201221348201221348
【發明所屬之技術領域】 ，。本發明係有關複層薄材、環狀帶及環狀帶的製造方 、’、的疋，本發明係有關於例如可用於工業相關之 =熱吐著性及财磨損性、止滑性良好的複層薄材、 亥複層薄材構成的環狀帶及環狀帶的製造方法。 丰發明係有關保護薄材、搬送薄材及組入該保護 送薄材的層疊裝置，其中將上述發明之複層薄材 二、反保護薄材（之後有只稱之「保護薄材」）及搬送 薄材’且應用在製造太陽能電池模組之層疊裝置。 【先前技術】 -卜 — 以來，已為所知的耐熱複合薄材係將耐熱性或非 + 子的耐熱樹脂複合於耐熱性及拉張強度等良好 的耐2性纖維織布，這㈣熱複合薄材係作為與工業相關 的耐熱#黏著性薄材或耐熱、非黏著性搬送帶等使用。 用於上述耐熱複合薄材的耐熱性纖維織布，例如係使 用以平織、斜織等形成的玻璃纖維、芳香族聚醯胺纖維等 織布。 又’用於上述耐熱複合薄材的耐熱樹脂，例如係使用 四氟乙烯樹脂（PTFE)等氟樹脂。 然而’―般，氟樹脂係具有良好的耐熱性、耐冷性、 非黏著性、耐藥品性（chemical resistance)、耐燃燒性（flame resistance)、耐候性（weather resistance)、電絕緣性、低 201221348 摩擦性等，但因缺乏耐磨損性（wearreisistance)、具有良 好低摩擦性，而容易有滑動的問題。 义 耐磨損性優於氟樹脂，而低摩擦性劣於氟樹脂、止滑 性（grip)優於氟樹脂，且難以滑動的耐熱材料例如為= 醯亞胺系樹脂等。 入 作為提升薄材的耐磨損性之製造方法，例如被提出的 方法係將耐熱性纖維織布含浸且附著於聚醯亞胺系樹脂 被分散在氟素樹脂水性懸浮液的混合液，乾燥後 二 方法（日本特開2006_21403號公報（專利文獻丨））。 t然而，δ己載於上述專利文獻丨的薄材係聚醯亞胺系樹 曰與氟樹脂的混合材料，因此，雙方的性能被平均，而似 Τ難以獲得聚醯亞胺系樹脂原本良好的耐磨損性。對於搬 '有：狀帶其與驅動滾輪的接觸面即帶體的内側面呈 斑2的止滑性及耐磨損性係重要的，但聚醯亞胺系樹脂 與氟樹脂的混合材料似乎難得使其兩全。 為1醯亞胺系樹脂與氟樹脂的混合材料，而係將聚 -=胺系樹脂與氟樹脂的層形成為管狀環狀帶（日本特開 啼八4 632號公報（特許文獻2)、日本特開平7-178741 哞(特9午文獻3)、日本特開2〇〇2·178422號公報（特 模具壓m出。然而，其製造方法係以圓筒狀金屬 .,為了對應各式各樣的尺寸，似乎使得設備 成本大增。 $封太陽能電池模組時所使用的層疊裝置’係如[Technical field to which the invention pertains]. The present invention relates to a manufacturer of a multi-layered thin material, an endless belt, and an endless belt, and the present invention relates to, for example, industrially relevant = hot spouting property and wealth wearability, and good slip resistance. A method for producing an endless belt made of a multi-layered thin material, a woven composite layer, and an endless belt. The invention relates to a laminating device for protecting a thin material, transporting a thin material, and incorporating the protective thin material, wherein the multi-layer thin material of the invention described above and the anti-protective thin material (hereinafter referred to as "protective thin material") And transporting thin materials' and applying them to a laminate device for manufacturing solar cell modules. [Prior Art] - Since the heat-resistant composite thin material is known, a heat-resistant or non-heat-resistant resin is compounded to a good secondary fiber-resistant fabric such as heat resistance and tensile strength. The composite thin material is used as an industrially-resistant heat-resistant adhesive material or a heat-resistant, non-adhesive conveyor belt. The heat-resistant fiber woven fabric used for the heat-resistant composite thin material is, for example, a glass fiber or an aromatic polyamide fiber which is formed by plain weave, twill weave or the like. Further, the heat resistant resin used for the above heat-resistant composite thin material is, for example, a fluororesin such as tetrafluoroethylene resin (PTFE). However, the fluororesin has good heat resistance, cold resistance, non-adhesiveness, chemical resistance, flame resistance, weather resistance, electrical insulation, and low 201221348. Friction, etc., but due to lack of wear reisistance, good low friction, and easy sliding. The wear resistance is superior to that of the fluororesin, and the low friction is inferior to the fluororesin, the grip is superior to the fluororesin, and the heat resistant material which is difficult to slide is, for example, a quinone imine resin. As a manufacturing method for improving the abrasion resistance of a thin material, for example, a method in which a heat-resistant fiber woven fabric is impregnated and adhered to a polyimine-based resin dispersed in an aqueous suspension of a fluororesin is dried. The latter two method (Japanese Laid-Open Patent Publication No. 2006_21403 (Patent Document No.)). However, δ has been added to the above-mentioned patent document, and the thin material is a mixed material of a polyimine-based tree scorpion and a fluororesin. Therefore, the performance of both of them is average, and it is difficult to obtain a polyimine-based resin which is originally good. Wear resistance. It is important for the moving side to have a contact surface with the driving roller, that is, the inner side of the belt body is spot-sliding and abrasion resistance, but the mixed material of the polyimide resin and the fluororesin seems to be mixed. It’s hard to make it both. In the case of a mixture of a quinone imine resin and a fluororesin, a layer of a poly-=amine resin and a fluororesin is formed into a tubular endless belt (Japanese Patent Publication No. 8 4 632 (Patent Document 2) Japanese Patent Laid-Open No. Hei 7-187741 (Japanese Patent Publication No. 3) and Japanese Patent Laid-Open No. Hei. No. 2/178422 (Special mold pressure is m. However, the manufacturing method is a cylindrical metal. The various sizes seem to increase the cost of the equipment. The stacking device used in the solar cell module is like
寻利文獻5所揭霡的 A 句露的’一般層疊加工時，具有藉由隔膜 201221348 (diaphragm )等押壓元件而分割的上腔室及下腔室。下腔 室具有加熱太陽能電池模組等待加工物的熱板，以及用於 將待加工物從層疊裝置外搬送至該熱板的搬送薄材。上腔 室具有用於押壓待加工物的隔膜等押壓元件。 搬送薄材由於係搭載待加工物而行走，因此，與熱板 之間產生摩擦，因此，容易遭受傷害或破損等損傷。又， 熱板與搬送薄材的接觸面亦因與搬送薄材的摩擦而磨 損。因此，一般係將保護薄材（上述熱板保護薄材）設置 於熱板之上部，保護搬送薄材。 [專利文獻1]特開2006-21403號公報 [專利文獻2]特開平7-110632號公報 [專利文獻3]特開平7-178741號公報 [專利文獻4]特開2002-178422號公報 [專利文獻5]特開2000-101117號公報 又，針對製造太陽能電池模組的層疊裝置其所使用的 保護薄材及搬送薄材，具有以下的問題。 藉由將保護薄材設置於熱板上，於熱板產生的熱，介 由保護薄材及搬送薄材傳導至待加工物。因此，往層疊加 工的待加工物的熱難以傳導，層疊加工時的升溫速度產生 延遲。其結果，層疊加工時間變長，具有生產效率降低的 問題。一方面，以待加工物的產出間隔時間（takt time) 為優先時，於層疊加工所需熱量不足，產生待加工物的構 成元件即填充材（密封材）的層疊加工度不足（交聯不 足）。此情況，產生待加工物之品質的問題或製造產率的 201221348 問題。 一方面，搬送薄材因耐熱性、非黏著性、潤 藥。口 I·生等理由’而使用含有氟系樹脂的等，又ί 板保護薄材亦因相同的理由而使用相同材料。在層曼加二 時，係將這二種類的薄材密接，更在層疊加工時，施加執 於兩薄材，但任一薄材皆係由含有氣樹脂之物所構成，因、 此，亦具有容易互相黏合的問題。第—次的層4加工結束 j，組裝、固定於熱板的熱板保護薄材及搬送薄材保持黏 合，搬送薄材為了將待加工物搬出而開始動作時，該保1 薄材因搬送薄材而被拉扯，熱板保護薄材的組裝部可能破 損。又’同時地，搬送薄材亦可能破損。 【發明内容】 本發明考慮到上述之事項而檢討，第一目的為提供— 種複層薄材、由該複層薄材所構成的環狀帶及環狀帶的製 造方法，使能得到良好的耐熱性、非黏著性，且具有所需 的耐磨損性或止滑性之薄材，其係將薄材裁切為所需尺寸 且利用將其環狀化，不須使用模具而可製造各式各樣尺寸 的環狀帶。 ， 又，本發明有鑑於上述問題，第二目的為提供一種保 濩薄材及搬送薄材，使層疊加工時的升溫速度可提升，同 夺地防止保護薄材的破損。又，第三目的為提供一種使用 該保護薄材及搬送薄材的層疊裝置。 為了達成上述目的，依據本發明之第一發明的一種複 201221348 =薄材，其包括由_脂及耐熱纖維布所構成的至少一複 “才層及由聚醞亞胺系樹脂所構成的一表面層 ，兮 ;=系:由一處理面而形成，該處理面係藉由對該複: 材層進仃表面活性化處理而形成。 ^發明之複層薄材係第—發明中，該表面活性化處 理包括無機粒子附著燒成處理、金屬納触刻處理、電激放 電處理或電暈放電處理。 第三發明之環狀帶係係第-發明中，由上述複層薄材 所形成的一帶狀物之環狀體所構成。 :四發明之環狀帶的製造方法係將第一發明的複層 薄材裁切為帶狀；接合此複層薄材之—帶狀物的相對二端 部而得一環狀體。 —第五發明之環狀帶的製造方法係將上述複層薄材與 -另-薄材所積層的—帶狀物，將該帶狀物的該複層薄材 之相對二端部及該環狀物的該另—薄材之相對二端部分 別接合或使其近接配置而得一環狀體。 ^第六發明之熱板保護薄材，係應用於一層疊裝置，且 係由第一發明或第二發明之複層薄材所構成。 ,第七發明之熱板保護薄材係第六發明中，層疊加工 後’與S亥層疊裝置的一搬送薄材完全未附著。 第八發明之熱板保護薄材係第六發明或第七發明 :，與該搬送薄材接觸之一側的表面，具有由聚醯亞胺系 樹脂所構成的一表面層。 第九發明之搬送薄材，係應用於一層疊裝置，且係由 201221348 第一發明或第二發明之複層薄材所構成。 第十發明之搬送薄材係第九發明中，層疊加工後，與 該層疊襞置的一熱板保護薄材完全未附著。 第十一發明之搬送薄材係第九發明或第十發明中，與 該熱板保護薄材接觸之一側的表面，具有由聚醯亞胺系樹 月曰所構成的一表面層。 第十二發明之層疊裝置，係使用第六發明至第八發明 任一發明的熱板保護薄材的層疊裝置。 第十三發明之層疊裝置，係使用第九發明至第十一發 明任一發明的搬送薄材的層疊裝置。 •依據本發明’能得到具有良好的耐熱性、非黏著性及 - 耐磨損性、止滑性的複層薄材。 此複層薄材之表面層為聚醯亞胺系樹脂，因此，能得 到適用於所要用途、需求性能等的非黏著性、耐磨損性或 止滑性。 接著’依據本發明，係直接將此複層薄材積層或係將 另一薄材積層後，再將此複層薄材裁切為帶狀或將另一薄 材的積層物裁切為帶狀，以形成所要的寬度及長度的環狀 帶，由此可得到環狀帶，因此，可容易製造對應用途之所 要寬度、長度、層之構成的環狀帶。又，可在積層前準備 各層所要的寬度、長度，將這些層積層後製造環狀帶。 又，根據情況不將同一複層薄材裁切，而係將寬度寬 的環狀帶一形成後，將此寬度寬的環狀帶裁切為所需寬 度，藉此，可同時製造複數個長度相同的環狀帶。又，在 201221348 裁切上述寬度寬的環狀帶時，藉由調整寬度，而容易作成 且區分相異寬度的環狀帶。 而由於藉由塗佈聚醯亞胺系樹脂可進行複層薄材之 表面層的形成，因此，在預先以薄材狀獲得表面層部分， 相較於藉由黏著劑等積層的情況，表面層的接合強度高， 因此可得強度及耐久性良好的複層薄材及環狀帶，且容 易、效率地進行複層薄材或環狀帶的製造。 藉由將本發明之複層薄材使用在層疊裝置的熱板保 護薄材及搬送薄材，可獲得以下的效果。 在層疊加工中，搬送薄材及熱板保護薄材未附著，因 此，層疊加工後，即使將待加工物搭載於搬送薄材而使其 行走，熱板保護薄材不會損傷。可免除熱板保護薄材及搬 送薄材的附著，更可提升熱板保護薄材及搬送薄材的耐磨 損性。因此，應用於層疊裝置的熱板保護薄材及搬送薄材 的壽命提升，因此，可減少其交換作業，而提升太陽能電 池模組的生產性。 層疊加工後的熱板保護薄材及搬送薄材未附著，因 此，在層疊加工結束後，即使將待加工物搭載於搬送薄材 而使其行走，兩薄材不會被破壞，可使熱板保護薄材及搬 送薄材的厚度變薄。藉此，從熱板介由熱板保護薄材、搬 送薄材往待加工物的加熱迅速，可縮短待加工物的層疊加 工時間。因此，本發明之熱板保護薄材及搬送薄材的熱傳 導性良好，可加快升溫，而可提升層疊加工的生產效率。 依據本發明之層疊裝置，在層疊加工中，搬送薄材及 201221348 熱板保護薄材未附著，因此，層疊加工後，即使將待加工 物搭載於搬送薄材而使其在熱板保護薄材上行走，熱板保 護薄材或搬送薄材不會損傷或破壞，可使兩薄材變薄，因 此，熱傳導性變得良好。藉此，於層疊加工時，可使待加 . 工物的升溫速度加快，且可提升層疊加工的生產效率。 又，因層疊加工的溫度上升不足而產生太陽能電池模組不 良的層疊加工減少，而提升製品的產率。 【實施方式】 本發明之複層薄材具有圭少一層由氣樹脂及财熱性 纖維織布所構成之複合材層及由聚醯亞胺系樹脂所構成 之表面層，其中該表面層係介由一處理面而形成，該處理 面係藉由對該複合材層進行表面活性化處理而形成。 作為本發明之複層薄材的較佳具體例，例如可為圖 1、2所記載之例子。 圖1所示之本發明的複層薄材10，係具有一層由氟樹 脂2a及耐熱性纖維織布2b所構成之複合材層2及由聚醯 亞胺系樹脂所構成之表面層3 a的複層薄材，其中，該表面 層3a係介由一處理面4而形成，該處理面3a係藉由對該 複合材層2進行表面活性化處理而形成。 圖2所示之本發明的複層薄材11，係具有由聚醯亞胺 系樹脂所構成之表面層於其兩面，且係具有一層由氟樹脂 2a及耐熱性纖維織布2b所構成之複合材層2及由聚醯亞 胺系樹脂所構成之表面層3a的複層薄材，其中，該表面 11 201221348 層3 a係介由一處理面4而形成’該處理面4係藉由對該複 合材層2進行表面活性化處理而形成。 〈複合材層> 於本發明之複層薄材的複合材層係由氟樹脂及耐熱 性纖維織布所構成。 本發明之氟樹脂胜無限定’其可係從聚四氟乙烯 (PTFE)、四氟乙烯_全氟烷基乙烯基醚共聚物（PFA)、四 氟乙烯-六氟丙烯共聚物（FEP)所構成的群選出的耐熱性 樹脂。在這之中，特別以聚四氟乙烯為佳。 該氟樹脂可對應所需而配合導電性粉末。藉此，可給 予導電性或提升導電性，且可達到提升耐磨損性。導電性 私末之較佳具體例為碳黑（Carbon black )及氧化鈦 (Titanium Oxide)。其配合量相對氟樹脂較佳為丨〜別質量 份0 於本發明中，耐熱性纖維織布並無限定，例如為玻璃纖 維、芳香族聚醯胺纖維。耐熱性纖維織布的厚度一般為 30〜1000# m，特別以30〜7〇〇" m為佳。 此複合材層較佳例如係可將銳樹脂粒子的水性懸, 液含浸㈣熱性纖維織布’乾燥後再藉由燒成而形成。tj 製水性^液_溶媒例如為水，特取純水為佳。《 懸浮液中的氟樹脂粒子數係相對溶媒⑽質量份，為— 質量份，特別以30〜60質量份為佳 =發明之複合材層係氟樹脂充份地浸透至耐熱相 纖維織布的内部，且較佳地•性纖維織布的表面係被寨 12 201221348 樹脂覆蓋。因此’將耐熱性纖維織布與氟樹脂的總量定為 100質量份，氟樹脂的施用量係3〇〜70質量份，特別以 40〜60質量份為佳。 <表面層> 於本發明之複層薄材具有由聚醯亞胺系樹脂所構成 的表面層。 於本發明中，聚醯亞胺系樹脂並無限定，較佳例如為 聚醯亞胺及聚醯胺醯亞胺（polyamide imide)，特別以聚醯 亞胺為佳。 本發明藉由塗佈表面層而形成時，為了容易塗佈可使 用液狀的聚醯亞胺清漆（polyimide varnish )，且對應所需 可搭配溶劑。藉此，能降低黏性而達到提升塗佈效率。 又，聚醯亞胺樹脂可對應所需而搭配導電性粉末。藉 此，例如給予導電性或熱傳導性或提升導電性或熱傳導 性，且可達到提升耐磨損性。 上述表面層之形成係可將上述聚醯亞胺系樹脂塗佈 在複合材層的表面活性化歧面，乾職藉由燒成而進 行。聚醯亞胺系樹脂的燒成溫度較佳為300〜400Ϊ:，特別 以330〜37〇°C為佳。 表面層的厚度可根據本發明之複層薄材及環狀帶的 具體用途或目的等而適當決定。例如，若係以製造特別適 用於搬送用途之環狀帶時所使用的複合薄材表示，聚酿亞 胺樹脂表面層的厚度較佳為1〜50/zm，特取5〜，mJb 佳0 13 201221348 <表面活性化處理> 於本發明之複層薄材中，上述表面層係介由一處理面 而形成，該處理面係藉由對該複合材層進行表面活性化處 理而形成。在此，表面活性化處理指的係藉由對本發明之 複合材層表面的氟樹脂進行處理而使其表面張力下降，以 使複合材層的氟樹脂與作為複層薄材之表面層而形成的 聚醯亞胺系樹脂為可接合，且產生充分之接合強度的處 理。若不進行此表面活性化處理，則無法在該複合材層形 成由聚醯亞胺系樹脂所構成的表面層，進而無法達成本發 明之目的。 作為本發明之較佳表面活性化處理，例如可為二氧化 石夕粒子（silica particle)附著燒成處理、金屬鈉蝕刻（Natrium etChing)表面處理、電浆放電（plasma discharge)處理、 電晕放電（corona discharge )處理等，在這之中，特別以 二氧化矽粒子附著燒成處理為佳。 在此，本發明之_表面活性化處理詳細如下所示。 七t一氧化矽粒子附著燒成處理：係將二氧化矽粒子與氟 树知教子的混合水性懸浮液塗佈於由氟樹脂及财熱性纖 =布所誠的複合材後，藉㈣行燒成處理而提升複合 材表面之親水性的處理。 金屬納ϋ刻表面處理：係藉由金屬鈉溶液塗佈 而提升複合材表面 熱㈣維織布所構成的複合材， t靦水性的處理。 電漿放電處理 係在由氟樹脂及耐熱性纖維織布所構 201221348 成的複合材之表面實施輝光放電（glow discharge)處理， 而提升複合材表面之親水性的處理。 電暈放電處理：係在由氟樹脂及耐熱性纖維織布所構 成的複合材之表面實施電暈放電處理，而提升複合材表面 之親水性的處理。 表面活性化處理較佳係對上述複合材層的表面層之 形成部位全面進行，但亦可係對上述複合材層的表面層之 形成部分的一部分進行。 藉由實施此表面活性化處理，將純水滴在複合材層表 面的氟樹脂上時的接觸角（contact angle )(曰本工業標準 HS，K6768)明顯減小。表面活性化處理前為106度的接 觸角，藉由二氧化矽粒子附著燒成處理接觸角為80〜90 度，而藉由金屬鈉蝕刻表面處理接觸角為50〜60度，藉由 電漿放電處理則下降至50〜60度。 <環狀帶> 本發明之環狀帶係由上述複層薄材所形成之帶狀物 的環狀體而形成。因此，本發明之環狀帶具有上述複層薄 材的良好特性，例如主要根據氟樹脂及耐熱性纖維織布所 形成的複合材層具有良好的耐熱性、形狀安定性、非黏著 性及耐久性，以及主要根據表面層的聚醯亞胺系樹脂具有 各種特性（例如，耐磨損性、财熱性、财久性）。 接著，本發明之環狀帶的製造方法，係將上述複層薄 材裁切為帶狀；接合此複層薄材帶狀物的相對二端部而獲 得一環狀體。又，此環狀體例如可係（1)藉由將複層薄 15 201221348 材帶狀物其中一端部的周邊範 (圖端。卩重合而接合 接:Λ12)藉由將複層薄材帶狀物的二端部堅固地 端部剖面（圖3⑻）；（3)||由將複層薄材帶狀 π Ά部兩者接合於同—連接用薄材（圖3(C))而獲 :二丨二端部的接合係可藉由熱封合(一。或使 用點署劑而進行。 又， 纟發明之另-環狀帶的製造方法係將上述複層薄 另—薄材所積層的帶狀物，將此帶狀物的上述複層薄 材之相對兩端部與此帶狀物的上述另—薄材之 =分別接合或近接配置而得—環狀體。在此，與上述複層 >材積層的另—薄材可例如係單層或複數層所構成的薄 材。又’此另-薄材可使用單層及複層薄材。此另一薄材 例如亦包括上述複合材2及複層薄材10、u等。 圖4為顯示本發明之環狀帶的較佳具體例。圖續示 的本發明之環狀帶12，係圖i所示的複層薄材ι〇於外周 側’而另一薄材5於内周側，此另一薄材5係使用與上述 ^复5材層2相同内容的薄材。本發明之環狀帶，係複層 薄材1〇的相對二端部及此帶狀物的上述另-薄材5的相 對二端部在位置6、7，並分別使其接合或使其近接配置而 得一環狀體為環狀帶。 又，作為本發明之環狀帶的較佳具體例，亦包括圖1 所示的複層薄材10於内周侧，而另—薄材5於外周側。 ,本發明與利用藉由習知模具所製成之無縫管狀物以 製造環狀帶的方法相#，本發明係可對應用途 而容易製造 201221348 所需寬度、長度、層之構成的環狀帶。 又，根據情況不將同一複層薄材裁切，而係將寬度寬 的環狀帶一形成後’將此寬度寬的環狀帶裁切為所需寬 度，藉此，可同時製造複數個長度相同的環狀帶。又，在 裁切上述寬度寬的環狀帶時，藉由調整寬度，而容易作成 且區分相異寬度的環狀帶。 本發明之複層薄材與另一薄材之積層薄材較佳係藉 由將複層薄材及另一薄材熱封合而得之，亦可係藉由黏著 劑將複層薄材及另一薄材接合而得一積層薄材。 [實施例] • <實施例Al> . (1)形成聚醯亞胺樹脂表面層於複合材之一面的複 層薄材 首先，為了獲得氟樹脂及玻璃纖維的複合材，以連續 塗佈裝置將氟樹脂（PTFE)的水性懸浮液含浸且附著於平 織的玻璃纖維（厚度95#m)，以80°C乾燥後，再以35〇 °〇的溫度燒成而得氟樹脂及玻璃纖維的複合材（厚度 // m)。 接著，為了在氟樹脂及玻璃纖維的複合材進行表面活 性化處理，將PTFE樹脂的水性懸浮液1〇〇質量份混合於 二氧化矽的水性懸浮液100質量份，而得表面活性化^理 液。 接著，以連續塗佈裝置將表面活性化處理液塗佈在氣 樹脂及玻璃纖維之複合材的一面，以8〇χ：乾燥後，再以 17 201221348 350°C的溫度燒成，使二氧化矽附著燒成而得表面活性化 處理層。 接著，為了獲得液狀聚醯亞胺清漆，將溶劑（二曱基 乙醯胺（DMAC) 100質量份混合於市面販售的（東麗公 司製的「Toray neece #3000」（商品名））100質量份，而得 黏性50Cp ( centipoise )的液狀聚醯亞胺清漆。 接著，以連續塗佈裝置將上述液狀聚醯亞胺清漆塗 佈、附著於上述氟樹脂及玻璃纖維之複合材（厚度135// m)已表面活性化處理的面，以80°C乾燥後，再以350°C 的溫度燒成，而得一形成聚醯亞胺樹脂表面層於氟樹脂及 玻璃纖維之複合材之一面的複層薄材（厚度140// m)(圖 1 )。 以下列評價方法比較上述所得到的複合材之氟樹脂 層面及複層薄材之聚醯亞胺樹脂層面。評價結果表示於表 1 ° 1) 磨損試驗：根據JIS日本工業標準H8682-1實施。 (使用81^入磨損試驗機，以速度2.4111/分，載重35(^【’ 試驗轉動數1000次，作為對磨材的磨耗輪（abrading wheel)(直徑50mm、寬度12mm)，#4000财水薄膜的條 件測定。） 2) 摩擦係數：根據JIS曰本工業標準K7218實施。（使 用Orientec公司製的摩擦磨損試驗機，以滑動速度 50mm/S，載重20N，試驗時間30分，及使用對磨材SUS304 環測定。） 201221348 用说:)二，角.根據JIS日本工業標準K6768實施。（使 口丨匕學公司製的接觸角計 (contact angle meter) a_df ’且使用_水作為試驗液測定。） 〔表1〕 聚醯亞胺樹脂層面 試驗項目 磨損量（mg)In the general lamination processing of the A sentence disclosed in the document No. 5, the upper chamber and the lower chamber divided by the pressing element such as the diaphragm 201221348 (diaphragm) are provided. The lower chamber has a hot plate for heating the solar battery module to wait for the workpiece, and a transporting thin material for transporting the object to be processed from the outside of the stacking device to the hot plate. The upper chamber has a pressing member such as a diaphragm for pressing the workpiece to be processed. Since the conveyed thin material travels by mounting the object to be processed, friction occurs between the hot plate and the hot plate, so that it is easily damaged by damage or breakage. Further, the contact surface between the hot plate and the conveying thin material is also worn by the friction with the conveying thin material. Therefore, in general, the protective thin material (the above-mentioned hot plate protective thin material) is placed on the upper portion of the hot plate to protect the transported thin material. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. Further, the protective thin material and the transport thin material used for the laminating apparatus for manufacturing a solar cell module have the following problems. By placing the protective thin material on the hot plate, the heat generated in the hot plate is conducted to the workpiece to be processed through the protective thin material and the transport thin material. Therefore, the heat of the object to be processed stacked on the layer is hard to be conducted, and the rate of temperature rise during lamination processing is delayed. As a result, the lamination processing time becomes long, and there is a problem that the production efficiency is lowered. On the one hand, when the takt time of the workpiece is prioritized, the heat required for the lamination processing is insufficient, and the lamination processing degree of the constituent material of the workpiece to be processed, that is, the filler (sealing material) is insufficient (crosslinking) insufficient). In this case, the problem of the quality of the object to be processed or the problem of manufacturing yield 201221348 arises. On the one hand, the thin material is conveyed due to heat resistance, non-adhesiveness, and moisturizing. The same material is used for the same reason, such as the use of a fluorine-containing resin or the like, and the use of a fluorine-containing resin. In the case of the layer Manga 2, the two types of thin materials are closely adhered, and when laminated, the two thin materials are applied, but any thin material is composed of a material containing a gas resin, and thus, It also has the problem of easily bonding to each other. When the first layer 4 finishes the processing j, the hot plate protection thin material and the conveyed thin material which are assembled and fixed to the hot plate are kept bonded, and when the conveyed thin material starts to move in order to carry out the work to be processed, the protective thin material is transported. The thin material is pulled, and the assembly portion of the hot plate protection thin material may be damaged. Also, at the same time, the thin materials may be damaged. SUMMARY OF THE INVENTION The present invention has been made in consideration of the above matters, and a first object thereof is to provide a method for producing a laminated thin material, an endless belt composed of the composite thin material, and an endless belt, which can be obtained well. A thin material having heat resistance, non-adhesiveness, and having desired wear resistance or slip resistance, which is obtained by cutting a thin material into a desired size and using the mold to be circularized without using a mold. Various types of endless belts are manufactured. Further, the present invention has been made in view of the above problems, and a second object of the invention is to provide a heat retaining material and a transporting thin material, which can increase the temperature increase rate during lamination processing and prevent breakage of the protective thin material. Further, a third object is to provide a laminating apparatus using the protective thin material and the transport thin material. In order to achieve the above object, a second 201221348=thin material according to the first invention of the present invention comprises at least one complex layer composed of _lipid and heat-resistant fiber cloth and one composed of polyimide-based resin. Surface layer, 兮; = system: formed by a processing surface formed by surface activation of the composite layer. ^Inventive multi-layer thin material system - invention, the The surface activation treatment includes an inorganic particle adhesion firing treatment, a metal nano-etching treatment, an electric shock discharge treatment, or a corona discharge treatment. The endless belt system of the third invention is formed of the above-mentioned multi-layer thin material. The invention relates to a method for manufacturing an endless belt of the invention. The method for manufacturing the endless belt of the fourth invention is to cut the multi-layered thin material of the first invention into a strip shape; and to bond the multi-layer thin material An annular body is obtained from the two ends. The method for manufacturing the endless belt of the fifth invention is to use the above-mentioned multi-layered thin material and the other-thin material to form a belt. The opposite ends of the multi-layered thin material and the opposite end portions of the other thin material of the ring The ring-shaped body is not joined or brought into close proximity. The hot plate protecting sheet of the sixth invention is applied to a laminating device and is composed of the multi-layered thin material of the first invention or the second invention. According to a sixth aspect of the present invention, in the sixth aspect of the present invention, in the sixth aspect of the present invention, the heat transfer sheet is not attached to the first embodiment of the present invention. According to the invention, the surface on one side in contact with the transporting thin material has a surface layer composed of a polyimide resin. The transport thin material according to the ninth invention is applied to a laminating apparatus and is manufactured by 201221348. According to a ninth aspect of the present invention, in the ninth aspect of the present invention, in the ninth aspect of the present invention, after the lamination processing, a hot plate protective sheet of the laminated layer is not attached at all. In the ninth invention or the tenth invention of the invention, the surface on one side in contact with the hot plate protective thin material has a surface layer composed of a polyimine-based tree. The stacking device uses the sixth to eighth inventions In the laminating apparatus of the thirteenth invention, the laminating apparatus of the thirteenth invention is a laminating apparatus for transporting a thin material according to any one of the ninth to eleventh inventions. Good heat resistance, non-adhesiveness, and multi-layered thin material with abrasion resistance and slip resistance. The surface layer of this multi-layered thin material is a polyimide resin, so it can be applied to the intended use and demand. Non-adhesiveness, abrasion resistance or slip-resistance of performance, etc. Next, according to the present invention, the multi-layer thin material is directly laminated or another thin material is laminated, and then the multi-layer thin material is cut. The strip shape or the laminate of another thin material is cut into a strip shape to form an endless belt of a desired width and length, whereby an endless belt can be obtained, and therefore, the desired width and length of the corresponding use can be easily manufactured. The endless belt is composed of layers, and the width and length of each layer can be prepared before lamination, and these layers are laminated to produce an endless belt. Further, depending on the case, the same multi-layered thin material is not cut, and after forming an endless belt having a wide width, the wide-width endless belt is cut into a desired width, whereby a plurality of sheets can be simultaneously manufactured. An endless belt of the same length. Further, when the endless belt having the wide width is cut in 201221348, by adjusting the width, it is easy to create and distinguish the endless belts having different widths. On the other hand, since the surface layer of the multi-layered thin material can be formed by coating the polyimide-based resin, the surface layer portion is obtained in a thin material in advance, and the surface is laminated as compared with the case of laminating with an adhesive or the like. Since the bonding strength of the layer is high, a multi-layered thin material and an endless belt having excellent strength and durability can be obtained, and the production of the multi-layered thin material or the endless belt can be easily and efficiently performed. By using the multi-layered thin material of the present invention in the hot plate protective thin material of the laminating apparatus and the transporting thin material, the following effects can be obtained. In the lamination process, the conveyance thin material and the hot plate protection thin material are not adhered. Therefore, even if the object to be processed is mounted on the conveyance thin material and traveled after the lamination process, the hot plate protection thin material is not damaged. It can eliminate the adhesion of the hot plate to protect the thin material and the transported thin material, and can improve the wear resistance of the hot plate protection thin material and the transport thin material. Therefore, the life of the hot plate protection thin material and the transport thin material applied to the laminating apparatus is improved, so that the exchange work can be reduced and the productivity of the solar battery module can be improved. Since the hot plate protection thin material and the conveyance thin material after the lamination processing are not attached, even after the lamination process is completed, even if the object to be processed is carried on the conveyance thin material and travels, the two thin materials are not broken, and the heat can be made hot. The thickness of the sheet protection thin material and the conveyed thin material is reduced. Thereby, the hot material is protected from the hot plate by the hot plate, and the thin material is transported to the object to be processed quickly, thereby shortening the layer stacking time of the object to be processed. Therefore, the hot plate protective thin material and the transport thin material of the present invention have good heat conductivity, can accelerate the temperature rise, and can improve the production efficiency of the lamination processing. According to the laminating apparatus of the present invention, since the transporting thin material and the 201221348 hot plate protective thin material are not adhered in the laminating process, even after the lamination processing, the object to be processed is placed on the transporting thin material to protect the thin material in the hot plate. When walking up, the hot plate protects the thin material or transports the thin material without damage or destruction, and the two thin materials can be thinned, so that the thermal conductivity becomes good. Thereby, during the lamination processing, the temperature increase rate of the workpiece to be added can be increased, and the production efficiency of the lamination processing can be improved. Further, since the temperature rise of the lamination processing is insufficient, the lamination processing of the solar cell module is reduced, and the yield of the product is improved. [Embodiment] The multi-layered thin material of the present invention has a composite layer composed of a gas resin and a heat-sensitive fiber woven fabric, and a surface layer composed of a polyimide-based resin, wherein the surface layer is It is formed by a processing surface which is formed by surface-activation of the composite layer. Preferred examples of the multi-layered thin material of the present invention are, for example, the examples described in Figs. The multi-layered thin material 10 of the present invention shown in Fig. 1 has a composite material layer 2 composed of a fluororesin 2a and a heat-resistant fiber woven fabric 2b, and a surface layer 3a composed of a polyimide resin. The multi-layered thin material is formed by a treatment surface 3a formed by surface-activation of the composite layer 2, wherein the surface layer 3a is formed by a treatment surface 4. The multi-layered thin material 11 of the present invention shown in Fig. 2 has a surface layer composed of a polyimide resin on both surfaces thereof, and has a layer composed of a fluororesin 2a and a heat-resistant fiber woven fabric 2b. a composite layer 2 and a multi-layered thin layer of the surface layer 3a composed of a polyimide-based resin, wherein the surface 11 201221348 layer 3 a is formed by a processing surface 4 The composite layer 2 is formed by surface activation treatment. <Composite layer> The composite layer of the multi-layered thin material of the present invention is composed of a fluororesin and a heat-resistant fiber woven fabric. The fluororesin of the present invention is not limited to 'polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP) A heat resistant resin selected from the group consisting of. Among them, polytetrafluoroethylene is particularly preferred. The fluororesin can be blended with a conductive powder as needed. Thereby, conductivity or electrical conductivity can be imparted, and the abrasion resistance can be improved. Preferred specific examples of conductivity are carbon black and titanium oxide (Titanium Oxide). The amount of the fluororesin is preferably 丨 to 5% by mass. In the present invention, the heat-resistant fiber woven fabric is not limited, and is, for example, a glass fiber or an aromatic polyamide fiber. The thickness of the heat-resistant fiber woven fabric is generally 30 to 1000 # m, particularly preferably 30 to 7 〇〇 " m. The composite material layer is preferably formed, for example, by subjecting an aqueous suspension of an acute resin particle to a liquid impregnated (four) thermal fiber woven fabric to be dried and then fired. Tj water-based liquid _ solvent is, for example, water, especially pure water is preferred. The number of fluororesin particles in the suspension is preferably 10 parts by mass relative to the solvent (10 parts by mass), particularly preferably 30 to 60 parts by mass. The composite layer fluororesin of the invention is sufficiently impregnated into the heat resistant phase fiber woven fabric. The surface of the interior, and preferably the woven fabric, is covered by the wall covering 12 201221348 resin. Therefore, the total amount of the heat-resistant fiber woven fabric and the fluororesin is set to 100 parts by mass, and the fluororesin is applied in an amount of from 3 to 70 parts by mass, particularly preferably from 40 to 60 parts by mass. <Surface layer> The multi-layered thin material of the present invention has a surface layer composed of a polyimide pigment. In the present invention, the polyimine-based resin is not limited, and is preferably, for example, a polyimide and a polyimide imide, and particularly preferably a polyimine. When the present invention is formed by coating a surface layer, a liquid phthalimide varnish can be used for easy coating, and a solvent can be used as needed. Thereby, the viscosity can be lowered to improve the coating efficiency. Further, the polyimide resin can be used in combination with a conductive powder as needed. Thereby, for example, conductivity or thermal conductivity or electrical conductivity or thermal conductivity is imparted, and improved wear resistance can be attained. In the formation of the surface layer, the polyimine-based resin may be applied to the surface-activated surface of the composite layer and dried by firing. The firing temperature of the polyimine-based resin is preferably from 300 to 400 Å: particularly preferably from 330 to 37 °C. The thickness of the surface layer can be appropriately determined according to the specific use or purpose of the multi-layered thin material and the endless belt of the present invention. For example, if the composite thin material used in the production of the endless belt which is particularly suitable for the conveying use is represented, the thickness of the surface layer of the polystyrene resin is preferably from 1 to 50/zm, especially from 5 to mJb. 13 201221348 <Surface activation treatment> In the multi-layered thin material of the present invention, the surface layer is formed by a treatment surface formed by surface-activation of the composite layer . Here, the surface activation treatment refers to the surface tension of the fluororesin on the surface of the composite layer of the present invention, so that the fluororesin of the composite layer and the surface layer as the composite thin layer are formed. The polyimine-based resin is a process which can be joined and produces sufficient joint strength. If the surface activation treatment is not carried out, the surface layer composed of the polyimide pigment can not be formed in the composite layer, and the object of the present invention cannot be achieved. As a preferred surface activation treatment of the present invention, for example, a silica particle adhesion baking treatment, a sodium alloy etching (Natrium et Ching) surface treatment, a plasma discharge treatment, and a corona discharge may be used. (corona discharge) treatment or the like, among which, in particular, the cerium oxide particle adhesion baking treatment is preferred. Here, the surface activation treatment of the present invention is as follows in detail. Seven t-cerium oxide particles adhered to the firing treatment: a mixed aqueous suspension of cerium oxide particles and fluorosis is applied to a composite material composed of fluororesin and fibrinous fiber = cloth, and then burned (four) A treatment that enhances the hydrophilicity of the surface of the composite. Metal nano-etching surface treatment: coating the surface of the composite material by coating with a metal sodium solution to enhance the surface of the composite material. The plasma discharge treatment is a treatment in which a surface of a composite material made of a fluororesin and a heat-resistant fiber woven fabric is subjected to a glow discharge treatment to enhance the hydrophilicity of the surface of the composite material. Corona discharge treatment: a treatment in which a surface of a composite material composed of a fluororesin and a heat-resistant fiber woven fabric is subjected to corona discharge treatment to enhance the hydrophilicity of the surface of the composite material. The surface activation treatment is preferably carried out on the entire surface of the surface layer of the composite material layer, but may be carried out on a part of the surface layer formed on the composite material layer. By carrying out this surface activation treatment, the contact angle (the industrial standard HS, K6768) of the pure water droplet on the fluororesin on the surface of the composite layer was remarkably reduced. Before the surface activation treatment, the contact angle is 106 degrees, and the contact angle is 80 to 90 degrees by the adhesion of the cerium oxide particles, and the surface contact angle is 50 to 60 degrees by the metal sodium etching, by plasma The discharge treatment is reduced to 50 to 60 degrees. < Annular Band> The endless belt of the present invention is formed of an annular body of a belt formed of the above-mentioned multi-layered thin material. Therefore, the endless belt of the present invention has good characteristics of the above-mentioned multi-layered thin material, for example, the composite layer mainly formed of a fluororesin and a heat-resistant fiber woven fabric has good heat resistance, shape stability, non-adhesiveness, and durability. Properties, and polyimine-based resins mainly based on the surface layer have various properties (for example, abrasion resistance, heat recovery, and longevity). Next, in the method for producing an endless belt of the present invention, the above-mentioned multi-layered thin material is cut into a strip shape, and the opposite ends of the multi-layered thin material strip are joined to obtain an annular body. Further, the annular body may be, for example, (1) by laminating the thin layer of the end of one end portion of the multi-layer thin layer 15 201221348 material strip (the end of the sheet is overlapped and joined: Λ12) a solid end section of the two ends of the body (Fig. 3 (8)); (3)||by joining the two layers of the bismuth bismuth portion to the same-connecting thin material (Fig. 3(C)) Obtained: the bonding system of the second end can be carried out by heat sealing (1. or using a dispensing agent. Moreover, the manufacturing method of the second ring-ring is to make the above-mentioned multi-layer thin-thin material The laminated strip is obtained by bonding the opposite ends of the laminated thin material of the strip to the other thin material of the strip, respectively or in close proximity to each other. The other thin material of the above-mentioned multi-layered material layer may be, for example, a thin material composed of a single layer or a plurality of layers. Further, the other thin material may be a single layer or a multi-layer thin material. For example, the composite material 2 and the composite thin material 10, u, etc. are also included. Fig. 4 is a view showing a preferred embodiment of the endless belt of the present invention. The endless belt 12 of the present invention shown in the drawing is shown in Fig. Complex The thin material is on the outer peripheral side and the other thin material 5 is on the inner peripheral side, and the other thin material 5 is a thin material having the same content as the above-described five-layered material 2. The annular belt of the present invention is complex. The opposite ends of the layered thin material 1 及 and the opposite ends of the other thin material 5 of the strip are at positions 6 and 7, respectively, and are joined or arranged in close proximity to obtain an annular body. Further, as a preferred embodiment of the endless belt of the present invention, the multi-layered thin material 10 shown in Fig. 1 is also provided on the inner peripheral side, and the other thin material 5 is on the outer peripheral side. The present invention The method of manufacturing an endless belt by using a seamless tubular body made by a conventional mold, the present invention can easily produce an endless belt of a desired width, length, and layer of 201221348 in accordance with the use. According to the case, the same multi-layered thin material is not cut, and the wide-width annular strip is formed, and the wide-width annular strip is cut into a desired width, thereby making it possible to simultaneously manufacture a plurality of lengths of the same length. The endless belt is also easy to make and distinguish the different widths when the width of the endless belt is cut. The endless layer of the present invention is preferably obtained by heat-sealing the multi-layered thin material and another thin material, or by an adhesive. The laminated thin material and the other thin material are joined to form a laminated thin material. [Examples] • <Example Al> (1) A multi-layered thin material which forms a surface layer of a polyimide pigmented resin on one side of a composite material First, in order to obtain a composite material of a fluororesin and a glass fiber, an aqueous suspension of a fluororesin (PTFE) is impregnated with a continuous coating device and adhered to a plain woven glass fiber (thickness: 95 #m), and dried at 80 ° C. Further, it is fired at a temperature of 35 ° C to obtain a composite material (thickness / / m) of a fluororesin and a glass fiber. Next, in order to surface-activate the fluororesin and the glass fiber composite material, the PTFE resin is water-based. One part by mass of the suspension was mixed with 100 parts by mass of an aqueous suspension of cerium oxide to obtain a surface active chemical solution. Next, the surface active treatment liquid is applied to one side of the composite material of the gas resin and the glass fiber in a continuous coating apparatus, and dried at a temperature of 17 201221348 at 350 ° C to be oxidized. The surface-activated layer is obtained by attaching and baking the crucible. Next, in order to obtain a liquid polyimine varnish, a solvent (100% by mass of dimethyl acetamide (DMAC) was mixed and sold in the market (Toray neece #3000 (trade name) manufactured by Toray Industries, Inc.) 100 parts by mass to obtain a liquid polyimine varnish having a viscosity of 50 Cp (centipoise). Next, the liquid polyimine varnish is applied and adhered to the composite of the fluororesin and the glass fiber by a continuous coating device. The surface of the material (thickness 135//m) which has been surface-activated is dried at 80 ° C and then fired at a temperature of 350 ° C to obtain a surface layer of polyiminoimide resin on fluororesin and glass fiber. A multi-layered thin material (thickness: 140/m) on one side of the composite material (Fig. 1). The fluororesin layer of the composite material obtained above and the polyimine resin layer of the multi-layered thin material were compared by the following evaluation methods. The evaluation results are shown in Table 1 ° 1) Abrasion test: It was carried out in accordance with JIS Japanese Industrial Standard H8682-1. (Use 81^ into the wear tester at a speed of 2.4111/min, load 35 (^[' test rotation number 1000 times, as abrading wheel for the abrasive material (diameter 50mm, width 12mm), #4000财水Determination of the conditions of the film.) 2) Coefficient of friction: According to JIS 曰 industrial standard K7218. (Using the friction and wear tester manufactured by Orientec, the sliding speed is 50 mm/s, the load is 20 N, the test time is 30 minutes, and the SUS304 ring is used for the measurement.) 201221348 It is said:) Second, angle. According to JIS Japanese Industrial Standard K6768 implementation. (The contact angle meter a_df ' made by the company and used as the test liquid.) [Table 1] Polyimine resin layer Test item Wear amount (mg)
氟樹脂層面 (PTFE) 0 74 U.18 接觸角（度） 根據上述坪價結果，聚醯亞胺樹脂的耐磨損性優於說 樹脂’而非黏著性、低摩擦性劣於氟樹脂。根據其結果， 可知聚醯亞胺樹脂比氟樹脂難以磨損、滑動。 實施例A1的構造較佳係將氟樹脂面用於非黏著性重 要、止滑性不重要的作業侧，而將聚醯亞胺樹脂面用於耐 磨損性及止滑性重要的作業非接觸側，但不以此為限。 <實施例A2 > (2 )形成聚醯亞胺樹脂表面層於複合材之兩面的複 層薄材 與實施例A1相同而得複層薄材。於此複層薄材的未 形成聚醯亞胺樹脂表面層之一面，與實施例A1相同操作 而進行表面活性化處理及聚醯亞胺樹脂表面層的形成，而 得一形成聚醯亞胺樹脂表面層於複合材之兩面的複層薄 材（厚度145#m)(圖2)。 19 201221348 實施例A2的構造係較佳為使用於耐磨損性、止滑性 重要，而非黏著性不重要之用途，但不以此為限。 <實施例A3> (3)實施例A1之複層薄材與另一薄材的積層薄材， 以及環狀帶 將實施例A1的複層薄材（厚度14〇，）、敦樹脂及 玻璃纖維之複合材（厚度135，）積層，且重叠同為氣 樹脂的層面，再以熱壓機且以35〇。匸的溫度使其熱封合， 以使其為環狀，而得一形成氟樹脂表面層於其一面、聚醯 亞胺樹脂表面層於其另一面的環狀帶（厚度275 # m)(圖 4)〇 此實施例A3之環狀帶的構造較佳係將氟樹脂面用於 非黏著性重要、止滑性不重要的作業側，而將聚醯亞胺樹 脂面用於耐磨損性及止滑性重要的作業非接觸侧的驅動 滾輪侧’但不以此為限。 <實施例A4> (4)將兩牧實施例A1之複層薄材積層、兩面為聚醯 亞胺樹脂的環狀帶 準備兩個實施例A1之複層薄材（厚度μ m )的帶 體’將同為氟樹脂的層面重疊，再以熱壓機且以35〇°c的 溫度使其熱封合而積層，以使其為環狀，而得一形成聚醯 亞胺樹脂表面層於其兩面的環狀帶（厚度280 v m)(圖 4)。 此實施例A4之環狀帶的構造係較佳使用於财磨損 201221348 性、止滑性重要、非黏著性不重要的用途上，但不以此為 限。 如上述實施例A1〜A4，可提供具有财熱性、财磨損 性、非黏著性及止滑性的高機能複層薄材及由此複層薄材 構成的搬送帶，係給予對應所需的非黏著性、耐磨損性、 止滑性，裁切為所需尺寸且利用環狀方式，不須使用模具 而可製造對應各式各樣尺寸的環狀帶。 <比較例A1 > 在實施例A1的複層薄材不進行表面活性化處理而係 塗佈液狀聚醯亞胺清漆，但無法接合，而無法獲得一具有 可使用之充份接合強度的複層薄材。 <實施例C1〜C4> 於實施例A1〜A4中，取代二氧化矽附著燒成處理而藉 由進行金屬鈉蝕刻處理形成表面活性化處理層之外，其他 皆與實施例A1〜A4相同，而得本發明之複層薄材Cl、C2 及環狀帶C3、C4。 〈實施例D1〜D4> 於實施例A1〜A4中，取代二氧化矽附著燒成處理而藉 由進行電漿處理形成表面活性化處理層之外，其他皆與實 施例A1〜A4相同，而得本發明之複層薄材DV、D2及環狀 帶 D3、D4。 <接合強度試驗> 對藉由上述實施例A1〜A4、實施例C1〜C4及實施例 D1〜D4所得到的各複層薄材的聚醯亞胺表面層，根據曰本 21 201221348 工業標準US H5400實施劃格附著力試驗（cross cut adhesion test) ( lmmxl80.39L)，但從複層薄材剝離的方格 數在任何一個複層薄材皆為零。一方面，在未進行表面活 性化處理層的比較例A1中，剝離的方格數為100個。評 價結果表示於表2。 〔表2〕 剝離的方格數 實施例A1 0 實施例A2 0 實施例A3 0 實施例A4 0 比較例A1 100 實施例Cl 0 實施例C2 0 實施例C3 0 實施例C4 0 實施例D1 0 實施例D2 0 實施例D3 0 實施例D4 0 [實施例2] 作為實施例2，針對實施例El、E2、F1及F2於下列 22 201221348 作說明。 實施例2 ’係將本發明之複層薄材使用在製造太陽:能 電池模組時所應用之層疊裝置的熱板保護薄材及搬送薄 材的實施例，且實施例2係使用圖5〜圖13作說明。於實 施例1的作業’相當於實施例2中的太陽能電池模組（圖 13 的「20」）。 如圖5所示，製造太陽能電池模組時所應用的層叠裝 置100的構造’係以上殼體110、熱板122 (參照圖6.)、 搬送薄材130、隔膜112、下殼體120、熱板保護薄材4〇〇 (參照圖6)等而構成。圖6係層疊裝置之層疊部的侧剖 -面圖。圖7係於層疊加工時層疊裝置之層疊部的側剖面圖。 • 如圖6所示，於上殼體110與下殼體120之間，且於 熱板122之表面設有熱板保護薄材4〇〇，於其更上方設有 自由移動的搬送薄材130。在此熱板保護薄材未設置於熱 板上的情況’搬送薄材一邊搭載待加工物2〇 一邊行走於 熱板上，因此’熱板的上面因搬送薄材而磨損。為了防止 這樣的熱板的磨損，而將熱板保護薄材設置在熱板上。 圖13為顯示太陽能電池模組之構成的剖面圖，太陽 能電池模組係使用結晶型單元作為待加工物2〇 ()如圖所 示，太陽能電池模組於透明防護玻璃21與裏面材22之間 且介由填充材23、24,具有嵌夾_列（string) 25的構成。 裏面材22係使用聚乙烯（polyethylene )樹脂等不透明材 料。填充材 23、24 係使用 EVA (ethylene vinyl acetate) 樹脂等。串列25係於電極26、2.7之間，介由導線29而 23 201221348 連接作為結晶型單元的太陽能電池單元28之構成。 搬送薄材130 —邊行走於熱板保護薄材上，一邊從圖 5之搬入傳輸機200接受層疊前的待加工物20，再正確地 搬送至層疊部101之中央位置，即熱板122之中央部。又， 搬送薄材130將層疊後的待加工物20輸送至圖5之搬出 傳輸機300。又，搬送薄材130的構成係與習知的熱板保 護薄材類似，因此，附註（ 400)於圖5、圖6、圖7。 接著，針對藉由本實施態樣之層疊裝置1〇〇而進行的 層疊加工，更具體地說明。首先，如圖6所示，搬送薄材 130將待加工物20搬送至層疊部101之中央位置。 接著，升降裝置（圖未顯示）使上殼體110下降。如 圖7所示，藉由將上殼體110下降，上殼體110與下殼體 120之内部空間被密閉。即，上腔室113及下腔室121分 別於上殼體110及下殼體120之内部可保持密閉狀態。 接著，層疊部101介由上殼體110之吸排氣口 114， 且藉由上腔室113内的真空泵（vacuum pump)進行真空 抽取。同樣地，層疊部101介由下殼體120之吸排氣口 123,且藉由真空泵進行下腔室121内的真空抽取（真空 工序）。藉由將下腔室Π1真空抽取，含於待加工物20内 的氣泡被送出待加工物20外。 待加工物20藉由熱板122加熱，熱板122係藉由溫 度控制裝置的溫度控制加熱，因此，含於待加工物20之 内部的填充材23、24亦加.熱。 接著，層疊部101將下腔室121保持真空狀態，並介 24 201221348 由上殼ituo的吸排氣口 114，導入空氣至上腔室出。藉 此，上腔室113與下腔室⑵之間產生氣壓差，隔膜112 膨脹。因此，如圖7所示，隔膜112突出於下方（加壓工 序）待加工物20藉由突出於下方的隔膜112及熱板m 夾麼，且藉由因加熱㈣化的填充材23、24，接合各構成 元件。 依此，層疊工序結束後，層疊部101介由下殼體120 的吸排氣口 123，導入空氣至下腔室】21。此時，升降裝 置使上殼體110上升。如圖6所示，藉由將上殼體削上 昇’可使搬送薄材130移動。搬送薄材130將層4後的待 加工物20輸送至搬出傳輸機300。 太陽能電池模組的層疊加工係如上述而進行。因此， 從熱板對太陽能電池模組供給指定的熱，而存在於待加工 物即太陽能電池模組20與熱板122之間的習知型的熱板 保邊薄材400及搬送薄材13〇，妨礙熱直接從熱板供給。 更進^層曼加工中，圖7之密接部分κ的熱板保護薄 材及搬达薄材，藉由熱板加熱，更於隔膜與熱板之間被加 壓，使兩薄材成容易附著的狀態。 習知的熱板保護薄材及搬送薄材係使訂、有氣系樹 月曰之構成’或係如圖8 (相當於圖ι及圖2的「2」部分） 斤示纟使用將說系樹脂含浸於藉由玻璃纖維而製織的玻 璃纖維織布（glass cl〇th)，燒成之物。熱板保護薄材及搬 送薄材亦包含同一性質的素材而構成’因此，兩薄材藉由 層疊加工而招致圖7之父部分的附著。以下合併熱板保護 25 201221348 薄材及搬送薄材，稱其為兩薄材。 於層疊加工，為了提升其生產效率，而盡可能地使太 陽能電池模組的升溫速度提高。因此，兩薄材較佳係比熱 低、熱傳導率高，且為薄物。一方面，熱板保護薄材，由 於係搬送薄材一邊搭載待加工物即太陽能電池模組一邊 行走於其上，因此，藉由層疊加工，搬送薄材及熱板保護 薄材一有附著，熱板保護薄材損傷。 又，即使熱板保護薄材本身遭受損傷，搬送薄材招致 損傷。熱板保護薄材的損傷，如上所述，主要係起因於與 搬送薄材的附著而產生。因此，熱板保護薄材之構成，於 熱板側與熱板容易附著，而與搬送薄材不易附著係重要 的。 本發明之熱板保護薄材及搬送薄材，即使於層疊裝置 的層疊加工條件為175°C、O.IMPa，加壓15分鐘左右，兩 薄材未附著。製造太陽能電池模組時所應用的層疊裝置， 係將密封劑即EVA樹脂熔化而交聯，因此，於真空狀態 下，且於指定的溫度、一定時間，於熱板及隔膜之間夾壓 進行。EVA樹脂的交聯大約係從140°C開始，因此，熱板 大約設定為150〜170°C。上述之175°C、O.IMPa、加壓15 分鐘左右的加工條件，係於該層疊加工，對應熱板保護薄 材所接受的溫度、壓力、時間。 本發明之該熱板保護薄材及搬送薄材，係與本發明之 複層薄材相同，設有厚度為數//m左右的聚醯亞胺系樹脂 層（以下稱之聚醯亞胺樹脂）於實施例1所記載之複合層 26 201221348 的表面上。作為複合層，可只有氟樹脂，或係將相當於圖 1及圖2之「2」部的财熱性纖維織布與氟樹脂複合之物亦 可。作為氟系樹月旨，可適當地選自PTFE、FEP、PFA、ETFE 等習知之物。藉由與實施例1之複層薄材相同的製造方法 而可獲得。 又，本發明之熱板保護薄材及搬送薄材係使用在製造 太陽能電池模組時所應用的層疊裝置，其大小從約略數 100mm正方大小〜lmx2m左右的大小，更可係這些以上的 大小。 藉由將本發明之熱板保護薄材及搬送薄材作為上述 之構成，可免除兩薄材的附著。表面的聚醯亞胺樹脂具有 高耐熱性，於層疊加工時以附加的熱條件防止部分的軟 化，具有防止兩薄材附著的效果。 這樣的聚醯亞胺樹脂層，亦可設置於熱板保護薄材及 搬送薄材的兩薄材，設置於任一邊皆可。將這樣的聚醯亞 胺樹脂層設置於熱板保護薄材側時，如圖6所示，係設置 於熱板保護薄材與搬送薄材的接觸面侧。又，將這樣的聚 醯亞胺樹脂層設置於搬送薄材侧時，係設置於搬送薄材的 熱板保護薄材接觸側。藉由這樣的構成，可免除層疊加工 後的熱板保護薄材及搬送薄材的附著，可防止兩薄材的破 損。 作為將聚醯亞胺樹脂層設置於本發明之熱板保護薄 材及搬送薄材的表面的態樣，亦可越過薄材整體而使其均 等分布。又，從防止兩薄材之附著的觀點，如圖9 (a)所 27 201221348 示，熱板保護薄材亦可係聚醯’亞胺樹脂層只設置於與搬送 薄材接觸之面的構成。一方面，如圖9 ( b )所示，搬送薄 材亦可係聚醯亞胺樹脂層僅設置於搬送薄材與熱板保護 薄材接觸之面的構成。藉由這樣的構成，解除熱板保護薄 材與搬送薄材附著的問題。更進一步，在層疊裝置的上殼 體及下殼體如圖7為閉闔的情況，下殼體侧的Ο環與搬送 薄材直接接觸的情況，防止因0環複數次加壓接觸而造成 的磨損損傷也係有效的。 又，圖雖未顯示，亦可係將聚醯亞胺樹脂層設置於搬 送薄材之兩面的構成。藉此，亦可提升搭載搬送薄材之待 加工物的一侧的耐磨損性。更進一步，層疊裝置的上殼體 側亦設有Ο環，而在與搬送薄材直接接觸的情況，防止因 0環複數次加壓接觸而造成的磨損損傷也係有效的。 如圖10所示，於熱板保護薄材及搬送薄材處理的聚 醯亞胺樹脂層，係可適當地選擇，使包含聚醯亞胺樹脂層 之部分於薄材面，條紋狀或島狀地分布在薄材面等方法， 亦可發現在防止附著之特點的效果。 該熱板保護薄材及搬送薄材的厚度較佳係35 /z m〜205 // m，更佳係 70// m~205 // m，又更佳係 85 // m 〜205 # m。 熱板保護薄材之厚度的特點較佳係越薄於35/zm越不阻 礙熱板的熱傳導，但因拉張強度太弱，將該熱板保護薄材 組裝於熱板時，具有破損之虞。又，熱板保護薄材之厚度 超過205 // m時，大大阻礙往待加工物的熱傳導。 以下，藉由實施例E1、實施例E2、比較例E1及比較 28 201221348 例E2,針對本發明之熱板保護薄材及搬送薄材無附著作確 認。 首先，針對本發明之熱板保護薄材及搬送薄材的附著 程度作確認。作為實施例與比較例的熱板保護薄材，係使 用表3之構成。搬送薄材於實施例E1、實施例E2、比較 例E1及比較例E2皆使用習知物的PREMIUM10 (Saint-Gobain股份公司製）。搬送薄材的材質為玻璃纖維 織布及氟樹脂的複合層。 〔表3〕 製造所 型號 厚度 (^ m) 熱板保護 薄材的材質 兩薄材 的附著 實施例E1 Η XGS-P504 CWRA-S 105 玻璃纖維織 布+氟樹脂+ 聚醯亞胺 無附著 實施例E2 Η XGS-P504 RA-S 105 玻璃纖維織 布+氟樹脂+ 聚醯亞胺 無附著 比較例E1 C FGF200-10 220 玻璃纖維織 布+氟樹脂 有附著 比較例E2 C FGF200-6-1 100 玻璃纖維織 布+氟樹脂 有附著 製造所H:本多產業股份公司製造所C:中興化成股份公司 如圖11所示’將熱板保護薄材及搬送薄材重合於加 熱加壓機而安置，再加熱及加壓一定時間，加熱加壓機係 可實現製造太陽能電池模組時所應用的層疊装置的加壓 力及加熱溫度。加熱加壓機係其上側部及下侧部為分開的 構成，上側部及下側部係可分別進行溫度控制，且係施加 指定加壓力的構成。 29 201221348 首先，將本發明之熱板保護薄材置於加熱加壓機之下 側㈣台座。此時並未特別地固定。習知物的搬送薄材組 裝於加熱加壓機之上側部的台座，且以框狀的固定元件固 疋其周圍。接著，—邊將加熱加廢機之上侧部及下侧部控 制為指定溫度—邊以指定的加㈣加壓。加壓條件係上下 台座的溫度皆設定為175t、G1MPa，加Μ 15分鐘。15 分鐘的加壓後，使加熱加壓機的上側台座上升而從下側的 台座離開。此時，本發明之熱板保護薄材與搬送薄材一起 上升時，將保持上升的情況作Α Γ有附著」。絲一起上 升，或係暫時-起上升因重力而自然地落下的情況作為 「未附著」而判定。 結果’實施例E1、實施例E2係「未附著」，比較例 E1及比較例E2係「有附著」。 接著，進打本發明之熱板保護薄材及搬送薄材的熱傳 導性試驗。 預先將熱電偶设置於加熱加壓機之下側部的台座，於 其上放置本發明之熱板保護薄材而加壓。 上侧部的台座設定為而下侧部的台座不条 〇.4MPa加壓20秒。此時，記錄熱電偶顯示的溫度，而將 溫度變化相對的經過時間表示於圖12。 實施例F1係熱板保護薄材與實施例E1相同的素材， 且厚度為105/zm之情況的溫度變化。（圖12中的（1)) 實施例F2係熱板保護薄材與實施例a相同的素材， 且厚度為105/zm之情況的溫度變化。（圖12中的（2)) 201221348 比較例F1係熱板保護薄材與比較例El相同的素材， 且厚度為220//m之情況的溫度變化。（圖12中的（4)) 比較例F2係熱板保護薄材與比較例E2相同的素材， 且厚度為100//m之情況的溫度變化。（圖12中的（3)) 由圖12得知，實施例FI、F2及比較例F2係厚度薄， 因此，溫度上升快，將太陽能電池模組層疊加工時，可將 層疊裝置之熱板的溫度加快傳達至待加工物。又，實施例 F1及實施例F2的溫度上升速度係比使用與習知品相同素 材且厚度相同程度的熱板保護薄材之物還快。比較例F2， 係厚度薄且溫度上升速度快，但層疊加工後的兩薄材有附 著，將待加工物搭載於搬送薄材而使其行走時，熱板保護 薄材破損。一方面，實施例FI、F2，係層疊加工後，本實 施例之熱板保護薄材及搬送薄材未附著，即使將待加工物 搭載於搬送薄材而使其行走時，熱板保護薄材不會破損。 因此，藉由將本發明之熱板保護薄材及搬送薄材使用在製 造太陽能電池模組時所應用的層疊裝置，即使兩薄材的厚 度薄，亦無破損，可縮短太陽能電池模組的積4加工時的 加熱時間，且可提升其生產效率。 【圖式簡單說明】 圖1為顯示本發明之複層薄材之構造的剖面圖； 圖2為顯示本發明之複層薄材之構造的剖面圖； 圖3為顯示本發明之環狀帶之構造的剖面圖； 圖4為顯示本發明之環狀帶之構造的剖面圖； 31 201221348 應用的層疊裝置的概 面圖； 圖5為製造太陽能電池模組時所 略圖； 圖6為層疊裝置的層疊部的側剖 圖為於層疊加工時層曼裝置之層叠部的側剖面圖； 圖8為習知之熱板保護薄材及搬送薄材的說明圖； 圖9為本發明之熱板保護薄材及搬送薄材的說明圖； 圖10為本發明之熱板保護薄材的說明圖； 圖11為評價本發明之熱板倾薄材_著性及熱傳 導性的加熱加壓機的概略圖； 圖12為本發明之熱板保護薄材的熱傳導性的說明 以及 圖13為待加工物的剖面圖。 【主要元件符號說明】 2:複合材層 2a:氟樹脂 2b :耐熱性纖維織布 3a :表面層 4 :處理面 5 .另一薄材 6、7 :端部接合位置 1G ' η :複層薄材 12 :環狀帶 19 :導線 32 201221348 21 :透明防護玻璃 22 :裏面材 23、24 :填充材 25 :串列 26、27 :電極 100 :層疊裝置 101 :層疊部 110 :上殼體 112 :隔膜 113 :上腔室 114、123 :吸排氣口 120 :下殼體 121 :下腔室 122 :熱板 130 :搬送薄材 200 :搬入傳輸機 300 :搬出傳輸機 400 :熱板保護薄材及搬送薄材（習知物） 500 :熱板保護薄材（本發明） 600 :搬送薄材（本發明） K :密接部分 33Fluororesin layer (PTFE) 0 74 U.18 Contact angle (degrees) According to the above-mentioned flat price results, the abrasion resistance of the polyimide resin is better than that of the resin, but the adhesiveness and low friction are inferior to those of the fluororesin. From the results, it was found that the polyimide resin was less likely to be worn and slipped than the fluororesin. The structure of the embodiment A1 is preferably such that the fluororesin surface is used for the non-adhesive property and the slip-resistance is not important, and the use of the polyimide film surface for the wear resistance and the slip resistance is important. Contact side, but not limited to this. <Example A2 > (2) A laminated thin material which forms a surface layer of a polyimide resin on both surfaces of the composite material was obtained in the same manner as in Example A1 to obtain a composite thin material. On the surface of the surface layer of the multi-layered polyimide material on which the polyimine resin was not formed, the surface activation treatment and the formation of the surface layer of the polyimide resin were carried out in the same manner as in Example A1, and a polyimine was formed. The surface layer of the resin was laminated on both sides of the composite (thickness 145#m) (Fig. 2). 19 201221348 The structure of the embodiment A2 is preferably used for abrasion resistance and slip resistance, but not for adhesion, but is not limited thereto. <Example A3> (3) The laminated thin material of the embodiment A1 and the laminated thin material of the other thin material, and the endless belt of the laminated layer of the embodiment A1 (thickness: 14 Å), The composite of glass fiber (thickness 135,) is laminated and overlapped with the layer of the gas resin, and then hot press and 35 〇. The temperature of the crucible is heat-sealed so as to be in a ring shape, and an endless belt (thickness 275 #m) having a surface layer of the fluororesin on one side and a surface layer of the polyimide resin on the other side is obtained ( Fig. 4) The structure of the endless belt of the embodiment A3 is preferably such that the fluororesin surface is used for the non-adhesive important, slip-resistant non-essential working side, and the polyiminoimide resin surface is used for wear resistance. The non-contact side of the drive roller side is important for the purpose of slippage and slippage, but not limited to this. <Example A4> (4) Preparing the multi-layered thin material (thickness μ m ) of the two examples A1 by laminating the multi-layered thin material of the two animal husbandry example A1 and the endless belt of the polyimine resin on both sides The belt body 'will overlap with the layer of the fluororesin, and then heat-sealed and laminated at a temperature of 35 ° C to laminate it so as to form a ring shape, thereby forming a surface of the polyimide film. An endless belt (thickness 280 vm) layered on both sides (Fig. 4). The structure of the endless belt of this embodiment A4 is preferably used for the purpose of the wear and tear of 201221348, the importance of slip resistance, and the non-adhesiveness, but it is not limited thereto. As in the above embodiments A1 to A4, it is possible to provide a high-functional multi-layered thin material having a heat-generating property, a wealth of wear, a non-adhesive property, and a non-slip property, and a conveying belt composed of the laminated thin material, which is required for the corresponding Non-adhesive, abrasion-resistant, slip-resistant, cut to the required size and in an annular manner, it is possible to manufacture endless belts of various sizes without using a mold. <Comparative Example A1 > The layered thin material of Example A1 was coated with a liquid polyimide emulsion without surface activation treatment, but was not bonded, and a sufficient joint strength was not obtained. Multi-layered thin material. <Examples C1 to C4> In Examples A1 to A4, except for the cerium oxide adhesion baking treatment, the surface activation treatment layer was formed by the metal sodium etching treatment, and the others were the same as those of Examples A1 to A4. The multi-layered thin materials Cl, C2 and the endless belts C3 and C4 of the present invention are obtained. (Examples D1 to D4) In the examples A1 to A4, except for the cerium oxide adhesion baking treatment, the surface treatment treatment layer was formed by plasma treatment, and the others were the same as those of the examples A1 to A4. The multi-layered thin materials DV and D2 and the endless belts D3 and D4 of the present invention are obtained. <Joint strength test> The polyimine surface layer of each of the multi-layered thin materials obtained by the above Examples A1 to A4, Examples C1 to C4, and Examples D1 to D4, according to 曰本21 201221348 Industrial The standard US H5400 implements a cross cut adhesion test (lmmxl80.39L), but the number of squares peeled from the laminate is zero in any of the multiple layers. On the other hand, in Comparative Example A1 in which the surface active layer was not subjected to treatment, the number of squares peeled off was 100. The evaluation results are shown in Table 2. [Table 2] Number of squares peeled off Example A1 0 Example A2 0 Example A3 0 Example A4 0 Comparative Example A1 100 Example Cl 0 Example C2 0 Example C3 0 Example C4 0 Example D1 0 Implementation Example D2 0 Example D3 0 Example D4 0 [Example 2] As Example 2, Examples El, E2, F1 and F2 are described in the following 22 201221348. [Embodiment 2] The embodiment of the present invention uses the laminated thin material of the present invention for the hot plate protection thin material and the transport thin material of the laminating apparatus applied when manufacturing the solar cell module, and the embodiment 2 uses FIG. ~ Figure 13 for illustration. The operation in the first embodiment corresponds to the solar battery module in the second embodiment ("20" in Fig. 13). As shown in FIG. 5, the structure of the laminating apparatus 100 applied when manufacturing a solar cell module is the upper casing 110, the hot plate 122 (refer to FIG. 6.), the conveyance thin material 130, the diaphragm 112, the lower casing 120, The hot plate protects the thin material 4 (see Fig. 6) and the like. Fig. 6 is a side cross-sectional view showing a laminated portion of the laminating apparatus. Fig. 7 is a side cross-sectional view showing a laminated portion of a laminating apparatus during lamination processing. As shown in FIG. 6, between the upper casing 110 and the lower casing 120, a hot plate protection thin metal material is disposed on the surface of the hot plate 122, and a freely movable conveying thin material is disposed above the upper surface of the hot plate 122. 130. In the case where the hot plate protection thin material is not provided on the hot plate, the upper surface of the hot plate is worn by the thin material while the thin material is being conveyed while being carried on the hot plate. In order to prevent such hot plate wear, the hot plate protection thin material is placed on the hot plate. 13 is a cross-sectional view showing the configuration of a solar cell module in which a solar cell module is used as a material to be processed, as shown in the drawing, and a solar cell module is disposed on the transparent cover glass 21 and the inner material 22; There is a configuration in which the fillers 23 and 24 have a pinch-string 25 therebetween. The inner material 22 is made of an opaque material such as polyethylene resin. For the fillers 23 and 24, an EVA (ethylene vinyl acetate) resin or the like is used. The series 25 is connected between the electrodes 26 and 2.7, and is connected to the solar battery unit 28 as a crystal unit via the wires 29 and 23 201221348. The conveyance of the thin material 130 is carried out on the hot plate protection thin material, and the workpiece 20 before lamination is received from the carry-in conveyor 200 of FIG. 5, and is conveyed correctly to the center position of the lamination part 101, ie, the hot plate 122. Central Department. Further, the transporting thin material 130 transports the stacked workpieces 20 to the carry-out conveyor 300 of Fig. 5 . Further, the configuration of the conveyance thin material 130 is similar to that of the conventional hot plate protection thin material. Therefore, the notes (400) are shown in Figs. 5, 6, and 7. Next, the lamination processing by the laminating apparatus 1 of the present embodiment will be more specifically described. First, as shown in Fig. 6, the conveyance thin material 130 conveys the workpiece 20 to the center position of the lamination portion 101. Next, a lifting device (not shown) lowers the upper casing 110. As shown in Fig. 7, by lowering the upper casing 110, the inner space of the upper casing 110 and the lower casing 120 is sealed. That is, the upper chamber 113 and the lower chamber 121 are kept in a sealed state from the inside of the upper casing 110 and the lower casing 120, respectively. Next, the lamination portion 101 is vacuum-extracted through the suction and exhaust port 114 of the upper casing 110 and by a vacuum pump in the upper chamber 113. Similarly, the lamination portion 101 passes through the suction and exhaust port 123 of the lower casing 120, and vacuum evacuation in the lower chamber 121 is performed by a vacuum pump (vacuum process). By vacuuming the lower chamber Π1, the bubbles contained in the workpiece 20 are sent out of the workpiece 20. The workpiece 20 is heated by the hot plate 122, and the hot plate 122 is heated by the temperature control of the temperature control device. Therefore, the fillers 23, 24 contained in the interior of the workpiece 20 are also heated. Next, the lamination portion 101 maintains the lower chamber 121 in a vacuum state, and introduces air to the upper chamber through the intake and exhaust port 114 of the upper casing iuo at 201221348. Thereby, a difference in air pressure is generated between the upper chamber 113 and the lower chamber (2), and the diaphragm 112 is expanded. Therefore, as shown in FIG. 7, the diaphragm 112 protrudes downward (pressurization process) by the separator 112 and the hot plate m which are protruded from the lower portion, and by the heating (four) filling materials 23, 24 , joining the constituent elements. As a result, after the lamination process is completed, the lamination unit 101 introduces air into the lower chamber 21 through the intake and exhaust port 123 of the lower casing 120. At this time, the lifting device raises the upper casing 110. As shown in Fig. 6, the transporting thin member 130 can be moved by cutting the upper casing up. The conveyed thin material 130 conveys the workpiece 20 after the layer 4 to the carry-out conveyor 300. The lamination processing of the solar cell module is carried out as described above. Therefore, the hot plate is supplied with the specified heat from the hot plate, and the conventional hot plate edge-preserving thin material 400 and the transfer thin material 13 existing between the solar cell module 20 and the hot plate 122 to be processed are disposed. Oh, it prevents the heat from being supplied directly from the hot plate. In the further processing, the hot plate of the close-contact part κ of FIG. 7 protects the thin material and the thin material, and is heated by the hot plate to be pressurized between the diaphragm and the hot plate, making the two thin materials easy. The state of attachment. The conventional hot plate protects the thin material and transports the thin material so that the composition of the gas tree is the same as that of the moon tree, or as shown in Figure 8 (corresponding to the "2" part of Fig. 1 and Fig. 2). The resin is impregnated with a glass fiber woven fabric made of glass fibers and fired. The hot plate protection thin material and the conveyed thin material also contain materials of the same nature and are constructed. Therefore, the two thin materials are caused to be attached to the parent portion of Fig. 7 by lamination processing. The following combined hot plate protection 25 201221348 Thin material and thin material, called two thin materials. In the lamination process, in order to increase the production efficiency, the heating rate of the solar cell module is increased as much as possible. Therefore, the two thin materials are preferably low in specific heat, high in thermal conductivity, and thin. On the one hand, the hot plate protects the thin material, and the solar cell module, which is a workpiece to be processed, is carried while being transported on the thin material. Therefore, by laminating, the thin material and the hot plate protective thin material are attached. The hot plate protects the thin material from damage. Moreover, even if the hot plate protects the thin material itself from being damaged, transporting the thin material causes damage. The damage of the hot plate protection thin material is mainly caused by adhesion to the conveyed thin material as described above. Therefore, the structure of the hot plate protection thin material is likely to adhere to the hot plate on the hot plate side, and is difficult to adhere to the transfer thin material. In the hot plate protective sheet and the transported thin material of the present invention, even if the laminating processing conditions of the laminating apparatus are 175 ° C and 0.1 MPa, the pressure is about 15 minutes, and the two thin materials are not adhered. The laminating device used in the manufacture of a solar cell module melts and crosslinks the sealant, that is, the EVA resin, and therefore is sandwiched between the hot plate and the separator under a vacuum and at a predetermined temperature and for a certain period of time. . The cross-linking of the EVA resin starts from about 140 ° C, so the hot plate is set to about 150 to 170 ° C. The above-mentioned processing conditions of 175 ° C, O. IMPa, and pressurization for about 15 minutes are based on the lamination process, and the temperature, pressure, and time received by the hot plate protection sheet are determined. The hot plate protective thin material and the transport thin material of the present invention are the same as the multi-layer thin material of the present invention, and are provided with a polyimine-based resin layer having a thickness of about several/m (hereinafter referred to as a polyimide resin). ) on the surface of the composite layer 26 201221348 described in Example 1. The composite layer may be a fluororesin or a composite of a heat-sensitive fiber woven fabric corresponding to the "2" portion of Figs. 1 and 2 and a fluororesin. The fluorine-based tree can be suitably selected from conventional materials such as PTFE, FEP, PFA, and ETFE. It can be obtained by the same manufacturing method as that of the multi-layered thin material of Example 1. Moreover, the hot plate protective thin material and the transport thin material of the present invention are used in a laminating apparatus applied when manufacturing a solar cell module, and the size thereof is about a size of about 100 mm square to a size of about lmx2 m, and more or more. . By using the hot plate protective thin material and the transport thin material of the present invention as the above configuration, the adhesion of the two thin materials can be eliminated. The surface polyimine resin has high heat resistance, prevents partial softening by additional thermal conditions during lamination processing, and has an effect of preventing adhesion of both thin materials. Such a polyimide resin layer may be provided on both the hot plate protective thin material and the two thin materials for transporting the thin material, and may be provided on either side. When such a polyimide resin layer is provided on the side of the hot plate protection sheet, as shown in Fig. 6, it is provided on the contact surface side of the hot plate protection sheet and the conveyance sheet. Moreover, when such a polyimide resin layer is provided on the side of the conveyance thin material, it is provided in the contact side of the hot plate protection thin material which conveys a thin material. According to this configuration, it is possible to eliminate the adhesion of the hot plate protective thin material and the transport thin material after lamination processing, and it is possible to prevent breakage of the two thin materials. The aspect in which the polyimide film layer is provided on the surface of the hot plate protective material and the transported thin material of the present invention can be uniformly distributed over the entire thin material. Moreover, from the viewpoint of preventing the adhesion of the two thin materials, as shown in Fig. 9 (a), 27 201221348, the hot plate protection thin material may be a structure in which the polyimine resin layer is provided only on the surface in contact with the conveyed thin material. . On the other hand, as shown in Fig. 9 (b), the transporting material may be a structure in which the polyimine resin layer is provided only on the surface where the transporting thin material and the hot plate protecting thin material are in contact with each other. With such a configuration, the problem of adhesion between the hot plate protection sheet and the conveyed sheet is released. Further, in the case where the upper casing and the lower casing of the laminating apparatus are closed as shown in FIG. 7, the cymbal ring on the lower casing side is in direct contact with the conveying thin material, and the pressurization of the 0 ring is prevented from being caused by the plurality of pressurizing contacts. The wear damage is also effective. Further, although not shown, the polyimine resin layer may be provided on both sides of the transporting thin material. Thereby, the wear resistance of the side on which the workpiece to be conveyed is conveyed can be improved. Further, the upper casing side of the laminating apparatus is also provided with an ankle ring, and in the case of direct contact with the conveying thin material, it is also effective to prevent abrasion damage caused by the plurality of pressurizing contacts of the O-ring. As shown in FIG. 10, the hot-layer protective thin material and the transported thin-material-treated polyimide resin layer can be appropriately selected so that the portion including the polyimide film layer is on the thin surface, stripe or island. It is also distributed in a thin material surface and the like, and the effect of preventing adhesion is also found. The thickness of the hot plate protection thin material and the transport thin material is preferably 35 /z m~205 // m, more preferably 70//m~205 // m, and more preferably 85 // m 205 205 # m. The thickness of the hot plate protection thin material is preferably such that the thinner than 35/zm does not hinder the heat conduction of the hot plate, but the tensile strength is too weak, and the hot plate protection thin material is damaged when assembled on the hot plate. Hey. Moreover, when the thickness of the hot plate protection thin material exceeds 205 // m, the heat conduction to the workpiece is greatly hindered. Hereinafter, in Example E1, Example E2, Comparative Example E1, and Comparative Example 28 201221348 Example E2, the hot plate protection sheet and the conveyed sheet of the present invention were not confirmed. First, the degree of adhesion of the hot plate protective thin material and the transport thin material of the present invention was confirmed. As the hot plate protection sheets of the examples and the comparative examples, the constitution of Table 3 was used. In the example E1, the example E2, the comparative example E1, and the comparative example E2, PREMIUM 10 (manufactured by Saint-Gobain Co., Ltd.) was used. The material for conveying the thin material is a composite layer of glass fiber woven fabric and fluororesin. [Table 3] Manufacturing model thickness (^m) Material of hot plate protection thin material Attachment of two thin materials Example E1 Η XGS-P504 CWRA-S 105 Glass fiber woven fabric + fluororesin + polyimine without adhesion Example E2 Η XGS-P504 RA-S 105 Glass fiber woven fabric + fluororesin + polyimine without adhesion Comparative example E1 C FGF200-10 220 Glass fiber woven fabric + fluororesin attached Example E2 C FGF200-6-1 100 Glass fiber woven fabric + fluororesin bonded factory H: The manufacturing company of this multi-industry joint-stock company C: ZTE Chemical Co., Ltd. as shown in Fig. 11 'The hot plate protection thin material and the transfer thin material are superposed on the heating press machine. Placement, reheating and pressurization for a certain period of time, the heating and pressing machine can realize the pressing force and heating temperature of the laminating device applied when manufacturing the solar cell module. The heating and pressurizing machine has a configuration in which the upper side portion and the lower side portion are separated, and the upper side portion and the lower side portion are respectively temperature-controlled, and a predetermined pressing force is applied. 29 201221348 First, the hot plate protection sheet of the present invention is placed on the lower (four) pedestal of the heating press. This is not particularly fixed at this time. The transfer sheet of the conventional material is attached to the pedestal on the upper side of the heating press, and is fixed around the frame by a fixing member. Next, while controlling the upper and lower sides of the heating and adding machine to a specified temperature, pressurize with a specified plus (four). The pressurization conditions were set to 175 t, G1 MPa for the upper and lower pedestals, and twisted for 15 minutes. After 15 minutes of pressurization, the upper pedestal of the heating press was raised to separate from the lower pedestal. At this time, when the hot plate protective thin material of the present invention rises together with the transporting thin material, it will remain as it is. The wire is raised together, or it is determined that the rise and fall naturally due to gravity is determined as "not attached". As a result, Example E1 and Example E2 were "not attached", and Comparative Example E1 and Comparative Example E2 were "attached". Next, the thermal conductivity test of the hot plate protective thin material and the transport thin material of the present invention was carried out. The thermocouple was previously placed on the pedestal at the lower side of the heating press, and the hot plate protective sheet of the present invention was placed thereon to be pressurized. The pedestal of the upper side is set so that the pedestal of the lower side is not pressurized for 4 seconds. At this time, the temperature displayed by the thermocouple is recorded, and the elapsed time with respect to the temperature change is shown in Fig. 12. Example F1 was a material having the same material as that of Example E1 and having a thickness of 105/zm. ((1) in Fig. 12) Example F2 is a material having the same material as that of Example a, and having a thickness of 105/zm. ((2) in Fig. 12) 201221348 Comparative Example F1 is a material having the same material as that of Comparative Example E, and having a thickness of 220/m. (4) in Fig. 12 Comparative Example F2 is a material having the same material as that of Comparative Example E2 and having a thickness of 100/m. (3) in Fig. 12 It is understood from Fig. 12 that the examples FI, F2 and the comparative example F2 are thin, so that the temperature rises rapidly, and when the solar cell module is laminated, the hot plate of the laminating device can be used. The temperature is quickly transmitted to the object to be processed. Further, in Examples F1 and F2, the temperature increase rate was faster than that of the hot plate-protecting thin material having the same thickness as the conventional product and having the same thickness. In Comparative Example F2, the thickness of the film was thin and the temperature rise rate was fast, but the two thin materials after lamination processing were attached, and when the object to be processed was mounted on the transporting thin material to travel, the hot plate protection thin material was broken. On the other hand, in the examples FI and F2, after the lamination processing, the hot plate protective thin material and the transport thin material of the present embodiment are not attached, and the hot plate protection thinner is carried out even when the object to be processed is mounted on the transport thin material to be carried. The material will not be damaged. Therefore, by using the hot plate protective thin material and the transport thin material of the present invention in a laminating device applied when manufacturing a solar cell module, even if the thickness of the two thin materials is thin, there is no damage, and the solar cell module can be shortened. The heating time of the product 4 is processed, and the production efficiency can be improved. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing the structure of a multi-layered thin material of the present invention; Fig. 2 is a cross-sectional view showing the structure of a multi-layered thin material of the present invention; and Fig. 3 is a view showing the endless belt of the present invention. Figure 4 is a cross-sectional view showing the structure of the endless belt of the present invention; 31 201221348 an outline view of a lamination device applied; Figure 5 is a schematic view of a solar cell module; Figure 6 is a lamination device A side cross-sectional view of a laminated portion of a layered device during lamination processing; FIG. 8 is an explanatory view of a conventional hot plate protecting thin material and a transporting thin material; FIG. 9 is a hot plate protection of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 10 is an explanatory view of a hot plate protection thin material of the present invention; FIG. 11 is a schematic view of a heat press machine for evaluating a hot plate inclined material of the present invention. Figure 12 is a view showing the thermal conductivity of the hot plate protection sheet of the present invention and Figure 13 is a cross-sectional view of the object to be processed. [Description of main component symbols] 2: Composite material layer 2a: fluororesin 2b: heat-resistant fiber woven fabric 3a: surface layer 4: treated surface 5. Another thin material 6, 7: end joint position 1G ' η: complex layer Thin material 12: endless belt 19: wire 32 201221348 21: transparent cover glass 22: inner material 23, 24: filler 25: tandem 26, 27: electrode 100: lamination device 101: lamination portion 110: upper casing 112 : diaphragm 113 : upper chamber 114 , 123 : intake and exhaust port 120 : lower case 121 : lower chamber 122 : hot plate 130 : transporting thin material 200 : carrying in conveyor 300 : carrying out conveyor 400 : hot plate protection thin Material and transporting thin material (conventional material) 500 : hot plate protection thin material (present invention) 600 : transporting thin material (present invention) K : close contact portion 33