TW201243354A - Conductive pattern inspection device - Google Patents
Conductive pattern inspection device Download PDFInfo
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- TW201243354A TW201243354A TW100142768A TW100142768A TW201243354A TW 201243354 A TW201243354 A TW 201243354A TW 100142768 A TW100142768 A TW 100142768A TW 100142768 A TW100142768 A TW 100142768A TW 201243354 A TW201243354 A TW 201243354A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2836—Fault-finding or characterising
- G01R31/2837—Characterising or performance testing, e.g. of frequency response
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
Abstract
Description
201243354 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種導電圖案檢查裝置，其係檢測形成 於基板上並且在第一方向呈長形的導電圖案在對象範圍内 的斷線位置。 【先前技術】 習知在平板顯示器等領域中，大多使用在基板上配置 複數個導電圖案之電路基板。該電路基板中，當導電圖案 發生斷線或短路時便無法發揮原本之功能。因此，在製造 電路基板時，係對各導電圖案進行關於斷線及短路之檢 查。為了容易且高精度實施該檢查，習知曾提出多種檢查 技術。 例如在專利文獻1, 2中揭示有當判斷出導電圖案上發201243354 VI. Description of the Invention: The present invention relates to a conductive pattern inspection apparatus which detects a disconnection position of a conductive pattern formed on a substrate and elongated in a first direction within a range of an object. [Prior Art] Conventionally, in the field of flat panel displays and the like, a circuit board in which a plurality of conductive patterns are disposed on a substrate is often used. In the circuit board, when the conductive pattern is broken or short-circuited, the original function cannot be performed. Therefore, in the manufacture of the circuit board, the respective conductive patterns are inspected for disconnection and short circuit. In order to carry out the inspection easily and with high precision, various inspection techniques have been proposed. For example, in Patent Document 1, 2, it is disclosed that when a conductive pattern is judged to be emitted
I 生斷線時，檢測該導電圖案中何處發生斷線之斷線位置的 技術。 具體而言，專利文獻1中係揭示依序配置第一供電電 極、檢查電極及第二供電電極，並且使此等三個電極沿著 發生斷線之導電圖案（以下稱為「斷線圖案」）移動，此時依 據檢查電極中感應之交流電壓值的變化來鑑別斷線位置的 技術。 此外，專利文獻2中係揭示從斷線圖案之一端供應檢 查信號，並且使檢測電極沿著斷線圖案移動且讀取檢查信 號，將未檢測出讀取信號之位置鑑別為斷線部位的技術。 201243354 (先如技術文獻） (專利文獻） [專利文 [專利文^日本特開誦-腳31號公報 ]日本特開2006-284597號公報 【發明内容】 明所欲解決之問題） 部的導；Ϊ = 2術文獻〗，2記載之技術，雖然在全 著當導電圖案之/&之間隔平打配置時有效，不過存在 題。 〃 ^置角度適#改變時則有應用困難的問 、】如在平板顯示器中#田+甘^ 視影像之像素區域 *反上’設有實際顯示可 以所指定的間隔平行配^ ^區財，複數個導電圖案係 數個導電圖案連接 /外’在像素區域之外侧，複 距遠比像切心糊=置=動1k端子間 將複數倘道恭 系的配置間距小。因此，為了 側，將導Ϊ3案連接於驅動IC ’需要在像素區域之外 外側4=之配置間距急遽狹窄。結果在像素區域之 + 夕導電圖案之配置間距逐漸縮小而傾斜配置。換 口之在像素區域之外側，各導電圖案係以不同之 度而配置。 為了使用先前技術文獻1，2記載之技術 ’進行在如此 配置間距逐漸變化之斷線位置的鑑別，需要使電極沿著該 傾斜之連接部而移動（追蹤）。但是如前所述，存在著各導電 201243354 圖案之連接的配置角度不同，而無法輕易追蹤的問題。當 然亦有記憶各導電圖案之配置角度，而使電極在其記憶之 配置角度方向移動的方法。但是，此時存在著控 雜之問題。 因，，本發明之目的非關於一種與導電圖案之配置態 ΐ置而是提供一種可簡易地鑑別斷線位置之導電圖案檢查 (解決問題之手段） 本發明之導電圖案檢查裝置係在基板上於第一方向以 間隔配置於複數個導電圖案中，在發生斷線之導電圖案中 檢測斷線位置，其特徵係具有：施加單元，其係從發生斷 ，導案的—端施加交流電壓’·感測器’其係在該基 反上經由間隙而相對，並在橫跨該複數個導電圖案之方向 移動，兩個以上之線狀電極，其係設於該感測器中，以彼 此不同之方向延伸並且彼此電性絕緣，且分別與相對之導 電圖案靜電結合；及控制部，其係依據兩個以上之線狀電 極刀別檢測的電壓信號之變動時序，來鑑別該斷線位置。 理想的態樣為兩個以上之線狀電極至少且有 =極，其係延伸於與第—方向正交之第二料·’及第二 ㈤.電極’其係延伸於對第—線狀電極傾斜之方向；該控 1。隨據該第-線狀電極所檢測之電遷信號的變動時序， 鐘別斷線之第—方a # @ °置，並依據該第一線狀電極所檢測 信號的變動時序及該第二線狀電極所檢測之電麼信 的變動時序’鑑別斷線之第二方向位置。此時，兩個以 201243354 上之線狀電極進—步具有第三線狀電極，其係對第一線狀 電極傾斜，並在傾斜於與第二線狀電極相反極性之方向延 伸，該控制部應依據該第一線狀電極所檢測之電壓信號的 變動時序’及該第二線狀電極或第三線狀電極所檢測之雷 壓信號的變動時序，鑑別斷線之第二方向位置。此時，進 一。步亦應㈣使該第二線狀電極對第—線狀電極傾斜 45，使第二線狀電極對第一線狀電極傾斜-45。。 其他理想的態樣為在該基板上形成有：像素區域，盆 係複數個導電圖“第—間隔配置於第—方向；及外部區 域，其係設於該像素區域之外側，並具有以導電圖案間之 間隔逐漸變化的方式配置該複數個導電圖案之區域；各個 2狀電極至少具有縱跨該外部區域之長度，她制裝置依 據各個線狀電極檢測之電壓信號的變動時序， 部區域之斷線位置。 麗 (發明之效果） 依本發明，使感測器在橫跨複數個導電圖案之方向上 移動時’因為係依據兩個以上之線狀f極分別檢測的電壓 信號之變動時序來鑑別斷線位置，所以，即使導電圖案之 配置態樣不明，仍可簡易地鑑別斷線位置。 【實施方式】 以下’就本發明之實施態樣參_式作㈣。本實施 態樣之導電_檢查裝置1()係用於檢查形成於平板顯示器 等使用之玻璃基板的導電圖t 11()是否良好的檢查裝置， 201243354 置之構成。在該導電圖案 單說明本實施態樣中作為 特別是成為有效用於鑑別斷線位 仏查農置10詳細說明之前，先簡 檢查對象之基板的構成。 杯在士1圖係用於平板顯示器之基板的概略構成圖。該基 複數個導電圖案⑽配置於γ方向之第一層、將 電圖案襲配置於χ方向之第二層及介於第-層 。弟二層之間的絕緣層以2方向疊層而構成。 形成於第-層之導電圖案n〇a及形成於第二層之 圖案110b(以下，在不區別兩者時，省略添加之英文字母， :稱：「導電圖案110」)在像素區域E1 t彼此交又地配 置。藉由該兩層之導電圖案11Ga，11Gb的交又點而形成― 個像素，藉由此轉素之集合而構成顯柯視影像之像素 區域E卜導電_ 110以所指定的第一間隔平行排列於該 像素區域E1内。 各導電圖案110在像素區域E1之外側連接於驅動 1C(未顯示於圖式中）。該驅動IC之連接端子以遠比像素區 域E1中之導電圖案} 10的配置間距小的間距而排列。因而 複數個導電_ 11G為了與_ IC連接，而在像素區域 E1之外側大幅縮小其配置間距。結果在像素區域幻之外 側形成複數個導電圖案11G以比第H卜之第二間隔而 平行排列的連接區域E2、及導電圖案間之間隔從第一間隔 逐漸變化成第二間隔之中間區域E3。在該中間區域£3中， 幾乎所有之導電圖案11〇係對χ軸或γ軸傾斜配置，且彼 此鄰接之導電圖案110的配置角度不同。 201243354 在各導電圖案110之另—端（不連接於驅動IC之側的 端部)設有導電焊墊112。該導電科112卿成的寬度比 導電圖案110寬，該導電焊墊112係用作各種檢查用信號 之供應及檢測。 ： 其次，就檢查形成於該基板之導電圖案11〇的導電圖 案仏查裝置10之構成，參照第2圖作說明。第2圖係揭示 本實施態樣之導電圖案檢查裝置1G的概略構成圖。另外.， 第2圖中省略第一層之導電圖案ii〇b的圖式。以下，依據 该第2圖，僅就第一層之導電圖案n〇a的斷線位置之鑑別 原理作說明，不過該鑑別原理對第二層之導電圖案ll〇b亦 同樣。 如剛述，該導電圖案檢查裝置1〇係特別有效用於構成 在發生斷線之導電圖案110中鑑別係在何處發生斷線的斷 線位置之鑑別。另外，以下僅就鑑別斷線位置詳細說明， 不過導電圖案檢查裝置1〇中除了斷線位置之鑑別功能之 外，亦可搭載判斷有無斷線或短路之判斷功能、短路位置 之鑑別功能等。 導電圖案檢查裝置10具有在斷線之導電圖案11〇中施 加交流電壓的施加機構12及檢測該施加之交流電壓的兩種 感測器（第一感測器18與第二感測器20)。施加機構12係 從斷線之導電圖案11〇的一端（本實施態樣係導電焊墊η〕） 施加檢查用之交流電壓的機構。該施加機構12例如由接觸 於導電焊墊112之接觸端子14,及經由接觸端子14而供應 交流電壓至導電圖案11〇之交流電源16等構成。另外，本 201243354 實施態樣係使用接觸端子14以接觸的方式施加電壓，不 過，亦可使用與導電圖案110靜電結合之電極，以不接觸 的方式施加電壓。 第一感測益18及第二感測器20均係檢測施加之交流 電壓者，控制部24依據該檢測結果鑑別斷線位置。該兩個 感測器（第一感測器18與第二感測器20)中，第一感測器18 用於鑑別在像素區域E1之斷線位置。第二感測器2〇用於 鑑別在中間區域E3及連接區域E2之斷線位置。以下，將 第一感測益20之檢查範圍的中間區域E3及連接區域E2 稱為「外部區域」。 通常，在檢查前的階段，因為不清楚一個導電圖案11〇 中究竟是在像素區域E1或是外部區域發生斷線，所以在鑑 別斷線位置時，基本上是驅動第一感測器18及第二感測器 20兩者。不過，當然依據任何一方感測器之檢測結果，明 確瞭解在另一方感測器之檢查範圍内並未發生斷線時，亦 "T省略該另一方感測器之驅動。例如，以第一感測器18檢 測出在像素區域E1内發生斷線時，亦可省略第二感測器 20之檢查。 其-人，就各感測為之構成詳細說明。在第一感測器18 中設有與相對之導電圖案110靜電結合的檢測電極26。感 測器驅動機構22使該檢測電極26始終與檢查對象之導電 圖案no相對，並使第一感測器18沿著該導電圖案11〇從 像素區域E1之一端向另-端移動。在移動時，檢測電極 26所感應之電胸皮放大器28放大後，輸入至控制部24。 201243354 壓信號相對應，亦將第-感測器18之位置資 塵斤控制部24將該檢測電極26所感應之電 ^號讀時的第-感測器18之位置鑑別為發生斷線之部 =如考慮使第-感測器18從導電焊整112側（第2圖 中之右側）的端部’朝向連接區域Ε2側（第2圖中之左側) =端料動之情況。此時，當檢測電極26比斷線部位靠近 電焊塾112(靠近電壓之施加部位）時，因$在相對之導電 圖案110中施加交流電壓，所以亦在與該導電圖案110靜 電結合之檢測電極2 6上感應比較高之電壓。另夕卜，檢測電 極26伴隨移動而比斷線部位移動至遠料電焊塾⑴之位 置時’此時刻，檢測電極26與未施加電壓之導電圖案u〇 相對。結果檢測電極26上幾乎不感應電麗，因而檢測之電 壓信號的位準下降。控制部24將該信號位準下降時之第一 感測器18的位置鑑別為發生斷線之部位。 、在此，從以上的說明瞭解，為了以該第一感測器18檢 測斷線，需要預先使檢測電極26始終位於檢查對象之導電 圖案110的正上方。在全部之導電圖案110延伸於與χ軸 或γ軸平行之方向的像素區域E1中，使檢測電極26沿著 斷線圖案移動比較容易。 但疋’如中間區域E3，導電圖案11〇之配置角度各不 相同，或是如中間區域E3及連接區域E2之邊界，導電圖 案110在中途彎曲情況下’使檢測電極26沿著導電圖案11 〇 移動困難。當然亦有預先記憶導電圖案110之配置角度， 201243354When a line is broken, a technique of detecting where the wire breakage occurs in the conductive pattern is detected. Specifically, Patent Document 1 discloses that the first power supply electrode, the inspection electrode, and the second power supply electrode are sequentially disposed, and the three electrodes are arranged along a conductive pattern in which a disconnection occurs (hereinafter referred to as a "broken pattern". Moving, at this time, the technique of discriminating the position of the disconnection based on the change in the value of the alternating voltage induced in the inspection electrode. Further, Patent Document 2 discloses a technique of supplying an inspection signal from one end of a disconnection pattern, and moving the detection electrode along the disconnection pattern and reading the inspection signal, and discriminating the position where the read signal is not detected as the disconnected portion. . 201243354 (Previously as a technical document) (Patent Document) [Patent Document [Patent Document ^ Japanese Patent Publication No. - No. 31 of the Japanese Patent Publication No. JP-A-2006-284597] [Draft of the Invention] ; Ϊ = 2 literary literature〗 2, the technology described, although in the full range of conductive patterns / & 〃 ^Setting angle is appropriate when there is a problem with the application, such as in the flat panel display #田+甘^ The pixel area of the image is *reversely 'the actual display can be arranged in parallel with the specified interval ^ ^ A plurality of conductive pattern coefficients are connected to the outer side of the pixel pattern, and the complex distance is farther than the image-cutting paste=set=moving 1k terminal. Therefore, for the side, connecting the guide 3 to the driver IC ’ needs to be narrowly spaced outside the pixel area. As a result, the arrangement pitch of the conductive patterns is gradually reduced and inclined in the pixel region. The swapping is on the outer side of the pixel area, and the respective conductive patterns are arranged with different degrees. In order to perform the discrimination of the disconnection position in which the pitch is gradually changed by the technique described in the prior art documents 1, 2, it is necessary to move (track) the electrode along the inclined connection portion. However, as described above, there is a problem that the arrangement angles of the respective conductive patterns of the 201243354 pattern are different and cannot be easily tracked. Of course, there is also a method of memorizing the arrangement angle of each conductive pattern and moving the electrode in the direction in which the memory is disposed. However, there is a problem with control at this time. Therefore, the object of the present invention is not related to an arrangement of a conductive pattern but to provide a conductive pattern inspection capable of easily discriminating a broken position (a means for solving the problem). The conductive pattern inspection device of the present invention is on a substrate. The plurality of conductive patterns are arranged at intervals in the first direction, and the disconnection position is detected in the conductive pattern in which the disconnection occurs, and the feature is: an application unit that applies an alternating voltage from the end of the guide. a sensor 'which is opposite to the base via a gap and moves in a direction across the plurality of conductive patterns, two or more linear electrodes that are attached to the sensor to each other Extending in different directions and electrically insulated from each other, and electrostatically combining with the opposite conductive patterns respectively; and a control portion for identifying the disconnection position according to a variation timing of the voltage signals detected by the two or more linear electrode cutters . The ideal aspect is that at least two of the linear electrodes have at least a pole extending from a second material and a second (five) orthogonal to the first direction. The electrode extends in a pair of lines. The direction in which the electrode is tilted; this control is 1. According to the variation timing of the relocation signal detected by the first-line electrode, the first-party a #@@ of the disconnection line is set according to the variation timing of the signal detected by the first linear electrode and the second The timing of the change of the electrical signal detected by the linear electrode 'identifies the position of the second direction of the disconnection. At this time, the two linear electrodes on the 201243354 have a third linear electrode which is inclined to the first linear electrode and extends in a direction inclined to the opposite polarity to the second linear electrode. The second direction position of the disconnection is discriminated based on the fluctuation timing of the voltage signal detected by the first linear electrode and the fluctuation timing of the lightning pressure signal detected by the second linear electrode or the third linear electrode. At this point, go ahead. The step should also (4) incline the second linear electrode to the first linear electrode 45 so that the second linear electrode is inclined to -45 toward the first linear electrode. . Another ideal aspect is that a pixel region is formed on the substrate, and the plurality of conductive patterns of the basin are “first-disposed in the first direction; and the outer region is disposed on the outer side of the pixel region and has a conductive The region of the plurality of conductive patterns is arranged in such a manner that the interval between the patterns is gradually changed; each of the two electrodes has a length spanning at least the length of the outer region, and the device is configured according to the timing of the change of the voltage signal detected by each of the linear electrodes. The position of the disconnection. (Effect of the invention) According to the present invention, when the sensor is moved in the direction across the plurality of conductive patterns, 'because the timing of the voltage signal detected by the two or more linear f-poles respectively The position of the disconnection is discriminated, so that the position of the disconnection can be easily discriminated even if the arrangement pattern of the conductive pattern is unknown. [Embodiment] The following is a description of the embodiment of the present invention (4). The conductive_inspection device 1() is an inspection device for inspecting whether or not the conductive pattern t 11 () formed on a glass substrate used in a flat panel display or the like is good, 201243354 In the embodiment of the conductive pattern, in the present embodiment, the structure of the substrate to be inspected is briefly checked as a specific description for the purpose of identifying the disconnection position. A schematic configuration diagram of a substrate of a flat panel display. The plurality of conductive patterns (10) are disposed in a first layer in the γ direction, a second layer in which the electrical pattern is disposed in the χ direction, and a layer between the second layer and the second layer. The insulating layer is laminated in two directions. The conductive pattern n〇a formed on the first layer and the pattern 110b formed on the second layer (hereinafter, when the two are not distinguished, the added English letter is omitted, : The conductive patterns 110") are disposed to overlap each other in the pixel region E1 t. By the intersection of the two layers of the conductive patterns 11Ga, 11Gb, a pixel is formed, and the pixel region E of the display image is formed by the set of the transfer elements, and the conductive_110 is parallel to the first interval specified. Arranged in the pixel area E1. Each of the conductive patterns 110 is connected to the driving 1C (not shown in the drawing) on the outer side of the pixel region E1. The connection terminals of the driver IC are arranged at a pitch far smaller than the arrangement pitch of the conductive patterns 10 in the pixel region E1. Therefore, a plurality of conductive_11Gs are connected to the _IC, and the arrangement pitch is greatly reduced on the outer side of the pixel area E1. As a result, a plurality of conductive patterns 11G are formed on the outer side of the pixel region to be connected in parallel with the second interval of the second interval, and the interval between the conductive patterns is gradually changed from the first interval to the intermediate portion E3 of the second interval. . In the intermediate portion £3, almost all of the conductive patterns 11 are arranged obliquely to the x-axis or the γ-axis, and the arrangement angles of the adjacent conductive patterns 110 are different. 201243354 A conductive pad 112 is provided at the other end of each conductive pattern 110 (the end not connected to the side of the driving IC). The conductive section 112 is wider than the conductive pattern 110, and the conductive pad 112 is used for supply and detection of various inspection signals. Next, the configuration of the conductive pattern inspection device 10 for inspecting the conductive pattern 11〇 formed on the substrate will be described with reference to Fig. 2 . Fig. 2 is a schematic view showing the configuration of a conductive pattern inspection device 1G of the present embodiment. In addition, the pattern of the conductive pattern ii 〇 b of the first layer is omitted in FIG. 2 . Hereinafter, according to the second drawing, only the principle of discrimination of the disconnection position of the conductive pattern n〇a of the first layer will be described, but the principle of discrimination is also the same for the conductive pattern 11b of the second layer. As just described, the conductive pattern inspection device 1 is particularly effective for constituting the discrimination of the disconnection position where the disconnection occurs in the conductive pattern 110 in which the disconnection occurs. In addition, the details of the disconnection position are described below. However, in addition to the discrimination function of the disconnection position, the conductive pattern inspection device 1 can be equipped with a determination function for determining whether or not there is a disconnection or a short circuit, an identification function for a short-circuit position, and the like. The conductive pattern inspection device 10 has an application mechanism 12 that applies an alternating voltage in the disconnected conductive pattern 11A and two types of sensors that detect the applied alternating voltage (the first sensor 18 and the second sensor 20) . The applying mechanism 12 is a mechanism for applying an AC voltage for inspection from one end of the disconnected conductive pattern 11A (the conductive pad η of the present embodiment). The application mechanism 12 is constituted by, for example, a contact terminal 14 that is in contact with the conductive pad 112, and an AC power source 16 that supplies an AC voltage to the conductive pattern 11 via the contact terminal 14. Further, in the embodiment of 2012043, the voltage is applied in a contact manner using the contact terminal 14, and an electrode electrostatically bonded to the conductive pattern 110 may be used to apply a voltage without contact. The first sensing gain 18 and the second sensor 20 are both detecting the applied alternating voltage, and the control unit 24 discriminates the disconnected position based on the detection result. Among the two sensors (the first sensor 18 and the second sensor 20), the first sensor 18 is used to identify the disconnection position in the pixel area E1. The second sensor 2 is used to identify the disconnection position in the intermediate area E3 and the connection area E2. Hereinafter, the intermediate region E3 and the connection region E2 of the inspection range of the first sensing benefit 20 are referred to as "outside regions". Generally, in the pre-inspection stage, since it is not clear whether a conductive pattern 11 is broken in the pixel area E1 or the external area, when the disconnection position is discriminated, the first sensor 18 is basically driven. Both of the second sensors 20 are. However, of course, based on the detection results of any one of the sensors, it is clearly understood that when no disconnection occurs within the inspection range of the other sensor, "T omits the driving of the other sensor. For example, when the first sensor 18 detects that a disconnection occurs in the pixel area E1, the inspection of the second sensor 20 may be omitted. The person-person, for each sense, constitutes a detailed description. A detecting electrode 26 electrostatically coupled to the opposite conductive pattern 110 is provided in the first sensor 18. The sensor driving mechanism 22 causes the detecting electrode 26 to always face the conductive pattern no of the inspection object, and moves the first sensor 18 along the conductive pattern 11 from one end of the pixel area E1 toward the other end. When moving, the electric chest amplifier 28 sensed by the detecting electrode 26 is amplified and input to the control unit 24. 201243354 Corresponding to the pressure signal, the position of the first sensor 18 of the first sensor 14 is also identified as the occurrence of the disconnection when the electric sensor sensed by the detecting electrode 26 is read. Portion = Considering the case where the first sensor 18 is moved from the end portion of the conductive bonding 112 side (the right side in FIG. 2) toward the connection region Ε2 side (the left side in FIG. 2). At this time, when the detecting electrode 26 is closer to the welding pad 112 than the wire breaking portion (close to the application site of the voltage), since the AC voltage is applied to the opposite conductive pattern 110, the detecting electrode is also electrostatically coupled to the conductive pattern 110. 2 6 senses a relatively high voltage. Further, when the detecting electrode 26 moves to the position of the remote soldering tip (1) with the movement of the disconnecting portion, the detecting electrode 26 is opposed to the conductive pattern u 未 to which no voltage is applied. As a result, the detection electrode 26 hardly senses the battery, and thus the level of the detected voltage signal drops. The control unit 24 discriminates the position of the first sensor 18 when the signal level is lowered as a portion where the disconnection occurs. Here, as is apparent from the above description, in order to detect the disconnection by the first sensor 18, it is necessary to make the detecting electrode 26 always positioned directly above the conductive pattern 110 of the inspection object. In the pixel region E1 in which all of the conductive patterns 110 extend in a direction parallel to the χ axis or the γ axis, it is relatively easy to move the detecting electrode 26 along the broken line pattern. However, if the intermediate region E3, the arrangement angle of the conductive patterns 11A is different, or the boundary between the intermediate portion E3 and the connection region E2, the conductive pattern 110 bends the detection electrode 26 along the conductive pattern 11 in the middle of bending. 〇 It is difficult to move. Of course, there is also a pre-memory configuration angle of the conductive pattern 110, 201243354
St:::?:在其記憶之配置角度方向移動的方法。但 ^存在者控制非常複雜的問題。 ㈣本料了解決此糊題，係在外部區域（中間區 » /接區域E2)設有用於檢_線H測器2〇。 具有與相對之導電圖㈣ 狀電極（第—線狀電極3G、第二線狀電極％與第 -4狀電極34)。二個線狀電極（第—線狀電極％、第二線 狀電極32與第三線狀電極34)相互延伸於不同之方向。且 體而言’第-線狀電極30係延伸於與複 n 之配置方向正交的方向(第2圖令 線電 極。第二線狀電極32及第三線狀電極 )= 電極3〇而線對稱地配置之線狀電極，且分別延伸於對第一 線狀電極30傾斜+45。及_45。之方白 該三個線狀電極（第一線狀電極30、第二線狀電極32 與第二線狀電極34)均具有可縱跨外部 各線狀電極(第-線狀電極-、第二線狀電極32二 狀電謂之X方向寬度與外部區 同。另外’圖式上係揭示三個線 I度大致相 篦-㈣雷标π 、裏狀電極(弟-線狀電極30、 第-線狀電極32與第三線狀電極34)之頂端相互接觸，不 3過2實/第上1^^=第—線狀^ 3G、第二線狀電極 2”第二線狀電極34)並未接觸，而係 設有該三個線狀電極（第一線狀電 、= 32與第三線狀電極3㈣二感測器2。藉編== 構22而移動於γ方向，亦即移動於橫跨複數個導電圖荦 201243354 m =方向㈣之移動位置與各線狀電極（第—線狀電極 H極32與第三線狀電極34)所檢測之電壓信 號相關連地傳送至控制部24。控制部“依據該三個線狀電 極（弟-線狀電極3〇、第二線狀電極32與第三線狀電極34) 刀別才双測之電壓信號的變動時序，來鑑別斷線位置。就該 鑑別之原理參照第3圖至第5圖作說明。 一第*3圖至第5圖係揭示斷線位置鑑別情形圖。更詳細 而言，第3圖揭示導電圖案11〇在傾斜於負側之範圍發生 斷線時的斷線位置之鑑別情形，第4圖揭示導電圖案11〇 在傾斜於正侧之範圍發生斷線時的斷線位置之鑑別情形， 第5圖揭示導電圖案u〇在延伸於乂方向之範圍發生斷線 時的斷線位置之鑑別情形。第3圖至第5圖中，於圖式左 側揭不有線狀電極檢測之電壓信號。此外，在第3圖至第5 圖中，於英文字母a至d的上側係揭示在時序a至時序d 之線狀電極（第-線狀電極3G、第二線狀電極％與第三線 狀電極3 4)與發生斷線之導電圖案】j 〇的相對位置關係。顯 示"亥相對位置關係之各圖中，圖式右侧為導電焊墊1側。 然後’在各圖令，將各導電圖g 11〇中感應電壓之部分以 粗線圖不，將因斷線而斷絕電壓供應之部分以細線圖示。 首先參照第3圖，說明導電圖案11〇在傾斜於負側之 範圍發生斷線時的斷線位置之鑑別原理。此時，鑑別斷線 位置主要係依據第一線狀電極3〇所檢測之電壓信號（以下 稱為第一檢測彳§號」），以及傾斜於與導電圖案1 1 〇相反 極性（正側）之第一線狀電極32所檢測的電壓信號（以下稱 12 201243354 為「第二檢測信號」）來進行。 電極30與第二線狀電極幻， 一圖僅j晏不第一線狀 式。 略第二線狀電極34之圖 第-j測器Μ位於初期位置。在該階段， 電圖案Π0相對。因而，在該階段，H與施加電壓之導 二線狀電極32中均未❹C線狀電極30與第 測信號均大致為〇。 檢測信號與第二檢 電極:二及感:器：向Y方向移動時’在時序b，第-線狀 圖荦ηοΛ 32之__與施加《之導電 ^案110相對的位置。此時，藉由與該導電圖宰110之靜 電結合，第-線狀電極3G及第1110之备 位準。因此，在時序Λ— 二檢測信號均上昇。序之认，第一檢測信號與第 3 〇 $ f t 一感測器2 〇進一步移動，在時序c，第—線狀電極 =斷線部位之正上方時，第—線狀電極3G中感應之電 準降低’第-檢測信號下降。另外，因為第二線狀電 楚2仍然為與施加電遷之導電圖案11〇相對之狀態，所以 f二檢測信號㈣維持指定位準。紐，第二感測器2〇進 '移動在時序d ’第一線狀電極32亦到達斷線部位之 正上方時，第二檢測信號亦下降。 、換言之’隨著第二感測器2〇之移動，第一線狀電極3〇 到達斷線部位之正上方時，發生第—檢測信號下降。此外， 第二線狀電極32到達斷線部位之正上方時，發生第二檢測 13 201243354 號:之下降時序來鑑別斷 信號下降。控制部24依據該兩個信 線部位。 ° 3〇到%從初期位置移動至第—線狀電極 =斷線雜正上方之距離（在時序&至時序^之間的移 為初期位置至斷線部位之γ方向(導電圖請 =跨方向）的移動距離hl。因為初期位置已知，所以只要 ，解該第二感測器20之移動距離Μ即可鑑別斷線部位之 γ方向位置 '然後’因為該移動距離hl可依據第一檢測信 號之下降^算出’所以控制部24依據該第—檢測信號之 下降時序算出斷線部位之γ方向位置。 。此外，因為第二線狀電極32對第一線狀電極30傾斜 +45，所以從第二線狀電極32頂端至斷線部位之X方向距 離h2與在日卞序d從第二線狀電極32頂端至斷線部位之γ 方向距離h3相同 '然後’該Y方向距離h3與第二感測器 2〇從第一線狀電極30到達斷線部位之正上方移動至第二 線狀電極32到達斷線部位之正上方的距離相等。該γ方向 距離h 3可依據第一檢測信號之下降時序及第二檢測信號之 下降時序算出。因此，控制部24依據該第一檢測信號與第 二檢測信號之下降時序算出斷線部位之X方向位置。 其次，參照第4圖，說明在導電圖案ι10傾斜於正側 之範圍發生斷線時的斷線位置鑑別原理。此時，鑑別斷線 位置主要係依據第一線狀電極30所檢測之電壓信號（第一 檢測信號)與傾斜於與導電圖案11〇相反極性（負側）之第三 線狀電極34所檢測的電壓信號（以下稱「第三檢測信號」）St:::?: A method of moving in the direction of the configuration of its memory. But ^ the existent controls a very complicated problem. (4) In order to solve this paste problem, it is provided in the external area (middle area » / connection area E2) for detecting _ line H detector 2 〇. There are opposite conductive patterns (four) electrodes (first-line electrode 3G, second line electrode %, and fourth-four electrode 34). The two linear electrodes (the first linear electrode %, the second linear electrode 32, and the third linear electrode 34) extend in different directions from each other. Further, the body-shaped linear electrode 30 extends in a direction orthogonal to the arrangement direction of the complex n (the second patterned wire electrode. The second linear electrode 32 and the third linear electrode) = the electrode 3 The linear electrodes are symmetrically arranged and extend by +45 to the first linear electrode 30, respectively. And _45. The three linear electrodes (the first linear electrode 30, the second linear electrode 32, and the second linear electrode 34) each have a vertical electrode (the first linear electrode - the second) The width of the linear electrode 32 in the X direction is the same as the width of the outer region. In addition, the figure shows that the three lines are substantially opposite to each other - (4) the lightning standard π, the inner electrode (the younger - the linear electrode 30, the first - the top ends of the linear electrodes 32 and the third linear electrodes 34) are in contact with each other, not 3 over 2 real / upper 1 ^ ^ = first linear ^ 3G, second linear electrode 2 "second linear electrode 34) Not contacting, but the three linear electrodes (first linear electric, = 32 and third linear electrode 3 (four) two sensors 2 are attached. The borrowing == structure 22 moves in the γ direction, that is, moves The movement position across the plurality of conductive patterns 荦201243354 m = direction (4) is transmitted to the control unit 24 in association with the voltage signals detected by the respective linear electrodes (the first linear electrode H pole 32 and the third linear electrode 34). The control unit "changes the voltage signal according to the three linear electrodes (the younger-linear electrode 3, the second linear electrode 32, and the third linear electrode 34) The timing is used to identify the position of the disconnection. The principle of the discrimination is described with reference to Figures 3 to 5. A diagram of Fig. 3 to Fig. 5 reveals a map of the position of the disconnection. In more detail, Fig. 3 The identification of the disconnection position when the conductive pattern 11〇 is broken in the range oblique to the negative side is revealed, and FIG. 4 reveals the discrimination of the disconnection position when the conductive pattern 11〇 is broken in the range inclined to the positive side. Fig. 5 is a view showing the discrimination of the disconnection position when the conductive pattern u〇 is broken in the range extending in the x direction. In Figs. 3 to 5, the voltage signal of the wired electrode detection is not shown on the left side of the drawing. Further, in the third to fifth figures, the linear electrodes (the first-line electrode 3G, the second line electrode %, and the third line) at the timing a to the timing d are revealed on the upper side of the letters a to d. The relative positional relationship between the electrode 3 4) and the conductive pattern [j 〇 where the wire breakage occurs. In each of the figures showing the relative positional relationship, the right side of the figure is the side of the conductive pad 1 . Then, in each figure, The portion of the induced voltage in each conductive pattern g 11〇 is not shown as a thick line graph. The portion of the line that cuts off the voltage supply is illustrated by a thin line. First, referring to Fig. 3, the principle of discriminating the position of the disconnection when the conductive pattern 11〇 is broken in the range oblique to the negative side is explained. At this time, the position of the disconnection is mainly identified. The voltage signal detected by the first linear electrode 3 (hereinafter referred to as "first detection 彳 §"), and the first linear electrode 32 inclined to the opposite polarity (positive side) from the conductive pattern 1 1 所The detected voltage signal (hereinafter referred to as 12 201243354 is "second detection signal") is performed. The electrode 30 and the second linear electrode are imaginary, and one picture is only the first line type. The second line electrode 34 is slightly Figure -j detector Μ is in the initial position. At this stage, the electrical pattern Π0 is opposite. Therefore, at this stage, both the C and the applied voltage of the two-wire electrode 32 are substantially equal to the C-line electrode 30 and the first measurement signal. The detection signal and the second detecting electrode: second and the sense: the device: when moving in the Y direction, at the timing b, the position of the first-line graph 荦ηοΛ 32 is opposite to the position where the conductive film 110 is applied. At this time, by the electrostatic combination with the conductive pattern 110, the first linear electrode 3G and the 1110th are at the level. Therefore, in the timing Λ - two detection signals are rising. In the order of recognition, the first detection signal and the third 〇$ ft sensor 2 are further moved. When the timing c, the first linear electrode = directly above the broken portion, the first linear electrode 3G is induced. The frequency is reduced by the 'first-detection signal drop. Further, since the second linear circuit 2 is still in a state of being opposed to the electroconductive pattern 11〇 to which the electromigration is applied, the f second detection signal (4) maintains the designated level. When the second sensor 2 is moved 'moving at the timing d', the first linear electrode 32 also reaches directly above the broken portion, and the second detection signal also drops. In other words, as the first linear electrode 3 到达 reaches the directly above the broken portion as the second sensor 2 〇 moves, the first detection signal falls. Further, when the second linear electrode 32 reaches directly above the broken portion, the second detection 13 201243354: the falling timing is generated to discriminate the falling signal. The control unit 24 is based on the two signal line parts. ° 3〇 to % moves from the initial position to the first line-shaped electrode = the distance above the broken line (the shift between the timing & to the timing ^ is the initial position to the γ direction of the broken line (conductive diagram please = The moving distance hl is across the direction. Since the initial position is known, the γ-direction position of the disconnected portion can be discriminated as long as the moving distance 该 of the second sensor 20 is solved, and then the moving distance hl can be determined according to the The decrease of the detection signal is calculated. Therefore, the control unit 24 calculates the position in the γ direction of the disconnection portion based on the descending timing of the first detection signal. Further, since the second linear electrode 32 is inclined to the first linear electrode 30 by +45 Therefore, the distance H2 from the top end of the second linear electrode 32 to the broken portion is the same as the distance h3 from the top end of the second linear electrode 32 to the broken portion in the γ direction, and then the distance in the Y direction H3 and the second sensor 2 are moved from directly above the first linear electrode 30 to the disconnection portion to the distance directly above the second linear electrode 32 reaching the disconnection portion. The γ-direction distance h 3 can be based on The falling timing of the first detection signal and the second The control unit 24 calculates the position of the X-direction of the disconnection portion based on the descending timing of the first detection signal and the second detection signal. Next, referring to FIG. 4, the conductive pattern ι10 is inclined to the positive direction. The principle of the disconnection position discrimination when the range of the side occurs is broken. At this time, the position of the disconnection is mainly determined according to the voltage signal (the first detection signal) detected by the first linear electrode 30 and the inclination to the opposite of the conductive pattern 11? Voltage signal detected by the third linear electrode 34 of the polarity (negative side) (hereinafter referred to as "third detection signal")
14 201243354 . 來進行。因而，第4圖中僅揭示第一線狀電極30與第三線 狀電極34，而省略第二線狀電極32之圖示。 如第4圖所示，在時序a，為了鑑別斷線位置，而使位 於初期位置之第二感測器20移動於Y方向。此處，在初期 位置之階段，第一線狀電極30及第三線狀電極34均未與 施加電壓之導電圖案110相對。因而在該階段，第一線狀 電極30與第三線狀電極34中均未感應電壓，第一檢測信 號與第三檢測信號之位準大致為〇。 第二感測器20向Y方向移動，在時序b，第三線狀電 極34超過斷線部位時，第三線狀電極34中感應指定位準 之電壓，第三檢測信號上昇。另外，第一線狀電極30在此 , 時刻，因為還未予施加電壓之導電圖案110相對，所以第 _ 一檢測信號仍然大致為0。 第二感測器20進一步向Y方向移動，在時序C，第一 線狀電極30超過斷線部位時，第一線狀電極30中亦感應 指定位準之電壓，第一檢測信號上昇。然後，第二感測器 20進一步移動時，在時序d，第一線狀電極30及第三線狀 電極34兩者同時到達與施加電壓之導電圖案110不相對之 位置。結果第一檢測信號與第三檢測信號大致同時下降。 換言之，隨著第二感測器20之移動，第三線狀電極34 超過斷線部位時第三檢測信號上昇。此外，第一線狀電極 30超過斷線部位時第一檢測信號上昇。控制部24依據該兩 個檢測信號之上昇時序來鑑別斷線部位。 亦即，從初期位置至第一線狀電極30超過斷線部位（從 15 201243354 時序a至時序c)之間，第二感測器2〇移動之 :然為初期位置至斷線部位之γ方向的距離 以只要瞭解該第二感測器2〇之移動二 第:檢方向位置。因為該移動距離M可依辕 弟—虎之下降時序算出，所以控 測信號之上昇時序算出斷線部位之丫方向位置。據第檢 妝雷因為第三線狀電極％傾斜_45。，所以在第三線 超過斷線部位之時序(時序b)從第三線狀電㈣ '斷線輕之X方向距心2，與在該時序b從第三線 狀電極34頂端至斷線部位之丫方向距離叫目㈤。然後， f第三線狀電極34頂端至斷線部位之Y方向距離h3，與 從第三線狀電極34超過斷線部位至第-線狀電極30超過 斷線部位之第二感測器2〇移動的距離相等。因為該丫方向 距，h3可依據第三檢測信號之上昇時序及第—檢測信號之 μ昇寺序算出，所以控制部24依據兩檢測信號之上昇時序 算出斷線部位之X方向位置。 一二人，參照第5圖說明導電圖案11 〇在平行於X方向 之範圍發生斷線時的斷線位置之鑑別原理。此時，亦可依 據第檢測信號及第二檢測信號鑑別斷線位置，亦可依據 第檢測仏號及第三檢測信號鑑別斷線位置。 亦即，如第5圖所示，此時第一檢測信號在第一線狀 電極30到達斷線部位之正上方的時刻僅瞬間上昇。換言 之，第一檢測信號之上昇時序也是第一檢測信號之下降時 序014 201243354 . Come and proceed. Therefore, in Fig. 4, only the first linear electrode 30 and the third linear electrode 34 are disclosed, and the illustration of the second linear electrode 32 is omitted. As shown in Fig. 4, at timing a, in order to discriminate the disconnection position, the second sensor 20 located at the initial position is moved in the Y direction. Here, at the initial stage, neither the first linear electrode 30 nor the third linear electrode 34 is opposed to the conductive pattern 110 to which the voltage is applied. Therefore, at this stage, no voltage is induced in the first linear electrode 30 and the third linear electrode 34, and the levels of the first detection signal and the third detection signal are substantially 〇. The second sensor 20 moves in the Y direction. When the third linear electrode 34 exceeds the disconnection portion at the timing b, the voltage of the designated level is induced in the third linear electrode 34, and the third detection signal rises. Further, the first linear electrode 30 is here, and since the conductive pattern 110 to which the voltage has not been applied is opposed, the first detection signal is still substantially zero. The second sensor 20 is further moved in the Y direction. When the first linear electrode 30 exceeds the disconnection portion at the timing C, the voltage of the designated level is also induced in the first linear electrode 30, and the first detection signal rises. Then, when the second sensor 20 is further moved, at the timing d, both the first linear electrode 30 and the third linear electrode 34 simultaneously reach a position opposite to the conductive pattern 110 to which the voltage is applied. As a result, the first detection signal and the third detection signal decrease substantially simultaneously. In other words, as the second sensor 20 moves, the third detection signal rises when the third linear electrode 34 exceeds the disconnected portion. Further, the first detection signal rises when the first linear electrode 30 exceeds the disconnection portion. The control unit 24 discriminates the disconnection portion based on the rising timing of the two detection signals. That is, from the initial position to the time when the first linear electrode 30 exceeds the disconnection portion (from 15 201243354 timing a to timing c), the second sensor 2 〇 moves: γ from the initial position to the disconnected portion The distance of the direction is as long as the movement of the second sensor 2 is known: the direction of the detection direction. Since the moving distance M can be calculated in accordance with the descending timing of the brother-tiger, the rising timing of the control signal calculates the position of the broken portion in the 丫 direction. According to the first inspection, the mine is tilted by _45 because of the third linear electrode. Therefore, the timing at which the third line exceeds the disconnection portion (timing b) is from the third linear electric (four) 'broken light X direction to the center 2, and from the top end of the third linear electrode 34 to the disconnected portion at the timing b The direction distance is called (5). Then, the Y-direction distance h3 from the top end of the third linear electrode 34 to the disconnection portion, and the second sensor 2〇 from the position where the third linear electrode 34 exceeds the disconnection portion to the position where the first-line electrode 30 exceeds the disconnection portion The distance is equal. Since the 丫 direction distance, h3 can be calculated based on the rising timing of the third detection signal and the μ sigma of the first detection signal, the control unit 24 calculates the X-direction position of the disconnected portion based on the rising timing of the two detection signals. For one or two persons, referring to Fig. 5, the principle of discrimination of the disconnection position when the conductive pattern 11 发生 is broken in the range parallel to the X direction will be described. At this time, the disconnection position may be discriminated according to the first detection signal and the second detection signal, and the disconnection position may be discriminated according to the first detection nickname and the third detection signal. That is, as shown in Fig. 5, at this time, the first detection signal rises only momentarily when the first linear electrode 30 reaches directly above the disconnection portion. In other words, the rising timing of the first detection signal is also the falling timing of the first detection signal.
16 201243354 因此，依據第一檢測信號及第二檢測信號鑑別斷線位 置情Λ下’與第3圖之情況同樣地，只須依據第一檢測信 號之下降時序（上昇時序）算出斷線位置之γ方向位置，並 依據第一檢測信號與第二檢測信號之下降時序算出斷線位 置之X方向位置即可。 此外，依據第一檢測信號及第三檢測信號鑑別斷線位 置情況下，與第4圖之情況相同地，只須依據第一檢測信 號之上昇時序（下降時序）算出斷線位置之γ方向位置，並 依據第一檢測信號與第三檢測信號之上昇時序算出斷線位 置之X方向位置即可。 因而，從以上之說明瞭解’本實施態樣不論導電圖案 110之配置角度係傾斜於正侧、傾斜於負侧或是在χ方向， 均可確實鑑別斷線位置。 另外，從以上之說明瞭解，依導電圖案110在斷線部 位之配置角度的極性，鑑別斷線位置時利用之信號種類不 同。因而在鑑別斷線位置時，也需要判斷導電圖案110之 配置角度的極性。該極性判斷例如可依據第一檢測信號與 第二檢測信號之上昇時序來進行。亦即，當導電圖案110 之配置角度係負側（與第二線狀電極32之傾斜角度相反極 性側）時，第一檢測信號與第二檢測信號大致同時上昇。另 外，當導電圖案110之配置角度係正側（與第二線狀電極u 之傾斜角度相同極性側）時，第二檢測信號之上昇時序比第 一檢測信號之上昇時序延遲。因此，控制部24可依據該第 一檢測信號與第二檢測信號之上昇時序來判斷導電圖案 201243354 110之配置角度的極性。此外’按照同樣的原理，亦可依據 第一檢測信號與第三檢測信號之下降時序進行配置角度之 極性判斷。 此外’上述之說明係將第二線狀電極32及第三線狀f 極34之配置角度分別設為對第一線狀電極3〇傾斜+45。、 -45°，不過，當然亦可設定其他配置角度。使用其他配置角 度Θ情況下’只須使用對第3圖至第5圖中之γ方向距離 h3乘上tan|0|的值作為從線狀電極頂端至斷線部位之χ方 向距離 h2 即可（h2=h3Xtan|0|)。 此外’上述之說明係設三個線狀電極，但是，只要具 有兩個以上彼此傾斜於不同方向之線狀電極者，亦可為其 他數量。不過，為了斷線位置算出的運算容易，至少應具 有延伸於X方向（與導電圖案110之配置方向正交的方向） 之線狀電極。 另外，即使僅設兩個線狀電極時，仍可以與設三個線 狀電極時大致同樣之程序_斷線位f。例如，考慮具有 延伸於X方向之第，綠電極3G、及延伸於對該線狀電極 傾斜+45。之方向的第二線狀電極32之情況。此時，在導電 圖案U0傾斜於負側(與第二線狀電極_反極性 是在導電圖案U0延伸於X方向之範圍發生斷線情 可按照與使用第4圖與第6圖說明之16 201243354 Therefore, the disconnection position is discriminated based on the first detection signal and the second detection signal. In the same manner as in the third diagram, the disconnection position is calculated only based on the falling timing (rising timing) of the first detection signal. The position in the γ direction may be calculated based on the falling timing of the first detection signal and the second detection signal in the X direction of the disconnection position. Further, in the case where the disconnection position is discriminated based on the first detection signal and the third detection signal, as in the case of FIG. 4, the γ-direction position of the disconnection position is calculated only by the rising timing (falling timing) of the first detection signal. And the position of the X-direction of the disconnection position may be calculated based on the rising timing of the first detection signal and the third detection signal. Therefore, it is understood from the above description that the present embodiment can surely identify the disconnection position regardless of the arrangement angle of the conductive pattern 110 being inclined to the positive side, inclined to the negative side, or in the χ direction. Further, as is apparent from the above description, depending on the polarity of the arrangement angle of the conductive pattern 110 at the disconnection portion, the types of signals used for discriminating the disconnection position are different. Therefore, when discriminating the disconnection position, it is also necessary to judge the polarity of the arrangement angle of the conductive pattern 110. The polarity determination can be performed, for example, based on the rising timing of the first detection signal and the second detection signal. That is, when the arrangement angle of the conductive pattern 110 is the negative side (the opposite polarity side from the inclination angle of the second linear electrode 32), the first detection signal and the second detection signal rise substantially simultaneously. Further, when the arrangement angle of the conductive pattern 110 is the positive side (the same polarity side as the inclination angle of the second linear electrode u), the rising timing of the second detection signal is delayed from the rising timing of the first detection signal. Therefore, the control unit 24 can determine the polarity of the arrangement angle of the conductive pattern 201243354 110 based on the rising timing of the first detection signal and the second detection signal. Further, according to the same principle, the polarity of the arrangement angle can be determined based on the falling timing of the first detection signal and the third detection signal. Further, in the above description, the arrangement angles of the second linear electrode 32 and the third linear f-electrode 34 are respectively inclined by +45 to the first linear electrode 3''. -45°, however, of course, other configuration angles can be set. When using other configuration angles, 'only need to multiply the value of tan|0| in the γ direction distance h3 in the 3rd to 5th figures as the distance h2 from the top of the linear electrode to the broken part. (h2=h3Xtan|0|). Further, the above description is based on three linear electrodes, but it may be any other number as long as it has two or more linear electrodes which are inclined to different directions from each other. However, it is easy to calculate the disconnection position, and at least a linear electrode extending in the X direction (a direction orthogonal to the arrangement direction of the conductive pattern 110) is required. Further, even when only two linear electrodes are provided, the program_breaking position f can be substantially the same as when three linear electrodes are provided. For example, it is considered that the green electrode 3G has a length extending in the X direction and extends +45 to the linear electrode. The case of the second linear electrode 32 in the direction. At this time, the conductive pattern U0 is inclined to the negative side (the second linear electrode _ reverse polarity is in the range in which the conductive pattern U0 extends in the X direction, and the disconnection can be performed according to the use of Figs. 4 and 6
別斷線位置。 r王木I 另外，在導電圖案110傾钭^τ y, / b〜 ,斜於正側（與第二線狀電極32 相同極性側）之範圍鑑別斷線位 請置情灯，需㈣帶其Do not disconnect the position. r Wang Mu I In addition, the conductive pattern 110 tilts ^τ y, / b~ , and the range on the positive side (the same polarity side as the second linear electrode 32) is discriminating the disconnection position, please set the lamp, need (4) its
V 201243354 • 件。就此參照第6圖與第7圖作說明。 首先，如第6圖所示，考慮導電圖案11()之傾斜角度α ' 未達+45°(α<45。）的情況。此時，斷線部位之γ方向位置 與使用第4圖說明之情況同樣地，可從初期位置至第一線 狀電極30之檢測信號上昇時序的第二感测器2〇移動之移 動距離hi獲得。 另外’此時斷線部位之X方向位置，與在第二線狀電 極32位於斷線部位正上方的時刻（第6圖之時序幻，從第 二線狀電極32之頂端至斷線部位的X方向距離h2相等。 然後，該X方向距離…與從第一線狀電極3〇位於斷線部 位之正上方的時序（第6圖之時序b)至第二線狀電極2位 於，線部位之正上方的時序(第6圖之時序d)之間，第二感 ^ ^移動的γ方向距離h3相等。此處，所謂第一線狀 Γ昇之日= 於㈣部位正上方之時，即是第-檢測信號 上方之眛皮4外，所謂第二線狀電極32位於斷線部位正 圖案U。之:二是第二檢測信號下降之時序。因此，導電V 201243354 • Pieces. This will be explained with reference to Figs. 6 and 7. First, as shown in Fig. 6, a case where the inclination angle α ' of the conductive pattern 11 () is less than +45 (α < 45 Å) is considered. At this time, the γ-direction position of the disconnected portion is the moving distance hi of the second sensor 2 〇 from the initial position to the detection signal rising timing of the first linear electrode 30 as in the case of the fourth embodiment. obtain. In addition, the position of the X-direction of the disconnected portion at this time is at a timing immediately above the broken portion of the second linear electrode 32 (the timing of FIG. 6 is illusory, from the top end of the second linear electrode 32 to the broken portion) The X-direction distance h2 is equal. Then, the X-direction distance... is located at a timing directly from the first linear electrode 3〇 at the disconnection portion (the timing b of FIG. 6) to the second linear electrode 2, at the line portion. Between the timings directly above (the timing d in Fig. 6), the gamma direction distance h3 of the second sense ^^ is equal. Here, when the first linear lift date = directly above the (four) portion, That is, except for the top 4 of the first detection signal, the second linear electrode 32 is located at the broken line positive pattern U. The second is the timing at which the second detection signal falls. Therefore, the conductive
之上昇時序Γ繁未達+45。情況下，可從第—檢測信號 方向位置。 檢測信號之下降時序獲得斷線部位之X ―人’參照第7圖，考慮導電圖案110之傾 超過+45。(〇[> 4S。、 、斜角度Ct 與使用第4 ^、的情況。此時騎部位之Y方向位置亦 圖說明的情況同樣地，可從初期位置至策一 :電極3〇之檢剛信號上昇時序的第二感測 ：： 動距離hi獲得。 移動之移 19 201243354 另外，此時斷線部位之^向位置，與 極32位於斷線部位正上方的時刻（第7圖之時序。），從第 二線狀電極32之頂端至斷線部位的χ方向距離μ相等。 紐，該X方向距與從第—線狀電極％位於斷線部 =上方的時序(第7圖之時“)至第二線狀電極”位 於斷線部位之正上方的時序（第7圖之時序e)之間，第二感 測裔20移動的γ方向距離h3相等。此處， 狀 位於斷線部位正上方之時序，即是第—檢測信號上 :之時序。此外’所謂第二線狀電極32位於斷線部位正上 =之時序’即是第二檢測信號上昇之時序。因此，導電圖The rising timing is less than +45. In this case, the position can be from the direction of the first detection signal. The falling timing of the detection signal obtains the X of the broken portion. Referring to Fig. 7, it is considered that the tilt of the conductive pattern 110 exceeds +45. (〇[> 4S., , and the oblique angle Ct and the case of using the 4th ^. In this case, the position of the riding position in the Y direction is also described in the same manner, from the initial position to the policy: the detection of the electrode 3〇 The second sensing of the signal rising timing is as follows: The moving distance hi is obtained. The moving shift 19 201243354 In addition, the position of the broken portion at this time and the position of the pole 32 directly above the broken portion (the timing of Fig. 7) The distance from the top end of the second linear electrode 32 to the broken line portion is equal to the distance μ. The New Zealand, the X-direction distance and the timing from the first linear electrode % at the disconnection portion = (Fig. 7) The time ") to the second linear electrode is located between the timing immediately above the broken portion (the timing e of Fig. 7), and the gamma direction of the second sensing 20 is equal to the distance h3. Here, the shape is located The timing immediately above the line portion is the timing of the first detection signal. Further, the timing of the so-called second linear electrode 32 being directly above the disconnection portion is the timing at which the second detection signal rises. Therefore, the conductive Figure
之傾斜角度超過+45。情況下，可從第—檢測信號之 上幵時序及第二檢測錢之上昇時賴得斷 向位置。 W =圖案則之傾斜角度α與第二線狀電極32之傾斜 :α 45 )^ <；兄下’在第二線狀電極32超過斷線部 二第二檢測信號僅瞬間上昇。換言之，第二檢測 ^虎之上#時序與第二檢難號之τ料序大致相同。因 此’使用第6圖與第7圖而說明之兩個原理中，使用任何 一個均可獲得斷線部位之χ方向位置。 換言之，從以上的說明瞭解，即妓兩個線狀電極， 更利用之時序，可鑑別斷線部位。另外，斷線 ^之^別係利用上昇時序或是下降時序，只要依據第一 第二檢測信號之下降時序與上昇時序的一致性The tilt angle is over +45. In this case, the position can be broken from the rise of the first detection signal and the rise of the second detection money. W = the inclination angle α of the pattern and the inclination of the second linear electrode 32: α 45 ) ^ <; brother's lower than the disconnection portion of the second linear electrode 32. The second detection signal rises only instantaneously. In other words, the second detection ^ tiger top # timing is substantially the same as the second detection difficulty τ sequence. Therefore, in either of the two principles explained using Figs. 6 and 7, the position of the broken portion in the χ direction can be obtained. In other words, it is understood from the above description that the two linear electrodes are used, and the timing of the use can be used to identify the broken portion. In addition, the disconnection is determined by the rising timing or the falling timing, as long as the falling timing of the first and second detection signals is consistent with the rising timing.
20 .201243354 :. 【圖式簡單說明】 • 第1圖係本發明之實施態樣中作為檢查對象的基板之 概略圖。 第2圖係本發明之實施態樣的導電圖案檢查裝置之概 略構成圖。 第3圖係本實施態樣之斷線位置鑑別原理的說明圖。 第4圖係本實施態樣之斷線位置鑑別原理的說明圖。 第5圖係本實施態樣之斷線位置鑑別原理的說明圖。 第6圖係其他實施態樣之斷線位置鑑別原理的說明 圖。 第7圖係其他實施態樣之斷線位置鑑別原理的說明 * 圖。 【主要元件符號說明】 10 導電圖案檢查裝置 12 施加機構 14 接觸端子 16 交流電源 18 第一感測器 20 第二感測器 22 感測器驅動機構 24 控制部 26 檢測電極 28 放大器 21 201243354 30 第一線狀電極 32 第二線狀電極 34 第三線狀電極 40 放大器 42 放大器 44 放大器 110 導電圖案 110a 導電圖案 110b 導電圖案 112 導電焊墊 El 像素區域 E2 連接區域 E3 中間區域 hi 移動距離 h2 X方向距離 h3 Y方向距離20 .201243354 :. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a substrate to be inspected in an embodiment of the present invention. Fig. 2 is a schematic configuration view of a conductive pattern inspecting apparatus according to an embodiment of the present invention. Fig. 3 is an explanatory view showing the principle of the disconnection position discrimination of the present embodiment. Fig. 4 is an explanatory view showing the principle of the disconnection position discrimination of the present embodiment. Fig. 5 is an explanatory view showing the principle of the disconnection position discrimination of the present embodiment. Fig. 6 is an explanatory view showing the principle of the disconnection position discrimination of other embodiments. Figure 7 is a description of the principle of disconnection position discrimination in other embodiments. [Main component symbol description] 10 Conductive pattern inspection device 12 Application mechanism 14 Contact terminal 16 AC power supply 18 First sensor 20 Second sensor 22 Sensor drive mechanism 24 Control portion 26 Detection electrode 28 Amplifier 21 201243354 30 One linear electrode 32 second linear electrode 34 third linear electrode 40 amplifier 42 amplifier 44 amplifier 110 conductive pattern 110a conductive pattern 110b conductive pattern 112 conductive pad El pixel area E2 connection area E3 middle area hi moving distance h2 X direction distance H3 Y direction distance
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| JP3589923B2 (en) * | 1999-01-21 | 2004-11-17 | シャープ株式会社 | Electrode pattern inspection apparatus and electrode pattern inspection method |
| JP2002365325A (en) * | 2001-06-11 | 2002-12-18 | Oht Inc | Circuit pattern inspection device, circuit pattern inspection method and storage medium |
| US20060043153A1 (en) * | 2002-11-30 | 2006-03-02 | Shuji Yamaoka | Circuit pattern inspection device and circuit pattern inspection method |
| JP4562358B2 (en) * | 2003-07-04 | 2010-10-13 | 株式会社ユニオンアロー・テクノロジー | Conductive pattern inspection device |
| JP4559204B2 (en) * | 2004-12-10 | 2010-10-06 | 日置電機株式会社 | Circuit board inspection apparatus and circuit board inspection method |
| JP4417858B2 (en) * | 2005-01-19 | 2010-02-17 | オー・エイチ・ティー株式会社 | Circuit pattern inspection apparatus and method |
| JP2006200993A (en) * | 2005-01-19 | 2006-08-03 | Oht Inc | Circuit pattern inspection device and its method |
| JP3989488B2 (en) * | 2005-01-19 | 2007-10-10 | オー・エイチ・ティー株式会社 | Inspection device, inspection method, and sensor for inspection device |
| JP2006300665A (en) * | 2005-04-19 | 2006-11-02 | Oht Inc | Inspection device, and conductive pattern inspection method |
| JP4291843B2 (en) * | 2006-10-19 | 2009-07-08 | 株式会社東京カソード研究所 | Pattern inspection device |
| JP4856120B2 (en) * | 2008-06-06 | 2012-01-18 | 株式会社ユニオンアロー・テクノロジー | Conductive pattern inspection device |
| JP5290697B2 (en) * | 2008-10-20 | 2013-09-18 | 日置電機株式会社 | Reference data creation method and circuit board inspection apparatus |
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| CN102759679B (en) | 2014-08-06 |
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