TW201315314A - Electroless nickel plating solution and method of manufacturing printed circuit board using the same - Google Patents

Electroless nickel plating solution and method of manufacturing printed circuit board using the same Download PDF

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TW201315314A
TW201315314A TW100147917A TW100147917A TW201315314A TW 201315314 A TW201315314 A TW 201315314A TW 100147917 A TW100147917 A TW 100147917A TW 100147917 A TW100147917 A TW 100147917A TW 201315314 A TW201315314 A TW 201315314A
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Taiwan
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nickel plating
electroless nickel
solution
printed circuit
grams
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TW100147917A
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Chinese (zh)
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Da-Mi Shim
Jung-Wook Seo
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Samsung Electro Mech
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/32Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
    • C23C18/34Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
    • C23C18/36Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents using hypophosphites
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1633Process of electroless plating
    • C23C18/1646Characteristics of the product obtained
    • C23C18/165Multilayered product
    • C23C18/1651Two or more layers only obtained by electroless plating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/42Coating with noble metals
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42Plated through-holes or plated via connections
    • H05K3/422Plated through-holes or plated via connections characterised by electroless plating method; pretreatment therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/095Conductive through-holes or vias
    • H05K2201/09563Metal filled via

Abstract

There are provided an electroless nickel plating solution capable of preventing non-plating of nickel, and a method of manufacturing a printed circuit board using the same. The electroless nickel plating solution including 0.05 to 3.0 grams of surfactant per 1 liter thereof. Nickel plating is performed by using the electroless nickel plating solution, and thus, the generation of unplated regions can be prevented.

Description

無電鍍鎳鍍覆溶液及使用該溶液製造印刷電路板之方法Electroless nickel plating solution and method for manufacturing printed circuit board using the same 相關申請案Related application

本申請案係主張2011年9月30日向韓國智慧財產局申請之韓國專利申請案第10-2011-0100126號之優先權,其全部揭露內容將併入本文中作為參考。The present application claims priority to Korean Patent Application No. 10-2011-0100, 126, filed on Sep. 30, 2011, the entire disclosure of which is hereby incorporated by reference.

本發明係關於一種無電鍍鎳鍍覆溶液及使用該溶液製造印刷電路板之方法,更特別的是,本發明係關於一種可抑制未鍍覆區域產生並降低鍍覆厚度偏差之無電鍍鎳鍍覆溶液及使用該溶液製造印刷電路板之方法。BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to an electroless nickel plating solution and a method of manufacturing a printed circuit board using the same, and more particularly to an electroless nickel plating capable of suppressing generation of an unplated area and reducing variation in plating thickness. A coating solution and a method of manufacturing a printed circuit board using the same.

鍍覆方法(plating method)可分為電鍍(electroplating)與無電鍍(electroless)鍍覆方法。就製造過程而言,這些鍍覆方法提供簡單、製程穩定、低成本、短加工時間、低沈積溫度、形成具有低電阻之高純度薄膜,因此可廣泛用於非常大規格之積體電路中。The plating method can be classified into an electroplating and an electroless plating method. As far as the manufacturing process is concerned, these plating methods are simple, stable in process, low in cost, short in processing time, low in deposition temperature, and high-purity film having low resistance, and thus can be widely used in a very large-sized integrated circuit.

依據無電鍍鍍覆方法之原則,金屬係藉由溶液中材料之自發性氧化及還原反應而進行沈澱,甚至不需外加電力,該無電鍍鍍覆方法已廣泛用於製造印刷電路板。According to the principle of the electroless plating method, the metal is precipitated by the spontaneous oxidation and reduction reaction of the material in the solution, and even without the need for external power, the electroless plating method has been widely used for manufacturing printed circuit boards.

由於無電鍍鍍覆方法係於水性溶液中進行,其後接續電鍍之過程連續性優異,而使該水性溶液易於滲入形成於鍍覆物體上之圖案。結果,可形成具有優異均勻特性且無階梯覆蓋(step coverage)相關之問題產生之金屬層。Since the electroless plating method is carried out in an aqueous solution, the subsequent plating process is excellent in continuity, and the aqueous solution is easily infiltrated into a pattern formed on the plated object. As a result, a metal layer having excellent uniform characteristics and no problem associated with step coverage can be formed.

近年,由於電子產品對於緊密度與高性能之要求與日俱增,印刷電路板必須高度整合,因此,該印刷電路板上之阻焊開口(solder resist opening,SRO)便需微小化。In recent years, due to the increasing demand for tightness and high performance of electronic products, printed circuit boards must be highly integrated, so the solder resist opening (SRO) on the printed circuit board needs to be miniaturized.

由於該阻焊開口(SRO)之尺寸必須降至80微米(μm)或更低,因此無鍍覆現象便可能發生於無電鍍鎳浸金(ENIG)或無電鍍鎳無電鍍鈀浸金(ENEPIG)鍍覆製程中。Since the size of the solder mask opening (SRO) must be reduced to 80 micrometers (μm) or less, no plating can occur in electroless nickel immersion gold (ENIG) or electroless nickel electroless palladium immersion gold (ENEPIG) ) in the plating process.

為解決此問題,可在鍍覆之前進行電漿處理,但此會導致加工成本增加。此外,無鍍覆問題如鎳漏鍍(Ni-skip)缺陷會依據處理條件而連續發生。To solve this problem, plasma treatment can be performed before plating, but this will result in an increase in processing cost. In addition, non-plating problems such as nickel Ni-skip defects occur continuously depending on the processing conditions.

本發明之態樣係提供一種可抑制未鍍覆區域產生同時在無電鍍鎳鍍覆時降低鍍覆厚度偏差之無電鍍鎳鍍覆溶液、及使用該溶液製造印刷電路板之方法。The aspect of the present invention provides an electroless nickel plating solution capable of suppressing generation of an unplated region while reducing plating thickness deviation during electroless nickel plating, and a method of manufacturing a printed circuit board using the solution.

依據本發明之態樣,提供一種無電鍍鎳鍍覆溶液,包含每1公升該溶液中0.05至3.0克之界面活性劑。According to an aspect of the present invention, there is provided an electroless nickel plating solution comprising 0.05 to 3.0 g of a surfactant per 1 liter of the solution.

該界面活性劑可為選自下列所組成群組之至少一者:陰離子性界面活性劑,包括月桂基硫酸鈉、十二烷基硫酸銨、月桂基醚硫酸鈉、烷基羥乙基磺酸鈉、十二烷基四乙氧基磷酸鈉以及月桂基肌胺酸鹽;以及非離子性界面活性劑,包括聚氧乙烯烷基醚與聚乙二醇。The surfactant may be at least one selected from the group consisting of anionic surfactants, including sodium lauryl sulfate, ammonium lauryl sulfate, sodium lauryl ether sulfate, alkyl isethionate. Sodium, sodium lauryl tetraethoxyphosphate, and lauryl sarcosinate; and nonionic surfactants, including polyoxyethylene alkyl ethers and polyethylene glycols.

該無電鍍鎳鍍覆溶液可復包括每1公升該溶液中20至36克之硫酸鎳、5至10克之檸檬酸鈉、40至50克之硫酸銨、10至20克之次磷酸鈉、以及0.5至1克之硫脲。The electroless nickel plating solution may further comprise 20 to 36 grams of nickel sulfate, 5 to 10 grams of sodium citrate, 40 to 50 grams of ammonium sulfate, 10 to 20 grams of sodium hypophosphite, and 0.5 to 1 per 1 liter of the solution. Thiourea.

依據本發明之另一態樣,提供一種製造印刷電路板之方法,該方法包含:製備具有含有阻焊開口(SRO)之阻焊層(solder resist layer)之印刷電路板;以及於該印刷電路板上使用無電鍍鎳鍍覆溶液進行無電鍍鎳鍍覆,該溶液包括每1公升該溶液中0.05至3.0克之界面活性劑。According to another aspect of the present invention, a method of manufacturing a printed circuit board is provided, the method comprising: preparing a printed circuit board having a solder resist layer containing a solder resist opening (SRO); and the printed circuit The plate is electroless nickel plated using an electroless nickel plating solution comprising 0.05 to 3.0 grams of surfactant per 1 liter of the solution.

該無電鍍鎳鍍覆溶液可復包括每1公升該溶液中20至36克之硫酸鎳、5至10克之檸檬酸鈉、40至50克之硫酸銨、10至20克之次磷酸鈉、以及0.5至1克之硫脲。The electroless nickel plating solution may further comprise 20 to 36 grams of nickel sulfate, 5 to 10 grams of sodium citrate, 40 to 50 grams of ammonium sulfate, 10 to 20 grams of sodium hypophosphite, and 0.5 to 1 per 1 liter of the solution. Thiourea.

該方法可復包含在無電鍍鎳鍍覆之後進行金鍍覆。The method may include gold plating after electroless nickel plating.

該阻焊開口(SRO)可具有直徑為80μm或更低。The solder resist opening (SRO) may have a diameter of 80 μm or less.

本發明之具體實施例將於下文進行詳細說明並佐以圖示。Specific embodiments of the invention are described in detail below and are illustrated in the drawings.

然而,本發明可以不同形式實施,且不應侷限於本文所述之具體實施例。However, the invention may be embodied in different forms and should not be limited to the specific embodiments described herein.

此外,提供這些具體實施例可使本文揭示更透徹與完整,並使此技術領域者可完全明白本發明之範疇。Rather, these specific embodiments are provided so that this disclosure will be thorough and complete.

在圖式中,為了說明清楚可能會放大各元件之形狀與尺寸,相同參考數字係用於表示相同或類似之元件。In the drawings, the shapes and dimensions of the various elements may be exaggerated for clarity of the description, and the same reference numerals are used to denote the same or similar elements.

依據本發明之具體實施例,可使用包含添加有界面活性劑之無電鍍鎳鍍覆溶液。According to a specific embodiment of the present invention, an electroless nickel plating solution containing a surfactant added may be used.

一般而言,無電鍍鍍覆溶液基本上可具有待用於鍍覆之含有金屬離子之金屬鹽,以及可還原並沈澱該金屬離子之還原劑。In general, the electroless plating solution may have substantially a metal salt containing a metal ion to be used for plating, and a reducing agent capable of reducing and precipitating the metal ion.

錯合劑可穩定地溶解該金屬離子,而pH調整劑則可提供還原劑進行氧化反應時所需之氫離子,催化劑可催化氧化還原反應,促進劑可增加氧化還原反應之速率,以及穩定劑可防止金屬不正常沈澱,這些皆可加入該溶液內。The wrong agent can stably dissolve the metal ion, and the pH adjuster can provide the hydrogen ion required for the oxidation reaction of the reducing agent, the catalyst can catalyze the redox reaction, the accelerator can increase the rate of the redox reaction, and the stabilizer can be To prevent abnormal precipitation of metals, these can be added to the solution.

本發明之具體實施例中之無電鍍鎳鍍覆溶液可復包括每1公升該溶液中20至36克之硫酸鎳、5至10克之檸檬酸鈉、40至50克之硫酸銨、10至20克之次磷酸鈉、以及0.5至1克之硫脲。The electroless nickel plating solution in the specific embodiment of the present invention may further comprise 20 to 36 grams of nickel sulfate, 5 to 10 grams of sodium citrate, 40 to 50 grams of ammonium sulfate, and 10 to 20 grams per 1 liter of the solution. Sodium phosphate, and 0.5 to 1 gram of thiourea.

硫酸鎳為含有鎳之金屬鹽,可作為鎳離子供應來源,提供鎳離子至無電鍍鎳鍍覆溶液中。Nickel sulfate is a metal salt containing nickel which can be used as a source of nickel ions to provide nickel ions to an electroless nickel plating solution.

次磷酸鈉可作為還原劑,將鎳離子還原成鎳金屬,以於基板表面形成鎳鍍覆層。Sodium hypophosphite can be used as a reducing agent to reduce nickel ions to nickel metal to form a nickel plating layer on the surface of the substrate.

檸檬酸鈉與硫酸銨可調整無電鍍鎳鍍覆溶液之pH值。無電鍍鍍覆之氧化還原反應會大幅受到無電鍍鎳鍍覆溶液之pH值影響。The pH of the electroless nickel plating solution can be adjusted by sodium citrate and ammonium sulfate. The redox reaction of electroless plating is greatly affected by the pH of the electroless nickel plating solution.

硫脲可增加氧化還原反應之速率,因而降低所沈澱鎳顆粒之尺寸,並增加鎳鍍覆層之光澤。Thiourea increases the rate of the redox reaction, thereby reducing the size of the precipitated nickel particles and increasing the gloss of the nickel plating layer.

在本發明具體實施例中,於無電鍍鎳鍍覆溶液每1公升中可含0.05至3.0克之界面活性劑。In a specific embodiment of the invention, 0.05 to 3.0 grams of surfactant may be included per 1 liter of the electroless nickel plating solution.

當界面活性劑之含量小於0.05克時,無電鍍鎳鍍覆溶液與待鍍覆物體之界面間之可濕潤性僅有些微改善。當界面活性劑之含量高於3.0克時,可鍍覆性會被破壞,此乃由於碳會在鍍覆膜上形成類共析體(euectoid)或產生氣泡。When the content of the surfactant is less than 0.05 g, the wettability between the interface of the electroless nickel plating solution and the object to be plated is only slightly improved. When the content of the surfactant is more than 3.0 g, the plateability is destroyed because carbon forms an euectoid or bubbles on the plated film.

該界面活性劑為溶解於液體並吸附至界面上之材料,可明顯降低該界面之能量,因而進行如濕潤、乳化、分散、泡沫化、溶解、清洗等之作用。The surfactant is a material which is dissolved in a liquid and adsorbed to the interface, and can significantly reduce the energy of the interface, thereby performing functions such as wetting, emulsifying, dispersing, foaming, dissolving, washing, and the like.

目前分為離子性界面活性劑,其可溶解於水中以呈現界面活性、以及非離子性界面活性劑,其無法溶解於水中而呈離子中性狀態。該離子性界面活性劑包括陰離子性、陽離子性與兩性離子性界面活性劑。Currently classified as an ionic surfactant, it is soluble in water to exhibit interfacial activity, and a nonionic surfactant that is insoluble in water and is in an ionic neutral state. The ionic surfactants include anionic, cationic and zwitterionic surfactants.

就陰離子性界面活性劑而言,可使用羧酸(-COOH)、磺酸鹽(-SO3H)、磺酸酯(-OSO3H)、磷酸酯、磷酸鹽、烷基苯磺酸鹽、α-烯烴磺酸鹽、烷基磺酸酯、烷基醚硫酸鹽、烷基磺酸鹽等。就陽離子性界面活性劑而言,可使用胺鹽、四級銨鹽、鋶鹽、鏻鹽等。就兩性離子界面活性劑而言,可使用胺基酸型陽離子性界面活性劑或甜菜鹼型界面活性劑。As the anionic surfactant, a carboxylic acid (-COOH), a sulfonate (-SO 3 H), a sulfonate (-OSO 3 H), a phosphate, a phosphate, an alkylbenzenesulfonate can be used. , α-olefin sulfonate, alkyl sulfonate, alkyl ether sulfate, alkyl sulfonate, and the like. As the cationic surfactant, an amine salt, a quaternary ammonium salt, a phosphonium salt, a phosphonium salt or the like can be used. As the zwitterionic surfactant, an amino acid type cationic surfactant or a betaine type surfactant can be used.

就非離子性界面活性劑而言,可使用多元醇衍生物如單甘油酯、聚甘油酯;山梨醣酯;蔗糖脂肪酸酯;烷醇醯胺;聚乙二醇與山梨糖醇;糖精;-OH基、-COO-基、-CO‧NH-基、-O-基之聚羥基化合物等。As the nonionic surfactant, polyol derivatives such as monoglycerides, polyglycerides; sorbitan esters; sucrose fatty acid esters; alkanolamines; polyethylene glycol and sorbitol; saccharin; -OH group, -COO- group, -CO‧NH- group, -O- group polyhydroxy compound, and the like.

在本發明之具體實施例中,該界面活性劑係加至無電鍍鎳鍍覆溶液中,因此可降低無電鍍鎳鍍覆溶液之表面張力,以改善無電鍍鎳鍍覆溶液之充型質量(filling qualities)。In a specific embodiment of the present invention, the surfactant is added to the electroless nickel plating solution, thereby reducing the surface tension of the electroless nickel plating solution to improve the filling quality of the electroless nickel plating solution ( Filling qualities).

換言之,該無電鍍鎳鍍覆溶液無法平滑地接觸窄部分,如彎曲區域、穿通孔、通孔等。然而,當將界面活性劑加至無電鍍鎳鍍覆溶液時,該無電鍍鎳鍍覆溶液可於這些部分上平滑地潤濕,因而增加鍍覆反應力並抑制由於氫氣泡之去泡沫化而出現未鍍覆區域。In other words, the electroless nickel plating solution cannot smoothly contact narrow portions such as curved regions, through holes, through holes, and the like. However, when a surfactant is added to the electroless nickel plating solution, the electroless nickel plating solution can be smoothly wetted on these portions, thereby increasing the plating reaction force and suppressing the defoaming due to hydrogen bubbles. An unplated area appears.

在本發明具體實施例中,界面活性劑之實例可為選自下列所組成群組之至少一者:陰離子性界面活性劑,包括月桂基硫酸鈉、十二烷基硫酸銨、月桂基醚硫酸鈉、月桂基肌胺酸鹽、烷基羥乙基磺酸鈉、十二烷基四乙氧基磷酸鈉、以及月桂基肌胺酸鹽等;以及非離子性界面活性劑,包括聚氧乙烯烷基醚與聚乙二醇。In a specific embodiment of the present invention, an example of a surfactant may be at least one selected from the group consisting of an anionic surfactant, including sodium lauryl sulfate, ammonium lauryl sulfate, and lauryl ether sulfate. Sodium, lauryl sarcosinate, sodium alkyl isethionate, sodium lauryl tetraethoxyphosphate, and lauryl sarcosinate; and nonionic surfactants, including polyoxyethylene Alkyl ether and polyethylene glycol.

下文將描述本發明之另一具體實施例之製造印刷電路板之方法。A method of manufacturing a printed circuit board according to another embodiment of the present invention will be described below.

請參照第1圖與第2圖,本發明之製造印刷電路板之方法可包括:製備具有含有阻焊開口(SRO)31之阻焊層30之印刷電路板;以及於該印刷電路板上使用無電鍍鎳鍍覆溶液進行無電鍍鎳鍍覆,該溶液包括每1公升該溶液中0.05至3.0克之界面活性劑。Referring to FIGS. 1 and 2, the method of manufacturing a printed circuit board of the present invention may include: preparing a printed circuit board having a solder resist layer 30 containing a solder resist opening (SRO) 31; and using the printed circuit board The electroless nickel plating solution is subjected to electroless nickel plating, and the solution includes 0.05 to 3.0 g of the surfactant per 1 liter of the solution.

絕緣層10可結構性支撐該印刷電路板與絕緣導體(其係形成於印刷電路板中)。The insulating layer 10 can structurally support the printed circuit board and the insulated conductor (which is formed in the printed circuit board).

內部線路22、通孔導體21、以及導電墊20可形成於印刷電路板內部。The inner line 22, the via conductor 21, and the conductive pad 20 may be formed inside the printed circuit board.

內部線路22可位於線路圖案間之絕緣層內側,並可形成複數層。當內部線路22形成複數層時,不同層中形成之內部線路22可連接至通孔導體21。The inner line 22 may be located inside the insulating layer between the line patterns and may form a plurality of layers. When the internal wiring 22 forms a plurality of layers, the internal wiring 22 formed in the different layers may be connected to the via conductor 21.

導電墊20可位於絕緣層10之外表面,且可用於形成印刷電路板上之電極。Conductive pads 20 can be located on the outer surface of insulating layer 10 and can be used to form electrodes on a printed circuit board.

穿透阻焊層30之阻焊開口(SRO)31可藉由蝕刻等方式部分移除該阻焊層而形成,以用於將形成於該印刷電路板之表面之導電墊20暴露於外。此稱為阻焊層開口或阻焊開口(SRO)31。The solder resist opening (SRO) 31 penetrating the solder resist layer 30 may be formed by partially removing the solder resist layer by etching or the like for exposing the conductive pad 20 formed on the surface of the printed circuit board to the outside. This is called a solder mask opening or a solder resist opening (SRO) 31.

首先,該印刷電路板可經清洗以移除有機污染物,如油類。First, the printed circuit board can be cleaned to remove organic contaminants such as oils.

之後,進行軟蝕刻以於所得印刷電路板之表面上形成微細粗糙度,因此,可使稍後待形成之鎳鍍覆層之黏著度增加。Thereafter, soft etching is performed to form fine roughness on the surface of the resulting printed circuit board, and therefore, the adhesion of the nickel plating layer to be formed later can be increased.

之後,進行預浸製程,以活化所得印刷電路板之表面。Thereafter, a pre-dip process is performed to activate the surface of the resulting printed circuit board.

之後,可形成Cl型或SO4型之取代式鈀催化劑。透過此催化作用,可於非導電性裝置中產生用於進行自發性氧化還原反應產生鍍覆,並在無電鍍鎳鍍覆溶液中開始還原反應之核種。Thereafter, a substituted palladium catalyst of the Cl type or the SO 4 type can be formed. Through this catalysis, a seed for generating a spontaneous redox reaction to produce plating and starting a reduction reaction in an electroless nickel plating solution can be produced in a non-conductive device.

之後,進行無電鍍鎳鍍覆。Thereafter, electroless nickel plating is performed.

於此,於無電鍍鎳鍍覆溶液中每1公升可包含0.05至3.0克之界面活性劑。Here, 0.05 to 3.0 g of the surfactant may be contained per 1 liter in the electroless nickel plating solution.

此外,該無電鍍鎳鍍覆溶液可復包括每1公升該溶液中20至36克之硫酸鎳、5至10克之檸檬酸鈉、40至50克之硫酸銨、10至20克之次磷酸鈉、以及0.5至1克之硫脲。Further, the electroless nickel plating solution may further comprise 20 to 36 grams of nickel sulfate, 5 to 10 grams of sodium citrate, 40 to 50 grams of ammonium sulfate, 10 to 20 grams of sodium hypophosphite, and 0.5 per 1 liter of the solution. To 1 gram of thiourea.

之後,可進行鈀(Pd)鍍覆與無電鍍取代式金(Au)鍍覆,以形成薄金鍍覆層。Thereafter, palladium (Pd) plating and electroless gold plating (Au) plating may be performed to form a thin gold plating layer.

之後,可進行無電鍍金(Au)鍍覆,以形成厚金(Au)鍍覆層。Thereafter, electroless gold (Au) plating may be performed to form a thick gold (Au) plating layer.

上述方法可用於製造其上具有鎳與金鍍覆層之印刷電路板。The above method can be used to fabricate printed circuit boards having nickel and gold plating thereon.

印刷電路板之阻焊開口(SRO)可具有直徑(A)為80μm或更低。The solder resist opening (SRO) of the printed circuit board may have a diameter (A) of 80 μm or less.

在印刷電路板之阻焊開口(SRO)具有直徑(A)為85至120μm之情況,便需在無電鍍鎳鍍覆之前進行電漿預處理,然而,會連續性產生未鍍覆區域。In the case where the solder resist opening (SRO) of the printed circuit board has a diameter (A) of 85 to 120 μm, it is necessary to perform plasma pretreatment before electroless nickel plating, however, continuity is generated to produce an unplated area.

此外,該電漿處理會使製造成本增加。In addition, the plasma treatment increases manufacturing costs.

當阻焊開口(SRO)具有直徑為80μm或更低時,該阻焊開口(SRO)很窄,使得無電鍍鎳鍍覆溶液無法輕易地滲透至阻焊開口(SRO)。結果,在該無電鍍鎳鍍覆溶液與待鍍覆物體間之接觸將無法適當產生,因而無法形成鍍覆層。When the solder resist opening (SRO) has a diameter of 80 μm or less, the solder resist opening (SRO) is narrow, so that the electroless nickel plating solution cannot easily penetrate into the solder resist opening (SRO). As a result, the contact between the electroless nickel plating solution and the object to be plated cannot be properly produced, and thus the plating layer cannot be formed.

為了解決這些問題,本發明之具體實施例之無電鍍鎳鍍覆溶液每1公升中包括0.05至3.0克之界面活性劑。In order to solve these problems, the electroless nickel plating solution of the specific embodiment of the present invention includes 0.05 to 3.0 g of the surfactant per 1 liter.

透過添加界面活性劑,可降低無電鍍鎳鍍覆溶液之界面張力,且可改善無電鍍鎳鍍覆溶液在待鍍覆物體之表面上之可濕潤性,因此,該無電鍍鎳鍍覆溶液可更容易滲透至小空間中。By adding a surfactant, the interfacial tension of the electroless nickel plating solution can be reduced, and the wettability of the electroless nickel plating solution on the surface of the object to be plated can be improved, and therefore, the electroless nickel plating solution can be It is easier to penetrate into small spaces.

因此,該無電鍍鎳鍍覆溶液可與待鍍覆物體之表面進行良好接觸,而不會產生未形成鍍覆層之未鍍覆區域。Therefore, the electroless nickel plating solution can be in good contact with the surface of the object to be plated without generating an unplated region where the plating layer is not formed.

因此,增加無電鍍鎳鍍覆溶液之可濕潤性,並可改善無電鍍鎳鍍覆溶液與待鍍覆物體間之接觸。Therefore, the wettability of the electroless nickel plating solution is increased, and the contact between the electroless nickel plating solution and the object to be plated can be improved.

因此,可更常發生無電鍍鎳鍍覆溶液與待鍍覆或已形成鍍覆層之物體間之接觸,因此,與無電鍍鎳鍍覆溶液中未添加界面活性劑之情況相較,鍍覆層全體可較厚。此外,該鍍覆層可更均勻地形成。Therefore, the contact between the electroless nickel plating solution and the object to be plated or the plated layer can be more often occurred, and therefore, compared with the case where no surfactant is added to the electroless nickel plating solution, the plating is performed. The entire layer can be thicker. Furthermore, the plating layer can be formed more uniformly.

有關無電鍍鎳鍍覆溶液之組成物之其它內容如同上述。Other contents relating to the composition of the electroless nickel plating solution are as described above.

<實施例><Example>

下文,本發明將以具體的實施例進行詳細說明。Hereinafter, the invention will be described in detail by way of specific examples.

首先,製備包括具有尺寸為80μm之阻焊開口(SRO)之印刷電路板,之後於其上進行清洗與軟蝕刻,因此移除在其表面上存留之外來物質。First, a printed circuit board including a solder resist opening (SRO) having a size of 80 μm was prepared, after which cleaning and soft etching were performed thereon, thereby removing foreign substances remaining on the surface thereof.

之後,進行預浸製程,以活化印刷電路板之表面。Thereafter, a pre-dip process is performed to activate the surface of the printed circuit board.

之後,以無電鍍鍍覆方法於該印刷電路板之表面上形成鎳鍍覆層。Thereafter, a nickel plating layer is formed on the surface of the printed circuit board by an electroless plating method.

無電鍍鎳鍍覆溶液係如下述製備。亦即,製備無電鍍鎳鍍覆溶液,其中界面活性劑之含量係於鹼性鍍覆溶液中變化,該溶液包括每1公升該無電鍍鎳鍍覆溶液中25克之硫酸鎳、8克之檸檬酸鈉、45克之硫酸銨、15克之次磷酸鈉、與1克之硫脲。The electroless nickel plating solution was prepared as follows. That is, an electroless nickel plating solution is prepared, wherein the content of the surfactant is varied in the alkaline plating solution, and the solution includes 25 g of nickel sulfate and 8 g of citric acid per 1 liter of the electroless nickel plating solution. Sodium, 45 grams of ammonium sulfate, 15 grams of sodium hypophosphite, and 1 gram of thiourea.

在本發明實施例1中,加入0.05克之月桂基硫酸鈉作為界面活性劑。In Example 1 of the present invention, 0.05 g of sodium lauryl sulfate was added as a surfactant.

在本發明實施例2中,加入0.05克之月桂醚硫酸鈉作為界面活性劑。In Example 2 of the present invention, 0.05 g of sodium lauryl ether sulfate was added as a surfactant.

在本發明實施例3中,加入0.05克之十二烷基硫酸銨作為界面活性劑。In Example 3 of the present invention, 0.05 g of ammonium lauryl sulfate was added as a surfactant.

在本發明實施例4中,加入0.96克之聚氧伸烷基烷基醚作為界面活性劑。In Example 4 of the present invention, 0.96 g of polyoxyalkylene alkyl ether was added as a surfactant.

無電鍍鍍覆係於無電鍍鎳鍍覆溶液維持於80℃時進行,因此在印刷電路板之SRO形成鎳鍍覆層。The electroless plating is performed while the electroless nickel plating solution is maintained at 80 ° C, so that a nickel plating layer is formed on the SRO of the printed circuit board.

之後,藉由無電鍍鍍覆於該鎳鍍覆層上形成鈀(Pd)鍍覆層,接著藉由無電鍍鍍覆於該鈀鍍覆層上形成金(Au)鍍覆層。Thereafter, a palladium (Pd) plating layer is formed by electroless plating on the nickel plating layer, and then a gold (Au) plating layer is formed by electroless plating on the palladium plating layer.

在比較例之無電鍍鎳鍍覆溶液,係以與本發明實施例相同之方法製備,除了未添加界面活性劑於該無電鍍鎳鍍覆溶液中之外。The electroless nickel plating solution of the comparative example was prepared in the same manner as in the examples of the present invention except that no surfactant was added to the electroless nickel plating solution.

就本發明實施例與比較例而言,決定鍍覆速率、有無被鈀溶液污染、有無未鍍覆區域,並進行電線焊接測試以及球拉伸測試,結果列於表1。For the examples and comparative examples of the present invention, the plating rate, the presence or absence of contamination by the palladium solution, the presence or absence of unplated areas, and the wire bonding test and the ball tensile test were performed. The results are shown in Table 1.

鍍覆速率係以於待鍍之30mm×30mm銅箔片(CCL)上進行無電鍍鍍覆25分鐘後所形成之鍍覆層的厚度,除以加工時間之數值表示。The plating rate is expressed by the value of the processing time formed by electroless plating on a 30 mm × 30 mm copper foil (CCL) to be plated for 25 minutes.

有無無鍍覆區域係以光學顯微鏡觀察而確認,結果顯示於第4圖中。The presence or absence of the non-plated area was confirmed by optical microscopy, and the results are shown in Fig. 4.

在部分產生無鍍覆區域之情況,則判定為缺陷情況(NG),若未產生無鍍覆區域,則判定為良好情況(OK)。When a non-plated area is partially generated, it is determined as a defect (NG), and if no unplated area is generated, it is judged to be good (OK).

進行電線焊接測試與球拉伸測試。Conduct wire welding test and ball tensile test.

依據電線焊接測試,將電線焊接至印刷電路板之鍍覆區域,之後測量拉伸電線時,該電線反抗拉力之能力。依據球拉伸測試,將球焊接至鍍覆層上,之後當球拉出時,檢查該鍍覆層是否被剝落或破壞。According to the wire soldering test, the wire is soldered to the plated area of the printed circuit board, and then the wire is resisted from the tensile force when the wire is drawn. According to the ball tensile test, the ball is welded to the plating layer, and then when the ball is pulled out, it is checked whether the plating layer is peeled off or broken.

就ENEPIG製程而言,可在界面活性劑被鈀溶液污染之情況下進行無電鍍鍍覆。因此,當使用被鈀溶液污染之界面活性劑時,需進行評估。For the ENEPIG process, electroless plating can be performed with the surfactant being contaminated with a palladium solution. Therefore, when using a surfactant contaminated with a palladium solution, an evaluation is required.

亦即,鎳鍍覆與金鍍覆係於界面活性劑被鈀溶液污染後進行,之後進行電線焊接測試與球拉伸測試,以評估可信賴性。That is, nickel plating and gold plating are performed after the surfactant is contaminated with the palladium solution, and then subjected to a wire bonding test and a ball tensile test to evaluate the reliability.

此外,無電鍍鎳鍍覆係於銅箔片上進行,觀察鍍覆層之厚度與形狀,比較鎳鍍覆層之厚度與均勻性,各自實施例之橫截面影像顯示於第5圖中。Further, electroless nickel plating was performed on a copper foil sheet, and the thickness and shape of the plating layer were observed, and the thickness and uniformity of the nickel plating layer were compared. The cross-sectional images of the respective examples are shown in Fig. 5.

請參照第3圖與第4圖,可確認在比較例中產生未鍍覆區域(B),但在本發明實施例1至4中未觀察到。Referring to Figs. 3 and 4, it was confirmed that the unplated region (B) was produced in the comparative example, but it was not observed in the inventive examples 1 to 4.

應瞭解到界面活性劑可有效降低無電鍍鎳鍍覆溶液之表面能量,因此該無電鍍鎳鍍覆溶液可有效滲透至待鍍覆物體之窄空間中,結果,該無電鍍鎳鍍覆溶液可平滑地接觸待鍍覆物體之表面。It should be understood that the surfactant can effectively reduce the surface energy of the electroless nickel plating solution, so the electroless nickel plating solution can effectively penetrate into the narrow space of the object to be plated, and as a result, the electroless nickel plating solution can be Smoothly contact the surface of the object to be coated.

請參照表1,比較例與本發明實施例顯示鍍覆速率為0.18微米(μm)/分鐘(min),所有實施例皆具有相同之鍍覆速率。Referring to Table 1, the comparative example and the embodiment of the present invention show a plating rate of 0.18 micrometers (μm) per minute (min), all of which have the same plating rate.

就鍍覆速率而言,由於比較例與本發明實施例並無明顯差別,因此在產率方面可推測比較例與本發明實施例亦無明顯差異。As far as the plating rate is concerned, since the comparative example is not significantly different from the embodiment of the present invention, it is presumed that the comparative example is not significantly different from the embodiment of the present invention in terms of productivity.

在電線焊接測試與球拉伸測試中,比較例與本發明實施例皆顯示良好結果。Both the comparative example and the examples of the present invention showed good results in the wire bonding test and the ball tensile test.

可確認的是當使用本發明之無電鍍鎳鍍覆溶液時,無可信賴性之問題。It can be confirmed that there is no problem of reliability when using the electroless nickel plating solution of the present invention.

應可瞭解到,即使在使用被鈀溶液污染之界面活性劑時,所有可信賴性之測試結果皆相當良好。It should be understood that all the reliability test results are quite good even when using a surfactant contaminated with a palladium solution.

就此事實而言,本發明之界面活性劑亦可應用於ENEPIG製程中。In this regard, the surfactant of the present invention can also be used in the ENEPIG process.

請參照顯示比較例之結果之第5A圖,可確認該鍍覆層具有厚度為2.81μm,且該鎳鍍覆層並非均勻地形成。Referring to Fig. 5A showing the results of the comparative example, it was confirmed that the plating layer had a thickness of 2.81 μm, and the nickel plating layer was not uniformly formed.

請參照顯示本發明實施例1之結果之第5B圖,可確認該鍍覆層具有厚度為4.21μm,且該鎳鍍覆層係均勻地形成。Referring to Fig. 5B showing the results of Example 1 of the present invention, it was confirmed that the plating layer had a thickness of 4.21 μm, and the nickel plating layer was uniformly formed.

亦即,可推測將界面活性劑加入無電鍍鎳鍍覆溶液可改善無電鍍鎳鍍覆溶液與待鍍覆物體間之可濕潤性,因此與比較例相較,本發明實施例可均勻地形成較厚之鎳鍍覆層。That is, it can be presumed that the addition of the surfactant to the electroless nickel plating solution improves the wettability between the electroless nickel plating solution and the object to be plated, and thus the embodiment of the present invention can be uniformly formed as compared with the comparative example. Thicker nickel plating.

如上述,於印刷電路板上使用本發明之具體實施例之無電鍍鎳鍍覆溶液進行鎳鍍覆時,可防止未鍍覆區域之產生,並降低鍍覆厚度之偏差。As described above, when nickel plating is performed on the printed circuit board using the electroless nickel plating solution of the specific embodiment of the present invention, generation of an unplated region can be prevented, and variation in plating thickness can be reduced.

本案說明書中所使用之術語係提供用於解釋特定的具體實施例,並以說明目的揭示,而具體解釋本發明。單數形式之描述係欲包括複數形式,除非文中內容清楚的另有所指。The terminology used in the description herein is for the purpose of illustration The singular forms are intended to include the plural unless the context clearly dictates otherwise.

除非另有特別描述,術語"包括(comprise)"以及變化詞如"包括(comprises或comprising)"應瞭解為指定元件之內含物,而非排除其他元件。Unless specifically stated otherwise, the terms "comprise" and variations such as "comprises or "comprising" shall be taken to mean the inclusion of the elements, and not to exclude other elements.

本發明已以例示性具體實施例進行詳細描述,熟習此技術領域者應可清楚瞭解到可進行修飾與變化,而不脫離後附申請專利範圍所定義之本發明之精神與範疇。The present invention has been described in detail with reference to the preferred embodiments of the present invention, and the scope of the present invention as defined by the appended claims.

10...絕緣層10. . . Insulation

20...導電墊20. . . Conductive pad

21...通孔導體twenty one. . . Through hole conductor

22...內部線路twenty two. . . Internal line

30...阻焊層30. . . Solder mask

31...阻焊開口(SRO)31. . . Solder mask opening (SRO)

本發明上述與其他態樣、特徵與其他優點將以下列詳細說明與圖示而更臻清楚,其中:The above and other aspects, features and other advantages of the present invention will become more apparent from

第1A圖為使用於本發明之具體實施例中之印刷電路板之示意圖;1A is a schematic view of a printed circuit board used in a specific embodiment of the present invention;

第1B圖為其上有鎳鍍覆形成之印刷電路板之示意圖;Figure 1B is a schematic view of a printed circuit board formed by nickel plating;

第1C圖為其上有金鍍覆形成之印刷電路板之示意圖;1C is a schematic view of a printed circuit board formed by gold plating thereon;

第2圖為本發明之具體實施例之製造印刷電路板之方法之流程圖;2 is a flow chart of a method of manufacturing a printed circuit board according to a specific embodiment of the present invention;

第3圖為比較例中印刷電路板之光學顯微鏡影像;Figure 3 is an optical microscope image of a printed circuit board in a comparative example;

第4A至第4D圖為本發明實施例1至4之印刷電路板之光學顯微鏡影像;4A to 4D are optical microscope images of printed circuit boards according to Embodiments 1 to 4 of the present invention;

第5A圖為比較例之印刷電路板之橫截面影像;以及Figure 5A is a cross-sectional image of a printed circuit board of a comparative example;

第5B圖為本發明實施例1之印刷電路板之橫截面影像。Fig. 5B is a cross-sectional image of a printed circuit board according to Embodiment 1 of the present invention.

該代表圖無元件符號及其代表之意義。The representative figure has no component symbols and the meaning of its representation.

Claims (7)

一種無電鍍鎳鍍覆溶液,包括每1公升該溶液中0.05至3.0克(g)之界面活性劑。An electroless nickel plating solution comprising 0.05 to 3.0 grams (g) of surfactant per 1 liter of the solution. 如申請專利範圍第1項所述之無電鍍鎳鍍覆溶液,其中,該界面活性劑係選自下列所組成群組之至少一者:陰離子界面活性劑,包括月桂基硫酸鈉、十二烷基硫酸銨、月桂基醚硫酸鈉、烷基羥乙基磺酸鈉、十二烷基四乙氧基磷酸鈉以及月桂基肌胺酸鹽;以及非離子性界面活性劑包括聚氧乙烯烷基醚與聚乙二醇。The electroless nickel plating solution according to claim 1, wherein the surfactant is selected from at least one of the group consisting of an anionic surfactant, including sodium lauryl sulfate and dodecane. Ammonium sulfate, sodium lauryl ether sulfate, sodium alkyl isethionate, sodium lauryl tetraethoxyphosphate, and lauryl sarcosinate; and nonionic surfactants including polyoxyethylene alkyl Ether and polyethylene glycol. 如申請專利範圍第1項所述之無電鍍鎳鍍覆溶液,復包括每1公升該溶液中20至36克之硫酸鎳、5至10克之檸檬酸鈉、40至50克之硫酸銨、10至20克之次磷酸鈉以及0.5至1克之硫脲。The electroless nickel plating solution as described in claim 1 further comprises 20 to 36 grams of nickel sulfate, 5 to 10 grams of sodium citrate, 40 to 50 grams of ammonium sulfate, 10 to 20 per 1 liter of the solution. Sodium hypophosphite and 0.5 to 1 gram of thiourea. 一種製造印刷電路板之方法,該方法包括:製備具有含有阻焊開口(solder resist opening (SRO))之阻焊層(solder resist layer)之印刷電路板;以及於該印刷電路板上使用無電鍍鎳鍍覆溶液進行無電鍍鎳鍍覆,該溶液包括每1公升該溶液中0.05至3.0克之界面活性劑。A method of manufacturing a printed circuit board, the method comprising: preparing a printed circuit board having a solder resist layer (SDR); and using an electroless plating on the printed circuit board The nickel plating solution is subjected to electroless nickel plating, and the solution includes 0.05 to 3.0 g of the surfactant per 1 liter of the solution. 如申請專利範圍第4項所述之方法,其中,該無電鍍鎳鍍覆溶液復包含每1公升該溶液中20至36克之硫酸鎳、5至10克之檸檬酸鈉、40至50克之硫酸銨、10至20克之次磷酸鈉以及0.5至1克之硫脲。The method of claim 4, wherein the electroless nickel plating solution comprises 20 to 36 grams of nickel sulfate, 5 to 10 grams of sodium citrate, and 40 to 50 grams of ammonium sulfate per 1 liter of the solution. 10 to 20 grams of sodium hypophosphite and 0.5 to 1 gram of thiourea. 如申請專利範圍第4項所述之方法,復包括在進行該無電鍍鎳鍍覆之後進行金鍍覆。The method of claim 4, further comprising performing gold plating after performing the electroless nickel plating. 如申請專利範圍第4項所述之方法,其中,該阻焊開口(SRO)具有直徑為80μm或更小。The method of claim 4, wherein the solder resist opening (SRO) has a diameter of 80 μm or less.
TW100147917A 2011-09-30 2011-12-22 Electroless nickel plating solution and method of manufacturing printed circuit board using the same TW201315314A (en)

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