TW201237101A - Resin composition, cured object, resin film, and wiring board - Google Patents

Resin composition, cured object, resin film, and wiring board Download PDF

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TW201237101A
TW201237101A TW100134429A TW100134429A TW201237101A TW 201237101 A TW201237101 A TW 201237101A TW 100134429 A TW100134429 A TW 100134429A TW 100134429 A TW100134429 A TW 100134429A TW 201237101 A TW201237101 A TW 201237101A
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compound
resin composition
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polyfunctional
polyimine
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TWI498380B (en
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Hiroaki Adachi
Toru Kusakabe
Yoro Sasaki
Masaki Yamamoto
Yasuhito Iizuka
Kanako Mizumura
Koichiro Shimoda
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Asahi Kasei E Materials Corp
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    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/40High-molecular-weight compounds
    • C08G18/60Polyamides or polyester-amides
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    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/40High-molecular-weight compounds
    • C08G18/42Polycondensates having carboxylic or carbonic ester groups in the main chain
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    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/40High-molecular-weight compounds
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    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
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    • C08G18/69Polymers of conjugated dienes
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    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
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    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1046Polyimides containing oxygen in the form of ether bonds in the main chain
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    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1057Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain
    • C08G73/106Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain containing silicon
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L75/00Compositions of polyureas or polyurethanes; Compositions of derivatives of such polymers
    • C08L75/04Polyurethanes
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L77/00Compositions of polyamides obtained by reactions forming a carboxylic amide link in the main chain; Compositions of derivatives of such polymers
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L69/00Compositions of polycarbonates; Compositions of derivatives of polycarbonates

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  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Polyurethanes Or Polyureas (AREA)

Abstract

Provided is a resin composition with which cure warpage can be mitigated and which has excellent heat resistance and is suitable for use as a material for the surface-protective film or interlayer dielectric of a semiconductor element or for a protective dielectric, interlayer dielectric, or the like for printed wiring boards. Also provided are a resin film obtained using the resin composition and a wiring board obtained using the composition or film. This resin composition is characterized by comprising (A) a polymer, (B) a polyfunctional hydroxylated compound having two or more hydroxy groups, and (C) a polyfunctional crosslinking compound having two or more crosslinking functional groups which form crosslinks between the crosslinking compound and the polymer and/or polyfunctional hydroxylated compound, the polyfunctional crosslinking compound being capable of forming three-dimensional crosslinks between the crosslinking compound and the polymer and/or polyfunctional hydroxylated compound.

Description

201237101 六、發明說明: 【發明所屬之技術領域】 本發明係關於一種可用作半導體元件之表面保護膜、層 間絕緣膜、半導體封裝基板、黏結片、印刷布線板用保護 絕緣膜之材料的樹脂組合物,使用樹脂組合物之硬化物, 使用樹脂組合物之樹脂膜,及使用該等之布線板。 【先前技術】 作為半導體元件之表面保護膜、層間絕緣膜、印刷布線 板用保護絕緣膜之材料,開始使用财熱性優異之聚醯亞胺 系樹脂組合物。特別是於將聚醯亞胺系樹脂組合物作為可 撓性印刷布線板之絕緣材料而使用之情形時,除了耐熱性 以外亦要求硬化後之翹曲較少。作為耐熱性優異、且可減 低硬化後之翹曲的聚醯亞胺系樹脂組合物,提出了包含醋 末养聚物及胺末端寡聚物之聚酿亞胺系墨水(例如參照 專利文獻1)。 專利文獻1中所記載之聚醯亞胺系墨水於塗佈於可撓性 布線電路上之後’於250°C以上之溫度下進行熱處理將其 醢亞胺化而使用。於該酿亞胺化步驟中,由於脫溶劑或寡 聚物之酿亞胺化所帶來之閉壤反應而引起的應力,產生所 形成之聚醯亞胺樹脂之收縮。因此,麵曲之抑制未必充 分’於加工性上亦產生問題。又,於電路材料使用銅荡之 情形時,亦存在如下之問題:由於250。(:以上之熱處理而 使羧基與布線材料反應,從而造成布線材料氧化。 又’亦開發了可於低溫下醯亞胺化,且可減低硬化後之 158118.doc 201237101 赵曲的聚酿亞胺前驅物。作為此種聚醯亞胺前驅物,可列 舉:使用有炫•基謎二胺之非聚矽氧系聚醯亞胺前驅物(例 如參照專利文獻2)、或者將二胺基矽氧烷用作二胺成分之 聚矽氧系聚醯亞胺前驅物(例如參照專利文獻3、專利文獻 4)等。 [先前技術文獻] [專利文獻] [專利文獻1]日本專利特開平2-145664號公報 [專利文獻4]曰本專利特開2〇〇6_321924號公報 [專利文獻2]日本專利特開昭57-143328號公報 [專利文獻3]日本專利特開昭58_13631號公報 【發明内容】 [發明所欲解決之問題] 然而’專利文獻2中所記載的聚醯亞胺前驅物具有源自 院基轉二胺之聚酿胺酸結構、源自芳香族二胺之聚醯亞胺 結構作為結構單元。因此,於製成聚醯亞胺系樹脂組合物 而用於可撓性印刷布線板之絕緣材料中之情形時,存在如 下問題:源自芳香族二胺之聚醯亞胺部位收縮,且未必可 充分抑制硬化時之翹曲。 又’於專利文獻3及專利文獻4中所記載之聚醯亞胺前驅 物係聚妙氧系聚酿亞胺前驅物,因此於製成聚醯亞胺系樹 脂組合物而塗佈於電路基板,使其醯亞胺化而形成電路之 保護膜之情形時,於其後之預浸或接合步驟中,聚矽氧部 位偏析於表面上而使保護膜之表面變為低表面張力、高斥 158118.doc 201237101 水性,從而存在與接著成分相排斥之情形。因此存在如下 之問題:保護膜與接著片之間的接著力不足,作為保護膜 而言未必獲得充分之性能。 本發明係鑒於如上方面而成者,其目的在於提供可減低 硬化時之翹曲、耐熱性優異、且可作為半導體元件之表面 保護膜、層間絕緣膜、印刷布線板用保護絕緣膜 '層間絕 緣膜等之材料而適宜使用的樹脂組合物,使用樹脂組合物 之樹脂膜及使用該等之布線板。 [解決問題之技術手段] 本發明之樹脂組合物之特徵在於:含有(A)高分子化合 物、(B)具有2個以上羥基的多官能含羥基化合物、於前 述高分子化合物及/或前述多官能含羥基化合物之間形成 交聯鍵的具有2個以上交聯性官能基的多官能交聯性化合 物’且刖述多官能交聯性化合物可於前述高分子化合物及/ 或前述多官能含羥基化合物之間形成3維交聯。 較佳的疋於本發明之樹脂組合物中,前述高分子化合物 具有醯亞胺基及/或醯胺基,且前述3維交聯包含c=〇基及/或 NH基。 較佳的疋於本發明之樹脂組合物中,前述多官能含經基 化合物及/或前述多官能交聯性化合物為3官能以上。 較佳的是於本發明之樹脂組合物中,前述高分子化合物 具有羥基及/或羧基。 較佳的是於本發明之樹脂組合物中,作為前述多官能含 羥基化合物,包含選自兩末端酚改性聚矽氧、聚丁二烯多 158118.doc 201237101 元醇、氫化聚丁二烯多元醇、及聚碳酸酯多元醇之至少1 種。 較佳的是於本發明之樹脂組合物中,前述多官能含羥基 化合物具有脂肪族結構。 較佳的是於本發明之樹脂組合物中,前述多官能含羥基 化合物係聚碳酸酯多元醇。 較佳的是於本發明之樹脂組合物中,作為前述多官能交 聯性化合物,包含具有2個以上異氰酸酯基之多官能異氰 酸醋化合物。 較佳的疋於本發明之樹脂組合物中,前述多官能交聯性 化合物包含2個以上嵌段異氰酸酯基。 較佳的是於本發明之樹脂組合物中,前述多官能含羥基 化合物中所含之羥基與前述多官能交聯性化合物中所含之 父聯性官能基的莫耳比係羥基/交聯性官能基〜丄。 較佳的是於本發明之樹脂組合物中,相對於前述$分子 化合物_質量份而言,前述多官能含經基化合物之含量 為5質量份〜60質量份。 較佳的是於本發明之樹脂組合物中,相對於前述高分子 化合物⑽質量份而言’前述多官能交聯性化合物之含量 為5質量份〜60質量份。 較佳的是於本發明之樹脂組合物中,前述多官能含經基 化合物之數量平均分子量為500〜彡〇〇〇。 較佳的是於本發明之樹脂組合物中,前述高分子化合物 具有下述通式(1)所表示之重複結構; ϋ 158118.doc 201237101 [化1] 通式(1)201237101 6. EMBODIMENT OF THE INVENTION The present invention relates to a material which can be used as a surface protective film for a semiconductor element, an interlayer insulating film, a semiconductor package substrate, a bonding sheet, and a protective insulating film for a printed wiring board. As the resin composition, a cured product of a resin composition, a resin film of a resin composition, and a wiring board using the same are used. [Prior Art] As a material of a surface protective film, an interlayer insulating film, and a protective insulating film for a printed wiring board of a semiconductor device, a polyilylimine-based resin composition excellent in heat-generating property is used. In particular, when the polyimine-based resin composition is used as an insulating material for a flexible printed wiring board, it is required to have less warpage after hardening in addition to heat resistance. A polyamidene-based ink containing a vinegar-end polymer and an amine-terminated oligomer is proposed as a polyimine-based resin composition which is excellent in heat resistance and can reduce warpage after curing (for example, refer to Patent Document 1) ). The polyimide-based ink described in Patent Document 1 is applied to a flexible wiring circuit and then heat-treated at a temperature of 250 ° C or higher to imidize the ruthenium. In the brewing imidization step, the shrinkage caused by the de-solvent or the imidization reaction of the oligomerization of the oligomer causes shrinkage of the formed polyimide resin. Therefore, the suppression of the buckling is not necessarily sufficient. Also, in the case where the circuit material uses copper swash, there are also the following problems: due to 250. (: The above heat treatment causes the carboxyl group to react with the wiring material, thereby causing oxidation of the wiring material. Also, 'the yttrium imidation at low temperature is developed, and the hardening can be reduced. 158118.doc 201237101 An imine precursor. Examples of such a polyimide precursor include a non-polyoxynene polyimine precursor using a daunic acid diamine (for example, refer to Patent Document 2), or a diamine. A polyoxynitride-based polyimine precursor which is used as a diamine component (for example, refer to Patent Document 3 and Patent Document 4). [Prior Art Document] [Patent Document] [Patent Document 1] Japanese Patent Application Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. SUMMARY OF THE INVENTION [Problems to be Solved by the Invention] However, the polyimine precursor described in Patent Document 2 has a polyamic acid structure derived from a diamine derived from a hospital group, and a polycondensation derived from an aromatic diamine. The quinone imine structure acts as a structural unit. When the polyimine-based resin composition is used in an insulating material of a flexible printed wiring board, there is a problem in that the polyamidene derived from the aromatic diamine shrinks and does not necessarily sufficiently inhibit hardening. In the case of the polyimine precursor described in Patent Document 3 and Patent Document 4, the polyoxyimide precursor is a polyamidene resin composition. When it is applied to a circuit board to imidize it to form a protective film of the circuit, in the subsequent prepreg or bonding step, the polyoxygenated portion is segregated on the surface to make the surface of the protective film low. The surface tension and the high repulsion 158118.doc 201237101 are water-based, and thus there is a case where they are repelled from the adhesive component. Therefore, there is a problem in that the adhesive force between the protective film and the adhesive sheet is insufficient, and sufficient performance is not necessarily obtained as a protective film. In view of the above, an object of the present invention is to provide a surface protective film, an interlayer insulating film, a printed wiring board which can be used as a semiconductor element, which is excellent in warpage and heat resistance at the time of hardening. A resin composition which is suitable for use as a material for protecting an insulating film, such as an interlayer insulating film, is a resin film of a resin composition, and a wiring board using the same. [Technical means for solving the problem] The resin composition of the present invention is characterized in that A polyfunctional hydroxyl group-containing compound having (A) a polymer compound and (B) having two or more hydroxyl groups, and having two or more crosslinks formed between the polymer compound and/or the polyfunctional hydroxyl group-containing compound The polyfunctional crosslinkable compound of the functional group and the polyfunctional crosslinkable compound can form a three-dimensional crosslink between the above polymer compound and/or the above polyfunctional hydroxyl group-containing compound. In the resin composition of the invention, the polymer compound has a quinone imine group and/or a guanamine group, and the three-dimensional crosslinks include c=mercapto group and/or NH group. In the resin composition of the present invention, the polyfunctional permeation-containing compound and/or the polyfunctional crosslinkable compound is preferably a trifunctional or higher functional group. Preferably, in the resin composition of the present invention, the polymer compound has a hydroxyl group and/or a carboxyl group. Preferably, in the resin composition of the present invention, the polyfunctional hydroxyl group-containing compound comprises a phenol-modified polyfluorene selected from the two ends, polybutadiene 158118.doc 201237101, and hydrogenated polybutadiene. At least one of a polyol and a polycarbonate polyol. It is preferred that in the resin composition of the present invention, the aforementioned polyfunctional hydroxyl group-containing compound has an aliphatic structure. Preferably, in the resin composition of the present invention, the polyfunctional hydroxyl group-containing compound is a polycarbonate polyol. In the resin composition of the present invention, a polyfunctional isocyanuric acid compound having two or more isocyanate groups is preferably contained as the polyfunctional crosslinking compound. Preferably, in the resin composition of the present invention, the polyfunctional crosslinkable compound contains two or more blocked isocyanate groups. Preferably, in the resin composition of the present invention, the hydroxyl group contained in the polyfunctional hydroxyl group-containing compound and the molar ratio hydroxyl group/crosslinking of the parent functional group contained in the polyfunctional crosslinkable compound are preferably Sex functional group ~ 丄. In the resin composition of the present invention, the content of the polyfunctional permeation-containing compound is from 5 parts by mass to 60 parts by mass based on the mass% of the above-mentioned molecular compound. In the resin composition of the present invention, the content of the polyfunctional crosslinkable compound is from 5 parts by mass to 60 parts by mass based on the mass of the polymer compound (10). It is preferred that in the resin composition of the present invention, the polyfunctional content-containing compound has a number average molecular weight of 500 Å. Preferably, in the resin composition of the present invention, the polymer compound has a repeating structure represented by the following formula (1); ϋ 158118.doc 201237101 [Chemical Formula 1] Formula (1)

(於式(1)中’ Yl表示2價之有機基,Z〗表示4價之有機基;a 表示1〜50之整數)。 較佳的是於本發明之樹脂組合物中,前述高分子化合物 係聚酿亞胺。 較佳的是於本發明之樹脂組合物中,前述高分子化合物 具有下述通式(2)所表示之重複結構; [化2] 通式(2)(In the formula (1), Y1 represents a divalent organic group, Z represents an tetravalent organic group; and a represents an integer of 1 to 50). Preferably, in the resin composition of the present invention, the polymer compound is a polyienimine. Preferably, in the resin composition of the present invention, the polymer compound has a repeating structure represented by the following formula (2); [Chemical Formula 2] Formula (2)

(於式(2)中,Zl及Z2表示4價之有機基,Y!、Y2、Y3、丫4及 Ys分別獨立地表示碳數為卜碳數為5之伸烷基,亦可分 支;b、C及d分別獨立地表示卜“之整數)。 較佳的是於本發明之樹脂組合物中,前述高分子化合物 具有下述通式(3)所表示之聚醯亞胺結構及下述通式(4)所 158118.doc 201237101 [化3] 通式(3) = 之聚雜胺酸結構分別作為重複結構單元 通(In the formula (2), Z1 and Z2 represent a tetravalent organic group, and Y!, Y2, Y3, 丫4 and Ys each independently represent an alkylene group having a carbon number of 5 and a branched alkyl group; b, C and d each independently represent an "integer". Preferably, in the resin composition of the present invention, the polymer compound has a polyimine structure represented by the following formula (3) and The general formula (4) is 158118.doc 201237101 [Chemical 3] The polyhexamic acid structure of the general formula (3) = as a repeating structural unit

(於式(3)及式(4)中,m、mRlQ R"、R13及r14分別獨立地表示氫原子或碳數為卜碳數為2 4貝之有機基,R3、R6、R9、Ri2&RM分別獨立地表示号 數為1〜碳數為20之4價之有機基,^〜分別獨立地4 示〇以上100以下之整數;R,6表示4價之有機基,Ri7表示今 數為1〜碳數為90之2價之有機基)。 較佳的是於本發明之樹脂組合物中,作為構成前述通_ (3)所表示之聚醯亞胺之二胺成分,包含下述通式所 示之二胺; [化4] 通式(5) 1581I8.doc -8 - 201237101 h2n 1=)中’Ri、R2、R4、R5、〜、mR, ^ «:!Rl:" ^ n P刀別獨立為0以上3〇以 ,且滿足1 g (m+n+p)g 30)。 :佳的是於本發明之樹脂組合物中,前述高分子化合相 -下述通式(6)所表示之結構作為重複單元; [化5] 通式(6) 4 ο ΟΛ—ΪΟ f 3 s 4Η, ?1-I^-R1 资?4^-r. /Γ> ΟΑ to I/O ·Ν 3 6 4 0-2 1ψη(In the formulas (3) and (4), m, mRlQ R", R13 and r14 each independently represent a hydrogen atom or an organic group having a carbon number of 24 carbon atoms, R3, R6, R9, Ri2& RM independently represents an organic group having a number of 1 to a carbon number of 4, and 4 to independently represent an integer of 100 or more; R, 6 represents a tetravalent organic group, and Ri7 represents the present number. It is an organic group having 1 to a carbon number of 90 valence. Preferably, in the resin composition of the present invention, the diamine component constituting the polyimine represented by the above-mentioned (3) includes a diamine represented by the following formula; (5) 1581I8.doc -8 - 201237101 h2n 1=) 'Ri, R2, R4, R5, ~, mR, ^ «:!Rl:" ^ n P is independent of 0 or more, and Satisfies 1 g (m+n+p)g 30). Preferably, in the resin composition of the present invention, the polymerized phase-structure represented by the following formula (6) is a repeating unit; [Chemical Formula 5] Formula (6) 4 ο ΟΛ-ΪΟ f 3 s 4Η, ?1-I^-R1 资?4^-r. /Γ> ΟΑ to I/O ·Ν 3 6 4 0-2 1ψη

Η"··01 ffcro-αΓ 於式(9)中,R,、r2、r4、Rs、R7、&、Ri。、〜、 i4刀別獨立地表示氫原子或碳數為丨〜碳數為2〇之1價之习 機基,、R5、R9、及尺丨5表示碳數為1〜碳數為20之 之有機基,m、η、P分別獨立地表示0以上30以下之整數 Rl6表示4價之有機基’ Rn表示碳數為1〜碳數為90之2價二 有機基,A、B、c表示各單元之mol%,且滿j 0.10S (A+B)/(A+B+c)S 0.85)。 較佳的是於本發明之樹脂組合物中,前述高分子化合4 具有下述通式(7)所表示之聚.醢亞胺結構及下述通式(8); 158118.doc 201237101 表示之聚醯胺酸結構作為結構單元; [化6] 通式(7)Η"··01 ffcro-αΓ In the formula (9), R, r2, r4, Rs, R7, &, Ri. , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The organic group, m, η, and P each independently represent an integer of 0 or more and 30 or less. R16 represents a tetravalent organic group 'Rn represents a divalent diorgano group having a carbon number of 1 to a carbon number of 90, A, B, and C. Indicates the mol% of each unit, and is full of 0.10S (A+B)/(A+B+c)S 0.85). Preferably, in the resin composition of the present invention, the polymer compound 4 has a poly(indenylene) structure represented by the following formula (7) and a formula (8): 158118.doc 201237101 Polylysine structure as a structural unit; [Chemical 6] General formula (7)

通式(8)General formula (8)

(於式(7)及式(8)中,Z3及Z4係源自下述通式(9)所 羧酸二酐的4價之有機基,可分別相同亦可τ π 不之四 "J不同;Ri _ 碳數為1〜碳數為30之2價之有機基,Rl9表示 ^ 叹歎為1〜碳數 為30之1價之有機基,e表示1以上20以下之整數) [化7] 通式(9)(In the formulae (7) and (8), Z3 and Z4 are derived from the tetravalent organic group of the carboxylic acid dianhydride of the following formula (9), and may be the same or τ π not four. J is different; Ri _ has a carbon number of 1 to an organic group having a carbon number of 30, Rl9 represents ^ an sigh of 1 to an organic group having a carbon number of 30, and e represents an integer of 1 or more and 20 or less) [ 7] General formula (9)

較佳的是於本發明之樹脂組合物中,含有(D)具有2個以 上可光聚合之不飽和雙鍵的(甲基)丙烯酸酯化合物、(E)光 •10· 158118.docPreferably, in the resin composition of the present invention, (D) a (meth) acrylate compound having two or more photopolymerizable unsaturated double bonds, (E) light • 10·158118.doc

S 201237101 聚合起始劑。 較佳的是於本發明之樹脂組合物中,作為前述具有2個 以上可光聚合之不飽和雙鍵的(甲基)丙烯酸酯化合物,包 含具有3個以上雙鍵之(甲基)丙烯酸酯化合物。 較佳的是於本發明之樹脂組合物中,作為前述具有3個 以上雙鍵之(曱基)丙烯酸酯化合物,包含下述通式(1〇)所 表示之化合物; [化8] 通式(10)S 201237101 Polymerization initiator. It is preferable that the (meth) acrylate compound having two or more photopolymerizable unsaturated double bonds in the resin composition of the present invention contains a (meth) acrylate having three or more double bonds. Compound. Preferably, in the resin composition of the present invention, the (fluorenyl) acrylate compound having three or more double bonds includes a compound represented by the following formula (1〇); (10)

(於式(10)中,R2〇表示氫原子或曱基,複數個£分別獨立地 表示碳數為2〜碳數為5之伸烷基,可分別相同亦可不同;f 為1〜10之整數)。 較佳的是於本發明之樹脂組合物中,作為前述具有2個 以上可光聚合之不飽和雙鍵的(甲基)丙烯酸酯化合物,包 含具有2個雙鍵之(曱基)丙烯酸酯化合物與具有3個以上雙 鍵之(曱基)丙烯酸酯化合物。 較佳的是於本發明之樹脂組合物中,含有(F)磷化合 物。(In the formula (10), R2〇 represents a hydrogen atom or a fluorenyl group, and plural plurals each independently represent a carbon number of 2 to an alkyl group having a carbon number of 5, which may be the same or different; f is 1 to 10 The integer). It is preferred that the (meth) acrylate compound having two or more photopolymerizable unsaturated double bonds in the resin composition of the present invention contains a (fluorenyl) acrylate compound having two double bonds. And a (fluorenyl) acrylate compound having three or more double bonds. It is preferred to contain (F) a phosphorus compound in the resin composition of the present invention.

158118.doc 201237101 物’包含磷酸酯化合物及/或磷腈化合物。 本發明之樹脂組合物之特徵在於:於温度85°C、濕度 85%、1 〇〇〇小時之絕緣可靠性試驗中之層間絕緣電阻為1 〇9 口 以上 ’ 120°C 〜220°C 之黏度為 5000 Pa.S〜100000 Pa.S,且 具有伸長率不足20%之彈性區域與伸長率為5〇%以上之塑 性區域’層間絕緣層之膜厚為4〇 μιη以下。 本發明之硬化物之特徵在於:藉由將上述樹脂組合物於 100C〜130°C下加熱5分鐘〜60分鐘後,於160。(:~200。匚下加 熱15分鐘〜60分鐘而獲得。 本發明之樹脂膜之特徵在於包含:基材、及於前述基材 上所6又之上述樹脂組合物。 較佳的是於本發明之樹脂膜中,前述基材係承載膜。 較佳的是於本發明之樹脂膜中,包含於前述樹脂組合物 上所設之覆蓋膜。 較佳的是於本發明之樹脂膜中,前述基材係銅箔。 本發明之布線板之特徵在於包含:具有布線之基材,以 覆蓋前述布線之方式而設置的上述樹脂組合物。 [發明之效果] 藉由本發明可提供可減低硬化時之翹曲,耐熱性優異, 且可作為半導體元件之表面保護膜、層間絕緣膜、印刷布 線板用保護絕緣膜、層間絕緣膜等之材料而適宜使用的樹 月曰組合物、使用樹脂組合物之樹脂膜及使用該等之布線 板。 【實施方式】 158118.doc158118.doc 201237101 The article 'comprising a phosphate compound and/or a phosphazene compound. The resin composition of the present invention is characterized in that the interlayer insulation resistance in the insulation reliability test at a temperature of 85 ° C, a humidity of 85%, and an hour is 1 〇 9 or more '120 ° C to 220 ° C The film has a viscosity of 5,000 Pa·s to 100,000 Pa.s, and an elastic region having an elongation of less than 20% and a plastic region having an elongation of 5% or more. The thickness of the interlayer insulating layer is 4 μm or less. The cured product of the present invention is characterized in that the resin composition is heated at 100 ° C to 130 ° C for 5 minutes to 60 minutes, and then at 160. (:~200. Obtained by heating under the underarm for 15 minutes to 60 minutes. The resin film of the present invention is characterized by comprising: a substrate, and the above resin composition on the substrate. In the resin film of the invention, the substrate is a carrier film. Preferably, the resin film of the present invention comprises a cover film provided on the resin composition. Preferably, in the resin film of the present invention, The substrate-based copper foil is characterized in that the wiring board of the present invention includes the resin composition provided with a wiring and covering the wiring. [Effects of the Invention] Provided by the present invention It is suitable for use in materials such as a surface protective film for a semiconductor element, an interlayer insulating film, a protective insulating film for a printed wiring board, and an interlayer insulating film, which can be used for the purpose of reducing the warpage at the time of hardening, and is excellent in heat resistance. A resin film using a resin composition and a wiring board using the same. [Embodiment] 158118.doc

12- 201237101 近年來,隨著行動電話等電子機器之高功能化及輕量 化’各種電子機n中所使用之可撓性印刷基板之薄型化或 零件安裝等之高功能化不斷發展。於可撓性印刷基板之製 步驟中使用環氧系樹脂或聚醯亞胺系樹脂 ,但於使用環 氧系樹脂作為保護膜之情形時,未必充分獲得可撓性印刷 基板之薄型化中所必須之高絕緣可靠性或柔軟性、低斥力 户燃丨生又’環氧系樹脂具有反應性,因此欠缺保存 穩疋性。又,於使用先前之聚醯亞胺系樹脂之情形時,可 實現翹曲之減低或耐熱性的聚醯亞胺系樹脂價格昂貴,且 期望隨著醯亞胺化之硬化物的翹曲得到減低或耐熱性良好 之樹脂纟且合物。 本發明者等人著眼於能夠於高分子化合物或多官能含羥 基化合物之間形成3維交聯的多官能交聯性化合物。而 且’本發明者等人設想藉由對包含高分子化合物及/或多 官能含經基化合物與多官能交聯性化合物之樹脂組合物進 行加熱,由多官能交聯性化合物與多官能含羥基化合物之 間所形成的3維交聯而形成3維網狀物。進而,本發明者等 人發現藉由該3維網狀物,可實現能夠減低硬化時之趣曲 且具有優異之耐熱性的樹脂組合物,從而完成本發明。 亦即’本發明之樹脂組合物含有(A)高分子化合物、(B) 具有2個以上羥基的多官能含羥基化合物、(c)於高分子化 合物及/或多官能含羥基化合物之間形成交聯鍵的具有2個 以上交聯性官能基的多官能交聯性化合物,多官能交聯性 化合物可於高分子化合物及/或多官能含羥基化合物之間 158118.doc •13- 201237101 形成3維交聯。 於該樹脂組合物中,藉由加熱而於多官能交聯性化合物 之交聯性官能基與多官能含羥基化合物之羥基之間形成3 維交聯,藉由該3維交聯而形成3維網狀物。藉此可抑制樹 脂組合物之硬化時高分子化合物之收縮,且高分子化合 物、多官能含羥基化合物及多官能交聯性化合物之間的相 溶性提高《其結果能夠實現可減低硬化時之翹曲,耐熱性 優異’且可作為半導體元件之表面保護膜、層間絕緣膜、 印刷布線板用保護絕緣膜、層間絕緣膜等之材料而適宜地 使用的樹脂組合物》 較佳的是於本發明之樹脂組合物中,高分子化合物具有 醯亞胺基及/或醯胺基,且於多官能含羥基化合物及多官 能交聯性化合物之間所形成的3維交聯包含〇〇基及/或NH 基。藉由該構成’而於3維交聯中所含之c=〇基及/或NH基 與高分子化合物之醯亞胺基及/或醯胺基之間產生以氫鍵 為主之相互作用,因此高分子化合物、多官能含經基化合 物及多官能交聯性化合物之間的相溶性進一步提高。藉此 可進而減低硬化時之赵曲,财熱性進一步提高。 於本發明之樹脂組合物中,作為高分子化合物、多官能 含羥基化合物及多官能交聯性化合物,若為藉由加熱等而 於高分子化合物及/或多官能含羥基化合物與多官能交聯 性化合物之間形成3維交聯者,則可起到本發明之效果的 範圍内將各種化合物組合使用。以下,對本發明之樹脂組 合物之態樣加以詳細說明。 -14· 158118.doc12-201237101 In recent years, with the increase in the functionality and weight of electronic devices such as mobile phones, the flexibility of flexible printed circuit boards used in various electronic devices has been increasing. In the step of producing a flexible printed circuit board, an epoxy resin or a polyimide resin is used. However, when an epoxy resin is used as the protective film, it is not always necessary to sufficiently reduce the thickness of the flexible printed circuit board. It must have high insulation reliability or softness, low repulsion, and the epoxy resin is reactive, so it lacks storage stability. Further, in the case of using the prior polyilylimine-based resin, the polyimide resin having a reduced warpage or heat resistance is expensive, and it is desired to obtain warpage of the cured product with yttrium. Reducing or heat-resistant resin bismuth. The inventors of the present invention have focused on a polyfunctional crosslinkable compound capable of forming a three-dimensional crosslink between a polymer compound or a polyfunctional hydroxyl group-containing compound. Further, the present inventors have conceived that a polyfunctional crosslinkable compound and a polyfunctional hydroxyl group are provided by heating a resin composition containing a polymer compound and/or a polyfunctional permeation-containing compound and a polyfunctional crosslinkable compound. The 3-dimensional crosslinks formed between the compounds form a 3-dimensional network. Furthermore, the inventors of the present invention have found that a resin composition capable of reducing the interest in curing and having excellent heat resistance can be realized by the three-dimensional network, and the present invention has been completed. That is, the resin composition of the present invention contains (A) a polymer compound, (B) a polyfunctional hydroxyl group-containing compound having two or more hydroxyl groups, and (c) a polymer compound and/or a polyfunctional hydroxyl group-containing compound. a polyfunctional crosslinkable compound having two or more crosslinkable functional groups, and a polyfunctional crosslinkable compound may be formed between a polymer compound and/or a polyfunctional hydroxyl group-containing compound 158118.doc •13-201237101 3D cross-linking. In the resin composition, a 3-dimensional crosslink is formed between the crosslinkable functional group of the polyfunctional crosslinkable compound and the hydroxyl group of the polyfunctional hydroxyl-containing compound by heating, and the 3D crosslinks form 3 Dimensional mesh. Thereby, the shrinkage of the polymer compound during curing of the resin composition can be suppressed, and the compatibility between the polymer compound, the polyfunctional hydroxyl group-containing compound, and the polyfunctional crosslinkable compound can be improved, and the result can be achieved by reducing the warpage at the time of hardening. A resin composition which is excellent in heat resistance and which can be suitably used as a surface protective film for a semiconductor element, an interlayer insulating film, a protective insulating film for a printed wiring board, and an interlayer insulating film, is preferably used in the present invention. In the resin composition of the invention, the polymer compound has a quinone imine group and/or a guanamine group, and the 3-dimensional crosslink formed between the polyfunctional hydroxyl group-containing compound and the polyfunctional crosslinkable compound includes a thiol group and / or NH base. Hydrogen bond-based interaction between the c=mercapto group and/or the NH group contained in the three-dimensional crosslink and the quinone imine group and/or the mercaptoamine group of the polymer compound by the constitution Therefore, the compatibility between the polymer compound, the polyfunctional permeation-containing compound, and the polyfunctional crosslinkable compound is further improved. In this way, the curvature of the hardening can be further reduced, and the financial property is further improved. In the resin composition of the present invention, the polymer compound, the polyfunctional hydroxyl group-containing compound, and the polyfunctional crosslinkable compound are polymerized with a polymer compound and/or a polyfunctional hydroxyl group-containing compound by heating or the like. When a three-dimensional crosslinker is formed between the linked compounds, various compounds can be used in combination within the range of the effects of the present invention. Hereinafter, the aspect of the resin composition of the present invention will be described in detail. -14· 158118.doc

S 201237101 (第1態樣) 本發明之第1態樣之樹脂組合物中,多官能含經基化合 物及/或多官能交聯性化合物為3官能以上❶如上所述,若 多官能含經基化合物或多官能交聯性化合物之至少一者為 3官能以上,則藉由多官能含羥基化合物之複數個羥基與 多官能交聯性化合物之複數個交聯性官能基(例如異氰酸 酯基、噁唑啉基)之間的交聯反應而形成包含複數個C=0基 及/或NH基之3維交聯,從而可形成3維網狀物。於此情形 時,由於並未經由高分子化合物而形成的多官能含羥基化 合物與多官能交聯性化合物之間的3維網狀物,變得可抑 制高分子化合物之收縮’表現出充分之翹曲之減低及優異 之耐熱性。 於本發明之第1態樣之樹脂組合物中,藉由多官能含經 基化合物與多官能交聯性化合物之間所形成的3維網狀物 而抑制高分子化合物之收縮,因此變得可並不限制於高分 子化合物之分子結構地起到本發明之效果。因此,例如即 使於使用並不具有複雜之分子結構的廉價的高分子化合物 之情形時,亦可減低樹脂組合物硬化時之翹曲,表現出優 異之耐熱性。 (第2態樣) 於本發明之第2態樣之樹脂組合物中,高分子化合物具 有羥基及/或羧基。如上所述,由於高分子化合物具有羥 基及羧基之任意一者,於高分子化合物之羥基及/或羧基 與多官能交聯性化合物之交聯性f能基(例如異氰酸酿 158118.doc -15- 201237101 基、噁唑啉基)之間亦形成交聯鍵。藉此而於高分子化合 物、多官能含羥基化合物及多官能交聯性化合物之間形成 經由南分子化合物之3維網狀物,因此高分子化合物、多 B月b 3經基化合物及多官能交聯性化合物之相溶性提高, 變得可進步抑制高分子化合物之收縮,特別是可減低樹 脂組合物硬化時之翹曲,表現出優異之耐熱性。 於本發明之第2態樣之樹脂組合物中,經由高分子化合 物而形成3維交聯,因此多官能含羥基化合物及多官能交 聯性化合物之至少一者為3官能以上,且變得可形成3維網 狀物。又’由於形成經由高分子化合物之3維網狀物,因 此局分子化合物與多官能含經基化合物及多官能交聯性化 合物之相溶性進一步提高。因此,即使於使用與多官能含 經基化合物及多官能交聯性化合物之相溶性低的高分子化 合物之情形時’亦獲得可於可撓性印刷布線板之製造步驟 等中使用的實用的樹脂組合物。以下,對各構成要件加以 詳細說明》 (A)高分子化合物 作為高分子化合物’可於起到本發明之效果的範圍内使 用各種高分子化合物。作為高分子化合物,例如可列舉聚 醯胺、聚醯胺醯亞胺、聚醯胺酸、聚醯胺酸經醯亞胺化而 成之聚醯亞胺等。再者,於本發明中,所謂聚醯亞胺,是 指包含聚醯胺酸之一部分經醯亞胺化而成之聚醯亞胺前驅 物及聚醢胺酸之全部經醯亞胺化而成之聚醯亞胺此兩者。 於第1態樣之樹脂組合物中,作為高分子化合物,可對 •16- 158118.docS 201237101 (first aspect) In the resin composition of the first aspect of the invention, the polyfunctional permeation-containing compound and/or the polyfunctional crosslinkable compound is a trifunctional or higher functional group, as described above, and if the polyfunctional content is When at least one of the base compound or the polyfunctional crosslinkable compound is a trifunctional or higher functional group, a plurality of crosslinkable functional groups (for example, isocyanate groups, a plurality of hydroxyl groups of the polyfunctional hydroxyl group-containing compound and the polyfunctional crosslinkable compound, The cross-linking reaction between the oxazoline groups forms a 3-dimensional crosslink comprising a plurality of C=0 groups and/or NH groups, so that a 3-dimensional network can be formed. In this case, the three-dimensional network between the polyfunctional hydroxyl group-containing compound and the polyfunctional crosslinkable compound which is not formed by the polymer compound can suppress the shrinkage of the polymer compound and exhibit sufficient Reduced warpage and excellent heat resistance. In the resin composition of the first aspect of the present invention, the shrinkage of the polymer compound is suppressed by the three-dimensional network formed between the polyfunctional permeation-containing compound and the polyfunctional crosslinkable compound, and thus The effect of the present invention can be achieved without being limited to the molecular structure of the polymer compound. Therefore, for example, even when an inexpensive polymer compound having a complicated molecular structure is used, warpage at the time of curing of the resin composition can be reduced, and excellent heat resistance can be exhibited. (Second aspect) In the resin composition of the second aspect of the invention, the polymer compound has a hydroxyl group and/or a carboxyl group. As described above, since the polymer compound has any one of a hydroxyl group and a carboxyl group, a crosslinkable energy group of a hydroxyl group and/or a carboxyl group of the polymer compound and a polyfunctional crosslinkable compound (for example, isocyanic acid 158118.doc) Crosslinking bonds are also formed between -15-201237101 base, oxazoline group). Thereby, a three-dimensional network via a south molecular compound is formed between the polymer compound, the polyfunctional hydroxyl-containing compound, and the polyfunctional crosslinkable compound, so that the polymer compound, the multi-B month b 3 radical compound, and the polyfunctional compound The compatibility of the crosslinkable compound is improved, and the shrinkage of the polymer compound can be suppressed, and in particular, the warpage of the resin composition at the time of curing can be reduced, and excellent heat resistance can be exhibited. In the resin composition of the second aspect of the invention, the three-dimensional cross-linking is formed by the polymer compound. Therefore, at least one of the polyfunctional hydroxyl group-containing compound and the polyfunctional cross-linking compound is trifunctional or more. A 3-dimensional mesh can be formed. Further, since a three-dimensional network via a polymer compound is formed, the compatibility of the local molecular compound with the polyfunctional permeation-containing compound and the polyfunctional crosslinkable compound is further improved. Therefore, even when a polymer compound having low compatibility with a polyfunctional permeation-containing compound and a polyfunctional crosslinkable compound is used, 'a practical use can be obtained in a manufacturing step of a flexible printed wiring board or the like. Resin composition. In the following, each of the constituent elements will be described in detail. (A) Polymer compound As the polymer compound, various polymer compounds can be used within the range in which the effects of the present invention are exerted. Examples of the polymer compound include polyamidamine, polyamidamine, polylysine, and polyamidene which are imidized by hydrazine. Further, in the present invention, the term "polyimine" refers to a polyamidene precursor comprising a part of polylysine which is imidized by hydrazine, and all of the polyamidino acid are imidized by imidization. The two kinds of polyimine. In the resin composition of the first aspect, as a polymer compound, it can be used for •16-158118.doc

S 201237101 分子結構並無限制地使用上述之聚醯亞胺等各種高分子化 合物。於該等中,自耐熱性及耐吸濕性之觀點考慮,較佳 地使用聚醢亞胺作為高分子化合物。 於第2態樣之樹脂組合物中’作為南分子化合物,使用 於分子鏈中具有羥基及/或羧基者。作為此種高分子化合 物,可使用聚醯胺酸或於分子鏈中具有羥基或羧基之聚醯 亞胺等。 聚醢亞胺可藉由酸二酐與二胺反應而所得。於使用聚醯 亞胺作為咼分子化合物之情形時,例如可使用主要具有聚 醯亞胺結構作為重複結構單元之聚醢亞胺,亦可使用具有 聚醢亞胺結構與聚醯胺酸結構作為重複結構單元的聚醯亞 胺。 作為高分子化合物,例如可使用具有下述通式⑴所表 示之重複結構單元者》 [化9] 通式(1)S 201237101 The polymer structure is not limited, and various polymer compounds such as the above polyimine are used. Among these, polycarbonitrile is preferably used as the polymer compound from the viewpoint of heat resistance and moisture absorption resistance. In the resin composition of the second aspect, 'as a south molecular compound, it is used for having a hydroxyl group and/or a carboxyl group in a molecular chain. As such a polymer compound, polylysine or a polyimine having a hydroxyl group or a carboxyl group in a molecular chain can be used. Polyimine can be obtained by reacting an acid dianhydride with a diamine. In the case of using a polyimine as a molecular compound, for example, a polyimine having a polyimine structure as a repeating structural unit may be used, or a polyimine structure and a poly-proline structure may be used. Repeating the structural unit of the polyimine. As the polymer compound, for example, a repeating structural unit represented by the following formula (1) can be used. [Chemical Formula 9] Formula (1)

(於式(1)中,Yl表示2價之有機基,&表示4價之有機基。& 表示1〜50之整數。) 158118.doc 201237101 又,作為高分子化合物’可使収基_二胺 =所得之非㈣Μ聚酿亞胺,亦可使用二胺㈣= 與酸一酐反應而所得之聚矽氧系聚醯亞胺。 作為高分子化合物,較佳的是使用具有下述通式⑺所 表不之重複結構者。於該高分子化合物中,由於具有氧美 伸烧基’從而賦予分子鏈柔軟性,且高分子化合物: 可溶性提高。 w [化 10] 通式(2)(In the formula (1), Y1 represents a divalent organic group, & represents a tetravalent organic group. & represents an integer of 1 to 50.) 158118.doc 201237101 Further, as a polymer compound, a base can be obtained. _Diamine = the obtained non-(tetra) fluorene imine, and the polyamine oxide polyimine obtained by reacting diamine (tetra) = with acid anhydride can also be used. As the polymer compound, those having a repeating structure represented by the following formula (7) are preferably used. In the polymer compound, the molecular chain is imparted with flexibility by imparting oxygen oxyalkylene group, and the polymer compound: solubility is improved. w [Chemical 10] General formula (2)

(於式(2)中’ Z丨及Z2表示4價之有機基,Υι、γ2、γ3、\及 Υ5分別獨立地表示碳數為卜碳數為5之伸烷基,亦可分 支。b、c及d分別獨立地表示丨〜5〇之整數。) 又,作為高分子化合物,較佳的是使用具有下述通式 (3)所表示之聚醯亞胺結構及下述通式(4)所表示之聚醯胺 酸結構而分別作為重複結構單元者。於該高分子化合物 中於聚酿亞胺結構中含有烷基醚結構,且含有聚醯胺酸 結構’因此無損分子量穩定性地賦予分子鏈柔軟性,因此 顯影穩定性提高。又,於該高分子化合物中,下述通式(4) 所含之聚醯胺酸結構的羧基與多官能交聯性化合物之交聯 性官能基(例如異氰酸酯基、噁唑啉基等)反應,因此於高 158118.doc δ -18·* 201237101 分子化合物與多官能交聯性化合物之間亦形成交聯,可進 一步抑制硬化時之聚醯亞胺之收縮。又,由於羧基與交聯 性官能基反應’因此硬化物中之竣基減少,因此可獲得絕 緣性優異之硬化物。 • [化 11] 式 通 J^LRefRS /ί^[\ Cf-R3lR2 .ΙΎ(In the formula (2), 'Z丨 and Z2 represent a tetravalent organic group, and Υι, γ2, γ3, \ and Υ5 each independently represent an alkylene group having a carbon number of 5 and a branched alkyl group. And c and d each independently represent an integer of 丨~5〇.) Further, as the polymer compound, it is preferred to use a polyimine structure having the following general formula (3) and the following formula ( 4) The polyamic acid structure represented as a repeating structural unit. In the polymer compound, an alkyl ether structure is contained in the polyanilin structure, and the polyglycolic acid structure is contained. Therefore, the molecular chain is imparted with flexibility without impairing molecular weight stability, and thus development stability is improved. Further, in the polymer compound, a crosslinkable functional group (for example, an isocyanate group or an oxazoline group) of a polycarboxyl acid structure-containing carboxyl group and a polyfunctional crosslinkable compound contained in the following formula (4); The reaction thus forms a crosslink between the molecular compound and the polyfunctional crosslinkable compound at a high 158118.doc δ -18·* 201237101, which further suppresses the shrinkage of the polyimine at the time of hardening. Further, since the carboxyl group reacts with the crosslinkable functional group, the sulfhydryl group in the cured product is reduced, so that a cured product excellent in insulating properties can be obtained. • [化11]式通J^LRefRS /ί^[\ Cf-R3lR2 .ΙΎ

4V 4— R—RIR4V 4 — R—RIR

< ΟΗΛ YMO N 3 一5 4 通式(4) -Ri7*N-^ - (於式(3)及式(4)中,R!、R2、R4、r5、&、&、、< ΟΗΛ YMO N 3 - 5 4 Formula (4) -Ri7*N-^ - (In the formulas (3) and (4), R!, R2, R4, r5, &, &,

Ru、Ru及RM分別獨立地表示氫原子或碳數為丨〜碳數為2〇 之1價之有機基。R3、Re R9、Rl2&Rls分別獨立地表示碳 數為1〜碳數為20之4價之有機基,m、n、p分別獨立地表 不〇以上100以下之整數^ Rlfi表示4價之有機基,表示碳 數為1〜碳數為90之2價之有機基。) 又,作為高分子化合物,較佳的是包含下述通式(5)所 表示之二胺作為構成上述通式(3)所表示之高分子化合物的 一胺成分者。 158118.doc -19- 201237101 [化 12J 通式(5) ?13 ?15^NH2 入4Ru, Ru and RM each independently represent a hydrogen atom or a monovalent organic group having a carbon number of 丨 to a carbon number of 2 Å. R3, Re R9, Rl2 & Rls each independently represent a tetravalent organic group having a carbon number of 1 to a carbon number of 20, and m, n, and p independently represent an integer of 100 or less. The base represents an organic group having a carbon number of 1 to a carbon number of 90. Further, the polymer compound preferably contains a diamine represented by the following formula (5) as a monoamine component constituting the polymer compound represented by the above formula (3). 158118.doc -19- 201237101 [Chemical 12J General formula (5) ?13 ?15^NH2 into 4

K (於式(5)中,Ri、&、&、心、r 〜分別獨立地表示氫原子或碳數M 8^°'R"、〜 機基。R3、R6、R一Rl5分別 數為2。之4價之有機基,m、:立地表示碳數為1〜 之整數,且滿足一咖二別獨立為。以上3。以· 二表作為高分子化合物’較佳的是使用具有下述通: (6)所表示之結構作為重複單元者。 I遇- [化 13] 通式(6)K (In the formula (5), Ri, &, &, heart, r~ respectively represent a hydrogen atom or a carbon number M 8^°'R", a machine base. R3, R6, R-Rl5 respectively The number is 2. The organic group of the 4th valence, m,: the ground indicates that the carbon number is an integer of 1 to 1, and satisfies one coffee and two independently. The above 3. The second table is used as the polymer compound'. It has the following structure: (6) The structure represented as a repeating unit. I encounter - [Chemical 13] General formula (6)

音 R«->—R»Sound R«->-R»

ο .2 1 91-lflR. ψ 资 R*_yR*ο .2 1 91-lflR. ψ R*_yR*

R8 ' Rio ' R, Ri R. (於式(6)中,R,、R2、r4、 :4:別獨立地表示氫原子或碳數為1〜碳數為二價之 之右^3、R6、R9、Rl^Rl5表示碳數為1〜碳數為2〇之' 之有機基,m、n、P分别獨立地表示〇以上3〇以下之整彰 ^表示4狀有減,Rl如錢為i〜碳 :機基。A、B、C表示各單元…,且滿 〇.i〇s(a+b)/(a+b+c)s〇.85。) 158118.doc -20. 201237101 於上述通式(6)所表示之高分子化合物中,藉由滿足 0.10S (a+b)/(a+b + c),而使分子鏈中之烷基醚結構增 大,高分子化合物之分子鏈的柔軟性提高,因此可減低硬 化後之翹曲。又,藉由滿足(A+B)/(A+B + C)s 0.85,而使 分子鏈中之羧基增大,因此表現出硬化物之相對於鹼性顯 影液的溶解性,且顯影性變良好。 進而’作為高分子化合物,較佳的是使用具有下述通式 (7)所表示之聚醯亞胺結構及下述通式(8)所表示之聚醯胺 酸結構作為重複結構單元者《於該高分子化合物中,於聚 醯亞胺結構中包含矽氧烷部位,從而賦予聚醯亞胺結構適 度之柔軟性’因此可抑制高分子化合物之分子鏈之收縮, 可抑制硬化後之翹曲。又,於聚醯胺酸結構中含有芳香 環’因此可抑制聚醯胺酸結構之分子量之降i,樹脂組合 物之保存穩定性及由樹脂組合物而所得之乾膜的顯影時間 穩定性提高。進、而,聚酿亞胺結構及聚酿胺酸結構包含源 自四叛酸二酐之4價之有機基,因此賦予分子鏈適度之剛 直性,对熱性提高而使絕緣可靠性提高。 [化 14] 通式(7)R8 ' Rio ' R, Ri R. (in the formula (6), R, R2, r4, : 4: independently represent a hydrogen atom or a carbon number of 1 to a carbon number of the divalent right ^3, R6, R9, and Rl^Rl5 represent an organic group having a carbon number of 1 to a carbon number of 2 Å, and m, n, and P independently represent 整 above 3 〇 整 ^ 表示 表示 表示 表示 表示 表示 表示 表示 表示 表示 表示 表示 表示 , , Money is i ~ carbon: machine base. A, B, C represent each unit..., and full. i〇s(a+b)/(a+b+c)s〇.85.) 158118.doc -20 201237101 In the polymer compound represented by the above formula (6), the alkyl ether structure in the molecular chain is increased by satisfying 0.10S (a+b)/(a+b + c). The molecular chain of the molecular compound is improved in flexibility, so that the warpage after hardening can be reduced. Further, by satisfying (A+B)/(A+B + C)s 0.85, the carboxyl group in the molecular chain is increased, thereby exhibiting solubility of the cured product with respect to the alkaline developing solution, and developability It is getting better. Further, as the polymer compound, it is preferred to use a polyaminic acid structure represented by the following formula (7) and a polyamic acid structure represented by the following formula (8) as a repeating structural unit. In the polymer compound, a polyoxyalkylene moiety is contained in the polyimine structure to impart a moderate flexibility to the polyimine structure. Therefore, the molecular chain of the polymer compound can be inhibited from shrinking, and the post-hardening warp can be suppressed. song. Further, since the polycyclic amino acid structure contains an aromatic ring, the molecular weight of the polyamic acid structure can be suppressed from decreasing i, and the storage stability of the resin composition and the development time stability of the dry film obtained from the resin composition are improved. . Further, since the polyienimine structure and the polystyrene structure contain a tetravalent organic group derived from tetrazoic acid dianhydride, the molecular chain is imparted with a moderate rigidity, and the heat resistance is improved to improve the insulation reliability. General formula (7)

158118.doc -21 - 201237101158118.doc -21 - 201237101

示之四 (於式(7)及式(8)中,Z3及Z4係源自下述通式(9)所表 羧酸二酐之4價之有機基,可分別相同亦可不 、 P』。R1 8表不 碳數為1〜碳數為30之2價之有機基,Rm表示碟數為丨〜碳數 為30之1價之有機基,e表示1以上20以下之整數。 [化 15] 通式(9)In the formula (7) and the formula (8), Z3 and Z4 are derived from the tetravalent organic group of the carboxylic acid dianhydride represented by the following formula (9), and may be the same or not. R1 8 represents an organic group having a carbon number of 1 to a carbon number of 30, and Rm represents an organic group having a number of disks of 丨 to a carbon number of 30, and e represents an integer of 1 or more and 20 or less. 15] General formula (9)

進而’作為高分子化合物’於使用藉由上述通式(7)所 表示之聚醯亞胺結構及上述通式(8)所表示之聚醯胺酸結構 作為重複結構單元者之情形時,聚醯胺酸結構中所含之缓 基與多官能交聯性化合物之交聯性官能基(例如異氰酸醋 基)反應。藉此將尚分子化合物嵌入至多官能含經基化人 物與多官能交聯性化合物之間的3維網狀物中,可抑制向 聚石夕氧部位的硬化物表面之偏析。藉此可抑制表面張力之 降低及斥水性之表現,因此即使於製成保護膜之情形時, 亦獲得良好之接著力。 158118.doc -22- 201237101 (B)多官能含羥基化合物 作為多官能含羥基化合物,於第1態樣及第2態樣之樹脂 組合物中可使用共通之多官能含羥基化合物。作為多官能 含經基化合物’若為於分子鏈中具有2個以上羥基者,則 可於起到本發明之效果的範圍内使用各種含經基化合物。 作為多官能性羥基化合物,例如可使用作為含有2個羥基 之2官能性含羥基化合物的各種二醇,亦可使用含有3個以 上經基之各種多元醇。於該等中,自於多官能含經基化合 物與多官能交聯性化合物(例如多官能異氰酸酯或多官能 喔唾琳化合物)之間形成複數個交聯鍵之觀點考慮,較佳 的是使用含有3個以上羥基之多官能性含羥基化合物作為 多官能含羥基化合物。 作為多g能含經基化合物,自提高絕緣性之觀點考慮, 較佳的是包含選自兩末端酚改性聚矽氧、聚丁二烯多元 醇、氫化聚丁二烯多元醇、及聚碳酸酯多元醇之至少i 種。又,作為多官能含羥基化合物,較佳的是具有脂肪族 結構者。藉此使耐水性提高且變為低彈性,因此可降低翹 曲與提高絕緣可靠性。自以上之觀點考慮,作為多官能含 羥基化合物,較佳的是上述所列舉之具體例中的氫化聚丁 二烯多元醇、聚碳酸酯多元醇’特別是自可減低翹曲之觀 點考慮’可較佳地使用聚碳酸酯多元醇。 於本發明之樹脂組合物中’較佳的是相對於聚醯亞胺 100質量份而t ’多官能性經基化合物之含量為5質量份 〜60質量份》藉由使多官能性含經基化合物為5質量份以 158118.doc •23· 201237101 上’可於多官能交聯性化合物之間形成充分之交聯,因此 變得可減低硬化時之翹曲。又,藉由使多官能性經基化合 物為60質量份以下,而使樹脂組合物中之過剩之經基減 少’因此可提咼樹脂組合物的硬化後之絕緣可靠性。進 而’較佳的是相對於聚醯亞胺100質量份而言,多官能含 經基化合物之含量為5質量份〜3〇質量份。 作為多官能含羥基化合物,較佳的是使用數量平均分子 量為500〜3000者。此處,所謂數量平均分子量是指藉由凝 膠滲透層析法而測定的苯乙烯換算分子量的數量平均分子 量。若多官能含羥基化合物之數量平均分子量為5〇〇以 上’則樹脂組合物變為低彈性,因此可減低翹曲。又,若 多官能含經基化合物之數量平均分子量為3〇〇〇以下,則可 減低樹脂組合物之黏度,因此於布線板之布線部或通孔部 之埋入性變良好。進而,作為多官能含羥基化合物之數量 平均分子量,自樹脂組合物之低彈性及黏度之減低之觀點 考慮’較佳的是500〜2000。 (C)多官能交聯性化合物 作為多官能交聯性化合物,於第1態樣及第2態樣之樹脂 組合物中可使用共通之多官能交聯性化合物。作為多官能 交聯性化合物,若為具有2個以上交聯性官能基者,則可 於起到本發明之效果的範圍内使用各種多官能交聯性化合 物。此處’所謂交聯性官能基是指可於高分子化合物之羥 基或叛基、及多官能含羥基化合物之羥基之間形成交聯鍵 的官能基。作為交聯性官能基,例如可列舉異氰酸酯基、 158118.docFurther, when the polymer compound represented by the above formula (7) and the polyphthalic acid structure represented by the above formula (8) are used as a repeating structural unit, the polymerization is carried out. The slow group contained in the structure of the proline is reacted with a crosslinkable functional group (for example, isocyanate group) of the polyfunctional crosslinkable compound. Thereby, the molecular compound is embedded in the three-dimensional network between the polyfunctional group-containing compound and the polyfunctional crosslinkable compound, and segregation to the surface of the cured product at the polyoxo site can be suppressed. Thereby, the reduction in surface tension and the expression of water repellency can be suppressed, so that even in the case of forming a protective film, a good adhesion is obtained. 158118.doc -22- 201237101 (B) Polyfunctional hydroxyl group-containing compound As the polyfunctional hydroxyl group-containing compound, a common polyfunctional hydroxyl group-containing compound can be used in the resin composition of the first aspect and the second aspect. When the polyfunctional group-containing compound is a compound having two or more hydroxyl groups in the molecular chain, various kinds of the mercapto group-containing compound can be used within the range in which the effects of the present invention are exerted. As the polyfunctional hydroxy compound, for example, various diols which are two-functional hydroxy group-containing compounds having two hydroxyl groups can be used, and various polyols having three or more groups can be used. In the above, from the viewpoint of forming a plurality of crosslinks between the polyfunctional permeation-containing compound and the polyfunctional crosslinkable compound (for example, a polyfunctional isocyanate or a polyfunctional barium compound), it is preferred to use A polyfunctional hydroxyl group-containing compound having three or more hydroxyl groups is used as the polyfunctional hydroxyl group-containing compound. As a multi-g-containing radical compound, from the viewpoint of improving the insulating property, it is preferred to contain a phenol-modified polyfluorene oxide, a polybutadiene polyol, a hydrogenated polybutadiene polyol, and a poly At least one of the carbonate polyols. Further, as the polyfunctional hydroxyl group-containing compound, those having an aliphatic structure are preferred. Thereby, the water resistance is improved and the elasticity is made low, so that the warpage can be reduced and the insulation reliability can be improved. From the above viewpoints, as the polyfunctional hydroxyl group-containing compound, preferred are the hydrogenated polybutadiene polyols and polycarbonate polyols in the above-exemplified specific examples, especially from the viewpoint of reducing warpage. A polycarbonate polyol can be preferably used. In the resin composition of the present invention, it is preferred that the content of the t 'polyfunctional transradical compound is from 5 parts by mass to 60 parts by mass relative to 100 parts by mass of the polyimine. The base compound is 5 parts by mass to 158118.doc •23·201237101. The above can form sufficient cross-linking between the polyfunctional crosslinkable compounds, and thus it becomes possible to reduce the warpage at the time of hardening. In addition, by making the polyfunctional base-based compound 60 parts by mass or less, the excess radical in the resin composition is reduced. Therefore, the insulation reliability after curing of the resin composition can be improved. Further, it is preferable that the content of the polyfunctional ketone-containing compound is 5 parts by mass to 3 parts by mass based on 100 parts by mass of the polyimine. As the polyfunctional hydroxyl group-containing compound, it is preferred to use a number average molecular weight of 500 to 3,000. Here, the number average molecular weight means the number average molecular weight of the molecular weight in terms of styrene measured by gel permeation chromatography. If the number average molecular weight of the polyfunctional hydroxyl group-containing compound is 5 Å or more, the resin composition becomes low in elasticity, so warpage can be reduced. In addition, when the number average molecular weight of the polyfunctional ketone-containing compound is 3 Å or less, the viscosity of the resin composition can be reduced, so that the embedding property in the wiring portion or the via portion of the wiring board is improved. Further, the number average molecular weight of the polyfunctional hydroxyl group-containing compound is preferably from 500 to 2,000 from the viewpoint of the low elasticity and viscosity of the resin composition. (C) Polyfunctional crosslinkable compound As the polyfunctional crosslinkable compound, a common polyfunctional crosslinkable compound can be used in the resin composition of the first aspect and the second aspect. When the polyfunctional crosslinkable compound has two or more crosslinkable functional groups, various polyfunctional crosslinkable compounds can be used within the range of the effects of the present invention. Here, the term "crosslinkable functional group" means a functional group which can form a crosslink bond between a hydroxyl group or a thiol group of a polymer compound and a hydroxyl group of a polyfunctional hydroxyl group-containing compound. Examples of the crosslinkable functional group include an isocyanate group, 158118.doc

S -24 - 201237101 °惡°坐琳基等,但並不限定於該等。又’作為多官能交聯性 化合物,可使用具有2個交聯性官能基的2官能交聯性化合 物’亦可使用具有3個以上交聯性官能基的交聯性化合 物。作為多官能交聯性化合物’例如可列舉:具有2個以 上異氰酸醋基之多官能異氰酸醋化合物、或者具有2個以 上噁唑啉基之多官能噁唑啉化合物等。 作為多官能交聯性化合物,較佳的是使用含有2個以上 異氰酸酯基的多官能異氰酸酯化合物。藉由該構成,可於 多官能異氰酸酯之異氰酸醋基與多官能含羥基化合物之經 基之間經由胺基曱酸酯鍵而形成3維網狀物,且於高分子 化合物中所含之醯亞胺基及醯胺基、或羥基及敌基與胺基 曱酸酯結構中所含之〇〇基及NH基之間產生氫鍵之相互作 用。藉此可使樹脂組合物之低斥力性提高,且由於高分子 化合物之塑性與樹脂組合物之彈性的複合化而於樹脂組合 物中表現出適度之流動性。其結果,可同時實現例如將樹 脂組合物作為多層可撓性印刷布線板之層間絕緣膜而使用 之情形時所必須之相反的2個物性(流動性及黏性),因此可 作為層間絕緣膜而確保優異之性能^作為多官能異氰酸酯 化合物,若為具有2個以上異氰酸酯基者,則可於起到本 發明之效果的範圍内使用各種異氰酸酯化合物。 又,於將本發明之樹脂組合物料多層可撓性布線板等 之層間絕緣膜而使用之情形時,需求樹脂組合物流入至布 線板之布線部或通孔部’另一方要求樹脂組合物並不自布 線板之端部流出而某種程度地保持。其原因在於:於高壓 158118.doc -25- 201237101 力下之壓製步驟中,若嘗試充分進行向通孔之流入,則通 常情況下樹脂組合物自布線板之端部流出,從而存在布線 板i端部的絕緣層之厚度變薄而造成絕緣性降低之虞。因 此,例如於使用多官能異氰酸酯作為上述之樹脂組合物中 的多官能交聯性化合物之情形時,藉由於多官能異氰酸酯 之異氰酸酯基與多官能含羥基化合物之羥基之間所形成的 胺基曱酸酯鍵而使多官能羥基化合物與多官能異氰酸酯化 合物鍵結’且產生胺基甲酸酯結構與高分子化合物之間的 氫鍵的相互作用。由此,可藉由高分子化合物之塑性與樹 脂組合物之彈性的複合化而同時實現樹脂組合物流入至相 反之布線部所必須之流動性、以及為了確保布線部之端部 的絕緣膜之厚度而防止樹脂組合物流出防止所必須之適度 的黏度。其結果,防止樹脂組合物自布線板之端部流出, 且樹脂組合物並不自布線板之端部流出地某種程度地保 持,因此可達成非常良好之埋入性。 又,作為多官能交聯性化合物,亦可使用含有2個以上 異氰酸酯基之多官能異氰酸酯與阻斷劑反應而所得之含有 嵌段異氰酸酯基的嵌段異氰酸酯。於此情形時,作為多官 能交聯性化合物’自與多官能含羥基化合物之羥基反應而 造成之高分子化、由於交聯形成之耐熱性提高及耐化學品 性的觀點考慮,較佳的是含有2個以上嵌段異氰酸酯基 者。進而,自形成多官能含羥基化合物與異氰酸酯化合物 之間的交聯鍵的觀點考慮,較佳的是使用含有3個以上異 氰酸酯之多官能異氰酸酯或嵌段異氰酸酯作為多官能含羥 158118.doc -26- 201237101 基化合物。 又,作為多官能交聯性化合物,使用具有2個以上噁唑 琳基之多官能°惡°坐琳化合物亦較佳。藉由該構成,多官能 噁唑啉化合物之噁唑啉基與多官能含羥基化合物之羥基之 間反應而形成醯胺鍵。又,於高分子化合物具有羥基或缓 基之情形時,多官能。惡咬琳化合物之嚼唾琳基與經基或叛 基之間反應而形成包含醢胺鍵及/或醯胺醋之交聯結構(3維 交聯)。藉此而於高分子化合物、多官能含羥基化合物及 多官能交聯性化合物之間形成包含醯胺鍵及/或醯胺酯之3 維交聯的3維網狀物,因此可藉由交聯結構與高分子化合 物之間的氫鍵等的相互作用及化學鍵結而將多官能含經基 化合物之柔軟性有效地反映給高分子化合物,可實現充分 之翹曲之減低及優異之耐熱性。作為多官能噁唑啉化合 物,若為具有2個以上噁唑啉基者,則可於起到本發明之 效果的範圍内使用各種噁唑啉化合物。 於本發明之樹脂組合物中,較佳的是相對於高分子化合 物100質量份而言,多官能交聯性化合物之含量為5質量份 60質量份。若多官能交聯性化合物之含量為5質量份以 上,則可於與多官能含羥基化合物之間形成充分之交聯, =此可減低硬化時之翹曲。又,若多官能交聯性化合物之 含量為60質量份以下,則高分子化合物於加熱加壓時流動 f生變佳,可提南通孔埋入性。進而,作為多官能交聯性化 2物之含量’較佳的是相對於高分子化合物1〇〇質量份而 言為5質量份〜3 〇質量份。 158118.doc •27· 201237101 於本發明之樹脂組合物中,較佳的是多官能含羥基化合 物中所含之羥基與多官能交聯性化合物中所含之交聯性官 能基的莫耳比為羥基/交聯性官能基=0.5〜1。藉此而使多官 月t·〖生含羥基化合物中所含之羥基相對於多官能交聯性化合 物之交聯性官能基而言變得過剩,因此適度地形成多官能 3羥基化合物與多官能交聯性化合物之間的交聯鍵。因 此,可抑制隨著樹脂組合物硬化的聚醯亞胺之收縮,可實 現硬化時充分之翹曲之減低及優異之耐熱性。 (D)光敏劑 本發明之樹脂組合物含有光敏劑,藉此可作為感光性樹 月曰組合物而是用。作為光敏劑,於第丨態樣及第2態樣之樹 月曰組合物中可使用共通之光敏劑。作為光敏劑,若為具有 由於光照射而使其結構變化,從而造成相對於溶劑之溶解 性變化的性質的化合物,則並無特別限定,可使用各種化 〇物作為光敏劑,例如可適宜使用具有2個以上可光聚 合之不飽和雙鍵的(甲基)丙烯酸酯化合物等。 又,於本發明之樹脂組合物中,自提高解像性及絕緣性 之觀點考慮,作為具有2個以上可光聚合之不飽和雙鍵的 (甲基)丙烯酸酯化合物,較佳的是包含具有3個以上雙鍵之 (甲基)丙稀酸S旨化合物。 進而,於本發明之樹脂組合物中,自絕緣電阻值或減低 翹曲之觀點考慮,具有3個以上雙鍵之(甲基)丙烯酸酯化合 物較佳的是下述通式(1〇)所表示之化合物。下述通式(1〇) 所表示之化合物並未嵌入至高分子化合物之骨架中地形成 158118.doc •28· 201237101 交聯體作為第二成分’因此可防止硬化時之高分子化合物 收縮’可抑制㈣m述通式⑽所表示之化合物 並不具有羥基等使電氣絕緣性降低之官能基,因此推測可 形成剛直之交聯體,且硬化膜之玻璃轉移點(Tg)或彈性模 數變高’絕緣電阻值提高。 [化 16] 通式(10)S -24 - 201237101 ° 恶 ° Sitting on the Lin Keji, etc., but not limited to these. Further, as the polyfunctional crosslinkable compound, a bifunctional crosslinkable compound having two crosslinkable functional groups can be used. A crosslinkable compound having three or more crosslinkable functional groups can also be used. The polyfunctional crosslinkable compound ′ is, for example, a polyfunctional isocyanuric acid compound having two or more isocyanato groups or a polyfunctional oxazoline compound having two or more oxazoline groups. As the polyfunctional crosslinkable compound, a polyfunctional isocyanate compound containing two or more isocyanate groups is preferably used. According to this configuration, a three-dimensional network can be formed between the isocyanate group of the polyfunctional isocyanate and the mesogenic group of the polyfunctional hydroxyl group-containing compound via an amino phthalate bond, and is contained in the polymer compound. The interaction between the imino group and the guanamine group, or the hydroxyl group and the ketone group and the thiol group and the NH group contained in the amino phthalate structure are hydrogen bonds. Thereby, the low repulsive property of the resin composition can be improved, and moderate fluidity is exhibited in the resin composition due to the combination of the plasticity of the polymer compound and the elasticity of the resin composition. As a result, for example, the two physical properties (fluidity and viscosity) which are necessary for the case where the resin composition is used as the interlayer insulating film of the multilayer flexible printed wiring board can be realized at the same time, and thus can be used as interlayer insulation. In the case of having a polyfunctional isocyanate compound, if it has two or more isocyanate groups, various isocyanate compounds can be used in the range which has the effect of this invention. In the case where the resin composition material of the present invention is used as an interlayer insulating film such as a multilayer flexible wiring board, the resin composition is required to flow into the wiring portion or the through hole portion of the wiring board, and the other resin is required. The composition does not flow out from the end of the wiring board and is somewhat retained. The reason is that, in the pressing step under the pressure of high pressure 158118.doc -25 - 201237101, if the inflow into the through hole is attempted sufficiently, the resin composition usually flows out from the end portion of the wiring board, so that wiring exists. The thickness of the insulating layer at the end of the board i is thinned, resulting in a decrease in insulation. Therefore, for example, when a polyfunctional isocyanate is used as the polyfunctional crosslinkable compound in the above resin composition, the amine group formed by the isocyanate group of the polyfunctional isocyanate and the hydroxyl group of the polyfunctional hydroxyl group-containing compound The acid ester bond bonds the polyfunctional hydroxy compound to the polyfunctional isocyanate compound and produces a hydrogen bond interaction between the urethane structure and the polymer compound. Thereby, the fluidity necessary for the resin composition to flow into the opposite wiring portion and the insulation of the end portion of the wiring portion can be simultaneously achieved by the combination of the plasticity of the polymer compound and the elasticity of the resin composition. The thickness of the film prevents the resin composition from flowing out to a moderate viscosity necessary to prevent it. As a result, the resin composition is prevented from flowing out from the end portion of the wiring board, and the resin composition does not flow out from the end portion of the wiring board to some extent, so that very good embedding property can be achieved. Further, as the polyfunctional crosslinkable compound, a blocked isocyanate group-containing block isocyanate obtained by reacting a polyfunctional isocyanate containing two or more isocyanate groups with a blocking agent may be used. In this case, it is preferred that the polyfunctional crosslinkable compound is polymerized by reaction with a hydroxyl group of a polyfunctional hydroxyl group-containing compound, heat resistance due to crosslinking formation, and chemical resistance. It is a one containing two or more blocked isocyanate groups. Further, from the viewpoint of forming a crosslinkage bond between the polyfunctional hydroxyl group-containing compound and the isocyanate compound, it is preferred to use a polyfunctional isocyanate or a blocked isocyanate containing three or more isocyanates as the polyfunctional hydroxy group 158118.doc -26 - 201237101 Base compound. Further, as the polyfunctional crosslinkable compound, a polyfunctional compound having two or more oxazolyl groups is also preferably used. According to this configuration, the oxazoline group of the polyfunctional oxazoline compound reacts with the hydroxyl group of the polyfunctional hydroxyl group-containing compound to form a guanamine bond. Further, when the polymer compound has a hydroxyl group or a slow group, it is polyfunctional. The chewing sulphate compound reacts with a thiol group or a thiol group to form a crosslinked structure (3-dimensional cross-linking) comprising a guanamine bond and/or a guanamine vinegar. Thereby, a three-dimensional crosslinked three-dimensional network comprising a guanamine bond and/or a guanamine ester is formed between the polymer compound, the polyfunctional hydroxyl group-containing compound and the polyfunctional crosslinkable compound, so that The interaction between the hydrogen bond and the hydrogen bond between the polymer structure and the chemical bond, and the flexibility of the polyfunctional group-containing compound can be effectively reflected to the polymer compound, thereby achieving sufficient warpage reduction and excellent heat resistance. . When the polyoxazoline compound is a compound having two or more oxazoline groups, various oxazoline compounds can be used within the range in which the effects of the present invention are exerted. In the resin composition of the present invention, the content of the polyfunctional crosslinkable compound is preferably 5 parts by mass and 60 parts by mass based on 100 parts by mass of the polymer compound. When the content of the polyfunctional crosslinkable compound is 5 parts by mass or more, sufficient crosslinking can be formed with the polyfunctional hydroxyl group-containing compound, and this can reduce the warpage at the time of curing. In addition, when the content of the polyfunctional crosslinkable compound is 60 parts by mass or less, the flow of the polymer compound during heating and pressurization is improved, and the south hole penetration property can be improved. Furthermore, the content of the polyfunctional crosslinkable material 2 is preferably 5 parts by mass to 3 parts by mass based on 1 part by mass of the polymer compound. 158118.doc •27·201237101 In the resin composition of the present invention, preferred is a molar ratio of a hydroxyl group contained in the polyfunctional hydroxyl group-containing compound and a crosslinkable functional group contained in the polyfunctional crosslinkable compound. It is a hydroxyl group/crosslinkable functional group = 0.5 to 1. In this way, the hydroxy group contained in the hydroxy group-containing compound becomes excessive with respect to the crosslinkable functional group of the polyfunctional crosslinkable compound, and thus the polyfunctional 3 hydroxy compound is appropriately formed. Crosslinking bonds between functional crosslinkable compounds. Therefore, it is possible to suppress the shrinkage of the polyimide which is hardened by the resin composition, and it is possible to achieve sufficient reduction in warpage and excellent heat resistance at the time of curing. (D) Photosensitizer The resin composition of the present invention contains a photosensitizer, whereby it can be used as a photosensitive dendrimer composition. As the photosensitizer, a common photosensitizer can be used in the second aspect and the second aspect of the tree. The photosensitizer is not particularly limited as long as it has a property of changing its structure due to light irradiation and causing a change in solubility with respect to a solvent, and various chemicals can be used as a photosensitizer, and for example, it can be suitably used. A (meth) acrylate compound having two or more photopolymerizable unsaturated double bonds. Further, in the resin composition of the present invention, a (meth) acrylate compound having two or more photopolymerizable unsaturated double bonds is preferably contained from the viewpoint of improving resolution and insulating properties. A compound of (meth)acrylic acid having three or more double bonds. Further, in the resin composition of the present invention, the (meth) acrylate compound having three or more double bonds is preferably a compound of the following formula (1 〇) from the viewpoint of insulation resistance value or reduction of warpage. Expressed as a compound. The compound represented by the following formula (1〇) is not embedded in the skeleton of the polymer compound to form 158118.doc •28·201237101 Crosslinker as the second component 'thus prevents the shrinkage of the polymer compound during hardening' When the compound represented by the formula (10) does not have a functional group which lowers the electrical insulating property such as a hydroxyl group, it is presumed that a straight crosslinked body can be formed, and the glass transition point (Tg) or the elastic modulus of the cured film becomes high. 'Insulation resistance value is increased. General formula (10)

(於式(10)中’ r2。表示氫原子或甲基,複數個砂別獨立地 表不碳數為2〜碳數為5之伸坑基,可分別相同亦可不同。f 為1〜1 0之整數。) 於本發明之樹餘合物巾,自顯影性及絕緣可靠性之觀 點考慮,作為具有2個以上可光聚合之不飽和雙鍵的(甲 丙烯酸醋化合物,較佳的是包含具有2個雙鍵之(甲基)丙締 酸醋化合物與具有3個以上雙鍵之(甲基)丙稀酸醋化合物。 具有3個以上雙鍵之(甲基)丙稀酸醋化合物與多官能含經基 化合物之間形成剛直之交聯體,因此可推測硬化膜之彈性 模數及玻璃轉移點(Tg)變高,絕緣可靠性提高。 (E)光聚合起始劑 於本發明之樹脂組合物中 於使用上述光敏劑之情形 158118.doc -29- 201237101 時,較佳的是與光聚合起始劑組合使用。作為光聚合起始 劑,於第1態樣及第2態樣之樹脂組合物中可使用共通之光 聚合起始劑。作為光聚合起始劑,若為藉由各種活性光 線、紫外線等而活化,使聚合起始之化合物,則可使用各 種化β物。作為光聚合起始劑,例如可適宜使用肟酯類 等。 於本發明之樹脂組合物中,較佳的是含有具有2個以上 可光聚合之不飽和雙鍵的(甲基)丙烯酸酯化合物與光聚合 起始劑。藉此可作為感光性樹脂組合物而適宜地使用。 (F)阻燃劑 於本發明之樹脂組合物中,較佳的是含有阻燃劑。作為 阻燃劑,於第1態樣及第2態樣之樹脂組合物中可使用共通 之阻燃劑。作為阻燃劑之種類,並無特別限定,可列舉含 鹵素化合物、含氮化合物、含磷化合物及無機阻燃劑等。 又,作為磷化合物,若為於結構中包含磷原子之化合物則 並無特別限定。作為磷化合物,例如可列舉磷酸酯化合 物、磷腈化合物等。該等阻燃劑可使用一種,亦可將兩種 以上混合使用。阻燃劑之添加量並無特別限定,可根據所 使用之阻燃劑之種類而適宜變更。 於本發明之樹脂組合物中,較佳的是包含磷化合物。藉 此可提高樹脂組合物之阻燃性。 又’於本發明之樹脂組合物中,作為磷化合物,較佳的 是包含磷酸酯化合物及/或磷腈化合物。藉此,特別可提 高樹脂組合物之阻燃性。 158118.doc 30- 201237101 於本發明之樹脂組合物中,可藉由以預定溫度進行加熱 或乾燥而獲得硬化物(硬化膜)^該硬化物例如可藉由將本 發明之樹脂組合物塗佈於基材上而進行乾燥,從而作為樹 脂膜而使用。又,含有光敏劑之感光性樹脂組合物亦可作 為感光性膜而使用《該等樹脂膜及感光性膜例如可作為可 撓性印刷基板之層間絕緣膜、布線保護膜而適宜使用。 本發明之硬化物可藉由將上述樹脂組合物於 l〇〇°C〜130°c下加熱5分鐘〜60分鐘後,於16(rc〜2〇(rc下加 熱15分鐘〜60分鐘而獲得。 本發明之樹脂膜包含基材、於該基材上所設之樹脂組合 物。於此情形時,作為基材,可使用銅箔或承載膜等。 又,於本發明之樹脂膜中,較佳的是包含承載膜、於該承 載膜上所設之樹脂組合物、於該樹脂組合物上所設之覆蓋 膜。藉此可保護樹脂膜之表面。 於本發明之樹脂獏中,可使用銅箔而作為基材,於該銅 泊上設置上述樹脂組合物。如上所述,藉由於鋼箔上設置 樹脂組合物而加以乾燥,可作為多層可撓性布線板等之層 間絕緣膜而適宜使用。 本發明之布線板包含:具有布線之基材、以覆蓋前述布 線之方式而双置的上述樹脂組合物。如上所述,藉由以覆 蓋布線之方式而設置樹脂組合物’可作為布線板之布線圖 案的保護膜而適宜使用。 於本發明之樹脂組合物中,包含與高分子化合物良好地 相溶之低分子量的多官能含羥基化合物及多官能交聯性化 158118.doc -31 - 201237101 合物,因此可減低樹脂組合物之黏度而使流動性。藉此, 於可撓性印刷布線板之製造步驟中,於布線板之絕緣基板 上所設之通孔或布線圖案中之埋込性提高,因此可作為多 層可撓性布線板用層間絕緣膜、布線保護膜而適宜使用。 此處,參照圖1而對本發明之布線板之製造步驟的概略 加以說明。如圖1A所示,於多層可撓性布線板之製造中使 用雙面可撓性基板10,前述雙面可撓性基板10包含絕緣基 板11、於該絕緣基板層11之兩個主表面上所設之銅箔 12a、12b。首先,於銅箔12a、12b上層壓乾膜後,藉由乾 膜之曝光、顯影及銅箔12a、12b之钱刻,將銅箔12a、12b 之一部分除去後,於絕緣基板11上形成通孔13。其次,於 通孔13之表面上形成鍍銅14而將兩個面之銅箔12a、12b電 性連接(參照圖1B)。 其次’如圖1C所示那樣藉由蝕刻將成為可撓性部丨6之區 域的銅箔12b除去。其次,將本發明之樹脂組合物填充於 通孔13内而進行絕緣處理。於此處,如上所述那樣於本發 明之樹脂組合物中使用多官能異氰酸酯化合物作為多官能 交聯性化合物,作為高分子化合物,於具有羥基及/或羧 基之情形時,樹脂組合物表現出適度之流動性及黏性。藉 此’即使於设置微小之通孔13之情形時,亦變得可填充於 通孔13内。 其次,如圖1D所示那樣,將積層體15分別積層於銅箔 12a、12b上,則述積層體丨5包含銅箔丨5a、將本發明之樹 脂組合物塗佈於銅箔15a上而所得之保護層15b。於此處, 158118.doc • 32- 201237101 於本發明之樹脂組合物中使用聚醯亞胺作為高分子化合物 之情形時,變得無須塗佈後之醯亞胺化。藉此而無須積層 後之後硬化處理,變得可進行利用快速壓製之積層。 其次,如圖1E所示那樣,藉由蝕刻等將銅箔i5a及保護 層15b除去後,實施鍍銅14而將作為外部導電層之銅箔又化 與作為内部導電層之銅箔12a、^電性連接。其次,藉由 減成法等將銅箔15a圖案化而形成布線圖案。最後,如圖 1F所示那樣,於進行了布線圖案加工之銅箔i化上塗佈本 發明之樹脂組合物而形成保護膜丨7。於此處,如上所述那 樣於本發明之樹脂組合物中使用多官能異氰酸酯化合物作 為多官能交聯性化合物,作為高分子化合物,於具有羥基 及/或羧基之情形時,於樹脂組合物中表現出適度之流動 性及黏性。藉此’即使於形成微細之布線圖案之情形時, 亦可於布線圖案間填充樹脂組合物,從而進行絕緣保護。 又’本發明之樹脂膜理想的是於溫度85〇c、濕度85〇/〇、 1000小時之絕緣可靠性試驗中之層間絕緣電阻為1〇9卩以 上,120C 〜220 C 之黏度為 5000 pa .s 〜100000 pa .s,且具 有伸長率不足20%之彈性區域與伸長率為5〇%以上之塑性 區域,且層間絕緣層之膜厚為4〇 μηι以下。藉此於將樹脂 膜及形成於銅箔上之樹脂膜積層於布線板上時,可良好地 埋入通孔部,於布線板端部無樹脂流動地適宜使用。於作 為層間絕緣膜而使用之情形時,要求樹脂流入布線板之布 線部或通孔部,另一方面要求樹脂組合物並不自布線板之 端部流出地某種程度地保持。其原因在於:於高壓力下之 158118.doc •33· 201237101 壓製步驟中,若嘗試充分進行向通孔之流入,則通常情況 下樹脂組合物自布線板之端部流出,從而存在布線板之端 部的絕緣層之厚度變薄而造成絕緣性降低之虞。於上述構 成之情形時,藉由控制樹脂膜之12(rc 〜22〇(>c之黏度以及 樹脂膜之彈性區域與塑性區域,可同時實現藉由先前技術 所難以實現之流入至相互相反之通孔中以及防止樹脂組合 物自布線板之端部流出,可達成非常良好之埋入性。 亦即’作為樹脂膜之120。(:〜22〇t之黏度,若係於積層 時所使用之120°C〜220°C之間’黏度為5000 pa.S以上,則 可防止樹脂組合物自布線板之端部流出且獲得良好之埋入 性,若黏度為100000 pa · S以下,則可藉由通用之積層裝 置、例如真空壓製機等而良好地積層。又,於樹脂膜之伸 長率不足20%之彈性區域中可防止樹脂組合物自布線板之 端部流出,藉由樹脂膜之伸長率為50%以上之塑性區域可 達成良好之埋入性。進而藉由使層間絕緣層之膜厚為4〇 μπι 以下而表現出極其良好之低斥力性,從而於小型可攜式電 子機器中之組入性變良好,藉由使於溫度85°C、濕度 85%、1000小時之絕緣可靠性試驗中的層間絕緣電阻為ι〇9 Ω 以上,即使於層間絕緣層之膜厚為40 μιη以下亦可獲得良 好之絕緣可靠性。 以下,對上述本發明之實施形態加以詳細說明。再者, 於以下之第1實施形態〜第4實施形態中,主要對上述第2態 樣之樹脂組合物加以說明,但於以下之第1實施形態〜第4 實施形態中,亦可藉由適宜選擇所使用之高分子化合物,(in the formula (10), 'r2. represents a hydrogen atom or a methyl group, and the plurality of sands independently represent a carbon number of 2 to a carbon number of 5, and may be the same or different. f is 1 to 1 An integer of 0. In the present invention, the yoghurt compound having two or more photopolymerizable unsaturated double bonds is preferably used as a resin residue having a photopolymerizable unsaturated double bond. a (meth)propionic acid vinegar compound having two double bonds and a (meth)acrylic acid vinegar compound having three or more double bonds. A (meth)acrylic acid vinegar compound having three or more double bonds Since a rigid crosslinked body is formed between the polyfunctional permeation-containing compound, it is presumed that the elastic modulus and the glass transition point (Tg) of the cured film are increased, and the insulation reliability is improved. (E) Photopolymerization initiator is used herein. The resin composition of the invention is preferably used in combination with a photopolymerization initiator in the case of using the above-mentioned photosensitizer 158118.doc -29-201237101. As a photopolymerization initiator, in the first aspect and the second A common photopolymerization initiator can be used as the photopolymerization initiator in the aspect of the resin composition. In the case of a compound which initiates polymerization by activation with various active light, ultraviolet light, etc., various β-forms can be used. As the photopolymerization initiator, for example, an oxime ester or the like can be suitably used. In the composition, a (meth) acrylate compound having two or more photopolymerizable unsaturated double bonds and a photopolymerization initiator are preferably used, and this can be suitably used as a photosensitive resin composition. (F) Flame Retardant In the resin composition of the present invention, a flame retardant is preferably contained. As the flame retardant, a common flame retardant can be used in the resin composition of the first aspect and the second aspect. The type of the flame retardant is not particularly limited, and examples thereof include a halogen-containing compound, a nitrogen-containing compound, a phosphorus-containing compound, and an inorganic flame retardant. Further, as the phosphorus compound, a compound containing a phosphorus atom in the structure is used. The phosphorus compound is, for example, a phosphate compound or a phosphazene compound. These flame retardants may be used alone or in combination of two or more. The resin composition of the present invention preferably contains a phosphorus compound, whereby the flame retardancy of the resin composition can be improved. In the resin composition, the phosphorus compound preferably contains a phosphate compound and/or a phosphazene compound, whereby the flame retardancy of the resin composition can be particularly improved. 158118.doc 30-201237101 Resin of the present invention In the composition, a cured product (cured film) can be obtained by heating or drying at a predetermined temperature. The cured product can be dried, for example, by applying the resin composition of the present invention to a substrate. Further, the photosensitive resin composition containing a photosensitizer can also be used as a photosensitive film. The resin film and the photosensitive film can be used as an interlayer insulating film or a wiring protective film of a flexible printed circuit board, for example. Suitable for use. The cured product of the present invention can be obtained by heating the above resin composition at 10 ° C to 130 ° C for 5 minutes to 60 minutes, and then heating at 16 (rc~2 Torr (rc for 15 minutes to 60 minutes). The resin film of the present invention comprises a substrate and a resin composition provided on the substrate. In this case, a copper foil, a carrier film, or the like can be used as the substrate. Further, in the resin film of the present invention, Preferably, a carrier film, a resin composition provided on the carrier film, and a cover film provided on the resin composition are provided, whereby the surface of the resin film can be protected. The copper resin is used as the substrate, and the resin composition is provided on the copper plate. As described above, the resin composition is dried on the steel foil to form an interlayer insulating film such as a multilayer flexible wiring board. The wiring board of the present invention comprises: a substrate having a wiring and a resin composition which is disposed to cover the wiring, and the resin composition is provided by covering the wiring as described above. The composition 'can be used as a wiring pattern of the wiring board The resin composition of the present invention contains a low molecular weight polyfunctional hydroxyl group-containing compound which is well compatible with the polymer compound and a polyfunctional crosslinkable compound 158118.doc -31 - 201237101, Therefore, the viscosity of the resin composition can be reduced to improve the fluidity, thereby embedding in the through hole or wiring pattern provided on the insulating substrate of the wiring board in the manufacturing process of the flexible printed wiring board. Since it can be used as an interlayer insulating film for a multilayer flexible wiring board or a wiring protective film, the outline of the manufacturing process of the wiring board of the present invention will be described with reference to Fig. 1. Fig. 1A As shown, a double-sided flexible substrate 10 is used in the manufacture of a multilayer flexible wiring board, and the double-sided flexible substrate 10 includes an insulating substrate 11 and is provided on the two main surfaces of the insulating substrate layer 11. Copper foils 12a and 12b. First, after laminating a dry film on the copper foils 12a and 12b, a part of the copper foils 12a and 12b is removed by exposure, development, and etching of the copper foils 12a and 12b. A through hole 13 is formed in the insulating substrate 11. Copper plating 14 is formed on the surface of the through hole 13 to electrically connect the copper foils 12a and 12b of the two faces (refer to FIG. 1B). Next, as shown in FIG. 1C, the flexible portion is formed by etching. The copper foil 12b in the region of 6 is removed. Next, the resin composition of the present invention is filled in the through hole 13 to perform an insulation treatment. Here, the polyfunctional isocyanate compound is used in the resin composition of the present invention as described above. When the polyfunctional crosslinkable compound has a hydroxyl group and/or a carboxyl group as a polymer compound, the resin composition exhibits moderate fluidity and viscosity. Thus, even in the case where a minute via 13 is provided At the same time, as shown in FIG. 1D, the laminated body 15 is laminated on the copper foils 12a and 12b, respectively, and the laminated body 5 includes the copper foil 5a and the present. The protective layer 15b obtained by applying the resin composition of the invention to the copper foil 15a. Here, 158118.doc • 32-201237101 In the case where polyimine is used as the polymer compound in the resin composition of the present invention, it becomes unnecessary to imidize after coating. Thereby, it is possible to carry out the layering using rapid pressing without the need for laminating and then hardening treatment. Next, as shown in FIG. 1E, after the copper foil i5a and the protective layer 15b are removed by etching or the like, copper plating 14 is performed to re-form the copper foil as the external conductive layer and the copper foil 12a as the inner conductive layer. Electrical connection. Next, the copper foil 15a is patterned by a subtractive method or the like to form a wiring pattern. Finally, as shown in Fig. 1F, the resin composition of the present invention is applied onto the copper foil subjected to the wiring pattern processing to form the protective film crucible 7. Here, as described above, a polyfunctional isocyanate compound is used as the polyfunctional crosslinkable compound in the resin composition of the present invention, and as a polymer compound, in the case of having a hydroxyl group and/or a carboxyl group, in the resin composition Shows moderate fluidity and stickiness. Therefore, even when a fine wiring pattern is formed, the resin composition can be filled between the wiring patterns to perform insulation protection. Further, the resin film of the present invention preferably has an interlayer insulation resistance of 1 〇 9 卩 or more in an insulation reliability test at a temperature of 85 〇 c, a humidity of 85 〇 / 〇, and 1000 hours, and a viscosity of 120 kPa to 220 C of 550 pa. .s ~100000 pa .s, and an elastic region having an elongation of less than 20% and a plastic region having an elongation of 5% or more, and the film thickness of the interlayer insulating layer is 4 〇μηι or less. When the resin film and the resin film formed on the copper foil are laminated on the wiring board, the through hole portion can be satisfactorily embedded, and the resin plate can be suitably used without flowing the resin at the end portion. When it is used as an interlayer insulating film, resin is required to flow into the wiring portion or the via portion of the wiring board, and on the other hand, the resin composition is required to be held to some extent without flowing out from the end portion of the wiring board. The reason is that in the pressing step under high pressure, in the pressing step, if the inflow to the through hole is attempted sufficiently, the resin composition usually flows out from the end portion of the wiring board, and wiring exists. The thickness of the insulating layer at the end of the board is reduced, resulting in a decrease in insulation. In the case of the above constitution, by controlling the viscosity of the resin film 12 (rc 〜 22 〇 (>c and the elastic region and the plastic region of the resin film, it is possible to simultaneously achieve the inflow of each other by the prior art) In the through hole and in the prevention of the resin composition flowing out from the end portion of the wiring board, very good embedding property can be achieved. That is, 'as a resin film 120. (: viscosity of ~22〇t, if it is laminated When the viscosity of between 120 ° C and 220 ° C used is 5,000 Pa·s or more, the resin composition can be prevented from flowing out from the end portion of the wiring board and good embedding property can be obtained if the viscosity is 100,000 pa · S In the elastic region in which the elongation of the resin film is less than 20%, the resin composition can be prevented from flowing out from the end portion of the wiring board, and the laminate is formed by a general-purpose laminated device, for example, a vacuum press. Good embedding property can be achieved by a plastic region in which the elongation of the resin film is 50% or more. Further, by making the thickness of the interlayer insulating layer 4 μm or less, an extremely good low repulsive property is exhibited, so that it is small. Portable electronic machine The interlayer insulating resistance in the insulation reliability test at a temperature of 85 ° C, a humidity of 85%, and a time of 1000 hours is ι 〇 9 Ω or more, even if the film thickness of the interlayer insulating layer is 40 μm or less. In the following, the embodiment of the present invention will be described in detail. In the following first to fourth embodiments, the resin composition of the second aspect is mainly used. In the following first to fourth embodiments, the polymer compound to be used may be appropriately selected.

158118.doc -34- S 201237101 而作為第1態樣之樹脂組合物使用。 (第1實施形態) 作為可撓性印刷基板之製造中所使用之材料,提出了包 含聚醯胺酸之一部分醯亞胺化而成的聚醯亞胺前驅物的樹 脂級合物。於該樹脂組合物中,藉由使用將聚酿胺酸之一 部分醯亞胺化而成之聚醯亞胺前驅物,可減低隨著聚醯亞 胺收縮而帶來之翹曲,可於低溫下進行醯亞胺化而抑制隨 著醯亞胺化所帶來之聚醯亞胺前驅物與布線材料之反應, 且使利用鹼性水溶液之顯影處理變容易。然而,由於近年 之可撓性印刷基板之高功能化及輕量化,於使用先前之包 含聚醯亞胺前驅物之樹脂之情形時,亦未必可充分減低翹 曲;又,關於耐熱性,亦期望得到改善。 本發明者等人著眼於使用含有聚醯胺酸結構及聚醯亞胺 結構作為結構單元的聚醯亞胺而作為(A)高分子化合物。 而且,本發明者等人發現藉由含有(A)作為高分子化合物 之聚醯亞胺、(B)多官能含羥基化合物、及(c)作為多官能 交聯性化合物之異氰酸酯化合物(嵌段異氰酸酯化合物), 且使多S能含羥基化合物中所含之羥基與嵌段異氰酸酯化 合物中所含之異氰酸酯基之莫耳比為預定範圍内,而獲得 可實現硬化時之趣曲之減低、及優異 < 耐熱,可作為半 導體元件之表面保護膜、層間絕緣膜、印刷布線板用保護 、邑緣膜層間絕緣膜等之材料而適宜使用的樹脂組合物。 於該樹脂組合物中’多官能含經基化合物並未嵌入至聚 酿亞胺之月4中而作為第二成分而存在,於多官能含經基 158118.doc •35- 201237101158118.doc -34- S 201237101 and used as the resin composition of the first aspect. (First Embodiment) As a material used in the production of a flexible printed circuit board, a resin conjugate of a polyimine precursor comprising a partial oxime imidization of one of polyamic acid has been proposed. In the resin composition, by using a polyamidimide precursor obtained by imidating a part of poly-aracine, the warpage caused by the shrinkage of the polyimine can be reduced, and the film can be cooled at a low temperature. The ruthenium imidization is carried out to suppress the reaction of the polyimide precursor with the wiring material by the ruthenium imidization, and the development treatment by the alkaline aqueous solution is facilitated. However, due to the high functionality and weight reduction of the flexible printed circuit board in recent years, it is not always possible to sufficiently reduce the warpage in the case of using the resin containing the polyimide precursor, and also regarding heat resistance. Expectations are improved. The inventors of the present invention have focused on the use of a polyimine having a polyamic acid structure and a polyimine structure as a structural unit as the (A) polymer compound. Furthermore, the present inventors have found that an isocyanate compound (block) containing (A) as a polymer compound, (B) a polyfunctional hydroxyl group-containing compound, and (c) as a polyfunctional crosslinkable compound The isocyanate compound), and the molar ratio of the hydroxyl group contained in the poly-S-containing hydroxyl group-containing compound to the isocyanate group contained in the blocked isocyanate compound is within a predetermined range, thereby obtaining a reduction in the interesting property at the time of hardening, and It is excellent in heat resistance, and can be suitably used as a surface protective film for a semiconductor element, an interlayer insulating film, a protective layer for a printed wiring board, or a material such as a rim film interlayer insulating film. In the resin composition, the polyfunctional permeation-containing compound is not embedded in the month 4 of the polyimine and is present as the second component in the polyfunctional P group 158118.doc • 35- 201237101

化合物與嵌段異氰酸酯化合物之間形成3維交聯,因此可 抑制硬化時之聚醯亞胺分子鏈之收縮,可抑制翹曲,且使 硬化前之樹脂組合物之熔融黏度降低而使通孔埋入性提 高。又,聚醯亞胺由於具有聚醯胺酸結構(前述聚醯胺酸 結構具有熱交聯性官能基)作為結構單元,因此於多官能 含羥基化合物與嵌段異氰酸酯化合物之間形成經由聚醯亞 胺之3維網狀物。藉由該等而可減低硬化時之翹曲。進 而,聚醯亞胺與其他成分之相溶性良好,且具有形成3維 •結構或相互貫通網狀結構[Inter Penetrati〇n Netw〇rk(ipNW 之聚醯亞胺結構作為結構單元,因此表現出較高之耐熱性 (例如較鬲之焊料耐熱性)。又,藉由包含嵌段異氰酸酯化 合物而於低溫下使羧基去活性化,變得可低溫硬化,因此 可防止硬化時之聚醯亞胺骨架之收縮,抑制翹曲。以下, 對本發明之第1實施形態加以具體說明。 本發明之第1實施形態之樹脂組合物含有(a)聚醯亞胺、 (B)多官能含羥基化合物、及(c_1}異氰酸酯化合物(嵌段異 氰酸酯化合物),聚醯亞胺具有聚醯亞胺結構及聚醯胺酸 結構作為結構單元,且多官能含羥基化合物中所含之羥基 與嵌段異氰酸酯化合物中所含之異氰酸酯基之莫耳比係羥 基/異氰酸醋基=0.5〜1。 於該樹脂組合物中,多官能含羥基化合物中所含之羥基 與嵌段異氰酸酯中所含之異氰酸酯基之莫耳比係羥基/異 氰酸酯基=0.5〜1 ’相對於羥基而言,異氰酸酯基之量過 剩。推測由於該構成,可藉由如下所示之機構而表現出耐 158118.docSince the compound forms a three-dimensional crosslink with the blocked isocyanate compound, the shrinkage of the polyimine molecular chain at the time of hardening can be suppressed, warpage can be suppressed, and the melt viscosity of the resin composition before hardening can be lowered to form a through hole. Increased burial. Further, since the polyimine structure has a polyphthalic acid structure (the polyamic acid structure has a heat crosslinkable functional group) as a structural unit, a polyfluorene-containing compound and a blocked isocyanate compound are formed via a polyfluorene. A 3-dimensional network of imines. By this, the warpage at the time of hardening can be reduced. Further, polyimine has good compatibility with other components, and has a three-dimensional structure or a network structure interpenetrating [Inter Penetrati〇n Netw〇rk (ipNW polyfluorene imide structure as a structural unit, thus exhibiting High heat resistance (for example, hot solder heat resistance). Further, by including a blocked isocyanate compound, the carboxyl group is deactivated at a low temperature, and it can be cured at a low temperature, thereby preventing the polyimine at the time of hardening. The first embodiment of the present invention will be described in detail with reference to the first embodiment of the present invention. The resin composition according to the first embodiment of the present invention contains (a) a polyimine and (B) a polyfunctional hydroxyl group-containing compound. And (c_1) an isocyanate compound (block isocyanate compound) having a polyamidene structure and a polyamic acid structure as a structural unit, and a hydroxyl group and a blocked isocyanate compound contained in the polyfunctional hydroxyl group-containing compound The molar ratio of the isocyanate group to the hydroxyl group / isocyanate group = 0.5 to 1. In the resin composition, the hydroxyl group and the block contained in the polyfunctional hydroxyl group-containing compound The molar ratio of the isocyanate group contained in the cyanate ester to the hydroxyl group/isocyanate group is 0.5 to 1 ', and the amount of the isocyanate group is excessive with respect to the hydroxyl group. It is presumed that the composition can be expressed by the mechanism shown below.出耐158118.doc

S -36- 201237101 熱性。異氰酸酯基與羥基反應而形成胺基甲酸酯結構,但 由於相對於羥基而言,異氰酸酯基之量過剩,因此異氰酸 酯基有剩餘。剩餘之異氰酸酯基與醯亞胺化反應後所殘存 之聚醯亞胺中所含之聚醯胺酸結構的羧基反應,形成醯胺 結構或脲結構等。亦即,藉由熱硬化而形成聚醯亞胺與嵌 段異氰酸酯化合物之間的化學性交聯、以及多官能含羥基 化合物與嵌段異氰酸酯化合物之間的化學性交聯。如上所 述’藉由異氰酸酯彼此之間的反應等複數個種類之交聯而 形成3維網狀物,由此而表現出進一步之耐熱性。 其次’對構成樹脂組合物之各組合物的詳細加以說明。 (a)聚醯亞胺 本實施形態之樹脂組合物中所使用之聚醯亞胺例如可藉 由使四叛酸一 Sf與二胺反應而獲得。所使用之四叛酸二酐 並無限制’可使用先前公知之四羧酸二酐。作為四羧酸二 野’可適用芳香族四羧酸二酐或脂肪族四羧酸二酐等。 又’所使用之二胺並無限制,可使用先前公知之二胺。 作為芳香族四羧酸二酐之具體例,可列舉均苯四甲酸二 酐、3,3’,4,4’.·聯苯四甲酸二酐、2,3,3·,4ι·聯苯四曱酸二 酐、2,2,3,3’-聯苯四曱酸二酐、3,3,,4,4,_二苯甲酮四甲酸 一酐、2,2’,3,3’-二苯甲酮四曱酸二酐、2,2_雙(3,4_二羧基 苯基)丙烷二酐、2,2-雙(2,3-二羧基苯基)丙烷二酐、厂^雙 (3’4-二羧基苯基)乙烷二酐、丨,卜雙(2,3_二羧基笨基)乙烷 -酐、雙(3,4-二叛基苯基)甲貌二肝、雙(2,3_二缓基苯基) 曱烷一酐、雙(3,4-二羧基笨基)砜二酐、3,3,_氧雙鄰笨二 158I18.doc •37· 201237101 曱酸二酐、4,4,-氧雙鄰苯二甲酸二酐、2,2-雙(4-(4-胺基笨 氧基)笨基)丙烷、1,3·二氫-1,3-二侧氧基_5·異苯并咬喃^ 酸-1,4-苯二酯、4-(2,5·二側氧基四氫呋喃_3_基广丨’^私四 氫化萘-1,2-二甲酸酐、1,2,5,6-萘四曱酸二酐、2,3,6,7-蔡 四曱酸二酐、2,3,5,6-吡啶四甲酸二酐、3,4,9,10-二蔡嵌笨 四曱酸二酐、2,2-雙(3,4-二羧基苯基)六氟丙烷二酐、2,2_ 雙(4-(3,4-二羧基笨氧基)苯基)六氟丙烷二酐、2 2•雙(4_ (3,4·二羧基苯甲醯氧基)苯基)六氟丙烷二酐、2,2,_雙(三I 甲基)-4,4·-雙(3,4_二羧基苯氧基)聯苯二酐等。 作為脂肪族四羧酸二酐之具體例,可列舉環丁烷四甲酸 二酐、1,2,3,4-環戊烷四甲酸二酐、2,3,5,6_環己烷四甲酸 一酐、5-(2,5-一側氧基四氫-3-0夫味基)·3 -甲基_3_環己締 1,2-二曱酸二酐、二環[2,2,2]辛 _7_烯_2,3,5,6_四甲酸二 酐、1,2,3,4-丁烷四甲酸二酐等。 上述四羧酸二酐可單獨使用,亦可將2種以上混合使 用。再者,自聚醯亞胺之耐熱性或聚合速度之觀點考慮, 於上述四羧酸二酐中,可列舉3,3·,4,4,·聯苯四曱酸二酐、 4,4 -氧雙鄰苯二甲酸二酐、3,3',4,4’_二苯甲酮四甲酸二 軒、雙(3,4-二叛基苯基)礙二酐作為特佳者。 作為二胺之具體例,例如可列舉3,3,_二胺基二苯曱酮、 4,4·-二胺基二苯甲酮、3,3’-二胺基二苯醚、4,4,_二胺基二 笨醚、1,3-雙(3-胺基苯氧基)苯、丨,4_雙(4_胺基笨氧基) 未雙(3-(3-胺基本氧基)苯基)喊、雙(4-(4-胺基苯氧基)苯 基)醚、1,3-雙(3-(3-胺基苯氧基)苯氧基)苯、14•雙(4(4_ 158118.doc •38· 201237101 胺基苯氧基)苯氧基)苯、雙(3-(3-(3-胺基苯氧基)苯氧基)苯 基)醚、雙(4-(4-(4-胺基苯氧基)苯氧基)苯基)醚、1,3-雙(3-(3-(3-胺基苯氧基)笨氧基)苯氧基)苯、1,4-雙(4-(4-(4-胺基 苯氧基)苯氧基)苯氧基)苯、4,4’-雙(3-胺基苯氧基)聯苯、 4,4·-雙(4-胺基苯氧基)聯苯、2,2-雙[4-(3-胺基苯氧基)苯 基]丙烷、2,2-雙[4-(4-胺基苯氧基)苯基]丙烷、2,2-雙[4-(3-胺基苯氧基)苯基]_1,1,1,3,3,3-六氟丙烷、2,2-雙[4-(4-胺基苯氧基)苯基]-1,1,1,3,3,3-六氟丙烷、間苯二胺、鄰苯 二胺、對苯二胺、雙(3-胺基苯基)硫醚、雙(4-胺基苯基)硫 醚、雙(3-胺基苯基)亞礙、雙(4-胺基苯基)亞砜、雙(3_胺 基苯基)砜、雙(4-胺基苯基)砜、2,2-雙[4-(3-胺基苯氧基) 笨基]丁烷、α:,ω-雙(2-胺基乙基)聚二甲基矽氧烷、^雙 (3 -胺基丙基)聚二甲基石夕氧烧、(^…雙(4 _胺基丁基)聚二甲 基矽氧烷、α,ω-雙(4-胺基苯基)聚二曱基矽氧烷、^雙 (3-胺基丙基)聚二苯基矽氧烷等,但並不限定於該等。較 佳的是4,4’-雙(3-胺基苯氧基)聯苯、ι,3_雙(3_(3_胺基苯氧 基)苯氧基)苯、1,3-雙(3-胺基苯氧基)苯、聚氧伸烷基二 胺。 又,作為二胺,^雙(2·胺基乙基)聚二甲基矽氧烷、 α,ω-雙(3-胺基丙基)聚二曱基矽氧烷、^雙^胺基丁基) 聚二甲基矽氧烷、α,ω-雙(4-胺基苯基)聚二甲基矽氧烷、 α,ω-雙(3-胺基丙基)聚二苯基矽氧烷等亦較佳。 於上述二胺中,自使樹脂組合物之硬化物之翹曲減低之 觀點考慮,較#的是使用$氧基伸乙基二胺或聚氧基伸丙 158118.doc •39- 201237101 基二胺、其他包含碳鏈數不同之氧基伸烷基的聚氧伸烷基 二胺等。作為聚氧伸烧基二胺類,可列舉美國Huntsman公 司製造之 JEFFAMINE ED-600 ' ED-900 ' ED-2003 ' EDR-148、HK-511等聚氧基伸乙基二胺或JEFFAMINE D-23 0、 D-400、D-2000、D-4000,德國BASF公司製造之聚醚胺0-230、D-400、D-2000等聚氧基伸丙基二胺或JEFFAMINE XTJ-542、XTJ533、XTJ536等具有聚四亞曱基伸乙基者 等。 其中,分子量比較低之EDR-148、D_230、D-400、HK-511等可成為具有比較高的玻璃轉移溫度的聚合物,因此 可於必須耐熱性、耐化學品性之用途中較佳地使用。另一 方面,分子量比較高之D-2000等之柔軟性等優異。又,自 耐熱性、耐化學品性與柔軟性、溶劑可溶性之平衡之方面 考慮,作為聚氧伸烷基二胺之重量平均分子量,較佳的是 400~3000,特佳的是400~2000,可較佳地使用〇-400、〇-2000、ED-600、ED-900、XTJ-542。 本實施形態之樹脂組合物中所使用之聚醯亞胺具有聚醯 亞胺結構及聚醯胺酸結構作為結構單元。如此而一同具有 與其他成分之相溶性良好的聚醯亞胺結構部分、與具有熱 交聯性官能基之聚醯胺酸結構部分,由此而藉由與嵌段異 氰酸酯之反應而使低溫硬化時所殘存之羧基去活性化,可 藉由嵌段異氰酸酯與多官能含羥基化合物而抑制翹曲》 又,作為本實施形態之樹脂組合物中所使用之聚醯亞 胺,較佳的是包含藉由聚醚結構之聚醯亞胺。其原因在 158118.doc •40· 201237101 於:藉由於骨架中具有聚醚結構,可抑制熱硬化後之硬化 物之玻璃轉移溫度與彈性模數,可進而減低翹曲。又,於 熱硬化後,於具有聚醚結構之聚醢亞胺與具有熱交聯性官 能基之化合物之間形成化學性交聯,且具有聚醚結構之聚 酿亞胺具有聚環氧烷鏈,因此可由於高分子鏈間之局部性 相互作用而形成3維網狀物,表現出耐熱性。 又’作為聚醯亞胺,較佳的是使用包含具有下述通式 (2)之結構的聚醯亞胺部的聚醯亞胺。其係用以提高聚醯亞 胺之溶劑可溶性。 [化 17] 通式(2)S -36- 201237101 Heat. The isocyanate group reacts with a hydroxyl group to form a urethane structure, but since the amount of the isocyanate group is excessive with respect to the hydroxyl group, the isocyanate group remains. The remaining isocyanate group reacts with a carboxyl group of a polyglycolic acid structure contained in the polyimine which remains after the imidization reaction to form a guanamine structure or a urea structure. That is, chemical crosslinking between the polyimine and the block isocyanate compound and chemical crosslinking between the polyfunctional hydroxyl group-containing compound and the blocked isocyanate compound are formed by thermal hardening. As described above, a plurality of types of cross-linking by reaction between isocyanates and the like form a three-dimensional network, thereby exhibiting further heat resistance. Next, the details of each composition constituting the resin composition will be described. (a) Polyimine The polyimine used in the resin composition of the present embodiment can be obtained, for example, by reacting tetrarexic acid-Sf with a diamine. The four tetrahydrous dianhydrides used are not limited to the use of previously known tetracarboxylic dianhydrides. As the tetracarboxylic acid di-field, an aromatic tetracarboxylic dianhydride or an aliphatic tetracarboxylic dianhydride can be used. Further, the diamine to be used is not limited, and a previously known diamine can be used. Specific examples of the aromatic tetracarboxylic dianhydride include pyromellitic dianhydride, 3,3', 4,4'. biphenyltetracarboxylic dianhydride, and 2,3,3·, 4 ι·biphenyl. Tetraphthalic acid dianhydride, 2,2,3,3'-biphenyltetradecanoic acid dianhydride, 3,3,4,4,_benzophenone tetracarboxylic acid monoanhydride, 2,2',3,3 '-benzophenone tetradecanoic acid dianhydride, 2,2-bis(3,4-dicarboxyphenyl)propane dianhydride, 2,2-bis(2,3-dicarboxyphenyl)propane dianhydride, Manufacture of bis(3'4-dicarboxyphenyl)ethane dianhydride, hydrazine, bis(2,3-dicarboxyphenyl)ethane-anhydride, bis(3,4-di-repentylphenyl) Dimensional liver, bis(2,3_bis-sulfophenyl) decane-anhydride, bis(3,4-dicarboxyphenyl)sulfone dianhydride, 3,3,_oxo-dual stupid 158I18.doc • 37· 201237101 Citrate dianhydride, 4,4,-oxydiphthalic dianhydride, 2,2-bis(4-(4-aminophenyl)oxy)propane, 1,3·dihydrogen -1,3-di-oxyl_5-isobenzopyrene-acid-1,4-phenylenedicarboxylate, 4-(2,5·di- oxytetrahydrofuran_3_基广丨'^私四Hydrogenated naphthalene-1,2-dicarboxylic anhydride, 1,2,5,6-naphthalene tetraphthalic acid dianhydride, 2,3,6,7-carotene phthalic acid dianhydride, 2,3,5,6-pyridyl Tetracarboxylic acid dianhydride, 3,4,9,10-dicain tetraphenyl phthalic anhydride, 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride, 2,2_bis (4 -(3,4-dicarboxyloxy)phenyl)hexafluoropropane dianhydride, 2 2•bis(4_(3,4·dicarboxybenzyloxy)phenyl)hexafluoropropane dianhydride, 2 2,_bis(tri-Imethyl)-4,4.-bis(3,4-dicarboxyphenoxy)biphenyl dianhydride. Examples of the aliphatic tetracarboxylic dianhydride include a ring. Butane tetracarboxylic dianhydride, 1,2,3,4-cyclopentane tetracarboxylic dianhydride, 2,3,5,6-cyclohexanetetracarboxylic acid monoanhydride, 5-(2,5-one side oxy group Tetrahydro-3-0fusyl)·3 -methyl_3_cyclohexan 1,2-diphthalic acid dianhydride, bicyclo[2,2,2]octyl-7-ene-2,3, 5,6_tetracarboxylic dianhydride, 1,2,3,4-butanetetracarboxylic dianhydride, etc. The above tetracarboxylic dianhydride may be used singly or in combination of two or more. From the viewpoint of the heat resistance of the imine or the polymerization rate, among the above tetracarboxylic dianhydrides, 3,3·, 4,4,-biphenyltetraphthalic acid dianhydride, 4,4-oxo-phthalic acid may be mentioned. Formic acid dianhydride, 3,3',4,4'-benzophenone tetracarboxylic acid dioxane, double (3,4-two rebellion Phenyl) dianhydride is particularly preferred. Specific examples of the diamine include 3,3,-diaminodibenzophenone, 4,4·-diaminobenzophenone, and 3,3. '-Diaminodiphenyl ether, 4,4,-diaminodiisopropyl ether, 1,3-bis(3-aminophenoxy)benzene, anthracene, 4-bis(4-aminophenoxy) Not bis(3-(3-amine basic oxy)phenyl), bis(4-(4-aminophenoxy)phenyl)ether, 1,3-bis(3-(3-amino) Phenoxy)phenoxy)benzene, 14•bis (4(4_158118.doc •38· 201237101 aminophenoxy)phenoxy)benzene, bis(3-(3-(3-aminophenoxy) Phenoxy)phenyl)ether, bis(4-(4-(4-aminophenoxy)phenoxy)phenyl)ether, 1,3-bis(3-(3-(3-) Aminophenoxy)phenyloxy)phenoxy)benzene, 1,4-bis(4-(4-(4-aminophenoxy)phenoxy)phenoxy)benzene, 4,4' - bis(3-aminophenoxy)biphenyl, 4,4.-bis(4-aminophenoxy)biphenyl, 2,2-bis[4-(3-aminophenoxy)benzene Propane, 2,2-bis[4-(4-aminophenoxy)phenyl]propane, 2,2-bis[4-(3-aminophenoxy)phenyl]_1,1, 1,3,3,3-hexafluoropropyl , 2,2-bis[4-(4-aminophenoxy)phenyl]-1,1,1,3,3,3-hexafluoropropane, m-phenylenediamine, o-phenylenediamine, para-benzene Diamine, bis(3-aminophenyl) sulfide, bis(4-aminophenyl) sulfide, bis(3-aminophenyl) sulfoxide, bis(4-aminophenyl) sulfoxide , bis(3-aminophenyl)sulfone, bis(4-aminophenyl)sulfone, 2,2-bis[4-(3-aminophenoxy)phenyl]butane, α:,ω - bis(2-aminoethyl)polydimethyloxane, bis(3-aminopropyl)polydimethyl oxazepine, (^...bis(4-aminobutyl) poly Dimethyl methoxy oxane, α, ω-bis(4-aminophenyl) polydidecyl fluorene oxide, bis(3-aminopropyl) polydiphenyl fluorene, etc., but not Limited to these. Preferred is 4,4'-bis(3-aminophenoxy)biphenyl, iota, 3_bis(3_(3-aminophenoxy)phenoxy)benzene, 1,3-bis( 3-aminophenoxy)benzene, polyoxyalkylene diamine. Further, as a diamine, bis(2.aminoethyl)polydimethyloxane, α,ω-bis(3-aminopropyl)polydidecyloxyne, bis-amine Butyl) polydimethyloxane, α,ω-bis(4-aminophenyl)polydimethyloxane, α,ω-bis(3-aminopropyl)polydiphenylfluorene Oxyalkanes and the like are also preferred. Among the above diamines, from the viewpoint of reducing the warpage of the cured product of the resin composition, it is preferable to use the oxyethylene diamine or the polyoxypropene 158118.doc •39-201237101 bisdiamine, Other polyoxyalkylene diamines and the like which contain an alkylene group having a different number of carbon chains. Examples of the polyoxyalkylene diamines include JEFFAMINE ED-600 ' ED-900 ' ED-2003 ' EDR-148, HK-511 and other polyoxyethylene ethylamine or JEFFAMINE D-23 manufactured by Huntsman Corporation of the United States. 0, D-400, D-2000, D-4000, polyetheramine 0-230, D-400, D-2000 and other polyoxyalkylene diamine or JEFFAMINE XTJ-542, XTJ533, XTJ536 manufactured by BASF, Germany Such as having a polytetradecyl group extending ethyl group and the like. Among them, EDR-148, D_230, D-400, HK-511 and the like having a relatively low molecular weight can be a polymer having a relatively high glass transition temperature, and therefore can be preferably used in applications requiring heat resistance and chemical resistance. use. On the other hand, D-2000 having a relatively high molecular weight is excellent in flexibility and the like. Further, from the viewpoint of the balance between heat resistance, chemical resistance, flexibility, and solvent solubility, the weight average molecular weight of the polyoxyalkylene diamine is preferably from 400 to 3,000, and particularly preferably from 400 to 2,000. Preferably, 〇-400, 〇-2000, ED-600, ED-900, and XTJ-542 can be used. The polyimine used in the resin composition of the present embodiment has a polyimine structure and a polyamic acid structure as structural units. Thus, together with the polyamidiamine moiety having good compatibility with other components, and the polyamic acid moiety having a thermally crosslinkable functional group, thereby curing at low temperature by reaction with the blocked isocyanate When the carboxyl group remaining at the time is deactivated, the block isocyanate and the polyfunctional hydroxyl group-containing compound can suppress warpage. Further, the polyimine used in the resin composition of the present embodiment preferably contains By polyether structure of polyimine. The reason is 158118.doc •40· 201237101. By virtue of the polyether structure in the skeleton, the glass transition temperature and the elastic modulus of the hardened material after thermal hardening can be suppressed, thereby further reducing the warpage. Further, after thermosetting, a chemical crosslink is formed between a polyimine having a polyether structure and a compound having a heat crosslinkable functional group, and the polyaminan having a polyether structure has a polyalkylene oxide chain. Therefore, a three-dimensional network can be formed due to the local interaction between the polymer chains, and heat resistance is exhibited. Further, as the polyimine, a polyimine containing a polyimine moiety having a structure of the following formula (2) is preferably used. It is used to increase the solvent solubility of polyimine. General formula (2)

(於式(2)中,:乙丨及Z2表示4價之有機基。丫丨、Y2、Y3、Y4及 Ys表示碳數為1〜碳數為5之伸烷基,亦可具有側鏈。b、c 及d表示1〜50之整數。) 又,作為聚醯亞胺,亦較佳的是使用包含具有下述通式 (11)之結構的聚醯亞胺部的聚醯亞胺。藉由包含具有下述 通式(11)之結構的聚醯亞胺部,而使聚醯亞胺之溶劑可溶 性提高。作為聚醢亞胺,較佳的是使用包含具有上述通式 (2)或下述通式(11)之結構之聚醯亞胺部的聚醯亞胺。 I58118.doc -41 · 201237101 [化 18] 通式(11)(In the formula (2), acetamidine and Z2 represent a tetravalent organic group. 丫丨, Y2, Y3, Y4 and Ys represent an alkylene group having a carbon number of 1 to a carbon number of 5, and may have a side chain. b, c and d represent an integer of 1 to 50.) Further, as the polyimine, it is also preferred to use a polyimine containing a polyimine moiety having a structure of the following formula (11) . The solvent solubility of the polyimine is improved by including a polyimine portion having a structure of the following formula (11). As the polyimine, a polyimine containing a polyimine moiety having a structure of the above formula (2) or the following formula (11) is preferably used. I58118.doc -41 · 201237101 [Chem. 18] General formula (11)

(於式(11)中’ Z5AZ6表示4價之有機基。γ6、γ7、%、 於上述通式(2)中,Y,、γ2、γ ν 鉍Α 2 Υ3、Υ4、丫5係碳數為1〜够 數為5之伸烷基,例如可列舉 τ &、伸乙基、伸丙基、 異伸丙基、伸丁基、異伸丁篡。 基 b、c及d表示1〜5 0之智 數,較佳的是3〜40,更佳的是5〜3〇。 於上述通式(11)中,乙及心表 舉苯基、聯苯基、一苯喊基」賈之有機基’例如可列 “ 本醚基、二苯甲酮基、二苯基砜基、 ,基。其中較佳的是聯苯基、二苯峻基、二苯甲縣、二 苯基砜基,更佳的是二苯醚基。 又,於上述通式⑴)中,Y6'Y7、Y8、m,、 K及Y丨3表不銓基。作為Υ6、Y7,例如可列舉亞甲基、伸 乙基、伸丙基、異伸丙基、# “ Λ *伸丁基、異伸丁基等碳數為1〜 碳數為5之伸烧基。又,作為γ、ν(In the formula (11), 'Z5AZ6 represents a tetravalent organic group. γ6, γ7, %, in the above formula (2), Y, γ2, γ ν 铋Α 2 Υ3, Υ4, 丫5 series carbon number Examples of the alkylene group having 1 to a sufficient number of 5 are τ &, ethyl, propyl, isopropyl, butyl, and isobutyl. The bases b, c and d represent 1 to The wisdom of 50 is preferably 3 to 40, more preferably 5 to 3 〇. In the above formula (11), B and the heart are phenyl, biphenyl, and phenyl. The organic group 'for example, may be listed as "the present ether group, benzophenone group, diphenyl sulfone group, and a group. Among them, a biphenyl group, a diphenyl junyl group, a diphenyl group, a diphenyl sulfone is preferred. Further, in the above formula (1)), Y6'Y7, Y8, m, K and Y丨3 represent a fluorenyl group. Examples of ruthenium 6, Y7 include, for example, a The base, the ethyl group, the propyl group, the exo-propyl group, the #" Λ * butyl group, the isobutyl group and the like have a carbon number of 1 to a carbon number of 5. Also, as γ, ν

入作為 γ8、γ9、YlQ、Υιι、U Y丨3,例如可列舉曱甚、7萁 r基乙基、丙基、丁基、苯基。其 中,較佳的是甲基、?其、兩总 、 乙基丙基、丁基,更佳的是甲基' 乙基、丙基。g表示3〜1〇〇之整數,較佳的是5〜7〇,更佳的 158118.docExamples of γ8, γ9, YlQ, Υιι, and U Y丨3 include hydrazine, 7萁rylethyl, propyl, butyl, and phenyl. Among them, preferred is methyl, ? It is a total of two groups, ethyl propyl group and butyl group, more preferably methyl 'ethyl group, propyl group. g represents an integer of 3 to 1 ,, preferably 5 to 7 〇, more preferably 158118.doc

S • 42· 201237101 是10〜50。 進而,於聚醯亞胺中之所古一 <所有一胺中,較佳的是具有下述 通式⑽之結構的二胺之含有率為15莫耳%以上85莫= 以下。其係為了提高聚醯亞胺之溶劑可溶性及低彈性模數 化。 [化 19] 通式(12) Y4-S • 42· 201237101 is 10~50. Further, among the monoamines of the polyimine, it is preferred that the content of the diamine having the structure of the following formula (10) is 15 mol% or more and 85 mol = or less. It is intended to improve the solvent solubility and low elastic modulus of polyimine. General formula (12) Y4-

H2N—Yt-ίο—-Y2-U〇—y3\/q. ο (於式(12)中’ Yl、Υ2、Υ3、Υ4及Υ5表示碳數為1〜碳數為5 之伸烷基,亦可具有侧鏈。b、c&d表示卜5〇之整數。) 再者,於上述通式(12)中,自與基板之密接性之觀點考 慮,較佳的是Y2、Y3、丫4及丫5具有2種以上之伸烷基。 進而,於聚醯亞胺中之所有二胺中,較佳的是藉由下述 通式(13)之結構的二胺之含有率為15莫耳%以上95莫耳% 以下。其係為了提高聚醯亞胺之溶劑可溶性及低彈性模數 化。 [化 20] 通式(13)H2N—Yt-ίο—Y2-U〇—y3\/q. ο (In the formula (12), 'Yl, Υ2, Υ3, Υ4, and Υ5 represent an alkylene group having a carbon number of 1 to a carbon number of 5, Further, in the above formula (12), Y2, Y3, and ytterbium are preferable from the viewpoint of adhesion to the substrate, in addition to the side chain. b, c&d. 4 and 丫5 have two or more kinds of alkylene groups. Further, among all the diamines in the polyimine, it is preferred that the content of the diamine having the structure of the following formula (13) is 15 mol% or more and 95 mol% or less. It is intended to improve the solvent solubility and low elastic modulus of polyimine. General formula (13)

Yl2 I. -Si—Y7 - ΜΗ: Yl3 Υιο Η2Ν—YrSi—〇4Si—〇 丫 9 LY11 158118.doc ·43· 201237101 (於式(13)中 ’ γ6、γ7、γ8、γ9、Υι〇、Υιι、丫12及丫|3 表示 火i基β g表不3〜100之整數。) 又,作為上述聚醯亞胺之酿亞胺化率,自形成聚醯亞胺 與作為具有交聯性官能基之多官能交聯性化合物的異氰酸 酿化合物之交聯的觀點考慮,較佳的是25%以上且不足 100%,更佳的是25°/。以上98%以下。若聚醯亞胺之醯亞胺 化率為98。/。以下’則充分殘留有與具有熱交聯性官能基之 化合物交聯的聚醯亞胺前驅物中之羧基,因此於硬化後發 揮耐化學品性、耐熱性。又,若聚醯亞胺之醯亞胺化率為 250/。以上’則硬化後可溶於驗性溶液之羧基殘基變少,可 發揮耐化學品性、耐熱性。 再者’於上述之實施形態中,對使用含有聚醯亞胺結構 與聚醯胺酸結構之聚醯亞胺的上述第2態樣之樹脂組合物 進行了說明,但亦可藉由於起到本發明之效果之範圍内使 用實質上不含聚醯胺酸結構的聚醯亞胺,從而作為上述第 1態樣之樹脂組合物而使用。於此情形時,聚醯亞胺之醯 亞胺化率成為100%,因此並無醯亞胺化反應之必要,布 線層之劣化得到抑制而發揮良好之絕緣可靠性、耐熱性。 其次,對聚醯亞胺之製造方法加以敍述《本實施形態之 聚醢亞胺之製造方法可適用包含公知方法的可製造聚酿亞 胺之所有方法。其中,較佳的是使用於有機溶劑中進行反 應之方.法。作為於此種反應中所使用之溶劑,例如可列舉 Ν,Ν·二甲基甲醯胺、N,N_二甲基乙醯胺、N_甲基·2_。比嘻 咬酮、γ-丁内酯、丨,2-二甲氧基乙烷、四氫呋喃、丨,3-二嗯 • 44· 158118.docYl2 I. -Si—Y7 - ΜΗ: Yl3 Υιο Η2Ν—YrSi—〇4Si—〇丫9 LY11 158118.doc ·43· 201237101 (in formula (13) 'γ6, γ7, γ8, γ9, Υι〇, Υιι丫12 and 丫|3 means that the fire i base β g is not an integer of 3 to 100.) Further, as the polyamidimide, the imidization ratio is self-forming and the cross-linking function is formed. From the viewpoint of crosslinking of the isocyanate compound of the polyfunctional crosslinkable compound, it is preferably 25% or more and less than 100%, more preferably 25°/. Above 98%. If the polyamidimide has a ruthenium imidation ratio of 98. /. In the following, the carboxyl group in the polyimine precursor which is crosslinked with the compound having a thermally crosslinkable functional group remains sufficiently, so that it exhibits chemical resistance and heat resistance after curing. Further, if the polyamidimide has a hydrazine imidation ratio of 250/. When the above is cured, the carboxyl residue remaining in the test solution is reduced, and the chemical resistance and heat resistance can be exhibited. Further, in the above embodiment, the resin composition of the second aspect using the polyimine having a polyimine structure and a polyaminic acid structure is described, but it may also be In the range of the effects of the present invention, a polyimide composition having substantially no polyamic acid structure is used, and it is used as the resin composition of the first aspect. In this case, since the imidization ratio of the polyimine is 100%, there is no need for the imidization reaction, and the deterioration of the wiring layer is suppressed to exhibit good insulation reliability and heat resistance. Next, a description will be given of a method for producing a polyimine. For the method for producing a polyimine of the present embodiment, all methods for producing a polyimide having a known method can be applied. Among them, a method of reacting in an organic solvent is preferred. Examples of the solvent to be used in such a reaction include hydrazine, hydrazine dimethylformamide, N,N-dimethylacetamide, and N-methyl-2.嘻 咬 ketone, γ-butyrolactone, hydrazine, 2-dimethoxyethane, tetrahydrofuran, hydrazine, 3- dimethyl • 44· 158118.doc

S 201237101 烧、1,4-二0惡規i、二甲其K rs λλ — Τ暴亞砜、本、甲苯、二甲苯、均三 曱苯、苯酚、甲酚、苯甲 〇 〇 Τ酸乙8曰、本甲酸丁酯等。該等可 單獨使用或者將2種以上混合使用。再者,該反應中之反 應原料之濃度通常為2質量%〜_%,較佳的是3〇質量 %〜70質量%。 進行反應之四竣酸二軒與二胺之莫耳比為〇·8〜Μ之範圍 内。於該範圍内之情形時,可提高分子量,且伸長率等亦 優異。較佳的是〇.9〜】.卜更佳的是om 聚醯亞胺之重#平均分子量較㈣是5_以上刪⑽以 y此處’所謂重量平均分子量是指以已知數量平均分子 量之聚$乙烯為;^準’藉由凝膠滲透層析法而測^的重量 平均分子量。重量平均分子量更佳的是1〇〇〇〇以上6〇〇〇〇以 下,最佳的是20000以上50000以丁。若重量平均分子量為 5000以上looooo以下,則使用樹脂組合物而所得之保護膜 的翹曲得到改善,低斥力性、及耐熱性優異。進而,可以 塗佈印刷時所期望之膜厚下無滲出地印刷,又,所得之保 護膜的伸長率等機械物性優異。 聚酿亞胺可藉由如下所述之方法而獲得。首先,使反應 原料於室溫下進行聚縮合反應,藉此而製造包含聚醯胺酸 結構之聚醯亞胺。其次’將該聚醯亞胺較佳地加熱至 100°c〜400°c而進行醯亞胺化’或者使用乙酸酐等醯亞胺 化劑而進行化學醯亞胺化,藉此而獲得包含具有與聚醯胺 酸對應之重複單元結構的聚醯亞胺結構的聚醯亞胺。於進 行加熱而進行醯亞胺化之情形時,為了除去所副生之水, 158118.doc •45- 201237101 較佳的是使共沸劑(較佳的是甲苯或二甲苯),使用Dean_ Stark型脫水裝置,於回流下進行脫水。 又’較佳的是藉由於下進行反應,使包含聚 酿胺酸結構之聚醯亞胺之生成與熱醯亞胺化反應一同進 行’獲得包含聚醯亞胺結構與聚醯胺酸結構之聚醯亞胺。 亦即’較佳的是使二胺成分與酸二酐成分懸浮或溶解於有 機溶劑中’於80。(:〜22(TC之加熱下使其反應,藉此而一同 進行聚醯亞胺之生成與脫水醯亞胺化,從而獲得聚醯亞 胺。 又,聚醯亞胺之聚合物主鏈之末端亦可藉由包含單胺衍 生物或羧酸衍生物之封端劑而進行封端。聚醯亞胺之聚合 物主鏈的末端被封閉,因此源自末端官能基之儲存穩定性 優異。 作為包含單胺衍生物之封端劑,例如可列舉:苯胺、鄰 甲苯胺、間甲苯胺、對曱苯胺、2,3-二甲苯胺、2,6-二甲 苯胺、3,4-二甲苯胺、3,5-二甲苯胺、鄰氯苯胺、間氣苯 胺、對氯苯胺、鄰溴苯胺、間溴苯胺、對溴苯胺、鄰硝基 苯胺、對硝基苯胺、間硝基苯胺、鄰胺基苯酚、對胺基苯 酚、間胺基苯酚、鄰胺基苯甲醚、間胺基苯甲醚、對胺基 苯甲醚、鄰胺基苯乙醚、間胺基苯乙醚、對胺基苯乙醚、 鄰胺基苯曱醛、對胺基苯甲醛、間胺基苯曱醛、鄰胺基苯 腈、對胺基苯腈、間胺基苯腈、2-胺基聯苯、3-胺基聯 苯、4-胺基聯苯、2-胺基苯基苯基醚、3-胺基苯基苯基 謎、4-胺基苯基苯基謎、2-胺基二苯甲嗣、3-胺基二笨曱 • 46- 158118.docS 201237101 Burning, 1,4-二0 规 i i, dimethyl ke s λ λ — Τ sulf sulfoxide, Ben, toluene, xylene, tricresene, phenol, cresol, benzoic acid 8 曰, the present butyl formate and the like. These may be used singly or in combination of two or more. Further, the concentration of the reaction raw material in the reaction is usually 2% by mass to _%, preferably 3 % by mass to 70% by mass. The molar ratio of the diterpene tetradecanoate to the diamine in the reaction range is in the range of 〇·8~Μ. In the case of this range, the molecular weight can be increased, and the elongation and the like are also excellent. Preferably, 〇.9~]. Bu is better than the weight of om polyimine. The average molecular weight is (5) is 5 or more. (10) y. Here, the so-called weight average molecular weight refers to the average molecular weight in a known amount. The poly(ethylene) is the weight average molecular weight measured by gel permeation chromatography. The weight average molecular weight is more preferably 1 Torr or more and 6 Å or less, and most preferably 20,000 or more and 50,000 ounces. When the weight average molecular weight is 5,000 or more and lessooo or less, the warpage of the protective film obtained by using the resin composition is improved, and the low repulsiveness and heat resistance are excellent. Further, it is possible to apply a film having a desired thickness at the time of printing without bleeding, and it is excellent in mechanical properties such as elongation of the obtained protective film. The brewing imine can be obtained by the method described below. First, a polycondensation reaction is carried out by subjecting a reaction raw material to a polycondensation reaction at room temperature. Next, 'the polyimine is preferably heated to 100 ° C to 400 ° C to carry out oxime imidization' or chemical imidization using a ruthenium imide such as acetic anhydride, thereby obtaining inclusion Polyimine having a polyimine structure having a repeating unit structure corresponding to polylysine. In the case of performing imidization by heating, in order to remove the by-produced water, 158118.doc •45-201237101 is preferably an azeotropic agent (preferably toluene or xylene) using Dean_Stark The type dehydration device performs dehydration under reflux. Further, it is preferred that the formation of the polyamidene containing the polyacrylic acid structure is carried out together with the thermal imidization reaction by the reaction, and the structure comprising the polyimine structure and the polyamic acid structure is obtained. Polyimine. That is, it is preferred to "suspend or dissolve the diamine component and the acid dianhydride component in an organic solvent" at 80. (: ~22 (the reaction of TC is heated, whereby the formation of polyimine and the dehydration of the ruthenium iodide are carried out together to obtain a polyimine. Further, the polymer backbone of the polyimine The terminal can also be blocked by a terminal blocking agent containing a monoamine derivative or a carboxylic acid derivative. The terminal of the polymer backbone of the polyimine is blocked, and thus the storage stability derived from the terminal functional group is excellent. Examples of the blocking agent containing a monoamine derivative include aniline, o-toluidine, m-toluidine, p-anisidine, 2,3-dimethylaniline, 2,6-dimethylaniline, and 3,4-di. Toluidine, 3,5-dimethylaniline, o-chloroaniline, m-aniline, p-chloroaniline, o-bromoaniline, m-bromoaniline, p-bromoaniline, o-nitroaniline, p-nitroaniline, m-nitroaniline, o-Aminophenol, p-aminophenol, m-aminophenol, o-aminoanisole, m-aminoanisole, p-aminoanisole, o-aminophenethyl ether, m-aminophenylether, p-amine Phenylethyl ether, o-aminobenzaldehyde, p-aminobenzaldehyde, m-aminophenyl aldehyde, o-aminobenzonitrile, p-aminobenzonitrile, m-amino group Benzotrile, 2-aminobiphenyl, 3-aminobiphenyl, 4-aminobiphenyl, 2-aminophenylphenyl ether, 3-aminophenyl phenyl mystery, 4-aminophenyl Phenyl mystery, 2-aminobenzidine, 3-amino 2 awkward • 46- 158118.doc

S 201237101 酮4-胺基一本甲酿1、2-胺基苯基苯基硫醚、3-胺基苯基 苯基硫謎、4-胺基苯基苯基硫醚、2_胺基苯基苯基砜、3_ 胺基苯基苯基砜、4-胺基笨基苯基砜、α_萘胺、β_萘胺、 1-胺基-2-萘酚、5-胺基-1-萘酚、2-胺基_1_萘酚、4-胺基_ 1-萘酚、5-胺基-2-萘酚、7-胺基-2-萘酚、8-胺基-1-萘酚、 8-胺基-2_萘酚、丨_胺基蒽、2_胺基蒽、9_胺基蒽等芳香族 單胺。其中,可較佳地使用苯胺衍生物。該等可單獨使 用,亦可將2種以上混合使用。 作為包含羧酸衍生物之封端劑,主要列舉羧酸酐衍生 物。作為羧酸酐衍生物,例如可列舉鄰苯二甲酸酐、2,3_ 一苯曱_二甲酸酐、3,4-二苯'曱酮二曱酸酐、2,3-二敌基 笨基苯基醚酐、3,4-二羧基苯基苯基醚酐、2,3-聯笨二曱 酸酐、3,4·聯苯二甲酸酐、2,3_二羧基苯基苯基砜酐、3,4_ 二羧基苯基笨基硬酐、2,3-二羧基苯基苯基硫醚酐、3,4-一叛基苯基苯基硫趟酐、1,2-萘二曱酸野、2,3-萘二曱酸 肝、1,8-萘一甲酸軒、1,2-蒽二曱酸if、2,3-蒽二曱酸肝、 1,9-蒽二甲酸酐等芳香族二羧酸酐。於該等芳香族二羧酸 酐中,較佳的是使用鄰苯二曱酸酐。該等可單獨使用,亦 可將2種以上混合使用。 藉由上述方法而所得之聚醯亞胺可未經脫溶劑而直接使 用’或者是需要進而調配必要之溶劑、添加劑等而用於本 實施形態之樹脂組合物中。 再者’於上述實施形態中,使用作為(A)高分子化合物 的具有包含脂肪族二胺成分之聚醯亞胺結構及聚醯胺酸結 158118.doc • 47· 201237101 構而作為結構單元的聚醯亞胺的第2態樣之樹脂組合物進 行了說明,亦可藉由於起到本發明之效果的範圍内使用實 質上不含聚醯胺酸結構之聚醯亞胺,從而作為上述第i雜 樣之樹脂組合物而使用。 (Β)多官能含羥基化合物 本貫施形態之樹脂組合物中所使用之多官能含經基化人 物是指相對於一根分子鏈而包含2個以上羥基者。可列舉 於骨架中包含脂肪族、芳香族、脂環基等之烴基者’自提 高絕緣性之方面考慮,較佳的是於骨架中具有如下述式 (14)所表示之結構者’自抑制翹曲之方面考慮,較佳的是 包含脂肪族之化合物。其原因在於:藉由具有脂肪族之骨 架,可並不損及抑制翹曲之效果地抑制吸濕性,即使於吸 濕時亦可表現出較高之絕緣性。再者,於包含長鏈之脂肪 族基之情形時,翹曲抑制之效果變高而較佳。 [化 21] 通式(14) H〇4fxyYffz^fx 计 〇Η (於式(14)中,X係芳香族,γ係碳數為丨〜碳數為⑺之脂肪 族’ Z係選㈣基、§旨基、碳㈣基、胺基甲酸醋基、腺 基之官能基’ h=0〜2之整數,卜㈠之整數,卜丨〜麵之整 數。) 又’特別是於電子材料請中,較佳的是不含氣或氣等 鹵素者。 158118.docS 201237101 Ketone 4-Amine, a brew, 1, 2-aminophenyl phenyl sulfide, 3-aminophenyl phenyl sulfide, 4-aminophenyl phenyl sulfide, 2-amino Phenylphenyl sulfone, 3-aminophenyl phenyl sulfone, 4-amino phenyl sulfone, α-naphthylamine, β-naphthylamine, 1-amino-2-naphthol, 5-amino group- 1-naphthol, 2-amino-1-naphthol, 4-amino-1-naphthol, 5-amino-2-naphthol, 7-amino-2-naphthol, 8-amino- An aromatic monoamine such as 1-naphthol, 8-amino-2-naphthol, anthraquinone-based anthracene, 2-aminoguanidine or 9-aminoindole. Among them, an aniline derivative can be preferably used. These may be used singly or in combination of two or more. As the blocking agent containing a carboxylic acid derivative, a carboxylic anhydride derivative is mainly mentioned. Examples of the carboxylic anhydride derivative include phthalic anhydride, 2,3-benzoquinone dicarboxylic anhydride, 3,4-diphenyl'fluorenone dicarboxylic anhydride, and 2,3-dicarbylphenyl. Ether anhydride, 3,4-dicarboxyphenyl phenyl ether anhydride, 2,3-biphenyl phthalic anhydride, 3,4·diphthalic anhydride, 2,3-dicarboxyphenyl sulfone anhydride, 3 , 4_ dicarboxyphenyl strepyl hard anhydride, 2,3-dicarboxyphenyl phenyl thioether anhydride, 3,4- retinophenyl phenyl phthalic anhydride, 1,2-naphthalene dicarboxylic acid wild, 2,3-naphthalene dihydrogenate liver, 1,8-naphthalene monocarboxylic acid, 1,2-decanoic acid if, 2,3-decanoic acid liver, 1,9-nonanedicarboxylic anhydride, etc. Dicarboxylic anhydride. Among these aromatic dicarboxylic acid anhydrides, phthalic anhydride is preferably used. These may be used alone or in combination of two or more. The polyimine obtained by the above method can be used as it is without using a solvent, or it can be used in the resin composition of the present embodiment by further preparing a necessary solvent, an additive or the like. Further, in the above embodiment, a polyimine structure having an aliphatic diamine component and a polyglycolate 158118.doc • 47·201237101 as a structural unit are used as the (A) polymer compound. The resin composition of the second aspect of the polyimine is described, and the polyimine which is substantially free of the polyamic acid structure may be used as the above-mentioned effect. I used a mixed resin composition. (Β) Polyfunctional hydroxyl group-containing compound The polyfunctional group-containing compound used in the resin composition of the present embodiment means a monomer having two or more hydroxyl groups per molecule chain. In the case of a hydrocarbon group containing an aliphatic, an aromatic or an alicyclic group in the skeleton, the self-inhibition of the structure represented by the following formula (14) is preferable in terms of improving the insulating property. In view of warpage, it is preferred to contain an aliphatic compound. The reason for this is that by having an aliphatic skeleton, hygroscopicity can be suppressed without impairing the effect of suppressing warpage, and high insulation properties can be exhibited even when absorbing moisture. Further, in the case of containing a long-chain aliphatic group, the effect of suppressing warpage becomes high and is preferable. General formula (14) H〇4fxyYffz^fx 〇Η (In the formula (14), X-type aromatic, γ-based carbon number is 丨~ carbon number is (7) aliphatic 'Z-based (four) base , § base, carbon (tetra), amino formate, argyl functional group 'h = 0 to 2 integer, Bu (a) integer, divination ~ face integer.) And 'especially for electronic materials, please Among them, it is preferred that the halogen is not contained in gas or gas. 158118.doc

S •48- 201237101 作為多官能含羥基化合物之具體例,可列舉 PTMG1 000(三菱化學公司製造)等聚丁二醇,G-1000(曰本 曹達公司製造)等聚丁二烯二醇,GI-1000(日本曹達公司製 造)等氫化聚 丁二烯二醇,DURANOL T565 1、DURANOL T5652、DURANOL T4671(旭化成化學公司製造)及 PLACCEL CD(大赛璐化學工業公司製造)等聚碳酸酯二 醇,PLACCEL 200(大赛璐化學工業公司製造)等聚己内酯 二醇,雙酚A(大賽璐化學工業公司製造)等雙酚類, Rikabinol HB(新日本理化公司製造)等氫化雙酚類等。 其中,自提高絕緣性之方面考慮,較佳的是聚丁二烯二 醇、氫化聚丁二烯二醇、聚碳酸酯二醇,自減低翹曲之方 面考慮,較佳的是聚碳酸醋二醇。 又,作為多官能含羥基化合物,自減低翹曲與於有機溶 劑中之溶解性之方面而言,較佳的是於室溫下為液狀者。 作為分子量,較佳的是500〜3000者,特佳的是分子量為 500〜2000者。 作為多官能含羥基化合物,自同時實現翹曲之減低、焊 料耐熱性及耐化學品性之方面考慮,較佳的是相對於樹脂 組合物100質量份而言含有3質量份〜70質量份,更佳的是 含有5質量份〜60質量份。 再者,於本實施形態中,作為(B)多官能含羥基化合 物,對含有2個羥基之多官能含羥基化合物進行了說明, 但亦可於起到本發明之效果的範圍内使用含有2個以上羥 基之多元醇等。 158118.doc -49- 201237101 (c-l)嵌段異氰酸酯化合物 本實施形態之樹脂組合物中所使用之嵌段異氰酸酯化合 物係藉由使分子内具有2個以上異氰酸酯基之異氰酸酷與 阻斷劑反應而所得之化合物。作為分子内具有2個以上異 氰酸醋基之異氮酸醋化合物,可列舉丨,6_己烷二異氰酸 酯、4,4’-二苯基甲烷二異氰酸酯、2,4_甲苯二異氰酸酯、 2,6-曱苯二異氰酸醋、苯二曱基二異氰酸醋、4,4·_二環己 基甲烧二異氛酸醋、4,4·-經基化二異氰酸酯、異佛爾_二 異氰酸酯、1,5-萘二異氰酸酯、4,4_二苯基二異氰酸酯、 1,3-雙(異氰酸醋甲基)環己烷、伸苯基_丨,4_二異氰酸酿、 伸苯基-2,6-二異氰酸酯、1,3,6_六亞甲基三異氰酸酯、或 六亞甲基二異氰酸酯等。作為阻斷劑,可列舉醇類、酚 類、ε-己内醯胺、蔣類、活性亞甲基類、硫醇類、胺類、 醯亞胺類、酿胺類、咪唑類、脲類、胺基甲酸鹽類、亞胺 類、或亞硫酸鹽類等。 作為嵌段異氰酸酯化合物之具體例,.可列舉旭化成化學 公司製造之商品名 Duranate SBN-70D、ΤΡΑ-Β80Ε、ΤΡΑ_ Β80Χ、17Β-60ΡΧ、MF-B60X、Ε402-Β80Τ、ME20-B80S、 MF-K60X、Κ6000等六亞甲基二異氰酸酯(以下亦稱為 「HDI」)系嵌段異氰酸酯。又,作為三井化學聚胺酯公司 之產品,可列舉商品名Takenate Β-882Ν、作為甲苯二異氛 酸醋系嵌段異氰酸酯之商品名Takenate β·830、作為4 4,_ 二苯基甲烷二異氰酸酯系嵌段異氰酸酯之商品名Takenate B-815N、作為ι,3·雙(異氰酸酯甲基)環己烷系嵌段異氰酸 158118.doc •50- 201237101 酯之Takenate B-846N。又,可列舉日本聚胺酯工業公司製 造之商品名 CORONET ΑΡ-Μ2503、2515、25〇7、2513、或 MILLIONATE MS-50等、或作為異佛爾酮二異氰酸酯系嵌 段異氰酸酯之Baxenden公司製造之件號795〇、7951、799〇 等。該等嵌段異氰酸酯化合物可單獨使用,亦可將2種以 上組合使用。 再者,於本實施形態中,作為(c)多官能交聯性化合 物,對嵌段異氰酸酯化合物進行了說明,亦可使用上述之 具有2個以上異氰酸酯基之多官能異氰酸酯化合物而代替 喪段異氰酸輯化合物。進而,亦可於起到本發明之效果的 範圍内使用多官能^坐琳化合物而代替多官能異氰酸醋化 合物。 再者,樹脂組合物除了聚醯亞胺、多官能含羥基化合 物、敌段異氰酸酷化合物以外,亦可含有有機溶劑。其原 因在於·n由设為溶解於有機溶劑中之狀態,可作為清漆 而較佳地使用。 作為此種有機溶劑,可列舉N,N_:甲基乙醯胺、Ν,Ν-二 乙基乙醯胺、N,N-二甲基甲醯胺、N,N-二乙基甲醯胺、Ν· 甲m各㈣等酿胺溶劑,γ·丁内醋、γ·戊㈣等内醋 冷劑一甲基亞砜、二乙基亞颯、六甲基亞砜等含硫系溶 劑’甲紛、苯紛等酴系溶劑,二乙二醇二Μ (二甘醇二 甲醚)、三乙二醇二甲醚(三甘醇二甲醚)、四乙醇二甲醚、 一心烷、四氫呋喃、苯甲酸丁酯、苯甲酸乙酯、苯甲酸甲 酉曰等驗办劑。χ,該等有機溶劑可單獨使用,亦可複數種 158118.doc •51- 201237101 性之方面考慮,較佳的是 苯甲酸丁酯、苯曱酸乙 併用。特別是自高沸點與低吸水 使用γ-丁内酯、三甘醇二曱醚、 酉旨0 (F)阻燃劑 樹月〜旨組合物亦可進而含有阻燃齊卜阻燃劑之種類並無特 :限足,可列舉含㈣化合物、含磷化合物及無機阻燃劑 等。該等阻燃劑可使用一種,亦可將兩種以上混合使用。 阻燃劑之添加量並無特別限^,可根據所使用之阻辦劑之 種類而適宜變更。例如,可以聚醯亞胺之含量為基準而於 5質量%〜5〇質量%之範圍内使用。 、作為含函素化合物,可列舉包含氣之有機化合物與包含 溴之化合物等。具體而言可列舉五溴二苯醚、八溴二苯S.48-201237101 Specific examples of the polyfunctional hydroxyl group-containing compound include polybutadiene diol such as PTMG1 000 (manufactured by Mitsubishi Chemical Corporation) and polybutadiene diol such as G-1000 (manufactured by Sakamoto Soda Co., Ltd.). a polycarbonate diol such as hydrogenated polybutadiene diol such as -1000 (manufactured by Japan Soda Co., Ltd.), DURANOL T565 1, DURANOL T5652, DURANOL T4671 (manufactured by Asahi Kasei Chemicals Co., Ltd.), and PLACCEL CD (manufactured by Daicel Chemical Industries, Ltd.). Polycaprolactone diol such as PLACCEL 200 (manufactured by Daicel Chemical Industries, Ltd.), bisphenols such as bisphenol A (manufactured by Daicel Chemical Industries, Ltd.), hydrogenated bisphenols such as Rikabinol HB (manufactured by Nippon Chemical Co., Ltd.). Among them, polybutadiene diol, hydrogenated polybutadiene diol, and polycarbonate diol are preferred from the viewpoint of improving the insulating property, and polycarbonate is preferred from the viewpoint of reducing warpage. Glycol. Further, as the polyfunctional hydroxyl group-containing compound, it is preferably liquid at room temperature from the viewpoint of reducing warpage and solubility in an organic solvent. The molecular weight is preferably from 500 to 3,000, and particularly preferably from 500 to 2,000. The polyfunctional hydroxyl group-containing compound is preferably contained in an amount of from 3 parts by mass to 70 parts by mass per 100 parts by mass of the resin composition, in view of reduction in warpage, solder heat resistance, and chemical resistance. More preferably, it contains 5 parts by mass to 60 parts by mass. In the present embodiment, the polyfunctional hydroxyl group-containing compound having two hydroxyl groups is described as the (B) polyfunctional hydroxyl group-containing compound, but it may be used in the range of the effect of the present invention. More than one hydroxyl group polyol, and the like. 158118.doc -49- 201237101 (cl) Block Isocyanate Compound The blocked isocyanate compound used in the resin composition of the present embodiment is an isocyanate and a blocker having two or more isocyanate groups in the molecule. The compound obtained by the reaction. Examples of the isocyanate compound having two or more isocyanate groups in the molecule include hydrazine, 6-hexane diisocyanate, 4,4'-diphenylmethane diisocyanate, and 2,4-toluene diisocyanate. 2,6-nonyl diisocyanate vinegar, benzodiazepine diisocyanate, 4,4·_dicyclohexyl methane diisocyanate, 4,4·-enylated diisocyanate, different Fro-diisocyanate, 1,5-naphthalene diisocyanate, 4,4-diphenyl diisocyanate, 1,3-bis(isocyanatomethyl)cyclohexane, phenyl phenylene, 4_2 Isocyanic acid, phenyl-2,6-diisocyanate, 1,3,6-hexamethylene triisocyanate, or hexamethylene diisocyanate. Examples of the blocking agent include alcohols, phenols, ε-caprolactam, jiang, active methylene, thiols, amines, quinones, amines, imidazoles, ureas. , amine carbamates, imines, or sulfites. Specific examples of the blocked isocyanate compound include Duranate SBN-70D, ΤΡΑ-Β80Ε, ΤΡΑ_Β80Χ, 17Β-60ΡΧ, MF-B60X, Ε402-Β80Τ, ME20-B80S, MF-K60X manufactured by Asahi Kasei Chemical Co., Ltd. Hexamethylene diisocyanate (hereinafter also referred to as "HDI") such as Κ6000 is a blocked isocyanate. Moreover, as a product of Mitsui Chemical Polyurethane Co., Ltd., the product name Takenate Β-882Ν, the trade name of the toluene diisocyanuric acid block isocyanate, Takenate β·830, and 4 4, _ diphenylmethane diisocyanate are mentioned. The trade name of block isocyanate is Takenate B-815N, which is Takeate B-846N as i,3·bis(isocyanatemethyl)cyclohexane block isocyanic acid 158118.doc •50- 201237101 ester. Further, a product manufactured by Japan Polyurethane Industry Co., Ltd. under the trade name of CORONET®-2503, 2515, 25〇7, 2513, or MILLIONATE MS-50, or Baxenden, which is an isophorone diisocyanate-block isocyanate, may be mentioned. No. 795〇, 7951, 799〇, etc. These block isocyanate compounds may be used singly or in combination of two or more. Further, in the present embodiment, the blocked isocyanate compound is described as the (c) polyfunctional crosslinkable compound, and the above polyfunctional isocyanate compound having two or more isocyanate groups may be used instead of the funeral Cyanate compound. Further, in place of the polyfunctional isocyanate compound, a polyfunctional compound can be used in the range in which the effects of the present invention are exerted. Further, the resin composition may contain an organic solvent in addition to the polyimine, the polyfunctional hydroxyl group-containing compound, and the latent isocyanate compound. The reason for this is that n is dissolved in an organic solvent and can be preferably used as a varnish. Examples of such an organic solvent include N,N_: methylacetamide, hydrazine, hydrazine-diethylacetamide, N,N-dimethylformamide, and N,N-diethylformamide. , Ν· A m (4) and other amine solvent, γ · butyl vinegar, γ · pentane (tetra) and other internal vinegar refrigerant monomethyl sulfoxide, diethyl hydrazine, hexamethyl sulfoxide and other sulfur-containing solvents ' A bismuth, benzene and other hydrazine solvents, diethylene glycol diterpene (diglyme), triethylene glycol dimethyl ether (triglyme), tetraethanol dimethyl ether, monocentric, Tetrahydrofuran, butyl benzoate, ethyl benzoate, formazan benzoate and other preparations. χ, these organic solvents may be used singly or in multiples. 158118.doc • 51- 201237101 In terms of properties, it is preferred to use butyl benzoate and benzoic acid. In particular, the use of γ-butyrolactone, triethylene glycol dioxime ether, and the composition of the flame retardant of the flame retardant from the high boiling point and the low water absorption may further include the type of the flame retardant flame retardant. There is no special: limited, including (4) compounds, phosphorus compounds and inorganic flame retardants. These flame retardants may be used alone or in combination of two or more. The amount of the flame retardant to be added is not particularly limited and may be appropriately changed depending on the type of the inhibitor to be used. For example, it can be used in the range of 5 mass% to 5 mass% based on the content of the polyimine. Examples of the element-containing compound include an organic compound containing gas and a compound containing bromine. Specifically, pentabromodiphenyl ether and octabromodiphenyl can be cited.

喊、十演二苯鱗、四淳嬸胁厶、自I 等。 〜“十二貌四漠雙紛A 作為含磷化合物,可列舉韻、膦、氧化膦、錢醋、 及亞鱗酸自旨㈣化合物。特別是自與聚醢亞胺組合物之相 溶性之方面考慮,較佳的是使㈣腈、氧化膦、或鱗酸 醋。 作為含填化合物之具體例,可列舉伏見製藥所公司製造 之磷腈衍生物FPl〇〇、FPn〇、奸3〇〇、Fp4〇〇等。 作為無機阻燃劑,可列舉錄化合物與金屬氫氧化物等。 作為綈化合物’可列舉三氧化二録與五氧化二^作為金 屬氫氧化物,可列舉氫氧化鋁、氫氧化鎂等。再者,藉由 將録化合物與上述含齒素化合物㈣,可於塑勝之熱分解 I58118.docShout, ten play diphenyl scales, four 淳婶 threats, since I and so on. ~ "Twelve appearances and four deserts A" as phosphorus-containing compounds, can be cited as rhyme, phosphine, phosphine oxide, vinegar, and squaric acid from the purpose of (4) compounds, especially from the compatibility with polyamidiamine compositions In view of the above, it is preferred to use (iv) a nitrile, a phosphine oxide, or a squaric acid vinegar. As a specific example of the filler-containing compound, a phosphazene derivative FPl〇〇, FPn〇, traitor 3 manufactured by Fushimi Pharmaceutical Co., Ltd. may be mentioned. Fp4〇〇, etc. Examples of the inorganic flame retardant include a compound and a metal hydroxide. Examples of the ruthenium compound include aluminum oxide and pentoxide as metal hydroxides, and examples thereof include aluminum hydroxide. Magnesium hydroxide, etc. Further, by recording the compound with the above-mentioned dentate-containing compound (IV), it can be decomposed by the thermal decomposition of I58118.doc

S •52· 201237101 素原子而生成齒化銻 溫度區,氧化銻自阻燃劑中奪取鹵 因此可相乘地提高阻燃性。 無機阻燃劑並不溶解於右 妨接沾〜 解於有機溶劑中,因此其粉末之粒徑 較佳的疋1 〇〇 μηι以下。其 τ 其原因在於:若粒徑為100 μηι以 下,則谷易混入至聚酿亞腰人 . ^ ΒΗ ^ 胺,且a物中,且有損硬化後之樹 月日之透明性。為了奋公组t 充刀柃鬲阻燃性,粉末之粒徑較佳的是 50μΓη以下,特佳的是1〇师以下。 又’作為阻燃劑,亦可使 J便用3氮化合物。含氮化合物可 使用-種而作為阻燃劑,亦可將上述之含函素化合物、含 碗化合物及無機阻燃劑與含氮化合物混合兩種以上使用而 作為阻燃劑。作為含氮化合物之添加量,並無特別限定, 可根據所使用之阻燃劑之種類而變更。作為含氮化合物之 。量例如可與上述之阻燃劑同樣地以聚醯亞胺之含量 為基準於5 f量〇/。〜50質量%之範圍内使用。作為含氮化 5物例如可列舉日產化學公司製造、輝化學工業公司製 ie之二聚氰胺氰尿酸醋等。 於形成塗佈膜時,可根據其塗佈方式而進行黏度與揺變 性之調整。亦可視需要添加填料或搖變性賦予劑而使用。 又,亦可添加公知之消泡劑或均化劑或顏料等添加劑。 又’於形成塗佈膜時’亦可添加胺基甲酸酯化觸媒而使 用作為胺基曱酸酯化觸媒,可列舉San-Apro公司製造之 ϋ-CAT SA(言主冊商標)1〇2、603、506、U-CAT(註冊商 標)1102、Matsumot〇 Fine Chemical Co.Ltd.製造之有機鍅 化合物、楠本化成公司製造之鍅K-KAT等。 158118.doc •53· 201237101 樹脂組合物亦可進而含有具有熱交聯性官能基之化合 物。作為具有熱交聯性官能基之化合物,可列舉三嗪系^ 合物、苯并噁嗪化合物、及環氧化合物等。 作為三嗪系化合物,較佳的是三聚氰胺類及三聚氰酸三 聚氰胺類。作為三聚氰胺類,可列舉三聚氰胺衍生物、具 有與三聚氰胺類似之結構的化合物與三聚氰胺之縮合物 等。作為三聚氰胺類之具體例,例如可列舉羥甲基化三聚 氰胺、三聚氰胺一醯胺、三聚氰酸二醯胺、甲醯縮胍胺: 胍基三聚氰胺、氰基三聚氰胺、芳基胍胺、蜜白胺、蜜勒 胺、蜜弄(melon)等。作為三聚氰酸三聚氰胺類,可列舉三 聚氰酸與三聚氰胺類之等莫耳反應物。又,三聚氰酸三聚 氰胺類中之胺基或羥基之數個亦可經其他取代基而取代。 苯并嚼嗪化合物可為僅包含單體者,亦可數個分子聚合而 成為寡聚物狀態β χ ’亦可同時使用具有不同結構之笨并 噁嗪化合物。其中,可較佳地使用雙酚苯并噁嗪。 再者,樹脂組合物可藉由進而添加丙烯酸系單體與光自 由基產生劑,從而作為負型感光性樹脂組合物而使用。 又可藉由添加光酸產生劑,從而作為正型感光性樹脂組 合物而使用。 可藉由對上述樹脂組合物進行加熱而獲得硬化物。關於 加之態樣’並無特別限定,較佳的是於2階段之溫度區 域各進行5分鐘〜6〇分鐘之加熱,更佳的是於1〇〇e>c〜13〇(>c 下進行5分鐘〜6〇分鐘之加熱後,於16〇艽〜2〇〇它下進行15 刀鐘〜60分鐘之加熱。如上所述地於2種溫度區域使其硬 158118.docS •52· 201237101 Produces a dentate enthalpy in the temperature zone. The cerium oxide captures halogen from the flame retardant, so the flame retardancy can be multiplied. The inorganic flame retardant is not dissolved in the right solution and is dissolved in an organic solvent, so that the particle size of the powder is preferably 疋1 〇〇 μηι or less. The reason for τ is that if the particle size is below 100 μηι, the grain is easily mixed into the poly-branched man. ^ ΒΗ ^ amine, and in a, and the transparency of the tree after the hardening is damaged. In order to improve the flame retardancy of the group, the particle size of the powder is preferably 50 μΓη or less, and particularly preferably 1 〇 or less. Further, as a flame retardant, it is also possible to use a nitrogen compound. The nitrogen-containing compound may be used as a flame retardant, and the above-mentioned element-containing compound, the bowl-containing compound, the inorganic flame retardant, and the nitrogen-containing compound may be used in combination of two or more kinds as a flame retardant. The amount of the nitrogen-containing compound to be added is not particularly limited, and may be changed depending on the type of the flame retardant to be used. As a nitrogen-containing compound. The amount can be measured, for example, in the same manner as the above-mentioned flame retardant based on the content of the polyimine. Use within the range of ~50% by mass. Examples of the nitriding-containing material include melamine cyanuric acid vinegar manufactured by Nissan Chemical Co., Ltd., and the company. When the coating film is formed, the viscosity and the enthalpy change can be adjusted according to the coating method. It may also be added by adding a filler or a rheology imparting agent as needed. Further, an additive such as a known antifoaming agent or a leveling agent or a pigment may be added. In addition, when a coating film is formed, a urethane-based catalyst may be added and used as an amine phthalate-based catalyst, and ϋ-CAT SA manufactured by San-Apro Co., Ltd. may be cited. 1〇, 603, 506, U-CAT (registered trademark) 1102, an organic hydrazine compound manufactured by Matsumot〇 Fine Chemical Co., Ltd., 鍅K-KAT manufactured by Nanben Chemical Co., Ltd., and the like. 158118.doc •53· 201237101 The resin composition may further contain a compound having a heat crosslinkable functional group. Examples of the compound having a thermally crosslinkable functional group include a triazine system, a benzoxazine compound, and an epoxy compound. As the triazine-based compound, melamine and melamine cyanurate are preferred. Examples of the melamines include melamine derivatives, condensates of compounds having a structure similar to melamine, and melamine. Specific examples of the melamines include, for example, methylolated melamine, melamine monoamine, decylamine cyanamide, and formazan: decyl melamine, cyano melamine, aryl decylamine, honey white Amine, melem, melon, and the like. Examples of the melamine cyanurate include a molar reactant such as cyanuric acid and melamine. Further, the number of amine groups or hydroxyl groups in the melamine cyanurate may be substituted by other substituents. The benzoxazine compound may be one containing only a monomer, or may be polymerized in several molecules to form an oligomer state β χ ' or a benzoxazine compound having a different structure may be used at the same time. Among them, bisphenol benzoxazine can be preferably used. Further, the resin composition can be used as a negative photosensitive resin composition by further adding an acrylic monomer and a photoradical generating agent. Further, it can be used as a positive photosensitive resin composition by adding a photoacid generator. The cured product can be obtained by heating the above resin composition. The addition state is not particularly limited, and it is preferred to carry out heating for 5 minutes to 6 minutes in each of the temperature zones of 2 stages, more preferably 1 〇〇e > c 〜 13 〇 (>c After heating for 5 minutes to 6 minutes, heat it for 15 kn. to ~60 minutes under 16 〇艽 to 2 Torr. Make it hard in 2 temperature zones as described above. 158118.doc

S -54- 201237101 化,控制樹脂組合物中所含之化合物間的反應,可形成3 維之網狀物。而且,藉此可提高硬化物之耐熱性或耐化學 品性。更具體而言如下所述。首先,於低溫區域(例如 l〇〇°C〜130°C)主要使多官能含羥基化合物與嵌段異氰酸酯 化合物反應而生成胺基甲酸酯結構。藉此而形成多官能含 羥基化合物與嵌段異氰酸酯化合物之間的化學性交聯〗(以 下稱為「步驟(I)」)。其後,於高溫區域(例如16(TC〜200°C) 内主要產生聚醯亞胺之醯亞胺化反應。而且,產生未經酿 亞胺化而殘存之聚醯亞胺中的聚醯胺酸之羧酸與異氰酸酉旨 基的反應而形成醯胺結構或脲結構等。藉此形成聚醯胺酸 與異氰酸酯之間的化學性交聯11(以下稱為「步驟(11)」)。 由於該交聯I及交聯II所形成之3維網狀物,可獲得耐熱性 優異之硬化物。再者’於交聯II之形成後所殘存之異氰酸 醋基可於所殘存之異氰酸酯基彼此之間反應。藉此而使活 性種變無,可提高硬化物之絕緣性。 於上述步驟(II)中,雖然亦根據所形成之樹脂組合物膜 之厚度,但藉由烘箱或加熱板而將最高溫度設為 150°C〜220°C之範圍,於空氣或氮氣等惰性環境下進行加 熱5分鐘〜1〇〇分鐘,由此而進行脫溶劑。加熱溫度可於處 理時間之整體中固定,亦可緩緩升溫。樹脂組合物膜可藉 由公知之網版印刷或精密滴塗法而印刷於可撓性印刷電路 基板或半導體晶圓表面而形成。 樹脂組合物可藉由熱硬化而顯示出優異之耐熱性,因此 可用作半導體元件之表面硬化膜、層間絕緣膜、黏結片、 158118.doc -55- 201237101 印刷布線板用保護絕緣膜、印刷電路基板之表面保護膜 等,適用於各種電子零件中。例如,作為可撓性之印刷電 路基板,使用Espanex M(新日鐵化學公司製造)(絕緣層之 厚度為25 μιη、導體層為銅箔F2-WS〇8 μιη)),於該電路基 板上之一部分上塗佈樹脂組合物,使其硬化。對未經塗佈 之部分實施電鍍鎳-金,由此而可作為外部端子使用。如 上所述而形成之表面保護膜發揮出良好之絕緣特性。再 者,本貫施形態之樹脂組合物的熱硬化於比較低之溫度條 件(例如160°C〜200°C)下進行,因此並不產生銅之氧化。 可進行此種低溫硬化之原因在於:羧酸與嵌段異氰酸酯化 合物(準確而言係藉由加熱而除去了嵌段的異氰酸酯化合 物)反應,因此變得無須完全醯亞胺化,變得無須25〇它之 高溫加熱。 又,本實施形態之樹脂組合物可藉由塗佈於基材上而加 以乾燥,從而作為樹脂膜而使用。 又,使用Espanex M(新日鐵化學公司製造)(絕緣層之厚 度為25 μηι、導體層為銅箔F2_WS(18 μηι))之雙面銅箔板, 製成雙面零件安裝電路基板’於該電路基板之零件安裝部 以外塗佈樹脂組合物而使其硬化,將樹脂組合物作為表面 保護膜而使用,亦可發揮出良好之絕緣特性。此處,表面 保護膜之膜厚較佳為1 μιη〜50 μιη。其原因在於··藉由使膜 厚為1 μιη以上,操作變容易;藉由使臈厚為5〇 μπι以下, 容易折彎而變得容易組入。 再者’本實施形態之樹脂組合物亦可藉由含有(D)光敏 •56- 158118.docS-54-201237101, controlling the reaction between the compounds contained in the resin composition, can form a three-dimensional network. Further, by this, the heat resistance or chemical resistance of the cured product can be improved. More specifically, it is as follows. First, a polyfunctional hydroxyl group-containing compound is mainly reacted with a blocked isocyanate compound in a low temperature region (e.g., 10 ° C to 130 ° C) to form a urethane structure. Thereby, a chemical crosslinking between the polyfunctional hydroxyl group-containing compound and the blocked isocyanate compound is formed (hereinafter referred to as "step (I)"). Thereafter, a ruthenium imidization reaction of polyimine is mainly produced in a high temperature region (for example, 16 (TC to 200 ° C). Further, a polyfluorene in the polyimine remaining without unimlination is produced. The reaction of a carboxylic acid of an amino acid with an isocyanate group forms a guanamine structure or a urea structure, etc., thereby forming a chemical crosslink between the polyglycolic acid and the isocyanate 11 (hereinafter referred to as "step (11)" By the three-dimensional network formed by the cross-linking I and the cross-linking II, a cured product excellent in heat resistance can be obtained. Further, the isocyanate group remaining after the formation of the cross-linking II can be used. The remaining isocyanate groups are reacted with each other, whereby the active species are eliminated, and the insulating properties of the cured product can be improved. In the above step (II), depending on the thickness of the formed resin composition film, The oven or the hot plate is set to a temperature of 150 ° C to 220 ° C and heated in an inert atmosphere such as air or nitrogen for 5 minutes to 1 minute to remove the solvent. The heating temperature can be treated. The time is fixed as a whole, and the temperature can be gradually increased. The resin composition film can be used by It is formed by printing on a surface of a flexible printed circuit board or a semiconductor wafer by a known screen printing or precision dispensing method. The resin composition can exhibit excellent heat resistance by thermal curing, and thus can be used as a semiconductor element. Surface-hardened film, interlayer insulating film, and adhesive sheet, 158118.doc -55- 201237101 Protective insulating film for printed wiring boards, surface protective film for printed circuit boards, etc., suitable for various electronic parts. For example, as flexible A printed circuit board is coated with a resin composition on one part of the circuit board using Espanex M (manufactured by Nippon Steel Chemical Co., Ltd.) (the thickness of the insulating layer is 25 μm, and the conductor layer is copper foil F2-WS〇8 μιη). To make it harden. The uncoated portion is plated with nickel-gold, which can be used as an external terminal. The surface protective film formed as described above exerts good insulating properties. Further, the thermal curing of the resin composition of the present embodiment is carried out under relatively low temperature conditions (e.g., 160 ° C to 200 ° C), so that oxidation of copper does not occur. The reason why such low-temperature hardening can be carried out is that the carboxylic acid reacts with the blocked isocyanate compound (accurately, the isocyanate compound which has been removed by heating), so that it becomes unnecessary to completely imidize and become unnecessary. 〇 It is heated at high temperatures. Further, the resin composition of the present embodiment can be used as a resin film by being applied to a substrate and dried. In addition, a double-sided copper foil plate of Espanex M (manufactured by Nippon Steel Chemical Co., Ltd.) (the thickness of the insulating layer is 25 μηι, and the conductor layer is copper foil F2_WS (18 μηι)) is used to form a double-sided component mounting circuit board. The resin composition is applied and cured in addition to the component mounting portion of the circuit board, and the resin composition is used as a surface protective film, and excellent insulating properties can be exhibited. Here, the film thickness of the surface protective film is preferably from 1 μm to 50 μm. This is because the film thickness is 1 μm or more, and the operation becomes easy. When the thickness is 5 μm or less, it is easy to bend and it is easy to assemble. Furthermore, the resin composition of the present embodiment can also be provided by containing (D) photosensitive. 56-158118.doc

S 201237101 劑而作為感光性樹脂組合物使用。又,亦可藉由將感光性 樹脂組合物塗佈於基材上而獲得感光性膜。 進而,本實施形態之樹脂組合物可藉由於銅箔上設置樹 月曰組合物而使其乾燥,從而作為多層可撓性布線板等之層 間絕緣膜而適宜地使用。又,本實施形態之樹脂組合物可 藉由以覆蓋基材上所形成之布線圖案的方式而設置樹脂組 合物,從而作為布線板之布線圖案的保護膜而適宜地使 用。 (第2實施形態) 於可撓性印刷基板之製造步驟中,必須電氣絕緣可靠 性、耐折彎性、耐熱性、阻燃性優異之覆蓋層。為了實現 此種覆蓋層’提出了包含將脂肪族二胺用作二胺成分的聚 醯胺酸的樹脂組合物。於該樹脂組合物中,脂肪族二胺包 含於聚酿胺酸中’因此由於如下原因而存在顯影性降低之 情形:使樹脂組合.物溶解於溶劑中而成之清漆的分子量降 低較大,且藉由微影法而形成圖案時之殘膜率降低及圖案 形狀變形等。 本發明者等人著眼於使用具有含脂肪族二胺&分之聚酿 亞胺結構及聚醯胺酸結構作為結構單元的聚醯亞胺而作為 (A)高分子化合物。而且,本發明者等人發現:藉由含有 (A)作為高分子化合物《具有含脂肪族二胺成分之聚醯亞 胺結構及聚醯胺酸結構作為結構單元的聚醯亞胺、(B)作 為多官能含羥基化合物之2官能含羥基化合物、(c)作為多 B能交聯性化合物之嵌段異氰酸酯化合物、光敏劑, 158118.doc •57- 201237101 可實現顯影性及翹曲良好、且具有優異之絕緣性的感光性 組合物。 於該感光性樹脂組合物中,2官能含羥基化合物之羥基 與嵌段異氰酸酯化合物之異氰酸酯基反應而形成胺基甲酸 S旨結構,且2官能含羥基化合物並未嵌入至聚醯亞胺骨架 中地作為第二成分而存在於感光性樹脂組合物中。藉此可 防止硬化時之聚醯亞胺骨架之收縮,可達成翹曲之減低。 又’於聚醯亞胺之聚醯亞胺結構中包含脂肪族二胺成分, 因此可抑制聚醯胺酸結構之解聚合所造成之分子量降低。 藉此而使分子量穩定化,因此可抑制藉由微影法而形成圖 案時之殘膜率降低或圖案形狀之變形,可抑制顯影性之降 低。以下,對本發明之第2實施形態加以具體說明。 本發明之第2實施形態之感光性樹脂組合物含有(a)聚醯 亞胺、(b)2官能含經基化合物、(c_ 1)異氰酸醋化合物(嵌段 異氰酸酯化合物)、光敏劑,2官能含羥基化合物中所含之 經基與嵌段異氰酸酯化合物中所含之異氰酸酯基之莫耳比 係經基/異氰酸醋基=0.5〜1。 於該樹脂組合物中,2官能含羥基化合物中所含之羥基 與嵌段異氰酸酯化合物中所含之異氰酸酯基之莫耳比為羥 基/異氰酸酯基=0.5〜1,因此過剩之異氰酸酯基與聚醯亞胺 中所含之聚醯.胺酸結構之羧酸反應。藉此而形成3維網狀 物,可達成優異之絕緣可靠性。以下,對各構成要素加以 詳細說明。 (a)聚醯亞胺 158118.doc 58- 201237101 首先,對本實施形態之感光性樹脂組合物中之聚醯亞胺 加以說明。於本實施形態之感光性樹脂組合物中,聚醯变 胺例如可藉由使四羧酸二酐與二胺反應而獲得。所使用之 四羧酸二酐並無限制,可使用先前公知之四羧酸二酐。作 為四羧酸二酐,可適用芳香族四羧酸或脂肪族四羧酸二酐 等。又,所使用之二胺並無限制,可使用先前公知之二 胺。 於本實施形態之感光性樹脂組合物中,作為聚酿亞胺, 自顯影性及分子量穩^性之觀點考慮,較佳的是具有下述 通式(3)所表示之聚酿亞胺結構、及下述通式(4)所表示之 聚醯胺酸結構分別作為重複結構單元。 [化 22] 式 通 <β ΟΑ ΥΟ ~Ν 35'4 Af 4t 41. R—RIR \^yp o2'11 t—R5 Cf-R3-R2 cxro R i / 通式(4) -Ri7 N^ --— ΗΟη|Ύ〇Η Ο ΟS 201237101 was used as a photosensitive resin composition. Further, a photosensitive film can also be obtained by applying a photosensitive resin composition to a substrate. Furthermore, the resin composition of the present embodiment can be suitably used as an interlayer insulating film such as a multilayer flexible wiring board by drying the resin composition on the copper foil. In addition, the resin composition of the present embodiment can be suitably used as a protective film for a wiring pattern of a wiring board by providing a resin composition so as to cover the wiring pattern formed on the substrate. (Second Embodiment) In the manufacturing process of the flexible printed circuit board, a coating layer excellent in electrical insulation reliability, bending resistance, heat resistance, and flame retardancy is required. In order to realize such a coating layer, a resin composition containing a polyaminic acid using an aliphatic diamine as a diamine component has been proposed. In the resin composition, the aliphatic diamine is contained in the poly-brenic acid. Therefore, there is a case where the developability is lowered for the following reasons: the molecular weight of the varnish which is obtained by dissolving the resin composition in the solvent is largely lowered. Further, when the pattern is formed by the lithography method, the residual film ratio is lowered, the pattern shape is deformed, and the like. The inventors of the present invention have focused on the use of a polyimine having a polydiamine structure and a polyglycolic acid structure as a structural unit as the (A) polymer compound. Furthermore, the present inventors have found that by containing (A) as a polymer compound, a polyimine having a polydiimide structure containing an aliphatic diamine component and a polyaminic acid structure as a structural unit, (B) a bifunctional hydroxyl group-containing compound as a polyfunctional hydroxyl group-containing compound, (c) a blocked isocyanate compound as a poly-B crosslinkable compound, and a photosensitizer, 158118.doc • 57-201237101, developability and warpage are good, A photosensitive composition having excellent insulating properties. In the photosensitive resin composition, a hydroxyl group of a bifunctional hydroxyl group-containing compound reacts with an isocyanate group of a blocked isocyanate compound to form an aminocarboxylic acid S structure, and a bifunctional hydroxyl group-containing compound is not embedded in a polyimine skeleton. The ground is present as a second component in the photosensitive resin composition. Thereby, the shrinkage of the polyimine skeleton at the time of hardening can be prevented, and the warpage can be reduced. Further, since the polydiimide component of the polyimine has an aliphatic diamine component, the molecular weight reduction due to the depolymerization of the polyglycolic acid structure can be suppressed. With this, the molecular weight is stabilized, so that the reduction in the residual film ratio or the deformation of the pattern shape when the pattern is formed by the lithography method can be suppressed, and the deterioration of the developability can be suppressed. Hereinafter, a second embodiment of the present invention will be specifically described. The photosensitive resin composition of the second embodiment of the present invention contains (a) a polyimine, (b) a bifunctional group-containing compound, (c-1) isocyanate compound (block isocyanate compound), and a photosensitizer. The molar ratio of the isocyanate group contained in the trans-group and the blocked isocyanate compound contained in the bifunctional hydroxyl group-containing compound is 0.5/1. In the resin composition, the molar ratio of the hydroxyl group contained in the bifunctional hydroxyl group-containing compound to the isocyanate group contained in the blocked isocyanate compound is hydroxy/isocyanate group = 0.5 to 1, so that excess isocyanate group and polyfluorene are present. A carboxylic acid reaction of a polyfluorene-amine structure contained in an imine. By this, a three-dimensional network is formed, and excellent insulation reliability can be achieved. Hereinafter, each component will be described in detail. (a) Polyimine 158118.doc 58-201237101 First, the polyimine in the photosensitive resin composition of the present embodiment will be described. In the photosensitive resin composition of the present embodiment, the polyketamine can be obtained, for example, by reacting a tetracarboxylic dianhydride with a diamine. The tetracarboxylic dianhydride to be used is not limited, and a previously known tetracarboxylic dianhydride can be used. As the tetracarboxylic dianhydride, an aromatic tetracarboxylic acid or an aliphatic tetracarboxylic dianhydride can be used. Further, the diamine to be used is not limited, and a previously known diamine can be used. In the photosensitive resin composition of the present embodiment, it is preferred to have a polyanilin structure represented by the following formula (3) from the viewpoint of self-developability and molecular weight stability. And the polyamic acid structures represented by the following general formula (4) are each a repeating structural unit.通 ] & β β ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' --- ΗΟη|Ύ〇Η Ο Ο

(於式(3)及式(4)中,Rl、r2、r4、R p p n ^ x 5 〜、R8、R10、(In equations (3) and (4), Rl, r2, r4, R p p n ^ x 5 〜, R8, R10,

Rii、Ri3*!^4分別獨立地表示氫原子或 -r, 必灭數為1〜碳數為20Rii, Ri3*!^4 independently represent a hydrogen atom or -r, and the number of extinctions is 1 to a carbon number of 20

之Η貝之有機基,可相同亦可不同。R Κδ、汉9、R12 及 R15 158118.doc •59- 201237101 表示碳數為1〜碳數為20之4價之有機基,m、η、p分別獨 立地表示0以上i00以下之整數。Rie表示4價之有機The organic base of mussels may be the same or different. R Κ δ, Han 9, R12 and R15 158118.doc • 59- 201237101 An organic group having a carbon number of 1 to a carbon number of 4, and m, η, and p independently represent an integer of 0 or more and i00 or less. Rie said that the organic price of 4

Xv | - 表示碳數為1〜碳數為90之2價之有機基。) ; 又作為聚酿亞胺’較佳的是包含下述通式(15)所表_、 之二胺而作為構成上述通式(3)所表示之聚醯亞胺結構的_ 胺成分。 [化 23] 域 HfNH2 *^11 R|4 3Xv | - represents an organic group having a carbon number of 1 to a carbon number of 90. Further, the term "imine" is preferably an amide component which comprises a polyamine represented by the following formula (15) and which constitutes a polyimine structure represented by the above formula (3). [Chem. 23] Domain HfNH2 *^11 R|4 3

通式(15) H2N~R R2 Rs Re (於式(15)中,R丨、R2、&、&、&、&、Ri。、R" ' 及General formula (15) H2N~R R2 Rs Re (in the formula (15), R丨, R2, &, &, &, &, Ri, R" ' and

Rl4分別獨立地表示氫原子或碳數為1〜碳數為20之丨價之有 機基,可相同亦可不同。^以為表示碳數 為卜碳數為20之4價之有機基,m、n、p分別獨立為〇以上 30以下之整數,且滿足t $ (m+n+p)g 。) 作為聚醯亞胺之合成法,可列舉使四缓酸二gf與上述通 式(15)所表不之脂肪族二胺聚合、環化而獲得聚酿亞胺 '使四敌I 一肝與下述通式(16)所表示之二胺聚合 成法。 [化 24] 通式(16) H2N-R17~NH2 I58118.doc 201237101 ;弋(16)中,r”表示碳數為〗〜碳數為9〇之2價之有機 基。) 作為四羧酸二針’可列舉聯笨_3,3,,4,4,_四曱酸二酐(以 下簡稱為「BPDA」)、二笨甲__3,3,,4,4,_四甲酸二肝(以 ^簡稱為「BTDA」)、氧雙鄰苯二甲酸二針(以下簡稱為 〇DpA」)、二苯基颯-3,3’,4,4·-四甲酸二酐、乙二醇雙 (偏笨三曱酸單酯酸酐)(以下簡稱為「tmeg」)、對伸苯基 雙(偏笨三曱酸單酯酸酐)、對偶笨雙(偏苯三曱酸單酯酸 =)、間伸笨基雙(偏苯三曱酸單酯酸酐)、鄰伸苯基雙(偏 苯三曱酸單酯酸酐)、戊二醇雙(偏苯三曱酸單酯酸酐)(以 下簡稱為「5-BTAj )、癸二醇雙(偏笨三甲酸單醋酸肝)、 均苯四甲酸二酐、雙(3,4-二羧基苯基)醚二酐、4,4,·(2,2· 六氟亞異丙基)雙鄰苯二曱酸二酐、間聯三苯_3,3,,4,4,_四 甲酸二酐、1,2,4,5_環己烷四甲酸二酐、二環[2,2,2]辛_7_ 烯-2’3,5,6-四甲酸二酐、環丁烷·1,2,3,4_四甲酸二酐、1_羧 甲基-2,3,5-環戊三甲酸-2,6:3,5-二酐、4_(2,5_二側氧基四 氫呋喃-3-基)-1,2,3,4-四氫化萘-1,2-二甲酸酐、5_(2,5-二側 氧基四氫呋喃基)-3-甲基-3-環己烯-丨,:^二甲酸酐等。上述 四羧酸二酐可單獨使用,亦可將2種以上混合使用。再 者’自聚酿亞胺之顯影性之觀點考慮,更佳的是BpDA、 ODPA、BTDA、TMeg ㈣旧。 5_bta、癸二醇雙(偏苯三甲酸單 作為上述通式(〗5)所 _ 所表示之結構則並無不之一胺,若具有上述通式(15) 無限定,可列舉认二胺基·3,6_二氧基 158118.doc * 61 - 201237101 辛烧專聚氧基伸乙基二胺化合物、Huntsman公司製造之 JEFFAMINE EDR-148、EDR-176等聚氧伸烷基二胺化合 物、JEFFAMINE D-230、D-400、D-2000、D-4000、BASF 公司製造之聚醚胺D-230、D-400、D-2000等聚氧基伸丙基 二胺化合物、HK-511、ED-600、ED-900、ED-2003、XTJ-542等具有不同之氧基伸烷基的化合物等。藉由使用該等 具有氧基伸烷基之化合物,可使聚醯亞胺之煅燒後之Fpc 的翹曲減低。 於上述通式(15)所表示之二胺中’ m、η、p分別獨立為〇 以上3〇以下之整數。自絕緣可靠性之觀點考慮,較佳的是 l$(m+n+p)$30 ’ 更佳的是 3S(m+n+p)$l〇。如 l$(m+n+P)S30這樣,具有氧基伸烷基之骨架較短,由此 可推測聚醯亞胺之彈性模數變高,絕緣可靠性提高。又, 於通常之此種氧基伸烷基骨架較短之情形時,存在表現出 翹曲之傾向,但於本實施形態中,藉由將2官能含羥基化 合物與嵌段異氰酸酯併用,推測可於將翹曲維持為良好之 狀態下’進一步使絕緣可靠性提高。 本實施形態之聚醯亞胺具有聚醯亞胺結才籌、聚酿胺酸結 構而分別作為重複結構單元,於聚醢亞胺結構中導入上述 通式(15)所表示之二胺,因此聚醯亞胺清漆及膜之分子量 穩定。若將上述通式(15)之二胺導人至聚·胺酸結構中, :脂肪族二胺之鹼性較高,於先前之聚醯胺酸相比較而 言,促進聚酿胺酸之解聚合,&子量降低變顯著。藉由導 入至聚醯亞胺結構中可;ρ受脂肪族三胺之驗性之影響地使 158118.doc -62- 201237101 分子量穩定化。 作為上述通式(16)所表示之二胺,可列舉丨^·雙(4_胺基 笨氧基)烧烴、1,4-雙(4-胺基苯氧基)烷烴、丨,5_雙(4胺基 笨氧基)烷烴、1,4-二胺基苯、丨,3_二胺基苯、2,4-二胺基 甲笨、4,4'-二胺基二苯基甲烷、4,4,_二胺基二苯醚、3,4,_ 二胺基二笨醚、3,3’-二甲基-4,4'-二胺基聯苯、2,2'-二甲 基一胺基聯苯、2,2'-雙(三氟曱基)_4,4'_二胺基聯苯、 3,7-一胺基-二曱基二苯并喧吩_5,5_二氧化物、4,4·-二胺基 一笨曱酮、3,:V-一胺基二苯甲酮、4,4'-雙(4-胺基苯基)硫 醚、4,4’-二胺基苯甲醯苯胺、ι,3-雙(4-胺基苯氧基)_2,2-二 甲基丙烧、1,2-雙|;2-(4-胺基苯氧基)乙氧基]乙烧、99_雙 (4-胺基苯基)藥、5-胺基-1-(4-胺基曱基)_ι,3,3-三甲基二氫 茚、1,4-雙(4-胺基苯氧基)笨、1,3-雙(4_胺基苯氧基)笨、 1,3-雙(3-胺基苯氡基)苯(以下簡稱為APB)、4,4'-雙(4-胺基 苯氧基)聯苯、4,4'-雙(3-胺基苯氧基)聯苯、2,2·雙(4-胺基 苯氧基)丙院(以下簡稱為BAPP)、三亞甲基-雙(4-胺基苯甲 酸酯)(以下簡稱為TMAB)、4-胺基苯基-4-胺基苯曱酸酯、 2-甲基-4-胺基苯基-4-胺基苯甲酸醋、雙[4-(4-胺基苯氧基) 苯基]颯、雙[4-(3-胺基苯氧基)苯基]砜、2,2-雙[4-(4-胺基 本氧基)笨基]六氟丙烧、1-胺基-3-胺基曱基-3,5,5-三曱基 環己'烷、3,3'··二羧基-4,4·-二胺基二苯基曱烷、3,5-二胺基 笨甲酸、3,3'·.二羥基-4,f-二胺基聯苯、1,3-雙(4-胺基苯氧 基苯)等。其中,自聚醯亞胺之低Tg、顯影性之觀點考 慮,較佳的是APB、BAPP、TMAB。亦可將該等二胺部分 158118.doc •63· 201237101 地作為聚醯亞胺中所使用之二胺而使用。 進而,於本實施形態中,較佳的是聚醯亞胺具有下述通 式(6)所表示之結構作為重複單元。 [化 25] 通式(6)Rl4 independently represents a hydrogen atom or an organic group having a carbon number of 1 to a carbon number of 20, and may be the same or different. ^ It is assumed that the carbon number is an organic group having a carbon number of 20, and m, n, and p are each independently an integer of 30 30 or more, and satisfy t $ (m+n+p)g. As a method for synthesizing the polyimine, a tetrakis-di-gf and an aliphatic diamine represented by the above formula (15) are polymerized and cyclized to obtain a poly-imine. A method of polymerizing a diamine represented by the following formula (16). In the formula (16), r" represents an organic group having a carbon number of 〗 〖~ a carbon number of 9 。.) as a tetracarboxylic acid Two needles can be cited as _3,3,,4,4,_tetradecanoic acid dianhydride (hereinafter referred to as "BPDA"), two scorpion __3,3,,4,4,_tetracarboxylic acid (referred to as "BTDA" for short), two needles of oxydiphthalic acid (hereinafter referred to as "DpA"), diphenylphosphonium-3,3',4,4·-tetracarboxylic dianhydride, ethylene glycol Double (stupidized tridecanoic acid monoester anhydride) (hereinafter referred to as "tmeg"), p-phenylene bis (powdered tridecanoic acid monoester anhydride), dual bismale (trimellitic acid monoester acid =) Between, styling, bis(trimellitic acid monoester anhydride), phenyl bis(trimellitic acid monoester anhydride), pentanediol bis(trimellitic acid monoester anhydride) (hereinafter referred to as "5-BTAj", bismuth diol bis (powdered triacetic acid monoacetate), pyromellitic dianhydride, bis(3,4-dicarboxyphenyl)ether dianhydride, 4,4, (2 , 2· hexafluoroisopropylidene) bisphthalic acid dianhydride, m-triphenyl_3,3,4,4,4-tetracarboxylic dianhydride, 1,2, 4,5_cyclohexanetetracarboxylic dianhydride, bicyclo[2,2,2]octyl-7-ene-2'3,5,6-tetracarboxylic dianhydride, cyclobutane·1,2,3,4 _tetracarboxylic dianhydride, 1-carboxymethyl-2,3,5-cyclopentanetricarboxylic acid-2,6:3,5-dianhydride, 4-(2,5-di-tertiary oxytetrahydrofuran-3-yl) -1,2,3,4-tetrahydronaphthalene-1,2-dicarboxylic anhydride, 5-(2,5-di-oxytetrahydrofuranyl)-3-methyl-3-cyclohexene-indole, :^ Dicarboxylic acid anhydride, etc. The above-mentioned tetracarboxylic dianhydride may be used singly or in combination of two or more kinds. Further, from the viewpoint of developability of polyanilin, BpDA, ODPA, BTDA, TMeg are more preferable. (4) Old. The structure represented by 5_bta and decanediol bis (p-trimethylene carboxylic acid as the above formula (〗 〖5) is not a single amine, and if it has the above formula (15), it is exemplified. Diamine-based 3,6-dioxy 158118.doc * 61 - 201237101 octyl polyoxyl ethylamine compound, JEFFAMINE EDR-148, EDR-176, etc. manufactured by Huntsman Co., Ltd. Amine compound, JEFFAMINE D-230, D-400, D-2000, D-4000, polyether amine D-230, D-400, D-2000, etc. a compound, a compound having a different alkyloxy group, etc., such as HK-511, ED-600, ED-900, ED-2003, XTJ-542, etc. By using these compounds having an alkyloxy group, a polyfluorene can be obtained. The warpage of the Fpc after calcination of the imine is reduced. In the diamine represented by the above formula (15), 'm, η, and p are each independently an integer of 〇 or more and 3 Å or less. From the viewpoint of insulation reliability, it is preferable that l$(m+n+p)$30' is more preferably 3S(m+n+p)$l〇. For example, l$(m+n+P)S30 has a short skeleton of an alkyloxy group, and it is presumed that the elastic modulus of the polyimine is increased and the insulation reliability is improved. Further, in the case where the usual oxyalkylene group skeleton is short, there is a tendency to exhibit warpage. However, in the present embodiment, it is presumed that the bifunctional hydroxyl group-containing compound and the blocked isocyanate are used in combination. When the warpage is maintained in a good state, the insulation reliability is further improved. The polyimine of the present embodiment has a polyimine structure and a polystyryl structure, and each of them is a repeating structural unit, and a diamine represented by the above formula (15) is introduced into the polyimine structure. The molecular weight of the polyimide and varnish is stable. If the diamine of the above formula (15) is introduced into the poly-amino acid structure, the aliphatic diamine has a higher basicity, and in comparison with the previous poly-proline, the poly-aracine is promoted. Depolymerization, & sub-quantity reduction becomes significant. It can be introduced into the polyimine structure; ρ is stabilized by the testability of the aliphatic triamine to 158118.doc -62- 201237101. Examples of the diamine represented by the above formula (16) include bismuth(4-aminophenyloxy)hydrocarbon, 1,4-bis(4-aminophenoxy)alkane, anthracene, 5 _Bis(4-aminophenyloxy)alkane, 1,4-diaminobenzene, hydrazine, 3-diaminobenzene, 2,4-diaminomethyl, 4,4'-diaminodiphenyl Methane, 4,4,-diaminodiphenyl ether, 3,4,-diaminodiphenyl ether, 3,3'-dimethyl-4,4'-diaminobiphenyl, 2,2 '-Dimethylmonoaminobiphenyl, 2,2'-bis(trifluoromethyl)-4,4'-diaminobiphenyl, 3,7-monoamino-dimercaptobenzophenone _5,5_dioxide, 4,4·-diamino-indolenone, 3,:V-monoaminobenzophenone, 4,4'-bis(4-aminophenyl)sulfide Ether, 4,4'-diaminobenzimidamide, iota, 3-bis(4-aminophenoxy)_2,2-dimethylpropane, 1,2-bis|; 2-(4 -Aminophenoxy)ethoxy]Ethylene, 99_bis(4-aminophenyl) drug, 5-amino-1-(4-aminoindenyl)_ι, 3,3-trimethyl Dihydroanthracene, 1,4-bis(4-aminophenoxy) stupid, 1,3-bis(4-aminophenoxy) stupid, 1,3-bis(3-aminophenyl fluorenyl) Benzene (hereinafter referred to as APB), 4, 4'-double 4-aminophenoxy)biphenyl, 4,4'-bis(3-aminophenoxy)biphenyl, 2,2.bis(4-aminophenoxy)propylamine (hereinafter referred to as BAPP) ), trimethylene-bis(4-aminobenzoate) (hereinafter abbreviated as TMAB), 4-aminophenyl-4-aminobenzoate, 2-methyl-4-aminobenzene 4-Aminobenzoic acid vinegar, bis[4-(4-aminophenoxy)phenyl]anthracene, bis[4-(3-aminophenoxy)phenyl]sulfone, 2,2- Bis[4-(4-amine basic oxy) phenyl] hexafluoropropanone, 1-amino-3-aminoindolyl-3,5,5-tridecylcyclohexane, 3,3' ··Dicarboxy-4,4·-diaminodiphenylnonane, 3,5-diaminobenzoic acid, 3,3′·.dihydroxy-4,f-diaminobiphenyl, 1, 3-bis(4-aminophenoxybenzene) and the like. Among them, APB, BAPP, and TMAB are preferred from the viewpoints of low Tg and developability of polyimine. These diamine moieties 158118.doc • 63· 201237101 can also be used as the diamine used in the polyimine. Further, in the present embodiment, it is preferred that the polyimine has a structure represented by the following formula (6) as a repeating unit. General formula (6)

CC

(於式⑷中,R1、R2、R4、R5、R7、R8、R10、Rn、R1A R!4分別獨立地表示氫原子或碳數為丨〜碳數為2〇之丨價之有 機基,可相同亦可不同。^、^、^、尺^及尺^表示碳數 為卜碳數為20之4價之有機基。m、n、p分別獨立地表示〇 以上30以下之整數。Ri6表示4價之有機基,r门表示碳數為 1〜碳數為90之2價之有機基。A、B、c表示各單元之 mol%,且滿足〇.1〇$ (A+B)/(A+B+C)^ 〇 。) 於上述通式⑹所表示之結構令,自顯影性、趣曲、及絕緣 可靠性之觀點考慮,較佳的是〇.1〇S(a+b)/(a+b+c)^以, 更佳的是(M5S (A+B)/(A+B+C)$ ο』,進一步更1圭的: 〇.2WA+B)/(A+B+C)以.7 1线包含上述通式叫所= 示之二胺之結構(A+B)相對於整體而言為〇1〇以上可減 低魅曲。X ’藉由使包含上述通式(15)所表示之二胺之往 構(A+B)相對於整體而言為〇·85以下, '’Ό Λ卜,可抑制彈性模數及 玻璃轉移點(Tg)之降低,保持絕緣可靠 進而,藉由传 聚醯亞胺結構(A+B)相對於整體而古j n 。传·85以下,可相對 15811S.doc • 64 · 201237101 於鹼性顯影液而表現出溶解性,顯影性變良好。 聚醯亞胺之主鏈末端若為不對性能造成影響之結構,則 並無特別限定。可為源自製造聚醯亞胺時所使用之酸二 酐、一胺之末端,亦可藉由其他酸酐、胺化合物等而對末 端進行封端。 聚酿亞胺之重罝平均分子量較佳的是1〇〇〇以上 以下。此處,所謂重量平均分子量是指以已知重量平均分 子量之聚苯乙烯為標準,藉由凝膠滲透層析法而測定之分 子量。作為重量平均分子量’自聚醯亞額之強度之觀點 考慮,杈佳的是1000以上。又,自含聚醯亞胺之樹脂組合 物的黏度、成型性之觀點考慮,較佳的是以下。 重量平均分子量更佳的是5000以上、500000以下特佳的 是10000以上300000以下,最佳的是20000以上、5〇〇〇〇以 下。 具有聚醯亞胺結構及聚醯胺酸結構分別作為重複單元的 聚醯亞胺可藉由如下步驟而製作:使酸二酐與二胺以非等 莫耳量反應而第1階段地合成聚醯亞胺部位的步驟(步驟 1),繼而第2階段地合成聚醯胺酸部位的步驟(步驟2)。以 下’對各個步驟加以說明。 (步驟1) 對第1階段之合成聚醯亞胺部位的步驟加以說明。作為 第1階段之合成聚醯亞胺部位的步驟,並無特別限定,可 適用公知之方法。更具體而言,可藉由以 〜々>2:而獲 得。首先,使二胺溶解及/或分散於聚合溶劑中,於其中 158118.doc -65- 201237101 添加酸二酐粉末。繼而,添加與水共沸之溶劑,一面使用 機械攪拌器而將副生之水共沸除去,一面進行〇 5小時〜96 小時、較佳的是0.5小時〜30小時之加熱攪拌。此時,單體 濃度為〇.5質量%以上、95質量❶/„以下,較佳的是1質量%以 上、90質量。/〇以下。 於合成聚醯亞胺部位時,可藉由添加公知之醯亞胺化觸 媒而獲得聚醯亞胺部位,亦可藉由無觸媒地獲得聚醯亞胺 部位。醯亞胺化觸媒並無特別限制,可列舉如乙酸酐這樣 的酸酐,如γ-戊内酯、γ-丁内酯、7_特窗酸、酞内酯、 香豆素、γ-酞内酯酸這樣的内酯化合物,如吡咬、啥琳、 Ν-曱基嗎啉、三乙基胺這樣的三級胺等。又,可視需要為 1種、或2種以上之混合物。其中,特別是自反應性之高度 及對其後反應之影響的觀點考慮,特佳的是γ_戊内酯與〇比 啶之混合系及無觸媒。 作為醯亞胺化觸媒之添加量,若使聚醢胺酸為1〇〇質量 份,則較佳的是50質量份以下,更佳的是30質量份以下。 作為於聚醯亞胺部位之合成時所使用之反應溶劑,可列 舉:如二甲醚、二乙醚、曱基乙基醚、四氫呋喃、二噁 烧、乙二醇二曱醚、二乙二醇二甲趟、三乙二醇二甲喊這 樣的碳數為2以上9以下之醚化合物;如丙酮、丁酮這樣的 碳數為2以上6以下之酮化合物;如正戊烷、環戊烷、正己 烷、環己烷、甲基環己烷、十氫萘這樣的碳數為5以上1〇 以下之飽和烴化合物;如苯、甲苯、二甲苯、均三曱苯、 蔡滿這樣的碳數為6以上10以下之芳香族煙化合物;如乙 158118.doc •66· 201237101 西文甲酉曰、乙酸乙酯、γ_ 丁内酯 '苯甲酸曱酯這樣的碳數為 3以上12以下之酯化合物;如氣仿、二氣甲烷、ι,2_二氣乙 烷這樣的碳數為丨以上1〇以下之含函素化合物;如乙腈' Ν,Ν 一甲基甲醯胺、Ν,Ν_:曱基乙醯胺、Ν_甲基_2_吡咯 咬嗣这樣的碳數為2以上10以下之含氮化合物;如二曱基 亞砜逗樣的含硫化合物。該等可視需要為丨種、或者2種以 上之混合物。作為特佳之溶劑,可列舉碳數為2以上9以下 之醚化合物、碳數為3以上12以下之酯化合物、碳數為6以 上10以下之芳香族烴化合物、碳數為2以上以下之含氮 化合物。該等溶劑可考慮工業生產性、對其後反應之影響 等而任意地選擇。 於聚醯亞胺部位之合成中,較佳的是於反應溫度為15°C 以上、250 C以下而實施。若反應溫度為15〇c以上,則反 應開始,且若為250。(:以下,則並無觸媒之去活化。較佳 的是20 C以上、220。(:以下,更佳的是2〇°c以上、200°C以 下。 反應所需要之時因目的或反應條件而異,通常為96小時 以内,特別適宜的是於3〇分鐘〜3〇小時之範圍内實施。 (步驟2) 其次’對第2階段之合成聚醯胺酸部位的步驟加以說 明。第2階段之聚醯胺酸部位之合成可藉由如下方式而實 施:使用步驟1中所得之聚醯亞胺部位作為起始材料,追 添一胺及/或酸一酐而使其聚合。第2階段之聚醯胺酸部位 之合成時的重合溫度較佳的是〇°C以上250°C以下,更佳的 158118.doc •67- 201237101 是0 C以上100 c以下,特佳的是〇它以上80〇c以下。 聚酿胺酸之合成時的反應所需之時間因目的或反應條件 而異,通常為96小時以内,特別適宜的是於3〇分鐘〜3〇小 時之範圍内實施。 作為反應溶劑’可使用與於步驟1中聚醯亞胺部位之合 成中所使用之反應溶劑相同者。於此情形時,可直接使用 步驟1之反應溶液而進行聚醯胺酸部位之合成。又,亦可 使用與合成聚醯亞胺部位之合成中所使用之反應溶劑不同 之溶劑。 作為此種溶劑,可列舉:如二甲醚、二乙醚、甲基乙基 醚、四氫呋喃、二噁烷、乙二醇二曱醚、二乙二醇二甲 趟、二乙二醇二曱醚這樣的碳數為2以上9以下之醚化合 物;如丙_、丁酮這樣的碳數為2以上6以下之酮化合物; 如正戊烷、環戊烷、正己烷、環己烷、甲基環己烷、十氫 萘這樣的碳數為5以上1 〇以下之飽和烴化合物;如苯、曱 苯、二曱苯、均三曱苯、萘滿這樣的碳數為6以上丨〇以下 之芳香族烴化合物;如乙酸甲g旨、乙酸乙醋、γ_ 丁内g旨、 苯曱酸甲酯這樣的碳數為3以上12以下之酯化合物;如氣 仿、一氣甲烷、1,2-二氣乙烷這樣的碳數為1以上10以下之 含鹵素化合物;如乙腈、N,N-二甲基甲醯胺、Ν,Ν·二甲基 乙酿胺、Ν-甲基-2-吡咯啶酮這樣的碳數為2以上1〇以下之 含氮化合物;如二甲基亞颯這樣的含硫化合物。 該等溶劑可視需要為1種、或2種以上之混合物。作為特 佳之溶劑’可列舉碳數為2以上9以下之醚化合物、碳數為 158118.doc -68 · 201237101 3以上12以下之酯化合物、碳數為6以上1〇 r •^方香族煙 化合物、碳數為2以上10以下之含氮化合物。該等可考 工業生產性、對其後反應之影響等而任意選擇。Π 製造結束後之聚醯亞胺可以溶解於反應溶劑中之狀熊 使用,亦可藉由以下之方法而回收、純化。又,製造 後之聚醯亞胺之回收可藉由將反應溶液中之溶劑減::去 而進行。 作為聚酿亞胺之純化方法,可列舉藉由減壓過據、加壓 過濾等將反應溶液中之不溶解的酸二酐及二胺除去的方 法。又,可實施利用將反應溶液添加於不良溶劑中使其析 出:亦即所謂之再沈澱的純化方法。進而,於必須純度特 別咼之聚醯亞胺之情形時,利用使用超臨界二氧化碳之萃 取的純化方法亦可。 於本實施形態之感光性樹脂組合物中,藉由含有2官能 含羥基化合物與嵌段異氰酸酯而使絕緣可靠性提高,且可 抑制翹曲。推測是由於2官能含羥基化合物中所含之羥基 與嵌段異氰酸酯中所含之異氰酸酯基的反應而形成交聯 體,因此絕緣可靠性提高。又,2官能含羥基化合物並未 嵌入至聚醯亞胺之骨架中地作為第二成分而存在,因此可 防止硬化時之聚醯亞胺骨架之收縮,可抑制翹曲。進而, 藉由包含嵌段異氰酸酯,可於低溫下使羧基去活性化,變 得可低溫硬化,因此防止硬化時之聚醯亞胺骨架之收縮, 可抑制勉曲。 再者’於上述之實施形態中,對使用聚醯亞胺作為(Α) 158118.doc • 69· 201237101 门刀子化Q物之例進行了說明,但亦可使用不含聚酿胺酸 結構之聚醜亞胺、不含聚酿亞胺結構之聚醯胺、一同含有 聚醯胺酸結構與聚醯亞胺結構之聚胺醯亞胺等而作為 (A)高分子化合物。 又,於本實施形態之樹脂組合物中,自耐熱性之觀點考 慮,2官能含羥基化合物中所含之羥基與嵌段異氰酸酯中 所含之異氰酸酯基之莫耳比較佳的是羥基/異氰酸酯基 =0.5〜1。 (b) 2官能含羥基化合物 作為2官能性含羥基化合物,可於起到本發明之效果的 範圍内,使用與上述第1實施形態之樹脂組合物中所使用 之多官能含羥基化合物相同者。 (c-1)嵌段異氰酸醋化合物 作為嵌段異氰酸酯化合物,可使用與上述第丨實施形態 之樹脂組合物中所使用之嵌段異氰酸酯化合物相同者。 又’亦可與第1實施形態之樹脂組合物同樣地於起到本發 明之效果的範圍内使用其他多官能異氰酸酯化合物或多官 能°惡》坐咐化合物。 (D)光敏劑 本實施形態之感光性樹脂組合物包含具有至少2個以上 可光聚合之不飽和雙鍵的(曱基)丙烯酸酯化合物作為光敏 劑,進而包含(E)光聚合起始劑。本實施形態之感光性樹 脂組合物中之光敏劑是表示具有可由於光照射而使結構變 化,相對於溶劑之溶解性變化之性質的化合物《於本實施 •70· 158118.doc(In the formula (4), R1, R2, R4, R5, R7, R8, R10, Rn and R1A R!4 each independently represent a hydrogen atom or an organic group having a carbon number of 丨 and a carbon number of 2〇. It can be the same or different. ^, ^, ^, 尺^ and 尺^ represent an organic group having a carbon number of 4 and a valence of 20, and m, n, and p each independently represent an integer of 30 or more 〇. The tetravalent organic group is represented, and the r-gate represents an organic group having a carbon number of 1 to a carbon number of 90. A, B, and c represent mol% of each unit, and satisfy 〇.1〇$ (A+B). /(A+B+C)^ 〇.) From the viewpoint of the structure of the above formula (6), from the viewpoints of self-developability, interest, and insulation reliability, it is preferable that 〇.1〇S(a+ b) / (a + b + c) ^ to, more preferably (M5S (A + B) / (A + B + C) $ ο", further more than 1 gui: 〇. 2WA + B) / ( A+B+C) The structure (A+B) containing the above-mentioned diamine represented by the above formula can be reduced by 〇1〇 or more with respect to the whole. X' by inhibiting the elastic modulus and the glass transition by making the conformation (A+B) containing the diamine represented by the above formula (15) to 〇85 or less with respect to the whole, ''Ό Λ Λ The decrease of the point (Tg) keeps the insulation reliable, and the structure of the polyamidimide (A+B) is relatively old with respect to the whole. In the case of 85 or less, the solubility is improved in the alkaline developing solution with respect to 15811S.doc • 64 · 201237101, and the developability is improved. The end of the main chain of the polyimine is not particularly limited as long as it does not affect the performance. The terminal end of the acid dianhydride or the monoamine used in the production of the polyimine may be blocked by another acid anhydride, an amine compound or the like. The average molecular weight of the weight of the chitoimide is preferably 1 Å or more. Here, the weight average molecular weight means a molecular weight measured by gel permeation chromatography using a known weight average molecular weight of polystyrene as a standard. From the viewpoint of the weight average molecular weight 'from the strength of the polybenzazole amount, it is preferably 1,000 or more. Further, from the viewpoint of the viscosity and moldability of the polyimine-containing resin composition, the following is preferable. More preferably, the weight average molecular weight is 5,000 or more and 500,000 or less, more preferably 10,000 or more and 300,000 or less, and most preferably 20,000 or more and 5 or less. The polyimine having a polyimine structure and a poly-proline structure as a repeating unit, respectively, can be produced by reacting an acid dianhydride with a diamine in a non-equal molar amount and synthesizing the first stage. The step of the quinone imine moiety (step 1), followed by the second stage of the step of synthesizing the polyaminic acid moiety (step 2). The following steps are explained. (Step 1) The procedure for synthesizing the polyimine portion of the first stage will be described. The step of synthesizing the polyimine portion in the first stage is not particularly limited, and a known method can be applied. More specifically, it can be obtained by using ~々>2:. First, the diamine is dissolved and/or dispersed in a polymerization solvent, and an acid dianhydride powder is added thereto at 158118.doc -65 - 201237101. Then, a solvent azeotroped with water is added, and the by-product water is azeotropically removed using a mechanical stirrer, and heating is carried out for 5 hours to 96 hours, preferably 0.5 hours to 30 hours. In this case, the monomer concentration is 5% by mass or more and 95 Å/Å or less, preferably 1% by mass or more and 90% by mass or less. In the case of synthesizing the polyimine portion, it is possible to add It is known that an imidization catalyst is used to obtain a polyimine moiety, and a polyimine moiety can also be obtained by a catalyst-free medium. The ruthenium-based catalyst is not particularly limited, and examples thereof include an acid anhydride such as acetic anhydride. a lactone compound such as γ-valerolactone, γ-butyrolactone, 7-telic acid, azlactone, coumarin, or γ-lactone, such as pyridine, 啥琳, Ν-曱A tertiary amine such as a morpholine or a triethylamine, etc., may be used alone or in combination of two or more kinds thereof, in particular, from the viewpoint of the height of the reactivity and the influence on the subsequent reaction. Particularly preferred is a mixture of γ-valerolactone and guanidinium and a non-catalyst. The amount of the ruthenium imidization catalyst added is preferably 1 part by mass. 50 parts by mass or less, more preferably 30 parts by mass or less. As the reaction solvent used in the synthesis of the polyimine moiety, for example, dimethyl An ether compound having a carbon number of 2 or more and 9 or less, such as diethyl ether, mercaptoethyl ether, tetrahydrofuran, dioxane, ethylene glycol dioxime ether, diethylene glycol dimethyl hydrazine or triethylene glycol dimethyl sulfonate a ketone compound having a carbon number of 2 or more and 6 or less such as acetone or methyl ethyl ketone; a carbon number of 5 such as n-pentane, cyclopentane, n-hexane, cyclohexane, methylcyclohexane or decalin; a saturated hydrocarbon compound having less than 1 以上 above; such as benzene, toluene, xylene, mesitylene, and chlorinated aromatic compounds having a carbon number of 6 or more and 10 or less; such as B 158118.doc • 66· 201237101 Western An ester compound having a carbon number of 3 or more and 12 or less such as methyl hydrazine, ethyl acetate or γ-butyrolactone oxime benzoate; carbon number such as gas-like, di-halogen methane, ι, 2-di-ethane It is a functional element containing less than 1 ; above; for example, acetonitrile ' Ν, Ν 甲基 甲基 醯 Ν Ν Ν Ν Ν 曱 曱 曱 曱 曱 曱 曱 曱 甲基 甲基 甲基 甲基 甲基 甲基 甲基 甲基 甲基 甲基 甲基 甲基a nitrogen-containing compound of 2 or more and 10 or less; a sulfur-containing compound such as a dimercapto sulfoxide. These may be sputum or two or more. A particularly preferred solvent is an ether compound having 2 or more and 9 or less carbon atoms, an ester compound having 3 or more and 12 or less carbon atoms, an aromatic hydrocarbon compound having 6 or more and 10 or less carbon atoms, and a carbon number of 2 or more. The following nitrogen-containing compounds may be arbitrarily selected in consideration of industrial productivity, effects on subsequent reactions, etc. In the synthesis of the polyamidene moiety, it is preferred that the reaction temperature be 15 ° C or more. When the reaction temperature is 15 〇c or more, the reaction starts and is 250. (: The following is not activated by the catalyst. It is preferably 20 C or more and 220. More preferably, it is 2 〇 ° C or more and 200 ° C or less. The reaction needs to be different depending on the purpose or reaction conditions, and is usually within 96 hours, and particularly preferably in the range of 3 Torr to 3 Torr. Implementation. (Step 2) Next, the step of synthesizing the polyamic acid moiety of the second stage will be described. The synthesis of the second stage polyamine moiety can be carried out by using the polyimine fraction obtained in the step 1 as a starting material and polymerizing by chasing an amine and/or an acid anhydride. The superposition temperature at the time of synthesis of the second-stage polyaminic acid moiety is preferably 〇°C or more and 250° C. or less, more preferably 158118.doc •67-201237101 is 0 C or more and 100 c or less, particularly preferably 〇 It is above 80〇c. The time required for the reaction in the synthesis of the poly-aracine is different depending on the purpose or the reaction conditions, and is usually within 96 hours, and particularly preferably in the range of from 3 minutes to 3 hours. As the reaction solvent, the same reaction solvent as used in the synthesis of the polyimine portion in the step 1 can be used. In this case, the synthesis of the polyaminic acid moiety can be carried out directly using the reaction solution of the step 1. Further, a solvent different from the reaction solvent used in the synthesis of the synthetic polyimine moiety can also be used. Examples of such a solvent include dimethyl ether, diethyl ether, methyl ethyl ether, tetrahydrofuran, dioxane, ethylene glycol dioxime ether, diethylene glycol dimethyl hydrazine, and diethylene glycol dioxime ether. Such an ether compound having a carbon number of 2 or more and 9 or less; a ketone compound having a carbon number of 2 or more and 6 or less such as propylene or butanone; such as n-pentane, cyclopentane, n-hexane, cyclohexane, methyl a saturated hydrocarbon compound having a carbon number of 5 or more and 1 Torr or less such as cyclohexane or decalin; a carbon number such as benzene, toluene, diphenyl, mesitylene, or tetralin is 6 or more and less than An aromatic hydrocarbon compound; an ester compound having a carbon number of 3 or more and 12 or less such as methyl acetate, ethyl acetate, γ-butene, methyl benzoate; for example, gas-like, mono-methane, 1,2- a halogen-containing compound having a carbon number of 1 or more and 10 or less such as acetonitrile, N,N-dimethylformamide, hydrazine, hydrazine dimethyl ethanoamine, hydrazine-methyl-2- A nitrogen-containing compound having a carbon number of 2 or more and 1 Torr or less such as pyrrolidone; a sulfur-containing compound such as dimethyl hydrazine. These solvents may be used alone or in combination of two or more. The solvent which is particularly preferable is an ether compound having a carbon number of 2 or more and 9 or less, an ester compound having a carbon number of 158118.doc -68 · 201237101 3 or more and 12 or less, and a carbon number of 6 or more. A compound or a nitrogen-containing compound having 2 or more and 10 or less carbon atoms. These can be arbitrarily selected for industrial productivity, influence on subsequent reactions, and the like.醯 After the production, the polyimine can be used in the reaction solvent, and can be recovered and purified by the following method. Further, the recovery of the polyimine after the production can be carried out by subtracting the solvent from the reaction solution. The method for purifying the polyamidiamine includes a method of removing the acid dianhydride and the diamine which are insoluble in the reaction solution by pressure reduction, pressure filtration or the like. Further, a purification method in which a reaction solution is added to a poor solvent to cause precipitation, that is, so-called reprecipitation, can be carried out. Further, in the case of a polyimine which is required to have a purity, it is also possible to use a purification method using extraction of supercritical carbon dioxide. In the photosensitive resin composition of the present embodiment, the bifunctional hydroxyl group-containing compound and the blocked isocyanate are contained to improve the insulation reliability and to suppress warpage. It is presumed that the crosslinked body is formed by the reaction of the hydroxyl group contained in the bifunctional hydroxyl group-containing compound with the isocyanate group contained in the blocked isocyanate, and thus the insulation reliability is improved. Further, since the bifunctional hydroxyl group-containing compound is present as a second component without being embedded in the skeleton of the polyimide, it is possible to prevent shrinkage of the polyimide phase skeleton during curing and to suppress warpage. Further, by including a blocked isocyanate, the carboxyl group can be deactivated at a low temperature and can be cured at a low temperature. Therefore, shrinkage of the polyimine skeleton at the time of curing can be prevented, and distortion can be suppressed. Further, in the above embodiment, an example in which poly(imine) is used as the (Korean) 158118.doc • 69· 201237101 knives is described, but a polylactoic acid-free structure may also be used. As a (A) polymer compound, polyugly imine, a polyamine which does not contain a polyimine structure, and a polyamine quinone which has a polyphthalic acid structure and a polyimine structure. Further, in the resin composition of the present embodiment, from the viewpoint of heat resistance, the hydroxyl group contained in the bifunctional hydroxyl group-containing compound and the mole of the isocyanate group contained in the blocked isocyanate are preferably a hydroxyl group/isocyanate group. =0.5~1. (b) The bifunctional hydroxyl group-containing compound is a bifunctional hydroxyl group-containing compound, and the same as the polyfunctional hydroxyl group-containing compound used in the resin composition of the first embodiment can be used within the range of the effects of the present invention. . (c-1) Block Isocyanate Compound The block isocyanate compound can be the same as the blocked isocyanate compound used in the resin composition of the above-mentioned Example. In the same manner as the resin composition of the first embodiment, other polyfunctional isocyanate compounds or polyfunctional isocyanate compounds can be used in the range of the effects of the present invention. (D) Photosensitive Agent The photosensitive resin composition of the present embodiment contains a (fluorenyl) acrylate compound having at least two photopolymerizable unsaturated double bonds as a photosensitizer, and further contains (E) a photopolymerization initiator. . The photosensitizer in the photosensitive resin composition of the present embodiment is a compound which has a property of being changeable in structure due to light irradiation and having a change in solubility with respect to a solvent. In the present embodiment, 70. 158118.doc

S 201237101 形態之感光性樹脂組合物中包含具有2個以上可光聚合之 不飽和雙鍵的(曱基)丙烯酸酯化合物與光聚合起始劑, 因此亦由具有2個以上可光聚合之不飽和雙鍵的(甲基)丙稀 酸酯化合物而形成交聯體,因此顯影性及絕緣可靠性提 高。 作為具有2個以上可光聚合之不飽和雙鍵的(曱基)丙稀 酸酯化合物,可列舉二氫芳樟醇二丙烯酸酯、環氧乙燒 (EO)改性雙酚A二甲基丙烯酸脂、EO改性氫化雙酚A二丙 稀曰、1,6-己二醇(曱基)丙稀酸醋、ι,4 -環己二醇二(曱 基)丙烯酸酯、聚丙二醇二(曱基)丙烯酸酯、聚乙二醇二 (曱基)丙烯酸酯、2-二(對羥基苯基)丙烷二(曱基)丙烯酸 S旨、三(2-丙烯醯氧基乙基)異三聚氰酸酯、ε_己内酯改性 二(丙烯醯氧基乙基)異三聚氰酸酯、丙三醇三(甲基)丙稀 酉文1曰、二經曱基丙烧三(甲基)丙烯酸酯、聚氧基伸丙基三 經曱基丙烷三(甲基)丙烯酸酯、聚氧基伸乙基三羥曱基丙 烧三(甲基)丙烯酸酯、二季戊四醇五(曱基)丙烯酸酯、三 經甲基丙烷三縮水甘油醚(甲基)丙烯酸酯、雙酚Α二縮水 甘油醚二(曱基)丙烯酸酯、β_羥基丙基_|3,_(丙烯醢氧基广丙 基鄰苯二甲酸酯、苯氧基聚乙二醇(曱基)丙烯酸酯、壬基 本氧基聚乙一醇(曱基)丙烯酸酯、季戊四醇三(曱基)丙歸 酸酯、季戊四醇四(曱基)丙烯酸酯、季戊四醇三/四(曱基) 丙烯酸酯等《其中,自顯影性或煅燒後之翹曲之觀點考 慮,較佳的是ΕΟ改性雙酚a二甲基丙烯酸脂、Ε〇改性氫化 雙酚A二丙烯酸酯、季戊四醇三/四(甲基)丙烯酸酯。 158118.doc •71- 201237101 又,自顯影性與絕緣可靠性之觀點考慮,較佳的是具有 2個雙鍵之化合物與具有3個以上雙鍵之化合物之組合。具 有3個以上雙鍵之化合物形成剛直之交聯體,因此推測硬 化膜之彈性模數或玻璃轉移點(Tg)變高,絕緣可靠性提 南。 通常於包含具有3個以上雙鍵之化合物之情形時,由於 交聯點增加而存在產生翹曲之傾向。然而,於本實施形態 中,含經基化合物並不與具有雙鍵之化合物形成交 聯結構,而是於感光性樹脂組合物中作為第二成分而存 在,因此可減輕麵曲。 作為具有3個以上雙鍵之化合物,可列舉季戊四醇三/四 丙烯酸酯(商品名:ARONIX(註冊商標)M-306、東亞合成 公司製造)、三羥甲基丙烷PO改性三丙烯酸酯(商品名: ARONIX M-3 10、東亞合成公司製造)、季戊四醇四丙烯酸 醋(商品名:A-TMMT、新中村化學工業公司製造)、E〇改 性丙三醇三(曱基)丙烯酸酯(商品名:A-GLY-9E(EO改性9 mol)、新中村化學工業公司製造)、二-三羥甲基丙烷四丙 烯酸酯(商品名:ARONIX M_4〇8、東亞合成公司製造)、 二季戊四醇五及六丙烯酸酯(商品名:ARONIX M-403、東 亞合成公司製造)等。 作為具有2個以上可光聚合之不飽和雙鍵之(甲基)丙稀 酸酯化合物之量,於將聚醯亞胺之量設為1〇〇質量份之情 形時’自顯影性之觀點考慮,較佳的是5質量份以上60質 量份以下,更佳的是10質量份以上40質量份以下。 -72· 158118.docThe photosensitive resin composition of the form of S 201237101 contains a (fluorenyl) acrylate compound having two or more photopolymerizable unsaturated double bonds and a photopolymerization initiator, and therefore has two or more photopolymerizable Since the (meth) acrylate compound of the double bond is saturated to form a crosslinked body, developability and insulation reliability are improved. Examples of the (fluorenyl) acrylate compound having two or more photopolymerizable unsaturated double bonds include dihydroarylene alcohol diacrylate and ethylene oxide (EO) modified bisphenol A dimethyl group. Acrylate, EO modified hydrogenated bisphenol A dipropylene oxime, 1,6-hexanediol (mercapto) acrylic acid vinegar, iota, 4-cyclohexanediol bis(indenyl) acrylate, polypropylene glycol (fluorenyl) acrylate, polyethylene glycol bis(indenyl) acrylate, 2-bis(p-hydroxyphenyl)propane bis(indenyl)acrylic acid, tris(2-propenyloxyethyl) Tricyanate, ε-caprolactone modified bis(propylene oxyethyl) isomeric cyanurate, glycerol tris(methyl) propyl hydrazine 1 曰, dipyridyl propyl acrylate Tris(meth)acrylate, polyoxyl-propyltrim-ylpropanepropane tri(meth)acrylate, polyoxyethylidene trishydroxypropylpropane tris(meth)acrylate, dipentaerythritol five (曱) Acrylate, trimethyl propylene triglycidyl ether (meth) acrylate, bisphenol hydrazine diglycidyl ether bis(indenyl) acrylate, β hydroxypropyl _|3, _ (Propylene oxy-oxypropyl phthalate, phenoxy polyethylene glycol (decyl) acrylate, hydrazine basic ethoxypoly(vinyl) acrylate, pentaerythritol tris(fluorenyl) propyl Orthoester, pentaerythritol tetrakis(meth)acrylate, pentaerythritol tris/tetrakis(fluorenyl) acrylate, etc. "In view of self-developing or warpage after calcination, yttrium-modified bisphenol a is preferred. Dimethacrylate, hydrazine-modified hydrogenated bisphenol A diacrylate, pentaerythritol tri/tetra(meth) acrylate. 158118.doc •71- 201237101 Also, from the viewpoint of self-developability and insulation reliability, Preferred is a combination of a compound having two double bonds and a compound having three or more double bonds. A compound having three or more double bonds forms a straight crosslinked body, and thus the elastic modulus or glass transition point of the cured film is estimated ( Tg) becomes high, and insulation reliability is advanced. Generally, when a compound having three or more double bonds is contained, there is a tendency for warpage to occur due to an increase in cross-linking points. However, in the present embodiment, a warp-containing group is included. Compound does not Since the compound having a double bond forms a crosslinked structure and exists as a second component in the photosensitive resin composition, the surface curvature can be reduced. As a compound having three or more double bonds, pentaerythritol tri/tetraacrylate can be mentioned. (trade name: ARONIX (registered trademark) M-306, manufactured by Toagosei Co., Ltd.), trimethylolpropane PO modified triacrylate (trade name: ARONIX M-3 10, manufactured by Toagosei Co., Ltd.), pentaerythritol tetraacrylate vinegar (trade name: A-TMMT, manufactured by Shin-Nakamura Chemical Industry Co., Ltd.), E-modified glycerol tris(mercapto) acrylate (trade name: A-GLY-9E (EO modified 9 mol), Shin-Nakamura Chemical Manufactured by Industrial Co., Ltd., di-trimethylolpropane tetraacrylate (trade name: ARONIX M_4〇8, manufactured by Toagosei Co., Ltd.), dipentaerythritol 5 and hexaacrylate (trade name: ARONIX M-403, manufactured by Toagosei Co., Ltd. )Wait. The amount of the (meth) acrylate compound having two or more photopolymerizable unsaturated double bonds is from the viewpoint of 'self-developability' when the amount of the polyimine is set to 1 part by mass. It is preferable that it is 5 parts by mass or more and 60 parts by mass or less, and more preferably 10 parts by mass or more and 40 parts by mass or less. -72· 158118.doc

S 201237101 再者,於本實施形態之樹脂組合物中,於並未作為感光 性樹脂而使用之情形時,未必必須使用(D)光敏劑。 (E)光聚合起始劑 作為光聚合起始劑’可列舉:如2,2-二甲氧基_丨,2_二苯 基乙烷-1-酮這樣之苯偶醯二甲基縮酮類、笨偶醯二丙基縮 酮類、笨偶酿二苯基縮酮類、安息香曱醚類、安息香乙 醚、。塞領酮、2,4-二甲基α塞嘲酮、2,4-二乙基。塞'頓酮、2-異 丙基噻噸酮、4-異丙基噻噸酮、2,4_異丙基噻噸酮、2_氟 噻噸酮、4-氟噻噸酮、2-氣噻噸酮、4-氣噻噸酮、1·氣_4-丙氧基噻嘲酮、二苯甲酮、4,4,_雙(二曱基胺基)二苯甲酮 [米其勒嗣]、4,4’-雙(二乙基胺基)二苯甲酮、2,2_二甲氧 基-2-苯基苯乙酮等芳香族酮化合物,咯吩二聚體等三芳基 咪《坐二聚體’-苯基吖啶等吖啶化合物,α,α—二曱氧基 Ν-嗎啉基-甲基噻吩基苯乙酮、2,4,6_三曱基苯甲醯基二笨 基氧化膦、Ν-芳基_α_胺基酸等肟酯化合物,對二曱基胺 基苯曱酸、對二曱基胺基苯甲酸、對二乙基胺基苯曱酸、 對二異丙基胺基苯曱酸、對苯曱酸酯、;μ羥基-環己基-苯 基-酮、2-羥基-2-甲基_1_苯基·丙烷酮、^[4-(2-羥基乙 氧基)-本基]-2-經基-2-曱基-1-丙烧-1-酮、2-經基-l-{4-[(2-羥基-2-曱基-丙醯基)_苄基]苯基}_2_甲基-丙烷·卜酮等α-羥 基烧基本酮類’ 2-甲基-1 -(4-曱基π塞吩基)_2-Ν-嗎淋基丙 烷-1-酮、2-(二甲基胺基)_2-[(4-甲基苯基)甲基]-1-[4-(4-Ν-嗎啉基)苯基]-1-丁酮等α_胺基烷基苯酮類,2,4,6-三曱基 苯甲醯基-二苯基-氧化膦、雙(2,4,6-三甲基苯曱醯基)·笨 158118.doc -73- 201237101 基氧化膦等醯基膦氧化物類,1,2-辛二酮1-[4-(苯硫基)_2_ (〇·苯甲醯肟)]、乙酮1-[9-乙基_6_(2_甲基苯甲醯基)·9Η_咔 唑-3-基]-1-(〇_乙醯肟)等肟酯類等。於該等中,自感光度 之觀點考慮’較佳的是特醋類。 作為光聚合起始劑之量,於將聚醯亞胺之量設為1〇〇質 量份之情形時,自感光度及解像度之觀點考慮,較佳的是 0.01質量份以上40質量份以下。更佳的是0 5質量份以上35 質量份以下。 (F)磷化合物 較佳的是感光性樹脂組合物含有磷化合物。磷化合物若 為於結構中包含磷原子之含麟原子化合物則並無限定。作 為此種磷化合物’可列舉具有磷酸酯結構之磷酸酯化合 物、或具有磷腈結構之磷腈化合物等。 作為磷酸酯化合物,可列舉磷酸三曱酯、磷酸三乙醋、 磷酸三丁酯、磷酸三異丁酯、磷酸三(2-乙基己基)酯等以 脂肪族烴基為取代基之磷酸酯,磷酸三(丁氧基乙基)醋等 以包含氧原子之脂肪族有機基為取代基之磷酸酯,鱗酸三 苯酯、磷酸三曱苯酯、磷酸三(二甲苯)酯、間苯二酚雙(二 苯基磷酸酯)等以芳香族有機基為取代基之磷酸酯化合物 等。該等中,自顯影性之觀點考慮,較佳的是磷酸三(丁 氧基乙基)酯、磷酸三異丁酯》 作為磷腈化合物,可列舉下述通式(17)、下述通式(18) 所表示之結構等。 158118.doc -74- 201237101 [化 26] 通式(17)S 201237101 In the case where the resin composition of the present embodiment is not used as a photosensitive resin, it is not always necessary to use (D) a photosensitizer. (E) Photopolymerization initiator as a photopolymerization initiator' can be exemplified by benzoin dimethyl condensate such as 2,2-dimethoxy-oxime, 2-diphenylethane-1-one Ketones, styrenes, dipropyl ketals, stupid diphenyl ketals, benzoin ethers, benzoin ethyl ether. Sesone, 2,4-dimethyl alpha serotonin, 2,4-diethyl. Seidone, 2-isopropylthioxanthone, 4-isopropylthioxanthone, 2,4-isopropylthioxanthone, 2-fluorothioxanthone, 4-fluorothioxanthone, 2- Gas thioxanthone, 4-air thioxanthone, 1 · gas _ 4-propoxy thioketidine, benzophenone, 4,4, bis (didecylamino) benzophenone [米其An aromatic ketone compound such as lysine, 4,4'-bis(diethylamino)benzophenone or 2,2-dimethoxy-2-phenylacetophenone, octomer dimer, etc. Acridine compound such as a dimer of a dimer, a phenyl acridine, α,α-dimethoxy oxime-morpholinyl-methylthienylacetophenone, 2,4,6-tridecyl An oxime ester compound such as benzamidine bisphosphonium phosphine oxide or fluorenyl-aryl _α-amino acid, p-didecylaminobenzoic acid, p-didecylaminobenzoic acid, p-diethylamino group Benzoic acid, p-diisopropylaminobenzoic acid, p-benzoate, μhydroxy-cyclohexyl-phenyl-one, 2-hydroxy-2-methyl-1-phenylpropanone, ^[4-(2-Hydroxyethoxy)-benzyl]-2-yl-2-yl-1-propan-1-one, 2-yl-l-{4-[(2- Basicity of α-hydroxyl burning such as hydroxy-2-indolyl-propionyl)-benzyl]phenyl}_2-methyl-propane·buxone Ketones '2-methyl-1 -(4-mercaptoπ-sepeno)_2-indole-l-propylpropan-1-one, 2-(dimethylamino)_2-[(4-methyl) α-Aminoalkylphenones such as phenyl)methyl]-1-[4-(4-indole-morpholino)phenyl]-1-butanone, 2,4,6-trimercaptobenzene Mercapto-diphenyl-phosphine oxide, bis(2,4,6-trimethylphenyl fluorenyl)·Bist 158118.doc -73- 201237101 fluorenylphosphine oxides such as phosphine oxides, 1, 2 -octanedione 1-[4-(phenylthio)_2_(〇·benzophenone)], ethyl ketone 1-[9-ethyl_6_(2-methylbenzylidene)·9Η_咔An oxime ester such as oxazol-3-yl]-1-(anthracene-ethene). Among these, from the viewpoint of sensitivity, 'excellent vinegars are preferred. In the case where the amount of the polyamidimide is 1 part by mass, the amount of the photopolymerization initiator is preferably 0.01 parts by mass or more and 40 parts by mass or less from the viewpoint of sensitivity and resolution. More preferably, it is 0 5 parts by mass or more and 35 parts by mass or less. (F) Phosphorus compound It is preferred that the photosensitive resin composition contains a phosphorus compound. The phosphorus compound is not limited as long as it contains a phosphorus atom-containing compound in the structure. The phosphorus compound of the present invention may be a phosphate compound having a phosphate structure or a phosphazene compound having a phosphazene structure. Examples of the phosphate compound include a phosphate ester having an aliphatic hydrocarbon group as a substituent such as tridecyl phosphate, triethyl sulphate, tributyl phosphate, triisobutyl phosphate, or tris(2-ethylhexyl) phosphate. a phosphate such as tris(butoxyethyl)acetate or the like, which is substituted with an aliphatic organic group containing an oxygen atom, triphenyl phthalate, triphenyl phenyl phosphate, tris(xylylene) phosphate, and isophthalic acid. A phosphate compound or the like having an aromatic organic group as a substituent such as phenol bis(diphenyl phosphate). In the above, from the viewpoint of the self-developability, tris(butoxyethyl) phosphate and triisobutyl phosphate are preferable. Examples of the phosphazene compound include the following formula (17). The structure represented by the formula (18) and the like. 158118.doc -74- 201237101 [Chem. 26] General formula (17)

^2| 0 —点=Ν· Λ R22 V 通式(18)^2| 0 —Point=Ν· Λ R22 V General formula (18)

G R23 ΟP=N- I0 I R24 ............G R23 ΟP=N- I0 I R24 ............

W 作為上述通式(1?m上料式⑽所腈化合物 中之R21 R22 R23、r24,若為碳數為i以上加以下之有機 基則並無限定。若碳數為1以上,則存在表現出阻燃性之 傾向而較佳。若碳數為20以下,則存在與聚醯亞胺相溶之 傾向而較佳。丨自表現阻燃性之觀點考慮,特佳的是 Ή 18以下之芳香族性化合物的官能基。作 為此種官能基,可列舉··苯基、2. f基苯基、3_甲基苯 基、Ή苯基、2•經基苯基、3_經基苯基、*經基苯 基2氰基苯基、3·氰基苯基、4-氰基苯基等具有苯基之 g此基’ 1_萘基、2_萘基等具有萘基之官能基,源自啦 15S118.doc •75· 201237101 咬、味σ坐、:r 4 四唑等含氮雜環化合物之官能基等。該 等化合物可視需要使用1種或者以2種以上之組合而使用。 ::中自獲得之各易性考慮,較佳的是具有苯基、3-甲基 苯基、4·經基苯基、4•氰基苯基之化合物。 Ά式(17)所表示之磷腈化合物中之v若為3以上25以 下則並…、限疋。若為3以上,則表現出阻燃性,若為以 以下,則對於有機溶劑之溶解性高。纟中,特別是自獲得 之容易性考慮,較佳的是v為3以上1〇以下。 上述通式(18)所表示之磷腈化合物中之w若為3以上 10000以下則並無限定。若為3以上,則表現出阻燃性若 為〇〇〇以下,則對於有機溶劑之溶解性高。其中,特別 是自獲得之容易性考慮,較佳的是3以上刚以下。 上述通式(18)所表示之磷腈化合物中之〇及;若為碳數為 3以上30以下之有機基則並無限定。其中,作為G,較佳的是 -N=P(〇C6H5)3 ' -N=P(〇C6H5)2(〇C6H4OH) ' -N=P(OC6H5)(〇C6H4〇H)2 ^ -N=P(0C6H40H)3、-N=P(〇)(〇c6H5)、-N=p(o)(〇c6H4〇H)。 作為 j ’ 較佳的是,Οί^Η5)4、_p(〇C6H5)3(〇C6H4〇H)、 -P(OC6H5)2(〇C6H4OH)2、-P(〇C6H5)(OC6H4OH)3、-p(oc6H4〇H)4、 -P(〇)(〇c6H5)2 ^ -P(0)(0C6H40H)2 > -P(0)(0C6H5)(0C6H40H) 等。 作為磷化合物,可使用丨種磷化合物’亦可將2種以上磷 化合物組合使用。 作為感光性樹脂組合物中之填化合物的添加量,於將聚 醯亞胺之量設為100質量份之情形時,自顯影性等之觀點 158118.docW is not limited as R21 R22 R23 and r24 in the nitrile compound of the above formula (10), and is an organic group having a carbon number of i or more plus or less. When the carbon number is 1 or more, it is present. It is preferable to exhibit a tendency to be flame-retardant. When the carbon number is 20 or less, it tends to be compatible with polyimine, and it is preferable from the viewpoint of exhibiting flame retardancy. The functional group of the aromatic compound. Examples of such a functional group include a phenyl group, a 2.f-phenyl group, a 3-methylphenyl group, a fluorenylphenyl group, a 2: phenyl group, and a 3-amino group. a base having a phenyl group such as a phenyl group, a phenyl group, a cyanophenyl group, a cyanophenyl group, a cyanophenyl group, a 4-cyanophenyl group, or the like, and a naphthyl group such as a 1-naphthyl group or a 2-naphthyl group. The functional group is derived from 15S118.doc •75· 201237101. The functional group of the nitrogen-containing heterocyclic compound such as tetrazole or the like, and the like. These compounds may be used alone or in combination of two or more. For use in combination, it is preferred to have a compound of a phenyl group, a 3-methylphenyl group, a 4, a phenyl group, and a cyanophenyl group. Said In the phosphazene compound, if it is 3 or more and 25 or less, it is limited to. When it is 3 or more, it exhibits flame retardancy, and if it is the following, it has high solubility in an organic solvent. In the phosphazene compound represented by the above formula (18), w is preferably 3 or more and 10,000 or less, and is not limited to 3 or more, and is preferably 3 or more. When the flame retardancy is 〇〇〇 or less, the solubility in an organic solvent is high. Among them, in particular, from the viewpoint of ease of availability, it is preferably 3 or more. The phosphazene compound is not limited to an organic group having a carbon number of 3 or more and 30 or less. Among them, as G, it is preferred that -N=P(〇C6H5)3 '-N=P( 〇C6H5)2(〇C6H4OH) '-N=P(OC6H5)(〇C6H4〇H)2 ^ -N=P(0C6H40H)3, -N=P(〇)(〇c6H5), -N=p( o) (〇c6H4〇H). As j ', it is preferable that Οί^Η5)4, _p(〇C6H5)3(〇C6H4〇H), -P(OC6H5)2(〇C6H4OH)2, -P (〇C6H5)(OC6H4OH)3, -p(oc6H4〇H)4, -P(〇)(〇c6H5)2^-P(0)(0C6H40H)2 > -P(0)(0C 6H5) (0C6H40H) and so on. As the phosphorus compound, a phosphorus compound can be used, and two or more kinds of phosphorus compounds can be used in combination. The amount of the compound to be added in the photosensitive resin composition is from the viewpoint of the self-developability or the like when the amount of the polyimine is 100 parts by mass.

S -76- 201237101 考慮較佳的是5 〇質量份以下。自硬化體之阻燃性之觀點 考慮,更佳的是45質量份以下。又,若為5質量份以上, 則發揮出效果。 (G)其他化合物 於感光性樹脂組合物中,可於不對其性能造成不良影響 之範圍内包含其他化合物。具體而言可列舉用以使煅燒後 之膜之韌性或耐溶劑性、耐熱性(熱穩定性)提高而使用之 熱固性樹脂、及與聚醯亞胺具有反應性之化合物等。又, 可列舉用以使密接性提高之雜環化合物、及用以膜之著色 的顏料或染料等。 作為熱固性樹脂,可列舉環氧樹脂、氰酸㈣脂、不飽 和聚醋樹脂、苯并。惡嗪樹脂、苯并嚼唾琳、紛樹脂、三聚 氰胺樹脂、馬來醯亞胺化合物等。 作為與聚醯亞胺具有反鹿枓夕#人 ,應性之化合物,可列舉能夠與聚 合物中之羧基、胺基或末端之酴 駿軒反應而形成3維交聯結 構的化合物等。其中,較伟的a拉丄 則圭的疋藉由加熱而產生作為鹼之 胺基的所謂熱鹼產生劑化合物。 切例如存在有將胺等鹼化合 物之胺基用磺酸等酸製成鹽結構, * 藉由一奴酸醋化合物進 行保護,藉由醯氯化合物進行俘嗜 仃保濩而所得之化合物。藉此 可製成於室溫下為並未表現出鹼性 ^ 之穩疋,可藉由加熱進 行去保護而產生鹼之熱鹼產生劑。 所謂雜環化合物,若為包含雜压7 … ★ 含雜原子之環式化合物則並無 限疋。此處’本貫施形態中之雜压7 雜原子可列舉氧、硫、氮、 磷。作為具體例,可列舉··如?田* 甲基咪°坐、2-十-烷基咪 •ΊΊ· 158118.doc 201237101 。坐、2_乙基-4-甲基咪唑、2-苯基咪唑這樣的咪唑,如1,2-二甲基味唾這樣的N_烷基取代咪唑,丨_苄基_2_曱基咪唑、 1-苄基-2-笨基咪唑等之含芳香族基之咪唑,丨氰基乙基_2_ 曱基咪吐、氰基乙基-2-乙基-4-曱基咪嗤、卜氰基乙基_ 2_十一烷基咪唑、1-氰基乙基-2-苯基咪唑等之含有氰基之 咪唑’咪唑矽烷等之含有矽之咪唑等咪唑化合物,5-曱基 苯并三唑、1-(1,,2,_二羧基乙基苯并三唑)、1(2乙基己基 胺基曱基笨并三唑)等三唑化合物,2-甲基_5_苯基苯并噁 唑等噁唑化合物等。 作為顏料或染料,可列舉酞菁系化合物。 其他化合物之添加量若為〇.〇1質量份以上、30質量份以 下則並無限定。若為〇〇1質量份以上,則存在充分地提高 密接f生或對膜之著色性的傾向,若為3 〇質量份以下,則並 無對感光性等之不良影響。感光性樹脂組合物亦可任意地 含有有機溶劑。 有機溶劑若為可使聚醯亞胺均勻地溶解及/或分散者則 並…、限疋作為此種有機溶劑,可列舉:如二甲醚、二乙 醚、甲基乙基醚、四氫呋喃、二噁烷、乙二醇二甲醚、二 乙醇一甲峻、二乙二醇二甲驗這樣的碳數為2以上9以下 之醚化合物;如丙酮、丁酮這樣的碳數為2以上6以下之酮 化合物,如正戊烷、環戊烷、正己烷、環己烷、甲基環己 烷、十氫萘這樣的碳數為5以上1〇以下之飽和烴化合物; 如苯、甲苯、〔甲苯、均三甲苯、萘滿這樣的碳數為6以 上10以下之芳香族烴化合物;如乙酸甲酯、乙酸乙酯、 158118.docS -76- 201237101 is preferably 5 parts by mass or less. From the viewpoint of the flame retardancy of the hardened body, it is more preferably 45 parts by mass or less. Moreover, when it is 5 mass parts or more, an effect is exhibited. (G) Other compounds In the photosensitive resin composition, other compounds may be contained in a range which does not adversely affect the performance. Specific examples thereof include a thermosetting resin used to improve the toughness, solvent resistance, and heat resistance (thermal stability) of the film after firing, and a compound reactive with polyimine. Further, a heterocyclic compound for improving the adhesion and a pigment or dye for coloring the film may be mentioned. Examples of the thermosetting resin include an epoxy resin, a cyanic acid (tetra) grease, an unsaturated polyacetal resin, and benzo. Oxazine resin, benzoxene, resin, melamine resin, maleimide compound, and the like. Examples of the compound which has an antibiotic activity with a polyruthenium group include a compound which can react with a carboxyl group, an amine group or a terminal group in the polymer to form a three-dimensional crosslinked structure. Among them, the more advanced a 丄 圭 圭 圭 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 。 。 。 。 。 。 。 。 For example, there is a compound obtained by subjecting an amine group such as an amine compound such as an amine to a salt structure by using an acid such as a sulfonic acid, and protecting it by a sulfonic acid compound, and purging it with a chlorinated compound. Thereby, it is possible to produce a hot base generator which does not exhibit alkalinity at room temperature and which can be deprotected by heating to produce a base. The heterocyclic compound is not limited to a compound containing a heterocyclic ring. Here, the hetero atom 7 hetero atom in the present embodiment may be exemplified by oxygen, sulfur, nitrogen, and phosphorus. As a specific example, for example, Tian* Mickey, sitting, 2-ten-alkyl M. • ΊΊ 158118.doc 201237101. An imidazole such as 2-ethyl-4-methylimidazole or 2-phenylimidazole, such as N-alkyl substituted imidazole such as 1,2-dimethyl-salt, 丨-benzyl-2-indole An aromatic group-containing imidazole such as imidazole, 1-benzyl-2-stackylimidazole, etc., decyl cyanoethyl 2 - hydrazinyl oxime, cyanoethyl-2-ethyl-4-hydrazinyl oxime, An imidazole compound such as an imidazole such as a cyano group, such as a cyano group, a 1-cyanoethyl imidazole or a 1-cyanoethyl-2-phenylimidazole, etc. Triazole compounds such as benzotriazole, 1-(1,2,-dicarboxyethylbenzotriazole), 1 (2 ethylhexylaminodecyl benzotriazole), 2-methyl-5 An oxazole compound such as phenyl benzoxazole. As a pigment or a dye, a phthalocyanine type compound is mentioned. The amount of the other compound to be added is not limited to 1 part by mass or more and 30 parts by mass or less. When it is 1 part by mass or more, the coloring property of the film may be sufficiently increased, and if it is 3 parts by mass or less, there is no adverse effect on photosensitivity or the like. The photosensitive resin composition may optionally contain an organic solvent. If the organic solvent is such that the polyimine is uniformly dissolved and/or dispersed, the organic solvent may be, for example, dimethyl ether, diethyl ether, methyl ethyl ether, tetrahydrofuran or the like. An ether compound having a carbon number of 2 or more and 9 or less such as an alkylene oxide, an ethylene glycol dimethyl ether, a diethanol monomethyl sulphate or a diethylene glycol dimethyl sulphide; a carbon number such as acetone or methyl ketone is 2 or more and 6 or less a ketone compound such as n-pentane, cyclopentane, n-hexane, cyclohexane, methylcyclohexane or decahydronaphthalene; a saturated hydrocarbon compound having a carbon number of 5 or more and 1 Torr or less; such as benzene, toluene, An aromatic hydrocarbon compound having a carbon number of 6 or more and 10 or less such as toluene, mesitylene or tetralin; such as methyl acetate, ethyl acetate, 158118.doc

S -78· 201237101 丁内酯、苯甲酸甲酯這樣的碳 厌数馮3以上9以下之酯化合 物;如氣仿、二氯曱烷、1 2_ _隹 ’ _一氣乙烷這樣的碳數為1以上 10以下之含鹵素化合物;如 乙腈、N,N_二甲基曱醯胺、 N,N-二甲基乙醯胺、N-曱某9 甲基·2-吡咯啶酮這樣的碳數為2以 上10以下之含氮化合物;如二 ▲ 〒基亞硬34樣的含硫化合 物0 該專可視需要為1種、或者2播|、; 種以上之混合物。作為特佳 之溶劑’可列舉碳數為2以上9以下之驗化合物、碳數為3 以上9以下之酿化合物、碳數為6以上1〇以下之芳香族烴化 合物、碳數為2以上10以下之含氮化合物、或者該等之工 種、或2種以上之混合物。χ,自聚醯亞胺之溶解性之觀 點考慮,較佳的是三乙二醇n Ν_甲基·2_π比洛咬 鲷、γ-丁内醋、N,N-二甲基甲酿胺、N,N-二甲基乙酿胺。 作為包含聚醯亞胺與有機溶劑之樹脂組合物中之聚酿亞 胺之漢度’若為可形成樹脂成型體之濃度,則i無特別限 制。自所製作之樹脂成型體之膜厚之觀點考慮,聚醯亞胺 之濃度較佳的是1質量%以±,自樹脂成型體之膜厚之均 勻丨生考慮,聚酿亞胺之濃度較佳的是9〇質量%以下。自所 得之樹脂成型體之膜厚之觀點考慮,更佳的是2質量%以 上、80質量%以下。 (H)感光性膜 本實施形態之感光性樹脂組合物可適宜用於感光性膜之 形成中。本實施形態之感光性膜可藉由將感光性樹脂組合 物塗佈於基材上而獲得。又,於本實施形態之感光性臈 158118.doc • 79· 201237101 中’較佳的是包含承載膜、於該承載膜上所設之上述感光 性樹脂組合物、形成於該感光性樹脂上之覆蓋膜者。 自製造感光性膜之觀點考慮,作為感光性樹脂組合物中 之聚醯亞胺之濃度,較佳的是1質量。/。以上、90質量%以 下作為聚醯亞胺之濃度’自感光性膜之膜厚之觀點考 慮’較佳的是1質量%以上,自感光性樹脂組合物之黏 度、膜厚之均勻性之觀點考慮’較佳的是9〇質量%以下。 自所得之感光性膜之膜厚之觀點考慮,更佳的是2質量% 以上' 80質量%以下。 其次’對感光性膜之製造方法加以說明。首先,將感光 性樹脂組合物塗佈於基材上。作為基材,若為於形成感光 性膜時並不損傷之基材,則並無限定。作為此種基材,可 列舉矽晶圓、玻璃、陶瓷、耐熱性樹脂、承載膜等。作為 承載膜,可列舉聚對苯二甲酸乙二酯膜或金屬膜。自操作 良好考慮,較佳的是耐熱性樹脂及承載膜,自基板壓接後 之剝離性之觀點考慮,特佳的是聚對苯二甲酸乙二酯膜。 作為塗佈方法,可例示棒塗、輥塗、模塗、刀塗、浸 塗、刮刀塗佈、喷塗、淋塗、旋塗、狹縫塗佈、刷塗等。 於塗佈後,亦可視需要而藉由加熱板等進行被稱為預烤之 加熱處理。 於製造包含感光性樹脂組合物之感光性膜之情形時,藉 由任意方法將感光性樹脂組合物之溶液塗佈於任意基材 (承载膜)上。其次,使感光性樹脂組合物乾燥而將其乾膜 化之後,製成例如包含承載膜與感光性膜之積層膜。 158118.doc οη • 80 -S -78· 201237101 An ester compound having a carbon anisotropy such as butyrolactone or methyl benzoate of von 3 or higher; for example, carbon number such as gas imitation, dichlorodecane, and 1 2_ _隹' _ hexane a halogen-containing compound of 1 or more and 10 or less; such as carbon such as acetonitrile, N,N-dimethyldecylamine, N,N-dimethylacetamide, N-methyl 9-methyl-2-pyrrolidone A nitrogen-containing compound having a number of 2 or more and 10 or less; for example, a sulfur-containing compound 0 of 2 ▲ 〒 亚 ia, which is preferably a mixture of 1 or 2, or more. The solvent which is particularly preferable is a compound having a carbon number of 2 or more and 9 or less, a brewing compound having a carbon number of 3 or more and 9 or less, an aromatic hydrocarbon compound having a carbon number of 6 or more and 1 or less, and a carbon number of 2 or more and 10 or less. A nitrogen-containing compound, or a work type thereof, or a mixture of two or more thereof. χ, from the viewpoint of the solubility of polyimine, preferred is triethylene glycol n Ν _ methyl · 2 _ π 洛 鲷 鲷, γ-butane vinegar, N, N-dimethyl amide , N,N-dimethyletheneamine. The degree of the polyimide of the resin composition containing the polyimine and the organic solvent is not particularly limited as long as the concentration of the resin molded body can be formed. From the viewpoint of the film thickness of the resin molded body to be produced, the concentration of the polyimine is preferably 1% by mass to ±, and the concentration of the polyanilin is higher than the uniform thickness of the film thickness of the resin molded body. The best is 9 〇 mass% or less. From the viewpoint of the film thickness of the obtained resin molded body, it is more preferably 2% by mass or more and 80% by mass or less. (H) Photosensitive film The photosensitive resin composition of the present embodiment can be suitably used for the formation of a photosensitive film. The photosensitive film of this embodiment can be obtained by applying a photosensitive resin composition to a substrate. Further, in the photosensitive 臈158118.doc 79: 201237101 of the present embodiment, it is preferable to include a carrier film, the photosensitive resin composition provided on the carrier film, and the photosensitive resin composition. Cover the film. The concentration of the polyimine in the photosensitive resin composition is preferably 1 mass from the viewpoint of producing a photosensitive film. /. The above-mentioned 90% by mass or less is considered to be preferably 1% by mass or more from the viewpoint of the film thickness of the photosensitive film from the viewpoint of the film thickness of the polyimide film, and the viscosity of the photosensitive resin composition and the uniformity of the film thickness. It is considered that 'it is preferably 9% by mass or less. From the viewpoint of the film thickness of the obtained photosensitive film, it is more preferably 2% by mass or more and 80% by mass or less. Next, a method of producing a photosensitive film will be described. First, a photosensitive resin composition is applied onto a substrate. The substrate is not limited as long as it is a substrate that does not damage when the photosensitive film is formed. Examples of such a substrate include a ruthenium wafer, glass, ceramics, heat resistant resin, carrier film, and the like. As the carrier film, a polyethylene terephthalate film or a metal film can be cited. From the viewpoint of good handling, a heat-resistant resin and a carrier film are preferable, and a polyethylene terephthalate film is particularly preferable from the viewpoint of the releasability after pressure-bonding of the substrate. The coating method may, for example, be bar coating, roll coating, die coating, knife coating, dip coating, blade coating, spray coating, shower coating, spin coating, slit coating, brush coating or the like. After the coating, a heat treatment called prebaking may be performed by a hot plate or the like as needed. In the case of producing a photosensitive film containing a photosensitive resin composition, a solution of the photosensitive resin composition is applied onto an arbitrary substrate (carrier film) by any method. Next, the photosensitive resin composition is dried and dried, and then formed into a laminated film comprising a carrier film and a photosensitive film. 158118.doc οη • 80 -

S 201237101 又,於感光性膜上,亦可設置至少一層任意之防污用或 保護用覆蓋膜而製成積層膜。於本實施形態之積層膜中, 作為覆蓋膜,若為低密度聚乙烯等保護感光性膜之膜則並 無限定。 (I)可撓性印刷布線板 本實施形態之感光性膜可適宜地用於可撓性印刷布線板 中。本實施形態之可撓性印刷布線板包含:具有布線之基 材、以覆蓋該基材上之布線的方式所設之上述感光性膜。 該可撓性布線板可藉由將感光性膜壓接於具有布線之基材 上,進行鹼顯影之後進行緞燒而獲得。 作為可撓性印刷布線板中之具有布線之基材,可列舉如 玻璃環氧樹脂基板、玻璃馬來醯亞胺基板等之硬質基材, 或銅羯積層板等可撓性基板等。其中,自可折彎之觀點考 慮’較佳的是可撓性基板。 可撓性印刷布線板之形成方法若為以覆蓋布線之方式而 於基材形成感光性膜者則並無限定。作為此種形成方法, 可列舉於具有布線之基材之布線側與本實施形態之感光性 膜相接觸之狀態下進行熱壓製、熱層壓、熱真空壓製、熱 真空層壓等的方法等。其中,自於布線間之感光性膜之埋 入之觀點考慮’較佳的是熱真空壓製、熱真空層壓。 一八令哗綠之基材上積層感光性膜時之加熱溫度若為感 =性膜可密接於基材上之溫度則並無限定。自於基材上之 在接之觀點或者感光性狀分解或副反應之觀點考慮,^ 佳的是3(rc以上,以下。更佳的是賊以上、i50。: 158118.doc • 81 - 201237101 以下。 具有布線之基材的整面處理並無特別限^,可列舉鹽酸 處理、硫酸處理、過硫酸鈉水溶液處理等。 感光性膜由於在光照射後’可藉由鹼顯影而溶解光照射 部位以外’因此可進行負型之綠微影法。於此情形時, 光照射所使狀光源可列舉高M水銀燈、超高壓水銀燈、 低壓水銀燈、金屬自素燈、^氣燈、螢光燈、嫣絲燈'氛 雷射、氦锡雷射等。其中,較佳的是高壓水銀燈、超高壓 水銀燈。 作為顯影中所使用之驗性水溶液,若為可溶解光照射部 位以外之溶㈣並無限^。作為此種溶液,可列舉碳酸納 水溶液、碳酸料雜、氫氧仙水溶液、氫氧化卸水溶 液、氫氧化四甲基兹水溶液等。自顯影性之觀點考慮,較 佳的是碳酸鈉水溶液及氫氧化鈉水溶液。作為顯影方法, 可列舉噴射顯影、浸潰顯影、浸置式顯影等。/ 其次’對Μ接有感光性膜之印刷布線板進行锻燒而形成 印刷布線板m燒,自溶劑之除去之觀點或者副反應 或分解等之觀點考慮,較佳的是於3〇〇c以上、4⑽艽以下 之溫度下實施。更佳的是l〇〇°C以上、3〇(rc以下。 煅燒之反應環境為空氣環境下或惰性氣體環境下均可實 施。於印刷布線板之製造中,冑述炮燒所須之時間因反應 條件而異,通常為24小時以内,特別適宜的是於!小時〜8 小時之範圍内實施。 本實施形態之聚醯亞胺及感光性樹脂組合物由於固化後 158118.doc -82· 201237101 之翹曲良好,且顯影性亦良好,於製成硬化體時顯示出耐 化學品性,因此於電子學領域中,利用於形成各種電子機 器之操作面板等中所使用之印刷布線板或電路基板之保護 層’形成積層基板之絕緣層,於半導體裝置中所使用之石夕 晶圓、半導體晶片、半導體裝置周邊之部件、半導體搭载 用基板、放熱板、引線接腳'半導體自身等之保護或者絕 緣及接著中所使用之電子零件上形成膜的用途中。如上所 述,將保護石夕晶圓、銅箔積層板、印刷布線板等上所形成 之布線的保護膜稱為覆蓋層。 又,本實施形態之聚酿亞胺及感光性樹脂組合物可適宜 用於可撓性印刷布線電路(FPC)用基板、捲帶式自動接合 (TAB)用基材、各種電子設備中之電氣絕緣膜及液晶顯示 器用基板、有機電激發光(EL)顯示器用基板、電子紙用基 板、太陽電池用基板、特別是可撓性印刷布線電路用覆蓋 層中。 (第3實施形態) 作為於可撓性印刷基板之製造步驟中所使用之材料,去 出了包含如下聚醯亞胺之樹脂組合物:前述聚醯亞胺具^ 使用聚矽氧二胺作為二胺成分的具矽氧烷部位之聚醯胺酉 結構以及聚醯亞胺結構。於該等樹脂組合物中,矽氧烷名 位僅僅存在於聚醯胺酸結構中。因此存在如下之問題7j 硬化時聚醯亞胺結構收縮而產生翹曲,且聚醯胺酸等 分子量之降低㈣,乾則樹脂膜)之顯影時間變得不诗 定。又,於料來,作為可撓料刷基板之零件安裂可— 158118.doc -83- 201237101S 201237101 Further, at least one layer of an anti-fouling or protective cover film may be provided on the photosensitive film to form a laminated film. In the laminated film of the present embodiment, the cover film is not limited as long as it is a film that protects the photosensitive film such as low-density polyethylene. (I) Flexible printed wiring board The photosensitive film of this embodiment can be suitably used for a flexible printed wiring board. The flexible printed wiring board of the present embodiment includes the above-mentioned photosensitive film provided with a substrate made of a wiring and covering the wiring on the substrate. The flexible wiring board can be obtained by pressure-bonding a photosensitive film to a substrate having a wiring, performing alkali development, and then satin burning. Examples of the substrate having a wiring in the flexible printed wiring board include a hard substrate such as a glass epoxy substrate or a glass maleimide substrate, or a flexible substrate such as a copper-clad laminate. . Among them, a flexible substrate is preferred from the viewpoint of bendability. The method of forming the flexible printed wiring board is not limited as long as it forms a photosensitive film on the substrate so as to cover the wiring. As such a formation method, hot pressing, hot lamination, hot vacuum pressing, hot vacuum lamination, or the like is performed in a state where the wiring side of the substrate having the wiring is in contact with the photosensitive film of the embodiment. Method, etc. Among them, from the viewpoint of embedding the photosensitive film between wirings, 'preferably, hot vacuum pressing and hot vacuum lamination. The heating temperature at the time of laminating a photosensitive film on a green substrate is not limited. The temperature at which the film can be adhered to the substrate is not limited. From the viewpoint of the connection on the substrate or the viewpoint of photodegradation or side reaction, it is preferable that it is 3 (rc or more, or less. More preferably, it is a thief or more, i50.: 158118.doc • 81 - 201237101 or less The whole surface treatment of the substrate having the wiring is not particularly limited, and examples thereof include hydrochloric acid treatment, sulfuric acid treatment, and aqueous sodium persulfate treatment. The photosensitive film can be dissolved by light irradiation by alkali development after light irradiation. Outside the part, the negative green lithography method can be performed. In this case, the light source can be cited as a high M mercury lamp, an ultra high pressure mercury lamp, a low pressure mercury lamp, a metal self lamp, a gas lamp, a fluorescent lamp. , 嫣 灯 ' 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛 氛Examples of such a solution include an aqueous solution of sodium carbonate, a carbonated product, an aqueous solution of hydroxyxanthine, an aqueous solution of hydrazine hydroxide, an aqueous solution of tetramethyl hydride hydroxide, etc. From the viewpoint of self-developability, carbon is preferred. The sodium aqueous solution and the aqueous sodium hydroxide solution. Examples of the development method include spray development, impregnation development, and dip-type development. / Next, the printed wiring board on which the photosensitive film is bonded is calcined to form a printed wiring board. The m-sintering is preferably carried out at a temperature of 3 〇〇 c or more and 4 (10) 艽 or less from the viewpoint of removal of a solvent or a side reaction or decomposition. More preferably, it is 1 〇〇 ° C or more, 3 〇(rc below. The reaction environment for calcination can be carried out in an air environment or in an inert gas atmosphere. In the manufacture of printed wiring boards, the time required for the calcination varies depending on the reaction conditions, usually within 24 hours. It is particularly suitable to be carried out in the range of from hr to 8 hours. The polyimine and the photosensitive resin composition of the present embodiment have good warpage after curing and good developability after 158118.doc -82·201237101 In the field of electronics, the protective layer formed of a printed wiring board or a circuit board used in forming an operation panel or the like of various electronic devices is formed in the field of electronics. The insulating layer of the laminated substrate is used for the protection or insulation of the slab wafer, the semiconductor wafer, the semiconductor device, the semiconductor mounting substrate, the heat radiating plate, the lead pin 'semiconductor itself, etc. used in the semiconductor device. In the use of forming a film on an electronic component to be used, as described above, a protective film for protecting a wiring formed on a stone wafer, a copper foil laminate, a printed wiring board, or the like is referred to as a cover layer. The form of the polyimide and the photosensitive resin composition can be suitably used for a substrate for a flexible printed wiring circuit (FPC), a substrate for tape and tape automatic bonding (TAB), an electrical insulating film for various electronic devices, and A substrate for a liquid crystal display, a substrate for an organic electroluminescence (EL) display, a substrate for an electronic paper, a substrate for a solar cell, and particularly a cover layer for a flexible printed wiring circuit. (Third Embodiment) As a material used in the production process of the flexible printed circuit board, a resin composition comprising the following polyimine: The polyamine structure of the diamine component having a polyoxyalkylene moiety and a polyimine structure. In these resin compositions, the oxoxane name is only present in the polyamic acid structure. Therefore, there is a problem that the polyamidene structure shrinks and warps when hardened, and the molecular weight of the poly-proline or the like is lowered (4), and the development time of the dry resin film becomes unsatisfactory. Also, as a material, the parts that can be used as a flexible brush substrate can be cracked - 158118.doc -83- 201237101

性’開始進行高加速試驗(HAST),從而要求具有耐HAST 性之高的絕緣可靠性、且為了提高連接可靠性而抑制了翹 曲的材料。 本發明者等人著眼於使用具有具矽氧烷部位之聚醯亞胺 結構及聚醯胺酸結構作為結構單元的聚醯亞胺而作為(A) 高分子化合物。而且’發現藉由含有(A)作為高分子化合 物之具有具矽氧烷部位之聚醯亞胺結構及聚醯胺酸結構作 為結構單元的聚醯亞胺、(D)作為光敏劑之具有特定結構 之(甲基)丙烯酸酯化合物、(E)光聚合起始劑的感光性樹脂 組合物’可實現具有優異'之耐HAST性的感光性樹脂組合 物。 於該感光性樹脂組合物中,於聚醯亞胺結構中包含石夕氧 烧部位,因此可抑制聚醯胺酸結構之分子量之降低,因此 可抑制顯影性之降低。又,對分子鏈之聚醯亞胺部位賦予 適度之柔軟性,因此可減低硬化時之樹脂膜之翹曲。進 而,包含2官能含羥基化合物及嵌段異氰酸酯化合物,因 此可抑制具有聚石夕氧部位之聚醯亞胺之收縮及偏析,可減 低硬化時之勉曲及提高财熱性,且可抑制與基材之接著性 之降低。以下’對本發明之第3實施形態加以具體說明。 本發明之第3實施形態之感光性樹脂組合物含有:(&)具 有聚醯亞胺結構及聚醯胺酸結構作為結構單元之聚醯亞 胺、(D)具有2個以上可光聚合之不飽和雙鍵的(甲基)丙烯 酸醋化合物、(E)光聚合起始劑。以下,對各構成要件加 以說明。 158118.doc •84· 201237101 (a)聚醯亞胺 本實施形癌之聚醯亞胺係具有下述通式所表示之聚 醯亞胺結構及下述通式(8)所表示之聚醯胺酸結構分別作為 重複結構單元的嵌段共聚物。本實施形態之聚醯亞胺可使 .用酸二酐及二胺而合成。 [化 27] 通式(7)The high-acceleration test (HAST) has been carried out, and a material having high insulation reliability against HAST and suppressing warpage in order to improve connection reliability has been demanded. The inventors of the present invention have focused on the use of a polyimine having a polyfluorene structure having a decane moiety and a polyamine structure as a structural unit as the (A) polymer compound. Further, it has been found to be specific as a photosensitizer by containing (A) a polyimine structure having a polyfluorene structure having a polyoxyalkylene moiety and a polyphthalic acid structure as a polymer compound, and (D) as a photosensitizer. The (meth) acrylate compound of the structure and the photosensitive resin composition of (E) photopolymerization initiator can realize the photosensitive resin composition which has the outstanding HAST resistance. In the photosensitive resin composition, since the polypyridinium structure contains the agglomerated portion, the decrease in the molecular weight of the polyamic acid structure can be suppressed, so that the deterioration of developability can be suppressed. Further, since the polyimine portion of the molecular chain is imparted with moderate flexibility, the warpage of the resin film during curing can be reduced. Further, since the bifunctional hydroxyl group-containing compound and the blocked isocyanate compound are contained, shrinkage and segregation of the polyimine having a polyoxo-oxygen moiety can be suppressed, the distortion at the time of curing can be reduced, and the heat-reducing property can be improved, and the base can be suppressed. The adhesion of the material is reduced. Hereinafter, the third embodiment of the present invention will be specifically described. The photosensitive resin composition of the third embodiment of the present invention contains: (&) polyimine having a polyimine structure and a polyaminic acid structure as a structural unit, and (D) having two or more photopolymerizable groups A (meth)acrylic acid vinegar compound having an unsaturated double bond and (E) a photopolymerization initiator. Hereinafter, each constituent element will be described. 158118.doc •84· 201237101 (a) Polyimine The polyimine of the present invention has a polyimine structure represented by the following formula and a polyfluorene represented by the following formula (8) The amino acid structure serves as a block copolymer of repeating structural units, respectively. The polyimine of this embodiment can be synthesized by using acid dianhydride and diamine. General formula (7)

0 0 (於式(7)及式(8)中’ Z3、Z4係源自下述通式(9)所表_ 羧酸二酐的4價之有機基’可分別相同亦可不同。汉 碳數為1〜碳數為30之2價之有機基,r19表示 U ^ 双為1〜碳數 為30之1價之有機基,e表示1以上20以下之整數。) [化 28] 通式(9) 158118.doc •85. 2012371010 0 (In the formulas (7) and (8), 'Z3 and Z4 are derived from the following formula (9). The tetravalent organic group of the carboxylic acid dianhydride may be the same or different. The carbon number is 1 to an organic group having a carbon number of 30, and r19 represents an organic group having a valence of 1 to a carbon number of 30, and e is an integer of 1 or more and 20 or less.) (9) 158118.doc •85. 201237101

聚醯亞胺結構,因此於聚醯亞胺結構中包含矽氧燒部位。 藉此而賦予分子鏈之聚醯亞胺部位適度之柔軟性,因此可 減低煅燒後之膜之翹曲。又,聚醯亞胺包含上述通式(8)所 表示之聚醯胺酸結構,因此於分子鏈中導入芳香環。II此 可抑制聚醯胺酸結構之分子量之降低,因此感光性樹脂組 合物之保存穩定性及乾膜之顯影時間穩定性提高。進而, 聚醯亞胺之聚醯胺酸結構及聚醯亞胺結構包含源自上述通 式(9)所表示之四羧酸二酐的4價之有機基,因此賦予分子 鍵適度之剛直性,耐熱性提高而使絕緣可靠性(耐) 提南。 作為本實施形態中所使用之酸二酐,可列舉均笨四甲酸 二酐(以下簡稱為「PMDA」)、氧雙鄰苯二甲酸二酐(以下 簡稱為「ODPA」)、聯苯四曱酸二.酐(以下簡稱為 「BPDA」)。關於氧雙鄰苯二甲酸二酐、聯苯四甲酸二 酐,雖然存在有結構異構物,但其結構並無特別限定。 又’ §亥等酸二酐可單獨使用,亦可複數種併用。 作為本實施形態中所使用之芳香族二胺,可列舉丨,3-雙 (3_胺基苯氧基)笨、1,4-雙(3-胺基苯氧基)苯、丨’心雙^ —胺 基本氧基)笨。自翹曲之觀點考慮,較佳的是具有可撓性 之丨,3-雙(3-胺基苯氧基)苯。 158118.doc -86 - 201237101 又’作為本實施形態中所使用之聚矽氧二胺,若為下述 通式(19)所表示之結構則並無特別限定。 [化 29] 通式(19) H2N-Rtr—-Si4〇Si-+™Rir-NH2 R,s V Rt./ 於上述通式(7)及上述通式(19)中,e係滿足i$e^2〇之 整數。若e為20以下,則鹼可溶性及耐HAST^4變良好。作 為上述通式(15)中之e,自所生成之聚醯亞胺之、及阻燃 性之觀點考慮,較佳的是1以上15以下,更佳的是丨以上i 2 以下。 於上述通式⑺及上述通式(19)中,Ri8若為碳數為i以上 30以下之2價之有機基則無限定,作為碳數為丨以上3〇以下 之2價之有機基(RM,自阻燃性之觀點考慮,較佳的是源 自CH2、C2H4、C3h6、C4li8等所表示之碳數為⑺以下之脂 肪族飽和烴的2價之有機基。 於上述通式⑺及上述通式(19)中,〜表示碳數為以上 3〇以下之有機基,可分別相同亦可不同。作為碳數為… 上30以下之有機基(Rl9) ’可列舉脂肪族飽和煙基、脂肪族 不飽和烴基、包含環狀結構之有機基、及該等組合而成之 基等。 作為上述脂肪族飽和烴基,可列舉甲基、乙基、丙基、 158118.doc •87· 201237101 丁基、戊基、己基等第一級烴基’異丁基、異戊基等第二 級烴基,第三丁基等第三級烴基等。 作為上述脂肪族不飽和烴基,可列舉乙稀基、稀丙基等 含雙鍵之烴基,乙炔基等含三鍵之烴基等。 作為上述包含環狀結構之官能基’可列舉環丁基、環戊 基、環己基、環癸基、環辛基等單環式官能基;降茨基、 金剛院基等多環式官能其· I 士 寸夕環式S能基,具有吡咯、呋喃、噻吩、味 。坐m唾、四氫°夫喃、二。惡院結構之雜環式官能 基;包含苯環、萘環、蒽環、菲環結構的芳香族烴基等。 作為碳數為mno以下之有機基(Ri9),可為包含齒素 原子、雜原子及金屬原子者。作為函素原可列舉氟、 氯 '演、破。又,作為雜原子,可列舉氧、硫、氣、碟。 又,作為金屬原子,可列舉矽及鈦。 於厌數為1以上30以下之有機基(R19)包含雜原子及/ 或金屬原子之情形時’ Ris可與所鍵結之雜原子及/或金屬 原子直接鍵合,亦可經由雜原子及/或金屬原子而鍵結。 作為上述通式⑺及上述通式(19)之〜之碳數,若考慮 阻燃性,則較佳的是“乂上別以下。進而,自所生成之聚 酿亞胺之溶劑溶解性之觀點考慮,碳數特佳的是!以上1〇 以下。 作為上述通式(19)所表示之化合物,RI8表示伸丙基、 尺19表不甲基之化合物可列舉冑越化學工業公司製造之 PAM-E(n = 2) > KF-801〇(n= ι〇) , X-22-161 A(n= 20) ' 1 it 康 V a 司製 & 之 BYl6_87l(n— 2)、及 川(n_ i〇)。 \5Sm.docThe polyamidene structure thus contains a oxyfluoride moiety in the polyimine structure. Thereby, the polyimine portion of the molecular chain is imparted with moderate flexibility, so that the warpage of the film after calcination can be reduced. Further, since the polyimine contains the polyamic acid structure represented by the above formula (8), an aromatic ring is introduced into the molecular chain. II. This suppresses the decrease in the molecular weight of the polyaminic acid structure, so that the storage stability of the photosensitive resin composition and the development time stability of the dry film are improved. Further, the polyaminic acid structure and the polyimine structure of the polyimine contain a tetravalent organic group derived from the tetracarboxylic dianhydride represented by the above formula (9), thereby imparting a moderate degree of rigidity to the molecular bond. The heat resistance is improved and the insulation reliability (resistance) is increased. Examples of the acid dianhydride used in the present embodiment include tetrazoic acid dianhydride (hereinafter abbreviated as "PMDA"), oxydiphthalic dianhydride (hereinafter abbreviated as "ODPA"), and biphenyl tetraindole. Acidic anhydride (hereinafter referred to as "BPDA"). Regarding oxydiphthalic dianhydride and biphenyltetracarboxylic dianhydride, although structural isomers are present, the structure thereof is not particularly limited. Further, § hai and other acid dianhydrides may be used singly or in combination of plural kinds. Examples of the aromatic diamine used in the present embodiment include anthracene, 3-bis(3-aminophenoxy)phenyl, 1,4-bis(3-aminophenoxy)benzene, and a heart. Bis-amine basic oxy) stupid. From the viewpoint of warpage, a flexible ruthenium, 3-bis(3-aminophenoxy)benzene, is preferred. 158118.doc -86 - 201237101 Further, the polyoxymethylene diamine used in the present embodiment is not particularly limited as long as it has a structure represented by the following formula (19). General formula (19) H2N-Rtr--Si4〇Si-+TMRir-NH2 R,s V Rt./ In the above formula (7) and the above formula (19), the e system satisfies i An integer of $e^2〇. When e is 20 or less, alkali solubility and HAST resistance 4 become good. The e in the above formula (15) is preferably 1 or more and 15 or less, more preferably y or more and i 2 or less from the viewpoint of the properties of the produced polyimine and the flame retardancy. In the above formula (7) and the above formula (19), Ri8 is not limited as long as it has a divalent organic group having a carbon number of i or more and 30 or less, and is a divalent organic group having a carbon number of 丨 or more and 3 Å or less ( RM, from the viewpoint of flame retardancy, is preferably a divalent organic group derived from an aliphatic saturated hydrocarbon having a carbon number of (7) or less represented by CH2, C2H4, C3h6, C4li8 or the like. In the above formula (19), the organic group having a carbon number of at most 3 Å or less may be the same or different. The organic group (Rl9) having a carbon number of 30 or more may be an aliphatic saturated tobacco group. An aliphatic unsaturated hydrocarbon group, an organic group containing a cyclic structure, and a combination thereof. Examples of the aliphatic saturated hydrocarbon group include a methyl group, an ethyl group, and a propyl group. 158118.doc •87·201237101 a second-stage hydrocarbon group such as a butyl group, a pentyl group or a hexyl group, a first-stage hydrocarbon group such as a 'isobutyl group or an isopentyl group; a third-stage hydrocarbon group such as a third butyl group; and the like. Examples of the above aliphatic unsaturated hydrocarbon group include a vinyl group. a hydrocarbon group containing a double bond such as a propyl group, a hydrocarbon group having a triple bond such as an ethynyl group, or the like. Examples of the functional group including a cyclic structure include a monocyclic functional group such as a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cyclodecyl group or a cyclooctyl group; and a polycyclic functional group such as a decyl group or a ruthenium group; I 士 夕 环 环 S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S An aromatic hydrocarbon group having a phenanthrene ring structure, etc. The organic group (Ri9) having a carbon number of mno or less may be a dentate atom, a hetero atom or a metal atom. Examples of the element include a fluorine atom and a chlorine atom. Further, examples of the hetero atom include oxygen, sulfur, gas, and a dish. Examples of the metal atom include ruthenium and titanium. The organic group (R19) having an anisotropy of 1 or more and 30 or less contains a hetero atom and/or a metal. In the case of an atom, ' Ris may be directly bonded to a bonded hetero atom and/or a metal atom, or may be bonded via a hetero atom and/or a metal atom. As the above formula (7) and the above formula (19) When considering the flame retardancy, it is preferable that the carbon number is not the following. From the viewpoint of the solvent solubility of the polyimine, the carbon number is particularly preferably 1 or less. As the compound represented by the above formula (19), RI8 represents a compound in which a propyl group and a ruler 19 are not methyl groups. Listed by PAM-E (n = 2) > KF-801〇(n= ι〇), X-22-161 A(n= 20) ' 1 it Kang V a system &; BYl6_87l (n-2), and Sichuan (n_i〇). \5Sm.doc

S -88- 201237101 又,Ri8表示伸丙基、Ro表示苯基之化合物可列舉信越化 學工業公司製造之X-22-166〇B_3(n〜20)。 、聚醯亞胺之主鏈末端若為不對性能造成影響之結構,則 並無特別限I可為源自製造聚醯亞胺時所使用之酸二 酐、一胺之主鏈末端,亦可為藉由其他酸酐、胺化合物等 而對主鏈末端進行封端者。 聚醯亞胺之重量平均分子量較佳的是1〇〇〇以上1〇〇〇〇〇〇 以下。此處,所謂重量平均分子量是指以已知重量平均分 子量之聚苯乙烯為標準,藉由凝膠滲透層析法而測定之分 子量。作為重量平均分子量,自聚醯亞胺膜之強度之觀點 考慮,較佳的是1000以上。又,自含有聚醯亞胺之樹脂組 合物之黏度、成型性之觀點考慮,較佳的是1〇〇〇〇〇〇以 下。重量平均分子量更佳的是5000以上、500000以下,特 佳的是10000以上300000以下,最佳的是25000以上、 50000以下。 具有聚醯亞胺結構及聚醯胺酸結構分別作為重複單元之 聚酿亞胺之製造方法可使用上述第2實施形態中所示之製 造方法。 再者,於上述實施形態中,對使用作為(A)高分子化合 物的具有具矽氧烷部位之聚醯亞胺結構及聚醯胺酸結構作 為結構單元的聚醯亞胺的第2態樣之樹脂組合物進行了說 明,但藉由於起到本發明之效果的範圍内使用實質上不含 聚醯胺酸結構的聚醯亞胺,亦可作為上述第1態樣之樹脂 組合物而使用。 158118.doc -89 - 201237101 (b) 2官能含羥基化合物 於本實施形態之感光性樹脂組合物中,較佳的是含有2 官能含羥基化合物及嵌段異氰酸酯化合物。2官能含經基 化合物並不與聚醯亞胺具有直接鍵結,因此並未嵌入至骨 架中而作為第二成分存在。藉此,可防止硬化時之聚酿亞 胺骨架之收縮,可抑制翹曲。進而,藉由包含嵌段異氰酸 S旨化合物而於低溫下使聚醯亞胺之羧基去活性化,變得可 低溫硬化’因此可防止硬化時之聚醯亞胺骨架之收縮,抑 制勉曲》 又’於本貫施形態之感光性樹脂組合物中,自耐熱性之 觀點考慮,2官能含羥基化合物中所含之羥基與嵌段異氰 西文Sa中所含之異氰酸酯基之莫耳比較佳的是經基/異氰酸 酉旨基=0.5〜1。 作為2官能性含羥基化合物,可使用與上述第丨實施形態 之樹脂組合物中所使用之2官能性含羥基化合物相同者。 再者,作為2官能含羥基化合物,亦可於起到本發明之效 果的範圍内使用含有2個以上羥基之多官能含羥基化合 物。 於本實施形態中,作為2官能含羥基化合物,自同時實 現趣曲之減低、焊料耐熱性及耐化學品性之方面而言,較 佳的是相對於樹脂組合物丨〇 〇質量份而言含有i質量份〜7 〇 質量份’更佳的是1質量份〜60質量份。 (c-1)嵌段異氰酸酯化合物 作為嵌段異氰酸酯化合物,可使用與上述第丨實施形態 158118.doc 201237101 之樹脂組合物中所使用之嵌段異氰酸酯化合物相同者。再 者’於本實施形態中’作為(c)多官能交聯性化合物,對 使用嵌段異氰酸酯化合物之例子加以說明,但亦可於起到 本發明之效果的範圍内使用具有2個以上異氰酸酯基之多 官能異氰酸酯化合物、或具有2個以上交聯性官能基的多 官能交聯性化合物、或多官能噁唑啉化合物。 (d)(曱基)丙烯酸酯化合物 作為具有2個以上可光聚合之不飽和雙鍵的(甲基)丙稀 酸酯化合物’可列舉二氫芳樟醇二丙烯酸酯、環氧乙烷 (EO)改性雙酚a二曱基丙烯酸脂、E〇改性氫化雙酚a二丙 稀酸醋、1,6-己二醇(曱基)丙烯酸酯、i,4_環己二醇二(甲 基)丙烯酸酯、聚乙二醇二(曱基)丙烯酸酯、聚丙二醇二 (曱基)丙烯酸酯、2-二(對羥基苯基)丙烷二(甲基)丙烯酸 醋、三(2-丙烯醯氧基乙基)異三聚氰酸酯、ε_己内酯改性 二(丙烯醯氧基乙基)異三聚氰酸酯、丙三醇三(甲基)丙稀 酸醋、三羥甲基丙烷三(甲基)丙烯酸酯、聚氧基伸乙基三 經曱基丙烷三(曱基)丙烯酸酯、聚氧基伸丙基三羥曱基丙 烧三(甲基)丙烯酸酯、二季戊四醇五(曱基)丙烯酸酯、三 經甲基丙烷三縮水甘油醚(曱基)丙烯酸酯、雙酚Α二縮水 甘油鱗二(甲基)丙烯酸酯、β-羥基丙基-β’-(丙烯醯氧基)-丙 基鄰苯二曱酸酯、苯氧基聚乙二醇(甲基)丙烯酸酯、壬基 苯氧基聚乙二醇(甲基)丙烯酸酯、季戊四醇三(曱基)丙稀 酸酷、季戊四醇四(曱基)丙烯酸酯、季戊四醇三/四(曱基) 丙烯酸酯等。 158118.doc 201237101 於本實施形態之感光性樹脂組合物中,含有具有2個以 上可光聚合之不飽和雙鍵的(甲基)丙烯酸酯化合物。自解 像性或_HAST性之觀點考慮,㈣的是包含具有3個以上 雙鍵之(甲基)丙烯酸酯化合物。 作為具有3個以上雙鍵之(曱基)丙稀酸賴化合物可列 舉季戊四醇三/四丙烯酸酿(東亞合成公司製造、ar〇nix M-306)、季戊四醇四丙烯酸酯(新中村化學工業公司製 造、Α-ΤΜΜΤ)、E0改性丙三醇三(甲基)丙稀酸醋(新中村 化學工業公司製造、A-GLY-9E(E〇改性9 m〇1))、二_三羥 甲基丙烷四丙烯酸酯(東亞合成公司製造、AR〇NIx M_ 408)、二季戊四醇五及六丙烯酸酯(東亞合成公司製造、 ARONIX M-403)等。 又’於本貫施形態中’作為具有3個以上雙鍵之(甲基) 丙烯酸酯化合物,自絕緣電阻值(耐或翹曲之觀點 考慮’更佳的疋下述通式(1〇)所表示之化合物。其原因在 於:下述通式(10)所表示之化合物並未嵌入至聚醯亞胺之 骨架中而形成交聯體作為第二成分,由此可防止硬化時之 聚醯亞胺骨架之收縮’可抑制翹曲。除此以外,由於並未 具有羥基等使電氣絕緣性降低之官能基,因此推測於本實 施形態之聚醯亞胺基質中形成剛直之交聯體,硬化膜之Tg 或彈性模數變高,耐HAST性提高。 [化 30] 通式(10)S-88-201237101 Further, a compound in which Ri8 represents a propyl group and Ro represents a phenyl group is X-22-166〇B_3 (n~20) manufactured by Shin-Etsu Chemical Co., Ltd. If the end of the main chain of the polyimine is a structure that does not affect the performance, there is no particular limitation. I may be the end of the main chain of the acid dianhydride or the amine used in the production of the polyimine. The end of the main chain is blocked by other acid anhydrides, amine compounds and the like. The weight average molecular weight of the polyimine is preferably 1 Å or more and 1 Torr or less. Here, the weight average molecular weight means a molecular weight measured by gel permeation chromatography using a known weight average molecular weight of polystyrene as a standard. The weight average molecular weight is preferably 1,000 or more from the viewpoint of the strength of the polyimide film. Further, from the viewpoint of the viscosity and moldability of the resin composition containing polyimine, it is preferably 1 or less. The weight average molecular weight is more preferably 5,000 or more and 500,000 or less, particularly preferably 10,000 or more and 300,000 or less, and most preferably 25,000 or more and 50,000 or less. The production method shown in the second embodiment can be used as a method for producing a polyanilin having a polyimine structure and a polyaminic acid structure as repeating units. Further, in the above embodiment, the second aspect of the polyimine which has a polyimine structure having a fluorene alkane moiety and a polyphthalic acid structure as a structural unit as the (A) polymer compound is used. Although the resin composition is used in the range of the effect of the present invention, it can be used as the resin composition of the first aspect, by using a polyimine which does not substantially contain a polyaminic acid structure. . 158118.doc -89 - 201237101 (b) Bifunctional hydroxyl group-containing compound The photosensitive resin composition of the present embodiment preferably contains a bifunctional hydroxyl group-containing compound and a blocked isocyanate compound. The bifunctional ketone-containing compound does not have a direct bond with the polyimine, and thus is not embedded in the skeleton and exists as a second component. Thereby, shrinkage of the polyamidene skeleton at the time of hardening can be prevented, and warpage can be suppressed. Further, by including a compound of the blocked isocyanate S, the carboxyl group of the polyimine is deactivated at a low temperature, and the resin can be cured at a low temperature. Therefore, shrinkage of the polyimine skeleton at the time of curing can be prevented, and ruthenium can be suppressed. In the photosensitive resin composition of the present embodiment, the hydroxyl group contained in the bifunctional hydroxyl group-containing compound and the isocyanate group contained in the block isocyanide Sa are considered from the viewpoint of heat resistance. The ear is preferably a thiol/isocyanate group = 0.5 to 1. The bifunctional hydroxyl group-containing compound can be the same as the bifunctional hydroxyl group-containing compound used in the resin composition of the above-described first embodiment. Further, as the bifunctional hydroxyl group-containing compound, a polyfunctional hydroxyl group-containing compound having two or more hydroxyl groups may be used insofar as it exhibits the effects of the present invention. In the present embodiment, the bifunctional hydroxyl group-containing compound is preferably in terms of the reduction in the taste, the solder heat resistance, and the chemical resistance of the resin composition. It contains i part by mass to 7 parts by mass of 'more preferably 1 part by mass to 60 parts by mass. (c-1) Block Isocyanate Compound The blocked isocyanate compound can be the same as the blocked isocyanate compound used in the resin composition of the above-mentioned 158118.doc 201237101. In the present embodiment, as the (c) polyfunctional crosslinkable compound, an example in which a blocked isocyanate compound is used is described. However, it is also possible to use two or more isocyanates in the range which has the effect of the present invention. A polyfunctional isocyanate compound or a polyfunctional crosslinkable compound having two or more crosslinkable functional groups or a polyfunctional oxazoline compound. (d) (fluorenyl) acrylate compound As the (meth) acrylate compound having two or more photopolymerizable unsaturated double bonds, dihydroindenyl alcohol diacrylate and ethylene oxide can be cited. EO) modified bisphenol a dimercapto acrylate, E 〇 modified hydrogenated bisphenol a diacrylic acid vinegar, 1,6-hexanediol (mercapto) acrylate, i, 4_cyclohexanediol II (Meth) acrylate, polyethylene glycol bis(indenyl) acrylate, polypropylene glycol bis(indenyl) acrylate, 2-di(p-hydroxyphenyl)propane di(meth)acrylic acid vinegar, three (2) - propylene methoxyethyl) isomeric cyanurate, ε_caprolactone modified bis(propylene oxyethyl) isocyanate, glycerol tris(meth) acrylate vinegar , trimethylolpropane tri(meth)acrylate, polyoxyethylidene tris-propylpropanepropane tris(decyl)acrylate, polyoxyl-propyltrihydroxymethylpropane tris(meth)acrylate , dipentaerythritol penta(indenyl) acrylate, trimethyl propyl triglycidyl ether (mercapto) acrylate, bisphenol quinone diglycidyl squamous (methyl) Ethyl ester, β-hydroxypropyl-β'-(propylene decyloxy)-propyl phthalate, phenoxy polyethylene glycol (meth) acrylate, nonyl phenoxy polyethyl Glycol (meth) acrylate, pentaerythritol tris(mercapto) acrylic acid, pentaerythritol tetrakis(meth) acrylate, pentaerythritol tri/tetrakis (fluorenyl) acrylate, and the like. 158118.doc 201237101 The photosensitive resin composition of the present embodiment contains a (meth) acrylate compound having two or more photopolymerizable unsaturated double bonds. From the viewpoint of self-resolution or _HAST property, (4) is a (meth) acrylate compound having three or more double bonds. Examples of the (mercapto)acrylic acid lysing compound having three or more double bonds include pentaerythritol tri/tetraacrylic acid (manufactured by Toagosei Co., Ltd., ar〇nix M-306), and pentaerythritol tetraacrylate (manufactured by Shin-Nakamura Chemical Co., Ltd.). , Α-ΤΜΜΤ), E0 modified glycerol tris(methyl) acrylate vinegar (manufactured by Shin-Nakamura Chemical Industry Co., Ltd., A-GLY-9E (E〇 modified 9 m〇1)), ternary trishydroxyl Methyl propane tetraacrylate (manufactured by Toagosei Co., Ltd., AR〇NIx M_ 408), dipentaerythritol penta and hexaacrylate (manufactured by Toagosei Co., Ltd., ARONIX M-403), and the like. Further, 'in the present embodiment', as a (meth) acrylate compound having three or more double bonds, from the viewpoint of insulation resistance (resistance or warpage), a more preferable formula (1〇) The compound is represented by the fact that the compound represented by the following formula (10) is not embedded in the skeleton of the polyimine to form a crosslinked body as the second component, thereby preventing aggregation at the time of hardening. The shrinkage of the imine skeleton can suppress warpage. In addition, since it does not have a functional group which reduces electrical insulation, such as a hydroxyl group, it is estimated that the rigid crosslinked body is formed in the polyimine matrix of this embodiment. The Tg or the modulus of elasticity of the cured film becomes high, and the HAST resistance is improved. [Chem. 30] Formula (10)

I58118.doc -92- S 201237101 ο ΪΗ20-( —6~CH2 Η30~°Η2^—CH20-(e-C%-( iH20*{i-〇^—9~c =CH2I58118.doc -92- S 201237101 ο ΪΗ20-( —6~CH2 Η30~°Η2^—CH20-(e-C%-( iH20*{i-〇^—9~c =CH2

基。複數個E分別獨立地 可分別相同亦可不同。F (於式(10)中,·尺2〇表示氫原子或甲 表示奴數為2〜碳數為5之伸烧基, 係1〜10之整數。) 於上述式⑽中,作為碳數為2〜碳數為6之伸垸基 例如可列舉伸乙基、伸丙基、異伸丙基、伸丁基、異伸丁 基伸戊基、新戊基等。自解像性之觀點考慮更佳的是 E係碳數為2或碳數為3之伸烷基。又,於上述式(ι〇)中疋 自阻燃性之觀點考慮,特佳的是f為1以上5以下。 作為上述通式(1〇)所表示之化合物,可列舉東亞合成公 司製造之ARONIx M-350(E:伸乙基、f:1)、m_36〇(e•伸乙 基、f:2)、M-310(E:伸丙基、f:1)、M_321(E:伸丙基、 f:2)、SARTOMER 公司製造之 SR5〇2(E:伸乙基、f:3)、 SR9035(E:伸乙基、f:5)等。該等可單獨使用,亦可複數種 併用。 又’於本實施形態之感光性樹脂組合物中,自缎燒後之 Μ曲或解像性之觀點考慮,較佳的是併用具有2個雙鍵之 (甲基)丙烯酸酯化合物與具有3個以上雙鍵之(曱基)丙烯酸 醋化合物。 作為具有2個雙鍵之(曱基)丙烯酸酯化合物,可分為脂 158118.doc -93- 201237101 肪族系二(甲基)㈣酸s|與具有雙㈣構之芳香族系 基)丙烯酸8旨。作為脂肪族系二(甲基)丙稀❾旨,可列 乙二醇二(曱基)丙稀酸輯、聚丙二醇二(曱基)丙歸酸醋、 聚丁二醇二(甲基)丙烯酸酯、聚乙烯-聚丙二醇 婦酸西曰等。具體而言,自趣曲抑制之觀點考慮,較佳土的是 九乙二醇二丙稀酸(新中村化學工業公司製造、9G)、七 丙二醇二甲基丙㈣脂(新中村化學工業公司製造、叫 又,作為芳香族系二(甲基)丙稀酸醋,可列舉下述通式 (20)所表示之化合物。 [化 31] 通式(20) h2c=c-c4e-o 2 I II ' r25obase. The plurality of Es may be independently the same or different. F (in the formula (10), the ruler 2〇 represents a hydrogen atom or a group represents a slave number of 2 to a carbon number of 5, and is an integer of 1 to 10.) In the above formula (10), as a carbon number Examples of the exfoliation group having 2 to a carbon number of 6 include an exoethyl group, a propyl group, an exo-propyl group, a butyl group, an isobutylene group, a neopentyl group, and the like. More preferably, from the viewpoint of self-resolution, E is an alkylene group having 2 carbon atoms or 3 carbon atoms. Further, in the above formula (ι), from the viewpoint of flame retardancy, it is particularly preferable that f is 1 or more and 5 or less. Examples of the compound represented by the above formula (1〇) include ARONIx M-350 (E: exoethyl, f: 1), m_36〇 (e•extended ethyl, f: 2) manufactured by Toagosei Co., Ltd. M-310 (E: propyl, f: 1), M_321 (E: propyl, f: 2), SR5 〇 2 (E: Ethyl, f: 3), SR9035 (E) manufactured by SARTOMER : Elongate ethyl, f: 5), etc. These may be used alone or in combination. Further, in the photosensitive resin composition of the present embodiment, from the viewpoint of distortion or resolution after satin burning, it is preferred to use a (meth) acrylate compound having two double bonds in combination with 3 More than one double bond (mercapto) acrylic vinegar compound. As a (fluorenyl) acrylate compound having two double bonds, it can be classified into a fat 158118.doc-93-201237101 aliphatic di(methyl)(tetra) acid s| and an aromatic group having a bis(tetra) structure) 8 purpose. As an aliphatic di(meth)acrylic acid, it can be listed as ethylene glycol di(indenyl)acrylic acid, polypropylene glycol di(indenyl)propionic acid vinegar, polybutylene glycol di(methyl). Acrylate, polyethylene-polypropylene glycol, bismuth citrate and the like. Specifically, from the viewpoint of suppression of the taste, the preferred soil is nonaethylene glycol diacrylic acid (manufactured by Shin-Nakamura Chemical Co., Ltd., 9G), heptapropanediol dimethylpropane (tetra) (Naka Nakamura Chemical Industry Co., Ltd. In addition, as the aromatic di(meth)acrylic acid vinegar, a compound represented by the following formula (20) can be mentioned. [Chem. 31] Formula (20) h2c=c-c4e-o 2 I II ' r25o

(於式(20)中,Ur26表示氫原子或甲基。複數個E分別 獨立地表示碳數為2〜碳數為6之伸烷[可分別相同亦可 不同。) 於上述通式(20)中,作為碳數為2〜碳數為6之伸烷基 (E)’例如可列舉伸乙基、伸丙基、異伸丙基、伸丁基、 異伸丁基、伸戊基、新戊基等。 於上述通式(20)中,1及k分別為!以上1〇以下之整數,且 2Sl+k$20。若1及k分別為1〇以下,則阻燃性及耐hasi^ 提高。又,自翹曲及解像性之觀點考慮,更佳的是通式 158118.doc S. 201237101 (20)中之1及k分別為3以上6以下,且1+kS 12。 作為上述通式(20)中之具體的例,可列舉東亞合成公司 製造之ARONIX M-208(R25、R26 :氫原子、e :伸乙基、 1、k与2)、新中村化學工業公司製造之bpe_5〇〇(R25、 R26 :甲基、E :伸乙基、l+k=l〇)、BPE-900(R25、R26 :甲 基、E :伸乙基、l+k=17)、A-BPE-500(R25、R26 :氫原 子 ' E :伸乙基、l+k=l〇)、A-B1206PE(下述通式(21)、 R25 :氫原子、R26 :甲基、E1 :伸乙基、E2 :伸丙基、 ll+kl=6 、 12+k2=12)等。 [化 32] 通式(21)(In the formula (20), Ur26 represents a hydrogen atom or a methyl group. The plurality of E independently represent an alkylene group having a carbon number of 2 to a carbon number of 6 (may be the same or different). In the above, examples of the alkylene group (E)' having a carbon number of 2 to a carbon number of 6 include an exoethyl group, a propyl group, an exo-propyl group, a butyl group, an isobutyl group, and a pentyl group. New amyl and so on. In the above formula (20), 1 and k are respectively! The above integer is less than 1〇, and 2Sl+k$20. When 1 and k are each 1 Å or less, the flame retardancy and the resistance to hasi are improved. Further, from the viewpoint of warpage and resolution, it is more preferable that 1 and k in the formula 158118.doc S. 201237101 (20) are 3 or more and 6 or less, respectively, and 1 + kS 12 . Specific examples of the above formula (20) include ARONIX M-208 (R25, R26: hydrogen atom, e: exoethyl, 1, k, and 2) manufactured by Toagosei Co., Ltd., and Shin-Nakamura Chemical Industry Co., Ltd. Manufactured bpe_5〇〇(R25, R26: methyl, E: extended ethyl, l+k=l〇), BPE-900 (R25, R26: methyl, E: extended ethyl, l+k=17) , A-BPE-500 (R25, R26: hydrogen atom 'E: ethyl, l+k=l〇), A-B1206PE (the following general formula (21), R25: hydrogen atom, R26: methyl group, E1: Ethyl, E2: propyl, ll+kl=6, 12+k2=12) and the like. General formula (21)

作為具有2個以上可光聚合之不飽和雙鍵的(曱基)丙烯 酸醋化合物之量,於將聚醯亞胺之量設為丨〇〇質量份之情 形時,自解像性之觀點考慮’較佳的是5質量份以上6〇質 量份以下,更佳的是1 〇質量份以上4〇質量份以下。 再者’於本實施形態之樹脂組合物中,並不作為感光性 樹脂而使用之情形時,未必必須含有作為(D)光敏劑之(曱 基)丙稀酸酯化合物。 (E)光聚合起始劑 作為光聚合起始劑,可使用與上述第2實施形態中所示 之光聚合起始劑相同者。 158118.doc -95· 201237101 (F) 鱗化合物 作為磷化合物,可使用與上述第2實施形態中所示之磷 化合物相同者。又,作為上述通式(17)所示之磷腈化合 物’具體而言可列舉:Rabhle(註冊商標)Fp_3〇〇、Fp_ 390、(伏見製藥所公司製造、簡稱Fp_3〇〇(R2i=R22=4氰基 苯基)、簡稱FP-390(R21=R22=3-曱基苯基))。 (G) 其他化合物 又,於本實施形態之感光性樹脂組合物中,可於不對其 性能造成不良影響的範圍内包含其他化合物。作為其他化 合物,可列舉與上述第2實施形態中所示之其他化合物相 同者》 (H) 感光性膜 又’本實施形態之感光性樹脂組合物可與上述第2實施 形態之感光性樹脂組合物同樣地用於感光性膜之形成中。 (I) 可撓性印刷布線板 又’本貫施形態之感光性樹脂組合物可與上述第2實施 形態之感光性樹脂組合物同樣地適宜用於可撓性印刷布線 板中。 (第4實施形態) 作為可撓性印刷基板之製造中所使用之材料,提出了包 含驗性水溶液可溶、溶劑可溶之聚醯亞胺的樹脂組合物, 前述聚醢亞胺係將聚醯胺酸之全部醯亞胺化而成,且包含 羥基及/或羧基。於該樹脂組合物中,可用作可撓性印刷 布線板之製造中所使用之無須雷射通道加工,藉由驗性水 • 96 - 158118.docThe amount of the (fluorenyl) acryl vinegar compound having two or more photopolymerizable unsaturated double bonds is considered to be self-resolution in the case where the amount of the polyimine is set to 丨〇〇 by mass. It is preferable that it is 5 parts by mass or more and 6 parts by mass or less, and more preferably 1 part by mass or more and 4 parts by mass or less. In the case where the resin composition of the present embodiment is not used as a photosensitive resin, it is not always necessary to contain a (meth) acrylate compound as the (D) photosensitizer. (E) Photopolymerization initiator The photopolymerization initiator can be the same as the photopolymerization initiator described in the second embodiment. 158118.doc -95· 201237101 (F) Scale compound As the phosphorus compound, the same as the phosphorus compound shown in the above second embodiment can be used. In addition, as a phosphazene compound represented by the above-mentioned general formula (17), Rabhle (registered trademark) Fp_3〇〇, Fp_390, (of Fushi Pharmaceutical Co., Ltd., abbreviated as Fp_3〇〇 (R2i=R22=) 4 cyanophenyl), abbreviated as FP-390 (R21=R22=3-mercaptophenyl)). (G) Other compounds Further, in the photosensitive resin composition of the present embodiment, other compounds may be contained in a range which does not adversely affect the performance. The other compound is the same as the other compound described in the second embodiment. (H) Photosensitive film. The photosensitive resin composition of the present embodiment can be combined with the photosensitive resin of the second embodiment. The object is similarly used in the formation of a photosensitive film. (I) Flexible printed wiring board The photosensitive resin composition of the present invention can be suitably used in a flexible printed wiring board in the same manner as the photosensitive resin composition of the second embodiment. (Fourth Embodiment) As a material used in the production of a flexible printed circuit board, a resin composition containing an aqueous solution of an aqueous solution which is soluble in an aqueous solution and a solvent-soluble polyimide is proposed. All of the guanidine acid is imidized and contains a hydroxyl group and/or a carboxyl group. In the resin composition, it can be used as a laser-free processing in the manufacture of a flexible printed wiring board, by using an aqueous test. 96 - 158118.doc

S 201237101 溶液或溶劑而進行通道加工之層間絕緣材料。然而,對可 撓性印刷布線板之製造步驟中所使用之溶劑或驗性水溶液 之耐受性差,引起要求加以改善。又,於藉由加熱加壓壓 製法將脫溶劑之膜形態的絕緣材料積層於布線板上而作為 層間絕緣膜使用之情形時,由於為高分子化合物,因此樹 脂流動性差且通孔埋入性差,期望加以改善。 本發明者等人著眼於使用具有羥基及/或羧基與矽氧烷 部位之溶劑可溶之聚醯亞胺作為(A)高分子化合物。而 且,本發明者等人發現藉由包含作為高分子化合物之 溶劑可溶性聚醯亞胺、(B)作為多官能含羥基化合物之2官 能含羥基化合物、(c)作為多官能交聯性化合物之噁唑啉 化合物,可實現可於交聯反應前進行利用溶劑或鹼性水溶 液之加工,且顯示出良好之通孔埋入性,於交聯反應後具 有優異之對溶劑及鹼性水溶液之耐受性的鹼可溶之樹脂組 合物。以下,對本發明之第4實施形態加以具體說明。 本發明之第4貫施形態之樹脂組合物含有(a)具有經基及/ 或羧基之聚醯亞胺、(b)2官能含羥基化合物、(c_2)噁唑啉 化合物,且相對於聚醯亞胺100質量份而言,2官能含羥基 化合物及噁唑啉化合物之含量為2質量份〜45質量份。 於該樹脂組合物中,聚醯亞胺具有羥基及/或羧基,及2 官能含經基化合物與噁唑啉化合物之含量為特定範圍内, 因此於交聯前,通孔埋入性優異,且可溶於鹼性水溶液 中’於交聯後’變得不溶於鹼性水溶液中。又,聚醯亞胺 具有羥基及/或羧基,因此可與噁唑啉化合物反應而抑制 158118.doc -97- 201237101 翹曲又,2gflb含羥基化舍物並未嵌入至聚醯亞胺之骨 架中而作為第二成分而存在,因此可防止硬化時之聚酿亞 胺骨架之收縮,可抑制翹曲。又,藉由包含噁唑啉化合物 而於低溫下使羧基去活性化,變得可低溫硬化,因此可防 止硬化時之聚醯亞胺骨架之收縮,抑制翹曲。 於該樹脂組合物中,聚醯亞胺具有羥基及/或羧基,因 此於硬化前變得可溶於鹼性水溶液中’於硬化後變得不溶 於鹼性水溶液中,且表現出較高的耐熱性(例如較高的焊 料耐熱性)。又,藉由上述結構可抑制硬化時之翹曲。 又,雖然於聚醯亞胺之結構中具有羥基及/或羧基,但 於樹脂組合物中存在有2官能含羥基化合物,由此可防止 硬化時之聚醯亞胺骨架之收縮。亦即,2官能含羥基化合 物並未嵌入至骨架中,而是作為第二成分而含有’由此可 進而減低由樹脂組合物所得之硬化物之翹曲。又,含有噁 唑啉化合物,因此可藉由與羥基之反應所帶來之高分子 化、父聯之形成而實現於驗性水溶液中之不溶性及進而更 局之财熱性。 又’ 2官能含羥基化合物與噁唑啉化合物之含量相對於 聚醢亞胺100質量份而言為2質量份〜45質量份,且聚醯亞 胺相對於其他成分而言過剩。由於該構成,推測可藉由如 下所示之機構而表現出耐熱性。噁唑啉基與羥基反應而形 成包含C=〇基或nh基之結構,但噁唑淋基進一步與醯亞胺 化反應後所殘存之聚醯亞胺中所含之羥基及/或羧酸反 應’形成包含C=〇基或NH基之醯胺結構或脲結構等。亦S 201237101 Interlayer insulation for channel processing with solution or solvent. However, the solvent or the aqueous solution used in the manufacturing steps of the flexible printed wiring board is poor in tolerance, which causes an improvement in requirements. In addition, when the insulating material in the form of a solvent-free film is laminated on a wiring board by a hot press method, it is used as an interlayer insulating film, and since it is a polymer compound, the resin has poor fluidity and is buried in the via hole. Poor sex and expect to improve. The inventors of the present invention have focused on the use of a solvent-soluble polyimine having a hydroxyl group and/or a carboxyl group and a decane moiety as the (A) polymer compound. Further, the inventors of the present invention have found that by containing a solvent-soluble polyimine as a polymer compound, (B) a bifunctional hydroxyl group-containing compound as a polyfunctional hydroxyl group-containing compound, and (c) as a polyfunctional crosslinkable compound The oxazoline compound can be processed by a solvent or an alkaline aqueous solution before the crosslinking reaction, and exhibits good through-hole embedding property, and has excellent resistance to a solvent and an alkaline aqueous solution after the crosslinking reaction. Receptive alkali soluble resin composition. Hereinafter, a fourth embodiment of the present invention will be specifically described. The resin composition of the fourth aspect of the present invention contains (a) a polyimine having a transradical group and/or a carboxyl group, (b) a bifunctional hydroxyl group-containing compound, and a (c-2) oxazoline compound, and is relative to the poly The content of the bifunctional hydroxyl group-containing compound and the oxazoline compound is from 2 parts by mass to 45 parts by mass per 100 parts by mass of the quinone. In the resin composition, since the polyimine has a hydroxyl group and/or a carboxyl group, and the content of the bifunctional group-containing compound and the oxazoline compound is within a specific range, the through-hole embedding property is excellent before crosslinking. It is soluble in an aqueous alkaline solution and becomes insoluble in an aqueous alkaline solution after 'crosslinking'. Further, since the polyimine has a hydroxyl group and/or a carboxyl group, it can react with the oxazoline compound to inhibit 158118.doc-97-201237101 warping, and the 2gflb hydroxylated material is not embedded in the skeleton of the polyimine. Since it exists as a 2nd component, it can prevent shrinkage of the poly-imine skeleton at the time of hardening, and can suppress a warpage. Further, by deactivating the carboxyl group at a low temperature by containing the oxazoline compound, the carboxyl group can be cured at a low temperature, so that shrinkage of the polyimine skeleton at the time of curing can be prevented, and warpage can be suppressed. In the resin composition, since the polyimine has a hydroxyl group and/or a carboxyl group, it becomes soluble in an alkaline aqueous solution before hardening, and becomes insoluble in an alkaline aqueous solution after hardening, and exhibits a high degree. Heat resistance (for example, higher solder heat resistance). Moreover, the warpage at the time of hardening can be suppressed by the said structure. Further, although the structure of the polyimine has a hydroxyl group and/or a carboxyl group, a bifunctional hydroxyl group-containing compound is present in the resin composition, whereby shrinkage of the polyimine skeleton at the time of curing can be prevented. That is, the bifunctional hydroxyl group-containing compound is not embedded in the skeleton, but is contained as the second component, whereby the warpage of the cured product obtained from the resin composition can be further reduced. Further, since the oxazoline compound is contained, it is possible to achieve insolubility in the aqueous solution and further increase in the heat resistance by the formation of the polymer and the formation of the parent by the reaction with the hydroxyl group. Further, the content of the difunctional hydroxy group-containing compound and the oxazoline compound is from 2 parts by mass to 45 parts by mass per 100 parts by mass of the polyimine, and the polyimine is excessive with respect to the other components. Due to this configuration, it is presumed that heat resistance can be exhibited by the mechanism as shown below. The oxazoline group reacts with a hydroxyl group to form a structure comprising a C=mercapto group or an nh group, but the oxazole and the carboxylic acid contained in the polyimine remaining after the oxime imidization reaction The reaction 'forms a guanamine structure or a urea structure containing a C=mercapto group or an NH group. also

158118.doc _98 S 201237101 即’藉由熱硬化而形成聚醯亞胺與噁唑啉化合物之間的化 學性交聯、以及2官能含經基化合物與》惡》»坐琳化合物之間 的化學性交聯。如上所述,藉由複數種之交聯而形成3維 交聯’進而使耐熱性優異之聚醯亞胺過剩,藉此而表現出 進一步之对熱性。 其次’對構成樹脂組合物之各組合物之詳細加以說明。 (a)聚醯亞胺 本實施形態之樹脂組合物中所使用之聚醯亞胺具有羥基 及/或羧基作為結構單元。如此藉由使聚醢亞胺結構部分 與多官能交聯性化合物之交聯性官能基反應而硬化,藉此 而顯示硬化後之於鹼性水溶液中之不溶性。又,藉由與噁 唑啉化合物及/或嵌段異氰酸酯化合物之反應而使於低溫 硬化時所殘存之羧基去活性化,可藉由噁唑啉化合物及/ 或嵌段異氰酸醋化合物與2官能含經基化合物而抑制勉 曲。 本實施形態之樹脂組合物中所使用之聚醯亞胺具有羥基 及/或羧基作為結構單元。羥基及/或羧基可藉由使用具有 羥基及/或羧基之二胺而導入至聚醯亞胺中。作為此種二 胺,可列舉2:,5-二胺基苯酚、3,5-二胺基笨酚、4,4l-(3,3’-二羥基)二胺基聯苯、4,4’-(2,2’-二羥基)二胺基聯苯、2,2|-雙(3-胺基-4-羥基苯基)六氟丙烷、3-羥基-4-胺基聯苯 (11入6)、4,4,-(3,3,-二羧基)二苯基胺、亞甲基雙胺基苯甲 酸(MBAA)、2,5-二胺基苯曱酸(DABA)、3,3,-二羧基-4,4丨-二胺基二苯醚等。 158118.doc •99- 201237101 關於聚醢亞胺之其他構成,可使用與上述第卬施形態 才同者再者於上述之實施形態中,對使用具有經基及/ 或缓基與碎氧烧部位之溶劑可溶之聚酿亞胺作為⑷高分 子化合物的第2態樣之樹脂組合物進行了說明,但亦可藉 由於起到本發明之效果的範圍内使用實質上不含聚酿胺酸 結構的聚醯亞胺,而作為上述第1態樣之樹脂組合物使 用。 作為本實施形態之聚醯亞胺之製造方法,可使用與上述 之第1實施形態中所示之聚醯亞胺之製造方法相同之方 法。 (b) 2官能含羥基化合物 本實施形態之樹脂組合物中所使用之2官能含經基化合 物是指相對於-根分子鏈而包含2個經基者。可列舉於骨 架中包含脂肪族、芳香族、脂環基等烴基者,自與π惡唾琳 化合物交聯之情形時提高絕緣性之方面考慮。較佳的是於 骨架中具有下述式(14)所表示之結構者,自抑㈣曲之方 面考慮&佳的疋包含脂肪族之化合物。其原因在於:藉 由具有脂肪族之骨架,可不損及勉曲之抑制效果地抑制吸 濕性,且即使於吸濕時亦可表現出較高之絕緣性^再者, 於包含長狀脂㈣基之情料效果提高而較 佳0 [化 33] 通式(14)158118.doc _98 S 201237101 ie, the chemical cross-linking between the polyimine and the oxazoline compound formed by thermal hardening, and the chemical interaction between the bifunctional ketone-containing compound and the oxalate compound Union. As described above, the cross-linking of a plurality of types forms a three-dimensional cross-linking, and the poly-imine which is excellent in heat resistance is excessive, whereby further thermal properties are exhibited. Next, the details of each composition constituting the resin composition will be described. (a) Polyimine The polyimine used in the resin composition of the present embodiment has a hydroxyl group and/or a carboxyl group as a structural unit. Thus, the polyimine structure moiety is hardened by reacting with the crosslinkable functional group of the polyfunctional crosslinkable compound, thereby exhibiting insolubility in the aqueous alkaline solution after hardening. Further, by decomposing the carboxyl group remaining at the time of low-temperature curing by reaction with an oxazoline compound and/or a blocked isocyanate compound, an oxazoline compound and/or a blocked isocyanate compound can be used. The bifunctional group contains a trans-based compound to suppress distortion. The polyimine used in the resin composition of the present embodiment has a hydroxyl group and/or a carboxyl group as a structural unit. The hydroxyl group and/or the carboxyl group can be introduced into the polyimide by using a diamine having a hydroxyl group and/or a carboxyl group. Examples of such a diamine include 2:5-diaminophenol, 3,5-diaminophenol, 4,4l-(3,3'-dihydroxy)diaminebiphenyl, 4,4. '-(2,2'-Dihydroxy)diaminobiphenyl, 2,2|-bis(3-amino-4-hydroxyphenyl)hexafluoropropane, 3-hydroxy-4-aminobiphenyl ( 11 into 6), 4,4,-(3,3,-dicarboxy)diphenylamine, methylenebisaminobenzoic acid (MBAA), 2,5-diaminobenzoic acid (DABA), 3,3,-dicarboxy-4,4丨-diaminodiphenyl ether and the like. 158118.doc •99- 201237101 For the other constitution of polyimine, the same can be used in the above embodiment, and in the above embodiments, the use of a base and/or a slow base and a broken oxygen The solvent-soluble polyi-imine of the site is described as the resin composition of the second aspect of the polymer compound (4), but it is also possible to use substantially no polyamine in the range of the effect of the present invention. The polyethylenimine having an acid structure is used as the resin composition of the first aspect described above. As the method for producing the polyimine of the present embodiment, the same method as the method for producing the polyimine shown in the first embodiment described above can be used. (b) Bifunctional hydroxyl group-containing compound The bifunctional group-containing compound used in the resin composition of the present embodiment means a matrix containing two base groups with respect to the -molecular chain. In the case where a hydrocarbon group such as an aliphatic, aromatic or alicyclic group is contained in the skeleton, it is considered from the viewpoint of improving the insulating property in the case of crosslinking with the π-causal compound. It is preferred to have a structure represented by the following formula (14) in the skeleton, and it is considered to be a compound of the formula (14) which contains an aliphatic compound. The reason for this is that by having an aliphatic skeleton, the hygroscopicity can be suppressed without impairing the inhibitory effect of the distortion, and even if it absorbs moisture, it exhibits high insulation properties, and further contains long fat. (4) The effect of the base is improved and preferably 0 [Chemical 33] General formula (14)

H04fx^(YH 畔(X 计 OH 158118.doc -100- 201237101 (於式(14)中,X係芳香族,Y係碳數為1〜碳數為10之脂肪 族,Ζ係選自醚基、酯基、碳酸酯基、胺基甲酸酯基、脲 基之官能基,h=0〜2之整數,i=0〜1之整數,j = l〜1000之整 數。) 又,為了與1惡唾琳化合物交聯,較佳的是多盼末端化合 物。又,特別是於電子材料用途中,較佳的是不含氟或氯 等鹵素者。 作為2官能含羥基化合物之具體例,可列舉三菱化學公 司製造之PTMG1000等聚丁二醇,日本曹達公司製造之G-1000等聚丁二烯二醇、GI-1000等氫化聚丁二烯二醇,旭 化成化學公司製造之DURANOL T5651、DURANOL T5652 > DURANOL T407 1及大赛路化學工業公司製造之 PLACCEL CD等聚碳酸酯二醇,大赛璐化學工業公司製造 之PLACCEL 200等聚己内酯二醇、雙酚A等雙酚類,新日 本理化公司製造之Rikabinol HB等氫化雙酚類,信越化學 公司製造之X-22-1821,道康寧公司製造之BY16-752、 BY16-799等兩末端酚改性聚矽氧等。 於該等中,自提高絕緣性之方面考慮,較佳的是兩末端 酚改性聚矽氧、聚丁二烯二醇、氫化聚丁二烯二醇、聚碳 酸酯二醇,自減低翹曲之方面考慮,較佳的是兩末端酚改 性聚矽氧、聚碳酸酯二醇。 又,作為2官能含羥基化合物,自翹曲之減低與於有機 溶劑中之溶解性的方面考慮,較佳的是於室溫下為液狀 者。較佳的是數量平均分子量為500〜3000者,特佳的是數 158118.doc • 101 - 201237101 量平均分子量為500〜2000者。 作為2官能含經基化合物’自同時實現龜曲之減低、焊 料耐熱性及耐化學品性之方面考慮,相對於樹脂組合物 100質量份而言,較佳的是含有3質量份〜70質量份,更佳 的是含有5質量份〜60質量份。 再者,於本實施形態中,作為(B)多官能含羥基化合 物’對含有2個羥基之2官能含羥基化合物進行了說明,但 亦可於起到本發明之效果的範圍内使用含有2個以上經基 之多元醇等。 (c-2) °惡坐琳化合物 本實施形態之樹脂組合物中所使用之„惡唾琳化合物係於 分子内具有2個以上噁唑啉基之化合物。作為噁唑啉化合 物七,較佳的是於聚醯亞胺(高分子化合物)及/或2官能含 羥基化合物之間形成交聯時,於該交聯中具有至少2個 C=0基及/或ΝΗ基者。 作為噁唑啉化合物之具體例,可列舉:丨’弘雙^^二氫_ 2_噁唑基)苯、日本觸媒公司製造之K2〇1〇E、K2〇2〇e、 K 203 0E、2,6-雙(4-異丙基_2_。惡唾嘛_2_基)°比咬、2,6-雙 (4-苯基-2-噁唑啉-2-基)吡啶、2,2ι_亞異丙基雙(4_苯基 噁唑啉)、2,2’-亞異丙基雙(4_第三丁基_2 -噁唑啉)等。該等 噁唑啉化合物可單獨使用,亦可將2種以上組合使用。 可藉由對上述樹脂組合物進行加熱而獲得硬化物。對加 熱之態樣並無特別限定’為了可溶於鹼性水溶液中,較佳 的是於50°C〜140°C下進行丨分鐘〜6〇分鐘之加熱。另.外於 158118.doc 201237101H04fx^(YH side (X OH 158118.doc -100- 201237101 (in the formula (14), X-based aromatic, Y-based carbon number is 1 to an aliphatic group having a carbon number of 10, and the lanthanide is selected from an ether group. , ester group, carbonate group, urethane group, urea group functional group, h=0~2 integer, i=0~1 integer, j=l~1000 integer.) Again, in order to 1 cross-linking of a smectite compound, preferably a terminal compound. Further, particularly in the use of an electronic material, it is preferably a halogen such as fluorine or chlorine. As a specific example of a bifunctional hydroxy group-containing compound, Polybutadiene glycol such as PTMG1000 manufactured by Mitsubishi Chemical Corporation, polybutadiene diol such as G-1000 manufactured by Japan Soda Co., Ltd., hydrogenated polybutadiene diol such as GI-1000, and DURANOL T5651 manufactured by Asahi Kasei Chemicals Co., Ltd. DURANOL T5652 > DURANOL T407 1 and polycarbonate diols such as PLACCEL CD manufactured by Dasailu Chemical Industry Co., Ltd., polycaprolactone diols such as PLACCEL 200 manufactured by Daicel Chemical Industry Co., Ltd., bisphenols such as bisphenol A, new Hydrogenated bisphenols such as Rikabinol HB manufactured by Japan Chemical and Chemical Corporation, X-22-182 manufactured by Shin-Etsu Chemical Co., Ltd. 1, BY16-752, BY16-799 and other two-terminal phenol-modified polyoxane manufactured by Dow Corning, etc. In these, from the viewpoint of improving insulation, it is preferred to have two-terminal phenol-modified polyoxane, The polybutadiene diol, the hydrogenated polybutadiene diol, and the polycarbonate diol are preferably a two-terminal phenol-modified polyfluorene oxide or a polycarbonate diol from the viewpoint of reducing warpage. The difunctional hydroxyl group-containing compound is preferably liquid at room temperature, and preferably has a number average molecular weight of 500 to 3,000, from the viewpoint of a decrease in warpage and solubility in an organic solvent. The most preferable is the number of 158118.doc • 101 - 201237101. The average molecular weight is 500~2000. As a bifunctional trans-containing compound, it is considered to reduce the tormentation, solder heat resistance and chemical resistance. The amount of the resin composition is preferably from 3 parts by mass to 70 parts by mass, more preferably from 5 parts by mass to 60 parts by mass, based on 100 parts by mass of the resin composition. Further, in the present embodiment, as (B) Functional hydroxyl-containing compound's 2-functional inclusion of two hydroxyl groups Although the base compound has been described, a polyol containing two or more kinds of a base group may be used in the range in which the effects of the present invention are used. (c-2) ° The oxalate compound is in the resin composition of the present embodiment. The oxalin compound is a compound having two or more oxazoline groups in the molecule. As the oxazoline compound VII, it is preferably a polyimine (polymer compound) and/or a bifunctional hydroxyl group. When cross-linking is formed between the compounds, there are at least two C=0 bases and/or fluorenyl groups in the cross-linking. Specific examples of the oxazoline compound include: 丨 'Hongshuang ^^ dihydro _ 2 oxazolyl) benzene, K2 〇 1 〇 E, K 2 〇 2 〇 e, K 203 0E manufactured by Nippon Shokubai Co., Ltd. , 2,6-bis(4-isopropyl-2-y. oxazol-2-yl), bite, 2,6-bis(4-phenyl-2-oxazolin-2-yl)pyridine, 2,2ι_isopropylidenebis(4-phenyloxazoline), 2,2'-isopropylidenebis(4_t-butyl-2-oxazoline), and the like. These oxazoline compounds may be used singly or in combination of two or more. The cured product can be obtained by heating the above resin composition. The heating state is not particularly limited. In order to be soluble in an alkaline aqueous solution, it is preferred to carry out heating at 50 ° C to 140 ° C for 丨 minute to 6 〇 minutes. Another. Outside 158118.doc 201237101

應’變得不溶於鹼性水溶液中。Should become 'insoluble in alkaline aqueous solution.

時間之整體中固定, ,於空氣或氮氣等惰性環境下進行加 由此而進行交聯。加熱溫度可於處理 ,亦可緩緩升溫。樹脂組合物膜可藉由 公知之網版印刷或精密滴塗法而印刷於可撓性印刷電路基 板或半導體晶圓表面而形成β 樹脂組合物可藉由熱硬化而顯示出優異之耐熱性,因此 可用作半導體元件之表面硬化膜、層間絕緣膜、黏結片、 印刷布線板用保護絕緣膜、印刷電路基板之表面保護膜/ 層間絕緣膜等,適用於各種電子零件中。例如,可於銅箔 F2-WS(12 μπι)上塗佈樹脂組合物而於95«»c下進行12分鐘之 乾燥,製作絕緣層之厚度為15 的附有樹脂之銅箔。作 為可撓性之印刷電路基板’使用Espanex Μ(新日鐵化學公 司製造)(絕緣層之厚度為25 μηι、導體層為銅箔F2-WS(18 Μ·1»)),藉由真空壓製機將附有樹脂之銅箔於1 〇〇它、4 下積層於該電路基板上1分鐘,於銅箔上形成感光性蝕刻 阻劑層,藉由鹼性水溶液使蝕刻阻劑與樹脂組合物溶解, 形成通道之後’將保護層剝離,於18〇eC下硬化1小時,藉 此獲得層間絕緣膜。如上所述而形成之層間絕緣膜可發揮 良好之絕緣特性。再者,本實施形態中之樹脂組合物之熱 硬化於比較低之溫度條件(例如160°C〜200。〇下進行,因 158118.doc -103· 201237101 此並不產生鋼之氧化。 又,使用ESpanex M(新日鐵化學公司製造、絕緣層之厚 度為25 μηι、導體層為銅箔F2_ws〇8 μιη))之雙面銅箔板, 製成雙面零件安|電路基板,於該電路基板上塗佈樹脂組 合物而加以乾燥,藉由鹼性水溶液而於加工後硬化,亦可 將樹脂組合物用作表面保護膜,發揮良好之絕緣特性。此 處表面保°蒦膜之膜厚較佳的是1 pm〜50 μιη。其原因在 於.藉由使膜厚成為i μπι以上而使操作變容易,藉由使其 為50 μιη以下,可是使折彎變容易從而使組入變容易。 再者,亦可藉由使本實施形態之樹脂組合物含有(D)光 敏劑,從而作為感光性樹脂組合物而使用。又,亦可藉由 見感光性樹脂組合物塗佈於基材上,可獲得感光性膜。 又,自提高阻燃性之觀點考慮,本實施形態之樹脂組合 物亦可含有(F)磷化合物而使用。作為(F)磷化合物可使 用碟酸酯化合物或鱗腈化合物等。 進而,本貫施形態之樹脂組合物可藉由於鋼箔上設置樹 脂組合物而加以乾燥,作為多層可撓性布線板等之層間絕 緣膜而適宜地使用。又,本實施形態之樹脂組合物可藉由 以覆蓋基材上所形成之布線圖案之方式而設置樹脂組合 物,作為布線板之布線圖案之保護膜而適宜地使用。 再者,樹脂組合物除了聚醯亞胺、2官能含羥基化合 物、噁唑啉化合物以外,亦可含有有機溶劑。其原因在 於.藉由設為溶解於有機溶劑中之狀態,可作為清漆而較 佳地使用。 158118.doc •104- 201237101 二::此種有機溶劑,可列舉:n,n•二甲基乙醯胺、n,n_ 醯胺、N,N-二甲基甲醯胺、N,N二乙基曱醯胺、 t、、/ Λ洛〇定綱等酿胺溶劑,γ-丁内6旨、γ·戊内酿等内 6曰》容劑,二甲其;π; 土亞颯、二乙基亞碾、六曱基亞砜等含硫系 ^劑’曱⑲、苯盼㈣系溶劑,二乙二醇二二甘醇 ·、) 一乙一醇二甲醚(三甘醇二曱醚)、四乙醇二甲 越、二°惡烧、四氯。夫。南、笨曱酸丁醋、苯曱酸乙醋、苯甲 甲-曰等峻冷劑。又’該等有機溶劑可單獨使用,亦可複 數種併用。特別是自高彿點與低吸水性之方面考慮,較佳 的疋使用γ 丁内g曰、二甘醇二曱醚、苯曱酸丁酯、苯曱酸 乙酯。 [實施例] 以下,對用以使本發明之效果明確而進行之實施例加以 說明。再者,本發明並不受以下實施例任何限定。 關於本發明之第1實施形態之樹脂組合物,參照以下之 實施例1及比較例1而進行說明。再者,於以下之實施例丄 中,試樣1〜試樣32係第2態樣之樹脂組合物,試樣33〜試樣 3 5係第1態樣之樹脂組合物。 (實施例1) 製作包含樹脂組合物之硬化膜的試樣1,確認其特性。 於本實施例中,作為樹脂組合物,使用於醢亞胺化率為 88%之聚醢亞胺(以下稱為聚醯亞胺A)之清漆中添加作為聚 碳酸酯二醇之旭化成化學公司製造之DURANOL T5651(分 子量1000 ;以下、多官能含經基化合物Α)、作為六亞甲基 158118.doc -105· 201237101 二異氰酸酯系嵌段異氰酸酯之旭化成化學公司製造之 Duranate SBN-70D(NCO含量為10_2 wt% ;以下稱為異氰酸 酯化合物A)而成者。相對於聚醯亞胺a 1 〇〇質量份而言, 多官能含羥基化合物A為5質量份,異氰酸酯化合物A為5 質量份。又,以相對於樹脂組合物而言聚醯亞胺A成為30 質量%之方式進行調合。於此情形時,多官能含羥基化合 物中所含之羥基與異氰酸酯化合物A中所含之異氰酸酯基 之莫耳比係羥基/異氰酸酯基=0.9。以下,對聚醯亞胺a之 合成方法、硬化膜之製作方法、及各特性之評價方法加以 [聚醯亞胺A] 對聚醯亞胺A之合成方法加以說明。首先,於三口可分 離式燒瓶上安裝氮氣導入管、溫度計、具有水分分離阱之 球型冷凝管。於冰水浴〇°C下,裝入JEFFAMINE XTJ-542(Huntsman公司製造、重量平均分子量i〇〇〇)4〇 g、ι,3-雙(3_胺基苯氧基)苯(八?8)23.519§、鄰苯二甲酸酐2.027 g、γ-丁内酯(GBL)60 g、苯甲酸乙酯(BAEE)60 g、甲苯20 g、Y-戊内酯12 g、η比啶18 g,樓拌至均勻。進而,每次少 量地添加3,3,,4,4,-二苯曱酮四曱酸二酐(BTDA)18.966 g、 3,3',4,4'-二苯基礙四甲酸二針(〇8〇入)19.616§»於0.5小時 之攪拌後,升溫至170°C,加熱4小時《於反應中,所副生 之水與甲苯共沸,使用具有水分分離阱之球型冷凝管而於 回流下進行脫水。除去副生水之後,停止回流,將甲苯全 部除去。將系統冷卻至60°C之後,添加BTDA 5.293 g、 • 106- 158118.docIt is fixed in the whole time, and is cross-linked by adding it in an inert environment such as air or nitrogen. The heating temperature can be treated and the temperature can be raised slowly. The resin composition film can be printed on a surface of a flexible printed circuit board or a semiconductor wafer by a known screen printing or precision dispensing method to form a β resin composition which can exhibit excellent heat resistance by thermal curing. Therefore, it can be used as a surface cured film of a semiconductor element, an interlayer insulating film, a bonded sheet, a protective insulating film for a printed wiring board, a surface protective film of a printed circuit board, an interlayer insulating film, and the like, and is suitable for use in various electronic parts. For example, the resin composition may be applied to a copper foil F2-WS (12 μm) and dried at 95 «»c for 12 minutes to prepare a resin-attached copper foil having an insulating layer thickness of 15. As a flexible printed circuit board, 'Espanex Μ (manufactured by Nippon Steel Chemical Co., Ltd.) (the thickness of the insulating layer is 25 μηι, and the conductor layer is copper foil F2-WS (18 Μ·1»)), by vacuum pressing The copper foil with resin is laminated on the circuit substrate for 1 minute, and a photosensitive etching resist layer is formed on the copper foil, and the etching resist and the resin composition are made of an alkaline aqueous solution. After dissolving, after forming the channel, the protective layer was peeled off and hardened at 18 ° C for 1 hour, whereby an interlayer insulating film was obtained. The interlayer insulating film formed as described above can exhibit good insulating properties. Further, the resin composition of the present embodiment is thermally cured at a relatively low temperature condition (for example, 160 ° C to 200 ° 〇 〇, because 158118.doc -103· 201237101 does not cause oxidation of steel. A double-sided copper foil plate made of ESpanex M (manufactured by Nippon Steel Chemical Co., Ltd., having a thickness of 25 μηη of insulating layer and a copper foil F2_ws〇8 μιη) is used as a double-sided component circuit board. The resin composition is applied onto the substrate, dried, and cured by an aqueous alkaline solution. The resin composition can also be used as a surface protective film to exhibit good insulating properties. The film thickness of the surface film is preferably from 1 pm to 50 μm. The reason for this is that the operation is facilitated by making the film thickness i μπι or more, and if it is 50 μm or less, the bending can be easily made and the assembly can be facilitated. In addition, the resin composition of the present embodiment can be used as a photosensitive resin composition by containing (D) a photosensitive agent. Further, a photosensitive film can be obtained by applying a photosensitive resin composition to a substrate. Further, the resin composition of the present embodiment may contain (F) a phosphorus compound and may be used from the viewpoint of improving flame retardancy. As the (F) phosphorus compound, a dish ester compound or a scalonitrile compound or the like can be used. Furthermore, the resin composition of the present invention can be suitably used as a layer-insulating film such as a multilayer flexible wiring board by drying a resin composition on a steel foil. In addition, the resin composition of the present embodiment can be suitably used as a protective film for a wiring pattern of a wiring board by providing a resin composition so as to cover a wiring pattern formed on a substrate. Further, the resin composition may contain an organic solvent in addition to the polyimine, the bifunctional hydroxyl group-containing compound, and the oxazoline compound. The reason for this is that it can be preferably used as a varnish by being dissolved in an organic solvent. 158118.doc •104- 201237101 2:: This organic solvent can be enumerated as: n, n• dimethyl acetamide, n, n_ decylamine, N, N-dimethylformamide, N, N Ethyl amide, t, , / Λ 〇 〇 〇 酿 酿 酿 酿 酿 酿 酿 γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ Ethyl sub-milling, hexamethylene sulfoxide and other sulfur-containing agents '曱19, benzene (four) solvent, diethylene glycol diethylene glycol·,) monoethylene glycol dimethyl ether (triethylene glycol dioxime ether) ), tetraethanol dimethoate, dioxane, tetrachlorine. husband. South, astringent vinegar, benzoic acid ethyl vinegar, benzomethazine, etc. Further, these organic solvents may be used singly or in combination of plural kinds. In particular, from the viewpoint of the high Buddha point and low water absorption, it is preferred to use γ butyl peptone, diethylene glycol dioxime ether, butyl benzoate or ethyl benzoate. [Examples] Hereinafter, examples for carrying out the effects of the present invention will be described. Further, the present invention is not limited by the following examples. The resin composition of the first embodiment of the present invention will be described with reference to the following Example 1 and Comparative Example 1. Further, in the following examples, Samples 1 to 32 are the resin compositions of the second aspect, and Samples 33 to 35 are the resin compositions of the first aspect. (Example 1) A sample 1 containing a cured film of a resin composition was prepared, and its characteristics were confirmed. In the present embodiment, as a resin composition, Asahi Kasei Chemical Co., Ltd., which is a polycarbonate diol, is added to a varnish of a polyimine (hereinafter referred to as polyimine) having a quinone imidization ratio of 88%. DURANOL SBN-70D (NCO content) manufactured by Asahi Kasei Chemicals Co., Ltd., manufactured as DURANOL T5651 (molecular weight 1000; or less, polyfunctional ketone-containing compound oxime), hexamethylene 158118.doc-105·201237101 diisocyanate-block isocyanate It is 10_2 wt%; hereinafter referred to as isocyanate compound A). The polyfunctional hydroxyl group-containing compound A was 5 parts by mass, and the isocyanate compound A was 5 parts by mass based on the mass fraction of the polyimine. In addition, the polyamidimide A was blended in an amount of 30% by mass based on the resin composition. In this case, the hydroxyl group contained in the polyfunctional hydroxyl group-containing compound and the mole ratio hydroxyl group/isocyanate group of the isocyanate group contained in the isocyanate compound A are 0.9. Hereinafter, a method for synthesizing polyiminamide a, a method for producing a cured film, and a method for evaluating each characteristic will be described. [Polyimide A] The method for synthesizing polyimine A will be described. First, a nitrogen inlet tube, a thermometer, and a spherical condenser having a moisture separation well were attached to a three-neck separable flask. JEFFAMINE XTJ-542 (manufactured by Huntsman, weight average molecular weight i〇〇〇) 4〇g, ι,3-bis(3-aminophenoxy)benzene (eight-8) was placed in an ice water bath at °C. ) 23.519 §, phthalic anhydride 2.027 g, γ-butyrolactone (GBL) 60 g, ethyl benzoate (BAEE) 60 g, toluene 20 g, Y-valerolactone 12 g, η pyridine 18 g , the floor is mixed evenly. Further, 3,3,4,4,-dibenzophenone tetradecanoic acid dianhydride (BTDA) 18.966 g, 3,3',4,4'-diphenyltetracarboxylic acid two needles were added in small amounts each time. (〇8〇) 19.616§» After stirring for 0.5 hours, the temperature was raised to 170 ° C and heated for 4 hours. In the reaction, the by-produced water was azeotroped with toluene, and a spherical condenser having a moisture separation well was used. Dehydration is carried out under reflux. After removing the by-produced water, the reflux was stopped, and the toluene was completely removed. After cooling the system to 60 ° C, add BTDA 5.293 g, • 106- 158118.doc

S 201237101 APB 4_780 g。於5小時後冷卻至室溫。其次,藉由5 μπι之 過濾器對生成物進行加壓過濾’藉此獲得醯亞胺化率為 88%之聚醯亞胺Α清漆。 再者,上述之醯亞胺化率可藉由IR法而求出。具體而 言,以基於1480 cm·1附近之苯環的峰值為基準,根據與基 於13 80 cm·1附近之生成醯亞胺環之峰值的吸光度之比而求 出醯亞胺化率。任意之溫度下之醯亞胺化率C係將任意之 溫度下之1480 cm1之吸光度設為A3,將1380 cm·1之吸光度設 為 B3 ’ 根據C=((B3/A3-Bl/Al)/(B2/A2-Bl/Al))xl〇〇(%)之 式而算出。此處’將於50°C下合成於8(TC下乾燥之樹脂的 於1480 cm·1下之吸光度設為A1,將1380 cm·1之吸光度設 為B1。又’將於大氣環境下、22〇。(:下進行了 60分鐘熱處 理之樹脂的於1480 cm·1下之吸光度設為A2,將1380 cnT1 之吸光度設為B2。又’關於各峰值,於峰值前後,以將峰 值之谷與谷連結之方式畫適宜之基線,將各峰值距基線之 高度(亦即,各峰值點、與自各峰值向基線降落之線與基 線之交點的距離)定義為各自之吸光度。再者,於上述式 中所算出之醯亞胺化率C是將於22〇。(:下進行60分鐘熱處理 時之醯亞胺化率設為1 〇〇%之值。 [硬化膜之製作] 藉由棒式塗佈機將上述樹脂組合物塗佈於基板上,於室 溫下進行5分鐘〜10分鐘之均化,於熱風烘箱中,於12〇<^ 下加熱60分鐘,其次於180°c下加熱30分鐘而進行乾燥硬 化’製作試樣1。作為基板,使用東麗杜邦公司製造之 158118.doc 201237101S 201237101 APB 4_780 g. After 5 hours, it was cooled to room temperature. Next, the resultant was subjected to pressure filtration by a filter of 5 μm to thereby obtain a polyimide varnish having a ruthenium iodide ratio of 88%. Further, the above imidization ratio can be determined by an IR method. Specifically, based on the peak of the benzene ring in the vicinity of 1480 cm·1, the ruthenium imidization ratio was determined based on the ratio of the absorbance to the peak of the quinone ring formed around 13 80 cm·1. The imidization rate of C at any temperature is set to A3 at an absorbance of 1480 cm1 at any temperature, and the absorbance at 1380 cm·1 is set to B3 ' according to C=((B3/A3-Bl/Al) /(B2/A2-Bl/Al))xl〇〇(%) is calculated. Here, 'synthesized at 50 ° C at 8 (the absorbance at 1480 cm·1 of the resin dried under TC is set to A1, and the absorbance at 1380 cm·1 is set to B1. Also 'will be in the atmosphere, 22〇.(: The absorbance at 1480 cm·1 of the resin subjected to heat treatment for 60 minutes is set to A2, and the absorbance of 1380 cnT1 is set to B2. Also for each peak, before and after the peak, to the valley of the peak Draw a suitable baseline by connecting the valleys, and define the height of each peak from the baseline (that is, the distance between each peak point and the line from the peak to the baseline to the intersection of the baseline) as the respective absorbance. The hydrazine imidization ratio C calculated in the above formula is 22 〇. (The value of the ruthenium imidization ratio at the time of heat treatment for 60 minutes is set to 1 〇〇%. [Production of cured film] by rod The above-mentioned resin composition was applied onto a substrate by a coater, and homogenized at room temperature for 5 minutes to 10 minutes, and heated in a hot air oven at 12 Torr for 60 minutes, followed by 180 ° C. After drying for 30 minutes, drying and hardening was performed to prepare sample 1. As a substrate, Toray Dupont was used. Manufacture of 158118.doc 201237101

Kapton(註冊商標)i〇〇EN。又,將樹脂組合物塗佈於基板 之单面上。乾燥硬化後之膜厚為約20 μιη。 [翹曲之評價] 翹曲之評價係藉由試樣四角之隆起而評價。具體而言, 於23°C '濕度50%之環境下,將上述試樣1切斷為5 cmx5 cm, 測地角相對於中央部之隆起距離而作為翹曲。將勉曲為1〇 mm以下者作為良好而記為〇,將5 mm以下者作為更良好 而記為◎,將1 5 mm以下者記為△,將超過15 mm者作為不 良而記為X。 [耐焊料性(耐熱性)之評價] 耐焊料性係基於JPCA-BM02規格,將切斷為3 cmx3 cm 之試樣1於焊料浴中260°C下浸潰60秒而進行評價。目視檢 查外觀,確認變形、溶解潰等之變化之有無,將於整體之 面積之90%以上未發現變化之情形記為〇,見於整體之面 積之50%〜90%未發現變化之情形記為△,將未發現變化之 區域不足50%之情形記為X。 [耐化學品性之評價] 於室溫下將上述試樣1於丁酮中浸潰1〇分鐘,目視檢查 塗膜外觀,確認變形、溶解潰等之變化之有無。將於整體 之面積之90%以上未發現變化之情形記為〇,見於整體之 面積之50。/。〜90%未發現變化之情形記為△,將未發現變化 之區域不足50%之情形記為χ。 [於溫度85°C、濕度85%下之絕緣電阻之評價] 作為可撓性印刷電路基板之基材,使用Espanex M(新曰 158118.doc -108- 201237101 鐵化學公司製造)(絕緣層之厚度為25 μπι、導體層為銅箔 F2-WS(18 μιη)) ’製作線寬/線距為5〇 μπι/5〇 μηι之梳形布線 板。於該電路基板上之一部分上,以硬化後之膜厚成為15 μιη之方式塗佈樹脂組合物而使其硬化,作為試樣! Β。硬 化之條件與試樣1Α相同。其後,一面於dc 50 V、85°C、 濕度85°/❶之條件下放置8小時一面測定電阻,將絕緣電阻 超過ΙΟ9 Ω之情形記為〇,將未達到1〇9 Ω之情形記為χ。 [100°C〜220°C之黏度之評價] 100 C〜220 C之黏度係使用TA Instruments公司製造之測 定機AR-G2,使用積層有27枚自樹脂膜(前述樹脂膜係從以 銅洎為基材之樹脂膜將銅箔姓刻除去而所得)的試樣,於 轉子.直徑為8 mm之平行板、應變:〇· 1%、頻率:! Hz、 法線應力:0.1 N(100 g)下進行評價。將i〇〇〇c〜22〇eC之黏 度為5000 Pa»s〜100000 Pa.s之範圍之情形記為〇,將處於 不足5000 Pa · s或超過100000 Pa . s之區域的情況記為X。 [彈性區域與塑性區域之評價] 彈性區域與塑性區域係基於jIS_C_2151規格,於夾盤間 距離為50 mm、100 mm/min下,對寬5 mm、長度為100 mm之試樣進行拉伸試驗’將至降伏點為止之伸長率設為 彈性區域,將自降伏點至斷裂點之伸長率作為塑性區域而 進行評價。將彈性區域為伸長率不足20%且伸長率為5〇〇/0 以上之塑性區域之情形記為〇,將彈性區域為伸長率為 20%以上或伸長率不足50%之塑性區域之情形記為x。 [層間絕緣電阻之評價] 158U8.doc 109- 201237101 層間絕緣電阻係使用Espanex Μ(新日鐵化學公司製 造)(絕緣層之厚度為25 μηι、導體層為銅箔F2_WS(18 μιη)) 作為可撓性印刷電路基板之基材,積層以銅箔為基材之樹 脂膜,其後,一面於DC 50 V、85eC、濕度85¾之條件下 放置1000小時一面測定電阻、將樹脂膜間之絕緣電阻為 1 Λ 9 D以上之情形記為〇’將未達到109 Ω之情形記為X。 [通孔埋入性之評價] 通孔埋入性係藉由環氧樹脂包埋所製作之4層布線板, 進行切斷、研磨’藉由光學顯微鏡進行評價。將樹脂無間 隙地埋入至通孔中之情形記為〇,將於通孔内觀察到間隙 之情形記為X。 [冷熱衝擊試驗之評價] 冷熱衝擊試驗係基於JPCA-HD01-2003規格,於-4(TC、 120°C、1000循環下評價所製作之4層布線板。將循環中之 接續電阻之變動為1 〇%以内之情形記為〇,將超過1 〇%之 情形記為X。 [樹脂流動性之評價] 樹脂流動性係用真空壓製機(180〇C、20分鐘、4 MPa)將 20 cm見方之以銅箔為基材之樹脂片與銅箔F2_ws(12 ^爪) 積層後’藉由目視評價試樣端部之樹脂之滲出。將樹脂之 滲出為1 mm以下之情形記為〇,將超過丨mm之情形記為 X 0 將試樣1 (試樣1A、試樣1B)之評價結果表示於下述表i 中。由下述表1可知:使用試樣1之樹脂組合物的硬化物之 •110- 158118.docKapton (registered trademark) i〇〇EN. Further, the resin composition was applied to one surface of the substrate. The film thickness after drying and hardening was about 20 μm. [Evaluation of Warpage] The evaluation of warpage was evaluated by the ridge of the four corners of the sample. Specifically, the sample 1 was cut into 5 cm x 5 cm in an environment of a humidity of 50% at 23 ° C, and the geodesic angle was warped with respect to the ridge distance of the central portion. When the distortion is 1 mm or less, it is marked as 良好, and if it is 5 mm or less, it is marked as ◎, and when it is 15 mm or less, it is △, and when it is more than 15 mm, it is marked as X. . [Evaluation of Solder Resistance (Heat Resistance)] The solder resistance was evaluated by immersing the sample 1 cut at 3 cm x 3 cm in a solder bath at 260 ° C for 60 seconds based on the JPCA-BM02 specification. Visually inspect the appearance and confirm the presence or absence of changes in deformation, dissolution, etc., and the case where no change is found in more than 90% of the total area is recorded as 〇, and the case where 50% to 90% of the total area is found is not recorded as △, the case where the area where no change was found is less than 50% is referred to as X. [Evaluation of chemical resistance] The sample 1 was immersed in methyl ethyl ketone at room temperature for 1 minute, and the appearance of the coating film was visually inspected to confirm the presence or absence of changes such as deformation and dissolution. A situation in which no change is found in more than 90% of the total area is recorded as 〇, which is found in the overall area of 50. /. The case where ~90% of the changes were not found was recorded as △, and the case where the area where no change was found was less than 50% was recorded as χ. [Evaluation of Insulation Resistance at a Temperature of 85 ° C and a Moisture of 85%] As a substrate of a flexible printed circuit board, Espanex M (manufactured by Niigata 158118.doc -108 - 201237101 Iron Chemical Co., Ltd.) (insulation layer) was used. The thickness is 25 μm, and the conductor layer is copper foil F2-WS (18 μιη)). A comb-shaped wiring board having a line width/line pitch of 5〇μπι/5〇μηι is produced. On one part of the circuit board, the resin composition was applied and hardened so that the film thickness after hardening became 15 μm, and it was used as a sample! Hey. The conditions of the hardening were the same as those of the sample 1Α. Thereafter, the electric resistance was measured while being placed under conditions of dc 50 V, 85 ° C, and humidity of 85 °/❶ for 8 hours, and the case where the insulation resistance exceeded ΙΟ9 Ω was recorded as 〇, and the case where the 〇9 Ω was not reached was recorded. Why? [Evaluation of viscosity at 100 ° C to 220 ° C] The viscosity of 100 C to 220 C was measured using a measuring machine AR-G2 manufactured by TA Instruments, and 27 layers of resin film were used for lamination (the foregoing resin film was obtained from copper enamel). A sample obtained by removing the copper foil from the resin film of the substrate, in a rotor, a parallel plate having a diameter of 8 mm, strain: 〇·1%, frequency:! Hz, normal stress: 0.1 N (100 g) for evaluation. The case where the viscosity of i〇〇〇c~22〇eC is in the range of 5000 Pa»s to 100000 Pa.s is denoted by 〇, and the case where the area is less than 5000 Pa·s or more than 100000 Pa·s is denoted as X. . [Evaluation of elastic and plastic regions] Elastic and plastic regions are tensile tests on specimens with a width of 5 mm and a length of 100 mm at a distance of 50 mm and 100 mm/min between the chucks based on the jIS_C_2151 specification. The elongation rate until the point of the drop was set as the elastic region, and the elongation from the point of the drop to the point of the break was evaluated as a plastic region. The case where the elastic region is a plastic region having an elongation of less than 20% and an elongation of 5 〇〇/0 or more is referred to as 〇, and the elastic region is a plastic region having an elongation of 20% or more or an elongation of less than 50%. Is x. [Evaluation of interlayer insulation resistance] 158U8.doc 109- 201237101 The interlayer insulation resistance is made by using Espanex® (manufactured by Nippon Steel Chemical Co., Ltd.) (the thickness of the insulating layer is 25 μηι, and the conductor layer is copper foil F2_WS (18 μιη)). The base material of the flexible printed circuit board is laminated with a resin film made of a copper foil as a base material, and then placed under conditions of DC 50 V, 85 eC, and humidity of 853⁄4 for 1000 hours to measure electric resistance and insulation resistance between the resin films. For the case of 1 Λ 9 D or more, it is recorded as 〇 'The case where 109 Ω is not reached is denoted as X. [Evaluation of Through Hole Buriedness] The through hole embedding property was performed by cutting and polishing with a 4-layer wiring board produced by epoxy resin embedding. The case where the resin was buried in the through hole without gap was recorded as 〇, and the case where the gap was observed in the through hole was recorded as X. [Evaluation of Thermal Shock Test] The thermal shock test is based on the specifications of JPCA-HD01-2003, and the 4-layer wiring board produced is evaluated at -4 (TC, 120 ° C, 1000 cycles). In the case of less than 1%, it is recorded as 〇, and the case where more than 1% is used is referred to as X. [Evaluation of Resin Fluidity] Resin fluidity is measured by a vacuum press (180 〇C, 20 minutes, 4 MPa) The resin sheet with copper foil as the base material and the copper foil F2_ws (12 ^ claws) were laminated, and the resin bleed out at the end of the sample was visually evaluated. The case where the resin bleed out to be 1 mm or less was recorded as 〇 The case where the value exceeds 丨mm is denoted by X 0 The evaluation result of the sample 1 (sample 1A, sample 1B) is shown in the following Table i. It is understood from the following Table 1 that the resin composition of the sample 1 is used. Hardened matter • 110- 158118.doc

S 201237101 硬化時之翹曲得到充公如生, , 兄刀抑制’且耐焊料性(亦即耐熱性)優 異又’财化學品性或高溫高濕條件下之絕緣性亦優異。 又’使用試樣1之樹脂組合物之硬化物於彈性區域與塑 性區域之評價、層間絕緣電阻、通孔埋入性、冷熱衝擊試 驗、樹脂流動性之任意者中均獲得良好之評價結果。 其次’使用與試樣1不同之條件下所調合之樹脂組合物 而製作硬化膜,確認所製作之試樣2〜試樣21之特性。 [試樣2〜試樣5] 試樣2〜試樣5係與試樣丨同樣地使用包含聚醯亞胺a、多 官能含羥基化合⑯A、g氰酸酯化合物A之樹脂組合物而 製作。試樣2〜試樣5之主要的不同點是多官能含羥基化合 物A與異氰酸酯化合物A之含量。具體而言,試樣2係使用 相對於聚酿亞胺A 100質量份而言,添加有多官能含羥基 化合物A 7.5質量份、異氰酸酯化合物A 75質量份之樹脂 組合物而製作者❶試樣3係使用相對於聚醯亞胺A 1〇〇質量 份而言,添加有多官能含羥基化合物A 10質量份、異氰酸 酉曰化合物A 1 0質篁份的樹脂組合物而製作者。試樣4係使 用相對於聚醯亞胺A 100質量份而言,添加有多官能含經 基化合物A 1 5質量份、異氰酸酯化合物a 15質量份的樹脂 組合物而製作者❶試樣5係使用相對於聚醯亞胺八100質量 份而言’添加有多官能含羥基化合物A 1 〇質量份、異氰酸 酉曰化合物A 15質量份的樹脂組合物而製作者。試樣2〜試樣 5之製作方法或評價方法等與試樣丨相同。 [試樣6〜試樣9] 158118.doc 201237101 試樣6〜試樣9係使用包含後述之醯亞胺化率為28%之聚 酿亞胺(以下稱為聚醢亞胺B)、多官能含羥基化合物a、異 氰酸醋化合物A的樹脂組合物而製作。試樣6〜試樣9之主要 之不同點是多官能含羥基化合物A與嵌段異氰酸酯a之含 量。具體而言,試樣6係使用相對於聚醯亞胺b 1〇〇質量份 而言’添加有多官能含羥基化合物A 7.5質量份、異氰酸醋 化合物A 7.5質量份的樹脂組合物而製作者。試樣7係使用 相對於聚醯亞胺B 1〇〇質量份而言,添加有多官能含經基 化合物A 10質量份、異氰酸酯化合物a 1〇質量份的樹脂組 合物而製作者。試樣8係使用相對於聚醯亞胺Β ι〇〇質量份 而言’添加有多官能含羥基化合物A 30質量份、異氰酸醋 化合物A 3 0質量份的樹脂組合物而製作者。試樣9係使用 相對於聚醯亞胺B 100質量份而言’添加有多官能含經基 化合物A 60質量份、異氰酸酯化合物A 6〇質量份的樹脂組 合物而製作者。關於試樣6〜試樣9之製作方法或評價方法 等,與試樣1相同。 [聚醯亞胺B] 聚醯亞胺B之合成方法如下所示。首先,於三口可分離 式燒瓶上安裝氮氣導入管、溫度計、具有水分分離阱之球 型冷凝管。於冰水浴0°c下’裝入JEFFAMINE XTJ_ 542(HUntsman公司製造、重量平均分子量1〇〇〇)4〇 g、γ 丁 内酯(GBL)60 g、苯甲酸乙酯(BAEE)6〇 g、甲苯2〇 g、丫·戊 内酯12 g、吡啶18 g,攪拌至均勻。進而,每次少量地添 加3,3,,4,4,-聯苯四甲酸二酐(81>〇人)11.76〇§。於〇5小時之 •112- 158118.docS 201237101 The warpage at the time of hardening is made public, and the brother's knife is suppressed and the solder resistance (that is, the heat resistance) is excellent, and the insulation property under the conditions of chemical properties or high temperature and high humidity is also excellent. Further, the cured product of the resin composition of Sample 1 was evaluated for good evaluation in any of the evaluation of the elastic region and the plastic region, the interlayer insulation resistance, the through hole embedding property, the thermal shock test, and the resin fluidity. Next, the cured resin film was prepared by using the resin composition blended under the conditions different from the sample 1, and the properties of the prepared samples 2 to 21 were confirmed. [Sample 2 to Sample 5] Samples 2 to 5 were produced in the same manner as the sample, using a resin composition containing polyiminoimine a, polyfunctional hydroxyl group-containing 16A, and g cyanate compound A. . The main difference between Samples 2 to 5 is the content of the polyfunctional hydroxyl-containing compound A and the isocyanate compound A. Specifically, the sample 2 was prepared by adding a resin composition containing 7.5 parts by mass of a polyfunctional hydroxyl group-containing compound A and 75 parts by mass of an isocyanate compound A to 100 parts by mass of the polyacrylonitrile A. In the third embodiment, a resin composition containing 10 parts by mass of a polyfunctional hydroxyl group-containing compound A and a hydrazine isocyanate compound A 10 oxime is added to a mass fraction of the polyimine. In the sample 4, a resin composition containing a polyfunctional phase-containing compound A 15 parts by mass and an isocyanate compound a 15 parts by mass added to 100 parts by mass of the polyimine A was used. A resin composition in which a polyfunctional hydroxyl group-containing compound A 1 〇 mass part and 15 parts by mass of guanidinium isocyanate compound A were added to 100 parts by mass of the polyimine was used. The preparation method, evaluation method, and the like of Samples 2 to 5 are the same as those of Sample 丨. [Sample 6 to Sample 9] 158118.doc 201237101 Samples 6 to 9 are obtained by using a poly-imine (hereinafter referred to as polyimine) having a sulfonium iodide ratio of 28%, which will be described later. It is produced by functionally containing a resin composition containing a hydroxy compound a and an isocyanate compound A. The main difference between Samples 6 to 9 is the content of the polyfunctional hydroxyl-containing compound A and the blocked isocyanate a. Specifically, the sample 6 is a resin composition in which 7.5 parts by mass of the polyfunctional hydroxyl group-containing compound A and 7.5 parts by mass of the isocyanate compound A are added to the mass part of the polyimide. maker. The sample 7 was produced by adding a resin composition containing 10 parts by mass of the base compound A and 1 part by mass of the isocyanate compound a to the mass part of the polyimine. The sample 8 was produced by adding a resin composition in which 30 parts by mass of the polyfunctional hydroxyl group-containing compound A and 30 parts by mass of the isocyanate compound A were added to the mass parts of the polyamidimide. The sample 9 was produced by adding a resin composition containing 60 parts by mass of the polybasic compound A and 60 parts by mass of the isocyanate compound A to 100 parts by mass of the polyimine B. The preparation method, evaluation method, and the like of Samples 6 to 9 are the same as Sample 1. [Polyimide B] The synthesis method of polyimine B is as follows. First, a nitrogen inlet tube, a thermometer, and a spherical condenser having a moisture separation well were attached to a three-neck separable flask. JEFFAMINE XTJ_542 (manufactured by Huntsman Co., Ltd., weight average molecular weight 1 〇〇〇) 4〇g, γ-butyrolactone (GBL) 60 g, and ethyl benzoate (BAEE) 6〇g were placed in an ice water bath at 0°C. 2 g of toluene, 12 g of yttrium valerolactone, and 18 g of pyridine were stirred until uniform. Further, 3,3,4,4,-biphenyltetracarboxylic dianhydride (81 > 〇人) 11.76 〇§ was added in small amounts each time. Yu Yu 5 hours • 112- 158118.doc

S 201237101 攪拌後,升溫至170°C,加熱4小時》於反應中,所副生之 水與曱苯共沸.,使用具有水分分離牌之球型冷凝管而於回 流下進行脫水。除去副生水之後’停止回流,將曱苯全部 除去。將系統冷卻至60。(:之後,添加BPDA 35.6 g、APB 29·73 8 g。於5小時後冷卻至室溫。其次,藉由5 μιη之過渡 器對生成物進行加壓過濾,藉此獲得醯亞胺化率為28%之 聚醯亞胺Β清漆。 [試樣10〜試樣15] 試樣10〜試樣1 5係使用包含聚醯亞胺A、異氰酸酯化合物 A的樹脂組合物而製作。試樣10〜試樣丨5之主要之不同點是 使用多官能含羥基化合物B〜F之任意者作為多官能含經基 化合物這一點"作為多官能含羥基化合物B,使用作為聚 石厌酸S旨一醇之旭化成化學公司製造之DURANOL T5652(分 子量2000) ^作為多官能含羥基化合物c,使用作為聚碳酸 酯二醇之旭化成化學公司製造之DURANOL Τ4671(分子量 1000)。作為多官能含經基化合物D’使用作為聚丁二稀二 醇之日本曹達公司製造之G-l〇〇〇(分子量1〇〇〇)。作為多官 能含羥基化合物E,使用作為氫化聚丁二烯二醇之日本曹 達公司製造之GI-1000(分子量1000p作為多官能含羥基化 合物F,使用作為聚丁二醇之三菱化學公司製造之 PTMG1000(分子量 1000)。 試樣10係使用相對於聚醯亞胺a 100質量份而言,添加 有多官能含羥基化合物Β 1 〇質量份、異氰酸酯化合物A 5 質量份的樹脂組合物而製作者。試樣丨丨係使用相對於聚醯 I58118.doc -Π3- 201237101 亞胺A 100質量份而言,添加有多官能含羥基化合物c l〇 質量伤、異氰酸酯化合物A 1 〇質量份的樹脂組合物而製作 者。試樣12係使用相對於聚醯亞胺A } 〇〇質量份而言,添 加有多官能含經基化合物D 3 0質量份、異氰酸酯化合物A 3〇質量份的樹脂組合物而製作者。試樣13係使用相對於聚 醯亞胺A 100質量份而言,添加有多官能含羥基化合物e 3〇質量份、異氰酸酯化合物A 30質量份的樹脂組合物而製 作者。試樣14係使用相對於聚醯亞胺a i 〇〇質量份而言, 添加有多官能含經基化合物F 30質量份、異氰酸酯化合物 A 30質量份的樹脂組合物而製作者。試樣丨5係使用相對於 聚醯亞胺A 100質量份而言,添加有多官能含羥基化合 7·5質量份、異氰酸酯化合物A 7 5質量份的樹脂組合物而 製作者。關於試樣10~試樣1 5之製作方法或評價方法等, 與試樣1相同》 [試樣16、試樣17] 試樣16、試樣17係使用包含聚醯亞胺a、多官能含經基 化合物A的樹脂組合物而製作。試樣丨6、試樣丨7之主要之 不同點係使用異氰酸酯化合物B、C之任意者作為異氰酸 酯化合物這一點。作為異氰酸酯化合物B,使用作為六亞 曱基二異氰酸S旨系叙段異氰酸醋之旭化成化學公司製造之S 201237101 After stirring, the temperature was raised to 170 ° C and heated for 4 hours. In the reaction, the by-produced water was azeotroped with toluene. The ball-type condenser tube having the moisture separation card was used for dehydration under reflux. After the removal of the by-produced water, the reflux was stopped, and the total benzene was removed. Cool the system to 60. (: After that, BPDA 35.6 g and APB 29·73 8 g were added. After 5 hours, it was cooled to room temperature. Secondly, the product was subjected to pressure filtration by a 5 μηη transition device, thereby obtaining a ruthenium imidization ratio. It is a 28% polyimine enamel varnish. [Sample 10 to Sample 15] Samples 10 to 15 are prepared by using a resin composition containing polyamid A and isocyanate compound A. Sample 10 The main difference between the sample and the sample 5 is that the polyfunctional hydroxyl group-containing compound B to F is used as the polyfunctional hydroxyl group-containing compound. DURANOL T5652 (molecular weight 2000) manufactured by Asahi Kasei Chemicals Co., Ltd. ^As a polyfunctional hydroxyl-containing compound c, DURANOL® 4671 (molecular weight 1000) manufactured by Asahi Kasei Chemicals Co., Ltd. as a polycarbonate diol is used as a polyfunctional ketone-containing compound. D' uses Gl〇〇〇 (molecular weight 1〇〇〇) manufactured by Japan's Soda Co., which is a polybutylene dilute diol. As a polyfunctional hydroxyl-containing compound E, it is manufactured by Japan Soda Co., Ltd. as hydrogenated polybutadiene diol. GI-1000 ( The amount of 1000p is used as the polyfunctional hydroxyl group-containing compound F, and PTMG1000 (molecular weight 1000) manufactured by Mitsubishi Chemical Corporation as polytetramethylene glycol is used. Sample 10 is used in an amount of 100 parts by mass relative to the polyimine. A resin composition containing a functional group of a hydroxyl group-containing compound Β 1 〇 by mass and 5 parts by mass of an isocyanate compound A. The sample oxime is used in an amount of 100 parts by mass relative to the polyamine I58118.doc -Π3- 201237101 imine A. Produced by adding a resin composition having a polyfunctional hydroxyl group-containing compound cl〇 mass-damaged or isocyanate compound A 1 〇 by mass. Sample 12 is used in a large amount relative to the mass fraction of polyethylenimine A } A resin composition containing a base compound D 30 parts by mass and an isocyanate compound A 3 parts by mass is used. Sample 13 is a polyfunctional hydroxyl group added to 100 parts by mass of the polyimine A. Produced by a resin composition of 3 parts by mass of the compound e and 30 parts by mass of the isocyanate compound A. The sample 14 was added with a polyfunctional content in comparison with the mass fraction of the polyimine. Produced by a resin composition of 30 parts by mass of the base compound F and 30 parts by mass of the isocyanate compound A. The sample 丨5 is used in which a polyfunctional hydroxyl group-containing compound is added to 100 parts by mass of the polyamid A. The resin composition of the mass part and the isocyanate compound A 7.5 parts by mass is produced. The preparation method or evaluation method of the sample 10 to the sample 15 is the same as that of the sample 1 [sample 16 and sample 17] Samples 16 and 17 were produced using a resin composition containing polyimine a and a polyfunctional group-containing compound A. The main difference between the sample 丨6 and the sample 丨7 is that any of the isocyanate compounds B and C is used as the isocyanate compound. As the isocyanate compound B, it is manufactured by Asahi Kasei Chemical Co., Ltd., which is a hexamethylene diisocyanate S

Duranate TPA-B80E(NCO含量=12.5 wt%)。作為異氰酸醋 化合物C ’使用作為異佛爾酮二異氰酸酯系嵌段異氰酸醋 之Baxenden公司製造之件號7951(NCO含量=7.80 wt%)。 試樣16係使用相對於聚醯亞胺A 100質量份而言,添加 158118.doc - 114 -Duranate TPA-B80E (NCO content = 12.5 wt%). As the isocyanate vinegar compound C', part number 7951 (NCO content = 7.80 wt%) manufactured by Baxenden Co., Ltd. as isophorone diisocyanate block isocyanuric acid was used. Sample 16 was used in an amount of 158118.doc - 114 - relative to 100 parts by mass of the polyimine A.

S 201237101 有多官能含羥基化合物A 10質量份、異氰酸酯化合物b 9 質量份的樹脂組合物而製作者。試樣17係使用相對於聚醯 亞胺A 100質量份而言,添加有多官能含羥基化合物A 1〇 質量份、異氰酸酯化合物C 14質量份的樹脂組合物而製作 者。關於試樣16、試樣17之製作方法或評價方法等,與試 樣1相同。 [試樣18、試樣19] 試樣1 8、試樣19係使用包含聚醯亞胺B、多官能含羥基 化合物A、異氰酸酯化合物a的樹脂組合物而製作。試樣 18、試樣19之主要之不同點是多官能含羥基化合物a與異 氰酸酯化合物A之含量、及硬化時之加熱條件。具體而 言’試樣1 8係使用相對於聚醯亞胺b 1 〇〇質量份而言,添 加有多官能含羥基化合物A 10質量份、異氰酸酯化合物a 1 〇質量份的樹脂組合物而製作者。試樣丨9係使用相對於聚 醯亞胺B 100質量份而言’添加有多官能含羥基化合物a 3〇質量份、異氰酸酯化合物A 3〇質量份的樹脂組合物而製 作者°又’硬化時之加熱條件為於1 8〇〇c下進行6〇分鐘, 繼而於180°C下進行60分鐘(亦即:i8〇°C、60分鐘χ2)。關 於除加熱條件以外之試樣18、試樣19之製作方法、評價方 法等’與試樣1相同。 [試樣20、試樣21] 试樣20、試樣21係與試樣1同樣地使用包含聚醯亞胺a、 夕S «b含經基化合物a、異氰酸酯化合物a之樹脂組合物 而製作。試樣20、試樣21之主要之不同點是多官能含羥基 158118.doc -115- 201237101 化〇物A與異氰酸酯化合物A之含量。具體而言,試樣2〇 係使用相對於聚醯亞胺A 100質量份而言,添加有多官能 3羥基化合物A 3質量份、異氰酸酯化合物A 3質量份的樹 月曰"且〇物而製作。試樣21係使用相對於聚酿亞胺A 100質 量份而言,添加有多官能含羥基化合物A 7〇質量份、異氰 酉欠S曰化σ物A 70質量份的樹脂組合物而製作者。試樣2〇、 試樣21之製作方法或評價方法等與試樣丨相同。 將試樣2〜試樣21之評價結果表示於下述表1中。由下述 表1可知:使用本實施例之樹脂組合物的硬化物之硬化時 之翹曲得到充分抑制,且耐焊料性(亦即耐熱性)優異。 又耐化千00性或咼溫高濕條件下之絕緣性亦優異。再 者,根據試樣10〜試樣15等之評價結果可知:自提高絕緣 性之方面考慮,較佳的是使用聚丁二烯二醇、氫化聚丁二 稀二醇、聚碳酸醋二醇作為多官能含經基化合物。又,可 知.自減低趣曲之方面而言,較佳的是相對於樹脂組合物 100質量份而言,至少含有3質量份〜7〇質量份之聚醯亞 胺,更佳的是含有5質量份〜7〇質量份,進一步更佳的是含 有5質量份〜6〇質量份。又,根據試樣18、試樣19等之評價 結果可知:自提高耐熱性或耐化學品性之方面而言,較佳 的是合併使用低溫區域(⑽〜13代)之熱處理與高溫區域 (160〜減)之熱處理。然而,熱處理之條件並不限定於 此。 其次’使用於與試樣!〜試樣21不同之條件下所調合之樹 脂組合物而製作硬化膜,確認所製作之試樣Μ〜試樣Μ之 158118.docS 201237101 A resin composition having 10 parts by mass of a polyfunctional hydroxyl group-containing compound A and 9 parts by mass of an isocyanate compound b. The sample 17 was prepared by adding a resin composition containing a polyfunctional hydroxyl group-containing compound A 1 part by mass and 14 parts by mass of an isocyanate compound C to 100 parts by mass of the polyimine A. The sample 16 and the sample 17 were produced or evaluated in the same manner as in the sample 1. [Sample 18 and Sample 19] Samples 18 and 19 were produced by using a resin composition containing polyiminoimine B, a polyfunctional hydroxyl group-containing compound A, and an isocyanate compound a. The main difference between the sample 18 and the sample 19 is the content of the polyfunctional hydroxyl-containing compound a and the isocyanate compound A, and the heating conditions at the time of curing. Specifically, the sample of the sample 1 8 is prepared by adding a resin composition containing 10 parts by mass of the polyfunctional hydroxyl group-containing compound A and 1 part by mass of the isocyanate compound to the polybenzamine b 1 by mass. By. In the sample 丨9, a resin composition in which a polyfunctional hydroxyl group-containing compound a 3 parts by mass or an isocyanate compound A 3 parts by mass is added to 100 parts by mass of the polyimine B is used. The heating conditions were carried out at 18 ° C for 6 minutes, and then at 180 ° C for 60 minutes (i.e., i8 ° C, 60 minutes χ 2). The sample 18, the method of producing the sample 19, the evaluation method, and the like except for the heating conditions were the same as those of the sample 1. [Sample 20 and Sample 21] The sample 20 and the sample 21 were produced in the same manner as the sample 1 by using a resin composition containing a polyimine a, a s-S «b-containing base compound a, and an isocyanate compound a. . The main difference between Sample 20 and Sample 21 is the polyfunctional hydroxyl group 158118.doc -115- 201237101 The content of the chemical A and the isocyanate compound A. Specifically, the sample 2 is used in an amount of 3 parts by mass of the polyfunctional 3 hydroxy compound A and 3 parts by mass of the isocyanate compound A with respect to 100 parts by mass of the polyimine A. And making. In the sample 21, a resin composition obtained by adding a polyfunctional hydroxyl group-containing compound A 7 parts by mass and an isocyanide sulfonium sulfonate A 70 parts by mass to 100 parts by mass of the polyacrylonitrile A was used. By. The sample 2〇, the method of producing the sample 21, the evaluation method, and the like are the same as those of the sample file. The evaluation results of Samples 2 to 21 are shown in Table 1 below. As is apparent from the following Table 1, the warpage at the time of curing of the cured product using the resin composition of the present embodiment is sufficiently suppressed, and the solder resistance (i.e., heat resistance) is excellent. It is also excellent in insulation under the conditions of resistance to aging or high temperature and humidity. Further, from the evaluation results of Samples 10 to 15 and the like, it is understood that polybutadiene diol, hydrogenated polybutylene dilute diol, and polycarbonate diol are preferably used from the viewpoint of improving insulation properties. As a polyfunctional perfluoro-based compound. In addition, it is preferable that at least 3 parts by mass to 7 parts by mass of the polyimine, more preferably 5, is contained with respect to 100 parts by mass of the resin composition. The mass parts are ~7 〇 parts by mass, and more preferably 5 parts by mass to -6 parts by mass. Further, from the evaluation results of the sample 18, the sample 19, and the like, it is understood that from the viewpoint of improving heat resistance or chemical resistance, it is preferred to use a heat treatment and a high temperature region in combination of a low temperature region ((10) to 13 generations) ( 160~min) heat treatment. However, the conditions of the heat treatment are not limited to this. Secondly, use it with the sample! ~ A cured film was prepared by mixing the resin composition under different conditions of sample 21, and the prepared sample Μ~sample 158118.doc was confirmed.

S -116· 201237101 特性。 [試樣22〜試樣25] s式樣22~試樣25係使用包含聚酿亞胺c〜F、多官能含經 基化合物A、異氰酸酯化合物A之樹脂組合物而與試樣^同 樣地製作。試樣22〜試樣25之主要之不同點是聚醯亞胺之 醯亞胺化率。具體而言,試樣22〜試樣25係使用相對於聚 醯亞胺C〜F 1〇〇質量份而言,添加有多官能含羥基化合物a 15質量份、異氰酸酯化合物A 15質量份之樹脂組合物而製 作者。試樣22〜試樣25之製作方法或評價方法等與試樣1相 同。 [聚醯亞胺C] 對聚酿亞胺C之合成方法加以說明β首先,於三口可分 離式燒瓶上安裝氮氣導入管、溫度計、具有水分分離阱之 球型冷凝管。於室溫25°C下,裝入三乙二醇二甲鰱15 g、 γ-丁内酯35 g、甲苯2〇·〇 g、4,4·-氧雙鄰苯二甲酸二酐 (MANAC公司製造、簡稱為 〇DpA)1〇 86 g(35 〇〇 mmol) * 授掉至均勻"其後’升溫至80°C而添加聚矽氧二胺(信越 化學工業公司製造、簡稱為KF-8010)11.30 g(13.78 mm〇l)’進一步攪拌0.5小時後,升溫至170°C,進行4小時 之加熱。於反應中,所副生之水與甲苯共沸,使用具有水 分分離味之球型冷凝管而於回流下進行脫水。除去副生水 之後’停止回流’將甲苯全部除去。將系統冷卻至1〇〇〇c 之後’添加馬來酸酐〇.14 g而進行〇 5小時之攪拌。於室溫 25°C下靜置、冷卻12小時之後,添加13_雙(3_胺基苯氧 158118.doc •117- 201237101 基)苯(三井化學公司製造、簡稱為APB-N)6_00 g(20.52 mmol)。於室溫25°C下授拌5小時。其次,藉由5 μιη之過滤 器對生成物進行加壓過濾,藉此獲得醯亞胺化率為40%之 聚醯亞胺C清漆。 [聚醯亞胺D] 對聚醯亞胺D之合成方法加以說明。首先,於三口可分 離式燒瓶上安裝氮氣導入管、溫度計、具有水分分離阱之 球型冷凝管。於室溫25 °C下,裝入三乙二醇二甲醚15 g、 γ-丁内酯 35 g、甲苯20.0 g、ODPA 10.86 g(35.00 mmol), 攪拌至均勻。其後,升溫至80°C而添加KF-8010 11.30 g(13.78 mmol) ’進一步攪拌2小時後,裝入第一次之八卩8-N 2.17 g(7.42 mmol)而攪拌0.5小時,其後升溫至170°C, 進行4小時之加熱》於反應中,所副生之水與甲苯共沸, 使用具有水分分離阱之球型冷凝管而於回流下進行脫水。 除去副生水之後,停止回流,將甲苯全部除去。將系統冷 卻至100°C之後,添加馬來酸酐0.14 g而進行〇·5小時之攪 拌。於室溫25°C下靜置、冷卻12小時之後,添加第二次之 APB-N 3.83 g(13.10 mmol)。於室温25°C 下攪拌 5小時。其 次’藉由5 μιη之過濾器對生成物進行加壓過濾,藉此獲得 醯亞胺化率為60°/。之聚酿亞胺d清漆。 [聚醯亞胺Ε] 對聚醯亞胺Ε之合成方法加以說明。使聚醯亞胺〇之合成 方法之第一次之ΑΡΒ-Ν為4.03 g( 13.78 mmol),使第二次之 APB-N為1.97 g(6.73 mm〇i)’除此以外與聚醯亞胺〇之合 158118.doc -118· 201237101 成方法同樣地進行而獲得酿亞胺化率為80°/。之聚酿亞胺e 清漆。 [聚醯亞胺F] 對聚醯亞胺F之合成方法加以說明。使聚醯亞胺d之合 成方法之第一次之APB-N為4.86 g( 16·62 mmol),使第二次 之APB-N為1·〇3 g(3.52 mmol),除此以外與聚醯亞胺d之 合成方法同樣地進行而獲得醯亞胺化率為90%之聚醯亞胺 F清漆。 [試樣26] 試樣26係使用包含聚醯亞胺c、多官能含羥基化合物 A、異氰酸酯化合物A之樹脂組合物而與試樣1同樣地製 作。试樣26相對於試樣22之主要之不同點是阻燃成分之添 加。具體而言’試樣26係使用相對於聚醯亞胺c 1〇〇質量 份而言,添加有多官能含羥基化合物A 15質量份、異氰酸 酯化合物A 15質量份、伏見製藥所公司製造之磷腈衍生物 FP-300(阻燃劑A)23質量份的樹脂組合物而製作者。試樣 26之製作方法或評價方法等與試樣1相同。 [試樣27] 試樣27係使用與試樣26相同之樹脂組合物而製作。試樣 27相對於試樣26之主要之不同點是[硬化膜之製作]中所使 用之基板具體而吕,於吕式樣27中,使用Furukawa Circuit Foil Co·,Ltd.公司製造之銅箔1?2_貿§之12 μιη膜厚品作為基 板,於銅箔之無光澤面上形成有硬化膜。乾燥硬化後之膜 厚為約30 μηι。試樣27之其他之製作方法或評價方法等與 158118.doc -119· 201237101 試樣1相同。 [試樣28] 試樣28係使用包含聚醯亞胺c、多官能含羥基化合物 A、異氰酸酯化合物A之樹脂組合物而與試樣1同樣地製 作。試樣28相對於試樣22之主要之不同點是阻燃成分之添 加與觸媒之添加。試樣28係使用相對於聚醯亞胺c 1 〇〇質 量伤而5 ’添加有多官能含經基化合物A 18質量份、異氰 酸醋化合物A 18質量份、伏見製藥所公司製造之磷腈衍生 物FP-300(阻燃劑a)27質量份、堺化學工業公司製造之三 聚氰胺氛尿酸酯MC-20NJ粉碎品(阻燃劑B ;平均粒徑為i. i μηι、最大粒控為3 μπι) 1 8質量份、San-Apro公司製造之u_ CAT SA(註冊商標)1〇2(觸媒A)0.18質量份的樹脂組合物而 製作者。試樣28之製作方法或評價方法等使用FurukawaS -116· 201237101 Features. [Sample 22 to Sample 25] s Pattern 22 to Sample 25 were produced in the same manner as the sample using a resin composition containing a polyaniline c-F, a polyfunctional perfluoro-based compound A, and an isocyanate compound A. . The main difference between Samples 22 and 25 is the ruthenium imidization ratio of polyimine. Specifically, in the sample 22 to the sample 25, 15 parts by mass of the polyfunctional hydroxyl group-containing compound a and 15 parts by mass of the isocyanate compound A are added to the mass parts of the polyimine. Producer of the composition. The preparation method or evaluation method of Samples 22 to 25 is the same as Sample 1. [Polyimide C] A method for synthesizing the brewed imine C. First, a nitrogen inlet tube, a thermometer, and a spherical condenser having a moisture separation well were attached to a three-neck separable flask. At room temperature 25 ° C, charged with triethylene glycol dimethyl hydrazine 15 g, γ-butyrolactone 35 g, toluene 2 〇 · 〇 g, 4, 4 · oxy diphthalic dianhydride (MANAC The company manufactures, abbreviated as 〇DpA)1〇86 g(35 〇〇mmol) * Granted to uniformity" thereafter 'heated to 80 °C and added polyoxydiamine (manufactured by Shin-Etsu Chemical Co., Ltd., abbreviated as KF -8010) 11.30 g (13.78 mm〇l)' After further stirring for 0.5 hour, the temperature was raised to 170 ° C, and heating was carried out for 4 hours. In the reaction, the by-produced water is azeotroped with toluene, and dehydrated under reflux using a spherical condenser having a water-separating taste. After removing the by-produced water, the "stop reflux" was carried out to remove all the toluene. After the system was cooled to 1 〇〇〇c, '14 g of maleic anhydride was added and stirred for 5 hours. After standing at room temperature and 25 ° C for 12 hours, 13_bis(3_aminophenoxy 158118.doc •117- 201237101) benzene (manufactured by Mitsui Chemicals, Inc., abbreviated as APB-N) 6_00 g was added. (20.52 mmol). The mixture was stirred at room temperature for 25 hours at 25 °C. Next, the resultant was subjected to pressure filtration through a filter of 5 μm to obtain a polyamidene C varnish having a sulfonium iodide ratio of 40%. [Polyimide D] The synthesis method of polyimine D is explained. First, a nitrogen inlet tube, a thermometer, and a spherical condenser having a moisture separation well were attached to a three-neck separable flask. 15 g of triethylene glycol dimethyl ether, 35 g of γ-butyrolactone, 20.0 g of toluene, and 10.86 g of ODPA (35.00 mmol) were charged at room temperature at 25 ° C, and stirred until homogeneous. Thereafter, the temperature was raised to 80 ° C and KF-8010 11.30 g (13.78 mmol) was added. After further stirring for 2 hours, the first gossip 8-N 2.17 g (7.42 mmol) was charged and stirred for 0.5 hour, after which The temperature was raised to 170 ° C and heated for 4 hours. In the reaction, the by-produced water was azeotroped with toluene, and dehydrated under reflux using a spherical condenser having a water separation well. After removing the by-produced water, the reflux was stopped, and all the toluene was removed. After the system was cooled to 100 ° C, 0.14 g of maleic anhydride was added and stirred for 5 hours. After standing at room temperature at 25 ° C for 12 hours, a second APB-N 3.83 g (13.10 mmol) was added. Stir at room temperature 25 ° C for 5 hours. Next, the product was subjected to pressure filtration by a filter of 5 μm to obtain a ruthenium amination ratio of 60 ° /. Polyimide d varnish. [Polyimine oxime] A method for synthesizing polyamidoxime is described. The first time the synthesis method of the polyimine oxime was 4.03 g (13.78 mmol), and the second APB-N was 1.97 g (6.73 mm〇i). The combination of the amine oxime 158118.doc -118· 201237101 was carried out in the same manner to obtain a brewing imidization ratio of 80 ° /. Polyimide e varnish. [Polyimine F] The synthesis method of polyimine F is explained. The first APB-N method for the synthesis of polyimine d was 4.86 g (16.62 mmol), and the second APB-N was 1·〇3 g (3.52 mmol), in addition to The synthesis method of polyimine d was carried out in the same manner to obtain a polyamidene F varnish having a quinone imidization ratio of 90%. [Sample 26] The sample 26 was produced in the same manner as in Sample 1 using a resin composition containing polyiminoimine c, polyfunctional hydroxyl-containing compound A, and isocyanate compound A. The main difference between sample 26 and sample 22 is the addition of flame retardant components. Specifically, in the sample 26, 15 parts by mass of the polyfunctional hydroxyl group-containing compound A, 15 parts by mass of the isocyanate compound A, and phosphorus produced by Fushimi Pharmaceutical Co., Ltd. were added to the mass part of the polyimine. Produced by a resin composition of 23 parts by mass of a nitrile derivative FP-300 (flame retardant A). The production method, evaluation method, and the like of the sample 26 were the same as those of the sample 1. [Sample 27] Sample 27 was produced by using the same resin composition as Sample 26. The main difference between the sample 27 and the sample 26 is that the substrate used in [Production of the cured film] is specific, and in the case of the sample 27, the copper foil 1 manufactured by Furukawa Circuit Foil Co., Ltd. is used. ? 2 _ § 12 μιη film thickness as a substrate, formed on the matte surface of the copper foil with a cured film. The film thickness after drying and hardening is about 30 μηι. The other production method or evaluation method of the sample 27 is the same as that of the sample 1 of 158118.doc-119·201237101. [Sample 28] Sample 28 was produced in the same manner as in Sample 1 using a resin composition containing polyiminoimine c, polyfunctional hydroxyl-containing compound A, and isocyanate compound A. The main difference between sample 28 and sample 22 is the addition of flame retardant components and the addition of catalyst. In the sample 28, 18 parts by mass of the polyfunctional permeation-containing compound A, 18 parts by mass of the isocyanate compound A, and phosphorus produced by Fushimi Pharmaceutical Co., Ltd. were added to the mass of the polyamidiamine c 1 〇〇. Nitrile derivative FP-300 (flame retardant a) 27 parts by mass, melamine urethane MC-20NJ pulverized product manufactured by 堺Chemical Industries Co., Ltd. (flame retardant B; average particle size i. i μηι, maximum particle size control It is produced by using a resin composition of 3 to 10 parts by mass of a resin composition of u_CAT SA (registered trademark) 1〇2 (catalyst A) manufactured by San-Apro Co., Ltd. in an amount of 0.18 parts by mass. Furukawa using Furukawa for the preparation method or evaluation method of sample 28

Circuit Foil Co.,Ltd.公司製造之銅箔F2-WS之12 μιη膜厚 作為基板’於銅羯之無光澤面上形成硬化膜,於12 〇 下加熱10分鐘及於200。(:下加熱15分鐘而進行乾燥硬化, 硬化後之膜厚為約30 μηι,除此以外與試樣1相同。 [試樣29] 试樣2 9係使用與s式樣2 8相同之樹脂組合物而製作。試樣 29相對於試樣28之主要之不同點僅僅是觸媒種類。具體而 言,使用San-Apro公司製造之U-CAT(註冊商標)11〇2(觸媒 B)〇.18質量份。試樣29之其他之製作方法或評價方法等與 試樣28相同。 將試樣22〜試樣29之評價結果表示於下述表2中。由了述 •120· 158118.doc12 μιη film thickness of copper foil F2-WS manufactured by Circuit Foil Co., Ltd. As a substrate, a cured film was formed on the matte side of the matte, and heated at 12 Torr for 10 minutes and at 200 Å. (: The film was dried and hardened for 15 minutes, and the film thickness after hardening was about 30 μm, except that it was the same as the sample 1. [Sample 29] The sample 2 was the same resin combination as the s pattern 28 The main difference between the sample 29 and the sample 28 is only the type of the catalyst. Specifically, U-CAT (registered trademark) 11〇2 (catalyst B) manufactured by San-Apro Co., Ltd. is used. 18.18 parts by mass. The other preparation method or evaluation method of the sample 29 is the same as that of the sample 28. The evaluation results of the sample 22 to the sample 29 are shown in the following Table 2. It is described that 120·158118. Doc

S 201237101 表2可知:使用試樣22〜試樣29之樹脂組合物之硬化物之硬 化時的翹曲得到充分抑制,且耐焊料性(亦即耐熱性)優 異。又,耐化學品性或高溫高濕條件下之絕緣性亦優異, 獲得與下述表1中所示之試樣丨〜試樣2丨之樹脂組合物相同 之效果。 其次,使用試樣27〜試樣29中所製作之樹脂膜而製作試 樣30〜試樣32,確認其特性。 [試樣30] 试樣30係使用試樣27中所得之樹脂膜而製作。試樣3〇相 對於試樣27之主要之不同點是於布線板上積層樹脂膜而製 作之方面。具體而言,使用Espanex M(新日鐵化學公司製 造)(絕緣層之厚度為25 μηι、導體層為銅箔F2_wS(18 pm)) 作為可撓性印刷布線板之基材,以4mm之間隔鑽孔加工出 直徑為0.1 mm之通孔而進行鍍銅後,藉由真空壓製機 (180°C、20分鐘、4 MPa)將樹脂膜積層於進行了圓案加工 之布線板之雙面,於圖案加工後,於通孔間中央進行雷射 通道加工,並且進行鍍銅,製作菊鏈連接有25個通道之* 層布線板。 [試樣31、試樣32] 忒樣3 1係使用試樣28,試樣32係使用試樣29,藉由與試 樣30同樣之方法而製作布線板,藉由與試樣3〇相同之方法 而進行評價。 其次,使用於與試樣卜試樣32不同之條件下所調合的樹 脂組合物而製作樹脂膜,確認所製作之試樣33〜試樣“之 158118.doc -121 - 201237101 特性。 [試樣33] 試樣33係使用於醯亞胺化率為1〇〇°/。之聚醯亞胺G之清漆 中添加有多官能含羥基化合物A、作為六亞甲基二異氰酸 酯系異氰酸酯之旭化成化學公司製造之Duranate TPA_ 100(NCO含量23.1 wt。/。;以下稱為異氰酸酯化合物c)者。 相對於聚醯亞胺G 100質量份而言,多官能含羥基化合物八 為1 〇質量份,異氰酸酯化合物C為4 · 4質量份。又,以相對 於樹脂組合物而言,聚醯亞胺G成為3 0質量%之方式進行 調合。於此情形時,多官能含經基化合物中所含之經基與 異氰酸酯化合物D中所含之異氰酸酯基之莫耳比係經基/異 氰酸酯基=0.9。使用該樹脂組合物,藉由與試樣3〇相同之 方法而製作布線板,藉由與試樣30相同之方法進行評價。 [聚醯亞胺G] 對聚醯亞胺G之合成方法加以說明。首先,於三口可分 離式燒瓶上安裝氮氣導入管、溫度計、具有水分分離阱之 球型冷凝管。於室溫25〇c下,裝入三乙二醇二甲醚15 §、 γ- 丁内酯35 g、甲笨2〇〇 g、4,4,_氧雙鄰苯二甲酸二酐 (MANAC公司製造、簡稱為〇DpA)1〇 % g(35 〇〇顏〇1)而 攪拌至均勻。其後,升溫至80。(:而添加聚矽氧二胺(信越 化學工業公司製造、簡稱為KF-8010)11.3〇 g(i3.78 mm〇1) ’進—步進行0.5小時之攪拌後,升溫至l7(TC而加 熱4小時。於反應+,所副生之水與甲苯共沸,使用具有 水为/7離阱之球型冷凝管而於回流下進行脫水。除去副生 158118.docIn the case of Table 2, it is understood that the warpage at the time of hardening of the cured product of the resin composition of Samples 22 to 29 is sufficiently suppressed, and the solder resistance (i.e., heat resistance) is excellent. Further, it was excellent in chemical resistance or high-temperature and high-humidity conditions, and the same effects as those of the resin compositions of Sample 丨 to Sample 2 shown in Table 1 below were obtained. Next, Samples 30 to 32 were prepared using the resin films prepared in Samples 27 to 29, and the properties were confirmed. [Sample 30] Sample 30 was produced by using the resin film obtained in Sample 27. The main difference between the sample 3 and the sample 27 is that the resin film is laminated on the wiring board. Specifically, Espanex M (manufactured by Nippon Steel Chemical Co., Ltd.) (the thickness of the insulating layer is 25 μm, and the conductor layer is copper foil F2_wS (18 pm)) is used as the substrate of the flexible printed wiring board, and is 4 mm. After the copper plating was performed by using a through hole having a diameter of 0.1 mm, the resin film was laminated on the wiring board subjected to the round processing by a vacuum press (180 ° C, 20 minutes, 4 MPa). After the pattern processing, the laser path is processed in the center between the through holes, and copper plating is performed to form a * layer wiring board in which daisy chain is connected with 25 channels. [Sample 31 and Sample 32] Sample 28 was used for Sample 3, and Sample 29 was used for Sample 32. A wiring board was produced by the same method as Sample 30, and Sample 3 was prepared. The same method was used for evaluation. Next, a resin film prepared by using the resin composition blended under the conditions different from the sample of the sample 32 was used to confirm the properties of the sample 33 to the sample "158118.doc -121 - 201237101. 33] Sample 33 is used in Asahi Kasei Chemicals in which a polyfunctional hydroxyl group-containing compound A and a hexamethylene diisocyanate isocyanate are added to a varnish having a ruthenium iodide ratio of 1 〇〇 °. Duranate TPA_ 100 (NCO content 23.1 wt%, hereinafter referred to as isocyanate compound c) manufactured by the company. Polyfunctional hydroxyl group-containing compound is 1 part by mass, isocyanate, relative to 100 parts by mass of polyimine. The amount of the compound C is 4,4 parts by mass. Further, the polyamidimide G is blended in an amount of 30% by mass based on the resin composition. In this case, the polyfunctional content-containing compound is contained. The molar ratio of the isocyanate group contained in the isocyanate group D to the isocyanate group is 0.9. Using the resin composition, a wiring board is produced by the same method as the sample 3, by Sample 30 is the same method Evaluation [Polyimide G] The synthesis method of polyimine G. First, a nitrogen inlet tube, a thermometer, and a spherical condenser having a moisture separation well were attached to a three-neck separable flask. Under the temperature of 25 ° C, charged with triethylene glycol dimethyl ether 15 §, γ-butyrolactone 35 g, methyl 2 〇〇 g, 4, 4, oxy phthalic acid dianhydride (manufactured by MANAC) , abbreviated as 〇DpA)1〇% g(35 〇〇颜〇1) and stirred until uniform. After that, the temperature is raised to 80. (: Add polyphosphonium diamine (manufactured by Shin-Etsu Chemical Co., Ltd., abbreviated as KF-) 8010)11.3〇g(i3.78 mm〇1) 'When the mixture is stirred for 0.5 hours, the temperature is raised to 17 (TC and heated for 4 hours. In the reaction +, the by-produced water is azeotroped with toluene, and has The water is /7 away from the ball type condenser tube and is dehydrated under reflux. Remove the by-product 158118.doc

S -122· 201237101 水之後’停止回流,將曱苯全部除去。將系統冷卻至 100°C之後’添加馬來酸酐0.14 g而進行0.5小時之攪拌。 於室溫25°C下靜置、冷卻12小時之後,添加1,3-雙(3-胺基 苯氧基)苯(三井化學公司製造、簡稱為APB-N)6.00 g (20.52 mmol)、γ-丁内酯 35 g、曱苯20.0 g。攪拌 0.5小時 後,升溫至17 0 °C而進行4小時之加熱。於反應中,所副生 之水與甲苯共沸,使用具有水分分離阱之球型冷凝管而於 回流下進行脫水。除去副生水之後,停止回流,將甲苯全 部除去。其次’藉由5 μηι之過遽器對生成物進行加壓過 濾,藉此獲得醯亞胺化率為1 〇〇%之聚醯亞胺G清漆。 [試樣34] 試樣34係使用於聚醯亞胺G之清漆中添加有作為聚碳酸 0旨二醇之旭化成化學公司製造之DURANOL T5650E(分子 量500)、異氰酸酯化合物D者。相對於聚醯亞胺〇 1〇〇質量 伤而δ,T5650E為5質量份,異氰酸酯化合物D為4·4質量 伤。又,以相對於樹脂組合物而言,聚醯亞胺Η成為3〇質 量%之方式進行調合。於此情形時,多官能含羥基化合物 中所含之羥基與異氰酸酯化合物D中所含之異氰酸酯基之 莫耳比係羥基7異氰酸酯基=0.9。使用該樹脂組合物,藉由 與忒樣3 0相同之方法而製作布線板,藉由與試樣π相同之 方法進行評價。 [試樣35] '•式樣35係使用於聚醯亞胺G之清漆中添加有作為聚碳酸 酯多70醇之平均羥基數為3·6之聚碳酸酯多元醇a、六亞曱 158118.doc -123· 201237101 基二異氰酸酯(以下稱為異氰酸酯化合物E)者。相對於聚 醯亞胺G 100質量份而言,[聚碳酸酯多元醇a為6 2質量 份,六亞曱基二異氰酸酯為2質量份。又,以相對於樹脂 組合物而言,聚醯亞胺G成為30質量%之方式進行調合。 於此情形時,多官能含羥基化合物中所含之羥基與異氛於 酯化合物E中所含之異氰酸酯基之莫耳比係羥基/異氛酸酿 基=0.9。使用該樹脂組合物,藉由與試樣3〇相同之方法而 製作布線板’藉由與試樣3 0相同之方法而進行評價。將古式 樣3 0〜試樣3 5之評價結果示於下述表3中。 [聚碳酸酯多元醇A] 對聚碳酸酯多元醇A之合成方法加以說明。於附有填充 了狄克松填料之直徑為10 mm、長度為300 mm之蒸餘试及 溫度計、攪拌機的2升燒瓶中添加碳酸乙二酯:Ec 87 i 6S -122· 201237101 After water, the reflux was stopped and all of the toluene was removed. After the system was cooled to 100 ° C, 0.14 g of maleic anhydride was added and stirred for 0.5 hours. After standing at room temperature and 25 ° C for 12 hours, 1,3-bis(3-aminophenoxy)benzene (manufactured by Mitsui Chemicals, Inc., abbreviated as APB-N) 6.00 g (20.52 mmol), Γ-butyrolactone 35 g, toluene 20.0 g. After stirring for 0.5 hour, the temperature was raised to 170 ° C and heating was carried out for 4 hours. In the reaction, the by-produced water is azeotroped with toluene, and dehydrated under reflux using a spherical condenser having a water separation well. After removing the by-produced water, the reflux was stopped, and the toluene was completely removed. Next, the resultant was subjected to pressure filtration through a 5 μηι filter to obtain a polyamidene G varnish having a ruthenium iodide ratio of 1%. [Sample 34] The sample 34 was obtained by adding DURANOL T5650E (molar weight 500) and isocyanate compound D manufactured by Asahi Kasei Chemicals Co., Ltd., which is a diol of polycarbonate. The δ, T5650E was 5 parts by mass, and the isocyanate compound D was 4.4 mass injures to the mass of the polyamidiamine. Further, the polyamidimidine was blended so as to be 3% by mass based on the resin composition. In this case, the hydroxyl group contained in the polyfunctional hydroxyl group-containing compound and the mole ratio of the isocyanate group contained in the isocyanate compound D are hydroxyl group 7 isocyanate group = 0.9. Using this resin composition, a wiring board was produced by the same method as the sample 30, and evaluated by the same method as the sample π. [Sample 35] '• Model 35 is used in the varnish of polybendimimine G. Polycarbonate a, hexamethylene 158118, which has an average hydroxyl number of 3,6, as a polycarbonate 70 alcohol. Doc -123· 201237101 The base diisocyanate (hereinafter referred to as isocyanate compound E). With respect to 100 parts by mass of the polyimine G, [polycarbonate polyol a was 62 parts by mass, and hexamethylene diisocyanate was 2 parts by mass. In addition, the polyamidimide G was blended so as to be 30% by mass based on the resin composition. In this case, the hydroxyl group contained in the polyfunctional hydroxyl group-containing compound and the molar ratio of the isocyanate group contained in the ester compound E are hydroxy/isogenic acid base = 0.9. Using this resin composition, a wiring board was produced by the same method as the sample 3', and evaluation was performed by the same method as the sample 30. The evaluation results of the ancient sample 30 to the sample 3 5 are shown in Table 3 below. [Polycarbonate Polyol A] A method for synthesizing polycarbonate polyol A will be described. Add ethylene carbonate to a 2 liter flask filled with a Dixon packing 10 mm diameter and 300 mm length and a thermometer and agitator: Ec 87 i 6

.S (9.9莫耳)、三羥曱基丙烷:TMP 530.8 g(3.96莫耳)、i 6_ 己二醇.HDL 351.6 g(2_98 莫耳)、1,5-戊二醇:pdl 31〇 g (2.98莫耳),於20 t〇rr之減壓下進行加熱攪拌,將内溫控 制為120°C〜130°C。一面自蒸餾塔之頂部餾出共彿組成之 EC與乙二醇,一面進行18小時之反應。其次取出蒸館塔而 使減壓度成為4 Torr而回收未反應之EC與二醇。於未反應 物之餾出結束後’使内溫成為19(TC,於保持該溫度之狀 態下使二醇餾出而進行自身縮合反應。於進行5小時之反 應後,藉由GPC(凝膠滲透層析法)分析而獲得數量平均分 子量為1014(聚苯乙烯換算)之無色透明之黏性液體。產量 為1200 g。該液體具有如下之物性。組成(莫耳%)為 158118.doc •124- 201237101 HDL:PDL:TMP=30.0:21.7:45.4、包含其他醚鍵之單元存在 有 0.4% ’ OH價(mgKOH/g)=198.8,平均經基數=3 6。 [多官能含羥基化合物之分子量之評價] 多官能含羥基化合物之分子量可藉由凝膠滲透層析法 , (Tosoh公司製造)而測定,藉由苯乙烯換算分子量之數量平 均分子量而進行評價。 由下述表3可知:使用試樣30〜試樣35之樹脂組合物的樹 脂膜之層間絕緣電阻、通孔埋入性、耐焊料性(亦即耐熱 性)、耐冷熱衝擊性優異,獲得與下述表丨所示之試樣丨~試 樣21之樹脂組合物相同之效果。又,於使用醢亞胺化率為 100%之聚醯亞胺之情形時(試樣33〜試樣35)、使用3官能以 上之多官能含羥基化合物之情形時(試樣35)、使用2官能之 異氰酸酯化合物之情形時(試樣35)、使用嵌段異氰酸酯以 外之異氰酸酯化合物之情形時(試樣33〜試樣35),均獲得 良好之結果。 (比較例1) 作為比較例,使用於與上述實施例1不同之條件下調合 之樹脂組合物而製作硬化膜,確認所製作之試樣之特性。 於本比較例中,製作比較試樣卜比較試樣8,確認其特 性。 [比較試樣1〜比較試樣3] 比較s式樣1 ~比較試樣3係使用包含聚醯亞胺a之樹脂組合 物而製作。比較試樣1〜比較試樣3之主要之不同點是聚酿 亞胺A以外之成分。具體而言,比較試樣i係使用不含多官 158118.doc .125- 201237101 能含羥基化合物A及異氰酸酯化合物a之樹脂組合物而製 作。比較試樣2係使用相對於聚醯亞胺a 100質量份而言添 加有多官能含羥基化合物A 5質量份之樹脂組合物而製 作。比較試樣3係使用相對於聚醯亞胺a 1 〇〇質量份而言添 加有異氰酸酯化合物A 5質量份之樹脂組合物而製作。比 較s式樣1〜比較試樣3之製作方法或評價方法等與實施例1相 同0 [比較試樣4、比較試樣5] 比較試樣4、比較試樣5係使用包含聚醯亞胺a、多官能 含經基化合物A、異氰酸酯化合物a之樹脂組合物而製 作。比較試樣4、5之主要之不同點是異氰酸酯化合物a相 對於多官能含經基化合物A之含量(亦即多官能含經基化合 物中所含之羥基與異氰酸酯化合物A中所含之異氰酸酯基 之莫耳比)。更具體而言’比較試樣4係使用相對於聚醯亞 胺A 100質量份而言添加有多官能含經基化合物a 1〇質量 份、異氰酸酯化合物A 6質量份,藉此使羥基與異氰酸酯 基之莫耳比為羥基/異氰酸酯基=1.4的樹脂組合物而製作。 比較.試樣5係使用相對於聚醯亞胺a 1〇〇質量份而言添加有 多官能含羥基化合物A 10質量份、異氰酸酯化合物a 20質 > 量份’藉此使羥基與異氰酸酯基之莫耳比為羥基/異氰酸 醋基=0.4的樹脂組合物而製作。比較試樣4、5之製作方法 或評價方法等與實施例1相同。 [比破試樣6] 比較試樣6係使用包含多官能含羥基化合物a、異氰酸醋 158118.doc -126- 201237101 化合物A之樹脂組合物而製作。亦即,比較試樣6係使用不 含聚酿亞胺之樹脂組合物而製作者。比較試樣6之製作方 法或評價方法等與實施例1相同。 [比較試樣7] 比較試樣7係使用包含多官能含經基化合物及喪段異氰 酸酯嵌入至骨架中之醯亞胺化率為100%之聚醯亞胺(不含 聚醢胺酸結構之聚醯亞胺;以下稱為聚醯亞胺H)的樹脂組 合物而製作。於聚醯亞胺Η中嵌入有多官能含羥基化合物 及欲段異氰酸酯,因此不含多官能含經基化合物及嵌段異 氰酸酯作為樹脂組合物之成分。比較試樣7之製作方法或 評價方法等與實施例1相同。 [聚醯亞胺Η].S (9.9 mol), trihydrocarbyl propane: TMP 530.8 g (3.96 mol), i 6_ hexanediol. HDL 351.6 g (2_98 mol), 1,5-pentanediol: pdl 31〇g (2.98 mol), heating and stirring under a reduced pressure of 20 t〇rr, and controlling the internal temperature to 120 ° C to 130 ° C. One side of the distillation tower was distilled from the top of the distillation column to form an EC and ethylene glycol, and the reaction was carried out for 18 hours. Next, the steaming tower was taken out and the degree of pressure reduction was 4 Torr to recover unreacted EC and diol. After the completion of the distillation of the unreacted material, the internal temperature was changed to 19 (TC, and the diol was distilled off while maintaining the temperature to carry out a self-condensation reaction. After the reaction for 5 hours, GPC (gel) was used. Permeation chromatography) analysis gave a colorless transparent viscous liquid having a number average molecular weight of 1014 (in terms of polystyrene). The yield was 1200 g. The liquid had the following physical properties. The composition (% by mole) was 158118.doc • 124- 201237101 HDL: PDL: TMP = 30.0: 21.7: 45.4, the unit containing other ether linkages has 0.4% 'OH valence (mgKOH/g) = 198.8, and the average number of base groups = 36. [Multifunctional hydroxyl-containing compounds Evaluation of Molecular Weight] The molecular weight of the polyfunctional hydroxyl-containing compound can be measured by gel permeation chromatography (manufactured by Tosoh Co., Ltd.), and evaluated by the number average molecular weight of the molecular weight in terms of styrene. The resin film of the resin composition of the sample 30 to the sample 35 was excellent in interlayer insulation resistance, via embedding property, solder resistance (that is, heat resistance), and thermal shock resistance, and was obtained as shown in the following table. Sample 丨~sample 21 The same effect as the fat composition. When using a polyimine having a ruthenium iodide ratio of 100% (samples 33 to 35) and using a polyfunctional hydroxy compound having three or more functional groups, (Sample 35), when a bifunctional isocyanate compound was used (Sample 35), and when an isocyanate compound other than blocked isocyanate (Sample 33 to Sample 35), good results were obtained. Example 1) As a comparative example, a cured film was prepared by using a resin composition blended under the conditions different from those of the above Example 1, and the properties of the produced sample were confirmed. In this comparative example, a comparison sample was prepared. [Comparative Sample 1 to Comparative Sample 3] Comparative s1 to Comparative Sample 3 were prepared using a resin composition containing polyimine i. Comparative Sample 1 to Comparative Sample The main difference between the three components is the component other than the polyamidiamine A. Specifically, the comparative sample i is a resin composition containing no hydroxy compound A and an isocyanate compound a, which does not contain a plurality of 158118.doc.125-201237101. And production. Compare sample 2 It is produced by using a resin composition in which 5 parts by mass of the polyfunctional hydroxyl group-containing compound A is added to 100 parts by mass of the polyimine a. The comparative sample 3 is used in an amount of 〇〇 by mass relative to the polyimine. It is prepared by adding a resin composition containing 5 parts by mass of the isocyanate compound A. The preparation method or evaluation method of the comparison s pattern 1 to the comparison sample 3 is the same as that of the first embodiment. 0 [Comparative Sample 4 and Comparative Sample 5] Sample 4 and Comparative Sample 5 were produced using a resin composition containing polyimine im a, polyfunctional perfluoro-containing compound A, and isocyanate compound a. The main difference between the comparative samples 4 and 5 is the content of the isocyanate compound a relative to the polyfunctional trans-group-containing compound A (that is, the hydroxyl group contained in the polyfunctional permeation-containing compound and the isocyanate group contained in the isocyanate compound A). Moer than). More specifically, 'Comparative Sample 4 is a mixture of a polyfunctional permeation-containing compound a 1 part by mass and an isocyanate compound A 6 parts by mass based on 100 parts by mass of the polyimine A, thereby making a hydroxyl group and an isocyanate The molar ratio of the base is prepared by a resin composition having a hydroxyl group/isocyanate group = 1.4. Comparative Example 5 was prepared by adding 10 parts by mass of a polyfunctional hydroxyl group-containing compound A to an amount of the polyisocyanate a 1 part by mass, and an isocyanate compound a 20 mass> part by weight' to thereby form a hydroxyl group and an isocyanate group. The molar ratio is a resin composition having a hydroxyl group/isocyanate group = 0.4. The production method or evaluation method of the comparative samples 4 and 5 was the same as in the first embodiment. [Comparative Sample 6] Comparative Sample 6 was produced by using a resin composition containing a polyfunctional hydroxyl group-containing compound a and isocyanate 158118.doc-126-201237101 Compound A. Namely, Comparative Sample 6 was produced by using a resin composition containing no polyimine. The production method, evaluation method, and the like of Comparative Sample 6 were the same as in Example 1. [Comparative Sample 7] Comparative Sample 7 used a polyamidimide having a ruthenium iodide ratio of 100% containing a polyfunctional ketone-containing compound and a toxic isocyanate embedded in a skeleton (without a polyaminic acid structure) Polyimine; a resin composition hereinafter referred to as polybendimimine H). The polyfunctional hydroxyl group-containing compound and the isocyanate are embedded in the polyamidoxime, so that the polyfunctional content-containing compound and the blocked isocyanate are not contained as a component of the resin composition. The production method or evaluation method of the comparative sample 7 was the same as in the first embodiment. [polyimine]

聚醯亞胺Η之合成方法如下所示。首先,於三口可分離 式燒瓶上安裝氮氣導入管、溫度計、具有水分分離阱之球 型冷凝管。裝入旭化成化學公司製造之DURANOL Τ5651(分子量1000)78.88 g、六亞甲基二異氰酸酯26.91 g、 γ-丁内酯(GBL)177 g。於室溫、氮氣環境下以200 rpm擾拌 15分鐘後,升溫至140°C而攪拌1小時。繼而,添加4,4·-氧 雙鄰苯二甲酸二酐62.04 g(200毫莫耳)、GBL 176 g,一面 於170°C下以2〇〇 rpm進行攪拌一面使其反應1.5小時。進 而,冷卻至室溫,添加 BPDA 5.88 g、APB 40.55 g、GBL 353 g、曱苯70 g、Y_戊内酯2.2 g、°比咬3.5 g,一面於 17(TC下以200 rpm進行攪拌一面使其反應3.5小時。於反應 中,所副生之水與甲苯共沸,使用具有水分分離阱之球型 158118.doc -127- 201237101 冷凝管而於回流下進行脫水。除去副生水之後,停止回 流,將甲苯全部除去。其次,藉由5 μπ1之過濾器對生成物 進行加壓過濾’藉此獲得醯亞胺化率為1 〇〇%之聚醯亞胺Η 清漆。亦即’所謂聚醯亞胺Η相當於如下者:於樹脂組合 物中之聚醯亞胺中並不含聚酿胺酸結構,且並不將多官能 含經基化合物及嵌段異氰酸酯作為樹脂組合物中之成分, 而是嵌入至聚醞亞胺之骨架中者。 將比較試樣1〜比較試樣7之評價結果示於下述表4中。藉 由比較試樣1〜3、6可確認:於聚醯亞胺、多官能含羥基化 合物、異氰酸S旨化合物之任意者欠缺之情形時,並未獲得 良好之硬化物。又,藉由比較試樣4、5可確認:於異氰酸 醋化合物變過剩之羥基/異氰酸酯基=0.4中,由於異氰酸酯 化合物彼此之間的反應而產生翹曲,於多官能含羥基化合 物變過剩之羥基/異氰酸酯基= 1.4中,未反應物增加而耐化 學品性降低。亦即,確認於並非羥基/異氰酸酯基=〇.5〜1之 情形時,無法獲得良好之硬化物》又,藉由比較試樣7可 確認··於多官能含羥基化合物及異氰酸酯化合物嵌入至骨 架中’且並未含有多官能含羥基化合物及異氰酸酯化合物 作為樹脂組合物之成分之情形時,無法獲得良好之硬化 物。 158118.doc -128- 201237101 【!<】 實施例 <s 〇 r·^ ο 〇 ON 〇 120°C60 分鐘 180°C30 分鐘 〇 〇 〇 < < 〇 〇 〇 〇 〇 o m m 〇\ d 〇 〇 < < 〇 〇 〇 〇 〇 〇 ο 沄 〇\ 〇 180°C60 分鐘 180°C60 分鐘 〇 〇 ◎ < < 〇 〇 〇 〇 〇 00 ο ο 〇 〇 〇 〇 ◎ < < 〇 〇 〇 〇 〇 卜 o ο 寸 Os 〇 120°C60 分鐘 180°C30 分鐘 〇 〇 ◎ 〇 Ο 〇 〇 〇 〇 〇 o T—M ο 〇\ σ> 〇 〇 〇 ◎ 〇 〇 〇 〇 〇 〇 〇 o in »r> d 〇 〇 ◎ 〇 〇 〇 〇 〇 〇 〇 寸 o F-H Os ο 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 o t··^ 0\ c> 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 (N o Os d 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 o 〇 〇 o o 〇 〇 ◎ 〇 〇 〇 〇 〇 〇 〇 〇 o r—i 〇 ON d 〇 〇 ◎ 〇 〇 〇 〇 〇 〇 〇 σ\ ο § § OS d 〇 〇 ◎ 〇 〇 〇 〇 〇 〇 〇 00 ο o o 〇 〇 ◎ 〇 〇 〇 〇 〇 〇 〇 卜 ο ο 〇 Os o 〇 〇 ◎ 〇 〇 〇 〇 〇 〇 〇 VO ο VO o 〇 〇 ◎ 〇 〇 〇 〇 〇 〇 〇 o ο VJ o 〇 〇 ◎ 〇 〇 〇 〇 〇 〇 〇 寸 o νη On O 〇 〇 ◎ 〇 〇 〇 〇 〇 〇 〇 m o ο ο Os 〇 〇 〇 ◎ 〇 〇 〇 〇 〇 〇 〇 <N o »〇 On 〇 〇 〇 ◎ 〇 〇 〇 〇 〇 〇 〇 o r**H in Os 〇 〇 〇 ◎ 〇 〇 〇 〇 〇 〇 〇 1 試樣 < PQ < CC1 U Q ω Ρ-. < CQ U 經基/異氰酸醋基(mol比) 加熱條件1 加熱條件2 120°C~220°C 之黏度 彈性區域與塑性區域 起曲 耐焊料性 耐化學品性 於溫度85°c、濕度85%下之絕緣電阻 層間絕緣電阻 通孔埋入性 冷熱衝擊試驗 樹脂流動性 (a)聚醯亞胺 (質量份) (Β)多官能羥基化合物 (質量份) (c-1)異氰酸酯化合物 (質量份) 158118.doc • 129· 201237101 [表2] '----__ f施例 試樣 22 23 24 25 26 27 28 29 (a)聚醯亞胺(質量份) C 100 100 100 100 100 D 100 E 100 F 100 (B)多官能羥基化合物 (質量份) A 15 15 15 15 15 15 18 18 (c-1)異氰酸酯化合物 (質量份) A 15 15 15 15 15 15 18 18 經基/異氰酸酯基(mol比) 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 阻燃劑 A 23 23 27 27 B 18 18 觸媒 A 0.18 B 0.18 加熱條件1 120°C60 分鐘 120°C1 [0分鐘 加熱條件2 180°C30 分鐘 200°C15 分鐘 120°C〜220°C之黏度 〇 〇 〇 〇 〇 〇 〇 〇 彈性區域與塑性區域 〇 〇 〇 〇 〇 〇 〇 〇 赵曲 ◎ ◎ ◎ ◎ ◎ ◎ ◎ ◎ 耐焊料性 〇 〇 〇 〇 〇 〇 〇 〇 耐化學品性 〇 〇 〇 〇 〇 〇 〇 〇 於溫度85°C、濕度85%下之絕緣電阻 〇 〇 〇 〇 〇 〇 〇 〇 層間絕緣電阻 〇 〇 〇 〇 〇 〇 〇 〇 通孔埋入性 〇 〇 〇 〇 〇 〇 〇 〇 冷熱衝擊試驗 〇 〇 〇 〇 〇 〇 〇 〇 樹脂流動性 〇 〇 〇 〇 〇 〇 〇 〇 158118.doc 130- 201237101 [表3] ~~ ----- 實施例 試樣 30 31 32 33 34 35 ⑷聚醯亞胺(質量份) C 100 100 100 G 100 100 100 (B)多官能羥基化合物 (質量份) A 15 18 18 10 G 5 Η 6.2 (c-1)異氰酸酯化合物 (質量份) A 15 18 18 D 4.4 4.4 E 2 羥基/異氰酸酯基(mol比) 0.9 0.9 0.9 0.9 0.9 0.9 阻燃劑 A 23 27 27 B 18 18 觸媒 A 0.18 B 0.18 加熱條件1 120°C60 分鐘 120°C1 0分鐘 120°C60 分鐘 加熱條件2 180°C60 分鐘 200°C15 分鐘 180°C60 分鐘 120°C〜220°C之黏度 〇 〇 〇 〇 〇 〇 彈性區域與塑性區域 〇 〇 〇 〇 〇 〇 輕曲 ◎ ◎ ◎ ◎ ◎ ◎ 耐焊料性 〇 〇 〇 〇 〇 〇 耐化學品性 〇 〇 〇 〇 〇 〇 於溫度85°C、濕度85%下之絕緣電阻 〇 〇 〇 〇 〇 〇 層間絕緣電阻 〇 〇 〇 〇 〇 〇 通孔埋入性 〇 〇 〇 〇 〇 〇 冷熱衝擊試驗 〇 〇 〇 〇 〇 〇 樹脂流動性 〇 〇 〇 〇 〇 〇 158118.doc 131 · 201237101 [表4]The synthesis method of polyimine oxime is as follows. First, a nitrogen inlet tube, a thermometer, and a spherical condenser having a moisture separation well were attached to a three-neck separable flask. It was loaded with DURANOL® 5651 (molecular weight: 1000) 78.88 g, hexamethylene diisocyanate 26.91 g, and γ-butyrolactone (GBL) 177 g manufactured by Asahi Kasei Chemicals Co., Ltd. After stirring at 200 rpm for 15 minutes at room temperature under a nitrogen atmosphere, the temperature was raised to 140 ° C and stirred for 1 hour. Then, 62.04 g (200 mmol) of 4,4·-oxydiphthalic dianhydride and 176 g of GBL were added, and the mixture was reacted at 170 ° C for 2 hours while stirring at 2 rpm. Further, it was cooled to room temperature, and BPDA 5.88 g, APB 40.55 g, GBL 353 g, toluene 70 g, Y-valerolactone 2.2 g, and a ratio of 3.5 g were added, and the mixture was stirred at 200 rpm at 17 TC. The reaction was carried out for 3.5 hours. In the reaction, the by-produced water was azeotroped with toluene, and dehydrated under reflux using a spherical type 158118.doc -127-201237101 condenser having a moisture separation trap. The reflux was stopped, and all of the toluene was removed. Secondly, the product was subjected to pressure filtration by a filter of 5 μπ1, whereby a polyamidimide varnish having a ruthenium iodide ratio of 1% was obtained. The polyimine oxime is equivalent to the fact that the polyamidene in the resin composition does not contain a polystyryl structure, and the polyfunctional ketone-containing compound and the blocked isocyanate are not used as the resin composition. The components were embedded in the skeleton of the polyimide. The evaluation results of the comparative sample 1 to the comparative sample 7 are shown in the following Table 4. By comparing the samples 1 to 3 and 6, it was confirmed: Any of the polyimine, polyfunctional hydroxyl-containing compounds, and isocyanate S compounds In the absence of the case, a good hardened material was not obtained. Further, by comparing the samples 4 and 5, it was confirmed that the isocyanate compound became excessive in the hydroxyl group/isocyanate group = 0.4 because of the isocyanate compounds between each other. The reaction is warped, and in the hydroxyl group/isocyanate group in which the polyfunctional hydroxyl group-containing compound is excessively changed, the unreacted product is increased and the chemical resistance is lowered. That is, it is confirmed that it is not a hydroxyl group/isocyanate group = 〇.5 to 1 In the case of the case, a good cured product could not be obtained. Further, by comparing the sample 7, it was confirmed that the polyfunctional hydroxyl group-containing compound and the isocyanate compound were embedded in the skeleton and did not contain the polyfunctional hydroxyl group-containing compound and the isocyanate compound. In the case of the components of the resin composition, a good cured product cannot be obtained. 158118.doc -128- 201237101 [!<] Example <s 〇r·^ ο 〇ON 〇120°C 60 minutes 180°C 30 minutes〇 〇〇<< 〇〇〇〇〇omm 〇\ d 〇〇<< 〇〇〇〇〇〇ο 沄〇\ 〇180°C60 minutes 180°C60钟〇〇◎ <<< 〇〇〇〇〇00 ο ο 〇〇〇〇 ◎ <<< 〇〇〇〇〇 o o ο 寸 Os 〇 120 ° C 60 minutes 180 ° C 30 minutes 〇〇 ◎ 〇Ο 〇 〇〇〇〇o T—M ο 〇\ σ> 〇〇〇◎ 〇〇〇〇〇〇〇o in »r> d 〇〇◎ 〇〇〇〇〇〇〇 inch o FH Os ο 〇〇〇〇〇 〇〇〇〇〇ot··^ 0\ c> 〇〇〇〇〇〇〇〇〇〇(N o Os d 〇〇〇〇〇〇〇〇〇〇o 〇〇oo 〇〇◎ 〇〇〇〇〇 〇〇〇or—i 〇ON d 〇〇◎ 〇〇〇〇〇〇〇σ\ ο § § OS d 〇〇◎ 〇〇〇〇〇〇〇00 ο oo 〇〇◎ 〇〇〇〇〇〇〇卜ο ο 〇Os o 〇〇◎ 〇〇〇〇〇〇〇VO ο VO o 〇〇◎ 〇〇〇〇〇〇〇o ο VJ o 〇〇◎ 〇〇〇〇 〇〇o νη On O 〇〇◎ 〇〇〇〇〇〇〇mo ο ο Os 〇〇〇◎ 〇〇〇〇〇〇〇<N o »〇On 〇〇〇◎ 〇〇〇〇〇〇〇 Or**H in Os 〇〇〇◎ 〇〇〇〇〇〇〇1 sample<PQ < CC1 UQ ω Ρ-. < CQ U thiol/isocyanate (mol ratio) Heating condition 1 Heating condition 2 120 ° C ~ 220 ° C viscosity elastic region and plastic region bending resistance solder resistance chemical resistance at 85 ° C, humidity 85% under insulation resistance interlayer insulation resistance through hole buried thermal shock test Resin fluidity (a) Polyimine (parts by mass) (Β) Polyfunctional hydroxy compound (parts by mass) (c-1) Isocyanate compound (parts by mass) 158118.doc • 129· 201237101 [Table 2] '-- --__ f Example sample 22 23 24 25 26 27 28 29 (a) Polyimine (parts by mass) C 100 100 100 100 100 D 100 E 100 F 100 (B) Polyfunctional hydroxy compound (parts by mass) A 15 15 15 15 15 15 18 18 (c-1) Isocyanate compound (parts by mass) A 15 15 15 15 15 15 18 18 Meridyl/isocyanate group (mol ratio) 0.9 0.9 0.9 0.9 0.9 0.9 0.9 0.9 Flame retardant A 23 23 27 27 B 18 18 Catalyst A 0.18 B 0.18 Heating condition 1 120 ° C 60 Minute 120 °C1 [0 minutes heating condition 2 180 °C 30 minutes 200 °C 15 minutes 120 °C ~ 220 °C viscosity 〇〇〇〇〇〇〇〇 elastic region and plastic region 〇〇〇〇〇〇〇〇 Zhao Qu ◎ ◎ ◎ ◎ ◎ ◎ ◎ ◎ Solder resistance, chemical resistance, insulation resistance at 85 ° C and 85% humidity 〇〇〇〇〇〇 〇〇 interlayer insulation resistance 〇〇〇〇〇〇〇〇 through hole buried 〇〇〇〇〇〇〇〇 thermal shock test 〇〇〇〇〇〇〇〇 resin fluidity 〇〇〇〇〇〇〇〇 158118. Doc 130-201237101 [Table 3] ~~ ----- Example Sample 30 31 32 33 34 35 (4) Polyimine (parts by mass) C 100 100 100 G 100 100 100 (B) Polyfunctional hydroxy compound ( Parts by mass) A 15 18 18 10 G 5 Η 6.2 (c-1) Isocyanate compound (parts by mass) A 15 18 18 D 4.4 4.4 E 2 Hydroxy/isocyanate group (mol ratio) 0.9 0.9 0.9 0.9 0.9 0.9 Flame retardant A 23 27 27 B 18 18 Catalyst A 0.18 B 0.18 Heating conditions 1 120 ° C 60 minutes 120 ° C 1 0 minutes 120 ° C 60 minutes heating conditions 2 180 ° C 60 minutes 200 ° C 15 minutes 180 ° C 60 minutes 120 ° C ~ 220 ° C viscosity 〇〇〇〇 〇〇 Elastic region and plastic region 〇〇〇〇〇〇 曲 ◎ ◎ ◎ ◎ ◎ ◎ Solder resistance 〇〇〇〇〇〇 Chemical resistance 温度 at 85 ° C, humidity 85% Insulation resistance 〇〇〇〇〇〇 interlayer insulation resistance 〇〇〇〇〇〇 through hole buried 〇〇〇〇〇〇 thermal shock test 〇〇〇〇〇〇 resin fluidity 〇〇〇〇〇〇 158118.doc 131 · 201237101 [Table 4]

-'—-_ 比較例 比較試樣 1 2 3 4 5 6 7 (a)聚醯亞胺(質量份) A 100 100 100 100 100 Η 100 (B)多官能羥基化合物(質量份) A 5 10 10 10 (c-I)異氰酸酯化合物(質量份) A 5 6 20 10 經基/異氰酸酯基(mol比) - - - 1.4 0.4 0.9 - 加熱條件1 20°C60分鐘 加熱條件2 180°C30 分鐘 120°C〜220°C之黏度 X X X X X X X 彈性區域與塑性區域 X X X X X X X 勉曲 X X X 〇 X 〇 X 耐焊料性 X X 〇 X X X X 耐化學品性 Δ X 〇 X 〇 X X 於溫度85°C、濕度85%下之絕緣電阻 X X 〇 X X 〇 〇 層間絕緣電阻 X X 〇 X X 〇 〇 通孔埋入性 X X X X X X X 冷熱衝擊試驗 X X X X X X X 樹脂流動性 X X X X X X X 由表1〜表4可知:根據實施例1及比較例1之評價結果可 確認藉由使用含有具有聚醯亞胺結構及聚醯胺酸結構作為 結構單元之聚醯亞胺、多官能含羥基化合物、異氰酸酯化 合物,且多官能含羥基化合物中所含之羥基與異氰酸酯化 合物中所含之異氰酸酯基之莫耳比為羥基/異氰酸酯基 =0.5〜1的樹脂組合物,可獲得勉曲得到充分抑制、且具有 優異之耐熱性的硬化膜。 又,由表1〜表3可知:於使用實施例1之樹脂組合物的試 樣1〜試樣35之樹脂膜中,可控制120°C〜220°C之黏度與樹 脂膜之彈性區域及塑性區域,因此可知樹脂流動性、通孔 埋入性、耐冷熱衝擊性變良好。因此,於布線板之製造步 驟中使用之情形時,可同時實現於通孔中之埋入性、防止 158118.doc -132- 201237101 樹脂組合物自布線板之端部流出。 關於本發明之第2實施形態之樹脂組合物,參照以下之 實施例2〜實施例12及比較例2~比較例6加以說明。再者, 以下之實施例2~實施例12係第2態樣之樹脂組合物。 〈試劑&gt; 於實施例及比較例中’所使用之試劑如下所示。再者’ 於以下之實施例2〜實施例12及比較例2~比較例6以及表5及 表6中,記載以下之試劑之簡稱。 (a) 聚醯亞胺成分:BPDA(三井化學公司製造)、APB(商 品名:APB-N、三井化學公司製造)、通式(5)所表示之二 胺:聚醚胺(商品名:聚醚胺D-400(以下僅僅記載為「D-400」)、BASF公司製造、m+n+p=6.1)、JEFFAMINE(商品 名:JEFFAMINE D-230(以下僅僅記載為「D-230」)、 Huntsman公司製造、m+n+p=2.5)、JEFFAMINE (商品名: JEFFAMINE XTJ-542(以下僅僅記載為「XJT-400」)、 Huntsman公司製造、m+n+p = 15)、JEFFAMINE(商品名: JEFFAMINE D-2000、Huntsman公司製造、m+n+p=33)。 (b) 2官能含羥基化合物:聚碳酸酯二醇(商品名: DURANOL T5651(以下僅僅記載為「T5651」)、旭化成化 學公司製造)、聚碳酸酯二醇(商品名:DURANOL Τ4671(以下僅僅記載為「Τ4671」)、旭化成化學公司製 造)。 (c-1)異氰酸酯化合物:嵌段異氰酸酯(商品名: Duranate SBN-70D(以下僅僅記載為「SBN-70D」)、旭化 158118.doc •133- 201237101 成化學公司製造)、嵌段異氰酸酯(商品名:Duranate τρΑ· Β80Ε(以下僅僅記載為γτρα_Β8〇ε」)、旭化成化學公司 製造)。 (D)光敏劑1 (具有2個雙鍵之化合物):E〇改性雙齡a二 甲基丙烯酸脂(商品名:BPE-500、新中村化學工業公司製 造)。 (D) 光敏劑2(具有3個以上雙鍵之化合物):三經甲基丙 烷p〇改性三丙烯酸酯(商品名:AR0NIX M_3 i〇(以下僅僅 s己載為「M-3 10」)、東亞合成公司製造、相當於具有3個 雙鍵之化合物)。 (E) 光聚合起始劑:乙酮^[9·乙基_6_(2_甲基苯甲醯基)_ 9H-吟嗤-3-基]-l-(〇-乙醯肟)(商標名:IRGAcuREOXE-02、Ciba Japan K.K.製造)。 (F) 碟化合物.碟腈化合物(商品名:Fp_3〇〇、伏見製藥 所公司製造)。 (其他).甲苯(和光純藥工業公司製造、有機合成用)、 γ-丁内酯(和光純藥工業公司製造)、碳酸鈉(和光純藥工業 公司製造)。 &lt;重量平均分子量測定&gt; 作為重量平均分子量之測定法的凝膠滲透層析法(GPC) 可藉由下述之條件而進行測地。作為溶劑,使用Ν,ν-二甲 基曱醯胺(和光純藥工業公司製造、高速液體層析儀用), 使用於測定前添加有24.8 mmol/L之溴化鐘單水合物(和光 純藥工業公司製造、純度為99.5%)及63.2 mm〇i/L之磷酸 158118.doc-'--_ Comparative Example Comparative Sample 1 2 3 4 5 6 7 (a) Polyimine (parts by mass) A 100 100 100 100 100 Η 100 (B) Polyfunctional hydroxy compound (parts by mass) A 5 10 10 10 (cI) isocyanate compound (parts by mass) A 5 6 20 10 thiol/isocyanate group (mol ratio) - - - 1.4 0.4 0.9 - Heating condition 1 20 ° C 60 minutes heating condition 2 180 ° C 30 minutes 120 ° C ~ Viscosity at 220 °C XXXXXXX Elastic region and plastic region XXXXXXX Distorted XXX 〇X 〇X Solder resistance XX 〇XXXX Chemical resistance Δ X 〇X 〇XX Insulation resistance XX at temperature 85 ° C, humidity 85% XX 〇〇 interlayer insulation resistance XX 〇 XX 〇〇 through hole embedding XXXXXXX thermal shock test XXXXXXX Resin fluidity XXXXXXX It can be seen from Table 1 to Table 4 that the evaluation results according to Example 1 and Comparative Example 1 can be confirmed by using Polyimine, polyfunctional hydroxyl-containing compound, isocyanate compound having a polyfluorene imide structure and a polyamic acid structure as a structural unit, and a hydroxyl group contained in the polyfunctional hydroxyl group-containing compound The resin composition having a hydroxyl group/isocyanate group = 0.5 to 1 in the molar ratio of the isocyanate group contained in the isocyanate compound is a cured film which is sufficiently suppressed in distortion and has excellent heat resistance. Further, as is clear from Tables 1 to 3, in the resin films of Samples 1 to 35 in which the resin composition of Example 1 was used, the viscosity at 120 ° C to 220 ° C and the elastic region of the resin film were controlled. Since the plastic region is formed, it is understood that the resin fluidity, the through-hole embedding property, and the thermal shock resistance are improved. Therefore, in the case of use in the manufacturing steps of the wiring board, the embedding property in the through hole can be simultaneously achieved, and the resin composition can be prevented from flowing out from the end portion of the wiring board. The resin composition of the second embodiment of the present invention will be described with reference to the following Examples 2 to 12 and Comparative Examples 2 to 6. Further, the following Examples 2 to 12 are the resin compositions of the second aspect. <Reagents> The reagents used in the examples and comparative examples are as follows. Further, in the following Examples 2 to 12 and Comparative Examples 2 to 6 and Tables 5 and 6, the abbreviations of the following reagents are described. (a) Polyimine component: BPDA (manufactured by Mitsui Chemicals, Inc.), APB (trade name: APB-N, manufactured by Mitsui Chemicals, Inc.), diamine represented by the general formula (5): polyetheramine (trade name: Polyetheramine D-400 (hereinafter simply referred to as "D-400"), manufactured by BASF Corporation, m+n+p=6.1), JEFFAMINE (trade name: JEFFAMINE D-230 (hereinafter only described as "D-230") ), manufactured by Huntsman, m+n+p=2.5), JEFFAMINE (trade name: JEFFAMINE XTJ-542 (hereinafter only described as "XJT-400"), manufactured by Huntsman, m+n+p = 15), JEFFAMINE (trade name: JEFFAMINE D-2000, manufactured by Huntsman, m+n+p=33). (b) Bifunctional hydroxyl group-containing compound: polycarbonate diol (trade name: DURANOL T5651 (hereinafter simply referred to as "T5651"), manufactured by Asahi Kasei Chemical Co., Ltd.), polycarbonate diol (trade name: DURANOL Τ 4671 (hereinafter only It is described as "Τ4671"), manufactured by Asahi Kasei Chemicals Co., Ltd.). (c-1) Isocyanate compound: Block isocyanate (trade name: Duranate SBN-70D (hereinafter simply referred to as "SBN-70D"), Asahi Kasei 158118.doc • 133-201237101 manufactured by Seiko Chemical Co., Ltd.), blocked isocyanate ( Product name: Duranate τρΑ· Β80Ε (hereinafter only described as γτρα_Β8〇ε), manufactured by Asahi Kasei Chemicals Co., Ltd.). (D) Photosensitizer 1 (compound having two double bonds): E〇 modified double age a dimethacrylate (trade name: BPE-500, manufactured by Shin-Nakamura Chemical Co., Ltd.). (D) Photosensitizer 2 (compound with more than 3 double bonds): trimethylpropane-p-modified triacrylate (trade name: AR0NIX M_3 i〇 (hereinafter only s is contained as "M-3 10" ), manufactured by the East Asian Synthetic Company, equivalent to a compound having three double bonds). (E) Photopolymerization initiator: ethyl ketone^[9·ethyl_6_(2-methylbenzhydryl)_9H-indol-3-yl]-l-(〇-acetamidine) ( Trade name: IRGAcuREOXE-02, manufactured by Ciba Japan KK). (F) Disc compound. Disc nitrile compound (trade name: Fp_3〇〇, manufactured by Fushimi Pharmaceutical Co., Ltd.). (Others). Toluene (manufactured by Wako Pure Chemical Industries, Ltd., organic synthesis), γ-butyrolactone (manufactured by Wako Pure Chemical Industries, Ltd.), sodium carbonate (manufactured by Wako Pure Chemical Industries, Ltd.). &lt;Measurement of Weight Average Molecular Weight&gt; Gel permeation chromatography (GPC), which is a method for measuring the weight average molecular weight, can be measured by the following conditions. As a solvent, Ν, ν-dimethyl decylamine (manufactured by Wako Pure Chemical Industries, Ltd., high-speed liquid chromatography) was used, and 24.8 mmol/L of brominated clock monohydrate was added before the measurement (and pure light) Manufactured by Pharmaceutical Industries, with a purity of 99.5%) and 63.2 mm〇i/L of 158118.doc

. S 201237101 (和光純藥工業公司製造、高速液體層析儀用)者。 管柱:Shodex KD-806M(昭和電工公司製造)S 201237101 (manufactured by Wako Pure Chemical Industries, Inc., for high-speed liquid chromatography). Pipe column: Shodex KD-806M (made by Showa Denko)

流速:1.0 mL/分鐘 管柱溫度:40°C 泵:PU-2080Plus(JASCO公司製造) 偵測器:RI-2031Plus(RI :示差折射儀、JASCO公司製造) UV-2075Plus(UV-VIS :紫外可見吸光計、JASCO公司製造) 又,用以算出重量平均分子量之校準曲線係使用標準聚 苯乙烯(Tosoh公司製造)而作成。 &lt;膜厚測定&gt; 硬化體之膜厚測定係使用膜厚計(Mitutoyo公司製造、 ID-C112B)而進行。 &lt;感光性膜之製造方法&gt; 感光性樹脂組合物之塗佈方法係藉由使用 FILMCOATER(TESTER S ANGYO 公司製造、PI 1210)之刮 刀成形法而進行。於PET膜(帝人杜邦薄膜公司製造、G2) 上滴加前述感光性樹脂組合物,以150 μηι之間隙進行塗 佈。使用乾燥器(ESPEC公司製造、SPHH-101),於95°C下 對所塗佈之前述膜進行12分鐘之乾燥,獲得感光性膜。 &lt;層壓條件&gt; 層壓係使用真空壓製機(名機製作所製造)而進行。於壓 製溫度為70°(:、壓製壓力為0.5 MPa、壓製時間為30秒下 進行行。 &lt;顯影性評價&gt; 158118.doc -135- 201237101 顯影性評價可藉由如下方 栋用忒止以时 飞而進订:於銅猪積層板上, 吏用感光性膜而於上述層壓 γ/ 2 '、牛下進行層壓後’於30〜3〇{] mJ/cm不進行曝光,繼而進 . ⑺用1質量%碳酸鈉水溶液 驗性肩衫處理與利用水 妙二化 Τ洗’於乾燥後藉由光學顯微 鏡而對圖案進行評價。遮罩中 早Τ使用直徑為100 μπι之圓形圖 案(間隔為100 μιη之間距)。將拉占 J將错由顯影而於未曝光部呈現 銅面、且殘膜率為90%以卜而H A ☆ ^ 上而且未發現圖案之變形之情形 記為〇,將殘膜率為9〇%以t彳日抵 上仁發現圖案之變形之情形記 為A 〇 &lt;煅燒後之翹曲測定&gt; 將所得之感光性膜,於上述層壓條件下層壓於 Kapton(註冊商標)(12 μιη)上之後,於l8〇t:下進行2小時之 緞燒。將該膜切出5 Cm見方’將端部之隆起高度為5麵以 内之情形記為〇,將5〜1〇 内之情形記為△,將具有 其以上之隆起高度之情形記為父。 &lt;絕緣可靠性(财I]V[性)評價&gt; 絕緣可靠性評價係以如下之方式而實施。於線與間隙為 20 μπι/20 μιη之梳型基板上,於上述層壓條件了層壓感光 性膜之後’於上述條件下進行曝光、顯影,於l8〇〇c下進 行2小時之煅燒。於膜上焊接電子遷移測定器之電纜,於 下述條件下進行絕緣可靠性試驗。 絕緣劣化評價系統:SIR-12(楠本化成公司製造) IM腔室:EHS-211M(ESPEC公司製造)Flow rate: 1.0 mL/min Column temperature: 40 °C Pump: PU-2080Plus (manufactured by JASCO) Detector: RI-2031Plus (RI: differential refractometer, manufactured by JASCO) UV-2075Plus (UV-VIS: UV Visible light meter, manufactured by JASCO Co., Ltd.) The calibration curve for calculating the weight average molecular weight was prepared using standard polystyrene (manufactured by Tosoh Corporation). &lt;Measurement of film thickness&gt; The film thickness measurement of the cured body was carried out using a film thickness meter (manufactured by Mitutoyo Co., Ltd., ID-C112B). &lt;Manufacturing Method of Photosensitive Film&gt; The method of applying the photosensitive resin composition is carried out by a doctor blade forming method using FILMCOATER (manufactured by TESTER S ANGYO Co., Ltd., PI 1210). The photosensitive resin composition was dropped on a PET film (manufactured by Teijin DuPont Film Co., Ltd., G2), and coated with a gap of 150 μm. The coated film was dried at 95 ° C for 12 minutes using a drier (manufactured by ESPEC Co., Ltd., SPHH-101) to obtain a photosensitive film. &lt;Lamination conditions&gt; The lamination was carried out using a vacuum press (manufactured by Naji Seisakusho Co., Ltd.). The pressing temperature was 70° (:, the pressing pressure was 0.5 MPa, and the pressing time was 30 seconds. &lt;Developability evaluation&gt; 158118.doc -135-201237101 The developability evaluation can be stopped by the following In the case of a copper pig laminate, the laminate is immersed in the laminated γ/ 2 ', under the cow with a photosensitive film, and is not exposed at 30~3〇{] mJ/cm. Then proceed. (7) Use 1% by mass aqueous sodium carbonate solution for shoulder-shoulder treatment and use water to clean the skin. After drying, the pattern is evaluated by optical microscopy. In the mask, a circle with a diameter of 100 μm is used. Shape pattern (interval between 100 μm). The film is pulled out by the developer and the copper surface is exposed in the unexposed portion, and the residual film rate is 90%, and HA ☆ ^ is not found. In the case of 〇, the residual film ratio is 9〇%, and the deformation of the pattern is found on the day after the 彳 记 记 记 A 〇 lt lt lt lt 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定After lamination on Kapton (registered trademark) (12 μιη), it was carried out for 2 hours under l8〇t: Satin burning. The film is cut out at 5 Cm square. The case where the height of the end portion is within 5 sides is denoted by 〇, and the case where 5 to 1 inch is inside is denoted by Δ, and the case where the height of the ridge is greater than <Parent reliability> (I) evaluation of insulation reliability is carried out in the following manner: on a comb-shaped substrate having a line and a gap of 20 μm / 20 μm, in the above layer After laminating the photosensitive film under pressure conditions, exposure and development were carried out under the above conditions, and calcination was carried out for 2 hours at 18 ° C. The cable of the electron mobility measuring device was welded to the film, and the insulation was reliably performed under the following conditions. Test. Insulation deterioration evaluation system: SIR-12 (manufactured by Nanben Chemical Co., Ltd.) IM chamber: EHS-211M (manufactured by ESPEC)

溫度:85°CTemperature: 85 ° C

158118.doc -136. S 201237101 濕度:85%158118.doc -136. S 201237101 Humidity: 85%

施加電壓:20 V 施加時間:1000小時 絕緣電阻值:將不足1·〇χ106 Ω之情形記為X,將^⑽⑺6 Ω〜 不足Ι.ΟχΙΟ7 Ω之情形記為Δ,將l.OxlO7 Ω〜不足Ι.Οχίο8 Ω 之情形記為〇,將Ι.ΟχΙΟ8 Ω以上之情形記為@。 外觀(樹枝狀結晶):於光學顯微鏡(ECLIPS LV100尼康 製造)、透射光、200倍之條件下對ΙΜ試驗後之梳型基板進 行觀察’將發現產生樹枝狀結晶之情形記為X,將未發現 之情形記為〇。 外觀(膨脹及變色):於光學顯微鏡(ECLIPS LV100尼康 製造)、明視野1 00倍之條件下對IM試驗後之梳型基板進行 觀察,將發現絕緣皮膜之膨脹及變色之情形記為X ,將發 現僅僅產生絕緣皮膜之膨脹之情形記為Δ,將未發現膨脹 及變色之情形記為〇。 〈聚醯亞胺(1)&gt; 於氮氣環境下,於具有Dean-Stark裝置及回流器之可分 離式燒瓶中裝入γ-丁内酯(255 g)、甲苯(51.0 g)、聚醚胺D_ 400(86.8 g(201.9 mmol))、BPDA(120 g(407.9 mmol)),升 溫至180°C,於180°C下加熱攪拌1小時。除去作為共沸溶 劑之曱苯後v冷卻至40°C,繼而添加APB-N(48.4 g(165.7 mmol)),於40°C下進行4小時之攪拌,獲得聚醯亞胺(1)之 溶液。將所得之聚醯亞胺(1)之重量平均分子量示於下述表 5中。 158118.doc -137- 201237101 &lt;聚醯亞胺(2)&gt; 於氮氣環境下,於具有Dean-Stark裝置及回流器之可分 離式燒瓶中裝入γ-丁内酯(87.0 g)、甲苯(17.0 g)、聚醚胺 \ D-400(5.00 g(11.63 mmol)) ' BPDA(30.0 g(102.0 mmol)) 5 升溫至180°C,於180°C下加熱攪拌1小時。除去作為共沸 溶劑之曱苯後,冷卻至40°C,繼而添加ΑΡΒ-Ν(23·5 g(80.3 9 mmol)),於40°C下進行4小時之攪拌,獲得聚醯亞 胺(2)之溶液。將所得之聚醯亞胺(2)之重量平均分子量示 於下述表5中。 &lt;聚醯亞胺(3)&gt; 於氮氣環境下,於具有Dean-Stark裝置及回流器之可分 離式燒瓶中裝入γ-丁内酯(99.0 g)、曱苯(20.0 g)、聚醚胺 D-400(32.0 g(74.42 mmol)) ' BPDA(30.0 g(102.0 mmol)) &gt; 升溫至1 80°C,於1 80°C下加熱攪拌1小時。除去作為共沸 溶劑之甲苯後,冷卻至40°C,繼而添加APB-N(5.00 g(17.10 mmol)),於40°C下進行4小時之攪拌,獲得聚醯亞 胺(3)之溶液。將所得之聚醯亞胺(3)之重量平均分子量示 於下述表5中。 &lt;聚醯亞胺(4)&gt; 於氮氣環境下,於具有Dean-Stark裝置及回流器之可分 離式燒瓶中裝入γ-丁内酯(80_0 g)、甲苯(16.0 g)、聚醚胺 D-230(16.8 g(73.04 mmol)) &gt; BPDA(30.0 g(102.0 mmol)) &gt; 升溫至180°C,於180°C下加熱攪拌1小時。除去作為共沸 溶劑之曱苯後,冷卻至40°C,繼而添加ΑΡΒ-Ν(5·60 -138- 158118.doc 201237101 g( 19.16 mmol),於40°C下進行4小時之攪拌,獲得聚醯亞 胺(4)之溶液。將所得之聚醯亞胺(4)之重量平均分子量示 於下述表5中。 &lt;聚醯亞胺(5)&gt; 於氮氣環境下,於具有Dean-Stark裝置及回流器之可分 離式燒瓶中裝入γ- 丁内酯(107 g)、甲苯(21.0 g)、 JEFFAMINE XTJ-542(25.7 g(25.70 mmol)) ' BPDA(30.0 g(102.0 mmol)),升溫至180°C,於180°C下加熱攪拌1小 時。除去作為共沸溶劑之甲苯後,冷卻至40°C,繼而添加 APB-N(18.9 g(64.65 mmol),於40°C 下進行 4小時之攪拌, 獲得聚醯亞胺(5)之溶液。將所得之聚醯亞胺(5)之重量平 均分子量示於下述表5中。 &lt;聚醯亞胺(6)&gt; 於氣氣環境下,於具有Dean-Stark裝置及回流器之可分 離式燒瓶中裝入γ- 丁内酯(120 g)、曱苯(24.0 g)、 JEFFAMINE D-2000(27.4 g(13.70 mmol))、BPDA(30.0 g (102.0 mmol)),升溫至180°C,於180°C下加熱攪拌1小 時。除去作為共沸溶劑之甲苯後,冷卻至40°C,繼而添加 APB-N(22.2 g(75.94 mmol),於 40°C 下進行 4 小時之攪拌, 獲得聚醯亞胺(6)之溶液。將所得之聚醯亞胺(6)之重量平 均分子量示於下述表5中。 [實施例2] 相對於聚醯亞胺(1)100質量份而言,混合T5651(6質量 份)、SBN_70D(6質量份)、ΒΡΕ-500(40質量份)、Μ-310(20 158118.doc -139- 201237101 質量份)、〇XE-G2(l質量份)、fp_3gq(25質量份),調製感 光性樹脂組合物。藉由上述方法將所得之感光性樹脂組合 物乾膜化,獲得感光性膜。藉由上述方法對該感光性膜之 顯影性、煅燒後之翹曲、絕緣可靠性(耐進行評價。 將結果示於下述表6中。 [實施例3] 相對於聚醯亞胺(i)ioo質量份而言,混合T467l(6質量 份)、SBN-70D(6質量份)、BPE_5〇〇(4〇f 量份)、M 3i〇(2〇 質量份)、〇XE-02(1質量份)、Fp_3〇〇(25f量份),調製感 光性樹脂組合物。藉由上述方法將所得之感光性樹脂組合 物乾膜化,獲得感光性膜。藉由上述方法對該感光性膜之 顯影性、煅燒後之翹曲、絕緣可靠性(耐)進行評價。 將結果示於下述表6中。 [實施例4] 相對於聚醯亞胺(1)100質量份而言,混合Τ565 1(6質量 份)、ΤΡΑ-Β80Ε(6 質量份)、βΡΕ_5〇〇(4〇 質量份)、Μ_ 3 10(20 質量份)、ΟΧΕ-Ο2(1 質量份)、FP-300(25 質量份), 調製感光性樹脂組合物。藉由上述方法將所得之感光性樹 脂組合物乾膜化,獲得感光性膜。藉由上述方法對該感光 性膜之顯影性、煅燒後之翹曲、絕緣可靠性(耐丨厘性)進行 評價。將結果示於下述表6中。 [實施例5] 相對於聚醯亞胺(1) 100質量份而言,混合T565 1 (6質量 份)、SBN_70D(10 質量份)' BPE-500(40 質量份)、μ- 158118.doc -140- 201237101 310(20 質量份)、OXE_02(1 質量份)、Fp_3〇〇(25 質量份), 調製感光性樹脂組合物。藉由上述方法將所得之感光 脂組合物乾膜化,獲得感光性膜。藉由上述方法對該感光 性膜之顯影性、煅燒後之翹曲、絕緣可靠性(耐進行 評價。將結果示於下述表6中。 [實施例6] 相對於聚醯亞胺(1)100質量份而言,混合Τ5651(6質量 份)、SBN-70D(6 質量份)、BpE_500(40f 量份)、〇XE〇2(1 質量份)、FP-3〇0(25質量份),調製感光性樹脂組合物。藉 由上述方法將所得之感光性樹脂組合物乾膜化,獲得感光 性膜。藉由上述方法對該感光性膜之顯影性、煅燒後之翹 曲、絕緣可靠性(耐IM性)進行評價。將結果示於下述表6中。 [實施例7] 相對於聚醢亞胺(1)1〇〇質量份而言,混合T5651(6質量 伤)、SBN-70D(6 質量份)、μ_3 10(20 質量份)、〇ΧΕ-02(1 質 量份)、FP-300(25質量份)’調製感光性樹脂組合物。藉由 上述方法將所得之感光性樹脂組合物乾膜化,獲得感光性 膜。藉由上述方法對該感光性膜之顯影性、煅燒後之翹曲、 絕緣可靠性(耐IM性)進行評價。將結果示於下述表6中。 [實施例8〜實施例12] 相對於聚醯亞胺(2)〜(6)各1〇〇質量份,混合T5651 (6質量 份)、SBN-70D(6質量份)、bpe_5〇〇(4〇質量份)、m_310(20 質量份)、ΟΧΕ-Ο2(1質量份)、Fp_3〇〇(25質量份),調製感 光性樹脂組合物。藉由上述方法將所得之感光性樹脂組合 158118.doc -141- 201237101 物乾膜化’獲得感光性膜。藉由上述方法對該感光性膜之 顯影性、煅燒後之翹曲、絕緣可靠性(耐IIvU±)進行評價。 將結果示於下述表6中。 [比較例2] 相對於聚醯亞胺(1)100質量份而言,混合31&gt;匕5〇〇(4〇質 量份)、M-310(20 質量份)、OXE_〇2(1 質量份)、Fp_3〇〇Q5 質量份)’調製感光性樹脂組合物》藉由上述方法將所得 之感光性樹脂組合物乾膜化,獲得感光性膜。藉由上述方 法對該感光性膜之顯影性、煅燒後之翹曲、絕緣可靠性 (耐IM性)進行評價。將結果示於下述表6中。 [比較例3] 相對於聚醢亞胺(1)100質量份而言,混合T565 1(6質量 份)、BPE-500(40 質量份)、m_310(20 質量份)、OXE_〇2(1 質量份)、FP-300(25質量份),調製感光性樹脂組合物。藉 由上述方法將所得之感光性樹脂組合物乾膜化,獲得感光性 膜。藉由上述方法對該感光性膜之顯影性、煅燒後之翹曲、 絕緣可靠性(耐IM性)進行評價。將結果示於下述表6中。 [比較例4] 相對於聚醯亞胺(1)100質量份而言,混合SBN-70D(6質 量份)、BPE-500(40 質量份)、M-310(20 質量份)、OXE-〇2(1質量份)、FP-300(25質量份),調製感光性樹脂組合 物。藉由上述方法將所得之感光性樹脂組合物乾膜化,獲 付感光性膜。藉由上述方法對該感光性膜之顯影性、缎燒 後之勉曲、絕緣可靠性(耐IM性)進行評價。將結果示於下 142· 158118.docApplied voltage: 20 V Application time: 1000 hours Insulation resistance value: Write less than 1·〇χ106 Ω as X, and ^(10)(7)6 Ω~ less than ΟχΙΟ.ΟχΙΟ7 Ω as Δ, l.OxlO7 Ω~ insufficient Ι.Οχίο8 Ω is recorded as 〇, and Ι.ΟχΙΟ8 Ω or more is recorded as @. Appearance (dendritic crystal): Observing the comb-shaped substrate after the ruthenium test under the condition of an optical microscope (manufactured by ECLIPS LV100 Nikon), transmitted light, 200 times, 'The case where dendrites are produced is recorded as X, and will not be The situation found is recorded as 〇. Appearance (expansion and discoloration): The comb-shaped substrate after the IM test was observed under an optical microscope (manufactured by ECLIPS LV100 Nikon) and a field of view of 100 Å. The expansion and discoloration of the insulating film were recorded as X. It was found that only the expansion of the insulating film was recorded as Δ, and the case where no expansion and discoloration were observed was recorded as 〇. <Polyimine (1)&gt; In a separable flask equipped with a Dean-Stark apparatus and a reflux apparatus, γ-butyrolactone (255 g), toluene (51.0 g), and polyether were placed under a nitrogen atmosphere. The amine D_400 (86.8 g (201.9 mmol)) and BPDA (120 g (407.9 mmol)) were heated to 180 ° C and stirred at 180 ° C for 1 hour. After removing the terpene as an azeotropic solvent, the mixture was cooled to 40 ° C, and then APB-N (48.4 g (165.7 mmol)) was added thereto, and stirred at 40 ° C for 4 hours to obtain a polyimine (1). Solution. The weight average molecular weight of the obtained polyimine (1) is shown in Table 5 below. 158118.doc -137- 201237101 &lt;Polyimide (2)&gt; In a separable flask equipped with a Dean-Stark apparatus and a reflux apparatus, γ-butyrolactone (87.0 g) was placed under a nitrogen atmosphere. Toluene (17.0 g), polyetheramine \ D-400 (5.00 g (11.63 mmol)) 'BPDA (30.0 g (102.0 mmol)) 5 was heated to 180 ° C, and stirred under heating at 180 ° C for 1 hour. After removing the terpene as an azeotropic solvent, it was cooled to 40 ° C, and then ruthenium-iridium (23. 5 g (80.3 9 mmol)) was added, and stirred at 40 ° C for 4 hours to obtain a polyimine ( 2) The solution. The weight average molecular weight of the obtained polyimine (2) is shown in Table 5 below. &lt;Polyimine (3)&gt; In a separable flask equipped with a Dean-Stark apparatus and a reflux apparatus, γ-butyrolactone (99.0 g) and toluene (20.0 g) were placed under a nitrogen atmosphere. Polyetheramine D-400 (32.0 g (74.42 mmol)) 'BPDA (30.0 g (102.0 mmol)) &gt; The temperature was raised to 1800 ° C and stirred at 1800 ° C for 1 hour. After removing toluene as an azeotropic solvent, it was cooled to 40 ° C, and then APB-N (5.00 g (17.10 mmol)) was added, and stirred at 40 ° C for 4 hours to obtain a solution of polyimine (3). . The weight average molecular weight of the obtained polyimine (3) is shown in Table 5 below. &lt;Polyimine (4)&gt; In a separable flask equipped with a Dean-Stark apparatus and a reflux apparatus, γ-butyrolactone (80_0 g), toluene (16.0 g), and poly were charged under a nitrogen atmosphere. Ether amine D-230 (16.8 g (73.04 mmol)) &gt; BPDA (30.0 g (102.0 mmol)) &gt; The temperature was raised to 180 ° C, and the mixture was heated and stirred at 180 ° C for 1 hour. After removing the benzene as an azeotropic solvent, it was cooled to 40 ° C, and then ΑΡΒ-Ν (5·60 -138-158118.doc 201237101 g (19.16 mmol) was added, and stirred at 40 ° C for 4 hours to obtain A solution of the polyimine (4). The weight average molecular weight of the obtained polyimine (4) is shown in the following Table 5. <Polyimine (5)&gt; Under a nitrogen atmosphere, A separable flask of Dean-Stark apparatus and reflux was charged with γ-butyrolactone (107 g), toluene (21.0 g), JEFFAMINE XTJ-542 (25.7 g (25.70 mmol)) 'BPDA (30.0 g (102.0) Methyl)), the temperature was raised to 180 ° C, and the mixture was heated and stirred at 180 ° C for 1 hour. After removing the toluene as an azeotropic solvent, it was cooled to 40 ° C, followed by the addition of APB-N (18.9 g (64.65 mmol), at 40 The solution of the polyimine (5) was obtained by stirring for 4 hours at ° C. The weight average molecular weight of the obtained polyimine (5) is shown in the following Table 5. &lt;Polyimine (6) </ RTI> γ-butyrolactone (120 g), toluene (24.0 g), JEFFAMINE D-2000 (27.4 g) were placed in a separable flask equipped with a Dean-Stark apparatus and a reflux apparatus in an air atmosphere. (13.70 mmol) BPDA (30.0 g (102.0 mmol)), the temperature was raised to 180 ° C, and the mixture was heated and stirred at 180 ° C for 1 hour. After removing the toluene as an azeotropic solvent, it was cooled to 40 ° C, and then APB-N was added (22.2). g (75.94 mmol) was stirred for 4 hours at 40 ° C to obtain a solution of polyimine (6). The weight average molecular weight of the obtained polyimine (6) is shown in Table 5 below. [Example 2] T5651 (6 parts by mass), SBN_70D (6 parts by mass), ΒΡΕ-500 (40 parts by mass), Μ-310 (20 158118) were mixed with 100 parts by mass of the polyimine (1). .doc - 139 - 201237101 parts by mass), 〇XE-G2 (1 part by mass), and fp_3gq (25 parts by mass) to prepare a photosensitive resin composition. The obtained photosensitive resin composition is dried by the above method, The photosensitive film was obtained, and the developability of the photosensitive film, the warpage after firing, and the insulation reliability (resistance evaluation) were evaluated by the above methods. The results are shown in Table 6 below. [Example 3] Relative to polymerization For the mass fraction of quinone imine (i) ioo, mix T467l (6 parts by mass), SBN-70D (6 parts by mass), BPE_5 〇〇 (4 〇f parts), M 3i 〇 (2 〇 Parts), 〇XE-02 (1 part by mass), Fp_3〇〇 (25F is parts by weight) to prepare a photosensitive resin composition. The obtained photosensitive resin composition was dried by the above method to obtain a photosensitive film. The developability of the photosensitive film, the warpage after firing, and the insulation reliability (resistance) were evaluated by the above methods. The results are shown in Table 6 below. [Example 4] Τ565 1 (6 parts by mass), ΤΡΑ-Β80Ε (6 parts by mass), βΡΕ_5〇〇 (4 parts by mass), Μ_ 3 were mixed with 100 parts by mass of the polyimine (1). 10 (20 parts by mass), ΟΧΕ-Ο2 (1 part by mass), and FP-300 (25 parts by mass), and a photosensitive resin composition was prepared. The obtained photosensitive resin composition was dried by the above method to obtain a photosensitive film. The developability of the photosensitive film, the warpage after firing, and the insulation reliability (resistance to corrosion) were evaluated by the above methods. The results are shown in Table 6 below. [Example 5] T565 1 (6 parts by mass), SBN_70D (10 parts by mass) 'BPE-500 (40 parts by mass), μ-158118.doc were mixed with respect to 100 parts by mass of the polyimine (1). -140-201237101 310 (20 parts by mass), OXE_02 (1 part by mass), and Fp_3〇〇 (25 parts by mass), and a photosensitive resin composition was prepared. The obtained photosensitive fat composition was dried by the above method to obtain a photosensitive film. The developability of the photosensitive film, the warpage after firing, and the insulation reliability (resistance evaluation) were evaluated by the above methods. The results are shown in Table 6 below. [Example 6] Relative to polyimine (1) 100 parts by mass, Τ5651 (6 parts by mass), SBN-70D (6 parts by mass), BpE_500 (40f parts), 〇XE〇2 (1 part by mass), FP-3〇0 (25 parts by mass) The photosensitive resin composition is prepared by the above method, and the obtained photosensitive resin composition is dried to obtain a photosensitive film. The developability of the photosensitive film, the warpage after firing, and the insulation are obtained by the above method. The reliability (IM resistance) was evaluated. The results are shown in the following Table 6. [Example 7] T5651 (6 mass damage) was mixed with 1 part by mass of the polyimine (1), SBN-70D (6 parts by mass), μ_3 10 (20 parts by mass), 〇ΧΕ-02 (1 parts by mass), and FP-300 (25 parts by mass) were prepared to prepare a photosensitive resin composition, which was obtained by the above method. The photosensitive resin composition is dried to obtain a photosensitive film, and the developability of the photosensitive film, the warpage after firing, and the like are obtained by the above method. The edge reliability (IM resistance) was evaluated. The results are shown in the following Table 6. [Example 8 to Example 12] Each of the polybenzamine (2) to (6) was used in an amount of 1 part by mass. T5651 (6 parts by mass), SBN-70D (6 parts by mass), bpe_5 〇〇 (4 parts by mass), m_310 (20 parts by mass), ΟΧΕ-Ο2 (1 part by mass), Fp_3 〇〇 (25 parts by mass) The photosensitive resin composition is prepared, and the photosensitive resin composition 158118.doc-141-201237101 is dried by the above method to obtain a photosensitive film. The developability of the photosensitive film by the above method, The warpage after the calcination and the insulation reliability (IIvU± resistance) were evaluated. The results are shown in the following Table 6. [Comparative Example 2] The mixture was mixed with respect to 100 parts by mass of the polyimine (1).匕5〇〇 (4〇 parts by mass), M-310 (20 parts by mass), OXE_〇2 (1 parts by mass), Fp_3〇〇Q5 parts by mass) 'Preparation of photosensitive resin composition>> by the above method The obtained photosensitive resin composition was dried to obtain a photosensitive film. The developability of the photosensitive film, the warpage after firing, and the insulation reliability (IM resistance) were evaluated by the above method. The results are shown in Table 6 below. [Comparative Example 3] T565 1 (6 parts by mass), BPE-500 (40 parts by mass), m_310 (20 parts by mass), and OXE_〇2 were mixed with respect to 100 parts by mass of the polyimine (1). 1 part by mass), FP-300 (25 parts by mass), and a photosensitive resin composition was prepared. The obtained photosensitive resin composition was dried by the above method to obtain a photosensitive film. The developability of the photosensitive film, the warpage after firing, and the insulation reliability (IM resistance) were evaluated by the above method. The results are shown in Table 6 below. [Comparative Example 4] SBN-70D (6 parts by mass), BPE-500 (40 parts by mass), M-310 (20 parts by mass), OXE- were mixed with 100 parts by mass of the polyimine (1).感光 2 (1 part by mass) and FP-300 (25 parts by mass) were prepared to prepare a photosensitive resin composition. The obtained photosensitive resin composition was dried by the above method to obtain a photosensitive film. The developability of the photosensitive film, the distortion after satin burning, and the insulation reliability (IM resistance) were evaluated by the above methods. The results are shown below 142· 158118.doc

S 201237101 述表6中。 [比較例5] 相對於聚醯亞胺(1)100質量份而言,混合T5651(6質量 份)、SBN-70D(15 質量份)、ΒΡΕ-500(40 質量份)、Μ-310(20 質量份)、ΟΧΕ-Ο2(1 質量份)、FP-300(25 質量份), 調製感光性樹脂組合物。藉由上述方法將所得之感光性樹 脂組合物乾膜化,獲得感光性膜。藉由上述方法對該感光 性膜之顯影性、锻燒後之魅曲、絕緣可靠性(财IM性)進行 評價。將結果示於下述表6中。 [比較例6] 相對於聚醯亞胺(1)100質量份而言,混合T565 1(15質量 份)、SBN-70D(6質量份)、ΒΡΕ-500(40質量份)、Μ-31 0(20 質量份)、ΟΧΕ-Ο2(1質量份)、FP-300(25質量份),調製感 光性樹脂組合物。藉由上述方法將所得之感光性樹脂組合 物乾膜化,獲得感光性膜。藉由上述方法對該感光性膜之 顯影性、煅燒後之翹曲、絕緣可靠性(耐IM性)進行評價。 將結果示於下述表6中。 [表5] 通式(5)所表示之二胺 (A+B)/(A+B+C) 重量平均分子量 聚醯亞胺(1) D-400 0.55 23000 聚醯亞胺(2) D-400 0.12 21000 聚醯亞胺(3) D-400 0.81 25000 聚醯亞胺(4) D-230 0.79 22000 聚醯亞胺(5) XTJ-542 0.28 26000 聚醯亞胺(6) D-2000 0.15 26000 158118.doc -143- 201237101 絕緣可靠性(耐ΙΜ性) i膨脹及變色 〇〇〇〇 &lt;〇〇&lt;〇〇&lt; &lt; X 〇 〇 &lt; 樹枝狀結晶 〇〇〇〇〇〇〇〇〇〇〇 X X Ο Ο X 絕缘電阻值 ◎◎◎◎〇◎◎◎〇〇&lt; &lt; &lt; @@ &lt; 00000&lt;&lt;0&lt;00 X〇X X〇 顯影性 〇〇〇〇〇&lt;&lt;&lt;〇〇&lt; 〇〇〇&lt; &lt; (F&gt;填化合物 i質量份 Csl(N&lt;N(N&lt;N&lt;N(N(N(N(S&lt;N ιη *η ι〇 ιη ό &lt;Ν &lt;Ν (Ν (Ν (Ν 賤 鄉 FP-300 FP-300 FP-300 FP-300 FP-300 FP-300 FP-300 FP-300 FP-300 FP-300 FP-300 FP-300 FP-300 FP-300 FP-300 FP-300 (E)光聚合起始劑 i質量份 i種類i OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 (D)光敏劑2 Φ) S S S S S 駭 鄉 M-310 M-310 M-310 M-310 M-310 M-310 M-310 M-310 M-310 M-310 M-310 M-310 M-310 M-310 M-310 (D)光敏剤1 i質量份 ooooo , o o o o o 寸,寸对兮 Tf 对寸々守 穿? ? ? § 種類i ooooo ooooo ooooo ooooo 1 1 1 1 1 k 1 1 1 1 1 Pl, cu CL, 0L. CU CL| pL. CX4 CL) PQ CQ CQ CQ CQ CQ CQ CQ CQ BPE-500 BPE-500 BPE-500 BPE-500 BPE-500 (c-1)異氱酸酯 化合物 i質量份 \〇 \〇 \〇 ^ \〇 \〇 s〇 ^ ^0 1 · VO 2 v〇 種類i QQgQQQQQQQQ 〇〇§〇〇〇〇〇〇〇〇 卜卜卜卜&quot;卜卜卜卜卜 1 · (JU 1 1 1 1 1 1 1 1 PQCQScQCQCQQQfflfflfflffi C/50〇Pc/3WCOC/3C/3C/20000 Q Q Q 000 卜卜卜 1 ' ίέ έ i: PQ CQ CQ C/3 C/3 ¢/3 (b)2官能含羥基 化合物 i質量份 Ό S〇 S〇 V〇 S〇 \〇 \〇 S〇 V〇 V〇 Ό 1 SO 1 S〇 ^ 種類i T5651 T4671 T5651 T5651 T5651 T5651 T5651 T5651 T5651 T5651 T5651 T5651 T5651 T5651 (a)聚醢亞胺 i質量份 00000000000 00000000000 ooooo ooooo 鞔 鄉 /—s /—V /—S /~S »&lt;—S /*—V /—V V 一 ―&lt;S ⑺寸*Λ Ό S_&gt;^ S_/ Sm/ «w· 隹钼甾猫甾绝甾绝钼接络 锺锺餹垴餹键滷锺滷键滷 龄鉍鉍鉍鉍鉍鉍鉍鉍鉍鉍 /-V /—V V /—N |M «Μ4 fM s—^ S·»· ^ NW* ^ ^ ta ta «η κη «n 璉滷璉餹璉 實施例2 實施例3 實施例4 實施例5 實施例6 實施例7 實施例8 實施例9 實施例10 實施例11 實施例12 m ^ m &lt;〇 # #猫錨#S 201237101 is described in Table 6. [Comparative Example 5] T5651 (6 parts by mass), SBN-70D (15 parts by mass), ΒΡΕ-500 (40 parts by mass), and Μ-310 were mixed with 100 parts by mass of the polyimine (1). 20 parts by mass), ΟΧΕ-Ο2 (1 part by mass), and FP-300 (25 parts by mass), and a photosensitive resin composition was prepared. The obtained photosensitive resin composition was dried by the above method to obtain a photosensitive film. The developability of the photosensitive film, the charm after calcination, and the insulation reliability (IM property) were evaluated by the above method. The results are shown in Table 6 below. [Comparative Example 6] T565 1 (15 parts by mass), SBN-70D (6 parts by mass), ΒΡΕ-500 (40 parts by mass), Μ-31 were mixed with 100 parts by mass of the polyimine (1). 0 (20 parts by mass), ΟΧΕ-Ο2 (1 part by mass), and FP-300 (25 parts by mass), and a photosensitive resin composition was prepared. The obtained photosensitive resin composition was dried by the above method to obtain a photosensitive film. The developability of the photosensitive film, the warpage after firing, and the insulation reliability (IM resistance) were evaluated by the above methods. The results are shown in Table 6 below. [Table 5] Diamine (A+B)/(A+B+C) represented by the formula (5) Weight average molecular weight Polyimine (1) D-400 0.55 23000 Polyimine (2) D -400 0.12 21000 Polyimine (3) D-400 0.81 25000 Polyimine (4) D-230 0.79 22000 Polyimine (5) XTJ-542 0.28 26000 Polyimine (6) D-2000 0.15 26000 158118.doc -143- 201237101 Insulation reliability (resistance to stagnation) i expansion and discoloration 〇〇〇〇&lt;〇〇&lt;〇〇&lt;&lt; X 〇〇&lt; dendritic 〇〇〇〇〇 〇〇〇〇〇〇XX Ο Ο X Insulation resistance value ◎◎◎◎〇◎◎◎〇〇&lt;&lt;&lt; @@ &lt;00000&lt;&lt;0&lt;00 X〇XX〇 developability〇〇〇〇 〇&lt;&lt;&lt;〇〇&lt;〇〇〇&lt;&lt;(F&gt;filling compound i mass parts Csl (N&lt;N(N&lt;N&lt;N(N(N(N(S&lt;N ηη *η 〇ιηιη ό &lt;Ν &lt;Ν &Ν;Ν (Ν (Ν 贱 Township FP-300 FP-300 FP-300 FP-300 FP-300 FP-300 FP-300 FP-300 FP-300 FP-300 FP- 300 FP-300 FP-300 FP-300 FP-300 FP-300 (E) Photopolymerization initiator i parts by mass i OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE- 02 OXE-02 OXE-02 OXE-02 OX E-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 (D) Photosensitizer 2 Φ) SSSSS 骇乡 M-310 M-310 M-310 M-310 M-310 M-310 M-310 M-310 M-310 M-310 M-310 M-310 M-310 M-310 M-310 (D) Photosensitive 剤1 i part by mass ooooo, ooooo inch, inch to 兮Tf to inch 々 wear?? § Type i ooooo ooooo ooooo ooooo 1 1 1 1 1 k 1 1 1 1 1 Pl, cu CL, 0L. CU CL| pL. CX4 CL) PQ CQ CQ CQ CQ CQ CQ CQ CQ BPE-500 BPE-500 BPE- 500 BPE-500 BPE-500 (c-1) Isophthalate compound i mass parts \〇\〇\〇^ \〇\〇s〇^ ^0 1 · VO 2 v〇 type i QQgQQQQQQQQ 〇〇§〇〇 〇〇〇〇〇〇卜卜卜&quot;卜卜卜卜1 · (JU 1 1 1 1 1 1 1 1 PQCQScQCQCQQQfflfflfflffi C/50〇Pc/3WCOC/3C/3C/20000 QQQ 000 Bu Bu 1 ' έ έ i: PQ CQ CQ C/3 C/3 ¢/3 (b) 2-functional hydroxyl-containing compound i part by mass Ό S〇S〇V〇S〇\〇\〇S〇V〇V〇Ό 1 SO 1 S〇^ Type i T5651 T4671 T5651 T5651 T5651 T5651 T5651 T5651 T5651 T5651 T5651 T5651 T5651 T5651 (a) Polyimine i mass parts 00000000000 00000000000 ooooo ooooo鞔乡/—s /—V /—S /~S »&lt;—S /*—V /—VV ——&lt;S (7) inch*Λ Ό S_&gt;^ S_/ Sm/ «w· 隹Mo 甾 甾甾 甾 钼 接 接 接 锺 锺 锺 锺 锺 - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - ^ NW* ^ ^ ta ta «η κη «n 琏 琏餹琏 琏餹琏 Example 2 Example 3 Example 4 Example 5 Example 6 Example 7 Example 8 Example 9 Example 10 Example 12 Example 12 m ^ m &lt;〇# #猫锚#

158118.doc - 144- S 201237101 根據表5、表6所示之結果可知:實施例2〜實施例12與比 較例2〜比較例6相比較而言,顯影性、翹曲、絕緣可靠性 良好。特別是於實施例2〜實施例丨2中,於〇. 1 〇 $ (A + B)/ (A+B+C)$0.85之任意情形時’均具有顯影性、翹曲、及 絕緣可靠性。 相對於此’於不含2官能含羥基化合物及異氰酸酯化合 物之感光性組合物中,產生翹曲及樹枝狀結晶(參照比較 例2)。又’即使於含有2官能含羥基化合物之情形時,於 不含異氰酸酯化合物之感光性樹脂組合物中,雖然發現翹 曲得到改善,但產生樹枝狀結晶(參照比較例3) ^進而,即 使於含有異氰酸酯化合物之情形時,於不含2官能含羥基 化合物之感光性樹脂組合物中,雖然發現樹枝狀結晶得到 改善’但變為產生翹曲之結果(參照比較例4)。該等結果係 由於不含具有艇曲減低效果的2官能含羥基化合物、或與 聚醯亞胺及二官能含羥基化合物形成交聯結構之異氰酸酯 化合物’從而產生翹曲及樹枝狀結晶。 又,即使於含有2官能含羥基化合物及異氰酸酯化合物 之情形時,於二官能含羥基化合物之羥基與異氰酸酯化合 物之異氰酸酯基之莫耳比小於0.5之感光性樹脂組合物 中,變為產生翹曲之結果(參照比較例5),於超過1.0之感 光性樹脂組合物中,變為產生樹枝狀結晶之結果(參照比 較例6)。該等結果係由於具有翹曲減低效果之2官能羥基 化合物之比例少,因此產生翹曲,或者異氰酸酯化合物之 比例少,因此產生無法與聚醯亞胺形成充分之交聯結構的 158118.doc -145- 201237101 樹枝狀結晶。 關於本發明之第3實施形態之樹脂組合物,參照以下之 實施例13~實施例24及比較例7、比較例8而進行說明。再 者,以下之實施例13〜實施例24係第2態樣之樹脂組合物。 &lt;試劑&gt; 於實施例及比較例中,作為所使用之試劑的聚矽氧二胺 (信越化學工業公司製造、KF-8010)、1,3-雙(3-胺基苯氧 基)苯(三井化學公司製造、APB-N)、聚氧化四亞甲基-二-對胺基苯曱酸酯(IHARA CHEMICAL INDUSTRY CO., LTD.製造、簡稱為PMAB、下述通式(22))、4,4'-氧雙鄰苯 二甲酸二酐(MANAC公司製造、簡稱為ODPA)、3,3·,4,4·-聯苯四曱酸二酐(三井化學公司製造、簡稱為BPDA)、均 苯四曱酸二酐(大賽璐化學工業公司製造、簡稱為 PMDA)、乙二醇雙(偏苯三曱酸單酯酸酐)(新曰本理化公司 製造、RIKACID TMEG-100、簡稱為 TMEG)、磷酸三(丁 氧基乙基)酯(大八化學公司製造、ΤΒΧΡ)、磷腈化合物(伏 見製藥所公司製造、Rabitle(註冊商標)FP-300、簡稱為FP-3 00)、乙酮1-[9-乙基-6-(2-曱基苯甲醯基)-9H-咔唑-3-基]-1-(0-乙醯肟)(Ciba Japan Κ·Κ·記載、商標名:IRGACURE ΟΧΕ 02、簡稱為ΟΧΕ-02)、2,2-雙(4-(曱基丙烯醯氧基五乙 氧基)苯基)丙烷(新中村化學工業公司製造、商標名:ΒΡΕ-500)、環氧乙烷(ΕΟ)改性雙酚Α二甲基丙烯酸脂(新中村化 學工業公司製造、商標名:BPE-500)、七丙二醇二甲基丙 烯酸脂.(新中村化學工業公司製造、商標名:9PG)、季戊 -146- 158118.doc 201237101 四醇三/四(甲基)丙烯酸酯(東亞合成公司製造、商標名: ARONIX M-3 06、簡稱為M-306)、三羥曱基丙烷EO改性三 丙烯酸酯(東亞合成公司製造、商標名:ARONIX M-350、 簡稱為M-350)、三羥甲基丙烷PO改性三丙烯酸酯(東亞合 成公司製造、商標名:ARONIX M-3 1 0、簡稱為M-3 1 0)、 季戊四醇四丙烯酸酯(新中村化學工業公司製造、商標 名:A-TMMT)、EO改性丙三醇三(曱基)丙烯酸酯(新中村 化學工業公司製造、A-GLY-9E(EO改性9 mol))聚碳酸酯二 醇(旭化成化學公司製造、DURANOL T5651)、六亞曱基二 異氰酸酯系嵌段異氰酸酯(旭化成化學公司製造、Duranate SBN-70D)曱苯(和光純藥工業公司製造、有機合成用)、γ-丁内酯(和光純藥工業公司製造)、三乙二醇二甲醚(和光純 藥工業公司製造)、碳酸鈉(和光純藥工業公司製造)可並不 實施特別之純化而用於反應中。 [化 34] 通式(22) Η2Ν -0和 Η2〇Η2〇Η2〇Η2〇-〇|~&lt;^ 〉~~ΝΗ^ &lt;重量平均分子量測定&gt; 於與上述第2實施形態之實施例相同之條件下測定。 &lt;感光性膜製造方法&gt; 與上述第2實施形態之實施例同樣地製作。 &lt;層壓條件&gt; 158118.doc -147- 201237101 與上述第2實施形態之實施例同樣地實施。 〈絕緣可靠性(耐HAST性)評價&gt; 如下所示地實施絕緣可靠性評價。於線與間隙為2〇 μιη/20 μιη之梳型基板上,於上述層壓條件下層壓感光性乾 膜之後,於上述條件下進行曝光、顯影,於1 8〇t:下進行五 小時之般燒。於感光性乾膜上焊接電子遷移測定器之電 纜’於下述條件下進行絕緣可靠性試驗。 絕緣劣化評價系統:SIR-12(楠本化成公司製造) HAST腔室:EHS-211M(ESPEC公司製造) 溫度:llOt: 濕度:85%158118.doc - 144-S 201237101 According to the results shown in Tables 5 and 6, it is understood that the developing examples, warpage, and insulation reliability are good in comparison between Examples 2 to 12 and Comparative Examples 2 to 6. . In particular, in the case of Example 2 to Example 2, in any case of 〇. 1 〇 $ (A + B) / (A + B + C) $ 0.85, both have developability, warpage, and insulation reliability. . On the other hand, in the photosensitive composition containing no bifunctional hydroxyl group-containing compound and isocyanate compound, warpage and dendritic crystals were generated (refer to Comparative Example 2). In addition, even in the case of containing a bifunctional hydroxyl group-containing compound, dendritic crystals are produced in the photosensitive resin composition containing no isocyanate compound, although the warpage is improved (refer to Comparative Example 3). Further, even In the case of containing an isocyanate compound, the dendritic crystal was found to be improved in the photosensitive resin composition containing no bifunctional hydroxyl group-containing compound, but the warpage was caused (see Comparative Example 4). These results are due to the absence of a bifunctional hydroxyl-containing compound having a boating effect or a isocyanate compound which forms a crosslinked structure with a polyimine and a difunctional hydroxyl-containing compound to produce warpage and dendrites. Further, even in the case of containing a bifunctional hydroxyl group-containing compound and an isocyanate compound, warpage occurs in the photosensitive resin composition in which the hydroxyl group of the difunctional hydroxyl group-containing compound and the isocyanate group of the isocyanate compound are less than 0.5. As a result (refer to Comparative Example 5), the dendritic crystal was produced in the photosensitive resin composition exceeding 1.0 (refer to Comparative Example 6). These results are due to the fact that the proportion of the bifunctional hydroxy compound having a warpage reducing effect is small, so that warpage occurs or the ratio of the isocyanate compound is small, so that a crosslinked structure which cannot form a sufficient crosslinked structure with polythenimine is produced 158118.doc - 145- 201237101 Dendritic crystals. The resin composition of the third embodiment of the present invention will be described with reference to the following Examples 13 to 24, Comparative Example 7, and Comparative Example 8. Further, the following Examples 13 to 24 are the resin compositions of the second aspect. &lt;Reagent&gt; In the examples and comparative examples, polyfluorene diamine (manufactured by Shin-Etsu Chemical Co., Ltd., KF-8010) and 1,3-bis(3-aminophenoxy) as reagents to be used Benzene (manufactured by Mitsui Chemicals, Inc., APB-N), polyoxytetramethylene-di-p-aminophenyl phthalate (manufactured by IHARA CHEMICAL INDUSTRY CO., LTD., abbreviated as PMAB, the following formula (22) , 4,4'-oxydiphthalic dianhydride (manufactured by MANAC, abbreviated as ODPA), 3,3·,4,4·-biphenyltetraphthalic acid dianhydride (manufactured by Mitsui Chemicals, Inc.) BPDA), pyromellitic acid dianhydride (manufactured by Daicel Chemical Industry Co., Ltd., abbreviated as PMDA), ethylene glycol bis(trimellitic acid monoester anhydride) (manufactured by Shinji Ryo Chemical Co., Ltd., RIKACID TMEG-100, Abbreviated as TMEG), tris(butoxyethyl) phosphate (manufactured by Daihatsu Chemical Co., Ltd.), phosphazene compound (Manufactured by Fushimi Pharmaceutical Co., Ltd., Rabitle (registered trademark) FP-300, abbreviated as FP-3 00 Ethylketone 1-[9-ethyl-6-(2-mercaptobenzylidene)-9H-indazol-3-yl]-1-(0-acetamidine) (Ciba Japan Κ·Κ · Record, trade name: IRGACURE Ο ΧΕ 02, abbreviated as ΟΧΕ-02), 2,2-bis(4-(mercaptopropenyloxypentaethoxy)phenyl)propane (manufactured by Shin-Nakamura Chemical Industry Co., Ltd., trade name: ΒΡΕ-500), Ethylene oxide (ΕΟ) modified bisphenol quinone dimethacrylate (manufactured by Shin-Nakamura Chemical Industry Co., Ltd., trade name: BPE-500), heptapropanediol dimethacrylate. (Manufactured and branded by Shin-Nakamura Chemical Industry Co., Ltd. Name: 9PG), Penta-146- 158118.doc 201237101 Tetrahydrin tri/tetrakis (meth) acrylate (manufactured by Toagosei Co., Ltd., trade name: ARONIX M-3 06, abbreviated as M-306), trioxindole Propane EO modified triacrylate (manufactured by Toagosei Co., Ltd., trade name: ARONIX M-350, abbreviated as M-350), trimethylolpropane PO modified triacrylate (manufactured by Toagosei Co., Ltd., trade name: ARONIX M-3 1 0, abbreviated as M-3 1 0), pentaerythritol tetraacrylate (manufactured by Shin-Nakamura Chemical Co., Ltd., trade name: A-TMMT), EO-modified glycerol tris(decyl) acrylate (new Made in Nakamura Chemical Industry Co., Ltd., A-GLY-9E (EO modified 9 mol)) polycarbonate diol (Asahi Kasei Chemicals Co., Ltd. Manufacture, DURANOL T5651), hexamethylene diisocyanate block isocyanate (made by Asahi Kasei Chemical Co., Ltd., Duranate SBN-70D), benzene (manufactured by Wako Pure Chemical Industries, Ltd., organic synthesis), γ-butyrolactone (and pure light) Triethylene glycol dimethyl ether (manufactured by Wako Pure Chemical Industries, Ltd.) and sodium carbonate (manufactured by Wako Pure Chemical Industries, Ltd.) can be used in the reaction without performing special purification. General formula (22) Η2Ν -0 and Η2〇Η2〇Η2〇Η2〇-〇|~&lt;^ 〉~~ΝΗ^ &lt;Measurement of weight average molecular weight&gt; In the second embodiment The conditions were determined under the same conditions. &lt;Photosensitive film production method&gt; It was produced in the same manner as in the examples of the second embodiment described above. &lt;Lamination conditions&gt; 158118.doc -147-201237101 The same as the embodiment of the second embodiment described above. <Insulation reliability (HAST resistance) evaluation> The insulation reliability evaluation was performed as follows. On a comb-shaped substrate having a line and a gap of 2 μm η / 20 μm, a photosensitive dry film was laminated under the above-mentioned laminating conditions, and then exposed and developed under the above conditions, and subjected to five hours at 18 〇t: Burn it all. The cable for soldering the electron mobility measuring instrument on the photosensitive dry film was subjected to an insulation reliability test under the following conditions. Insulation deterioration evaluation system: SIR-12 (manufactured by Nanben Chemical Co., Ltd.) HAST chamber: EHS-211M (manufactured by ESPEC) Temperature: llOt: Humidity: 85%

施加電壓:2 V 施加時間:528小時 絕緣電阻值:將不足1 〇xl〇6 口之情形記為x,將丨〇χ1〇6 不足1 .Ox 1〇7 Ω之情形記為a,將1 〇x i〇7 q〜不足1 〇χ丨〇8 Ω 之情形記為〇,將1·〇Χίο8 Ω以上之情形記為◎。 外觀(樹枝狀結晶):於光學顯微鏡(ECLIPS LV100尼康 製造)、透射光' 200倍之條件下對HAST試驗後之梳型基 板進行觀察,將發現產生樹枝狀結晶之情形記為X,將未 發現之情形記為〇。 外觀(膨脹及變色):於光學顯微鏡(ECLIPS LV100尼康 製造)、明視野、100倍之條件下對HAST試驗後之梳型基 板進行觀察’將發現直徑為50 μηι φ以上之大小的絕緣覆 膜之膨脹及/或變色之情形記為X,將發現丨〇 μΓη φ以上、不 158118.doc -148· 201237101 足50 _Φ之絕緣覆膜之膨脹及/或變色之情形記為△,將膨 脹及變色為10 μπι Φ以下之情形記為〇。 &lt;煅燒後之翹曲測定&gt; 將所得之感# # # _ 〜九乾膜,於上述層壓條件下層壓於 apt0n(°主冊商標)上之後,於18G°C下進行1小時之緞燒。 將該感光性乾臈切出5 em見方’將端部之隆起高度不足5 爪之It形5己為◎,將5〜不足1〇 _之情形記為〇,將具有 其以上之隆起高度之情形記為X。 &lt;解像性評價&gt; 解像性評價可如下所|地實&amp;。於銅落積層板上,於上 述層壓條件7層壓感光性乾膜後,於30〜270 mJ/cm2下進 仃曝光。繼而進行利用1質量°/。碳酸鈉水溶液之鹼性顯影 處理與利用水之沖洗’於乾燥後藉由光學顯微鏡對圖案進 行&quot;平價。遮罩中使用5〇 gm〜i〇〇 之線與間隙(L/s)圖 案。讀取由於顯影而於曝光部(硬化部)之殘膜率為1〇〇0/〇、 且顯現出未曝光部(溶解部)之銅面的部分。將可解像7〇 μπι之L/S圖案之情形記為◎,將可解像1〇〇 pmiL/s圖案之 情形記為〇’將無法解像1〇〇 μΓη之情形記為X。 ' 〈聚醯亞胺(7)&gt; • 於氮氣環境下,於可分離式燒瓶中裝入三乙二醇二曱醚 (15 g)、γ-丁内酯(35 g)、甲苯(20.0 g)、聚矽氧二胺(1^-8010(11.30 g(13.78 mmol))、〇DPA(10.86 g(35,00 mm〇l)),於 120°C下進行1小時之加熱攪拌。繼而連接Dean-Stark裝置 及回流器’於180°C下加熱攪拌1小時。除去作為共沸溶劑 158118.doc -149· 201237101 之甲苯後冷卻至25。(:,繼而添加APB-N(6.00 g(20.52 mmol)而於25°C下攪拌8小時,獲得聚醯亞胺(7)之溶液 夂。將所得之聚醯亞胺(7)之重量平均分子量示於下述表7 中。 &lt;聚醯亞胺(8)&gt; 於氮氣環境下,於可分離式燒瓶中裝入三乙二醇二甲醚 (15 g)、γ-丁内酯(35 g)、曱苯(20.0 g)、聚矽氧二胺#?-8010(11.00 g(l3.41 mmol))、BPDA(10.30 g(35.00 mmol)),於 120°C下進行1小時之加熱攪拌。繼而連接Dean_Stark裝置 及回流器’於180°C下加熱攪拌1小時。除去作為共沸溶劑 之甲苯後冷卻至25。(:,繼而添加APB-N(6.10 g(20.87 mmol)而於25°C下攪拌8小時,獲得聚醯亞胺(8)之溶液。 將所得之聚醯亞胺(8)之重量平均分子量示於下述表7中。 &lt;聚醯亞胺(9)&gt; 於氣氣環境下’於可分離式燒版中裝入三乙二醇二曱蝴 (15 g)、γ-丁内酯(35 g)、甲苯(20.0 g)、聚矽氧二胺(KF_ 8010(9.50 g(ll.59 mmol))、PMDA(7.63 g(35.00 mmol)), 於120 C下進行1小時之加熱攪拌。繼而連接Dean_Stark裝 置及回流器,於1 8 0 C下加熱攪拌1小時。除去作為共沸溶 劑之甲苯後冷卻至25°C,繼而添加ΑΡΒ·Ν(6.65 g(22.75 mmol)而於25 C下攪拌8小時,獲得聚醯亞胺(9)之溶液。 將所得之聚醯亞胺(9)之重量平均分子量示於下述表7中。 &lt;聚醯亞胺(10)&gt; 於氮氣環境下,於可分離式燒瓶中裝入三乙二醇二曱醚 158118.docApplied voltage: 2 V Application time: 528 hours Insulation resistance value: Write less than 1 〇 xl 〇 6 ports as x, and 丨〇χ 1 〇 6 less than 1. Ox 1 〇 7 Ω as a, 1 〇xi〇7 q~The case of less than 1 〇χ丨〇8 Ω is denoted by 〇, and the case of 1·〇Χίο8 Ω or more is denoted as ◎. Appearance (dendritic crystal): The comb-shaped substrate after the HAST test was observed under an optical microscope (manufactured by ECLIPS LV100 Nikon) and transmitted light 200 times, and the case where dendritic crystals were produced was recorded as X, which was not The situation found is recorded as 〇. Appearance (expansion and discoloration): Observing the comb-shaped substrate after the HAST test under the condition of an optical microscope (manufactured by ECLIPS LV100 Nikon), bright field, 100 times, 'Insulation film with a diameter of 50 μηι φ or more will be found. The case of expansion and/or discoloration is denoted by X, and it is found that 膨胀μΓη φ or more, not 158118.doc -148· 201237101, the expansion and/or discoloration of the insulating film of the foot 50 _Φ is recorded as Δ, and the expansion and The case where the discoloration is 10 μπι Φ or less is denoted as 〇. &lt;Measurement of warpage after calcination&gt; The resulting sensation ### _~9 dry film was laminated on apt0n (° main article trademark) under the above laminating conditions, and then subjected to 1 hour at 18 °C. Satin burning. The photosensitive dry cocoon is cut out to 5 em square 'the shape of the end portion is less than 5 claws, the It shape 5 is ◎, and the case where 5 to less than 1 〇 is described as 〇, which will have the above ridge height. The situation is recorded as X. &lt;Resolution Evaluation&gt; The resolution evaluation can be as follows. The photosensitive dry film was laminated on the copper backing layer plate under the lamination conditions 7, and then exposed to light at 30 to 270 mJ/cm2. Then use 1 mass ° /. The alkaline development treatment of the aqueous sodium carbonate solution and the rinsing with water 'after drying, the pattern was &lt; Line and gap (L/s) patterns of 5〇 gm~i〇〇 are used in the mask. The portion where the residual film ratio in the exposed portion (hardened portion) due to development is 1 〇〇 0 / 〇 and the copper surface of the unexposed portion (dissolved portion) appears is read. The case where the L/S pattern of 7 〇 μπι can be solved is denoted by ◎, and the case where the resolution of 1 〇〇 pmiL/s can be solved is denoted by 〇', and the case where 1 〇〇 μΓη cannot be solved is denoted by X. ' Polyimine (7)&gt; • In a separable flask, triethylene glycol dioxime (15 g), γ-butyrolactone (35 g), toluene (20.0) were placed under a nitrogen atmosphere. g), polyoxydiamine (1^-8010 (11.30 g (13.78 mmol)), 〇DPA (10.86 g (35,00 mm〇l)), heated and stirred at 120 ° C for 1 hour. The Dean-Stark apparatus and the refluxer were connected and heated and stirred at 180 ° C for 1 hour. The toluene as azeotropic solvent 158118.doc -149·201237101 was removed and cooled to 25. (:, then APB-N (6.00 g ( 20.52 mmol) was stirred at 25 ° C for 8 hours to obtain a solution of polyimine (7). The weight average molecular weight of the obtained polyimine (7) is shown in Table 7 below. Yttrium (8)&gt; In a separable flask, triethylene glycol dimethyl ether (15 g), γ-butyrolactone (35 g), toluene (20.0 g), were placed under a nitrogen atmosphere. Polyoxydiamine #?-8010 (11.00 g (l3.41 mmol)), BPDA (10.30 g (35.00 mmol)), heated and stirred at 120 ° C for 1 hour. Then connected to Dean_Stark device and refluxer' Stirring at 180 ° C for 1 hour with heating. Removal as an azeotropic solvent After toluene, it was cooled to 25. (:, then APB-N (6.10 g (20.87 mmol) was added and stirred at 25 ° C for 8 hours to obtain a solution of polyimine (8). 8) The weight average molecular weight is shown in the following Table 7. &lt;Polyimine (9)&gt; In a gas-liquid environment, a separable plate was charged with triethylene glycol dioxime (15 g). ), γ-butyrolactone (35 g), toluene (20.0 g), polyoxydiamine (KF_ 8010 (9.50 g (ll.59 mmol)), PMDA (7.63 g (35.00 mmol)), at 120 C The mixture was heated and stirred for 1 hour, and then connected to a Dean_Stark apparatus and a reflux vessel, and heated and stirred at 1880 C for 1 hour. The toluene as an azeotropic solvent was removed, and then cooled to 25 ° C, followed by addition of ΑΡΒ·Ν (6.65 g ( 22.75 mmol) was stirred at 25 C for 8 hours to obtain a solution of polyimine (9). The weight average molecular weight of the obtained polyimine (9) is shown in Table 7 below. Amine (10)&gt; In a separable flask, triethylene glycol dioxime 158118.doc was placed under a nitrogen atmosphere.

S -150· 201237101 (15 g)、γ-丁内酯(35 g)、曱苯(20.0 g)、聚矽氧二胺(1&lt;^-8010(13.15 g(16.04 mmol))、TMEG(14.36 g(35.00 mmol)),於 120°C下進行1小時之加熱攪拌。繼而連接Dean-Stark裝置 及回流器’於180°C下加熱攪拌1小時。除去作為共沸溶劑 之曱苯後冷卻至25°C,繼而添加APB-N(5.34 g(18.27 mmol)而於25°C下攪拌8小時,獲得聚醯亞胺(10)之溶液。 將所得之聚醯亞胺(10)之重量平均分子量示於下述表7中。 &lt;聚醯亞胺(11)&gt; 於氮氣環境下,於可分離式燒瓶中裝入三乙二醇二曱醚 (15 g)、γ-丁内酯(35 g)、曱苯(20.0 g)、PMAB((12.00 g (9.69 mmol)) · 〇DPA(10.86 g(35.00 mmol)),於 120°C 下進 行1小時之加熱攪拌》繼而連接Dean-Stark裝置及回流器, 於180°C下加熱攪拌1小時。除去作為共沸溶劑之甲苯後冷S-150· 201237101 (15 g), γ-butyrolactone (35 g), toluene (20.0 g), polyoxydiamine (1&lt;^-8010 (13.15 g (16.04 mmol)), TMEG (14.36) g (35.00 mmol)), heating and stirring at 120 ° C for 1 hour, followed by connection with a Dean-Stark apparatus and a refluxer 'heating and stirring at 180 ° C for 1 hour. The benzene was removed as an azeotropic solvent and then cooled to At 25 ° C, APB-N (5.34 g (18.27 mmol) was added and stirred at 25 ° C for 8 hours to obtain a solution of polyimine (10). The average weight of the obtained polyimine (10) was averaged. The molecular weights are shown in the following Table 7. &lt;Polyimine (11)&gt; In a separable flask, triethylene glycol dioxime (15 g), γ-butyrolactone was charged under a nitrogen atmosphere. (35 g), toluene (20.0 g), PMAB ((12.00 g (9.69 mmol)) · 〇DPA (10.86 g (35.00 mmol)), heated at 120 ° C for 1 hour, then connected to Dean- The Stark apparatus and the refluxer were heated and stirred at 180 ° C for 1 hour. The toluene was removed as an azeotropic solvent and then cooled.

卻至 25°C ’ 繼而添加 APB-N(7.20 g(24.63 mmol)而於25°C 下攪拌8小時.,獲得聚醯亞胺(11)之溶液。將所得之聚醯亞 胺(11)之重量平均分子量示於下述表7中。 [實施例13〜實施例15] 相對於聚醯亞胺(7)、聚醯亞胺(g)、聚醯亞胺(9)各丨〇〇質 量份而言’混合BPE-500(20質量份)、M-310(20質量份)、 〇xe-〇2(i 質量份)、Fp_3〇〇(25 質量份)、ΤΒχρ(15 質量 份),調製感光性樹脂組合物。藉由上述之乾膜製造方法 對所得之感光性樹脂組合物進行乾膜化而獲得感光性膜。 於上述之層壓條件下’將該感光性膜層壓於梳型基板上。 對所得之積層膜之絕緣可靠性進行評價。將結果示於下述 158118.doc -151· 201237101 表8中。又’於實施例13、實施例14中,翹曲為◎,解像 性為◎;於實施例15中,翹曲為〇,解像性為@。 [實施例16] 相對於聚酿亞胺(7)1〇〇質量份而言,混合2?£_500(40質 I 份)、ΟΧΕ-Ο2(1 質量份)、ρρ_3〇〇(25 質量份)、ΤΒΧΡ(15 質量份),調製感光性樹脂組合物。由所得之感光性樹脂 組合物’藉由與實施例13〜實施例IS相同之方法而製作積 層膜’對絕緣可靠性進行評價。將結果示於下述表8中。 又,翹曲為◎,解像性為X。 [實施例17] 相對於聚醢亞胺(7)100質量份而言,混合μ_3 10(40質量 份)、〇ΧΕ-〇2(1 質量份)、Fp_3〇〇(25 質量份)、τΒΧΡ( 1 5 質 量份)’調製感光性樹脂組合物。由所得之感光性樹脂組 合物’藉由與實施例13〜實施例15相同之方法而製作積層 膜,對絕緣可靠性進行評價。將結果示於下述表8中。 又,翹曲為〇,解像性為〇。 [實施例18] 相對於聚醯亞胺(7)100質量份而言,混合3?丑-900(20質 量份)、Μ-310(20質量份)、〇ΧΕ-02(1 質量份)、FP-300(25 質量份)、TBXP(15質量份),調製感光性樹脂組合物。由 所得之感光性樹脂組合物,藉由與實施例13〜實施例15相 同之方法而製作積層膜,對絕緣可靠性進行評價。將結果 示於下述表8中。又,翹曲為◎,解像性為〇。 [實施例19] • 152- 158118.docBut to 25 ° C ', then add APB-N (7.20 g (24.63 mmol) and stir at 25 ° C for 8 hours to obtain a solution of polyimine (11). The resulting polyimine (11) The weight average molecular weight is shown in the following Table 7. [Example 13 to Example 15] Each of the polyimine (7), the polyimine (g), and the polyimine (9) In terms of parts by mass, 'mixed BPE-500 (20 parts by mass), M-310 (20 parts by mass), 〇xe-〇2 (i parts by mass), Fp_3〇〇 (25 parts by mass), ΤΒχρ (15 parts by mass) The photosensitive resin composition is prepared by dry film formation of the obtained photosensitive resin composition by the above-mentioned dry film production method, and the photosensitive film is obtained by laminating the photosensitive film under the above-mentioned lamination conditions. On the comb-type substrate, the insulation reliability of the obtained laminated film was evaluated. The results are shown in Table 8 below, 158118.doc-151·201237101. Further, in Example 13 and Example 14, the warpage was ◎. The resolution was ◎; in Example 15, the warpage was 〇 and the resolution was @. [Example 16] Mixing 2 Å with respect to 1 part by mass of the polynymine (7) _50 0 (40 parts by mass), ΟΧΕ-Ο2 (1 parts by mass), ρρ_3 〇〇 (25 parts by mass), hydrazine (15 parts by mass), and a photosensitive resin composition was prepared, and the obtained photosensitive resin composition was borrowed. The laminated film was produced in the same manner as in Example 13 to Example IS to evaluate the insulation reliability. The results are shown in the following Table 8. The warpage was ◎, and the resolution was X. [Examples] 17] Mixing μ_3 10 (40 parts by mass), 〇ΧΕ-〇2 (1 part by mass), Fp_3〇〇 (25 parts by mass), τΒΧΡ (1 5) with respect to 100 parts by mass of the polyimine (7). In the photosensitive resin composition obtained from the above, a laminate film was produced by the same method as in Example 13 to Example 15, and the insulation reliability was evaluated. Further, the warpage is 〇, and the resolution is 〇. [Example 18] 3 parts of ugly-900 (20 parts by mass) are mixed with 100 parts by mass of the polyimine (7), Μ-310 (20 parts by mass), 〇ΧΕ-02 (1 parts by mass), FP-300 (25 parts by mass), TBXP (15 parts by mass), modulating photosensitive resin From the obtained photosensitive resin composition, a laminate film was produced by the same method as in Example 13 to Example 15, and the insulation reliability was evaluated. The results are shown in Table 8 below. The curve is ◎, and the resolution is 〇. [Example 19] • 152- 158118.doc

S 201237101 相對於聚醯亞胺(7)100質量份而言,混合9pG(2〇質量 份)、M-310(2()質量份)、〇xe-〇2(1 質量份)、FP-300(25 質 量份)、TBXP(15質量份),調製感光性樹脂組合物。由所 得之感光性樹脂組合物,藉由與實施例13〜實施例15相同 之方法而製作積層膜,對絕緣可靠性進行評價。將結果示 於下述表8中。又,翹曲為◎,解像性為〇。 [實施例20] 相對於聚醯亞胺(7)100質量份而言,混合8卩丑-500(20質 量份)、M-350(20 質量份)、〇xe-〇2(1 質量份)、FP-300(25 質量份)、TBXP(1 5質量份)’調製感光性樹脂組合物。由 所得之感光性樹脂組合物’藉由與實施例13〜實施例15相 同之方法而製作積層膜,對絕緣可靠性進行評價。將結果 示於下述表8中。又,翹曲為◎,解像性為 [實施例21] 相對於聚醯亞胺(7)100質量份而言,混合3?丑-500(20質 量份)、M-306(20 質量份)、〇xe-〇2(1 質量份)、FP-300(25 質量份)、TBXP(15質量份),調製感光性樹脂組合物。由 所得之感光性樹脂組合物,藉由與實施例13〜實施例15相 同之方法而製作積層膜’對絕緣可靠性進行評價。將結果 示於下述表8中。又’翹曲為◎,解像性為©。 [實施例22] 相對於聚醯亞胺(7)100質量份而言,混合BPE-500(20質 量份)、A-TMMT(20 質量份)、〇xe-02(1 質量份)、FP-300(25質量份)、TBXP(15質量份),調製感光性樹脂組合 158118.doc •153- 201237101 物。由所得之感光性樹脂組合物,藉由與實施例13〜實施 例15相同之方法而製作積層膜,對絕緣可靠性進行評價。 將結果示於下述表8中。又,翹曲為◎,解像性為©。 [實施例23] 相對於聚醯亞胺(7)100質量份而言,混合8卩£-500(20質 量份)、A-GLY-9E(20 質量份)、〇XE-02(1 質量份)、Fp_ 300(25質量份)、TBXP(15質量份),調製感光性樹脂組合 物。由所得之感光性樹脂組合物,藉由與實施例13〜實施 例1 5相同之方法而製作積層膜,對絕緣可靠性進行評價。 將結果示於下述表8中。又,翹曲為◎,解像性為◎。 [實施例24] 相對於聚醯亞胺(7)100質量份而言,混合BPE-500(20質 量份)、M-310(20 質量份)、〇χΕ_〇2(ΐ 質量份)、fp_300(25 質量份)、TBXP(15 質量份)、Τ5651(3 質量份)、SBN-70D(3 質量伤)’調製感光性樹脂組合物。由所得之感光性樹脂 組合物,藉由與實施例13〜實施例15相同之方法而製作積 層膜,對絕緣可靠性進行評價。將結果示於下述表8中。 又,翹曲為◎’解像性為◎。 [比較例7、比較例8] 相對於聚醯亞胺(1〇)、聚醯亞胺(11)各1〇〇質量份而言, 混合 BPE-500(20 質量份)、M_31〇(2〇 質量份)、〇χΕ〇2(ι 質 量份)、FP-300(25質量份)、ΤΒχρ〇5質量份),調製感光性 樹脂組合物。由所得之感光性樹脂組合物,藉由與實施例 13〜實施例15相同之方法而製作積層膜,對絕緣可靠性進 158118.doc •154- 201237101 行評價。將結果示於下述表8中。而且,比較例7及比較例 8均係翹^曲為◎,解像性為◎。 [表7] 酸二酑 二胺 矽氧烷結構 (質量%) 分子量 (Mw) 種類 添加量 (毫莫耳) 種類 添加量 (毫莫耳) 種類 添加量 (毫莫耳) 聚醯亞胺(7) ODPA 35.00 KF-8010 13.78 APB-N 20.52 40.0 40,000 聚醯亞胺(8) BPDA 35.00 KF-8010 13.41 APB-N 20.87 40.0 30,000 聚醯亞胺(9) PMDA 35.00 KF-8010 11.59 APB-N 22.75 40.0 35,000 聚醯亞胺(10) TMECr 35.00 KF-8010 16.04 APB-N 18.27 40.0 35,000 聚醯亞胺(11) ODPA 35.00 PMAB 9.69 APB-N 24.63 0.0 30,000 155- 158118.doc 201237101 怒5 外觀 (樹枝狀結晶) 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 X X 外觀 (膨脹及變色) 〇 〇 〇 &lt; 〇 &lt; Ο 〇 &lt; &lt; &lt; 〇 X X 絕緣電阻值 〇 〇 〇 &lt; 〇 〇 〇 〇 &lt; &lt; &lt; ◎ X X ! (F) 磷化合物 添加量 i(質量份) 25.0 15.0 Ο 〇 wS wS &lt;N — 25.0 15.0 25.0 15.0 25.0 15.0 25.0 15.0 25.0 15.0 25.0 15.0 ο ο ir&gt; w-&gt; &lt;N — ο ο fN — 25.0 15.0 Ο 〇 uS wS CN — 25.0 15.0 25.0 15.0 種類 FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 j TBXP (Η) 光聚合起始剤 «W甶 4 m p o p p p q q p p ρ ο p ρ q 種類 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXH-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 iS勺结 珀呛 4蛛&amp;·安 ^ §&lt;°S 一 1 添加量 (質量份) 20.0 20.0 20.0 40.0 20.0 20.0 20.0 丨 20.0 20.0 20.0 20.0 20.0 20.0 !種類 M-310 M-310 M-310 * M-310 M-310 M-310 M-350 M-306 Α-ΤΜΜΤ A-GLY -9Ε M-310 M-310 M-310 m «ί^ ^ 珀吞δ·安 *w甶 | 20.0 1_ 20.0 20.0 40.0 • 20.0 20.0 20.0 20.0 20.0 _1 20.0 -1 20.0 20.0 20.0 種類 BPE-500 BPE-500 BPE-500 BPE-500 1 BPE-900 9PG BPE-500 BPE-500 BPE-500 BPE-500 BPE-500 BPE-500 BPE-500 (〇1)異氮酸睦 化合物 添加量 (質董份) • 1 1 1 • 1 1 1 • o cW • « i種類 • 1 « 1 ' • 1 1 t 1 • SBN-70D • • (b)2官能羥基化合物 添加量 (質量份) • 1 • • 1 1 1 1 1 • o 1 &gt; i種類 1_ I 1 * 1 1 1 1 1 1 « T5651 1 « (a)聚醯亞胺 1_ 添加量 (質量份) 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 0 100.0 100.0 種類 聚酿亞胺 …―(71— 聚醢亞胺 (8)_ 聚趄亞胺 (9) 聚醯亞胺 ⑺ 聚醢亞胺 ω — 聚趄亞胺 (Z)_ 聚趄亞胺 聚趄亞胺 ⑺ 聚瞌亞胺 ⑺― 聚趄亞胺 (71... 聚豳亞胺 —ω_ 聚趄亞胺 ⑺ 隹 « s 聚趄亞胺 ου 實施例13 實施例14 實施例15 實施例16 實施例π 實施例18 實施例19 實施例20 實施例21 實施例22 實施例23 贲施例24 比較例7 比較例8 lS8118.doc -156- s 201237101 由表7及表8之結果可知:於使用含有上述通式(7)所表 示之聚醯亞胺結構、與上述通式(8)所表示之聚醯胺酸結構 的感光性樹脂組合物之實施例13〜實施例24中,與比較例7 及比較例8相比較而言,絕緣可靠性(耐HAST性)優異。 又,若將實施例13及實施例20與實施例22及實施例23加以 比較,則可知含有上述通式(10)所表示之結構的具有3個以 上雙鍵之(曱基)丙烯酸酯化合物的樹脂組合物之絕緣可靠 性(耐HAST性)進一步變良好。 關於本發明之第4實施形態之樹脂組合物,參照以下之 實施例25、實施例26及比較例9〜比較例11加以說明。再 者’以下之實施例25、實施例26係第2態樣之樹脂組合 物。 [實施例25] 於本實施例中,作為樹脂組合物,係使用於醯亞胺化率 為100°/。之聚醯亞胺Z之清漆中添加有作為2官能性羥基化 合物之信越化學公司製造之兩末端型酚改性聚矽氧χ_22· 1821(羥值為38 mgKOH/g)、作為噁唑啉化合物之i,3•雙 (4,5-二氫-2-噁唑基)苯(以下稱為Bp0)、阻燃劑A(參照實 施例1)者。使用相對於聚醯亞胺Ζ ι〇〇質量份而言,添加 有信越化學公司製造之兩末端型酚改性聚矽氧x_22_1821 5 質量份、BPO 13質量份、阻燃劑a 33質量份者。將該樹脂 組合物塗佈於銅箔上,於95。〇下進行12分鐘之乾燥而獲得 厚度為30 μηι之樹脂膜。該樹脂膜係使用於鹼可溶性之評 仏中。進一步將樹脂膜於1 8〇。〇下加熱6〇分鐘而獲得硬化 158118.doc -157- 201237101 物。該硬化物係使用於耐驗性之評價中。以下,對聚醯亞 胺z之合成方法加以說明。 [聚醯亞胺Z] 對聚醯亞胺Z之合成方法加以說明。首先,於三口可分 離式燒瓶上安裝氮氣導入管、溫度計、具有水分分離阱之 球型冷凝管。於室溫25°c下,裝入三乙二醇二曱醚15 g、 γ-丁内酯35 g、曱苯20.0 g、4,4'-氧雙鄰苯二曱酸二酐 (MANAC公司製造、簡稱為〇DPA)10.86 g(35.00 mmol), 攪拌至均勻。其後’升溫至80°C而添加聚矽氧二胺(信越 化學工業公司製造、簡稱為KF-8010)12.05 g(14.7 mmol), 進一步進行0.5小時之攪拌後,升溫至17〇。(:,進行4小時之 加熱。於反應中’所副生之水與曱苯共沸,使用具有水分 分離阱之球型冷凝管而於回流下進行脫水。除去副生水之 後,停止回流,將甲苯全部除去。於室溫25。〇下靜置、冷 卻12小時後添加2,2’-雙(3-胺基-4-羥基笨基)六氟丙烷7.56 g (20.65 mmol)、γ-丁内酯 35 g、甲苯20 〇 g。攪掉 〇 5小時 後,升溫至170°C ’進行4小時之加熱。於反應中,所副生 之水與甲苯共沸,使用具有水分分離阱之球型冷凝管而於 回流下進行脫水。除去副生水之後,停止回流,將曱苯全 部除去。其次,藉由5 μιη之過濾器對生成物進行加壓過 濾,藉此獲得醯亞胺化率為1 〇〇%之聚醯亞胺Ζ清漆。 [翹曲之評價] 翹曲之評價係藉由樹脂膜四角之隆起而評價。具體而言, 於23°C、濕度50%之環境下’將上述試樣丨切斷為5 cmx5 cm, 158118.doc 158· 201237101 測地角相對於中央部之隆起距離而作為翹曲。將麵曲為ι〇 mm以下者作為良好而記為〇,將5 mm以下者作為更良好 而記為◎,將15 mm以下者記為Δ,將超過15 111111者作為不 良而記為X。 [耐焊料性之評價] 耐焊料性係基於JPCA-BM02規格,將切斷為3 cm J c Π1 之硬化物於焊料浴中26(TC下浸潰60秒而進行評價。目視 檢查外觀,確認變形、溶解潰等之變化之有無,將於整體 之面積之90❶/。以上未發現變化之情形記為〇,見於整體之 面積之50%〜90%未發現變化之情形記為△,將未發現變化 之區域不足50%之情形記為X。 [鹼可溶性之評價] 將樹脂膜浸潰於48°C、3%之氫氧化鈉水溶液中,測定膜 厚之溶解速度’進行驗可溶性之評價。將膜厚之溶解2度 為〇·2 μΓη/sec以上之情形記為〇,將不足〇2之情: 吕己為X。 [耐鹼性之評價] 將硬化物於48°c、3。/。之氫氧化鈉水溶液中浸潰i分鐘, 測定浸潰前後之膜厚之變化,進行耐鹼性之評價。化 為2 μιη以下之情形記為〇,將超過2 μιη之情形記為X。 [通孔埋入性] 測 定 於與上述第1實施形態之實施例1相同之條件下進行 [冷熱衝擊試驗] 158118.doc •159· 201237101 於與上述第1實施形態之實施例1相同之條件下進行測 定。 [樹脂流動性] 於與上述第1實施形態之實施例1相同之條件下進行測 定。 [實施例26] 於本實施例中,作為樹脂組合物,係使用相對於聚醯亞 胺Z 100質量份而言,添加有作為2官能性羥基化合物之信 越化學公司製造之兩末端型酚改性聚矽氧χ_22 ΐ821 1〇質 量份、作為噁唑啉化合物之BP0 20質量份、阻燃劑a 33質 量份者。其他與實施例25相同地製作樹脂膜、硬化物而進 行評價。 [比較例9] 於本實施例中,作為樹脂組合物,係使用相對於聚醯亞 胺Z 100質量份而言,未添加2官能性羥基化合物地添加有 阻燃劑A 33質量份者。其他與實施例25相同地製作樹脂 膜、硬化物而進行評價。 [比較例10] 於本貫施例中,作為樹脂組合物,係使用未使用聚酿亞 胺Z而添加有作為2官能性羥基化合物之信越化學公司製造 之兩末端型酚改性聚矽氧χ_22_1821 1〇質量份、作為噁唑 啉化合物之BPO 20質量份、阻燃劑a 33質量份者。其他與 貫施例25相同地製作樹脂膜、硬化物而進行評價。 [比較例11] 158118.docS 201237101 9pG (2 parts by mass), M-310 (2 parts by mass), 〇xe-〇2 (1 part by mass), FP- are mixed with 100 parts by mass of the polyimine (7). 300 (25 parts by mass) and TBXP (15 parts by mass) were prepared to prepare a photosensitive resin composition. A laminate film was produced by the same method as that of Example 13 to Example 15 from the obtained photosensitive resin composition, and the insulation reliability was evaluated. The results are shown in Table 8 below. Further, the warpage was ◎, and the resolution was 〇. [Example 20] With respect to 100 parts by mass of the polyimine (7), 8 ugly-500 (20 parts by mass), M-350 (20 parts by mass), and 〇xe-〇2 (1 part by mass) were mixed. FP-300 (25 parts by mass) and TBXP (15 parts by mass) were prepared to prepare a photosensitive resin composition. From the obtained photosensitive resin composition ', a laminate film was produced by the same method as in Example 13 to Example 15, and the insulation reliability was evaluated. The results are shown in Table 8 below. Further, the warpage was ◎, and the resolution was [Example 21] 3 parts of ugly-500 (20 parts by mass) and M-306 (20 parts by mass) based on 100 parts by mass of the polyimine (7). ), xe-〇2 (1 part by mass), FP-300 (25 parts by mass), and TBXP (15 parts by mass) were prepared to prepare a photosensitive resin composition. From the obtained photosensitive resin composition, a laminate film was produced by the same method as in Examples 13 to 15 to evaluate the insulation reliability. The results are shown in Table 8 below. Further, the warpage is ◎, and the resolution is ©. [Example 22] BPE-500 (20 parts by mass), A-TMMT (20 parts by mass), 〇xe-02 (1 part by mass), FP were mixed with 100 parts by mass of the polyimine (7). -300 (25 parts by mass), TBXP (15 parts by mass), and a photosensitive resin combination 158118.doc • 153-201237101. From the obtained photosensitive resin composition, a laminate film was produced by the same method as in Example 13 to Example 15, and the insulation reliability was evaluated. The results are shown in Table 8 below. Further, the warpage was ◎, and the resolution was ©. [Example 23] A mixture of 8 --500 (20 parts by mass), A-GLY-9E (20 parts by mass), 〇XE-02 (1 mass) with respect to 100 parts by mass of the polyimine (7) Parts), Fp_300 (25 parts by mass), and TBXP (15 parts by mass) were prepared to prepare a photosensitive resin composition. From the obtained photosensitive resin composition, a laminate film was produced by the same method as in Example 13 to Example 15, and the insulation reliability was evaluated. The results are shown in Table 8 below. Further, the warpage was ◎, and the resolution was ◎. [Example 24] BPE-500 (20 parts by mass), M-310 (20 parts by mass), 〇χΕ_〇2 (ΐ by mass), and 100 parts by mass of the polyimine (7) were mixed. Fp_300 (25 parts by mass), TBXP (15 parts by mass), Τ5651 (3 parts by mass), and SBN-70D (3 mass damage) were prepared to prepare a photosensitive resin composition. From the obtained photosensitive resin composition, a laminate film was produced in the same manner as in Example 13 to Example 15, and the insulation reliability was evaluated. The results are shown in Table 8 below. Further, the warpage was ◎' resolution was ◎. [Comparative Example 7 and Comparative Example 8] BPE-500 (20 parts by mass) and M_31 〇 (2) were mixed with 1 part by mass of each of the polyimine (1 〇) and the polyimine (11).感光质量份), 〇χΕ〇2 (1 parts by mass), FP-300 (25 parts by mass), ΤΒχρ〇 5 parts by mass), and a photosensitive resin composition was prepared. From the obtained photosensitive resin composition, a laminate film was produced by the same method as in Example 13 to Example 15, and the insulation reliability was evaluated in 158118.doc • 154 - 201237101. The results are shown in Table 8 below. Further, in Comparative Example 7 and Comparative Example 8, the warpage was ◎, and the resolution was ◎. [Table 7] Structure of acid dioxane diamine oxime (% by mass) Molecular weight (Mw) Type of addition (mole) Type of addition (mole) Addition amount (mole) Polyimine ( 7) ODPA 35.00 KF-8010 13.78 APB-N 20.52 40.0 40,000 Polyimine (8) BPDA 35.00 KF-8010 13.41 APB-N 20.87 40.0 30,000 Polyimine (9) PMDA 35.00 KF-8010 11.59 APB-N 22.75 40.0 35,000 Polyimine (10) TMECr 35.00 KF-8010 16.04 APB-N 18.27 40.0 35,000 Polyimine (11) ODPA 35.00 PMAB 9.69 APB-N 24.63 0.0 30,000 155- 158118.doc 201237101 Anger 5 Appearance (dendritic Crystallization) 〇〇〇〇〇〇〇〇〇〇〇〇XX Appearance (expansion and discoloration) 〇〇〇&lt;〇&lt; Ο 〇&lt;&lt;&lt; 〇XX Insulation resistance value 〇〇〇&lt; 〇〇〇 〇&lt;&lt;&lt;&lt; ◎ XX ! (F) Phosphorus compound addition amount i (parts by mass) 25.0 15.0 Ο 〇wS wS &lt;N - 25.0 15.0 25.0 15.0 25.0 15.0 25.0 15.0 25.0 15.0 25.0 15.0 ο ο ir&gt; w- &gt;&lt;N — ο ο fN — 25.0 15.0 Ο 〇uS wS CN — 25.0 15.0 25.0 15.0 Type FP-300 TB XP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP-300 TBXP FP -300 j TBXP (Η) Photopolymerization start 剤«W甶4 mpopppqqpp ρ ο p ρ q Type OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXH-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 OXE-02 iS spoon 呛 呛 呛 蛛 蛛 蛛 ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° 20.0 20.0 20.0 20.0 !Type M-310 M-310 M-310 * M-310 M-310 M-310 M-350 M-306 Α-ΤΜΜΤ A-GLY -9Ε M-310 M-310 M-310 m « ί^ ^ Perton δ·安*w甶| 20.0 1_ 20.0 20.0 40.0 • 20.0 20.0 20.0 20.0 20.0 _1 20.0 -1 20.0 20.0 20.0 Type BPE-500 BPE-500 BPE-500 BPE-500 1 BPE-900 9PG BPE- 500 BPE-500 BPE-500 BPE-500 BPE-500 BPE-500 BPE-500 (〇1) Addition amount of bismuth isophthalate compound (quality Dong) • 1 1 1 • 1 1 1 • o cW • « i type • 1 « 1 ' • 1 1 t 1 • SBN-70D • • (b) Addition amount of 2-functional hydroxy compound (parts by mass) • 1 • • 1 1 1 1 1 • o 1 &gt; i type 1_ I 1 * 1 1 1 1 1 1 « T5651 1 « (a) Polyimine 1_ Addition (parts by mass) 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 0 100.0 100.0 Kinds of polyiminoimide...-(71-polyimine (8)_polyimine (9) Polyimine (7) Polyimine ω — Polyimine (Z) _ Polyimine Polyimine (7) Polyimine (7) - Polyimine (71... Polyimine - ω_ Polyimine (7) 隹 « s Polyimine ο υ Example 13 Example 14 Implementation Example 15 Example 16 Example π Example 18 Example 19 Example 20 Example 21 Example 22 Example 23 Example 24 Comparative Example 7 Comparative Example 8 lS8118.doc -156-s 201237101 From Table 7 and Table 8 As a result, it is understood that Example 13 to Example of using a photosensitive resin composition containing the polyimine structure represented by the above formula (7) and the polyphthalic acid structure represented by the above formula (8) Among them, in comparison with Comparative Example 7 and Comparative Example 8, the insulation reliability (HAST resistance) was excellent. Further, when Example 13 and Example 20 are compared with Example 22 and Example 23, it is understood that the (fluorenyl) acrylate compound having three or more double bonds including the structure represented by the above formula (10) is obtained. The insulation reliability (HAST resistance) of the resin composition is further improved. The resin composition of the fourth embodiment of the present invention will be described with reference to the following Example 25, Example 26, and Comparative Example 9 to Comparative Example 11. Further, the following Example 25 and Example 26 are the resin compositions of the second aspect. [Example 25] In the present example, as the resin composition, the sulfhydrylation ratio was 100 ° /. A two-terminal phenol-modified polyoxoxime _22·1821 (hydroxyl value: 38 mgKOH/g) manufactured by Shin-Etsu Chemical Co., Ltd. as a bifunctional hydroxy compound, as an oxazoline compound, is added to the varnish of the polyamidene Z. i,3•bis(4,5-dihydro-2-oxazolyl)benzene (hereinafter referred to as Bp0) and flame retardant A (refer to Example 1). The use of a two-terminal phenol-modified polyoxoxene x_22_1821 5 parts by mass, a BPO 13 parts by mass, and a flame retardant a 33 parts by mass of the Shin-Etsu Chemical Co., Ltd. . The resin composition was applied to a copper foil at 95. The underlayer was dried for 12 minutes to obtain a resin film having a thickness of 30 μm. This resin film was used in the evaluation of alkali solubility. Further, the resin film was at 18 Torr. The underarm is heated for 6 minutes to obtain hardening 158118.doc -157- 201237101. This hardened material is used in the evaluation of the testability. Hereinafter, a method for synthesizing polyimine z will be described. [Polyimide Z] The synthesis method of polyimine Z is explained. First, a nitrogen inlet tube, a thermometer, and a spherical condenser having a moisture separation well were attached to a three-neck separable flask. At room temperature 25 ° C, charged with triethylene glycol dioxime 15 g, γ-butyrolactone 35 g, toluene 20.0 g, 4,4'-oxybisphthalic acid dianhydride (MANAC) Manufactured, abbreviated as 〇DPA) 10.86 g (35.00 mmol), stirred until homogeneous. Thereafter, the temperature was raised to 80 ° C, and 12.05 g (14.7 mmol) of polyoxydeoxydiamine (manufactured by Shin-Etsu Chemical Co., Ltd., abbreviated as KF-8010) was added, and after further stirring for 0.5 hours, the temperature was raised to 17 Torr. (:, heating for 4 hours. In the reaction, the water produced by the by-product is azeotroped with benzene, and dehydrated under reflux using a spherical condenser having a water separation well. After the secondary water is removed, the reflux is stopped. The toluene was completely removed. After standing at room temperature for 25 hours, 2,2'-bis(3-amino-4-hydroxyphenyl)hexafluoropropane 7.56 g (20.65 mmol), γ- was added after cooling for 12 hours. 35 g of butyrolactone and 20 g of toluene. After stirring for 5 hours, the temperature was raised to 170 ° C for 4 hours. In the reaction, the by-produced water was azeotroped with toluene, and a water separation well was used. The ball-shaped condenser is dehydrated under reflux, and after the removal of the by-produced water, the reflux is stopped to remove all the toluene. Next, the product is subjected to pressure filtration by a filter of 5 μm to obtain the ruthenium iodide. The polyimide varnish having a yield of 1% by weight. [Evaluation of warpage] The evaluation of warpage was evaluated by the ridge of the resin film at four corners, specifically, at 23 ° C and a humidity of 50%. 'Cut the above sample to 5 cmx5 cm, 158118.doc 158· 201237101 Geodesic angle relative to the central part The bulging distance is warpage, and the surface curvature is ι 〇 mm or less as good as 〇, the 5 mm or less is better as ◎, and the 15 mm or less is recorded as Δ, which is more than 15 111111 It is described as X as a defect. [Evaluation of solder resistance] The solder resistance is based on the JPCA-BM02 specification, and the cured product cut into 3 cm J c Π1 is immersed in a solder bath for 26 seconds (TC immersion for 60 seconds). The evaluation was carried out. The appearance was visually inspected, and the presence or absence of changes such as deformation and dissolution was confirmed. The overall area was 90 ❶ /. The above-mentioned no change was recorded as 〇, and 50% to 90% of the total area was found. In the case of Δ, the case where the area where no change was found was less than 50% was referred to as X. [Evaluation of alkali solubility] The resin film was immersed in a 3% aqueous sodium hydroxide solution at 48 ° C, and the film thickness was measured. The dissolution rate was evaluated for solubility. The case where the film thickness was dissolved at 2 degrees 〇·2 μΓη/sec or more was recorded as 〇, which would be less than 〇2: Lu Ji is X. [Evaluation of alkali resistance] The hardened material was immersed in an aqueous solution of sodium hydroxide at 48 ° C for 3 minutes to determine the pre-impregnation. The change in film thickness was evaluated for alkali resistance, and the case of being 2 μm or less was denoted by 〇, and the case of exceeding 2 μηη was denoted by X. [Through hole embedding property] Measured in the first embodiment The measurement was carried out under the same conditions as in Example 1 [Cold and Thermal Shock Test] 158118.doc • 159·201237101 The measurement was carried out under the same conditions as in the first embodiment of the first embodiment. [Resin fluidity] In the first embodiment described above The measurement was carried out under the same conditions as in Example 1. [Example 26] In the present embodiment, as the resin composition, a two-terminal phenolic modification manufactured by Shin-Etsu Chemical Co., Ltd. as a bifunctional hydroxy compound was added to 100 parts by mass of the polyimine. The polyorganophosphonium _22 ΐ 821 1 part by mass, 20 parts by mass of BP0 as the oxazoline compound, and 33 parts by mass of the flame retardant a. A resin film and a cured product were produced in the same manner as in Example 25 and evaluated. [Comparative Example 9] In the present embodiment, as the resin composition, 33 parts by mass of the flame retardant A was added without adding a bifunctional hydroxy compound to 100 parts by mass of the polyamidene Z. In the same manner as in Example 25, a resin film and a cured product were produced and evaluated. [Comparative Example 10] In the present embodiment, a two-terminal phenol-modified polyoxosiloxane manufactured by Shin-Etsu Chemical Co., Ltd., which is a bifunctional hydroxy compound, was used as a resin composition, without using the polyamidene Z. Χ_22_1821 1 part by mass, 20 parts by mass of BPO as an oxazoline compound, and 33 parts by mass of flame retardant a. In the same manner as in Example 25, a resin film and a cured product were produced and evaluated. [Comparative Example 11] 158118.doc

S •160· 201237101 於本實施例令’作為樹脂組合物,係使用相對於聚酿亞 胺Z 100質量份而言’添加有作為2官能性羥基化合物之信 越化子A司製造之兩末端型酚改性聚石夕氧ISM 質 里伤阻燃劑A 3 3質量份者。其他與實施例25相同地製作 樹脂膜、硬化物而進行評價。 將貫她例25、實施例26及比較例9~比較例11之評價結果 示於下述表9中。由下述表9可知:使用實施例25、實施例 2 6之樹脂組合物的樹脂膜顯示出驗可溶性,且硬化物顯示 出耐驗性’進而低勉曲、耐焊料性優異,獲得與上述之其 他實施例之樹脂組合物相同之效果。另一方面,由比較例 9〜比較例11可知1於未包含聚醯亞胺、2官能性含經基化 合物及噁唾琳化合物之任意者之情形時’耐焊料性或翹曲 等之評價惡化。 158118.doc -161 - 201237101 [表9]S.160·201237101 In the present embodiment, 'as a resin composition, a two-end type manufactured by Shin-Etsu Chemicals A, which is a bifunctional hydroxy compound, is added to 100 parts by mass of the polyacrylonitrile Z. Phenol modified polysulfide ISM plasmon flame retardant A 3 3 parts by mass. In the same manner as in Example 25, a resin film and a cured product were produced and evaluated. The evaluation results of Example 25, Example 26, and Comparative Example 9 to Comparative Example 11 are shown in Table 9 below. As is apparent from the following Table 9, the resin films using the resin compositions of Example 25 and Example 26 showed solubility, and the cured product showed durability, and thus was low in distortion and excellent in solder resistance, and was obtained as described above. The resin compositions of the other examples have the same effects. On the other hand, in Comparative Example 9 to Comparative Example 11, it was found that evaluation of solder resistance, warpage, and the like in the case where any of the polyimine, the bifunctional group-containing compound, and the oxetine compound were not contained. deterioration. 158118.doc -161 - 201237101 [Table 9]

--^~~~_ 實施例25 實施例26 比較例9 比較例10 比較例11 (a)聚醯亞胺(質量份)Z 100 100 100 100 (b)2官能羥基化合物(質量份) 5 10 10 10 (c-2)噁唑啉化合物(質量份) 13 20 20 阻燃劑 A 33 33 33 33 33 加熱條件1 95°C12分鐘 加熱條件2 180°C60 分鐘 麵曲 ◎ ◎ X ◎ X 耐焊料性 〇 〇 X X X 驗可溶性 〇 〇 〇 〇 〇 对驗性 〇 〇 X X X 通孔埋入性 〇 〇 X 〇 X 冷熱衝擊試驗 〇 〇 X X X 樹脂流動性 〇 〇 X X X 再者,本發明並不限定於上述實施形態,可加以各種變 更而實施。於上述實施形態中,關於隨附圖式中所圖示之 大小或形狀等,並不限定於此,可在發揮本發明之效果的 範圍内進行適宜變更。另外,只要不偏離本發明之目的之 範圍,則可適宜變更而實施。 [產業上之可利用性] 本發明具有可實現如下之樹脂組合物之效果,前述樹脂 組合物可實現於硬化時充分之翹曲之減低、及優異之耐熱 性,特別是可作為半導體元件之表面保護膜、層間絕緣 膜、黏結片、半導體封裝基板、電路基板之保護層、印刷 布線板用保護絕緣膜、可撓性印刷基板用保護絕緣膜而適 宜地利用。 本申請係基於2011年1月18日所提出之日本專利2011-007862、2011年3月18曰所提出之曰本專利2011-062186、 -162- 158118.doc--^~~~_ Example 25 Example 26 Comparative Example 9 Comparative Example 10 Comparative Example 11 (a) Polyimine (parts by mass) Z 100 100 100 100 (b) Bifunctional hydroxy compound (parts by mass) 5 10 10 10 (c-2) Oxazoline compound (parts by mass) 13 20 20 Flame retardant A 33 33 33 33 33 Heating conditions 1 95 ° C 12 minutes heating condition 2 180 ° C 60 minutes surface curvature ◎ ◎ X ◎ X resistance Solderability 〇〇 验 〇〇〇〇〇 〇〇〇〇〇 〇〇〇〇〇 〇〇〇〇〇 〇〇 埋 埋 埋 埋 埋 X 〇 X Thermal thermal shock test 〇〇 XXX Resin fluidity 〇〇 XXX Further, the present invention is not limited to the above The embodiment can be implemented with various modifications. In the above-described embodiments, the size, shape, and the like as illustrated in the drawings are not limited thereto, and can be appropriately changed within the range in which the effects of the present invention are exerted. Further, it can be carried out as appropriate without departing from the scope of the object of the invention. [Industrial Applicability] The present invention has an effect of realizing a resin composition which can achieve sufficient warpage at the time of curing and excellent heat resistance, and particularly can be used as a semiconductor element. The surface protective film, the interlayer insulating film, the adhesive sheet, the semiconductor package substrate, the protective layer of the circuit board, the protective insulating film for a printed wiring board, and the protective insulating film for a flexible printed circuit board are suitably used. This application is based on Japanese Patent No. 2011-007862, filed on January 18, 2011, and filed on March 18, 2011. This patent 2011-062186, -162-158118.doc

S 201237101 2011年5月12日所提出之日本專利2011-107290、及2011年 7月22日所提出之日本專利2〇011-1 60730。該等之内容全 部包含於其中。 【圖式簡單說明】 圖1A-F係表示本實施形態之多層可撓性布線板之製造少 驟的概略的圖。 【主要元件符號說明】 11 絕緣基板 12a、12b、15a 銅箱 13 通孔 14 鍵銅 15 積層體 15b 保護層 16 可撓性部 17 保護膜 158118.doc - 163-S 201237101 Japanese Patent No. 2011-107290, filed on May 12, 2011, and Japanese Patent No. 2 011-1 60730, filed on July 22, 2011. All of these contents are included. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1A-F is a schematic view showing a small number of manufacturing of a multilayer flexible wiring board of the embodiment. [Main component symbol description] 11 Insulating substrate 12a, 12b, 15a Copper box 13 Through hole 14 Bond copper 15 Laminated body 15b Protective layer 16 Flexible portion 17 Protective film 158118.doc - 163-

Claims (1)

201237101 七、申請專利範圍: 1. 一種樹脂組合物,其特徵在於:含有(A)高分子化合物、 (B)具有2個以上經基的多官能含羥基化合物、(c)於前述 高分子化合物及/或前述多官能含羥基化合物之間形成交 聯鍵的具有2個以上交聯性官能基的多官能交聯性化合 物,且前述多官能交聯性化合物可於前述高分子化合物 及/或前述多官能含經基化合物之間形成3維交聯。 2·如請求項1之樹脂組合物,其中前述高分子化合物具有 醯亞胺基及/或醯胺基,且前述3維交聯包含c=〇基及/或 NH基。 3. 如請求項丨或2之樹脂組合物,其中前述多官能含羥基化 合物及/或前述多官能交聯性化合物為3官能以上。 4. 如吻求項1至3中任一項之樹脂組合物,其中前述高分子 化合物具有羥基及/或羧基。 5. 如明求項1至4中任一項之樹脂組合物,其中作為前述多 B能含羥基化合物,包含選自兩末端酚改性聚矽氧、聚 丁二烯多元醇、氫化聚丁二烯多元醇、及聚碳酸酯多元 醇之至少1種。 6. 如明求項丨至5中任一項之樹脂組合物,其中前述多官能 含經基化合物含有脂肪族結構。 7. 如請求項1JL6中任一項之樹脂組合物,其中前述多官能 含經基化合物係聚碳酸酯多元醇。 长項1至7中任一項之樹脂組合物,其中作為前述多 官能交聯性化合物,包含具有2個以上異氰酸酯基之多 158118.doc 201237101 官能異氰酸酯化合物β201237101 VII. Patent application scope: 1. A resin composition comprising (A) a polymer compound, (B) a polyfunctional hydroxyl group-containing compound having two or more groups, and (c) a polymer compound And/or a polyfunctional crosslinkable compound having two or more crosslinkable functional groups forming a crosslinkage bond between the polyfunctional hydroxyl-containing compounds, and the polyfunctional crosslinkable compound may be a polymer compound and/or A three-dimensional crosslink is formed between the aforementioned polyfunctional permeation-containing compounds. The resin composition of claim 1, wherein the polymer compound has a quinone imine group and/or a guanamine group, and the three-dimensional crosslinks comprise c=mercapto group and/or NH group. 3. The resin composition according to claim 2, wherein the polyfunctional hydroxyl group-containing compound and/or the polyfunctional crosslinkable compound is a trifunctional or higher functional group. 4. The resin composition according to any one of claims 1 to 3, wherein the polymer compound has a hydroxyl group and/or a carboxyl group. 5. The resin composition according to any one of claims 1 to 4, wherein the poly-B energy-containing hydroxy compound comprises a phenol-modified polyfluorene oxide, a polybutadiene polyol, and a hydrogenated polybutane selected from the two ends. At least one of a diene polyol and a polycarbonate polyol. 6. The resin composition according to any one of item 5, wherein the polyfunctional ketone-containing compound contains an aliphatic structure. 7. The resin composition according to any one of claims 1 to 3, wherein the polyfunctional group-containing compound is a polycarbonate polyol. The resin composition according to any one of items 1 to 7, wherein the polyfunctional crosslinkable compound comprises a plurality of or more isocyanate groups. 158118.doc 201237101 Functional isocyanate compound β 交聯性化合物包含2個以 其中前述多官能 以上嵌段異氰酸酯基。The crosslinkable compound contains two of the above polyfunctional upper block isocyanate groups. 11.如請求項1至1〇中任一 其中前述多宫能 刖述多官能交聯性化合物 比係羥基/交聯性官能基 項之樹脂組合物,其中相對於前 述同刀子化合物100質量份而言,前述多官能含羥基化 合物之含量為5質量份〜60質量份。 12.如明求項1至11令任一項之樹脂組合物,其t相對於前 述间刀子化合物1 〇〇質量份而言,前述多官能交聯性化 合物之含量為5質量份〜60質量份。 13·如求項1至12中任一項之樹脂組合物,其中前述多官 月匕3經基化合物之數量平均分子量為500〜3000 » 14.如睛求項丨至13中任一項之樹脂組合物其中前述高分 子化合物具有下述通式(1)所表示之重複結構: [化1] 通式(1) Q Ο11. The resin composition according to any one of claims 1 to 1 wherein the polyphenyl group is capable of repeating a polyfunctional crosslinkable compound than a hydroxyl group/crosslinkable functional group, wherein 100 parts by mass of the same knife compound as described above is used. The content of the polyfunctional hydroxyl group-containing compound is from 5 parts by mass to 60 parts by mass. The resin composition according to any one of the items 1 to 11, wherein the content of the polyfunctional crosslinkable compound is from 5 parts by mass to 60% by mass based on 1 part by mass of the knive compound. Share. The resin composition according to any one of claims 1 to 12, wherein the number average molecular weight of the above-mentioned polycyclic guanidine 3-based compound is 500 to 3000 » 14. In the resin composition, the polymer compound has a repeating structure represented by the following formula (1): [Chemical Formula 1] Formula (1) Q Ο 158118.doc 201237101 (於式(1、Φ V * .’ γι表不2價之有機基,Ζι表示4價之有機 基,a表示1〜50之整數)。 如請求項1至14 t任-項之樹脂組合物,其中前述高分 子化合物係聚醯亞胺。 如吻求項1至1 5中任一項之樹脂組合物,其中前述高分 子化合物具有下述通式(2)所表示之重複結構: [化2] 通式(2) Υι 如-Υ2ρ〇—γ,|4〇-γ4[ 0 一 Yjj 一 N 0 人2 Y 〇 (於式(2)中’ Zl及Z2表示4價之有機基,Υι、γ2、Υ3、Y 及丫5刀別獨立地表示碳數1〜碳數5之伸烧基,亦可4 支;b、(:及(1分別獨立地表示卜5〇之整數)。 17.如請求項1至16中任一項之樹脂組合物,其中前述高4 子化合物具有下述通式(3)所表示之聚醯亞胺結構及下妇 通式(4)所表不之聚醯胺酸結構分別作為重複結構單元: [化3] 通式(3)158118.doc 201237101 (in the formula (1, Φ V * .' γι represents an organic group of 2 valence, Ζι denotes an organic group of 4 valence, a represents an integer of 1 to 50). As claimed in claims 1 to 14 t - The resin composition of any one of the above-mentioned polymer compounds, wherein the polymer compound is represented by the following formula (2), wherein the polymer compound is a resin composition according to any one of the above items (1). Repeating structure: [Chemical 2] General formula (2) Υι such as -Υ2ρ〇-γ,|4〇-γ4[ 0 Yjj a N 0 person 2 Y 〇 (in formula (2) 'Zl and Z2 represent 4 price The organic group, Υι, γ2, Υ3, Y, and 丫5 knives independently represent a carbon number of 1 to a carbon number of 5, and may also be 4; b, (: and (1 respectively independently represent Bu 5〇) The resin composition according to any one of claims 1 to 16, wherein the high tetra compound has a polyimine structure represented by the following formula (3) and a lower formula (4) The poly-proline structure is represented as a repeating structural unit: [Chemical 3] General formula (3) 158118.doc 201237101 通式(4) r17n-^^n— η〇-τΓ f〇h ο ο (於式(3)及式(4)中,R,、R2、R4、R R 7 、R1〇、 Rn、Rn*!^4分別獨立地表示氫原子或碳數丨〜碳數2〇之 1價之有機基;R3、I、&amp;、R丨2及1^分別獨立地表示场 數1〜碳數20之4價之有機基’ m、n、p分別獨立地表示丨 以上100以下之整數;R!6表示4價之有機基,表示場 數1〜碳數90之2價之有機基)。 18.如請求項17之樹脂組合物,其中作為構成前述通式(3)巧 表示之聚醯亞胺之二胺成分,包含下述通式(5)所表示之 二胺: [化4] 通式(5) 2n 3 5 4 11 1 R1—RIR今。 1012~11 RIO^UO^τη ^丨^—^ ^Am /rs 13 2 ri-r—r H2 (於式(5)中,Rl、R2、R4 ' R5、R R « R 8 R10、Rn、R】 及分別獨立地表示氫原子或碳數丨〜碳數20之丨價之有 機基;^^及〜分別獨立地表示碳數卜碳 數20之4價之有機基,m、n、p分別獨立為〇以上3〇以下 之整數,且滿足l$(m+n+p)S30)。 l58H8.doc -4- 201237101 子化合物具有下述通:)=脂組合:,其中前述“ [化5] 表不之結構作為重複單元: 通式(6) ’只十。 則♦侧嫌。刪%册綱 (於式(9)中.,Ri、R2、R4、r5、R7、r 、 9 12及Rl5表示碳數1〜碳數20之4價之 機基,爪、n、卩分別獨立地表示〇以上30以下之整數; 丨6表不4價之有機基,表示碳數丨〜碳數之2價之有 機基,A、B、c表示各單元之m〇1%,且滿足〇 1〇$(Α+Β)/ (A+B+C)蕊〇·85)。 20.如請求項1至19中任一項之樹脂組合物,其中前述高分 子化合物具有下述通式(7)所表示之聚醯亞胺結構及下述 通式(8)所表示之聚醯胺酸結構作為結構單元: [化7] 通式(7)158118.doc 201237101 General formula (4) r17n-^^n— η〇-τΓ f〇h ο ο (In equations (3) and (4), R, R2, R4, RR 7 , R1〇, Rn, Rn*!^4 each independently represent a hydrogen atom or a monovalent organic group having a carbon number 丨~carbon number of 2〇; R3, I, &amp;, R丨2 and 1^ respectively represent the number of fields 1~ The organic group 'm, n, and p of the carbon number of 4 carbon atoms independently represent an integer of 100 or more and 整数, and R!6 represents a tetravalent organic group, and represents an organic group having a field number of 1 to a carbon number of 90. ). 18. The resin composition of claim 17, wherein the diamine component constituting the polyimine represented by the above formula (3) comprises a diamine represented by the following formula (5): General formula (5) 2n 3 5 4 11 1 R1 - RIR. 1012~11 RIO^UO^τη ^丨^—^ ^Am /rs 13 2 ri-r—r H2 (in equation (5), Rl, R2, R4 ' R5, RR « R 8 R10, Rn, R And an organic group independently representing a hydrogen atom or a carbon number 丨 to a carbon number of 20; ^^ and ~ respectively represent an organic group having a carbon number of 20 carbon atoms, m, n, p respectively Independently equal to an integer less than 3〇, and satisfies l$(m+n+p)S30). l58H8.doc -4- 201237101 Sub-compound has the following pass:) = lipid combination: wherein the above "[5] shows the structure as a repeating unit: Formula (6) 'only ten. % (in the formula (9), Ri, R2, R4, r5, R7, r, 9 12 and Rl5 represent the base of the carbon number 1 to the carbon number of 4, and the claws, n, and 卩 are independent The ground indicates an integer of 30 or more; 丨6 indicates an organic group having a tetravalent value, and represents an organic group having a carbon number of 丨 to a carbon number of 2, and A, B, and c represent m〇1% of each unit, and satisfy 〇 A resin composition according to any one of claims 1 to 19, wherein the aforementioned polymer compound has the following formula (a) ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( 7) The polyimine structure represented by the present invention and the polyamic acid structure represented by the following formula (8) are as structural units: [7] General formula (7) R1( -----/e 9 9 IewnD^ I ο / RtB_sl-—R1 \ 3 ΖΟΛ ΥΟ Ν 式通 158118.doc 201237101R1( -----/e 9 9 IewnD^ I ο / RtB_sl-—R1 \ 3 ΖΟΛ ΥΟ Ν tong 158118.doc 201237101 ίΓ^ (於式(7)及式(8)中,Ζ1 2及Ζ3係源自下述通式(9)所表, 四羧酸二酐的4價之有機基,可分別相同亦可^ ^ ^ J不同;R 表示碳數1〜碳數30之2價之有機基,R19表示雄&amp; 18 灰數1〜碳數 30之1價之有機基,e表示1以上20以下之整數) [化4] 通式(9)Γ^^ (In the formulae (7) and (8), Ζ1 2 and Ζ3 are derived from the following general formula (9), and the tetravalent organic group of the tetracarboxylic dianhydride may be the same or ^ ^ ^J is different; R is an organic group having a carbon number of 1 to a carbon number of 30, and R19 is an organic group having a valence of 1 to a carbon number of 30, and an integer of 1 or more and 20 or less. General formula (9) ,其係含有(D)具 158118.doc -6- 1 1 ·如請求項1至20中任一項之樹脂組合物 有2個以上可光聚合之不飽和雙鍵的(甲基)丙烯酸賴化人 物、(E)光聚合起始劑。 2 22. 如請求項21之樹脂組合物,其中作為前述具有2個以上 可光聚合之不飽和雙鍵的(甲基)丙烯酸酯化合物,包人 具有3個以上雙鍵之(曱基)丙烯酸酯化合物。 3 23. 如請求項22之樹脂組合物,其中作為前述具有3個以上 雙鍵之(甲基)丙烯酸酯化合物,包含下述通式(1〇)所表 示之化合物: 201237101 [化8] 通式(10) R» CH2〇-(E-〇)r-C— I 0 Rao H3C-CH2-C—CH2〇-(H-〇)7-C— &lt;^420作-0)^-? O Ri CH 2 /iS2-QH2 (於式(10)中,R2〇表示氫原子或曱基,複數個E分別獨立 地表示碳數2〜碳數5之伸烷基,可分別相同亦可不同;f 為1〜10之整數)。 24. 如請求項21至23中任一項之樹脂組合物’其中作為前述 具有2個以上可光聚合之不飽和雙鍵的(甲基)丙烯酸酯化 合物’包含具有2個雙鍵之(曱基)丙烯酸酯化合物與具有 3個以上雙鍵之(曱基)丙烯酸酯化合物。 25. 如請求項1至24中任一項之樹脂組合物,其係含有(1?)磷 化合物。 26. 如請求項25之樹脂組合物,其中作為前述磷化合物,包 含麟酸酯化合物及/或鱗腈化合物。 27. —種樹脂組合物’其特徵在於:於溫度85。〇、濕度 85°/。、1 〇〇〇小時之絕緣可靠性試驗中之層間絕緣電阻為 ΙΟ9 Ω以上 ’ 120。〇220。〇之黏度為5000 Pa .S〜100000 Pa · S, 且具有伸長率不足20%之彈性區域與伸長率為50%以 上之塑性區域,層間絕緣層之膜厚為4〇 μηι以下。 2 8. —種硬化物’其特徵在於:藉由將如請求項1至27中任 158118.doc 201237101 一項之樹脂組合物於100°c〜130°C下加熱5分鐘〜60分鐘 後’於160°C〜200°C下加熱15分鐘〜60分鐘而獲得。 29. —種樹脂膜,其特徵在於包含:基材、及設置於前述基 材上之如請求項1至27中任一項之樹脂組合物。 30. 如請求項29之樹脂膜’其中前述基材係承載膜。 3 1 _如請求項29或30之樹脂膜,其係包含設置於前述樹脂組 合物上之覆蓋膜。 32. 如請求項29至31中任一項之樹脂膜,其中前述基材係銅 箔。 33. -種布線板’其特徵在於包含:具有布線之基材、及以 覆蓋則述布線之方式設置的如請求項i至27中任一項之 樹脂組合物。 158118.doc(D) 158118.doc -6- 1 1 · The resin composition according to any one of claims 1 to 20 has two or more photopolymerizable unsaturated double bonds (meth)acrylic acid Chemical character, (E) photopolymerization initiator. The resin composition of claim 21, wherein the (meth) acrylate compound having two or more photopolymerizable unsaturated double bonds is a (meth) acrylate having three or more double bonds Ester compound. The resin composition of claim 22, wherein the (meth) acrylate compound having three or more double bonds includes a compound represented by the following formula (1): 201237101 Formula (10) R» CH2〇-(E-〇)rC— I 0 Rao H3C-CH2-C—CH2〇-(H-〇)7-C— &lt;^420为-0)^-? O Ri CH 2 /iS2-QH2 (In the formula (10), R 2 〇 represents a hydrogen atom or a fluorenyl group, and a plurality of E independently represent a C 2 to a C 5 alkyl group, which may be the same or different; It is an integer from 1 to 10.) The resin composition of any one of claims 21 to 23, wherein the (meth) acrylate compound having two or more photopolymerizable unsaturated double bonds as described above contains two double bonds (曱An acrylate compound and a (fluorenyl) acrylate compound having three or more double bonds. The resin composition according to any one of claims 1 to 24, which contains (1?) a phosphorus compound. 26. The resin composition of claim 25, wherein the phosphorus compound comprises a linonic acid ester compound and/or a scaly nitrile compound. 27. A resin composition' characterized by a temperature of 85. 〇, humidity 85 ° /. The interlayer insulation resistance in the insulation reliability test of 1 hour is ΙΟ9 Ω or more ’120. 〇220. The crucible has a viscosity of 5000 Pa·s to 100,000 Pa·s, and has an elastic region having an elongation of less than 20% and a plastic region having an elongation of 50% or more, and the film thickness of the interlayer insulating layer is 4 μm or less. 2 8. A hardened material' characterized in that the resin composition according to any one of claims 158118.doc 201237101 is heated at 100 ° C to 130 ° C for 5 minutes to 60 minutes. It is obtained by heating at 160 ° C to 200 ° C for 15 minutes to 60 minutes. A resin film comprising: a substrate; and a resin composition according to any one of claims 1 to 27, which is provided on the substrate. 30. The resin film of claim 29, wherein the aforementioned substrate is a carrier film. The resin film of claim 29 or 30, which comprises a cover film provided on the aforementioned resin composition. The resin film according to any one of claims 29 to 31, wherein the substrate is a copper foil. 33. A wiring board </ RTI> characterized by comprising: a substrate having a wiring, and a resin composition according to any one of claims 1 to 27, which is provided to cover the wiring. 158118.doc
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Families Citing this family (19)

* Cited by examiner, † Cited by third party
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US9243164B1 (en) 2012-02-21 2016-01-26 Park Electrochemical Corporation Thermosetting resin composition containing a polyphenylene ether and a brominated fire retardant compound
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US9562159B2 (en) * 2014-07-03 2017-02-07 Momentive Performance Material Inc. UV-active chromophore functionalized polysiloxanes and copolymers made therefrom
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KR102280582B1 (en) 2016-05-25 2021-07-23 도레이 카부시키가이샤 resin composition
CN110392864B (en) * 2017-03-29 2023-05-23 东丽株式会社 Negative photosensitive resin composition, cured film, element and organic EL display having cured film, and method for producing same
WO2019054625A1 (en) * 2017-09-15 2019-03-21 주식회사 엘지화학 Photosensitive resin composition and cured film comprising same
KR102134377B1 (en) * 2017-09-15 2020-07-15 주식회사 엘지화학 Photosensitive resin composition and cured film comprising the same
TWI706995B (en) 2017-12-05 2020-10-11 財團法人工業技術研究院 Resin composition
JP7115932B2 (en) * 2018-08-14 2022-08-09 株式会社ディスコ Workpiece processing method
JP7289666B2 (en) * 2019-02-05 2023-06-12 太陽インキ製造株式会社 Curable resin composition, dry film, cured product and electronic parts
JP7298079B2 (en) * 2019-02-05 2023-06-27 太陽ホールディングス株式会社 Curable resin composition, dry film, cured product and electronic parts
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Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1079109C (en) * 1999-09-08 2002-02-13 中国科学院广州化学研究所 Reticular solid-solid phase change material and its preparing process
TWI389936B (en) * 2005-03-28 2013-03-21 Ube Industries Polyimide resin and curable resin composition
TWI414557B (en) * 2006-06-30 2013-11-11 Toray Industries Thermal plastic resin composition and moldings thereof
JP5064950B2 (en) * 2007-09-14 2012-10-31 株式会社カネカ Novel photosensitive resin composition, photosensitive resin composition solution obtained therefrom, photosensitive film, insulating film, and printed wiring board with insulating film
CN101568572B (en) * 2007-10-26 2012-03-21 旭化成电子材料株式会社 Polyimide precursor and photosensitive resin composition containing polyimide precursor
JP5178296B2 (en) * 2008-04-16 2013-04-10 株式会社カネカ Novel photosensitive resin composition, use thereof and method for producing insulating film
TWI445765B (en) * 2009-06-09 2014-07-21 Asahi Kasei E Materials Corp A resin composition, a cured product, and a circuit substrate using the same

Cited By (5)

* Cited by examiner, † Cited by third party
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US10428253B2 (en) 2013-07-16 2019-10-01 Hitachi Chemical Company, Ltd Photosensitive resin composition, film adhesive, adhesive sheet, adhesive pattern, semiconductor wafer with adhesive layer, and semiconductor device
TWI733665B (en) * 2015-04-21 2021-07-21 美商富士軟片電子材料美國股份有限公司 Dry film structure and process for preparation thereof, process of forming laminate, process of forming patterned film, three dimensional object, and semiconductor device
US11782344B2 (en) 2015-04-21 2023-10-10 Fujifilm Electronic Materials U.S.A., Inc. Photosensitive polyimide compositions
US11899364B2 (en) 2015-04-21 2024-02-13 Fujifilm Electronic Materials U.S.A., Inc. Photosensitive polyimide compositions
TWI745426B (en) * 2016-09-08 2021-11-11 日商住友電木股份有限公司 Method of manufacturing semiconductor device

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