TW201247565A - Production method for glass sheet and glass sheet production device - Google Patents

Production method for glass sheet and glass sheet production device Download PDF

Info

Publication number
TW201247565A
TW201247565A TW101111556A TW101111556A TW201247565A TW 201247565 A TW201247565 A TW 201247565A TW 101111556 A TW101111556 A TW 101111556A TW 101111556 A TW101111556 A TW 101111556A TW 201247565 A TW201247565 A TW 201247565A
Authority
TW
Taiwan
Prior art keywords
glass
glass ribbon
temperature
width direction
ribbon
Prior art date
Application number
TW101111556A
Other languages
Chinese (zh)
Other versions
TWI417254B (en
Inventor
Tetsuo Kimijima
Kimihiko Nakashima
Shinji Yamazaki
Original Assignee
Avanstrate Inc
Avanstrate Korea Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Avanstrate Inc, Avanstrate Korea Inc filed Critical Avanstrate Inc
Publication of TW201247565A publication Critical patent/TW201247565A/en
Application granted granted Critical
Publication of TWI417254B publication Critical patent/TWI417254B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06—Forming glass sheets
    • C03B17/064—Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B18/00—Shaping glass in contact with the surface of a liquid
    • C03B18/02—Forming sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06—Forming glass sheets
    • C03B17/067—Forming glass sheets combined with thermal conditioning of the sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B18/00—Shaping glass in contact with the surface of a liquid
    • C03B18/02—Forming sheets
    • C03B18/04—Changing or regulating the dimensions of the molten glass ribbon
    • C03B18/06—Changing or regulating the dimensions of the molten glass ribbon using mechanical means, e.g. restrictor bars, edge rollers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B18/00—Shaping glass in contact with the surface of a liquid
    • C03B18/02—Forming sheets
    • C03B18/18—Controlling or regulating the temperature of the float bath; Composition or purification of the float bath
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B25/00—Annealing glass products
    • C03B25/04—Annealing glass products in a continuous way
    • C03B25/10—Annealing glass products in a continuous way with vertical displacement of the glass products
    • C03B25/12—Annealing glass products in a continuous way with vertical displacement of the glass products of glass sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/16—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by roller conveyors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

A glass sheet production method having: a melting step; a molding step that uses the overflow downdraw method; and a glass ribbon annealing step. In the glass ribbon annealing step, a glass ribbon is drawn downwards and annealed while a neighboring area adjacent in the width direction of the glass ribbon relative to both end sections in the glass ribbon width direction is sandwiched between a plurality of conveyance roller pairs disposed in the conveyance direction for the glass ribbon. In the molding step, after the glass ribbon is formed, both end sections of the glass ribbon in the width direction are cooled faster than the center section of the glass ribbon in the width direction. In the annealing step, tension is applied to the glass ribbon in the conveyance direction, in a temperature range in which the temperature of the glass ribbon is at least the glass transition temperature but no more than the glass softening point, so that plastic deformation does not occur in the glass ribbon.

Description

201247565 六、發明說明： 【發明所屬之技術領域】 本發明係有關於一種玻璃板之製造方法及玻璃板製造裝 置。 【先前技術】 利用下拉法之玻璃板之製造方法係首先於成形步驟中， 熔融玻璃自成形體中溢流，形成玻璃帶。繼而，於後續之 徐冷步驟巾，將玻璃帶__面由傳魏對夾持—面朝下方拉 入’藉此，拉伸至所需之厚度，且以避免内部產生應變， 又，以避免玻璃帶翹曲之方式，進行玻璃帶之冷卻。其 後，玻璃帶被切斷為特定之尺寸，㈣央紙等相互承載，、 或者，進而進行傳送，於後續步驟中實施處理（例如形狀 加工、離子更換之化學強化處理）。 作為先前之利用下拉法之玻璃板之製造方法，已知藉由 使设置於成形體之正下方之冷卻輥對之圓周速度小於相較 該傳送輥對設置於下方之用以朝向下方拉伸玻璃帶之傳送 輥對之圓周速度，而減少玻璃板之翹曲（專利文獻丨）。 又，已知於配置於成形體之下方之複數個傳送輥對，藉 由使设置於下方之傳送輥對之圓周速度快於配置於上方之 傳送輥對之圓周速度，而減少玻璃板之翹曲（專利文獻2)。 [先前技術文獻] [專利文獻] 專利文獻1 :日本專利特開平丨〇_291826號公報 專利文獻2:日本專利特開平1〇_291827號公報 163550.doc 201247565 【發明内容】 [發明所欲解決之問題] 且說，徐冷步驟中之玻璃帶之寬度方向之兩端部係稱為 「耳」或「耳部」’且未用作玻璃基板製品，而自破璃帶 中切斷、去除。通常’該耳部與可用作製品（玻璃基板）之 區域（以下亦稱為寬度方向中央區域）相比，厚度厚出2〜5 倍。此處，耳部之厚度係即便製品之板厚變化亦幾乎不改 變’故其與用作製品之寬度方向中央區域之厚度之差隨著 需要製造之製品之厚度變薄而增大。再者，複數個傳送親 對係夾持著相較耳部為寬度方向内側之部分，進行玻璃帶 之傳送。 專利文獻1之製造方法係藉由於成形體之正下方，以快 於玻璃帶之寬度方向中央區域之方式將耳部冷卻，而使張 力作用於玻璃帶之寬度方向。此處，傳送輥之軸與玻璃帶 相比維持於較低之溫度’以防止高溫下變形，且傳送較本 身與接觸之玻璃之溫度相比亦為低溫。因此，由傳送輥對 夾持之區域之玻璃相較其周邊區域冷卻得早。又，於玻璃 帶之板厚較薄之情形時，相較由耳部或傳送輥對夾持之區 域為寬度方向内側且傳送輥附近之鄰接區域（圖7中由符號 S表示之區域）亦冷卻得較早β其原因在於，由於該鄰接區 域與耳部相比厚度極小，故而與耳部相比儲備熱量較小， 又，由於相較與玻璃帶之寬度方向中央部靠近傳送輥或徐 冷爐之外壁，故容易冷卻。再者，圖7係表示先前之玻璃 板製造裝置，且圖中之其他參照符號與下述實施形態中說 163550.doc 201247565 明之各要素之符號相同。 專利文獻2之製造方法係使設置於下方之傳送輥之圓周 速度快於設置於上方之傳送輥，且基於藉由自傳送方向^ 上游側至下游側使傳送輥之圓周速度依序變快而沿傳送方 向始終對玻璃帶施加張力之觀點。 然而，如專利文獻2所示，即便單純地使下游之傳送輥 之圓周速度快於上游，亦不僅達不到效果，而且於製造例 如板厚為0_5 mm以下等較薄之玻璃板之情形時，例如若賦 予如實施例_5]記載之圓周速度差’則存在玻璃帶破碎 之虞，故而極其危險。 因此，本發明之目的在於提供一種於製造玻璃板時，可 於徐冷爐内之冷料抑制與玻料之由複數個傳送輕夹持 之部分鄰接之鄰接區域中產生波形之變形的玻璃板之製造 方法及玻璃板製造裝置。 [解決問題之技術手段] 本發明之一態樣係一種玻璃板之製造方法。 該製造方法包括： 熔解步驟，其將玻璃原料熔解，製造熔融玻璃； 成形步驟，其係利溢流下拉法，㈣融玻璃成形，形 成玻璃帶；及 徐冷步驟，其一面利用沿上述玻璃帶之傳送方向設置之 複數個傳送_，夹持與上述玻璃帶之寬度方向之兩端部 在上述寬度方向上鄰接之附近區域，一面朝向下方曳引上 述玻璃帶’進行徐冷。 163550.doc 201247565 上述成形步驟係藉由將自成形體溢流且在上述成形體之 側壁流下之熔融玻璃於上述成形體之下端黏合而形成上述 玻璃帶後，以快於上述玻璃帶之寬度方向之中央部之方 式，將上述玻璃帶之寬度方向之上述兩端部冷卻。 上述徐冷步驟係以避免上述玻璃帶中產生塑性變形之方 式，於上述玻璃帶之溫度達到玻璃轉移點以上且玻璃軟化 點以下之溫度區域内，使張力於上述傳送方向上作用於上 述玻璃帶。 此時，較佳為，上述徐冷步驟使上述傳送輥對中之相較 上述玻璃帶之溫度達到玻璃徐冷點之位置設置於下游側的 傳送輥對之傳送輥之圓周速度快於上述傳送輥對中之設置 於上.述玻璃帶之溫度達到玻璃轉移點以上且玻璃軟化點以 下之溫度區域内的傳送輥對之傳送輥之圓周速度。 上述玻璃板例如可設為板厚0.5 mm以下。 又，較佳為，上述徐冷步驟以避免在上述玻璃帶之寬度 方向内側鄰接於由上述傳送輥夾持之部分之鄰接區域中產 生塑性變形之方式，於上述鄰接區域之溫度達到玻璃轉移 點以上且玻璃軟化點以下之溫度區域内，使傳送方向之張 力作用於上述玻璃帶。 進而，較佳為，上述徐冷步驟使上述傳送輥對中之相較 與上述玻璃帶之由傳送報夾持之部分在上述玻璃帶之寬度 方向内側鄰接之鄰接區域之溫度達到玻璃徐冷點之位置設 置於下游側的傳送輥對之傳送輥之圓周速度，快於上述傳 送輥對中之設置於上述鄰接區域之溫度達到玻璃轉移點以 163550.doc 201247565 上且破璃軟化點以下之溫度區域内的傳送輥對之傳送輥之 圓周速度。 又’較佳為，玻璃板之製造方法包括以下步驟：於上述 成形體之下端將上述熔融玻璃黏合而形成玻璃帶後，將上 述兩端部進行冷卻’直至將上述玻璃帶之寬度方向之上述 兩端部之黏度設為η時達到l〇gT1=9以上為止，且，上述兩 端部之冷卻速度快於上述玻璃帶之寬度方向之中央部之冷 卻速度。 較佳為’上述徐冷步驟以於上述玻璃帶之寬度方向之中 央部’張力作用於玻璃帶之傳送方向之方式，至少於上述 玻璃帶之寬度方向之中央部之溫度自玻璃徐冷點加上 BO C之溫度達到將玻璃應變點減去2〇〇。〇之溫度的溫度區 域内，進行溫度控制，以使上述玻璃帶之寬度方向之中央 部之冷卻速度快於上述寬度方向之兩端部之冷卻速度。 又，較佳為，以如下方式進行上述玻璃帶之溫度之控 制。 於上述玻璃帶之寬度方向之中央部之溫度為玻璃軟化點 以上之區域内，以上述玻璃帶之寬度方向之兩端部低於由 上述兩端部炎隔之中央部之溫度，且上述中央部之溫度達 到均一之方式，控制上述玻璃帶之溫度。 以於上述玻璃帶之寬度方向之中央部，玻璃帶傳送方向 之張力進行作用之方式，於上述玻璃帶之上述中央部之溫 度未達玻璃軟化點且為玻璃應變點以上之區域内，於制上 述玻璃帶之溫度，以使上述玻璃帶之寬度方向之溫：分佈 I63550.doc 201247565 自上述中央部朝向上述兩端部變低。 於上述玻璃帶之上述中央部之溫度達到玻璃應變點之溫 度區域内’控制上述玻璃帶之溫度，以使上述玻璃帶之寬 度方向之上述兩端部與上述中央部之溫度梯度消失。 進而，較佳為，以於上述玻璃帶之寬度方向之中央部， 玻璃帶傳送方向之張力進行作用之方式，於上述玻璃帶之 上述中央部之溫度未達玻璃應變點附近之區域内，控制上 述玻璃帶之溫度，以使上述玻璃帶之溫度自上述玻璃帶之 上述兩端部朝向上述中央部變低。 較佳為’上述徐冷步驟使上述傳送輥對_之相較上述玻 璃帶之溫度達到玻璃徐冷點之位置設置於下游側的傳送輥 對之傳送輥之圓周速度，相較上述玻璃輥對中之設置於上 述玻璃帶之溫度達到玻璃轉移點以上且玻璃軟化點以下之 溫度區域内的傳送輥對之傳送輥之圓周速度快〇.〇3〜2〇/。。 上述玻璃板之寬度方向之長度係例如1000 mm以上。 較佳為，上述徐冷步驟以2 〇 〇 m/小時以上之傳送速度朝 向下方曳弓丨上述玻璃帶，進行徐冷。 本發明之其他態樣之玻璃板之製造方法包括： 熔解步驟，其將玻璃原料熔解，製造熔融玻璃； 成形步驟，其係利用下拉法使熔融玻璃成形，形成玻璃 帶；及 徐冷步驟，其一面利用沿上述玻璃帶之傳送方向設置之 複數個傳送輥對’夾持與上述玻璃帶之寬度方向之兩端部 在寬度方向上鄰接之附近區域，一面朝向下方曳引上述玻 163550.doc -8 - 201247565 璃帶進行徐冷，形成板厚為0 5 mm以下之玻璃帶。 上述徐冷步驟係使相較上述玻璃帶之溫度達到徐冷點之 位置設置於下游側的上述傳送輥對之傳送輥之圓周速度， 快於設置於上述玻璃帶之溫度達到玻璃轉移點以上且軟化 點以下之溫度區域内的上述傳送輥對之上述傳送輥之圓周 速度。 進而，本發明之其他之一態樣係一種玻璃板製造裝置。 該裝置包括： 成形裝置，其利用下拉法自熔融玻璃使玻璃帶成形；及 徐冷裝置，其一面利用複數個傳送輥對，夾持與上述玻 璃帶之寬度方向之兩端部在寬度方向上鄰接之附近區域， 一面朝向下方曳引上述玻璃帶進行徐冷，形成板厚為〇5 mm之上述玻璃帶； 上述徐冷裝置係包括上述複數個傳送輥對及驅動部， 上述複數個傳送輥對之一個係設置於上述玻璃帶之溫度 達到玻璃轉移點以上且軟化點以下之第丨溫度區域内上 述複數個傳送輥對之另一個係設置於上述玻璃帶之溫度達 到玻璃徐冷點以下之第2溫度區域内，且藉由朝下方拉入 上述玻璃帶而傳送上述玻璃帶， 上述驅動部係基於以設置於上述第2溫度區域内之傳送 輥對之傳送輥之圓周速度快於設置於上述第丨溫度區域内 之傳送輥之圓周速度之方式決定之傳送輥之圓周速度使 上述傳送輥旋轉驅動。 [發明之效果] 163550.doc 201247565 上述玻璃板之製造方法及玻璃板製造裝置可有效地使張 力於傳送方向上作用於在徐冷爐内傳送之玻璃帶，且可抑 制與玻璃帶之由傳送輥對夾持之部分鄰接之鄰接區域内產 生波形之變形。 【實施方式】 以下，對本發明之玻璃板之製造方法及玻璃板製造裝置 進行詳細說明。 又’本說明書中之下述語句係以如下方式規定。 所謂玻璃帶之中央部係指玻璃帶之寬度方向之寬度中的 玻璃帶之寬度方向之中心。 所謂玻璃帶之中央區域係指玻璃帶之寬度方向之寬度中 與玻璃帶之寬度方向之中心相距之寬度之85%以内之範 圍。 所明玻璃帶之兩端部係指與玻璃帶之寬度方向之邊緣相 距200 mm以内之範圍。 所謂與玻璃帶之寬度方向<兩端部在寬度方向±鄰接之 附近區域係指包含於自上述兩端部之寬度方向内側之邊緣 起進入至與玻璃帶之寬度之20%以内之長度相應的宽度方 向内側之範圍為止的區域。 所謂與由傳送輥夾持之部分在玻璃帶之寬度方向内侧鄰 接之鄰接區域係指包含於自由傳送輥夾持之部分之寬度方 向之内側之邊緣起進入至與玻璃帶之寬度之6%以内之長 度相應的寬度方向内側之範圍為止的區域。 所謂玻璃帶之溫度係指如下所述於玻璃帶存在溫度分佈 163550.doc 201247565 之情形時，根據玻璃帶之周圍之環境溫度換算所得之值， 例如環境溫度加上定於-25〜-5°C之範圍内之溫度所得之溫 度。 (玻璃板之製造方法） 圖1係說明本實施形態之玻璃板之製造方法之流程之一 例之圖。玻璃板之製造方法係主要包括熔解步驟（步驟 S10) '澄清步驟（步驟S20)、攪拌步驟（步驟S30)、成形步 驟（步驟S40)、徐冷步驟（步驟S50)、裁板步驟（步驟S6〇)、 及形狀加工步驟（步驟S70) » 溶解步驟（步驟S10)係於未圖示之熔解爐中，將玻璃原 料利用來自其上方之間接加熱、及利用使電流流入玻璃中 的直接加熱而加熱至高溫，製作熔融玻璃。玻璃之熔解亦 可由除此以外之方法進行。 其次，進行澄清步驟（步驟S20)。澄清步驟係於熔融玻 璃蓄積於未圖示之液槽中之狀態下，例如與熔解步驟中之 加熱時相比使熔融玻璃之溫度上升，藉此，促進熔融玻璃 中之氣泡之消泡·》藉此’可降低最終所得之玻璃板中之氣 泡含有率，從而可使良率提昇。 澄清步驟亦可藉由其他方法進行，例如亦可於炫融玻璃 蓄積於液财之狀態下，㈣澄清㈣除㈣玻璃中之氣 泡作為也/月劑，並無特別限制，例如使用氧化錫、氧化 鐵等金屬氧化物。具體而言，該情形時之澄清步驟係藉由 於熔融玻璃t價數變動之金屬氧化物之氧化還原反應而進 行。於高溫時之熔融玻璃中，金屬氧化物藉由還原反應而 163550.doc 201247565 釋放氧，該氧變成氣體，使熔融玻璃中之氣泡成長而浮上 液面。藉此’熔融玻璃中之氣泡被消泡。或者，氧氣之氣 泡取入熔融玻璃中之其他氣泡中之氣體進行成長，從而浮 上熔融玻璃之液面》藉此，熔融玻璃中之氣泡被消泡。進 而’金屬氧化物係若熔融玻璃之溫度降低，則藉由氧化反 應而吸收熔融玻璃中殘餘之氧，使熔融玻璃中之氣泡減 少〇 其次，進行攪拌步驟（步驟S30) ^攪拌步驟係藉由攪拌 裝置而機械性攪拌熔融玻璃，以保持玻璃之化學及熱均一 性。藉此’可抑制條紋等玻璃之不均一性。 其次，進行成形步驟（步驟S40)。成形步驟係採用下拉 法。包括溢流下拉法或流孔下引法等之下拉法係例如專利 第3586142號公報或使用圖2及圖3所示之裝置的公知之方 法《例如溢流下拉法之成型步驟係藉由使熔融玻璃自成形 體溢流且於成形體之側壁流下，進而於成形體之下端將該 熔融玻璃黏合，形成玻璃帶之步驟。對於下拉法_之成形 步驟將於下文敍述。藉此，使具有特定厚度、寬度之板狀 之玻璃帶成形。作為成形方法’下拉法中最佳為溢流下拉 法’但亦可利用流孔下引法。 成形步驟係將形成之玻璃帶之耳部（寬度方向之兩端部） 冷部。更詳細而言’可一面朝向兩端部施加張力一面將玻 璃帶之耳部（寬度方向之兩端部）冷卻，直至玻璃帶之耳部 (寬度方向之兩端部）之黏度達到l〇gTi=9以上為止。此時， 玻璃帶之耳部（寬度方向之兩端部）之冷卻速度係快於玻璃 163550.doc •12- 201247565 帶之寬度方向之中央部之冷卻速度。再者，玻璃帶之溫度 控制例如可藉由控制冷卻輥、設置於玻璃帶之寬度方向之 兩端部之附近的風冷管等冷卻機構、或設置於玻璃帶之寬 度方向及傳送方向上之複數個加熱器等加熱機構而實現。 其次，進行徐冷步驟（步驟S50)。徐冷步驟係以降低或 避免產生應變之方式，控制冷卻速度，於圆2及圖3所示之 徐冷爐十將成形為板狀之玻璃帶冷卻至徐冷點以下。具體 而言，與玻璃帶之寬度方向之兩端部在寬度方向上鄰接之 附近區域一面由沿玻璃帶之傳送方向至少設置有2個之複 數個傳送輥對夾持’一面例如以下述之傳送輥之圓周速度 朝向下方吳引’並進行徐冷。藉由使玻璃帶—面以如上所 述之傳送速度料-面進行料，㈣成❹板厚為〇5 _以下之玻璃帶。於玻璃帶之溫度達到應變點之附近 時可藉由以破璃帶之寬度方向之兩端部與寬度方向之中 央部之溫度梯度消失之方式進行控制，而降低玻璃帶中產 生之應變。 更詳細而言’於徐冷步驟中’亦可使玻璃帶之溫度分佈 於寬度方向上成為山峰之分佈，其後，以山峰之分佈伴隨 :入傳送方向下游側而逐漸減小之方式，進行配置於玻璃 …、…控制。此時’於玻璃帶之應變點附 恤：區域内，可以山峰之分佈成為平 佈、即寬度方向之溫度分佈成 之刀 之加熱器等之控制。換言之= 式行未圖示201247565 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a method for producing a glass sheet and a glass sheet manufacturing apparatus. [Prior Art] The manufacturing method of the glass plate by the down-draw method is first, in the forming step, the molten glass overflows from the molded body to form a glass ribbon. Then, in the subsequent cold step towel, the glass ribbon __ surface is pulled by the Wei-pair-face-down, thereby stretching to the desired thickness, and avoiding internal strain, and The glass ribbon is cooled by avoiding the way the glass ribbon is warped. Thereafter, the glass ribbon is cut to a specific size, and (4) the central paper or the like is carried by each other, or further conveyed, and processed in a subsequent step (for example, chemical processing of shape processing and ion exchange). As a manufacturing method of the glass plate using the down-draw method, it is known that the circumferential speed of the pair of cooling rolls disposed directly under the molded body is smaller than that of the pair of the conveying rolls, and the glass is pulled downward downward. The belt conveys the circumferential speed of the pair and reduces the warpage of the glass sheet (Patent Document 丨). Further, it is known that a plurality of conveying roller pairs disposed under the molded body reduce the warp of the glass sheet by making the circumferential speed of the pair of conveying rollers disposed below faster than the circumferential speed of the pair of conveying rollers disposed above. Song (Patent Document 2). [Prior Art] [Patent Document] Patent Document 1: Japanese Patent Laid-Open Publication No. Hei. No. 291826. Patent Document 2: Japanese Patent Laid-Open Publication No. Hei No. Hei. No. 291827 No. 163550.doc 201247565 [Summary of the Invention] The problem is that both ends of the width direction of the glass ribbon in the cold step are referred to as "ears" or "ears" and are not used as glass substrate products, but are cut and removed from the broken glass ribbon. Generally, the ear portion is 2 to 5 times thicker than a region which can be used as a product (glass substrate) (hereinafter also referred to as a central portion in the width direction). Here, the thickness of the ear portion is hardly changed even if the thickness of the product is changed. Therefore, the difference between the thickness of the ear portion and the thickness of the central portion serving as the width direction of the product increases as the thickness of the article to be manufactured becomes thinner. Further, the plurality of transporting members hold the portion in the width direction with respect to the ear portion, and convey the glass ribbon. In the manufacturing method of Patent Document 1, the ear portion is cooled so as to be faster than the central portion in the width direction of the glass ribbon, and the tensile force acts on the width direction of the glass ribbon. Here, the shaft of the conveying roller is maintained at a lower temperature than the glass ribbon to prevent deformation at a high temperature, and the conveying is also lower than the temperature of the glass in contact with the body. Therefore, the glass of the region sandwiched by the pair of conveying rollers cools earlier than the peripheral region thereof. Further, when the thickness of the glass ribbon is thin, the region sandwiched by the ear or the pair of transport rollers is the inner side in the width direction and the adjacent region near the transport roller (the region indicated by the symbol S in Fig. 7). The reason why the cooling is earlier β is that since the adjacent region is extremely small in thickness compared with the ear portion, the stored heat is smaller than that of the ear portion, and since it is closer to the conveying roller or the quenching furnace than the central portion in the width direction of the glass ribbon The outer wall is easy to cool. Further, Fig. 7 shows a conventional glass plate manufacturing apparatus, and the other reference numerals in the drawings are the same as those of the elements 163550.doc 201247565 in the following embodiment. The manufacturing method of Patent Document 2 is such that the circumferential speed of the conveying roller disposed below is faster than that of the conveying roller disposed above, and the circumferential speed of the conveying roller is sequentially increased by the upstream side to the downstream side from the conveying direction. The viewpoint of always applying tension to the glass ribbon in the conveying direction. However, as shown in Patent Document 2, even if the circumferential speed of the downstream conveying roller is simply higher than the upstream, it is not only ineffective, but also in the case of manufacturing a thin glass plate having a plate thickness of 0 mm or less. For example, if the circumferential speed difference described in Example _5 is given, the glass ribbon is broken, which is extremely dangerous. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a glass sheet which is capable of suppressing the formation of a glass sheet in a contiguous region adjacent to a portion of a glass material which is adjacent to a plurality of lightly held portions during the manufacture of a glass sheet. Method and glass plate manufacturing apparatus. [Technical means for solving the problem] One aspect of the present invention is a method for producing a glass plate. The manufacturing method comprises: a melting step of melting a glass raw material to produce molten glass; a forming step of extracting a downdraw method, (4) forming a glass ribbon to form a glass ribbon; and a step of cooling, one side of which is utilized along the glass ribbon A plurality of transports _ are provided in the transport direction, and the glass ribbons are pulled downward toward the lower side in the width direction at both end portions in the width direction of the glass ribbon. 163550.doc 201247565 The forming step is performed by forming a glass ribbon which is formed by overflowing the molten glass flowing from the molded body and flowing down the side wall of the molded body to the lower end of the molded body, and is faster than the width of the glass ribbon. In the center portion, the both end portions in the width direction of the glass ribbon are cooled. The step of quenching is to prevent plastic deformation in the glass ribbon, and to apply the tension to the glass ribbon in the conveying direction in a temperature region where the temperature of the glass ribbon reaches a temperature above the glass transition point and below the glass softening point. . In this case, it is preferable that the cold cooling step is such that the circumferential speed of the conveying roller of the pair of conveying rollers that is disposed at the downstream side of the conveying roller pair at a position where the temperature of the glass ribbon reaches the glass freezing point is faster than the conveying. The center of the roller is disposed at a peripheral speed of the conveying roller of the pair of conveying rollers in the temperature region above the glass transition point and below the glass transition point. The glass plate can be, for example, a plate thickness of 0.5 mm or less. Moreover, it is preferable that the cold-cooling step avoids a manner in which plastic deformation occurs in an adjacent region of a portion sandwiched by the transport roller on the inner side in the width direction of the glass ribbon, and the temperature of the adjacent region reaches a glass transition point. In the above temperature range below the softening point of the glass, the tension in the conveying direction acts on the glass ribbon. Further, preferably, the cold-cooling step is such that the temperature of the adjacent portion of the pair of transport rollers that is adjacent to the inner side of the glass ribbon in the width direction of the glass ribbon is lower than the temperature of the glass ribbon. The circumferential speed of the conveying roller of the pair of conveying rollers disposed at the downstream side is faster than the temperature of the pair of conveying rollers disposed at the adjacent region reaching the glass transition point of 163550.doc 201247565 and below the softening point of the glass The peripheral speed of the transfer roller of the transfer roller pair in the area. Further, preferably, the method for producing a glass sheet includes the steps of: bonding the molten glass to a lower end of the molded body to form a glass ribbon, and then cooling the both end portions until the width direction of the glass ribbon is the same When the viscosity of both ends is η, it is set to l〇gT1=9 or more, and the cooling rate of the both ends is faster than the cooling rate of the center part of the width direction of the said glass ribbon. Preferably, the above-mentioned cold cooling step applies a tension in the central portion in the width direction of the glass ribbon to the conveying direction of the glass ribbon, and at least the temperature in the central portion in the width direction of the glass ribbon is added from the glass cold point. The temperature of the upper BO C is reduced by 2 〇〇 of the glass strain point. In the temperature range of the temperature of the crucible, temperature control is performed so that the cooling rate of the central portion in the width direction of the glass ribbon is faster than the cooling rate at both end portions in the width direction. Further, it is preferable to control the temperature of the glass ribbon as follows. In a region where the temperature in the central portion in the width direction of the glass ribbon is equal to or higher than the softening point of the glass, the both end portions in the width direction of the glass ribbon are lower than the temperature at the central portion of the inflammation portion of the both end portions, and the center The temperature of the part is uniform, and the temperature of the glass ribbon is controlled. In the central portion of the width direction of the glass ribbon, the tension in the direction in which the glass ribbon is conveyed acts in a region where the temperature at the central portion of the glass ribbon is less than the glass softening point and is above the glass strain point. The temperature of the glass ribbon is such that the temperature in the width direction of the glass ribbon: distribution I63550.doc 201247565 is lowered from the central portion toward the both end portions. The temperature of the glass ribbon is controlled in a temperature range in which the temperature of the central portion of the glass ribbon reaches the glass strain point so that the temperature gradient between the both end portions and the central portion in the width direction of the glass ribbon disappears. Furthermore, it is preferable that the tension in the glass ribbon conveyance direction acts on the central portion in the width direction of the glass ribbon, and the temperature in the central portion of the glass ribbon is not in the vicinity of the glass strain point. The temperature of the glass ribbon is such that the temperature of the glass ribbon is lowered from the both end portions of the glass ribbon toward the central portion. Preferably, the above-mentioned cold cooling step is such that the temperature of the pair of conveying rollers is higher than the circumferential speed of the conveying roller of the pair of conveying rollers disposed on the downstream side at a position where the temperature of the glass ribbon reaches a point where the glass is cold, compared to the pair of glass rollers. The circumferential speed of the conveying roller of the conveying roller pair in the temperature region where the temperature of the glass ribbon above the glass transition point and below the glass softening point is fast is 〇3~2〇/. . The length of the glass plate in the width direction is, for example, 1000 mm or more. Preferably, the above-mentioned cold cooling step is performed by dragging the glass ribbon downward at a conveying speed of 2 〇 〇 m / hour or more to perform cold cooling. A method for producing a glass sheet according to another aspect of the present invention includes: a melting step of melting a glass raw material to produce a molten glass; a forming step of forming a molten glass by a down-draw method to form a glass ribbon; and a cold cooling step a plurality of transport roller pairs disposed along the transport direction of the glass ribbon are slid into the vicinity of the widthwise direction of both end portions of the glass ribbon in the width direction, and the glass 163550.doc is pulled downward. 8 - 201247565 The ribbon is cold-cooled to form a glass ribbon with a thickness of 0 5 mm or less. The quenching step is such that the peripheral speed of the conveying roller of the pair of conveying rollers disposed on the downstream side at a position where the temperature of the glass ribbon reaches a freezing point is faster than the temperature of the glass ribbon is higher than the glass transition point. The circumferential speed of the above-mentioned conveying roller of the above-mentioned conveying roller pair in the temperature region below the softening point. Further, another aspect of the present invention is a glass sheet manufacturing apparatus. The apparatus includes: a forming device that forms a glass ribbon from a molten glass by a down-draw method; and a cold cooling device that uses a plurality of conveying roller pairs on one side and sandwiches both ends in the width direction of the glass ribbon in the width direction In the vicinity of the adjacent region, the glass ribbon is pulled downward to be cold-cooled to form the glass ribbon having a thickness of 〇5 mm. The cold cooling device includes the plurality of conveying roller pairs and the driving portion, and the plurality of conveying rollers One of the plurality of transport roller pairs disposed in the temperature range of the glass ribbon above the glass transition point and below the softening point is disposed at a temperature below the glass undercooling point In the second temperature region, the glass ribbon is conveyed by pulling the glass ribbon downward, and the driving portion is disposed on the circumferential speed of the transport roller based on the pair of transport rollers disposed in the second temperature region. The circumferential speed of the conveying roller, which is determined by the manner of the peripheral speed of the conveying roller in the second temperature region, causes the conveying roller to be rotationally driven. [Effects of the Invention] 163550.doc 201247565 The method for producing a glass sheet and the glass sheet manufacturing apparatus can effectively apply the tension to the glass ribbon conveyed in the quenching furnace in the conveying direction, and can suppress the pair of conveying rollers with the glass ribbon. A deformation of the waveform is generated in the adjacent region adjacent to the nip portion. [Embodiment] Hereinafter, a method for producing a glass sheet of the present invention and a glass sheet manufacturing apparatus will be described in detail. Further, the following statements in the present specification are defined as follows. The central portion of the glass ribbon refers to the center of the width direction of the glass ribbon in the width direction of the glass ribbon. The central region of the glass ribbon refers to a range in which the width of the glass ribbon in the width direction is within 85% of the width of the center of the width direction of the glass ribbon. The ends of the glass ribbon are defined as being within 200 mm of the edge of the glass ribbon in the width direction. The width direction of the glass ribbon <the vicinity of the both end portions in the width direction ± is included in the width from the inner side of the both end portions to the length within 20% of the width of the glass ribbon. The area up to the inner side of the width direction. The abutting region adjacent to the inner side in the width direction of the glass ribbon by the portion sandwiched by the conveying roller means that the edge included in the inner side in the width direction of the portion where the free conveying roller is sandwiched enters within 6% of the width of the glass ribbon. A region from the range of the inner side in the width direction corresponding to the length. The temperature of the glass ribbon refers to the value obtained by converting the ambient temperature around the glass ribbon when the temperature of the glass ribbon is 163550.doc 201247565, for example, the ambient temperature is set at -25 to -5 °. The temperature obtained by the temperature in the range of C. (Manufacturing Method of Glass Plate) Fig. 1 is a view showing an example of a flow of a method for producing a glass plate of the present embodiment. The manufacturing method of the glass plate mainly includes a melting step (step S10) 'clarification step (step S20), stirring step (step S30), forming step (step S40), cold cooling step (step S50), and cutting step (step S6) 〇) and shape processing step (step S70) » The dissolution step (step S10) is carried out in a melting furnace (not shown), and the glass raw material is heated by the upper side and heated by direct current flowing into the glass. Heat to a high temperature to produce molten glass. The melting of the glass can also be carried out by other methods. Next, a clarification step is performed (step S20). In the clarification step, the molten glass is stored in a liquid tank (not shown), and the temperature of the molten glass is raised, for example, compared with the heating in the melting step, thereby promoting the defoaming of the bubbles in the molten glass. By this, the bubble content in the finally obtained glass plate can be lowered, so that the yield can be improved. The clarification step can also be carried out by other methods, for example, in the state in which the glazed glass is accumulated in the liquid state, and (4) clarifying (4) the bubbles in the (four) glass are not particularly limited, for example, using tin oxide, A metal oxide such as iron oxide. Specifically, the clarification step in this case is carried out by a redox reaction of a metal oxide having a valence of molten glass t. In the molten glass at a high temperature, the metal oxide releases oxygen by a reduction reaction 163550.doc 201247565, and the oxygen becomes a gas, so that the bubbles in the molten glass grow and float to the surface. Thereby, the bubbles in the molten glass are defoamed. Alternatively, the bubble of oxygen is taken into the gas in the other bubbles in the molten glass to grow, thereby floating the liquid surface of the molten glass, whereby the bubbles in the molten glass are defoamed. Further, when the temperature of the molten glass is lowered by the metal oxide, the residual oxygen in the molten glass is absorbed by the oxidation reaction to reduce the bubbles in the molten glass, and the stirring step is performed (step S30). The molten glass is mechanically stirred by a stirring device to maintain the chemical and thermal uniformity of the glass. Thereby, the unevenness of the glass such as the streaks can be suppressed. Next, a forming step (step S40) is performed. The forming step is a pull-down method. A method of laminating, such as an overflow down-draw method or a flow-down method, such as Patent No. 3586142, or a known method using the apparatus shown in FIGS. 2 and 3, for example, a molding step of an overflow down-draw method is used. The molten glass overflows from the molded body and flows down the side wall of the molded body, and the molten glass is bonded to the lower end of the molded body to form a glass ribbon. The forming step for the pull-down method will be described below. Thereby, a plate-shaped glass ribbon having a specific thickness and width is formed. As the forming method, the optimum method of the down-draw method is the overflow down-draw method, but the downhole method can also be used. The forming step is a cold portion of the ear portion (both ends in the width direction) of the formed glass ribbon. More specifically, the ear portion (both ends in the width direction) of the glass ribbon can be cooled while applying tension to both end portions until the viscosity of the ear portion (both ends in the width direction) of the glass ribbon reaches l〇gTi. =9 or more. At this time, the cooling speed of the ear portion (both ends in the width direction) of the glass ribbon is faster than the cooling speed of the center portion of the glass in the width direction of the glass 163550.doc •12-201247565. Further, the temperature control of the glass ribbon can be performed, for example, by controlling a cooling roller, a cooling mechanism such as an air-cooling tube provided in the vicinity of both end portions in the width direction of the glass ribbon, or in the width direction and the conveying direction of the glass ribbon. It is realized by a plurality of heating mechanisms such as heaters. Next, a cold step is performed (step S50). The Xu cold step controls the cooling rate in a manner that reduces or avoids strain, and the glass ribbon formed into a plate shape in the circle 2 and the quenching furnace shown in Fig. 3 is cooled to below the freezing point. Specifically, one side of the vicinity of the width direction of the glass ribbon in the vicinity of the width direction is sandwiched by at least two transport roller pairs provided in the transport direction of the glass ribbon, for example, by the following The circumferential speed of the roller is directed downwards and is cold. The glass ribbon-side is fed by the material-surface at the above-mentioned conveying speed, and (4) is formed into a glass ribbon having a thickness of 〇5 _ or less. When the temperature of the glass ribbon reaches the vicinity of the strain point, the temperature gradient in the center portion in the width direction and the width direction of the glass ribbon can be controlled to reduce the strain generated in the glass ribbon. More specifically, in the 'cooling step', the temperature of the glass ribbon may be distributed in the width direction to become a mountain peak distribution, and thereafter, the distribution of the mountain peaks may be gradually reduced in the downstream direction of the transport direction. Configured in glass...,... control. At this time, in the strain point of the glass ribbon: in the region, the distribution of the peaks can be controlled by a flat, that is, a heater having a temperature distribution in the width direction. In other words = the line is not shown

Ji i5〇°r ^ 、 亦可於自破璃帶之徐冷點加 上150C之》皿度起直至應變點為止之溫度區域内，以使玻 163550.doc 201247565 璃帶之寬度方向上之中央部之冷卻速度快於玻璃帶寬度方 向之兩端部之冷卻速度’且玻璃帶之寬度方向上之中央部 之溫度自高於兩端部之狀態起於應變點附近之溫度區域内 成為相同之方式，使溫度分佈成為固定。 進而，亦可於玻璃帶之溫度自徐冷點成為（應變點_5〇。〇 之概度區域内，與其他溫度區域相比，將玻璃帶緩慢地徐 冷°藉此’可降低玻璃帶之熱收縮率。 進而，亦可於玻璃帶之溫度自應變點達到應變點減去 200 C之溫度的溫度區域内，以使玻璃帶之溫度分佈沿寬 度方向成為山谷、且該山谷之深度伴隨進入至傳送方向下 游側而變大之方式’即以中央部之溫度與兩端部相比逐漸 降低之方式，進行未圖示之加熱器等之控制。可藉由以此 方式’於溫度分佈中逐漸使山谷變深，而始終對玻璃邊緣 實施壓縮，因此，可抑制玻璃帶破碎。 此處，傳送輥之圓周速度就使玻璃板之生產性提昇之 點而s ’較佳為較快。具體而言，傳送報之圓周速声較 為快於150 m/小時，且較佳為細⑻小時以上例如亦 為220 m/小時以上、240瓜/小時以上' 250 m/小時以上 27〇m/小時以上、3GGm/小時以上、34〇m/小時以上 又’玻璃帶之板厚越薄’則由傳送輥對夾持之部分之⑴ 之儲備熱越小，故而，若玻璃帶之板厚狀5 _以下，, 適於本發明，例如若权4 _以下，収適於本發明，^ 為0.3 nun以下，則更適於本發明，若為〇25議以下，^ 更適於本發明。換言之，甚故 右為0.01〜0.5 mm，則適於本专 163550.doc 201247565 明，例如若為0.0丨一 4 mm，則更適於本發明而言，若為 0·01〜〇·3 mm ’則更適於本發明，若為〇 〇1〜〇 25 mm，則 更適於本發明。再者，傳送輥之圓周速度並不限定於上述 者，例如於熔融玻璃1天流入至下述成形體之量未達ό t之 情形時，或即便於熔融玻璃1天流入至成形體之量為ό t以 上之情形時因製造之玻璃之寬度方向之大小，而亦存在達 到200 m/小時以下之情形。熔融玻璃1天流入至成形體之 量可為2 t以上’亦可為6 t以上、1〇 t以上、16 t以上、2〇 t 以上。再者’就使玻璃板之生產性提昇之觀點而言，熔融 玻璃1天流入至成形體之量（MG (Megagram，百萬克）量）較 佳為越多越好。 徐冷步驟係使相較玻璃帶之溫度達到徐冷點之位置設置 於下游側的傳送輥對之傳送輥之圓周速度，快於設置於玻 璃帶之溫度達到玻璃轉移點以上且為軟化點以下之溫度區 域内的傳送輥對之傳送輥之圓周速度快，且例如快 〇.〇3〜20/〇 〇 於徐冷步驟後’進行裁板步驟（步驟S6〇)o具體而言， 將連續生成之玻璃帶切斷為每一個固定長度，裁板得到玻 璃板。 其後’進行形狀加工步驟（步驟S70) ^形狀加工步驟中 不僅切取特定之玻璃板之尺寸或形狀，而且進行玻璃端面 之研削、研磨。形狀加工既可利用使用有切割機或雷射之 物理性方法’亦可利用蝕刻等化學性方法。 此外，玻璃板之製造方法包括清洗步驟及檢查步驟，但 163550.doc •15- 201247565 省略該等步驟之說明。再者，可分別省略澄清步驟及攪拌 步驟。 (玻璃板製造裝置） 圖2及圖3係作為本發明之第1實施形態的玻璃板製造裝 置1之概略構成圖。本實施形態之玻璃板製造裝置1及使用 有玻璃板製造裝置1之玻璃板之製造方法可較佳地應用於 液晶顯示裝置或有機EL(Electro Luminescence，電致發光） 顯示裝置等平板顯示器之玻璃基板或便攜式終端設備之顯 示面之防護玻璃之製造。其原因在於液晶顯示裝置或有機 EL顯示裝置等近年來要求高精度、高圖像質量，故對於用 於其之玻璃基板要求波形變形為0.2 mm以下。又，其原因 在於，由於防護玻璃應用於裝置之顯示面等，故對於用於 其之玻璃基板要求極高之平滑性。 玻璃板製造裝置1係利用下拉法由熔融玻璃A製造玻璃板 C。玻璃板製造裝置1係包括由配置於上下方向之3個部位 的隔熱板21、22、23隔離而成之爐室11、第1徐冷爐12、 第2徐冷爐13、及未圖示之裁板室。隔熱板21〜23係包含陶 瓷纖維等隔熱材料之板狀構件《於隔熱板21-23中分別形 成有傳送孔16’以使下述玻璃帶b朝向下方通過。隔熱板 21〜23分別於圖2中，為易於理解而除與下述爐壁15接觸之 水平方向之2個部位以外，均省略圖示，但對於玻璃帶B， 於紙面前面侧及背面側，一體地連接有水平方向之2個部 位彼此。再者’於圖2及圖3中表示有藉由隔熱板而於3個 部位進行隔離之例，但隔熱板之個數及設置位置並無特別 163550.doc -16- 201247565 限疋，隔熱板設置1個以上即可。再者，由於隔熱板之數 量越多，則可獨立地控制環境溫度之空間越多，徐冷條件 之調整變得越容易，故而，較佳為，於下述徐冷裝置3中 設置複數個隔熱板而隔離成複數個空間。換言之，徐冷爐 雖設置1個以上即可，但更佳為設置3個以上。 玻璃板製造裝置1係包括成形裝置2、徐冷裝置3、及裁 板裝置4。 成形裝置2係自熔融玻璃Α利用下拉法使玻璃帶Β成形之 裝置。成开> 裝置2係包括以由耐火磚或塊狀之電鑄耐火物 等組裝而成之爐壁15包圍之爐室Ue於爐室u内設置有成 形體10、及輥對17。成形體1〇係包括朝上方開放之槽 l〇a(參照圖3) ’且溶融玻璃a於槽1〇a内流動。成形體叫系 包括例如煉碑。輥對17係於與在成形體1〇之下端融合之溶 融玻璃A之寬度方向兩側之端部（寬度方向之兩端部）對應 之位置各认置1對，且將熔融玻璃A夾持著朝向下方傳送。 再者®2中紙面内之左右方向及圖3中之垂直於紙面之方 向係玻璃帶B之寬度方向。圖2及圖3中紙面内之上下方向 係玻璃帶B之傳送方向。再者，於圖2及圖3中，成形體 與報對17係未隔離地設置，但為使徐冷條件之調整（ 皿度調整）變得容易’亦可於該等之間設置隔熱板進行隔 離。又’輥對17亦可於傳送方向上設置2對以上。 (徐冷裝置） 凃、裝置3係將破璃帶B_面由複數個傳送輥對β、μ 持著朝向下方曳引 灵W ’ 一面進行徐冷。徐冷裝置3係包括鄰 163550.doc 201247565 接地設置於爐室11之下方之第1徐冷爐i 2及第2徐冷爐13。 第1徐冷爐12及第2徐冷爐13係由亦構成爐室π之上述爐壁 15包圍而成。徐冷裝置3係於第1徐冷爐12及第2徐冷爐13 内設置有沿玻璃帶Β之傳送方向配置且由下述電腦自動控 制之加熱機構。加熱機構並無特別限制，例如可使用電加 熱器。第1徐冷爐12及第2徐冷爐13内之玻璃帶Β之周圍之 環境溫度係藉由利用加熱機構進行加熱，而以避免玻璃帶 Β中產生翹曲或應變之方式，進行溫度控制，以使玻璃帶 Β之寬度方向及傳送方向之溫度分佈具有如下所述之分 佈。於第1徐冷爐12及第2徐冷爐13内，藉由利用加熱機構 進行加熱，而自玻璃帶Β之傳送方向上游側依序產生玻璃 帶Β分別成為軟化點SP之點、成為玻璃轉移點Tg之點、成 為徐冷點AP之點、成為應變點stP之點。所謂軟化點sp係 表示玻璃之黏度為1〇7·6 dPa.s之溫度。又，所謂徐冷點Ap 係表示玻璃之黏度為1〇13 dPa.s之溫度《所謂應變點StP係 表示玻璃之黏度為1014·5 dPa.s之溫度。再者，於圖2及圖3 中’玻璃帶B之溫度達到該等點Sp、Tg、AP、StP之溫度 的玻璃帶B之位置係由虛線之各指線沿水平方向延長時與 玻璃帶B相交之點表示》再者，徐冷爐12、π内之傳送輥 對18、19之設置數並無制約，至少設置1個以上即可。 傳送輥對18、19係於第1徐冷爐12内設置有沿玻璃帶β之 傳送方向配置之3個傳送輥對18。於第2徐冷爐13内設置有 沿玻璃帶B之傳送方向配置之4個傳送輥對19。於本實施形 態中’最上游侧之2個傳送輥對1 8配置於玻璃轉移點Tg以 163550.doc •18· 201247565 上且軟化點SP以下之玻璃帶B之溫度區域D(第！溫度區域） 内。自上游側起第3及第4個傳送輥對丨8係配置於高於徐冷 點AP且未達玻璃轉移點Tg之玻璃帶b之溫度區域内，自上 游側起第5〜第7個傳送輥對19係配置於達到徐冷點a p以下 之玻璃帶B之溫度區域E(第2溫度區域）内。再者，軟化點 SP亦可位於爐室11内。傳送輥對18、19位於溫度區域d内 抑或是位於溫度區域E、或者高於徐冷點AP且未達玻璃轉 移點Tg之玻璃帶B之溫度區域等資訊係如下所述基於藉由 溫度感測器34之計測所得之玻璃帶b之周圍之環境溫度， 推疋SP、Tg、AP、StP之位置，並由該推定之sp、Tg、 AP、StP之位置而決定。 進而，徐冷裝置3係包括檢測控制部3〇及驅動部32(參照 圖4) 〇 傳送輥對18、19係藉由朝向下方拉入玻璃帶b而傳送玻 璃帶B ^各傳送輥對18係包括以夾持與玻璃帶b之寬度方 向之兩端部鄰接之附近區域之方式配置於玻璃帶B之兩側 的4個傳送輥18a、及將相對玻璃帶b位於相同側之2個傳送 輥18a連結且配置於玻璃帶b之兩側之2根驅動用轴18b。各 傳送輥對19係包括以夾持與玻璃帶b之寬度方向之兩端部 鄰接之附近區域之方式配置於玻璃帶B之兩側的4個傳送輥 19a、及將相對玻璃帶b位於相同側之2個傳送輥19a連結且 配置於玻璃帶B之兩側之2根驅動用轴19b。再者，傳送報 對18、19並不限定於上述者。例如各輥對之傳送輕亦可為 相對玻璃帶B位於相同面側者彼此未由驅動用轴連結而與 163550.doc 201247565 輥對17之輕同樣地獨立配晋於谈植胜^ 馎配置於玻璃帶Β之寬度方向之兩端 部者。 /具體而。成形裝置2之爐室11、第丨徐冷爐12、及第2 徐冷爐13内之玻璃帶3之周圍之埽境溫度係以玻璃帶β具 有以下之溫度分佈之方式進行溫度控制。 即於在成形體之下端將熔融玻璃a黏合形成玻璃帶Β 後，對兩端部進行冷卻，直至將玻璃帶8之寬度方向之兩 端。卩（耳邛）之黏度設為η時達到丨〇βη=9以上、較佳為1〇卯=9 以上14.5以下為止，且以兩端部之冷卻速度快於玻璃帶β 之寬度方向之中央部之冷卻速度之方式進行溫度控制。 或者，在第1徐冷爐12及第2徐冷爐13内進行之徐冷步驟 亦可以使拉伸應力作用於玻璃帶B之傳送方向之方式，至 少於玻璃帶之寬度方向之中央部之溫度自徐冷點加上 15〇°C所得之溫度至自應變點減去2〇〇t：所得之溫度的溫度 區域内，以玻璃帶B之寬度方向之中央部之冷卻速度快於 玻璃帶B之寬度方向之兩端部（耳部）之冷卻速度之方式進 行溫度控制。藉此’徐冷步驟可於玻璃帶B之寬度方向之 中央部，始終於傳送方向上施加拉伸應力。 或者’於玻璃帶B之寬度方向之中央部之溫度為玻璃軟 化點以上之區域内，以玻璃帶B之寬度方向之兩端部（耳 部）低於中央部之溫度、且中央部之溫度成為均一之方式 控制玻璃帶B之溫度。進而’以傳送方向之拉伸應力作用 於玻璃帶B之寬度方向中央部之方式，於玻璃帶β之寬度 方向之中央部之溫度未達軟化點且為應變點以上之區域 163550.doc -20· 201247565 内，控制玻璃帶B之溫度，以使玻璃帶8之寬度方向之溫 刀佈自_央。(？朝向兩端部變低。進而，於玻璃帶B之寬 度方向之中央部之溫度達到應變點之溫度區域内，控制玻 璃帶B之溫度，以使玻璃帶之寬度方向之兩端部（耳部）與 中央部之溫度梯度消失。藉此，於玻璃帶B之寬度方向之 中央部受到傳送方向之拉伸應力。 進而，亦可以使傳送方向之張力作用於玻璃帶B之寬度 方向中央部之方式，於玻璃帶B之寬度方向之中央部之溫 度未達應變點附近之區域内，控制玻璃帶B之溫度，以使 玻璃帶B之溫度自玻璃帶3之寬度方向之兩端部（耳部）朝向 玻璃帶B之寬度方向之中央部變低。藉此’於玻璃帶6之 寬度方向之中央部的未達應變點附近之區域内，可在玻璃 帶B之寬度方向之中央部，始終於傳送方向上施加拉伸應 力。 進而’徐冷步驟亦可包括第1冷卻步驟，其以第1平均冷 卻速度進行冷卻，直至玻璃帶B之寬度方向之中央部之溫 度達到徐冷點為止；第2冷卻步驟，其以第2平均冷卻速度 進行冷卻，直至玻璃帶B之寬度方向之中央部之溫度自徐 冷點達到應變點-50°C為止；及第3冷卻步驟，其以第3平 均冷卻速度進行冷卻，直至玻璃帶之中央部之溫度自應變 點-50 C達到應變點-200°C為止。於該情形時，第1平均a 卻速度為5.0 C /秒以上，第1平均冷卻速度快於第3平均冷 卻速度’且第3平均冷卻速度快於第2平均冷卻速度。即， 平均冷卻速度係由高到低依序為第1平均冷卻速度、第3平 163550.doc -21 - 201247565 均冷卻速度、第2平均冷卻速度。玻璃帶b之傳送方向之冷 卻速度對製造之玻璃板之熱收縮造成影響。然而，可藉由 以上述方式設定冷卻速度’而一面提昇玻璃板之製造量， 一面獲得具有較佳之熱收縮率之玻璃板。 如上所述，於進行成形步驟、徐冷步驟之爐室u、第i 徐冷爐12、及第2徐冷爐13内’以玻璃帶b具有上述溫度之 方式，利用加熱機構控制玻璃帶B之周圍之環境溫度。 檢測控制部3 0係如圖4所示包括對應於傳送輥(對丨8、i 9 而配置之溫度感測器3 4、及作為圓周速度決定部3 8發揮功 能之未圖示之電腦。圖4係說明控制傳送輥對18、19之旋 轉驅動的控制系統之構成之方塊圖。各溫度感測器34係連 接於圓周速度決定部3 8。又’圓周速度決定部3 8係以經由 驅動部32驅動傳送輥對18、19之方式進行連接。檢測控制 部30之詳細内容於下文敍述。 驅動部32係基於記憶於下述記憶部36中之傳送親丨8a、 19a之圓周速度’使傳送輥18&、19a進行旋轉驅動。驅動 部32係包括對應於各傳送輥對丨8、丨9而設置之未圖示之馬 達。再者，馬達亦可不對應於各傳送輥對18、19設置，且 其數量例如亦可少於各傳送輥對丨8、丨9之數量。於該情形 時’可使用具有可於各傳送輥18a、19a間變更速度比之齒 輪者’以利用1台馬達驅動複數個傳送輥i8a、19a。於該 情形時’來自馬達之驅動力係例如經由萬向接頭等傳遞至 傳送輥18a、19a。 (檢測控制部） 163550.doc •22· 201247565 此處，對檢測控制部30進一步詳細地進行說明。 溫度感測器34係分別檢測第1徐冷爐12及第2徐冷爐丨3内 之配置位置之環境溫度。 圓周速度決定部38係基於製造之玻璃板之厚度等，決定 複數個傳送輥18a、19a之圓周速度。而且，傳送輥i8a、 19a之圓周速度係以如下方式決定，即，與設置於溫度區 域D内之所有傳送親18a相比，設置於溫度區域E内之所有 傳送輥19a較快’較佳為，相較玻璃帶b之溫度達到應變點 StP之位置設置於下游之傳送報19a較快。即’徐冷步驟係 以避免玻璃帶B產生波形之塑性變形之方式，於玻璃帶B 之溫度達到玻璃轉移點以上且軟化點以下之溫度區域内， 控制複數個傳送輥18a、19a，以使張力沿傳送方向作用於 玻璃帶B。 具體而言，圓周速度決定部38首先參照記憶於下述記憶 部36中之玻璃帶B之軟化點SP、玻璃轉移點Tg、徐冷點 AP、應變點StP，基於藉由溫度感測器34檢測之環境溫 度，推定徐冷爐12、13内之該等點SP、Tg、AP、StP之位 置。其次，圓周速度決定部38使設置於溫度區域E内之3個 傳送報19a之圓周速度快於設置於溫度區域〇内之2個傳送 輥18a之圓周速度。若由比表示該圓周速度之差異，則就 抑制玻璃帶B之破碎之觀點而言，較佳為，將較快之圓周 速度相對較慢之圓周速度之比之上限例如設為1〇2，就充 分獲得防止塑性變形之效果之觀點而言，較佳為，將上述 比之下限设為1_〇〇〇3。即，溫度區域e之3個傳送輥〗9a之 163550.doc -23· 201247565 圓周速度比溫度區域D之2個傳送輥18a之圓周速度較佳為 快0.03〜2%，更佳為快〇 〇5〜1.7%，進而較佳為快 0.1〜1.5%，尤佳為快0_2〜1.0%，較佳為快〇 3〜〇 8%。 此時，咼於徐冷點AP且未達玻璃轉移點Tg之傳送輥 18a、19a之圓周速度、及傳送輥18a進而位於溫度區域 上游側外側時該傳送輥18a之圓周速度可與溫度區域D之傳 送報18a之圓周速度相同或不同，尤佳為不同。於不同之 情形時’較佳為’以相較溫度區域D為上游側之傳送輥 18a、溫度區域D之傳送輥18a、高於徐冷點Ap且未達玻璃 轉移點Tg之傳送輥19a之順序，傳送輥越位於下游側越 快。 於溫度區域D中’最上游側之傳送輥18a之圓周速度、與 自上游側起第2個傳送輥1 8a之圓周速度可相同或不同，尤 佳為不同。於不同之情形時，較佳為自上游側起第2個傳 送報18a之圓周速度快於最上游侧之傳送輥18a之圓周速 度°又，於溫度區域E内’自下游側起之3個傳送親i9a之 圓周速度可全部相同、一部分相同或全部不同，尤佳為全 不同。於全部不同之情形時’較佳為，最下游側之傳送 親19a之圓周速度最快，自下游側起第3個傳送輥i9a之圓 周速度最慢。 又’較佳為’以避免與由傳送輥18a、19a夾持之部分在 玻璃帶B之寬度方向内側鄰接之鄰接區域中產生波形之塑 性變形之方式’於鄰接區域之溫度達到玻璃轉移點Tg以上 且軟化點SP以下之溫度區域内，使傳送方向之拉伸應力作 163550.doc -24 201247565 用於玻璃帶B。 就使拉伸應力作用之方面而言，較佳為，使傳送報對 18、19中之相較與玻璃帶之由傳送輥夾持之部分在玻璃帶 之寬度方向内側鄰接之鄰接區域之溫度達到玻璃徐冷點AP 之位置設置於下游側的傳送輥對之傳送輥之圆周速度快於 傳送輥對18、19中之設置於鄰接區域之溫度達到玻璃轉移 點Tg以上且軟化點SP以下之溫度區域内的傳送輥對1 8之傳 送輥18a之圓周速度快。 如上所述，以設置於溫度區域E内之傳送輥19a快於設置 於溫度區域D内之傳送輥l8a之方式，決定傳送報i8a、i9a 之圓周速度’故可防止可藉由以此方式控制旋轉驅動而有 效地使張力作用於玻璃帶B之傳送方向上的傳送輥18a、 19a之寬度方向内侧之區域中產生之波形之變形。 圓周速度決定部38係包括記憶部36。記憶部36係記憶以 上述方式決定之複數個傳送輥18a、19a之圓周速度。記憶 部36係將玻璃帶B之軟化點SP、玻璃轉移點Tg、徐冷點 AP、應變點StP記憶於每一玻璃之組成中。 又’未圖示之電腦係基於由溫度感測器3 4檢測之環境溫 度’以將徐冷爐12、13内之環境溫度分別維持於特定之溫 度範圍内之方式，自動控制徐冷爐12、13内之加熱機構。 第1徐冷爐12之特定之溫度範圍係設定為例如5〇0〜8〇〇度。 第2徐冷爐13之特定之溫度範圍係設定為例如2〇〇〜5〇〇度。 裁板裝置4係包括配置於第2徐冷爐13之下游側的未圖示 之裁板室。裁板室係將玻璃帶B切斷為每一個固定長度， 163550.doc -25- 201247565 裁板得到玻璃板C。玻璃板c之厚度係例如〇·5 mm以下。 又，玻璃板C之大小並無特別限定，例如為寬度方向長度 500〜3 500 mmx長度方向長度500〜35〇〇 mm。又，例如玻璃 板C之寬度方向長度亦可為1〇〇〇 mm以上、1500 mm以上、 2000 mm以上、2500 mm以上，長度方向長度亦可為1〇〇〇 mm以上、1500 mm以上、2〇〇〇 mm以上、25〇〇 mm以上。 玻璃板C越大型化，則玻璃帶8中，與寬度方向之中央部 之傳送輥或徐冷爐之外壁相距之距離越大，因此，於玻璃 帶B之寬度方向之中央部、與作為傳送輥附近且寬度方向 内側之玻璃帶B之區域的鄰接區域之間，存在容易產生溫 度差之傾向。因此，於玻璃板c之寬度方向長度為1〇〇〇 mm以上之情形時，於作為傳送輥附近且寬度方向内側之 玻璃帶B之區域中存在容易產生波形變形之傾向，使得本 發明之效果變得明顯。再者，玻璃衫之寬度方向長度越 為1500 _以上、200〇111111以上、25〇〇111111以上，則本發明 之效果越有益。Ji i5〇°r ^, can also be in the temperature range from the cold point of the broken ribbon to the 150C to the strain point, so that the center of the width of the glass ribbon 163550.doc 201247565 The cooling rate of the portion is faster than the cooling rate of both end portions in the width direction of the glass ribbon, and the temperature at the central portion in the width direction of the glass ribbon becomes the same in the temperature region near the strain point from the state higher than the both end portions. The way is to make the temperature distribution fixed. Furthermore, the temperature of the glass ribbon can be lowered from the cold point (strain point _5 〇. In the region of the 〇, the glass ribbon is slowly cooled compared with other temperature regions) The heat shrinkage rate. Further, the temperature of the glass ribbon may be within a temperature range from the strain point to the strain point minus the temperature of 200 C, so that the temperature distribution of the glass ribbon becomes a valley in the width direction, and the depth of the valley is accompanied. The method of entering the downstream side in the transport direction and becoming larger is to control the heater or the like (not shown) so that the temperature of the central portion gradually decreases from the both end portions. The valley is gradually deepened, and the edge of the glass is always compressed, so that the glass ribbon can be suppressed from being broken. Here, the peripheral speed of the conveying roller makes the productivity of the glass sheet to be improved, and it is preferably faster. Specifically, the peripheral sound velocity of the transmission report is faster than 150 m/hour, and preferably fine (8) hours or more, for example, 220 m/hour or more, 240 meg/hour or more '250 m/hour or more and 27 〇m/ More than hours, 3GGm/ The storage heat of (1) of the portion sandwiched by the transfer roller pair is smaller as the thickness of the glass ribbon is less than 30 〇m/hour or more, and the thickness of the glass ribbon is 5 _ or less. It is suitable for the present invention, for example, if it is 4 _ or less, it is suitable for the present invention, and if it is 0.3 nun or less, it is more suitable for the present invention, and if it is 〇25 or less, it is more suitable for the present invention. In other words, even right It is 0.01~0.5 mm, which is suitable for the purpose of 163550.doc 201247565. For example, if it is 0.0丨-4mm, it is more suitable for the present invention. If it is 0·01~〇·3 mm ', it is more suitable. The present invention is more suitable for the present invention, in the case of 〇〇1 to 〇25 mm. Further, the peripheral speed of the conveying roller is not limited to the above, and for example, the amount of molten glass flowing into the following molded body for one day is not In the case of όt t, or even when the amount of molten glass flowing into the molded body for one day is ό t or more, the width direction of the glass to be produced may be 200 m / hr or less. The amount of glass flowing into the molded body in one day may be 2 t or more 'may be 6 t or more, 1 〇 t or more, 16 t or more. In addition, from the viewpoint of improving the productivity of the glass sheet, the amount of the molten glass flowing into the molded body per day (the amount of MG (Megagram) is preferably as large as possible. The cooling step is such that the circumferential speed of the conveying roller pair disposed on the downstream side at a position where the temperature of the glass ribbon reaches a cold point is faster than the temperature of the glass ribbon is above the glass transition point and below the softening point. The circumferential speed of the conveying roller of the conveying roller pair in the temperature region is fast, and for example, fast 〇 〜 3 〜 20 / 〇〇 after the cold cooling step 'the cutting step (step S6 〇) o specifically, will be continuous The resulting glass ribbon is cut to each fixed length and the panel is paneled to obtain a glass panel. Thereafter, the shape processing step (step S70) is performed. In the shape processing step, not only the size or shape of the specific glass sheet but also the glass end surface is ground and polished. The shape processing can be performed by a physical method using a cutter or a laser, and a chemical method such as etching can also be used. In addition, the manufacturing method of the glass plate includes a washing step and an inspection step, but 163550.doc •15-201247565 omits the description of the steps. Further, the clarification step and the stirring step may be omitted, respectively. (Glass plate manufacturing apparatus) Fig. 2 and Fig. 3 are schematic configuration diagrams of a glass sheet manufacturing apparatus 1 according to the first embodiment of the present invention. The glass sheet manufacturing apparatus 1 of the present embodiment and the method of manufacturing the glass sheet using the glass sheet manufacturing apparatus 1 can be preferably applied to a glass of a flat panel display such as a liquid crystal display device or an organic EL (Electro Luminescence) display device. Manufacture of protective glass for the display surface of a substrate or portable terminal device. The reason for this is that liquid crystal display devices or organic EL display devices have required high precision and high image quality in recent years. Therefore, the glass substrate for the glass substrate is required to have a waveform distortion of 0.2 mm or less. Further, the reason is that since the cover glass is applied to the display surface of the device or the like, extremely high smoothness is required for the glass substrate used therefor. In the glass sheet manufacturing apparatus 1, the glass sheet C is produced from the molten glass A by the down-draw method. The glass sheet manufacturing apparatus 1 includes a furnace chamber 11 in which three heat insulating panels 21, 22, and 23 disposed in the vertical direction are separated, a first quenching furnace 12, a second quenching furnace 13, and a panel chamber (not shown). . The heat insulating plates 21 to 23 are plate-shaped members including heat insulating materials such as ceramic fibers. "Transport holes 16' are formed in the heat insulating plates 21-23, respectively, so that the glass ribbon b described below passes downward. In Fig. 2, the heat insulating plates 21 to 23 are respectively omitted from the two positions in the horizontal direction in contact with the furnace wall 15 described below for easy understanding. However, the glass tape B is on the front side and the back side of the paper surface. On the side, two places in the horizontal direction are integrally connected to each other. In addition, in FIG. 2 and FIG. 3, there is an example in which the insulation panel is used to isolate the three parts, but the number of the heat insulation panels and the installation position are not particularly limited to 163550.doc -16-201247565. It is sufficient to set one or more heat shields. Further, since the number of the heat insulating plates is larger, the space in which the ambient temperature can be independently controlled is increased, and the adjustment of the cold cooling condition becomes easier. Therefore, it is preferable to provide plural numbers in the following cold cooling device 3. A heat shield is isolated into a plurality of spaces. In other words, although one or more of the cold furnaces are provided, it is more preferable to provide three or more. The glass sheet manufacturing apparatus 1 includes a forming apparatus 2, a cooling apparatus 3, and a cutting apparatus 4. The forming apparatus 2 is a device for forming a glass ribbon from a molten glass crucible by a down-draw method. The device 2 includes a furnace body Ue surrounded by a furnace wall 15 assembled of a refractory brick or a block-shaped electroformed refractory or the like, and a forming body 10 and a roller pair 17 are disposed in the furnace chamber u. The molded body 1 includes a groove l〇a (see Fig. 3) that opens upward, and the molten glass a flows in the groove 1〇a. The shaped body is called, for example, a refining monument. The roller pair 17 is placed in a pair corresponding to the end portions (both end portions in the width direction) of the both sides in the width direction of the molten glass A fused to the lower end of the molded body 1〇, and the molten glass A is sandwiched. Transfer towards the bottom. Further, the left and right directions in the paper surface of the product 2 and the direction perpendicular to the paper surface in Fig. 3 are the width direction of the glass ribbon B. In Fig. 2 and Fig. 3, the direction of the upper and lower sides of the paper is the direction in which the glass ribbon B is conveyed. In addition, in FIGS. 2 and 3, the molded body and the report 17 are not isolated, but it is also possible to adjust the cold condition (dose adjustment). The board is isolated. Further, the roller pair 17 may be provided in two or more pairs in the conveying direction. (Xu cold device) The coating and the device 3 are configured to cool the glass strip B_ surface by a plurality of conveying rollers, β and μ, while pulling the spirit W ′ downward. The chilling device 3 includes a first chiller furnace i 2 and a second chill furnace 13 which are grounded below the furnace chamber 11 in the vicinity of 163550.doc 201247565. The first quenching furnace 12 and the second quenching furnace 13 are surrounded by the furnace wall 15 which also constitutes the furnace chamber π. In the first cooling furnace 12 and the second quenching furnace 13, the first cooling device 3 is provided with a heating mechanism which is disposed in the conveying direction of the glass ribbon and is automatically controlled by the following computer. The heating mechanism is not particularly limited, and for example, an electric heater can be used. The ambient temperature around the glass ribbon in the first quenching furnace 12 and the second quenching furnace 13 is controlled by heating by a heating mechanism to prevent warpage or strain in the glass ribbon, and temperature control is performed to make the glass The temperature distribution in the width direction and the conveying direction of the belt has the distribution as described below. In the first quenching furnace 12 and the second quenching furnace 13, the heating is performed by the heating means, and the glass ribbons are sequentially formed from the upstream side of the glass ribbon crucible to the softening point SP, and become the glass transition point Tg. Point, become the point of the cold point AP, and become the point of the strain point stP. The softening point sp is a temperature at which the viscosity of the glass is 1 〇 7·6 dPa·s. Further, the so-called cold spot Ap indicates that the viscosity of the glass is 1 〇 13 dPa·s. The so-called strain point StP indicates the temperature at which the viscosity of the glass is 1014·5 dPa·s. Further, in FIGS. 2 and 3, the position of the glass ribbon B at which the temperature of the glass ribbon B reaches the temperatures of the points Sp, Tg, AP, and StP is extended by the horizontal direction of each of the indicated lines of the dotted line with the glass ribbon. In addition, the number of the transfer roller pairs 18 and 19 in the cold furnace 12 and π is not limited, and at least one or more may be provided. The pair of conveying rollers 18, 19 are provided in the first quenching furnace 12 with three conveying roller pairs 18 arranged in the conveying direction of the glass ribbon β. Four transport roller pairs 19 disposed along the transport direction of the glass ribbon B are disposed in the second Xu cold furnace 13. In the present embodiment, the two transport roller pairs 18 on the most upstream side are disposed in the temperature region D of the glass ribbon B at the glass transition point Tg of 163550.doc •18·201247565 and below the softening point SP (the temperature range of the ! ) Inside. The third and fourth transfer roller pairs 8 are disposed in the temperature region of the glass ribbon b that is higher than the cold spot AP and not reach the glass transition point Tg from the upstream side, and the fifth to seventh from the upstream side. The transport roller pair 19 is disposed in the temperature region E (second temperature region) of the glass ribbon B that reaches the undercooling point ap. Further, the softening point SP may also be located in the furnace chamber 11. Information such as the temperature of the transport roller pair 18, 19 in the temperature region d or the temperature region E, or the temperature of the glass ribbon B which is higher than the cold spot AP and not reaching the glass transition point Tg is based on the sense of temperature as follows The ambient temperature around the glass ribbon b measured by the detector 34 is determined by the positions of SP, Tg, AP, and StP, and is determined by the positions of the estimated sp, Tg, AP, and StP. Further, the cooling device 3 includes a detection control unit 3A and a driving unit 32 (see FIG. 4). The pair of conveying rollers 18 and 19 convey the glass ribbon B by pulling the glass ribbon b downward. The four conveying rollers 18a disposed on both sides of the glass ribbon B so as to sandwich the vicinity of the both end portions in the width direction of the glass ribbon b, and the two conveyings on the same side of the opposite glass ribbon b The roller 18a is connected and disposed on the two drive shafts 18b on both sides of the glass ribbon b. Each of the transport roller pairs 19 includes four transport rollers 19a disposed on both sides of the glass ribbon B so as to sandwich a region adjacent to both end portions in the width direction of the glass ribbon b, and the opposite glass ribbon b is located at the same The two transport rollers 19a on the side are coupled to each other and disposed on the two drive shafts 19b on both sides of the glass ribbon B. Further, the transmission reports 18 and 19 are not limited to the above. For example, the light transfer of each pair of rollers may be such that the glass strips B are located on the same surface side and are not connected to each other by the driving shaft, and are independently arranged in the same manner as the light of the 163550.doc 201247565 roller pair 17 . Both ends of the glass ribbon are in the width direction. / Specific. The ambient temperature around the furnace chamber 11, the second cooling furnace 12, and the glass ribbon 3 in the second quenching furnace 13 of the molding apparatus 2 is temperature controlled so that the glass ribbon β has the following temperature distribution. That is, after the molten glass a is bonded to the lower end of the formed body to form a glass ribbon, both ends are cooled until both ends of the glass ribbon 8 in the width direction. When the viscosity of 卩 (deafness) is η, 丨〇βη=9 or more, preferably 1〇卯=9 or more and 14.5 or less, and the cooling rate at both end portions is faster than the center of the width direction of the glass ribbon β. The temperature is controlled in the manner of the cooling rate of the part. Alternatively, the step of quenching in the first quenching furnace 12 and the second quenching furnace 13 may also cause tensile stress to act on the conveying direction of the glass ribbon B, at least in the central portion of the width direction of the glass ribbon. The temperature obtained by adding 15 〇 ° C to the temperature range obtained by subtracting 2 〇〇 t from the strain point: the cooling rate of the central portion in the width direction of the glass ribbon B is faster than the width of the glass ribbon B. Temperature control is performed in such a manner as to cool the ends of the ears (ears). Thereby, the "cold cooling step" can apply a tensile stress in the conveying direction at the center portion in the width direction of the glass ribbon B. Or, in the region where the temperature in the central portion in the width direction of the glass ribbon B is equal to or higher than the glass softening point, the both end portions (ear portions) in the width direction of the glass ribbon B are lower than the temperature at the central portion and the temperature at the central portion. The temperature of the glass ribbon B is controlled in a uniform manner. Further, the tensile stress in the transport direction acts on the central portion in the width direction of the glass ribbon B, and the temperature in the central portion in the width direction of the glass ribbon β does not reach the softening point and is above the strain point. 163550.doc -20 · In 201247565, control the temperature of the glass ribbon B so that the temperature of the glass ribbon 8 in the width direction is from the center. (? toward the both end portions becomes lower. Further, in the temperature region where the temperature in the central portion in the width direction of the glass ribbon B reaches the strain point, the temperature of the glass ribbon B is controlled so that both ends in the width direction of the glass ribbon ( The temperature gradient of the ear portion and the central portion disappears, whereby the tensile stress in the conveying direction is received in the central portion in the width direction of the glass ribbon B. Further, the tension in the conveying direction can be applied to the center in the width direction of the glass ribbon B. In the manner of the portion, the temperature of the glass ribbon B is controlled so that the temperature of the glass ribbon B is from the both ends of the width direction of the glass ribbon 3 in a region where the temperature in the central portion of the width direction of the glass ribbon B is not near the strain point. The (ear portion) becomes lower toward the central portion in the width direction of the glass ribbon B. Thus, in the region near the strain point in the central portion in the width direction of the glass ribbon 6, the center of the width direction of the glass ribbon B can be The tensile stress is always applied in the conveying direction. Further, the "cold cooling step" may include a first cooling step of cooling at a first average cooling rate until the center portion of the width direction of the glass ribbon B. The second cooling step is performed at a second cooling rate until the temperature in the central portion of the width direction of the glass ribbon B reaches a strain point of -50 ° C from the cold point; and a cooling step of cooling at a third average cooling rate until the temperature in the central portion of the glass ribbon reaches a strain point of -200 ° C from a strain point of -50 C. In this case, the first average a speed is 5.0 C. /second or more, the first average cooling rate is faster than the third average cooling rate 'and the third average cooling rate is faster than the second average cooling rate. That is, the average cooling rate is the first average cooling rate from high to low, 3rd flat 163550.doc -21 - 201247565 The average cooling rate and the second average cooling rate. The cooling rate in the conveying direction of the glass ribbon b affects the heat shrinkage of the manufactured glass sheet. However, the cooling can be set by the above method. At the same time, while increasing the amount of glass plate produced, a glass plate having a better heat shrinkage rate is obtained. As described above, the furnace chamber u, the i-th cold furnace 12, and the second quench furnace 1 are subjected to a forming step and a cold cooling step. 3: The ambient temperature around the glass ribbon B is controlled by the heating mechanism in such a manner that the glass ribbon b has the above temperature. The detection control unit 30 includes the corresponding conveying roller as shown in Fig. 4 (for the 丨8, i9) The temperature sensor 34 and the computer (not shown) functioning as the peripheral speed determining unit 38. Fig. 4 is a block diagram showing the configuration of a control system for controlling the rotational driving of the pair of conveying rollers 18 and 19. The temperature sensor 34 is connected to the peripheral speed determining unit 38. Further, the peripheral speed determining unit 38 is connected to drive the pair of transport rollers 18 and 19 via the driving unit 32. The details of the detecting unit 30 are as follows. The drive unit 32 rotationally drives the transport rollers 18 & 19 a based on the peripheral speeds of the transport relatives 8 a and 19 a stored in the memory unit 36 described below. The drive unit 32 includes a motor (not shown) provided corresponding to each of the transport roller pairs 8 and 9. Further, the motor may not be provided corresponding to each of the pair of conveying rollers 18, 19, and the number thereof may be, for example, less than the number of the pair of conveying rollers, 丨8, 丨9. In this case, the plurality of conveying rollers i8a and 19a can be driven by one motor using a gear having a speed ratio that can be changed between the respective conveying rollers 18a and 19a. In this case, the driving force from the motor is transmitted to the conveying rollers 18a, 19a, for example, via a universal joint or the like. (Detection Control Unit) 163550.doc • 22· 201247565 Here, the detection control unit 30 will be described in further detail. The temperature sensor 34 detects the ambient temperature of the arrangement position in the first quenching furnace 12 and the second quenching furnace 3, respectively. The peripheral speed determining unit 38 determines the peripheral speed of the plurality of transport rollers 18a and 19a based on the thickness of the glass plate to be manufactured or the like. Further, the peripheral speeds of the conveying rollers i8a, 19a are determined in such a manner that all of the conveying rollers 19a provided in the temperature region E are faster than the all conveying parents 18a provided in the temperature region D. The transport report 19a disposed downstream of the position where the temperature of the glass ribbon b reaches the strain point StP is faster. That is, the 'cold cooling step is to prevent the glass ribbon B from being plastically deformed by the waveform, and the plurality of conveying rollers 18a, 19a are controlled so that the temperature of the glass ribbon B reaches a temperature above the glass transition point and below the softening point. The tension acts on the glass ribbon B in the conveying direction. Specifically, the peripheral speed determining unit 38 first refers to the softening point SP, the glass transition point Tg, the cold spot AP, and the strain point StP of the glass ribbon B stored in the memory unit 36 described below, based on the temperature sensor 34. The detected ambient temperature is estimated by the positions of the points SP, Tg, AP, and StP in the cold furnaces 12 and 13. Next, the peripheral speed determining unit 38 makes the peripheral speed of the three transport reports 19a provided in the temperature region E faster than the peripheral speeds of the two transport rollers 18a provided in the temperature region 。. When the ratio of the peripheral speed is represented by the ratio, it is preferable that the upper limit of the ratio of the peripheral speed of the relatively fast circumferential speed is set to 1 〇 2, for example, from the viewpoint of suppressing the breakage of the glass ribbon B. From the viewpoint of sufficiently obtaining the effect of preventing plastic deformation, it is preferable to set the lower limit of the above ratio to 1_〇〇〇3. That is, the 163550.doc -23·201247565 of the three transport rollers 9a of the temperature region e is preferably 0.03 to 2% faster than the circumferential speed of the two transport rollers 18a of the temperature region D, and more preferably is fast. 5 to 1.7%, further preferably 0.1 to 1.5%, more preferably 0 to 1.0%, preferably 3 to 8%. At this time, the peripheral speed of the conveying rollers 18a, 19a which is at the cold spot AP and not reaching the glass transition point Tg, and the peripheral speed of the conveying roller 18a when the conveying roller 18a is further located outside the upstream side of the temperature region may be compared with the temperature region D. The circumferential speeds of the transmissions 18a are the same or different, and particularly preferably different. In a different case, 'preferably' is a conveying roller 18a on the upstream side, a conveying roller 18a in the temperature region D, a conveying roller 19a which is higher than the freezing point Ap and not reaching the glass transition point Tg. In order, the faster the transfer roller is on the downstream side. The peripheral speed of the transport roller 18a on the most upstream side in the temperature region D may be the same as or different from the peripheral speed of the second transport roller 18a from the upstream side, and is particularly preferably different. In a different case, it is preferable that the circumferential speed of the second transfer newspaper 18a is faster than the circumferential speed of the transport roller 18a on the most upstream side from the upstream side, and three from the downstream side in the temperature region E. The peripheral speeds of the transmission pro-i9a may all be the same, some of them are the same or all different, and particularly preferably all are different. In all the different cases, it is preferable that the circumferential speed of the transporting pro-19a on the most downstream side is the fastest, and the circumferential speed of the third transporting roller i9a from the downstream side is the slowest. Further, it is preferable to prevent the plastic deformation of the waveform from occurring in the adjacent region adjacent to the inner side in the width direction of the glass ribbon B by the portion sandwiched by the conveying rollers 18a, 19a. The temperature at the adjacent region reaches the glass transition point Tg. In the temperature range above and below the softening point SP, the tensile stress in the conveying direction is made 163550.doc -24 201247565 for the glass ribbon B. In terms of the action of the tensile stress, it is preferred that the temperature of the adjacent portion of the conveying report 18, 19 adjacent to the portion of the glass ribbon held by the conveying roller adjacent in the width direction inner side of the glass ribbon is made. The circumferential speed of the conveying roller pair which is disposed on the downstream side at the position where the glass cold spot AP is reached is faster than the temperature of the conveying roller pair 18, 19 which is disposed in the adjacent region reaches the glass transition point Tg and below the softening point SP. The peripheral speed of the conveying roller 18a of the conveying roller pair 18 in the temperature region is fast. As described above, the transfer speed of the transfer marks i8a, i9a is determined by the transfer roller 19a disposed in the temperature region E faster than the transfer roller 18a disposed in the temperature region D, so that it can be prevented from being controlled in this manner. The rotation is driven to effectively apply the tension to the deformation of the waveform generated in the region on the inner side in the width direction of the conveying rollers 18a and 19a in the conveying direction of the glass ribbon B. The peripheral speed determining unit 38 includes a memory unit 36. The memory unit 36 stores the peripheral speeds of the plurality of transport rollers 18a and 19a determined in the above manner. The memory unit 36 stores the softening point SP of the glass ribbon B, the glass transition point Tg, the cold spot AP, and the strain point StP in the composition of each glass. Further, the computer (not shown) automatically controls the inside of the quenching furnaces 12 and 13 in such a manner that the ambient temperature in the quenching furnaces 12 and 13 is maintained within a specific temperature range based on the ambient temperature detected by the temperature sensor 34. Heating mechanism. The specific temperature range of the first quenching furnace 12 is set to, for example, 5 〇 0 to 8 Torr. The specific temperature range of the second quenching furnace 13 is set to, for example, 2 〇〇 to 5 〇〇. The panel cutting device 4 includes a panel chamber (not shown) disposed on the downstream side of the second quenching furnace 13. The paneling room cuts the glass strip B into each fixed length, 163550.doc -25- 201247565. The thickness of the glass plate c is, for example, 〇·5 mm or less. Further, the size of the glass sheet C is not particularly limited, and is, for example, a length in the width direction of 500 to 3 500 mm x and a length in the longitudinal direction of 500 to 35 mm. Further, for example, the length of the glass sheet C in the width direction may be 1 mm or more, 1500 mm or more, 2000 mm or more, 2500 mm or more, and the length in the longitudinal direction may be 1 mm or more, 1500 mm or more, or 2 〇〇〇mm or more, 25〇〇mm or more. The larger the glass plate C is, the larger the distance between the glass ribbon 8 and the outer surface of the conveying roller or the quenching furnace at the center in the width direction, so that the center portion of the glass ribbon B in the width direction and the vicinity of the conveying roller Further, a temperature difference tends to occur between adjacent regions of the region of the glass ribbon B on the inner side in the width direction. Therefore, when the length of the glass plate c in the width direction is 1 mm or more, there is a tendency that waveform deformation is likely to occur in a region of the glass ribbon B which is in the vicinity of the transport roller and inward in the width direction, so that the effect of the present invention is obtained. Become obvious. Further, the effect of the present invention is more advantageous as the length of the glass shirt in the width direction is 1500 Å or more, 200 〇 111111 or more, and 25 〇〇 111111 or more.

再者，傳送㈣a、19a之圓周速度亦可由操作人員決定 而取代由圓周速度決定部38決定。於該情形時，玻璃板製 造裝置i更包括受理操作人員之輸入操作之未圖示之輸入 部，且該輸入部受理操作人員所輸入之傳送輥181 !%之 圓周速度或旋轉速度等。記憶部36亦可不記憶玻璃帶k 軟化點sp、玻璃轉移點Tg、徐冷fiAp、應變點⑽等，只 要記憶由操作人員&於玻璃帶B之軟化點sp、 ZFurther, the peripheral speeds of the transmissions (4) a and 19a may be determined by the operator instead of being determined by the peripheral speed determining unit 38. In this case, the glass sheet manufacturing apparatus i further includes an input unit (not shown) that accepts an input operation by an operator, and the input unit accepts a peripheral speed or a rotational speed of the transport roller 181% that is input by the operator. The memory unit 36 may also not memorize the glass ribbon k softening point sp, the glass transition point Tg, the Xu cold fiAp, the strain point (10), etc., as long as the softening point sp, Z of the glass band B is memorized by the operator &

Tg、徐冷點AP、應變點StP等決定且輸入之傳送輥H I63550.doc -26- 201247565 19a之圓周速度或旋轉速度，且將該等資訊傳遞至驅動部 即可。再者，輸入部亦可直接連接於驅動部，將傳送輥之 圓周速度或旋轉速度直接輸入至驅動部。 根據以如上方式構成之玻璃板製造裝置1，於玻璃帶B之 溫度達到玻璃轉移點Tg以上且玻璃軟化點sp以下之溫度區 域内，使拉伸應力沿傳送方向作用於玻璃帶B。更具體而 § ’以設置於玻璃帶B之溫度達到玻璃徐冷點AP以下之溫 度區域内的傳送輥對19之傳送輥19a之圓周速度快於設置 於玻璃帶B之溫度達到玻璃轉移點Tg以上且軟化點sp以下 之溫度區域D内的傳送輥18a之圓周速度之方式，控制傳送 輥18a、19a之旋轉驅動。因此，可有效地使張力沿傳送方 向作用於在徐冷爐12、13内傳送之玻璃帶B。因此，可抑 制在與由傳送輥18a、19a夾持之部分於玻璃帶8之寬度方 向内側鄰接之鄰接區域中產生波形之變形，從而防止玻璃 板之平坦度之劣化。該效果係即便於製造玻璃帶B之寬度 方向之兩端部與寬度方向中央部之厚度之差容易變大且即 便較小之應力亦容易變形之板厚為〇_5 mm以下之玻璃板之 情形時亦發揮作用，從而可降低將要產生之翹曲、破碎之 產生。 對該方面進行更具體說明。 如先前所述，於將由圖7所示之傳送輥對18、19失持之 區域冷卻，且玻璃收縮之情形時，壓縮應力作用於圖7中 符號S表示之區域（鄰接區域）。此時，於傳送輥之附近且 相較傳送輥為寬度方向内側之鄰接區域之玻璃溫度與軟化 I63550.doc •27- 201247565 點（黏度η達到1(^η=7.65之溫度）相比為高溫之情形時，作 用於相較由傳送輥對18、19夾持之區域為寬度方向内側且 傳送輥附近之區域的鄰接區域之壓縮應力瞬間得到緩和， 故而不易產生波形之塑性變形。另一方面，於同樣之鄰接 區域之玻璃溫度相較玻璃轉移點為低溫之情形時，由於黏 度充分上升’故而不易產生波形之塑性變形。 與此相對，於傳送輥之附近且相較傳送輥為寬度方向内 側之鄰接區域之玻璃溫度與玻璃軟化點相比為低溫且與 玻璃轉移點相比為咼溫之情形時，因上述生成之麼縮應 力，而於傳送輥18a、18b之附近且寬度方向内側之玻璃帶 之鄰接區域中容易產生塑性變形（波形之變形），導致玻璃 板之平坦度劣化。更具體而言，例如若以玻璃帶B之寬度 方向之中央部受到傳送方向之拉伸應力（張力）之方式進行 玻璃帶之溫度控制，則鄰接區域受到壓縮，使得鄰接區域 中容易產生形呈現波形之塑性變形。 再者，：¾•始終以玻璃帶B之寬度方向之中央部之冷卻速 度成為最快之方式進行溫度控制，則玻璃帶B之寬度方向 之中央部始終受到傳送方向之拉伸應力（張力）。因此，於 包括玻璃帶B之寬度方向之中央部的玻璃帶之中央區域， 與上述鄰接區域相比不易產生塑性變形。 藉由自成形體之正下方對玻璃帶B之寬度方向之兩端部 (耳部）進行急冷’而於如上所述之上述鄰接區域内波形之. 塑性變形之問題變得明顯。又，藉由以玻璃帶B之寬度方 向之中央部始終受到傳送方向之拉伸應力之方式，進行玻 163550.doc 28· 201247565 璃帶B之溫度控制’而使上述鄰接區域之塑性變形之問題 變得明顯。即，於進行如上所述之玻璃帶B之寬度方向之 中央部始終受到傳送方向之拉伸應力之類的溫度控制之情 形時，抑制塑性變形之本發明之製造方法之效果變得明 顯。 如此之塑性變形之問題係於製造玻璃帶B之寬度方向之 兩端部與上述鄰接區域之厚度之差容易變大且因厚度較薄 而即便較小之應力亦容易變形之板厚為〇 5 mm以下之玻璃 板之情形時變得明顯。即，若僅利用上述專利文獻丨之製 造方法，則於製造板厚為〇5 mm以下之玻璃板之情形時， 作為傳送輥之寬度方向内側之區域的上述鄰接區域更容易 變形，導致玻璃板之平坦度進一步劣化。 另一方面’上述專利文獻2之製造方法係使設置於下方 之傳送輥之圓周速度快於設置於上方之傳送輥，但根據專 利文獻2之段落編號[0045]〜[〇〇49]之記載，亦可認為上述 專利文獻2之製造方法係以板厚為〇 7〜i mm左右之相對較 厚之玻璃為前提，又，基於藉由自傳送方向之上游側至下 游侧，使傳送輥之圓周速度依序變快而對玻璃帶沿傳送方 向始終施加張力之觀點。 然而，於玻璃帶之上述鄰接區域產生塑性變形係如上所 述有限之玻璃帶之溫度區域中之現象，故必需於適當之溫 度區域之傳送耗間賦予圓周速度差。因此，即便如專利文 獻2所述，僅使下游之傳送輥之圓周速度快於上游，亦不 僅無效果，而且於玻璃帶中產生塑性變形、或製造板厚為 163550.doc •29- 201247565 0.5 mm以下之玻璃板之情形時，例如若賦予如實施例 [0045]所3己载之圓周速度差，則存在玻璃帶破碎之虞。 與此相對，本實施形態係於玻璃帶B之溫度達到玻璃轉 移點Tg以上且玻璃軟化點sp以下之溫度區域内使張力沿 傳送方向對玻璃帶B進行作用。因此，可抑制於玻璃帶B 之鄰接區域中產生波形之變形，從而可防止玻璃板之平坦 度之劣化。又，即便於製造板厚為〇 5 下之玻璃板之 情形時’玻璃帶亦不會破碎。 具體而δ，本實施形態係為使拉伸應力沿傳送方向對玻 璃帶Β進行作用，而以設置於玻璃帶Β之溫度達到玻璃徐 冷點ΑΡ以下之溫度區域内的傳送輥對19之傳送輥19a之圓 周速度快於設置於玻璃帶B之溫度達到玻璃轉移點Tg以上 且軟化點SP以下之溫度區域D内的傳送親〗8a之圓周速度之 方式，控制傳送輕18a、i9a之旋轉驅動。 再者，複數個傳送輥對18、19至少設置於溫度區域D及 溫度區域E即可。又，複數個傳送親對之數量為至少2個即 可’並無特別限制。再者，位於軟化點SP、玻璃轉移點The circumferential speed or the rotational speed of the transport roller H I63550.doc -26- 201247565 19a, which is determined by the Tg, the cold spot AP, the strain point StP, etc., may be transmitted to the drive unit. Further, the input unit may be directly connected to the driving unit, and the peripheral speed or the rotational speed of the conveying roller may be directly input to the driving unit. According to the glass sheet manufacturing apparatus 1 configured as described above, in the temperature range in which the temperature of the glass ribbon B reaches the glass transition point Tg or more and the glass softening point sp or less, the tensile stress acts on the glass ribbon B in the conveying direction. More specifically, the circumferential speed of the conveying roller 19a of the conveying roller pair 19 in the temperature region where the temperature of the glass ribbon B reaches the glass freezing point AP is faster than the temperature of the glass ribbon B reaches the glass transition point Tg. The rotational driving of the conveying rollers 18a and 19a is controlled such that the peripheral speed of the conveying roller 18a in the temperature region D below the softening point sp is as described above. Therefore, the tension can be effectively applied to the glass ribbon B conveyed in the quenching furnaces 12, 13 in the conveying direction. Therefore, it is possible to suppress the deformation of the waveform in the adjacent region adjacent to the inner side in the width direction of the glass ribbon 8 which is sandwiched by the conveying rollers 18a, 19a, thereby preventing deterioration of the flatness of the glass sheet. The effect is that the difference between the thicknesses of the both ends in the width direction of the glass ribbon B and the central portion in the width direction is likely to be large, and the glass sheet having a thickness of 〇_5 mm or less which is easily deformed even with a small stress is used. It also plays a role in the situation, which can reduce the occurrence of warpage and breakage that will occur. This aspect is more specifically explained. As described earlier, in the case where the region lost by the pair of conveying rollers 18, 19 shown in Fig. 7 is cooled and the glass is contracted, the compressive stress acts on the region indicated by the symbol S in Fig. 7 (adjacent region). At this time, the glass temperature in the vicinity of the conveying roller and the adjacent region in the width direction inner side of the conveying roller is higher than the softening I63550.doc •27-201247565 point (viscosity η is 1 (^η=7.65)) In other cases, the compressive stress acting on the adjacent region of the region sandwiched by the pair of transport rollers 18 and 19 in the width direction inner side and the vicinity of the transport roller is instantaneously relieved, so that plastic deformation of the waveform is less likely to occur. When the glass temperature in the same adjacent region is lower than the glass transition point, the viscosity is sufficiently increased because the viscosity is sufficiently increased. In contrast, in the vicinity of the conveying roller and in comparison with the conveying roller, the width direction is When the glass temperature in the adjacent region on the inner side is lower than the glass softening point and is higher than the glass transition point, the shrinkage stress is generated in the vicinity of the conveying rollers 18a and 18b and in the width direction inner side. Plastic deformation (deformation of the waveform) is likely to occur in the adjacent region of the glass ribbon, resulting in deterioration of the flatness of the glass sheet. More specifically, for example, When the central portion of the width direction of the glass ribbon B is subjected to temperature control of the glass ribbon in such a manner as to undergo tensile stress (tension) in the transport direction, the adjacent region is compressed, so that plastic deformation of the waveform in the adjacent region is likely to occur. :3⁄4 • The temperature is controlled so that the cooling rate in the center of the width direction of the glass ribbon B is the fastest, and the center portion in the width direction of the glass ribbon B is always subjected to the tensile stress (tension) in the conveying direction. The central portion of the glass ribbon including the central portion in the width direction of the glass ribbon B is less likely to be plastically deformed than the adjacent region. By both ends of the width direction of the glass ribbon B from the directly under the molded body (ear) The part is rapidly quenched and the waveform in the adjacent region as described above is formed. The problem of plastic deformation becomes apparent. Further, the central portion in the width direction of the glass ribbon B is always subjected to the tensile stress in the conveying direction. The problem of plastic deformation of the adjacent region is made apparent by performing the temperature control of the glass ribbon B 163550.doc 28·201247565. In the case where the central portion in the width direction of the glass ribbon B as described above is always subjected to temperature control such as tensile stress in the transport direction, the effect of the manufacturing method of the present invention for suppressing plastic deformation becomes remarkable. The problem of plastic deformation is that the difference between the thicknesses of the both end portions in the width direction of the glass ribbon B and the adjacent regions is likely to be large, and the thickness is small, and the thickness is easily deformed even if the stress is small, 〇5 mm or less. In the case of the glass plate, the manufacturing method of the above-mentioned patent document is used, and in the case of producing a glass plate having a thickness of 〇5 mm or less, it is a region on the inner side in the width direction of the conveying roller. The abutting region is more easily deformed, and the flatness of the glass sheet is further deteriorated. On the other hand, the manufacturing method of the above-mentioned Patent Document 2 is such that the circumferential speed of the conveying roller disposed below is faster than that of the conveying roller disposed above, but according to the patent In the description of the paragraph number [0045] to [〇〇49] of the document 2, the manufacturing method of the above-mentioned Patent Document 2 is considered to have a plate thickness of about 7 to i mm. The relatively thick glass premise and, based on the direction by the conveying side from the upstream to the downstream side, the peripheral speed of the conveying roller becomes faster sequential views tension applied to the glass ribbon is always along the conveying direction. However, the plastic deformation in the adjacent region of the glass ribbon is a phenomenon in the temperature region of the limited glass ribbon as described above, so that it is necessary to impart a peripheral speed difference between the transmission costs of the appropriate temperature region. Therefore, even if the circumferential speed of the downstream conveying roller is faster than the upstream as described in Patent Document 2, it is not only ineffective, but also plastically deformed in the glass ribbon, or the plate thickness is 163,550.doc •29-201247565 0.5 In the case of a glass plate of not more than mm, for example, if the circumferential speed difference of 3 as described in Example [0045] is given, the glass ribbon is broken. On the other hand, in the present embodiment, the tension is applied to the glass ribbon B in the transport direction in a temperature region where the temperature of the glass ribbon B reaches the glass transition point Tg or more and the glass softening point sp is equal to or lower. Therefore, deformation of the waveform in the adjacent region of the glass ribbon B can be suppressed, so that deterioration of the flatness of the glass sheet can be prevented. Further, even in the case of manufacturing a glass plate having a plate thickness of 〇 5, the glass ribbon is not broken. Specifically, δ, in the present embodiment, the tensile stress is applied to the glass ribbon 沿 in the conveying direction, and the conveying roller pair 19 is disposed in a temperature region where the temperature of the glass ribbon is lower than the glass freezing point ΑΡ. The peripheral speed of the roller 19a is faster than the peripheral speed of the transporting master 8a in the temperature region D above the glass transition point Tg and below the softening point SP, and the rotational driving of the conveying light 18a, i9a is controlled. . Further, a plurality of transport roller pairs 18 and 19 may be provided at least in the temperature region D and the temperature region E. Further, the number of the plurality of transmission pro-pairs is at least two, and there is no particular limitation. Furthermore, located at the softening point SP, the glass transition point

Tg、徐冷點AP、應變點Stp之位置、及以該等各點為交界 而形成之各區域内之傳送輥對之數量並無特別限制。 (第2實施形態） 其次，對作為本發明之第2實施形態的玻璃板製造裝置 進行說明。 此處著眼於與上述第1實施形態之不同之處進行說 明。 163550.doc 201247565 於第2實施形態中’檢測控制部4〇之電腦除作為圓周速 度決定部48發揮功能^卜，而且如圖5所示進而作為傳 送報狀態檢測部（以下亦簡稱為檢測部）47中之除溫度感測 器44以外之料發揮錢。圖5係說明控制傳魏對18、 19之旋轉驅動的控制系統之構成之方塊圖。於圖5中，利 用與第1實施形態中參照之符號相同之符號表示之要素係 與第i實施形態中說明之要素相同。檢測部47係與溫度感 測器44連接。溫度感測器44係檢測傳送輥w、叫之溫 度°此處’檢測傳送輥18a、19a之溫度亦包括算出傳送輕 18a、19a之溫度。於該情形時，參照藉由各溫度感測器料 所檢測之環境溫度中之記憶於記憶部46中之溫度差資料， 算出傳送輥18a、19a之溫h檢測部47係基於檢測之傳送 輥18a、19a之溫度.，如下所述，算出傳送輥i8a、i9a之熱 膨脹量作為直徑之變化。 圓周速度決定部48之記憶部46係記憶溫度差資料。溫度 差資料係包括徐冷爐12、13之設置時預先測定的徐冷爐 12、13之環境溫度與各環境溫度中之傳送輥18&、丨％之溫 度（表面溫度）之差之資料。溫度差資料係因徐冷爐12、13 之構造而不同地記憶。記憶部46中更記憶有傳送輥l8a、 19a之熱膨脹係數（以下，亦稱為輥熱膨脹係數卜輥熱膨脹 係數係由傳送輥18a、19a之材質決定。 又，記憶部46中更記憶由圓周速度決定部48決定之各傳 送輥18a、19a之旋轉速度、於複數個傳送輥對18、19間設 定之作為基準之圓周速度分佈、及各傳送輥18a、i9a之直 163550.doc •31 · 201247565 徑之基準值。各傳送輥18a、19a之直徑之基準值分別為常 m·(例如25度）下之新製品時之直徑。又，記憶部46係記憶 達成作為基準之圓周速度分佈時之條件（傳送輥之溫度、 玻璃帶B之溫度、玻璃帶之熱膨脹係數、玻璃帶8之厚 度、寬度、玻璃帶之流量等）。 圓周速度決定部48係設定於複數個傳送輥對18、19間傳 送輥18a、19a之圓周速度與玻璃帶b之傳送速度之相對速 度固定時的複數個傳送輥對18、19間之圓周速度比（圓周 速度分佈）。該圓周速度比係設定為設置於溫度區域E内的 傳送報對19之傳送輥19a之圓周速度快於設置於溫度區域d 内的傳送輥對18之傳送輥18a之圓周速度。其次，圓周速 度決定部48係於維持著第！實施形態中決定之溫度區域〇、 E内的傳送輥18a、19a之圓周速度之大小關係之狀態下， 以基於由檢測部47算出之傳送輥18a、19a之直徑之變化， 保持複數個傳送輥對18、19間之圓周速度比之方式，決定 各傳送觀18a、19a之旋轉速度。 再者’傳送輥18a、19a之圓周速度亦可由操作人員而取 代由圓周速度決定部48算出。於該情形時，玻璃板製造裝 置1更包括與第1實施形態中說明者相同之輸入部。記憶部 46亦可不記憶溫度差資料、輥熱膨脹係數、圓周速度分 佈、各傳送輥18a、19a之直徑之基準值、達成作為基準之 圓周速度分佈時之條件等，只要記憶由操作人員基於溫度 差資料、輥熱膨脹係數、圓周速度分佈、各傳送輥18a、 19a之直徑之基準值、達成作為基準之圓周速度分佈時之 163550.doc -32· 201247565 條件等而异出後輸入之傳送輥18a、19a之圓周速度即可。 ((圓周速度比之設定）） 複數個傳送輥對1 8、1 9間之圓周速度比係設定為例如以 最上游側之傳送輥18a之圓周速度為基準’自緊接著其次 的下游側之傳送輥18a起依序以最上游側之傳送輥l8a之圓 周速度之0.1〇/。為單位，使圓周速度變快。於本實施形態 中，最下游側之傳送輥19a之圓周速度為最上游側之傳送 輥18a之100.6%。藉由按照如此之圓周速度比，控制複數 個傳送輥對18、19,而使玻璃帶B不會於傳送輥對18、19 之上方產生變形，且可抑制於玻璃帶B之表面產生微細之 才貝傷。於該情形時，根據圓周速度比設定之圓周速度係利 用最上游側之傳送輥18a之圓周速度設定值。以此方式設 定為基準之圓周速度比係以先前玻璃帶B不會產生損傷或 形狀變形之問題之方式進行徐冷時之圓周速度比。作為該 基準之圓周速度分佈係與玻璃帶B之溫度、熱膨脹係數' 厚度、寬度、玻璃流量等條件一併記憶保持於圓周速度決 疋°卩48。該圓周速度比係如下所述於玻璃帶b之溫度變化 等知冷時之條件變化之情形時，修正並設定作為基準之圓 周速度分佈。 圓周速度決定部48係藉由玻璃帶B之溫度、熱膨脹係 數、厚度、玻璃流量等而修正並設定基準之圓周速度比。 八體而。，於設疋為基準之圓周速度分佈之圓周速度 比’作為此時之條件，設定有各傳送輥對18、19之作為基 準之溫度。因& ’於當前之玻璃帶B之溫度相對作為該基 163550.doc •33· 201247565 準之溫度變化之情形時，例如於溫度Τι變化成Ts之情形 時，圓周速度決定部48利用I與丁丨之溫度差中之熱膨脹率 之差’修正設定為基準之圓周速度分佈的圓周速度比。其 原因在於’玻璃帶B之傳送速度係因由玻璃帶b之溫度及 熱膨脹係數決定的熱膨脹率而變化。於該情形時，由於熱 膨脹係數因玻璃帶B之種類不同而不同，故而，亦可利用 兼顧玻璃帶B之熱膨脹係數及溫度的熱膨脹率之差異，更 普通化地修正圓周速度比。如此之圓周速度比係不僅根據 玻璃帶B之溫度及熱膨脹係數之溫度依存性，而且根據玻 璃帶B之厚度、寬度、玻璃流量等條件之變化進行修正及 設定。因此’玻璃帶B之溫度、熱膨脹係數之溫度依存性 之特性、厚度、寬度、玻璃流量等基準之圓周速度比中之 條件係預先記憶保持於圓周速度決定部48中。玻璃熱膨脹 係數係由溶融玻璃之組成所決定。根據設定之圓周速度 比’以最上游側之傳送輥對之當前之圓周速度為基準，算 出下游側之各傳送輥對之圓周速度。 可藉由以此方式’相應於包括玻璃帶B之溫度的狀態之 變化’修正圆周速度比，而決定更適當之傳送報18a、i9a 之旋轉速度。 ((傳送輥之旋轉速度之決定）） 圓周速度決定部48係基於所算出或由操作人員輸入之各 傳送報18a、19a之圓周速度’按照下式決定各傳送輥 18a、19a之旋轉速度。 旋轉速度=圓周速度/(熱膨脹後之傳送輥之直徑χπ) 163550.doc •34-The number of the transport roller pairs in the respective regions formed by the positions of Tg, the cold spot AP, the strain point Stp, and the intersections of the respective points is not particularly limited. (Second Embodiment) Next, a glass sheet manufacturing apparatus according to a second embodiment of the present invention will be described. Here, attention will be paid to the difference from the above-described first embodiment. In the second embodiment, the computer of the detection control unit 4 functions as a peripheral speed determination unit 48, and further includes a transmission status detection unit (hereinafter also referred to simply as a detection unit) as shown in FIG. 5 . In addition to the temperature sensor 44, the material of 47 is used for money. Figure 5 is a block diagram showing the construction of a control system for controlling the rotational drive of the 18, 19. In Fig. 5, elements denoted by the same reference numerals as those in the first embodiment are the same as those described in the i-th embodiment. The detecting unit 47 is connected to the temperature sensor 44. The temperature sensor 44 detects the conveyance roller w, called the temperature. Here, the temperature of the detection conveyance rollers 18a, 19a also includes calculating the temperatures of the conveyance lamps 18a, 19a. In this case, referring to the temperature difference data stored in the memory unit 46 in the ambient temperature detected by each temperature sensor material, the temperature h detecting portion 47 of the transport rollers 18a, 19a is calculated based on the detected transport roller. The temperature of 18a, 19a is calculated as follows, and the amount of thermal expansion of the conveying rolls i8a, i9a is calculated as a change in diameter. The memory unit 46 of the peripheral speed determining unit 48 stores the temperature difference data. The temperature difference data includes data of the difference between the ambient temperature of the quenching furnaces 12 and 13 which are previously measured at the time of setting of the cold furnaces 12 and 13, and the temperature (surface temperature) of the conveying rollers 18 & The temperature difference data is memorized differently due to the structure of the cold furnaces 12, 13. The thermal expansion coefficient of the transport rollers 18a and 19a is further stored in the memory unit 46 (hereinafter, also referred to as the thermal expansion coefficient of the roller, the thermal expansion coefficient of the roller is determined by the material of the transport rollers 18a and 19a. Further, the memory portion 46 is more memorized by the peripheral speed. The rotational speed of each of the transport rollers 18a and 19a determined by the determining unit 48, the peripheral speed distribution set between the plurality of transport roller pairs 18 and 19, and the straightness of each of the transport rollers 18a and i9a 163550.doc • 31 · 201247565 The reference value of the diameter. The reference value of the diameter of each of the transport rollers 18a and 19a is the diameter of a new product at a constant m· (for example, 25 degrees). Further, the memory unit 46 is a memory of the circumferential velocity distribution as a reference. Conditions (temperature of the conveying roller, temperature of the glass ribbon B, thermal expansion coefficient of the glass ribbon, thickness of the glass ribbon 8, width, flow rate of the glass ribbon, etc.). The peripheral speed determining portion 48 is set to a plurality of conveying roller pairs 18, 19 The peripheral speed ratio (circumferential velocity distribution) between the plurality of transport roller pairs 18, 19 when the relative speed of the peripheral speed of the intermediate transport rollers 18a, 19a and the transport speed of the glass ribbon b is fixed. The peripheral speed of the conveying roller 19a of the conveying report 19 set in the temperature region E is faster than the peripheral speed of the conveying roller 18a of the conveying roller pair 18 provided in the temperature region d. Next, the peripheral speed determining portion 48 is tied to In the state in which the circumferential speeds of the transport rollers 18a and 19a in the temperature regions 〇 and E determined in the second embodiment are maintained, the diameters of the transport rollers 18a and 19a calculated by the detecting unit 47 are maintained. The rotational speed of each of the transport views 18a, 19a is determined by the ratio of the peripheral speeds of the plurality of transport roller pairs 18, 19. Further, the peripheral speed of the transport rollers 18a, 19a may be replaced by the peripheral speed determining portion 48 by the operator. In this case, the glass sheet manufacturing apparatus 1 further includes an input unit similar to that described in the first embodiment. The memory unit 46 may not memorize temperature difference data, roll thermal expansion coefficient, circumferential speed distribution, and each transport roller 18a. The reference value of the diameter of 19a, the condition for achieving the circumferential speed distribution as a reference, etc., as long as the memory is calculated by the operator based on the temperature difference data, the coefficient of thermal expansion of the roller, and the circumference The speed distribution, the reference value of the diameter of each of the transport rollers 18a and 19a, and the peripheral speed of the transport rollers 18a and 19a which are input after the 163550.doc-32·201247565 condition of the reference circumferential speed distribution is obtained may be used. ((circumferential speed ratio setting)) The circumferential speed ratio between the plurality of conveying roller pairs 18 and 19 is set, for example, based on the peripheral speed of the conveying roller 18a on the most upstream side, and is followed by the next downstream side. The conveying roller 18a sequentially increases the peripheral speed by 0.1 〇 / of the circumferential speed of the conveying roller 18a on the most upstream side. In the present embodiment, the peripheral speed of the transport roller 19a on the most downstream side is 100.6% of the transport roller 18a on the most upstream side. By controlling the plurality of transport roller pairs 18, 19 in accordance with such a peripheral speed ratio, the glass ribbon B is not deformed above the transport roller pairs 18, 19, and the surface of the glass ribbon B can be suppressed from being fine. Only the shell injury. In this case, the peripheral speed setting value of the conveying roller 18a on the most upstream side is utilized in accordance with the peripheral speed ratio of the peripheral speed ratio. The peripheral speed ratio set as the reference in this manner is a peripheral speed ratio when the cold glass ribbon B is not damaged or deformed in shape. The circumferential speed distribution as the reference is stored and maintained at the peripheral speed 疋°卩48 together with the temperature, thermal expansion coefficient 'thickness, width, and glass flow rate of the glass ribbon B. When the circumferential speed ratio is changed as follows when the temperature change of the glass ribbon b changes as the temperature changes, the circumferential speed distribution as a reference is corrected and set. The peripheral speed determining unit 48 corrects and sets the reference peripheral speed ratio by the temperature of the glass ribbon B, the coefficient of thermal expansion, the thickness, the flow rate of the glass, and the like. Eight bodies. The circumferential speed ratio "of the circumferential speed distribution based on the setting" is set as the temperature at which the respective conveying roller pairs 18 and 19 are used as the reference. When the temperature of the current glass ribbon B is changed as the temperature of the base 163550.doc • 33·201247565, for example, when the temperature is changed to Ts, the peripheral speed determining unit 48 uses I and The difference between the thermal expansion rates in the temperature difference of Ding's is corrected as the peripheral speed ratio of the circumferential velocity distribution of the reference. The reason for this is that the conveying speed of the glass ribbon B changes due to the thermal expansion coefficient determined by the temperature of the glass ribbon b and the coefficient of thermal expansion. In this case, since the coefficient of thermal expansion differs depending on the type of the glass ribbon B, the difference in the coefficient of thermal expansion between the thermal expansion coefficient and the temperature of the glass ribbon B can be utilized to more specifically correct the peripheral speed ratio. Such a peripheral speed ratio is corrected and set not only in accordance with the temperature dependence of the temperature and thermal expansion coefficient of the glass ribbon B but also on the changes in the thickness, width, and glass flow rate of the glass ribbon B. Therefore, the conditions of the temperature dependence of the temperature of the glass ribbon B, the temperature dependence of the thermal expansion coefficient, the thickness, the width, and the glass flow rate are preliminarily stored in the peripheral speed determining unit 48. The coefficient of thermal expansion of the glass is determined by the composition of the molten glass. The peripheral speed of each pair of transport rollers on the downstream side is calculated based on the set peripheral speed ratio 'based on the current peripheral speed of the pair of transport rollers on the most upstream side. The rotational speed of the more appropriate transmissions 18a, i9a can be determined by correcting the peripheral speed ratio in this manner 'corresponding to the change in the state including the temperature of the glass ribbon B'. (Determining the rotational speed of the transport roller) The peripheral speed determining unit 48 determines the rotational speed of each of the transport rollers 18a and 19a based on the circumferential speed ′ of each of the transmissions 18a and 19a calculated or input by the operator. Rotation speed = circumferential speed / (diameter of the transfer roller after thermal expansion χ π) 163550.doc • 34-

201247565 此處，於在徐冷爐12、13内之各傳送輥對18、19之配置 位置檢測出之環境溫度相對於上述作為基準之圓周速度比 中之傳送輥對之溫度變化之情形時，以保持上述圓周速度 比之方式決定傳送輥18a、19a之旋轉速度。 具體而言，對於由溫度感測器44探測之溫度變化之傳送 輥18a、19a ,檢測部47參照傳送輥18a、19a之溫度中之輥 熱膨脹係數、及各傳送輥丨8a、丨93之直徑之基準值，按照 下式算出該傳送輥18&之膨脹量（直徑之變化量）。 dD=p-DAT dD :膨脹量 β :熱膨脹係數 D:傳送輥之直徑之基準值 △Τ:與基準之圓周速度比中設定之傳送輥之溫度的溫度差 圓周速度決定部48係根據由檢測部47算出之傳送輥i8a 之直徑之變化量’按照下式，以圆周速度之變化量為1， 算出新的旋轉速度’從而變更傳送輥18&、i9a之旋轉速 度。 新的旋轉速度=(圓周速度+圓周速度之變化量傳送輥 之直徑+傳送輥之直徑之變化量）χπ) 由圓周速度決定部48決定之旋轉速度係傳送至驅動部 32，控制傳送輥18a、19a之旋轉。 圓周速度比並不限於上述者。又，圓周速度決定部48亦 可算出各傳送輥18a、19a之具體之圓周速度作為圓周速度 分佈而取代圓周速度比。於該情形時，作為基準之圓周速 163550.doc -35- 201247565 度分佈及修正後之圓周速度亦設定為具體之速度值。 於第2實施形態中，不僅根據傳送輥之直徑之溫度，調 整旋轉速度，以成為設定之圓周速度分佈，而且，對於圓 周速度分佈，亦根據玻璃帶之溫度修正並設定作為基準之 圓周速度分佈。然而，亦可不根據玻璃帶之當前之溫度修 正作為基準之圓周速度分佈。然而，就製造表面品質優異 之玻璃板之方面而言，較佳為，根據玻璃帶之當前之溫度 修正作為基準之圓周速度分佈。 根據第2實施形態，除第丨實施形態之效果以外，亦考慮 產生於傳送輥1 8a、1 9a中之狀態之變化，以補償該變化之 方式控制各傳送報18a、19a之旋轉速度，因此，可以更高 之精度抑制各傳送報18a、19a之圓周速度與玻璃帶b之傳 送速度之相對速度於複數個傳送輥對18、19中產生差值。 藉此’可防止玻璃帶B與傳送報18a、19a之間之滑移，從 而使玻璃板表面之品質提昇。 又’由於根據玻璃帶B之溫度，修正及設定用以傳送玻 璃帶B之複數個傳送輥對18、丨9之圓周速度分佈，故而可 防止玻璃帶B殘餘，導致玻璃帶b變形，又，可藉由變得 比要求更快，而防止玻璃帶B受到拉伸，導致玻璃帶B破 碎。如此之效果係於玻璃之傳送速度較快，且玻璃帶B之 強度較小且容易變形之厚度為0.5 mm以下之薄板玻璃之製 造中更為明顯。 如第1實施形態中所說明，即便控制徐冷爐12、13内之 環境溫度，如上所述，玻璃帶B之溫度或傳送輥18a、19a I63550.doc -36- 201247565 之溫度亦進行變化。然而，由於該變化相對較小，故而， 即便根據溫度修正上述作為基準之圓周速度比，其修正量 亦較小’未大幅度地改變作為設定之基準之圓周速度比之 分佈。即’設置於溫度區域E内的上述傳送輥對之傳送輥 之圓周速度快於設置於溫度區域D内的傳送輥對之上述傳 送輥之圓周速度之情況並未變化。 上述例係於溫度感測器令檢測徐冷爐12、13内之環境溫 度，並利用該環境溫度算出傳送輥溫度，但亦可直接測定 傳送輥溫度。因此，例如可使用用以連續地測定傳送輥之 溫度之溫度計作為傳送親狀態檢測部。 (第3實施形態） 其次，對作為本發明之第3實施形態的玻璃板製造裝置 進行說明。 此處，著眼於與上述第1及第2實施形態不同之處進行說 明。 第2實施形態係使用檢測傳送輥18a、i9a之溫度的溫度 感測器44及電腦作為傳送輥狀態檢測部47，但此處，如圖 6所示’使用用以檢測傳送輥l8a、19a之磨損量的距離測 定感測器54及未圖示之電腦，作為傳送輥狀態檢測部（以 下亦簡稱為檢測部）57。再者，圓6係說明控制傳送輕對 18、19之旋轉驅動的控制系統之構成之方塊圖。於圖6 中，以與第丨及第2實施形態中參照之符號相同之符號表示 之要素係與第1及第2實施形態中說明之要素相同。檢測部 57係與距離測定感測器54連接。 163550.doc -37· 201247565 距離測定感測器54係對應於各傳送輥對18、19設置有複 數個。距離測定感測器54係檢測驅動用軸間隔。驅動用轴 間隔係指將位於相對玻璃帶B為相同側之傳送輥18a、19a 彼此連結之驅動用軸l8b、19b、及與該驅動用軸18b、 對向配置之驅動用軸18b、19b之距離β傳送輥對18、19係 於成對之傳送輥18a、19a間相互受到偏壓之狀態下夾持玻 璃帶B。因此，各傳送輥18a、19a之磨損量係作為按照下 式算出之輥半徑之與新製品時之輥半徑相比的變化量因傳 送輥18a、19a之磨損所產生，而由檢測部57檢測。於該式 中，由於玻璃帶B之厚度於各傳送輥18a、19&之位置固 疋’故而藉由測定驅動用軸18b、19b彼此之間隔而算出報 半徑。 輥半徑=(驅動用軸間隔-玻璃帶厚度）/2 檢測控制部50之圓周速度決定部58以補償因起因於檢測 之傳送輥18a、19a之磨損的傳送輥18&、19a之半徑之變化 而產生之傳送輥18a、19a之圓周速度之與圓周速度比之偏 差之方式’決定傳送輥18a、19a之旋轉速度。 再者’第3實施形態係利用基於磨損之狀態算出之半經 之變化’作為傳送輥18a、19a之直徑變化，但亦可與第2 實施形態中使用之傳送輥1 8a、19a之溫度一併綜合地應用 該磨損之狀態。於該情形時’傳送輥18a、19a之直徑因磨 損量而變化’並且因熱膨脹而變化。可利用該直徑，以將 伴隨直徑變化而變化之傳送輥18a、19a之圓周速度維持為 圓周速度比之方式’算出傳送輥18a、19a之旋轉速度。 163550.doc •38· 201247565 進而，除傳送輥18a、19a之直徑變化以外，亦可綜合地 與根據由玻璃帶B之熱膨脹引起之玻璃帶B之溫度相應地 變化之玻璃帶B之傳送速度變化，作為玻璃帶之狀態。 根據以上之第3實施形態之玻璃板製造裝置，可補償因 由傳送輥18a、19a之磨損引起之直徑變化所導致的傳送輥 之圓周速度之與圓周速度比之偏差。 再者，於該玻璃板製造裝置中，可構成為距離測定感測 器54讀取傳送輥對18、19之驅動用轴18b、19b之與原點位 置之偏差’而取代傳送輥對18、19之驅動用軸18b、19b彼 此之距離’以檢測磨損量《原點位置係傳送輥丨8a、} 9a為 新製品時驅動用軸18b、19b所在之中心位置，且記憶於記 憶部56中。利用傳送輥對18、19之驅動用軸18b、i9b之與 原點位置之偏差’檢測傳送輥18 a、19 a之磨損量，藉此， 可算出經磨損之傳送輥之輥徑。再者，傳送輥18^、1%之 直在並不限疋於檢測部5 7算出，例如亦可基於磨損量由操 作人員算出。於該情形時，基於由操作人員算出且輸入至 圓周速度決定部58之傳送輥18&、19a之直徑，藉由圓周速 度決定部58而算出傳送輥i8a、19a之旋轉速度。或者，亦 可基於操作人員算出之傳送輥18&、19a之直徑，進一步算 出傳送輥18a、l9a之旋轉速度，且將該算出結果輸入至圓 周速度決定部58。圓周速度決定部58中算出或輸入之旋轉 速度係由圓周速度決定部58決定，且傳遞至驅動部32。 又，傳送輥18a、19a之磨損量、原點位置亦可由操作人員 算出’且可將算出之值記憶於記憶部56中。 163550.doc -39· 201247565 再者’第2實施形態、第3實施形態中以補償產生於傳送 親對18、19之各輥中之傳送輥〗8a、193之直徑變化之方 式，決定傳送輥18a、19a之旋轉速度，但除傳送輥18a、 19 a以外’亦可以補償成形步驟中用作冷卻報對的輥對17 之各輕之直徑變化之方式，決定輥對17之各輥之旋轉速 度°於該情形時’輥對17之各輥係利用上述傳送輥狀態檢 測部47、57之類的檢測部，檢測輥對17之各輥之狀態，並 以基於檢測結果，補償輥對17之各輥之直徑變化之方式， 決定輥對17之各輥之旋轉速度。 一般而言’由於輥對17之各輥之圓周速度以玻璃板之厚 度分佈或玻璃表面之凹凸變得最小之方式設定為適當之 值’故而’與該值偏差會使玻璃板之厚度分佈或玻璃表面 之凹凸劣化。 即，若輥對17之圓周速度變化，則自成形體之下端於輥 對17之間進行之玻璃帶b之拉伸之量、及自輥對17於傳送 親對18之間進行之玻璃帶b之拉伸之量產生變化，（由於成 形體之下端〜輥對17間之玻璃帶B之寬度方向之溫度分佈、 與親對17〜傳送輥對18、19中之玻璃帶之寬度方向之溫度 分佈之形態不同）故導致製造之玻璃板之寬度方向之厚度 分佈或玻璃表面之凹凸之大小產生變化。因此，較佳為， 以補償較對17之各輥之直徑變化之方式，決定輥對17之各 親之旋轉速度。 又’亦可對傳送輥對18、19及輥對17之各輥中之至少任 1個各輥’以補償各輥之直徑變化之方式決定旋轉速度。 163550.doc 201247565 即，以補償冷卻輥或傳送輥之直徑變化之方式，決定輥 之旋轉速度亦可僅對有效之輥進行而無需於所有輥（冷卻 輥、傳送輥）中進行。 ^ 例如可藉由以補償設置於玻璃帶B之寬度方向之中央部 成為軟化點（黏度η成為l〇gn=7 65之溫度）以下之區域内的 傳送輥之直徑變化之方式！決定傳送輥之旋轉速度，且使 傳送輥進行旋轉驅動，而抑制玻璃帶3之滑移等，從而可 抑制於玻璃帶B之表面產生損傷。 右玻璃為軟化點SP以上，則玻璃帶B之黏度較低，不易 產生滑移。另一方面，軟化點卯以下之玻璃帶3係容易產 生滑移。因此，較佳為，以補償設置於玻璃帶3之中央部 為軟化點SP以下之區域内的傳送輥之直徑變化之方式，決 定傳送輥之旋轉速度。 又，於上述徐冷步驟中，由於以補償至少設置於玻璃帶 B之中央部之溫度達到玻璃轉移點Tg以上且軟化點sp以下 之溫度區域内的傳送輥之直徑變化之方式，決定傳送輥之 旋轉速度，故而，玻璃帶B之塑性變形之抑制效果變大。 因此，較佳為，以補償至少設置於玻璃帶B之中央部之溫 度達到玻璃轉移點Tg以上且軟化點sp以下之溫度區域内的 傳送輥之直徑變化之方式，決定傳送輥之旋轉速度。 又，由於設置於玻璃帶；6之中央部之溫度達到玻璃轉移 點Tg以上且軟化點SP以下之溫度區域内的傳送輥容易產生 直徑變化，故而，較佳為，以補償設置於該區域内之傳送 輥之直徑變化之方式，決定傳送輥之旋轉速度。 163550.doc -41 - 201247565 於玻璃溫度相較軟化點sp為高溫之情形時，由於作用於 玻璃之壓縮應力瞬間得到緩和，故而於玻璃帶B中，不易 產生波形之塑性變形。另一方面，於玻璃溫度相較玻璃轉 移點Tg為低溫之情形時，由於玻璃帶b之黏度充分上升， 故而不易產生波形之塑性變形。 又，越為上游側之傳送輥，則越容易產生因磨損或熱膨 脹引起之輥徑變化。即，較佳為，以補償至少設置於溫度 達到玻璃轉移點Tg以上且軟化點sp以下 之溫度區域内的傳 送輥之直徑變化之方式，決定傳送輥之旋轉速度。 (變形例） 於第3實施形態之玻璃板製造裝置之傳送輥狀態檢測部 57，亦可使用將基於傳送輥18&、19&之使用天數算出之傳 送輥18a、19a直徑之變化作為傳送輥183、19a之直徑變化 進行計數之裝置，取代距離測定感測器54。例如對該直徑 變化進行計數之裝置係將傳送輥18a、19a之使用天數傳送 至圓周速度決定部58。圓周速度決定部58係參照記憶於圆 周速度決定部58之記憶部56中且關於各傳送輥18a、19以乍 為以往之更換實績以往更換時輥直徑與其新製品時相比之 磨損量、及直至更換為止之使用天數，並基於該等，算出 每1天之磨損量。其次，參照記憶於記憶部56中之新製品 時之輥直徑，按照下式算出輥直徑。此時，利用自對上述 直徑變化進行計數之裝置傳送之使用天數，如下式所示， 作為每1天之磨損量X使用天數之積相當於傳送輥18&、i9a 之磨損量進行檢測。 163550.doc •42· 201247565 輥直徑=新製品時之直徑-(每1天之磨損量χ使用天數） 圓周速度決定部58係於記憶部56中，對於各傳送輥 18a、19a記憶以往之更換實績 '新製品時之輥直徑。 根據該變形例，可以更簡單之方法，補償因傳送輥 18a、19a之直徑變化而產生之傳送輥18a、19a之圓周速度 之與圓周速度比之偏差。再者，每1天之磨損量亦可由操 作人員算出且使記憶部56進行記憶。又，由上述磨損量引 起之傳送輥18a、19a之直徑變化亦可由操作人員算出，且 傳遞至檢測控制部5 〇或驅動部3 2 »進而，以往更換時之報 直徑之與其新製品時相比之磨損量、及直至更換為止之使 用天數亦可由操作人員算出，且算出之值可記憶於記憶部 56中。 再者’第2實施形態、及第3實施形態之變形例亦可進行 組合。可藉由組合第2實施形態、與第3實施形態之變形 例，而與單獨應用第2實施形態或第3實施形態之情形相 比’以更高之精度補償與圓周速度比相比之偏差。 又，上述塑性變形之問題因利用輥對17將玻璃帶之寬度 方向之兩端部（耳部）急冷而變得容易產生。於玻璃之液相 溫度為1050。(：〜125CTC之高溫之情形時，於利用輥對17將 玻璃帶之寬度方向之兩端部（耳部）急冷時的上述鄰接區 域、與玻璃帶B之中心位置之間，溫度下降量之差較大， 谷易產生塑性變形之問題。因此，使塑性變形不易產生之 本發明之製造方法係適合使用液相溫度為1丨〇〇〇C〜丨25〇〇C 之玻璃的玻璃板之製造。使用液相溫度為i 150〇C〜丨25〇。〇 163550.doc •43_ 201247565 之玻璃的玻璃板之製造更適合本發明，進而較佳為使用液 相溫度為1180°C〜1250°C之玻璃的玻璃板之製造，尤佳為 使用液相溫度為1200°C〜1250°C之玻璃的玻璃板之製造。 液相黏度為較小之150000 dPa.s以下之液晶顯示器或有 機EL顯示器等平板顯示器用玻璃板係於成形步驟時處於容 易產生失透之狀態。因此，必需使成形步驟時之熔融玻璃 之溫度成為高溫，故上述塑性變形之問題變得明顯。因 此，本發明適合使用液相黏度為150000 dPa.s以下之玻璃 的玻璃板之製造，本發明之製造方法更適合使用液相黏度 為35000〜150000 dPa‘s之玻璃的玻璃板之製造。本發明之 製造方法進而適合使用液相黏度為50000〜100000 dPa.s之 玻璃的玻璃板之製造，本發明之製造方法更適合使用液相 黏度為5〇000〜8〇000 (1?3_3之玻璃的玻璃板之製造。 又，上述塑性變形係玻璃之熱膨脹係數越大，則越容易 因急劇之溫度變化下之膨脹差而產生。因此，本發明之製 造方法適合使用熱膨脹係數（100〜300°c )[xl(T7°C ]為30以上 之玻璃的玻璃板之製造。其中，於將本發明之製造方法應 用於平板顯示器用玻璃板之情形時，若熱膨脹係數過大， 則於平板顯示器製造時之熱處理步驟中，存在熱衝擊或熱 收縮量增大之傾向，因此，例如不適合平板顯示器用玻璃 板等。根據以上情況’本發明之製造方法適合熱膨脹係數 (100〜300 C)[xl〇7°C]為30以上且未達4〇之玻璃板之製造， 本發明之製造方法更適合熱膨脹係數為32以上且未達40之 玻璃板之製造’本發明之製造方法更適合熱膨脹係數為34 163550.doc -44 -201247565 Here, in the case where the ambient temperature detected at the arrangement position of each of the transport roller pairs 18, 19 in the cold furnaces 12, 13 is changed with respect to the temperature of the transport roller pair in the above-mentioned reference peripheral speed ratio, The above-described peripheral speed ratio determines the rotational speed of the transport rollers 18a, 19a. Specifically, with respect to the transport rollers 18a, 19a whose temperature is detected by the temperature sensor 44, the detecting portion 47 refers to the thermal expansion coefficient of the rollers among the temperatures of the transport rollers 18a, 19a, and the diameters of the respective transport rollers 8a, 丨93. The reference value is calculated by the following equation, and the amount of expansion (the amount of change in diameter) of the conveying roller 18 & dD=p-DAT dD : expansion amount β : thermal expansion coefficient D: reference value of the diameter of the conveying roller ΔΤ: temperature difference from the temperature of the conveying roller set in the ratio of the circumferential speed of the reference, the circumferential speed determining unit 48 is based on the detection The amount of change in the diameter of the transport roller i8a calculated by the portion 47 is calculated by the following equation, and the amount of change in the peripheral speed is 1, and the new rotational speed is calculated to change the rotational speeds of the transport rollers 18 & and i9a. The new rotation speed = (circumferential speed + change in the circumferential speed; the diameter of the transport roller + the change in the diameter of the transport roller) χ π) The rotational speed determined by the peripheral speed determining portion 48 is transmitted to the drive portion 32, and the transport roller 18a is controlled. , the rotation of 19a. The peripheral speed ratio is not limited to the above. Further, the peripheral speed determining unit 48 can calculate the specific peripheral speed of each of the transport rollers 18a and 19a as a peripheral speed distribution instead of the peripheral speed ratio. In this case, the circumferential speed 163550.doc -35 - 201247565 degree distribution as a reference and the corrected circumferential speed are also set to specific speed values. In the second embodiment, the rotational speed is adjusted not only in accordance with the temperature of the diameter of the transport roller but also as the set peripheral velocity distribution, and the circumferential velocity distribution is also corrected and set as the reference circumferential velocity distribution based on the temperature of the glass ribbon. . However, it is also possible to correct the circumferential velocity distribution as a reference based on the current temperature of the glass ribbon. However, in terms of producing a glass sheet excellent in surface quality, it is preferred to correct the circumferential speed distribution as a reference based on the current temperature of the glass ribbon. According to the second embodiment, in addition to the effects of the third embodiment, the state of rotation of the conveyance rollers 18a and 19a is also considered, and the rotation speed of each of the transmissions 18a and 19a is controlled so as to compensate the change. The relative speed of the peripheral speed of each of the transport marks 18a, 19a and the transport speed of the glass ribbon b can be suppressed with higher precision to produce a difference in the plurality of transport roller pairs 18, 19. Thereby, the slip between the glass ribbon B and the conveyance marks 18a, 19a can be prevented, thereby improving the quality of the surface of the glass sheet. In addition, since the circumferential speed distribution of the plurality of conveying roller pairs 18 and 丨9 for conveying the glass ribbon B is corrected and set according to the temperature of the glass ribbon B, the glass ribbon B can be prevented from remaining, and the glass ribbon b is deformed. The glass ribbon B can be prevented from being stretched by becoming faster than required, causing the glass ribbon B to be broken. Such an effect is more pronounced in the manufacture of sheet glass having a relatively high conveying speed of glass and having a small strength and easily deformed glass ribbon B having a thickness of 0.5 mm or less. As described in the first embodiment, even if the ambient temperature in the quenching furnaces 12, 13 is controlled, as described above, the temperature of the glass ribbon B or the temperature of the conveying rollers 18a, 19a, I63550.doc - 36 - 201247565 also changes. However, since the change is relatively small, even if the circumferential speed ratio as the reference is corrected in accordance with the temperature, the correction amount is small, and the distribution of the peripheral speed ratio as the reference for setting is not largely changed. Namely, the circumferential speed of the conveying roller of the pair of conveying rollers disposed in the temperature region E is not changed faster than the peripheral speed of the conveying roller of the pair of conveying rollers disposed in the temperature region D. The above example is based on the temperature sensor to detect the ambient temperature in the quenching furnaces 12, 13, and uses the ambient temperature to calculate the conveying roller temperature, but it is also possible to directly measure the conveying roller temperature. Therefore, for example, a thermometer for continuously measuring the temperature of the conveying roller can be used as the conveying pro-state detecting portion. (Third Embodiment) Next, a glass sheet manufacturing apparatus according to a third embodiment of the present invention will be described. Here, attention will be paid to the differences from the first and second embodiments described above. In the second embodiment, the temperature sensor 44 for detecting the temperatures of the transport rollers 18a and i9a and the computer are used as the transport roller state detecting portion 47. However, here, as shown in Fig. 6, 'the detecting rollers 18a, 19a are used. The distance measuring sensor 54 and the computer (not shown) of the wear amount are referred to as a conveying roller state detecting unit (hereinafter also simply referred to as a detecting unit) 57. Further, the circle 6 is a block diagram showing the configuration of a control system for controlling the rotational driving of the light pair 18, 19. In Fig. 6, the elements denoted by the same reference numerals as those in the second and second embodiments are the same as those described in the first and second embodiments. The detecting unit 57 is connected to the distance measuring sensor 54. 163550.doc -37·201247565 The distance measuring sensor 54 is provided in plurality for each of the transport roller pairs 18, 19. The distance measuring sensor 54 detects the driving shaft interval. The drive shaft spacing means the drive shafts 18b and 19b that connect the transport rollers 18a and 19a on the same side with respect to the glass ribbon B, and the drive shafts 18b and 19b that are disposed opposite to the drive shaft 18b. The distance-conveying roller pair 18, 19 is held in a state in which the pair of conveying rollers 18a, 19a are biased to each other to sandwich the glass ribbon B. Therefore, the amount of wear of each of the transport rollers 18a and 19a is detected by the detecting portion 57 as a result of the amount of change in the roller radius calculated from the following formula as compared with the roller radius at the time of the new product due to the abrasion of the transport rollers 18a and 19a. . In this formula, since the thickness of the glass ribbon B is fixed at the position of each of the transport rollers 18a, 19 &, the radius of the projection is calculated by measuring the distance between the drive shafts 18b and 19b. Roller radius = (drive shaft interval - glass ribbon thickness) / 2 The peripheral speed determining portion 58 of the detecting portion 50 compensates for variations in the radius of the conveying rollers 18 & 19a due to the abrasion of the detecting conveying rollers 18a, 19a The manner in which the peripheral speeds of the conveying rollers 18a, 19a are generated as a deviation from the peripheral speed ratio determines the rotational speed of the conveying rollers 18a, 19a. In the third embodiment, the change in the half-length calculated by the state of wear is changed as the diameter of the transport rollers 18a and 19a. However, the temperature of the transport rollers 18a and 19a used in the second embodiment may be one. The state of wear is applied comprehensively. In this case, the diameters of the conveying rollers 18a, 19a vary by the amount of wear and change due to thermal expansion. The diameter can be used to calculate the rotational speed of the transport rollers 18a and 19a by maintaining the peripheral speed of the transport rollers 18a and 19a which vary with the diameter change to the peripheral speed ratio. 163550.doc •38·201247565 Further, in addition to the change in the diameter of the conveying rollers 18a and 19a, the conveying speed of the glass ribbon B which varies according to the temperature of the glass ribbon B caused by the thermal expansion of the glass ribbon B can be comprehensively changed. As the state of the glass ribbon. According to the glass sheet manufacturing apparatus of the third embodiment described above, it is possible to compensate for the deviation of the peripheral speed of the conveying roller from the peripheral speed ratio caused by the change in diameter caused by the abrasion of the conveying rollers 18a and 19a. Further, in the glass sheet manufacturing apparatus, the distance measuring sensor 54 reads the deviation of the driving shafts 18b and 19b of the conveying roller pairs 18 and 19 from the origin position, instead of the conveying roller pair 18, The distance between the driving shafts 18b and 19b of 19 is 'to detect the amount of wear. The origin position is the center position of the driving shafts 18b and 19b when the conveying rollers 8a, 9a are new products, and is stored in the memory unit 56. . The amount of wear of the transport rollers 18a, 19a is detected by the deviation of the drive shafts 18b, i9b of the transport roller pairs 18, 19 from the origin position, whereby the roll diameter of the worn transport roller can be calculated. Further, the conveyance roller 18^, 1% is not limited to the calculation by the detecting unit 57, and may be calculated by the operator based on, for example, the amount of wear. In this case, the rotational speeds of the transport rollers i8a and 19a are calculated by the peripheral speed determining unit 58 based on the diameters of the transport rollers 18&, 19a calculated by the operator and input to the peripheral speed determining unit 58. Alternatively, the rotation speeds of the conveying rollers 18a and 19a may be further calculated based on the diameters of the conveying rollers 18&, 19a calculated by the operator, and the calculation result may be input to the circumferential speed determining portion 58. The rotational speed calculated or input by the peripheral speed determining unit 58 is determined by the peripheral speed determining unit 58 and transmitted to the drive unit 32. Further, the amount of wear and the position of the origin of the transport rollers 18a and 19a can be calculated by the operator', and the calculated value can be stored in the memory unit 56. 163550.doc -39·201247565 In the second embodiment and the third embodiment, the conveying roller is determined so as to compensate for the change in the diameter of the conveying rollers 8a and 193 which are generated in the respective rollers of the conveying pair 18 and 19. The rotational speed of 18a, 19a, but in addition to the conveying rollers 18a, 19a, can also compensate for the change in the diameter of each of the roller pairs 17 used as the cooling report in the forming step, and determine the rotation of each roller of the pair of rollers 17. In this case, the respective rollers of the pair of rollers 17 detect the state of each roller of the roller pair 17 by the detecting portions such as the above-described conveying roller state detecting portions 47, 57, and compensate the roller pair 17 based on the detection result. The manner in which the diameters of the rolls vary varies the speed of rotation of the rolls of the pair of rolls 17. In general, 'the circumferential speed of each roller of the pair of rollers 17 is set to an appropriate value such that the thickness of the glass plate is minimized or the unevenness of the glass surface is minimized. Therefore, the deviation from the value causes the thickness distribution of the glass plate or The unevenness of the surface of the glass deteriorates. That is, if the peripheral speed of the pair of rolls 17 is changed, the amount of stretching of the glass ribbon b between the lower end of the formed body between the pair of rollers 17 and the glass ribbon between the pair of rollers 17 and the transporting pair 18 are performed. The amount of stretching of b varies, (due to the temperature distribution in the width direction of the glass ribbon B between the lower end of the molded body and the pair of rollers 17 and the width direction of the glass ribbon in the pair 17 to the pair of transport rollers 18, 19 The shape of the temperature distribution is different), so that the thickness distribution in the width direction of the manufactured glass sheet or the size of the unevenness on the glass surface changes. Therefore, it is preferable to determine the rotational speed of each of the pair of rollers 17 in such a manner as to compensate for the change in the diameter of each of the rollers of the pair 17. Further, the rotation speed may be determined such that at least one of the rollers of the transport roller pairs 18 and 19 and the roller pair 17 compensates for the change in the diameter of each roller. 163550.doc 201247565 That is, in order to compensate for the change in the diameter of the cooling roll or the transfer roll, it is also possible to determine the rotational speed of the roll only for the effective roll without being carried out in all the rolls (cooling rolls, transfer rolls). For example, it is possible to compensate for the change in the diameter of the transfer roller in the region below the softening point (the viscosity η becomes the temperature of l〇gn = 7 65) in the central portion of the width direction of the glass ribbon B by compensating the diameter of the transfer roller. The rotation speed of the conveying roller is determined, and the conveying roller is rotationally driven to suppress the slip of the glass ribbon 3 or the like, thereby suppressing damage to the surface of the glass ribbon B. When the right glass is at a softening point of SP or more, the viscosity of the glass ribbon B is low, and slippage is unlikely to occur. On the other hand, the glass ribbon 3 below the softening point tends to cause slippage. Therefore, it is preferable to determine the rotational speed of the transport roller so as to compensate for the change in the diameter of the transport roller provided in the region where the central portion of the glass ribbon 3 is below the softening point SP. Further, in the above-described cold-cold step, the transfer roller is determined in such a manner as to compensate for the change in the diameter of the transport roller in the temperature region where the temperature at the central portion of the glass ribbon B reaches at least the glass transition point Tg and the softening point sp or less. Since the rotation speed is high, the effect of suppressing the plastic deformation of the glass ribbon B becomes large. Therefore, it is preferable to determine the rotational speed of the transport roller so as to compensate for the change in the diameter of the transport roller in the temperature region where the temperature of the central portion of the glass ribbon B is at least the glass transition point Tg and the softening point sp or less. Further, since the conveying roller provided in the temperature portion of the center portion of the glass ribbon 6 reaches the glass transition point Tg or more and the softening point SP or less is likely to cause a diameter change, it is preferable to provide the compensation in the region. The manner in which the diameter of the transfer roller changes determines the rotational speed of the transfer roller. 163550.doc -41 - 201247565 When the glass temperature is higher than the softening point sp, the compressive stress acting on the glass is momentarily relieved, so that in the glass ribbon B, plastic deformation of the waveform is less likely to occur. On the other hand, when the glass temperature is lower than the glass transition point Tg, since the viscosity of the glass ribbon b is sufficiently increased, plastic deformation of the waveform is less likely to occur. Further, the more the transfer roller on the upstream side, the more likely the roll diameter changes due to abrasion or thermal expansion. That is, it is preferable to determine the rotational speed of the transport roller so as to compensate for the change in the diameter of the transport roller which is provided at least in the temperature region where the temperature reaches the glass transition point Tg or more and the softening point sp or less. (Modification) In the conveying roller state detecting unit 57 of the glass sheet manufacturing apparatus of the third embodiment, a change in the diameter of the conveying rollers 18a and 19a calculated based on the number of days of use of the conveying rollers 18 & 19 & The device for counting the change in diameter of 183, 19a is replaced by the distance measuring sensor 54. For example, the device for counting the change in diameter transmits the number of days of use of the transport rollers 18a, 19a to the peripheral speed determining portion 58. The circumferential speed determining unit 58 refers to the amount of wear that is stored in the memory unit 56 of the peripheral speed determining unit 58 and that is smaller than the time when the roll diameter is changed to the new product in the case of the conventional replacement of the respective transfer rollers 18a and 19, and The number of days of use until replacement, and based on these, the amount of wear per day is calculated. Next, referring to the roll diameter at the time of the new product stored in the memory unit 56, the roll diameter was calculated according to the following formula. At this time, the number of days of use of the apparatus for counting the change in the diameter is measured as follows, and the product of the number of days of wear per day X is equivalent to the amount of wear of the transport rollers 18 & i9a. 163550.doc •42·201247565 Roll diameter = diameter at the time of new product - (wearing amount per day χ days of use) The peripheral speed determining unit 58 is attached to the storage unit 56, and the replacement of each of the transport rollers 18a and 19a is memorable. The performance of the roll diameter of the new product. According to this modification, the deviation of the peripheral speed of the conveying rollers 18a, 19a due to the change in the diameter of the conveying rollers 18a, 19a with the peripheral speed ratio can be compensated for by a simpler method. Further, the amount of wear per day can also be calculated by the operator and the memory unit 56 can be memorized. Further, the change in the diameter of the transport rollers 18a and 19a caused by the above-described wear amount can be calculated by the operator and transmitted to the detection control unit 5 or the drive unit 3 2 » Further, the diameter of the report of the conventional replacement is the same as that of the new product. The amount of wear and the number of days until replacement can be calculated by the operator, and the calculated value can be stored in the memory unit 56. Further, the second embodiment and the modification of the third embodiment may be combined. By combining the second embodiment and the modification of the third embodiment, it is possible to compensate for the deviation from the peripheral speed ratio with higher accuracy than when the second embodiment or the third embodiment is applied alone. . Further, the problem of the plastic deformation described above is caused by the rapid cooling of both end portions (ear portions) in the width direction of the glass ribbon by the pair of rollers 17. The temperature of the liquid phase in the glass is 1050. (In the case of a high temperature of 125CTC, the temperature drop amount is between the adjacent region when the both ends (ear portions) in the width direction of the glass ribbon are rapidly cooled by the roller pair 17 and the center position of the glass ribbon B. The difference is large, and the grain is liable to cause plastic deformation. Therefore, the manufacturing method of the present invention which makes plastic deformation difficult to produce is suitable for the use of a glass plate having a liquidus temperature of 1 丨〇〇〇C to 丨25 〇〇C. Manufactured using a glass plate having a liquidus temperature of i 150 〇C 丨25 〇. 〇163550.doc •43_201247565 is more suitable for the present invention, and further preferably uses a liquidus temperature of 1180 ° C to 1250 ° The manufacture of a glass plate of glass of C is particularly preferably a glass plate using a glass having a liquidus temperature of 1200 ° C to 1250 ° C. A liquid crystal display having a liquid phase viscosity of less than 150,000 dPa·s or an organic EL The glass plate for a flat panel display such as a display is in a state of being easily devitrified during the forming step. Therefore, it is necessary to make the temperature of the molten glass at the time of the molding step high, so that the problem of the plastic deformation becomes remarkable. It is suitable to manufacture a glass plate using a glass having a liquidus viscosity of 150,000 dPa.s or less, and the manufacturing method of the present invention is more suitable for the production of a glass plate using a glass having a liquidus viscosity of 35,000 to 150,000 dPa's. The method is further suitable for the manufacture of a glass plate using a glass having a liquid viscosity of 50,000 to 100,000 dPa.s, and the manufacturing method of the present invention is more suitable for using a glass plate having a liquid viscosity of 5,000 to 8,000 (1?3? Further, the larger the thermal expansion coefficient of the plastically deformable glass, the more easily the difference in expansion due to a sharp temperature change occurs. Therefore, the manufacturing method of the present invention is suitable for using a thermal expansion coefficient (100 to 300 ° C ) [ Xl (T7 ° C ] is a glass plate of glass of 30 or more. When the manufacturing method of the present invention is applied to a glass plate for a flat panel display, if the coefficient of thermal expansion is too large, heat treatment at the time of manufacture of the flat panel display In the step, there is a tendency that the amount of thermal shock or heat shrinkage increases, and therefore, for example, it is not suitable for a glass plate for a flat panel display or the like. According to the above, the manufacturing method of the present invention Suitable for the manufacture of glass sheets having a thermal expansion coefficient (100 to 300 C) [xl 〇 7 ° C] of 30 or more and less than 4 Å, the manufacturing method of the present invention is more suitable for a glass plate having a thermal expansion coefficient of 32 or more and less than 40 Å. Manufacturing 'The manufacturing method of the present invention is more suitable for a thermal expansion coefficient of 34 163550.doc -44 -

201247565 以上且未達40之玻璃板之製造。 (玻璃板之組成） 由本實施形態之玻璃板製造方法及玻璃板製造装置製造 之玻璃板例如可較佳地列舉液晶顯示器用玻璃基板。 液晶顯示器用玻璃基板之玻璃組成可例示以下之玻璃組 成。 較佳為含有：Manufacture of glass sheets of 201247565 and above and less than 40. (Composition of Glass Plate) The glass plate produced by the glass plate manufacturing method and the glass plate manufacturing apparatus of the present embodiment is preferably a glass substrate for liquid crystal display, for example. The glass composition of the glass substrate for a liquid crystal display can exemplify the following glass composition. Preferably, it contains:

Si02 50〜70 質量 ％、 B2O3 〇~15 質量 ％、 AI2O3 5~25 質量 ％、Si02 50~70 mass %, B2O3 〇~15 mass %, AI2O3 5~25 mass %,

MgO 0〜1〇質量％、MgO 0~1〇% by mass,

CaO 0〜20 質量。/〇、CaO 0~20 mass. /〇,

SrO 0〜20質量％、SrO 0 to 20% by mass,

BaO 0〜10質量％、 RO 5〜20質量％(其中r係選自Mg、Ca、Sr及Ba中之玻璃 板中所含之總成分且為至少1種）。 進而，就抑制形成於液晶顯示器用玻璃基板之TFT(Thin Film Transistor，薄膜電晶體）之破壞之觀點而言，較佳為 無驗玻璃（實質上不含驗成分之玻璃）。另一方面，為使熔 融玻璃之熔解性及澄清性提昇，可反而使其含有微量鹼成 分。於該情形時，較佳為r，2〇超過0 05質量％且為2 〇質量 %以下’更佳為r，2〇超過0丨質量％且為2 〇質量％以下（其中 R·係選自Li、Na及K中之玻璃板中所含之總成分且為至少1 種）。 163550.doc •45- 201247565 (實施例） 為研究本發明之效果，使用先前之玻璃板製造裝置與本 實施形態之玻璃板製造裝置，分別按照下述方法製造玻璃 帶’測定產生於玻璃帶中之波狀之變形。再者，所用之玻 璃板製造裝置均為圖3及圖4所示之下拉法之玻璃板製造裝 置1 ’玻璃係使用含有下述所示成分之鋁矽酸鹽玻璃。BaO is 0 to 10% by mass and RO is 5 to 20% by mass (wherein r is at least one selected from the total components contained in the glass plate of Mg, Ca, Sr and Ba). Further, from the viewpoint of suppressing the destruction of a TFT (Thin Film Transistor) formed on a glass substrate for a liquid crystal display, it is preferable to have no glass (substantially free of glass of the component). On the other hand, in order to improve the meltability and clarity of the molten glass, it is possible to contain a trace amount of a base component instead. In this case, it is preferable that r, 2 〇 exceeds 0.05 mass% and is less than 2 〇 mass%, more preferably r, 2 〇 exceeds 0 丨 mass%, and is 2 〇 mass% or less (where R· is selected It is at least one of the total components contained in the glass plates of Li, Na, and K. 163550.doc •45-201247565 (Example) In order to study the effects of the present invention, the glass sheet manufacturing apparatus of the present embodiment and the glass sheet manufacturing apparatus of the present embodiment were respectively produced by the following method. The wavy deformation. Further, the glass plate manufacturing apparatus used is a glass plate manufacturing apparatus 1 of the lower drawing method shown in Figs. 3 and 4, and the glass is an aluminosilicate glass containing the components shown below.

Si02 60質量％Si02 60% by mass

Al2〇3 19.5 質量 〇/〇 b2o3 10質量％Al2〇3 19.5 Quality 〇/〇 b2o3 10% by mass

CaO 5質量％CaO 5 mass%

SrO 5質量％SrO 5 mass%

Sn02 0.5 質量 〇/〇。 作為實施例1，按照上述第1實施形態，藉由圓周速度決 定部38 ’而以設置於相較玻璃帶b之溫度達到徐冷點AP之 位置為下游之溫度區域]E内的傳送輥19a之圓周速度比設置 於在徐冷爐内傳送之玻璃帶B之溫度達到玻璃轉移點Tg以 上且軟化點SP以下之溫度區域d内的傳送輥18a之圓周速度 快0.6°/。之方式’決定傳送輥i9a之圓周速度，且基於決定 後之圓周速度，控制各傳送輥18a、19a之旋轉驅動，以0.5 mm厚度製作寬度方向長2〇〇〇 mmx長度方向長2500 mm之 大小之液晶顯示器用玻璃基板。 又’作為實施例2係除了按照上述第2實施形態，以保持 圓周速度分佈之方式決定各傳送輥18a、19a之圓周速度， 且基於決定之傳送輥之圓周速度，使傳送輥i 8a、i9a進行 163550.doc 201247565 旋轉驅動之方面以外，以與實施例1相同之條件製作0.5 mm厚度之液晶顯示器用玻璃基板。 作為實施例3 ’按照上述第1實施形態，藉由圓周速度決 定部38 ’而以設置於相較玻璃帶B之溫度達到徐冷點AP之 位置為下游之溫度區域E内的傳送輥19a之圓周速度比設置 於在徐冷爐内傳送之玻璃帶B之溫度達到玻璃轉移點Tg以 上且軟化點SP以下之溫度區域D内的傳送輥18a之圓周速度 快0.6%之方式，決定傳送輥19a之圓周速度，且基於決定 後之圓周速度’控制各傳送輥18a、19a之旋轉驅動，以〇.7 mm厚度製作寬度方向長2〇〇〇 mmx長度方向長2500 大小之液晶顯示器用玻璃基板。 作為比較例1係除了使所有傳送輥18a、l9a之圓周速度 相同之方面以外’以與實施例丨相同之條件，製作〇 5 mm 厚度之液晶顯示器用玻璃基板。 又，作為比較例2係除了使所有傳送輥18a、19a之圓周 速度相同之方面以外’以與實施例3相同之條件，製作0.7 mm厚度之液晶顯示器用玻璃基板。 mm ° 對於所得之實施例1〜3、比較例U之液晶顯示器用玻璃 基板，利用厚度規計測產生於液晶顯示器用玻璃基板之鄰 接區域中之波形之變形（板厚方向之凹凸）。其結果，於實 施例1中’波形之變形（凹凸之高度）為〇 〇 5 mm以下。於實 施例2中，波形之變形為〇 〇4 mm以下。於實施例3中波 ^之變形為0.05 mm。於比較例1中，波形之變形為〇 4 mm。於比較例2中’波形之變形為〇 25 163550.doc •47· 201247565 再者，波形之變形係於厚度為〇·5 mm及厚度為0.7 mm之 液晶顯示器用玻璃基板中，將厚度方向為〇 2 mm以内者設 為滿足表面品質。 利用先前之製造裝置所得之比較例1之液晶顯示器用玻 璃基板係波形變形下之階差為0.4 mm，故未滿足上述表面 品質。利用先前之製造裝置所得之比較例2之液晶顯示器 用玻璃基板係波形變形下之階差為0.25 mm，故未滿足上 述表面品質。 與此相對，利用本實施形態之製造裝置1所得之實施例 1〜3之液晶顯示器用玻璃基板係波形變形下之階差為〇 〇5 mm以下’故滿足上述表面品質。實施例1之波形之凹凸之 高度係改善為1 /8。實施例2之波形之凹凸之高度係改善為 1/10。實施例3之波形之凹凸之高度係改善為丨/5。 以上，對本發明之玻璃板之製造方法及玻璃板製造裝置 詳細地進行了說明，無勿庸置疑，本發明並不限定於上述 實施形態，於不脫離本發明之精神之範圍内，亦可進行各 種改良或變更。 【圖式簡單說明】 圖1係表示本實施形態之玻璃板之製造方法之流程之一 例之圖。 圖2係說明本發明第1實施形態之玻璃板製造裝置之内部 之平面圖。 圖3係圖2之III線箭線剖面圖。 圖4係說明本發明第1實施形態之控制傳送輥對之旋轉驅 163550.doc •48· 201247565 動的控制系統之構成之方塊圖。 圖5係說明本發明第2實施形態之控制傳送輥對之旋轉驅 動的控制系統之構成之方塊圖β 圖6係說明本發明第3實施形態之控制傳送輥對之旋轉驅 動的控制系統之構成之方塊圖。 圖7係說明先前之玻璃板製造裝置之内部之平面圖。 【主要元件符號說明】 1 玻璃板製造裝置 2 成形裝置 3 徐冷裝置 18、19 傳送輥對 18a、19a 傳送輥 30 檢測控制部 40 檢測控制部 50 檢測控制部 32 驅動部 34 溫度感測器 38 圓周速度決定部 44 溫度感測器 47 傳送輥狀態檢測部 48 圓周速度決定部 54 距離測定感測器 57 傳送輥狀態檢測部 58 圓周速度決定部 163550.doc •49- 201247565 A AP B C D E S10 S20 S30 S40 S50 S60 S70 SP Tg 熔融玻璃 徐冷點 玻璃帶 玻璃板 玻璃帶之溫度達到玻璃轉移點以上且 為軟化點以下之溫度區域 玻璃帶之溫度達到徐冷點以下之溫度區域 熔解步驟 澄清步驟 攪拌步驟 成形步驟 徐冷步驟 裁板步驟 形狀加工步驟 軟化點 玻璃轉移點 163550.doc -50·Sn02 0.5 Mass 〇/〇. In the first embodiment, according to the first embodiment, the peripheral speed determining unit 38' is provided with the transport roller 19a disposed in the temperature region _E downstream of the position where the temperature of the glass ribbon b reaches the freezing point AP. The circumferential speed is 0.6°/faster than the circumferential speed of the conveying roller 18a in the temperature region d above the glass transition point Tg and the temperature lower than the softening point SP, which is set in the glass ribbon B conveyed in the quench furnace. The method of 'determining the peripheral speed of the conveying roller i9a, and controlling the rotational driving of each of the conveying rollers 18a, 19a based on the determined peripheral speed, is made to have a width of 2 mm in the width direction and a length of 2,500 mm in the longitudinal direction at a thickness of 0.5 mm. A glass substrate for a liquid crystal display. Further, as the second embodiment, in accordance with the second embodiment, the circumferential speeds of the respective conveying rollers 18a and 19a are determined so as to maintain the circumferential speed distribution, and the conveying rollers i 8a and i9a are made based on the determined peripheral speed of the conveying roller. A glass substrate for a liquid crystal display having a thickness of 0.5 mm was produced under the same conditions as in Example 1 except that 163550.doc 201247565 was used for the rotational driving. In the third embodiment, according to the first embodiment, the peripheral speed determining unit 38' is disposed in the transporting roller 19a in the temperature region E downstream of the position where the temperature of the glass ribbon B reaches the freezing point AP. The circumferential speed is determined in such a manner that the circumferential speed of the conveying roller 19a is set to be 0.6% faster than the circumferential speed of the conveying roller 18a in the temperature region D above the glass transition point Tg and the softening point SP or lower. The speed and the rotational speed of each of the transport rollers 18a and 19a are controlled based on the determined peripheral speed, and a glass substrate for a liquid crystal display having a length of 2 mm in the width direction and a length of 2,500 in the longitudinal direction is produced at a thickness of 〇7 mm. In Comparative Example 1, a glass substrate for a liquid crystal display having a thickness of 5 mm was produced under the same conditions as in Example 以外 except that the peripheral speeds of all the transport rollers 18a and 19a were the same. Further, in Comparative Example 2, a glass substrate for a liquid crystal display having a thickness of 0.7 mm was produced under the same conditions as in Example 3 except that the circumferential speeds of all the transport rollers 18a and 19a were the same. In the glass substrates for liquid crystal displays of Examples 1 to 3 and Comparative Example U, the deformation of the waveform (the unevenness in the thickness direction) generated in the adjacent region of the glass substrate for liquid crystal display was measured by a thickness gauge. As a result, in the first embodiment, the deformation of the waveform (the height of the unevenness) was 〇 〇 5 mm or less. In the second embodiment, the waveform has a deformation of 〇 〇 4 mm or less. In Example 3, the wave distortion was 0.05 mm. In Comparative Example 1, the waveform was deformed to 〇 4 mm. In Comparative Example 2, the deformation of the waveform is 〇25 163550.doc •47·201247565 Furthermore, the deformation of the waveform is in a glass substrate for a liquid crystal display having a thickness of 〇·5 mm and a thickness of 0.7 mm, and the thickness direction is 〇 2 mm or less is set to meet the surface quality. The glass substrate of the liquid crystal display of Comparative Example 1 obtained by the prior art apparatus had a step difference of 0.4 mm under the waveform deformation, and thus the above surface quality was not satisfied. The glass substrate of the liquid crystal display of Comparative Example 2 obtained by the prior art apparatus had a step difference of 0.25 mm under the waveform deformation, and thus the above surface quality was not satisfied. On the other hand, in the glass substrates for liquid crystal displays of Examples 1 to 3 obtained by the manufacturing apparatus 1 of the present embodiment, the step difference under the waveform deformation of the liquid crystal display is 〇 5 mm or less, so that the surface quality is satisfied. The height of the unevenness of the waveform of Example 1 was improved to 1 / 8. The height of the irregularities of the waveform of Example 2 was improved to 1/10. The height of the irregularities of the waveform of Example 3 was improved to 丨/5. The glass sheet manufacturing method and the glass sheet manufacturing apparatus of the present invention have been described in detail above, and it is needless to say that the present invention is not limited to the above-described embodiments, and may be carried out without departing from the spirit of the invention. Various improvements or changes. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing an example of a flow of a method for producing a glass sheet according to the present embodiment. Fig. 2 is a plan view showing the inside of a glass sheet manufacturing apparatus according to a first embodiment of the present invention. Figure 3 is a cross-sectional view of the arrow line of the line III of Figure 2. Fig. 4 is a block diagram showing the configuration of a control system for controlling the rotation of the transport roller pair according to the first embodiment of the present invention, 163550.doc • 48·201247565. Fig. 5 is a block diagram showing a configuration of a control system for controlling rotational driving of a pair of conveying rollers according to a second embodiment of the present invention. Fig. 6 is a view showing a configuration of a control system for controlling rotational driving of a pair of conveying rollers according to a third embodiment of the present invention. Block diagram. Figure 7 is a plan view showing the inside of the prior glass plate manufacturing apparatus. [Description of main component symbols] 1 Glass plate manufacturing apparatus 2 Forming apparatus 3 Pressing apparatus 18, 19 Transfer roller pairs 18a, 19a Transfer roller 30 Detection control unit 40 Detection control unit 50 Detection control unit 32 Driving unit 34 Temperature sensor 38 Circumferential speed determining unit 44 temperature sensor 47 transporting roller state detecting unit 48 peripheral speed determining unit 54 distance measuring sensor 57 transporting roller state detecting unit 58 peripheral speed determining unit 163550.doc • 49- 201247565 A AP BCDE S10 S20 S30 S40 S50 S60 S70 SP Tg Molten glass cold-cold glass ribbon glass plate The temperature of the glass ribbon reaches the temperature above the glass transition point and is below the softening point. The temperature of the glass ribbon reaches the temperature below the freezing point. Melting step Clarification step Stirring step Forming step, cold step, cutting step, step shape, processing step, softening point, glass transfer point, 163550.doc -50·

Claims (1)

201247565 七、申請專利範圍： 1· 一種玻璃板之製造方法，其特徵在於包括： 熔解步驟，其將玻璃原料熔解，製造熔融玻璃； 成形步驟，其係利用溢流下拉法，使熔融玻璃成形， 形成玻璃帶；及 徐冷步驟，其係一面利用沿上述玻璃帶之傳送方向設 置之複數個傳送輥對，夾持與上述玻璃帶之寬度方向之 兩端部在上述寬度方向上鄰接之附近區域，一面朝向下 方曳引上述玻璃帶，進行徐冷； 上述成形步驟係藉由將自成形體溢流且在上述成形體 之側壁流下之溶融玻璃於上述成形體之下端黏合而形成 上述玻璃帶後’以快於上述玻璃帶之寬度方向之中央部 之方式，將上述玻璃帶之寬度方向之上述兩端部冷卻， 上述徐冷步驟係以避免上述玻璃帶中產生塑性變形之 方式’於上述玻璃帶之溫度達到玻璃轉移點以上且玻璃 軟化點以下之溫度區域内’使張力於上述傳送方向上作 用於上述玻璃帶。 2. 如請求項1之玻璃板之製造方法，其中上述徐冷步驟係 使上述傳送輥對中之較上述玻璃帶之溫度達到玻璃徐冷 點之位置更設置於下游側的傳送輥對之傳送輥之圓周速 度’快於上述傳送輥對中之設置於上述玻璃帶之溫度達 到玻璃轉移點以上且玻璃軟化點以下之溫度區域内的傳 送輥對之傳送輥之圓周速度。 3. 如請求項1之玻璃板之製造方法’其中上述玻璃板係板 163550.doc 201247565 厚為0.5 mm以下。 4. 如請求項1之玻璃板之製造方法，其令上述徐冷步驟係 以避免在上述玻璃帶之寬度方向内側鄰接於由上述傳送 親央持之部分之鄰接區域中產生塑性變形之方式，於上 述鄰接區域之溫度達到玻璃轉移點以上且玻璃軟化點以 下之溫度區域内，使傳送方向之張力作用於上述玻璃 帶。 5. 如請求項1之玻璃板之製造方法，其中上述徐冷步驟係 使上述傳送輥對中之相較與上述玻璃帶之由傳送輥夹持 之部分在上述玻璃帶之寬度方向内側鄰接之鄰接區域之 溫度達到玻璃徐冷點之位置更設置於下游側的傳送輥對 之傳送輥之圓周速度，快於上述傳送輥對中之設置於上 述鄰接區域之溫度達到玻璃轉移點以上且玻璃軟化點以 下之溫度區域内的傳送輥對之傳送輥之圓周速度。 6. 如請求項1之玻璃板之製造方法，其中包括以下步驟： 於上述成形體之下端將上述熔融玻璃黏合而形成玻璃帶 後，將上述兩端部進行冷卻，直至上述玻璃帶之寬度方 向之上述兩端部之黏度設為η時達到1〇gTi = 9以上為止， 且，上述兩端部之冷卻速度快於上述玻璃帶之寬度方向 之中央部之冷卻速度。 7. 如明求項1之玻璃板之製造方法，其中上述徐冷步驟係 以於上述玻璃帶之寬度方向之中央部，張力作用於玻璃 帶之傳送方向之方式，至少於上述玻璃帶之寬度方向之 中央部之溫度自玻璃徐冷點加上15〇〇c之溫度至自玻璃 163550.doc 201247565 應變點減去20(TC之溫度的溫度區域内，進行溫度控 制，以使上述玻璃帶之寬度方向之中央部之冷卻速度快 於上述寬度方向之兩端部之冷卻速度。 8.如請求項1之玻璃板之製造方法，其中於上述玻璃帶之 寬度方向之中央部之溫度為玻璃軟化點以上之區域内， 以上述玻璃帶之寬度方向之兩端部低於由上述兩端部夾 隔之中央部之溫度，且上述中央部之溫度成為均一之方 式，控制上述玻璃帶之溫度，且 以於上述玻璃帶之寬度方向之中央部，玻璃帶傳送方 向之張力進行作用之方式，於上述玻璃帶之上述中央部 之溫度未達玻璃軟化點且為玻璃應變點以上之區域内， 始连 U :士，τΑ· ^201247565 VII. Patent application scope: 1. A method for manufacturing a glass plate, comprising: a melting step of melting a glass raw material to produce molten glass; and a forming step of forming a molten glass by an overflow down-draw method, Forming a glass ribbon; and a cold cooling step of arranging a plurality of transport roller pairs disposed along a transport direction of the glass ribbon, and sandwiching adjacent portions of the glass ribbon in the width direction adjacent to the width direction The glass ribbon is pulled downward to perform the cold cooling. The forming step is performed by bonding the molten glass that has overflowed from the molded body and flows down the side wall of the molded body to the lower end of the molded body to form the glass ribbon. 'cooling the both end portions in the width direction of the glass ribbon so as to be faster than the central portion in the width direction of the glass ribbon, and the cold cooling step is to prevent plastic deformation in the glass ribbon The temperature of the belt reaches the temperature above the glass transition point and below the softening point of the glass. The above glass ribbon is used in the above conveying direction. 2. The method for producing a glass sheet according to claim 1, wherein the cold-cooling step is such that the transfer roller pair is disposed on the downstream side of the transfer roller pair at a position where the temperature of the glass ribbon is higher than the temperature of the glass ribbon. The peripheral speed of the rolls is faster than the peripheral speed of the transfer rolls of the pair of transfer rolls disposed in the pair of transfer rolls disposed in a temperature region above the glass transition point and below the glass softening point. 3. The method for producing a glass sheet according to claim 1, wherein the glass sheet system 163550.doc 201247565 has a thickness of 0.5 mm or less. 4. The method for producing a glass sheet according to claim 1, wherein the step of quenching is performed to prevent a plastic deformation in a side of the width direction of the glass ribbon adjacent to a portion adjacent to the portion to be transferred by the transfer, The tension in the transport direction acts on the glass ribbon in a temperature region where the temperature of the adjacent region reaches a temperature above the glass transition point and below the glass softening point. 5. The method of producing a glass sheet according to claim 1, wherein the step of cooling is such that a portion of the pair of conveying rollers is adjacent to a portion of the glass ribbon sandwiched by the conveying roller in a width direction inner side of the glass ribbon. The temperature of the adjacent region reaches the freezing point of the glass, and the circumferential speed of the conveying roller of the pair of conveying rollers disposed on the downstream side is faster than the temperature of the pair of conveying rollers disposed above the adjacent region to reach the glass transition point and the glass softens. The peripheral speed of the transfer roller of the transfer roller pair in the temperature zone below the point. 6. The method for producing a glass sheet according to claim 1, comprising the steps of: bonding the molten glass to a lower end of the formed body to form a glass ribbon, and cooling the both end portions until a width direction of the glass ribbon; When the viscosity of the both end portions is η, it is 1 〇 gTi = 9 or more, and the cooling speed of the both end portions is faster than the cooling rate at the central portion in the width direction of the glass ribbon. 7. The method of producing a glass sheet according to claim 1, wherein the step of cooling is performed at a central portion in a width direction of the glass ribbon, and a tension acts on a conveying direction of the glass ribbon at least in a width of the glass ribbon. The temperature in the central part of the direction is from the temperature of the glass cold point plus the temperature of 15 °c to the temperature range of the glass 163550.doc 201247565 strain point minus 20 (the temperature of the TC, temperature control is performed to make the glass ribbon The cooling rate of the central portion in the width direction is faster than the cooling rate at the both ends in the width direction. The method for producing a glass sheet according to claim 1, wherein the temperature in the central portion in the width direction of the glass ribbon is glass softening. In the region above the point, the temperature of the glass ribbon is controlled such that the end portions of the glass ribbon in the width direction are lower than the temperature of the central portion sandwiched by the both end portions, and the temperature of the central portion is uniform. And in the central portion in the width direction of the glass ribbon, the tension in the conveying direction of the glass ribbon acts on the temperature of the central portion of the glass ribbon Up to the softening point of the glass and above the strain point of the glass, the beginning of U: Shi, τΑ· ^ 溫度區域内’控制上述玻璃帶之溫度，心 之寬度方向之上述兩端部與上述中央部 失。 如請求項1之玻璃板之製造方法，其中以 之寬度方 其中以於上述玻璃帶In the temperature region, the temperature of the glass ribbon is controlled, and the both end portions in the width direction of the core and the central portion are lost. The method for producing a glass sheet according to claim 1, wherein a width of the glass sheet is 之方式， 變點附近 破璃帶之 部變低。 其中上述徐冷步驟係 如請求項1之玻璃板之製造方法，装 163550.doc 201247565 使上述傳送輥對中之相較上述玻璃帶之溫度達到玻璃徐 冷點之位置更設置於下游側的傳送輥對之傳送輥之圓周 速度，相較上述玻璃輥對中之設置於上述玻璃帶之溫度 達到玻璃轉移點以上且玻璃軟化點以下之溫度區域内的 傳送輥對之傳送輥之圓周速度快0.03〜2%。 11_如請求項1之玻璃板之製造方法，其中上述玻璃板之寬 度方向之長度係為1000 mm以上。 12. 如請求項1之玻璃板之製造方法，其中上述徐冷步驟係 以200 m/小時以上之傳送速度朝向下方曳引上述玻璃 帶，進行徐冷。 13. —種玻璃板之製造方法，其特徵在於包括： 溶解步驟，其將玻璃原料熔解，製造熔融玻璃； 成形步驟，其係利用溢流下拉法使熔融玻璃成形，形 成玻璃帶；及 徐冷步驟，其係一面利用沿上述玻璃帶之傳送方向設 置之複數個傳送輥對’夾持與上述玻璃帶之寬度方向之 兩端部在上述寬度方向上鄰接之附近區域，一面朝向下 方矣引上述玻璃帶進行徐冷，形成板厚為〇 5 mm以下之 玻璃帶， 上述成形步驟係藉由於上述成形體之下端將自成形體 溢流且在上述成形體之側壁流下之熔融玻璃黏合而形成 上述玻璃帶， 上述徐冷步驟係使上述傳送輥對中之相較上述玻璃帶 之溫度達到徐冷點之位置更設置於下游側的傳送輥對之 163S50.doc 201247565 傳送輥之圓周速度，快於上述傳送輥對中之設置於上述 玻璃帶之溫度達到玻璃轉移點以上且軟化點以下之溫度 區域内的傳送輥對之上述傳送輥之圓周速度。 14. 一種玻璃板製造裝置，其特徵在於包括： 成形裝置’其利用下拉法自熔融玻璃使玻璃帶成形；及 徐冷裝置，其係一面利用複數個傳送輥對，夾持與上 述玻璃帶之寬度方向之兩端部在上述寬度方向上鄰接之 附近區域，一面朝向下方良引上述玻璃帶進行徐冷，形 成板厚為0.5 mm以下之上述玻璃帶； 上述徐冷裝置係包括上述複數個傳送輥對及驅動部， 上述複數個傳送輥對之一個係設置於上述玻璃帶之溫 度達到玻璃轉移點以上且軟化點以下之第！溫度區域 内:上述複數個傳魏對之另—個係設置於上述玻璃帶 之恤度達到玻璃徐冷點以下之第2溫度區域内且藉由 朝下方拉人上述玻璃帶而傳送上述玻璃帶， ::驅動部係以設置於上述第2溫度區域内之傳送輕 之送輕之圓周速度快於設置於上述第丨溫度區域内 之傳送較之圓周速度之方式，使上述傳送親旋轉壤動域内 163550.docIn the way, the part of the broken ribbon near the change point becomes lower. Wherein the above-mentioned cold-cold step is the method for producing the glass plate of claim 1, which is equipped with 163550.doc 201247565 to transfer the center of the transfer roller to the downstream side at a position where the temperature of the glass ribbon reaches the glass cold spot. The peripheral speed of the transfer roller of the pair of rolls is 0.03 faster than the circumferential speed of the transfer roller of the pair of the glass rolls disposed in the temperature range of the glass ribbon above the glass transition point and below the glass softening point. ~2%. The method of producing a glass sheet according to claim 1, wherein the length of the glass sheet in the width direction is 1000 mm or more. 12. The method of producing a glass sheet according to claim 1, wherein the step of cooling is carried out by pulling the glass ribbon downward at a conveying speed of 200 m/hr or more. 13. A method of producing a glass sheet, comprising: a dissolving step of melting a glass raw material to produce a molten glass; and a forming step of forming a molten glass by an overflow down-draw method to form a glass ribbon; and a step of squeezing the above-mentioned regions adjacent to each other in the width direction by a plurality of conveying roller pairs disposed along the conveying direction of the glass ribbon in the vicinity of the width direction of the glass ribbon The glass ribbon is cold-cooled to form a glass ribbon having a thickness of 〇5 mm or less, and the forming step is formed by adhering the molten glass which overflows from the molded body and flows down the side wall of the molded body by the lower end of the molded body. The glass ribbon, the above-mentioned cold cooling step is such that the temperature of the pair of conveying rollers is higher than the temperature of the glass ribbon to the position of the freezing point, and the circumferential speed of the conveying roller pair of the downstream conveying roller is set to 163S50.doc 201247565. a temperature of the pair of conveying rollers disposed at a temperature above the glass transition point and below a softening point of the glass ribbon The peripheral speed of the above-mentioned conveying roller of the conveying roller pair in the area. A glass sheet manufacturing apparatus, comprising: a molding apparatus that shapes a glass ribbon from a molten glass by a down-draw method; and a cold cooling apparatus that uses a plurality of conveying roller pairs on one side to sandwich the glass ribbon The glass ribbons in the width direction are adjacent to each other in the vicinity of the width direction, and the glass ribbon is cooled toward the lower side to form the glass ribbon having a thickness of 0.5 mm or less. The above-mentioned subcooling apparatus includes the plurality of transmissions. In the pair of rollers and the driving unit, one of the plurality of conveying roller pairs is disposed at a temperature above the glass transition point and below the softening point of the glass ribbon! In the temperature region, the plurality of the plurality of fibers are disposed in the second temperature region of the glass ribbon below the glass cold point and the glass ribbon is conveyed by pulling the glass ribbon downward. , the :: drive unit is configured to transmit the light in the second temperature region and the circumferential speed is faster than the circumferential speed in the second temperature region to make the transmission rotate Within the domain 163550.doc
TW101111556A 2011-03-30 2012-03-30 Manufacture method of glass plate and manufacturing apparatus for glass plate TWI417254B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011075418 2011-03-30

Publications (2)

Publication Number Publication Date
TW201247565A true TW201247565A (en) 2012-12-01
TWI417254B TWI417254B (en) 2013-12-01

Family

ID=46930225

Family Applications (2)

Application Number Title Priority Date Filing Date
TW102111602A TWI552969B (en) 2011-03-30 2012-03-30 Glass plate manufacturing method and glass plate manufacturing apparatus
TW101111556A TWI417254B (en) 2011-03-30 2012-03-30 Manufacture method of glass plate and manufacturing apparatus for glass plate

Family Applications Before (1)

Application Number Title Priority Date Filing Date
TW102111602A TWI552969B (en) 2011-03-30 2012-03-30 Glass plate manufacturing method and glass plate manufacturing apparatus

Country Status (5)

Country Link
JP (2) JP5260794B2 (en)
KR (2) KR101300858B1 (en)
CN (2) CN103183464B (en)
TW (2) TWI552969B (en)
WO (1) WO2012132454A1 (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6388210B2 (en) * 2014-12-22 2018-09-12 日本電気硝子株式会社 Glass ribbon manufacturing apparatus and glass ribbon manufacturing method
CN107428581A (en) * 2015-03-30 2017-12-01 安瀚视特控股株式会社 The manufacture method of glass substrate
JP6514588B2 (en) * 2015-06-30 2019-05-15 ＡｖａｎＳｔｒａｔｅ株式会社 Method of manufacturing glass substrate
CN105776823A (en) * 2016-01-25 2016-07-20 徐林波 Flat glass entrainment forming method
JP6299784B2 (en) * 2016-02-17 2018-03-28 旭硝子株式会社 Glass plate and method for producing glass plate
JP6708970B2 (en) * 2016-12-15 2020-06-10 日本電気硝子株式会社 Method for manufacturing glass article
KR102139863B1 (en) * 2017-09-29 2020-07-31 아반스트레이트 가부시키가이샤 Method for manufacturing glass substrate
KR20190038349A (en) 2017-09-29 2019-04-08 아반스트레이트 가부시키가이샤 Method for manufacturing glass substrate and glass substrate manufacturing apparatus
KR102136931B1 (en) * 2017-09-29 2020-07-23 아반스트레이트 가부시키가이샤 Method for manufacturing glass substrate and glass substrate manufacturing apparatus
KR102179884B1 (en) * 2017-12-26 2020-11-18 아반스트레이트 가부시키가이샤 Method for manufacturing glass substrate and glass substrate manufacturing apparatus
KR20210022045A (en) * 2018-06-21 2021-03-02 쇼오트 글라스 테크놀로지스 (쑤저우) 코퍼레이션 리미티드. Chemically toughened glass article having no optical orange skin and method for producing the same
WO2020104497A1 (en) * 2018-11-21 2020-05-28 Schott Ag Method and device for producing thin glass, and thin glass strip
JP7092018B2 (en) * 2018-12-18 2022-06-28 日本電気硝子株式会社 Glass plate manufacturing method
CN111176165B (en) * 2019-12-30 2021-01-26 彩虹显示器件股份有限公司 Automatic adjusting system and method for substrate glass pulling roller
CN112759241B (en) * 2021-01-29 2024-02-23 彩虹显示器件股份有限公司 Glass stress control method
CN113277719B (en) * 2021-04-30 2022-08-30 彩虹（合肥）液晶玻璃有限公司 Plate glass plate height control device
CN113880405A (en) * 2021-09-24 2022-01-04 彩虹（合肥）液晶玻璃有限公司 Self-correcting traction roller structure for liquid crystal substrate glass forming

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05124827A (en) * 1991-10-31 1993-05-21 Hoya Corp Device for producing glass plate and production of glass plate
JPH10291827A (en) * 1997-04-16 1998-11-04 Hoya Corp Production of glass pane and apparatus for production therefor
JP3335291B2 (en) * 1997-04-16 2002-10-15 ホーヤ株式会社 Method and apparatus for manufacturing glass plate
JP3586142B2 (en) * 1999-07-22 2004-11-10 エヌエッチ・テクノグラス株式会社 Glass plate manufacturing method, glass plate manufacturing apparatus, and liquid crystal device
KR100524842B1 (en) * 2002-09-25 2005-10-28 삼성코닝정밀유리 주식회사 Method for the preparation of a plate glass having a low residual stress
WO2005055284A2 (en) * 2003-11-28 2005-06-16 Corning Incorporated Method of fabricating low-warp flat glass
JP4753067B2 (en) * 2005-08-18 2011-08-17 日本電気硝子株式会社 Sheet glass forming method
US20070062219A1 (en) * 2005-09-22 2007-03-22 Blevins John D Methods of fabricating flat glass with low levels of warp
JP5076443B2 (en) * 2006-10-24 2012-11-21 日本電気硝子株式会社 Glass ribbon manufacturing apparatus and manufacturing method thereof
US8627684B2 (en) * 2007-10-29 2014-01-14 Corning Incorporated Pull roll apparatus and method for controlling glass sheet tension
JP5428288B2 (en) * 2007-12-25 2014-02-26 日本電気硝子株式会社 Glass plate manufacturing method and manufacturing equipment
US8037716B2 (en) * 2009-02-27 2011-10-18 Corning Incorporated Thermal control of the bead portion of a glass ribbon
JP5611572B2 (en) * 2009-05-18 2014-10-22 コーニング インコーポレイテッド Stress control area
JP5375385B2 (en) * 2009-07-13 2013-12-25 日本電気硝子株式会社 Manufacturing method of glass substrate
JP5669006B2 (en) * 2010-10-19 2015-02-12 日本電気硝子株式会社 Strip glass film manufacturing method and strip glass film manufacturing apparatus

Also Published As

Publication number Publication date
JP5260794B2 (en) 2013-08-14
JPWO2012132454A1 (en) 2014-07-24
KR20130122748A (en) 2013-11-08
TWI417254B (en) 2013-12-01
CN102869622A (en) 2013-01-09
TW201328998A (en) 2013-07-16
JP2013136515A (en) 2013-07-11
TWI552969B (en) 2016-10-11
KR20120132675A (en) 2012-12-07
WO2012132454A1 (en) 2012-10-04
KR101300858B1 (en) 2013-08-27
JP5819870B2 (en) 2015-11-24
KR101497251B1 (en) 2015-02-27
CN103183464B (en) 2016-08-03
CN103183464A (en) 2013-07-03
CN102869622B (en) 2015-07-29

Similar Documents

Publication Publication Date Title
TW201247565A (en) Production method for glass sheet and glass sheet production device
TWI428296B (en) Glass plate manufacturing method and glass plate manufacturing apparatus
EP2551245B1 (en) Glass substrate manufacturing method
TWI427044B (en) Glass substrate manufacturing method and glass substrate
JP5428288B2 (en) Glass plate manufacturing method and manufacturing equipment
TWI422539B (en) Manufacturing method and apparatus for glass plate
US10822264B2 (en) Alkali-free glass substrate and method for manufacturing alkali-free glass substrate
TWI498291B (en) A glass substrate manufacturing method and a glass substrate manufacturing apparatus
WO2009081740A1 (en) Process and apparatus for producing glass plate
TW201702193A (en) Method for manufacturing glass substrate which is capable of reducing the variations in the thickness of the glass substrate
JP2013147355A (en) Method for producing glass plate and glass plate
TWI538890B (en) A manufacturing method of a glass plate and a manufacturing apparatus for a glass plate
JP2017048074A (en) Manufacturing method of glass substrate, and manufacturing apparatus of glass substrate