201224184 六、發明說明： 【發明所屬之技術領域】 [0001] 本發明涉及一種真空鍍膜件及其製造方法，尤其涉及一 種具有天藍色與金屬質感的真空鍍膜件及其製造方法。 【先前技術】 [0002] 隨著科技的不斷進步，手機、個人數位助理（PDA，Personal Digital Assistant)、 及電腦等各式電子裝置 亦迅速發展，其功能亦愈來愈豐富。為了使電子裝置的 外殼具有豐富色彩，傳統上可利用彩色塑膠形成彩色塑 0 膠外殼，或藉由喷漆方式在電子裝置的外殼表面形成顏 色層。然而，塑膠外殼與噴漆外殼不能呈現良好的金屬 質感。另一方面，由於真空鍍膜技術本身較為複雜而不 易精密操控，習知技術中於外殼表面形成的金屬真空鍍 膜層的色彩有限，與烤漆、陽極處理等工藝相比，真空 鍍膜層的顏色不夠豐富，嚴重限制了其在裝飾鍍膜領域 的競爭力。 【發明内容】 [0003] 有鑒於此，本發明提供一種具有天益色及金屬質感的真 空鍍膜件。 [0004] [0005] 另外，本發明還提供一種上述真空鍍膜件的製造方法。 一種真空鍍膜件，包括基體及形成於基體上的顏色層， 所述顏色層為Ti-0-Ν膜，該顏色層呈現的色度區域於 CIE LAB表色系統的L*座標值介於50至60之間，a*座標 值介於-3至-2之間，b*座標值介於-6至-10之間。 099141748 表單編號A0101 第3頁/共10頁 0992072540-0 201224184 [0006] —種真空鍍膜件的製造方法，其包括如下步驟： [0007] 提供基體； [0008] 採用一鈦靶，以氧氣及氮氣為反應氣體，氧氣的流量為 15~20sccm，氮氣的流量為80〜lOOsccm，在所述基體上 滅射形成顏色層；所述顏色層為Ti-〇-N膜，所述顏色層 呈現的色度區域於CIE LAB表色系統的L*座標值介於50 至60之間，a*座標值介於-3至-2之間，b*座標值介於-6 至-10之間。 [0009] 所述真空鍍膜件的製造方法，在形成顏色層時，採用鈦 靶作為靶材，藉由對反應氣體氮氣和氧氣的流量的控制 ，實現所需的顏色層中各成分的比例關係及各成分間的 微觀鍵合結構，從而達到使顏色層呈現出天藍色的目的 。以該方法所製得的真空鍍膜件可呈現出具吸引力的天 藍色的金屬外觀，豐富了真空鍍膜層的顏色，極大地提 高了產品的外觀競爭力。 【實施方式】 [0010] 請參閱圖1，本發明一較佳實施例的真空鍍膜件10可為一 手機的外殼。該真空鍍膜件10包括基體11、襯底層13及 顏色層15。該襯底層13設置於基體11的表面，該顏色層 15設置於槻底層13的表面。 [0011] 基體11為可為金屬材料或玻璃、塑膠等非金屬材料。 [0012] 所述襯底層13以磁控濺射的方式形成於基體11的表面。 該襯底層13為鈦層，其厚度為50〜100nm。該襯底層13的 顏色為不影響顏色層顏色的淺色調，比如可為銀色、白 099141748 表單編號A0101 第4頁/共10頁 0992072540-0 201224184 色及灰白色等淺色調。 [0013] 所述顏色層15為Ti-0-Ν膜，其以磁控濺射的方式形成。 該顏色層15的厚度為200〜350nm。該顏色層15由肉眼直 觀呈現出天藍色，而其呈現的色度區域於CIE LAB表色系 統的L*座標值介於50至60之間，a*座標值介於-3至-2之 間，b*座標值介於-6至-10之間。 [0014] 上述真空鍍膜件10的製造方法主要包括如下步驟：201224184 VI. Description of the Invention: [Technical Field] The present invention relates to a vacuum coated member and a method of manufacturing the same, and more particularly to a vacuum coated member having a sky blue and metallic texture and a method of manufacturing the same. [Prior Art] [0002] With the continuous advancement of technology, various electronic devices such as mobile phones, personal digital assistants (PDAs), and computers have also developed rapidly, and their functions have become more and more abundant. In order to make the outer casing of the electronic device rich in color, it is conventional to form a color plastic plastic shell by using colored plastic, or to form a color layer on the surface of the outer casing of the electronic device by painting. However, the plastic case and the painted case do not exhibit a good metallic feel. On the other hand, because the vacuum coating technology itself is relatively complicated and difficult to manipulate, the color of the metal vacuum coating layer formed on the surface of the outer casing is limited in color, and the color of the vacuum coating layer is not rich enough compared with the processes such as baking varnish and anodizing. It severely limits its competitiveness in the field of decorative coatings. SUMMARY OF THE INVENTION [0003] In view of the above, the present invention provides a vacuum coating member having a natural color and a metallic texture. [0004] In addition, the present invention also provides a method of manufacturing the above vacuum coating member. A vacuum coating member comprising a substrate and a color layer formed on the substrate, the color layer being a Ti-0-Ν film, the color layer exhibiting a chromaticity region of the CIE LAB color system having an L* coordinate value of 50 Between 60 and 60, the a* coordinate value is between -3 and -2, and the b* coordinate value is between -6 and -10. 099141748 Form No. A0101 Page 3 of 10 0992072540-0 201224184 [0006] A method of manufacturing a vacuum coated member, comprising the steps of: [0007] providing a substrate; [0008] using a titanium target with oxygen and nitrogen For the reaction gas, the flow rate of oxygen is 15-20 sccm, the flow rate of nitrogen gas is 80~100 sccm, and the color layer is formed by extinction on the substrate; the color layer is a Ti-〇-N film, and the color layer presents a color The L* coordinate value of the CIE LAB color system is between 50 and 60, the a* coordinate value is between -3 and -2, and the b* coordinate value is between -6 and -10. [0009] The vacuum coating member manufacturing method uses a titanium target as a target when forming a color layer, and achieves a proportional relationship between components in a desired color layer by controlling a flow rate of a reaction gas of nitrogen and oxygen. And the micro-bonding structure between the components, so as to achieve the purpose of making the color layer appear sky blue. The vacuum coated parts produced by this method can exhibit an attractive sky-blue metallic appearance, enrich the color of the vacuum coating layer, and greatly enhance the appearance competitiveness of the product. [Embodiment] Referring to Figure 1, a vacuum coating member 10 according to a preferred embodiment of the present invention may be an outer casing of a mobile phone. The vacuum coated member 10 includes a substrate 11, a substrate layer 13, and a color layer 15. The substrate layer 13 is provided on the surface of the substrate 11, and the color layer 15 is provided on the surface of the crucible layer 13. [0011] The base 11 may be a metal material or a non-metal material such as glass or plastic. [0012] The substrate layer 13 is formed on the surface of the substrate 11 by magnetron sputtering. The underlayer 13 is a titanium layer having a thickness of 50 to 100 nm. The color of the substrate layer 13 is a light color tone which does not affect the color of the color layer, and may be, for example, silver or white. 099141748 Form No. A0101 Page 4 / Total 10 pages 0992072540-0 201224184 Light colors such as color and gray. [0013] The color layer 15 is a Ti-0-germanium film formed by magnetron sputtering. The color layer 15 has a thickness of 200 to 350 nm. The color layer 15 visually presents a sky blue color by the naked eye, and the chromaticity area presented by the CIE LAB color system has an L* coordinate value between 50 and 60, and the a* coordinate value is between -3 and -2. The b* coordinate value is between -6 and -10. [0014] The manufacturing method of the vacuum coating member 10 described above mainly includes the following steps:
[0015] 提供基體11。該基體11可為金屬材料或玻璃、塑膠等非 金屬材料。 [0016] 對該基體11進行預處理。該預處理可包括常規的對基體 11進行化學除油、除壤、酸洗、超聲波清洗及烘乾等步 驟。 [0017] 在基體11的表面形成襯底層13。該襯底層13為鈦金屬膜 ，其可採用磁控濺射的方式形成。形成該襯底層13的具 體操作方法可為：將基體11固定於一磁控濺射鍍膜機（ 圖未示）的轉架上，對該鍍膜機的鍍膜室進行抽真空處 理至真空度為8. 0xl0_3Pa，並加熱該鍍膜室至80~120°C (即濺射溫度為80〜120°C)，通入流量為100〜250sccm ( 標準狀態毫升/分鐘）的工作氣體氬氣；開啟一鈦靶材的 電源，設定鈦靶材電源功率為7〜10kw，對基體11施加-1 50 — 250V的偏壓，佔空比為50~70%，並設置轉架的公 轉轉速為2〜3轉/每分鐘（revolution per minute， rpm)，沉積所述襯底層13。沉積所述襯底層13的時間為 5~1Omin ° 099141748 表單編號A0101 第5頁/共10頁 0992072540-0 201224184 [0018] 在該襯底層1 3的表面形成顏色層1 5。在本發明的較佳實 施例中，形成顏色層15的具體操作方法可為：在沉積所 述襯底層13後，向所述磁控濺射鍍膜機中通入氧氣與氮 氣（反應氣體），其中氧氣的流量為15〜20sccm，氮氣 的流量為8 0〜1 0 0 sccm，保持所述鈦乾的電源功率、對基 體施加的偏壓、濺射溫度及佔空比不變，沉積所述顏色 層15。沉積顏色層15的時間為20~40min。 [0019] 該顏色層15為Ti-0-Ν膜，其於CIE LAB表色系統的L*座 標值介於50至60之間，a*座標值介於-3至-2之間，b*座 標值介於-6至-10之間。 [0020] 本發明真空鍍膜件10可為筆記型電腦、個人數位助理等 電子裝置的外殼，或為其他裝飾類產品的外殼。相較於 習知技術，所述真空鍍膜件10的製造方法，藉由對靶材 的選取及對反應氣體氧氣和氮氣流量的設計，從而達到 使顏色層15呈現出天藍色的目的。 [0021] 應該指出，上述實施方式僅為本發明的較佳實施方式， 本領域技術人員還可在本發明精神内做其他變化。這些 依據本發明精神所做的變化，都應包含在本發明所要求 保護的範圍之内。 【圖式簡單說明】 [0022] 圖1係本發明較佳實施例的真空鍍膜件的結構示意圖。 【主要元件符號說明】 [0023] 真空鍍膜件：10 [0024] 基體：11 099141748 表單編號A0101 第6頁/共10頁 0992072540-0 201224184 [0025] 襯底層：13 [0026] 顏色層：1 5[0015] A substrate 11 is provided. The base 11 may be a metal material or a non-metal material such as glass or plastic. [0016] The substrate 11 is pretreated. The pretreatment may include conventional steps of chemical degreasing, soil removal, pickling, ultrasonic cleaning, and drying of the substrate 11. [0017] A substrate layer 13 is formed on the surface of the substrate 11. The substrate layer 13 is a titanium metal film which can be formed by magnetron sputtering. The specific operation method for forming the substrate layer 13 may be: fixing the substrate 11 to a rotating frame of a magnetron sputtering coating machine (not shown), and vacuuming the coating chamber of the coating machine to a vacuum degree of 8 0xl0_3Pa, and heat the coating chamber to 80~120 °C (ie, the sputtering temperature is 80~120 °C), and pass the working gas argon with a flow rate of 100~250sccm (standard state ML/min); open a titanium For the power supply of the target, set the power of the titanium target to 7~10kw, apply a bias voltage of -1 to 50V to the base 11, the duty ratio is 50~70%, and set the revolution speed of the turret to 2~3 rpm. The substrate layer 13 is deposited every minute (revolution per minute, rpm). The time for depositing the underlayer 13 is 5~1Omin ° 099141748 Form No. A0101 Page 5 of 10 0992072540-0 201224184 [0018] A color layer 15 is formed on the surface of the substrate layer 13. In a preferred embodiment of the present invention, the specific operation method of forming the color layer 15 may be: after depositing the substrate layer 13, introducing oxygen and nitrogen (reaction gas) into the magnetron sputtering coater. Wherein the flow rate of oxygen is 15 to 20 sccm, and the flow rate of nitrogen is 80 to 1 0 sccm, and the power supply of the titanium dry, the bias applied to the substrate, the sputtering temperature, and the duty ratio are maintained, and the deposition is performed. Color layer 15. The time for depositing the color layer 15 is 20 to 40 minutes. [0019] The color layer 15 is a Ti-0-Ν film, and the L* coordinate value of the CIE LAB color system is between 50 and 60, and the a* coordinate value is between -3 and -2, b * The coordinate value is between -6 and -10. [0020] The vacuum coating member 10 of the present invention may be an outer casing of an electronic device such as a notebook computer or a personal digital assistant, or an outer casing of other decorative products. Compared with the prior art, the vacuum coating member 10 is manufactured by the method of selecting the target and designing the flow rate of the reaction gas oxygen and nitrogen to achieve the blue color of the color layer 15. [0021] It should be noted that the above-described embodiments are merely preferred embodiments of the present invention, and those skilled in the art may make other changes within the spirit of the present invention. All changes made in accordance with the spirit of the invention are intended to be included within the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS [0022] FIG. 1 is a schematic view showing the structure of a vacuum coating member according to a preferred embodiment of the present invention. [Description of Main Component Symbols] [0023] Vacuum Coating Member: 10 [0024] Substrate: 11 099141748 Form No. A0101 Page 6 of 10 0992072540-0 201224184 [0025] Substrate Layer: 13 [0026] Color Layer: 1 5
099141748 表單編號A0101 第7頁/共10頁 0992072540-0099141748 Form No. A0101 Page 7 of 10 0992072540-0