embodiment of the present invention. Referring to FIG. 4A, first, a group III element substrate 102 is provided. Referring to FIG. 4B, next, the group V element powder 104 is placed on the group III element substrate 102. In detail, in the present embodiment, the method of placing the group V element powder 104 on the group III element substrate 102 includes the following steps. First, the group V element powder 104 and the solvent 103 are mixed to form a mixed liquid 101. Next, the mixed liquid 101 is uniformly sprayed on the group III element substrate 102. By this method, the group V element powder 104 can be uniformly disposed on the group III element substrate 102, and the solvent 103 sprayed on the group III element substrate 102 can be volatilized in the subsequent heating process.
請參照圖4B及圖4C,接著,加熱Ⅲ族元素基底102而使部份的Ⅲ族元素基底102與V族元素粉末104形成Ⅲ-V族化合物層105,而Ⅲ-V族化合物層105上殘留另一部份的Ⅲ族元素基底102a。請參照圖4C及圖4D,然後,加熱Ⅲ族元素基底102至Ⅲ族元素的熔點,而使另一部份的Ⅲ族元素基底102a的其中一部份與Ⅲ-V族化合物層105形成Ⅲ-V族化合物半導體層106,且另一部份的Ⅲ族 元素基底102a的另一部份102b即為Ⅲ族元素層108。於此便可提供出載體110。 Referring to FIG. 4B and FIG. 4C, next, the group III element substrate 102 is heated to form a portion of the group III element substrate 102 and the group V element powder 104 to form the group III-V compound layer 105, and the group III-V compound layer 105 is formed. Another portion of the group III element substrate 102a remains. Referring to FIG. 4C and FIG. 4D, then, the melting points of the group III element to the group III element are heated, and another part of the group III element substrate 102a is formed with the group III-V compound layer 105. - group V compound semiconductor layer 106, and another portion of group III The other portion 102b of the element substrate 102a is the group III element layer 108. The carrier 110 can be provided here.
請再參照圖2的步驟4及圖3D,在提供出載體110後,接著,將矽粉末120置於載體110之Ⅲ族元素層108上。詳言之,在本實施例中,將矽粉末120置於Ⅲ族元素層108上之方法包括下列步驟。首先,將矽粉末120與溶劑122混合成混合液124。接著,將混合液124噴灑於載體110之Ⅲ族元素層108上。藉由此方法,矽粉末120可均勻地配置於Ⅲ族元素層108上,進而形成品質優良的P型半導體基板。 Referring again to step 4 of FIG. 2 and FIG. 3D, after the carrier 110 is provided, the tantalum powder 120 is then placed on the group III element layer 108 of the carrier 110. In detail, in the present embodiment, the method of placing the tantalum powder 120 on the group III element layer 108 includes the following steps. First, the tantalum powder 120 and the solvent 122 are mixed to form a mixed liquid 124. Next, the mixed solution 124 is sprayed onto the group III element layer 108 of the carrier 110. By this method, the tantalum powder 120 can be uniformly disposed on the group III element layer 108, thereby forming a P-type semiconductor substrate of excellent quality.
請再參照圖2的步驟5及圖3E,接著,加熱載體110,而使矽粉末120與Ⅲ族元素層108形成P型多晶矽層130。具體而言,在本實施例中,加熱載體110,而使矽粉末120與Ⅲ族元素層108形成P型多晶矽層130之步驟為:快速地加熱載體110至1430℃(即達到並超過矽粉末102熔點1.414℃)以上,而使矽粉末120與Ⅲ族元素層108形成P型多晶矽層130。於此便初步完成了本實施例之P型半導體基板100的製程。值得一提的是,相較於習知技術,本實施例之P型半導體基板100的製程不需磨去大量的多晶矽層,而可減少材料的浪費,進而大幅降低P型半導體基板的製造成本。 Referring to step 5 and FIG. 3E of FIG. 2 again, the carrier 110 is heated to form the P-type polysilicon layer 130 with the tantalum powder 120 and the group III element layer 108. Specifically, in the present embodiment, the step of heating the carrier 110 to form the P-type polysilicon layer 130 between the tantalum powder 120 and the group III element layer 108 is as follows: rapidly heating the carrier 110 to 1430 ° C (ie, reaching and exceeding the tantalum powder) 102 has a melting point of 1.414 ° C) or more, and the tantalum powder 120 and the group III element layer 108 form a p-type polysilicon layer 130. Thus, the process of the P-type semiconductor substrate 100 of the present embodiment is initially completed. It is worth mentioning that, compared with the prior art, the process of the P-type semiconductor substrate 100 of the present embodiment does not need to grind a large number of polysilicon layers, thereby reducing material waste, thereby greatly reducing the manufacturing cost of the P-type semiconductor substrate. .
請再參照圖2的步驟6及圖3E,多個子P型多晶矽層130a可被堆疊在充滿氫氣(H2)且具有1350度的腔體B中,以進行退火(annealing)製程。請再參照圖2的步驟7、8,接著,前述腔體中的子P型多晶矽層130a可被移至另 一腔體C中冷卻(如步驟6至步驟7),接著,子P型多晶矽層130a可依序被排出腔體(如步驟7至步驟8)。 Referring again to step 6 of FIG. 2 and FIG. 3E, a plurality of sub-P-type polysilicon layers 130a may be stacked in a cavity B filled with hydrogen (H 2 ) and having a temperature of 1350 degrees for an annealing process. Referring again to steps 7 and 8 of FIG. 2, the sub-P-type polysilicon layer 130a in the cavity may be moved to another cavity C for cooling (steps 6 to 7), and then the sub-P-type polysilicon Layer 130a can be sequentially ejected from the cavity (steps 7 through 8).
請再參照圖2的步驟9及圖3F製造者可視實際所需的太陽能電池尺寸,而將P型多晶矽層130可被分成多個子P型多晶矽層130a。在本實施例,可利用雷射(laser)將P型多晶矽層130可被分成多個子P型多晶矽層130a。子P型多晶矽層130a的尺寸例如為5公分成5公分。請再參照圖2的步驟10,被切割後的子P型多晶矽層130a被包裝後可存放在純氮氣中進行運輸。 Referring to step 9 of FIG. 2 and FIG. 3F, the manufacturer can visually determine the solar cell size required, and the P-type polysilicon layer 130 can be divided into a plurality of sub-P-type polysilicon layers 130a. In the present embodiment, the P-type polysilicon layer 130 may be divided into a plurality of sub-P-type polysilicon layers 130a using a laser. The size of the sub-P-type polysilicon layer 130a is, for example, 5 cm in 5 cm. Referring again to step 10 of FIG. 2, the cut sub-P-type polysilicon layer 130a is packaged and stored in pure nitrogen for transportation.
本實施例之P型半導體基板100可進一步地被製作為太陽能電池。詳言之,當P型多晶矽層完成後,可在P型多晶矽層上形成N型半導體層,以形成太陽能電池。 The P-type semiconductor substrate 100 of the present embodiment can be further fabricated as a solar cell. In detail, after the P-type polysilicon layer is completed, an N-type semiconductor layer can be formed on the P-type polysilicon layer to form a solar cell.
以下配合圖5A至圖5B詳細說明之。圖5A至圖5B示出本發明一實施例之P型半導體基板被製作成太陽能電池的過程。 This will be described in detail below with reference to FIGS. 5A to 5B. 5A to 5B illustrate a process in which a P-type semiconductor substrate is fabricated into a solar cell according to an embodiment of the present invention.
如圖3F所示,當P型多晶矽層130完成後,在本實施例中,製造者可視實際所需的太陽能電池尺寸,而將P型多晶矽層130可被分成多個子P型多晶矽層130a。 As shown in FIG. 3F, after the P-type polysilicon layer 130 is completed, in the present embodiment, the manufacturer can divide the P-type polysilicon layer 130 into a plurality of sub-P-type polysilicon layers 130a depending on the actual required solar cell size.
接著,如圖5A所示,可對這些子P型多晶矽層130a進行退火(annealing)製程。然後,可在這些子P型多晶矽層130a上分別形成多個N型半導體層140。N型半導體層140之材質例如為N型一氧化矽(n+-Si/O)超晶(surperlattice)或其他適當的材質。值得一提的是,在1.8電子伏特(eV)帶(band)的N型一氧化矽(n+-Si/O)或在超過2電子伏特(eV)帶的N型銻化鋁(n+-AlSb)可與在1.1電子伏特(eV)帶之子 P型多晶矽層130形成陡峭的異質介面位障(hetero-junction barrier)。此陡峭的異質介面位障可使具有此位障之太陽能電池具有降滲漏而達到增高光電轉換效率。換言之,陡峭的異質介面位障可使太陽能電池每瓦的發電成本明顯下降。 Next, as shown in FIG. 5A, these sub-P-type polysilicon layers 130a may be subjected to an annealing process. Then, a plurality of N-type semiconductor layers 140 may be formed on the sub-P-type polysilicon layers 130a, respectively. The material of the N-type semiconductor layer 140 is, for example, an N-type germanium oxide (n + -Si/O) superlattice or other suitable material. It is worth mentioning that N-type niobium oxide (n + -Si/O) in 1.8 electron volt (eV) band or N-type aluminum telluride in n 2 electron volt (eV) band (n + -AlSb) can form a steep hetero-junction barrier with the P-type polysilicon layer 130 of the 1.1 electron volt (eV) band. This steep heterogeneous interface barrier can reduce the leakage of the solar cell with this barrier to increase the photoelectric conversion efficiency. In other words, a steep heterogeneous interface barrier can significantly reduce the cost per watt of solar cells.
在本實施例中,可利用原子層沉積(Atomic Layer Deposition,ALD)儀器(instrument)對子P型多晶矽層130a進行退火製程並在這些子P型多晶矽層130a上形成N型半導體層140。利用ALD instrument可大量且快速地在子P型多晶矽層130a上形成N型半導體層140。 In the present embodiment, the sub-P-type polysilicon layer 130a may be annealed using an Atomic Layer Deposition (ALD) instrument and an N-type semiconductor layer 140 may be formed on the sub-P-type polysilicon layer 130a. The N-type semiconductor layer 140 can be formed on the sub-P-type polysilicon layer 130a in a large amount and quickly by the ALD instrument.
如圖5B所示,在子P型多晶矽層130a上形成N型半導體層140後,可選擇性地在N型半導體層140上形成透明導電電極150。N型半導體層140位於子P型多晶矽層130a與透明導電電極150之間。接著,可選擇性地在子P型多晶矽層130a上形成反射膜160。子P型多晶矽層130a位於反射膜160與N型半導體層140之間。反射膜160可增加入射光在太陽能電池100A中的傳遞路徑,進而增加太陽能電池100A的光電轉換效率。 As shown in FIG. 5B, after the N-type semiconductor layer 140 is formed on the sub-P-type polysilicon layer 130a, the transparent conductive electrode 150 can be selectively formed on the N-type semiconductor layer 140. The N-type semiconductor layer 140 is located between the sub-P-type polysilicon layer 130a and the transparent conductive electrode 150. Next, a reflective film 160 may be selectively formed on the sub-P-type polysilicon layer 130a. The sub-P-type polysilicon layer 130a is located between the reflective film 160 and the N-type semiconductor layer 140. The reflective film 160 can increase the transmission path of the incident light in the solar cell 100A, thereby increasing the photoelectric conversion efficiency of the solar cell 100A.
圖5B示出本發明一實施例之太陽能電池。本實施例之太陽能電池100A包括載體、P型多晶矽層130a以及N型半導體層140。載體110包括Ⅲ-V族化合物半導體層106。子P型多晶矽層130a位於Ⅲ-V族化合物半導體層106上。本實施例之太陽能電池100A可進一步包括透明導電電極150。N型半導體層140位於P型多晶矽層130a與 透明導電電極150之間。本實施例之太陽能電池100A更包括反射膜160。P型多晶矽層130a位於反射膜160與N型半導體層140之間。本實施例之太陽能電池100A具有低製造成本及高光電轉換效率的優點。 Fig. 5B shows a solar cell according to an embodiment of the present invention. The solar cell 100A of the present embodiment includes a carrier, a P-type polysilicon layer 130a, and an N-type semiconductor layer 140. The carrier 110 includes a III-V compound semiconductor layer 106. The sub-P-type polysilicon layer 130a is on the III-V compound semiconductor layer 106. The solar cell 100A of the present embodiment may further include a transparent conductive electrode 150. The N-type semiconductor layer 140 is located in the P-type polysilicon layer 130a and Between the transparent conductive electrodes 150. The solar cell 100A of the present embodiment further includes a reflective film 160. The P-type polysilicon layer 130a is located between the reflective film 160 and the N-type semiconductor layer 140. The solar cell 100A of the present embodiment has an advantage of low manufacturing cost and high photoelectric conversion efficiency.
綜上所述,在本發明一實施例之P型半導體基板及太陽能電池的製程中,將矽粉末置於Ⅲ族元素層上,並加熱載體,而使矽粉末與Ⅲ族元素層形成P型多晶矽層。因此,相較於習知技術,本發明一實施例之P型半導體基板及太陽能電池的製程不需鋸切而浪費大量的多晶矽層,而可減少大量多晶矽材料的浪費,進而大幅降低P型半導體基板及太陽能電池的製造成本。 In summary, in the process of the P-type semiconductor substrate and the solar cell according to an embodiment of the present invention, the tantalum powder is placed on the group III element layer, and the carrier is heated, so that the tantalum powder and the group III element layer form a P-type. Polycrystalline germanium layer. Therefore, compared with the prior art, the process of the P-type semiconductor substrate and the solar cell according to an embodiment of the present invention does not require sawing and wastes a large amount of polycrystalline germanium layer, thereby reducing the waste of a large amount of polycrystalline germanium material, thereby substantially reducing the P-type semiconductor. Manufacturing costs of substrates and solar cells.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.
100‧‧‧P型半導體基板 100‧‧‧P type semiconductor substrate
100A‧‧‧太陽能電池 100A‧‧‧ solar cells
101、124‧‧‧混合液 101, 124‧‧‧ mixture
102‧‧‧Ⅲ族元素基底 102‧‧‧III elemental substrate
102a‧‧‧另一部份的Ⅲ族元素基底 102a‧‧‧Other part of the III element base
102b‧‧‧另一部份的Ⅲ族元素基底的另一部份 102b‧‧‧Another part of the other part of the group III element
103、122‧‧‧溶劑 103, 122‧‧‧ solvent
104‧‧‧V族元素(粉末) 104‧‧‧V element (powder)
105‧‧‧Ⅲ-V族化合物層 105‧‧‧III-V compound layer
106‧‧‧Ⅲ-V族化合物半導體層 106‧‧‧III-V compound semiconductor layer
108‧‧‧Ⅲ族元素層 108‧‧‧III elemental layer
110‧‧‧載體 110‧‧‧ Carrier
120‧‧‧矽粉末 120‧‧‧矽 powder
130‧‧‧P型多晶矽層 130‧‧‧P-type polycrystalline layer
130a‧‧‧子P型多晶矽層 130a‧‧‧P-type polycrystalline layer
140‧‧‧N型半導體層 140‧‧‧N type semiconductor layer
150‧‧‧透明導電電極 150‧‧‧Transparent conductive electrode
160‧‧‧反射膜 160‧‧‧Reflective film
200‧‧‧感應加熱線圈 200‧‧‧Induction heating coil
A、B、C‧‧‧腔體 A, B, C‧‧‧ cavity
G‧‧‧石墨纖維傳送帶 G‧‧‧Graphite fiber conveyor belt
S100~S300‧‧‧步驟 S100~S300‧‧‧Steps
圖1為本發明一實施例之P型半導體基板的製造流程圖。 1 is a flow chart showing the manufacture of a P-type semiconductor substrate according to an embodiment of the present invention.
圖2為本發明一實施例之P型半導體基板的製造流程示意圖。 2 is a schematic view showing a manufacturing process of a P-type semiconductor substrate according to an embodiment of the present invention.
圖3A至圖3F為對應圖2之半導體基板的製造流程剖面示意圖。 3A to 3F are schematic cross-sectional views showing a manufacturing process of the semiconductor substrate corresponding to FIG. 2.
圖4A至圖4D示出本發明另一實施例之提供載體的方法。 4A through 4D illustrate a method of providing a carrier in accordance with another embodiment of the present invention.
圖5A至圖5B示出本發明一實施例之P型半導體基板被製作成太陽能電池的過程。 5A to 5B illustrate a process in which a P-type semiconductor substrate is fabricated into a solar cell according to an embodiment of the present invention.
102‧‧‧Ⅲ族元素基底 102‧‧‧III elemental substrate
104‧‧‧V族元素(粉末) 104‧‧‧V element (powder)
120‧‧‧矽粉末 120‧‧‧矽 powder
A、B、C‧‧‧腔體 A, B, C‧‧‧ cavity
G‧‧‧石墨纖維傳送帶 G‧‧‧Graphite fiber conveyor belt
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