TW201307995A - Curable resin composition containing alicyclic epoxy group, method for preparing the same, and cured article thereof - Google Patents

Curable resin composition containing alicyclic epoxy group, method for preparing the same, and cured article thereof Download PDF

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TW201307995A
TW201307995A TW101121024A TW101121024A TW201307995A TW 201307995 A TW201307995 A TW 201307995A TW 101121024 A TW101121024 A TW 101121024A TW 101121024 A TW101121024 A TW 101121024A TW 201307995 A TW201307995 A TW 201307995A
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meth
solvent
resin composition
acrylate
curable resin
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Tadashi Teranishi
Yasunobu Nakagawa
Yasuyuki Akai
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Daicel Corp
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10Esters
    • C08F220/26Esters containing oxygen in addition to the carboxy oxygen
    • C08F220/32Esters containing oxygen in addition to the carboxy oxygen containing epoxy radicals
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J3/00Processes of treating or compounding macromolecular substances
    • C08J3/24Crosslinking, e.g. vulcanising, of macromolecules
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J3/00Processes of treating or compounding macromolecular substances
    • C08J3/24Crosslinking, e.g. vulcanising, of macromolecules
    • C08J3/241Preventing premature crosslinking by physical separation of components, e.g. encapsulation
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L33/00Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Compositions of derivatives of such polymers
    • C08L33/04Homopolymers or copolymers of esters
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10Esters
    • C08F220/26Esters containing oxygen in addition to the carboxy oxygen
    • C08F220/32Esters containing oxygen in addition to the carboxy oxygen containing epoxy radicals
    • C08F220/325Esters containing oxygen in addition to the carboxy oxygen containing epoxy radicals containing glycidyl radical, e.g. glycidyl (meth)acrylate

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

The present invention provides a curable resin composition, which can improve solibilty and stability during preparing resist composition, meanwhile, can increase uniformity of membrane thickness during film formation, uniformity of line width, adhesiveness of resist film during developing, and safety. It is provided a curable resin composition comprising a copolymer and a solvent, wherein said copolymer contains (A) a monomer unit corresponding to polymerizable unsaturated compound containing alicyclic epoxy group, and (B) a monomer unit containing alkali soluble group, and said solvent contains 30 to 100 mass% of dipropylene glycol dimethyl ether with respect to the amount of total solvent.

Description

含有脂環式環氧基之硬化性樹脂組成物、其製法及其硬化物 Curing resin composition containing alicyclic epoxy group, preparation method thereof and cured product thereof

本發明係關於用以形成半導體製程中之使用遠紫外線、電子線、離子束、X射線等之活性光線的微影術、或液晶顯示元件、積體電路元件、固態攝影元件等之電子構件所設置的絕緣膜、保護膜等之材料所使用的放射線敏感性樹脂、用以形成液晶顯示材料(液晶顯示用間隔材料(photospacer)、液晶顯示用肋形成材料、保護層(overcoat)、彩色濾光片形成用彩色光阻(color resist)、TFT絕緣膜等)之液晶光阻劑用材料、塗料、塗布劑、黏著劑等所使用的含有脂環式環氧基之硬化性樹脂組成物、其製法及其硬化物。 The present invention relates to a lithography for forming active light using a far ultraviolet ray, an electron beam, an ion beam, an X ray or the like in a semiconductor process, or an electronic component such as a liquid crystal display element, an integrated circuit element, a solid state photographic element, or the like. a radiation-sensitive resin used for a material such as an insulating film or a protective film, or a liquid crystal display material (photospacer for liquid crystal display, rib forming material for liquid crystal display, overcoat, color filter) a serocyclic epoxy group-containing curable resin composition used for a liquid crystal resist material, a coating material, a coating agent, an adhesive, or the like for forming a color resist or a TFT insulating film. Method and its hardened material.

就液狀光阻劑(photoresist)(以下,有縮寫為「resist」的情形)所使用的溶媒而言,向來已知有各式各樣者,考慮光阻樹脂組成物之溶解性、塗布性、感度、顯影性、形成的圖案特性等,適切的溶劑(溶媒)被選擇、使用。作為上述溶解性、塗布性、光阻形成特性等諸特性為優異的溶劑,例如已知乙二醇單乙基醚乙酸酯,但因被批評對人體的安全性有問題,不能完全被使用作為光阻之溶媒,故作為安全性高的溶媒,一般使用丙二醇單甲基醚乙酸酯等(專利文獻1~3等)。又,作為安全性高的溶媒,除丙二醇單甲基醚乙酸酯以外,亦已知有乳酸乙酯及甲基-n-戊基酮等。 In the case of a solvent used for a liquid photoresist (hereinafter, abbreviated as "resist"), various types of solvents have been known, and solubility and coating properties of the photoresist resin composition are considered. The sensitivity, developability, pattern characteristics to be formed, and the like, and a suitable solvent (solvent) are selected and used. As a solvent excellent in properties such as solubility, applicability, and photoresist formation characteristics, for example, ethylene glycol monoethyl ether acetate is known, but it cannot be completely used because it is criticized for its safety to human body. As a solvent for the photoresist, propylene glycol monomethyl ether acetate or the like is generally used as a solvent having high safety (Patent Documents 1 to 3, etc.). Further, as a highly safe solvent, in addition to propylene glycol monomethyl ether acetate, ethyl lactate and methyl-n-amyl ketone are also known.

然而,察看與乙二醇單乙基醚乙酸酯相比為安全性高的此等溶劑時,光阻形成特性及樹脂溶解性等之特性有所謂不充分的問題。例如,於丙二醇單甲基醚乙酸酯的情形,將光阻劑塗布於基板上、成膜時,有溶劑殘膜率(指製膜後之膜中的溶劑殘存率)高、線寬均一性、顯影時之光阻膜之密著性等之降低的問題。就其原因而言,可舉例丙二醇單甲基醚乙酸酯本身為蒸發速度快的溶劑,但作為光阻樹脂之溶劑使用時,僅塗布表面蒸發會進行,於表面形成所謂的皮膜,因而塗布面內部所包含的溶劑變得難以蒸發。又,丙二醇單甲基醚乙酸酯與乙二醇單乙基醚乙酸酯相比,已知其樹脂溶解性、起始劑溶解性等為差。又,尤其將含有於側鏈具有脂環式環氧基的共聚合樹脂的硬化性樹脂組成物長期保管的情形,亦有組成物的經時安定性低的問題。因此,正冀求安全性高、且樹脂溶解性、起始劑溶解性、樹脂組成物之經時安定性優異的溶媒。 However, when such a solvent having high safety compared with ethylene glycol monoethyl ether acetate is observed, characteristics such as photoresist formation characteristics and resin solubility are insufficient. For example, in the case of propylene glycol monomethyl ether acetate, when a photoresist is applied onto a substrate to form a film, there is a solvent residual film ratio (refer to a solvent residual ratio in a film after film formation), and a line width is uniform. The problem of the decrease in the adhesion of the photoresist film during development and development. For the reason, propylene glycol monomethyl ether acetate itself is a solvent having a high evaporation rate, but when used as a solvent for a photoresist resin, only the surface evaporation of the coating surface proceeds to form a so-called film on the surface, and thus coating The solvent contained inside the surface becomes difficult to evaporate. Further, propylene glycol monomethyl ether acetate is known to have poor solubility in a resin, solubility in an initiator, and the like, as compared with ethylene glycol monoethyl ether acetate. In addition, in particular, when the curable resin composition containing the copolymer resin having an alicyclic epoxy group in the side chain is stored for a long period of time, there is a problem that the composition has a low stability with time. Therefore, a solvent having high safety, resin solubility, solubility of the initiator, and excellent stability with time of the resin composition is being sought.

先前技術文獻 Prior technical literature 專利文獻 Patent literature

專利文獻1 特公平3-1659號公報 Patent Document 1 Special Fair 3-1659

專利文獻2 特公平4-56973號公報 Patent Document 2 Special Fair No. 4-56973

專利文獻3 特公平4-49938號公報 Patent Document 3 Special Fair No. 4-49938

因此,本發明之目的係提供一種含有於側鏈具有脂環式環氧基的共聚合樹脂的硬化性樹脂組成物,其安全 性高、樹脂溶解性等優異的同時,經時安定性為優異的硬化性樹脂組成物、該硬化性樹脂組成物之製造法、及硬化該硬化性樹脂組成物所獲得的硬化物。 Accordingly, an object of the present invention is to provide a curable resin composition containing a copolymerized resin having an alicyclic epoxy group in a side chain, which is safe A curable resin composition excellent in stability over time and excellent in resin solubility, and a curable resin composition excellent in stability over time, a method for producing the curable resin composition, and a cured product obtained by curing the curable resin composition.

本發明之其他目的係進一步提供可形成膜厚均一、對基板的密著性及耐溶劑性優異的塗膜(光阻膜等)的硬化性樹脂組成物、該硬化性樹脂組成物之製造法、及硬化該硬化性樹脂組成物而獲得的硬化物。 Further, another object of the present invention is to provide a curable resin composition which can form a coating film (such as a photoresist film) which is uniform in film thickness, excellent in adhesion to a substrate, and solvent resistance, and a method for producing the curable resin composition. And a cured product obtained by curing the curable resin composition.

本發明者們為了解決上述問題點而致力進行研究的結果,發現含有具有含脂環式環氧基的構造單元及含鹼可溶性基的構造單元的共聚合樹脂、及作為溶媒之二丙二醇二甲基醚的硬化性樹脂組成物可解決上述問題點,遂而完成本發明。 In order to solve the above problems, the inventors of the present invention have found that a copolymerized resin containing a structural unit containing an alicyclic epoxy group and a structural unit containing an alkali-soluble group, and a dipropylene glycol as a solvent are found. The curable resin composition of the ether ether can solve the above problems, and the present invention has been completed.

即,本發明係提供一種硬化性樹脂組成物,其特徵為含有一種共聚物及溶媒,其中該共聚物為含有(A)對應含有脂環式環氧基的聚合性不飽和化合物的單體單元及(B)含鹼可溶性基的單體單元的共聚物,該溶媒係於全溶媒中含有30~100質量%之二丙二醇二甲基醚。 That is, the present invention provides a curable resin composition characterized by containing a copolymer and a solvent, wherein the copolymer is a monomer unit containing (A) a polymerizable unsaturated compound corresponding to an alicyclic epoxy group. And (B) a copolymer of an alkali-soluble group-containing monomer unit containing 30 to 100% by mass of dipropylene glycol dimethyl ether in the total solvent.

(A)含有脂環式環氧基的聚合性不飽和化合物可為選自3,4-環氧基環己基甲基(甲基)丙烯酸酯、3,4-環氧基三環[5.2.1.02,6]癸-8或9-基(甲基)丙烯酸酯之至少1種之化合物。 (A) The polymerizable unsaturated compound containing an alicyclic epoxy group may be selected from 3,4-epoxycyclohexylmethyl (meth) acrylate and 3,4-epoxytricyclo[5.2. A compound of at least one of 1.0 2,6 ]癸-8 or 9-yl(meth)acrylate.

上述共聚物進一步可含有(C)對應不含有環氧基之脂環式聚合性不飽和化合物的單體單元。 The above copolymer may further contain (C) a monomer unit corresponding to an alicyclic polymerizable unsaturated compound not containing an epoxy group.

又,本發明提供一種上述硬化性樹脂組成物之製造方法,其特徵為包含(1)使用作為聚合溶媒之含有二丙二醇二甲基醚的溶媒來製造共聚物的步驟、或(2)將共聚物之溶媒與含有二丙二醇二甲基醚的溶媒作溶媒交換的步驟。 Moreover, the present invention provides a method for producing the curable resin composition, which comprises the steps of (1) producing a copolymer using a solvent containing dipropylene glycol dimethyl ether as a polymerization solvent, or (2) copolymerizing The solvent of the substance and the solvent containing dipropylene glycol dimethyl ether are used as a solvent exchange step.

又,本發明提供將上述硬化性樹脂組成物硬化而獲得的硬化物。 Moreover, the present invention provides a cured product obtained by curing the above-mentioned curable resin composition.

本發明之硬化性樹脂組成物係安全性高、樹脂溶解性優異的同時,組成物之經時安定性為優異。依據本發明之硬化性樹脂組成物,可形成膜厚均一、對基板的密著性及耐溶劑性為優異的塗膜(光阻膜等)。又,可形成線寬均一、硬度高的光阻膜。 The curable resin composition of the present invention has high safety and excellent resin solubility, and is excellent in stability over time of the composition. According to the curable resin composition of the present invention, a coating film (such as a photoresist film) having a uniform film thickness and excellent adhesion to a substrate and solvent resistance can be formed. Further, a photoresist film having uniform line width and high hardness can be formed.

[用以實施發明之形態] [Formation for implementing the invention] [硬化性樹脂組成物] [Curable resin composition]

本發明之硬化性樹脂組成物其特徵為含有共聚物及溶媒,其中共聚物為含有(A)對應含有脂環式環氧基的聚合性不飽和化合物的單體單元及(B)含有鹼可溶性基的單體單元,其中溶媒為於全溶媒中含有30~100質量%之二丙二醇二甲基醚。 The curable resin composition of the present invention is characterized by comprising a copolymer and a solvent, wherein the copolymer is a monomer unit containing (A) a polymerizable unsaturated compound containing an alicyclic epoxy group and (B) an alkali-soluble The monomer unit of the group, wherein the solvent contains 30 to 100% by mass of dipropylene glycol dimethyl ether in the total solvent.

<共聚物> <copolymer>

本發明之硬化性樹脂組成物所含的共聚物為含有(A)含對應含有脂環式環氧基的聚合性不飽和化合物的單體單元(構造單元)及(B)含有鹼可溶性基的單體單元(構造單元)。 The copolymer contained in the curable resin composition of the present invention contains (A) a monomer unit (structural unit) containing a polymerizable unsaturated compound containing an alicyclic epoxy group, and (B) an alkali-soluble group. Monomer unit (construction unit).

<(A)對應含有脂環式環氧基之聚合性不飽和化合物的單體單元> <(A) corresponds to a monomer unit of a polymerizable unsaturated compound containing an alicyclic epoxy group>

對應含有脂環式環氧基之聚合性不飽和化合物的單體單元係可藉由將含有對應的脂環式環氧基之聚合性不飽和化合物交付共聚合而導入聚合物中。 The monomer unit corresponding to the polymerizable unsaturated compound containing an alicyclic epoxy group can be introduced into the polymer by delivering a polymerizable unsaturated compound containing a corresponding alicyclic epoxy group to a copolymerization.

作為含有脂環式環氧基之聚合性不飽和化合物而言,例如,可舉例3,4-環氧基環己基(甲基)丙烯酸酯、3,4-環氧基環己基甲基(甲基)丙烯酸酯、2-(3,4-環氧基環己基)乙基(甲基)丙烯酸酯、2-(3,4-環氧基環己基甲氧基)乙基(甲基)丙烯酸酯、3-(3,4-環氧基環己基甲氧基)丙基(甲基)丙烯酸酯等之3,4-環氧基環己烷環等之含有含環氧基的脂環式碳環的聚合性不飽和化合物((甲基)丙烯酸酯衍生物等);5,6-環氧基-2-雙環[2.2.1]庚基(甲基)丙烯酸酯等之含5,6-環氧基-2-雙環[2.2.1]庚烷環的聚合性不飽和化合物((甲基)丙烯酸酯衍生物等);環氧基化二環戊烯基(甲基)丙烯酸酯[3,4-環氧基三環[5.2.1.02,6]癸-9-基(甲基)丙烯酸酯、3,4-環氧基三環[5.2.1.02,6]癸-8-基(甲基)丙烯酸酯、或此等之混合物]、環氧基化二環戊烯氧基乙基(甲基)丙烯酸酯[2-(3,4-環氧基三環[5.2.1.02,6]癸-9-氧基)乙基(甲基)丙烯酸酯、2-(3,4-環氧基三環[5.2.1.02,6]癸-8-氧基)乙基(甲基)丙烯酸酯、或此等之混合物]、環氧基化二環戊烯氧基丁基(甲基)丙烯酸酯、環氧基化二環戊烯氧基己基(甲基)丙烯酸酯等之含3,4-環氧基三環[5.2.1.02,6]癸環的聚合性不飽和化合物((甲基)丙烯酸酯衍生物等)等。此等可單獨使用或組合2種以上來使用。 As the polymerizable unsaturated compound containing an alicyclic epoxy group, for example, 3,4-epoxycyclohexyl (meth) acrylate, 3,4-epoxycyclohexylmethyl group (A) can be exemplified. Acrylate, 2-(3,4-epoxycyclohexyl)ethyl(meth)acrylate, 2-(3,4-epoxycyclohexylmethoxy)ethyl(meth)acrylic acid An epoxy group-containing alicyclic ring such as an ester or a 3,4-epoxycyclohexane ring such as 3-(3,4-epoxycyclohexylmethoxy)propyl (meth)acrylate a carbocyclic unsaturated compound ((meth) acrylate derivative, etc.); 5,6-epoxy-2-bicyclo[2.2.1] heptyl (meth) acrylate, etc. - a polymerizable unsaturated compound of a cyclooxy-2-bicyclo[2.2.1]heptane ring ((meth) acrylate derivative, etc.); epoxidized dicyclopentenyl (meth) acrylate [ 3,4-epoxytricyclo[5.2.1.0 2,6 ]non-9-yl(meth)acrylate, 3,4-epoxytricyclo[5.2.1.0 2,6 ]癸-8- (meth) acrylate, or a mixture of such], epoxidized dicyclopentenyloxyethyl (meth) acrylate [2-(3,4-epoxytricyclo[5.2.1.0] 2,6] dec-9-yloxy) ethyl (meth) propionate Ester, 2- (3,4-epoxy-tricyclo [5.2.1.0 2,6] dec-8-oxy) ethyl (meth) acrylate, or mixtures of these], epoxidized Tricyclopentenyloxybutyl (meth) acrylate, epoxidized dicyclopentenyloxyhexyl (meth) acrylate, etc. containing 3,4-epoxytricyclo[5.2.1.0 2, 6 ] A polymerizable unsaturated compound (such as a (meth) acrylate derivative) of an anthracene ring. These may be used alone or in combination of two or more.

就含有脂環式環氧基之聚合性不飽和化合物而言,以含3,4-環氧基環己烷環等之含有環氧基的脂環式碳環的聚合性不飽和化合物((甲基)丙烯酸酯衍生物等)為較佳,其中,以3,4-環氧基環己基(甲基)丙烯酸酯、3,4-環氧基環己基甲基(甲基)丙烯酸酯、環氧基化二環戊烯基(甲基)丙烯酸酯[3,4-環氧基三環[5.2.1.02,6]癸-9-基(甲基)丙烯酸酯、3,4-環氧基三環[5.2.1.02,6]癸-8-基(甲基)丙烯酸酯、或此等之混合物]為更佳。 In the case of a polymerizable unsaturated compound containing an alicyclic epoxy group, a polymerizable unsaturated compound containing an epoxy group-containing alicyclic carbocyclic ring such as a 3,4-epoxycyclohexane ring (( A methyl) acrylate derivative or the like is preferred, and 3,4-epoxycyclohexyl (meth) acrylate, 3,4-epoxycyclohexylmethyl (meth) acrylate, Epoxylated dicyclopentenyl (meth) acrylate [3,4-epoxytricyclo[5.2.1.0 2,6 ]non-9-yl (meth) acrylate, 3,4-ring More preferably, oxytricyclo[5.2.1.0 2,6 ]non-8-yl (meth) acrylate, or a mixture thereof.

對應含有脂環式環氧基之聚合性不飽和化合物的單體單元於共聚物中所佔的比率,係依使用的單體種類或光阻的形式(負型或正型)而異,通常相對於構成共聚物的全單體單元為30~95質量%,較佳為50~90質量%,更佳為60~85質量%。經由使對應含有脂環式環氧基之聚合性不飽和化合物的單體單元之含量於如此範圍時,主要可使耐藥品性(耐溶劑性、耐鹼性等)進一步提升。 The ratio of the monomer unit corresponding to the polymerizable unsaturated compound containing an alicyclic epoxy group to the copolymer varies depending on the type of the monomer to be used or the form of the photoresist (negative or positive), usually It is 30 to 95% by mass, preferably 50 to 90% by mass, and more preferably 60 to 85% by mass based on the total monomer unit constituting the copolymer. When the content of the monomer unit corresponding to the polymerizable unsaturated compound containing an alicyclic epoxy group is in such a range, chemical resistance (solvent resistance, alkali resistance, etc.) can be further improved.

<(B)含鹼可溶性基之單體單元> <(B) Monomer unit containing an alkali-soluble group>

含鹼可溶性基之單體單元係具有對聚合物賦予鹼可溶性的機能。藉此聚合物於顯影時會溶解於鹼水溶液(顯影液)。 The monomer unit containing an alkali-soluble group has a function of imparting alkali solubility to the polymer. Thereby, the polymer is dissolved in an aqueous alkali solution (developing solution) at the time of development.

含鹼可溶性基之單體單元係可將具有鹼可溶性基的聚合性不飽和化合物交付共聚合而導入聚合物中。就前述鹼可溶性基而言,可使用於光阻領域中通常使用的基,例如,羧基、酚性羥基等。就具有鹼可溶性基之聚合性不飽和化合物之代表例而言,可舉例不飽和羧酸或其酸酐、羥基苯乙烯或其衍生物等,此等並未被限定。此等中,尤其以不飽和羧酸或其酸酐為較佳。 The monomer unit containing an alkali-soluble group can be subjected to copolymerization of a polymerizable unsaturated compound having an alkali-soluble group into a polymer. As the aforementioned alkali-soluble group, a group which is generally used in the field of photoresist, for example, a carboxyl group, a phenolic hydroxyl group or the like can be used. Representative examples of the polymerizable unsaturated compound having an alkali-soluble group include unsaturated carboxylic acids or anhydrides thereof, hydroxystyrene or derivatives thereof, and the like, which are not limited. Among these, in particular, an unsaturated carboxylic acid or an anhydride thereof is preferred.

就不飽和羧酸或其酸酐而言,例如,可例示丙烯酸、甲基丙烯酸、衣康酸、巴豆酸、順丁烯二酸、反丁烯二酸等之α,β-不飽和羧酸及其酸酐(順丁烯二酸酐、衣康酸酐等)。此等中,以丙烯酸、甲基丙烯酸為特佳。具有鹼可溶性基之聚合性不飽和化合物可單獨使用或組合2種以上來使用。 The unsaturated carboxylic acid or an anhydride thereof may, for example, be an α,β-unsaturated carboxylic acid such as acrylic acid, methacrylic acid, itaconic acid, crotonic acid, maleic acid or fumaric acid. Its anhydride (maleic anhydride, itaconic anhydride, etc.). Among these, acrylic acid and methacrylic acid are particularly preferred. The polymerizable unsaturated compound having an alkali-soluble group may be used singly or in combination of two or more.

含鹼可溶性基之單體單元佔共聚物的比率依使用的單體之種類或光阻劑之形式(負型或正型)而異,通常相對於構成共聚物的全單體單元為5~50質量%,較佳為5~40質量%,更佳為5~30質量%。此比率過小時,對鹼顯影液難以溶解而有顯影性變差的情形,相反地過大時,有顯影後之蝕刻性變差的情形。 The ratio of the monomer unit containing an alkali-soluble group to the copolymer varies depending on the kind of the monomer to be used or the form of the photoresist (negative or positive), and is usually 5 to the total monomer unit constituting the copolymer. 50% by mass, preferably 5 to 40% by mass, more preferably 5 to 30% by mass. When the ratio is too small, the alkali developer is difficult to dissolve and the developability is deteriorated. On the contrary, when the ratio is too large, the etching property after development may be deteriorated.

<(C)對應非含有環氧基之脂環式聚合性不飽和化合物之單體單元> <(C) corresponds to a monomer unit of an alicyclic unsaturated unsaturated compound containing an epoxy group>

本發明之硬化性樹脂組成物中所含的共聚物,除了上述單體單元(A)、(B)以外,可含有(C)對應非含有環氧基之脂環式聚合性不飽和化合物的單體單元(構造單元)。 The copolymer contained in the curable resin composition of the present invention may contain (C) an alicyclic polymerizable unsaturated compound not containing an epoxy group, in addition to the above monomer units (A) and (B). Monomer unit (construction unit).

對應非含有環氧基之脂環式聚合性不飽和化合物之單體單元係可將對應的非含有環氧基之脂環式聚合性不飽和化合物交付共聚合可導入聚合物中。就非含有環氧基之脂環式聚合性不飽和化合物中所含的脂環而言,例如,可舉例碳數為5~20之脂環式烴環,可為單環亦可為稠合環或橋接環等之多環。就代表的脂環式烴環而言,例如,可舉例環己烷環、環辛烷環、環癸烷環、金剛烷 環、降烷環、降烯環、烷環、異烷環、過氫茚(perhydroindene)環、十氫萘環、過氫茀環(三環[7.4.0.03,8]十三烷環)、過氫蒽環、三環[5.2.1.02,6]癸烷環、三環[4.2.2.12,5]十一烷環、四環[4.4.0.12,5.17,10]十二烷環。脂環式烴環可具有甲基等之烷基(例如,C1-4烷基等)、氯原子、氟原子等之鹵素原子、可經保護基保護的羥基、側氧基、可經保護基保護的羧基等之取代基。就脂環而言,例如以三環[5.2.1.02,6]癸烷環、金剛烷環等之多環之脂環式烴環(橋接環式烴環)者為較佳。 The monomer unit corresponding to the non-epoxy group-containing alicyclic polymerizable unsaturated compound can be subjected to copolymerization of a corresponding non-epoxy group-containing alicyclic polymerizable unsaturated compound into a polymer. The alicyclic ring contained in the alicyclic unsaturated polymerizable compound containing an epoxy group may, for example, be an alicyclic hydrocarbon ring having 5 to 20 carbon atoms, and may be a single ring or a fused ring. Multiple rings such as rings or bridge rings. As the alicyclic hydrocarbon ring represented, for example, a cyclohexane ring, a cyclooctane ring, a cyclodecane ring, an adamantane ring, and a descending ring are exemplified. Alkane ring Olefin, Alkane ring Alkane ring, perhydroindene ring, decahydronaphthalene ring, perhydroindole ring (tricyclo[7.4.0.0 3,8 ] tridecane ring), perhydroindole ring, tricyclic ring [5.2.1.0 2, 6 ] decane ring, tricyclo[4.2.2.1 2,5 ] undecane ring, tetracyclo[4.4.0.1 2,5 .1 7,10 ] dodecane ring. The alicyclic hydrocarbon ring may have an alkyl group such as a methyl group (for example, a C 1-4 alkyl group or the like), a halogen atom such as a chlorine atom or a fluorine atom, a hydroxyl group which may be protected by a protective group, a pendant oxy group, and may be protected. A substituent such as a carboxyl group protected by a group. As the alicyclic ring, for example, a polycyclic alicyclic hydrocarbon ring (bridged cyclic hydrocarbon ring) such as a tricyclo[5.2.1.0 2,6 ]decane ring or an adamantane ring is preferred.

就非含有環氧基之脂環式聚合性不飽和化合物而言,例如,可舉例環己基(甲基)丙烯酸酯、環己基甲基(甲基)丙烯酸酯、2-(環己基)乙基(甲基)丙烯酸酯、2-(環己基甲氧基)乙基(甲基)丙烯酸酯、3-(環己基甲氧基)丙基(甲基)丙烯酸酯等之含環己烷環的聚合性不飽和化合物((甲基)丙烯酸酯衍生物等);2-雙環[2.2.1]庚基(甲基)丙烯酸酯等之含2-雙環[2.2.1]庚烷環的聚合性不飽和化合物((甲基)丙烯酸酯衍生物等);含1-金剛烷基(甲基)丙烯酸酯等之含金剛烷環的聚合性不飽和化合物((甲基)丙烯酸酯衍生物等);二環戊烷基(甲基)丙烯酸酯{三環[5.2.1.02,6]癸-9-基(甲基)丙烯酸酯、三環[5.2.1.02,6]癸-8-基(甲基)丙烯酸酯、或此等之混合物}、二環戊烯基(甲基)丙烯酸酯{三環[5.2.1.02,6]癸-3-烯-9-基(甲基)丙烯酸酯、三環[5.2.1.02,6]癸-3-烯-8-基(甲基)丙烯酸酯、或此等之混合物}、二環戊烯氧基乙基(甲基)丙烯酸酯{2-(三環[5.2.1.02,6]癸-9-氧基)乙基(甲基)丙烯酸酯、2-(三環 [5.2.1.02,6]癸-8-氧基)乙基(甲基)丙烯酸酯、或此等之混合物}、二環戊烯氧基丁基(甲基)丙烯酸酯、二環戊烯氧基己基(甲基)丙烯酸酯等之含三環[5.2.1.02,6]癸烷環的聚合性不飽和化合物((甲基)丙烯酸酯衍生物等)等。非含有環氧基之脂環式聚合性不飽和化合物可單獨使用或組合2種以上使用。 With respect to the alicyclic polymerizable unsaturated compound not containing an epoxy group, for example, cyclohexyl (meth) acrylate, cyclohexylmethyl (meth) acrylate, 2-(cyclohexyl)ethyl group can be exemplified. a cyclohexane ring containing (meth) acrylate, 2-(cyclohexylmethoxy)ethyl (meth) acrylate, 3-(cyclohexyl methoxy) propyl (meth) acrylate, etc. Polymerizable unsaturated compound ((meth) acrylate derivative, etc.); polymerizable property of 2-bicyclo[2.2.1] heptane ring such as 2-bicyclo[2.2.1]heptyl (meth) acrylate Unsaturated compound (such as a (meth) acrylate derivative); a polymerizable unsaturated compound containing adamantane ring such as 1-adamantyl (meth) acrylate (such as a (meth) acrylate derivative) Dicyclopentanyl (meth) acrylate {tricyclo[5.2.1.0 2,6 ]癸-9-yl(meth)acrylate, tricyclo[5.2.1.0 2,6 ]癸-8-yl (Meth) acrylate, or a mixture of such}, dicyclopentenyl (meth) acrylate {tricyclo[5.2.1.0 2,6 ]non-3-ene-9-yl (meth)acrylic acid Ester, tricyclo[5.2.1.0 2,6 ]non-3-en-8-yl (meth) acrylate, or a mixture of these, Pentenyloxyethyl (meth) acrylate {2-(tricyclo[5.2.1.0 2,6 ]non-9-oxy)ethyl (meth) acrylate, 2-(tricyclic [5.2. 1.0 2,6 ]癸-8-oxy)ethyl(meth)acrylate, or a mixture of such}, dicyclopentenyloxybutyl (meth) acrylate, dicyclopentenyloxyhexyl A polymerizable unsaturated compound (such as a (meth) acrylate derivative) containing a tricyclo[5.2.1.0 2,6 ]nonane ring such as (meth) acrylate. The alicyclic polymerizable unsaturated compound which does not contain an epoxy group can be used individually or in combination of 2 or more types.

就非含有環氧基之脂環式聚合性不飽和化合物而言,以含三環[5.2.1.02,6]癸烷環或金剛烷環的聚合性不飽和化合物為較佳,其中以二環戊烯基(甲基)丙烯酸酯、1-金剛烷基(甲基)丙烯酸酯為較佳。 In the case of an alicyclic polymerizable unsaturated compound not containing an epoxy group, a polymerizable unsaturated compound containing a tricyclo[5.2.1.0 2,6 ]nonane ring or an adamantane ring is preferred, wherein A cyclopentenyl (meth) acrylate or 1-adamantyl (meth) acrylate is preferred.

對應非含有環氧基之脂環式聚合性不飽和化合物的單體單元之共聚物中所佔比率可依所欲的要求性能來適宜選擇。 The ratio of the copolymer of the monomer unit corresponding to the alicyclic polymerizable unsaturated compound containing no epoxy group can be appropriately selected depending on the desired properties.

<其他之單體單元> <Other monomer units>

本發明之含有脂環式環氧基之硬化性樹脂組成物中所含的共聚物可含有上述(A)、(B)、(C)以外之單體單元。如此單體單元可藉由將對應的聚合性不飽和化合物交付共聚合而導入聚合物中。 The copolymer contained in the alicyclic epoxy group-containing curable resin composition of the present invention may contain a monomer unit other than the above (A), (B), and (C). Such a monomer unit can be introduced into the polymer by delivery of the corresponding polymerizable unsaturated compound to the copolymerization.

就對應其他之單體單元的聚合性不飽和化合物而言,例如,可舉例(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸戊酯、(甲基)丙烯酸己酯等之(甲基)丙烯酸烷基酯[例如,(甲基)丙烯酸C1-10烷基酯等];(甲基)丙烯酸苄基酯等之分子內具有芳香族環狀構造的(甲基)丙烯酸酯;苯乙烯、乙烯基甲苯、α-甲基苯乙烯乙烯基萘等之苯乙烯系化合 物;甲基乙烯基醚、丁基乙烯基醚、苯基乙烯基醚等之乙烯基醚化合物。 Examples of the polymerizable unsaturated compound corresponding to other monomer units include, for example, methyl (meth)acrylate, ethyl (meth)acrylate, propyl (meth)acrylate, and (meth)acrylate. (meth)acrylic acid alkyl ester such as ester, amyl (meth)acrylate, hexyl (meth)acrylate [for example, C 1-10 alkyl (meth)acrylate, etc.]; (meth)acrylic acid a (meth) acrylate having an aromatic cyclic structure in a molecule such as a benzyl ester; a styrene compound such as styrene, vinyl toluene or α-methylstyrene vinyl naphthalene; methyl vinyl ether; A vinyl ether compound such as butyl vinyl ether or phenyl vinyl ether.

又,對應其他之單體單元的聚合性不飽和化合物亦包含具有親水性基的自由基聚合性單體。就親水性基而言,例如,可舉例羥基(酚性者除外)、第4級銨基、胺基、雜環式基等。就具有親水性基的自由基聚合性單體之具體例而言,例如,可舉例(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸羥基丙酯、(甲基)丙烯酸羥基丁酯等之具有羥基的(甲基)丙烯酸酯類;甲氧基二乙二醇(甲基)丙烯酸酯、乙氧基二乙二醇(甲基)丙烯酸酯、異辛基氧基二乙二醇(甲基)丙烯酸酯、甲氧基三乙二醇(甲基)丙烯酸酯、甲氧基聚乙二醇(甲基)丙烯酸酯等之烷氧基聚伸烷二醇(甲基)丙烯酸酯;(甲基)丙烯酸2-胺基乙基酯等之具有胺基的(甲基)丙烯酸酯;2-乙烯基吡咯啶酮等之具有乙烯基的雜環式化合物(含氮雜環式化合物等)等。 Further, the polymerizable unsaturated compound corresponding to another monomer unit also contains a radical polymerizable monomer having a hydrophilic group. The hydrophilic group may, for example, be a hydroxyl group (except for a phenolic one), a fourth-order ammonium group, an amine group, a heterocyclic group or the like. Specific examples of the radical polymerizable monomer having a hydrophilic group include, for example, 2-hydroxyethyl (meth)acrylate, hydroxypropyl (meth)acrylate, and hydroxybutyl (meth)acrylate. And other (meth) acrylates having a hydroxyl group; methoxydiethylene glycol (meth) acrylate, ethoxy diethylene glycol (meth) acrylate, isooctyloxy diethylene glycol Alkoxy polyalkylene glycol (meth) acrylate such as (meth) acrylate, methoxy triethylene glycol (meth) acrylate or methoxy polyethylene glycol (meth) acrylate a (meth) acrylate having an amine group such as 2-aminoethyl (meth)acrylate; a heterocyclic compound having a vinyl group such as 2-vinylpyrrolidone (nitrogen-containing heterocyclic compound) and many more.

<溶媒> <Solvent>

本發明之硬化性樹脂組成物係於全溶媒中含有30~100質量%之二丙二醇二甲基醚作為溶媒。二丙二醇二甲基醚係於全溶媒中含有50~100質量%者為較佳,含有70~100質量%者為更佳,含有80~100質量%者為又更佳。藉由將二丙二醇二甲基醚之含量作成全溶媒中為30~100質量%,成為硬化性樹脂組成物之溶解性、經時安定性、塗布性、感度、顯影性、形成的圖案特性等為優異者,且安全性變高。 The curable resin composition of the present invention contains 30 to 100% by mass of dipropylene glycol dimethyl ether as a solvent in the total solvent. The dipropylene glycol dimethyl ether is preferably 50 to 100% by mass in the total solvent, more preferably 70 to 100% by mass, and even more preferably 80 to 100% by mass. By setting the content of the dipropylene glycol dimethyl ether to 30 to 100% by mass in the total solvent, the solubility, the stability over time, the coatability, the sensitivity, the developability, the formed pattern characteristics, and the like of the curable resin composition are obtained. It is excellent and its safety is high.

二丙二醇二甲基醚與乙二醇系溶劑相比,對人體的安全性高。例如,乙二醇系溶劑為特殊健康診斷受診對象,但丙二醇系溶劑不為此對象。又,為乙二醇系溶劑之分解物的乙二醇的毒性高,但為丙二醇系溶劑之分解物的丙二醇亦可被使用於食品添加物等而安全性高。 Dipropylene glycol dimethyl ether is safer to humans than glycol-based solvents. For example, a glycol-based solvent is a subject for special health diagnosis, but a propylene glycol-based solvent is not a target. Further, ethylene glycol which is a decomposition product of a glycol-based solvent is highly toxic, but propylene glycol which is a decomposition product of a propylene glycol-based solvent can be used for food additives and the like, and is highly safe.

二丙二醇二甲基醚相對於硬化性樹脂組成物全體的含量可例如為30~80質量%,較佳為40~80質量%,更佳為50~80質量%。藉由將二丙二醇二甲基醚之含量作成如此之範圍,可作成硬化性樹脂組成物之溶解性、經時安定性、塗布性、感度、顯影性、形成的圖案特性等較為優異者,且安全性可更提高。 The content of the dipropylene glycol dimethyl ether relative to the entire curable resin composition can be, for example, 30 to 80% by mass, preferably 40 to 80% by mass, and more preferably 50 to 80% by mass. When the content of the dipropylene glycol dimethyl ether is in such a range, the solubility, the stability over time, the coatability, the sensitivity, the developability, and the pattern characteristics to be formed of the curable resin composition are excellent, and Security can be improved.

本發明之硬化性樹脂組成物可含有作為溶媒之二丙二醇二甲基醚以外的溶媒。就其他之溶媒而言,例如,可舉例醚[二乙基醚;乙二醇單或二烷基醚、二乙二醇單或二烷基醚(二乙二醇甲基乙基醚等之二乙二醇二烷基醚等)、丙二醇單或二烷基醚、丙二醇單或二芳基醚、二丙二醇單或二烷基醚(二丙二醇二乙基醚等之二丙二醇二C2-4烷基醚等)、三丙二醇單或二烷基醚、1,3-丙二醇單或二烷基醚、1,3-丁二醇單或二烷基醚、1,4-丁二醇單或二烷基醚、甘油單、二或三烷基醚等之二醇醚類等之鏈狀醚;四氫呋喃、二烷等之環狀醚等]、酯(乙酸甲酯、乙酸乙酯、乙酸丁酯、乙酸異戊酯、乳酸乙酯、3-甲氧基丙酸甲酯、3-乙氧基丙酸乙酯、C5-6環烷二醇單或二乙酸酯、C5-6環烷二甲醇單或二乙酸酯等之羧酸酯類;乙 二醇單烷基醚乙酸酯、乙二醇單或二乙酸酯、二乙二醇單烷基醚乙酸酯、二乙二醇單或二乙酸酯、丙二醇單烷基醚乙酸酯、丙二醇單或二乙酸酯、二丙二醇單烷基醚乙酸酯、二丙二醇單或二乙酸酯、1,3-丙二醇單烷基醚乙酸酯、1,3-丙二醇單或二乙酸酯、1,3-丁二醇單烷基醚乙酸酯、1,3-丁二醇單或二乙酸酯、1,4-丁二醇單烷基醚乙酸酯、1,4-丁二醇單或二乙酸酯、1,6-己烷二醇單或二乙酸酯、甘油單、二或三乙酸酯、甘油單或二C1-4烷基醚二或單乙酸酯、三丙二醇單烷基醚乙酸酯、三丙二醇單或二乙酸酯等之乙二醇乙酸酯類或乙二醇醚乙酸酯類等)、酮(丙酮、甲基乙基酮、甲基異丁基酮、環己酮、3,5,5-三甲基-2-環己烯-1-酮等)、醯胺(N,N-二甲基乙醯胺、N,N-二甲基甲醯胺等)、亞碸(二甲基亞碸等)、醇(甲醇、乙醇、丙醇、C5-6環烷二醇、C5-6環烷二甲醇等)、烴(苯、甲苯、二甲苯等之芳香族烴、己烷等之脂肪族烴、環己烷等之脂環式烴等)等。此等可單獨使用或組合2種以上使用。此等中,以二丙二醇甲基n-丙基醚等之單或二丙二醇二烷基醚(二丙二醇二甲基醚除外)、丙二醇單甲基醚乙酸酯等之單或二丙二醇單烷基醚乙酸酯等為較佳。 The curable resin composition of the present invention may contain a solvent other than dipropylene glycol dimethyl ether as a solvent. As the other solvent, for example, ether [diethyl ether; ethylene glycol mono or dialkyl ether, diethylene glycol mono or dialkyl ether (diethylene glycol methyl ethyl ether, etc.) can be exemplified. Diethylene glycol dialkyl ether, etc.), propylene glycol mono or dialkyl ether, propylene glycol mono or diaryl ether, dipropylene glycol mono or dialkyl ether (dipropylene glycol diethyl ether, etc. dipropylene glycol di C 2- 4 alkyl ether, etc.), tripropylene glycol mono or dialkyl ether, 1,3-propanediol mono or dialkyl ether, 1,3-butanediol mono or dialkyl ether, 1,4-butanediol single Or a chain ether of a glycol ether such as a dialkyl ether or a glycerol mono-, di- or trialkyl ether; tetrahydrofuran, two a cyclic ether such as an alkane, etc.], an ester (methyl acetate, ethyl acetate, butyl acetate, isoamyl acetate, ethyl lactate, methyl 3-methoxypropionate, 3-ethoxypropionic acid a carboxylate such as an ester, a C 5-6 cycloalkane mono or diacetate, a C 5-6 cycloalkanediethanol mono or diacetate; an ethylene glycol monoalkyl ether acetate, B Diol mono or diacetate, diethylene glycol monoalkyl ether acetate, diethylene glycol mono or diacetate, propylene glycol monoalkyl ether acetate, propylene glycol mono or diacetate, two Propylene glycol monoalkyl ether acetate, dipropylene glycol mono or diacetate, 1,3-propanediol monoalkyl ether acetate, 1,3-propanediol mono or diacetate, 1,3-butanediol Monoalkyl ether acetate, 1,3-butanediol mono or diacetate, 1,4-butanediol monoalkyl ether acetate, 1,4-butanediol mono or diacetate 1,6-hexanediol mono or diacetate, glycerol mono, di or triacetate, glycerol mono or di C 1-4 alkyl ether di or monoacetate, tripropylene glycol monoalkyl ether Acetate, ethylene glycol ester such as tripropylene glycol mono- or diacetate or glycol ether acetate, etc.), ketone (acetone, methyl group) Ketone, methyl isobutyl ketone, cyclohexanone, 3,5,5-trimethyl-2-cyclohexen-1-one, etc., decylamine (N,N-dimethylacetamide, N,N-dimethylformamide, etc.), hydrazine (dimethyl hydrazine, etc.), alcohol (methanol, ethanol, propanol, C 5-6 cycloalkanediol, C 5-6 naphthenic dimethanol) And the like, a hydrocarbon (an aromatic hydrocarbon such as benzene, toluene or xylene, an aliphatic hydrocarbon such as hexane or the like, or an alicyclic hydrocarbon such as cyclohexane). These may be used alone or in combination of two or more. Among these, mono or dipropylene glycol monoalkane such as dipropylene glycol methyl n-propyl ether or the like, such as mono- or dipropylene glycol dialkyl ether (excluding dipropylene glycol dimethyl ether) or propylene glycol monomethyl ether acetate. Alkyl ether acetate or the like is preferred.

溶媒相對於硬化性樹脂組成物全體的含量,例如可為10~80質量%,較佳為15~80質量%,更佳為20~80質量%。藉由作成如此範圍,可作成硬化性樹脂組成物之溶解性、經時安定性、塗布性、感度、顯影性、形成的圖案特性等更優異者,且安全性可更高。 The content of the solvent relative to the entire curable resin composition is, for example, 10 to 80% by mass, preferably 15 to 80% by mass, and more preferably 20 to 80% by mass. By setting it in such a range, the solubility, the stability with time, the coatability, the sensitivity, the developability, the pattern characteristics to be formed, and the like of the curable resin composition can be made more excellent, and the safety can be made higher.

溶媒中的二丙二醇二甲基醚與其他溶媒之重量比(前者:後者)可為100:0~30:70,較佳為100:0~50:50,更佳為100:0~70:30,又更佳為100:0~80:20。藉由作成如此比率,可成為硬化性樹脂組成物之溶解性、經時安定性、塗布性、感度、顯影性、形成的圖案特性等更為優異者,且安全性變高。 The weight ratio of dipropylene glycol dimethyl ether to other solvent in the solvent (the former: the latter) may be 100:0 to 30:70, preferably 100:0 to 50:50, more preferably 100:0 to 70: 30, and more preferably 100:0~80:20. By making such a ratio, the solubility, the stability over time, the coatability, the sensitivity, the developability, the pattern characteristics to be formed, and the like of the curable resin composition are more excellent, and the safety is improved.

<共聚物之製造方法> <Method for producing copolymer>

本發明之硬化性樹脂組成物中所含的共聚物可藉由將含有對應單體單元(A)、(B)的聚合性不飽和化合物、與因應必要之單體單元(C)及對應其他單體的聚合性不飽和化合物的單體混合物交付共聚合(乙烯基聚合)而製造。 The copolymer contained in the curable resin composition of the present invention can be obtained by including a polymerizable unsaturated compound containing the corresponding monomer units (A) and (B), and a monomer unit (C) necessary for the reaction, and other The monomer mixture of the monomeric polymerizable unsaturated compound is produced by copolymerization (vinyl polymerization).

就聚合所使用的聚合起始劑而言,可使用通常之自由基起始劑。例如,2,2’-偶氮雙異丁腈、2,2’-偶氮雙(2,4-二甲基戊腈)、2,2’-偶氮雙(4-甲氧基-2,4-二甲基戊腈)、二甲基-2,2’-偶氮雙(2-甲基丙酸酯)、2,2’-偶氮雙(異丁酸)二甲酯、二乙基-2,2’-偶氮雙(2-甲基丙酸酯)、二丁基-2,2’-偶氮雙(2-甲基丙酸酯)等之偶氮化合物、過氧化苯甲醯基、過氧化月桂醯基、t-丁基過氧基新戊酸酯、1,1-雙(t-丁基過氧基)環己烷等之有機過氧化物、過氧化氫等。使用過氧化物作為自由基聚合起始劑的情形,亦可組合還原劑而作為氧化還原型之起始劑。上述中以偶氮化合物為較佳,尤其以2,2’-偶氮雙異丁腈、2,2’-偶氮雙(2,4-二甲基戊腈)、2,2’-偶氮雙(異丁酸)二甲酯為較佳。 As the polymerization initiator used in the polymerization, a usual radical initiator can be used. For example, 2,2'-azobisisobutyronitrile, 2,2'-azobis(2,4-dimethylvaleronitrile), 2,2'-azobis(4-methoxy-2) , 4-dimethylvaleronitrile), dimethyl-2,2'-azobis(2-methylpropionate), 2,2'-azobis(isobutyrate) dimethyl ester, two Azo compound such as ethyl-2,2'-azobis(2-methylpropionate), dibutyl-2,2'-azobis(2-methylpropionate), peroxidation Organic peroxide such as benzamidine, laurate, t-butylperoxypivalate, 1,1-bis(t-butylperoxy)cyclohexane, hydrogen peroxide Wait. In the case where a peroxide is used as the radical polymerization initiator, a reducing agent may be combined to serve as a redox-type initiator. Among the above, an azo compound is preferred, especially 2,2'-azobisisobutyronitrile, 2,2'-azobis(2,4-dimethylvaleronitrile), 2,2'-even Nitrogen bis(isobutyrate) dimethyl ester is preferred.

聚合起始劑之使用量可於不損害平順的共聚合的範圍內加以適當選擇,但通常為相對於總單體成分及聚合起始劑之總量,為1~30質量%左右,較佳為5~25質量%左右。 The amount of the polymerization initiator to be used can be appropriately selected within the range which does not impair the smooth copolymerization, but it is usually about 1 to 30% by mass, preferably about 1 to 30% by mass based on the total of the total monomer component and the polymerization initiator. It is about 5 to 25 mass%.

於本發明,亦可併用於自由基聚合一般所使用的鏈轉移劑。就具體例而言,可舉例硫醇類(n-十二基硫醇、n-辛基硫醇、n-丁基硫醇、tert-丁基硫醇、n-月桂基硫醇、巰基乙醇、巰基丙醇、三乙二醇二硫醇等)、硫醇酸類(巰基丙酸、硫苯甲酸、硫二醇酸、硫蘋果酸等)、醇類(異丙基醇等)、胺類(二丁基胺等)、次磷酸鹽類(次磷酸鈉等)、α-甲基苯乙烯二聚物、萜品油烯(terpinolene)、月桂烯(myrcene)、檸檬烯(limonene)、α-蒎烯、β-蒎烯等,鏈轉移劑之量相對於總自由基聚合性單體之量,較佳為0.001~3質量%。使用鏈轉移劑的情形,預先與聚合性乙烯基單體混合為較佳。 In the present invention, it can also be used in combination with a chain transfer agent generally used in radical polymerization. Specific examples thereof include mercaptans (n-dodecyl mercaptan, n-octyl mercaptan, n-butyl mercaptan, tert-butyl mercaptan, n-lauryl mercaptan, mercaptoethanol , mercaptopropanol, triethylene glycol dithiol, etc.), thiol acids (mercaptopropionic acid, thiobenzoic acid, thioglycolic acid, sulfur malic acid, etc.), alcohols (isopropyl alcohol, etc.), amines (dibutylamine, etc.), hypophosphites (sodium hypophosphite, etc.), α-methylstyrene dimer, terpinolene, myrcene, limonene, α- The amount of the chain transfer agent, such as terpene or β-pinene, is preferably 0.001 to 3% by mass based on the total amount of the radical polymerizable monomer. In the case of using a chain transfer agent, it is preferred to mix it with a polymerizable vinyl monomer in advance.

聚合可藉由溶液聚合、塊狀聚合、懸浮聚合、塊狀-懸浮聚合、乳化聚合等之製造苯乙烯系聚合物或丙烯酸系聚合物之際所使用的慣用方法來進行。此等中以溶液聚合為較佳。單體、聚合起始劑各自可一併供給於反應系統,亦可將其一部份或全部逐滴加入反應系統。例如,可採用保持於一定溫度的單體與聚合溶媒之混合液中,逐滴滴入溶解了聚合起始劑的聚合溶媒的溶液而聚合的方法;或將預先使單體、聚合起始劑溶解於聚合溶媒的溶液逐滴添加於保持一定溫度的聚合溶媒中而聚合的方法(滴下聚合法)等。聚合溫度可於例如30~150℃左右之範圍內適宜選擇。 The polymerization can be carried out by a conventional method used for producing a styrene polymer or an acrylic polymer such as solution polymerization, bulk polymerization, suspension polymerization, bulk-suspension polymerization or emulsion polymerization. Among these, solution polymerization is preferred. Each of the monomer and the polymerization initiator may be supplied to the reaction system at the same time, or a part or all of it may be added dropwise to the reaction system. For example, a method in which a solution of a polymerization solvent in which a polymerization initiator is dissolved is added dropwise to a mixture of a monomer and a polymerization solvent maintained at a certain temperature may be used; or a monomer or a polymerization initiator may be previously used. The solution dissolved in the polymerization solvent is added dropwise to a polymerization solvent maintained at a constant temperature to be polymerized (drop polymerization method). The polymerization temperature can be suitably selected, for example, in the range of about 30 to 150 °C.

聚合溶媒可因應單體組成等而適宜選擇。就聚合溶媒而言,可使用上述例示之溶媒。就聚合溶媒而言,以含30質量%以上之二丙二醇二甲基醚的溶媒為較佳(更佳為50質量%以上,特佳為80質量%以上)。經由使用如此聚合溶媒,可於硬化性樹脂組成物製造時省略溶媒置換等之處理,而可更簡化製造步驟。 The polymerization solvent can be appropriately selected depending on the monomer composition and the like. As the polymerization solvent, the above-exemplified solvent can be used. The polymerization solvent is preferably a solvent containing 30% by mass or more of dipropylene glycol dimethyl ether (more preferably 50% by mass or more, particularly preferably 80% by mass or more). By using such a polymerization solvent, the treatment such as solvent replacement can be omitted in the production of the curable resin composition, and the production steps can be further simplified.

依據上述方法生成本發明之共聚物。共聚物之重量平均分子量係例如為500~100000,較佳為1000~40000,更佳為2000~30000左右。共聚物之分散度(重量平均分子量Mw/數平均分子量Mn)為1~3左右。 The copolymer of the present invention is produced according to the above method. The weight average molecular weight of the copolymer is, for example, 500 to 100,000, preferably 1,000 to 40,000, more preferably about 2,000 to 30,000. The degree of dispersion (weight average molecular weight Mw / number average molecular weight Mn) of the copolymer is about 1 to 3.

[硬化性樹脂組成物之製造方法] [Method for Producing Curable Resin Composition]

本發明之硬化性樹脂組成物之製造方法其特徵為含有(1)使用含有二丙二醇二甲基醚之溶媒作為聚合溶媒而製造共聚物的步驟、或(2)將共聚物之溶媒與含有二丙二醇二甲基醚的溶媒交換的溶媒交換步驟。 The method for producing a curable resin composition of the present invention is characterized by comprising (1) a step of producing a copolymer using a solvent containing dipropylene glycol dimethyl ether as a polymerization solvent, or (2) preparing a solvent and a copolymer of the copolymer A solvent exchange step for solvent exchange of propylene glycol dimethyl ether.

以本發明之硬化性樹脂組成物之製造方法,可於上述方法所獲得的共聚物之聚合液,因應必要調整固體成分濃度、作溶媒交換、施予過濾處理。含有二丙二醇二甲基醚之溶媒中之二丙二醇二甲基醚的含量為30質量%以上較佳(更佳為50質量%以上,特佳為80質量%以上)。 According to the method for producing a curable resin composition of the present invention, the polymerization liquid of the copolymer obtained by the above method can be adjusted by adjusting the solid content concentration, performing solvent exchange, and applying a filtration treatment. The content of the dipropylene glycol dimethyl ether in the solvent containing dipropylene glycol dimethyl ether is preferably 30% by mass or more (more preferably 50% by mass or more, particularly preferably 80% by mass or more).

以本發明之硬化性樹脂組成物之製造方法,進一步因應必要,可摻合硬化觸媒[熱酸產生劑(熱硬化觸媒、熱陽離子聚合起始劑)、光酸產生劑(光硬化觸媒、光陽離子聚合起始劑)]、光自由基起始劑、硬化劑、硬化促進劑、放射線敏感性成分、反應性稀釋劑、添加劑(交聯 劑、填充劑、著色用顏料、聚合禁止劑、密著性賦予劑、消泡劑、難燃劑、氧化防止劑、紫外線吸收劑、低應力化劑、可撓性賦予劑、蠟類、樹脂、交聯劑、鹵素捕捉劑、調平劑、濕潤改良劑等)。又,藉由沈澱或再沈澱聚合所生成的聚合物而純化,將此經純化的聚合物,與前述適宜的添加物一起,因應用途而溶解於溶媒,亦可獲得硬化性樹脂組成物。就構成硬化性樹脂組成物之溶媒而言,相對於全溶媒,可使用30~100質量%之二丙二醇二甲基醚,因應必要可使用作為其他溶媒之前述例示之溶媒。 According to the method for producing a curable resin composition of the present invention, a curing catalyst can be further blended as necessary [thermal acid generator (thermosetting catalyst, thermal cationic polymerization initiator), photoacid generator (photohardening contact) Medium, photocationic polymerization initiator), photoradical initiator, hardener, hardening accelerator, radiation sensitive component, reactive diluent, additive (crosslinking) Agent, filler, pigment for coloring, polymerization inhibitor, adhesion imparting agent, antifoaming agent, flame retardant, oxidation inhibitor, ultraviolet absorber, low stress agent, flexibility imparting agent, wax, resin , cross-linking agent, halogen scavenger, leveling agent, wetting improver, etc.). Further, the polymer produced by precipitation or reprecipitation polymerization is purified, and the purified polymer is dissolved in a solvent together with the above-mentioned suitable additive to obtain a curable resin composition. In the solvent constituting the curable resin composition, 30 to 100% by mass of dipropylene glycol dimethyl ether can be used for the total solvent, and the above-exemplified solvent which is another solvent can be used as necessary.

前述硬化觸媒中,就熱酸產生劑而言,例如,可使用San-Aid SI-45、San-Aid SI-47、San-Aid SI-60、San-Aid SI-60L、San-Aid SI-80、San-Aid SI-80L、San-Aid SI-100、San-Aid SI-100L、San-Aid SI-145、San-Aid SI-150、San-Aid SI-160、San-Aid SI-110L、San-Aid SI-180L(以上,三新化學工業公司製品,商品名)、CI-2921、CI-2920、CI-2946、CI-3128、CI-2624、CI-2639、CI-2064(以上,日本曹達(股)公司製品,商品名)、CP-66、CP-77(旭電化工業公司製品,商品名)、FC-520(3M公司製品,商品名)等代表的重氮鎓鹽、錪鹽、鋶鹽、鏻鹽、硒鹽、氧鎓鹽、銨鹽等。 Among the aforementioned hardening catalysts, for the thermal acid generator, for example, San-Aid SI-45, San-Aid SI-47, San-Aid SI-60, San-Aid SI-60L, San-Aid SI can be used. -80, San-Aid SI-80L, San-Aid SI-100, San-Aid SI-100L, San-Aid SI-145, San-Aid SI-150, San-Aid SI-160, San-Aid SI- 110L, San-Aid SI-180L (above, Sanxin Chemical Industry Co., Ltd., trade name), CI-2921, CI-2920, CI-2946, CI-3128, CI-2624, CI-2639, CI-2064 ( The diazonium salt represented by the above-mentioned products of Japan, Co., Ltd., product name, CP-66, CP-77 (product of Asahi Denki Chemical Co., Ltd., product name), FC-520 (product of 3M company, trade name) , barium salts, barium salts, barium salts, selenium salts, oxonium salts, ammonium salts, and the like.

就光酸產生劑而言,例如,可使用Cyracure UVI-6970、Cyracure UVI-6974、Cyracure UVI-6990、Cyracure UVI-950(以上,美國Union Carbide公司製,商品名)、Irgacure 261(Ciba Speciality Chemicals公司製,商品名) 、SP-150、SP-151、SP-170、Optomer SP-171(以上,旭電化工業股份有限公司製,商品名)、CG-24-61(Ciba Speciality Chemicals公司製,商品名)、DAICATII(Daicel化學工業公司製,商品名)、UVAC1591[Daicel‧CYTEC(股)公司製,商品名]、CI-2064、CI-2639、CI-2624、CI-2481、CI-2734、CI-2855、CI-2823、CI-2758(以上,日本曹達公司製品,商品名)、PI-2074(Rhône-Poulenc公司製,商品名,五氟苯基硼酸鹽甲苯醯基茴香基錪鹽)、FFC509(3M公司製品,商品名)、BBI-102、BBI-101、BBI-103、MPI-103、TPS-103、MDS-103、DTS-103、NAT-103、NDS-103(Midori化學公司製,商品名)、CD-1012(美國,Sartomer公司製,商品名)等代表的重氮鎓鹽、錪鹽、鋶鹽、鏻鹽、硒鹽、氧鎓鹽、銨鹽等。 As the photoacid generator, for example, Cyracure UVI-6970, Cyracure UVI-6974, Cyracure UVI-6990, Cyracure UVI-950 (above, trade name, manufactured by Union Carbide, USA), Irgacure 261 (Ciba Speciality Chemicals) can be used. Company system, trade name) , SP-150, SP-151, SP-170, Optomer SP-171 (above, manufactured by Asahi Kasei Kogyo Co., Ltd., trade name), CG-24-61 (manufactured by Ciba Speciality Chemicals, trade name), DAICATII ( Daicel Chemical Industry Co., Ltd., trade name), UVAC1591 [Daicel‧CYTEC Co., Ltd., trade name], CI-2064, CI-2639, CI-2624, CI-2481, CI-2734, CI-2855, CI -2823, CI-2758 (above, product of Japan Soda Corporation, trade name), PI-2074 (manufactured by Rhône-Poulenc, trade name, pentafluorophenyl borate tolyl fenyl sulfonium salt), FFC509 (3M company) Product, trade name), BBI-102, BBI-101, BBI-103, MPI-103, TPS-103, MDS-103, DTS-103, NAT-103, NDS-103 (manufactured by Midori Chemical Co., Ltd., trade name) And diazonium salt, sulfonium salt, sulfonium salt, sulfonium salt, selenium salt, oxonium salt, ammonium salt, etc. represented by CD-1012 (manufactured by Sartomer Co., Ltd., trade name).

就光自由基起始劑而言,例如可單獨使用二苯甲酮等之二苯甲酮類;乙醯苯苄基、苄基二甲基酮;苯偶姻(benzoin)、苯偶姻甲基醚、苯偶姻乙基醚、苯偶姻異丙基醚等之苯偶姻類;二甲氧基乙醯苯、二甲氧基苯基乙醯苯、二乙氧基乙醯苯等之乙醯苯類;二苯基二亞硫酸酯、鄰苯甲醯基苯甲酸甲酯、4-二甲基胺基苯甲酸乙酯[日本化藥(股)製Kayacure EPA等]、2,4-二乙基噻噸酮[日本化藥(股)製Kayacure DETX等]、2-甲基-1-[4-(甲基)苯基]-2-啉基丙酮-1[Ciba-Geigy(股)製Irgacure 907等]、四(t-丁基過氧基羰基)二苯甲酮、苄基、2-羥基-2-甲基-1-苯基-丙-1-酮、4,4-雙二乙基胺基二苯甲酮、2,2'-雙(2-氯苯基)-4,5,4’,5’-四苯基-1,2’-二咪唑基[土谷化學(股) 製B-CIM等]或混合使用,因應必要可添加光增感劑。聚合起始劑係於硬化性樹脂組成物中以1~10質量%之比率摻合者為較佳。 As the photoradical initiator, for example, benzophenones such as benzophenone may be used alone; acetophenone, benzyldimethyl ketone; benzoin, benzoin A Benzoin such as benzyl ether, benzoin ethyl ether, benzoin isopropyl ether; dimethoxyacetamidine, dimethoxyphenyl acetophenone, diethoxy acetophenone, etc. Benzene benzene; diphenyl di sulfite, methyl phthalate benzoate, ethyl 4-dimethylamino benzoate [Kayacure EPA, etc. made by Nippon Kayaku Co., Ltd.], 2, 4-Diethylthioxanthone [Kayacure DETX, etc. made by Nippon Kayaku Co., Ltd.], 2-methyl-1-[4-(methyl)phenyl]-2- Phytylacetone-1 [Irgacure 907, etc., manufactured by Ciba-Geigy Co., Ltd.], tetrakis(t-butylperoxycarbonyl)benzophenone, benzyl, 2-hydroxy-2-methyl-1-phenyl -propan-1-one, 4,4-bisdiethylaminobenzophenone, 2,2'-bis(2-chlorophenyl)-4,5,4',5'-tetraphenyl- 1,2'-diimidazolyl [B-CIM, etc. manufactured by Toya Chemical Co., Ltd.] or a mixture may be used, and a photosensitizer may be added as necessary. It is preferred that the polymerization initiator is blended in the curable resin composition at a ratio of from 1 to 10% by mass.

相對於硬化性樹脂組成物中之前述共聚物(樹脂分),硬化觸媒之添加量例如為0.05~10質量%,較佳為0.5~5質量%。硬化觸媒可單獨或組合2種以上使用。 The amount of the curing catalyst added is, for example, 0.05 to 10% by mass, preferably 0.5 to 5% by mass, based on the copolymer (resin fraction) in the curable resin composition. The curing catalyst can be used singly or in combination of two or more.

就前述交聯劑而言,可使用多官能性醇化合物或多官能性硫醇化合物類等。 As the crosslinking agent, a polyfunctional alcohol compound, a polyfunctional thiol compound, or the like can be used.

就多官能性醇化合物而言,只要為具有2個以上羥基之化合物即可,例如,可舉例乙二醇、二乙二醇、三乙二醇、丙二醇、二丙二醇、1,3-丁二醇、1,4-丁二醇、甘油、二甘油、D-葡萄糖、D-葡糖醇(glucitol)、異戊二烯二醇、丁二醇、1,5-戊二醇、1,6-己二醇、1,9-壬二醇、新戊二醇等之多元醇類;聚乙二醇類、聚丙二醇類、聚丁二醇類、聚四亞甲基二醇類等之聚伸烷二醇類;聚己內酯二醇類、聚己內酯三醇類、聚碳酸酯二醇類等。 The polyfunctional alcohol compound may be a compound having two or more hydroxyl groups, and examples thereof include ethylene glycol, diethylene glycol, triethylene glycol, propylene glycol, dipropylene glycol, and 1,3-butyl. Alcohol, 1,4-butanediol, glycerin, diglycerin, D-glucose, d-glucitol, isoprene diol, butanediol, 1,5-pentanediol, 1,6 - Polyols such as hexanediol, 1,9-nonanediol, neopentyl glycol, etc.; polyethylene glycols, polypropylene glycols, polytetramethylene glycols, polytetramethylene glycols, etc. Alkanediols; polycaprolactone glycols, polycaprolactone triols, polycarbonate glycols, and the like.

就多官能性硫醇化合物而言,只要為具有2個以上之硫醇基的化合物即可,例如,可舉例己烷二硫醇、癸烷二硫醇、1,4-丁二醇雙硫丙酸酯、1,4-丁二醇雙硫羥乙酸酯、乙二醇雙硫羥乙酸酯、乙二醇雙硫丙酸酯、三羥甲基丙烷三硫羥乙酸酯、三羥甲基丙烷三硫丙酸酯、三羥甲基丙烷三(3-巰基丁酸酯)、季戊四醇肆硫羥乙酸酯、季戊四醇肆硫丙酸酯、三巰基丙酸三(2-羥基乙基)三聚異氰酸酯、1,4-二甲基巰基苯、2,4,6-三巰基-s-三、2-(N,N-二丁基胺基)-4,6-二巰基-s-三、四乙二醇雙3-巰基丙 酸酯、三羥甲基丙烷三3-巰基丙酸酯、三(3-巰基炔丙基氧基乙基)三聚異氰酸酯、季戊四醇肆3-巰基丙酸酯、二季戊四醇肆3-巰基丙酸酯、1,4-雙(3-巰基丁醯基氧基)丁烷、1,3,5-三(3-巰基丁氧基乙基)-1,3,5-三-2,4,6(1H,3H,5H)-三酮、季戊四醇肆(3-巰基丁酸酯)等。多官能性醇化合物或多官能性硫醇化合物類可以1種單獨存在,亦可以2種以上存在。 The polyfunctional thiol compound may be a compound having two or more thiol groups, and examples thereof include hexane dithiol, decane dithiol, and 1,4-butanediol disulfide. Propionate, 1,4-butanediol dithioacetate, ethylene glycol dithioacetate, ethylene glycol dithiopropionate, trimethylolpropane trithiol acetate, three Hydroxymethylpropane trithiopropionate, trimethylolpropane tris(3-mercaptobutyrate), pentaerythritol thiol acetate, pentaerythritol thiopropionate, tris-propionic acid tris(2-hydroxyethyl) Trimeric isocyanate, 1,4-dimethylnonylbenzene, 2,4,6-trimethyl-s-three , 2-(N,N-dibutylamino)-4,6-dimercapto-s-three , tetraethylene glycol bis 3-mercaptopropionate, trimethylolpropane tris 3-mercaptopropionate, tris(3-decylpropargyloxyethyl) trimer isocyanate, pentaerythritol 肆 3-mercaptopropionic acid Ester, dipentaerythritol 肆 3-mercaptopropionate, 1,4-bis(3-mercaptobutyloxy)butane, 1,3,5-tris(3-mercaptobutoxyethyl)-1,3, 5-three -2,4,6(1H,3H,5H)-trione, pentaerythritol bismuth (3-mercaptobutyrate), and the like. The polyfunctional alcohol compound or the polyfunctional thiol compound may be present alone or in combination of two or more.

就前述放射線敏感性成分而言,可舉例多官能性(甲基)丙烯酸酯、多官能性環氧基化合物、多官能性胺甲酸酯(甲基)丙烯酸酯、多官能性環氧基(甲基)丙烯酸酯(於環氧基加成丙烯酸的形式)等。亦可為組合多官能性(甲基)丙烯酸酯與熱或放射線聚合起始劑、多官能性環氧基化合物與熱或放射線酸產生劑來摻合。此等放射線敏感性成分、或熱或放射線聚合起始劑、熱或放射線酸產生劑個別可為單獨1種,亦可以2種以上存在。 The above-mentioned radiation-sensitive component may, for example, be a polyfunctional (meth) acrylate, a polyfunctional epoxy compound, a polyfunctional urethane (meth) acrylate, or a polyfunctional epoxy group ( Methyl) acrylate (in the form of an epoxy group-added acrylic acid) or the like. It is also possible to combine a polyfunctional (meth) acrylate with a thermal or radiation polymerization initiator, a polyfunctional epoxy compound, and a thermal or radiation acid generator. These radiation-sensitive components, or a heat or radiation polymerization initiator, a heat or a radiation acid generator may be used alone or in combination of two or more.

就多官能性(甲基)丙烯酸酯之具體例而言,可舉例乙二醇、丙二醇等之伸烷二醇之二(甲基)丙烯酸酯類、聚乙二醇、聚丙二醇等之聚伸烷二醇之二(甲基)丙烯酸酯類、兩末端羥基聚丁二烯、兩末端羥基聚異戊二烯、兩末端羥基聚辛內酯等之兩末端羥基化聚合體之二(甲基)丙烯酸酯類、甘油、1,2,4-丁三醇、三羥甲基練鏈烷、四羥甲基鏈烷、季戊四醇、二季戊四醇等之3價以上之多價醇的聚(甲基)丙烯酸酯類、3價以上之多價醇之聚伸烷二醇加成物之聚(甲基)丙烯酸酯類、1,4-環己烷二醇、1,4-苯二醇類等之環式多元醇之聚(甲基)丙烯酸酯類、聚 酯(甲基)丙烯酸酯、環氧基(甲基)丙烯酸酯、胺甲酸酯(甲基)丙烯酸酯、醇酸樹脂(alkyd)(甲基)丙烯酸酯、矽樹脂(甲基)丙烯酸酯、螺烷(spirane)樹脂(甲基)丙烯酸酯等之寡(甲基)丙烯酸酯等。此等可為單獨1種,亦可以2種以上存在。 Specific examples of the polyfunctional (meth) acrylate include poly(ethylene) acrylates such as ethylene glycol and propylene glycol, and polyethylene glycol, polypropylene glycol, and the like. Two (terminal) hydroxylated polymers of alkanediol di(meth)acrylates, two terminal hydroxyl polybutadienes, two terminal hydroxyl polyisoprene, two terminal hydroxyl polycaprolactones, etc. a poly(methyl group) of a trivalent or higher polyvalent alcohol such as acrylate, glycerin, 1,2,4-butanetriol, trimethylolane alkane, tetramethylolalkane, pentaerythritol or dipentaerythritol a poly(meth)acrylate, a 1,4-cyclohexanediol, a 1,4-benzenediol, etc. of an alkylene oxide adduct of an acrylate or a trivalent or higher polyvalent alcohol Poly(meth) acrylates of polycyclic alcohols, poly Ester (meth) acrylate, epoxy (meth) acrylate, urethane (meth) acrylate, alkyd (meth) acrylate, decyl (meth) acrylate An oligo (meth) acrylate such as a spirane resin (meth) acrylate. These may be used alone or in combination of two or more.

就多官能性環氧基化合物而言,例如,可使用商品名「CELLOXIDE 2021」,商品名「CELLOXIDE 2081」,商品名「CELLOXIDE 3000」,商品名「EHPE3150」,商品名「EPOLEAD GT401」(以上,Daicel化學工業股份有限公司製),商品名「EPOLIGHT 4000」(共榮社化學製)等。此等可為單獨1種,亦可以2種以上存在。 For the polyfunctional epoxy compound, for example, the trade name "CELLOXIDE 2021", trade name "CELLOXIDE 2081", trade name "CELLOXIDE 3000", trade name "EHPE 3150", trade name "EPOLEAD GT401" (above) can be used. , manufactured by Daicel Chemical Industry Co., Ltd., trade name "EPOLIGHT 4000" (manufactured by Kyoeisha Chemical Co., Ltd.). These may be used alone or in combination of two or more.

就前述反應性稀釋劑而言,只要可溶解上述共聚物者即可,並未特別限制,例如,可使用具有1種以上之(甲基)丙烯酸基的聚合性乙烯基單體等。又,反應性稀釋劑亦可為作為前述放射線敏感性成分的機能。 The reactive diluent is not particularly limited as long as it can dissolve the copolymer. For example, a polymerizable vinyl monomer having one or more (meth)acrylic groups can be used. Further, the reactive diluent may also function as the aforementioned radiation sensitive component.

就反應性稀釋劑而言,具體而言,例如,可舉例異冰片基(甲基)丙烯酸酯、環己基(甲基)丙烯酸酯、辛基(甲基)丙烯酸酯等之烷基或環烷基(甲基)丙烯酸酯;2-羥基乙基(甲基)丙烯酸酯、3-羥基丙基(甲基)丙烯酸酯等之羥基烷基(甲基)丙烯酸酯;乙二醇之單或二(甲基)丙烯酸酯、甲氧基乙二醇之(甲基)丙烯酸酯、四乙二醇之單或二(甲基)丙烯酸酯、三丙二醇之單或二(甲基)丙烯酸酯等之二醇之單或二(甲基)丙烯酸酯;3,4-環氧基環己基甲基(甲基)丙烯酸酯、環氧丙基(甲基)丙烯酸酯等之含有環氧基之(甲基)丙烯酸酯;甘油二(甲基)丙烯酸酯、三羥甲基 丙烷三(甲基)丙烯酸酯、季戊四醇之三或四(甲基)丙烯酸酯、二季戊四醇六丙烯酸酯等之多元醇或其伸烷基氧化物加成物之(甲基)丙烯酸酯等。 With regard to the reactive diluent, specifically, for example, an alkyl group or a naphthene such as isobornyl (meth) acrylate, cyclohexyl (meth) acrylate, octyl (meth) acrylate or the like can be exemplified. a hydroxyalkyl (meth) acrylate such as 2-hydroxyethyl (meth) acrylate or 3-hydroxypropyl (meth) acrylate; or a single or two ethylene glycol (meth) acrylate, (meth) acrylate of methoxy glycol, mono or di (meth) acrylate of tetraethylene glycol, mono or di (meth) acrylate of tripropylene glycol, etc. a mono- or di(meth)acrylate of a diol; an epoxy group-containing (3,4-epoxycyclohexylmethyl (meth) acrylate, a glycidyl (meth) acrylate, etc. Acrylate; glycerol di(meth) acrylate, trimethylol A polyhydric alcohol such as propane tri(meth)acrylate, tris or tetra(meth)acrylate of pentaerythritol, dipentaerythritol hexaacrylate or the like, or a (meth) acrylate of an alkylene oxide adduct thereof.

其中,就反應性稀釋劑而言,由引火點為100℃以上者於製造步驟中的安全性確保的面向而言為較佳。又,就反應性稀釋劑而言,以三羥甲基丙烷三(甲基)丙烯酸酯等之多元醇或其伸烷基氧化物加成物之(甲基)丙烯酸酯等之多官能性(甲基)丙烯酸酯為特佳。 Among them, in the case of the reactive diluent, it is preferable that the ignition point is 100 ° C or more, and the safety is ensured in the manufacturing step. Further, in the case of the reactive diluent, polyfunctionality such as a polyol such as trimethylolpropane tri(meth)acrylate or a (meth) acrylate of an alkylene oxide adduct thereof ( Methyl) acrylate is particularly preferred.

相對於前述共聚物100質量份,反應性稀釋劑可以例如,1~1000質量份、較佳為50~700質量份、更佳為100~500質量份之比率摻合。 The reactive diluent may be blended in a ratio of, for example, 1 to 1000 parts by mass, preferably 50 to 700 parts by mass, more preferably 100 to 500 parts by mass, based on 100 parts by mass of the copolymer.

本發明之硬化性樹脂組成物中作為因應必要添加的填充劑,可舉例環氧基樹脂等之反應性樹脂、硫酸鋇、氧化矽、滑石、黏土及碳酸鈣等。就著色用顏料而言,可舉例酞菁綠、結晶紫、氧化鈦及碳黑等。就聚合禁止劑而言,可舉例氫醌、氫醌單甲基醚、啡噻等。 The filler to be added as necessary in the curable resin composition of the present invention may, for example, be a reactive resin such as an epoxy resin, barium sulfate, cerium oxide, talc, clay or calcium carbonate. Examples of the pigment for coloring include phthalocyanine green, crystal violet, titanium oxide, carbon black, and the like. As the polymerization inhibiting agent, hydroquinone, hydroquinone monomethyl ether, and thiophene can be exemplified. Wait.

如此所得的硬化性樹脂組成物,經由硬化對基材或基板具有高密著性的同時,可獲得耐溶劑性或耐鹼性等之耐藥品性為優異的硬化物(硬化皮膜等)。因此,除液晶光阻劑用材料之外,亦有用於作為塗料、印墨、塗布劑、黏接著劑等之構成成分,尤其可適合用於電子材料領域。 The curable resin composition thus obtained has high adhesion to the substrate or the substrate via curing, and a cured product (hardened film or the like) excellent in chemical resistance such as solvent resistance or alkali resistance can be obtained. Therefore, in addition to materials for liquid crystal photoresists, it is also used as a constituent component of paints, inks, coating agents, adhesives, and the like, and is particularly suitable for use in the field of electronic materials.

[硬化物] [hardened material]

本發明之硬化物係例如,可經由將上述硬化性樹脂組成物以旋轉塗布機、狹縫式塗布機等之方式,塗布於 各種基材或基板上而形成塗膜後,使該塗膜硬化而獲得。就基材或基板而言,可舉例玻璃、陶瓷、矽晶圓、金屬、塑膠等。可藉由旋轉塗布機或狹縫式塗布機等的塗布之周知方法來進行。本發明之硬化物於基板密著性、耐溶劑性、硬度、膜厚均一性、線寬均一性、感度、顯影性、形成的圖案特性等之諸物性為優異。 The cured product of the present invention can be applied, for example, to a curable resin composition by a spin coater or a slit coater. After the coating film is formed on various substrates or substrates, the coating film is cured and obtained. Examples of the substrate or the substrate include glass, ceramics, tantalum wafers, metals, plastics, and the like. This can be carried out by a known method of coating such as a spin coater or a slit coater. The cured product of the present invention is excellent in physical properties such as substrate adhesion, solvent resistance, hardness, film thickness uniformity, line width uniformity, sensitivity, developability, and formed pattern characteristics.

塗膜之硬化係藉由加熱或照射活性能量線而曝光、或曝光後加熱來進行。藉由熱使上述硬化性樹脂組成物硬化的情形,加熱溫度為50℃至260℃之範圍,較佳為80℃至240℃之範圍。又,藉由光使上述硬化性樹脂組成物硬化的情形,於曝光使用各種波長之光線、例如,紫外線、X射線、g線、i線、準分子雷射等。硬化後之塗膜厚度依用途可適宜選擇,但一般為0.1~40μm,較佳為0.3~20μm,更較佳為0.5~10μm左右。 The hardening of the coating film is carried out by heating or irradiation with an active energy ray, or by heating after exposure. In the case where the curable resin composition is cured by heat, the heating temperature is in the range of 50 ° C to 260 ° C, preferably in the range of 80 ° C to 240 ° C. Further, in the case where the curable resin composition is cured by light, light of various wavelengths such as ultraviolet rays, X rays, g lines, i-line, excimer laser or the like is used for exposure. The thickness of the coating film after hardening can be appropriately selected depending on the application, but it is usually 0.1 to 40 μm, preferably 0.3 to 20 μm, more preferably about 0.5 to 10 μm.

[實施例] [Examples]

以下,基於實施例以更詳細說明本發明,但本發明並未受限於此等實施例。 Hereinafter, the present invention will be described in more detail based on examples, but the present invention is not limited to the examples.

合成例1 Synthesis Example 1

於具備流冷卻器、滴液漏斗及攪拌機的1L燒瓶內以0.02L/分鐘流入氮氣而作成氮氣環境,置入二丙二醇二甲基醚250質量份,一邊攪拌一邊加熱至65℃。其次,將甲基丙烯酸30質量份、三環[5.2.1.02.6]癸-8-基 甲基丙烯酸酯60質量份、3,4-環氧基環己基甲基 甲基丙烯酸酯200質量份溶解於二丙二醇二甲基醚70質量份而調製溶液,該溶解液使用滴液漏斗歷經4小時逐滴添加於65℃保 溫的燒瓶內。另一方面,將聚合起始劑2,2’-偶氮雙(2,4-二甲基戊腈)30質量份溶解於二丙二醇二甲基醚220質量份的溶液,使用另外的滴液漏斗而歷經3小時逐滴添加至燒瓶內。聚合起始劑之溶液之滴下結束後,保持於65℃ 3小時,之後以二丙二醇二甲基醚140質量份稀釋後,冷卻至室溫而獲得共聚物A之溶液。所獲得的共聚物A溶液之固體成分為30.8質量%、酸價為75mg-KOH/g(換算固體成分)、重量平均分子量Mw為11,400、分散度為2.23。 In a 1 L flask equipped with a flow cooler, a dropping funnel, and a stirrer, nitrogen gas was introduced at 0.02 L/min to prepare a nitrogen atmosphere, and 250 parts by mass of dipropylene glycol dimethyl ether was placed, and the mixture was heated to 65 ° C while stirring. Next, 30 parts by mass of methacrylic acid, 60 parts by mass of tricyclo[5.2.1.0 2.6 ]癸-8-yl methacrylate, and 200 parts by mass of 3,4-epoxycyclohexylmethyl methacrylate were dissolved. A solution was prepared by dissolving 70 parts by mass of dipropylene glycol dimethyl ether, and the solution was added dropwise to a flask kept at 65 ° C for 4 hours using a dropping funnel. On the other hand, 30 parts by mass of a polymerization initiator 2,2'-azobis(2,4-dimethylvaleronitrile) was dissolved in a solution of 220 parts by mass of dipropylene glycol dimethyl ether, and another drop was used. The funnel was added dropwise to the flask over 3 hours. After completion of the dropwise addition of the solution of the polymerization initiator, the mixture was kept at 65 ° C for 3 hours, and then diluted with 140 parts by mass of dipropylene glycol dimethyl ether, and then cooled to room temperature to obtain a solution of the copolymer A. The obtained copolymer A solution had a solid content of 30.8 mass%, an acid value of 75 mg-KOH/g (as a solid content), a weight average molecular weight Mw of 11,400, and a degree of dispersion of 2.23.

合成例2 Synthesis Example 2

於具備流冷卻器、滴液漏斗及攪拌機的1L燒瓶內以0.02L/分鐘流入氮氣而作成氮氣環境,置入二丙二醇二甲基醚250質量份,一邊攪拌一邊加熱至65℃。其次,將甲基丙烯酸30質量份、三環[5.2.1.02.6]癸-8-基 甲基丙烯酸酯60質量份、3,4-環氧基環己基甲基 甲基丙烯酸酯200質量份溶解於二丙二醇二甲基醚70質量份而調製溶液,該溶解液使用滴液漏斗歷經4小時逐滴添加於65℃保溫的燒瓶內。另一方面,將聚合起始劑2,2’-偶氮雙(2,4-二甲基戊腈)30質量份溶解於二丙二醇二甲基醚220質量份的溶液,使用另外的滴液漏斗而歷經3小時逐滴添加至燒瓶內。聚合起始劑之溶液之滴下結束後,保持於65℃ 3小時,之後以二丙二醇二甲基醚70質量份及二丙二醇甲基n-丙基醚70質量份稀釋後,冷卻至室溫而獲得共聚物A之溶液。所獲得的共聚物A溶液之固體成分為31.1質量%、酸價為71mg-KOH/g(換算固體成分)、重量平均分子量Mw為11,800、分散度為2.22。 In a 1 L flask equipped with a flow cooler, a dropping funnel, and a stirrer, nitrogen gas was introduced at 0.02 L/min to prepare a nitrogen atmosphere, and 250 parts by mass of dipropylene glycol dimethyl ether was placed, and the mixture was heated to 65 ° C while stirring. Next, 30 parts by mass of methacrylic acid, 60 parts by mass of tricyclo[5.2.1.0 2.6 ]癸-8-yl methacrylate, and 200 parts by mass of 3,4-epoxycyclohexylmethyl methacrylate were dissolved. A solution was prepared by dissolving 70 parts by mass of dipropylene glycol dimethyl ether, and the solution was added dropwise to a flask kept at 65 ° C for 4 hours using a dropping funnel. On the other hand, 30 parts by mass of a polymerization initiator 2,2'-azobis(2,4-dimethylvaleronitrile) was dissolved in a solution of 220 parts by mass of dipropylene glycol dimethyl ether, and another drop was used. The funnel was added dropwise to the flask over 3 hours. After completion of the dropwise addition of the solution of the polymerization initiator, it was kept at 65 ° C for 3 hours, and then diluted with 70 parts by mass of dipropylene glycol dimethyl ether and 70 parts by mass of dipropylene glycol methyl n-propyl ether, and then cooled to room temperature. A solution of copolymer A was obtained. The obtained copolymer A solution had a solid content of 31.1% by mass, an acid value of 71 mg-KOH/g (as a solid content), a weight average molecular weight Mw of 11,800, and a degree of dispersion of 2.22.

合成例3 Synthesis Example 3

於具備流冷卻器、滴液漏斗及攪拌機的1L燒瓶內以0.02L/分鐘流入氮氣而作成氮氣環境,置入二丙二醇二甲基醚110質量份及丙二醇單甲基醚乙酸酯140質量份,一邊攪拌一邊加熱至65℃。其次,將甲基丙烯酸30質量份、三環[5.2.1.02.6]癸-8-基 甲基丙烯酸酯60質量份、3,4-環氧基環己基甲基 甲基丙烯酸酯200質量份溶解於丙二醇單甲基醚乙酸酯70質量份而調製溶液,該溶解液使用滴液漏斗歷經4小時逐滴添加於65℃保溫的燒瓶內。另一方面,將聚合起始劑2,2’-偶氮雙(2,4-二甲基戊腈)30質量份溶解於二丙二醇二甲基醚230質量份的溶液,使用另外的滴液漏斗而歷經3小時逐滴添加至燒瓶內。聚合起始劑之溶液之滴下結束後,保持於65℃ 3小時,之後以丙二醇單甲基醚乙酸酯130質量份稀釋後,冷卻至室溫而獲得共聚物A之溶液。所獲得的共聚物A溶液之固體成分為31.2質量%、酸價為73mg-KOH/g(固體成分換算)、重量平均分子量Mw為10,800、分散度為2.16。 In a 1 L flask equipped with a flow cooler, a dropping funnel, and a stirrer, nitrogen gas was introduced at 0.02 L/min to prepare a nitrogen atmosphere, and 110 parts by mass of dipropylene glycol dimethyl ether and 140 parts by mass of propylene glycol monomethyl ether acetate were placed. Heat to 65 ° C while stirring. Next, 30 parts by mass of methacrylic acid, 60 parts by mass of tricyclo[5.2.1.0 2.6 ]癸-8-yl methacrylate, and 200 parts by mass of 3,4-epoxycyclohexylmethyl methacrylate were dissolved. A solution was prepared by using 70 parts by mass of propylene glycol monomethyl ether acetate, and the solution was added dropwise to a flask kept at 65 ° C for 4 hours using a dropping funnel. On the other hand, 30 parts by mass of a polymerization initiator 2,2'-azobis(2,4-dimethylvaleronitrile) was dissolved in a solution of 230 parts by mass of dipropylene glycol dimethyl ether, and another drop was used. The funnel was added dropwise to the flask over 3 hours. After completion of the dropwise addition of the solution of the polymerization initiator, the mixture was kept at 65 ° C for 3 hours, and then diluted with 130 parts by mass of propylene glycol monomethyl ether acetate, and then cooled to room temperature to obtain a solution of the copolymer A. The solid content of the obtained copolymer A solution was 31.2% by mass, the acid value was 73 mg-KOH/g (in terms of solid content), the weight average molecular weight Mw was 10,800, and the degree of dispersion was 2.16.

合成例4 Synthesis Example 4

於具備流冷卻器、滴液漏斗及攪拌機的1L燒瓶內以0.02L/分鐘流入氮氣而作成氮氣環境,置入二丙二醇二甲基醚250質量份,一邊攪拌一邊加熱至65℃。其次,將甲基丙烯酸30質量份、3,4-環氧基三環[5.2.1.02,6]癸-8或9-基 丙烯酸酯260質量份溶解於二丙二醇二甲基醚70質量份而調製溶液,該溶解液使用滴液漏斗歷經4小時逐滴添加於65℃保溫的燒瓶內。另一方面,將聚合起始劑2,2’- 偶氮雙(2,4-二甲基戊腈)30質量份溶解於二丙二醇二甲基醚220質量份的溶液,使用另外的滴液漏斗而歷經3小時逐滴添加至燒瓶內。聚合起始劑之溶液之滴下結束後,保持於65℃ 3小時,之後以二丙二醇二甲基醚140質量份稀釋後,冷卻至室溫而獲得共聚物B之溶液。所獲得的共聚物B溶液之固體成分為29.8質量%、酸價為68mg-KOH/g(換算固體成分)、重量平均分子量Mw為11,100、分散度為2.21。 In a 1 L flask equipped with a flow cooler, a dropping funnel, and a stirrer, nitrogen gas was introduced at 0.02 L/min to prepare a nitrogen atmosphere, and 250 parts by mass of dipropylene glycol dimethyl ether was placed, and the mixture was heated to 65 ° C while stirring. Next, 30 parts by mass of methacrylic acid and 260 parts by mass of 3,4-epoxytricyclo[5.2.1.0 2,6 ]癸-8 or 9-yl acrylate are dissolved in 70 parts by mass of dipropylene glycol dimethyl ether. The solution was prepared, and the solution was added dropwise to a flask maintained at 65 ° C for 4 hours using a dropping funnel. On the other hand, 30 parts by mass of a polymerization initiator 2,2'-azobis(2,4-dimethylvaleronitrile) was dissolved in a solution of 220 parts by mass of dipropylene glycol dimethyl ether, and another drop was used. The funnel was added dropwise to the flask over 3 hours. After completion of the dropwise addition of the solution of the polymerization initiator, the mixture was kept at 65 ° C for 3 hours, and then diluted with 140 parts by mass of dipropylene glycol dimethyl ether, and then cooled to room temperature to obtain a solution of the copolymer B. The obtained copolymer B solution had a solid content of 29.8% by mass, an acid value of 68 mg-KOH/g (as a solid content), a weight average molecular weight Mw of 11,100, and a degree of dispersion of 2.21.

比較合成例1 Comparative Synthesis Example 1

除了將於合成例1之二丙二醇二甲基醚變更為丙二醇單甲基醚乙酸酯以外,與合成例1相同地合成共聚物A。獲得的共聚物A溶液之固體成分為31.1質量%、酸價為70mg-KOH/g(換算固體成分)、重量平均分子量Mw為11,600、分散度為2.33。 Copolymer A was synthesized in the same manner as in Synthesis Example 1, except that the dipropylene glycol dimethyl ether of Synthesis Example 1 was changed to propylene glycol monomethyl ether acetate. The obtained copolymer A solution had a solid content of 31.1% by mass, an acid value of 70 mg-KOH/g (as a solid content), a weight average molecular weight Mw of 11,600, and a degree of dispersion of 2.33.

比較合成例2 Comparative Synthesis Example 2

除了將於合成例1之二丙二醇二甲基醚變更為乙二醇單乙基醚乙酸酯之外,與合成例1同樣地合成共聚物A。獲得的共聚物A溶液之固體成分為31.2質量%、酸價為75mg-KOH/g(換算固體成分)、重量平均分子量Mw為11,600、分散度為2.26。 Copolymer A was synthesized in the same manner as in Synthesis Example 1, except that the dipropylene glycol dimethyl ether of Synthesis Example 1 was changed to ethylene glycol monoethyl ether acetate. The obtained copolymer A solution had a solid content of 31.2% by mass, an acid value of 75 mg-KOH/g (as a solid content), a weight average molecular weight Mw of 11,600, and a degree of dispersion of 2.26.

實施例1 Example 1

於合成例1製造的共聚物溶液50質量份中摻合三羥甲基丙烷三丙烯酸酯50質量份、作為起始劑之Ciba-Geigy製「Irgacure 907」2質量份,而調製硬化性樹脂組成物1。 In 50 parts by mass of the copolymer solution produced in Synthesis Example 1, 50 parts by mass of trimethylolpropane triacrylate and 2 parts by mass of "Irgacure 907" manufactured by Ciba-Geigy as a starter were blended to prepare a curable resin. Matter 1.

實施例2 Example 2

除了將共聚物溶液變更為以合成例2製造者之外,與實施例1同樣地,調製硬化性樹脂組成物2。 The curable resin composition 2 was prepared in the same manner as in Example 1 except that the copolymer solution was changed to the one produced in Synthesis Example 2.

實施例3 Example 3

除了將共聚物溶液變更為以合成例3製造者之外,與實施例1同樣地,調製硬化性樹脂組成物3。 The curable resin composition 3 was prepared in the same manner as in Example 1 except that the copolymer solution was changed to the one produced in Synthesis Example 3.

實施例4 Example 4

除了將共聚物溶液變更為以合成例4製造者之外,與實施例1同樣地,調製硬化性樹脂組成物4。 The curable resin composition 4 was prepared in the same manner as in Example 1 except that the copolymer solution was changed to the one produced in Synthesis Example 4.

比較例1 Comparative example 1

除了將共聚物溶液變更為以比較合成例1製造者之外,與實施例1同樣地,調製硬化性樹脂組成物5。 The curable resin composition 5 was prepared in the same manner as in Example 1 except that the copolymer solution was changed to the manufacturer of Comparative Synthesis Example 1.

比較例2 Comparative example 2

除了將共聚物溶液變更為以比較合成例2製造者之外,與實施例1同樣地,調製硬化性樹脂組成物6。 The curable resin composition 6 was prepared in the same manner as in Example 1 except that the copolymer solution was changed to the manufacturer of Comparative Synthesis Example 2.

評價試驗 Evaluation test (1)評價用試驗片之製作 (1) Production of test pieces for evaluation

以旋轉塗布機將各實施例及比較例所獲得的共聚物溶液(硬化性樹脂組成物)塗布於基材後,於80℃之熱壓下加熱10分鐘後,於230℃之烘箱中加熱30分鐘而製作各評價用試驗片。作為基材,使用玻璃板及不鏽鋼板。 The copolymer solution (curable resin composition) obtained in each of the examples and the comparative examples was applied to a substrate by a spin coater, and then heated at 80 ° C for 10 minutes under hot pressing, and then heated in an oven at 230 ° C. Test pieces for each evaluation were prepared in minutes. As the substrate, a glass plate and a stainless steel plate are used.

(2)安定性 (2) Stability

於各實施例及比較例,使用於室溫儲藏2週的共聚物溶液,與前述(1)同樣地,製作評價用試驗片(基材:玻璃板、不鏽鋼板)。 In each of the examples and the comparative examples, a copolymer test solution which was stored at room temperature for 2 weeks was used, and a test piece for evaluation (base material: glass plate, stainless steel plate) was produced in the same manner as in the above (1).

與使用儲藏前之共聚物溶液所製作的評價用試驗片[前述(1)]作比較,若為同等膜厚的均一塗膜則為◎、些微膜厚變化但幾乎同等之塗膜者為○、大的膜厚變化者為△、無法形成均一的塗膜者為×。使用以玻璃板製作的評價試驗片的情形,亦獲得與以不鏽鋼板製作的評價用試驗片的情形相同的結果。 In comparison with the test piece for evaluation [the above (1)] prepared by using the copolymer solution before storage, the uniform coating film having the same film thickness is ◎, and the film thickness is changed, but the film is almost the same. The change in the film thickness of the large film is Δ, and the film which cannot form a uniform film is ×. In the case of using an evaluation test piece made of a glass plate, the same results as in the case of the test piece for evaluation made of a stainless steel plate were obtained.

(3)密著性 (3) Adhesion

使用前述(1)製作的評價用試驗片(基材:玻璃板、不鏽鋼板),依據JISK-5600-5-6,測量自基材剝離之密著性。又,依據JISK5600-5-6之8.3記載的「表1試驗結果之分類」所規定的分類,基於下述基準作評價。 Using the test piece for evaluation (base material: glass plate, stainless steel plate) produced in the above (1), the adhesion from the substrate was measured in accordance with JIS K-5600-5-6. In addition, the classification specified in "Classification of Test Results in Table 1" described in 8.3 of JISK5600-5-6 is evaluated based on the following criteria.

◎:試驗結果之分類為「0」。 ◎: The classification of the test results is "0".

○:試驗結果之分類為「1」。 ○: The classification of the test results is "1".

△:試驗結果之分類為「2」。 △: The classification of the test results is "2".

×:試驗結果之分類為「3」「4」。 ×: The classification of the test results is "3" and "4".

(4)耐溶劑性 (4) Solvent resistance

於實施例及比較例,對以玻璃板製作的評價用試驗片,各自各滴入1滴異丙基醇(IPA)、甲基乙基酮(MEK)、N-甲基吡咯啶酮(NMP),並靜置10分鐘。之後水洗,滴入溶劑的位置完全未變化者為◎;殘餘些微溶劑的痕跡,但擦拭後會消失者為○;殘餘溶劑痕跡,即使擦拭亦不會消失者為△;全面地變色者為×。使用以不鏽鋼板製作的評價用試驗片的情形亦獲得相同結果。 In the examples and comparative examples, one drop of isopropyl alcohol (IPA), methyl ethyl ketone (MEK), and N-methylpyrrolidone (NMP) were each added to the test piece for evaluation made of a glass plate. ) and let stand for 10 minutes. After washing with water, the position where the solvent is dropped is not changed at all; ◎; traces of some micro-solvents remain, but disappear after wiping; ○; traces of residual solvent, even if wiping does not disappear, △; . The same results were obtained also in the case of using the test piece for evaluation made of a stainless steel plate.

評價試驗之結果示於表1。又,表1中,數值之單位表示重量份。 The results of the evaluation test are shown in Table 1. Further, in Table 1, the unit of the numerical value indicates the parts by weight.

表1中之溶媒之縮寫表示如下。 The abbreviations of the solvents in Table 1 are as follows.

DMM:二丙二醇二甲基醚 DMM: dipropylene glycol dimethyl ether

DPMNP:二丙二醇甲基n-丙基醚 DPMNP: dipropylene glycol methyl n-propyl ether

MMPGAC:丙二醇單甲基醚乙酸酯 MMPGAC: propylene glycol monomethyl ether acetate

EGA:乙二醇單乙基醚乙酸酯 EGA: ethylene glycol monoethyl ether acetate

如表所示可清楚得知,實施例之硬化性樹脂組成物、及由該樹脂組成物所獲得的硬化塗膜,於安定性、基板密著性及耐溶劑性之任一者之點皆為優異。相對於此,比較例之硬化性樹脂組成物及由該樹脂組成物所獲得的硬化塗膜,於安定性、密著性的點為差者。 As is apparent from the table, the curable resin composition of the examples and the cured coating film obtained from the resin composition are all in the properties of stability, substrate adhesion, and solvent resistance. Excellent. On the other hand, the curable resin composition of the comparative example and the hardened coating film obtained from the resin composition were inferior in stability and adhesion.

[產業上之利用可能性] [Industry use possibility]

依據本發明,解決使用溶劑的安全性問題,同時可獲得樹脂溶解性、組成物之安定性、塗布性為優異,且使用作為光阻劑用材料的情形中的感度、顯影性、形成的圖案特性等之諸物性為優異的硬化性樹脂組成物。將此硬化性樹脂組成物硬化而獲得的塗膜,因膜厚均一 性、對基板的密著性、耐溶劑性等之諸物性為優異,除了作為光阻劑用材料之外,可利用作為塗料、塗布劑、黏接著劑等,尤其可適合使用於電子材料領域。 According to the present invention, it is possible to solve the problem of safety in the use of a solvent, and at the same time, it is excellent in resin solubility, stability of composition, and coating property, and sensitivity, developability, and formed pattern in the case of using a material for a photoresist. The physical properties such as properties are excellent curable resin compositions. The coating film obtained by hardening the curable resin composition is uniform in film thickness It is excellent in physical properties such as adhesion to a substrate, solvent resistance, and the like, and can be used as a coating material, a coating agent, an adhesive, etc., and is particularly suitable for use in an electronic material field. .

Claims (5)

一種硬化性樹脂組成物,其特徵為含有共聚物及溶媒,其中該共聚物為含有(A)對應含有脂環式環氧基的聚合性不飽和化合物的單體單元及(B)含鹼可溶性基的單體單元的共聚物,該溶媒係於全溶媒中含有30~100質量%之二丙二醇二甲基醚。 A curable resin composition characterized by comprising a copolymer and a solvent, wherein the copolymer is a monomer unit containing (A) a polymerizable unsaturated compound containing an alicyclic epoxy group and (B) an alkali-soluble solution A copolymer of a monomer unit containing 30 to 100% by mass of dipropylene glycol dimethyl ether in the total solvent. 如申請專利範圍第1項之硬化性樹脂組成物,其中(A)含有脂環式環氧基的聚合性不飽和化合物為選自3,4-環氧基環己基甲基(甲基)丙烯酸酯、3,4-環氧基三環[5.2.1.02,6]癸-8或9-基(甲基)丙烯酸酯之至少1種之化合物。 The curable resin composition of claim 1, wherein (A) the alicyclic epoxy group-containing polymerizable unsaturated compound is selected from the group consisting of 3,4-epoxycyclohexylmethyl (meth)acrylic acid. A compound of at least one of an ester, 3,4-epoxytricyclo[5.2.1.0 2,6 ]non-8 or 9-yl(meth)acrylate. 如申請專利範圍第1或2項之硬化性樹脂組成物,其中前述共聚物進一步含有(C)對應非含有環氧基之脂環式聚合性不飽和化合物之單體單元。 The curable resin composition according to claim 1 or 2, wherein the copolymer further contains (C) a monomer unit corresponding to an alicyclic polymerizable unsaturated compound not containing an epoxy group. 一種如申請專利範圍第1至3項中任一項之硬化性樹脂組成物之製造方法,其包含(1)使用作為聚合溶媒之含有二丙二醇二甲基醚的溶媒而製造共聚物的步驟、或(2)將共聚物之溶媒與含有二丙二醇二甲基醚的溶媒作溶媒交換的步驟。 A method for producing a curable resin composition according to any one of claims 1 to 3, which comprises (1) a step of producing a copolymer using a solvent containing dipropylene glycol dimethyl ether as a polymerization solvent, Or (2) a step of exchanging a solvent of the copolymer with a solvent containing dipropylene glycol dimethyl ether. 一種硬化物,其係將如申請專利範圍第1至3項中任一項之硬化性樹脂組成物硬化而獲得。 A cured product obtained by hardening a curable resin composition according to any one of claims 1 to 3.
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