201248669 • 六、發明說明： : 【發明所屬之技術領域】 . 本發明係關於具有可接合分離自如地安裝於例如真空 容器内之固定侧電極與可動側電極的真空闊。 【先前技術】 以往的真空閥係在以氧化鋁陶瓷之類的絕緣物作為材 質的圓筒狀絕緣容器兩端形成有金屬化層，且為了將容器 内部氣密保持於高度真空狀態，而使金屬凸緣藉由硬焊固 接於此金屬化層。 固接在絕緣容器兩端的金屬凸緣，在同軸上相對地分 別安裝有固定側電極棒、可動側電擊棒，在各電擊棒的對 向面則分別固接有固定側電極與可動側電極。 而且，以可動侧電極一邊保持氣密一邊可移動於絕緣 容器軸心上的方式，在可動側電極棒與金屬凸緣間設置有 伸縮囊管，但為了防止電流遮斷時所產生的電弧導致伸縮 囊ΐ污損而没置的傘狀伸縮囊管蓋係固設於可動側電極 棒，伸縮囊管則安裝於伸縮囊管蓋與可動側凸緣。 此外，在絕緣容器内部，以圍繞相對向之電極的方式 設置有電弧屏蔽，以防止絕緣容器的内沿面因電流遮斷時 產生的電弧而受到污損。 於可動側金屬凸緣固設有導件安裝板，嵌合於可動侧 電極棒的導件則藉螺絲安裝於導件安裝板。該導件係由可 螺固之螺固部、與延伸於軸方向之可動側電極棒的滑動部 分所構成，可動侧電極棒係發揮可沿著中心軸上進行開閉 323258 4 201248669 之轴承的作用（參照專利文獻丨）。 又，如專利文獻2所示，亦有藉由導件按 導件的例子。於此情況下，可動側電極棒 牛來保持 且具有由絕緣材料所構成的導件以作 反’ 滑動防止件’而作為該導件的固U元件了動側電極棒的 導件按麼件。導件按壓件係在組裝導件之德則有圓板狀的 而熔接於端板。 ’藉雷射熔接 專利文獻3巾’係於可動側電轉安裝 ^的另-端挾人持於真空斷路器的可動侧導體 導件麟，絲滑動部作為可動侧金屬端㈣ = 件，使可動側金屬端板具有軸承功能。 ，、導 〔先前技術文獻〕 〔專利文獻〕 〔專利文獻1〕曰本特開平5—31487〇號公報 〔專利文獻2〕日本特開昭58_ι6983〇號公報 〔專利文獻3〕日本特開2005-339865號公報 【發明内容】 〔發明所欲解決之課題〕 前述之專利文獻1及專利文獻2所記载之習知真 之導件的安裝方法中，需要有螺絲、導件安裝板、或^導 件按壓件等之導件安裝㈣件，而有導致零件數增多之問 題。 此外，當著眼於導件的安裝作業時，由於必須進行螺 固或雷射炼接，故很耗費作業時間，而且為了以雷射溶接 323258 5 201248669 ' 來安裝導件，需要昂貴的雷射熔接機器，而有導致製作成 : 本增多之問題。 - 前述之專利文獻3所記載之真空閥的導件安裝方法 中，為了藉由可動側主電路端子來防止導件的落下，即便 在閉極狀態亦必須使導件的一端突出可動侧凸緣外，俾與 可動側主電路端子接觸，結果，會有真空閥的整體長度變 長之問題。 本發明係為了解決前述之課題而開發者，其目的在於 提供一種可簡單地安裝導件而不會使零件數增加，且可縮 短整體長度的真空閥。 〔用以解決課題之手段〕 本發明之真空閥係具備：絕緣筒；固定側凸緣，係安 裝於前述絕緣筒之一端側；可動側凸緣，係安裝於前述絕 緣筒之另一端侧；固定側電極棒，係安裝於前述固定側凸 緣，且設有固定侧電極；可動侧電極棒，係與前述固定側 電極棒配置於同軸上，且設有與前述固定側電極相對向的 可動側電極，並經由伸縮囊管支持於前述可動側凸緣；及 伸縮囊管蓋，係安裝於前述可動側電極棒以覆蓋前述伸縮 囊管； 其中，就前述伸縮囊管蓋而言，其中心部係形成筒狀， 且朝著與前述可動側電極相反的方向延伸，並於前述伸縮 囊管蓋的筒狀部安裝有由絕緣物所構成的導件。 又，本發明之真空閥係具備：絕緣筒；固定側凸緣， 係安裝於前述絕緣筒之一端側；可動側凸緣，係安裝於前 6 323258 201248669 述絕緣筒之另一端側；固定側電極棒，係安裝於前述固定 • 側凸緣，且設有固定側電極；可動側電極棒，係與前述固 - 定側電極棒配置於同軸上，且設有與前述固定側電極相對 向的可動側電極，並經由伸縮囊管支持於前述可動側凸 緣；及伸縮囊管蓋，係安裝於前述可動側電極棒以覆蓋前 述伸縮囊管； 其中，前述伸縮囊管蓋之中心部係形成筒狀，且朝著 與前述可動側電極相反的方向延伸，而在前述伸縮囊管蓋 的筒狀部安裝有由絕緣物所構成的導件；前述可動側凸緣 的中心部係形成筒狀，且將前述導件的外表面延伸於前述 可動側電極方向，藉由前述可動側凸緣之筒狀部的内表面 與前述導件的外表面相接觸，而使前述可動側凸緣具有軸 承功能。 又，本發明之真空閥係具備：絕緣筒；固定側凸緣， 係安裝於前述絕緣筒之一端側；可動側凸緣，係安裝於前 述絕緣筒之另一端側；固定側電極棒，係安裝於前述固定 側凸緣，且設有固定側電極；可動側電極棒，係與前述固 定側電極棒配置於同軸上，且設有與前述固定側電極相對 向的可動側電極，並經由伸縮囊管支持於前述可動側凸 緣；及伸縮囊管蓋，係安裝於前述可動側電極棒以覆蓋前 述伸縮囊管； 其中，前述伸縮囊管蓋之中心部係形成筒狀，且於朝 與前述可動側電極相反的方向延伸，而在前述伸縮囊管蓋 的筒狀部安裝有由絕緣物所構成的導件；前述可動側凸緣 7 323258 201248669 :由命：裝於刖述絕緣筒之另-端側的可動側端部金屬 、/、安裝於前述可動側端部金屬件且經由前述伸縮囊管 •支持前述可動側電極棒的可動側端板所構成；前述可動侧 j板的中心部係形成筒狀’且將前述導件的外表面延伸於 别述可動側電極方向，藉由前述可動側端板之筒狀部的内 表面與前述導件的外表面相接觸，而使前述可動側端板具 有軸承功能。 〔發明的功效〕 …根據本發明之真空閥，伸縮囊管蓋係使其中心部形成 同狀:且朝著與可動側電極相反的方向延伸，藉由在伸縮 囊管蓋的筒狀部安裝由絕緣物所構成的導件，能獲得一種 不會使零件數增加且可使整體長度縮短的真空闕。 【實施方式】 (實施形態1) 以下’根據第1圖至第3圖說明本發明之實施形態， 各圖中，針對相同或相當構件、部位係標註相同符號來說 明。第1圖係顯示本發明實施形態工之真空闕的概略剖面 圖。第2圖係顯示本發明實施形態j之真空閥的伸縮囊管 蓋與導件之嵌合狀態的構成圖。第3圖係本發明實施形態 1之真空閥之伸縮囊管蓋與導件之嵌合部的放大圖。 該真空閥係對於以氧化銘陶究等絕緣物作為材質的圓 筒狀絕緣筒1，在其兩端側形成容器，且為了將内部以高 真空狀舒以氣密保持，而安裝有以獨鋼等金屬作為材 質的固定侧凸緣2與可動側凸緣3，且此等固定侧凸緣2 323258 8 201248669 一和可動侧凸緣3係藉由真空硬焊以與絕緣筒丨同軸之型態 固接於絕緣筒1的兩端側所形成的金屬化層4。 •—在固接於絕緣筒1之-端侧的固定側凸緣2固接有固 定侧電極棒5,而在固接於絕緣筒！之另一端側的可動側 凸緣3 ’則經由伸縮囊管7安裝有可動側電極棒6。伸縮囊 管7的一端側係與可動側凸緣3固接，伸縮囊管7的另一 端側，可動側電極棒6係經由伸縮囊管蓋8固接，該伸縮 囊b蓋8係以防止因電流遮斷時產生的電弧導致伸縮囊管 7污損為目的而設置者。 在固定側電極棒5與可動側電極棒6的對向面，分別 固接有固定側電極9及可動側電極1〇，由於固接的可動側 電極棒6係經由伸縮囊管7安裝於可動側凸緣3，所以可 動側電極10可在維持氣密的狀態下在絕緣筒1的軸心上形 成與固定側電極9接合分離自如。 —匕外於、’、§>緣4 1的内沿面’以圍繞相對向配置的固 ，側電極9與可動側電極1G的方式設置有電弧屏蔽n， :亥電弧屏蔽11係以防止電流遮斷時在電極間產生的電弧 導致絕緣筒1内沿面的污損為目的。 如上所述’伸縮囊管7係透過伸缩囊管蓋8固設於可 動侧電極棒6。如第2圖所示，伸縮囊管蓋8的中心部係 形成筒狀，且形成例如圓筒狀的圓筒狀部^而朝與電極相 反的方向延伸。伸縮囊管蓋8之圓筒狀部83的前端側係形 成琴曲狀，而在圓周方向形成凸部8b。另-方面，可動側 凸緣3的中心部係形成筒狀，且形成例如圓筒狀的圓筒狀 323258 9 201248669 部3a朝電極方向延伸。 “由熱可塑性合成樹脂等所構成的導件12係形成 圓筒狀’ 在其内表面設有凹部12a。伸縮囊管蓋8係由 具彈性的帶狀構件加工而成’而且，藉由向内推壓入導 12可使導件12的凹部12a嵌合於伸縮囊管蓋8的凸 处，而將導件12安裝於伸縮囊管蓋8。此時，為了使導; 12容易地Μ人伸縮囊管蓋8，亦可如第2圖所示地在 12的前端側設置推拔部12b。 在伸縮囊管蓋8 t，亦可僅設置圓筒狀部8a並藉 著劑等安裝導件12。然而，如第3圖所示，將伸縮^蓋 8的厚度設為t，將伸縮囊管蓋8之凸部此的突出尺寸設 為a，將導件12之凹部12a的深度尺寸設為匕時藉由^ 各尺寸设定成b>a+t之關係，將真空閥組褒於真空斷路 器本體時，可防止關_作㈣致導件脫離及落下。 〜可動側凸緣3的圓筒狀部3a係藉由與安裝於伸縮囊管 =8的導件12相接觸，使可動側凸緣3的圓筒狀部如與 導件12成為滑動部，而可使可動侧凸緣3具有軸承功能。 該實施形態1中，藉由在伸縮囊管蓋8設置凸部8b， 可將導件12安裝於伸縮囊管蓋8，故不需於可動側凸緣3 固設導件安裝板等構件，*可謀求零件數的減少。 再者’將導件12安襄於伸縮囊管蓋8時，僅需將導件 2壓入伸縮囊管蓋8 ’可避免使用職進行導件鎖緊作業 或雷射賴等繁瑣的作業，而可縮短導件的安裝作業時 間。由於第2圖所示的伸縮囊管蓋8可藉由沖壓加工製成， 323258 10 201248669 故可使零件單價抑制在低廉價位。 此外，由於將導件12安裝於伸縮囊管蓋8,且使具有 軸承功能之可動側凸緣3的圓筒狀部3a朝電極方向延伸， 所以即便在開極狀態下，亦可使可動侧電極棒6相對於絕 緣筒1的軸心平行地動作，而使導件12並不會突出至可動 側凸緣3外部，所以可謀求真空閥整體長度的縮短。 々藉由前述零件數的減少、導件安裝作業的縮短、伸縮 囊管蓋8製作的容易性和真空閥整體長度的縮短，可達成 真空閥成本的削減。 (實施形態2) 根據第4圖說明本發明實施形態2。第4圖係顯示本 發明實施形態2之真空閥之導件與可動侧凸緣的概略圖。 本發明實施形態2中’如第4圖所示，藉由在可動侧 凸緣3的筒狀部3a設置缺口部3b，且在導件12的外表面 設置用來與缺口部3b卡合的凸部12c，可避免可動側電極 棒6與伸縮囊管蓋8的轉動，並防止伸縮囊管7之扭轉。 此外’第4圖中，係說明可動側凸緣3之筒狀部3a的缺口 邛3b、導件12的凸部12c均設置在一個部位的情形，但 當然亦可設置兩個部位以上應無庸贅述。 (實施形態3) 根據第5圖，說明本發明實施形態3。第5圖係顯示 本發明實施形態3之真空閥之導件與可動侧凸緣的概略 圖。 本發明實施形態3中，與前述實施形態2同樣地，為 323258 11 201248669 了避免可動側電極棒6與伸縮囊管蓋8之轉動，且防止伸 縮囊笞7之扭轉，而如第$圖所示地，可動侧凸緣3的筒 狀部3c係形成多角管狀，且導件12的外周面亦形成多角 狀，俾嵌合於多角管狀部3c内。 ^第5圖所不之導件12的外表面與可動側凸緣3的多角 管狀部3c係顯示為六角形，惟當然亦可為六角形以外的多 角形應無庸贅述。 (實施形態4) 根據第6圖說明本發明實施形態4。第6圖係顯示本 發明實施形態4之真空閥的概略剖面圖。 如第6圖所示，各元件符號卜2、4至12係為與前述 實施形態1相同的構成。相對於前述實施形態1的可動側 ，緣3,本實施形態4的可動侧凸緣13係由：安裝於絕緣 筒1另一端侧之金屬化層4的可動側端部金屬件14、及安 裝於可動側端部金屬件14且透過伸縮囊管7支持可動側電 極棒6的可動侧端板15所構成；可動侧端板15的中心部 係形成筒狀，例如形成圓筒狀部15a，並將導件12的外表 面朝可動側電極方向延伸，且使可動側端板15之圓筒狀部 15a的内表面與導件12的外表面相接，藉以使可動側端板 15具有軸承功能。 "又成此種構造的理由，係為了使可動側端部的機械強 度提升。例如，為了使前述實施形態丨之可動侧凸緣3之 端板部分（伸縮囊管7的固接部分）的機械強度提升，只要 增加凸緣整體的板厚即可，但因絕緣筒1與可動侧凸緣3 323258 12 201248669 具有熱膨張係数的差異’所以愈增加板厚，真空硬焊時產 生於絕緣筒1的應力就愈增大，而有導致絕緣筒〗產生破 裂之可能性。 因此，在實施形態4中，藉由使可動側端部金屬件14 固接於金屬化層4，且將伸縮囊管7的接合構件變更成可 動側端板15，而設成可改變可動側端板15之板厚且可謀 求機械強度之提升的構造。可動侧端板15的板厚若增厚， 圓筒狀部15a的板厚也會變厚，滑動部的機械強度亦會提 升’可達成可動側端部之機械壽命的延伸’可獲致亦適用 於多頻度開閉用真空斷路器之真空閥。 (實施形態5) 根據第7圖說a月本發明實施形態$。第7圖係顯示 本發明實施形態5之真空閥之伸縮囊管蓋與導件的概略 圖。第7圖（a)係顯示真空閥之伸縮囊管蓋與導件的立體 圖’第7圖（b)係顯示真空閥之伸縮囊管蓋的前視圖，第7 圖（c)係顯示真，之導件的前視圖。 —本實施幵v態5中，由於只有可動側電極棒與伸縮囊管 ^件的化狀不同’其餘構造係與前述實施形態1相同， 故其餘構造的說明從略。 裝的：骏於真空斷路器本體時’有時會考量到安 =作業^將可動側電極棒以成多角狀，而不設成圓 钱⑶* 。 圖所不’並非在伸縮囊管蓋8設置圓 Λ狀8β，而是伸縮壹其 κ ^ . 、、囊e盍8的中心部形成多角管狀，例 如形成多角管狀部8 c且在伸縮囊管蓋8之多角管狀部8c η 323258 201248669 的側面設有凸部8d。另一方面，將導件12的内周面設成 • 與伸縮囊管蓋8之多角管狀部8c同樣的多角狀部12d，且 • 在其多角狀部12d的内表面設置凹部12e，而使導件12的 凹部12e嵌合於伸縮囊管蓋8的凸部8d。 藉由採用以上的構造，能使可動側電極棒6相對於絕 緣筒1的軸心平行地動作。 /第7圖中，伸縮囊管蓋8的多角管狀部8c係顯示成六 角形，惟亦可配合可動側電極棒6的形狀，而改變多角管 狀部k的形狀。此外，第7圖中，設置於伸縮囊管蓋8之 多角管狀部8c側面的凸部8d係顯示設於三個部位的情 $ ’惟不論設置於多少部位皆可達成同樣的效果乃無庸費 根據實施形態5’由於與前述實施形態i同樣地可在 伸縮囊管蓋8安裝料12，所料紐導件安裝板等構件 固接於可動側凸緣，可達成零件數的減少。 、此外’導件12僅藉由壓入伸縮囊管蓋8即可安裝，所 以了縮短導件12的安裝作業時間。 另外，第7圖所示的伸縮囊管蓋8亦可藉由沖壓加工 製成，所料使料單價㈣在低廉價位。 又由於將導件12安裝於伸縮囊管蓋8，使具有抽承 :可動側凸緣3的圓筒狀部3a朝電極方向延伸，所以 更在開極狀態下’亦可進行可動側電極棒6的軸心運 直^會使導件12突出至可動側凸緣3外部 求真空閥整體長度的縮短。 323258 14 201248669 • 此外’藉由使伸縮囊管蓋8之多角管狀部化的形狀配 .合可動側電極棒6的形狀，即可増加伸縮囊管蓋8之多角 -管狀部8c相對於可動側電極棒6的内接面積，使可動侧電 極棒6對於通1時所產生之電磁力㈣度可更有效地補 強。 又，第7圖所示之伸縮囊管蓋8組裝完成之後，如第 6圖之前述實施形態4之真空閥的概略剖面圖所示地，藉 由可動側端部金屬件14與可動側端板15來構成可動側凸 緣13，亦能發揮同樣的效果。 (實施形態6) 依據第8圖至第1〇圖說明本發明實施形態6，惟其中 對相同或相當的構件、部位係標談相同符號來說明。第8 圖係顯示本發明實施形態6之真空間的概略剖面圖。第9 圖係顯示本發明實施形態6之真空間之伸縮囊管蓋與導件 之嵌合狀態的構成圖。第10圖係本發明實施形態6之真允 閥之伸縮囊管蓋與導件之嵌合部的放大圖。 /工 與前述第1圖所示之實施形態i之真空閥的概略剖面 圖相比較時，不同的部位只有伸縮囊管蓋與導件的構造， 所以變更部位以外之部位的說明從略。 本實施形態6中，如第8圖所示，伸縮囊管蓋8的中 心部係形成圓筒狀’例如形成㈣狀部8a，且以圍繞可動 側電極棒6的方式朝著與電極相反的方向延伸。而且，將 伸縮囊管蓋8之圓筒狀部8a的延伸側前端部予以反折而开》 成有反折部8e。（參照第9圖） 323258 15 201248669 由熱可塑性合成樹脂等所構成的導件12係形成圓筒 狀，如第9圖所示，將其一端部予以反折而形成有反折部 12f。伸縮囊管蓋8係由具彈性的帶狀構件加工而成，藉由 壓入導件12而使導件12的反折部彼合於伸維囊管蓋 8的反折部8e，即可將導件12安裝於伸縮囊管蓋8。 如第9圖所示，將伸縮囊管蓋8的厚度設為t，將伸 縮囊管蓋8之反折部8e的反折尺寸設為A ’將導件12之 反折部12f的反折尺寸設為B，將導件12之反折部12f的 反折尺寸設為C時，藉由以使B> A+2t且B-a> 2t之條件 成立的方式設定各尺寸，即可實現伸縮囊管蓋8之反折部 8e與導件12之反折部12f的嵌合’再者，藉由設定c>t /2之條件’將真空閥組裝於真空斷路器本體時可防止因 開閉動作而導致導件脫離及落下。 與前述實施形態1同樣地，可動侧凸緣3的圓筒狀部 3a係藉由與安裝於伸縮囊管蓋8的導件12相接觸，可動 側凸緣3的圓筒狀部3a與導件12乃成為滑動部，可使可 動侧凸緣3具有轴承功能。 此貫施肜I 6中，與前述實施形態丨同樣地，由於 需要導件安餘等構件，所以可達成零件數的減少。此外， 將導件12安裝於伸縮囊管蓋8時，由於可避免利用螺綠進 行導件的鎖緊作業或雷射炫接等繁_#，故可縮短 的：裝作=’。由於第9圖所示的伸縮囊管蓋8亦可藉 由冲壓加工^成，故可使零件單價抑制在低廉價位。 藉由12安裝於伸縮囊管蓋8，即便在開極狀離 323258 16 201248669 下亦可使可動側電極棒6相對於絕緣们的軸心平行地動 作而不會使導件12突出至可動側凸緣3外部’所以可謀 ‘求真空閥整體長度之縮短。 此外，實施形態6中，導件12係位於由接近可動側電 極棒6之伸縮囊营蓋8的圓筒狀部如與可動側凸緣3的圓 筒狀部3a所挾持的位置，所以即使在薄壁化的狀態下亦可 保持其強度。亦即，因薄壁化而使導件12的材料費減少。 藉ί前述之零件數的減少、導件安裝作業的縮短、伸縮囊 管盖8之製作的容易性，真空閥整體長度的縮短及導件12 的薄壁化’可實現真空_成本降低。 由於伸縮囊管蓋8係以朗範„繞可動側電極棒 6’故作為對於通電時產生之電磁力的補強材而言，可有效 地防止可動側電極棒6的彎曲。 又該實施形態6 t，亦如第4圖所示地’藉由在導 件12的外表面設置凸部12c，且在可動側凸緣^設置缺口 邛3b ’即可避免可動侧電極棒6與伸縮囊管蓋8之轉動， 並可防止伸縮囊管7之杻轉。第4圖中，導件12的凸部 12c、可動側凸緣3的缺口部北均設置一個部位 狹 亦可設置兩個部位以上。 田… (實施形態7) 7 °第11圖係顯示 圖0 元件符號1、2、4 6相同的構成。相 依據第11圖說明本發明實施形態 本發明實施形態7之真空閱的概略剖面 該實施形態7中，如第u圖所示， 至12、8a、8e、12f係與前述實施形態 323258 17 201248669 對於前述實施形態6的可動側凸緣3，本實施形態7的可 動侧凸緣13係由：安裝於絕緣筒1另一端側之金屬化層4 的可動側端部金屬件14、及安裝於可動側端部金屬件14 且經由伸縮囊管7支持可動侧電極棒6的可動侧端板15所 構成。可動側端板15的中心部係形成筒狀，例如形成圓筒 狀部15a，且將導件12的外表面朝可動側電極方向延伸， 可動側端板15之圓筒狀部15a的内表面與導件12的外表 面相接觸，藉以使可動側端板15具有軸承功能。 本實施形態7中，藉由使可動側端部金屬件14固接於 金屬化層4，且將伸縮囊管7的接合構件變更成可動侧端 板15，以改變可動側端板15之板厚，而成為可謀求機械 強度之提升的構造。若使可動側端板15的板厚增加，則圓 筒狀部15a的板厚亦會變厚，滑動部的機械強度亦會提 升，可謀求可動側端部之機械壽命的延長，可獲致亦能適 用於多頻度開閉用真空斷路器之真空閥。 〔產業上之可利用性〕 本發明適於實現一種可簡單地安裝導件而不會使零件 數增加，且可達成長度之縮短之真空閥。 【圖式簡單說明】 第1圖係顯示本發明實施形態1之真空閥的概略剖面 圖。 第2圖係顯示本發明實施形態1之真空閥之伸縮囊管 蓋與導件之嵌合狀態的構成圖。 第3圖係本發明實施形態1之真空閥之伸縮囊管蓋與 18 323258 201248669 導件之嵌合部的放大圖。 • 第4圖係顯示本發明實施形態2之真空閥之導件與可 ’ 動侧凸緣的概略圖。 第5圖係顯示本發明實施形態3之真空閥之導件與可 動侧凸緣之其他例的概略圖。 第6圖係顯示本發明實施形態4之真空閥的概略剖面 圖。 第7圖（a)至（c)係顯示本發明實施形態5之真空閥的 伸縮囊管蓋與導件的概略圖。 第8圖係顯示本發明實施形態6之真空閥的概略剖面 圖。 第9圖係顯示本發明實施形態6之真空閥之伸縮囊管 蓋與導件之嵌合狀態的構成圖。 第10圖係本發明實施形態6之真空閥之伸縮囊管蓋與 導件之嵌合部的放大圖。 第11圖係顯示本發明實施形態7之真空閥的概略剖面 圖。 【主要元件符號說明】 1 絕緣筒 2 固定侧凸緣 3 可動側凸緣 3a 圓筒狀部 3b 缺口部 3c 多角管狀部 4 金屬化層 5 固定侧電極棒 6 可動側電極棒 7 伸縮囊管 8 伸縮囊管蓋 8a 圓筒狀部 323258 19 201248669 8b 凸部 8c 多角管狀部 8d 凸部 8e 反折部 9 固定側電極 10 可動側電極 11 電弧屏蔽 12 導件 12a 凹部 12b 推拔部 12c 凸部 12e 凹部 12f 反折部 13 可動側凸緣 14 可動側封止金屬件 15 可動侧端板 15a 圓筒狀部201248669 • VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a vacuum width having a fixed side electrode and a movable side electrode which are detachably mountable in, for example, a vacuum container. [Prior Art] A conventional vacuum valve has a metallized layer formed on both ends of a cylindrical insulating container made of an insulator such as alumina ceramic, and is made to maintain the inside of the container in a highly vacuum state. The metal flange is fixed to the metallization layer by brazing. The metal flanges fixed to the both ends of the insulating container are fixedly coupled to the fixed side electrode rod and the movable side electric shock rod, respectively, and the fixed side electrode and the movable side electrode are respectively fixed to the opposite surfaces of the electric shock rods. Further, a bellows tube is provided between the movable side electrode rod and the metal flange so that the movable side electrode can be moved to the axial center of the insulating container while maintaining the airtightness, but the arc generated during the interruption of the current is prevented. The umbrella-shaped bellows cap that is not stained by the bellows is fixed to the movable side electrode rod, and the bellows tube is attached to the bellows cap and the movable side flange. Further, inside the insulating container, an arc shield is provided so as to surround the opposite electrode to prevent the inner surface of the insulating container from being stained by an arc generated when current is interrupted. A guide mounting plate is fixed to the movable side metal flange, and the guide member fitted to the movable side electrode rod is attached to the guide mounting plate by screws. The guide member is composed of a screw-fastened screw portion and a sliding portion of the movable-side electrode rod extending in the axial direction, and the movable-side electrode rod functions as a bearing that can open and close along the central axis 323258 4 201248669 (Refer to the patent document 丨). Further, as shown in Patent Document 2, there is also an example of a guide member by a guide. In this case, the movable side electrode rod is held and has a guide member made of an insulating material as a reverse sliding prevention member, and as a solid member of the guide member, the guide member of the movable side electrode rod is pressed. . The guide pressing member is welded to the end plate in a disc shape in the assembly guide. 'Through the laser welding patent document 3 towel' is attached to the movable side conductor guide of the vacuum circuit breaker, and the wire sliding part acts as the movable side metal end (4) = piece, making it movable The side metal end plates have a bearing function. 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 In the method of attaching a conventional guide member described in Patent Document 1 and Patent Document 2, a screw, a guide mounting plate, or a ^ is required. The guide member such as the guide pressing member is mounted (four), and there is a problem that the number of parts is increased. In addition, when focusing on the installation work of the guides, it is necessary to perform screwing or laser refining, which is time consuming, and in order to install the guides by laser welding 323258 5 201248669 ', expensive laser welding is required. The machine has a problem that leads to the production: this increase. - In the guide mounting method of the vacuum valve described in Patent Document 3, in order to prevent the guide from falling by the movable side main circuit terminal, it is necessary to protrude the movable side flange at one end of the guide even in the closed state. Further, the crucible is in contact with the movable side main circuit terminal, and as a result, there is a problem that the overall length of the vacuum valve becomes long. The present invention has been made in order to solve the above problems, and an object of the invention is to provide a vacuum valve which can easily mount a guide without increasing the number of parts and can shorten the overall length. [Means for Solving the Problem] The vacuum valve of the present invention includes: an insulating cylinder; a fixed side flange attached to one end side of the insulating cylinder; and a movable side flange attached to the other end side of the insulating cylinder; The fixed-side electrode rod is attached to the fixed-side flange and provided with a fixed-side electrode; the movable-side electrode rod is disposed coaxially with the fixed-side electrode rod, and is provided to be movable relative to the fixed-side electrode a side electrode supported by the movable side flange via a bellows; and a bellows cap attached to the movable side electrode rod to cover the bellows; wherein, in the case of the bellows cap, the center thereof The portion is formed in a tubular shape and extends in a direction opposite to the movable side electrode, and a guide member made of an insulator is attached to the tubular portion of the bellows cap. Further, the vacuum valve of the present invention includes: an insulating cylinder; a fixed side flange attached to one end side of the insulating cylinder; and a movable side flange attached to the other end side of the insulating sleeve of the first 6 323258 201248669; The electrode rod is attached to the fixed side flange and has a fixed side electrode; the movable side electrode rod is disposed coaxially with the fixed-fixing side electrode rod and is disposed opposite to the fixed side electrode a movable side electrode supported by the movable side flange via a bellows; and a bellows cap attached to the movable side electrode rod to cover the bellows tube; wherein the center portion of the bellows cap is formed a tubular shape extending in a direction opposite to the movable side electrode, and a guide member made of an insulator is attached to the tubular portion of the bellows cap; the center portion of the movable side flange is formed into a cylindrical shape And extending the outer surface of the guiding member in the direction of the movable side electrode, and the inner surface of the tubular portion of the movable side flange is in contact with the outer surface of the guiding member, thereby making the movable The flange having a bearing function. Further, the vacuum valve according to the present invention includes: an insulating cylinder; a fixed side flange attached to one end side of the insulating cylinder; a movable side flange attached to the other end side of the insulating cylinder; and a fixed side electrode rod Mounted on the fixed side flange, and provided with a fixed side electrode; the movable side electrode rod is disposed coaxially with the fixed side electrode rod, and is provided with a movable side electrode facing the fixed side electrode, and is extended and contracted The balloon tube is supported by the movable side flange; and the bellows cap is attached to the movable side electrode rod to cover the bellows tube; wherein the center portion of the bellows cap is formed into a cylindrical shape, and The movable side electrode extends in an opposite direction, and a guide member made of an insulator is attached to the tubular portion of the bellows cap; the movable side flange 7 323258 201248669: by life: mounted in the insulating barrel a movable side end metal on the other end side, a metal side member attached to the movable side end member, and a movable side end plate supporting the movable side electrode rod via the bellows tube; The central portion of the side j plate is formed into a cylindrical shape and extends the outer surface of the guide member in the direction of the movable side electrode, wherein the inner surface of the cylindrical portion of the movable side end plate is in contact with the outer surface of the guide member The aforementioned movable side end plate has a bearing function. [Effect of the Invention] According to the vacuum valve of the present invention, the bellows cap is formed such that its central portion is formed in the same shape: and extends in a direction opposite to the movable side electrode by mounting in the cylindrical portion of the bellows cap The guide member composed of the insulator can obtain a vacuum crucible which does not increase the number of parts and can shorten the overall length. [Embodiment] (Embodiment 1) Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 3, and the same reference numerals are given to the same or corresponding members and parts in the drawings. Fig. 1 is a schematic cross-sectional view showing a vacuum crucible of an embodiment of the present invention. Fig. 2 is a view showing a configuration of a state in which a bellows cap and a guide of a vacuum valve according to Embodiment j of the present invention are fitted. Fig. 3 is an enlarged view showing a fitting portion of a bellows cap and a guide of the vacuum valve according to the first embodiment of the present invention. This vacuum valve is formed of a cylindrical insulating cylinder 1 made of an insulating material such as oxidized ceramics, and has a container formed on both end sides thereof, and is installed in a gas-tight manner in order to hold the inside in a high-vacuum state. A metal such as steel has a fixed side flange 2 and a movable side flange 3 as materials, and the fixed side flanges 2 323258 8 201248669 and the movable side flange 3 are vacuum-welded to be coaxial with the insulating cylinder The state is fixed to the metallization layer 4 formed on both end sides of the insulating cylinder 1. • The fixed side electrode rod 5 is fixed to the fixed side flange 2 fixed to the end side of the insulating cylinder 1, and is fixed to the insulating barrel! The movable side flange 3' on the other end side is attached to the movable side electrode rod 6 via the bellows tube 7. One end side of the bellows 7 is fixed to the movable side flange 3, and the other end side of the bellows tube 7 is fixed to the movable side electrode rod 6 via a bellows cap 8, which is prevented from being prevented. It is set for the purpose of fouling the bellows 7 due to an arc generated when the current is interrupted. The fixed side electrode 9 and the movable side electrode 1 are fixed to the opposing surfaces of the fixed side electrode rod 5 and the movable side electrode rod 6, respectively, and the fixed movable side electrode rod 6 is attached to the movable portion via the bellows tube 7 Since the side flange 3 is provided, the movable side electrode 10 can be formed to be detachably coupled to the fixed side electrode 9 on the axial center of the insulating cylinder 1 while maintaining airtightness. - the outer edge of the ', §> edge 4 1 ' is provided with an arc shield n in such a manner as to surround the oppositely disposed solid, side electrode 9 and movable side electrode 1G: the arc shield 11 is used to prevent current The arc generated between the electrodes at the time of the interruption causes the stain on the inner surface of the insulating cylinder 1 for the purpose. As described above, the bellows 7 is fixed to the movable side electrode rod 6 through the bellows cap 8. As shown in Fig. 2, the center portion of the bellows cap 8 is formed into a tubular shape, and is formed, for example, in a cylindrical cylindrical portion and extends in a direction opposite to the electrode. The front end side of the cylindrical portion 83 of the bellows cap 8 is formed in a zigzag shape, and a convex portion 8b is formed in the circumferential direction. On the other hand, the central portion of the movable side flange 3 is formed in a cylindrical shape, and is formed, for example, in a cylindrical shape. The 323258 9 201248669 portion 3a extends in the electrode direction. "The guide 12 composed of a thermoplastic synthetic resin or the like is formed into a cylindrical shape". The inner surface thereof is provided with a concave portion 12a. The bellows cap 8 is formed of a flexible band member. The inner push guide 12 allows the recess 12a of the guide 12 to be fitted to the convex portion of the bellows cap 8, and the guide 12 to be attached to the bellows cap 8. At this time, in order to make the guide 12 easily The human bellows cap 8 may be provided with a push-out portion 12b on the distal end side of the second end as shown in Fig. 2. The bellows cap 8t may be provided with only the cylindrical portion 8a and attached by a dose or the like. The guide member 12. However, as shown in Fig. 3, the thickness of the telescopic cover 8 is set to t, the projection size of the convex portion of the bellows cap 8 is set to a, and the depth of the recess 12a of the guide 12 is set. When the size is set to 匕, the relationship between the size and the size of b> a+t is set, and when the vacuum valve group is placed on the vacuum circuit breaker body, the off-axis (4) guide member can be prevented from coming off and falling. The cylindrical portion 3a of the rim 3 is brought into contact with the guide 12 attached to the bellows tube 8 so that the cylindrical portion of the movable side flange 3 becomes a sliding portion with the guide member 12, and The movable side flange 3 has a bearing function. In the first embodiment, by providing the convex portion 8b in the bellows cap 8, the guide 12 can be attached to the bellows cap 8, so that the movable side flange is not required. 3 Fixing the components such as the guide mounting plate, * can reduce the number of parts. In addition, when the guide 12 is mounted on the bellows cap 8, only the guide 2 needs to be pressed into the bellows cap 8'. Avoid the cumbersome work such as guide locking operation or laser ray, and shorten the installation time of the guide. Since the bellows cap 8 shown in Fig. 2 can be made by stamping, 323258 10 In addition, since the guide member 12 is attached to the bellows cap 8, and the cylindrical portion 3a of the movable side flange 3 having the bearing function is extended in the electrode direction, even if the guide member 12 is attached to the battery. In the open state, the movable-side electrode rod 6 can be operated in parallel with the axial center of the insulating cylinder 1, and the guide 12 does not protrude to the outside of the movable-side flange 3, so that the entire length of the vacuum valve can be achieved. Shortening of the number of parts, reduction of the number of parts mentioned above, installation of guides The ease of the production of the bellows cap 8 and the shortening of the entire length of the vacuum valve can be achieved, and the cost of the vacuum valve can be reduced. (Embodiment 2) Embodiment 2 of the present invention will be described based on Fig. 4, and Fig. 4 shows the present invention. In the second embodiment of the present invention, the notch portion 3b is provided in the tubular portion 3a of the movable side flange 3, as shown in Fig. 4, Further, the convex portion 12c for engaging with the notch portion 3b is provided on the outer surface of the guide member 12, so that the rotation of the movable side electrode rod 6 and the bellows cap 8 can be prevented, and the torsion of the bellows 7 can be prevented. In the figure, the notch 邛3b of the tubular portion 3a of the movable side flange 3 and the convex portion 12c of the guide 12 are all provided in one portion. However, it is needless to say that two or more portions may be provided. (Embodiment 3) Embodiment 3 of the present invention will be described based on Fig. 5 . Fig. 5 is a schematic view showing a guide of a vacuum valve and a movable side flange according to a third embodiment of the present invention. In the third embodiment of the present invention, in the same manner as in the second embodiment, 323258 11 201248669 avoids the rotation of the movable-side electrode rod 6 and the bellows cap 8, and prevents the twist of the bellows 7, as shown in Fig. The cylindrical portion 3c of the movable side flange 3 is formed into a polygonal tubular shape, and the outer peripheral surface of the guide 12 is also formed in a polygonal shape, and the weir is fitted into the polygonal tubular portion 3c. The outer surface of the guide member 12 and the polygonal tubular portion 3c of the movable side flange 3 are shown in a hexagonal shape in Fig. 5, but it is needless to say that the polygonal shape other than the hexagonal shape should be omitted. (Embodiment 4) Embodiment 4 of the present invention will be described based on Fig. 6 . Fig. 6 is a schematic cross-sectional view showing a vacuum valve according to a fourth embodiment of the present invention. As shown in Fig. 6, each component symbol 2, 4 to 12 has the same configuration as that of the first embodiment. With respect to the movable side and the edge 3 of the first embodiment, the movable side flange 13 of the fourth embodiment is a movable side end metal member 14 attached to the other end side of the insulating cylinder 1, and is mounted. The movable side end metal member 14 is configured to support the movable side end plate 15 of the movable side electrode rod 6 through the bellows tube 7; the central portion of the movable side end plate 15 is formed into a cylindrical shape, for example, a cylindrical portion 15a is formed. The outer surface of the guide member 12 is extended toward the movable side electrode, and the inner surface of the cylindrical portion 15a of the movable side end plate 15 is brought into contact with the outer surface of the guide member 12, whereby the movable side end plate 15 has a bearing. Features. " The reason for this construction is to increase the mechanical strength of the movable side end. For example, in order to increase the mechanical strength of the end plate portion (the fixed portion of the bellows 7) of the movable side flange 3 of the above-described embodiment, it is only necessary to increase the thickness of the entire flange, but the insulating cylinder 1 and The movable side flange 3 323258 12 201248669 has a difference in thermal expansion coefficient 'so that the plate thickness is increased, and the stress generated in the insulating cylinder 1 during vacuum brazing is increased, and there is a possibility that the insulating cylinder is broken. Therefore, in the fourth embodiment, the movable side end metal member 14 is fixed to the metallization layer 4, and the joint member of the bellows tube 7 is changed to the movable side end plate 15, so that the movable side can be changed. The structure of the end plate 15 is thick and the mechanical strength can be improved. When the thickness of the movable side end plate 15 is increased, the thickness of the cylindrical portion 15a is also increased, and the mechanical strength of the sliding portion is also improved. "The extension of the mechanical life of the movable side end can be achieved". Vacuum valve for vacuum circuit breaker for multi-frequency opening and closing. (Embodiment 5) According to Fig. 7, a month of embodiment of the present invention is described. Fig. 7 is a schematic view showing a bellows cap and a guide of a vacuum valve according to a fifth embodiment of the present invention. Fig. 7(a) is a perspective view showing the bellows cap and the guide of the vacuum valve. Fig. 7(b) is a front view showing the bellows cap of the vacuum valve, and Fig. 7(c) shows the true, Front view of the guide. In the present embodiment, only the movable-side electrode rod and the bellows tube are different in configuration. The rest of the structure is the same as that of the first embodiment, and therefore the description of the remaining structures will be omitted. Installed: Jun in the vacuum circuit breaker body 'sometimes will consider the safety = operation ^ will move the side electrode rod into a polygonal shape, not set to money (3) *. In the figure, the bellows cap 8 is not provided with a rounded shape 8β, but is expanded and contracted, and the central portion of the capsule e盍8 is formed into a polygonal tube shape, for example, a polygonal tubular portion 8c is formed and the bellows tube is formed. The side surface of the polygonal tubular portion 8c η 323258 201248669 of the cover 8 is provided with a convex portion 8d. On the other hand, the inner peripheral surface of the guide 12 is provided with a polygonal portion 12d similar to the polygonal tubular portion 8c of the bellows cap 8, and the concave portion 12e is provided on the inner surface of the polygonal portion 12d. The concave portion 12e of the guide 12 is fitted to the convex portion 8d of the bellows cap 8. By adopting the above configuration, the movable-side electrode rod 6 can be operated in parallel with respect to the axial center of the insulating cylinder 1. In Fig. 7, the polygonal tubular portion 8c of the bellows cap 8 is shown in a hexagonal shape, but the shape of the polygonal tube portion k may be changed in accordance with the shape of the movable side electrode rod 6. Further, in Fig. 7, the convex portion 8d provided on the side surface of the polygonal tubular portion 8c of the bellows cap 8 is displayed in three places, but the same effect can be achieved regardless of the number of places provided. According to the fifth embodiment, the material 12 can be attached to the bellows cap 8 in the same manner as in the above-described embodiment i, and members such as the guide member mounting plate are fixed to the movable side flange, and the number of parts can be reduced. Further, the guide member 12 can be attached only by press-fitting the bellows cap 8, so that the installation work time of the guide 12 is shortened. In addition, the bellows cap 8 shown in Fig. 7 can also be produced by press working, and the unit price (four) is made low and low. Further, since the guide member 12 is attached to the bellows cap 8 and the cylindrical portion 3a having the suction side of the movable side flange 3 is extended in the direction of the electrode, the movable side electrode rod can be further moved in the open state. The axial centering of 6 causes the guide 12 to protrude to the outside of the movable side flange 3 to shorten the overall length of the vacuum valve. 323258 14 201248669 • In addition, by the shape of the polygonal tubular portion of the bellows cap 8 and the shape of the movable side electrode rod 6, the polygonal-tubular portion 8c of the bellows cap 8 can be moved relative to the movable side. The inner contact area of the electrode rod 6 allows the movable side electrode rod 6 to be more effectively reinforced by the electromagnetic force (four degrees) generated when the current is passed. Further, after the assembly of the bellows cap 8 shown in Fig. 7 is completed, as shown in the schematic cross-sectional view of the vacuum valve of the fourth embodiment in Fig. 6, the movable side end metal member 14 and the movable side end are provided. The plate 15 constitutes the movable side flange 13, and the same effect can be exhibited. (Embodiment 6) The sixth embodiment of the present invention will be described with reference to the sixth embodiment, and the same or equivalent components and portions will be described with the same reference numerals. Fig. 8 is a schematic cross-sectional view showing the vacuum chamber in the sixth embodiment of the present invention. Fig. 9 is a view showing the configuration of a state in which the bellows cap and the guide of the vacuum chamber according to the sixth embodiment of the present invention are fitted. Fig. 10 is an enlarged view showing a fitting portion of a bellows cap and a guide of the true valve of the sixth embodiment of the present invention. When compared with the schematic cross-sectional view of the vacuum valve of the first embodiment shown in Fig. 1, the different portions have only the structure of the bellows cap and the guide member, and therefore the description of the portions other than the changed portion will be omitted. In the sixth embodiment, as shown in Fig. 8, the center portion of the bellows cap 8 is formed in a cylindrical shape, for example, a (four) portion 8a, and is opposed to the electrode so as to surround the movable side electrode rod 6. The direction extends. Further, the front end portion of the extending portion of the cylindrical portion 8a of the bellows cap 8 is folded back to form a folded portion 8e. (Refer to Fig. 9) 323258 15 201248669 A guide 12 composed of a thermoplastic synthetic resin or the like is formed into a cylindrical shape. As shown in Fig. 9, one end portion is folded back to form a folded-back portion 12f. The bellows cap 8 is machined from a resilient band member, and by pressing the guide 12, the reflexed portion of the guide member 12 is joined to the reflexed portion 8e of the stretched cap tube cover 8 The guide 12 is attached to the bellows cap 8. As shown in Fig. 9, the thickness of the bellows cap 8 is set to t, and the reflexed size of the folded-back portion 8e of the bellows cap 8 is set to A' to reflex the reflexed portion 12f of the guide 12. When the size is B and the reversal size of the folded-back portion 12f of the guide 12 is C, the size can be set such that the conditions of B > A+2t and B-a> 2t are established. The fitting of the folded-back portion 8e of the bellows cap 8 and the folded-back portion 12f of the guide 12 is further prevented by assembling the vacuum valve to the vacuum interrupter body by setting the condition of c>t /2 The opening and closing action causes the guide to disengage and fall. Similarly to the first embodiment, the cylindrical portion 3a of the movable side flange 3 is in contact with the guide 12 attached to the bellows cap 8, and the cylindrical portion 3a and the guide of the movable side flange 3 are guided. The member 12 is a sliding portion, and the movable side flange 3 can have a bearing function. In this embodiment, as in the above-described embodiment, since a member such as a guide balance is required, the number of parts can be reduced. Further, when the guide member 12 is attached to the bellows cap 8, it is possible to avoid the use of the screw green for the locking operation of the guide member or the laser splicing, etc., so that it can be shortened: Since the bellows cap 8 shown in Fig. 9 can also be formed by press working, the unit price of the part can be suppressed at a low price. By attaching to the bellows cap 8 by 12, the movable side electrode rod 6 can be moved in parallel with respect to the axis of the insulator without opening the guide 12 to the movable side even in the open state of 323258 16 201248669. The outer portion of the flange 3 is so small that the overall length of the vacuum valve can be shortened. Further, in the sixth embodiment, the guide 12 is located at a position sandwiched by the cylindrical portion of the bellows cover 8 close to the movable-side electrode rod 6 and the cylindrical portion 3a of the movable-side flange 3, so that even The strength can also be maintained in a thinned state. That is, the material cost of the guide 12 is reduced due to the thinning. The reduction in the number of parts described above, the shortening of the guide mounting work, the ease of production of the bellows cap 8, the shortening of the entire length of the vacuum valve, and the thinning of the guide 12 can achieve a vacuum-cost reduction. Since the bellows cap 8 is a reinforcing material for the electromagnetic force generated at the time of energization, it can effectively prevent the bending of the movable-side electrode rod 6. This embodiment 6 t, as shown in Fig. 4, by providing the convex portion 12c on the outer surface of the guide member 12, and providing the notch 邛3b' on the movable side flange, the movable side electrode rod 6 and the bellows cap can be avoided. The rotation of 8 prevents the bellows 7 from rotating. In Fig. 4, the convex portion 12c of the guide member 12 and the notch portion of the movable side flange 3 are each provided with a narrow portion or more than two portions. (Embodiment 7) Fig. 11 is a view showing the same configuration of the reference numerals 1, 2, and 4 6 of Fig. 0. A schematic cross section of the vacuum reading according to the seventh embodiment of the present invention will be described with reference to Fig. 11. In the seventh embodiment, as shown in Fig. u, the steps 12, 8a, 8e, and 12f are the same as the above-described embodiment 323258 17 201248669. With respect to the movable side flange 3 of the above-described sixth embodiment, the movable side flange 13 of the seventh embodiment is provided. The movable side end of the metallization layer 4 mounted on the other end side of the insulating cylinder 1 The metal member 14 and the movable side end plate 15 attached to the movable side end metal member 14 and supporting the movable side electrode rod 6 via the bellows tube 7 are formed. The center portion of the movable side end plate 15 is formed into a cylindrical shape, for example, The cylindrical portion 15a extends the outer surface of the guide 12 toward the movable side electrode, and the inner surface of the cylindrical portion 15a of the movable side end plate 15 comes into contact with the outer surface of the guide member 12, whereby the movable side end plate is provided. In the seventh embodiment, the movable side end metal fitting 14 is fixed to the metallized layer 4, and the joint member of the bellows 7 is changed to the movable side end plate 15 to change the movable side. When the thickness of the end plate 15 is increased, the mechanical strength can be improved. When the thickness of the movable side end plate 15 is increased, the thickness of the cylindrical portion 15a is also increased, and the mechanical strength of the sliding portion is also increased. It is possible to increase the mechanical life of the movable side end, and it is also possible to apply to a vacuum valve for a multi-frequency opening and closing vacuum circuit breaker. [Industrial Applicability] The present invention is suitable for realizing a simple installation. Guides without increasing the number of parts Fig. 1 is a schematic cross-sectional view showing a vacuum valve according to a first embodiment of the present invention. Fig. 2 is a view showing a bellows of a vacuum valve according to a first embodiment of the present invention. Fig. 3 is an enlarged view of a fitting portion of a bellows cap of a vacuum valve according to Embodiment 1 of the present invention and a guide member of 18 323258 201248669. Fig. 4 is a view showing A schematic view of a guide for a vacuum valve and a movable side flange according to a second embodiment of the present invention. Fig. 5 is a schematic view showing another example of a guide of a vacuum valve and a movable side flange according to a third embodiment of the present invention. Fig. 6 is a schematic cross-sectional view showing a vacuum valve according to a fourth embodiment of the present invention. Fig. 7 (a) to (c) are schematic views showing a bellows cap and a guide of a vacuum valve according to a fifth embodiment of the present invention. Fig. 8 is a schematic cross-sectional view showing a vacuum valve according to a sixth embodiment of the present invention. Fig. 9 is a view showing the configuration of a state in which the bellows cap and the guide of the vacuum valve according to the sixth embodiment of the present invention are fitted. Fig. 10 is an enlarged view showing a fitting portion of a bellows cap and a guide of the vacuum valve according to the sixth embodiment of the present invention. Figure 11 is a schematic cross-sectional view showing a vacuum valve according to a seventh embodiment of the present invention. [Main component symbol description] 1 Insulation cylinder 2 Fixed side flange 3 Movable side flange 3a Cylindrical portion 3b Notched portion 3c Multi-angle tubular portion 4 Metallized layer 5 Fixed side electrode rod 6 Movable side electrode rod 7 Telescopic tube 8 Bellows cap 8a Cylindrical portion 323258 19 201248669 8b Projection 8c Polygonal tubular portion 8d Projection 8e Reflexed portion 9 Fixed side electrode 10 Movable side electrode 11 Arc shield 12 Guide 12a Recess 12b Pushout portion 12c Projection 12e Concave portion 12f Folding portion 13 Movable side flange 14 Movable side sealing metal member 15 Movable side end plate 15a Cylindrical portion