TW201312849A - Manufacturing process of laminated type balun - Google Patents

Manufacturing process of laminated type balun Download PDF

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TW201312849A
TW201312849A TW100133192A TW100133192A TW201312849A TW 201312849 A TW201312849 A TW 201312849A TW 100133192 A TW100133192 A TW 100133192A TW 100133192 A TW100133192 A TW 100133192A TW 201312849 A TW201312849 A TW 201312849A
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conductive layer
layer unit
wire segment
unit
insulating layer
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TWI478436B (en
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Bin-Qi Zeng
guo-feng Liu
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Max Echo Technology Corp
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Abstract

The present invention provides a manufacturing process of laminated type balun, which includes the following steps: preparing a first lower conductive layer unit on a lower substrate, wherein the first lower conductive layer unit includes a first lower insulating layer and a first lower conductor segment; preparing a first middle conductive layer on the first lower conductive layer, wherein the first middle conductive layer unit includes a first middle insulating layer and a first middle conductor segment, and the first middle conductive layer unit is made by first cutting a through hole in the insulating material, and then disposing the conductive material within the through hole, and the insulating material and the conductive material may respectively form the first middle insulating layer and the first middle conductor segment; and, preparing a first upper conductive layer unit, a second lower conductive layer unit, a second middle conductive layer unit, a second upper conductive layer unit, and an upper substrate. The present invention employs the layer-by-layer manufacturing process, which needs no precise alignment for manufacturing to reduce the manufacturing difficulty and cost.

Description

積層式平衡非平衡轉換器製程Stacked balanced unbalanced converter process

本發明是有關於一種平衡非平衡轉換器製程,特別是指一種積層式平衡非平衡轉換器製程。The invention relates to a balanced unbalanced converter process, in particular to a laminated balanced unbalanced converter process.

在成功大學的碩士論文「利用複合材料實現小型化半集總式低溫陶瓷共燒平衡非平衡轉換器」中提到了一種LTCC(Low Temperature Co-fired Ceramic)製程。此種製程是在陶瓷玻璃內加入其他材料,並於多層疊壓後形成一三度空間的結構體,此種結構體即可作為元件或基板使用。此種製程主要的步驟是先在複數陶瓷生胚上進行填孔佈線的動作成為陶瓷基板,接著再將該等陶瓷基板予以對準及堆疊,最後進行切割、共燒、後段製程完成成品。然而,此種製程卻有著下列的缺點:在對準及堆疊的過程中,必需要非常精密調整該等陶瓷基板的位置,否則將會導致該等陶瓷基板無法精準彼此導通。由於此種製程要求相當高的精密度,造成了在應用此製程上的困難度,大幅增加了生產成本。A LTCC (Low Temperature Co-fired Ceramic) process is mentioned in the master's thesis of the successful university "Using composite materials to realize miniaturized semi-lumped low-temperature ceramic co-fired balanced unbalanced converter". This type of process is a structure in which a ceramic material is added to a ceramic glass to form a three-dimensional space after lamination, and the structure can be used as an element or a substrate. The main steps of this process are to first perform the filling operation on the plurality of ceramic green sheets to become the ceramic substrate, and then align and stack the ceramic substrates, and finally perform the cutting, co-firing, and finishing processes to complete the finished product. However, such a process has the following disadvantages: in the process of alignment and stacking, it is necessary to precisely adjust the position of the ceramic substrates, otherwise the ceramic substrates cannot be accurately connected to each other. Due to the relatively high precision required for such a process, the difficulty in applying this process is greatly increased, and the production cost is greatly increased.

因此,本發明之目的,即在提供一種易於製備的積層式平衡非平衡轉換器製程。Accordingly, it is an object of the present invention to provide a layered balanced balun process which is easy to prepare.

於是,本發明積層式平衡非平衡轉換器製程,包含以下步驟:(A)製備一下基板,(B)於該下基板上製備一第一下導電層單元,該第一下導電層單元具有一第一下絕緣層及一設置於該第一下絕緣層上的第一下導線段,(C)在該第一下導電層單元上製備至少一第一中導電層單元,該第一中導電層單元具有一第一中絕緣層,及一設置於該第一中絕緣層上且與該第一下導線段電連接的第一中導線段,該第一中導電層單元的製造流程是先將絕緣材料挖開一穿孔,接著將導電材料設置於該穿孔內,絕緣材料及導電材料分別形成該第一中絕緣層及該第一中導線段,(D)在該第一中導電層單元上製備一第一上導電層單元,該第一上導電層單元具有一第一上絕緣層,及一設置於該第一上絕緣層且與該第一中導線段電連接的第一上導線段,(E)於該第一上導電層單元上製備一第二下導電層單元,該第二下導電層單元具有一第二下絕緣層及一設置於該第二下絕緣層上的第二下導線段,(F)在該第二下導電層單元上製備至少一第二中導電層單元,該第二中導電層單元具有一第二中絕緣層,及一設置於該第二中絕緣層上且與該第二下導線段電連接的第二中導線段,該第二中導電層單元的製造流程是先將絕緣材料挖開一穿孔,接著將導電材料設置於該穿孔內,絕緣材料及導電材料分別形成該第二中絕緣層及該第二中導線段,(G)在該第二中導電層單元上製備一第二上導電層單元,該第二上導電層單元具有一第二上絕緣層,及一設置於該第二上絕緣層且與該第二中導線段電連接的第二上導線段,(H)在該第二上導電層單元上製備一上基板,該下基板、該第一下導電層單元、該第一中導電層單元、該第一上導電層單元、該第二下導電層單元、該第二中導電層單元、該第二上導電層單元、該上基板組成一待加工的單體,(I)在該單體上燒結四導電端,使該等導電端分別與該單體的第一下導線段、第一上導線段、第二下導線段、第二上導線段電連接。Therefore, the laminated unbalanced converter process of the present invention comprises the steps of: (A) preparing a substrate, and (B) preparing a first lower conductive layer unit on the lower substrate, the first lower conductive layer unit having a a first lower insulating layer and a first lower wire segment disposed on the first lower insulating layer, (C) preparing at least one first intermediate conductive layer unit on the first lower conductive layer unit, the first conductive layer The layer unit has a first intermediate insulating layer, and a first middle wire segment disposed on the first intermediate insulating layer and electrically connected to the first lower wire segment. The manufacturing process of the first conductive layer unit is first Digging a hole through the insulating material, and then placing a conductive material in the through hole, the insulating material and the conductive material respectively forming the first intermediate insulating layer and the first middle wire segment, and (D) the first conductive layer unit Forming a first upper conductive layer unit, the first upper conductive layer unit having a first upper insulating layer, and a first upper conductive line disposed on the first upper insulating layer and electrically connected to the first middle conductive portion a segment, (E) preparing a first on the first upper conductive layer unit a lower conductive layer unit, the second lower conductive layer unit has a second lower insulating layer and a second lower wire segment disposed on the second lower insulating layer, and (F) is prepared on the second lower conductive layer unit At least one second conductive layer unit, the second conductive layer unit has a second intermediate insulating layer, and a second intermediate conductor disposed on the second intermediate insulating layer and electrically connected to the second lower conductive segment The manufacturing process of the second conductive layer unit is to first dig a hole through the insulating material, and then place a conductive material in the through hole, and the insulating material and the conductive material respectively form the second intermediate insulating layer and the second middle portion a wire segment, (G) preparing a second upper conductive layer unit on the second conductive layer unit, the second upper conductive layer unit having a second upper insulating layer, and a second upper insulating layer disposed on the second conductive layer a second upper wire segment electrically connected to the second middle wire segment, (H) preparing an upper substrate on the second upper conductive layer unit, the lower substrate, the first lower conductive layer unit, and the first middle conductive layer Layer unit, the first upper conductive layer unit, the second lower conductive layer The second conductive layer unit, the second upper conductive layer unit, the upper substrate constitute a monomer to be processed, and (I) sintering four conductive ends on the single body, so that the conductive ends are respectively associated with the single The first lower wire segment, the first upper wire segment, the second lower wire segment, and the second upper wire segment of the body are electrically connected.

因此,本發明之另一目的,即在提供一種易於製備的積層式平衡非平衡轉換器製程。Accordingly, it is another object of the present invention to provide a layered balanced balun process which is easy to prepare.

於是,本發明積層式平衡非平衡轉換器製程,包含以下步驟:(A)製備一下基板,(B)於該下基板上製備複數第一下導電層單元,該等第一下導電層單元分別具有一第一下絕緣層及一設置於該第一下絕緣層上的第一下導線段,(C)在該等第一下導電層單元上分別製備至少一第一中導電層單元,該等第一中導電層單元分別具有一第一中絕緣層,及一設置於該第一中絕緣層上且與該第一下導線段電連接的第一中導線段,該第一中導電層單元的製造流程是先將絕緣材料挖開一穿孔,接著將導電材料設置於該穿孔內,絕緣材料及導電材料分別形成該第一中絕緣層及該第一中導線段,(D)在該等第一中導電層單元上分別製備一第一上導電層單元,該等第一上導電層單元分別具有一第一上絕緣層,及一設置於該第一上絕緣層且與該第一中導線段電連接的第一上導線段,(E)於該等第一上導電層單元上製備複數第二下導電層單元,該等第二下導電層單元分別具有一第二下絕緣層及一設置於該第二下絕緣層上的第二下導線段,(F)在該等第二下導電層單元上分別製備至少一第二中導電層單元,該等第二中導電層單元分別具有一第二中絕緣層,及一設置於該第二中絕緣層上且與該第二下導線段電連接的第二中導線段,該第二中導電層單元的製造流程是先將絕緣材料挖開一穿孔,接著將導電材料設置於該穿孔內,絕緣材料及導電材料分別形成該第二中絕緣層及該第二中導線段,(G)在該等第二中導電層單元上分別製備一第二上導電層單元,該等第二上導電層單元分別具有一第二上絕緣層,及一設置於該第二上絕緣層且與該第二中導線段電連接的第二上導線段,(H)在該等第二上導電層單元上製備一上基板,該下基板、該等第一下導電層單元、該等第一中導電層單元、該等第一上導電層單元、該等第二下導電層單元、該等第二中導電層單元、該等第二上導電層單元、該上基板組成一待加工的本體,(I)將該本體沿縱方向切割成複數單體,(J)在該等單體上分別燒結四導電端,使該等導電端分別與該單體的第一下導線段、第一上導線段、第二下導線段、第二上導線段電連接。Therefore, the process of the laminated balanced unbalanced converter of the present invention comprises the steps of: (A) preparing a substrate, and (B) preparing a plurality of first lower conductive layer units on the lower substrate, wherein the first lower conductive layer units respectively Having a first lower insulating layer and a first lower wire segment disposed on the first lower insulating layer, (C) preparing at least one first intermediate conductive layer unit on the first lower conductive layer units, The first intermediate conductive layer unit has a first intermediate insulating layer and a first intermediate conductive segment disposed on the first intermediate insulating layer and electrically connected to the first lower conductive segment, the first conductive layer The manufacturing process of the unit is to first dig a hole through the insulating material, and then place a conductive material in the through hole, and the insulating material and the conductive material respectively form the first intermediate insulating layer and the first middle wire segment, wherein (D) Forming a first upper conductive layer unit on each of the first conductive layer units, the first upper conductive layer units respectively having a first upper insulating layer, and one disposed on the first upper insulating layer and the first a first upper wire segment electrically connected to the middle wire segment, ( E) preparing a plurality of second lower conductive layer units on the first upper conductive layer units, wherein the second lower conductive layer units respectively have a second lower insulating layer and a second insulating layer disposed on the second lower insulating layer a second lower conductive layer, (F) respectively preparing at least one second intermediate conductive layer unit on the second lower conductive layer unit, wherein the second middle conductive layer units respectively have a second intermediate insulating layer, and one is disposed on a second intermediate conductor segment electrically connected to the second lower conductor segment and the second intermediate conductor segment is formed by first digging a hole in the insulating material and then placing the conductive material on the second intermediate conductor segment In the perforation, the insulating material and the conductive material respectively form the second intermediate insulating layer and the second intermediate conducting segment, and (G) preparing a second upper conductive layer unit on the second intermediate conductive layer units, respectively The second upper conductive layer unit respectively has a second upper insulating layer, and a second upper wire segment disposed on the second upper insulating layer and electrically connected to the second middle wire segment, (H) in the second Preparing an upper substrate on the upper conductive layer unit, the lower substrate, the first a conductive layer unit, the first intermediate conductive layer unit, the first upper conductive layer unit, the second lower conductive layer unit, the second middle conductive layer unit, the second upper conductive layer unit, The upper substrate constitutes a body to be processed, (I) the body is cut into a plurality of monomers in the longitudinal direction, and (J) the four conductive ends are respectively sintered on the monomers, so that the conductive ends are respectively associated with the single The first lower wire segment, the first upper wire segment, the second lower wire segment, and the second upper wire segment are electrically connected.

本發明之功效在於,透過逐層依序製備,可輕易的對準各層使各層照設計導通,並不需要相當高精密的對準技術,藉此可大幅降低生產成本。The effect of the invention is that, by layer-by-layer sequential preparation, the layers can be easily aligned to make the layers be designed to be turned on, and a relatively high precision alignment technique is not required, thereby greatly reducing the production cost.

有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之數個較佳實施例的詳細說明中,將可清楚的呈現。The above and other technical features, features, and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments.

在本發明被詳細描述之前,要注意的是,在以下的說明內容中,類似的元件是以相同的編號來表示。Before the present invention is described in detail, it is noted that in the following description, similar elements are denoted by the same reference numerals.

參閱圖1、圖2與圖3,本發明積層式平衡非平衡轉換器製程之第一較佳實施例包含以下步驟:在一步驟100中,製備一下基板1。Referring to Figures 1, 2 and 3, a first preferred embodiment of the laminated balanced balun process of the present invention comprises the steps of: in a step 100, preparing a substrate 1.

在一步驟101中,於該下基板1上以網版印刷方式製備一第一下導電層單元2,該第一下導電層單元2具有一第一下絕緣層21,及一以網版印刷方式製備設置於該第一下絕緣層21上的第一下導線段22。In a step 101, a first lower conductive layer unit 2 is prepared on the lower substrate 1 by screen printing, the first lower conductive layer unit 2 has a first lower insulating layer 21, and one is screen-printed. The first lower wire segment 22 disposed on the first lower insulation layer 21 is prepared in a manner.

在一步驟102中,在該第一下導電層單元2上以網版印刷方式製備一第一中導電層單元3,該第一中導電層單元3具有一第一中絕緣層31,及一以網版印刷方式製備設置於該第一中絕緣層31上且與該第一下導線段22電連接的第一中導線段32。In a step 102, a first medium conductive layer unit 3 is prepared on the first lower conductive layer unit 2 by screen printing, and the first middle conductive layer unit 3 has a first intermediate insulating layer 31, and a A first intermediate wire segment 32 disposed on the first intermediate insulating layer 31 and electrically connected to the first lower wire segment 22 is prepared by screen printing.

該第一中導電層單元3的製造流程是先將絕緣材料300挖開一穿孔301,接著將導電材料400設置於該穿孔301內,絕緣材料300及導電材料400分別形成該第一中絕緣層31及該第一中導線段32。The manufacturing process of the first conductive layer unit 3 is to first dig a through hole 301 of the insulating material 300, and then the conductive material 400 is disposed in the through hole 301, and the insulating material 300 and the conductive material 400 respectively form the first intermediate insulating layer. 31 and the first middle wire segment 32.

在一步驟103中,在該第一中導電層單元3上以網版印刷方式製備一第一上導電層單元4,該第一上導電層單元4具有一第一上絕緣層41,及一以網版印刷方式製備設置於該第一上絕緣層41且與該第一中導線電段32連接的第一上導線段42。In a step 103, a first upper conductive layer unit 4 is prepared on the first conductive layer unit 3 by screen printing, and the first upper conductive layer unit 4 has a first upper insulating layer 41, and a A first upper wire segment 42 disposed on the first upper insulating layer 41 and connected to the first intermediate wire electrical segment 32 is prepared in a screen printing manner.

在一步驟104中,於該第一上導電層單元4上以網版印刷方式製備一第二下導電層單元5,該第二下導電層單元5具有一第二下絕緣層51,及一以網版印刷方式製備設置於該第二下絕緣層51上的第二下導線段52。In a step 104, a second lower conductive layer unit 5 is formed on the first upper conductive layer unit 4 by screen printing, and the second lower conductive layer unit 5 has a second lower insulating layer 51, and a The second lower wire segment 52 disposed on the second lower insulating layer 51 is prepared by screen printing.

在一步驟105中,在該第二下導電層單元5上以網版印刷方式製備一第二中導電層單元6,該第二中導電層單元6具有一第二中絕緣層61,及一以網版印刷方式製備設置於該第二中絕緣層61上且與該第二下導線段52電連接的第二中導線段62。In a step 105, a second intermediate conductive layer unit 6 is prepared on the second lower conductive layer unit 5 by screen printing, and the second middle conductive layer unit 6 has a second intermediate insulating layer 61, and a A second intermediate wire segment 62 disposed on the second intermediate insulating layer 61 and electrically connected to the second lower wire segment 52 is prepared by screen printing.

該第二中導電層單元6的製造流程是先將絕緣材料300挖開一穿孔301,接著將導電材料400設置於該穿孔301內,絕緣材料300及導電材料400分別形成該第二中絕緣層61及該第二中導線段62。The manufacturing process of the second conductive layer unit 6 is to first dig the insulating material 300 into a through hole 301, and then the conductive material 400 is disposed in the through hole 301, and the insulating material 300 and the conductive material 400 respectively form the second intermediate insulating layer. 61 and the second middle wire segment 62.

在一步驟106中,在該第二中導電層單元6上以網版印刷方式製備一第二上導電層單元7,該第二上導電層單元7具有一第二上絕緣層71,及一以網版印刷方式製備設置於該第二上絕緣層71且與該第二中導線段62電連接的第二上導線段72。In a step 106, a second upper conductive layer unit 7 is formed on the second conductive layer unit 6 by screen printing, and the second upper conductive layer unit 7 has a second upper insulating layer 71, and a A second upper wire segment 72 disposed on the second upper insulating layer 71 and electrically connected to the second intermediate wire segment 62 is prepared by screen printing.

在一步驟107中,在該第二上導電層單元7上製備一上基板8,該下基板1、該第一下導電層單元2、該第一中導電層單元3、該第一上導電層單元4、該第二下導電層單元5、該第二中導電層單元6、該第二上導電層單元7、該上基板8組成一待加工的單體500。In a step 107, an upper substrate 8 is prepared on the second upper conductive layer unit 7, the lower substrate 1, the first lower conductive layer unit 2, the first middle conductive layer unit 3, and the first upper conductive layer. The layer unit 4, the second lower conductive layer unit 5, the second middle conductive layer unit 6, the second upper conductive layer unit 7, and the upper substrate 8 constitute a monomer 500 to be processed.

在一步驟108中,在該單體500上燒結四導電端9,使該等導電端9分別與該單體500的第一下導線段22、第一上導線段42、第二下導線段52、第二上導線段72電連接,並以一金屬對該等導電端9進行電鍍。In a step 108, four conductive ends 9 are sintered on the cell 500 such that the conductive ends 9 are respectively associated with the first lower wire segment 22, the first upper wire segment 42, and the second lower wire segment of the cell 500. 52. The second upper wire segment 72 is electrically connected, and the conductive terminals 9 are plated with a metal.

值得一提的是,該第一下絕緣層21、第一中絕緣層31、第一上絕緣層41、第二下絕緣層51、第二中絕緣層61及第二上絕緣層71是以玻璃陶瓷製成,該第一下導線段22、第一中導線段32、第一上導線段42、第二下導線段52、第二中導線段62、第二上導線段72及該等導電端9是以銀製成,絕緣材料300是玻璃陶瓷,導電材料400是銀。It is to be noted that the first lower insulating layer 21, the first intermediate insulating layer 31, the first upper insulating layer 41, the second lower insulating layer 51, the second intermediate insulating layer 61 and the second upper insulating layer 71 are Made of glass ceramic, the first lower wire segment 22, the first middle wire segment 32, the first upper wire segment 42, the second lower wire segment 52, the second middle wire segment 62, the second upper wire segment 72, and the like The conductive end 9 is made of silver, the insulating material 300 is glass ceramic, and the conductive material 400 is silver.

此外,值得一提的是,該第一下絕緣層21與該下基板1呈一體狀。In addition, it is worth mentioning that the first lower insulating layer 21 is integral with the lower substrate 1.

參閱圖4,本發明積層式平衡非平衡轉換器製程的第二較佳實施例與該第一較佳實施例構件與組裝方式大致相同,不同處在於該第二較佳實施例中,在該步驟104中,該第二下導電層單元5位於該第一下導電層單元2上,在該步驟105中,該第二中導電層單元6位於該第一中導電層單元3上,在該步驟106中,該第二上導電層單元7位於該第一上導電層單元4上,更進一步說明的是,在本第二較佳實施例中,交替實施該步驟102與步驟104,製備複數個第一中導電層單元3與複數個第二中導電層單元6,該等第一中導線段32還形成於該第二下導電層單元5與該等第二中導電層單元6,該等第二中導線段62還形成於該等第一中導電層單元3與該第一上導電層單元4。Referring to FIG. 4, the second preferred embodiment of the laminated balanced balun process of the present invention is substantially the same as the first preferred embodiment of the component and the assembly method, except that in the second preferred embodiment, In step 104, the second lower conductive layer unit 5 is located on the first lower conductive layer unit 2, and in the step 105, the second middle conductive layer unit 6 is located on the first middle conductive layer unit 3, where In step 106, the second upper conductive layer unit 7 is located on the first upper conductive layer unit 4. Further, in the second preferred embodiment, the step 102 and the step 104 are alternately performed to prepare a plurality of The first middle conductive layer unit 3 and the plurality of second middle conductive layer units 6 are formed on the second lower conductive layer unit 5 and the second middle conductive layer unit 6 . The second middle wire segment 62 is also formed in the first middle conductive layer unit 3 and the first upper conductive layer unit 4.

參閱圖5,本發明積層式平衡非平衡轉換器製程的第三較佳實施例與該第一較佳實施例構件與組裝方式大致相同,不同處在於該第三較佳實施例中,在該步驟101至步驟106中,該第一下導電層單元2、該等第一中導電層單元3、該第一上導電層單元4、該第二下導電層單元5、該等第二中導電層單元6、該第二下導電層單元7分別還包括一鐵心部600,該等鐵心部600彼此沿縱方向連接形成塊體狀。Referring to FIG. 5, a third preferred embodiment of the laminated balanced balun process of the present invention is substantially the same as the first preferred embodiment of the component and the assembly method, except that in the third preferred embodiment, In step 101 to step 106, the first lower conductive layer unit 2, the first middle conductive layer unit 3, the first upper conductive layer unit 4, the second lower conductive layer unit 5, and the second middle conductive Each of the layer unit 6 and the second lower conductive layer unit 7 further includes a core portion 600 which is connected to each other in the longitudinal direction to form a block shape.

參閱圖6、圖7與圖8,本發明積層式平衡非平衡轉換器製程的第四較佳實施例與該第一較佳實施例構件與組裝方式大致相同,不同處在於該第四較佳實施例中,自步驟200至步驟208是一次同時製備多數個下基板1、第一下導電層單元2、第一中導電層單元3、第一上導電層單元4、第二下導電層單元5、第二中導電層單元6、第二上導電層單元7及上基板8,組成待加工的一本體700,接著,在一步驟208中,將該本體700切割成複數單體500。Referring to FIG. 6 , FIG. 7 and FIG. 8 , the fourth preferred embodiment of the laminated balanced balun process of the present invention is substantially the same as the first preferred embodiment of the component and the assembly method, and the difference lies in the fourth preferred embodiment. In the embodiment, from step 200 to step 208, a plurality of lower substrates 1, a first lower conductive layer unit 2, a first middle conductive layer unit 3, a first upper conductive layer unit 4, and a second lower conductive layer unit are simultaneously prepared at one time. 5. The second intermediate conductive layer unit 6, the second upper conductive layer unit 7, and the upper substrate 8 constitute a body 700 to be processed. Then, in a step 208, the body 700 is cut into a plurality of cells 500.

綜上所述,透過逐層製備的方式製作平衡非平衡轉換器,可避免如習知技術一般進行高精密度對準作業,不需精確對準就能生產製備,藉此,可大幅減低生產的困難度節省生產成本,故確實能達成本發明之目的。In summary, the balanced unbalanced converter is fabricated by layer-by-layer preparation, which avoids high-precision alignment operations as in the prior art, and can be produced without precise alignment, thereby greatly reducing production. The difficulty of saving the production cost makes it possible to achieve the object of the present invention.

惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent.

1...下基板1. . . Lower substrate

2...第一下導電單元2. . . First lower conductive unit

21...第一下絕緣層twenty one. . . First lower insulation layer

22...第一下導線段twenty two. . . First lower wire segment

3...第一中導電單元3. . . First medium conductive unit

31...第一中絕緣層31. . . First intermediate insulation

32...第一中導線段32. . . First middle wire segment

4...第一上導電單元4. . . First upper conductive unit

41...第一上絕緣層41. . . First upper insulating layer

42...第一上導線段42. . . First upper wire segment

5...第二下導電單元5. . . Second lower conductive unit

51...第二下絕緣層51. . . Second lower insulation layer

52...第二下導線段52. . . Second lower wire segment

6...第二中導電單元6. . . Second conductive unit

61...第二中絕緣層61. . . Second intermediate insulation

62...第二中導線段62. . . Second middle wire segment

7...第二上導電單元7. . . Second upper conductive unit

71...第二上絕緣層71. . . Second upper insulating layer

72...第二上導線段72. . . Second upper wire segment

8...上基板8. . . Upper substrate

9...導電端9. . . Conductive end

100...步驟100. . . step

101...步驟101. . . step

102...步驟102. . . step

103...步驟103. . . step

104...步驟104. . . step

105...步驟105. . . step

106...步驟106. . . step

107...步驟107. . . step

108...步驟108. . . step

200...步驟200. . . step

201...步驟201. . . step

202...步驟202. . . step

203...步驟203. . . step

204...步驟204. . . step

205...步驟205. . . step

206...步驟206. . . step

207...步驟207. . . step

208...步驟208. . . step

209...步驟209. . . step

300...絕緣材料300. . . Insulation Materials

301...穿孔301. . . perforation

400...導電材料400. . . Conductive material

500...單體500. . . monomer

600...鐵心部600. . . Iron core

700...本體700. . . Ontology

圖1是本發明積層式平衡非平衡轉換器製程之第一較佳實施例的一流程圖;1 is a flow chart of a first preferred embodiment of a process for a laminated balanced balun of the present invention;

圖2是流程圖,說明該第一較佳實施例接續圖1的流程;Figure 2 is a flow chart illustrating the flow of the first preferred embodiment continuing from Figure 1;

圖3是該第一較佳實施例的一分解立體圖,說明由下至上的製備示意;Figure 3 is an exploded perspective view of the first preferred embodiment illustrating the preparation from bottom to top;

圖4是本發明積層式平衡非平衡轉換器製程之第二較佳實施例的一分解立體圖,說明由下至上的製備示意;Figure 4 is an exploded perspective view showing the second preferred embodiment of the process of the laminated balanced balun of the present invention, illustrating the preparation from bottom to top;

圖5是本發明積層式平衡非平衡轉換器製程之第三較佳實施例的一分解立體圖,說明由下至上的製備示意Figure 5 is an exploded perspective view showing the third preferred embodiment of the process of the laminated balanced balun of the present invention, illustrating the preparation from bottom to top.

圖6是本發明積層式平衡非平衡轉換器製程之第四較佳實施例的一流程圖;6 is a flow chart showing a fourth preferred embodiment of the process of the laminated balanced balun of the present invention;

圖7是流程圖,說明該第四較佳實施例接續圖6的流程;及Figure 7 is a flow chart showing the flow of Figure 4 of the fourth preferred embodiment; and

圖8是該第四較佳實施例的一分解立體圖,說明將一本體切割為複數單體。Figure 8 is an exploded perspective view of the fourth preferred embodiment illustrating the cutting of a body into a plurality of cells.

1...下基板1. . . Lower substrate

2...第一下導電單元2. . . First lower conductive unit

21...第一下絕緣層twenty one. . . First lower insulation layer

22...第一下導線段twenty two. . . First lower wire segment

3...第一中導電單元3. . . First medium conductive unit

31...第一中絕緣層31. . . First intermediate insulation

32...第一中導線段32. . . First middle wire segment

4...第一上導電單元4. . . First upper conductive unit

41...第一上絕緣層41. . . First upper insulating layer

42...第一上導線段42. . . First upper wire segment

5...第二下導電單元5. . . Second lower conductive unit

51...第二下絕緣層51. . . Second lower insulation layer

52...第二下導線段52. . . Second lower wire segment

6...第二中導電單元6. . . Second conductive unit

61...第二中絕緣層61. . . Second intermediate insulation

62...第二中導線段62. . . Second middle wire segment

7...第二上導電單元7. . . Second upper conductive unit

71...第二上絕緣層71. . . Second upper insulating layer

72...第二上導線段72. . . Second upper wire segment

8...上基板8. . . Upper substrate

9...導電端9. . . Conductive end

300...絕緣材料300. . . Insulation Materials

301...穿孔301. . . perforation

400...導電材料400. . . Conductive material

500...單體500. . . monomer

Claims (10)

一種積層式平衡非平衡轉換器製程,包含以下步驟:(A)製備一下基板;(B)於該下基板上製備一第一下導電層單元,該第一下導電層單元具有一第一下絕緣層及一設置於該第一下絕緣層上的第一下導線段;(C)在該第一下導電層單元上製備至少一第一中導電層單元,該第一中導電層單元具有一第一中絕緣層,及一設置於該第一中絕緣層上且與該第一下導線段電連接的第一中導線段,該第一中導電層單元的製造流程是先將絕緣材料挖開一穿孔,接著將導電材料設置於該穿孔內,絕緣材料及導電材料分別形成該第一中絕緣層及該第一中導線段;(D)在該第一中導電層單元上製備一第一上導電層單元,該第一上導電層單元具有一第一上絕緣層,及一設置於該第一上絕緣層且與該第一中導線段電連接的第一上導線段;(E)於該第一上導電層單元上製備一第二下導電層單元,該第二下導電層單元具有一第二下絕緣層及一設置於該第二下絕緣層上的第二下導線段;(F)在該第二下導電層單元上製備至少一第二中導電層單元,該第二中導電層單元具有一第二中絕緣層,及一設置於該第二中絕緣層上且與該第二下導線段電連接的第二中導線段,該第二中導電層單元的製造流程是先將絕緣材料挖開一穿孔,接著將導電材料設置於該穿孔內,絕緣材料及導電材料分別形成該第二中絕緣層及該第二中導線段;(G)在該第二中導電層單元上製備一第二上導電層單元,該第二上導電層單元具有一第二上絕緣層,及一設置於該第二上絕緣層且與該第二中導線段電連接的第二上導線段;(H)在該第二上導電層單元上製備一上基板,該下基板、該第一下導電層單元、該第一中導電層單元、該第一上導電層單元、該第二下導電層單元、該第二中導電層單元、該第二上導電層單元、該上基板組成一待加工的單體;及(I)在該單體上燒結四導電端,使該等導電端分別與該單體的第一下導線段、第一上導線段、第二下導線段、第二上導線段電連接。A laminated balanced unbalanced converter process comprising the steps of: (A) preparing a substrate; (B) preparing a first lower conductive layer unit on the lower substrate, the first lower conductive layer unit having a first lower layer An insulating layer and a first lower wire segment disposed on the first lower insulating layer; (C) preparing at least one first intermediate conductive layer unit on the first lower conductive layer unit, the first conductive layer unit having a first intermediate insulating layer, and a first middle wire segment disposed on the first intermediate insulating layer and electrically connected to the first lower wire segment, the first middle conductive layer unit is manufactured by firstly insulating the material Digging a through hole, then placing a conductive material in the through hole, the insulating material and the conductive material respectively forming the first intermediate insulating layer and the first middle wire segment; (D) preparing a first conductive layer unit on the first conductive layer unit a first upper conductive layer unit having a first upper insulating layer and a first upper wire segment disposed on the first upper insulating layer and electrically connected to the first middle wire segment; E) preparing a second lower conductive layer on the first upper conductive layer unit a second lower conductive layer unit having a second lower insulating layer and a second lower wire segment disposed on the second lower insulating layer; (F) preparing at least one of the second lower conductive layer unit a second conductive layer unit, the second middle conductive layer unit has a second intermediate insulating layer, and a second middle wire segment disposed on the second intermediate insulating layer and electrically connected to the second lower wire segment, The manufacturing process of the second conductive layer unit is to first dig a hole in the insulating material, and then place the conductive material in the through hole, and the insulating material and the conductive material respectively form the second intermediate insulating layer and the second middle wire segment; (G) preparing a second upper conductive layer unit on the second conductive layer unit, the second upper conductive layer unit has a second upper insulating layer, and a second upper insulating layer is disposed on the second upper insulating layer a second upper wire segment electrically connected to the wire segment; (H) preparing an upper substrate on the second upper conductive layer unit, the lower substrate, the first lower conductive layer unit, the first middle conductive layer unit, The first upper conductive layer unit, the second lower conductive layer unit, the first a medium conductive layer unit, the second upper conductive layer unit, the upper substrate constitutes a monomer to be processed; and (I) sintering four conductive ends on the monomer, respectively, the conductive ends are respectively associated with the monomer The lower wire segment, the first upper wire segment, the second lower wire segment, and the second upper wire segment are electrically connected. 根據申請專利範圍第1項所述之積層式平衡非平衡轉換器製程,在該步驟(E)中,該第二下導電層單元位於該第一上導電層單元上。According to the laminated balanced unbalanced converter process of claim 1, in the step (E), the second lower conductive layer unit is located on the first upper conductive layer unit. 根據申請專利範圍第1項所述之積層式平衡非平衡轉換器製程,在該步驟(E)中,該第二下導電層單元位於該第一下導電層單元上,在該步驟(F)中,該第二中導電層單元位於該第一中導電層單元上,在該步驟(G)中,該第二上導電層單元位於該第一上導電層單元上。According to the layered balanced unbalanced converter process of claim 1, in the step (E), the second lower conductive layer unit is located on the first lower conductive layer unit, in the step (F) The second middle conductive layer unit is located on the first middle conductive layer unit, and in the step (G), the second upper conductive layer unit is located on the first upper conductive layer unit. 根據申請專利範圍第3項所述之積層式平衡非平衡轉換器製程,交替實施該步驟(C)與步驟(F),製備複數個第一中導電層單元與複數個第二中導電層單元,該等第一中導線段還形成於該第二下導電層單元與該等第二中導電層單元,該等第二中導線段還形成於該等第一中導電層單元與該第一上導電層單元。The step (C) and the step (F) are alternately performed according to the layered balanced unbalanced converter process described in claim 3, and a plurality of first conductive layer units and a plurality of second conductive layer units are prepared. The first middle wire segment is further formed on the second lower conductive layer unit and the second middle conductive layer unit, and the second middle wire segments are further formed on the first middle conductive layer unit and the first Upper conductive layer unit. 根據申請專利範圍第4項所述之積層式平衡非平衡轉換器製程,在該步驟(B)至步驟(G)中,該第一上導電層單元、該等第一中導電層單元、該第一下導電層單元、該第二上導電層單元、該等第二中導電層單元、該第二下導電層單元分別還包括一鐵心部,該等鐵心部彼此沿縱方向連接形成塊體狀。According to the layered balanced unbalanced converter process of claim 4, in the step (B) to the step (G), the first upper conductive layer unit, the first middle conductive layer unit, the The first lower conductive layer unit, the second upper conductive layer unit, the second middle conductive layer unit, and the second lower conductive layer unit respectively further comprise a core portion, and the core portions are connected to each other in the longitudinal direction to form a block body shape. 依據申請專利範圍第1項所述之積層式平衡非平衡轉換器製程,在該步驟(B)至步驟(G)中,是以印刷方式製備該第一上導電層單元、該等第一中導電層單元、該第一下導電層單元、該第二上導電層單元、該等第二中導電層單元、該第二下導電層單元。According to the layered balanced unbalanced converter process described in claim 1, in the step (B) to the step (G), the first upper conductive layer unit is prepared by printing, and the first intermediate a conductive layer unit, the first lower conductive layer unit, the second upper conductive layer unit, the second middle conductive layer unit, and the second lower conductive layer unit. 依據申請專利範圍第6項所述之積層式平衡非平衡轉換器製程,在該步驟(B)至步驟(G)中,該印刷方式是網版印刷。According to the laminated balanced unbalanced converter process described in claim 6, in the step (B) to the step (G), the printing method is screen printing. 依據申請專利範圍第1項所述之積層式平衡非平衡轉換器製程,在該步驟(I)後,還有一步驟(J),在該步驟(J)中,以一金屬對該等導電端進行電鍍。According to the laminated balanced unbalanced converter process described in claim 1, after the step (I), there is a step (J) in which the conductive ends are made of a metal. Perform electroplating. 依據申請專利範圍第1項所述之積層式平衡非平衡轉換器製程,在該步驟(B)至步驟(G)中,該第一下絕緣層、第一中絕緣層、第一上絕緣層、第二下絕緣層、第二中絕緣層及第二上絕緣層是以玻璃陶瓷製成,該第一下導線段、第一中導線段、第一上導線段、第二下導線段、第二中導線段、第二上導線段及該等導電端是以銀製成,絕緣材料是玻璃陶瓷,導電材料是銀。According to the laminated balanced unbalanced converter process of claim 1, in the step (B) to the step (G), the first lower insulating layer, the first intermediate insulating layer, and the first upper insulating layer The second lower insulating layer, the second intermediate insulating layer and the second upper insulating layer are made of glass ceramic, the first lower wire segment, the first middle wire segment, the first upper wire segment, the second lower wire segment, The second middle wire segment, the second upper wire segment and the conductive ends are made of silver, the insulating material is glass ceramic, and the conductive material is silver. 一種積層式平衡非平衡轉換器製程,包含以下步驟:(A)製備一下基板;(B)於該下基板上製備複數第一下導電層單元,該等第一下導電層單元分別具有一第一下絕緣層及一設置於該第一下絕緣層上的第一下導線段;(C)在該等第一下導電層單元上分別製備至少一第一中導電層單元,該等第一中導電層單元分別具有一第一中絕緣層,及一設置於該第一中絕緣層上且與該第一下導線段電連接的第一中導線段,該第一中導電層單元的製造流程是先將絕緣材料挖開一穿孔,接著將導電材料設置於該穿孔內,絕緣材料及導電材料分別形成該第一中絕緣層及該第一中導線段;(D)在該等第一中導電層單元上分別製備一第一上導電層單元,該等第一上導電層單元分別具有一第一上絕緣層,及一設置於該第一上絕緣層且與該第一中導線段電連接的第一上導線段;(E)於該等第一上導電層單元上製備複數第二下導電層單元,該等第二下導電層單元分別具有一第二下絕緣層及一設置於該第二下絕緣層上的第二下導線段;(F)在該等第二下導電層單元上分別製備至少一第二中導電層單元,該等第二中導電層單元分別具有一第二中絕緣層,及一設置於該第二中絕緣層上且與該第二下導線段電連接的第二中導線段,該第二中導電層單元的製造流程是先將絕緣材料挖開一穿孔,接著將導電材料設置於該穿孔內,絕緣材料及導電材料分別形成該第二中絕緣層及該第二中導線段;(G)在該等第二中導電層單元上分別製備一第二上導電層單元,該等第二上導電層單元分別具有一第二上絕緣層,及一設置於該第二上絕緣層且與該第二中導線段電連接的第二上導線段;(H)在該等第二上導電層單元上製備一上基板,該下基板、該等第一下導電層單元、該等第一中導電層單元、該等第一上導電層單元、該等第二下導電層單元、該等第二中導電層單元、該等第二上導電層單元、該上基板組成一待加工的本體;(I)將該本體沿縱方向切割成複數單體;及(J)在該等單體上分別燒結四導電端,使該等導電端分別與該單體的第一下導線段、第一上導線段、第二下導線段、第二上導線段電連接。A laminated balanced unbalanced converter process comprising the steps of: (A) preparing a substrate; (B) preparing a plurality of first lower conductive layer units on the lower substrate, the first lower conductive layer units respectively having a first a first insulating layer and a first lower conductive line disposed on the first lower insulating layer; (C) preparing at least one first conductive layer unit on the first lower conductive layer unit, the first The middle conductive layer units respectively have a first intermediate insulating layer, and a first middle wire segment disposed on the first intermediate insulating layer and electrically connected to the first lower wire segment, the first middle conductive layer unit being fabricated The process is to first dig a hole through the insulating material, and then place a conductive material in the through hole, the insulating material and the conductive material respectively form the first intermediate insulating layer and the first middle wire segment; (D) at the first Forming a first upper conductive layer unit on the middle conductive layer unit, the first upper conductive layer units respectively have a first upper insulating layer, and a first upper insulating layer disposed on the first upper insulating layer and the first upper conductive layer First upper wire segment electrically connected; (E) at the same Forming a plurality of second lower conductive layer units on an upper conductive layer unit, wherein the second lower conductive layer units respectively have a second lower insulating layer and a second lower conductive portion disposed on the second lower insulating layer; F) preparing at least one second intermediate conductive layer unit on the second lower conductive layer unit, wherein the second middle conductive layer units respectively have a second intermediate insulating layer, and one of the second intermediate insulating layers is disposed on the second intermediate insulating layer a second middle wire segment electrically connected to the second lower wire segment, wherein the second conductive layer unit is manufactured by first digging a hole in the insulating material, and then placing a conductive material in the through hole, the insulating material And the conductive material respectively forms the second intermediate insulating layer and the second middle conductive segment; (G) respectively preparing a second upper conductive layer unit on the second conductive layer unit, the second upper conductive layer unit Each has a second upper insulating layer, and a second upper wire segment disposed on the second upper insulating layer and electrically connected to the second middle wire segment; (H) being prepared on the second upper conductive layer unit An upper substrate, the lower substrate, the first lower conductive layer a first intermediate conductive layer unit, the first upper conductive layer unit, the second lower conductive layer unit, the second middle conductive layer unit, the second upper conductive layer unit, the upper substrate Forming a body to be processed; (I) cutting the body into a plurality of monomers in a longitudinal direction; and (J) sintering the four conductive ends on the monomers, respectively, so that the conductive ends are respectively associated with the monomer The lower wire segment, the first upper wire segment, the second lower wire segment, and the second upper wire segment are electrically connected.
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