201241762 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種在對例如LSI製造工廠之化合物半導 體工廠等進行再開發或於人工作業工廠中，利用至少包含 離線裝置之一個或複數個處理裝置，而管理製造發光二極 . 體（LED)或半導體雷射元件等之半導體發光元件等之半導 體元件時之生產之生產管理系統及使用其之生產管理方 法、用以使電腦實行該生產管理方法之控制程式、存儲該 控制程式之電腦之可電腦讀取之可讀取記憶媒體。 【先前技術】 在先前之LSI製造工廠等中，根據專利文獻丨，有如下之 控制系統之提案：在半導體製造工序之批次搬運中，將自 動控制、管理自動搬運、設備與搬運機器之系統作為前 提’以設備運轉狀況之收集與設備處理計劃之計算、必要 之搬運台車數之計算結果為基礎，以使等待時間成為最短 之方式進行搬運指示。在該控制系統中，關於生產自動化 控制技術，在使生產裝置與搬運高度自動化、線上化之半 導體製造線上，藉由進行資訊之自動獲取與時間計算等， 向產之精細之指示，而可使搬運控 別是_等待時間極小化。 特 ,根據專利文獻2，有如下之控制系統之提案：在半導體 製造工序之批次搬運中’將自動控制、管理自動搬運、嗖 備與搬運機器之系統作為前提，以設備運轉狀況之收集與 设備處理計劃之計算、必要之搬運台車數之計算結果為基 160338.doc 201241762 礎’以使等待時間成為最短之方式進行搬運指示。在該控 制系統中，作為可實現半導體製造工廠之人員性.時間性 批次之現實化之系統程式技術，有如下之技術之報告： 為進彳于批次進展狀況之詳細分析與裝置運轉狀態之分析， 接收來自裝置之事件資訊（並非SECS(SEMI Equipment Communications Standard ： SEMI 通訊設備標準，判定該 事件為哪個批次之資訊，在哪個裝置·端口得以處理者， 而於資料庫中蓄積資訊。 根據專利文獻3，有如下之控制系統之提案：在半導體 製造工序之批次搬運中，將自動控制、管理自動搬運、設 備與搬運機器之系統作為前提，以設備運轉狀況之收集與 設備處理計劃計算、必要之搬運台車數之計算結果為基 礎，以使等待時間成為最短之方式進行搬運指示。 [先前技術文獻] [專利文獻] [專利文獻1]曰本特開2010-247911號公報 [專利文獻2]曰本特開2005-242987號公報 [專利文獻3]日本特開2005-100092號公報 【發明内容】 [發明所欲解決之問題] 在專利文獻1所揭示之先前技術中，係設備與搬運系統 之線上化、CIM化為前提之系統，當然，於初期設備投資 需要大量之工時、大量之反複試驗及大量之調整，初期設 備投資額亦巨大。又，在專利文獻2、3所揭示之先前技術 I60338.doc 201241762 中，亦與專利文獻1之情形相同，係設備與搬運系統之線 上化、CIM化為前提之系統，當然，初期設備投資需要大 量之工時、大量之反複試驗及大量之調整，初期設備投資 額亦巨大。 概s之’上述專利文獻1〜3之先前技術皆為以線上自動 化控制為前提之技術，特別是於人工搬運/離線裝置中展 開之情形時，適於自動搬運與線上管理之裝置改造中，需 要大量之工時、大量之反復試驗及大量之調整，需要大額 之投資，線上裝置與離線裝置混在之生產線之外，在廉價 勞動力環境下離線處理為前提之生產線、或因生產線再開 發而控制方法大幅變化之生產線及以小規模生產而非自動 化、極力抑制投資額之生產線等中，其實現較為困難。 一直追求對LSI製造工廠之化合物半導體工廠等進行再 開發或人工作業工廠之活用時，將離線之人工處理進行低 投資且基於線上之管理，從而實現節約人力與防止作業失 誤之技術。 本發明係解決上述先前之問題者，目的在於提供一種在 具有人工搬運/離線裝置之生產線上，進行適於作業管理 及節約人力之導航而實現作業之效率化及防止作業失誤之 生產管理系統及使用其之生產管理方法、用以使電腦實行 该生產管理方法之控制程式、存儲該控制程式之電腦之可 電腦讀取之可讀取記憶媒體。 [解決問題之技術手段] 本發明之生產管理系統包含：各管理個人電腦，其係對 160338.doc 201241762 包含離線裝置之複數個處理裝置之各者賦與獨特之id;讀 卡機，其係分別連接於該各管理個人電腦，而可讀取已對 複數個批次賦與各自獨特之ID及處理資訊之資料卡之内容 作為各作業者之生產資訊而讀取；及主機裝置，其係與該 各管理個人電腦交換資訊而管理工序；且，該各管理個人 電腦將生產資訊上傳至該主機裝置，該主機裝置基於上傳 之生產資料，將作業指示資訊下載至與其對應之管理個人 電腦，藉此達成上述目的。 又，較好的是，本發明之生產管理系統中之主機裝置基 於以上述讀卡機讀取上述資料卡之内容而經由上述管理個 人電腦收集之各批次之生產資訊’經由該管理個人電腦而 將批次之作業指示資訊賦與作業者。 再者，較好的是，本發明之生產管理系統中之主機裝置 保有製造流程與處理裝置之資訊、流動之批次之進度資 訊，自上述管理個人電腦接收各批次之生產資訊，判斷應 處理之批次是否設置於應處理之處理裝置± ’將對應於該 處理裝置之處理參數顯示於對應於該處理裝置之管理個人 電腦之顯示畫面上而指示作業者，對處理結束之批次，將 下-個搬ϋ目的地顯示於該管理個人電腦之顯示畫面上而 指示作業者。 再者，較好的是，在本發明之生產管理系統中上述管 理個人電腦包含：》程對照機#，其係、流程對照以上述讀 卡機讀取之批次叩及其工序内容作為上述生產資訊是否正 確’對照結果顯示控制機構，其係於顯示畫面上顯示該流 160338.doc 201241762 程對照機構所進行之對照結果及下一個處理内容；參數序 號發行機構’其係當該對照結果作為作業指示為正確時， 發行對應於該批次ID之參數序號；處理結束通知機構，其 係將對於該批次ID之處理結束一事通知至上述主機裝置； 處理歷程傳送機構，其係在上述處理裝置之處理歷程寫入 後，將該處理裝置之處理歷程資料傳送至該主機裝置；及 下一工序内容顯示控制機構，其係於顯示晝面上控制顯示 「晶匣之取出」之訊息，且使「入庫堆料機」或「下一工 序之處理裝置」顯示；且，上述主機裝置包含：參數登錄 機構，其係接收該參數序號之發行，將對應於參數序號之 内容登錄於資料庫中；處理開始指示機構，其係在該參數 内容之登錄後，經由該管理個人電腦而對該處理裝置指示 處理開始」，處理歷程寫入指示機構，其係接收處理結 束通知，對該管理個人電腦進行指示以使其寫入該處理裝 置之處理歷程資料；處理歷程登錄機構，其係接收來自該 管理個人電腦之傳送處理歷程資料，且將該處理裝置之處 理歷程資料登錄於該資料庫中；及下一工序内容顯示指示 機構，其係對該管理個人電腦進行下一工序内容之顯示指 示0 再者，較好的是，本發明之生產管理系統中之對照結果 顯示控制機構係當上述對照結果作為處理指示為不正確 時，於顯示畫面上控制顯示「警告」及其「搬運目的 地」。 本發明之生產管理方法係使用本發明之上述生產管理系 160338.doc 201241762 統者’且包含如下步驟：使上述主機裝置保有製造流程與 處理裝置之資訊、流動之批次之進度資訊，該主機裝置接 收來自上述管理個人電腦各者之生產資訊，判斷應處理之 生產作業是否設置於應處理之適當之處理裝置上，自該主 機裝置經由該管理個人電腦，將對應於該處理裝置之處理 參數顯示指示作業者，該主機裝置相對處理結束之生產作 業，經由該管理個人電腦而將下一個搬運目的地指示作業 者’藉此達成上述目的。 又，較好的是，在本發明之生產管理方法中，上述管理 個人電腦包含：由流程對照機構流程對照輸入之批次出及 其工序内容作為上述生產資訊是否正確之流程對照步驟；201241762 VI. [Technical Field] The present invention relates to a method of redeveloping a compound semiconductor factory or the like, for example, an LSI manufacturing factory, or using one or a plurality of processes including at least an offline device in a manual operation factory. And a production management system for manufacturing a semiconductor element such as a semiconductor light-emitting element such as a light-emitting diode (LED) or a semiconductor laser element, and a production management method using the same, for enabling the computer to perform the production management The control program of the method and the computer-readable readable memory medium of the computer storing the control program. [Prior Art] In the LSI manufacturing plant and the like, according to the patent document, there is a proposal for a control system that automatically controls and manages automatic transportation, equipment, and transportation systems during batch transportation in a semiconductor manufacturing process. As a premise, based on the calculation of the equipment operation status and the calculation of the equipment processing plan and the calculation result of the number of necessary transportation vehicles, the transportation instruction is made so that the waiting time becomes the shortest. In the control system, with regard to the production automation control technology, in the semiconductor manufacturing line that automates and linearizes the production device and the transportation, by making automatic information acquisition and time calculation, etc. The handling control is _ waiting time is extremely small. According to Patent Document 2, there is a proposal for a control system in which a system for automatically controlling and managing automatic transportation, preparation, and transportation of a machine is used as a premise for batch transportation in a semiconductor manufacturing process, and collection of equipment operation conditions is performed. The calculation of the equipment handling plan and the calculation of the number of necessary transporting vehicles are based on the calculation of the handling of the waiting time to the shortest. In this control system, as a system program technology that can realize the actualization of personnel and time batches of semiconductor manufacturing plants, there are reports of the following technologies: Detailed analysis of the progress of the batch and operation status of the device The analysis receives the event information from the device (not SECS (SEMI Equipment Communications Standard: SEMI), which determines which batch of information is the event, and which device/port is processed, and accumulates information in the database. According to Patent Document 3, there is a proposal for a control system in which a system for automatically controlling and managing automatic transportation, equipment, and transportation equipment is used as a premise for batch transportation of semiconductor manufacturing processes, and equipment operation status collection and equipment processing plans are adopted. In the calculation and the calculation result of the number of necessary transporting vehicles, the handling instruction is carried out in such a manner that the waiting time is the shortest. [Prior Art Document] [Patent Document] [Patent Document 1] 曰本特开2010-247911号 [Patent Document 2] Unexamined Patent Publication No. 2005-242987 [Patent Document 3] Japanese Patent Laid-Open No. 2005-10 [Invention of the Invention] [Problems to be Solved by the Invention] In the prior art disclosed in Patent Document 1, a system in which the equipment and the transportation system are linearized and CIM-based is required, of course, a large amount of equipment investment is required in the initial stage. The working hours, a large number of trials and a large number of adjustments, and the initial equipment investment amount are also large. Moreover, in the prior art I60338.doc 201241762 disclosed in Patent Documents 2 and 3, it is also the same as the case of Patent Document 1, which is a device. With the premise of the onlineization and CIM of the handling system, of course, the initial equipment investment requires a large amount of labor, a large number of trial and error, and a large number of adjustments, and the initial equipment investment amount is also huge. The prior art of 3 is a technology based on the premise of online automation control, especially in the case of unfolding in manual handling/offline devices. In the transformation of devices suitable for automatic handling and online management, a large amount of man-hours and a large number of iterations are required. Experiments and a large number of adjustments require a large amount of investment, and the online and offline devices are mixed outside the production line, in the cheap labor It is difficult to realize the production line that is under the premise of off-line processing, or the production line that has undergone a drastic change in the control method due to the redevelopment of the production line, and the production line that is small-scale production rather than automation, and the amount of investment is strongly suppressed. When a compound semiconductor factory or the like is redeveloped or used in a manual operation factory, the off-line manual processing is performed with low investment and on-line management, thereby realizing technology for saving manpower and preventing work errors. The present invention solves the above problems. The purpose of the invention is to provide a production management system and a production management method using the same, which is suitable for operation management and man-saving navigation on a production line with manual handling/off-line devices, to achieve efficiency of operation and prevent operation errors, and to use the same. A computer-readable readable memory medium for causing a computer to execute a control program of the production management method and a computer storing the control program. [Technical means for solving the problem] The production management system of the present invention comprises: each management personal computer, which assigns a unique id to each of the plurality of processing devices including the offline device of the 160338.doc 201241762; the card reader, the system Connected to each of the management personal computers, and can read the contents of the data card that has assigned the unique ID and processing information to the plurality of batches as the production information of each operator; and the host device, And managing the process by exchanging information with the management personal computers; and the management personal computers upload the production information to the host device, and the host device downloads the job instruction information to the management personal computer corresponding thereto according to the uploaded production materials. In order to achieve the above objectives. Moreover, it is preferable that the host device in the production management system of the present invention passes the production information of each batch collected through the management personal computer by reading the contents of the data card by the card reader described above. The batch job instruction information is assigned to the operator. Furthermore, it is preferable that the host device in the production management system of the present invention retains the information of the manufacturing process and the processing device, and the progress information of the flow batch, and receives the production information of each batch from the management personal computer, and determines that Whether the processed batch is set in the processing device to be processed ± 'displays the processing parameter corresponding to the processing device on the display screen of the management personal computer corresponding to the processing device, and indicates the operator, and the batch to the end of the processing, The next destination is displayed on the display screen of the management personal computer to instruct the operator. Furthermore, it is preferable that in the production management system of the present invention, the management personal computer includes: "process control machine #", the system and the flow are compared with the batch read by the card reader and the content of the process as the above The production information is correct. The comparison result shows the control mechanism, which displays the comparison result and the next processing content of the stream 160338.doc 201241762. The parameter serial number issuing organization's When the job instruction is correct, the parameter number corresponding to the batch ID is issued; the processing end notification mechanism notifies the host device of the processing of the batch ID; the processing history transmission mechanism is processed After the processing history of the device is written, the processing history data of the processing device is transmitted to the host device; and the next process content display control mechanism is displayed on the display surface to control the display of the message "the removal of the wafer", and Displaying the "input stocker" or "processing device of the next process"; and the host device includes: parameter The mechanism receives the release of the parameter number, and registers the content corresponding to the parameter number in the database; the process start instruction means, after the registration of the parameter content, instructs the processing device via the management personal computer Processing start", the process history writing instruction means receiving a processing end notification, instructing the management personal computer to write the processing history data of the processing device; and processing the history registration mechanism receiving the management individual The computer transmits the processing history data, and the processing history data of the processing device is registered in the database; and the next process content display indicating mechanism indicates that the management personal computer performs the display of the next process content. Preferably, the comparison result display control means in the production management system of the present invention controls to display "warning" and "transport destination" on the display screen when the comparison result is incorrect as the processing instruction. The production management method of the present invention uses the above-mentioned production management system 160338.doc 201241762 of the present invention and includes the steps of: maintaining the information of the manufacturing process and the processing device and the progress information of the flow batch of the host device. The device receives the production information from each of the management personal computers, determines whether the production operation to be processed is set on an appropriate processing device to be processed, and the processing parameters corresponding to the processing device from the host device via the management personal computer The display operator is instructed to perform the above-mentioned purpose by indicating the operator to the next transportation destination via the management personal computer. Moreover, preferably, in the production management method of the present invention, the management personal computer includes: a process comparison step of comparing the batch input by the process with the process flow and the process content as the production information is correct;
數序號發行機構發行對應於該nID之參數㈣之參數序 制步驟；若該對照結果作為作業指示而正確， 理結束通知機構將相對該批次ID處理裝The number serial number issuing authority issues a parameter sequence step corresponding to the parameter (4) of the nID; if the comparison result is correct as the job instruction, the processing end notification mechanism will process the batch ID
由參數登錄機構將對應於參數序號 160338.doc 號發行步驟；由處理結 置之處理結束一事通知 之對照結果顯 正確，則由參 接收該參數序號之發 號之參數内容登錄於 201241762 資料庫中之參數登錄步驟；在該參數内容之登錄後， 理開始指示機構經由該管理個人電腦而對該處理裝置指干 「處理開始」之處理開始指示步驟；接收處理結束通：不 由處理歷程寫人指示機構對該管理個人電腦進行指示以使 其寫入該處理裝置之處理歷程資料之處理歷程寫人指示步 驟；由處理歷程登錄機構接收來自該管理個人電腦之傳送 處理歷程資料，且將該處理裝置之處理歷程資料登錄於該 資料庫中之處理歷程登錄步驟；&由下—卫序内容顯示指 示機構於該管理個人電腦中進行下一工序内容之顯示指示 之下一工序内容顯示指示步驟》 本發明之控制程式係記述用以使電腦實行本發明之上述 生產管理方法之處理程序者，藉此達成上述目的。 本發明之可讀取記憶媒體係存儲有本發明之上述控制程 式且為電腦可讀取者’藉此達成上述目的。 基於上述構成，以下，茲說明本發明之作用。 在本發明中，包含：各管理個人電腦，其係對包含離線 裝置之複數個處理裝置之各者賦與獨特之ID;讀卡機，其 係77別連接於該各管理個人電腦，而可讀取已對複數個生 產批次賦與各自獨特之1D及處理資訊之資料卡之内容作為 各作業者之生產資訊；及主機裝置，其係可與該各管理個 人電腦交換資訊；且該各·管理個人電腦將該各作業者之生 產資訊上傳至該主機裝置’該主機裝置基於上傳之生產資 料’將作業指示資訊下載至與其對應之管理個人電腦中。 藉此’利用資料卡’使處理批次與處理裝置關聯，以控 160338.doc 201241762 制工序全體之主機裝置進行虛擬線上管理之生產，故可實 現離線裝置之處理時之作業失誤防止（正確作業指示處理 條件指示與搬運指示處理歷程收集）及基於有效之搬運控 制之節約人力。因此，在具有人工搬運/離線裝置之生產 線上，進行適於作業管理及節約人力之導航而可實現作業 之效率化及防止作業失誤。 [發明之效果] 基於以上，根據本發明，利用資料卡，使處理批次與處 理裝置關聯，藉由控制工序全體之主機裝置進行虛擬線上 管理之生產，故可實現離線裝置處理時之作業失誤防止及 基於有效之搬運控制之節約人力。因此，在具有人工搬運/ 離線裝置之生產線上，進行適於作業管理及節約人力之導 航，而以極低投資，在小規模生產線·局部性之分散生產 線上’仍可進行與線上控制同等之生產，從而可實現作業 之效率化及防止作業失誤。 【實施方式】 以下，關於本發明之生產管理系統及生產管理方法之實 施形態，茲參照圖式詳細說明。 圖1係顯示本發明之實施形態中之生產管理系統之要部 構成例及其動作之方塊圖。 在圖1中，本實施形態之生產管理系統丨具有：各管理個 人電腦2，其係對包含離線裝置之複數個處理裝置之各者 賦與獨特之ID;主機裝置3,其係設為可與各管理個人電 腦2为別交換資訊；及讀卡機4 ’其係設為將複數個生產作 160338.doc • 10 - 201241762 業（複數個生產批-人）中各個賦與獨特之id及處理資訊（流 程）之資料卡（RF-m)自資料卡賦與裝置（未圖示）賦與作業 者，而可自該資料卡讀取各作業者之生產資訊。 於資料卡巾，嵌人有搭_為標籤^之錢體之κ:晶 片及天線，以使作業者一目了然之方式而於卡片表面上記 載有「將哪個堆料機之哪個生產作業即晶E(批次）人工搬 運至哪個處理裝置而進行作業」。資料卡，以迴避處理裝 置中之輸入失誤之方式，於IC晶片内登錄資料藉由讀卡 機4 ’容易且確實可讀取，或以條形碼表記生產條件，藉 由條形碼令易且確實可讀取。Ic晶片内之登錄資料，係 獲知例如處理所需之拙4 ^ 批-人為何者、需要如何之處理之資 料。 作為生產作業之晶!£(批次）之作業指示資訊，顯示於管 理個人電腦2之顯示畫面上，或藉由連接於管理個人電心 之資料卡賦與裝置，資料卡之内容經覆寫而得以顯示。 <設置於例如離線裝置等之處理裝置之附近之管理個人電 腦2刀別連接於主機裝置3與讀卡機4。管理個人電腦2將各 作業者之生產資訊上傳至主機裝置3 ,基於上傳之生產資 訊，主機裝置3將作業指示資訊下載至與其對應之管理個 人電腦…概言之’管理個人電腦2,藉由作業者將處理 1始口束時寫入生產批次資訊（批次ID/流程資訊）之作業 =之資料卡觸碰或靠近讀卡機4，而讀取該資料卡之内 备經由管理個人電腦2而傳送至主機裝置3»主機裝置 3 ’基於該傳送之資料卡之内容（生產批次資訊），掌握各批 I60338.doc 201241762 次之處理狀況(進展管理、正常處理之校對），使符合該批 次進展狀況之作業指示、晶匣（批次）之取出指示下一工 ㈣理裝置選定與其搬運指示顯示於管理個人電腦2之 顯示畫面，且將作業歷程自動收集於主機裝置3之資料庫 中〇 圖2係顯示，之生產管理系W中之管理個人電腦2與主 機裝置3之軟體構成例之方塊圖。 如圖2所示，本實施形態之生產管理系統】中之管理個人 電腦2具有：CPU(中央運算處理裝置m，其係作為進行全 體之控制之控制部；輸入裝置22，其係用以相對cpu2i進 行指令輸入之鍵盤、滑鼠、觸控面板及筆輸入裝置，進而 經由通訊網路（例如網際網路或内部網路）而進行接收輸 入’顯不部23 ’其係於顯示畫面上顯示初期畫面、選擇場 面、基於CPU21之控制結果畫面及操作輸入畫面等； ROM24，其係作為記憶控制程式及其資料等之可電腦讀取 之可讀取記錄媒體；ARAM25，其係作為作為起動時讀取 控制程式及其資料等，基於CPU21之各控制時讀取記憶資 料之操作記憶體而動作之記憶部。 本實施形態之生產管理系統j中之主機裝置3具有：Cpu (令央運算處理裝置則，其係作為進行全體之控制之控制 卩及資料庫32 ’其係除了作為記憶控制程式及其資料 之可電腦讀取之可堉甘触> 己錄媒體之ROM、及作為作為起 時讀取控制程式及装咨 ^及其資科等，基於咖31之各控制 取’⑽資料之操作記憶體而動作之記憶部之軸之外， I60338.doc 201241762 記憶大量之生產資訊。 作為可讀取記錄媒體之ROM，除了硬碟之外，可以擴帶 自由之光碟、磁光碟、磁碟及1C記憶體等而構成。該控制 程式及其資料等雖記憶於ROM，但該控制程式及其資料， 自其匕可3賣取記錄媒體，或，經由無線、有線或網際網 路等而下載至ROM。 管理個人電腦2中之CPU21具有：資料輸入機構211，其 、基於控制程式及其資料，將以讀卡機4讀取之批次id及 其工序内容加以資料輸入；流程對照機構212，其係流程 對照資料輸入機構211資料輸入之批次1]〇及其工序内容作 為生產資訊是否正確；對照結果顯示控制機構213，其係 於顯示畫面上顯示流程對照機構212進行之對照結果及其 後之處理内容（處理參數）；參數序號發行機構214，若對照 結果作為作業指示為正確，則發行對應於批次⑴之參數序 號；處理結束通知機構215，其係將對於該批次m之處理 結束之狀況通知至主機裝置3;處理歷程傳送機構216，其 係於處理歷程寫人將該處理裝置之處理歷程資料傳送 至主機裝置3;下一工序内容顯示控制機構217，其係於顯 示畫面上顯示控制「晶臣之取出」之訊息，且使「入庫堆 料機」或「下一工序之處理裝置」顯示。 對照結果顯示控制機構213，若對照結果作為作業指示 正確’則於顯示晝面上顯示控制「警告」&其「搬運目的 地J 〇 主機裝置3中之CPU31具有：參數登錄機構311，其係基 160338.doc 201241762 於控制程式及其資料，接收對應於管理個人電腦2之批次 ID之參數序號之發行，將對應於參數序號之參數（工序内 容）登錄於資料庫32中；處理開始指示機構312，其係基於 參數登錄機構311之對應於參數序號之參數内容（工序内容） 之登錄後，經由管理個人電腦2而相對處理裝置指示「處 理開始」；處理歷程寫人指示機構313，其係接收處理結束 通知’以相對該處理裝置之管理個人電腦2而寫人該處理 裝置之處理歷程資料之方式指示；處理歷程登錄機構 314,其係接收來自管理個人電腦2之傳送處理歷程資料， 而將該處理裝置之處理歷程f料登錄於資料庫Μ中；及下 -工序内容顯示指示機構315，其係於管理個人電腦2中進 行下一工序内容之顯示指示。 基於上述構成1說明利用本實施形態之生產管理系統 1，作業者進行生產處理之情形之一例。 、 =顯示包含制圖1之生產管理H而進行生產處 理之情形之作業者之作業處理 之流程圖。 生產“里系統1之動作例 启无，如圖3所示 料+Ml#® ，由作業者操作構成資 枓卡賦與裝置5之堆料機 出資訊。你氣「上u 個人電腦51而選擇「卡片輸 堆料機^出那^ 出資訊」’相對作業者指示自哪個 堆料機取㈣個^ (批次人 此後，在步驟S2，作業者操作堆 個處理裝置。 自資料卡印表機52印刷輸出資料㈣機管理個人電腦51而 接著’在步㈣，作業者依料刷輸出之詩卡53之内 160338.doc *14- 201241762 容而使該經指示之晶匣（批次）自源極堆料機54出庫。 其後，在步驟S4，作業者將出庫之晶匣（批次）人工搬運 至特定之處理裝置中， 進而，在步驟S5中，作業者將人工搬運之晶匣（批次）安 置於裝置裝載機，且以讀卡機4讀取資料卡53之内容。 即，作為「晶匣之安置」，作業者將晶匣（批次）安置於該處 理裝置t。藉由使資料卡接近於設置於該處理裝置之讀卡 機4,而進行「批次ID/工序讀取」，從而讀卡機4可無讀取 失誤地正確讀取以該處理裝置進行處理之批次山及其工序 内容。 以上之步驟S1〜S5，係作業者實行藉由堆料機管理個人 電腦51及資料卡53而指示之事件，且使讀卡機4讀取資料 卡53之内容之作業者之作業。 接著’在步驟S6,在管理個人電腦2中，資料輸入機構 211資料輸入以讀卡機4讀取之該處理裝置中進行處理之批 次ID及其工序内容，流程對照機構212進行各該處理裝置 之流程對照，進行「晶匣驗證、參數校對」，對照結果顯 示控制機構213將其對照結果及其後之作業内容顯示於顯 示部23。即’設置於該處理裝置之管理個人電腦2，確認 讀卡機4讀取之批次ID及其工序内容作為作業指示是否正 確。若讀卡機4讀取之批次ID及其工序内容（流程）正確， 則管理個人電腦2在其顯示畫面上相對作業者進行接收確 認。即，若該批次ID及其工序内容正確，則作為接收確 認’作業者可對處理裝置指示處理開始，管理個人電腦2 160338.doc •15· 201241762 之參數序號發行機構214發行對應於批次id之參數序號， 在步驟S7，主機裝置3接收對應於該批次id之參數序號， 主機裝置3之參數登錄機構311將晶匣（批次）及參數（工序内 容）登錄至資料庫32中。 在步驟S8中，藉由主機裝置3之參數登錄機構311之對應 於批次ID之參數序號之登錄後，處理開始指示機構312相 對處理裝置自動指示「處理開始」。 在步驟S6中，作為流程對照機構2丨2對照之結果，若該 批次ID及其工序内容不正確（否），則對照結果顯示控制機 構213於該管理個人電腦2之表示畫面上顯示控制「警告」 及其「搬運目的地」。 以上之步驟86〜88係管理個人電腦2及主機裝置3進行之 動作。 接著，在步驟S9中，於顯示畫面上發佈 2 ’作業者自該處理裝置取出晶£(批次），將該晶昆（: )人工搬運至正規之搬運目的地之處理裝置。 再者，在步賴中，基於處理開始指*機構⑴之。 理開始指示」，處理裝署μ仏& _ 裝置㈣“ 一定時間後，處: 束其處理。處理裝置，在步驟請，管理個 之處理結束通知機構215，將針 之狀況通知至主機裝置3，==Γ處理結· Μ Μ 7^, 主機裝置3之處理歷裎寫入指· 管理個人電腦2之處人處理歷程之#料之方式指示 電版處理歷程傳送機構216將該處理裝置之< 160338.doc • 16- 201241762 理歷程資料傳送至主機裝置3»在主機裝置3中，接收來自 管理個人電腦2之處理歷程資料，主機裝置3之處理歷程登 錄機構314將該處理裝置之處理歷程資料登錄至資料庫“ 中〇 ' 再者，在步驟812,主機裝置3判斷相對該晶E (批次）處 • 理是否結束，若相對該晶匣（批次）處理結束（YES)，則主 機裝置3之下一工序内容顯示指示機構315，在步驟， 於管理個人電腦2中進行下一工序内容之顯示指示，管理 個人電腦2之下一工序内容顯示控制機構217於其顯示畫面 上顯示控制「晶匣之取出」之訊息，且使「入庫堆料機」 顯示於管理個人電腦2之顯示畫面上。依據該指示，作業 者自裝置裝載機卸下該晶匣（批次）而搬運至特定指示堆料 機，使該晶匣（批次）入庫至特定指示堆料機。 又在步驟S12中，若相對該晶匣（批次）處理未結束 (NO) ’則主機裝置3之下-ji序内容顯示指示機構315，在 步驟S14’於管理個人電腦2中進行下一工序内容之顯示指 示’管理個人電腦2之下一工序内容顯示控制機構217，於 其顯不畫面上顯示「晶匣之取出」之訊息，且使「下一工 序之處理裝置」顯示於管理個人電腦2之顯示晝面上。依 據該指示’作業者自裝置裝載機卸下該晶g (批次）而搬運 至下一工序之處理裝置，作業者在步祕，將該晶£(批 次）安置於裝置裝載機’且將資料卡靠近讀卡機4,使讀卡 機4讀取卡片資訊。 以上之步驟S10〜S 14，你答裡你）i 係S理個人電腦2及主機裝置3進 160338.doc •17- 201241762 行之動作。 另’作業者’該處理裝置之處理之間，進行其他工作， 若於管理個人電腦2之顯示畫面上顯示「晶£之取出」及 「向下-工序之搬運」之指示，則自該處縣置進行「晶 E之取出」’於下一工序中人工搬運該晶g (批次）。 概言之，在管理個人電腦2中，具有：資料輸入機構2ιι 資料輸入以讀卡機4讀取之批次⑴及其工序内容之資料輸 入步驟；流程對照機構212流程對照輪入之批次ι〇及其工 序内谷作為生產資訊是否正確之流程對照步驟；對昭&果 顯示控制機構⑴於顯示畫面上顯示控制流程對照機構加 進打之對照結果及其後之作業内容之對照結果顯示控制步 驟；若對照結果作為作業指示正確，則參數序號發行機構 發行對應於減ID之參數㈣之參數序號發行步驟； 處理結束通知機構215將㈣批次ID處理裝置之處理結束 之狀況通知至主機裝置3之處理結束通知步驟；處理^置 之處理歷程寫入後’處理歷程傳送機構216將該處理裝置 之處理歷程資料傳送至主機裝置3之處理歷程傳送步驟； 下一工序内容顯示控制機構217於顯示畫面上顯示控制 「晶匣之取出」之訊息，且顯示控制「入庫堆料機」或 「下-工序之處理裝置」之下一工序内容顯示控制步驟； 在主機裝置3中’具有：接收參數序號之發行，參數登 錄機構3U將對應於參數序號之參數内容登錄於資料庫中 之參數登錄步驟；參數内容之登錄後，處理開始指示機構 312對處理裝置指示「處理開始」之處理開始指示步驟； 160338.doc 201241762 接收處理結束通知，處理歷程寫入指示機構313以相對管 理個人電腦2而寫入處理歷程資料之方式指示之處理歷程 寫入指示步驟；處理歷程登錄機構314接收來自管理個人 電腦2之傳送處理歷程資料，而將處理裝置之處理歷程資 料登錄於資料庫32中之處理歷程登錄步驟；及下一工序内 容顯示指示機構315於管理個人電腦2中進行下一工序内容 之顯不指示之下一工序内容顯示指示步驟。 以上’已說明作為主機裝置3與作業者之作業界面之管 理個人電腦2及讀卡機4，接著，利用圖4詳細說明，即使 具有離線裝置作為處理裝置之生產線，仍將實現基於生產 管理系統1之虛擬線上管理之管理個人電腦2之其他功能。 藉由以上之本實施形態之生產管理系統丨，操作員即作 業者，藉由在，夬定之週期下以人工搬運而巡迴預先決定之 根，依據顯示於管理個人電腦2之顯示畫面或資料卡（RF_ ID標籤）之作業指示用畫面之生產資訊，即使離線裝置中 不會自動接收批次之處理裝置’仍可確實進行正確之作業 處理與批次搬運.下-工序處理。藉此，在具有人工搬運/ 離線裝置之生產線上，進行適於作業管理及節約人力之導 航而確實實現作業之效率化及防止作業失誤。 圖4係圖1之生產管理系統中之離線裝置即複數個處理裝 置、管理個人電腦2及主機裝置3之配置圖。 在圖4中，於離線裝置6中設罟 τ叹置有以可確認處理裝置為異 常（警報）或運轉、非運轉（飨螬制值L、 付m(強制停止）、可處理、處理 中 '處理結束、處理等待）笙+士二.^ 哥）等之方式而點亮顯示之信號塔 160338.doc •19· 201241762 61。該離線裝置6之信號塔61廣泛用於本來之目的即檢測 運轉、非運轉等之裝置狀態。管理個人電腦2讀取包含該 裝置狀態資訊之信號塔信號/警告信號（以下簡稱為信號塔 "is號），使離線裝置6虛擬線上化而可即時資訊取得離線裝 置ό之裝置狀態。於與該信號塔61連接之信號線62，設置 讀取各種信號之解碼裝置63，以可與管理個人電腦2進行 線上通訊之電子機器讀取’藉此，無需改造離線裝置6之 裝置本體，而將離線裝置6之裝置狀態自管理個人電腦2傳 送其裝置狀態資訊至進行工序管理之主機裝置3。 該生產管理系統1具有：主機裝置3，其對至少包含一個 或複數個離線裝置6之一個或複數個處理裝置，具有批次 之處理流程進展管理功能；及各管理個人電腦2，其係讀 取以點亮、非點亮而通知附加於離線裝置6之裝置運轉狀 況之信號塔信號（包含警報信號），而將離線裝置6之裝置狀 態資訊（異常（警報）或運轉、非運轉狀態資訊；裝置是否可 用之資訊）傳送至主機裝置3;且主機裝置3基於至少包含 離線裝置6之一個或複數個處理裝置之各裝置狀態資訊（異 常（警報）或運轉、非運轉狀態資訊；裝置是否可用之資 訊）’經由各管理個人電腦2而輸出批次之作業指示資訊。 該情形，在主機裝置3中，自複數個離線裝置6同時檢測 作業所需之信料，综合判㈣次之處理優先順序、作業 者當前地點等，向各離線裝置6之管理個人電腦2輸出作業 指示資訊。即，自至少包含離線裝置6之一個或複數個處 理裝置同時檢測作業所需之信號時，主機裝置3綜合判斷 160338.doc -20- 201241762 批次之處理優先順序、作業者當前地點等之生產條件，經 由至少包含離線裝置6之一個或複數個處理裝置之各者之 各管理個人電腦2而使作業指示資訊輸出。又，由自離線 裝置6讀取之信號塔信號中所含之處理開始信號、與預先 登錄之離線裝置6之製程時間，預測處理結束時刻，而向 各離線裝置6之管理個人電腦2輸出作業預約指示。主機裝 置3由自至少包含離線裝置6之一個或複數個處理裝置分別 讀取之處理開始信冑、與預先登錄之製程時間而預測處理 結束時刻，經由至少包含離線裝置6之一個或複數個處理 裝置之各者之各管理個人電腦2,使作業預約指示資訊輸 出。 可考量經由該各管理個人電腦2之批次之作業指示資 訊，於各管理個人電腦2之顯示部23之顯示畫面上，以文 章或圖樣等進行顯示輸出，或於異常（警報）時等藉由蜂鳴 器等而進行音頻輸出’藉此對作業者進行各種指示輸出。 作為使用該生產管理系統丨之生產管理方法，係由管理 % A f腦2讀取以點亮 '非點亮而通知附加於離線裝置^之 裝置運轉狀況之信號塔信號（包含警報信號），將離線裝置6 之裝置狀態資訊傳送至主機裝置3,主機裝置3基於離線裝 置6之裝置狀態資訊’經由管理個人電腦2，使離線裝置之 批次之作業指示資訊輸出1，本實施形態之生產管理方 法，係由各管理個人電腦2讀取以點亮、非點亮而通知附 加於離線裝置6之裝置運轉狀況之信號塔信號（包含警報作 號）’將至少包含離線裝置6之—個或複數個處理裝置之裝 160338.doc 21 · 201241762 置狀態資訊分別傳送至主機裝 含離線裝置6之-個或複數個 經由對應之各管理個人電腦2 ’使至少包含離 個或複數個處理裝置之批次之 裝置6之 形，管理個人電腦2將裝置狀熊 -清 機裝置3基於上傳之裝置狀^ ° I機裝置3，主 狀裝置狀態f訊，將批次之 讯分別下載至與其對應之各管理個人電腦2中。The parameter registration mechanism will correspond to the parameter number 160338.doc issuing step; if the comparison result of the processing of the process completion is correct, the parameter content of the number of the parameter receiving the parameter number is registered in the 201241762 database. a parameter registration step; after the registration of the parameter content, the process start instruction means refers to the process start instruction step of the "processing start" to the processing device via the management personal computer; the reception process ends: the process history writer does not indicate a process of instructing the management personal computer to instruct the processing history of the processing device to be written to the processing device; the processing history registration mechanism receives the transmission processing history data from the management personal computer, and the processing device The processing history data is registered in the processing history registration step in the database; & the lower-wei order content display instruction unit displays the next process content display instruction in the management personal computer. The control program of the present invention is described for implementing a computer The above-described object is achieved by the processing program of the above-described production management method of the present invention. The readable memory medium of the present invention stores the above-described control method of the present invention and is a computer readable person' thereby achieving the above object. Based on the above configuration, the action of the present invention will be described below. In the present invention, each of the management personal computers includes a unique ID for each of a plurality of processing devices including the offline device; the card reader is connected to the management personal computers, and Reading the content of the data card that has assigned the unique 1D and processing information to the plurality of production batches as the production information of each operator; and the host device, which can exchange information with the management personal computers; The management personal computer uploads the production information of each operator to the host device 'the host device downloads the job instruction information based on the uploaded production materials' to the management personal computer corresponding thereto. By using the "data card" to associate the processing batch with the processing device, the main device of the 160338.doc 201241762 process can be controlled for virtual online management, so that the operation error of the offline device can be prevented (correct operation) Indicates the processing condition indication and the handling indication process history collection) and the labor saving based on the effective handling control. Therefore, on the production line having the manual handling/off-line device, it is possible to realize the efficiency of the work and prevent the operation error by performing navigation for the work management and manpower saving. [Effects of the Invention] According to the present invention, by using a data card, the processing batch is associated with the processing device, and the host device of the entire control process is used for virtual online management production, so that the operation error during the offline device processing can be realized. Prevent and save manpower based on effective handling control. Therefore, on the production line with manual handling/offline devices, navigation for job management and manpower saving is carried out, and with very low investment, it can be performed on the small-scale production line/localized distributed production line. Production, so that the efficiency of the work can be achieved and the operation errors can be prevented. [Embodiment] Hereinafter, embodiments of the production management system and the production management method of the present invention will be described in detail with reference to the drawings. Fig. 1 is a block diagram showing an example of the configuration of a main part of the production management system and an operation thereof in the embodiment of the present invention. In FIG. 1, the production management system of the present embodiment has: each management personal computer 2, which assigns a unique ID to each of a plurality of processing devices including an offline device; and the host device 3 is configured to be Exchange information with each management PC 2; and the card reader 4' is designed to assign a unique id to each of the multiple productions 160338.doc • 10 - 201241762 (multiple production lots - people) The data card (RF-m) for processing information (process) is assigned to the operator from the data card assigning device (not shown), and the production information of each operator can be read from the data card. In the data card towel, the inlaid person has a _ tag for the money body of the tag ^: the chip and the antenna, so that the operator can clearly indicate which production machine is the crystal E on the surface of the card in a way that the operator can see at a glance. (Batch) Which processing device is manually transported to work." The data card can be easily and readable by the card reader 4 by means of the input error in the processing device, or can be easily read by the card reader, or can be easily read by the barcode. take. The registration information in the Ic chip is known, for example, for the processing of the required batches, and for what needs to be processed. As the crystal of the production operation, the job instruction information of the (batch) is displayed on the display screen of the management personal computer 2, or by the data card connected to the management personal computer, the content of the data card is overwritten. And can be displayed. < The management personal computer provided in the vicinity of the processing device such as an offline device is connected to the host device 3 and the card reader 4. The management personal computer 2 uploads the production information of each operator to the host device 3, and based on the uploaded production information, the host device 3 downloads the job instruction information to the management personal computer corresponding thereto (in general) 'management personal computer 2, by The operator will process the data card written to the production batch information (batch ID/process information) at the beginning of the mouth to touch or close the card reader 4, and read the data card to be managed by the management individual. The computer 2 is transferred to the host device 3»the host device 3' based on the content of the data card (production batch information), and the processing status (progress management, normal processing proofreading) of each batch of I60338.doc 201241762 is mastered. The operation instruction corresponding to the progress of the batch, the removal instruction of the wafer (batch), the next device (four) device selection and the transportation instruction are displayed on the display screen of the management personal computer 2, and the operation history is automatically collected in the host device 3 FIG. 2 is a block diagram showing a software configuration example of the management PC 2 and the host device 3 in the production management system. As shown in Fig. 2, the management personal computer 2 in the production management system of the present embodiment includes a CPU (a central processing unit m as a control unit for performing overall control, and an input unit 22 for relative use). Cpu2i performs command input keyboard, mouse, touch panel and pen input device, and then receives input through the communication network (such as the Internet or internal network). The display portion is displayed on the display screen. Screen, selection scene, control result screen based on CPU 21, operation input screen, etc.; ROM 24, which is a computer-readable readable recording medium such as a memory control program and its data; ARAM 25, which is used as a start-time reading The memory unit that operates by reading the operating memory of the memory data during each control of the CPU 21, etc. The host device 3 in the production management system j of the present embodiment has: Cpu (Calculator processing device) Then, as a control and database 32 for controlling the whole, it is computer-readable except as a memory control program and its data. The ROM of the recorded media, and the memory of the operating memory based on the operation memory of the '(10) data of each control of the coffee 31 as the reading control program and the package In addition to the axis of the department, I60338.doc 201241762 memorizes a large amount of production information. As a ROM that can read the recording medium, in addition to the hard disk, it can be expanded with free optical discs, magneto-optical discs, magnetic disks and 1C memory. Although the control program and its data are stored in the ROM, the control program and its data can be downloaded from the recording medium or downloaded to the ROM via wireless, cable or internet. The CPU 21 of 2 has: a data input unit 211, which inputs data based on the batch id and the content of the process read by the card reader 4 based on the control program and its data; the flow comparison mechanism 212, which is a process control data The input unit 211 inputs the batch 1] and its process contents as the production information is correct; the comparison result display control unit 213 displays the comparison result by the flow comparison mechanism 212 on the display screen. And the processing content (processing parameter); the parameter number issuing mechanism 214, if the comparison result is correct as the job instruction, issue the parameter number corresponding to the batch (1); the processing end notification mechanism 215, which will be for the batch The status of the processing of the m is notified to the host device 3; the processing history transmitting unit 216 is configured to transfer the processing history data of the processing device to the host device 3; the next process content display control unit 217 The message "Controlling the take-out of the crystal" is displayed on the display screen, and the "stocking machine" or "processing device for the next process" is displayed. The comparison result shows that the control unit 213, if the comparison result is correct as the job instruction, then The control "warning" is displayed on the display screen. The "transport destination J" CPU 31 in the host device 3 has a parameter registration mechanism 311 whose base is 160338.doc 201241762 for the control program and its data, and the reception corresponds to management. The issuance of the parameter number of the lot ID of the personal computer 2, and the parameter (process content) corresponding to the parameter number is registered in the database 32. The processing start instruction unit 312 instructs the processing device to instruct the "processing start" via the management personal computer 2 based on the registration of the parameter content (process content) corresponding to the parameter number of the parameter registration means 311; the processing history writer instruction The mechanism 313 receives the processing end notification 'instructed to write the processing history data of the processing device with respect to the management personal computer 2 of the processing device; the processing history registration mechanism 314 receives the transmission from the management personal computer 2 The processing history data is processed, and the processing history of the processing device is registered in the database; and the lower-process content display instruction unit 315 is instructed to display the display of the content of the next process in the management personal computer 2. An example of a case where the operator performs production processing by the production management system 1 of the present embodiment will be described based on the above configuration 1. , = A flow chart showing the operation of the operator including the production management H of the drawing 1 and performing the production processing. The production process of "Inside System 1" is not available, as shown in Figure 3, material + Ml#®, which is operated by the operator to form the information of the stacking machine of the equipment card and the device 5. You are angry with the personal computer 51. Select "Card loader to output the information" "relative to the operator from which stacker to take (four) ^ (after the batch of people, in step S2, the operator operates a stack of processing devices. Self-document printing The watch machine 52 prints the output data (4) the machine manages the personal computer 51 and then 'in step (4), the operator according to the brush output of the poem card 53 160338.doc *14- 201241762 allows the indicated wafers (batch) The source stacker 54 is taken out. Thereafter, in step S4, the operator manually transports the wafers (batch) of the stock out to a specific processing apparatus, and further, in step S5, the operator carries the manuals. The wafer (batch) is placed in the device loader, and the contents of the data card 53 are read by the card reader 4. That is, as the "placement of the wafer", the operator places the wafer (batch) on the processing device. t. by bringing the data card close to the card reader 4 disposed in the processing device The batch ID/process read" allows the card reader 4 to correctly read the batch mountain and its process contents processed by the processing device without reading errors. The above steps S1 to S5 are performed by the operator. The operator instructs the personal computer 51 and the data card 53 to indicate the event, and causes the card reader 4 to read the contents of the data card 53 by the operator's work. Then 'in step S6, in the management personal computer 2, the data The input unit 211 inputs the batch ID and the process contents processed by the processing device read by the card reader 4, and the flow matching unit 212 performs flow control of each of the processing devices to perform "crystal verification and parameter proofreading". The comparison result display control unit 213 displays the comparison result and the subsequent work content on the display unit 23. That is, the management PC 2 installed in the processing device confirms the batch ID read by the card reader 4 and its operation. Whether the content is the job instruction is correct. If the lot ID read by the card reader 4 and its process content (flow) are correct, the management PC 2 receives the confirmation on the display screen with respect to the operator. If the batch ID and the content of the process are correct, the operator can instruct the processing device to start processing, and the parameter number issuing unit 214 that manages the personal computer 2 160338.doc •15·201241762 issues parameters corresponding to the batch id. In step S7, the host device 3 receives the parameter number corresponding to the lot id, and the parameter registration unit 311 of the host device 3 registers the wafer (batch) and the parameter (process content) in the database 32. In S8, after the registration of the parameter number corresponding to the lot ID by the parameter registration means 311 of the host device 3, the processing start instruction means 312 automatically instructs "processing start" with respect to the processing means. In step S6, as a result of the comparison by the flow comparison mechanism 2丨2, if the batch ID and the content of the process are incorrect (NO), the comparison result display control unit 213 displays the control on the display screen of the management personal computer 2. "Warning" and its "transfer destination". The above steps 86 to 88 manage the operations performed by the personal computer 2 and the host device 3. Next, in step S9, 2' operator is taken out from the processing device to take out the crystal (batch), and the crystal (:) is manually transported to the processing device of the normal transfer destination. Furthermore, in the step, based on the processing start refers to the mechanism (1). "Starting the instruction", processing the installation μ仏& _ device (4) "After a certain period of time, at: processing the device. In the step, please manage the processing end notification mechanism 215, notify the host device of the status of the needle 3, ==Γ处理结· Μ Μ 7^, the processing history of the host device 3 is written to the finger • The personal computer processing history of the personal computer 2 indicates the electronic version of the processing history transfer mechanism 216 to the processing device < 160338.doc • 16- 201241762 The process data is transmitted to the host device 3»In the host device 3, the processing history data from the management personal computer 2 is received, and the processing history registration mechanism 314 of the host device 3 processes the processing device The process history data is registered in the database "中〇". Further, in step 812, the host device 3 determines whether the process is completed with respect to the crystal E (batch), and if the process is completed with respect to the wafer (batch) (YES) Then, a process content display instruction unit 315 under the host device 3 performs a display instruction of the next process content in the management personal computer 2, and manages a process content display control unit under the personal computer 2 The structure 217 displays a message for controlling the "removal of the wafer" on the display screen, and displays the "stocking machine" on the display screen of the management personal computer 2. According to the instruction, the operator removes the wafer (batch) from the device loader and transports it to a specific indicator stocker to store the wafer (batch) to a specific indicator stocker. Further, in step S12, if the processing of the wafer (batch) is not completed (NO), the host device 3 displays the instruction indicating unit 315, and proceeds to the next step in the management PC 2 in step S14. The display of the process content indication "management of the personal computer 2 under the process content display control means 217, the message "removal of the wafer" is displayed on the display screen, and the "processing device of the next process" is displayed on the management individual. The display of the computer 2 is on the screen. According to the instruction, the operator removes the crystal g (batch) from the device loader and transports it to the processing device of the next process, and the operator places the crystal (batch) on the device loader' and The card is placed close to the card reader 4, so that the card reader 4 reads the card information. The above steps S10~S 14, you answer you) i system S computer 2 and host device 3 into 160338.doc • 17- 201241762 action. In addition, the 'operator' performs other work between the processing of the processing device, and if the display of "Picking out of the crystal" and "Transporting down to the process" is displayed on the display screen of the management personal computer 2, from there The prefecture carries out the "extraction of crystal E" and manually transports the crystal g (batch) in the next step. In summary, in the management personal computer 2, there is: a data input unit 2 ιι data input step of the batch (1) read by the card reader 4 and its process content input step; the flow comparison mechanism 212 process compares the batch of the round entry Ι〇 and its process valley as the process of correct production flow control step; the display & control display mechanism (1) on the display screen to display the control flow control organization to add the comparison results and the subsequent work content comparison results The control step is displayed; if the comparison result is correct as the job instruction, the parameter number issuing authority issues a parameter number issuing step corresponding to the parameter (4) of the minus ID; and the processing end notifying means 215 notifies the status of the processing of the (4) batch ID processing device to The processing end notification step of the host device 3; the processing history transmission step of the processing history transfer mechanism 216 transmitting the processing history data of the processing device to the host device 3; the next process content display control mechanism 217 displays a message for controlling "take out of the wafer" on the display screen, and the display control "into" In the host device 3, 'there is a distribution of the parameter number received, and the parameter registration means 3U registers the parameter content corresponding to the parameter number. The parameter registration step in the database; after the registration of the parameter content, the processing start instruction unit 312 instructs the processing device to start the processing start instruction step of the "processing start"; 160338.doc 201241762 Receive processing end notification, process history writing instruction mechanism 313 The processing history instructing step is written in a manner of writing the processing history data relative to the management personal computer 2; the processing history registration unit 314 receives the transmission processing history data from the management personal computer 2, and registers the processing history data of the processing device. The process history registration step in the database 32; and the next process content display instruction means 315 in the management personal computer 2 to perform the next process content display instruction step. The above has described the management of the personal computer 2 and the card reader 4 as the work interface between the host device 3 and the operator. Next, as will be described in detail with reference to FIG. 4, even if the offline device is used as the production line of the processing device, the production management system will be realized. 1 virtual online management management of other functions of personal computer 2. According to the production management system of the present embodiment described above, the operator, that is, the operator, patrols the predetermined root by manual transportation during the predetermined period, and displays the display screen or the data card displayed on the management personal computer 2 (Production information of the operation instruction screen of the (RF_ID tag), even if the batch processing device is not automatically received in the offline device', the correct operation process and batch handling. Down-process processing can be performed. In this way, on the production line with the manual handling/off-line device, it is possible to carry out the operation management and save manpower to ensure the efficiency of the work and prevent the operation errors. 4 is a configuration diagram of an offline device, that is, a plurality of processing devices, a management personal computer 2, and a host device 3 in the production management system of FIG. 1. In FIG. 4, the offline device 6 is provided with a 罟 叹 置 to confirm that the processing device is abnormal (alarm) or operation, non-operation (manufacturing value L, pay m (forced stop), processable, and processing The signal tower 160338.doc •19· 201241762 61 is displayed in the manner of 'processing end, processing waiting', 笙+士二.^哥). The signal tower 61 of the offline device 6 is widely used for the purpose of detecting the operation state, non-operation, and the like. The management personal computer 2 reads the signal tower signal/warning signal (hereinafter referred to as the signal tower "is number) containing the device status information, so that the offline device 6 is virtually linearized and the offline information can be obtained by the instant information. A decoding device 63 for reading various signals is provided on the signal line 62 connected to the signal tower 61 so as to be readable by an electronic device that performs on-line communication with the personal computer 2, thereby eliminating the need to modify the device body of the offline device 6. The device state of the offline device 6 is transmitted from the management personal computer 2 to its host device information to the host device 3 for performing process management. The production management system 1 has: a host device 3 having one or a plurality of processing devices including at least one or a plurality of offline devices 6, having a batch process flow management function; and each management personal computer 2, which is read by The signal tower signal (including the alarm signal) for notifying the operation state of the device attached to the offline device 6 by lighting or not lighting, and the device status information (abnormal (alarm) or operation, non-operation status information of the offline device 6 The information about whether the device is available is transmitted to the host device 3; and the host device 3 is based on at least one device status information (abnormal (alarm) or operational, non-operational status information of at least one of the offline devices 6; Available information) 'The job instruction information of the batch is output via each management PC 2. In this case, in the host device 3, the plurality of offline devices 6 simultaneously detect the information required for the job, and the processing priority order of the (four) times, the current location of the operator, and the like are collectively output to the management personal computer 2 of each offline device 6. Job instruction information. That is, when at least one of the offline devices 6 or a plurality of processing devices simultaneously detects a signal required for the job, the host device 3 comprehensively determines the processing priority of the 160338.doc -20-201241762 batch, the current location of the operator, and the like. The condition is outputted via the management personal computer 2 including at least one of the offline devices 6 or each of the plurality of processing devices. Further, the processing start signal included in the signal tower signal read from the offline device 6 and the processing time of the offline device 6 registered in advance are predicted to be processed, and the operation is output to the management personal computer 2 of each offline device 6. Appointment instructions. The host device 3 predicts a processing end time from a process start letter read by at least one of the offline devices 6 or a plurality of processing devices, and a process end time, including at least one of the offline devices 6 Each of the management PCs of each of the devices outputs job reservation instruction information. The job instruction information of the batches of the management personal computers 2 can be displayed on the display screen of the display unit 23 of each management personal computer 2 by an article or a pattern, or when an abnormality (alarm) is used. The audio output is performed by a buzzer or the like 'by this, various instructions are output to the operator. As a production management method using the production management system, a signal tower signal (including an alarm signal) that is read by the management % A f brain 2 to illuminate 'non-lighting and notify the operation state of the device attached to the offline device ^, The device status information of the offline device 6 is transmitted to the host device 3, and the host device 3 outputs the job instruction information of the batch of the offline device via the management personal computer 2 based on the device status information of the offline device 6, and the production of the embodiment The management method is that the signal tower signal (including the alarm number) that is read by each management personal computer 2 to notify the operation state of the device attached to the offline device 6 to illuminate or not light up will include at least the offline device 6. Or a plurality of processing devices installed 160338.doc 21 · 201241762 The status information is transmitted to the host device containing the offline device 6 or a plurality of corresponding management personal computers 2' to at least include one or more processing devices In the form of a batch of devices 6, the management personal computer 2 is based on the device-like device of the device-like bear-cleaning device 3, the main device f hearing, the hearing of the batch corresponding to each download of administering the personal computer 2.
藉由以上，自包含離線裝置6之裝置狀態資訊(運轉、非 運轉狀態資訊）之作辨· & e # I B I , )之以Μ唬而即時掌握裝置之運轉、非 運轉狀態，藉此，進行工序f 肚機裝置3可於各離線 裝置6之管理個人電腦2之顯示畫面上準確顯示指示進行中 之生產作業（批次）搬運/處理指 號㈣之位置之作業者，藉由顯_ Μ位在看不到信 下菜者藉由顯不於各離線裝置6之管理 :人電腦2之顯示畫面上之指示，仍可確實得知處理結 束。與此㈣，當產生作業所需之信號之情形時，進行工 序管理之主機裝置3判斷優先順序’向各離線裝置6之管理 個人電腦2之顯示畫面顯示指示，藉此可管理作業之優先 順序。再者’由於可自處理開始時刻預測處理結束時刻， 藉由組人向作業者發出先行（歡）作業指示等之功能，可 提高作業者之作業效率(節約人力再者，主機裝置3可自 動口 -十離線裝置6之裝置運轉狀況資料，可即時且正確地 進行先前手動合計之運轉率管理，從而可實現生產線平衡 等之工序改善。 如以上般，雖利用本發明之較佳實施形態而例示本發 160338.doc •22- 201241762 日，但本發明不應限定於該實施形態而加以解釋。應理解 =明應僅基於專利中請範圍而解釋其範圍。本領域技術 員應理解，根據本發明之具體之較佳實施形態之記載， 基於本發明之記載及技術常識，可實施等價之範圍。本說 明書中引用之專利、專利申請案及文獻，丨内容本身與具 體記载於本㈣書者相同，其㈣係料料本說明書之 參考而援用。 [產業上之可利用性] 本發明，在例如對LSI製造工廠之化合物半導體工廠等 進行再開發或於人工作業工廠中，在管理使用至少包含離 線裝置之-個或複數個處理裝置而製造發光二極體（咖） 或+導體雷射元件等之半導體發光元件等之半導體元件時 之生產之生產管理系統及使用其之生產管理方法、用以使 電腦實行該生產管理方法之控制程式、存儲該控制程式之 可電腦讀取之可讀取記憶媒體之領域中，由於利用資料卡 (RF-ID)使處理減與處理裝置關聯，以㈣卫序全體之 主機進行虛擬線上管理之生產，故可實現離線裝置處理時 之作業失誤防止(正確作業指示、處理條件指示與搬運指 示處理歷程收集）及基於有效之搬運控制之節約人力。因 此，在具有人工搬運/離線裝置之生產線上’進行適於作 業管理及節約人力之導航，而以低投資，在小規模生產 線、局部性之分散生產線上，仍可進行與線上控制同等之 生產，從而可實現作業之效率化及防止作業失誤。 【圖式簡單說明】 ' 160338.doc •23· 201241762 圖1係顯示本發明之實施形態中之生產管理系統之要部 構成例及其動作之方塊圖。 圖2係顯示圖！之生產管理系統中之管理個人電腦與主機 裝置之軟體構成例之方塊圖。 圖3係顯示包含利用圖1之生產管理系統而進行生產處理 · 之情形之作業者之作業處理之生產管理系統之動作例之流 - 程圖。 圖4係圖1之生產管理系統中之離線裝置即複數個處理裝 置、管理個人電腦及主機裝置之配置例。 【主要元件符號說明】 1 生產管理系統 2 管理個人電腦 3 主機裝置 4 讀卡機 5 資料卡賦與裝置 6 離線裝置 21 CPU(中央運算處理裝置） 22 輸入裝置 23 顯示部 24 ROM 25 RAM 31 CPU(中央運算處理裝置） 32 資料庫 51 堆料機管理個人電腦 160338.doc -24* 201241762 52 資料卡印表機 53 資料卡 54 源極堆料機 61 信號塔 62 信號線 63 解碼裝置 211 資料輸入機構 212 流程對照機構 213 對照結果顯示控制機構 214 參數序號發行機構 215 處理結束通知機構 216 處理歷程傳送機構 217 下一工序内容顯示控制機構 311 參數登錄機構 312 處理開始指示機構 313 處理歷程寫入指示機構 314 處理歷程登錄機構 315 下一工序内容顯示指示機構 160338.doc -25-By the above, the operation state and the non-operation state of the device are grasped immediately after the device state information (operation, non-operation state information) including the offline device 6 is diagnosed & e # IBI , Performing the process f The belly machine device 3 can accurately display the operator indicating the position of the ongoing production operation (batch) handling/processing instruction (4) on the display screen of the management personal computer 2 of each offline device 6 by displaying _ The person who can not see the letter can still know that the process is finished by not being able to display the management of the offline device 6: the instruction on the display screen of the person computer 2. In the case of (4), when the signal required for the job is generated, the host device 3 that performs the process management determines the priority order 'display instruction on the display screen of the management PC 2 of each offline device 6, thereby managing the priority of the job. . Furthermore, since the function of predicting the processing end time can be self-processed, the group person can give the operator a function of the advance (job) operation instruction, etc., thereby improving the work efficiency of the operator (saving manpower, the host device 3 can automatically The operation status data of the device of the port-ten offline device 6 can immediately and correctly perform the operation rate management of the previous manual total, thereby realizing the improvement of the process such as the balance of the production line. As described above, the preferred embodiment of the present invention is utilized. The present invention is exemplified by the present invention, and the present invention is not limited to the embodiment. It should be understood that the scope should be interpreted only based on the scope of the patent, and it should be understood by those skilled in the art that The description of the preferred embodiments of the invention, based on the description of the invention and the technical common sense, can be implemented in equivalent ranges. The patents, patent applications and documents cited in the present specification, the contents of which are specifically described in the present (4) The book is the same, and the (4) material is referred to in the present specification. [Industrial Applicability] The present invention is, for example, made by LSI. Re-development of a compound semiconductor factory in a factory, or in a manual factory, manufacturing semiconductor light-emitting diodes such as light-emitting diodes or +-conductor laser elements by using at least one or more processing devices including at least off-line devices A production management system for producing a semiconductor component such as a component, a production management method using the same, a control program for causing a computer to execute the production management method, and a computer-readable readable memory medium storing the control program In the process of using the data card (RF-ID) to reduce the processing to the processing device, the virtual host management is performed by the host of the (four) Guardian, so that the operation error prevention during the offline device processing can be realized (correct operation indication and processing) Conditional indication and handling of handling instructions are collected) and labor saving based on effective handling control. Therefore, on the production line with manual handling/offline devices, it is suitable for operation management and manpower-saving navigation, while low investment, small Large-scale production lines and localized dispersed production lines can still be controlled with online In the production, the efficiency of the work can be improved and the operation error can be prevented. [Simplified description of the drawings] '160338.doc • 23· 201241762 FIG. 1 is a view showing an example of the configuration of a main part of the production management system in the embodiment of the present invention and Fig. 2 is a block diagram showing a software configuration example of a management personal computer and a host device in the production management system of Fig.! Fig. 3 is a view showing a case where production processing is performed using the production management system of Fig. 1. FIG. 4 is a configuration example of an offline device, that is, a plurality of processing devices, a management personal computer, and a host device in the production management system of FIG. 1. [Mainly. Description of component symbols] 1 Production management system 2 Management of personal computers 3 Host device 4 Card reader 5 Data card assignment device 6 Offline device 21 CPU (Central Processing Unit) 22 Input device 23 Display unit 24 ROM 25 RAM 31 CPU (Central Operation processing device) 32 Database 51 Stacker management PC 160338.doc -24* 201241762 52 Data card printer 53 Data card 54 Source stacker 61 Signal tower 62 Signal line 63 Decoding device 211 Data input mechanism 212 Flow comparison mechanism 213 Control result display control mechanism 214 Parameter number issuing mechanism 215 Processing end notification mechanism 216 Processing history Transfer mechanism 217 Next process Content display control unit 311 Parameter registration unit 312 Process start instruction unit 313 Process history write instruction unit 314 Process history registration unit 315 Next step content display instruction unit 160338.doc -25-