201237400 六、發明說明： 【發明所屬之技術領域】 方 本發明係關於氣密封裝 法以及氣密封裝之茂漏率 、氣密封裝内 檢測方法。 部之水分量檢消j 【先前技術】 在專利文獻1中揭露， 冷卻，來調查在該破璃面的 而且，若不能用目視確認凝 水分量低之良品。 藉由將氣密封裝的玻璃面強制 内壁上是否凝結露水的技術。 結露水’則判斷為氣密封裝内 先前技術文獻 專利文獻 專利文獻1 專利文獻2 專利文獻3 專利文獻4 專利文獻5 專利文獻6 曰本特開平07-126494號公報 曰本特開2001 -25741 0號公報 曰本特開平08-078445號公報 曰本特開平06-022969號公報 曰本特開2004-331 920號公報 曰本特開昭62-182643號公報 【發明内容】 發明欲解決的課題 使用專利文獻1記載之技術，無法掌握氣密封裝内部 的正確的水分量。 本發明係為了解決如上述的課題，其目的在於提供一 201237400 種肊夠莩握氣密封裝内部的正確的水分量的氣密封裝、氣 密封裝内。卩之水分量檢測方法以及使用該水分量檢測方法 之氣密封裝之洩漏率檢測方法。 解決課題之手段 本案發明的氣密封嚴，其特徵在於包括：封住電子元 件之框體，固定於马"Μ §* rin Pit ^框體内壁的結露感測器；固定於該框 體，用以測量該姓霞戌：日丨,。。、丄 Ό路感，則益破固定之位置的溫度的溫度感 測器。 本累發明之氣密封裝内部之水分量檢測方法，其特徵 在：包括：冷卻氣密封裝的框體之特定位置的步驟；藉由 1疋在該特疋位置的内壁之結露感測器檢測因為該冷卻而 =成之L冑’並由固^在該特定位置之溫度感測器感測結 2 ^驟，以及使用結露點和該氣密封裝内部的水分量 的關聯圖形，求出該氣密封裝内部的水分量的步驟。 力本案發明之氣密封裝之攻漏率檢測方法，其特徵在於 執行前述之氣密封裝内部之水分量檢測方法的步 ^將負荷施加於該氣密封裝上的步驟；在施加該負荷之 驟，^如刖述之轧在封裝内部之水分量檢測方法的步 'Ο由執行施加該負荷的步驟之前的該氣密封裝内部的水 以及執行施加該負荷的步驟之後的該氣密封裝 :水分量之差值，計算出該氣密封裝U漏率。 發明之效果 依據本發明，能夠測定氣浓 密封裝内部的正確的水分^裝内·露點以掌握氣 201237400 【實施方式】 用以實施發明之型態 實施型態1 第1圖為本發明之實施型態i的氣密封裝之示意圖。 本發明實施型態i的氣密封裝1〇包括框體12。框體12係 為將電子裝置等氣密封裝之物。結露感測器Η固定在框體 12的内壁。結露感測器14係由隨著結露之有無而改變其 電阻值之電阻所形成。線路14a與結露感測器Μ連結。線 路14a連結於延伸於框體12的外部之線路i4b。再者，在 第1圖中框體12内部的元件以虛線表示。 。。溫度感測器16固定在氣密封裝10的外壁。溫度感g 器16固定在能夠測量結露感測$ 14固定位置的溫度的士 置。亦即’溫度感測器16盡可能固^在結露感測器14白 附近。線路1 6a連結於溫度感測器1 6。 第2圖為氣密封裝1〇内部之水分量檢測方法之流系 圖：：下依據該流程圖進行說明。首先，從框體12外部并 冷部氣體吹到氣密封裝1〇的框體12的特定位置（步馬 30)。在此，特定位置係為結露感測器u被固定的位置。 第3圖為將從噴嘴丨8提供之冷卻氣體吹到框體η 特定位置的示意圖。噴嘴18具有尖端收窄的形狀。喷: 18尖端收窄之理由有二。其一 ’在喷嘴…尖端由於丨 熱膨脹造成隔熱冷卻而使氣體的溫度下降。藉此能夠將 被隔熱冷卻的氣體吹到框體12的特定位置。其二 冷部《I體集中在一點’能夠有效率且能局部地冷卻框體1 6 201237400 置。此外’氣想以使用氮氣或乾燥空氣等的惰性 紝命繼之*固疋在特定位置的内壁的結露感測器14檢測 結露’並由固定在特定位置的溫度感測器16㉟測結露點 (步驟32)。參照第4圖說明步驟32。第*圖為將電腦別 連結到結露感測器14及溫度感測器16的示意圖。因為在 路感心14的電阻發生結露現象，因此結露感測器14 的電阻值變化。電腦20檢測到上述電阻值的變化，並測定 此時溫度感測ϋ 16的溫度，即「結露點」。 繼之，由結露點求出氣密封裝1G内部的水分量（步驟 。參照第5圖說明步驟34。第5圖為結露點和氣密封 :〇内部之水分量的關聯圖(下文僅稱之為關聯昨步驟 ，中士，使用該關聯圖求出氣密封裝1Q内部的水分量。此 ，忒關聯圖係儲存於電腦20中。如&，$ tu -部的水分量時，就結束處理。未出氣密封裝内 方根據本發明實施形態1的氣密封裝内部的水分量測定 方法’藉由結露感測器14和溫度感測器16求出結露點， 並根據關聯®來測定氣密封裝内部的水分量 氣密封裝㈣的正確的水分量 ％掌握 丨的氣密封裝内部的水分量測定:二在形態 密封裝10,所以能以非破壞的方式求出水有打開氣 立第6圖為本發明實施型態1之氣密封装的變形例之干 二圖。該氣密封裝包括能夠視覺確認框體12 = 40。該玻璃窗W就是冷卻氣體吹到的部分（衫位置^ 201237400 且’結露的檢出，係藉由透過玻璃窗4〇視覺確認結露來進 打。若為此構成’可以獲致本發明實施形態]的氣密封裝 内4的水分量測定方法的效果，i因為沒有必要在框體η 内4固疋結露感測器’所以能夠使得構成簡單。 雖然結露感測器14係由電阻形成，但是只要是在結露 發生的則後特性有變化即可’並不限定為電阻。例如，结 露感測器亦可用線圈或者電容器等形成。$外也可以藉 由振動和磁場的變化來檢出結露。 」皿度感測益1 6也可以不是固定在框體i 2的外壁，而 固疋在内壁上。另外，噴嘴18 i不限定為尖端收窄的形 狀例如，也可以提供在喷嘴内部已冷卻的氣體。另外， 也可以使用將已冷卻的物體貼在框體上等的冷卻氣體之外 的方法來冷卻特定位置。 實施形態2 第7圖為本發明實施型態2之氣密封裝内部之水分量 方法之机程圖。以下依據該流程圖進行說明。首先， 將氣密封裝的溫度從1()(rc升到15()t左右（步驟5〇)。繼 Ί乳密封裝的溫度降低到常溫程度（步驟52)。繼之， 執行前述的步驟30、32以及34。 本發明實施形態2的氣密封裝内部的水分量測定方法 之特徵為’在吹出冷卻氣體求出結露點以前，具有升高氣 密封裝的溫度的步冑，以及降低氣密封裝的溫度的步^ 如此’藉由執行所謂焕乾的步驟，能夠讓在氣密封裂内部 的水分排放到氣密封裝内部的氣體中…匕，能夠精確測 201237400 定精度氣密封裝内部的水分量。另外，即使水分附著在好 露感測器上，也能夠藉由供乾而使該水分汽化，所以能提 升結露感測器對冷卻氣體的靈敏性。 實施形態3 第8圖為本發明實施型態3之褒 疋乳密封裝之洩漏率檢測 方法之流程圖。以下依據該流程圖進行說明。首先，藉由 上述說明的本發明實施形態的氣密封裝内部的水分量測定 方法來測定水分量(步驟60) '繼之，將負荷施加於氣密二 裝（步驟6 2 )。在此’負荷係為耐濕性保存測試。 繼之’ S度藉由上述說明的本發明實施形態的氣密封 裝内部的水分量測定方法來測定水分量（步驟⑷。接著執 行茂漏率的計算（步驟66)。茂漏率的計算為，由執行施加 -該負荷的步驟之前的該氣密封褒内部的水分量以及執行 -施加該負荷的步驟之後的該氣密封褒内部的水分量之： 值’计算出該氣密封裝之洩漏率。 本發明實施形態3的氣密封裝的茂漏率測定方法中， 因為能藉由已說明的方法掌握氣密封嚴内部的正確的水分 量，所以也能提升洩漏率的測定精度。 雖然將負荷施加於氣密封裝的步驟中，負荷為耐濕性 保存測試，伸是σ I处、日丨〜七 p Hb測定沒漏率即可，亦可以為其他的 、：。此外，在本發明實施形態2以及3中，也可以實施 和本發明實施形態1同程度的變形。 、 【圖式簡單說明】 9 201237400 第1圖為本發明之實施型態1的氣密封裝之示意圖。 第2圖為氣密封裝内部之水分量檢測方法之流程圖。 第3圖為將從喷嘴提供之冷卻氣體吹到框體之特定位 置的示意圖。 第4圖為將電腦連結到結露感測器及溫度感測器的示 意圖。 第5圖為結露點和氣密封裝内部之水分量的關聯圖。 第6圖為本發明實施型態1之氣密封裝的變形例之示 意圖。 第7圖為本發明實施型態2之氣密封裝内部之水分量 檢測方法之流程圖。 第8圖為本發明實施型態3之氣密封裝之洩漏率檢測 方法之流程圖。 【主要元件符號說明】 10 氣密封裝 12 框體 14 結露感測器 14a線路 14b線路 16 溫度感測器 1 6 a線路201237400 VI. Description of the Invention: [Technical Field to Which the Invention Is Applicable] The present invention relates to a leak rate of a hermetic sealing method and a hermetic package, and a method for detecting a hermetic package. In the prior art, it is disclosed in Patent Document 1 that it is cooled, and it is not possible to visually confirm that the condensed water content is low. The technique of forcing dew condensation on the inner wall by forcing the glass face of the hermetic package. The dew condensation water is judged as a hermetic seal. PRIOR ART DOCUMENT Patent Document Patent Document 1 Patent Document 2 Patent Document 3 Patent Document 4 Patent Document 5 Patent Document 6 曰本特开平07-126494号曰本特开2001-25741 0 Japanese Patent Application Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. According to the technique described in Patent Document 1, it is impossible to grasp the correct amount of moisture inside the hermetic package. The present invention has been made in an effort to solve the above problems, and an object of the invention is to provide a 201237400 airtight package or a hermetic package which is capable of gripping the correct moisture content inside the hermetic seal. The method for detecting the moisture content of the crucible and the leak rate detecting method for the hermetic package using the moisture detecting method. Means for Solving the Problem The airtight seal of the present invention is characterized in that it comprises: a frame for sealing an electronic component, and a condensation sensor fixed to a wall of a horse" ** rin Pit ^ frame; fixed to the frame body, Used to measure the surname Xia Wei: Japanese,. .丄 Ό 感 , , , , , , 益 益 益 益 益 益 益 温度 温度 温度 温度 温度 温度 温度The method for detecting the moisture content inside the hermetic package of the present invention is characterized in that it comprises: a step of sealing a specific position of the frame of the air-sealed package; and detecting by using a condensation sensor on the inner wall of the special position Because the cooling is made into L胄' and the temperature sensor is sensed by the temperature sensor at the specific position, and the associated graph of the dew point and the moisture content inside the hermetic package is used. The step of hermetically sealing the amount of moisture inside the device. The method for detecting a leak rate of a hermetic package according to the present invention is characterized in that the step of applying a load to the hermetic package is performed by performing the above-described method of detecting the moisture content inside the hermetic package; , as described in the step of the water content detecting method inside the package, the water inside the gas-tight package before the step of applying the load and the gas-sealed device after the step of applying the load: moisture The difference between the quantities, the U leak rate of the hermetic package is calculated. Advantageous Effects of Invention According to the present invention, it is possible to measure the correct moisture content inside and the dew point inside the gas-tight sealed package to grasp the gas 201237400. [Embodiment] Embodiments for implementing the invention 1 FIG. 1 is an embodiment of the present invention. Schematic diagram of the hermetic seal of state i. The hermetic package 1 of the embodiment i of the present invention includes a frame 12. The casing 12 is a gas-sealed article such as an electronic device. The condensation sensor Η is fixed to the inner wall of the frame 12. The dew sensor 14 is formed by a resistance whose resistance value is changed as the condensation is present. The line 14a is coupled to the condensation sensor Μ. The line 14a is connected to a line i4b extending outside the casing 12. Further, the elements inside the casing 12 in Fig. 1 are indicated by broken lines. . . The temperature sensor 16 is fixed to the outer wall of the hermetic package 10. The temperature sensor 16 is fixed to a temperature capable of measuring the temperature at which the dew condensation senses a fixed position of $14. That is, the temperature sensor 16 is as close as possible to the white of the condensation sensor 14. Line 16a is coupled to temperature sensor 16. Fig. 2 is a flow diagram of the method for detecting the amount of water inside the airtight device. Fig.: The following description will be made based on the flowchart. First, the outside of the casing 12 and the cold portion gas are blown to a specific position of the casing 12 of the hermetic seal 1 (step horse 30). Here, the specific position is a position at which the condensation sensor u is fixed. Fig. 3 is a schematic view showing that the cooling gas supplied from the nozzle 丨 8 is blown to a specific position of the frame η. The nozzle 18 has a shape in which the tip is narrowed. Spray: There are two reasons for the narrowing of the tip of 18. The temperature of the gas is lowered at the tip of the nozzle by the thermal expansion of the crucible. Thereby, the heat-insulated and cooled gas can be blown to a specific position of the frame 12. The second part of the cold section "I body is concentrated at one point" can efficiently and partially cool the frame 1 6 201237400. In addition, it is intended to detect condensation by a condensation sensor 14 that is fixed to the inner wall of a specific position by using an inert gas such as nitrogen or dry air, and the dew point is measured by a temperature sensor 1635 fixed at a specific position ( Step 32). Step 32 will be explained with reference to FIG. The figure is a schematic diagram of connecting the computer to the condensation sensor 14 and the temperature sensor 16. Since the condensation occurs in the resistance of the road core 14, the resistance value of the condensation sensor 14 changes. The computer 20 detects the change in the resistance value and measures the temperature of the temperature sensing ϋ 16 at this time, that is, the "dew point". Then, the moisture content inside the hermetic seal 1G is obtained from the dew point (step. Step 34 is explained with reference to Fig. 5. Fig. 5 is a correlation diagram of the dew point and the hermetic seal: the water content inside the crucible (hereinafter simply referred to as In association with the previous step, the sergeant uses the correlation map to determine the amount of moisture inside the hermetic package 1Q. Here, the 忒-related map is stored in the computer 20. If the water content of the &, tu-part is finished, the processing ends. The method for measuring the moisture content inside the hermetic package according to the first embodiment of the present invention is obtained by the condensation sensor 14 and the temperature sensor 16, and the gas seal is determined according to the correlation®. The correct moisture content of the water-sealed airtight seal (4) installed inside is measured. The moisture content inside the hermetic seal is measured: 2. In the form of sealed seal 10, the water can be obtained in a non-destructive manner. The figure is a dry view of a modified example of the hermetic seal of the embodiment 1 of the present invention. The hermetic package includes a visual confirmation frame 12 = 40. The glass window W is a portion to which the cooling gas is blown (shirt position ^ 201237400) And the detection of condensation is caused by The effect of the moisture content measurement method in the hermetic seal 4 which can be obtained in the embodiment of the present invention is formed by the glass window 4, and i is not necessary to be fixed in the frame η. The dew condensation sensor' can make the configuration simple. Although the dew sensor 14 is formed of a resistor, it is not limited to a resistor as long as it changes after the dew condensation occurs. For example, a dew sensor It can also be formed by a coil or a capacitor, etc. The condensation can also be detected by the change of vibration and magnetic field. The sense of the sensor 1 can also be fixed on the outer wall of the frame i 2 and fixed on the inner wall. Further, the nozzle 18 i is not limited to a shape in which the tip end is narrowed. For example, a gas that has been cooled inside the nozzle may be provided. Alternatively, a method of attaching the cooled object to a cooling gas such as a frame may be used. Embodiment 2 FIG. 7 is a machine view showing a method of moisture content inside the hermetic package of Embodiment 2 of the present invention. The following description will be made based on the flowchart. First, a gas seal will be described. The temperature rises from 1 () (rc to 15 () t (step 5 〇). The temperature of the sealed milk seal is lowered to the normal temperature level (step 52). Subsequently, the aforementioned steps 30, 32 and 34 are carried out. The method for measuring the moisture content in the hermetic package according to the second embodiment of the present invention is characterized in that the step of raising the temperature of the hermetic package and the step of lowering the temperature of the hermetic package are performed before the dew point is obtained by blowing out the cooling gas. ^ By doing so, the so-called revitalization step allows the moisture inside the hermetic seal to be discharged into the gas inside the hermetic package... 匕, which can accurately measure the moisture content inside the 201237400 fixed-air hermetic package. Moisture adheres to the good sensor, and the moisture can be vaporized by drying, so that the sensitivity of the condensation sensor to the cooling gas can be improved. Embodiment 3 Fig. 8 is a flow chart showing a method for detecting a leak rate of a 疋 milk sealed package according to an embodiment 3 of the present invention. The following description will be made based on this flowchart. First, the moisture content is measured by the moisture content measuring method inside the hermetic package according to the embodiment of the present invention described above (step 60). Then, the load is applied to the airtight package (step 62). Here, the load is a moisture resistance preservation test. The water content is measured by the moisture content measurement method inside the hermetic package according to the embodiment of the present invention described above (step (4). Next, the calculation of the leak rate (step 66) is performed. The calculation of the leak rate is The amount of moisture inside the hermetic seal before the step of applying the load and the amount of moisture inside the hermetic seal after the step of applying the load: a value of 'the leak rate of the hermetic seal is calculated In the method for measuring the leak rate of the hermetic package according to the third embodiment of the present invention, since the correct moisture content inside the hermetic seal can be grasped by the method described, the measurement accuracy of the leak rate can be improved. In the step of applying to the hermetic package, the load is a moisture resistance storage test, and the extension is σ I, and the 没 七 七 七 p p H 测定 测定 测定 测定 , , , , , , , , , , , , , , , , , , , 七 七 七In the second and third embodiments, the same modification as in the first embodiment of the present invention can be carried out. [Simplified description of the drawings] 9 201237400 Fig. 1 is a schematic view showing a hermetic package of the first embodiment of the present invention. Figure 2 is a flow chart of the method for detecting the moisture content inside the hermetic package. Fig. 3 is a schematic view of blowing the cooling gas supplied from the nozzle to a specific position of the frame. Fig. 4 is a diagram of connecting the computer to the condensation sensor. And Fig. 5 is a diagram showing the relationship between the dew point and the moisture content inside the hermetic package. Fig. 6 is a schematic view showing a modification of the hermetic package of the embodiment 1 of the present invention. A flowchart of a method for detecting a moisture content inside a hermetic package of the present invention. Fig. 8 is a flow chart showing a method for detecting a leak rate of a hermetic package according to Embodiment 3 of the present invention. Sealed 12 Frame 14 Condensation Sensor 14a Line 14b Line 16 Temperature Sensor 1 6 a Line