TW201302625A - Treatment method and treatment apparatus of industrial water drainage - Google Patents

Abstract

To provide a treatment method of industrial water drainage and a treatment apparatus of industrial water drainage, which inhibit the usage quantity of the treatment agent to a minimum limit and exactly make the treatment towards the ingredient of the treatment object to be able to economically carry out the treatment towards the industrial water drainage. [Solution] To use the treatment apparatus to carry out the water drainage treatment. The treatment apparatus is to comprise: a treatment object ingredient concentration measurement apparatus (12), measuring the concentration of the afore-mentioned treatment object ingredient in the industrial water drainage; concentration data acquisition means of the co-existent ingredient, causing influences towards the measurement result of the treatment object ingredient concentration; data acquisition means (11) of the flow rate of industrial water drainage and the water drainage time; treatment agent addition means, which adds the treatment agent into the afore-mentioned industrial drainage; a calculation apparatus (20), which corrects the measurement concentration of the treatment object ingredient according to the concentration of the co-existent ingredient concentration, and calculates the addition quantity of the treatment agent according to the corrected concentration and the flow rate of the afore-mentioned industrial water drainage and the water drainage time; and a control apparatus (30), which receives the signal from the calculation apparatus (20) to add the treatment agent in the addition quantity from afore-mentioned calculation.

Description

Industrial drainage treatment method and treatment device

The present invention relates to a method and a processing apparatus for industrial drainage discharged from various production facilities.

From the point of view of the conservation of limited water resources and the environmental protection of the earth, in various industries, it is actively recycling industrial drainage. Further, since various medicines are used depending on the products to be produced, drainage treatment is necessary.

For example, in a semiconductor manufacturing factory, in order to perform semiconductor etching treatment, a large amount of hydrofluoric acid is used, and a large amount of industrial wastewater containing fluorine ions is discharged.

The treatment of industrial wastewater containing fluoride ions has been carried out by adding a calcium salt such as calcium chloride, calcium hydroxide, calcium carbonate or calcium sulfate to insolubilize the fluoride ions in the drainage, and then performing solid-liquid treatment. A method of separating and removing fluorine from the drainage.

Since the emission reference value of the fluoride ion is 8 mg/L or less, each manufacturer has a drainage treatment that does not exceed this reference value.

Patent Document 1 discloses a method for treating a fluorine-containing water, which is a method for adding a calcium salt to fluorine-containing water and precipitating and separating fluorine as calcium fluoride, which is characterized in that fluorine is contained in the fluorine-containing water. The amount of the calcium salt added is set by the amount of ions and the amount of ions other than the fluoride ion of the poorly soluble salt of calcium.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2001-212574

When the concentration of the treatment target component such as fluoride ion contained in the industrial drainage can be accurately grasped, the amount of the treatment agent can be optimized. For example, as a measuring instrument for measuring fluorine ions, there is a measuring device which is formed by an ion electrode method using cesium fluoride which selectively permeates fluorine ions. This measuring device is low in cost and easy to handle, and is widely used between drainage treatments. However, it is easily affected by coexisting components such as anions or metal ions in the drainage, and there are many actual concentrations. There is a discrepancy between the measured concentration and the measured concentration. In the case of precise analysis such as ion chromatography, the concentration of the component to be processed can be accurately measured. However, since it takes time or a procedure in the measurement, fluctuations occur in the concentration of the component to be processed. In the case of circumstances, it is not possible to respond quickly. Therefore, from the prior art, there is a case where the treatment agent is excessively added to satisfy the drainage reference value, and there is a problem that the consumption cost of the treatment agent or the sludge treatment cost is increased.

Therefore, an object of the present invention is to provide a method for suppressing the amount of use of a treatment agent to a minimum and to surely A treatment method for industrial drainage capable of economically treating industrial drainage and an industrial drainage treatment device.

The method for treating industrial waste water according to the present invention is a method for treating industrial waste water which is treated by treating a chemical component to be treated by a treatment agent, and is discharged, and is characterized in that: a process of measuring the concentration of the component to be treated; and obtaining a concentration data of a coexisting component that affects the measurement result of the concentration of the component to be treated; and obtaining a concentration of the component to be processed based on the concentration of the coexisting component a project for correcting the corrected concentration of the measured concentration; and a project for obtaining data on the flow rate of the industrial drainage and the drainage time; and calculating the amount based on the corrected concentration of the processing target component, the flow rate of the industrial drainage, and the drainage time The process of treating the amount of the drug to be added; and the process of adding the above-mentioned treatment agent in the above-mentioned calculated addition amount.

According to the method for treating industrial drainage according to the present invention, the concentration of the component to be treated in the industrial drainage is corrected based on the concentration of the coexisting component that affects the measurement result, and based on the corrected concentration and By adding the amount of the treatment agent to the flow rate of the industrial drainage and the drainage time, and adding the treatment agent by the calculated addition amount, the amount of the treatment agent can be suppressed to the minimum necessary, and the treatment target is The ingredients are treated as they are, and they can be economically drained.

Preferably, the process of obtaining the concentration data of the coexisting component in the method for treating industrial waste according to the present invention is carried out by obtaining the distribution data of the aqueous solution which is the source of the industrial drainage and/or the measurement data of the coexisting component. The above-mentioned project for obtaining information on the flow rate of the industrial drainage and the drainage time is carried out by obtaining the process data of the production process for producing the industrial drainage. According to this configuration, the measurement data of the aqueous solution which is the source of the industrial drainage and/or the measurement data of the coexisting component are obtained, and the component which is easy to change can be extracted from the measurement data, and the component which is difficult to change can be obtained. Since it can be taken out based on the preparation data, the concentration of the coexisting component can be easily and quickly extracted. Moreover, by obtaining the process data of the production process for industrial drainage, it is possible to easily and quickly extract the flow rate of industrial drainage and the drainage time.

Preferably, in the above-described process for determining the corrected concentration of the industrial drainage treatment method of the present invention, the correction rate is obtained in advance for each coexisting component, and the correction is multiplied by the concentration of each coexisting component. The rate is calculated by calculating the amount of error due to the coexisting component, calculating the total amount of the error amount due to each of the coexisting components, and correcting the total amount of the measured concentration. According to this aspect, the correction rate is obtained in advance for each coexisting component, and the correction amount due to the coexisting component can be quickly extracted.

Preferably, in the method for treating industrial drainage according to the present invention, the component to be treated is fluorine ion, and the treatment agent is a calcium salt.

Moreover, the industrial drainage treatment device of the present invention is included in the production The treatment device for industrial drainage in which the treatment target component is treated by the treatment agent and is drained, and the treatment target component concentration for measuring the concentration of the treatment target component in the industrial drainage is included a measuring device; a concentration data obtaining means for coexisting components which affect the measurement result of the concentration of the component to be treated; and a data obtaining means for the flow rate of the industrial drainage and the drainage time; and adding the processing agent to the industrial drainage The treatment agent addition means; and calculating the concentration of the treatment target component based on the concentration of the coexisting component, and calculating the calculation amount of the treatment agent based on the corrected concentration, the flow rate of the industrial drainage, and the drainage time And a control device that receives the signal from the calculation device and adds the processing agent to the calculated addition amount.

Preferably, the concentration data acquisition means of the coexisting component of the industrial drainage treatment apparatus of the present invention is formed by a preparation database of an aqueous solution which is a source of the industrial drainage and/or a measurement apparatus for the coexisting component, and the industrial drainage. The data acquisition means for the flow rate and the drainage time are formed by a process database for the production of the industrial drainage.

Preferably, the industrial drainage treatment apparatus of the present invention further includes a correction database for determining a correction rate for each of the coexisting components, wherein the calculation device multiplies the concentration of each coexisting component. The correction rate of each of the coexisting components is calculated from the correction rate of each of the correction database, and the total amount of the error amount due to each coexisting component is calculated, and the total amount is calculated for the processing target component. Determination The concentration is corrected, whereby the corrected concentration is obtained.

Preferably, in the industrial drainage treatment device of the present invention, the industrial drainage is a fluorine ion-containing drainage generated in an etching process of a semiconductor manufacturing process, and the treatment agent is calcium, and the processing target component concentration measuring device is used. A simple type fluoride ion concentration meter using an ion electrode method using cesium fluoride which selectively permeates fluorine ions.

According to the present invention, the concentration of the component to be treated in the industrial drainage is corrected based on the concentration of the coexisting component that affects the measurement result, and the flow rate and drainage of the industrial drainage are based on the corrected concentration In addition, the amount of the treatment agent to be added is calculated by adding the amount of the treatment agent to the amount of the treatment agent, and the amount of the treatment agent can be suppressed to the minimum necessary, and the treatment target component can be reliably treated. It becomes an economical drainage treatment.

Hereinafter, an embodiment of the industrial drainage treatment apparatus of the present invention will be described with reference to the drawings. However, the scope of the invention is not limited by the examples.

In FIGS. 1 and 2, one embodiment of the treatment of industrial wastewater containing fluorine ions generated in the etching process of the semiconductor manufacturing process of the semiconductor manufacturing facility 1 is shown. Therefore, in this embodiment, the fluoride ion corresponds to the component to be treated in the present invention. another In addition, the industrial drainage is not limited to those discharged from semiconductor manufacturing equipment, and can be applied, for example, to industrial wastewater discharge processing from production facilities such as liquid crystal production, solar cell manufacturing, and metal surface processing.

As shown in FIG. 1, generally, this industrial drainage treatment apparatus is applied to the drainage processing of the semiconductor manufacturing equipment 1. The semiconductor manufacturing equipment 1 performs an etching process and a cleaning process, and industrial drainage containing fluorine ions flows out of the apparatus through the pipe L1.

In the semiconductor manufacturing equipment 1, a preparation database 10 in which a raw material and a mixing liquid are mixed and the like is provided. Further, at the device, the process data signal transmitter 11 is provided with a transmission process data signal. Examples of the process data signal include a processing time (starting time, end time, and the like) of each process for generating drainage, a drainage time (starting time, end time, and the like) generated by each process, and each processing. The amount of displacement produced, etc.

The pipe L1 is provided with a fluorine ion concentration meter 12, and is connected to the raw water tank 3. In the embodiment, the fluorine ion concentration meter 12 corresponds to the processing target component concentration measuring device in the present invention. As the fluoride ion concentration meter, as long as the measurement can be continuously performed, it is possible to use a user who is generally used in drainage treatment from the past. For example, a simple type fluoride ion concentration meter which is formed by an ion electrode method using cesium fluoride which selectively permeates fluorine ions is preferably used because it is inexpensive and easy to handle.

The pipe L2 extends from the raw water tank 3 and is connected to the sedimentation tank 4. At the pipe L2, it flows into the calcium salt tank 5 through the pump P1. Calcium salt inside. The amount of the calcium salt added is controlled by the calculation device 20, and the signal from the calculation device 20 is received and controlled by the control device 30 for the pump P1. Make adjustments. As the calcium salt, calcium chloride, calcium hydroxide, calcium carbonate, calcium sulfate or the like is used. In this embodiment, the calcium salt corresponds to the treatment agent in the present invention.

In the sedimentation tank 4, the aggregating agent in the aggregating agent tank 6 flows in through the pump P2. Examples of the aggregating agent include polyaluminum chloride and the like. At the bottom of the sedimentation tank 4, a pipe L3 is provided, and the sludge settled to the bottom is discharged to the outside of the system through the pipe L3. Further, at the side wall of the upper portion of the sedimentation tank 4, a pipe L4 is provided, and the upper purified water system is discharged to the sewage.

Next, a case where the industrial wastewater containing fluorine ions generated in the etching process of the semiconductor manufacturing process of the semiconductor manufacturing facility 1 is processed by using the above-described processing apparatus will be taken as an example of the treatment method of the industrial drainage of the present invention. One of the embodiments is described.

The industrial drainage discharged from the semiconductor manufacturing equipment 1 is temporarily stored in the raw water tank through the pipe L1.

The fluoride ion concentration of the industrial drainage flowing through the pipe L1 is measured by the fluorine ion concentration meter 12, and is input to the calculation device 20.

Further, the process data signal in the semiconductor manufacturing equipment 1 is input from the process data signal transmitter 11 to the calculation device 20.

Further, from the distribution database 10, a coexisting component which affects the measurement result of the fluoride ion concentration in the fluoride ion concentration meter 12 is obtained. The concentration data is input to the calculation device 20. As the concentration data of the coexisting component, in addition to the distribution database 10, a measurement value obtained by taking out and analyzing one part of the industrial drainage discharged from the semiconductor manufacturing equipment 1 may be used. In addition, since the concentration data of the coexisting component is conceivable, if the raw materials and the cleaning liquid used in the production process have been determined, there is almost no change. Therefore, it is not necessary to carry out industrial drainage every time. The analysis may be carried out only when the use of the raw material is changed or the product is changed. Further, as the concentration data of the coexisting component, the measured value for analyzing the industrial drainage may be used only for a part of the coexisting component, and the value of the blending database 10 may be used for the other components.

The industrial drainage stored in the raw water tank 3 is extracted from the pipe L2, and calcium salt is added to supply the liquid to the sedimentation tank 4.

The amount of calcium salt added is obtained by receiving the signal from the calculation device 20 and controlling the pump P1 via the control device 30 in such a manner as to be added by the calculation device 20. Adjustment. Hereinafter, the calculation processing of the amount of addition of the calcium salt by the calculation device 20 will be described with reference to FIG. 2 .

The calculation device 20 includes a fluorine ion concentration calculation unit 21 and a treatment agent addition amount calculation unit 22.

The fluorine ion concentration calculation unit 21 refers to the correction database in which the correction rate is extracted in advance for each of the coexisting components, and multiplies the individual correction rates for the concentration of each coexisting component. Calculating the amount of error, and by combining the sum of the errors caused by the coexisting components The measured values of the fluoride ion concentration meter 12 are totaled to calculate the corrected fluoride ion concentration, that is, the estimated true fluoride ion concentration is calculated. That is, the calculation of the following formulas (1) and (2) is performed, and the estimated true fluoride ion concentration is calculated.

(Total amount of error due to the amount of each component of the coexisting) = ₍₁ × concentration of component A Component A correction factor of ₁₎ + (concentration × correction factor A ₂ component of the A ₂₎ + ... (Component A Concentration of _n × correction rate of component A _n )......(1)

(true fluoride ion concentration) = (measured value of the fluoride ion concentration meter) + (sum of the amount of error due to each coexisting component) ... (2)

Here, the correction rate of the database is corrected, and the value obtained by the fluorine concentration meter 12 due to the concentration Xi of the coexisting component is affected by the true fluoride ion concentration (true concentration - measured value). When XF is set, it can be extracted by Xf/Xi.

For example, in a simple fluoride ion sensor (manufactured by Toago DKK), the correction rates of calcium ions, magnesium ions, aluminum ions, iron ions, phosphate ions, sulfate ions, and nitrate ions are as shown in Table 1. The general value.

For example, in the case of containing 1 mol of calcium ions, it is concentrated for fluoride ions. The measured value of the gauge 11 was 1 mol (calcium ion concentration) × 1 (correction rate) = 1 mol, and was added as an error amount. In the case where the magnesium ion is contained in an amount of 1 mol, the measured value of the fluoride ion concentration meter 11 is 1 mol (magnesium ion concentration) × 0.1 (correction rate) = 0.1 mol, and is added as an error amount. In the case where the phosphate ion concentration is 1 mol, the measured value of the fluoride ion concentration meter 11 is 1 mol (phosphoric acid ion concentration) × (-0.001) (correction rate) = -0.001 mol, and is added as an error amount. In other words, by multiplying the individual correction ratios for the concentration of each coexisting component, the amount of error due to the coexisting component is calculated, and the total amount is corrected for the measured concentration, thereby realizing the true concentration. However, since the amount of the anion of the phosphate ion, the sulfate ion, the nitrate ion or the like is extremely small, it is substantially negligible in the case of industrial drainage in which the concentration is low.

Further, the concentration of the coexisting component may not be the only use of the blending database 10, for example, a component which is generally easy to be changed in the manufacturing process such as calcium, and may be used as the actual concentration of the component in the industrial drainage. The value of the measurement.

In the processing agent addition amount calculation unit 22, the calculation result of the fluorine ion concentration calculation unit 21 and the process data signal from the process data signal transmitter 11 are input, and calcium is calculated based on the data. The amount of salt added. That is, the amount of the calcium salt to be added is calculated based on the calculated concentration of the fluoride ion, the flow rate of the industrial drainage, and the drainage time.

The amount of addition calculated by the calculation device 20 as described above is input to the control device 30. In the control device 30, The amount of addition calculated by the apparatus 20 is controlled for the pump P1, and the amount of calcium salt added is adjusted.

In this way, the industrial wastewater to which a specific amount of calcium salt is added is sent to the precipitation tank 4, and a flocculant such as polyaluminum chloride is added thereto to react the calcium ions with the bulk ions. The calcium fluoride produced is used for agglutination precipitation.

The sludge is discharged from the pipe L3 provided at the bottom of the sedimentation tank 4, and the upper clean water is discharged from the pipe L4 provided at the upper side wall and discharged to the sewage.

In this way, according to the present invention, since the measured concentration of the component to be treated (in this embodiment, the fluoride ion) in the industrial drainage is based on the coexisting component which affects the measurement result (here) In the embodiment, the concentration of the calcium ion, the magnesium ion, the aluminum ion, the iron ion, the phosphate ion, the sulfate ion, the nitrate ion, or the like is corrected, and the concentration of the actual processing target component is extracted, and the concentration is based on the concentration data. In addition, the amount of the treatment agent (in this embodiment, a calcium salt) required for the treatment of the target component is calculated, so that the amount of the treatment agent can be suppressed to the minimum necessary, and The processing target component is processed as it is.

[Examples]

The value (pre-corrected value) measured by a simple type fluoride ion sensor (manufactured by Toago DKK) for the industrial drainages A and B including the coexisting components shown in Table 2 below, by the present invention Way to The fluoride ion concentration is corrected and calculated from the error amount due to the coexisting component (corrected value), and the value (analytical value) measured by ion chromatography is summarized in Table 3. .

As is apparent from the above results, the fluorine ion concentration measured by a simple type fluoride ion sensor (manufactured by Toago DKK) is corrected by the amount of error caused by the coexisting component. It is possible to get a value that is very close to the analytical value.

1‧‧‧Semiconductor manufacturing equipment

3‧‧‧ original sink

4‧‧‧precipitation tank

5‧‧‧Calcium salt trough

6‧‧‧ agglutination tank

11‧‧‧Process Data Signal Transmitter

12‧‧‧Fluorine ion concentration meter

20‧‧‧calculation device

21‧‧‧Fluorum ion concentration calculation unit

22‧‧‧Processing dosage calculation unit

30‧‧‧Control device

L1~L4‧‧‧ piping

P1, P2‧‧‧

Fig. 1 is a schematic configuration diagram of an industrial drainage treatment apparatus according to the present invention.

FIG. 2 is a flow chart at the calculation device in the drainage treatment device.

1‧‧‧Semiconductor manufacturing equipment

3‧‧‧ original sink

4‧‧‧precipitation tank

5‧‧‧Calcium salt trough

6‧‧‧ agglutination tank

10‧‧‧Provisioning database

11‧‧‧Process Data Signal Transmitter

12‧‧‧Fluorine ion concentration meter

20‧‧‧calculation device

30‧‧‧Control device

L1~L4‧‧‧ piping

P1, P2‧‧‧

Claims (8)

A method for treating industrial wastewater is a treatment method for industrial wastewater that is treated by treating a chemical component in industrial wastewater and treated by a treatment agent, and is characterized in that the industrial wastewater is treated as described above. a process for measuring the concentration of the target component; and obtaining a concentration data of the coexisting component that affects the measurement result of the concentration of the component to be treated; and determining the concentration of the component to be processed based on the concentration of the coexisting component a project for correcting the corrected concentration; and a project for obtaining data on the flow rate of the industrial drainage and the drainage time; and calculating the treatment agent based on the corrected concentration of the treatment target component, the flow rate of the industrial drainage, and the drainage time The addition amount of the project; and the addition of the aforementioned treatment agent to the above-mentioned calculated addition amount. The method of treating industrial wastes according to the first aspect of the invention, wherein the process of obtaining the concentration data of the coexisting component is obtained by obtaining an aqueous solution of the source of the industrial drainage and/or the coexisting component. The project for obtaining the data of the flow rate of the industrial drainage and the drainage time by the measurement data is obtained by obtaining the process data of the production process for producing the industrial drainage mentioned above. Carry it out. The method for treating industrial drainage according to the first or second aspect of the patent application, wherein the method for obtaining the corrected concentration is obtained by predetermining a correction rate for each coexisting component and for each coexisting component. The concentration is multiplied by the correction rate of each, and the amount of error due to the coexisting component is calculated, and the total amount of the error amount due to each coexisting component is calculated, and the total amount is corrected for the measured concentration. And proceed. The method for treating industrial wastewater according to any one of the first to third aspects of the present invention, wherein the component to be treated is a fluoride ion, and the treatment agent is a calcium salt. An industrial drainage treatment apparatus is an industrial drainage treatment apparatus that treats a treatment target component contained in industrial drainage by a treatment agent and drains it, and is characterized in that: a concentration target data acquisition device for measuring a concentration of a target component to be measured; and a concentration data acquisition means for a coexisting component which affects a measurement result of the concentration of the component to be treated; and a data acquisition means for the flow rate of the industrial drainage and the drainage time And a treatment agent addition means for adding the treatment agent to the industrial wastewater; and correcting the concentration of the treatment target component based on the concentration of the coexisting component, and based on the corrected concentration and the flow rate of the industrial drainage and Drainage time to calculate the calculation amount of the aforementioned treatment agent And a control device that receives the signal from the calculation device and adds the processing agent to the calculated addition amount. The processing device for industrial drainage according to the fifth aspect of the invention, wherein the concentration data acquisition means of the coexisting component is a preparation database of an aqueous solution which is a source of the industrial drainage and/or a measurement device for the coexisting component The data acquisition means for the flow rate of the industrial drainage and the drainage time is formed by a manufacturing database for the production of the industrial drainage. The processing device for industrial drainage according to the fifth or sixth aspect of the invention, further comprising: a correction database for determining a correction rate for each of the coexisting components, wherein the calculation device is The correction rate of each of the coexisting components is multiplied by the correction rate of each of the coexisting components, and the amount of error caused by the coexisting component is calculated, and the total amount of errors due to the coexisting components is calculated. The total amount is corrected for the measured concentration of the component to be treated, whereby the corrected concentration is obtained. The industrial drainage treatment device according to any one of the items 5 to 7, wherein the industrial drainage is a fluorine ion-containing drainage generated in an etching process of a semiconductor manufacturing process, and the treatment is performed. Medicament, is calcium, The processing target component concentration measuring apparatus is a simple type fluoride ion concentration meter which is performed by an ion electrode method using cesium fluoride which selectively permeates fluorine ions.