201226771 六、發明說明： 【發明所屬之技術領域】 本發明，係有關於適合使用在對於會依存於所照射之 光源而使特性改變之例如太陽電池等的裝置之特性評價等 的各種試驗中之照射裝置。 【先前技術】 於先前技術中，將具備有與太陽光略相同之頻譜特性 的光（以下，稱作「擬似太陽光」）作照射之擬似太陽光 裝置，係爲周知，此擬似太陽光裝置，係在太陽電池之發 電效率等的特性評價或者是各種裝置等之耐光試驗中，而 被廣泛作使用（例如，參考專利文獻1 )。 另外，在太陽電池之領域中，作爲太陽電池之其中一 種，例如係周知有色素增感型太陽電池（例如參考專利文 獻2)。色素增感型太陽電池，雖然相較於Si太陽電池而 光電變換效率係爲低，但是，由於係並不需要如同在製造 Si太陽電池中所需要的半導體製造裝置一般之大規模的設 備，而能夠以低價來製造，並且構造亦爲單純而容易量產 ，因此，係被使用在消耗電力爲小之機器的電力源等之中 [先前技術文獻] [專利文獻] [專利文獻1]日本特開2009-26499 1號公報 201226771 [專利文獻2]日本特開2010-080276號公報 【發明內容】 [發明所欲解決之課題] 色素增感型太陽電池，由於耐光性係爲低，而容易由 於太陽光之照射而劣化，因此，通常，色素增感太陽電池 ，係多被使用於在室內作使用之機器中。在此種色素增感 型太陽電池之發電效率等的特性評價中，雖係使用有先前 技術之擬似太陽光裝置，但是，若是照射擬似太陽光，則 會成爲使色素增感型太陽電池之劣化提早，並且，係有著 無法進行對於室內之使用狀況作了考慮的適當之特性評價 的問題。 因此，係有必要與使用在Si太陽電池中之擬似太陽光 裝置分開地，而另外設置用以進行色素增感型太陽電池之 特性評價的光源裝置，如此一來，成本係增大，並且亦會 產生需要對於複數之光源裝置進行操作的必要，因此，在 操作或維修上係成爲繁雜。 本發明，係爲有鑑於上述之事態而進行者，其目的， 係在於提供一種：就算是在當對於像是Si太陽電池或者是 色素增感型太陽電池等之各種太陽電池一般之在特性評價 等之試驗時所應照射之適當的光源互爲相異之裝置進行試 驗的情況時，亦不需要個別地準備此些之光源，便能夠進 行試驗之照射裝置。 201226771 [用以解決課題之手段] 在本說明書中，係包含有於2010年7月26日所申請之 日本特願20 1 0- 1 66726之全部內容。 爲了達成上述目的，本發明，係提供一種照射裝置， 其特徵爲：係在框體中，具備有輻射出涵蓋全波長區域而 具備有連續頻譜之光的裝置光源、和放置試驗對象物之試 料台、和將前述裝置光源之光導引至前述試料台處並照射 於前述試驗對象物上之導光用光學系，在前述裝置光源和 前述導光用光學系之間，係可自由裝著卸下地設置有將前 述裝置光源之光的頻譜特性變換爲其他光源之光的頻譜特 性之頻譜修正濾鏡，藉由對前述頻譜修正濾鏡作交換，係 能夠對於前述試驗對象物而照射所期望之其他光源之光的 頻譜特性之光。 又’本發明，係於上述照射裝置中，具備有下述特徵 :亦即是’前述導光用光學系，係具備著射入有透過了前 述頻譜修正滤鏡後之光的柱型積分器（Rod Integrator) ’並將集光角爲0度〜30度之範圍的光，從前述裝置光源 來依序射入至前述頻譜修正濾鏡以及前述柱型積分器中。 又’本發明，係於上述照射裝置中，具備有下述特徵 :亦即是’在前述頻譜修正濾鏡和前述導光用光學系之間 ’係可自由交換地被設置有減光濾鏡。 又’本發明，係在上述照射裝置中，具備有下述特徵 :亦即是’係具備有：具有可使透過光量連續性地作變化 之透過開口的調光板、和將透過率爲相異之複數的前述減 201226771 光濾鏡作担持，並被設置在前述調光板之前段或者是後段 處之減光板，藉由透過前述調光板之透過開口的光量之透 過比例、以及前述減光板之減光濾鏡的透過率’此兩者之 組合，來進行調光。 又，本發明，係在上述照射裝置中，具備有下述特徵 :亦即是，係具備有2枚之前述調光板，該調光板’係將 Na個的減光濾鏡作担持，並更進而具備有使射入光之全量 作透過的透過比例1〇〇 %之透過開口，當將前述調光板之 最小透過比例設爲了 Tb的情況時，在將第1階段設爲透過 率100%，並且將在該透過率10 0%上逐次乘上最小透過比 例Tb所求取出之（Na+ 1 ) 2階段的各調光階段之透過率中 ，將第2〜（Na+Ι)階段之各透過率，設爲第1枚之減光 板的各減光濾鏡之透過率，並將第〔（（Na+1) xm) + 1〕階段的透過率，設爲第2枚之減光板的各減光濾鏡之透 過率，其中，m係爲1以上並滿足（Na+1) xm+l< (Na + 1 ) 2的整數。 又，本發明，係在上述照射裝置中，具備有下述特徵 :亦即是，係將前述調光板，設置在前述導光用光學系之 前段處。 [發明之效果] 若依據本發明，則由於係在裝置光源和導光用光學系 之間，可自由裝著卸下地設置將裝置光源之光的頻譜特性 變換爲其他光源之光的頻譜特性之頻譜修正濾鏡，並藉由 -8- 201226771 對於此頻譜修正濾鏡作交換，而成爲能夠對於試驗對象物 照射所期望之其他光源的光之頻譜特性的光，因此，就算 是在對於當進行特性評價等的試驗時所應照射之適當的光 源互爲相異之裝置作試驗的情況時，亦並不需要對於此些 之光源個別地作準備，便能夠進行試驗。 【實施方式】 以下，參考圖面，針對本發明之實施形態作說明。 〈第1實施形態〉 圖1，係爲對於本實施形態之照射裝置1的槪略構成作 展示之圖。 此照射裝置1，係爲用以作爲Si太陽電池以及色素增 感型太陽電池之特性評價的光源之裝置，當評價對象爲Si 太陽電池的情況時，係照射擬似太陽光，又，當評價對象 爲色素增感型太陽電池的情況時，係照射照明光。此照明 光’係爲對於室內照明燈具之光源的光作模仿之光。在本 實施形態中’作爲室內照明燈具之光源的照射光，係構成 爲能夠將螢光燈之光、白色LED之光以及冷鹵素燈之光分 別選擇性地作照射。另外，當然的，作爲室內照明燈具之 光源或者是作爲屋內照明光源，係亦可設爲上述以外之光 源’又’亦可將對於路燈等之屋外照明燈具的光源之光作 了模仿之光，設爲照明光。 照射裝置1，係如圖1中所示一般，具備有箱型之框體 201226771 2。在此框體2中，係內設有裝置光源4、和載置身爲試驗 對象之試料（在本實施形態中，係爲Si太陽電池或者是色 素增感型太陽電池）的試料台6、和將裝置光源4之光導引 至試料台6並對於試驗對象物作照射之導光用光學系8’進 而，在裝置光源4和導光用光學系8之間，係被配置有濾鏡 群9。 裝置光源4，係具備有燈管1 0、和將燈管1 〇之輻射光 作集光之反射鏡12，並構成爲朝向上方（鉛直朝上方向） 而將光輸出。燈管10，係具備有於全波長區域而爲平坦之 頻譜特性，例如係可使用氙燈管或者是鹵素燈管，但是， 由於鹵素燈管係在短波長側（約400〜500nm以下之波長 )的頻譜成分爲較其他波長區域而更小，因此，在本實施 形態中，係設爲使用氙燈管。 於此，在本實施形態中，上述之全波長區域所代表的 波長帶域，係指包含有在藉由照射裝置1所進行之各種試 驗中的各個中所需要之各帶域的帶域。例如，在太陽電池 之特性評價中，當將Si結晶系之太陽電池作爲試驗對象的 情況時，作爲擬似太陽光，係要求400nm〜llOOnm之帶域 的光，又，當將S i非晶質系之太陽電池作爲試驗對象的情 況時，作爲擬似太陽光，係要求350nm〜750nm之帶域的 光’進而，在色素增感型太陽電池的情況時，作爲照射光 ，係要求400nm〜900nm之帶域的光。故而，當藉由照射 裝置1來進行此些試驗的情況時，3 50nm〜1 lOOnm之波長 帶域’係相當於全波長區域，裝置光源4，係放出在此全 -10- 201226771 波長區域中而具備有平坦之頻譜特性的光。 試料台6，係具備有載置試料14之平坦的載置面。在 此試料台6之正上方’係在從試料台6起而最大分離了約 6 5 0mm之位置處，設置有光之射出開口 16，並對於試料台 6而照射從此射出開口 16起而逐漸擴大的光。此試料台6, 係中介存在有未圖示之升降機構或者是台座等，而構成爲 能夠朝向射出開口 1 6來將高度位置在下限位置P0〜上限位 置P1之範圍內作調整，並藉由此而成爲能夠對於在試料台 6處之光照射的照射範圍作調整。在本實施形態中，當試 料台6位置在下限位置P0處時，係在約500mm四方之範圍 而均一地照射光，又，當位置在上限位置P 1處時，係在約 150mm四方之範圍而均一地照射光。此時，隨著試料台6 之位置從下限位置P0起而接近上限位置P 1，由於照射範圍 係縮小，因此，每單位面積之光量係增加，經由使試料台 6之位置成爲可變，亦能夠對於光量作調整。 另外，亦可構成爲：在接下來所敘述之導光用光學系 8和試料台6之間，而中介存在有將光線平行光化之光學系 ，而無關於試料台6之位置地來恆常設爲一定之照射範圍 〇 導光用光學系8，係爲將裝置光源4之照度分布以及色 分布設爲均一，並對於在照射面處之照度不均以及色不均 之發生作抑制者，而具備有身爲積分器光學元件的其中一 者之玻璃柱（柱狀積分器）18、和透鏡單元20，並將此些 配置在同一之光軸K2上。在裝置光源4之光軸K1上，係被 -11 - 201226771 配置有將裝置光源4之光的前進方向變換爲水平方向之反 射鏡22，該反射鏡22之反射光，係射入至玻璃柱18之射入 端面18A處，並從射出端面18B來輸出無照度不均之光， 並射入至透鏡單元20中。透鏡單元20，係爲將射入光線之 束徑擴大並作輸出者，並被担持於投影透鏡位置調整機構 43處。投影透鏡位置調整機構43，係使透鏡單元20在光軸 K2方向上成爲可動，並對於位置作調整。在該透鏡單元 20之射出端20A的光軸K2上，係被配置有將透鏡單元2〇之 光的前進方向改變爲正下方向之反射鏡24。在此反射鏡24 之反射光的光軸K3上，係存在有上述試料台6，藉由此， 光係被導引並照射至被設置於反射鏡24之正下方的試料台 6處。 關於濾鏡群9，係於後再述。 接著，若是針對框體2之構造作說明，則框體2之內部 ，係可大略作區分’而區隔成收容有將裝置光源4作點燈 之電性電路等的各種電性電路之電性零件室3 0、和收容有 裝置光源4之光源室32、和收容有導光用光學系8之光學系 室34、以及收容有試料台6之試料設置室36。 電性零件室30以及光源室32，係被作上下層積配置， 試料設置室3 6 ’係被與該些橫向並排而相鄰接地作配置， 又’在光源室3 2以及試料設置室36上，係從此些之光源室 32起涵蓋試料設置室36地而被設置有光學系室34。在此種 構成中，裝置光源4、導光用光學系8、以及試料台6，由 於係被配置爲門型（下方開放之C字狀），因此，係成爲 -12- 201226771 對於照射裝置1之寬幅尺寸作了抑制的小型p置。 在電性零件室30、光源室32以及光學系室34之各個處 ，係被設置有維修用之開閉扉40 A〜40C。又，在電性零 件室30處，係被設置有內部冷卻用之螺旋槳風扇50，在光 學系室34處，係於裝置光源4之正上方而設置有燈管冷卻 用風扇52，在濾鏡群9之正上方，係被設置有濾鏡冷卻用 風扇53,在試料設置室3 6處，係被設置有氣室內排氣風扇 5 4 〇 在光源室32中，係被設置有XYZ可動調整平台42，其 係使裝置光源4沿著光軸K1而升降或者是相對於光軸K1而 在垂直方向上移動並可自由作定位。又，在光源室32之正 上方，係被配置有監測機構5 6，其係內藏有照度計等，並 用以測出燈管位置。在燈管1 〇之交換時等，係藉由以XYZ 可動調整平台42來調整裝置光源4之位置，而使裝置光源4 之光軸K1被對位於特定之位置處。 而，濾鏡群9,係被配置在導光用光學系8之射入側處 ，而將裝置光源4之光的頻譜特性作變換並設爲所期望之 照明光，同時，亦對於照度作調整，該濾鏡群9，係具備 有改變頻譜特性之頻譜修正濾鏡60、和用以調整照度之2 枚的ND (減光）濾鏡62，此些，係被沿著導光用光學系8 之光軸K2而作層積配置。頻譜修正濾鏡60，例如係爲由 介電質多層膜所成並具備有使裝置光源4之光的頻譜特性 接近於所期望之其他光源的頻譜之比例（Proportional ) 的光透過特性之光學濾鏡（波光板）。此些之頻譜修正濾 -13- 201226771 鏡60以及ND濾鏡（減光濾鏡）62，係可自由裝著卸下 被設置在未圖示之光學安裝座上。如同上述一般，濾鏡 9，係被配置在導光用光學系8和裝置光源4之間，並且 由於從裝置光源4起直到導光用光學系8爲止的光路，係 由反射鏡22而被彎折成L字狀，因此，藉由在此反射鏡 之近旁處設置上述光學系室4之開閉扉40C，係能夠從此 閉扉40C來對於濾鏡群9以及裝置光源4之燈管10的各者 擷取並進行交換等之作業。另外，亦能夠以成爲在燈管 之點燈中也能夠以手動來安全地對於濾鏡群9進行手動 換的方式，而內藏用以對於濾鏡群9進行交換之專用的 換機構》 在本實施形態中，作爲頻譜修正濾鏡60，係預先準 有：將燈管10之頻譜特性變換爲太陽光之頻譜特性並產 擬似太陽光之濾鏡、和產生上述之照明光的濾鏡。進而 在產生照明光之頻譜修正濾鏡60處，係分別預先準備有 生螢光燈之光的濾鏡、產生白色LED之光的濾鏡、以及 生鹵素燈管之光的濾鏡。而，藉由從此些之頻譜修正濾 60中而選擇與所期望之光相對應者並設置在濾鏡群9處 係能夠將照射至試料1 4處之光設爲所期望之光源的光。 在頻譜修正濾鏡60之交換時，由於會依存於頻譜修 濾鏡60之透過特性的差異，而使得照射至試料台6處之 量改變，因此，係並無法進行使光量成爲相等而僅對於 明光作改變之試驗。因此，在濾鏡群9處，係可自由裝 卸下地而被設置有光量調整用之ND濾鏡62，並構成爲 地 群 > 藉 22 開 作 10 交 交 備 生 y 產 產 鏡 正 光 照 著 能 -14 - 201226771 夠藉由交換爲用以得到所期望之光量的適當之減光率的 ND濾鏡62，來使頻譜修正濾鏡60之交換後的光量成爲一 定。藉由此，就算是並不對每一者之所期望的照明光而分 別準備光源，亦能夠以相同之光量來進行各照明光下之試 驗。特別是，由於螢光燈之光量係爲較小，因此，在大光 量下之試驗係爲困難，但是，若依據本實施形態，則係能 夠以與擬似太陽光同等程度之大光量來照射螢光燈之照明 光並進行試驗。又，螢光燈，由於其之起因於經年劣化所 導致的光量變化係爲大，因此，要將光量設爲一定地而進 行試驗一事，係爲困難，但是，若依據本實施形態，則由 於係能夠藉由較螢光燈而更爲安定之燈管10來產生螢光燈 之照明光，因此，係能夠將螢光燈之照明光的光量設爲一 定並進行再現性爲佳之試驗。 又，在照射裝置1中，係於濾鏡群9和導光用光學系8 之間，設置有將透過光量連續性地作可變之調光板64。調 光板64，係爲沿著圓盤之圓周而設置有使開口幅逐次做了 變化之細縫的金屬細縫板。調光板64，係因應於使用者之 操作而經由未圖示之驅動馬達來作旋轉驅動，並因應於旋 轉驅動量而將對於試料台6之照射光量連續性地作可變。 藉由如此這般而設爲能夠以調光板6 4來進行光量調整，係 能夠以相較於對ND濾鏡62作交換並調整光量而更大之幅 度來進行調整。 又，若是僅藉由ND濾鏡62來進行調整，則並無法進 行連續性之調光，但是，藉由此種調光板64，係使連續性 -15- 201226771 之調光成爲可能。進而，若是僅藉由調光板64來進行調光 ，則在縮小爲低光量時，係會發生照射不均，但是，藉由 將ND濾鏡62作倂用，係能夠對於此種照射不均之發生作 抑制。 另外，在本實施形態中，作爲調光板64，係例示了使 用有圓盤型之金屬細縫板的構成，但是，係並不被限定於 此。亦即是，作爲調光板64，只要是使驅動量與透過光量 成正比之構造，則係可採用任意之構造，例如，代替圓盤 型，亦可設爲具備有藉由作滑動移動來使透過光量逐次增 加/減少之開口的滑動式之直線驅動型。又，ND濾鏡62 (減光濾鏡），亦同樣的，只要是不會對於照射面處之照 度分布或者是分光頻譜變化造成影響者，則例如亦可採用 將透明板作了重疊者、擴散板、網格構造之板等，或者是 將此些作了組合者。 此些之濾鏡群9以及調光板64，不論是配置在導光用 光學系8之射入側以及射出側之任一者處均可，但是，藉 由配置在射入側（裝置光源4和導光用光學系8之間）處， 係能夠將由於光透過濾鏡群9 一事所產生的色不均或者是 照度不均，藉由玻璃柱1 8來作抵消。 又，在濾鏡群9處，係從裝置光源4起直到導光用光學 系8處爲止，而依序配置頻譜修正濾鏡60和ND濾鏡62。藉 由此’係能夠將在ND濾鏡62處所反射之光回到燈管10處 並且此些返回光被集光於例如燈管電極附近而導致電極之 早期摩耗的情況減輕。 -16- 201226771 又，在照射裝置1處，除了經由頻譜修正濾鏡60和ND 濾鏡62之上述配列順序來將朝向反射鏡1 2之返回光減輕的 構成以外，亦藉由將濾鏡群9相對於光軸K1而傾斜特定角 度（例如5°)，而設爲不會使從濾鏡群9而來的返回光被 集光在燈管1 〇處。 又，係並不被限定於將濾鏡群9之頻譜修正濾鏡60以 及ND濾鏡62藉由手動來作交換之構成，例如，亦可設爲 將能夠作使用之頻譜修正濾鏡60以及ND濾鏡62全部預先 設置在光軸K2之近旁，並設置將經由使用者等所選擇了 的適當之頻譜修正濾鏡60以及ND濾鏡62自動地配置在光 軸K2上之機構的構成。 又，裝置光源4之光，由於係如同上述一般，藉由反 射鏡1 2而作集光並射入至濾鏡群9處，因此，在射入至濾 鏡群9處之光線的外周部處，係如同在圖2中作擴大展示一 般，成爲從對於濾鏡群9之射入角爲0度（直射入）起而偏 離了角度0 (=集光角之1/2)。若是此角度0變得越大 (亦即是集光角越大），則在濾鏡群9之頻譜修正濾鏡60 以及ND濾鏡62的各別之濾鏡特性處，係會產生偏差，並 成爲無法作爲照明光而得到所期望之特性。另一方面，若 是角度0過小（亦即是集光角爲小），則由於射入至玻璃 柱18中並作多重反射之光的成份會減少，因此，爲了在透 過玻璃柱1 8時而得到能夠充分的將照度不均抵消之程度的 多重反射，係需要將玻璃柱1 8延長。 因此，在本實施形態中，係以使角度0成爲〇度〜I5 -17- 201226771 度的方式、亦即是以使集光角成爲0度〜30度的方式，來 藉由反射鏡12而將光作集光，並射入至濾鏡群9處，藉由 此’而對於濾鏡群9之濾鏡特性的偏差作抑制，並且成爲 不需要將玻璃柱1 8延長便能夠充分地抵消照度不均。 又，在本實施形態中，於濾鏡群9和玻璃柱1 8之間， 係被設置有集光透鏡65。亦即是，如圖2中所示一般，藉 由使濾鏡群9之光通過集光透鏡65，相對於光軸Κ1之角度 r係變大，而能夠對於玻璃柱18，來以較角度0更大之角 度7來作射入（斜射入）。藉由此，由於就算是將上述集 光角縮小並將射入至濾鏡群9之角度0縮小，亦能夠藉由 通過集光透鏡65而使角度r變大，因此，不需要將玻璃柱 1 8延長，便能夠得到足以作均一化之充分的反射次數，並 且能夠對於濾鏡群9中之濾鏡特性的偏差作抑制。 圖3，係爲對於照射裝置1所照射至試料台6處之照射 光的頻譜特性作展示之圖，圖3(A)係爲對於不存在有 頻譜修正濾鏡60之情況作展示，圖3 ( B )係爲對於在頻譜 修正濾鏡60處使用產生擬似太陽光之濾鏡的情況作展示， 圖3 ( C )係爲對於在頻譜修正濾鏡60處使用產生螢光燈的 照明光之濾鏡的情況作展示，圖3 ( D )係爲對於在頻譜 修正濾鏡60處使用產生白色LED的照明光之濾鏡的情況作 展示，圖3(E)係爲對於在頻譜修正濾鏡6 0處使用產生雙 色冷鹵素燈的照明光之濾鏡的情況作展示。另外，在此些 之圖中，目標頻譜，係代表應照射至試料處之實際的光源 (實際之擬似太陽光、螢光燈、白色LED、雙色冷鹵素燈 -18- 201226771 )的頻譜特性。 如同在此些之圖中所示一般，若依據照射裝置1 ,則 藉由對於頻譜修正濾鏡60作交換，係能夠分別產生實際之 擬似太陽光、螢光燈、白色LED、雙色冷鹵素燈的各種光 〇 而’在進行太陽電池之試驗的情況時，係於試料台6 處載置太陽電池，並因應於太陽電池之種類而對於據鏡群 9之頻譜修正濾鏡60作交換。亦即是，當太陽電池爲Si太 陽電池的情況時，係交換爲擬似太陽光產生用之頻譜修正 濾鏡60，又’在色素增感型太陽電池的情況時，係交換爲 產生螢光燈、白色LED或者是雙色冷鹵素燈之光的頻譜修 正濾鏡60，來進行試驗。此時，藉由對試料台6之高度位 置作可變，而使照度成爲可變，又，藉由對於ND濾鏡62 作交換，來調整光量。 藉由此，係能夠藉由1個的照射裝置1，來進行S i太陽 電池以及色素增感型太陽電池之雙方的試驗。又，在色素 增感型太陽電池中，雖然會依存於色素之種類而使特性成 爲相異，但是，若依據照射裝置1，則藉由對於頻譜修正 濾鏡60適宜作交換，亦能夠尋找出在各光源之每一者中而 發電效率爲良好之色素的種類。 又，藉由在裝置光源4之燈管1 0處使用氙燈管，相較 於將螢光燈或者是白色LED作爲光源的情況，由於係能夠 作爲螢光燈或白色LED之照明光而得到大的光量，因此’ 亦成爲能夠進行加速試驗。 -19- 201226771 如此這般，若依據本實施形態，則係在裝置光源4和 導光用光學系8之間，可自由裝著卸下地設置能夠將裝置 光源4之光的頻譜特性變換爲其他光源之光（擬似太陽光 、螢光燈之光、白色LED之光、雙色冷鹵素燈之光）的頻 譜特性之頻譜修正濾鏡60，並藉由對於此頻譜修正濾鏡60 作交換，而成爲能夠對於試料1 4照射所期望之其他光源的 照明光。 藉由此，就算是在當對於在特性評價等之試驗時所應 照射之適當的光源互爲相異之Si太陽電池和色素增感型太 陽電池而分別進行試驗的情況時，亦不需要個別地準備此 些之光源，便能夠使用照射裝置1來進行試驗。 又，若依據本實施形態，則導光用光學系8，係具備 有使透過了頻譜修正濾鏡60之光作射入的相當於柱型積分 器之玻璃柱18，並設爲以使集光角成爲〇度〜30度的方式 來藉由反射鏡12作集光而從裝置光源4來依序射入至頻譜 修正濾鏡6 0以及玻璃柱1 8處之構成。 藉由此構成，係能夠對於濾鏡群9之濾鏡特性的偏差 作抑制’並且’並不需要將玻璃柱1 8延長，便能夠充分地 將照度不均抵消。 又’由於係在濾鏡群9之後段處配置玻璃柱18，因此 ’經由濾鏡群9所產生的色不均或者是照度不均，係藉由 玻璃柱18而被抵消，而能夠將並不存在有此些之色不均或 者是照度不均的光，照射至試料14處。 又’若依據本實施形態，則由於係在頻譜修正濾鏡60 -20- 201226771 和導光用光學系8之間，可自由裝著卸下地設置有2枚的 ND濾鏡62，因此，就算是在對於頻譜修正濾鏡60適宜地 作了交換的情況時，亦能夠藉由對於ND濾鏡62之減光率 適當地作調整，來將光量維持爲一定。 又，由於係成爲在裝置光源4和ND濾鏡62之間，而中 介存在有頻譜修正濾鏡60，因此，由被ND濾鏡62所反射 之光所導致的回到裝置光源4之返回光係被抑制，而能夠 對於由該返回光所導致的燈管1 0之損傷作防止。 又，若依據本實施形態，則由於係設爲將因應於驅動 量來使透過光量成爲可變之調光板64設置在導光用光學系 8之前段（在本實施形態中，係爲玻璃柱1 8之前方）的構 成，因此，藉由設爲能夠以調光板64來進行光量調整，係 能夠以相較於對於ND濾鏡62作交換來調整光量的情況而 更大之幅度，來進行調整。 又，若是僅藉由ND濾鏡62來進行調整，則並無法進 行連續性之調光，但是，藉由此種調光板64，係使連續性 之調光成爲可能。進而，若是僅藉由調光板64來進行調光 ，則在縮小爲低光量時，係會發生照射不均，但是，藉由 將ND濾鏡62作倂用，係能夠對於此種照射不均之發生作 抑制。 〈第2實施形態〉 在本實施形態中，係對於藉由具備有調光功能之調光 裝置70來進行調光之構成的照射裝置1〇〇作說明^ -21 - 201226771 圖4，係爲對於本實施形態之照射裝置1 〇〇的構成作展 示之圖。另外，在該圖中’針對與圖1相同之構件，係附 加相同之符號，並省略其說明。 如同該圖中所示—般’在照射裝置100中，係在第1實 施形態之調光板64和頻譜修正濾鏡60以及ND濾鏡62 (亦 即是，濾鏡群9 )之配置位置處’配置調光裝置70，並具 備有對於由該調光裝置7 0所進行之調光作控制的調光控制 器7 1，於此點上，係與第1實施形態中所說明之照射裝置1 在構成上有所相異。 圖5，係爲調光裝置7〇之正面側立體圖。又，圖6，係 爲對於調光裝置7〇之構成作展示之圖’圖6(A)係爲正 面圖，圖6(B)係爲背面圖，圖6(C)係爲上面圖，圖6 (D)係爲側面圖。 調光裝置70，係被配置在光軸K2上，並爲對於射入 之光作調光者，在本實施形態中，係更進而亦具備有將頻 譜特性作變更之功能。亦即是，調光裝置7 0，係如圖5以 及圖6中所示一般，將1枚的金屬調光板164、和複數枚（ 在圖示例中，係爲3枚）的濾鏡支持器162，沿著上述光軸 K2來作層積配置。 圖7,係爲對於金屬調光板164之構成作展示之圖。 金屬調光板164，係如圖中所示一般，在橫長矩形狀 之基底板180處一體性地具備有支持片181而成略T字狀’ 在基底板1 80處，係作爲橫長之透過開口，而被設置有使 縱方向之開口寬幅W隨著朝向橫方向而逐漸地變小之所謂 -22- 201226771 的淚滴型之淚滴型細縫182。支持片181，係被支持於後述 之滑動移動機構192上，並經由該滑動移動機構192而在橫 方向上作滑動移動。 淚滴型細縫1 8 2之開口寬幅W，係在成爲最大之位置 Qa處而較光束剖面更大（亦即是，開口率爲1〇〇% )，並 不被淚滴型細縫1 8 2所遮蔽而透過之光量的比例（以下， 稱作「透過比例」）係成爲100%，而隨著朝向橫方向前 進，開口寬幅W (開口率）係連續性地變窄，透過比例係 減少。亦即是，藉由使淚滴型細縫1 82在橫方向上作滑動 移動並使淚滴型細縫1 82和光軸K2之交叉位置改變，透過 比例係被連續性地作可變。但是，由於若是開口寬幅W作 了某種程度的變小，則會顯著地產生照度不均，因此，在 本實施形態中，係將不會使照度不均成爲顯著的開口寬幅 W ’作爲使用上的限度。在本實施形態中，係將透過比例 成爲70%之開口寬幅W作爲使用限度，從此位置Qb起直到 透過比例成爲100%上述位置Qa爲止，係成爲滑動移動範 圍。 圖8，係爲對於濾鏡支持器丨62之構成作展示之圖。 濾鏡支持器162，係爲將ND濾鏡62或者是頻譜修正濾 鏡60作担持之支持構件，如圖8中所示一般，與金屬調光 板164相同的’係在橫長矩形狀之基底板183處—體性地具 備有支持片184而成爲略τ字狀，在基底板183處，係成橫 —列地而被設置有複數之濾鏡裝著開口 185。在各濾鏡裝 著開口 185處，係被裝著有透過率互爲相異之ND濾鏡62、 -23- 201226771 或者是被裝著有頻譜特性互爲相異之頻譜修正濾鏡60。濾 鏡裝著開口 1 8 5之直徑，係至少較射入光束更大，只要在 濾鏡裝著開口 185處並未被裝著有ND濾鏡62以及頻譜修正 濾鏡60之任一者，則係能夠將該濾鏡裝著開口 185作爲透 過率1 00%之開口來使用。具體而言，爲了成爲能夠實行 並不使用濾鏡支持器162之僅藉由金屬調光板164所致的調 光，如圖10中所示一般，在左端部之濾鏡裝著開口 185處 ，係並未被裝著有ND濾鏡62，射入光量之全量係透過， 透過比例係被設爲1 〇〇%。支持片184，係被支持於後述之 滑動移動機構192上，並經由該滑動移動機構192而在橫方 向上作滑動移動，藉由此，光軸K2所通過之ND濾鏡62或 者是頻譜修正濾鏡60係被設爲可變。藉由此，透過率係被 階段性地作可變，或者是頻譜係被作變更。 另外，在以下之說明中，係將担持有ND濾鏡62之濾 鏡支持器162，稱作ND濾鏡支持器（減光板），並附加符 號162A，又，將担持有頻譜修正濾鏡60之濾鏡支持器162 ，稱作修正濾鏡支持器，並附加符號1 62B，藉由此，來對 於各者作區分。 調光裝置70，係如前述之圖5以及圖6中所示一般，具 備有略矩形之裝置基板187，在裝置基板187之正面側處， 1枚的金屬調光板164、2枚的ND濾鏡支持器162A、以及1 枚的修正濾鏡支持器162B，係以沿著光軸K2而重疊的方 式，而分別被支持於可動支持片188處。 在此裝置基板1 8 7之正面側處，於橫方向作延伸之軌 -24- 201226771 道186，係在上下方向而被作並列配置，在各軌道186處， 可動支持片188係可自由滑動移動地而被作安裝。 此時，如圖6(D)中所示一般，2枚的ND濾鏡支持器 162A、以及1枚的修正濾鏡支持器162B，係爲了防止在濾 鏡面處之反射光被朝向從光軸K2而折返的方向作反射並 回到裝置光源4處，而以使相對於光軸K2之角度τ成爲90° ±α (例如α =約5。）的方式，而相對於光軸K2而傾斜地 被作支持。 另一方面，在裝置基板187之背面側處，於每一可動 支持片188處，係被設置有驅動馬達189、滑車191、以及 被搭架於驅動馬達189和滑車191處的正時皮帶（timing belt) 190。在正時皮帶190處，係被連結有突出於可動支 持片1 8 8之背面側的背面側突出片1 8 8 A (圖6 ( B ))，經 由以驅動馬達189所致之正時皮帶190的驅動，可動支持片 188係作滑動移動。亦即是，係具備有此些之可動支持片 188、軌道186、驅動馬達189、滑車191以及正時皮帶190 ，而構成上述之滑動移動機構192。 調光控制器7 1，係具備有對於光量之增減作指示的操 作元件、以及對於頻譜特性之變更作指示的操作元件（均 省略圖示）’根據光量之增減指示，來驅動調光裝置70之 驅動馬達189 ’並藉由將金屬調光板164之透過比例和ND 濾鏡支持器162A之ND濾鏡62間的組合自動作可變，來改 變光之透過率而進行調光控制，同時，根據頻譜特性之變 更指示，來驅動驅動馬達189，而對於修正濾鏡支持器 -25- 201226771 162B之頻譜修正濾鏡60自動地作變更，以變更頻譜特性。 藉由具備有此種調光裝置70，係並不需要以手動來對 於ND濾鏡62或者是頻譜修正濾鏡60作交換，光量或頻譜 之調整作業係成爲容易。 於此，在本實施形態中，當將金屬調光板164之最小 透過比例設爲Tb (在本實施形態中，係爲75% )，並將ND 濾鏡支持器162 A所担持之ND濾鏡62的數量設爲Na (在本 實施形態中，Na=3)的情況時’藉由該金屬調光板164之 透過比例和2枚之ND濾鏡支持器162A的ND濾鏡62之透過 率間的組合，係成爲能夠在從100%起直到Tb之[(Na+1) X (Na+ 1 )]次方％ (在本實施形態中，係爲約1 · 0 % )爲止之 間而進行連續性的調光。 若是作詳細敘述，則若依據担持有Na個（在本實施形 態中，係爲3個）的ND濾鏡62之2枚的ND濾鏡支持器162A ，則若是對於各ND濾鏡支持器162A係更進而各具備有1個 的作爲100%透過率之開口而起作用的濾鏡裝著開口 185— 事作考慮，則係能夠實現（Na+l)x(Na+l)階段（在本實施 形態中，係爲（3 + l)x(3 + l)= 16階段）之調光階段。 而，如圖9(A)中所示一般，將調光之第1階段設爲 透過率100%，並在此透過率100%上逐次乘上最小透過比 例T b，而求取出（N a+ 1) X (N a+ 1)階段（在圖示例中，係爲 16階段）之各調光階段的透過率，再將此些之調光階段中 ，第2〜（Na+Ι)階段（在圖示例中，係爲第2〜4階段）的 各透過率設爲第1枚之ND濾鏡62的透過率，且將〔（ -26- 201226771 (Na + l)Xm) + 1〕階段（但是，m係爲1以上之整數，且爲 滿足111<(>^+1)之平方的整數）（於圖示例中，係爲5、9 、13)之透過率，設爲第2枚之ND濾鏡62之各別的透過率 〇 於圖10中，係對於金屬調光板164之透過比例範圍以 及對ND濾鏡支持器162 A之透過率的分配結果作模式性展 示。在如此這般而作了分配後，其結果，如圖9(B)中所 示一般，2枚之ND濾鏡支持器162A之各ND濾鏡62的透過 率，係藉由2枚之ND濾鏡支持器162A的ND濾鏡62之組合 ，而成爲能夠以（Na+l)X(Na+U階段來使透過率階段性地 作可變。 各調光階段之間，由於係身爲乘上金屬調光板164之 最小透過比例Tb所得到的範圍，因此，在各調光階段之間 ，係能夠藉由使金屬調光板1 64之透過比例作可變，來連 續性地進行調光，又，在最小階段使用時，由於亦能夠更 進而使用金屬調光板164，因此，其結果，係成爲能夠在 100%〜1'1?之["&+1)><"&+1)]次方％爲止之間而進行連續 性的調光。 具體而言，調光控制器7 1，在使光量作增減的情況時 ，當透過率爲位於各階段之間時，係使金屬調光板1 64作 滑動移動而進行調光，當對階段作改變的情況時，係先將 金屬調光板164之透過比例設爲100%，再藉由以對於2枚 的ND濾鏡支持器162A之ND濾鏡62的組合作改變來改變調 光之階段的方式，來驅動各驅動馬達189。 -27- 201226771 又，實際上，N D濾鏡6 2 ’要想製作成目的之透過率 一事，係爲困難，而多會有透過率從設計値而產生了數％ 之偏差的情況。因此，實際上，圖9之各調光階段的透過 率，亦會有從設計値而偏移的情況，而在各調光階段之間 ，係會有產生1〇〇〜75 %以上之差異的情況。 因此，針對金屬調光板164，係對於不會對照度不均 造成影響而能夠實際作使用之透過比例的範圍，設計爲能 夠持有餘裕地來一直對應至較上述之最小透過比例Tb而更 低之比例（例如65%程度），或者是將經由調光控制器7 1 來使金屬調光板164作移動之範圍，亦設爲100%〜最小透 過比例Tb以下之持有餘裕的範圍（例如65% )，藉由此構 成，就算是產生有上述一般之偏差，亦能夠在全範圍而進 行連續性調光。 如此這般，若依據本實施形態，則除了第1實施形態 的效果以外，藉由以金屬調光板164和具備有透過率互爲 相異之複數的ND濾鏡62之ND濾鏡支持器162 A來進行調光 ，係能夠對於照度不均之發生作抑制，並以廣範圍來連續 性地進行調光。 特別是，當將金屬調光板1 64之最小透過比例設爲了 Tb的情況時，在將第1階段設爲透過率100%並在該透過率 100%上逐次乘上最小透過比例Tb所求取出之（Na+Ι)平方 階段的各調光階段之透過率中，藉由將2〜（Na+Ι)階段之各 透過率，設爲第1枚之ND濾鏡支持器162A的各ND濾鏡62 之透過率，並將〔（（Na+l)xm) + 1〕階段（但是，m係 -28- 201226771 爲1以上之整數，且爲滿足（Na+l)xm + 1 < (Na+l)之平方的 整數）之透過率，設爲第2枚之ND濾鏡支持器16 2A的各 ND爐鏡62之各別的透過率，係能夠涵蓋1〜（Na+l) χ (Na+l)階段，而在 100% 〜Tb 之[(Na+l) x(Na+l)]次方 ％爲 止之間，並不使照度不均或分光頻譜產生大幅變化地來進 行連續性的調光。 另外，上述之各實施形態，係僅爲對於本發明之其中 —種形態作展示者，在不脫離本發明之趣旨的範圍內，係 可做任意之變形以及應用。 例如，在第1實施形態中，實現照射裝置1之光源，係 並不被限定於上述之實施形態中的例示，只要是能夠使用 例如介電質多層膜之頻譜修正濾鏡60來實現者，則係可使 用任意之物，又，頻譜修正濾鏡60之枚數，係亦可爲2枚 〜3枚（當然的，係可藉由使用雙面塗覆型、單面塗覆型 之其中一者，來對於枚數作改變）。 又，例如，ND濾鏡62之枚數，係並不被限定於1枚， 亦可作複數枚之重疊，來作爲目的之透過率而使用。 又，例如在第1實施形態中，亦可將濾鏡群9，並非設 置在導光用光學系8之射入側處，而是設置在射出側處。 又，作爲導光用光學系8之積分器光學元件，亦可使用玻 璃柱1 8以外之其他的光學元件。 又，在各實施形態中，作爲照射裝置1之試料’雖係 例示有Si太陽電池以及色素增感型太陽電池，但是，係並 不被限定於此，亦可爲CIS系太陽電池或者是有機薄膜太 -29- 201226771 陽電池、其他化合物之太陽電池等的任意之太陽電池。又 ，當然的，亦可爲太陽電池以外之試料。 又，在各實施形態中，亦可如圖11中所示一般，構成 爲：在框體2之中，將構成光學基準面之基底板295，以並 不與框體2之內側面相接的方式來作設置，並在此基底板 295處，將包含著具備有燈管1〇以及反射鏡12之裝置光源4 以及導光用光學系8之各種的光學元件作組合固定，而構 成照射裝置200。 藉由此構成，由於係成爲使身爲光學基準面之基底板 295並不與框體2相接之雙重構造，因此，光學元件係難以 由於搬送時等之外力而受到影響，特別是，係不會有光學 元件之配置歪斜的狀況，而能夠將光學系光軸等作維持。 又，以裝置光源4之反射鏡12爲首之光學元件，係全 部成爲在身爲光學基準面之基底板2 95上分別經由被作了 機械加工之保持治具來作安裝的構成，藉由此，係成爲能 夠以高精確度來進行各光學元件之定位。特別是，將身爲 光學基準面之基底板295作支撐的腳，係以藉由全部進行 同時加工而使長度成爲相等的光學基準用支柱2 96來構成 ，藉由將此些之光學基準用支柱296垂直地立起設置於構 成框體2之底面的基台2A上，並支持基底板295’係成爲 能夠將基底板295之光學基準面維持爲水平’並成爲能夠 以更高精確度來進行各光學元件之定位。 【圖式簡單說明】 -30- 201226771 [圖1 ]圖1，係爲對於本發明之第1實施型態的照射裝 置之槪略構成作展示之圖。 [圖2]圖2，係爲對於從濾鏡群所對於導光用光學系之 射入作展示的擴大圖。 [圖3]圖3，係爲對於照射裝置所照射之光的頻譜特性 作展示之圖，（A )係爲對於不存在有頻譜修正濾鏡之情 況作展示，（B)係爲對於將頻譜修正濾鏡交換爲產生擬 似太陽光之濾鏡的情況作展示，（C )係爲對於將頻譜修 正濾鏡交換爲產生螢光燈的照明光之濾鏡的情況作展示， (D)係爲對於將頻譜修正濾鏡交換爲產生白色LED的照 明光之濾鏡的情況作展示，（E )係爲對於將頻譜修正濾 鏡交換爲產生冷鹵素燈的照明光之濾鏡的情況作展示。 [圖4]圖4，係爲對於本發明之第2實施型態的照射裝 置之槪略構成作展示之圖。 [圖5]圖5，係爲調光裝置之正面側立體圖。 [圖6]圖6，係爲對於調光裝置之構成作展示之圖，（ A)係爲正面圖，（B)係爲背面圖，（C)係爲上面圖， (D )係爲側面圖》 [圖7]圖7，係爲對於金屬調光板之構成作展示之圖。 [圖8]圖8，係爲對於濾鏡支持器之構成作展示之圖。 [圖9]圖9，係爲用以對於從ND濾鏡支持器而對於各 ND濾鏡之透過率的分配作說明的圖。 [圖10]圖10，係爲對於金屬調光板之透過比例範圍以 及對於ND濾鏡之透過率的分配結果作展示之圖。 -31 - 201226771 [圖1 1 ]圖1 1，係爲本發明之變形例的照射裝置之槪略 構成圖。 【主要元件符號說明】 1、1〇〇 :照射裝置 2 :框體 4 :裝置光源 6 :試料台 8 :導光用光學系 9 :濾鏡群 1 0 :燈管 1 2 :反射鏡 1 4 :試料 1 8 :玻璃柱（柱型積分器） 20 :透鏡單元 22、24 :反射鏡 3 0 :電性零件室 32 :光源室 34 :光學系室 3 6 :試料設置室 4 0 A〜4 0 C :開閉扉 42 : XYZ可動調整平台 60 :頻譜修正濾鏡 62 : ND濾鏡（減光濾鏡） -32- 201226771 64 :調光板 70 :調光裝置 7 1 :調光控制器 1 6 2 :濾鏡支持器 162A : ND濾鏡支持器（減光板） 164:金屬調光板（調光板） 182 :淚滴型細縫（透過開口） 1 8 5 :濾鏡裝著開口（開口） 192 :滑動移動機構 Tb :最小透過比例 W :開口寬幅 Na :減光濾鏡之數量 -33-201226771 VI. [Technical Field] The present invention relates to various tests suitable for use in evaluation of characteristics of a device such as a solar cell or the like which changes characteristics depending on a light source to be irradiated. Irradiation device. [Prior Art] In the prior art, a pseudo-sunlight device that emits light having a spectral characteristic slightly similar to that of sunlight (hereinafter referred to as "like-like sunlight") is known as a solar device. It is widely used in the evaluation of the characteristics such as the power generation efficiency of solar cells or the light resistance test of various devices (for example, refer to Patent Document 1). Further, in the field of solar cells, as one of the solar cells, for example, a dye-sensitized solar cell is known (for example, refer to Patent Document 2). A dye-sensitized solar cell has a low photoelectric conversion efficiency compared to a Si solar cell, but does not require a large-scale apparatus as in a semiconductor manufacturing apparatus required for manufacturing a Si solar cell. It can be manufactured at a low price, and the structure is also simple and easy to mass-produce. Therefore, it is used in a power source or the like that consumes a small power. [Prior Art Document] [Patent Document] [Patent Document 1] Japan [Problem to be Solved by the Invention] A dye-sensitized solar cell has a low light resistance and is easy to be used. [Patent Document 2] JP-A-2010-080276 (Patent Document 2) Since the sunlight is deteriorated by irradiation, in general, a dye-sensitized solar cell is often used in a device that is used indoors. In the evaluation of the characteristics such as the power generation efficiency of the dye-sensitized solar cell, although a pseudo-sunlight device of the prior art is used, if the pseudo-sunlight is irradiated, the deterioration of the dye-sensitized solar cell is caused. In the early days, there is a problem that it is not possible to perform an appropriate evaluation of the characteristics of the indoor use. Therefore, it is necessary to separately provide a light source device for performing the evaluation of the characteristics of the dye-sensitized solar cell separately from the pseudo-sunlight device used in the Si solar cell, so that the cost is increased, and There is a need to operate a plurality of light source devices, and therefore, it becomes complicated in operation or maintenance. The present invention has been made in view of the above-described circumstances, and an object thereof is to provide a characteristic evaluation even when it is used for various solar cells such as a Si solar cell or a dye-sensitized solar cell. When the test is performed when the appropriate light sources to be irradiated are different from each other, it is not necessary to separately prepare the light sources, and the test apparatus can be tested. 201226771 [Means for Solving the Problem] In this manual, the entire contents of the Japanese Patent Application No. 20 1 0 - 1 66726, which was filed on July 26, 2010, are included. In order to achieve the above object, an object of the present invention is to provide an illumination device comprising: a device light source that emits light having a continuous spectrum covering a full-wavelength region, and a sample on which a test object is placed; And a light guide optical system that guides the light of the device light source to the sample stage and is irradiated onto the test object, and is freely mountable between the device light source and the light guide optical system A spectrum correction filter that converts the spectral characteristics of the light of the light source of the device to the spectral characteristics of the light of the other light source is provided, and the spectral correction filter is exchanged for the test object. Light of the spectral characteristics of the light of other sources. Further, the present invention is characterized in that, in the above-described irradiation device, the optical system for guiding light is provided with a column type integrator that receives light transmitted through the spectrum correction filter. (Rod Integrator) 'The light having a collecting angle of 0 to 30 degrees is sequentially incident on the spectrum correction filter and the column integrator from the device light source. Further, the present invention is characterized in that the irradiation device is characterized in that a 'diffusion filter is provided between the spectrum correction filter and the optical system for light guides" . In the above-mentioned irradiation device, the present invention is characterized in that the light-receiving plate having a transmission opening that allows the amount of transmitted light to be continuously changed and the transmittance is And the aforementioned reduction of the 201226771 optical filter is carried out, and is disposed in the front or rear of the dimming plate, the transmittance of the light passing through the through opening of the dimming plate, and the aforementioned reduction The transmittance of the dimming filter of the light plate 'the combination of the two is used for dimming. Further, the present invention is characterized in that the irradiation device includes two of the dimming plates, and the dimming plate is configured to hold Na dimming filters. Further, a transmissive opening having a transmission ratio of 1% by volume for transmitting the entire amount of incident light is provided, and when the minimum transmission ratio of the dimming plate is set to Tb, the first stage is set as the transmittance. 100%, and the transmission rate of each dimming stage of the (Na + 1 ) 2 stage obtained by multiplying the transmittance by 100% by the minimum transmission ratio Tb, the second to (Na + Ι) stage The respective transmittances are set as the transmittances of the dimming filters of the first dimming plate, and the transmittance in the [((Na+1) xm) + 1] stage is reduced as the second one. The transmittance of each dimming filter of the light plate, wherein m is 1 or more and satisfies (Na+1) xm+l <An integer of (Na + 1 ) 2 . Furthermore, the present invention is characterized in that the light-adjusting plate is provided at a front portion of the optical system for light guiding. [Effects of the Invention] According to the present invention, since the device light source and the light guiding optical system are disposed between the device light source and the light guiding optical system, the spectral characteristics of the light that converts the spectral characteristics of the light of the device light source into other light sources can be detachably provided. The spectrum correction filter is exchanged with the spectrum correction filter by -8-201226771, and becomes light capable of illuminating the spectrum of the light of the desired other light source with respect to the test object, and therefore, even if it is performed for In the case where a suitable light source to be irradiated to each other in a test such as a characteristic evaluation is tested, it is not necessary to separately prepare the light sources, and the test can be performed. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. <First Embodiment> Fig. 1 is a view showing a schematic configuration of an irradiation apparatus 1 of the present embodiment. The illuminating device 1 is a device for illuminating the characteristics of a Si solar cell and a dye-sensitized solar cell. When the evaluation target is a Si solar cell, the illuminating pseudo-sun light is used, and the evaluation object is In the case of a dye-sensitized solar cell, illumination light is irradiated. This illumination light is a light that mimics the light of the source of the indoor lighting fixture. In the present embodiment, the irradiation light as the light source of the indoor lighting fixture is configured to selectively illuminate the light of the fluorescent lamp, the light of the white LED, and the light of the cold halogen lamp, respectively. In addition, of course, as a light source of an indoor lighting fixture or as an indoor lighting source, it is also possible to use a light source other than the above, and can also imitate the light of the light source of the outdoor lighting fixture such as a street lamp. , set to illumination light. The irradiation device 1 is generally provided as shown in Fig. 1, and has a box-shaped frame 201226771 2 . In the housing 2, a device light source 4 and a sample stage 6 on which a sample to be tested is placed (in the present embodiment, a Si solar cell or a dye-sensitized solar cell), and The light guide optical system 8' that guides the light of the device light source 4 to the sample stage 6 and irradiates the test object, and further, a filter group is disposed between the device light source 4 and the light guide optical system 8 9. The device light source 4 is provided with a bulb 10 and a mirror 12 for collecting the radiation of the bulb 1 , and is configured to output light upward (vertical upward direction). The lamp tube 10 is provided with a spectral characteristic which is flat in the whole wavelength region. For example, a xenon lamp or a halogen lamp can be used. However, since the halogen lamp is on the short wavelength side (wavelength of about 400 to 500 nm or less) The spectral component of the spectrum is smaller than the other wavelength regions. Therefore, in the present embodiment, a xenon lamp is used. Here, in the present embodiment, the wavelength band represented by the above-described full-wavelength region refers to a band region including each band required in each of various tests performed by the irradiation device 1. For example, in the case of evaluating the characteristics of a solar cell, when a solar cell of a Si crystal system is used as a test object, as the pseudo-sun light, light of a band of 400 nm to 110 nm is required, and when S i is amorphous, When a solar cell is used as a test target, it is required to be a light of a range of 350 nm to 750 nm as a pseudo-sun light. Further, in the case of a dye-sensitized solar cell, it is required to be 400 nm to 900 nm as an irradiation light. Light with a field. Therefore, when the test is performed by the irradiation device 1, the wavelength band of 3 50 nm to 1 lOOnm corresponds to the full wavelength region, and the device light source 4 is emitted in the wavelength region of all -10- 201226771. It has light with flat spectral characteristics. The sample stage 6 is provided with a flat mounting surface on which the sample 14 is placed. Immediately above the sample stage 6 is a position where the light exit opening 16 is provided at a position separated from the sample stage 6 by a maximum of about 650 mm, and the irradiation of the sample stage 6 is gradually increased from the injection opening 16 Expanded light. The sample stage 6 is provided with an elevating mechanism (not shown) or a pedestal, and is configured to be capable of adjusting the height position from the lower limit position P0 to the upper limit position P1 toward the injection opening 16 by This makes it possible to adjust the irradiation range of the light irradiation at the sample stage 6. In the present embodiment, when the sample stage 6 is positioned at the lower limit position P0, the light is uniformly irradiated in a range of about 500 mm square, and when the position is at the upper limit position P1, it is in the range of about 150 mm square. The light is uniformly illuminated. At this time, as the position of the sample stage 6 approaches the upper limit position P1 from the lower limit position P0, since the irradiation range is reduced, the amount of light per unit area increases, and the position of the sample stage 6 is made variable. It is possible to adjust the amount of light. Further, an optical system in which the light is collimated in parallel may be interposed between the optical guiding optical system 8 and the sample stage 6 which will be described later, and the position of the sample stage 6 may be constant. The optical system 8 for guiding light is a constant illumination range, and the illuminance distribution and color distribution of the device light source 4 are uniform, and the illuminance unevenness and color unevenness at the irradiation surface are suppressed. There is provided a glass column (column integrator) 18, which is one of the integrator optical elements, and the lens unit 20, and these are arranged on the same optical axis K2. On the optical axis K1 of the device light source 4, a mirror 22 for converting the forward direction of the light of the device light source 4 into a horizontal direction is disposed by -11 - 201226771, and the reflected light of the mirror 22 is incident on the glass column. The light is incident on the end surface 18A, and the light having no illuminance unevenness is output from the emission end surface 18B, and is incident on the lens unit 20. The lens unit 20 is formed by expanding and outputting the beam diameter of the incident light, and is held by the projection lens position adjusting mechanism 43. The projection lens position adjusting mechanism 43 causes the lens unit 20 to be movable in the optical axis K2 direction and adjusts the position. On the optical axis K2 of the emission end 20A of the lens unit 20, a mirror 24 for changing the advancing direction of the light of the lens unit 2 to the direct downward direction is disposed. The sample stage 6 is present on the optical axis K3 of the reflected light of the mirror 24, whereby the light system is guided and irradiated to the sample stage 6 disposed directly below the mirror 24. The filter group 9 will be described later. Next, if the structure of the casing 2 is described, the inside of the casing 2 can be roughly distinguished from each other and divided into various electric circuits in which an electric circuit for lighting the device light source 4 is housed. The electrical component chamber 30 and the light source chamber 32 in which the device light source 4 is housed, the optical system chamber 34 in which the light guiding optical system 8 is housed, and the sample setting chamber 36 in which the sample stage 6 is housed are provided. The electrical component chamber 30 and the light source chamber 32 are vertically stacked, and the sample installation chambers 3 6 ′ are arranged side by side in parallel with the lateral direction, and are disposed in the light source chamber 3 2 and the sample setting chamber 36. The optical system chamber 34 is provided from the light source chamber 32 to cover the sample setting chamber 36. In such a configuration, since the device light source 4, the light guiding optical system 8, and the sample stage 6 are arranged in a gate type (C-shaped downward opening), it is -12-201226771 for the irradiation device 1. The small size of the wide size is suppressed. In each of the electrical component chamber 30, the light source chamber 32, and the optical system chamber 34, maintenance opening/closing ports 40A to 40C are provided. Further, in the electrical component chamber 30, a propeller fan 50 for internal cooling is provided, and in the optical system chamber 34, a lamp cooling fan 52 is provided directly above the device light source 4, in the filter Directly above the group 9, a filter cooling fan 53 is provided, and in the sample setting chamber 36, an air chamber exhaust fan 5 4 is provided in the light source chamber 32, and XYZ movable adjustment is provided. The platform 42 moves the device light source 4 up and down along the optical axis K1 or in a vertical direction with respect to the optical axis K1 and is freely positionable. Further, directly above the light source chamber 32, a monitoring mechanism 5 6 is disposed, which is provided with a illuminometer or the like for detecting the position of the lamp. When the lamp tube 1 is exchanged, the position of the device light source 4 is adjusted by the XYZ movable adjustment stage 42, so that the optical axis K1 of the device light source 4 is positioned at a specific position. Further, the filter group 9 is disposed on the incident side of the light guiding optical system 8, and converts the spectral characteristics of the light of the device light source 4 into a desired illumination light, and also for illumination. In adjustment, the filter group 9 is provided with a spectrum correction filter 60 for changing spectral characteristics and an ND (dimming) filter 62 for adjusting illuminance, and these are along the optical light for guiding light. The optical axis K2 of the system 8 is arranged in a layer. The spectrum correction filter 60 is, for example, an optical filter formed of a dielectric multilayer film and having light transmission characteristics such that the spectral characteristics of the light of the device light source 4 are close to the ratio of the spectrum of the other light source desired (Proportional). Mirror (wave plate). These spectral correction filters -13 - 201226771 mirror 60 and ND filter (dimmer filter) 62 are freely detachable and are placed on an optical mount (not shown). As described above, the filter 9 is disposed between the light guiding optical system 8 and the device light source 4, and the optical path from the device light source 4 to the light guiding optical system 8 is blocked by the mirror 22. Since the bending is formed into an L shape, the opening and closing 扉 40C of the optical system chamber 4 is provided in the vicinity of the reflecting mirror, so that the filter group 9 and the lamp tube 10 of the device light source 4 can be closed from the closing 40C. The operator picks up and exchanges the work. In addition, it is also possible to manually change the filter group 9 manually by changing the light in the lamp, and to incorporate a dedicated change mechanism for exchanging the filter group 9 In the present embodiment, as the spectrum correction filter 60, a filter that converts the spectral characteristics of the bulb 10 into the spectral characteristics of sunlight, produces a pseudo-solar filter, and a filter that generates the above-described illumination light is pre-accepted. Further, at the spectrum correcting filter 60 for generating illumination light, a filter for generating light of the fluorescent lamp, a filter for generating light of the white LED, and a filter for generating light of the halogen lamp are prepared in advance. Further, by selecting from the spectral correction filters 60, the light corresponding to the desired light is selected and disposed at the filter group 9 to enable the light irradiated to the sample 14 to be the desired light source. When the spectrum correction filter 60 is exchanged, since the amount of irradiation to the sample stage 6 is changed depending on the difference in the transmission characteristics of the spectrum filter 60, it is impossible to make the amount of light equal and only for Mingguang made a test of change. Therefore, in the filter group 9, the ND filter 62 for adjusting the amount of light can be freely attached and detached, and is configured as a group of groups> -14 - 201226771 The amount of light exchanged by the spectrum correcting filter 60 is made constant by exchanging the ND filter 62 which is an appropriate dimming rate for obtaining a desired amount of light. By this means, even if the light source is not prepared separately for each of the desired illumination light, the test under each illumination light can be performed with the same amount of light. In particular, since the amount of light of the fluorescent lamp is small, it is difficult to test under a large amount of light. However, according to the present embodiment, it is possible to irradiate the fluorescent light with a large amount of light equivalent to the pseudo-sun light. The illumination of the light is tested and tested. In addition, since the change in the amount of light caused by deterioration over the years is large, the fluorescent lamp is difficult to perform the test by setting the amount of light to be constant. However, according to the present embodiment, Since the illumination light of the fluorescent lamp can be generated by the lamp 10 which is more stable by the fluorescent lamp, it is possible to test the light amount of the illumination light of the fluorescent lamp to be constant and to perform reproducibility. Further, in the irradiation device 1, a light guide plate 64 that continuously changes the amount of transmitted light is provided between the filter group 9 and the light guiding optical system 8. The light guide plate 64 is provided with a metal slit plate which is provided with a slit which changes the opening width successively along the circumference of the disk. The light-adjusting plate 64 is rotationally driven by a drive motor (not shown) in response to a user's operation, and the amount of illumination light to the sample stage 6 is continuously changed in accordance with the amount of rotation drive. By doing so, it is possible to adjust the amount of light by the light-adjusting plate 64, and it is possible to adjust it by a larger degree than the ND filter 62 is exchanged and the amount of light is adjusted. Further, if the adjustment is performed only by the ND filter 62, continuous dimming cannot be performed. However, the dimming plate 64 makes it possible to perform dimming of the continuity -15 - 201226771. Further, if the dimming is performed only by the dimming plate 64, unevenness of illumination occurs when the amount is reduced to a low amount of light. However, by using the ND filter 62, it is possible to perform such illumination. All occur as inhibition. In the present embodiment, the light-adjusting plate 64 is exemplified by a disk-shaped metal slit plate. However, the present invention is not limited thereto. In other words, the dimming plate 64 may have any structure as long as it has a driving amount proportional to the amount of transmitted light. For example, instead of the disk type, it may be provided to have a sliding movement. A slide type linear drive type that allows the opening amount to be increased/decreased by the amount of light. Further, the ND filter 62 (light reduction filter) is also similar, as long as it does not affect the illuminance distribution at the irradiation surface or the spectral spectrum change, for example, a transparent plate may be overlapped. A diffuser plate, a mesh structure plate, etc., or a combination of these. The filter group 9 and the light control plate 64 may be disposed on either the incident side or the output side of the light guiding optical system 8, but are disposed on the incident side (device light source) 4 and between the light guiding optical system 8 can offset the color unevenness caused by the light transmitting filter group 9 or the illuminance unevenness, and cancel by the glass column 18. Further, at the filter group 9, the spectrum correction filter 60 and the ND filter 62 are arranged in this order from the device light source 4 to the light guiding optical system 8. By this, it is possible to reduce the light reflected at the ND filter 62 back to the bulb 10 and the return light is collected in the vicinity of, for example, the vicinity of the electrode of the tube, resulting in a reduction in the early wear of the electrode. -16- 201226771 In addition to the above-described arrangement order of the spectrum correction filter 60 and the ND filter 62, the illumination device 1 is also configured to reduce the return light toward the mirror 12, and also by the filter group. 9 is inclined at a specific angle (for example, 5°) with respect to the optical axis K1, and is set such that return light from the filter group 9 is not collected at the bulb 1 。. Further, the configuration is not limited to the configuration in which the spectrum correction filter 60 and the ND filter 62 of the filter group 9 are manually exchanged. For example, the spectrum correction filter 60 and the spectrum correction filter 60 that can be used may be used. The ND filters 62 are all disposed in advance in the vicinity of the optical axis K2, and are provided with a mechanism for automatically arranging the appropriate spectral correction filter 60 and the ND filter 62 selected by the user or the like on the optical axis K2. Further, since the light of the apparatus light source 4 is collected by the mirror 12 and incident on the filter group 9 as described above, the light is incident on the outer peripheral portion of the light beam at the filter group 9. As shown in Fig. 2, the angle of incidence from the filter group 9 is 0 degrees (straight incidence) and deviated from the angle 0 (= 1/2 of the collection angle). If the angle 0 becomes larger (that is, the larger the collection angle), deviations occur in the respective filter characteristics of the spectrum correction filter 60 and the ND filter 62 of the filter group 9. It is also impossible to obtain desired characteristics as illumination light. On the other hand, if the angle 0 is too small (that is, the collecting angle is small), since the composition of the light incident into the glass column 18 and multi-reflected is reduced, therefore, in order to pass through the glass column 18 It is necessary to extend the glass column 18 by multiple reflection which can sufficiently cancel the illuminance unevenness. Therefore, in the present embodiment, the angle 0 is set to the range of I1 to 172 to 201226771, that is, the illuminating angle is 0 to 30 degrees, and the mirror 12 is used. The light is collected and incident on the filter group 9, whereby the deviation of the filter characteristics of the filter group 9 is suppressed, and the glass column 18 can be sufficiently offset without extending the glass column 18. Illumination is uneven. Further, in the present embodiment, the collecting lens 65 is provided between the filter group 9 and the glass column 18. That is, as shown in FIG. 2, by making the light of the filter group 9 pass through the collecting lens 65, the angle r with respect to the optical axis 变1 becomes larger, and the glass column 18 can be angled. 0 is greater angle 7 for injection (inclined into). Thereby, even if the light collecting angle is reduced and the angle 0 incident on the filter group 9 is reduced, the angle r can be increased by passing through the collecting lens 65, so that it is not necessary to use the glass column. By lengthening 18, it is possible to obtain a sufficient number of reflections sufficient for uniformization, and it is possible to suppress variations in filter characteristics in the filter group 9. Fig. 3 is a view showing the spectral characteristics of the illumination light irradiated to the sample stage 6 by the irradiation device 1, and Fig. 3(A) shows the case where the spectrum correction filter 60 is not present, Fig. 3 (B) is shown for the case where a filter for generating pseudo-sunlight is used at the spectrum correction filter 60, and Fig. 3(C) is for the illumination light for generating a fluorescent lamp at the spectrum correction filter 60. The case of the filter is shown in Fig. 3(D) for the case where the filter for generating illumination light of the white LED is used at the spectrum correction filter 60, and Fig. 3(E) is for the spectrum correction filter. The case of the filter using the illumination light that produces the two-color cold halogen lamp is shown at 60. In addition, in these figures, the target spectrum represents the spectral characteristics of the actual light source (actually pseudo-sunlight, fluorescent lamp, white LED, two-color cold halogen lamp -18-201226771) that should be irradiated to the sample. As shown in the figures of the figures, if the illumination device 1 is used, the actual pseudo-sunlight, fluorescent lamp, white LED, and two-color cold halogen lamp can be respectively generated by exchanging the spectrum correction filter 60. In the case of the solar cell test, the solar cell is placed on the sample stage 6, and the spectrum correction filter 60 according to the mirror group 9 is exchanged in accordance with the type of the solar cell. That is, when the solar cell is a Si solar cell, it is exchanged for a spectrum correction filter 60 for generating sunlight, and in the case of a dye-sensitized solar cell, it is exchanged for generating a fluorescent lamp. A white LED or a spectrum correction filter 60 for the light of a two-color cold halogen lamp is tested. At this time, the illuminance is made variable by changing the height position of the sample stage 6, and the amount of light is adjusted by exchanging the ND filter 62. As a result, it is possible to perform tests on both the Si solar cell and the dye-sensitized solar cell by one irradiation device 1. Further, in the dye-sensitized solar cell, although the characteristics vary depending on the type of the dye, the irradiation device 1 can be appropriately selected by exchanging the spectrum correction filter 60. In each of the light sources, the power generation efficiency is a good type of pigment. Moreover, by using a xenon tube at the lamp tube 10 of the device light source 4, compared with the case where a fluorescent lamp or a white LED is used as a light source, it can be obtained as illumination light of a fluorescent lamp or a white LED. The large amount of light, therefore, has also made it possible to carry out accelerated tests. -19-201226771 In this way, according to the present embodiment, between the device light source 4 and the light guiding optical system 8, the spectral characteristics of the light of the device light source 4 can be converted to other ones. The spectral correction filter 60 of the spectral characteristics of the light source (like sunlight, fluorescent light, white LED light, two-color cold halogen light) is exchanged for this spectral correction filter 60, and It is an illumination light that can illuminate the desired other light source with the sample 14. By this, even when the test is performed separately for the Si solar cell and the dye-sensitized solar cell in which the appropriate light sources to be irradiated during the test of the characteristic evaluation or the like are different from each other, it is not necessary to individually By preparing these light sources, the irradiation device 1 can be used for the test. Further, according to the present embodiment, the light guiding optical system 8 is provided with a glass column 18 corresponding to a column type integrator for injecting light transmitted through the spectrum correcting filter 60, and is set to The light angle is set to a temperature of -30 degrees, and the light is collected by the mirror 12 to sequentially enter the spectrum correction filter 60 and the glass column 18 from the device light source 4. With this configuration, it is possible to suppress the variation of the filter characteristics of the filter group 9 and to eliminate the illuminance unevenness sufficiently without extending the glass column 18. In addition, since the glass column 18 is disposed in the subsequent stage of the filter group 9, the color unevenness generated by the filter group 9 or the illuminance unevenness is canceled by the glass column 18, and the There is no such color unevenness or illuminance unevenness, and the light is irradiated to the sample 14. Further, according to the present embodiment, since the spectrum correction filter 60-20-201226771 and the light guiding optical system 8 are provided, two ND filters 62 can be detachably provided, so that even In the case where the spectrum correction filter 60 is appropriately exchanged, the amount of light can be maintained constant by appropriately adjusting the dimming rate of the ND filter 62. Further, since the spectrum correction filter 60 is interposed between the device light source 4 and the ND filter 62, the return light of the device light source 4 is returned by the light reflected by the ND filter 62. It is suppressed, and the damage of the tube 10 caused by the return light can be prevented. In addition, according to the present embodiment, the light guide plate 64 that changes the amount of transmitted light in response to the amount of driving is provided in the front stage of the light guiding optical system 8 (in the present embodiment, it is glass). Since the configuration of the light beam 64 can be adjusted by the light control plate 64, it is possible to adjust the amount of light more than the ND filter 62. To make adjustments. Further, if the adjustment is performed only by the ND filter 62, continuous dimming cannot be performed. However, such a dimming plate 64 makes it possible to perform continuous dimming. Further, if the dimming is performed only by the dimming plate 64, unevenness of illumination occurs when the amount is reduced to a low amount of light. However, by using the ND filter 62, it is possible to perform such illumination. All occur as inhibition. <Second Embodiment> In the present embodiment, an illumination device 1 configured to perform dimming by a dimming device 70 having a dimming function is described. ^ -21 - 201226771 Fig. 4 is The configuration of the irradiation device 1A of the present embodiment is shown. In the drawings, the same members as those in Fig. 1 are denoted by the same reference numerals, and their description will be omitted. As shown in the figure, in the irradiation device 100, the arrangement positions of the light-adjusting plate 64, the spectrum correcting filter 60, and the ND filter 62 (that is, the filter group 9) of the first embodiment are shown. The dimming device 70 is disposed to be provided with a dimming controller 7 for controlling the dimming performed by the dimming device 70. In this regard, the illumination described in the first embodiment is used. Device 1 differs in its composition. Fig. 5 is a front side perspective view of the dimming device 7'. 6 is a front view showing the configuration of the dimming device 7A. FIG. 6(A) is a front view, FIG. 6(B) is a rear view, and FIG. 6(C) is a top view. Figure 6 (D) is a side view. The dimming device 70 is disposed on the optical axis K2 and is used for dimming the incident light. In the present embodiment, the dimming device 70 is further provided with a function of changing the spectral characteristics. In other words, the dimming device 70 is a filter of one metal dimming plate 164 and a plurality of (three in the illustrated example) as shown in FIG. 5 and FIG. The holder 162 is arranged in a layered manner along the optical axis K2 described above. FIG. 7 is a view showing the configuration of the metal dimming plate 164. The metal light-adjusting plate 164 is generally provided with a support piece 181 in a T-shaped shape at the base plate 180 of the horizontally long rectangular shape, and is formed in the base plate 1 80 as a horizontal length. Through the opening, a teardrop type slit 182 of a so-called -22-201226771 in which the width W of the opening in the longitudinal direction gradually decreases toward the lateral direction is provided. The support piece 181 is supported by a slide moving mechanism 192 which will be described later, and is slidably moved in the lateral direction via the slide moving mechanism 192. The opening width W of the teardrop type slit 8 8 is larger at the position Qa and larger than the beam profile (that is, the aperture ratio is 1〇〇%), and is not a teardrop type slit. The ratio of the amount of light that is blocked and transmitted (hereinafter referred to as "transmission ratio") is 100%, and the width W (opening ratio) of the opening is continuously narrowed as it progresses in the lateral direction. The ratio is reduced. That is, the transmission ratio is continuously variable by sliding the teardrop type slit 1 82 in the lateral direction and changing the intersection position of the teardrop type slit 182 and the optical axis K2. However, if the width W of the opening is somewhat reduced, illuminance unevenness is remarkably generated. Therefore, in the present embodiment, the illuminance unevenness is not significantly increased. As a limit on use. In the present embodiment, the opening width W having a transmission ratio of 70% is used as the use limit, and the sliding movement range is obtained from the position Qb until the transmission ratio becomes 100% of the position Qa. Figure 8 is a diagram showing the construction of the filter holder 丨62. The filter holder 162 is a supporting member for holding the ND filter 62 or the spectrum correcting filter 60. As shown in FIG. 8, the same as the metal dimming plate 164 is attached to the base of the horizontally long rectangular shape. The plate 183 is integrally provided with a support piece 184 and has a slightly zigzag shape. At the base plate 183, a plurality of filter attachment openings 185 are provided in a horizontal-to-column manner. Each of the filters is provided with an opening 185, which is provided with ND filters 62, -23-201226771 having mutually different transmittances, or a spectral correction filter 60 having spectral characteristics which are different from each other. The filter is provided with a diameter of the opening 185 which is at least larger than the incident beam, as long as the ND filter 62 and the spectrum correction filter 60 are not mounted at the filter-mounted opening 185. The filter can be used with the opening 185 as an opening having a transmittance of 100%. Specifically, in order to be able to perform dimming by the metal dimming plate 164 without using the filter holder 162, as shown in FIG. 10, the filter at the left end is provided with the opening 185. The ND filter 62 is not mounted, and the total amount of incident light is transmitted, and the transmission ratio is set to 1 〇〇%. The support piece 184 is supported by a slide moving mechanism 192 which will be described later, and is slidably moved in the lateral direction via the slide moving mechanism 192, whereby the ND filter 62 through which the optical axis K2 passes or spectrum correction The filter 60 is set to be variable. By this, the transmittance is changed stepwise, or the spectrum system is changed. In addition, in the following description, the filter holder 162 holding the ND filter 62 is referred to as an ND filter holder (light reduction plate), and the symbol 162A is added, and the spectrum correction filter 60 is held. The filter holder 162, referred to as a correction filter holder, is appended with the symbol 1 62B, whereby the distinction is made for each. The dimming device 70 is provided with a substantially rectangular device substrate 187 as shown in FIG. 5 and FIG. 6 described above. On the front side of the device substrate 187, one metal dimming plate 164 and two NDs are provided. The filter holder 162A and the one modified filter holder 162B are supported by the movable supporting piece 188 so as to overlap each other along the optical axis K2. At the front side of the device substrate 187, the rails -24 to 201226771 186 extending in the lateral direction are arranged side by side in the vertical direction. At each of the rails 186, the movable supporting piece 188 is slidable. It is installed and moved. At this time, as shown in FIG. 6(D), two ND filter holders 162A and one modified filter holder 162B are used to prevent the reflected light at the filter surface from being directed toward the light. The direction in which the axis K2 is folded back is reflected and returned to the device light source 4 so that the angle τ with respect to the optical axis K2 becomes 90° ± α (for example, α = about 5), and with respect to the optical axis K2. Supported obliquely. On the other hand, at the back side of the device substrate 187, at each of the movable supporting pieces 188, a driving motor 189, a pulley 191, and a timing belt which is mounted on the driving motor 189 and the pulley 191 are provided ( Timing belt) 190. At the timing belt 190, a back side protruding piece 1 8 8 A (FIG. 6 (B)) protruding from the back side of the movable supporting piece 188 is coupled via a timing belt which is driven by the motor 189. The drive of the 190, the movable support piece 188 is used for sliding movement. That is, the movable support piece 188, the rail 186, the drive motor 189, the pulley 191, and the timing belt 190 are provided to constitute the above-described slide moving mechanism 192. The dimming controller 171 includes an operation element for instructing the increase or decrease of the amount of light, and an operation element (not shown) for instructing the change of the spectral characteristics to drive the dimming according to the increase/decrease instruction of the amount of light. The drive motor 189' of the device 70 is automatically dimmed by a combination of the transmission ratio of the metal dimming plate 164 and the ND filter 62 of the ND filter holder 162A to change the transmittance of light for dimming control. At the same time, the drive motor 189 is driven according to the change instruction of the spectrum characteristics, and the spectrum correction filter 60 for the correction filter holder-25-201226771 162B is automatically changed to change the spectral characteristics. By providing such a dimming device 70, it is not necessary to manually exchange the ND filter 62 or the spectrum correcting filter 60, and the adjustment of the amount of light or the spectrum is easy. Here, in the present embodiment, the minimum transmission ratio of the metal dimming plate 164 is Tb (in the present embodiment, 75%), and the ND filter carried by the ND filter holder 162A is used. When the number of the mirrors 62 is Na (in the present embodiment, Na = 3), the transmission ratio by the metal dimming plate 164 and the ND filter 62 of the two ND filter holders 162A are transmitted. The combination between the rates is between [100%] and Tb [(Na+1) X (Na+ 1 )] 次% (in the present embodiment, about 1 +/- 0%). Perform continuous dimming. If it is described in detail, if the ND filter holder 162A of the ND filter 62 of Na (three in the present embodiment) is held, it is for each ND filter holder 162A. Further, each of the filters is provided with a filter opening 185 that functions as an opening having a 100% transmittance. In consideration, it is possible to realize a (Na+l)x(Na+l) stage (in this case). In the embodiment, it is a dimming phase of (3 + l) x (3 + l) = 16 stages). As shown in FIG. 9(A), the first stage of dimming is set to a transmittance of 100%, and the minimum transmission ratio Tb is sequentially multiplied by 100% of the transmittance, and is taken out (N a+ 1) The transmittance of each dimming stage of the X (N a+ 1) stage (in the example of the figure, the 16 stages), and then the 2~(Na+Ι) stage of these dimming stages ( In the example of the figure, the transmittances of the second to fourth stages are the transmittance of the first ND filter 62, and [( -26 - 201226771 (Na + l) Xm) + 1] Stage (however, m is an integer greater than 1 and satisfies 111 <(>^+1) the integer of the square) (in the example of the figure, 5, 9, 13), and the transmittance of each of the ND filters 62 of the second 〇 In FIG. 10, the distribution ratio range of the metal dimming plate 164 and the distribution result of the transmittance of the ND filter holder 162 A are schematically shown. After allocating in this way, as a result, as shown in Fig. 9(B), the transmittance of each of the ND filters 62 of the two ND filter holders 162A is obtained by two NDs. The combination of the ND filter 62 of the filter holder 162A makes it possible to change the transmittance stepwise by (Na + 1) X (Na + U stage). By multiplying the range obtained by the minimum transmission ratio Tb of the metal dimming plate 164, it is possible to continuously perform the ratio of the transmittance of the metal dimming plate 1 64 between the dimming stages. In the case of dimming, in the case of the minimum stage, the metal dimming plate 164 can be further used, and as a result, it can be in the range of 100% to 1'1 ["&+1)><"&+1)] Continuous dimming between the powers of %. Specifically, when the light amount is increased or decreased in the case where the light amount is increased or decreased, when the transmittance is between the stages, the metal dimming plate 1 64 is slidably moved to perform dimming. In the case where the phase is changed, the transmission ratio of the metal dimming plate 164 is first set to 100%, and the dimming is changed by the group cooperation change of the ND filter 62 for the two ND filter holders 162A. The stages of the drive motor 189 are driven. -27- 201226771 In addition, in fact, it is difficult for the ND filter 6 2 ' to produce a transmittance for the purpose, and there are cases where the transmittance is a few percent deviation from the design. Therefore, in fact, the transmittance of each dimming stage of Fig. 9 may also be shifted from the design, and there will be a difference of 1〇〇~75% between the dimming stages. Case. Therefore, the metal dimming plate 164 is designed to be capable of holding a margin even if it has an influence on the unevenness of the contrast, and is designed to be able to hold the margin even more than the minimum transmission ratio Tb. A low ratio (for example, about 65%), or a range in which the metal dimming plate 164 is moved by the dimming controller 71, and is also set to a range of a holding margin of 100% to a minimum transmission ratio Tb ( For example, 65%), by this configuration, even if the above-described general deviation occurs, continuous dimming can be performed over the entire range. As described above, according to the present embodiment, in addition to the effects of the first embodiment, the ND filter holder is provided by the metal dimming plate 164 and the ND filter 62 having a plurality of mutually different transmittances. 162 A is used for dimming, which suppresses the occurrence of illuminance unevenness and continuously performs dimming over a wide range. In particular, when the minimum transmission ratio of the metal dimming plate 1 64 is Tb, the first stage is set to a transmittance of 100%, and the minimum transmission ratio Tb is multiplied by the transmission rate of 100%. In the transmittance of each dimming stage of the squared (Na + Ι) phase, the respective NDs of the first ND filter holder 162A are set by the respective transmittances of the 2 to (Na + Ι) stages. The transmittance of the filter 62, and the [((Na+l)xm) + 1] stage (however, the m-system -28-201226771 is an integer of 1 or more, and satisfies (Na+l)xm + 1 The transmittance of each of the ND mirrors 62 of the ND filter holder 16 2A of the second ND filter holder 16 2A can cover 1 to (Na+). l) χ (Na+l) stage, and the illuminance unevenness or the spectral spectrum is greatly changed between 100% and Tb [(Na+l) x(Na+l)] For continuous dimming. In addition, each of the above-described embodiments is merely illustrative of the embodiments of the present invention, and any modifications and applications are possible without departing from the scope of the present invention. For example, in the first embodiment, the light source of the irradiation device 1 is not limited to the above-described embodiment, and may be realized by using the spectrum correction filter 60 of, for example, a dielectric multilayer film. Any number of elements can be used, and the number of spectrum correction filters 60 can be two to three (of course, by using a double-sided coating type, a single-sided coating type) One, to change the number of the number). Further, for example, the number of the ND filters 62 is not limited to one, and may be overlapped as a plurality of pieces to be used as the intended transmittance. Further, for example, in the first embodiment, the filter group 9 may be provided not on the incident side of the light guiding optical system 8, but on the emitting side. Further, as the integrator optical element of the optical system 8 for light guiding, an optical element other than the glass column 18 can be used. In the respective embodiments, the sample of the irradiation device 1 is exemplified by a Si solar cell and a dye-sensitized solar cell. However, the present invention is not limited thereto, and may be a CIS solar cell or an organic device. Thin film -29- 201226771 Any solar cell such as a solar cell or a solar cell of another compound. Also, of course, it can be a sample other than a solar cell. Further, in each of the embodiments, as shown in FIG. 11, the base plate 295 constituting the optical reference surface may be formed in the casing 2 so as not to be in contact with the inner side surface of the casing 2. In the manner of the base plate 295, various optical elements including the device light source 4 including the lamp tube 1 and the mirror 12 and the optical unit 8 for guiding light are combined and fixed to form an illumination. Device 200. With this configuration, since the base plate 295 that is the optical reference surface does not have a double structure that is in contact with the frame 2, the optical element is less likely to be affected by external forces such as during transportation, and in particular, The optical optical axis and the like can be maintained without the arrangement of the optical element being skewed. Further, the optical elements including the mirror 12 of the device light source 4 are all mounted on the base plate 2 95 which is an optical reference surface via a mechanically held holding jig. This makes it possible to position each optical element with high precision. In particular, the leg supporting the base plate 295 which is an optical reference surface is constituted by optical reference posts 2 96 which are equal in length by simultaneous simultaneous processing, and these optical references are used. The support 296 is vertically erected on the base 2A constituting the bottom surface of the frame 2, and supports the base plate 295' so as to maintain the optical reference surface of the base plate 295 horizontally and to be able to be more accurate. Positioning of each optical component is performed. [Brief Description of the Drawings] -30-201226771 [Fig. 1] Fig. 1 is a schematic view showing a schematic configuration of an irradiation apparatus according to a first embodiment of the present invention. Fig. 2 is an enlarged view showing the injection of the optical system for light guide from the filter group. [Fig. 3] Fig. 3 is a diagram showing the spectral characteristics of the light irradiated by the illumination device, (A) is shown for the absence of a spectrum correction filter, and (B) is for the spectrum. Corrected the case where the filter swap is used to generate a filter that resembles sunlight, and (C) shows the case where the spectrum correction filter is exchanged for the filter that produces the illumination of the fluorescent lamp. (D) is A case where the spectrum correction filter is exchanged for a filter that produces illumination light of a white LED is shown, and (E) is a case where a filter for exchanging the spectrum correction filter into illumination light for generating a cold halogen lamp is shown. Fig. 4 is a view showing a schematic configuration of an irradiation apparatus according to a second embodiment of the present invention. Fig. 5 is a front perspective view of the dimming device. Fig. 6 is a view showing the configuration of the dimming device, wherein (A) is a front view, (B) is a rear view, (C) is a top view, and (D) is a side view; Fig. 7 is a diagram showing the composition of a metal dimming plate. Fig. 8 is a view showing the configuration of a filter holder. Fig. 9 is a view for explaining the distribution of the transmittance of each ND filter from the ND filter holder. Fig. 10 is a view showing the distribution ratio range of the metal dimming plate and the distribution result of the transmittance of the ND filter. -31 - 201226771 [Fig. 1 1] Fig. 1 is a schematic configuration diagram of an irradiation apparatus according to a modification of the present invention. [Description of main component symbols] 1. 1〇〇: Irradiation device 2: Frame 4: Device light source 6: Sample stage 8: Optical system for light guide 9: Filter group 1 0: Lamp 1 2: Mirror 1 4 : Sample 1 8 : Glass column (column integrator) 20 : Lens unit 22 , 24 : Mirror 30 : Electrical component chamber 32 : Light source chamber 34 : Optical chamber 3 6 : Sample setting chamber 4 0 A to 4 0 C : Opening and closing 扉 42 : XYZ movable adjustment platform 60 : Spectrum correction filter 62 : ND filter (dimmer filter) -32- 201226771 64 : Dimming plate 70 : Dimming device 7 1 : Dimming controller 1 6 2 : Filter holder 162A : ND filter holder (light reduction plate) 164 : Metal dimmer plate (dimming plate) 182 : Teardrop type slit (through opening) 1 8 5 : Filter with opening ( Opening) 192: sliding movement mechanism Tb: minimum transmission ratio W: opening width Na: number of dimming filters - 33-