201221251 六、發明說明：201221251 VI. Description of invention:
c 明所屬技系好領J 發明領域 本發明係有關於一種粉體製造裝置。 C j$tr ^fihr U 發明背景 %知，成為鐘離子2次電池之極的材料之粉體等，例如 係藉由將原料水溶液喷霧乾燥且粉體化，且將該等粉體放 入陶瓷谷器在爐内燒成且使熱變性而製造。在如此之方法 中考慮對陶瓷容器之損害，於燒成中必須30分鐘到數小 時：效率杨。又’在如此之方法中為了在將粉體堆積 並靜置的狀Hit行燒成，於燒成時也有所謂粒子間炫著的 广專利文獻卜揭示了—種在將原料水溶液喷霧於具 成丁電漿放電之電極的粉體生成爐内，藉由電製放電 =超高溫的«空間巾，將補水減賴 ^ 切而使融合之㈣製造裝置。 少熱 ^此之_製造裝置㈣出之龍好 瞬間被加熱，粒子㈣=液之液滴在超高溫之電毁空間 發而被破壞之故。、刀—_氣化膨脹，粒子蒸氣爆 又’在如此之粉體製 小，電漿空間内之溫度也有、’一；電漿空間之容積 歧異，所以並 不均，於每個粒子熱歷程大為 k ;製造變性溫度及加熱時間等會大大影 201221251 響品質的粉體。 又，於專利文獻2中，記載有藉由火焰將粉體原料熔融 以製造球狀粒子的裝置。即使是藉由火焰加熱之粉體製造 裝置，由於火焰内部之溫度不均大，所以無法使處理溫度 及處裡時間均勻。 【先行技術文獻】 【專利文獻】 【專利文獻1】特開2004-263257號說明書 【專利文獻2】特開2010-75810號說明書 I：發明内容3 發明概要 【發明所欲解決的課題】 本發明鑑於前述問點題而以提出一種可使在浮游狀態 被處理之粉體的熱歷程均勻的粉體製造裝置為課題。 【用以解決課題之手段】 為了解決前述課題，本發明之粉體製造裝置，係使包 含有於内部形成處理空間的粉體生成爐、具有燃燒器之燃 燒室、將在前述燃燒室所發生之燃燒排氣導入至前述粉體 生成爐的燃燒排氣喷嘴、及配置於前述燃燒排氣喷嘴中且 將原料吹入前述粉體生成爐的原料喷嘴。 藉由此構成，導入至粉體生成爐内之燃燒排氣無不均 地將處理空間之宽廣範圍維持於高溫。利用使原料浮游於 該高溫之燃燒排氣中，而均等地加熱原料並使熱變性。 又，本發明之粉體製造裝置中，也可是前述燃燒排氣 201221251 喷嘴之流路斷面積小於前述燃燒室。 依據该構成，在燃燒室内使流速較低，在狹窄之燃燒 至内進行完全燃燒，且使燃燒排氣喷嘴之燃燒排氣的流速 乃I大，藉以可防止燃燒排氣偏向一側流動，降低溫度 不岣而導入至粉體生成爐内。 又，本發明之粉體製造裝置中，也可是前述燃燒室於 水平方向較長，且前述燃燒器從前述燃燒室之水平方向一 喁於水平方向形成火焰，而前述燃燒排氣噴嘴係從前述燃 t室之他端附近垂直地取出前述燃燒排氣，並直線地導入 至前述粉體生成爐。 藉由該構成，可使燃燒室小型化且縮短燃燒排氣喷嘴 的在路，並可使熱損失最小化。又，由於直角地變更燃燒 挪氣之流動方向，所以可促進燃燒排氣之攪拌而使無溫度 不岣。 又，本發明之粉體製造裝置也可是前述原料喷嘴具有 將前述原料噴霧之原料噴霧喷嘴、及配置成包圍前述原料 噴霧喷嘴且將冷卻空氣吹入至所喷霧之前述原料周圍的冷 卻噴嘴。 依據該構成’可藉由冷卻空氣防止原料在極短時間被 力〇熱，且防止粉體粒子之因蒸氣爆發之破裂，而形成均質 的缸子。 又，本發明之粉體製造裝置中，也可是前述冷卻喷嘴 係由多層管構成，且多層地吹入前述冷卻空氣。 依據該構成，複數冷卻空氣之層形成階段的溫度分 201221251 布，而可階段地使原料升溫，所以更提高防止粉體粒子之 蒸氣爆發的效果。 又，本發明之粉體製造裝置中，也可是前述冷卻喷嘴 具有以冷卻水冷卻之套子。再者，也可是包含有隔著間隙 覆蓋前述套子的外層板。 依據該構成，藉由水冷套而可防止在燃燒排氣喷嘴内 冷卻空氣及原料變成高溫。藉此，可以少的冷卻空氣確實 地防止粉體粒子之蒸氣爆發，以抑制燃燒排氣之稀釋。又， 經由發揮隔熱效果之空氣的層將外層板配設於水冷套之周 圍，藉以抑制冷卻水與燃燒排氣之間的熱交換，所以燃燒 排氣喷嘴内之燃燒排氣的熱損失也小。因此，藉由該構成， 一面維持高熱效率，一面可防止粉體粒子之蒸氣爆發。 圖式簡單說明 第1圖係本發明第1實施形態之粉體製造裝置的概略 圖。 第2圖係第1圖之原料喷嘴的詳細斷面圖。 第3圖係本發明第2實施形態之原料喷嘴的斷面圖。 I：實施方式3 較佳實施例之詳細說明 第1圖係顯示本發明第1實施形態之粉體製造裝置1。粉 體製造裝置1具有粉體生成爐2、燃燒室3、燃燒排氣喷嘴4 與原料喷嘴5，粉體生成爐2係直立筒狀並具有鏡板狀之上 端與縮徑成圓錐狀之下部，且於内部形成隔離的處裡空 間，燃燒室3係圓筒狀並配置於粉體生成爐2之上方且朝水 201221251 平方向延伸，燃燒排氣喷嘴4係連接燃燒室3與粉體生成爐 2，並將燃燒室3内所生成之燃燒排氣從粉體生成爐2之上端 朝下吹入，原料喷嘴5係貫通燃燒室3並配置成延伸至燃燒 排氣喷嘴4之内部，且用以將含有粉體原料之料漿從粉體生 成爐2之上端朝下噴霧。 燃燒室3於一端設有燃燒器6，且從一端朝另一端形成 水平方向之火焰。燃燒器6係可以任意比率供給例如如天然 氣之燃料與燃燒用空氣者，也可具有公知之點火裝置及導 燃器。當然，燃料可以是氣體燃料、液體燃料及固體燃料 之任一者。 燃燒室3可收容燃燒器6所形成之火焰，且使具有使燃 料完全燃燒所必須之最低限度之容積者，所以使其較小者 為佳。因為可使來自燃燒室3之爐壁的熱損失抑制於最低限 度。例如，本實施形態之燃燒室3相對於燃燒器6之燃燒容 量116kW，較佳者為内徑130〜250mm、長度500〜 1000mm，更佳者為具有内徑150〜200mm、長度600〜 800mm之細長形狀。 燃燒排氣喷嘴4係朝與燃燒室3之燃燒器6為相反側之 端部附近開口，且配設成垂直地將燃燒排氣取出，並從喷 霧裝置5之外側直線地吹入到粉體生成爐2。又，燃燒排氣 喷嘴4之流路斷面積較燃燒室3小，較佳者係内徑為70〜 120mm，更佳者係内徑為90〜110mm。藉此，以使熱風喷 嘴4之燃燒排氣的流速為燃燒室3之下流側之流速的1.5倍 到2.5倍者為佳。 201221251 將燃燒排氣從比較上流動慢的燃燒室3取出到流路面 積小的燃燒排氣喷嘴4，藉以在流入到燃燒排氣喷嘴4時， 急遽地提高燃燒排氣的流速。藉由該流速變化，在燃燒室3 内即使於燃燒排氣之溫度有不平均，由於直角地變更燃燒 排氣之流動方向，所以可攪拌燃燒排氣，而使溫度平均。 又，於燃燒排氣喷嘴4内，燃燒排氣被整流成流速大致均勻 之直線的流動，且吹入到粉體生成爐2。 再者，原料喷嘴5之細部顯示於第2圖。原料喷嘴5具有 供給原料料漿且在前端設有噴頭尖端（spray tip)7之原料喷 霧喷嘴8、配設成覆蓋原料噴霧噴嘴8且通過與原料喷霧喷 嘴8之間隙用以將冷卻空氣供給到自原料喷霧喷嘴8喷霧的 原料周圍之冷卻喷嘴9、設於冷卻喷嘴9之外周的水冷套 10、及於水冷套10之外側隔著空隙而配設之外層板11。 冷卻水於水冷套10循環，水冷套10内之冷卻水溫度約 保持在50°c。由於水冷套10與外層板11之間的空氣係作為 隔熱層，曝露於約1200°C燃燒排氣之外層板11裏面的溫度 成為約960°C，然而水冷套10與燃燒排氣之間的熱交換量為 一點點。因此，相較於無外層板11燃燒排氣直接接觸於水 冷套10之外面的情況，燃燒排氣被原料喷嘴8奪去的熱量非 常小。是故，雖常溫之空氣供給至冷卻喷嘴9 ’然而’在溫 度幾乎未上升之情況下，吹入粉體生成爐2。藉此’防止剛 喷霧後之原料液滴的蒸氣爆發之效果變高。 冷卻空氣覆蓋自原料喷霧喷嘴8喷霧之原料，而原料液 滴直接暴露於高溫(例如1200°C)之燃燒排氣，並瞬時升溫以 201221251 使水分爆發地蒸發，藉以防止粒子被破壞。 若使原料液滴之溫度上升稍微延遲，則可防止粒子的 破壞’所以冷卻空氣為了燃燒排氣之稀釋，以少量為佳， 且相對於燃燒排氣190m3N/h，以5〜20 m3N/h者為佳，1〇〜 15 m3N/h者更佳。又，因為冷卻空氣只覆蓋剛噴霧後之原 料液滴便可，所以其流速較燃燒排氣慢者即可，在本實施 形態中，為燃燒排氣之流速的40%左右。 原料料漿之蒸發潛熱比起燃燒排氣之熱量不過是數百 分比’所以燃燒排氣在將原料液滴的水分全部蒸發後也可 充分保持高溫。因此’在使乾燥原料液滴後的粒子浮游於 高溫之燃燒排氣的狀態’再藉由燃燒排氣加熱到所希望的 溫度(在本實施形態中為700〜1200。〇，而可進行熔融、燒 成、發泡化及熱變性等被要求之熱處理。 於本實施形態中，由於燃燒排氣在粉體製造塔2内之寬 廣範圍形成大略均勻的高溫環境，所以於粉體粒子的熱歷 程中不均勻變少而可進行均質的熱處理。又，由於在分散 浮游於燃燒排氣中的狀態將粉體加熱至高溫’所以粒子間 不生干擾，粒子形狀便成均勻。 又，於本實施形態中，原料噴嘴5也可是使粉體與空氣 一起將原料粉體吹入到粉體生成爐2内者。此時，由於不須 擔心蒸氣爆發所產生之粉體粒子的破壞，所以可省略冷卻 噴嘴9、水冷套1〇、及外層板11。 接著，第3圖係顯示可替代第1實施形態之原料喷嘴5使 用之本發明第2實施形態的原料噴嘴21。本實施形態之原料 201221251 喷嘴21係具有供給原料漿料且於前端設有噴射尖端22的原 料喷霧喷嘴23、配設成覆蓋原料喷霧喷嘴23且用以通過與 原料喷霧喷嘴23的間隙將冷卻空氣供給到自原料喷霧噴嘴 23喷霧之原料的周圍之第丨冷卻喷嘴24、及配設成再覆蓋第 1冷卻喷嘴24且通過與第丨冷卻喷嘴24的間隙將額外的冷卻 空氣供給到自第1冷卻喷嘴24所供給之冷卻空氣的外側之 第2冷卻喷嘴25。 如此，利用使冷卻喷嘴多層，而可形成溫度階段地變 化之複數冷卻空氣的層。藉此，藉由少的冷卻空氣而可防 止燃燒室3及燃燒排氣噴嘴4内之原料噴嘴23的溫度上升， 以及剛喷霧後之原料液滴之瞬間升溫所產生之蒸氣爆發。 L圖式簡單說明3 第1圖係本發明第1實施形態之粉體製造裝置的概略 圖。 第2圖係第1圖之原料喷嘴的詳細斷面圖。 第3圖係本發明第2實施形態之原料喷嘴的斷面圖。 【主要元件符號説明： 1 1..·粉體製造裝置 8…原料喷霧喷嘴 2...粉體生成爐 9...冷卻喷嘴 3...燃燒室 10···水冷套 4…燃燒排氣喷嘴 11...外層板 5··.原料噴嘴 21…原料喷嘴 6··.燃燒器 22…喷射尖端 7…喷頭尖端 23…原料噴霧喷嘴 201221251 24.. .第1冷卻喷嘴 25.. .第2冷卻喷嘴C FIELD OF THE INVENTION The present invention relates to a powder manufacturing apparatus. C j$tr ^fihr U BACKGROUND OF THE INVENTION It is known that a powder of a material which is a pole of a secondary battery of a secondary ion is sprayed and dried, for example, by powdering an aqueous solution of the raw material, and the powder is placed. The ceramic grain is fired in a furnace and thermally denatured. In such a method, damage to the ceramic container is considered, and it takes 30 minutes to several hours in the firing: efficiency Yang. In addition, in such a method, in order to burn a powder in which a powder is piled up and left to stand, a wide-ranging method in which particles are scattered during firing is disclosed in the patent document. In the powder generating furnace of the electrode of the plasma discharge, the fused water is reduced by the electric discharge=ultra-high temperature «space towel, and the fused (4) manufacturing device is used. Less heat ^This _ manufacturing device (four) out of the dragon is good to be instantly heated, particles (four) = liquid droplets in the ultra-high temperature of the electric damage caused by the destruction. Knife--gasification expansion, particle vapor explosion and 'in such a small powder system, the temperature in the plasma space also has, 'one; the volume of the plasma space is different, so it is not uniform, in the thermal history of each particle Larger k; manufacturing denaturation temperature and heating time will greatly affect the 201221251 ring quality powder. Further, Patent Document 2 describes an apparatus for melting a powder raw material by a flame to produce spherical particles. Even in the powder manufacturing apparatus which is heated by the flame, since the temperature inside the flame is not uniform, the processing temperature and the time in the inside cannot be made uniform. [PRIOR ART DOCUMENT] [Patent Document 1] JP-A-2004-263257 [Patent Document 2] JP-A-2010-75810 Specification I: SUMMARY OF THE INVENTION SUMMARY OF THE INVENTION [Problems to be Solved by the Invention] The present invention In view of the above-mentioned problems, it has been proposed to provide a powder manufacturing apparatus which can make the heat history of the powder processed in a floating state uniform. [Means for Solving the Problems] In order to solve the above problems, the powder producing apparatus of the present invention is a powder generating furnace including a processing space formed therein, a combustion chamber having a burner, and a combustion chamber to be generated in the combustion chamber. The combustion exhaust gas is introduced into a combustion exhaust nozzle of the powder generating furnace, and a raw material nozzle disposed in the combustion exhaust nozzle and blowing the raw material into the powder generating furnace. According to this configuration, the combustion exhaust gas introduced into the powder generating furnace maintains a wide range of the processing space at a high temperature without unevenness. The raw material is heated and denatured by heating the raw material in the high-temperature combustion exhaust gas. Further, in the powder producing apparatus of the present invention, the cross-sectional area of the nozzle of the combustion exhaust gas 201221251 may be smaller than the combustion chamber. According to this configuration, the flow velocity is made low in the combustion chamber, and the combustion is completed in the narrow combustion, and the flow velocity of the combustion exhaust gas of the combustion exhaust nozzle is made large, thereby preventing the combustion exhaust gas from flowing toward one side and lowering. The temperature is not introduced and introduced into the powder generating furnace. Further, in the powder producing apparatus of the present invention, the combustion chamber may be long in a horizontal direction, and the burner may form a flame in a horizontal direction from a horizontal direction of the combustion chamber, and the combustion exhaust nozzle may be from the foregoing The combustion exhaust gas is taken out vertically near the other end of the burning chamber, and is introduced linearly into the powder generating furnace. According to this configuration, the combustion chamber can be miniaturized and the path of the combustion exhaust nozzle can be shortened, and heat loss can be minimized. Further, since the flow direction of the combustion gas is changed at a right angle, the agitation of the combustion exhaust gas can be promoted so that there is no temperature. Further, in the powder producing apparatus of the present invention, the raw material nozzle may have a raw material spray nozzle that sprays the raw material, and a cooling nozzle that is disposed to surround the raw material spray nozzle and that blows cooling air around the sprayed raw material. According to this configuration, the raw material can be prevented from being heated by the cooling air for a short period of time, and the powder particles are prevented from being broken by the vapor burst, thereby forming a homogeneous cylinder. Further, in the powder producing apparatus of the present invention, the cooling nozzle may be formed of a multilayered tube, and the cooling air may be blown into a plurality of layers. According to this configuration, the temperature of the layer forming stage of the plurality of cooling air is divided into 201221251, and the temperature of the raw material can be raised stepwise, so that the effect of preventing the vapor burst of the powder particles is further enhanced. Further, in the powder producing apparatus of the present invention, the cooling nozzle may have a jacket cooled by cooling water. Furthermore, an outer layer plate covering the cover may be included with a gap therebetween. According to this configuration, it is possible to prevent the cooling air and the raw material from becoming high in the combustion exhaust nozzle by the water jacket. Thereby, it is possible to prevent the vapor burst of the powder particles from being reliably prevented by the cooling air to suppress the dilution of the combustion exhaust gas. Further, the outer layer plate is disposed around the water-cooling jacket through a layer of air that exhibits a heat insulating effect, thereby suppressing heat exchange between the cooling water and the combustion exhaust gas, so that heat loss of the combustion exhaust gas in the combustion exhaust nozzle is also small. Therefore, with this configuration, it is possible to prevent vapor burst of the powder particles while maintaining high heat efficiency. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a powder manufacturing apparatus according to a first embodiment of the present invention. Fig. 2 is a detailed sectional view of the raw material nozzle of Fig. 1. Fig. 3 is a cross-sectional view showing a material nozzle according to a second embodiment of the present invention. I. EMBODIMENT 3 DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Fig. 1 shows a powder manufacturing apparatus 1 according to a first embodiment of the present invention. The powder manufacturing apparatus 1 includes a powder generating furnace 2, a combustion chamber 3, a combustion exhaust nozzle 4, and a material nozzle 5, and the powder generating furnace 2 has an upright cylindrical shape and has a mirror-shaped upper end and a conical lower portion. Further, an isolated space is formed inside, and the combustion chamber 3 is cylindrical and disposed above the powder generating furnace 2 and extends in the horizontal direction of the water 201221251. The combustion exhaust nozzle 4 is connected to the combustion chamber 3 and the powder generating furnace. 2, the combustion exhaust gas generated in the combustion chamber 3 is blown downward from the upper end of the powder generating furnace 2, and the raw material nozzle 5 is passed through the combustion chamber 3 and arranged to extend into the inside of the combustion exhaust nozzle 4, and is used The slurry containing the powder raw material is sprayed downward from the upper end of the powder generating furnace 2. The combustion chamber 3 is provided with a burner 6 at one end, and a horizontal flame is formed from one end toward the other end. The burner 6 can be supplied to, for example, a natural gas fuel and a combustion air at an arbitrary ratio, and can also have a known ignition device and a pilot burner. Of course, the fuel may be any of a gaseous fuel, a liquid fuel, and a solid fuel. The combustion chamber 3 can accommodate the flame formed by the burner 6 and has a minimum volume necessary for the combustion of the fuel to be completely reduced, so that it is preferably smaller. This is because the heat loss from the furnace wall of the combustion chamber 3 can be suppressed to a minimum. For example, the combustion chamber 3 of the present embodiment has a combustion capacity of 116 kW with respect to the burner 6, preferably an inner diameter of 130 to 250 mm, a length of 500 to 1000 mm, and more preferably an inner diameter of 150 to 200 mm and a length of 600 to 800 mm. Slender shape. The combustion exhaust nozzle 4 is opened toward the vicinity of the end opposite to the burner 6 of the combustion chamber 3, and is disposed to vertically take out the combustion exhaust gas and blow it linearly from the outside of the spray device 5 to the powder. Body formation furnace 2. Further, the cross-sectional area of the flow path of the combustion exhaust nozzle 4 is smaller than that of the combustion chamber 3. The inner diameter is preferably 70 to 120 mm, and more preferably the inner diameter is 90 to 110 mm. Thereby, it is preferable that the flow rate of the combustion exhaust gas of the hot air nozzle 4 is 1.5 times to 2.5 times the flow rate of the flow side below the combustion chamber 3. 201221251 The combustion exhaust gas is taken out from the combustion chamber 3 which is relatively slow in flow to the combustion exhaust nozzle 4 having a small flow surface area, whereby the flow velocity of the combustion exhaust gas is sharply increased when flowing into the combustion exhaust nozzle 4. By the change in the flow velocity, even if the temperature of the combustion exhaust gas is uneven in the combustion chamber 3, since the flow direction of the combustion exhaust gas is changed at a right angle, the combustion exhaust gas can be stirred to average the temperature. Further, in the combustion exhaust nozzle 4, the combustion exhaust gas is rectified into a straight line flow having a substantially uniform flow velocity, and is blown into the powder generating furnace 2. Further, the details of the material nozzle 5 are shown in Fig. 2. The raw material nozzle 5 has a raw material spray nozzle 8 that supplies a raw material slurry and has a spray tip 7 at its tip end, and is disposed to cover the raw material spray nozzle 8 and is provided with a gap between the raw material spray nozzle 8 and the cooling air. The cooling nozzle 9 supplied to the periphery of the raw material sprayed from the raw material spray nozzle 8, the water-cooling jacket 10 provided on the outer periphery of the cooling nozzle 9, and the outer layer plate 11 are disposed outside the water-cooling jacket 10 with a gap interposed therebetween. The cooling water is circulated in the water jacket 10, and the temperature of the cooling water in the water jacket 10 is maintained at about 50 °C. Since the air between the water jacket 10 and the outer panel 11 serves as a heat insulating layer, the temperature exposed to the inside of the laminate 11 outside the combustion exhaust gas at about 1200 ° C becomes about 960 ° C, but between the water jacket 10 and the combustion exhaust gas The amount of heat exchange is a little bit. Therefore, the amount of heat that the combustion exhaust gas is taken up by the raw material nozzle 8 is extremely small as compared with the case where the combustion exhaust gas without the outer layer 11 directly contacts the outer surface of the water jacket 10. Therefore, although the air at normal temperature is supplied to the cooling nozzle 9', however, the powder generating furnace 2 is blown when the temperature is hardly increased. Thereby, the effect of preventing the vapor burst of the raw material droplets immediately after the spraying becomes high. The cooling air covers the raw material sprayed from the raw material spray nozzle 8, and the raw material liquid droplet is directly exposed to the combustion exhaust gas at a high temperature (for example, 1200 ° C), and is instantaneously heated to evaporate the moisture outbreak at 201221251, thereby preventing the particles from being destroyed. If the temperature rise of the raw material droplets is slightly delayed, the destruction of the particles can be prevented. Therefore, the cooling air is preferably a small amount for the dilution of the combustion exhaust gas, and is 5 to 20 m 3 N/h with respect to the combustion exhaust gas of 190 m 3 N/h. It is better, 1〇~15 m3N/h is better. Further, since the cooling air covers only the droplets of the raw material immediately after the spraying, the flow rate may be slower than that of the combustion exhaust gas. In the present embodiment, it is about 40% of the flow rate of the combustion exhaust gas. The latent heat of vaporization of the raw material slurry is only a few hundredths of a ratio of the heat of the combustion exhaust gas. Therefore, the combustion exhaust gas can sufficiently maintain the high temperature after evaporating the moisture of the raw material droplets. Therefore, 'the state in which the particles after drying the raw material droplets float on the high-temperature combustion exhaust gas' is further heated to a desired temperature by the combustion exhaust gas (in the present embodiment, it is 700 to 1200. Heat treatment required for firing, foaming, thermal denaturation, etc. In the present embodiment, since the combustion exhaust gas forms a substantially uniform high temperature environment in a wide range in the powder manufacturing tower 2, the heat of the powder particles In the course of the process, the unevenness is reduced and the homogeneous heat treatment can be performed. Moreover, since the powder is heated to a high temperature in a state of being dispersed and floating in the combustion exhaust gas, the particles are not disturbed and the particle shape is uniform. In the embodiment, the raw material nozzle 5 may blow the raw material powder into the powder generating furnace 2 together with the air. In this case, since it is not necessary to worry about the destruction of the powder particles due to the vapor burst, The cooling nozzle 9, the water jacket 1 and the outer layer 11 are omitted. Next, Fig. 3 shows a material nozzle 21 according to the second embodiment of the present invention which can be used in place of the material nozzle 5 of the first embodiment. In the form of the raw material 201221251, the nozzle 21 has a raw material spray nozzle 23 that supplies a raw material slurry and has a spray tip 22 at the tip end, and is disposed to cover the raw material spray nozzle 23 and is cooled by a gap with the raw material spray nozzle 23. The air is supplied to the second cooling nozzle 24 around the raw material sprayed from the raw material spray nozzle 23, and is disposed to re-cover the first cooling nozzle 24 and supply additional cooling air to the gap between the second cooling nozzle 24 and the second cooling nozzle 24 The second cooling nozzle 25 on the outer side of the cooling air supplied from the first cooling nozzle 24. Thus, by forming a plurality of cooling nozzles, a layer of a plurality of cooling air whose temperature is gradually changed can be formed. The air can prevent the temperature rise of the raw material nozzles 23 in the combustion chamber 3 and the combustion exhaust nozzle 4, and the vapor burst generated by the instantaneous temperature rise of the raw material droplets immediately after the spraying. L. Simple description 3 Fig. 1 Fig. 2 is a detailed sectional view of a raw material nozzle of Fig. 1 and Fig. 3 is a cross section of a raw material nozzle according to a second embodiment of the present invention. Fig. [Description of main component symbols: 1 1. Powder manufacturing device 8... Raw material spray nozzle 2... Powder generating furnace 9... Cooling nozzle 3... Combustion chamber 10···Water cooling jacket 4 ...combustion exhaust nozzle 11...outer plate 5··.feeding nozzle 21...feeding nozzle 6··.burner 22...injection tip 7...head tip 23...feeding nozzle 201221251 24.. .1st cooling nozzle 25.. .2nd cooling nozzle