TW201214073A - A display program by moving graphs in group - Google Patents

Abstract

Provided is a technology for accurately analyzing a measurement value using a first graph line representing the measurement value and a second graph line representing a control signal. The first and second graph lines specified by the same file name are associated with each other, and when a desired graph line is selected from the first graph lines (134a, 134c, 134d) of the measurement values displayed on a screen (100) and the second graph lines (144a, 144c, 144d), and the selected graph line is determined as a movement target, the associated first and second graph lines are moved together. Accordingly, the relationship between the first graph line for the measurement value and the second graph line representing the timing chart can be maintained after the movement, and thus, an analysis error does not occur.

Description

201214073 VI. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to the technical field of vacuum processing apparatuses, and more particularly to mass production techniques using vacuum processing apparatus. [Prior Art] The vacuum processing technology includes a sputtering method, a CVD method, an evaporation method, and the like, or an etching technique, a surface modification technique, an impurity injection technique, a vacuum drying technique, and the like, and is used in a wide range of fields. When a product is mass-produced by a vacuum processing technique, most of the processing objects of the same specification are subjected to the same vacuum treatment. However, even if the manufacturing conditions are the same, the quality of the vacuum processing apparatus or the state of the pretreatment is different. The difference is a very common situation. In the case where the quality is very different, it is important to analyze the cause of the large difference, and to prevent the recurrence of manufacturing engineering management. In actual production, the temperature or pressure of the vacuum processing device during the operation is also measured. The time required for power or processing, etc., and the measurement results are compared and verified between batches. In particular, when the measurement results obtained from the vacuum processing apparatus are compared between batches or between vacuum processing apparatuses, the measurement result measured at the time of product production is given a file name by knowing which vacuum processing apparatus or batch is known. The measurement results were patterned and their morphology was compared. [Previous Technical Literature]

[Patent Document] [Patent Document 1] Japanese Laid-Open Patent Publication No. 2009-80844 [Explanation] [Problems to be Solved by the Invention] However, the device to be measured in the vacuum processing apparatus increases the number of items to be measured. The types of physical quantities have also increased, and it is difficult to pattern most batches, so a program or an analysis device that can perform a simple comparison is sought. [Means for Solving the Problem] In order to solve the above problems, the present invention provides a vacuum processing apparatus for vacuum-treating a processing object to be processed in a vacuum chamber, and a plurality of measurement electrodes for transmitting the information by the processing device, and the measurement of the measurement target a computing device that performs a correspondence with the vacuum processing and memorizes the memory of the memory device, a display device that calculates the memory content of the memory device, and a display device that operates the vacuum processing device And the control signal for including the operation stop signal as the number of signals, and is recorded in the memory device in response to the measurement; the operation start time of the operation signal _, and the stop time when the operation start signal is stopped The display program of the measurement unit in the analysis device of the memory device is characterized in that the measurement, the operation start time, and the operation stop time are converted into or between the measurement orders Assignment at the time of vacuum setting, reading and displaying the empty processing stop At the time of the start, the calculation time is converted from the time of the -6 - 201214073 reference time, and the conversion time is calculated when the operation is started. The size of the measurement 换算 is converted into the distance in the vertical direction of the drawing. The converted time is converted into a horizontal distance from the position on the screen at the time of the reference, and the measurement point having the measurement time measurement time is displayed on the screen to display the first map from the measurement signal and the operation The converted time and the stop conversion time are displayed on the front side based on the position of the reference time, and the first 'second' obtained by the same vacuum processing of the 値 and the measurement signal respectively The line is first assigned, so that the first and second lines in the foregoing can be selected, and the desired first and second lines are assigned to the associated first or second line, and when selected, the two sides are selected. In order to move the object, it is possible to input the shift in the horizontal direction, and convert the amount of movement into the horizontal direction on the screen to move the object first. FIG two lines on the display screen the program moves to the horizontal. The present invention is a display program in which the first moving object and the second drawing are arranged in a plurality of mutually associated moving objects. The present invention is a display program in which the measurement line that can be moved on the screen and intersects with the first line is displayed on the screen, and the measurement point of the intersection of the measurement lines of the first graph is displayed. The present invention is a display program in which a measurement line that can be moved on the screen and intersects with the first line is displayed on the screen, and the control signal is displayed at the intersection of the measurement lines in the second figure. Any of the above display programs are memorized in the above-mentioned recording and moving surface and the front line; the motion description is measured and the first-party momentum is moved to make the moving direction and the off-line and the second line and > billion installed s 201214073 Set up the analysis device. [Effects of the Invention] Since the first graph on which the measurement 値 is displayed on the screen is moved by the same distance on the X-axis as the second graph on which the control signal corresponding to the measurement 显示 is displayed, the measurement can be maintained. The relative relationship between 値 and control signals prevents analysis errors. [Embodiment] FIG. 1 is an example of a vacuum processing apparatus according to the present invention, and includes a vacuum processing unit 20 and a control unit 21 » Vacuum processing unit 20, and has a vacuum chamber 11 in which a processing object is provided in the vacuum chamber 11. The processing group 23 of the vacuum processing of the substrate. The processing group 23 includes a plurality of processing apparatuses, and the processing apparatus includes a vapor deposition source 34 disposed on the bottom surface of the vacuum chamber 11, an EB (electron beam) gun 33 that irradiates the vapor deposition source 34 with an electron beam, and is disposed in the processing apparatus. The holding device 31 above the vapor deposition source 34 and the heater 32 disposed inside the holding device 31. Reference numeral 15 in Fig. 1 denotes a substrate to be processed, and the film formation surface is held by the holding device 31 so as to face the vapor deposition source 34. The peripheral device group 24 and the control unit 21 are disposed outside the vacuum chamber 11. The peripheral machine group 24 has a plurality of peripheral devices. Here, the peripheral device includes a vacuum exhaust system 36, a gas introduction system 37, a heater power source 38, and a vapor deposition power source 39. The vacuum exhaust system 36 and the gas introduction system 37 are connected to the vacuum chambers 11 -8 - 201214073, and the vacuum exhaust system 36 can be operated to evacuate the inside of the vacuum chamber 1 1 so that the gas introduction system 37 can be operated to the vacuum. A gas such as a reactive gas is introduced into the inside of the tank 11 by the gas introduction system 37, and for example, reactive vapor deposition can be performed. The heater power source 38 and the vapor deposition power source 39 are connected to the heater 32 and the EB gun 33, respectively, and the heater power source 38 and the vapor deposition power source 39 supply electric power to the heater 32 and the EB gun 33, respectively. The heater 32 generates heat by the supplied electric power, and the holding device 31 is heated to heat the substrate 15 in a vacuum atmosphere. The EB gun 33 irradiates the vapor deposition source 34 with an electron beam by the supplied electric power, heats the vapor deposition material disposed in the vapor deposition source 34, and discharges the vapor of the vapor deposition material in a vacuum atmosphere in the vacuum chamber 11. This vapor is applied to the substrate 15 in a vacuum atmosphere or a reaction gas atmosphere to form a film on the film formation surface. In the peripheral device group 24, the processing device included in the processing device group 23 is mounted with a sensor portion, and includes a measuring device for measuring physical quantities such as temperature measurement or pressure measurement, and includes a power supply for the heater 38. Or a measuring device for measuring a physical quantity such as a current or a voltage inside the vapor deposition power source 39 or the like. In the peripheral device group 24, the pressure in the vacuum chamber 11 measured by the peripheral device of the peripheral device group 24, the temperature of the substrate I5, the amount of gas introduced, the amount of current flowing to the heater 32, the electric power supplied to the EB gun 33, and the like. The measurement enthalpy or the like is generated, and the measurement 値 is measured in accordance with the measurement time at which the measurement enthalpy is measured, and is input to the control unit 21 by the peripheral device group 24. In the control unit 21, the sequence device 41 and the analysis device 40 are arranged, by the week

S -9 - 201214073 The measurement 输入 and measurement time input by the side machine group 24 are input to the analysis device 40 through the transmission sequence device 4 1 . The analysis device 40 includes the calculation device 42, the memory device 43, and the display device 44, and the measurement UI input thereto is stored in the memory device 43 together with the measurement time. When the vacuum processing of the substrate 15 is completed in the vacuum chamber 11, the vacuum-treated substrate 15 is carried out to the outside of the vacuum chamber 11, and the unprocessed substrate is carried in and subjected to vacuum processing. A plurality of substrates continuously vacuum-treated under the same conditions belong to one batch, and each batch is given a different batch number, and the vacuum-processed substrate is divided into batch numbers so that the measurement 値 is memorized together with the batch number. In the memory device 43. In the file name, including the batch number or batch name, etc., the batch display can be distinguished. In addition, in a batch, different vacuum treatments can also distinguish vacuum treatment in a distinguishable manner, including the vacuum processing number. Representation. That is, the measurement 値 can be assigned a correspondence between the file name and the contents of the batch and the vacuum processing to understand the processed content. On the other hand, in the sequence device 41, the step of operating the vacuum processing unit 20 by the sequence device 41 is output to the peripheral device group 24 or the processing device group 23 by the sequence device 41, and the peripheral device is started and stopped at the same time as the output control operation. The group 24 or the processing unit 23 operates to control the vacuum signal. The control signal includes at least an operation signal for causing the peripheral device group 24 and the processing device group 23 to operate, and a stop signal for stopping the operation. -10- 39 201214073 control signal for the peripheral device 36 included in the peripheral device group 24 Or the processing machines 31 to 34 included in the processing machine group 23 output, and also analyze the output of the device 40. Further, the sequence device 41, at the analysis device 40, controls the signal start, the operation start time at which the output of the action signal starts, the output of the action signal is stopped, the output of the stop signal is stopped, and the operation stop time is stopped, and the action signal and the action signal are The stop signal is outputted to the corresponding switch, and the control signal is attached with the batch number or the vacuum process number of the true process by the control signal, and the batch and the vacuum process are correspondingly associated with the action start time and action. The stop time is recorded in the vacuum processing apparatus 1 together, and the vacuum processing of the plurality of substrates is performed, and the measurement of the vacuum processing of the plurality of batches is stored in the memory device 43. The measurement time of the measurement flaw is controlled, and the vacuum processing is controlled. The control start time and the action stop time in the control signal and the control signal. The control signal, here the high and low binary carry, the status of the motion signal is memorized as the number of high (High), and the state of the stop signal is recorded as the number of low (Low). Here, the data corresponding to one file name is the same batch, and includes: a plurality of measurement 包含 included in one batch, a control time corresponding to each measurement 、, and a control for controlling vacuum processing to obtain a measurement 値The time of the signal state and the time of measurement when the signal state changes, as long as the measurement is measured at a constant time interval, the reference time between the reference and the measurement sequence and the measurement time It is included in the data displayed by the file name, and the measurement time can also be obtained by calculating the calculation from the 测 空 赋 处 处 处 含 5 5 5 5 5 5 5 5 5 5 5 5 5 。 。 。 。 。 。 。 。 。 In the following, in order to analyze the measurement result of the vacuum processing of a plurality of samples, the operation step 0 of the analysis apparatus 4 of the present invention constituted by a computer is stored in the memory device 43, and the program of the present invention for analyzing the vacuum processing is stored. When the operator who performs the analysis starts the program, the calculation device 42 reads the measurement 对应 corresponding to the vacuum processing of the plural number together with the measurement time generated by the measurement ,, and performs calculation to generate the first and second maps β to be described later. The measurement of the analysis 値 'here, the measurement results of the same processing machines 31 to 34 or the peripheral devices 3 6 to 3 9 ' are the same physical quantities. The interval between the measurement times is constant in a vacuum process, and is also constant between the vacuum process and the vacuum process. In addition, the control signal for controlling the vacuum processing at the time of the measurement of the read enthalpy is also read. The operation start time and the operation stop time may be, for example, the time included in the measurement time. The correspondence between the batch of the control signal and the vacuum processing can be controlled by the name of the file of the control signal. The symbol 100 of Fig. 2 shows a screen of the display device 44 connected to the analysis device 40. It may also be a screen of a display device of the analysis device 40 and another analysis device that communicates by means of a communication means such as a LAN. On the screen 1 〇〇, there is a measurement 进行 that has been read, and a measurement 値 specific column 1 1 〇 and a control signal specific column 120 for which a control signal corresponding to the measurement 支 is specified. The other areas of the screen 100 are divided into display connection measurements in such a manner that the change of the measurement signal and the change of the control signal can be visually confirmed.

-12- S 201214073 The curve display area 130 of the first line of the line of 値, and the timing chart display area 140 of the second line of the figure showing the control signal. In addition to the batch and vacuum processing, the type of enthalpy (for example, current 値, voltage, pressure, etc.) can be specified by the file name 151, in the measurement 値 specific column 110 and the control signal specific column 120. And setting the file name 151 of the measurement file that has been read in, and the file name 161 of the control signal that has been read in, respectively, in the first and second name display columns 1 1 1 of one column. 1, 1 2 1. After a file name is read into the measurement and control signals, the second name display column 121 displays the file name 161 of the same content displayed in the file name 151 of the first name display column ill. Further, in the measurement 値 specific column 110 and the control signal specific column 120, first and second display indication columns 1 1 4 and 1 24 are provided. In the first and second display indication columns 114' 124, there are provided check boxes 154, 164, such that the check fields 154, 164 and the file names 151, 161 are in a one-to-one correspondence with the file names 151, 161 The same height is shown as a column. Among the check fields 154 and 164, located at the same height as the file names 151 and 161 to be displayed as the map on the screen 100, the check boxes 154 and 164 corresponding to the file names 151 and 161 are given a check mark. The corresponding file name 1 5 1 , 1 6 1 measurement 値 and control signal, as described later, are respectively displayed as the first and second pictures. A checkbox other than the checkbox 154'104 of the first and second display indication columns 114, 124 is selected to check the checkbox on the screen 1 ,, $ -13- 201214073 can be On the screen, the cursor's cursor tip is placed above the checkbox' by pressing the left button of the mouse. The screen 1 of the display device 44 has a quadrangular shape, and among the four sides of the quadrangle, pixels arranged in a matrix are arranged along one side arranged in the horizontal direction and the side arranged in the vertical direction. The curve display area 130 is displayed along the X-axis of the side in the horizontal direction, and the XY coordinate formed by the γ-axis along the vertical direction indicates 'in the timing chart display area 140, and the time axis 141 displayed parallel to the X-axis is displayed. . Symbol 131 is the origin of the XY coordinates. When the X axis is the axis of the display time, and the time on the X axis is the current time, the left side of the screen on the X axis is the past, and the right side is the future. The Y axis shows the size of the measured flaw. In the analyzing device 40, the measurement 含 contained in the data of the plural file name 151 is read and stored in the control signal corresponding to the measurement 。. The file names 151, 161' of the read materials are displayed on the screen 100. Among the file names 151, 161, the check boxes 154, 164 are checked by the operator who performs the analysis to select the desired file. At the time of the measurement of the selected file name 1 5 1 , 1 6 1 and the control signal, together with the measurement time, the curve display area 丨3〇 and the timing chart display area 140 are displayed as the first and second pictures. line. Here, as shown in FIG. 3, in the curved display area 1130, the first plurality of first lines 134c, 134d generated by the read measurement 显示 are displayed, and most of the portions displayed on the screen 100 are displayed. It is overlapping.

S - 14 - 201214073 Check boxes 154 , 164 corresponding to the control signals displayed on the curve display area 130 are checked. In the timing chart display area 140, the X axis displayed on the curved display area 130 is moved in parallel to display the time axis 141. After the control signal, on the time axis 141, a time chart extending in a horizontal direction parallel to the X-axis and being placed high above the low (Low) is used as the second map 144a, 144c. , 144d, are configured at different heights. At the measurement time in the control signal, there is an operation start time at the time when the operation of the control signal is started, and an operation stop time at the time when the display operation is stopped, and the measurement time or the measurement time corresponding to the measurement , is one day. For 24 hours, the time starting from 0:00 am, accompanied by the year of the West and the month, even at the same time, as long as one of the different years, months or dates is different, it is a different time. That is, different measurement 値 of the same device corresponds to different measurement times. In this case, the reference time of the different time is set for each vacuum process, and even in this example, the measurement time corresponding to the read measurement 也 is converted into the time conversion from the reference time of the measurement 値. The time is stored in the memory or the memory device 43 in association with the measurement 値. When the display methods of the first and second graphs 134a, 134c, 134d, 144a, 144c, and 144d are described, the reference time is set to the time before the first operation start time of each measurement cassette, and the X-axis of the reference time. The position on the screen is the specific position on the screen (here the origin of the X axis)

S -15- 201214073 The horizontal distance on the screen 100 indicates the time, and the time per unit distance in the horizontal direction is input by the keyboard. Alternatively, it can be calculated by reading the time of measurement 値 or the like. In other words, the position on the X-axis of each measurement enthalpy is calculated from the position on the screen at the reference time and the time per unit length in the horizontal direction, and the X-axis of each measurement 算出 is calculated from the conversion time of each measurement 値. s position. Further, the position on the Y-axis of each measurement enthalpy is calculated from the 値 and the origin of each unit length on the Y-axis. As a result, each measurement 値 is displayed at a position on the corresponding X-Y axis, and among the positions indicated by 値, the first line 134a, 134c, 134d is displayed by connecting the line segments of the adjacent positions. For the control signal, the left end of the horizontal line showing the sorghum is the action start time, the right end is the action stop time, the left end of the horizontal line showing the low 为 is the action end time, the right end is the action start time, and the action start time and the action stop time are transformed. The converted time is referred to as the operation start conversion time and the operation stop end time, and the second map lines 144a, 144c, and 144d are displayed on the time axis 14 1 . The right end of the sorghum and the left end of the low squat and the left end of the sorghum and the right end of the squat are at the same time, and the ends at the same time are connected by the vertical line segments 1 4 8 and 149, and the time of the vertical line segments 148, 149 The position on the shaft 141 displays the operation start time or the operation stop time. In the second graph lines 144a, 144c, and 144d, the rising position at which the low level of the control signal is converted to the high level is the operation start time, and the lowering position from the high level to the low level is the operation stop time. From the start of the action to the stop of the action -16- 201214073 is the action signal between the moments. Further, the control signal is a stop signal until the first motion signal after the vacuum processing device 1 is turned on. In this example, the time at which the first motion signal is output is the first motion start time. Each of the peripheral devices 36 to 39 or the processing devices 31 to 34 sends measurement cadences to the respective devices 31 to 34 and 36 to 39 at regular intervals, that is, measurements measured by the same devices 31 to 34 and 36 to 39. It is measured at the measurement time of a certain time interval. When the physical quantity of the measurement target is the same, the same time interval is used even when the vacuum processing is different, that is, when one of the measurement times is used as the reference time and the conversion time is calculated based on the reference time, the reading is performed. When the measurement of the plural file name 151 is completed, the measurement of each file name 151 becomes corresponding to one conversion time. The position in the vertical direction on the screen of the crucible is determined by converting the measurement 値 to the position on the Y-axis in the vertical direction by the position of the origin and the length per unit length in the vertical direction. The origin is located on the Y-axis of the vertical line passing through the reference time. The operation start time and the operation stop time are the same as the measurement 以, and the conversion time converted to the time from the reference time 〇 crosses the straight line parallel to the Y axis of the X axis and the time axis 141, and X The axis and time axis 1 4 1 intersect at the same conversion time. Next, the step of moving the map using the data analysis program will be described. In Fig. 3, the plurality of first graphs 134a, 134c, and 13d are overlapped. -17-201214073. The analysis program of the present invention can be analyzed by the analyzer. The operator of 40 selects the desired line among the first and second map lines 134a, 134c, 13 4d, 144a, 144c, 144d displayed on the screen 100. The first and second graphs 13 4a, 134c, 134d, 144a, 144c, and 144d of the same file name 151, 161 are associated with each other, and when the operator selects the first graph 134a as a moving object, the related The second graph 144a also becomes a moving object. Conversely, when the second graph 144a is selected as the moving object, the first graph 13 4a associated therewith also becomes the moving object. As described above, when the first and second map lines 134a and 144a of the same file name 151 and 161 are selected and become the moving object, the other party also becomes the moving object 〇 regarding the selection, and the measurement is performed in the specific column 1 1 0 and the control. The signal specific column 1 20 is respectively provided with first and second movement indication columns 117 and 127, and the first and second movement indication columns 117 and 127 are corresponding to the check column 157 of the file names 151 and 161, 167 are respectively arranged in a column. By the operator checking the check fields 157, 167 of the first or second mobile indication columns 117, 127, the first or second map 134a of the file name corresponding to the checked check boxes 157, 167 is checked. 144a becomes a moving object. In addition, the operator can make the apex of the cursor of the mouse be located in the first or moved by the first 'second line 134a' 134c, 134d, 144a, 144c, 144d displayed on the screen 100. On the second line 134a, 144a, press the left button of the mouse to select. At this point, after pressing the left button of the mouse, keep pressing the state while moving -18 - 201214073 to move the cursor along the axis. When the left button is pressed at the desired position, the amount of movement of the cursor is Become the distance that makes it move. With the movement of the cursor, the first and second maps i34a, 134c, 134d, 144a, 144c, and 144d of the left button of the mouse are pressed with the cursor on the state where the cursor tip is located thereon, and displayed together with the cursor. Moving along the X axis can also refer to the amount of movement. The operator can input the keyboard and directly input the moving distance on the screen. When the movement amount is input to the movement time on the axis, it can be converted to the distance on the screen. For the method selected by the operator, the cursor of the mouse may be placed on a graphic (not shown) for indicating the screen 100 displayed on the display device, and the left button of the mouse is pressed in the state to display the input name. i side, then use the keyboard to enter a name. Either way, the selected first and second plots 134a, 144a are within the analysis device 40 and are distinguished from the unselected first and second plots 134c, 134d ' 144c ' 144d. Symbols 134a' and 144a' of Fig. 4 show the first and second graphs of the moving distances for which the movement is input, and the first and second graphs 1 34a and 1.44a before the movement are erased from the screen. In the past, the movement in the future direction (right direction) is positive, the movement in the past direction (left direction) is negative, and the relationship between the movement distance of the X-axis and time is converted into the correction time, and the correction time is added to the conversion time. Correct the conversion time. Each measurement point in the first graph line 134a or each point 5 -19-201214073 in the second graph line 144a is represented as a position corresponding to the axis of the 换算 of the corrected conversion time or the position of the time axis 1 4 1 on. The first line 1 34a' after the movement is displayed between the adjacent points of the measured measurement points after the movement, and is displayed by a straight line or a curved line. The second map line 1 44a' after the movement is calculated from the movement start time and the movement stop time at the operation start time and the operation stop time. The conversion time corresponding to the shifted first and second graphs 134a' and 144a' does not change, and is the same as before the movement. Therefore, after the movement, the conversion time of each measurement point of the moved graph and each The conversion time on the X-axis at the position directly below the measurement point is different. The display method of the moved second image line 144a' is the same as the case of the second image line 144a before the movement, and the display of the high-pitched display and the low-pitched display on the time axis 141 is moved, and the movement start time and movement after the movement At the end of the stop action, the end of the stop signal and the end of the motion signal are connected on the screen. The relative positional relationship between the moved first line 134a' and the moved second line 144a' is unchanged from the positional relationship between the first and second lines 1 34a, 144a before the movement Therefore, the relationship between the first screen line 134a, 134a' and the first screen line 134a, 134a' is not changed, and the relationship between the first line 134a, 134a' is the same as the first line 134a, 134a'. The relationship with the position of the signal 値 change of the second graph does not change. When the measurement method of each line after the movement or the method of confirming the control signal is described, the first and second measurement indication columns 1 1 are respectively set in the measurement 値 specific column 1 1 〇 and the control signal specific column 1 2 分别. 3, 1 23 'in the first, second

S -20- 201214073 Measurement indication column 1 13 , 123 ‘The check fields 153 and 163 are set corresponding to the file names 1 5 1 and 1 61. When the operator selects the check boxes 153 and 163 of the first and second measurement indications 、 3, 1 23, the measurement 对应 corresponding to the selected file name 151 and the side measurement line of the control signal are displayed. In FIG. 5, among the first and second graphs 13 4c, 144c, 134d, and 144d of the non-moving complex array, the hooks of the file names 151 and 161 of the first and second graphs 134c and 144c of the group The selection columns 153, 163, and the check boxes 153, 163 of the file names 151, 161 of the first and second map lines 134a', 144a' of the movement are checked, and the check boxes 153, 163 of the total four items are selected. Checked, measurement lines 101, 102, 103, 104 corresponding to the first and second lines 134c, 134a', 144c, 144a' of the four lines are displayed. Each of the measuring lines 101, 102, 103, 104 is a straight line extending in a direction perpendicular to the X-axis on the screen 1 , and each measuring line 101, 102, 103, 104 can be controlled by the operator's keyboard or The mouse moves the distance and moves in the direction along the X axis. Each measuring line 1 〇1, 1 02 '1 03, 10 04 can be moved, and when each measuring line 101, 102, 103, 104 is displayed or moved, it can be associated with the corresponding first and second lines 134c, The desired point crossings on 134a', 144c, 144a' are configured, with each measurement line 1〇1, 102, 103, 104, and corresponding first and second lines 134c, 134a, 144c, 144a When intersecting, at the intersection with the first graph lines 134c and 134a, the measured 値 and the converted time ' of the displayed intersection point intersect with the second map line 丨44c, 144a', and the control signal of the intersection point is displayed.値 (high or low), and the time of conversion on the timeline 1 4 1 corresponding to the intersection - 21 - 201214073. The conversion time of the intersection, the measurement 値, and the control signal are displayed in the vicinity of the measurement line 1 0 1 to 1 04 where these are available. After the measurement, it is given and the mark for distinguishing the intersection (here, the symbols of p 1 and P2) is displayed. After the moved first and second graphs 134a', 144a' are moved from the overlapping positions on the curved display region 130 to other positions, the moved first and second graphs 134a', 144a' are unmoved The shape of the first and second graphs 134c, 134d, 144c, 144d is relatively easy to compare. The positional relationship between the first and second map lines 134a' and 144a' which are moved in comparison with the first and second map lines 134c and 144c which are not moved is also facilitated. In addition, when the measurement line 1 〇1 to 1 04 moves, the measurement line 1 that wants to move is moved when the cursor is moved to the measurement line 01 to 104 that is to be moved, and the mouse is moved while the left mouse button is pressed. 01 to 1 04 are also configured to move together with the cursor, and when the desired position is pressed, the desired measurement lines 101 to 104 can be moved. In addition, when the first graph 134a moves, the second graph 144a corresponding to the first graph 134a also moves, and the measurement line 102 intersecting the moved first graph 134a', and the moved The measurement line 1 04 of the second line 1 44a' intersection is arranged linearly, and the measurement 相同 of the same conversion time and the control signal corresponding thereto can be read. The above is the case where the desired first line 13 4a is moved among the overlapping first lines 134a, 134c, and 134d, but the leaving picture may be made uniform. -22- 201214073 FIG. 6 is a check box 157, 167 for indicating the display of the first and second graphs 134a', 144a' of the aforementioned movement, and a check for displaying the measurement lines 1〇1 to 1〇4. Blocks 153, 163' eliminate the given checkmark' and erase the display of the corresponding first and second map lines 134a', 144a' and the measurement lines 1〇1~104 from the screen i〇〇, and at the same time, First, the second display indication column 154, 164 of the check boxes 154, 164 is given a check, and the first and second lines 13 4b, 14 4b' of one of the file names 151, 161 are not displayed for display. . In FIG. 6, the first and second graph lines 134b to 134d and 144b to 144d detect that the first signal in the control signal rises, and the time before the specific time from the conversion time is used as the reference time, at the first Second line. "~.々(^""~"々(^ causes the reference moment to be displayed at the origin of the 丫 coordinate or time axis. The first and second graphs 134c, 134d, 144c also shown in Fig. 3 to Fig. 5 At 1 44d, the first motion start time of the motion signal is detected as the first rise time, and the measurement signal of the newly displayed second map 1 44b is included at an earlier time than the first motion start time. The noise 1 47, the rise of the noise 147 is detected as the initial rising time, and the time before the certain time is used as the reference time. As a result, the newly displayed first and second lines 134b, 144b And leaving the other first and second graphs 134c, 134d, 144c, and 144d. On the other hand, the second graphs I44c and 144d also shown in FIGS. 3 to 5 show the vertical line segment arrangement at the start of the initial motion. In order to make the peak position of each of the first graphs 134b to 134d coincide, first select the newly displayed second graph 1 44b to move it as described above, as shown in Fig. -23-201214073 7 The second map lines 144b to 144d are arranged on a straight line as shown. The line 134b moves together with the second line 14 4b. The symbols 13 4b' and 14 4b' of Fig. 7 refer to the first and second lines after the movement. When moving, the amount of movement is converted into the correction time with the symbol. When the correction time is added to the conversion time, the correction conversion time is obtained. When the distance between the conversion time of the noise 147 and the time of the conversion between the conversion time and the first operation start time is changed, the second movement is performed. The corrected conversion time of the first operation start time of the line 1 44b ' and the conversion time of the first operation start time of the second line 1 44c that does not move are the same time. Next, the first operation start time is up to If the time until the peak of the peak is the same, the position on the X-axis of the peak of the moving first line 13 4b' becomes the same as the position of the peak of the unmoved first line 134c on the X-axis. The corrected conversion time can be displayed at the position where the conversion time is displayed, and the conversion time is displayed. In Fig. 8, the first and second lines 13 4b', 1 4 4 b ' and the measurement line 1 0 2, 1 0 are moved. Near the intersection of 4, Measure 値, control signal 値, and correct conversion time. You can move the first and second lines 134b, i 44b at the same time as the conversion time, or watch the correction conversion time and move the measurement line 1〇2, 1〇4 ' Therefore, the positions of the second graphs 14 4b', 144c, and 144d can be simply aligned. As a result, the peak position or the shape of the graphs of the first graphs 34b', 134c, and 134d can be simply compared. The first and second diagrams obtained by the first and second graphs 134a to -24-201214073 134d and 144a to 144d of the present invention, the same as the file names 151 and 161, and the control signals are obtained. The lines are associated with each other, and the first and second maps to which the association is assigned cannot be moved separately. That is, even if one side moves and the other side moves the same distance in the same direction, the relative relationship between the measurement 値 and the timing chart (second line) is maintained, and the measurement 移动 after the movement is not erroneously explained. That is, the data obtained by the vacuum processing can be correctly analyzed. Further, in the above-described embodiment, the measurement lines that can intersect the first and second map lines associated with each other cannot be moved separately, and are arranged as a straight line. In this state, in the first and second graph lines, when the measurement line that can intersect with one side is moved, the measurement line that can intersect with the other side also moves in the same direction by the same distance. In contrast to this, in the present invention, the measurement lines can also be independently and movable. Further, in the foregoing embodiment, the set of first and second maps 134a, 144a or 134b, 144b associated with each other are moved to move the object, but the first or the plurality of complex arrays associated with each other are selected. In the second graph, the first and second graphs of each group may be moved. In this case, only one movement amount can be input by the mouse or the keyboard, so that all the first and second graphs that are moving objects move the same distance on the X-axis in the same direction along the X-axis. . Further, the measurement target column 11 and the control signal specific column 1 20 are provided with color indication columns 1 1 2, 1 22, corresponding to the file names 1 5 1 and 1 6 1, by changing the display in the color indication columns 112, 122. The colors I52 and 162 can change the color of the first -25-201214073 and the second line. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a block diagram showing a vacuum processing apparatus of the present invention. Fig. 2 is a view (1) of a display device for explaining the analysis method of vacuum processing of the present invention. Fig. 3 is a view (2) of a display device for explaining the analysis method of the vacuum processing of the present invention. Fig. 4 is a view (3) of a display device for explaining the analysis method of the vacuum processing of the present invention. Fig. 5 is a view (4) of a display device for explaining the analysis method of the vacuum processing of the present invention. Fig. 6 is a view (5) of a display device for explaining the analysis method of the vacuum processing of the present invention. Fig. 7 is a view (6) of a display device for explaining the analysis method of the vacuum processing of the present invention. Fig. 8 is a view (7) of a display device for explaining the analysis method of the vacuum processing of the present invention. [Description of main component symbols] I : Vacuum processing device II : Vacuum chamber 1 5 : Object to be processed 2〇 : Vacuum processing unit

S -26- 201214073 2 1 : Control unit 23: Processing device group 24: Peripheral device groups 31 to 34: Processing devices 36 to 39: Peripheral device 40: Analysis device (computer) 4'1 : Program device (sequencer) 42: Calculation device 43: remembering device. 44: display devices 101 to 104: measurement lines 134a to 134d: first lines 144a to 144d: second line 3 -27-

Claims (1)

201214073 VII. Patent application scope: 1. A display program comprising: a vacuum processing device that vacuum-treats an object to be processed disposed in a vacuum chamber; and a measurement of a plurality of signals transmitted by the vacuum processing device, and a memory device that is stored in a correspondence relationship with the vacuum processing, a calculation device that reads the memory content of the device, and a display device that displays the calculation result of the calculation device: The operation signal "the operation signal for stopping the operation of the vacuum processing device and the control signal for stopping the operation" is associated with the measurement device, and is stored in the memory device: the time at which the operation signal starts The operation start time and the operation stop time at the time when the operation start signal is stopped are stored in the analysis device of the memory device, and the display program of the measurement target is processed by: the measurement time, the operation start time, and the Stop action time The conversion time, the operation start conversion time, and the operation stop conversion time from the reference time are converted into a screen in which the size of the measurement 换算 is converted into the vertical direction of the screen, and the converted time is converted into the reference time. In the horizontal direction, the measurement point having the measurement 値 and the measurement time is displayed on the screen to display the first line; S -28-201214073 is converted from the measurement signal and the operation The time-shifting conversion time is displayed, and the second image line is displayed on the screen based on the position of the reference time, and the first and second lines respectively obtained by the measurement of the same vacuum processing and the number are first assigned. In association with the first and second graph lines, the desired first and second graph lines are assigned to the associated first or second graph, and one of the selected two parties is selected as the moving object. , so that the amount of movement in the horizontal direction can be input, and the amount of movement can be replaced by the distance in the horizontal direction on the screen to move the object before FIG moved in the first line of the screen in the horizontal direction "2. The patent application shows the program range, Paragraph 1, in which the moving object, the texture may be assigned to each other comprise associated first and second lines in FIG. 3. In the display program of claim 1 or 2, wherein the display can be moved on the screen, and the first line is displayed on the screen, and the first line and the measuring line are displayed. The front of the intersection. 4. In the display program of claim 1, wherein the display can be moved on the screen, and the second line is displayed on the screen, and the intersection of the second line and the measurement line is displayed. Before, the above description, in the previous control, the above-mentioned second choice is calculated as the front and the second complex array fork measurement test fork control -29-201214073 signal. 5. An analysis device characterized in that the display program according to any one of claims 1 to 4 is memorized in the memory device. S -30-