201212086 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種真空開閉器及真空絕緣開關裝置， 尤其是關於適用在具備測定真空容器內的真空壓力之測定 裝置者之真空開閉器及真空絕緣開關裝置。 【先前技術】 在受電設備中，設置收納有用以遮斷負荷電流或是事 故電流之真空遮斷器、在進行負荷的保養維修時爲了確保 作業者的安全遮斷電流之斷路器及與大氣接地之接地開閉 器、檢測系統電壓·電流之檢測裝置，再者保護繼電器等 之閉鎖型配電盤（稱爲開關裝置）。 該開關裝置的絕緣方式係爲多種樣式，除了習知以來 的氣中絕緣盤、使用sf6氣體之隔離型氣體絕緣開關裝置 (GIS )，最近從環境對應的觀點來看出現固體絕緣、壓 縮空氣絕緣、全真空絕緣方式者。 又根據各種絕緣方式，在加速遮斷器、斷路器、接地 開閉器的各組件小型化之中，開發出利用環氣注型將進行 電壓♦電流的投入與遮斷之真空閥、與可切換爲關閉、斷 路與接地之3位置之氣中絕緣接地斷路部一體化者加以收 納之真空絕緣開關裝置（參照例如日本特開2006-23 8522 號公報）。 然而，真空開閉裝置的耐電壓性能及遮斷性能係與真 空容器內部的壓力依存爲一般悉知的。由於真空中的放電 -5- 201212086 特性係成爲由壓力與距離的乘積構成的帕邪曲線，當壓力 上升到某値以上時’使絕緣性能急劇降低。在真空開閉裝 置中’不只是破損故障，由於根據環境氣體的長期穿透也 有使壓力惡化的可能性，而要求定期維修。 一般而言’在真空壓力的健全性檢查中，採用將真空 開閉裝置搬出受電盤外部後，在極間施加特定的高電壓， 根據放電的有無判斷健全性的方式。在該情況，會造成維 修時必須停電，或是必須另外準備高電壓電源等問題。爲 了與維修作業的簡單化或是由於經常監視的省力化等省維 護需求對應’期許在通常的運轉中可以診斷的手法，開發 出各種方法（例如參照日本特開2007-080594號公報）。 [先前專利文獻] [專利文獻] [專利文獻1]日本特開2006-238522號公報 [專利文獻2]日本特開2007-080594號公報 【發明內容】 (發明槪要） (發明所欲解決之課題） 在上述習知技術中，爲了保持開閉開關部的信賴性， 必須有從模型外部經常監視利用環氧樹脂模塑的真空閥之 真空外漏的技術。又在真空壓力的健全性檢査時，因爲將 真空開閉裝置搬出受電盤外部後，在極間施加特定的高電 -6 - 201212086 壓’根據閃絡的有無判斷健全性，因此會有維修時必須停 電' 或是必須另外準備高電壓電源等的問題。 本發明之目的係爲提供一種提升真空壓力診斷精確度 之真空開閉器或是真空絕緣開關裝置。 (用以解決課題之手段） 爲了達成上述目的，在關於本發明之真空開閉器中， 其特徵爲具備：內部爲真空且進行電流的投入.遮斷之真 空閥、配置在該真空閥內之遮蔽罩、及至少具有一部份與 該遮蔽罩之最接近的對向距離成爲約略一定的面之真空測 定端子。 又關於本發明之真空絕緣開關裝置，其特徵爲具備： 上述真空開閉器、及具有電路的接地•斷路機能之氣中絕 緣接地斷路部。 (發明之效果） 根據本發明，可以提升真空壓力診斷的精確度。 【實施方式】 (用以實施發明之形態） 以下，針對適合本發明的實施之實施例使用圖面加以 說明。又下述實施例不過是實施用的例子’當然不是意圖 將本發明限定於實施例的具體樣態之宗旨° 201212086 [實施例1] 第1圖係顯示本發明之真空開閉裝置的模型部剖面圖 0 第1 (a)圖係爲從上部觀看真空開閉裝置的上面圖 ，第1 ( b )圖係爲從旁邊觀看真空開閉裝置的橫剖面圖 〇 如第1 ( b )圖所示，真空閥1係由固定側陶瓷筒2、 密閉覆蓋固定側陶瓷筒2的端部之固定側端子板3、固定 導體4、配置在真空閥1內的電極周圍之中間遮蔽罩5、 可動側陶瓷筒6、密閉覆蓋可動側陶瓷筒6的端部之可動 側端子板7、可動導體8、雖然沒有特別圖示，用以一邊 維持真空狀態一邊使前述可動導體8動作之伸縮體、設置 在前述固定導體4前端之固定電極、與該固定電極對向， 而且設置在前述可動導體8前端之可動電極構成。可動電 極係藉由伸縮體可以一邊維持真空密閉一邊動作，與固定 電極接觸/分離達到作爲開閉裝置的任務。 真空閥1的開閉係利用真空閥用絕緣桿23、氣中絕 緣接地斷路部25係利用接地斷路部用絕緣桿24進行開閉 。氣中絕緣接地斷路部2 5係形成爲可切換成關閉、斷路 及接地3位置的構造。 真空閥用絕緣桿23與接地斷路部用絕緣桿24之間係 利用可撓性導體22加以連接。 具備中間遮蔽罩5的真空閥1周園係利用環氧等絕緣 物1 3模塑。在絕緣物1 3的外周部係施予導電塗布1 4， -8- 201212086 將該塗布面接地。又真空壓力診斷用之真空測定端子12 係利用絕緣物1 3與真空閥1同時被模塑。真空測定端子 12與導電塗布14係成爲電氣絕緣。 真空測定端子1 2係爲了得到只要能夠充分確保真空 測定端子1 2與中間遮蔽罩5之間的靜電容量之面積，如 第2圖所示，真空測定端子1 2係具有與中間蔽遮罩5中 心約略相等，呈約略同心圓狀覆蓋中間蔽遮罩5外周側的 至少一部份之形狀。真空測定端子1 2係藉由與中間蔽遮 罩5中心約略相等，呈約略同心圓狀覆蓋外周側的至少一 部份，中間遮蔽罩5與真空測定端子1 2之距離係成爲等 間隔，（因爲可以將中間遮蔽罩5與真空測定端子1 2爲 最接近的部份形成爲面狀，）在中間遮蔽罩5與真空測定 端子1 2之間係成爲能夠使電場均勻分布。 其中，就真空測定端子1 2、測定端子電壓檢測部1 8 的材質而言，在模塑時，以加工性佳的金屬，例如黃銅或 鋁爲佳。 再者，上述之真空測定端子1 2係與測定端子電壓檢 測部1 8連接。真空測定端子1 2雖然利用絕緣物1 3被模 塑，但是測定端子電壓檢測部1 8係爲露出，與外部的壓 力診斷裝置連接。真空測定端子1 2係在利用絕緣物1 3模 塑時，藉由預先安裝在塡充絕緣物1 3的模型，在模塑後 連同絕緣物1 3 —起從模型取下，可以實現在正確位置的 埋入。又在本實施例中，雖然使測定端子壓力檢測部1 8 露出，但是使其露出不能說是用以達到發明效果的必要條 201212086 件，即使被模塑亦可。對於真空測定端子1 2也 模型內在進行真空測定方面不是必要條件。 如第3圖所示，真空測定端子1 2係利用介 子電壓檢測部18與壓力診斷裝置19連接。該壓 置1 9係利用電容器26 (電容M C〇 )、與電容署 連接，測定電容器26的輸出電壓Vut之電壓計 電壓計20連接判定真空壓力是否正常之判定部 真空測定端子1 2係與一端爲接地之電容器26的 連接，在電壓計20中係測定在電容器26兩端發 V。^。判定部2 1係比較預先設定的基準値與利 20測定的測定値，在超過基準値的情況判定爲 以上，在低於基準値的情況判定真空壓力爲正常 其次，針對真空壓力惡化的情況加以說明。 放電特性係如第4圖所示，由於成爲顯示壓力與 電壓的關係之帕邢曲線，在主電路與中間遮蔽罩 距離爲一定的情況，當壓力上升到某値以上時 路-中間遮蔽罩5之間產生放電，使中間遮蔽罩 V ,上升。其中，藉由確保真空測定端子1 2 -中間 之間的靜電容量C ,，預定決定真空測定端子1 2 真空測定端子1 2-中間遮蔽罩5之間的距離，可 測定端子1 2檢測出各相的輸出電壓V()Ut。換言 測定端子1 2 -中間遮蔽罩5之間的靜電容量C i値 的，不可以從規定値有所變動。 其中’輸出電壓VQUt係成爲根據電容器26 是，埋入 由測定端 力診斷裝 | 26並聯 20、及與 2 1構成。 另一端側 生的電壓 用電壓計 真空壓力 〇 真空中的 放電開始 5之間的 ，在主電 5的電位 遮蔽罩5 的形狀、 以從真空 之，真空 係爲重要 的靜電容 -10- 201212086 量C 0與真空測定端子1 2 -中間遮蔽罩5之間的靜電容量 C i之比加以決定’可以如以下所示加以計算。 V〇u,= V,XC,/ (Cj + Co) 此時’以電壓V。^歸納在壓力診斷裝置1 9的檢測範 圍內之方式，預先設定C〇、C,。 換言之，因爲Co、Ci爲既知的定數，藉由測定電座 v。^，對於中間遮蔽罩5的電位V,可以算出。再者，電 壓V,係如上述所示，因爲與真空閥1內的壓力依存變化 ，在真空壓力發生異常產生放電時會上升，因此從電壓 V,或是電壓V^t値可以診斷真空開閉裝置之真空壓力的 健全性。 在本實施例中，真空測定端子1 2係藉由具有與中間 蔽遮罩5中心約略相等，呈約略同心圓狀覆蓋中間蔽遮罩 5外周側的至少一部份之形狀，可以將中間蔽遮罩5與真 空測定端子1 2成爲最接近的部位形成爲面狀’使靜電容 量C,難以變動的同時，而且藉由變化與中間蔽遮罩5對 向的面積，也可以自由變化靜電容量的大小’提升真空壓 力診斷的精確度。藉此’以電壓Vm，歸納在壓力診斷裝 置1 9的檢測範圍內之方式，達到可以自由設計靜電容量 値。 又在本實施例中’由於將中間遮蔽罩5配合圓筒形狀 的真空閥1而成爲圓筒形狀，對於真空測定端子12也形 成以約略同心圓狀覆蓋者，但是對於中間遮蔽罩5，即使 只具備一部份中間遮蔽罩5與真空測定端子1 2之間的最 -11 - 201212086 接近對向距離爲約略一定的面，在對向面也可以形成電容 器，針對使靜電容量C 1難以變動的同時’而且藉由變化 對向的面積自由變化靜電容量的大小也可以得到一定的效 果。 作爲具有該特徵的情況，考量將中間遮蔽罩與真空測 定端子的至少一部份成爲相似形，針對該相似形部使兩者 的對向距離約略成爲一定的情況。在該情況下，在對向面 形成的電容器之靜電容量係可以更爲穩定’單是對於中間 遮蔽罩而言，比即使只具備一部份中間遮蔽罩與真空測定 端子之間之最接近的對向距離約略成爲一定的面之情況爲 有利的。 又在中間遮罩蔽與真空測定端子（之至少一部份）成 爲相似形，兩者的對向距離約略成爲一定的情況之中，進 一步如本實施例所示，藉由使中間遮蔽罩5爲圓筒形狀， 真空測定端子1 2爲具有與中間遮蔽罩5中心約略相等， 呈約略同心圓狀覆蓋中間遮蔽罩5外周側的至少一部份之 形狀，可以沒有角部，而且也能夠緩和電場集中，更爲有 利。 又中間遮蔽罩5雖然在本實施例中主要是針對防止電 弧附著在絕緣筒之電弧遮蔽罩的情況加以說明，但是在真 空惡化發生放電的情況下，儘管是電弧遮蔽罩都因爲放電 而導通，因此可以適用在真空閥1內的全部遮蔽罩。 [實施例2] -12- 201212086 針對實施例2使用第5圖加以說明。在本實施例中， 雖然針對將在實施例1內說明的真空開閉裝置以3相並列 的情況加以說明，但是針對各個真空開閉裝置係與實施例 1相同，省略重覆說明。 在本實施例中，如第5圖所示，利用連結點2 7合成 三相分之真空測定端子1 2的電壓所施加之測定端子電壓 檢測部1 8，將已合成的電壓施加到與電容器2 6的接地側 連接之一端的另一端側。因此，被檢測的輸出電壓V。。, 係成爲與在三相分的測定端子產生的電壓之合成値成比例 之數値。 根據實施例1說明的內容，雖然可以診斷真空開閉裝 置之真空壓力的健全性，但是由於在中間遮蔽罩所誘發的 電位係爲主電路的約4 0 %，比習知數値更高，再者在接 點的狀態（投入、切離）使電位變動，易於使S/N比降低 。因此，在本實施例中，如第5圖所示，藉由在判斷真空 壓力異常的檢測器將三相分的訊號合成加以輸入，對於隨 機的雜訊可以抵消，使S/N比提升。例如藉由將真空度爲 正常時的訊號爲〇，在任一相產生異常造成三相不平均時 產生訊號，可以監視真空容器的真空外漏。對於正常時與 異常時的電壓只要調整各靜電容量即可，不一定是正常時 爲0，異常時由〇使電位變化。 又在本實施例中針對利用連結點27之一處統括合成 三相分的測定端子電壓檢測部1 8的情況加以說明，但是 設置複數個連結點階段性合成電壓亦可。又即使沒有合成 -13- 201212086 三相全部只合成二相，對於S/Ν比的提升也可J； 的效果。 爲了檢查真空測定端子1 2是否正常動作， 製品出貨前的例行試驗之AC耐電壓試驗。真3 12係由於在三相的合成電壓成爲不平均時產生 由對於各相各自進行AC電壓的施加試驗，可 測定端子1 2爲正常運作。習知以來，真空測定 檢查與AC耐電壓試驗係爲各別實施，但是在髮 於可以同時進行真空測定端子1 2的檢查與AC 驗’因此可以圖謀開關裝置出貨前試驗之項目· 短。 [實施例3] 針對本發明之實施例3使用第6圖加以說尽 圖中，針對在上述各實施例中說明的真空開閉裝 狀態加以說明。對於除此以外都與上述相同，售 重覆說明。 在本實施例中，斷路狀態係爲將氣中絕緣接 25的中間氣中接點30與軸套側固定電極3 1的 爲比氣中絕緣接地斷路部25的接地用氣中接點 側固定電極3 2的距離爲大。又將真空閥1側的 於遮斷位置，提高斷路狀態的信賴性。接地側 32係與接地電位之金屬框體28連接。 根據該構成，即使在負荷側產生雷擊等異常 達到一定 會利用在 測定端子 訊號，藉 確認真空 §子12的 方法中由 耐電壓試 時間的縮 3。在第6 置的斷路 略在此的 地斷路部 距離形成 29與接地 接點也位 固定電極 的情況， -14- 201212086 因爲真空閥1側位於遮斷位置而使異常不會波及到母線側 ’可以提高信賴性。 又在假設已產生真空外漏的情況，即使破壞真空閥1 內的遮斷狀態，使接點間導通，而將負荷側異常狀態的電 位施加到氣中可動導體3 3的情況，因爲將氣中絕緣接地 斷路部25的中間氣中接點30與軸套側固定電極3 1的距 離形成爲比氣中絕緣接地斷路部25的接地用氣中接點29 與接地側固定電極32的距離爲大，因此在氣中可動導體 3 3的中間氣中接點3 0與軸套側固定電極3 1之間不會導 通，而是導通氣中可動導體33的接地用氣中接點29與接 地側固定電極3 2之間。因此，可以使異常不會波及到母 線側，形成接地優先構造。由於異常波及到母線側會牽連 到對於其他電路也受到異常波及，造成使負荷側的一電路 異常擴散相關聯。因此，如上述所示根據使異常不會波及 到母線側，形成接地優先構造，可以提高電力系統本身的 信賴性。 又針對關於本實施例的特點，不一定要與上述各實施 例中的真空壓力診斷一起使用，也可以適用於不進行真空 壓力診斷的開閉器或開關裝置。 【圖式簡單說明】 第1圖（a )係爲實施例1之真空開閉裝置之模塑部 的上剖面圖。（b )係爲實施例1之真空開閉裝置之模塑 部的橫剖面圖。 -15- 201212086 第2圖係爲實施例1之真空感測端子的槪略圖。 第3圖係爲實施例1之壓力診斷裝置的電路圖。 第4圖係爲顯示壓力與放電開始電壓之關係的特性圖 〇 第5圖係爲實施例2之壓力診斷裝置的配線圖。 第6圖係爲實施例3之真空開閉裝置之模塑部的橫剖 面圖。 【主要元件符號說明】 1 :真空閥 2 :固定側陶瓷筒 3 :固定側端子板 4 :固定導體 5 :中間遮蔽罩 6 :可動側陶瓷筒 7 :可動側端子板 8 :可動導體 1 2 :真空測定端子 1 3 :絕緣物 1 4 :導電塗裝 1 6 :母線連接用軸套 17 :負荷連接用軸套 1 8 :測定端子電壓檢測部 19 :壓力診斷裝置 -16- 201212086 20 :電壓計 2 1 :判定部 22 :可撓性導體 23 :真空閥用絕緣桿 24 :接地斷路部用絕緣桿 25 :氣中絕緣接地斷路部 26 :電容器 27 :連結點 28 :金屬框體 2 9 :接地用氣中接點 3 0 :中間氣中接點 3 1 :軸套側固定電極 3 2 :接地側固定電極 33 :氣中可動導體 -17201212086 VI. Description of the Invention: [Technical Field] The present invention relates to a vacuum switch and a vacuum insulated switchgear, and more particularly to a vacuum shutter and vacuum applied to a measuring device having a vacuum pressure for measuring a vacuum vessel Insulated switchgear. [Prior Art] In the power receiving equipment, a vacuum interrupter that is used to block the load current or the accident current is installed, and a circuit breaker that protects the operator from interrupting the current during maintenance and repair of the load and grounding with the atmosphere is provided. The grounding switch, the detection system for detecting the voltage and current of the system, and the blocking type switchboard (called the switching device) such as the protection relay. The insulation method of the switch device is of various types. In addition to the conventional gas-insulated disk and the isolated gas-insulated switch device (GIS) using sf6 gas, solid insulation and compressed air insulation have recently appeared from the viewpoint of environmental correspondence. , full vacuum insulation method. In addition, according to various insulation methods, in the miniaturization of each component of the accelerating breaker, the circuit breaker, and the grounding switch, a vacuum valve that can be used to input and block the voltage ♦ current by the ring gas injection type and switchable is developed. A vacuum insulated switchgear that accommodates the integrators of the grounding and disconnecting sections in the gas at the three positions of the shutdown, the disconnection, and the grounding (see, for example, Japanese Laid-Open Patent Publication No. 2006-23 8522). However, it is generally known that the withstand voltage performance and the breaking performance of the vacuum opening and closing device are dependent on the pressure inside the vacuum container. Since the discharge in vacuum -5-201212086 is a Paige curve composed of the product of pressure and distance, when the pressure rises above a certain level, the insulation performance is drastically lowered. In the vacuum opening and closing device, not only the failure of the damage, but also the possibility of deteriorating the pressure according to the long-term penetration of the ambient gas, requires regular maintenance. In general, when the vacuum opening and closing device is carried out of the power receiving panel, a specific high voltage is applied between the electrodes, and the soundness is judged based on the presence or absence of the discharge. In this case, there is a problem that the power must be cut off during maintenance or the high voltage power supply must be prepared separately. Various methods have been developed in order to simplify the maintenance work, or to meet the provincial maintenance requirements such as the labor-saving maintenance of the regular monitoring, and to develop a method that can be diagnosed in the normal operation (for example, refer to Japanese Laid-Open Patent Publication No. 2007-080594). [Patent Document 1] [Patent Document 1] JP-A-2006-238522 (Patent Document 2) JP-A-2007-080594 (Summary of the Invention) (Inventive Summary) [Problem] In the above-described conventional technique, in order to maintain the reliability of the open/close switch portion, it is necessary to constantly monitor the vacuum leakage of the vacuum valve molded by the epoxy resin from outside the mold. In addition, when the vacuum opening and closing device is carried out of the power receiving panel, a specific high voltage is applied between the electrodes. -6 - 201212086 Pressure 'The soundness is judged based on the presence or absence of flashover. Therefore, it is necessary to maintain the vacuum. Power outages or problems such as high voltage power supplies must be prepared separately. SUMMARY OF THE INVENTION It is an object of the present invention to provide a vacuum shutter or vacuum insulated switchgear that increases the accuracy of vacuum pressure diagnostics. (Means for Solving the Problem) In order to achieve the above object, a vacuum switch according to the present invention is characterized in that it is provided with a vacuum inside and a current is supplied, and a vacuum valve that is interrupted is disposed in the vacuum valve. The mask and the vacuum measuring terminal having at least a portion of the opposite distance from the mask to a substantially constant surface. Further, a vacuum insulated switchgear according to the present invention is characterized by comprising: the vacuum switch, and an air-insulated grounding disconnecting portion having a grounding/breaking function of the circuit. (Effect of the Invention) According to the present invention, the accuracy of vacuum pressure diagnosis can be improved. [Embodiment] (Embodiment for Carrying Out the Invention) Hereinafter, an embodiment suitable for the practice of the present invention will be described with reference to the drawings. The following examples are merely examples of the implementations. Of course, the present invention is not intended to be limited to the specific embodiments of the embodiments. 201212086 [Embodiment 1] FIG. 1 is a cross-sectional view of a model portion of the vacuum opening and closing device of the present invention. Fig. 0 The first (a) is a top view of the vacuum opening and closing device viewed from the upper part, and the first (b) is a cross-sectional view of the vacuum opening and closing device viewed from the side, as shown in the first (b), vacuum The valve 1 is composed of a fixed-side ceramic cylinder 2, a fixed-side terminal plate 3 that hermetically covers the end of the fixed-side ceramic cylinder 2, a fixed conductor 4, an intermediate shield 5 disposed around the electrode in the vacuum valve 1, and a movable-side ceramic cylinder. 6. The movable side terminal plate 7 and the movable conductor 8 that cover the end portion of the movable side ceramic cylinder 6 are provided, and the expandable body that operates the movable conductor 8 while maintaining the vacuum state is not provided. The fixed electrode at the tip end of the conductor 4 is opposed to the fixed electrode, and is formed of a movable electrode provided at the tip end of the movable conductor 8. The movable electrode can be operated while maintaining the vacuum sealing by the expandable body, and comes into contact with the fixed electrode to achieve the function as an opening and closing device. The vacuum valve 1 is opened and closed by the insulating rod 23 for the vacuum valve and the insulating grounding portion 25 for the gas, and the insulating member 24 is opened and closed by the grounding breaking portion. The gas-insulated grounding breaking portion 25 is formed to be switchable to a position of closing, opening, and grounding. The vacuum valve insulating rod 23 and the grounding breaking portion insulating rod 24 are connected by a flexible conductor 22. The vacuum valve 1 having the intermediate shield 5 is molded by an insulator such as epoxy. Conductive coating 1 4, -8-201212086 is applied to the outer peripheral portion of the insulator 13 to ground the coated surface. Further, the vacuum measuring terminal 12 for vacuum pressure diagnosis is molded simultaneously with the vacuum valve 1 by the insulator 13. The vacuum measuring terminal 12 and the conductive coating 14 are electrically insulated. In order to obtain the area of the electrostatic capacitance between the vacuum measurement terminal 1 2 and the intermediate shield 5, the vacuum measurement terminal 12 has a vacuum measurement terminal 12 and an intermediate mask 5 as shown in FIG. The centers are approximately equal in shape and approximately concentrically cover at least a portion of the outer peripheral side of the intermediate mask 5. The vacuum measuring terminal 12 is approximately equal to the center of the intermediate mask 5, and covers at least a portion of the outer peripheral side approximately concentrically, and the distance between the intermediate shield 5 and the vacuum measuring terminal 12 is equally spaced, Since the intermediate mask 5 and the vacuum measuring terminal 12 are the closest to each other, the electric field can be uniformly distributed between the intermediate mask 5 and the vacuum measuring terminal 1 2 . Among them, the material of the vacuum measurement terminal 1 2 and the measurement terminal voltage detecting portion 18 is preferably a metal having good workability such as brass or aluminum at the time of molding. Further, the above-described vacuum measurement terminal 12 is connected to the measurement terminal voltage detecting unit 18. The vacuum measurement terminal 1 2 is molded by the insulator 13, but the measurement terminal voltage detecting unit 18 is exposed and connected to an external pressure diagnosing device. The vacuum measuring terminal 1 2 is molded by the insulator 13 and can be realized by being preliminarily mounted on the model of the entangled insulator 13 and removed from the mold together with the insulator 13 after molding. The location is buried. Further, in the present embodiment, the measurement terminal pressure detecting portion 18 is exposed, but the exposure may not be said to be the necessary article 201212086 for achieving the effects of the invention, even if it is molded. It is not necessary for the vacuum measurement terminal 1 2 to perform vacuum measurement in the model. As shown in Fig. 3, the vacuum measurement terminal 12 is connected to the pressure diagnostic device 19 by the dielectric voltage detecting unit 18. This voltage is set by the capacitor 26 (capacitor MC〇), and is connected to the capacitor unit, and the voltmeter voltmeter 20 that measures the output voltage Vut of the capacitor 26 is connected to the determination unit for determining whether the vacuum pressure is normal or not. For the connection of the grounded capacitor 26, it is determined in the voltmeter 20 that V is applied across the capacitor 26. ^. The determination unit 2 1 compares the measurement enthalpy measured by the predetermined reference 値 and the profit 20, and determines that the measurement 为 exceeds the reference 値, and determines that the vacuum pressure is normal after the reference 値 is lower than the reference 値, and the vacuum pressure is deteriorated. Description. As shown in Fig. 4, the discharge characteristic is a Paschen curve showing the relationship between pressure and voltage. When the distance between the main circuit and the intermediate shield is constant, the road-intermediate shield 5 is when the pressure rises above a certain level. A discharge is generated between them to raise the intermediate shield V. Here, by ensuring the electrostatic capacitance C between the vacuum measurement terminals 12 - 2, the distance between the vacuum measurement terminals 1 2 and the vacuum measurement terminals 1 - 2 intermediate shields 5 is predetermined, and the terminals 1 2 can be detected. Phase output voltage V()Ut. In other words, it is not possible to change the electrostatic capacitance C i 之间 between the terminal 1 2 and the intermediate shield 5 from the predetermined enthalpy. The 'output voltage VQUt' is based on the capacitor 26, and is embedded in the measurement end force diagnostic device 26 in parallel with 20 and 21. The voltage at the other end is between the voltmeter vacuum pressure 放电 vacuum discharge start 5, the main power 5 potential mask 5 shape, from the vacuum, the vacuum system is important electrostatic capacitance -10- 201212086 The ratio of the amount C 0 to the electrostatic capacitance C i between the vacuum measurement terminal 1 2 and the intermediate shield 5 is determined 'can be calculated as shown below. V〇u, = V, XC, / (Cj + Co) At this time, the voltage V is used. ^In the manner of the detection range of the pressure diagnostic device 19, C〇, C are set in advance. In other words, since Co and Ci are known constants, the electric seat v is measured. ^, the potential V of the intermediate mask 5 can be calculated. Further, as described above, the voltage V is increased in accordance with the pressure in the vacuum valve 1, and rises when the vacuum pressure is abnormally generated. Therefore, the voltage V or the voltage V^t値 can diagnose the vacuum opening and closing. The soundness of the vacuum pressure of the device. In the present embodiment, the vacuum measuring terminal 12 has a shape which is approximately equal to the center of the intermediate mask 5 and covers at least a portion of the outer peripheral side of the intermediate mask 5 approximately concentrically. The mask 5 and the portion where the vacuum measurement terminal 12 is closest to each other are formed in a planar shape. The electrostatic capacitance C is hard to vary, and the electrostatic capacitance can be freely changed by changing the area opposed to the intermediate mask 5. The size 'improves the accuracy of the vacuum pressure diagnosis. Thereby, the electrostatic capacitance 値 can be freely designed in such a manner that the voltage Vm is integrated in the detection range of the pressure diagnosing device 19. Further, in the present embodiment, the intermediate shield cover 5 is formed into a cylindrical shape by fitting the cylindrical vacuum valve 1, and the vacuum measurement terminal 12 is also formed to be approximately concentrically covered, but even the intermediate shield 5 is even Only a part of the intermediate hood 5 and the vacuum measuring terminal 1 between the -11 - 201212086 is close to the opposite distance, and a capacitor can be formed on the opposite surface, so that the electrostatic capacitance C 1 is difficult to change. At the same time, it is also possible to obtain a certain effect by changing the size of the opposing electrostatic capacitance. As a case of this feature, it is considered that the intermediate mask and the vacuum measuring terminal are formed in a similar shape, and the opposing distance between the two is substantially constant for the similar shaped portion. In this case, the capacitance of the capacitor formed on the opposite surface can be more stable 'single for the intermediate mask, even if only a part of the intermediate mask and the vacuum measuring terminal are closest to each other. It is advantageous that the opposite distance is approximately a certain surface. Further, in the case where the intermediate mask and the vacuum measuring terminal (at least a part of the terminal) are in a similar shape, and the opposing distance between the two is approximately constant, as shown in the present embodiment, the intermediate mask 5 is further provided. In the cylindrical shape, the vacuum measuring terminal 12 has a shape which is approximately equal to the center of the intermediate mask 5 and covers at least a portion of the outer peripheral side of the intermediate mask 5 in a substantially concentric shape, and may have no corners and can be relaxed. It is more advantageous to concentrate the electric field. Further, in the present embodiment, the intermediate shield 5 is mainly described in the case of preventing the arc from adhering to the arc shield of the insulating cylinder. However, in the case where the vacuum is deteriorated and the discharge occurs, the arc shield is turned on due to the discharge. Therefore, it is possible to apply to all the masks in the vacuum valve 1. [Embodiment 2] -12-201212086 The second embodiment will be described with reference to Fig. 5. In the present embodiment, the vacuum opening and closing device described in the first embodiment will be described in the case where the three phases are arranged in parallel. However, the respective vacuum opening and closing devices are the same as those in the first embodiment, and the description thereof will not be repeated. In the present embodiment, as shown in Fig. 5, the measurement terminal voltage detecting unit 1 8 which applies the voltage of the three-phase vacuum measuring terminal 12 by the connection point 27, applies the synthesized voltage to the capacitor. 2 6 The ground side is connected to the other end side of one end. Therefore, the output voltage V is detected. . The number is proportional to the composite 値 of the voltage generated at the measurement terminal of the three-phase component. According to the contents described in the first embodiment, although the soundness of the vacuum pressure of the vacuum opening and closing device can be diagnosed, since the potential induced by the intermediate shielding cover is about 40% of the main circuit, it is higher than the conventional number, and then In the state of the contact (input and cut-off), the potential is changed, and the S/N ratio is easily lowered. Therefore, in the present embodiment, as shown in Fig. 5, by synthesizing the signal of the three-phase component in the detector for determining the abnormal vacuum pressure, the random noise can be canceled and the S/N ratio is increased. For example, when the signal with the degree of vacuum is normal is 〇, a signal is generated when an abnormality occurs in any of the phases, causing a three-phase unevenness, and the vacuum leakage of the vacuum container can be monitored. It is only necessary to adjust the respective electrostatic capacitances for the voltages at the normal time and the abnormality, and it is not necessarily normal when the voltage is 0, and the potential is changed by the 〇 when the abnormality occurs. Further, in the present embodiment, the case where the measurement terminal voltage detecting unit 18 that synthesizes the three-phase component is integrated by one of the connection points 27 will be described. However, a plurality of connection point phase-synthesized voltages may be provided. Even if there is no synthesis -13- 201212086 All three phases are only synthesized into two phases, and the effect of S/Ν ratio can be improved. In order to check whether the vacuum measurement terminal 12 is operating normally, the AC withstand voltage test of the routine test before shipment of the product. The true 3 12 system is generated when the combined voltage of the three phases becomes uneven. By applying an AC voltage test to each phase, the terminal 12 can be measured to operate normally. Since the vacuum measurement test and the AC withstand voltage test have been carried out separately, the vacuum check terminal 12 and the AC test can be simultaneously performed. Therefore, it is possible to plan the test before the switch device is shipped. [Embodiment 3] Embodiment 3 of the present invention will be described with reference to Fig. 6 for the vacuum opening and closing state described in each of the above embodiments. All of the above are the same as above, and the sales are repeated. In the present embodiment, the open circuit state is such that the intermediate gas intermediate contact 30 of the gas-insulated connection 25 and the sleeve-side fixed electrode 31 are fixed to the contact side of the grounding gas in the gas-insulated grounding disconnecting portion 25. The distance between the electrodes 3 2 is large. Further, the vacuum valve 1 side is placed at the blocking position to improve the reliability of the open circuit state. The ground side 32 is connected to the metal frame 28 of the ground potential. According to this configuration, even if an abnormality such as a lightning strike occurs on the load side, the measurement of the terminal signal is utilized, and the method of confirming the vacuum § 12 is shortened by the withstand voltage test time. In the case where the disconnection at the sixth place is slightly different from the ground contact portion formation 29 and the ground contact is also fixed to the electrode, -14-201212086, because the vacuum valve 1 side is at the blocking position, the abnormality does not affect the busbar side. Can improve reliability. Further, assuming that a vacuum leak has occurred, even if the blocking state in the vacuum valve 1 is broken, the contact between the contacts is turned on, and the potential of the load side abnormal state is applied to the movable conductor 3 in the gas because the gas is supplied. The distance between the intermediate gas contact point 30 of the intermediate insulated ground breaking portion 25 and the bushing side fixed electrode 31 is formed such that the distance between the grounding gas contact point 29 and the ground side fixed electrode 32 of the gas insulated ground disconnecting portion 25 is Therefore, the intermediate gas in the middle of the movable conductor 3 3 in the gas does not conduct between the contact point 30 and the sleeve side fixed electrode 31, but the grounding gas in the ventilating movable conductor 33 is connected to the ground 29 and the ground. The side is fixed between the electrodes 3 2 . Therefore, the abnormality can be prevented from reaching the bus side, and a grounding priority structure can be formed. Since the abnormality is applied to the bus side, it is also affected by other circuits, and the abnormal distribution of a circuit on the load side is caused. Therefore, as described above, the grounding priority structure is formed so that the abnormality does not reach the busbar side, and the reliability of the power system itself can be improved. Further, the features of the present embodiment are not necessarily used together with the vacuum pressure diagnosis in the above embodiments, and may be applied to a shutter or a switching device that does not perform vacuum pressure diagnosis. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1(a) is a top cross-sectional view showing a molded portion of the vacuum opening and closing device of the first embodiment. (b) is a cross-sectional view of a molded portion of the vacuum opening and closing device of the first embodiment. -15- 201212086 Fig. 2 is a schematic diagram of the vacuum sensing terminal of the first embodiment. Fig. 3 is a circuit diagram of the pressure diagnosing device of the first embodiment. Fig. 4 is a characteristic diagram showing the relationship between the pressure and the discharge start voltage. Fig. 5 is a wiring diagram of the pressure diagnostic apparatus of the second embodiment. Fig. 6 is a cross-sectional view showing a molded portion of the vacuum opening and closing device of the third embodiment. [Description of main components] 1 : Vacuum valve 2 : Fixed side ceramic cylinder 3 : Fixed side terminal block 4 : Fixed conductor 5 : Intermediate shield 6 : Movable side ceramic cylinder 7 : Movable side terminal block 8 : Movable conductor 1 2 : Vacuum measuring terminal 1 3 : Insulator 1 4 : Conductive coating 1 6 : Bushing 17 for busbar connection: Bushing for load connection 1 8 : Measuring terminal voltage detecting unit 19 : Pressure diagnostic device - 16 - 201212086 20 : Voltmeter 2 1 : Judging section 22 : Flexible conductor 23 : Insulation rod 24 for vacuum valve : Insulation rod 25 for grounding disconnection part : Gas-insulated grounding breaking section 26 : Capacitor 27 : Connection point 28 : Metal frame 2 9 : Grounding Contact point in gas 3 0 : contact in intermediate gas 3 1 : fixed side of bushing side 3 2 : fixed side of ground side 33 : movable conductor in gas -17