JP4826776B2 - Cylindrical linear motor - Google Patents
Cylindrical linear motor Download PDFInfo
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- JP4826776B2 JP4826776B2 JP2006252283A JP2006252283A JP4826776B2 JP 4826776 B2 JP4826776 B2 JP 4826776B2 JP 2006252283 A JP2006252283 A JP 2006252283A JP 2006252283 A JP2006252283 A JP 2006252283A JP 4826776 B2 JP4826776 B2 JP 4826776B2
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Description
本発明は、円筒形状の界磁と電機子を備えた可動磁石構造の円筒形リニアモータに関する。 The present invention relates to a cylindrical linear motor having a movable magnet structure including a cylindrical field and an armature.
従来、円筒形状の界磁と電機子を備えた３相の円筒形リニアモータは、図５のようになっている。
図５は従来の３相の円筒形リニアモータの構成を示す側断面図である。図６は図５中のＢ−Ｂ‘における固定子の正断面図である。
図５において、１は固定子、２は可動子、３は支持機構、４はＵ相、Ｖ相、Ｗ相のコイル、５はＵ相、Ｖ相、Ｗ相の渡り線、６は永久磁石、７はキャン、８はヨークである。
固定子１は円筒状の磁性体よりなるヨーク８の内側に、電気装荷手段となるＵ相、Ｖ相、Ｗ相を構成する円筒状のコイル４を軸方向に複数個並べ、接着によりヨーク８に固定され構成される。各相のコイル４の渡り線５は、図６に示すように周方向の一箇所に集められ、前記コイル５の表面に密着するように成形される。
可動子２は軸方向に伸びる円筒状のキャン７の内側に、磁気装荷手段となる円筒状の永久磁石６を軸方向に複数挿設して構成される。
この構成により、固定子１の電気装荷手段と可動子２の磁気装荷手段との間で軸方向の推力が発生し、可動子２が固定子１とギャップを介して支持機構３により軸方向に移動可能に支持されるなかで、可動子２の推力を外に取り出すことができる（例えば、特許文献１、２を参照）。
FIG. 5 is a side sectional view showing a configuration of a conventional three-phase cylindrical linear motor. FIG. 6 is a front sectional view of the stator at BB ′ in FIG. 5.
In FIG. 5, 1 is a stator, 2 is a mover, 3 is a support mechanism, 4 is a U-phase, V-phase, and W-phase coil, 5 is a U-phase, V-phase, and W-phase crossover, and 6 is a permanent magnet. , 7 is a can, and 8 is a yoke.
In the stator 1, a plurality of cylindrical coils 4 constituting U-phase, V-phase, and W-phase serving as electric loading means are arranged in the axial direction inside a yoke 8 made of a cylindrical magnetic material, and the yoke 8 is bonded by bonding. Fixed and configured. As shown in FIG. 6, the connecting wires 5 of the coils 4 of each phase are gathered at one place in the circumferential direction and are formed so as to be in close contact with the surface of the coil 5.
The mover 2 is configured by inserting a plurality of cylindrical permanent magnets 6 serving as magnetic loading means in the axial direction inside a cylindrical can 7 extending in the axial direction.
With this configuration, an axial thrust is generated between the electric loading means of the stator 1 and the magnetic loading means of the mover 2, and the mover 2 is axially moved by the support mechanism 3 through the stator 1 and the gap. The thrust of the mover 2 can be taken out while being supported so as to be movable (see, for example, Patent Documents 1 and 2).
ところが、従来の円筒形リニアモータにおいて、コイルの渡り線が一箇所に集められ、コイル表面に密着しているので、各相コイルを構成する銅線が互いの渡り線または渡り線とコイルで接触することになる。そのため、相間の絶縁が銅線の絶縁皮膜のみで構成されることになり、銅線に加わる機械的ストレスや銅線皮膜に存在するピンホールの影響により、絶縁耐圧が低下すると言う問題があった。
本発明はこのような問題点に鑑みてなされたものであり、多相の円筒形リニアモータのコイルを軸方向に複数個並べて構成する際に、コイルの渡り線が相間で接触しないようにし、絶縁耐圧の低下を防ぐことが可能な多相の円筒形リニアモータを提供することを目的とする。
However, in the conventional cylindrical linear motor, the connecting wires of the coils are gathered in one place and are in close contact with the coil surface, so that the copper wires constituting each phase coil are in contact with each other connecting wires or connecting wires and the coils. Will do. Therefore, the insulation between the phases is composed only of an insulating film of copper wire, and there is a problem that the withstand voltage decreases due to the mechanical stress applied to the copper wire and the influence of pinholes existing in the copper wire film. .
The present invention has been made in view of such problems, and when a plurality of coils of a multiphase cylindrical linear motor are arranged side by side in the axial direction, the connecting wires of the coils are prevented from contacting each other, An object of the present invention is to provide a multiphase cylindrical linear motor capable of preventing a decrease in dielectric strength.
上記問題を解決するため、本発明は、次のように構成したものである。 In order to solve the above problems, the present invention is configured as follows.
請求項１に記載の発明は、円筒状の磁性体よりなる金属パイプの内径側に、電気装荷手段となる円筒状に巻回したコイルを軸方向に複数個並べ構成される固定子と、前記固定子の内側に磁気的空隙を介して対向配置されると共に、軸方向に伸びる円筒状の薄肉ステンレス製のキャンの内径側に、磁気装荷手段となる永久磁石を軸方向に複数個挿設して構成される可動子とを備えた円筒形リニアモータにおいて、前記金属パイプの周方向に、相数をＮとした場合、３６０度／Ｎの角度ピッチで軸方向に延びるように配置されると共に、前記各相のコイルの渡り線をそれぞれ埋設するための凸部を設けたことを特徴としている。 According to a first aspect of the present invention, there is provided a stator configured by arranging a plurality of coils wound in a cylindrical shape serving as electric loading means on an inner diameter side of a metal pipe made of a cylindrical magnetic body, A plurality of permanent magnets serving as magnetic loading means are inserted in the axial direction on the inner diameter side of a cylindrical thin-walled stainless steel can that is opposed to the inside of the stator via a magnetic gap and extends in the axial direction. In the cylindrical linear motor provided with the mover configured as described above, the metal pipe is arranged so as to extend in the axial direction at an angular pitch of 360 degrees / N, where N is the number of phases in the circumferential direction of the metal pipe. Further, the present invention is characterized in that a convex portion is provided for embedding the connecting wire of the coil of each phase.
また、請求項２に記載の発明は、請求項１記載の円筒形リニアモータにおいて、前記金属パイプの周方向に設けた凸部の内部に、前記凸部の内壁に沿うような外面形状を有し、かつ、前記コイルの渡り線の脱落を防止するための絶縁物より成る渡り線落下防止コマを設けたことを特徴としている。 According to a second aspect of the present invention, in the cylindrical linear motor according to the first aspect of the present invention, the convex shape provided in the circumferential direction of the metal pipe has an outer surface shape along the inner wall of the convex portion. In addition, a crossover fall prevention piece made of an insulating material for preventing the crossover of the coil from falling off is provided.
また、請求項３に記載の発明は、請求項２記載の円筒形リニアモータにおいて、前記渡り線落下防止コマは、正断面視で下向きＬ字状に形成されたコマを２つ対向させるように用いて構成され、該２つのコマの間に前記コイルの渡り線を挟み込むように固定したことを特徴としている。 According to a third aspect of the present invention, in the cylindrical linear motor according to the second aspect of the present invention, the jumper drop prevention piece is configured so that two pieces formed in a downward L-shape are opposed to each other in a front sectional view. The coil is fixed so that the connecting wire of the coil is sandwiched between the two frames.
また、請求項４に記載の発明は、請求項２記載の円筒形リニアモータにおいて、前記渡り線落下防止コマは、正断面視で下向きに開口部を有し、内部に空洞部を有する略Ｃ字状に形成されたコマで構成され、該コマに形成された空洞部に前記コイルの渡り線を埋設したことを特徴としている。 According to a fourth aspect of the present invention, there is provided the cylindrical linear motor according to the second aspect, wherein the crossover drop prevention piece has an opening portion facing downward in a front sectional view and has a hollow portion therein. It is composed of a frame formed in a letter shape, and the connecting wire of the coil is embedded in a hollow portion formed in the frame.
請求項１に記載の発明によると、各相の渡り線は周方向に３６０度／Ｎの位置に配置されるため、各相の渡り線同士の接触は無くなり、相間絶縁の低下を防ぐことができる。 According to the first aspect of the present invention, since the connecting wires of each phase are arranged at a position of 360 degrees / N in the circumferential direction, there is no contact between the connecting wires of each phase, thereby preventing a decrease in interphase insulation. it can.
請求項２に記載の発明によると、絶縁物より成る渡り線落下防止コマを設けることで、渡り線を金属パイプに設けられる凸部に固定することができ、リング状のコイルとの接触を防ぐことができ、渡り線とコイルの接触による相間絶縁の低下を防ぐことができる。 According to the second aspect of the present invention, by providing the connecting wire fall prevention piece made of an insulating material, the connecting wire can be fixed to the convex portion provided on the metal pipe, thereby preventing contact with the ring-shaped coil. It is possible to prevent the interphase insulation from being lowered due to the contact between the crossover and the coil.
請求項３に記載の発明によると、渡り線をＬ字形状の渡り線落下防止コマで挟み込み固定するため、各コイルから立ち上がる渡り線を容易に軸方向に整列でき、作業性良く渡り線とコイルの接触による相間絶縁の低下を防ぐことができる。 According to the invention described in claim 3, since the jumper is sandwiched and fixed by the L-shaped jumper drop prevention piece, the jumper rising from each coil can be easily aligned in the axial direction, and the jumper and the coil can be easily operated. It is possible to prevent the interphase insulation from being deteriorated due to the contact.
請求項４に記載の発明によると、渡り線が略Ｃ形状の絶縁物より成る渡り線落下防止コマで包まれるため、渡り線とフレームとの地絡を防ぐことができる。 According to the fourth aspect of the invention, since the crossover is wrapped with the crossover fall prevention piece made of a substantially C-shaped insulator, it is possible to prevent a ground fault between the crossover and the frame.
以下、本発明の実施の形態について図を参照して説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
図１は本発明の第１実施例を示す３相の円筒形リニアモータの側断面図である。図２は図１中のＡ−Ａ‘における正断面図である。なお、本発明の構成要素が従来技術と同じものについてはその説明を省略し、異なる点について説明する。
図１において、９は金属パイプ、１０は凸部、５１、５２、５３はそれぞれＵ相、Ｖ相、Ｗ相コイルの渡り線である。
本発明の特徴は以下のとおりである。
固定子１は円筒状の磁性体で作られたヨークとなる金属パイプ９の内径側に、電気装荷手段となる円筒状に巻回して構成されるＵ相、Ｖ相、Ｗ相より成るコイル４を軸方向に複数並べ構成している。金属パイプ９の周方向に、図２に示すように１２０度ピッチで軸方向に延びるように配置された凸部１０が設けられており、該凸部１０にＵ相、Ｖ相、Ｗ相コイルの渡り線５１、５２、５３をそれぞれ埋設している。すなわち、該凸部１０は、コイルの相数をＮとした場合、３６０度／Ｎの角度ピッチで金属パイプの周方向に配置されることになる。
可動子２は軸方向に伸びる円筒状のキャン７の内側に、磁気装荷手段となる円筒状の永久磁石６を軸方向に複数挿設して構成している。
このように本実施例では各相の渡り線は周方向に１２０℃の位置に配置されるため、各相の渡り線同士の接触を無くすことができる。
FIG. 1 is a side sectional view of a three-phase cylindrical linear motor showing a first embodiment of the present invention. FIG. 2 is a front sectional view taken along line AA ′ in FIG. In addition, the description is abbreviate | omitted about the same component of this invention as a prior art, and a different point is demonstrated.
In FIG. 1, 9 is a metal pipe, 10 is a convex part, 51, 52, and 53 are crossovers of U-phase, V-phase, and W-phase coils, respectively.
The features of the present invention are as follows.
The stator 1 is a coil 4 made of a U-phase, V-phase, and W-phase, which is formed by winding in a cylindrical shape serving as an electric loading means on the inner diameter side of a metal pipe 9 serving as a yoke made of a cylindrical magnetic material. Are arranged side by side in the axial direction. In the circumferential direction of the metal pipe 9, as shown in FIG. 2, convex portions 10 are provided so as to extend in the axial direction at a pitch of 120 degrees, and U-phase, V-phase, and W-phase coils are provided on the convex portions 10. Connecting wires 51, 52 and 53 are buried. That is, when the number of phases of the coil is N, the convex portions 10 are arranged in the circumferential direction of the metal pipe at an angular pitch of 360 degrees / N.
The mover 2 is constituted by inserting a plurality of cylindrical permanent magnets 6 serving as magnetic loading means in the axial direction inside a cylindrical can 7 extending in the axial direction.
Thus, in the present embodiment, the connecting wires of the respective phases are arranged at a position of 120 ° C. in the circumferential direction, so that the connecting wires of the connecting wires of the respective phases can be eliminated.
図３は本発明の第２実施例を示す３相の円筒形リニアモータの正断面図である。
第２実施例が第１実施例と異なる点は、以下のとおりである。
すなわち、Ｕ相、Ｖ相、Ｗ相の渡り線５１、５２、５３が埋設される凸部１０に、該凸部１０の内壁の一部に沿うような外面形状を有し、かつ、該渡り線の脱落を防止するための絶縁物より成る渡り線落下防止コマ１１を設けている。該コマ１１は、正断面視でコイルの内径側中心に向かって下向きＬ字状に形成されたものを２つ対向させるように用いて構成され、該２つのコマ１１の間にコイルから立ち上がる渡り線を挟み込むように固定している。
本発明の第２実施例は、渡り線をＬ字形状の渡り線落下防止コマで挟み込み固定することで、各コイルから立ち上がる渡り線を容易に軸方向に整列でき、作業性良く渡り線とコイルの接触による相間絶縁の低下を防ぐことができる。
FIG. 3 is a front sectional view of a three-phase cylindrical linear motor showing a second embodiment of the present invention.
The second embodiment is different from the first embodiment as follows.
That is, the convex portion 10 in which the U-phase, V-phase, and W-phase connecting wires 51, 52, and 53 are embedded has an outer surface shape along a part of the inner wall of the convex portion 10, and the crossover A crossover drop prevention piece 11 made of an insulating material for preventing the line from falling off is provided. The top 11 is configured by using two pieces formed in an L shape downwardly facing the inner diameter side center of the coil in a front sectional view, and a cross rising up from the coil between the two tops 11. It is fixed so as to sandwich the wire.
In the second embodiment of the present invention, the crossover wire rising from each coil can be easily aligned in the axial direction by sandwiching and fixing the crossover wire with an L-shaped crossover drop prevention piece. It is possible to prevent the interphase insulation from being deteriorated due to the contact.
図４は本発明の第３実施例を示す３相の円筒形リニアモータの正断面図である。
第３実施例が第１実施例、第２実施例と異なる点は、以下のとおりである。
すなわち、Ｕ相、Ｖ相、Ｗ相の渡り線５１、５２、５３が埋設される凸部１０に、該凸部１０の内壁に沿うような外面形状を有し、かつ、該渡り線の脱落を防止するための絶縁物より成る渡り線落下防止コマ１２を設けている。該コマ１２は、正断面視でコイルの内径側中心に向かって下向きに開口部１２２を有し、内部に空洞部１２１を有する略Ｃ字状に形成されたもので構成され、該コマ１２に形成された空洞部１２１にコイルの渡り線を埋設した点である。
本発明の第３実施例はこうすることにより、略Ｃ形状の絶縁物より成る渡り線落下防止コマで各相の渡り線が包まれるため、渡り線とフレームとの地絡も防ぐことができる。
FIG. 4 is a front sectional view of a three-phase cylindrical linear motor showing a third embodiment of the present invention.
The third embodiment is different from the first embodiment and the second embodiment as follows.
That is, the convex portion 10 in which the U-phase, V-phase, and W-phase connecting wires 51, 52, and 53 are embedded has an outer surface shape along the inner wall of the convex portion 10, and the connecting wire is dropped. A crossover dropping prevention piece 12 made of an insulating material is provided. The top 12 is formed in a substantially C shape having an opening 122 downward toward the inner diameter side center of the coil in a front sectional view and having a hollow portion 121 inside. This is a point in which the connecting wire of the coil is embedded in the formed cavity 121.
In this way, the third embodiment of the present invention can prevent a ground fault between the connecting wire and the frame because the connecting wire of each phase is wrapped with the connecting wire drop prevention piece made of a substantially C-shaped insulator. .
本発明の３相の円筒形リニアモータによると、産業用途のリニアモータに必要な絶縁信頼性を十分確保し、絶縁劣化から来る故障を防ぐことが可能なので、高信頼性を必要とする液晶・半導体製造装置あるいは検査装置のほか、例えば、チップマウンタのヘッドなどにも適用することができる。 According to the three-phase cylindrical linear motor of the present invention, it is possible to ensure sufficient insulation reliability necessary for linear motors for industrial use and to prevent failures caused by insulation deterioration. In addition to a semiconductor manufacturing apparatus or an inspection apparatus, for example, it can be applied to a chip mounter head.
１ 固定子
２ 可動子
３ 支持機構
４ Ｕ相、Ｖ相、Ｗ相コイル
５ 渡り線
５１ Ｕ相の渡り線
５２ Ｖ相の渡り線
５３ Ｗ相の渡り線
６ 永久磁石
７ キャン
８ ヨーク
９ 金属パイプ
１０ 凸部
１１ 渡り線落下防止コマ（断面Ｌ字状）
１２ 渡り線落下防止コマ（断面Ｃ字状）
１２１ 空洞部
１２２ 開口部
DESCRIPTION OF SYMBOLS 1 Stator 2 Movable element 3 Support mechanism 4 U-phase, V-phase, W-phase coil 5 Crossover wire 51 U-phase crossover wire 52 V-phase crossover wire 53 W-phase crossover wire 6 Permanent magnet 7 Can 8 Yoke 9 Metal pipe 10 Convex 11 Crossover fall prevention piece (L-shaped cross section)
12 Crossover fall prevention piece (C-shaped cross section)
121 Cavity 122 Opening
Claims (4)
前記固定子の内側に磁気的空隙を介して対向配置されると共に、軸方向に伸びる円筒状の薄肉ステンレス製のキャンの内径側に、磁気装荷手段となる永久磁石を軸方向に複数個挿設して構成される可動子と、
を備えた多相円筒形リニアモータにおいて、
前記金属パイプの周方向に、相数をＮとした場合、３６０度／Ｎの角度ピッチで軸方向に延びるように配置されると共に、前記各相のコイルの渡り線をそれぞれ埋設するための凸部を設けたことを特徴とする円筒形リニアモータ。 A stator configured by arranging a plurality of coils made of a U phase, a V phase, and a W phase wound in a cylindrical shape as an electric loading means in the axial direction on the inner diameter side of a metal pipe made of a cylindrical magnetic body;
A plurality of permanent magnets serving as magnetic loading means are inserted in the axial direction on the inner diameter side of a cylindrical thin-walled stainless steel can that is disposed inside the stator via a magnetic gap and extends in the axial direction. A mover configured as
In a multi-phase cylindrical linear motor with
When the number of phases is N in the circumferential direction of the metal pipe, the metal pipes are arranged so as to extend in the axial direction at an angular pitch of 360 degrees / N, and convex portions for embedding the connecting wires of the coils of the respective phases. A cylindrical linear motor characterized by having a portion.
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| JP2006252283A JP4826776B2 (en) | 2006-09-19 | 2006-09-19 | Cylindrical linear motor |
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| JP2006252283A JP4826776B2 (en) | 2006-09-19 | 2006-09-19 | Cylindrical linear motor |
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| JP2008079358A JP2008079358A (en) | 2008-04-03 |
| JP4826776B2 true JP4826776B2 (en) | 2011-11-30 |
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| JP5496159B2 (en) * | 2011-09-07 | 2014-05-21 | 三菱電機株式会社 | Cylindrical linear motor and winding method of stator coil of cylindrical linear motor |
| WO2014141317A1 (en) * | 2013-03-12 | 2014-09-18 | 三菱電機株式会社 | Interphase insulation structure for motor |
| JP2015065746A (en) * | 2013-09-24 | 2015-04-09 | 山洋電気株式会社 | Linear motor |
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| JP2000004575A (en) * | 1998-04-13 | 2000-01-07 | Hitachi Metals Ltd | Linear drive actuator |
| JP4711181B2 (en) * | 2005-01-17 | 2011-06-29 | 株式会社安川電機 | Cylindrical linear motor armature coil winding method, cylindrical linear motor stator, and cylindrical linear motor using the same |
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