TW201305377A - Device for generating aerosol and depositing a light-emitting layer - Google Patents

Abstract

The invention relates to a device, comprising a storage container (4) for receiving a powder (5) and a conveyor screw (8) in order to deliver a metered quantity of the powder (5) from the storage container (4) to a feed point (13), at which feed point (13) the powder (5) enters a carrier gas flow (25) to be transported away as suspended particles in the carrier gas flow (25) through an aerosol line (15). In order to improve an aerosol generator with regard to the technology thereof, the conveyor screw (8) comprises an axial flow duct (10) through which the carrier gas flow (25) flows.

Description

Gas gel generating device and deposition of luminescent layer

The present invention relates to a device comprising a storage container for accommodating powder and a screw conveyor for conveying a quantity of the powder from the storage container to a feed point, the powder entering the feed point The gas stream is thus carried away in the carrier gas stream through the gas gel line in the form of suspended particles.

See US 6,037,241 for the same type of device. The funnel-type storage container contains organic powder. Below the storage container is provided a screw conveyor driven by a motor for delivering a quantity of the powder to the feed point and feeding a carrier gas line through which the carrier gas flows. The powder particles form a gas gel in the carrier gas stream and are sent to the evaporator by the gas gel line. The evaporator is a container, and the wall of the container is composed of an open-cell foam, and the foam is heated by applying an electric current to transfer heat to the gas particles in contact with the wall of the hole to evaporate. . The carrier gas and the vapor are sent to the processing chamber of the CVD reactor by a vapor line, and the vapor is condensed on the surface of the substrate in the processing chamber to form a light-emitting layer.

The device described in US 7,501,152 B2 has a storage container having an opening in its bottom surface in communication with a support tube, the support tube being provided with a screw conveyor whereby the powder stored in the container can be metered to the evaporator. The powder used is an organic starting material which, upon evaporation, can be condensed on the substrate to form a luminescent layer.

US 2009/0039175 A1 likewise relates to an evaporator in which a powdered organic material is conveyed by a screw conveyor, which can be deposited on a substrate. OLED structure.

The conveying device described in US 2006/0177576 A1, US 2006/0177578 A1, US 2009/0081365 A1, US 6,037, 241 A and EP 0 585 848 A1 has a screw conveyor with a solid shaft.

DE 19 638 100 C1 describes a CVD reactor comprising a plurality of storage containers for storing solid components, which are continuously kept in motion by the drive means. A pipe member is fixed to the storage container, and the pipe member is a rotary drive type pipe member and carries a carrier gas therein.

It is an object of the present invention to provide a technical improvement to the aforementioned gas gel generator.

The invention as described in the scope of the patent application is a solution to achieve this object.

The invention first proposes the main solution: the screw conveyor has an axial flow path through which the carrier gas stream passes. Thereby, the function of the gas gel generator in the evaporation device can be improved. In the case where the end of the support chamber of the screw conveyor is properly formed, the powder particles conveyed by the screw conveyor will move radially inward at the end of the screw conveyor and directly into the carrier gas stream flowing from the end of the screw conveyor. The flow path is located within the axis of rotation of the screw conveyor. The powder particles are transported in the form of suspended particles from the carrier gas through a gas gel line to an evaporator where they absorb heat and vaporize into a vapor. The carrier gas stream enriched in vapor of the evaporated organic starting material is passed through a vapor line to the CVD reactor. The CVD reactor has a showerhead type gas distributor, the bottom surface of which has an outlet surface, and the outlet surface has a plurality of screens The air outlet of the arrangement. The vapor-rich carrier gas flows through the gas distributor and the gas outlets into a processing chamber disposed below the gas distributor. The bottom of the processing chamber is formed by a base on which a coating, for example, of glass, is applied. A substrate that is cooled by the cooling element of the susceptor to a temperature at which the vapor condenses on the surface of the substrate. The gas glue directly formed at the end of the screw conveyor can be fed into the gas glue pipe by a second carrier gas flow flowing transversely to the screw conveyor. However, the gas pipeline can also be aligned with the flow channel. In the case of a straight line, a second carrier gas can also be delivered to the gas line at the feed point. If the first carrier gas stream exits the center of a rotationally symmetric feed system, the second carrier gas may be provided by a nozzle system disposed radially outward. The carrier gas delivery tube of the first carrier gas may have a valve that alternately performs an opening and closing operation so that the carrier gas pulse passes through the flow path of the screw conveyor. The second carrier gas can also be pulsed. The valve is preferably a switching valve that delivers a carrier gas stream to the flow or discharge line. The carrier gas stream is preferably applied quantitatively. This is achieved by a mass flow regulator. The storage container can have a stirrer as described in US 7,501,152 B2. The agitator can be driven by the same motor used to drive the screw conveyor to rotate. The agitator is a helically curved wire that rotates about a helix when driven. The container is rotationally symmetrical. The shaft of the agitator is parallel to the shaft of the screw.

Embodiments of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 is a schematic illustration of an apparatus for depositing an OLED layer on a substrate 20. Place The CVD reactor 3 used has been greatly reduced in Fig. 1. The reactor is provided with a showerhead type gas distributor 18, and a bottom surface thereof is provided with a plurality of air outlets directed to the processing chamber 19. The bottom of the processing chamber is composed of a cooled base 21, and the substrate to be coated 20 is laid flat on the base. Seat surface. A wide range of total pressures can be set inside the processing chamber 19 by the vacuum pump 22. A total pressure between 1 mbar and 100 mbar is usually used.

The gas distributor 18 is supplied with a process gas by a vapor delivery pipe 17. The process gas is a vapor of an organic starting material transported by a carrier gas which condenses on the substrate 20 to form a thin layer.

In order to generate the vapor, first, a powdered organic starting material 5 and a carrier gas stream 25 are used in the gas gel generator 1 to produce a gas gel which is sent from the gas glue line 15 to the evaporator 2, and is transported by the carrier gas stream 25. The suspended particles evaporate in this evaporator. To this end, the evaporator 2 has an evaporation element 16 to be heat treated. The evaporation element is preferably an open cell structure. The open cell structure can be an open cell solid foam. The walls of the holes form a curved channel. The channel walls form the evaporation surface. The surface of the suspended particles is brought into surface contact with the evaporation surface to obtain heat of evaporation, which is evaporated and sent as vapor to the CVD reactor 3 from the carrier gas stream 25 via the vapor line 17.

Carrier gas stream 25 is metered by mass flow regulator 27. The metered applied carrier gas stream 25 can be fed to the carrier gas delivery tube 12 or the discharge tube 28 by the switching valve 26. The carrier gas 25 can be pulsed through the carrier gas delivery tube 12 by a rapid switching operation.

The carrier gas delivery pipe 12 communicates with the flow path 10 distributed in the shaft body of the screw conveyor 8. The screw conveyor 8 has one or more spirals on its outer sheath wall Arranged conveyor strips. After the screw conveyor 8 is driven to rotate by the driving device 11, the powdery organic starting material 5 stored in the storage container 4 is conveyed to the end of the screw conveyor 8, and the outlet 14 of the flow path 10 is located at the end.

The storage container 4 is provided with an agitator 8 driven by a motor 7, which is responsible for uniformly charging the screw conveyor 8.

The powder contained in the conveying groove 23 between the spiral ribs 24 is conveyed to the feed point 13 by the rotation of the screw conveyor 8. Wherein, the screw conveyor 8 rotates in the support tube 9, and the end of the support tube is tapered in a funnel shape, so that the powder reaches the front of the outlet 14 of the flow path 10 via the gap between the end surface and the funnel-shaped end 9'.

After the carrier gas stream 25 exits the outlet 14, the powder in the form of suspended particles is delivered to the evaporator 16 via the gas line conduit 15.

In the embodiment shown in Figs. 3 and 4, the screw conveyor 8 and the agitator 6 are driven by the same motor 7, wherein the shaft body of the agitator 6 and the shaft body of the screw conveyor 8 are parallel to each other and connected to each other by a gear. The cylindrical storage container 4 is provided with a rotatable spiral, and the agitator 6 is composed of the spiral. The end 33 of the support tube 9 is formed by a pipe joint whose end faces constitute a funnel 9'. The pipe joint is adapted to be inserted into the opening of a pipe.

In the embodiment shown in Figures 5 and 6, the pipe joint 33 is inserted into the sheath opening of the tubular member through the second carrier gas stream 29. The tube thus forms a carrier gas delivery tube 30 for transporting the second carrier gas 29 upstream of the feed point 13. This tube forms a gas line 15 downstream of the feed point 13. At feed point 13, by screw conveyor The powder conveyed by the machine 8 is fed by the first carrier gas stream 25 that has passed through the flow path 10.

The embodiment shown in Figures 7 and 8 feeds the gas glue from the end face into the gas glue line 15. The pipe joint 33 is here inserted in the nozzle head 31, by means of which the second carrier gas stream 29 can be fed into the gas line conduit 15. This point is achieved by a feed zone provided around the pipe joint 33 as a second carrier gas 29 which forms a plurality of openings 32 into which the second carrier gas 29 is fed by the carrier gas delivery pipe 30. The gas passages 15 are flowed through the openings.

The embodiment shown in Figure 9 does not use a second carrier gas. The pipe end of the gas glue line 15 is here inserted directly onto the pipe joint 33. After the carrier gas 25 passes through the flow path 10 provided in the rotating shaft of the screw conveyor 8, at the outlet 14 of the flow path 10, powder particles moving from the radially outer side toward the center of rotation are wrapped therein and used as suspended particles. It is sent to the evaporator 2.

All the revealed features (ie, themselves) are the essence of the invention. Therefore, the disclosure of the present application also contains all the contents disclosed in the related/attached priority file (copy of the prior application), and the features described in the file are also included in the scope of the patent application of the present application. The sub-items describe the features of the prior art improvements of the prior art using optional side-by-side terms, the main purpose of which is to apply for division on the basis of the scope of such patent applications.

1‧‧‧ gas glue generator

2‧‧‧Evaporator

3‧‧‧ CVD reactor

4‧‧‧ storage container

5‧‧‧Powdered organic starting materials

6‧‧‧Agitator

7‧‧‧Motor

8‧‧‧Spiral conveyor

9‧‧‧Support tube

9'‧‧‧End/Funnel

10‧‧‧ flow path

11‧‧‧ drive

12‧‧‧Carrier delivery tube

13‧‧‧ Feeding point

14‧‧‧Export

15‧‧‧ gas pipeline

16‧‧‧Evaporation components

17‧‧‧Vapor Pipe/Vapor Pipe

18‧‧‧ gas distributor

19‧‧‧Processing room

20‧‧‧Substrate

21‧‧‧Base

22‧‧‧Vacuum pump

23‧‧‧ conveyor

24‧‧‧Spiral ribs

25‧‧‧Air carrier/carrier gas

26‧‧‧Valve/switching valve

27‧‧‧Quality flow regulator

28‧‧‧Draining tube

29‧‧‧Second carrier gas/second carrier gas flow

30‧‧‧Carrier delivery tube

31‧‧‧Nozzle head

32‧‧‧ openings

33‧‧‧Fittings/ends

1 is a schematic view of a device according to the present invention; FIG. 2 is an enlarged view of a region defined by a broken line II-II in FIG. 1; and FIG. 3 is a perspective view of a conveying device of the gas gel generator 1; Figure 4 is a view of the conveying device of Figure 3, the screw conveyor bracket portion is a cross-sectional view; Figure 5 is a top view of the conveyor device shown in Figures 3 and 4, the pipe portion is a sectional view, transported by the conveyor device The particles are injected into the tube; FIG. 6 is a cross-sectional view taken along line VI-VI of FIG. 5; and FIG. 7 is another application example of the conveying device shown in FIGS. 3 and 4, wherein the powder conveyed by the conveying device The particles are fed into the gas glue pipe 15 in the axial direction; FIG. 8 is a cross-sectional view taken along line VIII-VIII of FIG. 7; and FIG. 9 is another application example of the conveying device shown in FIGS. 3 and 4, this example Similarly, the gas line 15 is fed in the axial direction.

1‧‧‧ gas glue generator

4‧‧‧ storage container

6‧‧‧Agitator

7‧‧‧Motor

8‧‧‧Spiral conveyor

9‧‧‧Support tube

10‧‧‧ flow path

11‧‧‧ drive

12‧‧‧Carrier delivery tube

13‧‧‧ Feeding point

14‧‧‧Export

23‧‧‧ conveyor

24‧‧‧Spiral ribs

25‧‧‧Air carrier/carrier gas

Claims (10)

A device comprising a storage container (4) for accommodating a powder (5) and a screw conveyor for conveying a quantity of the powder (5) from the storage container (4) to a feed point (13) ( 8), the powder (5) enters the carrier gas stream (25) at the feed point (13), and is transported in the carrier gas stream (25) through the gas glue pipe (15) in the form of suspended particles, which is characterized The screw conveyor (8) has an axial flow passage (10) that is passed by the carrier gas stream (25). The device of claim 1, wherein there is an evaporator (16) fed by the gas glue pipe (15), wherein the suspended particles are absorbed by heat in the evaporator to form a vapor, and the vapor is vaporized by the carrier. The gas stream (25) is carried away via a vapor line (17). The apparatus of claim 2, wherein a CVD reactor (3) is a gas distributor (18) fed by the vapor conduit (17), the CVD reactor having a processing chamber including a susceptor (21) (19) The substrate (20) is accommodated, and the substrate is coated by condensing the vapor. The device of claim 1, wherein the gas gel conduit (15) is aligned with the flow channel (10) or transverse to the flow channel (10). The apparatus of claim 1, wherein there is a second carrier gas delivery tube (30) in communication with the gas gel conduit (15) in the region of the feed point (13). The device of claim 1, wherein the valve (26) is disposed in the carrier gas conduit (12), and the valve can alternately perform an opening and closing operation to generate a pulsed carrier gas flow. The apparatus of claim 1, wherein there is a mass flow regulator (27) disposed in the carrier gas conduit (12) for quantitatively applying the carrier gas stream (25). The device of claim 1, wherein there is a stirrer (6) disposed in the storage container (4). The apparatus of claim 1, wherein the evaporator (2) has a heated heat transfer surface, and the heat transfer surfaces are formed by an evaporation element (16), which is specifically a solid foam. The device of claim 3, wherein the base (21) has an element for cooling the substrate (19).