TW201312905A - Stator of cylindrical linear motor, cylindrical linear motorand winding method of stator coil of cylindrical linear motor - Google Patents

Stator of cylindrical linear motor, cylindrical linear motorand winding method of stator coil of cylindrical linear motor Download PDF

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TW201312905A
TW201312905A TW101106165A TW101106165A TW201312905A TW 201312905 A TW201312905 A TW 201312905A TW 101106165 A TW101106165 A TW 101106165A TW 101106165 A TW101106165 A TW 101106165A TW 201312905 A TW201312905 A TW 201312905A
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coil
jumper
linear motor
phase
cylindrical linear
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TW101106165A
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Chinese (zh)
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TWI488410B (en
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Yosuke Takaishi
Haruyuki Hasegawa
Toru Katae
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Mitsubishi Electric Corp
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K15/00Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
    • H02K15/04Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of windings, prior to mounting into machines
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K1/00Details of the magnetic circuit
    • H02K1/06Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/12Stationary parts of the magnetic circuit
    • H02K1/18Means for mounting or fastening magnetic stationary parts on to, or to, the stator structures
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K3/00Details of windings
    • H02K3/04Windings characterised by the conductor shape, form or construction, e.g. with bar conductors
    • H02K3/28Layout of windings or of connections between windings
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/03Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K2203/00Specific aspects not provided for in the other groups of this subclass relating to the windings
    • H02K2203/12Machines characterised by the bobbins for supporting the windings

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Linear Motors (AREA)

Abstract

Provided is a winding method of a cylindrical linear motor capable of increasing a contact area between coil and yoke, enhancing radiation performance, and improving magnetic features with excellent magnetic balance, wherein the cylindrical linear motor comprises stator 10 having long cylindrical yoke 8 made of magnetic material and plural short cylindrical coils 4A of U phase, V phase and W phase arranged in plurality along an axial direction upon an inner diameter side of yoke 8, and movable components 20 disposed upon the inner side of stator 10 while facing each other with magnetic gap in between and movable along the axial direction and interposed with plural permanent magnets 6 along the axial direction. Further, crossover 5A of coils 4A of each phase of stator 10 is arranged upon inner circumferential face of coils 4A. Thereby, crossover process is conducted upon the inner diameter side of coils 4A, and the outer circumferential portion of coils 4A can become a true cylindrical shape. As a result, the radiation performance and magnetic features can be enhanced without the need to form unevenness upon yoke 8 while simplifying the process.

Description

圓筒型線性馬達之定子、圓筒型線性馬達及圓筒型線性馬達之定子線圈之捲裝方法 Rolling method of stator of cylindrical linear motor, cylindrical linear motor and stator coil of cylindrical linear motor

本發明係關於具有在圓筒狀磁軛的內徑側朝軸向排列複數個之複數個線圈的圓筒型線性馬達的定子;除了該定子以外,具備有在定子的內側相對向配置,朝軸向插設有複數個永久磁鐵的活動件的圓筒型線性馬達、及圓筒型線性馬達之定子線圈之捲裝方法。 The present invention relates to a stator having a cylindrical linear motor in which a plurality of coils are arranged in the axial direction on the inner diameter side of the cylindrical yoke, and is provided to be disposed opposite to the stator, A cylindrical linear motor in which a movable member of a plurality of permanent magnets is axially inserted, and a winding method of a stator coil of a cylindrical linear motor.

第11圖係在例如專利文獻1中作為課題而予以記載之習知圓筒型線性馬達的側剖面圖。第12圖係沿著第11圖之C-C線的箭頭方向剖面圖。在第11圖中,10為定子,20為活動件,3為支持機構,4為U相、V相、W相的線圈,15為U相、V相、W相的跨接線,6為永久磁鐵,7為護套(can),8為磁軛。 Fig. 11 is a side cross-sectional view showing a conventional cylindrical linear motor described in, for example, Patent Document 1. Fig. 12 is a cross-sectional view taken along the line C-C of Fig. 11 in the direction of the arrow. In Fig. 11, 10 is the stator, 20 is the movable part, 3 is the supporting mechanism, 4 is the U-phase, V-phase, W-phase coil, 15 is the U-phase, V-phase, W-phase jumper, 6 is permanent The magnet, 7 is a sheath, and 8 is a yoke.

定子10係在由長型圓筒狀之磁性體所構成的磁軛8的內側,朝軸向排列複數個構成U相、V相、W相的短型圓筒狀(環狀)線圈4,利用黏著方式而固定在磁軛8所構成。線圈4係朝軸向配置複數個,且分別藉由各相的跨接線15而接合。各相的線圈4的跨接線15係如第12圖所示集中在圓周方向的一個部位,以密接於線圈4表面的方式成形。 In the stator 10, a plurality of short cylindrical (annular) coils 4 constituting a U phase, a V phase, and a W phase are arranged in the axial direction inside the yoke 8 formed of a long cylindrical magnetic body. It is fixed to the yoke 8 by an adhesive method. The coils 4 are arranged in plural in the axial direction, and are respectively joined by the jumper wires 15 of the respective phases. The jumper 15 of the coil 4 of each phase is concentrated in one portion in the circumferential direction as shown in Fig. 12, and is formed so as to be in close contact with the surface of the coil 4.

活動件20係在朝軸向延伸的圓筒狀護套7的內側,朝軸向插設複數個圓筒狀之永久磁鐵6而構成。活動件20係與定子10隔著微小間隙,以可朝軸向移動的方式藉由支持機構3予以支持。藉由這樣構成之圓筒型線性馬達,在定 子10與活動件20之間會發生軸向的推力並輸出至外部。 The movable member 20 is formed by inserting a plurality of cylindrical permanent magnets 6 in the axial direction inside the cylindrical sheath 7 extending in the axial direction. The movable member 20 is supported by the support mechanism 3 so as to be movable in the axial direction with a slight gap from the stator 10. With the cylindrical linear motor thus constructed, An axial thrust occurs between the sub-10 and the movable member 20 and is output to the outside.

在這種習知圓筒型線性馬達中,由於線圈的跨接線集中在一個部位,且與線圈表面相密接,故構成各相線圈的銅線會在彼此的跨接線間、或跨接線與線圈間相接觸。因此,各相間的絕緣僅由銅線的絕緣皮膜所構成,因為施加於銅線的機械應力或存在於銅線皮膜的針孔的影響,會有絕緣耐壓降低的間題。 In the conventional cylindrical linear motor, since the jumper wires of the coil are concentrated at one portion and are in close contact with the surface of the coil, the copper wires constituting the coils of the respective phases are arranged between the jumpers of each other, or the jumper and the coil. Inter-contact. Therefore, the insulation between the phases is composed only of the insulating film of the copper wire, and the mechanical stress applied to the copper wire or the pinhole existing in the copper wire film may cause a problem that the dielectric breakdown voltage is lowered.

相對於此,在專利文獻1之圓筒型線性馬達中,為了確保跨接線的收納空間,而在磁軛設置凸部(由內徑側觀察時為凹部)以確保空間,使跨接線、結線作業性提升,而且使製作之容易性提升。 On the other hand, in the cylindrical linear motor of Patent Document 1, in order to secure the accommodation space of the jumper, the yoke is provided with a convex portion (a concave portion when viewed from the inner diameter side) to secure a space for the jumper and the wire. Increased workability and ease of production.

此外,若依據專利文獻2之圓筒型線性馬達,則在環狀線圈的繞線型式上下工夫,藉由在內外側實施跨接線的處理,俾可施行連續繞線。此外,為了確保跨接線的空間,在短型圓筒狀外周的磁軛設置缺口部分,以形成間隙來實施空間的確保。 Further, according to the cylindrical linear motor of Patent Document 2, the winding type of the toroidal coil is used, and the process of the jumper is performed on the inner and outer sides, so that the continuous winding can be performed. Further, in order to secure the space of the jumper, a notch portion is provided in the yoke of the short cylindrical outer circumference to form a gap to secure the space.

(先前技術文獻) (previous technical literature) (專利文獻) (Patent Literature)

(專利文獻1)日本特開2008-79358號公報 (Patent Document 1) Japanese Patent Laid-Open Publication No. 2008-79358

(專利文獻2)日本特開2006-223090號公報 (Patent Document 2) Japanese Patent Laid-Open Publication No. 2006-223090

但是,依據上述習知技術,由於係在線圈外周側進行結線處理、跨接線處理,所以必須在線圈外周側確保收納 結線、跨接線的空間。因此,必須在磁軛設置缺口或凸部,或在線圈與磁軛間設置間隙。 However, according to the above-described conventional technique, since the wire bonding process and the jumper wire process are performed on the outer circumferential side of the coil, it is necessary to ensure accommodation on the outer circumferential side of the coil. The space for the connection and jumper. Therefore, it is necessary to provide a notch or a convex portion in the yoke or to provide a gap between the coil and the yoke.

若在磁軛設置缺口或凸部時,由於磁軛的鐵心部分會消失或距離變遠,因此有磁特性降低的問題。此外,雖依製作精度而有不同,但是若未以良好的平衡度製作缺口部分,則會發生磁性不平衡,有因齒槽效應轉矩(cogging torque)或轉矩漣波(torque ripple)、磁性吸引力的不平衡而造成軸變形等,導致軸位移精度惡化的情形,而成為課題所在。此外,在磁軛設置缺口或凸部,必須在磁軛實施機械加工等而加工成特殊形狀,因此與磁軛為正圓形的情形相比,成本會增加,故成為課題所在。 When the yoke is provided with a notch or a convex portion, since the core portion of the yoke disappears or the distance becomes long, there is a problem that the magnetic characteristics are lowered. In addition, although it differs depending on the manufacturing precision, if the notch portion is not formed with a good balance, magnetic imbalance occurs, and cogging torque or torque ripple occurs. When the magnetic attraction force is unbalanced and the shaft is deformed, the accuracy of the shaft displacement is deteriorated, which is a problem. Further, since the yoke is provided with a notch or a convex portion, it is necessary to machine the yoke into a special shape by machining or the like. Therefore, the cost is increased as compared with the case where the yoke is a perfect circular shape, which is a problem.

另一方面,若在線圈與磁軛間設置間隙,在作為發熱源的短型圓筒狀的線圈之外周面、及對將熱能傳到外部框體的磁軛部分,會存在有具有隔熱性的空氣層,而導致線圈的散熱性惡化。 On the other hand, if a gap is provided between the coil and the yoke, the outer peripheral surface of the short cylindrical coil as a heat source and the yoke portion that transmits thermal energy to the outer casing may have heat insulation. The air layer of the air causes the heat dissipation of the coil to deteriorate.

本發明係鑑於上述課題而研創者,其目的在提供一種線圈與磁軛的接觸面積增加、散熱性提升、磁性平衡佳且磁特性提升、加工容易之圓筒型線性馬達之定子、圓筒型線性馬達及圓筒型線性馬達之定子線圈之捲裝方法。 The present invention has been made in view of the above problems, and an object thereof is to provide a stator and a cylindrical type of a cylindrical linear motor in which a contact area between a coil and a yoke is increased, heat dissipation is improved, magnetic balance is improved, magnetic characteristics are improved, and processing is easy. A winding method of a stator coil of a linear motor and a cylindrical linear motor.

為了解決上述課題並達成目的,本發明之圓筒型線性馬達之定子之特徵為具有:以磁性體所成的長型圓筒狀的磁軛;及分別呈短型圓筒狀且在磁軛的內徑側朝軸向排列複數個的U相、V相、W相的複數個線圈,各相的線圈的跨 接線係配設在線圈的內周面。 In order to solve the above problems and achieve the object, the stator of the cylindrical linear motor of the present invention is characterized in that it has a long cylindrical yoke formed of a magnetic body, and a short cylindrical shape and a yoke. The inner diameter side is arranged in the axial direction with a plurality of U-phase, V-phase, and W-phase coils, and the cross-coils of the respective phases The wiring system is disposed on the inner circumferential surface of the coil.

再者,本發明之圓筒型線性馬達之特徵為具備有定子及活動件,定子具有:以磁性體所成的長型圓筒狀的磁軛、及分別呈短型圓筒狀且在磁軛的內徑側朝軸向排列複數個的U相、V相、W相的複數個線圈;而活動件係在定子的內側隔著磁性間隙相對向,並以可朝軸向移動的方式配置,且朝軸向插設有複數個永久磁鐵;並將定子的各相線圈的跨接線配設在線圈的內周面。 Further, the cylindrical linear motor of the present invention is characterized in that it has a stator and a movable member, and the stator has a long cylindrical yoke formed of a magnetic body and a short cylindrical shape and magnetic A plurality of U-phase, V-phase, and W-phase coils are arranged in the axial direction on the inner diameter side of the yoke; and the movable member is opposed to the inner side of the stator via a magnetic gap, and is movable in the axial direction. And a plurality of permanent magnets are inserted in the axial direction; and the jumper wires of the coils of the respective phases of the stator are disposed on the inner circumferential surface of the coil.

此外,本發明之圓筒型線性馬達之定子線圈之捲裝方法,該定子線圈係具有以磁性體所成的長型圓筒狀的磁軛、及分別呈短型圓筒狀且在磁軛的內徑側朝軸向排列複數個的第1、第2、第3之複數個線圈,該圓筒型線性馬達之定子線圈之捲裝方法的步驟包括:使用第1、第2、第3的3支拉線管,首先,在捲繞第1線圈後,由第1線圈的內徑端朝軸向拉出跨接線,接著,將與第1線圈鄰接的第2線圈捲繞在第1線圈的跨接線的外側,由第2線圈的內徑端朝軸向拉出跨接線,繼之,將與第2線圈鄰接的第3線圈捲繞在第1線圈及第2線圈的跨接線的外側,由第3線圈的內徑端朝軸向拉出跨接線,接著,將與第3線圈鄰接的第1線圈捲繞在第2線圈及第3線圈的跨接線的外側,由第1線圈的內徑端朝軸向拉出跨接線,藉由反覆以上步驟,將定子的各相之線圈的跨接線配設在線圈的內周面。 Further, in the method of winding a stator coil of a cylindrical linear motor according to the present invention, the stator coil has a long cylindrical yoke formed of a magnetic body, and each has a short cylindrical shape and a yoke. The plurality of first, second, and third plurality of coils are arranged in the axial direction of the inner diameter side, and the step of winding the stator coil of the cylindrical linear motor includes: using the first, second, and third First, after the first coil is wound, the jumper is pulled out from the inner diameter end of the first coil in the axial direction, and then the second coil adjacent to the first coil is wound around the first coil. The outer side of the jumper of the coil is pulled out from the inner diameter end of the second coil in the axial direction, and then the third coil adjacent to the second coil is wound around the jumper of the first coil and the second coil. On the outer side, the jumper wire is pulled out from the inner diameter end of the third coil in the axial direction, and then the first coil adjacent to the third coil is wound around the outer side of the jumper of the second coil and the third coil, and the first coil is wound. The inner diameter end pulls the jumper wire axially, and by repeating the above steps, the jumper of the coil of each phase of the stator is disposed on the inner circumference of the coil .

藉由在短型圓筒狀的內徑實施所有的結線處理、跨接線處理,短型圓筒狀的外周部係可形成為圓筒狀,且不需要在磁軛設置缺口或凸部,因此線圈與磁軛的接觸面積會增加,散熱性會提升。此外,由於磁軛為圓筒狀,因此不會發生磁性不平衡,亦不會導致磁特性之降低。此外,由於磁軛為圓筒狀,因此加工亦較為容易。 By performing all the wire bonding processing and the jumper wire processing in the short cylindrical inner diameter, the outer circumference of the short cylindrical shape can be formed into a cylindrical shape, and it is not necessary to provide a notch or a convex portion in the yoke. The contact area between the coil and the yoke is increased, and the heat dissipation is improved. Further, since the yoke is cylindrical, magnetic imbalance does not occur and magnetic characteristics are not lowered. Further, since the yoke is cylindrical, processing is also relatively easy.

以下根據圖式詳細說明本發明之圓筒型線性馬達之定子、圓筒型線性馬達及圓筒型線性馬達之定子線圈之捲裝方法之實施形態。然而,本發明不應受該實施形態之限定。 Hereinafter, embodiments of the winding method of the stator, the cylindrical linear motor, and the stator coil of the cylindrical linear motor according to the present invention will be described in detail with reference to the drawings. However, the invention should not be limited by the embodiment.

〈實施形態1〉 <Embodiment 1>

第1圖係本發明實施形態1之圓筒型線性馬達的側剖面圖。第2圖係沿著第1圖A-A線箭頭方向之剖面圖。在第1圖中,10為定子,20為活動件,3為支持機構,4A為U相、V相、W相的線圈,5A為U相、V相、W相的跨接線,6為永久磁鐵,7為護套(can),8為磁軛。 Fig. 1 is a side sectional view showing a cylindrical linear motor according to a first embodiment of the present invention. Fig. 2 is a cross-sectional view taken along the line A-A of Fig. 1 in the direction of the arrow. In Fig. 1, 10 is a stator, 20 is a movable member, 3 is a support mechanism, 4A is a U-phase, V-phase, and W-phase coil, 5A is a U-phase, V-phase, and W-phase jumper, and 6 is permanent. The magnet, 7 is a sheath, and 8 is a yoke.

定子10係在由長型圓筒狀之磁性體所構成的磁軛8的內側,朝軸向排列複數個構成U相、V相、W相的短型圓筒狀(環狀)之線圈4A,藉由粘著方式而固定在磁軛8所構成。線圈4A係朝軸向配置複數個,且分別藉由各相的跨接線5A而相接合。如第2圖所示,本實施形態之跨接線5A係在線圈4A的徑向內徑側,集中在圓周方向的一個部位,並以密接於前述線圈4A的內周表面的方式配設。 In the stator 10, a plurality of short cylindrical (annular) coils 4A constituting a U phase, a V phase, and a W phase are arranged in the axial direction inside the yoke 8 formed of a long cylindrical magnetic body. It is fixed to the yoke 8 by an adhesive method. The coil 4A is disposed in plural in the axial direction, and is joined by the jumper wires 5A of the respective phases. As shown in Fig. 2, the jumper wire 5A of the present embodiment is disposed on one side in the circumferential direction on the radial inner diameter side of the coil 4A, and is disposed so as to be in close contact with the inner circumferential surface of the coil 4A.

活動件20係在朝軸向延伸的圓筒狀護套7的內側,朝 軸向插設複數個圓筒狀永久磁鐵6而構成。活動件20係與定子10隔著微小的磁性間隙(磁隙,gap)相對向,並藉由支持機構3以可朝軸向移動的方式予以支持。在此,所謂軸向係指活動件20的可移動方向。藉由這種構成之圓筒型線性馬達,係與習知物品同樣地會在定子10與活動件20之間產生軸向的推力,該推力則藉由活動件20的移動而輸出至外部。 The movable member 20 is on the inner side of the cylindrical sheath 7 extending in the axial direction, toward A plurality of cylindrical permanent magnets 6 are axially inserted. The movable member 20 is opposed to the stator 10 with a slight magnetic gap (gap), and is supported by the support mechanism 3 so as to be movable in the axial direction. Here, the axial direction refers to the movable direction of the movable member 20. According to the cylindrical linear motor having such a configuration, axial thrust is generated between the stator 10 and the movable member 20 in the same manner as the conventional article, and the thrust is output to the outside by the movement of the movable member 20.

第3圖係顯示實施形態1之圓筒型線性馬達之線圈4A之跨接線5A的配設位置之圖,且為第1圖的B部分的放大圖。第4圖係顯示實施形態1之圓筒型線性馬達之線圈4A的捲裝順序的步驟圖。其中,在第3、4圖中僅顯示線圈4A及其跨接線5A,活動件20或捲繞工具則並未記載。第5圖係實施形態1之圓筒型線性馬達之線圈4A的局部放大剖面圖。 Fig. 3 is a view showing an arrangement position of the jumper 5A of the coil 4A of the cylindrical linear motor of the first embodiment, and is an enlarged view of a portion B of Fig. 1. Fig. 4 is a flow chart showing the winding procedure of the coil 4A of the cylindrical linear motor of the first embodiment. Here, in the drawings 3 and 4, only the coil 4A and its jumper 5A are shown, and the movable member 20 or the winding tool is not described. Fig. 5 is a partially enlarged sectional view showing a coil 4A of a cylindrical linear motor according to the first embodiment.

在第3圖中,將U相、V相、W相的各相的跨接處理配置在內徑側(內周面),俾可進行各線圈4A間的結線。此外,藉由在線圈4A的內徑側進行跨接線處理及結線處理,可將線圈4A的外徑側設計成沒有凹凸的圓筒狀,以提高與磁軛8的接觸面積。此外,線圈4A的外周面為不具凹凸的正圓型圓筒狀,因此可利用輕壓入或輕熱縮嵌合(shrinkage fit)將線圈4A插入磁軛8。藉此,得以提升熱傳導性,並且提升線圈4A的固定可靠性。 In Fig. 3, the bridging process of the respective phases of the U phase, the V phase, and the W phase is disposed on the inner diameter side (inner peripheral surface), and the connection between the coils 4A can be performed. Further, by performing the jumper processing and the wire bonding process on the inner diameter side of the coil 4A, the outer diameter side of the coil 4A can be designed in a cylindrical shape without irregularities to increase the contact area with the yoke 8. Further, since the outer circumferential surface of the coil 4A is a perfect circular cylindrical shape having no concavities and convexities, the coil 4A can be inserted into the yoke 8 by a light press fit or a shrinkage fit. Thereby, the thermal conductivity is improved, and the fixing reliability of the coil 4A is improved.

根據第4圖說明本實施形態之線圈4A之捲裝方法、及跨接線5A之配線方法。其中,在第4圖中,在第3圖所示 之線圈4A中,係將U相(第1相)的線圈設為4u,將V相(第2相)的線圈設為4v,將W相(第3相)的線圈設為4w。此外,在第3圖所示之跨接線5A之中,係將U相(第1相)的跨接線設為5u,將V相(第1相)的跨接線設為5v,將W相(第3相)的跨接線設為5w。 The winding method of the coil 4A and the wiring method of the jumper 5A according to the present embodiment will be described with reference to Fig. 4 . Among them, in Figure 4, shown in Figure 3 In the coil 4A, the coil of the U phase (first phase) is 4u, the coil of the V phase (second phase) is 4v, and the coil of the W phase (third phase) is 4w. Further, in the jumper 5A shown in Fig. 3, the U-phase (first phase) jumper is set to 5u, and the V-phase (first phase) jumper is set to 5v, and the W phase ( The jumper of the third phase is set to 5w.

U相、V相、W相的線圈4u、4v、4w係藉由捲繞在圓筒棒狀之未圖示捲繞工具而成形,然後從捲繞工具抽出,並插入在磁軛8(第2圖)內。第4圖係示意性顯示捲繞在捲繞工具的樣態。線圈4A之捲裝係使用U相、V相、W相之各相1支的3支拉線管(nozzle)9u、9v、9w來進行。首先,捲繞U相線圈4u。捲繞U相線圈4u後,由U相線圈4u的內徑側端,朝軸向拉出跨接線5u。該跨接線5u係朝軸向圈繞達2個相的線圈寬度份(第4圖(a))。 The U-phase, V-phase, and W-phase coils 4u, 4v, and 4w are formed by being wound around a cylindrical rod-shaped winding tool (not shown), and then taken out from the winding tool and inserted into the yoke 8 (No. 2)). Fig. 4 is a view schematically showing a state of being wound around a winding tool. The package of the coil 4A is carried out using three pull wires 9u, 9v, and 9w of one phase of each of the U phase, the V phase, and the W phase. First, the U-phase coil 4u is wound. After the U-phase coil 4u is wound, the jumper wire 5u is pulled out in the axial direction from the inner diameter side end of the U-phase coil 4u. The jumper 5u is wound in the axial direction by a coil width of two phases (Fig. 4(a)).

接著,與U相線圈4u鄰接的V相線圈4v係捲繞在U相線圈4u的跨接線5u之上(外側)。V相線圈4v捲繞結束時,則與U相線圈4u同樣地,由V相線圈4v的內徑側端拉出跨接線5v,且朝軸向圈繞達2個相的線圈寬度份(第4圖(b))。 Next, the V-phase coil 4v adjacent to the U-phase coil 4u is wound around the jumper 5u of the U-phase coil 4u (outside). When the winding of the V-phase coil 4v is completed, the jumper wire 5v is pulled out from the inner diameter side end of the V-phase coil 4v, and the coil width of the two phases is wound in the axial direction in the same manner as the U-phase coil 4u. 4 Figure (b)).

接著,使與V相線圈4v鄰接的W相線圈4w捲繞在跨接線5u及跨接線5v之上(外側)(第5圖(c))。之後,同樣地使U相、V相、W相的各線圈4u、4v、4w分別捲繞在其他2個(2相)線圈的跨接線之上(外側)。 Next, the W-phase coil 4w adjacent to the V-phase coil 4v is wound around the jumper 5u and the jumper 5v (outer side) (Fig. 5(c)). Thereafter, the U-phase, V-phase, and W-phase coils 4u, 4v, and 4w are wound around the jumper wires (outer sides) of the other two (two-phase) coils, respectively.

依上述方式,依據本實施形態之圓筒型線性馬達之定子線圈之捲裝方法,係使用3支拉線管9u、9v、9w,依各 相的各別順序進行繞線及朝軸向延伸的2相份的跨接處理,並且第1線圈的繞線係捲繞在第2、第3繞線之上(外側),藉由反覆這個操作即可進行連續跨接線處理,由於不需要結線作業,因此有助於作業性之提升。此外,藉由在線圈4u、4v、4w的內周面進行跨接線處理,故可輕易捲繞在其他2相的跨接線之上(外側),無須避開其他2相的跨接線即可進行繞線,因此即使未對繞線型式或繞線機作特殊的設計,亦可輕易地進行連續繞線。 According to the above aspect, the winding method of the stator coil of the cylindrical linear motor according to the present embodiment uses three pull wires 9u, 9v, and 9w, respectively. The two-phase bridging process of winding and extending in the axial direction is performed in the respective order of the phases, and the winding of the first coil is wound around the second and third windings (outside) by repeating this The continuous jumper processing can be performed by the operation, and the workability is improved because the wire bonding operation is not required. In addition, by performing the jumper processing on the inner circumferential surfaces of the coils 4u, 4v, and 4w, it can be easily wound on the other two-phase jumper (outer side) without having to avoid the other two-phase jumper wires. Winding, so continuous winding can be easily performed even without special design for the winding pattern or winding machine.

跨接線5u、5v、5w的固定係使用清漆固定在各線圈4u、4v、4w的內周面。藉此,得以對各線圈4u、4v、4w賦予形狀穩定性,而且跨接線5u、5v、5w不會在內徑側脫落,另外,藉由將跨接線5u、5v、5w予以固定而賦予形狀穩定性,即不會有在內徑側脫落的情形,又可對跨接線5u、5v、5w賦加絕緣性。 The fixing of the jumper wires 5u, 5v, and 5w is fixed to the inner circumferential surfaces of the respective coils 4u, 4v, and 4w using varnish. Thereby, the shape stability is imparted to each of the coils 4u, 4v, and 4w, and the jumper wires 5u, 5v, and 5w are not detached from the inner diameter side, and the jumper wires 5u, 5v, and 5w are fixed to impart a shape. Stability, that is, there is no possibility of falling off on the inner diameter side, and insulation can be added to the jumper wires 5u, 5v, 5w.

藉由採用如上所述之捲裝方法,藉由形成朝軸向排列的各線圈4u、4v、4w,即可將各線圈的跨接線5u、5v、5w配置在內徑側。此外,構成U相、V相、W相之各線圈4u、4v、4w的電線係為沒有接頭之連續構造(連續繞線)。藉由依以上方式實現連續繞線,由於不需要各線圈間的結線,故不會有生產性惡化的情形。此外,藉由將跨接線5u、5v、5w配置在線圈的內周面,即可在其他2相的跨接線之上實施繞線,在預定的線圈繞線結束後,可直接實施下一個繞線。 By using the winding method as described above, the jump wires 5u, 5v, and 5w of the respective coils can be disposed on the inner diameter side by forming the respective coils 4u, 4v, and 4w arranged in the axial direction. Further, the electric wires constituting the respective coils 4u, 4v, and 4w of the U phase, the V phase, and the W phase are continuous structures (continuous winding) having no joint. By continuous winding in the above manner, since the knots between the coils are not required, there is no possibility that the productivity is deteriorated. In addition, by arranging the jumper wires 5u, 5v, and 5w on the inner circumferential surface of the coil, the winding can be performed on the other two-phase jumper wires, and after the predetermined coil winding is completed, the next winding can be directly performed. line.

再者,本實施形態之線圈4A係藉由捲繞在捲繞工具而 成形,但是亦可藉由捲繞在裝設於捲繞工具之未圖示之捲線管(bobbin)(捲框)來成形,然後連同捲線管一起由捲繞工具抽出,並插入在磁軛8(第2圖)內。此時,跨接線5A係攀附在凹設於未圖示之捲線管(捲框)之線圈捲裝面的溝槽內。 Furthermore, the coil 4A of the present embodiment is wound by a winding tool. Forming, but it can also be formed by winding a bobbin (reel frame) which is not shown in the winding tool, and then taken out by the winding tool together with the bobbin, and inserted in the yoke 8 (Figure 2). At this time, the jumper wire 5A is hung in a groove recessed in the coil winding surface of the bobbin (reel frame) not shown.

如以上所述,依據本實施形態之圓筒型線性馬達,具備有定子及活動件。該定子具有以磁性體所成的長型圓筒狀的磁軛8、及分別呈短型圓筒狀且在磁軛8的內徑側朝軸向排列複數個的U相、V相、W相的複數線圈4A;該活動件20係在定子10的內側隔著磁性間隙相對向,並以可朝軸向移動的方式配置,且朝軸向插設有複數個永久磁鐵6。定子10之各相的線圈4A的跨接線5A係配設在線圈4A的內周面。藉由在線圈4A的內徑側實施全部的結線處理、跨接線處理,線圈4A的外周部係可設成為圓筒狀,而不需要在磁軛8設置缺口或凸部,因此線圈4A與磁軛8的接觸面積會增加,散熱性得以提升。而且,由於磁軛8為圓筒狀,因此不會發生磁性不平衡,亦不會導致磁特性之降低。此外,由於磁軛8為圓筒狀,因此加工亦較為容易。 As described above, the cylindrical linear motor according to the embodiment includes the stator and the movable member. The stator has a long cylindrical yoke 8 formed of a magnetic material, and a U-phase, a V-phase, and a W-phase, which are each formed in a short cylindrical shape and arranged in the axial direction on the inner diameter side of the yoke 8. The plurality of coils 4A of the phase; the movable member 20 is disposed on the inner side of the stator 10 with a magnetic gap therebetween, and is disposed to be movable in the axial direction, and a plurality of permanent magnets 6 are inserted in the axial direction. The jumper 5A of the coil 4A of each phase of the stator 10 is disposed on the inner circumferential surface of the coil 4A. By performing all the wire bonding processing and the jumper processing on the inner diameter side of the coil 4A, the outer peripheral portion of the coil 4A can be formed in a cylindrical shape, and it is not necessary to provide a notch or a convex portion in the yoke 8, so the coil 4A and the magnetic body The contact area of the yoke 8 is increased, and heat dissipation is improved. Further, since the yoke 8 has a cylindrical shape, magnetic imbalance does not occur and magnetic characteristics are not lowered. Further, since the yoke 8 is cylindrical, processing is also easy.

此外,本實施形態之跨接線5A係藉由清漆而固定在各線圈4A的內周面,但是亦可利用黏著劑、黏著帶、樹脂等來進行固定,而非侷限於清漆。 Further, the jumper wire 5A of the present embodiment is fixed to the inner circumferential surface of each of the coils 4A by varnish, but may be fixed by an adhesive, an adhesive tape, a resin or the like, and is not limited to the varnish.

〈實施形態2〉 <Embodiment 2>

第6圖係顯示實施形態2之圓筒型線性馬達的線圈外觀的局部放大圖。第7圖係實施形態2之圓筒型線性馬達 的橫剖面圖。本實施形態之線圈4B係用剖面扁平形的扁平電線使其寬面彼此重疊,並利用多數條無間隙地捲繞的所謂扁立(edgewise)方式捲繞而形成。使用剖面扁平形的扁平電線的本實施形態之線圈4B係如第6圖所示,與使用剖面圓形的電線的實施形態1(第5圖)的線圈4A相比較,可以沒有間隙地進行捲繞,且佔空因素較高。如第7圖所示,跨接線5B係呈剖面扁平形,詳而言之,係沿著線圈4B的內周面,朝寬度方向彎曲。其中,第7圖的線圈4B係經誇張描述其特徵,俾易於理解。 Fig. 6 is a partially enlarged view showing the appearance of a coil of the cylindrical linear motor of the second embodiment. Figure 7 is a cylindrical linear motor of Embodiment 2. Cross section view. The coil 4B of the present embodiment is formed by a so-called flatwise winding in which a wide flat surface of a flat electric wire having a flat cross section is overlapped with each other and wound by a plurality of slits without a gap. As shown in Fig. 6, the coil 4B of the present embodiment, which is a flat-shaped flat wire having a flat cross-section, can be wound without a gap as compared with the coil 4A of the first embodiment (fifth drawing) in which a circular electric wire is used. Winding, and the duty factor is higher. As shown in Fig. 7, the jumper wire 5B has a flat cross section, and is, in other words, curved in the width direction along the inner circumferential surface of the coil 4B. Among them, the coil 4B of Fig. 7 is exaggerated to describe its characteristics, and is easy to understand.

依據本實施形態之線圈4B,藉由使用扁平電線,可減小跨接線5B的空間,另外亦增加佔空因素,因此可減低損失,並且可謀求小型化。此外,藉由使用扁平電線而形成為扁立方式捲繞,可將線圈4A外形完全形成為正圓形,可更加增加對磁軛8的接觸面積,因此可提升熱傳導。 According to the coil 4B of the present embodiment, by using a flat electric wire, the space of the jumper wire 5B can be reduced, and the duty factor can be increased, so that the loss can be reduced and the size can be reduced. Further, by forming a flat wire by using a flat electric wire, the outer shape of the coil 4A can be completely formed into a perfect circular shape, and the contact area with respect to the yoke 8 can be further increased, so that heat conduction can be improved.

其中,如實施形態1的線圈4A(第5圖)那樣,即使在使用剖面圓形的電線的情況下,僅將跨接線的部分壓扁而形成為剖面扁平形,即可謀求跨接線的省空間化或小型化。 In the coil 4A (Fig. 5) of the first embodiment, even when a wire having a circular cross section is used, only the portion of the jumper wire is flattened to have a flat cross section, and the jumper can be saved. Spatial or miniaturized.

〈實施形態3〉 <Embodiment 3>

第8圖係實施形態3之圓筒型線性馬達的橫剖面圖。在本實施形態中,係使用磁鐵保持用的金屬管(SUS管)來作為覆蓋活動件20之外周部的護套7。在護套7的外周面沿著軸向形成有溝槽20a,而跨接線5A則配設在該溝槽20a內。其他構成與實施形態1相同。 Fig. 8 is a cross-sectional view showing a cylindrical linear motor of the third embodiment. In the present embodiment, a metal tube (SUS tube) for holding a magnet is used as the sheath 7 covering the outer peripheral portion of the movable member 20. A groove 20a is formed along the axial direction on the outer circumferential surface of the sheath 7, and the jumper wire 5A is disposed in the groove 20a. The other configuration is the same as that of the first embodiment.

依此設計,不會浪費跨接線空間,而可縮短磁隙(活動 件20與定子10間的微小磁性間隙)。尤其在活動件側使用磁鐵保持用之SUS管作為護套7時,可設置跨接線空間而不會對磁特性造成影響。 With this design, the jumper space is not wasted, and the magnetic gap can be shortened (activity A slight magnetic gap between the member 20 and the stator 10). In particular, when the SUS tube for magnet holding is used as the sheath 7 on the movable member side, the jumper space can be provided without affecting the magnetic characteristics.

此外,本實施形態之活動件20係具有覆蓋外周部的護套7,在該護套7形成有供跨接線5A隱避的溝槽20a,但是即使為未具有護套的活動件,亦可藉由在外周面形成供跨接線隱避的溝槽,而獲得大略相同的效果。 Further, the movable member 20 of the present embodiment has a sheath 7 covering the outer peripheral portion, and the groove 7a for the jumper 5A is formed in the sheath 7, but even a movable member having no sheath can be borrowed A groove having a wrap line is formed on the outer peripheral surface to obtain substantially the same effect.

〈實施形態4〉 <Embodiment 4>

第9圖係實施形態4之圓筒型線性馬達的橫剖面圖。在本實施形態中,在活動件20的外周面,為了達成隱避跨接線5D之目的,而在圓周方向以120度間距朝軸向延伸形成有3條溝槽20b。在3條溝槽20b的位置分別配設有U相、V相、W相的各線圈4A的跨接線5D。其他構成則與實施形態3相同。依據本實施形態之圓筒型線性馬達,不會產生磁性吸引力的不平衡,可輸出穩定的推力。 Fig. 9 is a cross-sectional view showing a cylindrical linear motor of the fourth embodiment. In the present embodiment, three grooves 20b are formed in the outer circumferential surface of the movable member 20 so as to extend the axial direction at a pitch of 120 degrees in order to achieve the purpose of avoiding the jumper wire 5D. A jumper wire 5D of each of the U-phase, V-phase, and W-phase coils 4A is disposed at the position of the three grooves 20b. The other configuration is the same as that of the third embodiment. According to the cylindrical linear motor of the present embodiment, an unbalance of magnetic attraction force is not generated, and a stable thrust can be output.

〈實施形態5〉 <Embodiment 5>

第10圖係顯示實施形態5之圓筒型線性馬達的線圈捲裝樣態的局部放大圖。本實施形態之U相、V相、W相的各線圈4C係藉由就各相設置的3支拉線管9,僅捲繞成形與軸平行的1層。亦即,在本實施形態中,相對於實施形態1之以多段捲繞有線圈4A之方式,線圈4C係朝徑向以段數僅成為1段(1層)的方式捲繞,其他構成則與實施形態1相同。依據本實施形態之圓筒型線性馬達,可將線圈外周形狀輕易地形成為剖面正圓形的圓筒狀,可增加對磁軛8 的接觸面積,而更加提升熱傳導性。 Fig. 10 is a partially enlarged view showing a state of coil winding of the cylindrical linear motor of the fifth embodiment. In the U-phase, V-phase, and W-phase coils 4C of the present embodiment, only one of the three pull wires 9 provided in each phase is wound and formed into one layer parallel to the shaft. In the present embodiment, the coil 4C is wound in the radial direction so that the number of segments is only one step (one layer), and the other configuration is such that the coil 4C is wound in a plurality of stages in the first embodiment. The same as the first embodiment. According to the cylindrical linear motor of the present embodiment, the outer peripheral shape of the coil can be easily formed into a cylindrical shape having a substantially circular cross section, and the yoke 8 can be added. The contact area increases the thermal conductivity.

(產業上之可利用性) (industrial availability)

如以上所述,本發明之圓筒型線性馬達最適用於具有在圓筒狀磁軛的內徑側朝軸向排列複數個之複數線圈的圓筒型線性馬達。 As described above, the cylindrical linear motor of the present invention is most suitable for a cylindrical linear motor having a plurality of plural coils arranged in the axial direction on the inner diameter side of the cylindrical yoke.

3‧‧‧支持機構 3‧‧‧Support institutions

4、4A、4B、4C、4u、4v、4w‧‧‧線圈 4, 4A, 4B, 4C, 4u, 4v, 4w‧‧‧ coil

15、5A、5B、5D、5u、5v、5w‧‧‧跨接線 15, 5A, 5B, 5D, 5u, 5v, 5w‧‧‧ jumper

6‧‧‧永久磁鐵 6‧‧‧ permanent magnet

7‧‧‧護套 7‧‧‧ sheath

8‧‧‧磁軛 8‧‧‧Y yoke

9、9u、9v、9w‧‧‧繞線機拉線管 9, 9u, 9v, 9w‧‧‧ winding machine cable

10‧‧‧定子 10‧‧‧ Stator

20‧‧‧活動件 20‧‧‧Activities

20a、20b‧‧‧溝槽 20a, 20b‧‧‧ trench

第1圖係本發明實施形態1之圓筒型線性馬達的側剖面圖。 Fig. 1 is a side sectional view showing a cylindrical linear motor according to a first embodiment of the present invention.

第2圖係沿著第1圖之A-A線箭頭方向之剖面圖。 Fig. 2 is a cross-sectional view taken along the line A-A of Fig. 1 in the direction of the arrow.

第3圖係顯示實施形態1之圓筒型線性馬達的線圈的跨接線配設位置之圖,其為第1圖的B部分放大圖。 Fig. 3 is a view showing a jumper arrangement position of a coil of a cylindrical linear motor according to the first embodiment, which is an enlarged view of a portion B of Fig. 1.

第4圖(a)至(c)係顯示實施形態1之圓筒型線性馬達的線圈的捲裝順序之步驟圖。 Fig. 4 (a) to (c) are process diagrams showing the winding sequence of the coil of the cylindrical linear motor of the first embodiment.

第5圖係實施形態1之圓筒型線性馬達的線圈的局部放大剖面圖。 Fig. 5 is a partially enlarged cross-sectional view showing the coil of the cylindrical linear motor of the first embodiment.

第6圖係顯示實施形態2之圓筒型線性馬達的線圈外觀的局部放大圖。 Fig. 6 is a partially enlarged view showing the appearance of a coil of the cylindrical linear motor of the second embodiment.

第7圖係實施形態2之圓筒型線性馬達的橫剖面圖。 Fig. 7 is a cross-sectional view showing a cylindrical linear motor of the second embodiment.

第8圖係實施形態3之圓筒型線性馬達的橫剖面圖。 Fig. 8 is a cross-sectional view showing a cylindrical linear motor of the third embodiment.

第9圖係實施形態4之圓筒型線性馬達的橫剖面圖。 Fig. 9 is a cross-sectional view showing a cylindrical linear motor of the fourth embodiment.

第10圖係顯示實施形態5之圓筒型線性馬達之線圈捲裝樣態的局部放大圖。 Fig. 10 is a partially enlarged view showing a coil package state of the cylindrical linear motor of the fifth embodiment.

第11圖係習知圓筒型線性馬達的側剖面圖。 Figure 11 is a side cross-sectional view of a conventional cylindrical linear motor.

第12圖係沿著第11圖之C-C線箭頭方向的剖面圖。 Fig. 12 is a cross-sectional view taken along the line C-C of Fig. 11 in the direction of the arrow.

4A‧‧‧線圈 4A‧‧‧ coil

5A‧‧‧跨接線 5A‧‧‧ Jumper

8‧‧‧磁軛 8‧‧‧Y yoke

10‧‧‧定子 10‧‧‧ Stator

20‧‧‧活動件 20‧‧‧Activities

Claims (12)

一種圓筒型線性馬達之定子,係具有:以磁性體所成的長型圓筒狀的磁軛;及分別呈短型圓筒狀且在前述磁軛的內徑側朝軸向排列複數個的U相、V相、W相的複數個線圈,前述各相的線圈的跨接線係配設在前述線圈的內周面。 A stator of a cylindrical linear motor having a long cylindrical yoke formed of a magnetic body; and each having a short cylindrical shape and arranged in the axial direction on the inner diameter side of the yoke The plurality of coils of the U phase, the V phase, and the W phase, and the jumper of the coils of the respective phases are disposed on the inner circumferential surface of the coil. 一種圓筒型線性馬達,係具備有:定子,具有以磁性體所成的長型圓筒狀的磁軛、及分別呈短型圓筒狀且在前述磁軛的內徑側朝軸向排列複數個的U相、V相、W相的複數個線圈;以及活動件,係在前述定子的內側隔著磁性間隙相對向並以可朝軸向移動的方式配置,且朝軸向插設有複數個永久磁鐵;並將前述定子的前述各相之線圈的跨接線配設在前述線圈的內周面。 A cylindrical linear motor comprising: a stator having a long cylindrical yoke formed of a magnetic body; and each having a short cylindrical shape and arranged in the axial direction on an inner diameter side of the yoke a plurality of U-phase, V-phase, and W-phase coils; and a movable member disposed on the inner side of the stator with a magnetic gap interposed therebetween and movable in the axial direction, and inserted in the axial direction a plurality of permanent magnets; and a jumper of the coils of the respective phases of the stator is disposed on an inner circumferential surface of the coil. 如申請專利範圍第2項所述之圓筒型線性馬達,其中,前述線圈係由扁平電線捲繞而形成。 The cylindrical linear motor according to claim 2, wherein the coil is formed by winding a flat electric wire. 如申請專利範圍第2項或第3項所述之圓筒型線性馬達,其中,同相的複數個前述線圈、及跨接該等線圈的跨接線係予以連續繞線而無電線之接頭。 A cylindrical linear motor according to claim 2, wherein the plurality of coils in the same phase and the jumper bridges across the coils are continuously wound without a wire joint. 如申請專利範圍第2項或第3項所述之圓筒型線性馬達,其中,前述跨接線係呈剖面扁平形狀。 The cylindrical linear motor of claim 2, wherein the jumper wire has a flat cross-sectional shape. 如申請專利範圍第2項或第3項所述之圓筒型線性馬 達,其中,前述跨接線係藉由清漆、接著劑、黏著帶、及樹脂之任一者而固定在前述線圈的內周面。 Cylindrical linear horse as described in item 2 or 3 of the patent application In the above, the jumper wire is fixed to the inner circumferential surface of the coil by any one of a varnish, an adhesive, an adhesive tape, and a resin. 如申請專利範圍第2項或第3項所述之圓筒型線性馬達,其中,在前述活動件的外周面沿著軸向形成有溝槽,前述跨接線係配設在前述溝槽所形成的空間內。 The cylindrical linear motor according to claim 2, wherein the outer peripheral surface of the movable member is formed with a groove along an axial direction, and the jumper is formed in the groove. Within the space. 如申請專利範圍第3項所述之圓筒型線性馬達,其中,前述線圈係由前述扁平電線以扁立方式捲繞成形。 The cylindrical linear motor according to claim 3, wherein the coil is wound in a flat manner by the flat electric wire. 如申請專利範圍第2項、第3項或第8項中任一項所述之圓筒型線性馬達,其中,前述線圈係僅捲繞與軸呈平行的1層而成形。 The cylindrical linear motor according to any one of claims 2 to 3, wherein the coil is formed by winding only one layer parallel to the shaft. 如申請專利範圍第2項、第3項或第8項中任一項所述之圓筒型線性馬達,其中,前述線圈係壓入於前述磁軛。 The cylindrical linear motor according to any one of claims 2 to 3, wherein the coil is press-fitted into the yoke. 如申請專利範圍第2項、第3項或第8項中任一項所述之圓筒型線性馬達,其中,前述定子復具備捲裝有前述線圈的捲線管,前述跨接線係攀附於凹設在前述捲線管的溝槽內。 The cylindrical linear motor according to any one of claims 2 to 3, wherein the stator is provided with a bobbin in which the coil is wound, and the jumper is attached to the recess It is disposed in the groove of the aforementioned bobbin. 一種圓筒型線性馬達之定子線圈之捲裝方法,該定子線圈係具有以磁性體所成的長型圓筒狀的磁軛、及分別呈短型圓筒狀且在前述磁軛的內徑側朝軸向排列複數個的第1、第2、第3之複數個線圈,該圓筒型線性馬達之定子線圈之捲裝方法的步驟包括:使用第1、第2、第3的3支拉線管,首先,在捲繞第1線圈後,由前述第1線圈的內徑端朝軸向拉出跨接線, 接著,將與前述第1線圈鄰接的第2線圈捲繞在前述第1線圈的跨接線的外側,由前述第2線圈的內徑端朝軸向拉出跨接線,繼之,將與前述第2線圈鄰接的第3線圈捲繞在前述第1線圈及前述第2線圈的跨接線的外側,由前述第3線圈的內徑端朝軸向拉出跨接線,接著,將與前述第3線圈鄰接的第1線圈捲繞在前述第2線圈及前述第3線圈的跨接線的外側,由前述第1線圈的內徑端朝軸向拉出跨接線,藉由反覆以上步驟,將前述定子的前述各相之線圈的跨接線配設在前述線圈的內周面。 A winding method of a stator coil of a cylindrical linear motor, the stator coil having a long cylindrical yoke formed of a magnetic body, and a short cylindrical shape and an inner diameter of the yoke The plurality of first, second, and third plurality of coils are arranged side by side in the axial direction, and the step of winding the stator coil of the cylindrical linear motor includes: using the first, second, third, and third First, after winding the first coil, the jumper wire is pulled out from the inner diameter end of the first coil toward the axial direction. Next, the second coil adjacent to the first coil is wound around the jumper of the first coil, and the jumper is pulled out from the inner diameter end of the second coil in the axial direction, and then a third coil adjacent to the coil is wound around the jumper of the first coil and the second coil, and the jumper is pulled out from the inner diameter end of the third coil in the axial direction, and then the third coil is connected The adjacent first coil is wound around the outer side of the jumper of the second coil and the third coil, and the jumper is pulled out from the inner diameter end of the first coil in the axial direction, and the stator is reversed by the above steps. The jumper of the coil of each of the above phases is disposed on the inner circumferential surface of the coil.
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WO2019206531A1 (en) * 2018-04-25 2019-10-31 Asml Netherlands B.V. Tubular linear actuator, patterning device masking device and lithographic apparatus
US11262663B2 (en) 2018-04-25 2022-03-01 Asml Netherlands B.V. Tubular linear actuator, patterning device masking device and lithographic apparatus

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