TW201316825A - Activation method for emission sources of field emission display - Google Patents

Activation method for emission sources of field emission display Download PDF

Info

Publication number
TW201316825A
TW201316825A TW100136116A TW100136116A TW201316825A TW 201316825 A TW201316825 A TW 201316825A TW 100136116 A TW100136116 A TW 100136116A TW 100136116 A TW100136116 A TW 100136116A TW 201316825 A TW201316825 A TW 201316825A
Authority
TW
Taiwan
Prior art keywords
field emission
hydrogen
absorbing material
activating
substrate
Prior art date
Application number
TW100136116A
Other languages
Chinese (zh)
Inventor
Te-Ming Chen
Chih-Che Kuo
Original Assignee
Au Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Au Optronics Corp filed Critical Au Optronics Corp
Priority to TW100136116A priority Critical patent/TW201316825A/en
Priority to CN201110359453XA priority patent/CN102354643A/en
Publication of TW201316825A publication Critical patent/TW201316825A/en

Links

Landscapes

  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Gas-Filled Discharge Tubes (AREA)

Abstract

An activation method for emission sources of a field emission display is described. A field emission display device having a hydrogen absorption material is provided, and the hydrogen absorption material has absorbed saturated hydrogen gas. A vacuuming treatment is performed to the field emission display device, and an initial activation process is performed to the hydrogen absorption material. Next, an activation process is performed such that the hydrogen gas in the hydrogen absorption material is released.

Description

場發射式顯示器之發射源的活化方法Activation method of emission source of field emission display

本發明是有關於一種場發射式顯示器之發射源的活化方法。The present invention is directed to an activation method for an emission source of a field emission display.

場發射式顯示器發光原理,是在真空環境下利用電場將電子發射尖端的電子吸引出,而離開陰極板的場發射電子受陽極上正電壓的加速吸引,撞擊至陽極的螢光粉而發光(Luminescence)。陰極板係作為場電子發射源,而陽極板作為發光源,由陰極板射出之電子撞擊陽極板上之螢光層而發光。The field emission type display illumination principle is to use an electric field to attract electrons from the electron emission tip in a vacuum environment, and the field emission electrons leaving the cathode plate are attracted by the acceleration of the positive voltage on the anode, and the phosphor powder impinging on the anode emits light ( Luminescence). The cathode plate serves as a field electron emission source, and the anode plate serves as a light source, and electrons emitted from the cathode plate strike the phosphor layer on the anode plate to emit light.

一般來說,電子發射尖端可由奈米碳管或是金屬製成。但是在含有氧氣的環境之下,上述奈米碳管或是金屬電子發射尖端容易與氧氣產生反應而形成氧化物。上述之氧化物會使得電子發射尖端的發射電流降低,而造成場發射式顯示器的發光亮度降低。Generally, the electron emission tip can be made of a carbon nanotube or a metal. However, in an environment containing oxygen, the above-mentioned carbon nanotube or metal electron emission tip easily reacts with oxygen to form an oxide. The above oxides cause the emission current of the electron emission tip to be lowered, resulting in a decrease in the luminance of the field emission type display.

目前已經有研究指出,電子發射尖端在含有氫氣的環境之下有助於增進場發射特性。但是過多的氫氣反而會對場發射造成反面效果。這主要是因為過多的氫離子會對電子發射尖端產生離子轟擊效應,而使得電子發射尖端遭到破壞。At present, it has been pointed out that the electron emission tip contributes to the enhancement of field emission characteristics in an environment containing hydrogen. However, too much hydrogen will have a negative effect on the field emission. This is mainly because excessive hydrogen ions can cause an ion bombardment effect on the electron emission tip, which causes the electron emission tip to be destroyed.

本發明提供一種場發射式顯示器之發射源的活化方法,其可以還原電子發射尖端與氧氣產生氧化反應,又同時可以防止電子發射尖端遭到離子轟擊的破壞。The invention provides a method for activating an emission source of a field emission display, which can reduce the oxidation reaction of the electron emission tip with oxygen, and at the same time prevent the electron emission tip from being damaged by ion bombardment.

本發明提出一種場發射式顯示器之發射源的活化方法,其包括提供場發射式顯示器,其中所述場發射式顯示器中裝設有吸氫材料,其中吸氫材料已經吸收有飽和氫氣。將場發射式顯示器內抽真空,之後對吸氫材料進行初始活化程序。接著進行所述活化程序,以使吸氫材料中的氫氣被釋放出來。The present invention provides a method of activating an emissive source of a field emission display, comprising providing a field emission display, wherein the field emission display is provided with a hydrogen absorbing material, wherein the hydrogen absorbing material has absorbed saturated hydrogen. A vacuum is applied to the field emission display, followed by an initial activation procedure for the hydrogen absorbing material. The activation procedure is then carried out to release hydrogen from the hydrogen absorbing material.

基於上述,本發明在場發射式顯示器放置吸收有飽和氫氣之吸氫材料。之後當進行活化程序時可釋放出吸氫材料中的氫氣。藉由上述方法可以使電子發射尖端在含有氫氣的環境之下活化發射源,以增進場發射特性。又同時可控制氫氣存在場發射式顯示器內的量不會過多。Based on the above, the present invention places a hydrogen absorbing material that absorbs saturated hydrogen in a field emission type display. Hydrogen in the hydrogen absorbing material can then be released when the activation procedure is performed. By the above method, the electron emission tip can activate the emission source under an environment containing hydrogen to enhance field emission characteristics. At the same time, it is possible to control the presence of hydrogen in the field emission type display without excessive amounts.

為讓本發明之上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the present invention will be more apparent from the following description.

圖1是根據本發明一實施例之場發射式顯示器的剖面示意圖。圖2A是根據本發明一實施例之於通入氫氣材料之前的場發射式顯示器的上視示意圖。圖2B是根據本發明一實施例之於通入氫氣材料之後的場發射式顯示器的上視示意圖。為了清楚的說明本實施例,圖2A以及圖2B僅顯示出場發射式顯示器之部分元件,詳細之組成構件仍以圖1為主。1 is a cross-sectional view of a field emission display in accordance with an embodiment of the present invention. 2A is a top plan view of a field emission display prior to introduction of hydrogen gas material, in accordance with an embodiment of the present invention. 2B is a top plan view of a field emission display after passing hydrogen gas material, in accordance with an embodiment of the present invention. In order to clearly illustrate the present embodiment, FIG. 2A and FIG. 2B show only some of the components of the field emission type display, and the detailed components are still mainly shown in FIG.

請參照圖1以及圖2A及圖2B,本實施例之場發射式顯示器之發射源的活化方法首先提供場發射式顯示器100,且所述場發射式顯示器100中裝設有吸氫材料200。Referring to FIG. 1 and FIG. 2A and FIG. 2B, the method for activating the emission source of the field emission display of the present embodiment first provides a field emission display 100, and the field emission display 100 is provided with a hydrogen absorbing material 200.

根據本實施例,所述場發射式顯示器100包括第一基板110、多個電子發射器140、第二基板120、發光材料層150以及密封結構130。According to the embodiment, the field emission display 100 includes a first substrate 110, a plurality of electron emitters 140, a second substrate 120, a luminescent material layer 150, and a sealing structure 130.

第一基板110之材質可為玻璃、石英、或是不透光/反射材料(例如:導電材料、金屬、晶圓、陶瓷、或其它可適用的材料)、或是其它可適用的材料。第一基板110主要是用來承載顯示器之元件以及線路之用。第一基板110具有外表面110a以及內表面110b。根據本實施例,第一基板110上可進一步包括第一電極層112、電阻層113、介電層114以及第二電極層116。第一電極層112位於第一基板110之內表面110b上。第一電極層112一般是使用金屬材料。然而本發明不僅限於此,根據其他實施例,第一電極層112也可以使用其他導電材料。例如:合金、金屬材料的氮化物、金屬材料的氧化物、金屬材料的氮氧化物、或其它合適的材料)、或是金屬材料與其它導材料的堆疊層。電阻層112覆蓋第一電極層112。介電層114位於電阻層112上。介電層114例如是氧化矽、氮化矽等無機介電材料。介電層114中具有多個開口(未標號)。第二電極層116位於介電層114之表面上,且不填入介電層114之開口內。一般來說,具有第一電極層112以及第二電極層116之第一基板110又稱為陰極板。The material of the first substrate 110 may be glass, quartz, or an opaque/reflective material (for example, a conductive material, a metal, a wafer, a ceramic, or other applicable materials), or other applicable materials. The first substrate 110 is mainly used to carry components of the display and lines. The first substrate 110 has an outer surface 110a and an inner surface 110b. According to the embodiment, the first substrate 110 may further include a first electrode layer 112, a resistance layer 113, a dielectric layer 114, and a second electrode layer 116. The first electrode layer 112 is located on the inner surface 110b of the first substrate 110. The first electrode layer 112 is generally made of a metal material. However, the present invention is not limited thereto, and other conductive materials may be used for the first electrode layer 112 according to other embodiments. For example: alloys, nitrides of metallic materials, oxides of metallic materials, oxynitrides of metallic materials, or other suitable materials), or stacked layers of metallic materials and other conductive materials. The resistance layer 112 covers the first electrode layer 112. Dielectric layer 114 is on resistive layer 112. The dielectric layer 114 is, for example, an inorganic dielectric material such as hafnium oxide or tantalum nitride. The dielectric layer 114 has a plurality of openings (not labeled) therein. The second electrode layer 116 is on the surface of the dielectric layer 114 and is not filled in the opening of the dielectric layer 114. In general, the first substrate 110 having the first electrode layer 112 and the second electrode layer 116 is also referred to as a cathode plate.

電子發射器140位於第一基板110上。在本實施例中,電子發射器140是位於電極層112上方之介電層114的開口內。電子發射器140可為奈米碳管電子發射端或是金屬電子發射端。此外,本發明不對電子發射器140的數目作限制。值得一提的是,本發明不限制電子發射器140、第一電極層112、介電層114以及第二電極層116之間的配置形式需如圖1所繪示。根據其他實施例,電子發射器140、第一電極層112、介電層114以及第二電極層116之間還可以採用其他的配置方式。The electron emitter 140 is located on the first substrate 110. In the present embodiment, electron emitter 140 is located within the opening of dielectric layer 114 above electrode layer 112. The electron emitter 140 can be a carbon nanotube electron emission end or a metal electron emission end. Moreover, the present invention does not limit the number of electron emitters 140. It should be noted that the configuration of the present invention does not limit the arrangement between the electron emitter 140, the first electrode layer 112, the dielectric layer 114, and the second electrode layer 116 as shown in FIG. According to other embodiments, other configurations may be employed between the electron emitter 140, the first electrode layer 112, the dielectric layer 114, and the second electrode layer 116.

第二基板120位於第一基板110的對向,其材質可為玻璃、石英、或是其它可適用的材料。第二基板120主要是用來承載顯示器之元件以及線路之用。發光材料層150位於第二基板120上。在此發光材料層150包括磷光材料層或是螢光材料層。在一實施例中,發光材料層150包括紅色磷光/螢光材料層、綠色磷光/螢光材料層以及藍色磷光/螢光材料層。根據本實施例,第二基板120上更包括覆蓋有第三電極層122。一般來說,具有第三電極層122之第二基板120又可稱為陽極板。另外,第三電極層122與第一電極層112/第二電極層116之間所產生的電場可使得電子發射器140所產生的電子束可以往第三電極層122加速以激發發光材料層150而產生特定的色光。The second substrate 120 is located opposite to the first substrate 110 and may be made of glass, quartz, or other suitable materials. The second substrate 120 is mainly used to carry components of the display and lines. The luminescent material layer 150 is located on the second substrate 120. The luminescent material layer 150 here comprises a phosphor layer or a layer of phosphor material. In an embodiment, the luminescent material layer 150 includes a red phosphorescent/fluorescent material layer, a green phosphorescent/fluorescent material layer, and a blue phosphorescent/fluorescent material layer. According to the embodiment, the second substrate 120 further includes a third electrode layer 122. In general, the second substrate 120 having the third electrode layer 122 may also be referred to as an anode plate. In addition, an electric field generated between the third electrode layer 122 and the first electrode layer 112 / the second electrode layer 116 may cause the electron beam generated by the electron emitter 140 to be accelerated toward the third electrode layer 122 to excite the luminescent material layer 150 And produce a specific shade of light.

密封結構130位於第一基板110與第二基板120之間,以使第一基板110、第二基板120以及密封結構130之間形成腔體CH(如圖1以及圖2所示)。密封結構130例如是由玻璃框架(例如為玻璃熔塊(frit))與/或密封膠構成,或是由支撐結構與密封膠構成。The sealing structure 130 is located between the first substrate 110 and the second substrate 120 such that a cavity CH is formed between the first substrate 110, the second substrate 120, and the sealing structure 130 (as shown in FIGS. 1 and 2). The sealing structure 130 is composed, for example, of a glass frame (for example, a glass frit) and/or a sealant, or a support structure and a sealant.

值得一提的是,為了後續能夠對場發射式顯示器進行抽真空之程序以使腔體CH中具有一定的真空度,密封結構130具有開口132。It is worth mentioning that the sealing structure 130 has an opening 132 for the subsequent process of evacuating the field emission display to have a certain degree of vacuum in the cavity CH.

另外,裝設於場發射式顯示器100中之吸氫材料200包括由鋯(Zr)、釩(V)、鐵(Fe)、鈦(Ti)或其組合所形成的合金。在本實施例中,吸氫材料200是裝設於場發射式顯示器的外部。更詳細來說,如圖1以及圖2所示,本實施例之場發射式顯示器更包括外加容置結構250,其是裝設於第一基板110之外表面100a上。吸氫材料200則是裝設於所述外加容置結構250內,並且透過此外加容置結構250之開口252而與腔體CH相通。為了使外加容置結構250與腔體CH相通,第一基板110在對應外加容置結構250之開口252處亦設計有開口111,藉由相連通的開口111與開口252,而使得外加容置結構250與腔體CH相通。如此一來,設置在外加容置結構250內之吸氫材料200便可對腔體CH內之氫氣產生吸收作用。Further, the hydrogen absorbing material 200 installed in the field emission display 100 includes an alloy formed of zirconium (Zr), vanadium (V), iron (Fe), titanium (Ti), or a combination thereof. In the present embodiment, the hydrogen absorbing material 200 is mounted outside the field emission display. In more detail, as shown in FIG. 1 and FIG. 2, the field emission display of the present embodiment further includes an external accommodating structure 250 mounted on the outer surface 100a of the first substrate 110. The hydrogen absorbing material 200 is disposed in the external accommodating structure 250 and communicates with the cavity CH through the opening 252 of the accommodating structure 250. In order to make the external accommodating structure 250 communicate with the cavity CH, the first substrate 110 is also provided with an opening 111 at the opening 252 corresponding to the external accommodating structure 250, and the external opening is adopted by the opening 111 and the opening 252. Structure 250 is in communication with cavity CH. In this way, the hydrogen absorbing material 200 disposed in the external accommodating structure 250 can absorb the hydrogen in the cavity CH.

根據本實施例,所述吸氫材料200吸收有飽和的氫氣。使吸氫材料200吸收飽和的氫氣之方式例如是在場發射式顯示器100中裝設吸氫材料200之後,在場發射式顯示器100內通入氫氣,以使吸氫材料200吸收氫氣。於場發射式顯示器100內通入氫氣之方法例如是透過密封結構130之開口132(如圖2所示)而將氫氣注入場發射式顯示器100之腔體CH中。根據本實施例,於場發射式顯示器100中通入氫氣的條件包括壓力為0.01~0.1atm,時間為大於2小時,且溫度為室溫。然本發明不限於此。於進行上述之通入氫氣之步驟之後,場發射式顯示器100之腔體CH中充滿氫氣,且氫氣通過開口111以及開口252而被吸氫材料200吸收。為了確保吸氫材料200能夠飽和地吸收氫氣,可通入過飽和的氫氣至腔體CH中。一般來說,透過吸氫材料200的量(面積、體積或重量等等)的調整,可以控制吸氫材料200吸收的氫氣量。而對於越大尺寸的面板,所需的吸氫材料200的量(面積、體積或重量等等)越大。在此,所設置的吸氫材料200是能夠吸收足夠的氫氣以使後續所釋放出的氫氣能對顯示器100內之電子發射器140產生活化的作用。值得一提的是,上述所通入的氫氣可與電子發射器140表面之氧化物反應而生成氣體,因而可以避免因氧化物的存在而造成電子發射器140之發射電流降低。According to this embodiment, the hydrogen absorbing material 200 absorbs saturated hydrogen. The manner in which the hydrogen absorbing material 200 absorbs saturated hydrogen is, for example, after the hydrogen absorbing material 200 is installed in the field emission display 100, and hydrogen gas is introduced into the field emission display 100 to cause the hydrogen absorbing material 200 to absorb hydrogen. Hydrogen is introduced into the field emission display 100 by, for example, injecting hydrogen into the cavity CH of the field emission display 100 through the opening 132 of the sealing structure 130 (shown in FIG. 2). According to the present embodiment, the conditions for introducing hydrogen into the field emission display 100 include a pressure of 0.01 to 0.1 atm, a time of more than 2 hours, and a temperature of room temperature. However, the invention is not limited thereto. After the above-described step of introducing hydrogen gas, the cavity CH of the field emission display 100 is filled with hydrogen gas, and hydrogen gas is absorbed by the hydrogen absorbing material 200 through the opening 111 and the opening 252. In order to ensure that the hydrogen absorbing material 200 can saturately absorb hydrogen, supersaturated hydrogen gas may be introduced into the chamber CH. Generally, the amount of hydrogen absorbed by the hydrogen absorbing material 200 can be controlled by adjusting the amount (area, volume, weight, etc.) of the hydrogen absorbing material 200. For larger sized panels, the amount (area, volume, weight, etc.) of the hydrogen absorbing material 200 required is greater. Here, the hydrogen absorbing material 200 is provided to be capable of absorbing sufficient hydrogen to enable subsequent release of hydrogen to activate the electron emitter 140 in the display 100. It is worth mentioning that the hydrogen gas introduced above can react with the oxide on the surface of the electron emitter 140 to generate a gas, thereby preventing the emission current of the electron emitter 140 from being lowered due to the presence of the oxide.

根據其他實施例,使吸氫材料200吸收飽和的氫氣之方式也可以是在將吸氫材料200裝設於場發射式顯示器100之前,即先使吸氫材料200吸收飽和的氫氣。According to other embodiments, the manner in which the hydrogen absorbing material 200 absorbs saturated hydrogen may be such that the hydrogen absorbing material 200 first absorbs saturated hydrogen gas before the hydrogen absorbing material 200 is mounted on the field emission display 100.

接著對所述場發射式顯示器100進行抽真空程序。根據本實施例,對場發射式顯示器100進行抽真空之方法例如是透過密封結構130之開口132(如圖2所示)而將腔體CH內之氣體抽出,以使腔體CH中呈現一定程度的真空度。在進行上述抽真空程序之後,接著利用密封材料134將上述之開口132封住,以使得腔體CH維持一定的真空度,例如是在10-6torr的真空狀態。The field emission display 100 is then subjected to a vacuuming process. According to the embodiment, the method of vacuuming the field emission display 100 is, for example, the gas in the cavity CH is extracted through the opening 132 of the sealing structure 130 (as shown in FIG. 2), so that the cavity CH is presented in a certain manner. The degree of vacuum. After the vacuuming process described above, the opening 132 is then sealed with a sealing material 134 to maintain a certain degree of vacuum, such as a vacuum of 10 -6 torr.

之後,對吸氫材料200進行初始活化程序。根據本實施例,上述之初始活化程序包括對吸氫材料200進行加熱處理,所述加熱的溫度為攝氏150至450度,較佳的是攝氏350至450度。在此,對吸氫材料200進行初始活化程序之方法例如是使用高週波加熱裝置400(如圖3所示),但本發明不限於此。使用高週波加熱裝置400對吸氫材料200進行活化程序的優點是,此種加熱裝置可以只針對顯示器之特定部位(裝設有吸氫材料200處)進行加熱,而不會對顯示器之整體進行加熱。如此可以避免因高溫加熱而對顯示器內之其他元件造成影響。Thereafter, the hydrogen absorbing material 200 is subjected to an initial activation process. According to this embodiment, the initial activation procedure described above includes heat treating the hydrogen absorbing material 200 at a temperature of from 150 to 450 degrees Celsius, preferably from 350 to 450 degrees Celsius. Here, the method of performing the initial activation process on the hydrogen absorbing material 200 is, for example, using the high-frequency heating device 400 (as shown in FIG. 3), but the present invention is not limited thereto. The advantage of using the high-frequency heating device 400 to activate the hydrogen absorbing material 200 is that the heating device can be heated only for a specific portion of the display (where the hydrogen absorbing material 200 is installed) without performing the overall display. heating. This avoids the effects of high temperature heating on other components in the display.

接著對吸氫材料200進行活化程序,以使吸氫材料200產生逆反應而釋放出氫氣。此時所釋放出的氫氣可與電子發射器140表面之氧化物反應而生成氣體,因而可以避免因氧化物的存在而造成電子發射器140之發射電流降低。根據本實施例,上述之活化程序包括對吸氫材料200進行加熱處理,所述加熱處理主要與吸氫材料200本身的材質有關,其溫度例如是攝氏100度至攝氏1000度之間。在此,對吸氫材料200進行活化程序之方法例如是使用高週波加熱裝置400(如圖3所示),但本發明不限於此。使用高週波加熱裝置400對吸氫材料200進行活化程序的優點是,此種加熱裝置可以只針對顯示器之特定部位(裝設有吸氫材料200處)進行加熱,而不會對顯示器之整體進行加熱。如此可以避免因高溫加熱而對顯示器內之其他元件造成影響。Next, the hydrogen absorbing material 200 is subjected to an activation process to cause the hydrogen absorbing material 200 to undergo a reverse reaction to release hydrogen gas. The hydrogen gas released at this time can react with the oxide on the surface of the electron emitter 140 to generate a gas, thereby preventing the emission current of the electron emitter 140 from being lowered due to the presence of the oxide. According to the present embodiment, the activation procedure described above includes heat treatment of the hydrogen absorbing material 200, which is mainly related to the material of the hydrogen absorbing material 200 itself, and the temperature thereof is, for example, between 100 degrees Celsius and 1000 degrees Celsius. Here, the method of performing the activation process on the hydrogen absorbing material 200 is, for example, using the high-frequency heating device 400 (as shown in FIG. 3), but the present invention is not limited thereto. The advantage of using the high-frequency heating device 400 to activate the hydrogen absorbing material 200 is that the heating device can be heated only for a specific portion of the display (where the hydrogen absorbing material 200 is installed) without performing the overall display. heating. This avoids the effects of high temperature heating on other components in the display.

根據本發明之一實施例,上述之活化程序除了對吸氫材料200進行加熱處理之外,可進一步包括對場發射式顯示器進行點亮步驟。所述點亮步驟例如是對閘極(即第二電極層116)施予0~35V電壓,且對陰極(第三電極層122)施予0~1KV電壓。換言之,當對上述之電極層施予上述電壓時,電子發射器140會被誘使產生電子束。According to an embodiment of the present invention, the activation process may further include a step of illuminating the field emission display in addition to the heat treatment of the hydrogen absorbing material 200. The lighting step is, for example, applying a voltage of 0 to 35 V to the gate (ie, the second electrode layer 116) and applying a voltage of 0 to 1 KV to the cathode (third electrode layer 122). In other words, when the above voltage is applied to the above electrode layer, the electron emitter 140 is induced to generate an electron beam.

承上所述,對吸氫材料200進行活化程序以釋放出吸氫材料200中的氫氣之後,所釋放出的氫氣可擴散至整體腔室CH中,以使得顯示器100內之電子發射器140處於含有氫氣的環境中,進而增進其場發射特性。As described above, after the hydrogen absorbing material 200 is activated to release hydrogen in the hydrogen absorbing material 200, the released hydrogen gas may diffuse into the entire chamber CH, so that the electron emitter 140 in the display 100 is at In an environment containing hydrogen, it further enhances its field emission characteristics.

值得一提的是,於進行上述之活化程序以使吸氫材料200釋放出氫氣之後,所述吸氫材料200可再度吸收場發射式顯示器100內之多餘的氫氣。如此一來,除了可使得場發射式顯示器100內含有氫氣之外,又可確保顯示器100內的氫氣量不會過多,以避免過多的氫離子會對電子發射尖端產生離子轟擊效應。值得一提的是,吸氫材料200除了吸收多餘的氫氣之外,吸氫材料200更可進一步吸收氫氣與氧化物反應生成的氣體。It is worth mentioning that after performing the above activation procedure to release hydrogen from the hydrogen absorbing material 200, the hydrogen absorbing material 200 can again absorb excess hydrogen in the field emission display 100. In this way, in addition to allowing the field emission display 100 to contain hydrogen, it is ensured that the amount of hydrogen in the display 100 is not excessive, so as to avoid excessive ion ions to cause ion bombardment effects on the electron emission tip. It is worth mentioning that, in addition to absorbing excess hydrogen, the hydrogen absorbing material 200 can further absorb the gas generated by the reaction of hydrogen and oxide.

承上所述,根據另一實施例,當所述吸氫材料200再度吸收場發射式顯示器內的氫氣之後,可選擇性地再度進行一次所述活化程序,以使吸氫材料200釋放出氫氣。換言之,本實施例可以根據實際所需而重複地使吸氫材料200進行吸附氫氣以及釋放氫氣之程序。According to another embodiment, after the hydrogen absorbing material 200 absorbs hydrogen in the field emission display again, the activation process may be selectively performed again to release the hydrogen absorbing material 200. . In other words, the present embodiment can repeatedly cause the hydrogen absorbing material 200 to perform a process of adsorbing hydrogen gas and releasing hydrogen gas according to actual needs.

圖5顯示場發射式顯示器中通入氫氣之後的時間與發射電流的關係圖。請參照圖5,橫軸表示時間(秒),右邊縱軸表示真空度(Torr),左邊縱軸表示發射電流(A)。曲線A表示以脈衝方式通入氫氣時,場發射式顯示器在300秒至600秒之間有真空度的變化。曲線C表示在場發射式顯示器在通入氫氣之後進行發射電流之第一次量測,曲線B表示在曲線C之量測之後進行第二次發射電流之量測。由曲線B可知,當場發射式顯示器內之氫氣過多時,反而造成場發射式顯示器之發射電流下降。因此可證明,場發射式顯示器內之氫氣過多反而對場發射式顯示器產生不良的影響。Figure 5 is a graph showing the relationship between the time after the hydrogen gas is introduced into the field emission display and the emission current. Referring to Fig. 5, the horizontal axis represents time (seconds), the right vertical axis represents vacuum (Torr), and the left vertical axis represents emission current (A). Curve A indicates that the field emission display has a change in vacuum between 300 seconds and 600 seconds when hydrogen is introduced in a pulsed manner. Curve C represents the first measurement of the emission current after the field emission display is introduced with hydrogen, and curve B represents the measurement of the second emission current after the measurement of curve C. It can be seen from the curve B that when the amount of hydrogen in the field emission display is too large, the emission current of the field emission display is decreased. Therefore, it can be proved that too much hydrogen in the field emission display adversely affects the field emission type display.

因此,本實施例先在場發射式顯示器通入氫氣,以使吸氫材料吸收氫氣之後,再將場發射式顯示器內抽真空,並且透過活化程序以釋放出吸氫材料中的氫氣。藉由上述方法可以控制氫氣在場發射式顯示器的量,以避免過多的氫離子會對電子發射尖端產生離子轟擊效應而使得電子發射尖端遭到破壞。Therefore, in this embodiment, hydrogen is first introduced into the field emission display to allow the hydrogen absorbing material to absorb hydrogen, and then the field emission type display is evacuated and passed through an activation process to release hydrogen in the hydrogen absorbing material. By the above method, the amount of hydrogen in the field emission type display can be controlled to prevent the excessive ion ions from generating an ion bombardment effect on the electron emission tip and causing the electron emission tip to be destroyed.

圖4是根據本發明另一實施例之場發射式顯示器的剖面示意圖。圖4之實施例與圖1之實施例相似,因此相同的元件以相同的符號表示,且不再重複說明。請參照圖4,在本實施例中,吸氫材料200是設置在密封結構130之表面上。換言之,吸氫材料200是設置在場發射式顯示器的內部。將吸氫材料200設置在場發射式顯示器100的內部同樣可以使吸氫材料200吸收氫氣並且透過活化程序而釋放出氫氣,以使得顯示器100內之電子發射器140處於含有氫氣的環境中進而增進其場發射特性。4 is a cross-sectional view of a field emission display in accordance with another embodiment of the present invention. The embodiment of FIG. 4 is similar to the embodiment of FIG. 1, and therefore the same components are denoted by the same reference numerals and the description thereof will not be repeated. Referring to FIG. 4, in the present embodiment, the hydrogen absorbing material 200 is disposed on the surface of the sealing structure 130. In other words, the hydrogen absorbing material 200 is disposed inside the field emission type display. The hydrogen absorbing material 200 is disposed inside the field emission display 100. The hydrogen absorbing material 200 can also absorb hydrogen and release hydrogen through an activation process, so that the electron emitter 140 in the display 100 is in an environment containing hydrogen. Its field emission characteristics.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

100...場發射式顯示器100. . . Field emission display

110...第一基板110. . . First substrate

110a...外表面110a. . . The outer surface

110b...內表面110b. . . The inner surface

111...開口111. . . Opening

112...第一電極層112. . . First electrode layer

113...電阻層113. . . Resistance layer

114...介電層114. . . Dielectric layer

116...第二電極層116. . . Second electrode layer

120...第二基板120. . . Second substrate

122...第三電極層122. . . Third electrode layer

130...密封結構130. . . Sealing structure

150...發光材料層150. . . Luminescent material layer

140...電子發射器140. . . Electronic transmitter

200...吸氫材料200. . . Hydrogen absorbing material

250...外加容置結構250. . . Additional accommodating structure

252...開口252. . . Opening

CH...腔體CH. . . Cavity

400...高週波加熱裝置400. . . High frequency heating device

圖1是根據本發明一實施例之場發射式顯示器的剖面示意圖。1 is a cross-sectional view of a field emission display in accordance with an embodiment of the present invention.

圖2A是根據本發明一實施例之於通入氫氣材料之前的場發射式顯示器的上視示意圖。2A is a top plan view of a field emission display prior to introduction of hydrogen gas material, in accordance with an embodiment of the present invention.

圖2B是根據本發明一實施例之於通入氫氣材料之後的場發射式顯示器的上視示意圖。2B is a top plan view of a field emission display after passing hydrogen gas material, in accordance with an embodiment of the present invention.

圖3是根據本發明一實施例之對場發射式顯示器進行活化程序的示意圖。3 is a schematic diagram of an activation procedure for a field emission display in accordance with an embodiment of the present invention.

圖4是根據本發明另一實施例之場發射式顯示器的剖面示意圖。4 is a cross-sectional view of a field emission display in accordance with another embodiment of the present invention.

圖5是根據本發明一實施例之場發射式顯示器的時間與發射電流的關係圖。5 is a graph showing the relationship between time and emission current of a field emission type display according to an embodiment of the present invention.

100...場發射式顯示器100. . . Field emission display

110...第一基板110. . . First substrate

110a...外表面110a. . . The outer surface

110b...內表面110b. . . The inner surface

111...開口111. . . Opening

112...第一電極層112. . . First electrode layer

113...電阻層113. . . Resistance layer

114...介電層114. . . Dielectric layer

116...第二電極層116. . . Second electrode layer

120...第二基板120. . . Second substrate

122...第三電極層122. . . Third electrode layer

130...密封結構130. . . Sealing structure

150...發光材料層150. . . Luminescent material layer

140...電子發射器140. . . Electronic transmitter

200...吸氫材料200. . . Hydrogen absorbing material

250...外加容置結構250. . . Additional accommodating structure

252...開口252. . . Opening

CH...腔體CH. . . Cavity

Claims (14)

一種場發射式顯示器之發射源的活化方法,包括:提供一場發射式顯示器,其中該場發射式顯示器中裝設有一吸氫材料,其中該吸氫材料已經吸收飽和氫氣;將該場發射式顯示器內抽真空;對吸氫材料進行一初始活化程序;以及進行一活化程序,以使該吸氫材料中的氫氣被釋放出來。A method for activating an emission source of a field emission display, comprising: providing a field emission display, wherein the field emission display is provided with a hydrogen absorbing material, wherein the hydrogen absorbing material has absorbed saturated hydrogen; and the field emission display Vacuuming; performing an initial activation procedure on the hydrogen absorbing material; and performing an activation procedure to release hydrogen from the hydrogen absorbing material. 如申請專利範圍第1項所述之場發射式顯示器之發射源的活化方法,其中進行該活化程序以釋放出該吸氫材料中的氫氣之後,該吸氫材料可再度吸收該場發射式顯示器內的氫氣。The method for activating an emission source of a field emission display according to claim 1, wherein the activation process is performed to release hydrogen in the hydrogen absorbing material, and the hydrogen absorbing material can again absorb the field emission display. Hydrogen inside. 如申請專利範圍第2項所述之場發射式顯示器之發射源的活化方法,其中該吸氫材料吸收該場發射式顯示器內的氫氣之後,可再次進行該活化程序。The activation method of the emission source of the field emission display according to claim 2, wherein the activation process is performed again after the hydrogen absorbing material absorbs hydrogen in the field emission display. 如申請專利範圍第1項所述之場發射式顯示器之發射源的活化方法,其中該活化程序包括對該吸氫材料進行一加熱處理。The method of activating an emission source of a field emission display according to claim 1, wherein the activation process comprises a heat treatment of the hydrogen absorbing material. 如申請專利範圍第4項所述之場發射式顯示器之發射源的活化方法,其中該加熱處理的溫度為攝氏100度至攝氏1000度。The method for activating an emission source of a field emission type display according to claim 4, wherein the temperature of the heat treatment is from 100 degrees Celsius to 1000 degrees Celsius. 如申請專利範圍第4項所述之場發射式顯示器之發射源的活化方法,其中該加熱處理包括使用一高週波加熱裝置。The method of activating an emission source of a field emission type display according to claim 4, wherein the heat treatment comprises using a high frequency heating device. 如申請專利範圍第1項所述之場發射式顯示器之發射源的活化方法,其中在該場發射式顯示器通入氫氣的條件包括壓力為0.01~0.1atm,時間為大於2小時,且溫度為室溫。The method for activating an emission source of a field emission display according to claim 1, wherein the condition for introducing hydrogen into the field emission display comprises a pressure of 0.01 to 0.1 atm, a time of more than 2 hours, and a temperature of Room temperature. 如申請專利範圍第1項所述之場發射式顯示器之發射源的活化方法,其中該場發射式顯示器包括:一第一基板;一第一電極層,位於該第一基板上;一介電層,位於該第一電極層上,其中該第一電極層具有多個開口;多個電子發射器,位於該介電層之該些開口內;一第二電極層,位於該介電層之表面上;一第二基板,位於該第一基板的對向;一發光材料層,位於該第二基板上;一第三電極層,覆蓋該發光材料層;以及一密封結構,位於該第一基板與該第二基板之間,以使該第一基板、該第二基板以及該密封結構之間形成一腔體。The method for activating an emission source of a field emission type display according to claim 1, wherein the field emission type display comprises: a first substrate; a first electrode layer on the first substrate; a dielectric a layer on the first electrode layer, wherein the first electrode layer has a plurality of openings; a plurality of electron emitters are located in the openings of the dielectric layer; and a second electrode layer is located in the dielectric layer a second substrate disposed opposite the first substrate; a luminescent material layer on the second substrate; a third electrode layer covering the luminescent material layer; and a sealing structure located at the first Between the substrate and the second substrate, a cavity is formed between the first substrate, the second substrate, and the sealing structure. 如申請專利範圍第8項所述之場發射式顯示器之發射源的活化方法,其中該活化程序更包括對該第二電極層施予0~35V電壓,且對該第三電極層施予0~1KV電壓。The method for activating an emission source of a field emission display according to claim 8, wherein the activation process further comprises applying a voltage of 0 to 35 V to the second electrode layer, and applying a zero to the third electrode layer. ~1KV voltage. 如申請專利範圍第8項所述之場發射式顯示器之發射源的活化方法,其中該場發射式顯示器更包括一外加容置結構,設置於該第一基板之一外表面上,該外加容置結構具有與該腔體相通的一開口,且該吸氫材料裝設於外加容置結構內。The method for activating an emission source of a field emission type display according to the invention of claim 8, wherein the field emission type display further comprises an external receiving structure disposed on an outer surface of the first substrate, the external volume The structure has an opening communicating with the cavity, and the hydrogen absorbing material is disposed in the external accommodating structure. 如申請專利範圍第8項所述之場發射式顯示器之發射源的活化方法,其中該吸氫材料設置在該密封結構之表面上。The method of activating an emission source of a field emission type display according to claim 8, wherein the hydrogen absorbing material is disposed on a surface of the sealing structure. 如申請專利範圍第1項所述之場發射式顯示器之發射源的活化方法,其中在該電子發射器表面之氧化物與氫氣反應所生成的一氣體會被該吸氫材料吸附。The method for activating an emission source of a field emission type display according to claim 1, wherein a gas generated by reacting an oxide on the surface of the electron emitter with hydrogen is adsorbed by the hydrogen absorbing material. 如申請專利範圍第1項所述之場發射式顯示器之發射源的活化方法,其中該吸氫材料包括由鋯(Zr)、釩(V)、鐵(Fe)、鈦(Ti)或其組合所形成的合金。The method for activating an emission source of a field emission display according to claim 1, wherein the hydrogen absorbing material comprises zirconium (Zr), vanadium (V), iron (Fe), titanium (Ti) or a combination thereof. The alloy formed. 如申請專利範圍第1項所述之場發射式顯示器之發射源的活化方法,其中該初始活化程序的溫度為攝氏150至450度。The method of activating an emission source of a field emission display according to claim 1, wherein the initial activation procedure has a temperature of 150 to 450 degrees Celsius.
TW100136116A 2011-10-05 2011-10-05 Activation method for emission sources of field emission display TW201316825A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW100136116A TW201316825A (en) 2011-10-05 2011-10-05 Activation method for emission sources of field emission display
CN201110359453XA CN102354643A (en) 2011-10-05 2011-11-14 Method for activating emission source of field emission display

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW100136116A TW201316825A (en) 2011-10-05 2011-10-05 Activation method for emission sources of field emission display

Publications (1)

Publication Number Publication Date
TW201316825A true TW201316825A (en) 2013-04-16

Family

ID=45578183

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100136116A TW201316825A (en) 2011-10-05 2011-10-05 Activation method for emission sources of field emission display

Country Status (2)

Country Link
CN (1) CN102354643A (en)
TW (1) TW201316825A (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1269978B (en) * 1994-07-01 1997-04-16 Getters Spa METHOD FOR THE CREATION AND MAINTENANCE OF A CONTROLLED ATMOSPHERE IN A FIELD-EMISSION DEVICE THROUGH THE USE OF A GETTER MATERIAL
US5688708A (en) * 1996-06-24 1997-11-18 Motorola Method of making an ultra-high vacuum field emission display
JP2002008519A (en) * 2000-06-26 2002-01-11 Matsushita Electric Ind Co Ltd Cold electron emitting element device and its manufacturing method
US6670753B1 (en) * 2000-07-19 2003-12-30 Sony Corporation Flat panel display with gettering material having potential of base, gate or focus plate
JP2008210642A (en) * 2007-02-26 2008-09-11 Toshiba Corp Image display device

Also Published As

Publication number Publication date
CN102354643A (en) 2012-02-15

Similar Documents

Publication Publication Date Title
KR100369723B1 (en) How to use getter material to create and maintain a controlled environment within a field emitter
US9242019B2 (en) UV pipe
JP2005513732A (en) Structure and method for emitting light
KR100858811B1 (en) Method of manufacturing electron emission display device
WO2000060634A1 (en) Method for manufacturing flat image display and flat image display
US7489071B2 (en) Field emission system and method for improving its vacuum
Cao et al. A field emission light source using a reticulated vitreous carbon (RVC) cathode and cathodoluminescent phosphors
TW201316825A (en) Activation method for emission sources of field emission display
JP2009238415A (en) Deep ultraviolet phosphor thin film, and lamp using deep ultraviolet phosphor thin film
JP2012142109A (en) Field emission type light source
US5898272A (en) Cathode for gas discharge lamp
JP3120745B2 (en) Method of manufacturing field emission display device
JP2761404B2 (en) Fluorescent display tube
US20060006789A1 (en) Electron-beam excited light-emitting devices
JP2004066225A (en) Getter composition and field emission display apparatus using the getter composition
JP4863329B2 (en) Fluorescent display tube
JP4890343B2 (en) Light source device
WO2012086330A1 (en) Method for producing field emission light, and field emission light
US20150262779A1 (en) Cathodoluminescent UV Panel
KR100312691B1 (en) Vacuum fluorescent display having non-evaporable getter and method for making vacuous using getter
KR100283685B1 (en) High vacuum sealing method for field emission display device panel
JP2000340140A (en) Airtight container
JP2004146074A (en) Electron beam excited light emitting device
JP3117007B2 (en) Fluorescent lamp, lighting device and display device using the same
JPS61264654A (en) Fluorescent lamp