TW201313381A - Scaling device - Google Patents
Scaling device Download PDFInfo
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- TW201313381A TW201313381A TW101132172A TW101132172A TW201313381A TW 201313381 A TW201313381 A TW 201313381A TW 101132172 A TW101132172 A TW 101132172A TW 101132172 A TW101132172 A TW 101132172A TW 201313381 A TW201313381 A TW 201313381A
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- 230000033001 locomotion Effects 0.000 claims description 51
- 230000000694 effects Effects 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 description 31
- 238000000576 coating method Methods 0.000 description 31
- 239000000758 substrate Substances 0.000 description 18
- 239000007788 liquid Substances 0.000 description 10
- 230000008602 contraction Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 230000007246 mechanism Effects 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000032258 transport Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 230000005674 electromagnetic induction Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
- G01D5/34753—Carriages; Driving or coupling means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
Description
本發明是關於塗佈裝置(coating machine)的開縫噴嘴(slit nozzle)位置控制等，主要被利用於直動裝置的精密控制的標度裝置。
The present invention relates to a slit nozzle position control of a coating machine, and the like, which is mainly used for a precision control scale device of a linear motion device.
在液晶顯示器(liquid crystal display)或電漿顯示器(plasma display)等的平面面板顯示器(flat panel display)，在基板(substrate)上塗佈有光阻(resist)液者(稱為塗佈基板)被使用。該塗佈基板是藉由在基板上均勻地塗佈光阻液或藥液等的塗佈液的塗佈裝置而形成。
顯示塗佈裝置的概略圖於圖6。塗佈裝置1具有運送基板W的運送部2，與將塗佈液塗佈於基板的塗佈部3。塗佈部3具備具有延伸於與透過運送部2進行的基板W的運送方向垂直的方向的開縫(slit)的開縫噴嘴，一邊以規定速度運送基板W，一邊由該開縫吐出塗佈液，在基板W上形成塗佈膜。
為了使該塗佈膜的厚度均勻，需使由開縫吐出的塗佈液的量均勻，並且以例如微米(micron)單位精度佳地控制開縫噴嘴的高度，均勻地保持開縫噴嘴與基板W的距離。
用以精度佳地控制該開縫噴嘴的高度的手段，例如如以下的專利文獻1所示的將標度(scale)組裝於直動裝置，根據由標度得到的位置資訊進行定位對象的位置控制的手法一直以來被使用於塗佈裝置的塗佈部的構成。例如如圖7(a)所示，在搭載開縫噴嘴91的梁(beam)92升降並控制開縫噴嘴91的高度的塗佈部90中，在透過直動導件(direct-acting guide)95支撐梁92的支撐部96安裝有標度93，在梁92安裝有讀取頭94。此處，讀取頭94讀取標度93的刻度，藉由根據該值控制讀取頭94的位置，進行梁92及開縫噴嘴91的高度的控制，使開縫噴嘴91與基板W的距離保持一定。而且，標度93透過標度93的兩端部的近旁的固定部97及固定部98，並透過螺栓固定而被安裝於支撐部96。
[專利文獻1] 日本國特開平11-138475號公報In a flat panel display such as a liquid crystal display or a plasma display, a resist liquid is coated on a substrate (referred to as a coated substrate). used. The coated substrate is formed by a coating device that uniformly applies a coating liquid such as a photoresist or a chemical liquid on a substrate.
A schematic view of the display coating device is shown in Fig. 6. The coating device 1 has a transport unit 2 that transports the substrate W, and a coating unit 3 that applies a coating liquid to the substrate. The application unit 3 includes a slit nozzle having a slit extending in a direction perpendicular to the conveyance direction of the substrate W through the transport unit 2, and transports the substrate W at a predetermined speed while discharging the coating from the slit. The liquid forms a coating film on the substrate W.
In order to make the thickness of the coating film uniform, it is necessary to make the amount of the coating liquid discharged from the slit uniform, and to control the height of the slit nozzle with, for example, micron unit precision, and uniformly maintain the slit nozzle and the substrate. The distance of W.
For the purpose of accurately controlling the height of the slit nozzle, for example, a scale is assembled to a linear motion device as shown in Patent Document 1 below, and the position of the positioning target is performed based on the position information obtained by the scale. The method of control has been used for the configuration of the coating portion of the coating device. For example, as shown in FIG. 7(a), in the application portion 90 in which the beam 92 of the slit nozzle 91 is lifted and lowered and the height of the slit nozzle 91 is controlled, the direct-acting guide is transmitted through the direct-acting guide. A support portion 96 of the 95 support beam 92 is mounted with a scale 93, and a read head 94 is attached to the beam 92. Here, the reading head 94 reads the scale of the scale 93, and controls the height of the beam 92 and the slit nozzle 91 by controlling the position of the reading head 94 based on the value, so that the slit nozzle 91 and the substrate W are controlled. The distance remains certain. Further, the scale 93 passes through the fixing portion 97 and the fixing portion 98 near the both end portions of the scale 93, and is attached to the support portion 96 by bolt fixing.
[Patent Document 1] Japanese Patent Laid-Open No. 11-138475
但是，在記載於上述專利文獻1的直動裝置中，若周圍溫度有變化，則有無法正確地進行位置控制之虞的問題。
例如若設圖7(a)所示的塗佈部90的支撐部96熱膨脹變成圖7(b)的狀態，則與支撐部96的膨脹一起，在圖7(a)所示的固定部97及固定部98的位置也變化，而位移到固定部97’及固定部98’所示的位置。此時，因與固定部97與固定部98之間的距離比較，固定部97’與固定部98’之間的距離變長，故標度93被拉長，標度93的刻度間隔也擴大。
此處，例如在讀取頭94讀取了標度93的A之座標的刻度的位置中開縫噴嘴91對基板W進行塗佈液的塗佈動作而進行控制的情形，在圖7(a)的情形與圖7(b)的情形下，標度93顯示座標A的位置不同。亦即無法正確地控制開縫噴嘴91的位置，均等地保持開縫噴嘴91與基板W的距離並以均勻的膜厚進行塗佈變的困難。
此外，防止該問題的一個方法可舉出以低熱膨脹材構成支撐部96，但因與一般當作構成支撐部96的材料而被使用的SUS(stainless steel:不銹鋼)等比較，低熱膨脹材成本非常高，且支撐部96為支撐開縫噴嘴91的構件，具有大的形狀，故替換成低熱膨脹材會導致塗佈裝置的製作成本的大幅增加。因此，當盡可能抑制預算製作塗佈裝置時，很難採用該方法。
為了解決上述課題，本發明的標度裝置包含:在一方向排列有刻度之標度；安裝前述標度之基座部；讀取前述標度的刻度之讀取頭，其特徵為:前述標度藉由在附加有刻度的方向的刻度方向的一端中被固定於前述基座部之固定部，與在相反側的端部中透過直動導件被安裝於前述基座部之導件安裝部，而被安裝於前述基座部，前述直動導件移動的方向與前述刻度方向為同一。
依照上述標度裝置，由於標度藉由在刻度方向的一端中被固定於基座部之固定部，與在相反側的端部中透過直動導件被安裝於基座部之導件安裝部，而被安裝於基座部，直動導件移動的方向與刻度方向為同一，即使基座部熱膨脹或收縮，也可藉由直動導件動作，防止標度因該熱膨脹或收縮而伸縮於刻度方向，故可保持標度的座標精度，讀取頭所帶來的精度佳的位置控制為可能。
而且，當前述基座部的一端被固定於搭載構件時，關於前述刻度方向，前述固定部比前述導件安裝部還靠近前述搭載構件較佳。
如此當基座部的一端被固定於搭載構件時，基座部被固定於搭載構件的位置成為基座部的膨脹的起點。因此，關於刻度方向，因可藉由固定部比導件安裝部還靠近搭載構件，拉近基座部的膨脹的起點與固定部的距離，故可減小基座部的熱膨脹或收縮造成的固定部的位置的變動，可抑制標度的位置變動。
而且，其他的形態為一種標度裝置，包含:在一方向排列有刻度之標度；安裝前述標度之托架(bracket)；安裝前述托架之基座部；讀取前述標度的刻度之讀取頭，其特徵為:前述托架藉由在前述標度於附加有刻度的方向的刻度方向的一端中被固定於前述基座部之第一固定部，與在相反側的端部中透過第一直動導件被安裝於前述基座部之第一導件安裝部，而被安裝於前述基座部，前述標度藉由在前述刻度方向的一端中被固定於前述托架之第二固定部而被安裝於前述托架，在相反側的端部中透過第二直動導件被安裝於前述托架或前述基座部之第二導件安裝部，而被安裝於前述托架或前述基座部，前述第一直動導件及前述第二直動導件移動的方向與前述刻度方向為同一，關於前述刻度方向，前述第一固定部與前述第一導件安裝部的位置關係，和前述第二固定部與前述第二導件安裝部的位置關係為相反。
如此，可藉由第一直動導件及第二直動導件移動的方向與刻度方向為同一，防止因基座部的熱膨脹或收縮使得托架及標度伸縮。進而關於刻度方向，藉由第一固定部與第一導件安裝部的位置關係，和第二固定部與第二導件安裝部的位置關係為相反，基座部及托架，與標度因熱膨脹或收縮而位移的方向變成相反，因各自的膨脹或收縮造成的影響被抵銷，故可減小由基座部、托架及標度的伸縮而產生的標度的座標誤差，讀取頭所帶來的精度佳的位置控制為可能。
而且，當前述基座部的一端被固定於搭載構件時，關於前述刻度方向，使前述第一固定部比前述第一導件安裝部還靠近前述搭載構件較佳。
如此關於刻度方向，因可藉由第一固定部比第一導件安裝部還靠近搭載構件，拉近基座部的膨脹的起點與第一固定部的距離，故可減小基座部的熱膨脹或收縮造成的第一固定部的位置的變動，可抑制標度的位置變動。However, in the linear motion device described in Patent Document 1, if the ambient temperature changes, there is a problem that the position control cannot be performed correctly.
For example, when the support portion 96 of the application portion 90 shown in Fig. 7(a) is thermally expanded to the state shown in Fig. 7(b), the fixing portion 97 shown in Fig. 7(a) is formed together with the expansion of the support portion 96. The position of the fixing portion 98 also changes, and is displaced to the position indicated by the fixing portion 97' and the fixing portion 98'. At this time, since the distance between the fixed portion 97' and the fixed portion 98' is longer than the distance between the fixed portion 97 and the fixed portion 98, the scale 93 is elongated, and the scale interval of the scale 93 is also enlarged. .
Here, for example, in the position where the reading head 94 reads the scale of the coordinate of the scale A of the scale 93, the slit nozzle 91 performs the coating operation of the coating liquid on the substrate W, and is controlled in FIG. 7 (a). In the case of FIG. 7(b), the scale 93 indicates that the position of the coordinate A is different. That is, it is impossible to accurately control the position of the slit nozzle 91, and it is difficult to uniformly maintain the distance between the slit nozzle 91 and the substrate W and apply it with a uniform film thickness.
Further, one method for preventing this problem is to form the support portion 96 with a low thermal expansion material. However, the cost of the low thermal expansion material is compared with SUS (stainless steel) which is generally used as a material constituting the support portion 96. Very high, and the support portion 96 is a member that supports the slit nozzle 91, and has a large shape, so replacement with a low thermal expansion material results in a large increase in the manufacturing cost of the coating device. Therefore, it is difficult to adopt this method when it is possible to suppress the budgeting of the coating apparatus as much as possible.
In order to solve the above problems, the scale apparatus of the present invention includes: a scale in which scales are arranged in one direction; a base portion on which the scale is mounted; and a read head in which the scale of the scale is read, which is characterized by: The degree is fixed to the fixing portion of the base portion at one end in the graduated direction in the direction in which the scale is added, and is mounted to the guide portion of the base portion through the linear motion guide at the end portion on the opposite side. The portion is attached to the base portion, and the direction in which the linear motion guide moves is the same as the scale direction.
According to the above-described scale device, since the scale is fixed to the fixing portion of the base portion at one end in the graduate direction, and the guide member mounted to the base portion through the linear guide in the opposite end portion is mounted. The portion is mounted on the base portion, and the direction in which the linear motion guide moves is the same as the direction of the scale. Even if the base portion thermally expands or contracts, the linear motion guide can be operated to prevent the scale from being thermally expanded or contracted. The telescopic speed is in the direction of the scale, so the coordinate accuracy of the scale can be maintained, and the position control with good precision brought by the reading head is possible.
Further, when one end of the base portion is fixed to the mounting member, it is preferable that the fixing portion is closer to the mounting member than the guide attaching portion in the scale direction.
When the one end of the base portion is fixed to the mounting member as described above, the position at which the base portion is fixed to the mounting member serves as a starting point for expansion of the base portion. Therefore, in the scale direction, since the fixing portion can be closer to the mounting member than the guide attaching portion, the distance between the starting point of the expansion of the base portion and the fixing portion can be narrowed, so that the thermal expansion or contraction of the base portion can be reduced. The change in the position of the fixed portion can suppress the positional change of the scale.
Moreover, the other aspect is a scale device comprising: a scale in which a scale is arranged in one direction; a bracket for mounting the scale; a base portion on which the bracket is mounted; and a scale on which the scale is read The reading head is characterized in that the bracket is fixed to the first fixing portion of the base portion and the end portion on the opposite side by one end of the scale in the scale direction in which the scale is added. The first direct-moving guide is attached to the first guide attaching portion of the base portion, and is attached to the base portion, and the scale is fixed to the bracket by one end in the scale direction. The second fixing portion is attached to the bracket, and the opposite end portion is attached to the bracket or the second guide mounting portion of the base portion through the second linear guide, and is attached to In the bracket or the base portion, the direction in which the first linear motion guide and the second linear motion guide move is the same as the scale direction, and the first fixing portion and the first guide member are in the scale direction Positional relationship of the mounting portion, and the aforementioned second fixing The positional relationship between the second guide member opposite to the mounting portion.
In this manner, the direction in which the first linear motion guide and the second linear motion guide move is the same as the direction of the scale, thereby preventing the bracket and the scale from expanding and contracting due to thermal expansion or contraction of the base portion. Further, with respect to the scale direction, the positional relationship between the first fixing portion and the first guide mounting portion and the positional relationship between the second fixing portion and the second guide mounting portion are opposite, the base portion and the bracket, and the scale The direction of displacement due to thermal expansion or contraction becomes opposite, and the influence caused by the respective expansion or contraction is offset, so that the coordinate error of the scale caused by the expansion and contraction of the base portion, the bracket, and the scale can be reduced, and read. Accurate position control by taking the head is possible.
Further, when one end of the base portion is fixed to the mounting member, it is preferable that the first fixing portion is closer to the mounting member than the first guide attaching portion with respect to the scale direction.
In the scale direction as described above, since the first fixing portion is closer to the mounting member than the first guide attaching portion, the distance between the starting point of the expansion of the base portion and the first fixing portion can be narrowed, so that the base portion can be reduced. The change in the position of the first fixed portion due to thermal expansion or contraction can suppress the positional variation of the scale.
【發明的功效】
依照本發明的標度裝置，可抑制使用環境的溫度變化的影響，可進行定位對象的正確的位置控制。[Effect of the invention]
According to the scale device of the present invention, the influence of the temperature change of the use environment can be suppressed, and the correct position control of the positioning object can be performed.
使用圖面說明與本發明有關的實施的形態。此外，在以後的說明中是以在前述的圖6的塗佈裝置中基板W被運送的方向為X軸方向，以在水平面上與X軸方向正交的方向為Y軸方向，以與X軸方向及Y軸方向正交的方向為Z軸方向進行說明。
顯示本發明的一實施形態中的標度裝置於圖1。圖1(a)的標度裝置10具有標度11、讀取頭12、直動導件13及基座部14，根據讀取頭12由標度11讀取的座標資訊，控制可與讀取頭12一起移動而被組裝的單元的位置控制。
標度11為在一方向排列有刻度的平板，在本實施形態中是使用線性標度(linear scale)。標度11為像光電式的線性標度等刻有刻度而被排列，或像電磁感應式的線性標度般線圈(coil)取代刻度而被排列，或像磁式的線性標度般N極及S極取代刻度而被排列等也可以。此外，在以後的說明中稱刻度或取代刻度者被排列的方向為刻度方向。
讀取頭12是由標度11讀取座標的檢測器(detector)，對應上述的標度11的種類者被配設。而且，讀取頭12被安裝於可移動於刻度方向之未圖示的直動機構(direct-acting mechanism)，可在其移動範圍內的各位置中由標度11讀取座標。
直動導件13是由導軌(rail)16與安裝於導軌16的滑塊(slider)17構成之單元，滑塊17沿著導軌16以少的滑動阻力往復運動。
基座部14是安裝標度11的構件，具有安裝標度11用的平面。而且，直動導件13也被安裝於該基座部14，以滑塊17在刻度方向動作的方向，導軌16被固定於基座部14。而且，基座部14的外形依照標度裝置10的用途為有各式各樣，為在鉛直方向使物體直動的機構的支柱，或在水平方向使物體直動的機構的底板也可以。
標度11在一方的端部中，在固定部15中透過螺栓等固定於基座部14。而且，在相反側的端部中，在導件安裝部18中被安裝於直動導件13的滑塊17。亦即，採取標度11在其一端中透過直動導件13安裝於基座部14的形態。此處，基座部14具有容納直動導件13的段差(level difference)，以便標度11不歪斜而被安裝，基座部14之與固定部15接觸的面，與滑塊17之安裝於標度11的面成為位於同一平面。
藉由採取以上的構成，即使是基座部14因周圍溫度的變化等而膨脹或收縮的情形，標度11至少在刻度方向可不受到該膨脹、收縮的影響。
具體上，基座部14膨脹並由圖1(a)的狀態變成圖1(b)的狀態，即使直動導件13的導軌16的位置與該狀態的變化一起變化，也藉由滑塊17在導軌16上位移，使滑塊17的位置不被基座部14的膨脹影響。因此，即使基座部14膨脹或收縮，也可防止標度11伴隨該膨脹或收縮而伸縮於刻度方向。進而當標度11的熱膨脹可忽略時，標度11的長度及刻度間隔不變動。
此處，當標度11的厚度薄時，若直接將該標度11安裝於基座部14及滑塊17，則有標度11彎曲之虞。此情形將未圖示的塊體(block)配設於中間，將標度11固定於該塊體並補強後，將該塊體安裝於基座部14及滑塊17也可以。此時可藉由以低熱膨脹材形成塊體，防止該塊體本身因溫度變化而膨脹或收縮並使標度11伸縮。
圖2是使用本實施形態的標度裝置10的一例。標度裝置10被使用於在塗佈裝置的塗佈部3中使開縫噴嘴升降的機構的位置控制。
圖2(a)所示的塗佈部3具有前述的標度裝置10及開縫噴嘴升降部4，開縫噴嘴升降部4具有開縫噴嘴21、梁22、馬達23、滾珠螺桿(ball screw)24、直動導件25及支撐部26。
開縫噴嘴21具有朝下開口並延伸於Y軸方向的開縫，將塗佈液塗佈於透過運送部2在開縫噴嘴21的下方運送於X軸方向的基板W成帶狀。
梁22為支撐開縫噴嘴21，可藉由自身的移動而使開縫噴嘴21移動之延伸於Y軸方向的梁。在梁22安裝有直動導件25的滑塊，透過直動導件25連接於支撐部26。此處，直動導件25的導軌沿著開縫噴嘴21及梁22應移動的方向而被配置、固定於支撐部26，在本次的例子中被配置於Z軸方向。
在梁22的Y軸方向的兩端部安裝有滾珠螺桿24，而且在各滾珠螺桿24安裝有馬達23，藉由透過外部控制使各馬達23動作而使各滾珠螺桿24旋轉，梁22及開縫噴嘴21沿著直動導件25的導軌的方向移動於Z軸方向。
支撐部26配設於梁22的Y軸方向的兩端部，如前述透過直動導件25與梁22連接，而且藉由支撐馬達23及滾珠螺桿24而支撐梁22及開縫噴嘴21。而且，支撐部26在端部28中被搭載、固定於搭載構件之平台(surface table)27。該支撐部26大多以廉價且可確保剛性的SUS形成。
此處，標度裝置10排列於開縫噴嘴21位移於刻度方向的方向亦即Z軸方向，而被組裝於塗佈部3。
基座部14為開縫噴嘴升降部4的支撐部26的一部分，刻度方向成為Z軸方向而使標度11在固定部15中被固定，而且滑塊的移動方向成為Z軸方向而安裝直動導件13。
讀取頭12被安裝於開縫噴嘴升降部4的梁22，可與梁22及開縫噴嘴21一起移動於Z軸方向。
藉由採取以上的構成，即使是基座部14亦即支撐部26因周圍溫度的變化等而膨脹，由圖2(a)變成圖2(b)的狀態的情形，也如前述，標度11至少在刻度方向可不受到該膨脹的影響，可保持標度11的座標精度，讀取頭12所帶來的精度佳的位置控制為可能。而且，即使是基座部14及標度11收縮的情形也一樣。
此外在圖2(b)中，為了使說明簡略起見，基座部14的膨脹僅顯示Z軸方向的膨脹。
另一方面，此情形因基座部14是以搭載於平台27的搭載部之端部28為起點，膨脹於上方向，故固定部15的位置變動。亦即，若設相對於在圖2(a)的狀態下端部28與固定部15的距離為d，基座部14膨脹且固定部15如圖2(b)所示位移到固定部15’的位置，與端部28的距離變成d’，則標度11的安裝位置上升約該距離的差之(d’-d)。此處，例如在讀取頭12讀取了標度11的A之座標的刻度的位置中開縫噴嘴21對基板W進行塗佈液的塗佈動作而被控制的情形，在圖2(a)的情形與圖2(b)的情形下，標度11顯示座標A的位置約(d’-d)不同，即使可藉由本實施形態的標度裝置10防止標度11因基座部14的膨脹而伸長於刻度方向，雖然只有一點點，該差也會產生。
為了使該差極小，使固定部15接近端部28並縮短距離d本身，減小距離d與距離d’的差較佳。至少藉由關於刻度方向，成為固定部15比直動導件13還靠近端部28的配置而安裝標度11，與以固定部15比直動導件13還遠離端部28的配置安裝標度11的情形比較，可縮短距離d。
其次，顯示本發明的其他的實施形態於圖3。
圖3(a)的標度裝置30具有標度31、讀取頭32、托架33、直動導件34、直動導件35及基座部36。
標度31與前述的標度11一樣為光電式、電磁感應式或磁式等的線性標度，稱該等線性標度之刻度或取代刻度者被排列的方向為刻度方向。
讀取頭32是由標度31讀取座標的檢測器，對應上述的標度31的種類者被配設。而且，讀取頭32被安裝於可移動於刻度方向之未圖示的直動機構，可在其移動範圍內的各位置中由標度31讀取座標。
托架33是安裝標度31的構件，具有用以安裝標度31的平面。而且，直動導件34也被安裝於該托架33，以直動導件34的滑塊在刻度方向動作的方向，直動導件34的導軌被固定於托架33。而且，標度31在一方的端部中，在固定部37中透過螺栓等固定，在相反側的端部中，在導件安裝部38中被安裝於直動導件34的滑塊。此處，托架33具有容納直動導件34的段差，以便標度31不歪斜而被安裝，托架33之與固定部37接觸的面，與直動導件34的滑塊之安裝於標度31的面成為位於同一平面。
基座部36是安裝上述托架33的構件，具有用以安裝托架33的平面。而且，直動導件35也被安裝於該基座部36，以直動導件35的滑塊在刻度方向動作的方向，直動導件35的導軌被固定於基座部36。而且，托架33在一方的端部中，在固定部39中透過螺栓等固定，在相反側的端部中，在導件安裝部40中被安裝於直動導件35的滑塊。亦即採取托架33在其一端中透過直動導件35連接於基座部36的形態。此處，基座部36具有容納直動導件35的段差，基座部36之與固定部39接觸的面，與直動導件35的滑塊之安裝於托架33的面成為位於同一平面。
此處，關於刻度方向，固定部37與導件安裝部38的位置關係，和固定部39與導件安裝部40的位置關係成為相反。亦即如果在圖3(a)中托架33在左側的端部具有固定部39且被固定於基座部36，在右側的端部具有導件安裝部40且被安裝於直動導件35，標度31在右側的端部中具有固定部37且被固定於托架33，在左側的端部具有導件安裝部38且被安裝於直動導件35。
藉由採取以上的構成，即使是圖3(a)的基座部36因周圍溫度的變化等而膨脹，變成圖3(b)的狀態的情形，托架33及標度31至少在刻度方向可不受到該膨脹的影響。再者，當也考慮標度31的熱膨脹時，若以比導件安裝部40還靠近固定部39的端部41為起點，則因基座部36的膨脹而使固定部39位移的方向以及因托架33以固定部39為起點而膨脹而使固定部37位移的方向，與標度31以固定部37為起點因膨脹而使標度31的刻度位移的方向成為相反，各自的位移被抵銷。因此，可減小由標度31、托架33及基座部36的膨脹所產生的標度的座標誤差。而且，即使是標度31、托架33及基座部36收縮的情形也一樣。
而且，托架33以低熱膨脹材形成較佳。標度31因使用現成製品，且因基座部36形狀大，裝置製作成本大幅增加，故很難將標度31及基座部36替換成低熱膨脹材，但至少可藉由以低熱膨脹材形成托架33，抑制因托架33的熱膨脹的影響使得標度31的位置變化。
顯示使用該實施形態的標度裝置30的一例於圖4。
圖4(a)所示的塗佈部3具有前述的標度裝置30及開縫噴嘴升降部4，開縫噴嘴升降部4的構成與圖2一樣。
標度裝置30排列於開縫噴嘴21位移於刻度方向的方向亦即Z軸方向，而被組裝於塗佈部3。
基座部36為開縫噴嘴升降部4的支撐部26的一部分，在端部41中被搭載、固定於搭載構件之平台27。而且，標度31在固定部37中被固定於托架33，以便刻度方向成為Z軸方向，該托架33在固定部39中被固定於基座部36。而且，直動導件34及直動導件35被安裝，以便滑塊的移動方向都成為Z軸方向，關於刻度方向，固定部39被配置於比導件安裝部40還靠近端部41的近旁亦即下方，固定部37被配置於比導件安裝部38還上方。
讀取頭32被安裝於開縫噴嘴升降部4的梁22，可與梁22及開縫噴嘴21一起移動於Z軸方向。
藉由採取以上的構成，即使是標度31、托架33及基座部36因周圍溫度的變化等而膨脹並由圖4(a)變成圖4(b)的狀態，即使是圖4(a)的固定部37及固定部39像圖4(b)的固定部37’及固定部39’般位移了的情形，也如前述，標度31的刻度位移的方向也成為與兩固定部位移的方向相反，故可抵銷各自的膨脹的影響。因此，可減小標度31的座標誤差，讀取頭12所帶來的精度佳的位置控制為可能。而且，即使是基座部14及標度11收縮的情形也一樣。
此外在圖4(b)中，為了使說明簡略起見，基座部36的膨脹僅顯示Z軸方向的膨脹。
此處，為了在標度31的規定的座標中更進一步提高定位精度，也可以在該座標中設定固定部37及固定部39的位置，以便標度31、托架33及基座部36的熱膨脹的影響變少，形成標度裝置30。其一例為以在讀取頭32讀取了在圖4中標度31的A之座標的位置中開縫噴嘴21對基板W進行塗佈液的塗佈動作而進行控制的情形進行說明。此時，座標A的位置精度特別重要。
設標度31的熱膨脹係數(coefficient of thermal expansion)為α1，設托架33的熱膨脹係數為α2，設基座部36的熱膨脹係數為α3，設周圍溫度由圖4(a)的狀態約變化Δt，變成圖4(b)的狀態。此時若設在圖4(a)中由搭載面28到固定部39的刻度方向的距離為d1，則因此為以搭載面28為起點，由於基座部36的熱膨脹而變化，故由圖4(a)的狀態變成圖4(b)的狀態時的該距離的變化量Δd1成為如以下的式(1)，因固定部39位於比搭載面28還上方，故固定部39位移於上方向。
Δd1＝α１×Δｔ×d１ ……(1)
而且，設在圖4(a)中固定部39到固定部37的刻度方向的距離為d2，則因此為以固定部39為起點，由於托架33的熱膨脹而變化，故由圖4(a)的狀態變成圖4(b)的狀態時的該距離的變化量Δd2成為如以下的式(2)，因固定部37位於比固定部39還上方，故固定部37也位移於上方向。
Δd2＝α2×Δｔ×d2 ……(2)
而且，設在圖4(a)中固定部37到座標A的刻度的刻度方向的距離為d3，則因此為以固定部37為起點，由於標度31的熱膨脹而變化，故由圖4(a)的狀態變成圖4(b)的狀態時的該距離的變化量Δd3成為如以下的式(3)，因標度31的刻度位於比固定部37還下方，故標度31的刻度位移於下方向。
Δd3＝α3×Δｔ×d3 ……(3)
由以上的關係，由圖4(a)的狀態變成圖4(b)的狀態時的座標A的刻度的刻度方向的位置的變化量Δd考慮位移的方向成為合併了式(1)到式(3)的以下的式(4)。
Δd＝（α１×d１＋α２×d２－α３×d３）×Δt……(4)
因此，可藉由設定d1、d2及d3的距離，以便(α１×d１＋α２×d２－α３×d３)的值變小，而反映於標度裝置30的構成，提高座標A的刻度的位置精度。
而且，針對標度裝置30的構成，在圖3中直動導件34配設於標度31與托架33之間，使得標度31不會受到托架33及基座部36的熱膨脹的影響，惟如圖5所示，將直動導件34配設於標度31與基座部36之間也可以。乃因即使是這種配置，也能得到標度31不會受到托架33及基座部36的熱膨脹的影響之功效。
可藉由以上說明的標度裝置抑制使用環境的溫度變化的影響，使定位對象的正確的位置控制為可能。
而且，在上述的說明中雖然安裝有標度的基座部是當作支撐開縫噴嘴或梁的支撐部的一部分，但未必需要支撐部的一部分，與該支撐部獨立配設也無妨。
而且，本發明的標度裝置不僅如上述的塗佈裝置的開縫噴嘴位置控制，也能適用於例如XY平台(XY table)等使用標度進行精密定位的所有的直動機構。The form of the embodiment related to the present invention will be described using the drawings. In the following description, in the coating apparatus of FIG. 6 described above, the direction in which the substrate W is transported is the X-axis direction, and the direction orthogonal to the X-axis direction in the horizontal plane is the Y-axis direction, and X. The direction in which the axial direction and the Y-axis direction are orthogonal to each other is described as the Z-axis direction.
A scale device according to an embodiment of the present invention is shown in Fig. 1. The scale device 10 of Fig. 1(a) has a scale 11, a read head 12, a linear motion guide 13 and a base portion 14, and the control information can be read and read according to the coordinate information read by the read head 12 by the scale 11. The head 12 is moved together to control the position of the assembled unit.
The scale 11 is a flat plate in which scales are arranged in one direction, and in the present embodiment, a linear scale is used. The scale 11 is arranged such that a linear scale such as a photoelectric type is arranged with a scale, or a coil such as an electromagnetic induction type scale is arranged instead of a scale, or a linear scale like a magnetic scale. It is also possible to arrange the S pole instead of the scale. Further, in the following description, the direction in which the scale or the scale is replaced is referred to as the scale direction.
The read head 12 is a detector that reads a coordinate from the scale 11, and is assigned to the type of the above-described scale 11. Further, the pickup head 12 is attached to a direct-acting mechanism (not shown) that can be moved in the scale direction, and the coordinates can be read by the scale 11 at each position within the range of movement.
The linear motion guide 13 is a unit composed of a rail 16 and a slider 17 attached to the guide rail 16, and the slider 17 reciprocates along the guide rail 16 with a small sliding resistance.
The base portion 14 is a member to which the scale 11 is mounted, and has a plane for mounting the scale 11. Further, the linear motion guide 13 is also attached to the base portion 14, and the guide rail 16 is fixed to the base portion 14 in a direction in which the slider 17 moves in the scale direction. Further, the outer shape of the base portion 14 may be various types depending on the application of the scale device 10, and may be a pillar of a mechanism that directly moves an object in a vertical direction or a bottom plate of a mechanism that directly moves an object in a horizontal direction.
The scale 11 is fixed to the base portion 14 by a bolt or the like in the fixing portion 15 at one end portion. Further, in the end portion on the opposite side, the slider 17 of the linear motion guide 13 is attached to the guide mounting portion 18. That is, the scale 11 is attached to the base portion 14 through the linear motion guide 13 at one end thereof. Here, the base portion 14 has a level difference for accommodating the linear motion guide 13 so that the scale 11 is mounted without being skewed, the surface of the base portion 14 in contact with the fixed portion 15, and the mounting of the slider 17 The faces on the scale 11 are in the same plane.
By adopting the above configuration, even if the base portion 14 expands or contracts due to a change in the ambient temperature or the like, the scale 11 is not affected by the expansion and contraction at least in the scale direction.
Specifically, the base portion 14 is expanded and changed from the state of FIG. 1(a) to the state of FIG. 1(b), even if the position of the guide rail 16 of the linear motion guide 13 changes together with the change of the state, by the slider 17 is displaced on the guide rail 16 so that the position of the slider 17 is not affected by the expansion of the base portion 14. Therefore, even if the base portion 14 expands or contracts, the scale 11 can be prevented from expanding and contracting in the scale direction accompanying the expansion or contraction. Further, when the thermal expansion of the scale 11 is negligible, the length of the scale 11 and the scale interval do not change.
Here, when the thickness of the scale 11 is thin, if the scale 11 is directly attached to the base portion 14 and the slider 17, the scale 11 is bent. In this case, a block (not shown) is disposed in the middle, and after the scale 11 is fixed to the block and reinforced, the block may be attached to the base portion 14 and the slider 17. At this time, by forming the block with a low thermal expansion material, the block itself is prevented from expanding or contracting due to temperature changes and the scale 11 is stretched and contracted.
Fig. 2 is an example of the use of the scale device 10 of the embodiment. The scale device 10 is used to control the position of the mechanism for raising and lowering the slit nozzle in the coating portion 3 of the coating device.
The coating unit 3 shown in Fig. 2(a) has the above-described scale device 10 and slit nozzle lifting portion 4, and the slit nozzle lifting portion 4 has a slit nozzle 21, a beam 22, a motor 23, and a ball screw. 24) The linear motion guide 25 and the support portion 26.
The slit nozzle 21 has a slit that opens downward and extends in the Y-axis direction, and applies a coating liquid to the substrate W that is conveyed in the X-axis direction by the transporting portion 2 below the slit nozzle 21 in a strip shape.
The beam 22 is a support slit nozzle 21, and the slit nozzle 21 can be moved by the movement of the slit nozzle 21 in the Y-axis direction. A slider to which the linear motion guide 25 is attached to the beam 22 is connected to the support portion 26 through the linear motion guide 25. Here, the guide rail of the linear motion guide 25 is disposed and fixed to the support portion 26 along the direction in which the slit nozzle 21 and the beam 22 should move, and is disposed in the Z-axis direction in the present example.
The ball screw 24 is attached to both ends of the beam 22 in the Y-axis direction, and the motor 23 is attached to each of the ball screws 24, and each of the motors 23 is operated by external control to rotate the ball screws 24, and the beam 22 is opened. The slit nozzle 21 moves in the Z-axis direction in the direction of the guide rail of the linear motion guide 25.
The support portion 26 is disposed at both end portions of the beam 22 in the Y-axis direction, and is connected to the beam 22 by the transmission linear guide 25, and supports the beam 22 and the slit nozzle 21 by supporting the motor 23 and the ball screw 24. Further, the support portion 26 is mounted and fixed to the surface table 27 of the mounting member at the end portion 28. Most of the support portion 26 is formed of SUS which is inexpensive and can ensure rigidity.
Here, the scale device 10 is arranged in the application portion 3 in the Z-axis direction in which the slit nozzle 21 is displaced in the direction of the scale.
The base portion 14 is a part of the support portion 26 of the slit nozzle lifting portion 4, the scale direction is in the Z-axis direction, the scale 11 is fixed in the fixing portion 15, and the moving direction of the slider is in the Z-axis direction. Moving guide 13.
The reading head 12 is attached to the beam 22 of the slit nozzle lifting portion 4, and is movable in the Z-axis direction together with the beam 22 and the slit nozzle 21.
By adopting the above configuration, even if the base portion 14 , that is, the support portion 26 is expanded by a change in the ambient temperature or the like, and the state of FIG. 2( a ) is changed to the state of FIG. 2( b ), as described above, the scale is also obtained. 11 is not affected by the expansion at least in the scale direction, and the coordinate accuracy of the scale 11 can be maintained, and the positional control by the reading head 12 is excellent. Moreover, even the case where the base portion 14 and the scale 11 are contracted is the same.
Further, in Fig. 2(b), for the sake of simplicity of explanation, the expansion of the base portion 14 only shows the expansion in the Z-axis direction.
On the other hand, in this case, since the base portion 14 is expanded in the upper direction from the end portion 28 of the mounting portion mounted on the stage 27, the position of the fixing portion 15 fluctuates. That is, if the distance between the end portion 28 and the fixing portion 15 is d in the state of Fig. 2(a), the base portion 14 is expanded and the fixing portion 15 is displaced to the fixing portion 15' as shown in Fig. 2(b). The position, the distance from the end portion 28 becomes d', and the mounting position of the scale 11 rises by about the difference (d'-d) of the distance. Here, for example, in the position where the reading head 12 reads the scale of the coordinate of the scale 11 of the scale 11, the slit nozzle 21 performs the coating operation of the coating liquid on the substrate W, and is controlled in FIG. 2 (a). In the case of FIG. 2(b), the scale 11 indicates that the position of the coordinate A is different (d'-d), and the scale 11 can be prevented from being caused by the scale portion 11 by the base portion 14 of the present embodiment. The expansion expands in the direction of the scale, although only a little, the difference will also occur.
In order to make the difference extremely small, the fixing portion 15 is brought close to the end portion 28 and the distance d itself is shortened, and the difference between the distance d and the distance d' is preferably reduced. The scale 11 is mounted at least by the arrangement of the fixed portion 15 closer to the end portion 28 than the linear guide 13 with respect to the scale direction, and the mounting bracket is disposed with the fixed portion 15 further away from the end portion 28 than the linear guide 13 In the case of degree 11, the distance d can be shortened.
Next, another embodiment of the present invention is shown in Fig. 3.
The scale device 30 of Fig. 3(a) has a scale 31, a read head 32, a bracket 33, a linear motion guide 34, a linear motion guide 35, and a base portion 36.
The scale 31 is a linear scale such as a photoelectric type, an electromagnetic induction type, or a magnetic type, like the aforementioned scale 11, and the scale of the linear scales or the direction in which the scales are arranged is the scale direction.
The read head 32 is a detector that reads the coordinates by the scale 31, and is assigned to the type of the above-described scale 31. Further, the pickup head 32 is attached to a linear motion mechanism (not shown) that can be moved in the scale direction, and the coordinates can be read by the scale 31 at each position within the movement range.
The bracket 33 is a member of the mounting scale 31 having a plane for mounting the scale 31. Further, the linear motion guide 34 is also attached to the bracket 33, and the guide rail of the linear motion guide 34 is fixed to the bracket 33 in the direction in which the slider of the linear motion guide 34 moves in the scale direction. Further, the index 31 is fixed to the fixing portion 37 by a bolt or the like at one end portion, and is attached to the slider of the linear motion guide 34 in the guide attaching portion 38 at the opposite end portion. Here, the bracket 33 has a step that accommodates the linear motion guide 34 so that the scale 31 is mounted without being skewed, and the surface of the bracket 33 that is in contact with the fixed portion 37 is mounted to the slider of the linear motion guide 34. The faces of the scale 31 are located on the same plane.
The base portion 36 is a member to which the bracket 33 is attached, and has a flat surface for mounting the bracket 33. Further, the linear motion guide 35 is also attached to the base portion 36, and the guide rail of the linear motion guide 35 is fixed to the base portion 36 in the direction in which the slider of the linear motion guide 35 operates in the scale direction. Further, the bracket 33 is fixed to the fixing portion 39 by a bolt or the like at one end portion, and is attached to the slider of the linear motion guide 35 in the guide attaching portion 40 at the opposite end portion. That is, the bracket 33 is connected to the base portion 36 through the linear guide 35 at one end thereof. Here, the base portion 36 has a step that accommodates the linear motion guide 35, and the surface of the base portion 36 that is in contact with the fixed portion 39 is located in the same plane as the surface of the slider of the linear motion guide 35 that is attached to the bracket 33. flat.
Here, regarding the scale direction, the positional relationship between the fixing portion 37 and the guide attaching portion 38 and the positional relationship between the fixing portion 39 and the guide attaching portion 40 are reversed. That is, if the bracket 33 has the fixing portion 39 at the end portion on the left side and is fixed to the base portion 36 in FIG. 3(a), the guide mounting portion 40 is provided at the end portion on the right side and is mounted to the linear motion guide member. 35. The scale 31 has a fixing portion 37 at the end portion on the right side and is fixed to the bracket 33, and has a guide mounting portion 38 at the end portion on the left side and is attached to the linear motion guide 35.
By adopting the above configuration, even if the base portion 36 of FIG. 3(a) expands due to a change in ambient temperature or the like, the state of FIG. 3(b) is obtained, and the bracket 33 and the scale 31 are at least in the scale direction. Can not be affected by this expansion. In addition, when the thermal expansion of the scale 31 is also considered, when the end portion 41 closer to the fixing portion 39 than the guide attaching portion 40 is used as the starting point, the direction in which the fixing portion 39 is displaced by the expansion of the base portion 36 and The direction in which the bracket 33 is expanded by the fixing portion 39 as a starting point and the fixing portion 37 is displaced is reversed from the scale 31 by the fixing portion 37 as a starting point, and the displacement of the scale 31 is reversed, and the displacement is reversed. offset. Therefore, the coordinate error of the scale caused by the expansion of the scale 31, the bracket 33, and the base portion 36 can be reduced. Moreover, even in the case where the scale 31, the bracket 33, and the base portion 36 are contracted, the same is true.
Moreover, the bracket 33 is preferably formed of a low thermal expansion material. Since the scale 31 is made of a ready-made product, and the shape of the base portion 36 is large, the manufacturing cost of the device is greatly increased, so it is difficult to replace the scale 31 and the base portion 36 with a low thermal expansion material, but at least by using a low thermal expansion material. The bracket 33 is formed to suppress the position of the scale 31 from being changed by the influence of the thermal expansion of the bracket 33.
An example of the scale device 30 using this embodiment is shown in FIG.
The application unit 3 shown in Fig. 4(a) has the above-described scale device 30 and slit nozzle lift portion 4, and the configuration of the slit nozzle lift portion 4 is the same as that of Fig. 2 .
The scale device 30 is arranged in the application portion 3 in a Z-axis direction in which the slit nozzle 21 is displaced in the direction of the scale.
The base portion 36 is a part of the support portion 26 of the slit nozzle lifting portion 4, and is mounted and fixed to the platform 27 of the mounting member at the end portion 41. Further, the scale 31 is fixed to the bracket 33 in the fixing portion 37 so that the scale direction becomes the Z-axis direction, and the bracket 33 is fixed to the base portion 36 in the fixing portion 39. Further, the linear motion guide 34 and the linear motion guide 35 are mounted such that the moving direction of the slider is the Z-axis direction, and the fixing portion 39 is disposed closer to the end portion 41 than the guide mounting portion 40 with respect to the scale direction. Immediately below, the fixing portion 37 is disposed above the guide mounting portion 38.
The reading head 32 is attached to the beam 22 of the slit nozzle lifting portion 4, and is movable in the Z-axis direction together with the beam 22 and the slit nozzle 21.
By adopting the above configuration, even if the scale 31, the bracket 33, and the base portion 36 are expanded by a change in the ambient temperature or the like, and the state of FIG. 4(a) is changed to the state of FIG. 4(b), even FIG. 4 ( The fixing portion 37 and the fixing portion 39 of a) are displaced like the fixing portion 37' and the fixing portion 39' of Fig. 4(b). As described above, the direction of the scale displacement of the scale 31 also becomes the two fixing portions. The displacements are reversed in direction, thus offsetting the effects of their respective expansions. Therefore, the coordinate error of the scale 31 can be reduced, and the positional control by the reading head 12 with high precision is possible. Moreover, even the case where the base portion 14 and the scale 11 are contracted is the same.
Further, in Fig. 4(b), for the sake of simplicity of explanation, the expansion of the base portion 36 only shows the expansion in the Z-axis direction.
Here, in order to further improve the positioning accuracy in the predetermined coordinates of the scale 31, the positions of the fixing portion 37 and the fixing portion 39 may be set in the coordinates so as to be the scale 31, the bracket 33, and the base portion 36. The effect of thermal expansion is reduced, and the scale device 30 is formed. An example of the case where the coating nozzle 21 performs the coating operation of the coating liquid on the substrate W in the position where the head 32 of the scale 31 in FIG. 4 is read by the reading head 32 will be described. At this time, the positional accuracy of the coordinate A is particularly important.
The coefficient of thermal expansion of the scale 31 is α 1 , the thermal expansion coefficient of the bracket 33 is α 2 , the thermal expansion coefficient of the base portion 36 is α 3 , and the ambient temperature is set by the state of FIG. 4( a ). The change Δt changes to the state of Fig. 4(b). At this time, if the distance from the mounting surface 28 to the fixing portion 39 in the scale direction in FIG. 4( a ) is d 1 , the mounting surface 28 is used as a starting point, and the base portion 36 changes due to thermal expansion. the amount of change in the distance when the state of FIG. 4 (a) becomes FIG. 4 (b) state [Delta] d 1 becomes the following formula (1), since the fixed portion is located 39 further upward than the mounting surface 28, so that the fixed portion 39 displaced In the upper direction.
Δd 1 =α 1 ×Δt×d 1 (1)
Further, since the distance in the scale direction of the fixing portion 39 to the fixing portion 37 in FIG. 4(a) is d 2 , the fixing portion 39 is used as a starting point, and the thermal expansion of the bracket 33 changes, so that FIG. 4 ( FIG. 4 When the state of a) is changed to the state of FIG. 4(b), the amount of change Δd 2 of the distance is expressed by the following formula (2). Since the fixing portion 37 is located above the fixing portion 39, the fixing portion 37 is also displaced. direction.
Δd 2 =α 2 ×Δt×d 2 (2)
Further, provided on the fixed portion scale direction scale 37 to the coordinates A, (a) in FIG. 4, a distance d 3, is therefore fixed portion 37 as a starting point, due to the scale of thermal expansion 31 varies, so from Figure 4 When the state of (a) is changed to the state of FIG. 4(b), the amount of change Δd 3 of the distance is expressed by the following formula (3), and since the scale of the scale 31 is located below the fixed portion 37, the scale 31 is The scale is displaced in the down direction.
Δd 3 = α 3 × Δt × d 3 (3)
In the above relationship, the amount of change Δd in the position in the scale direction of the scale of the coordinate A when the state of FIG. 4(a) is changed to the state of FIG. 4(b) is considered to be a combination of equations (1) to ( 3) The following formula (4).
Δd=(α 1 ×d 1 +α 2 ×d 2 -α 3 ×d 3 )×Δt (4)
Therefore, by setting the distances of d 1 , d 2 and d 3 so that the value of (α 1 ×d 1 +α 2 ×d 2 -α 3 ×d 3 ) becomes small, it is reflected in the composition of the scale device 30. , improve the positional accuracy of the scale of the coordinate A.
Further, with respect to the configuration of the scale device 30, the linear motion guide 34 is disposed between the scale 31 and the bracket 33 in FIG. 3 so that the scale 31 is not thermally expanded by the bracket 33 and the base portion 36. However, as shown in FIG. 5, the linear motion guide 34 may be disposed between the scale 31 and the base portion 36. Even in such an arrangement, the scale 31 can be obtained without being affected by the thermal expansion of the bracket 33 and the base portion 36.
It is possible to suppress the influence of the temperature change of the use environment by the scale device described above, and to control the correct position of the positioning target.
Further, in the above description, the base portion to which the scale is attached is a part of the support portion that supports the slit nozzle or the beam, but a part of the support portion is not necessarily required, and it may be disposed independently of the support portion.
Further, the scale device of the present invention can be applied not only to the position of the slit nozzle of the above-described coating device but also to all of the linear motion mechanisms that are precisely positioned using a scale such as an XY table (XY table).
1．．．塗佈裝置1. . . Coating device
2．．．運送部2. . . Shipping department
3、90．．．塗佈部3, 90. . . Coating department
4．．．開縫噴嘴升降部4. . . Slot nozzle lifting section
10、30．．．標度裝置10, 30. . . Scale device
11、31、93．．．標度11, 31, 93. . . Scaling
12、32．．．讀取頭12, 32. . . Read head
13、25、34、35、95．．．直動導件13, 25, 34, 35, 95. . . Direct acting guide
14、36．．．基座部14, 36. . . Base part
15、15’、37、37’、39、39’、97、97’、98、98’．．．固定部15, 15', 37, 37', 39, 39', 97, 97', 98, 98'. . . Fixed part
16．．．導軌16. . . guide
17．．．滑塊17. . . Slider
18、38、40．．．導件安裝部18, 38, 40. . . Guide mounting
21、91．．．開縫噴嘴21, 91. . . Slot nozzle
22、92．．．梁22, 92. . . Beam
23．．．馬達twenty three. . . motor
24．．．滾珠螺桿twenty four. . . Ball screw
26、96．．．支撐部26, 96. . . Support
27．．．平台27. . . platform
28、41．．．端部28, 41. . . Ends
33．．．托架33. . . bracket
94．．．讀取單元94. . . Reading unit
W．．．基板W. . . Substrate
圖1是本發明的一實施形態中的標度裝置之概略圖。
圖2是使用本發明的一實施形態中的標度裝置的一例之概略圖。
圖3是其他的實施形態中的標度裝置之概略圖。
圖4是使用其他的實施形態中的標度裝置的一例之概略圖。
圖5是其他的實施形態中的標度裝置之概略圖。
圖6是塗佈裝置之概略圖。
圖7是使用習知的標度裝置的一例之概略圖。
Fig. 1 is a schematic view showing a scale device according to an embodiment of the present invention.
Fig. 2 is a schematic view showing an example of a scale device according to an embodiment of the present invention.
Fig. 3 is a schematic view showing a scale device in another embodiment.
Fig. 4 is a schematic view showing an example of a scale device in another embodiment.
Fig. 5 is a schematic view showing a scale device in another embodiment.
Fig. 6 is a schematic view of a coating device.
Fig. 7 is a schematic view showing an example of a conventional scale device.
10．．．標度裝置10. . . Scale device
11．．．標度11. . . Scaling
12．．．讀取頭12. . . Read head
13．．．直動導件13. . . Direct acting guide
14．．．基座部14. . . Base part
15．．．固定部15. . . Fixed part
16．．．導軌16. . . guide
17．．．滑塊17. . . Slider
18．．．導件安裝部18. . . Guide mounting
Claims (4)
在一方向排列有刻度之標度；
安裝該標度之基座部；以及
讀取該標度的刻度之讀取頭，
其特徵為:
該標度藉由在附加有刻度的方向的刻度方向的一端中被固定於該基座部之固定部，與在相反側的端部中透過直動導件被安裝於該基座部之導件安裝部，而被安裝於該基座部，該直動導件移動的方向與該刻度方向為同一。A scale device comprising:
a scale with scales arranged in one direction;
a base portion on which the scale is mounted; and a read head that reads the scale of the scale,
Its characteristics are:
The scale is fixed to the fixing portion of the base portion at one end in the graduated direction in the direction in which the scale is attached, and is guided to the base portion through the linear guide in the end portion on the opposite side. The mounting portion is attached to the base portion, and the direction in which the linear motion guide moves is the same as the scale direction.
在一方向排列有刻度之標度；
安裝該標度之托架；
安裝該托架之基座部；以及
讀取該標度的刻度之讀取頭，
其特徵為:
該托架藉由在該標度於附加有刻度的方向的刻度方向的一端中被固定於該基座部之第一固定部，與在相反側的端部中透過第一直動導件被安裝於該基座部之第一導件安裝部，而被安裝於該基座部，
該標度藉由在該刻度方向的一端中被固定於該托架之第二固定部而被安裝於該托架，在相反側的端部中透過第二直動導件被安裝於該托架或該基座部之第二導件安裝部，而被安裝於該托架或該基座部，
該第一直動導件及該第二直動導件移動的方向與該刻度方向為同一，
關於該刻度方向，該第一固定部與該第一導件安裝部的位置關係，和該第二固定部與該第二導件安裝部的位置關係為相反。A scale device comprising:
a scale with scales arranged in one direction;
Install the bracket of the scale;
Mounting the base portion of the bracket; and reading the reading head of the scale
Its characteristics are:
The bracket is fixed to the first fixing portion of the base portion at one end of the scale in the direction in which the scale is attached, and is transmitted through the first linear guide in the end portion on the opposite side. Mounted to the first guide mounting portion of the base portion, and mounted to the base portion,
The scale is attached to the bracket by a second fixing portion fixed to the bracket at one end in the graduated direction, and is attached to the bracket at the opposite end portion through the second linear guide. a bracket or a second guide mounting portion of the base portion, and is mounted to the bracket or the base portion,
The direction in which the first linear motion guide and the second linear motion guide move is the same as the direction of the scale.
Regarding the scale direction, the positional relationship between the first fixing portion and the first guide mounting portion and the positional relationship between the second fixing portion and the second guide mounting portion are opposite.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011207121A JP2013068508A (en) | 2011-09-22 | 2011-09-22 | Scale device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201313381A true TW201313381A (en) | 2013-04-01 |
| TWI560023B TWI560023B (en) | 2016-12-01 |
Family
ID=47914336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101132172A TW201313381A (en) | 2011-09-22 | 2012-09-04 | Scaling device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2013068508A (en) |
| TW (1) | TW201313381A (en) |
| WO (1) | WO2013042563A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114646246A (en) * | 2020-12-21 | 2022-06-21 | 细美事有限公司 | Position measuring instrument and substrate processing apparatus including the same |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6107390B2 (en) * | 2013-04-30 | 2017-04-05 | 株式会社ニコン | Imaging device |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3719409A1 (en) * | 1987-06-11 | 1988-12-22 | Heidenhain Gmbh Dr Johannes | POSITION MEASURING DEVICE |
| US5270886A (en) * | 1989-08-07 | 1993-12-14 | Antek Peripherals, Inc. | Two motor servo system for a removable disk drive |
| JP2000097686A (en) * | 1998-09-25 | 2000-04-07 | Nikon Corp | Length measuring device |
| JP3822389B2 (en) * | 1999-07-09 | 2006-09-20 | 株式会社ミツトヨ | Displacement measurement system |
| JP4154089B2 (en) * | 1999-08-12 | 2008-09-24 | ソニーマニュファクチュアリングシステムズ株式会社 | Scale unit connection member |
| JP2004058218A (en) * | 2002-07-30 | 2004-02-26 | Ricoh Microelectronics Co Ltd | Positioning device, working device, and positioning method |
| JP2009019876A (en) * | 2005-10-28 | 2009-01-29 | Mitsubishi Electric Corp | Optical absolute value encoder |
| JP2009180525A (en) * | 2008-01-29 | 2009-08-13 | Mitsutoyo Corp | Measuring apparatus |
-
2011
- 2011-09-22 JP JP2011207121A patent/JP2013068508A/en not_active Withdrawn
-
2012
- 2012-09-04 TW TW101132172A patent/TW201313381A/en not_active IP Right Cessation
- 2012-09-10 WO PCT/JP2012/073014 patent/WO2013042563A1/en active Application Filing
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114646246A (en) * | 2020-12-21 | 2022-06-21 | 细美事有限公司 | Position measuring instrument and substrate processing apparatus including the same |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI560023B (en) | 2016-12-01 |
| JP2013068508A (en) | 2013-04-18 |
| WO2013042563A1 (en) | 2013-03-28 |
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