TW201208793A - Drill hole entry sheet - Google Patents

Drill hole entry sheet Download PDF

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Publication number
TW201208793A
TW201208793A TW100121203A TW100121203A TW201208793A TW 201208793 A TW201208793 A TW 201208793A TW 100121203 A TW100121203 A TW 100121203A TW 100121203 A TW100121203 A TW 100121203A TW 201208793 A TW201208793 A TW 201208793A
Authority
TW
Taiwan
Prior art keywords
water
soluble resin
resin composition
drill
drilling
Prior art date
Application number
TW100121203A
Other languages
Chinese (zh)
Other versions
TWI519365B (en
Inventor
Yousuke Matsuyama
Takuya Hasaki
Kenichi Shimizu
Reiki Akita
Shinya Komatsu
Original Assignee
Mitsubishi Gas Chemical Co
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Publication of TW201208793A publication Critical patent/TW201208793A/en
Application granted granted Critical
Publication of TWI519365B publication Critical patent/TWI519365B/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B26HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26DCUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D7/08Means for treating work or cutting member to facilitate cutting
    • B26D7/088Means for treating work or cutting member to facilitate cutting by cleaning or lubricating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B26HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26FPERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
    • B26F1/00Perforating; Punching; Cutting-out; Stamping-out; Apparatus therefor
    • B26F1/16Perforating by tool or tools of the drill type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B35/00Methods for boring or drilling, or for working essentially requiring the use of boring or drilling machines; Use of auxiliary equipment in connection with such methods
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0044Mechanical working of the substrate, e.g. drilling or punching
    • H05K3/0047Drilling of holes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/02Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
    • H05K2203/0214Back-up or entry material, e.g. for mechanical drilling

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
  • Laminated Bodies (AREA)
  • Drilling And Boring (AREA)

Abstract

Provided is a drill hole entry sheet that: is formed on at least one side of a metal support foil from a crystalline, water-soluble resin compound as a layer 0.02-0.3 mm thick; has excellent hole position accuracy; is formed from a resin that does not cling to the drill bit; and protects the drill bit from damage. The crystal particles of the water-soluble resin compound have an average diameter of 5-70 μm and a standard deviation of 25 μm or less. The drill entry surface of the layer formed from the water-soluble resin compound has a surface roughness (Sm) of 8 μm or less. After a hot melt of the water soluble resin compound is directly applied to the metallic support foil or after a solution that contains the water soluble resin compound is applied to the metallic support foil and dried, the aforementioned layer is formed by being cooled from 120-160 DEG C to 25-40 DEG C within 60 seconds at a cooling speed of 1.5 DEG C/s or greater.

Description

201208793 六、發明說明: 【發明所屬之技術領域】 本發明係關於貼鋼積層板和多層板之鑽孔加卫時所使用 之鑽孔用蓋板。 【先前技術】 作為印刷佈線板材料所使用之貼納積層板和多層板之鑽 孔加工方法’一般係採用將貼銅積層板或多層板配置一片, 或重疊複數片,並將料金屬切料體或在金屬支撐縣 面上形成樹脂組成物層之薄片(以下,在本說明書中,通常 係將此薄片稱為「魏用蓋板」配置作為抵住最上部 之板,而進行開孔加工之方法。 近年來對於屬於印刷佈線板材料之貼銅積層板和多層板 的要求,係有高密度化'生產性提升與成本降低,並要求使 孔位置精確度提升之高品質關孔加h為了對應此要求, 係例如在專利文獻1中提案有:使用由聚乙二醇等水溶性樹 脂所構成之薄片的開孔加卫法。x,在專敎獻2中提案 有.在金屬箔上形成水溶性樹脂層之開孔用滑劑薄片。甚至 於專利文獻3中提案有:於喊有熱硬化性樹脂薄膜之紹羯 上形成水溶性樹脂層之開孔用蓋板。 然而,相較於半導體之高密度化技術的發展,印刷佈線板 之高密度化技術的發展緩慢,而有所差距,故而將對於印刷 佈線板材料之高密度化的要求予以更高度化。為了對應此要 100121203 3 201208793 求’係有進一步使孔位置精確度提升之必要,而熱烈期盼孔 位置精確度更優異之鑽孔用蓋板的開發。 此外’再加上一併考慮全球化所造成之競爭激烈化與新興 國家的需求’針對生產性提升及成本降低方面有著更為強烈 的要求。因此,為使孔位置精確度進一步提升,使可一次開 孔之重疊片數增加,而熱烈盼望孔位置精確度更優異之鑽孔 用蓋板的開發。 [專利文獻1]曰本專利特開平4-92494號公報 [專利文獻2]日本專利特開平5_1694〇〇號公報 [專利文獻3]日本專利特開2〇〇3_136485號公報 【發明内容】 (發明所欲解決之問題) 對於屬於印刷佈線板材料之貼銅積層板和多層板的要 係如上所述,為高密度化、生產性提升及成本降低,詳細〈 如下述,要求使孔位置精確度提升之開孔加工性。 第-個問題騎卿線板之高密度化,其係可直接表示〆 最小孔直徑的推移。關於量產,係進化到〇.3mm、〇.25mm 〇.2醜之小徑化,而可鑽孔為〇.15mm、〇.i05mm之程度 然而,關於最小孔直徑為〇.08職、o.075mm、0 06mm 0.05mm之極小㈣,係採用雷射開孔。其理由係因為⑴ 硬金屬㈣造之極小徑鑽賴而料凹折,故在先前技術二 鑽孔用盍板巾’容㈣起極小闕頭之折損所致。於極小; 100121203 4 201208793 的領射,防止鑽頭之折損、位置精確度良好地進行鑽孔之 問題係先前技術所未能解決的。 第二個問題為黏附有樹脂之鑽頭’其係於旋轉中重心由其 軸線偏離時’結果會引起芯振動,而有損於鑽孔之位置精確 度。極小徑之鑽頭係少量樹脂的_即容易弓丨起芯振動。此 外,於樹脂落下位置與鑽孔位置相同之情形下,鑽頭會碰到 所落下之樹脂,而損及求芯性’會引起孔位置精確度惡化或 鑽頭之折損。ϋ此,針對極小徑之綱,財進—步減少勒 附在鑽頭上之樹脂的必要,關於極小徑之鑽頭,因為排出其 切削物之螺旋狀溝槽偏細城’故樹脂容易黏附在鑽頭上, 此係先前技術所未能解決的問題。另外,上述求芯性係指切 削時之切削方向的向前性。 第三個問題則是鑽頭在接觸到蓋板之樹脂組成物層時,會 一邊滑動,而前端刀片一邊切入樹脂組成物層中。此處,滑 動會損及求心性,由於係用以達到高密度化之極小捏鑽頭, 重要的是減少滑動量以提升孔位置精確度。然而,極小徑之 鑽頭係亦受到樹脂組成物層之表面狀態上細微差異的影塑 而進行滑動,當此滑動量偏大時,會有鑽頭折損之情形。而 關於減少此滑動量、提升孔位置精確度方面,係先前技術所 未能解決的。 第四個問題係與鑽頭徑無關’而有生產性提升與成本降低 之市場要求。背景為一併考慮全球化所造成之競爭激烈化、 100121203 5 201208793 加上新興國家的需求之必要性、希望壓縮庫存量規模之需 求。又’以高密度化使孔數急遽增加而開孔加工時間會長時 間化方面及與雷射開孔技術之競爭方面均是促進生產性提 升與成本降低的驅動力。例如,因為全球化,所以在成本結 構不同之國家可以便宜製作的問題係會引起嚴重的競爭,在 一併考慮收入水準低得非常懸殊之新興國需求方面,必需是 非常便宜的成本。也就是說,生產性提升與成本降低之市場 要求與先前相較為非t強烈的,有必要進—步提升孔位置精 確度、增加可—次開孔之關積層板和多層板之重疊片數, :求得生產性提高、抑_孔料備投資金額、成本刪減。 ^技更為嚴厲之成本與重疊片數之兼顧方面,係 =技術所未能解決的。另外,所謂增加重疊片數係指已重 和多層板之最上部與最下部之孔位置精確 ^保持良好,而在鑽孔刀片長度所允許的範圍 貼銅積層板和多層板。 為了解決上述_,本發明之目的係在於提供—種相較於 先前技術之鑽孔用蓋板,係 、 J防止鑽頭折知、孔位置精確度 優”、树脂難以黏附在鑽頭上之鑽孔用蓋板。 (解決問題之手段) 本發明者等係為了解決上述問題而進行各 重要的是練㈣料入面續驗成:果 其是水溶歸齡絲之結-时均_=; 100121203 6 201208793 ^、樹爿曰組成物層之鑽頭進入面的表面粗糙度(凹凸之平 均間隔)。然後,透過將製造時之冷卻條件予以特定,則可 以控制水溶性樹脂組成物之結晶性,其結果為發現可使結晶 粒小且標準偏差小之緻密性結晶多數生成 ,而表面粗綠度201208793 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a drilling cover plate for use in drilling and affixing a steel laminated board and a multilayer board. [Prior Art] As a method of drilling a laminate of a laminated board and a multi-layer board used as a material of a printed wiring board, it is generally used to arrange a copper-clad laminate or a multi-layer board, or to overlap a plurality of sheets, and to cut the metal material. A sheet in which a resin composition layer is formed on a metal support surface (hereinafter, in the present specification, the sheet is generally referred to as a "wei cover" as a plate that is placed against the uppermost portion, and is subjected to the hole processing. In recent years, the requirements for copper-clad laminates and multi-layer boards belonging to printed wiring board materials are high-density 'productivity improvement and cost reduction, and high-quality holes for increasing hole position accuracy are required. In order to cope with this requirement, for example, Patent Document 1 proposes an opening and squeezing method using a sheet made of a water-soluble resin such as polyethylene glycol. x, which is proposed in the special 2, in the metal foil A slip sheet for opening a water-soluble resin layer is formed thereon. Even in Patent Document 3, a cover for opening a water-soluble resin layer is formed on a film having a thermosetting resin film. Compared with the development of high-density technology for semiconductors, the development of high-density technology for printed wiring boards is slow, and there is a gap. Therefore, the requirements for high density of printed wiring board materials are further increased. This is 100121203 3 201208793. It is necessary to further improve the accuracy of the hole position, and it is expected to develop the drilling cover with better hole position accuracy. In addition, it is considered to be caused by globalization. The fierce competition and the demand of emerging countries have more intense requirements for productivity improvement and cost reduction. Therefore, in order to further improve the hole position accuracy, the number of overlapping openings can be increased, and the hope is increased. Japanese Patent Laid-Open Publication No. Hei No. Hei-4-92494 (Patent Document 2) Japanese Patent Laid-Open Publication No. Hei No. Hei-5-9694 No. [Patent Document 3] Japan Patent Publication No. 2〇〇3_136485 [Draft of the Invention] (Problems to be Solved by the Invention) Copper-clad laminates and layers belonging to printed wiring board materials As described above, in order to increase the density, productivity, and cost, the details are as follows: The hole processing property is required to improve the hole position accuracy. The first problem is the high density of the riding wire plate. The system can directly indicate the change of the minimum hole diameter. For mass production, it has evolved to a diameter of 33mm, 〇.25mm 〇.2 ugly, and can be drilled to a degree of 〇15mm, 〇.i05mm. The minimum hole diameter is 〇.08, o.075mm, 0 06mm 0.05mm is very small (four), the use of laser opening. The reason is because (1) hard metal (four) made of small diameter drilled and folded, so In the prior art, the drilling of the shovel towel was made by the 容 四 四 四 四 四 四 四 四 四 四 四 四 四 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 What could not be solved. The second problem is that the bit that adheres to the resin, which is attached to the center of gravity when it is rotated by its axis, causes the core to vibrate, which detracts from the positional accuracy of the hole. The drill with a very small diameter is a small amount of resin _ that is easy to bow the core vibration. Further, in the case where the resin drop position is the same as the drill position, the drill bit may hit the dropped resin, and the damage to the core property may cause the hole position accuracy to deteriorate or the drill bit to be broken. Therefore, for the outline of the extremely small path, Caijin-step reduces the need for the resin attached to the drill bit. For the drill with a very small diameter, the spiral groove of the cutting object is too fine, so the resin tends to adhere to the drill bit. Above, this is a problem that was not solved by prior art. Further, the above-mentioned core-finding property refers to the forward direction of the cutting direction at the time of cutting. The third problem is that the drill bit slides while contacting the resin composition layer of the cover, and the front end blade is cut into the resin composition layer. Here, the slip is detrimental to the centering property, and since it is used to achieve a high density of the pinch bit, it is important to reduce the amount of slip to improve the hole position accuracy. However, the drill having a very small diameter is also slid by the slight difference in the surface state of the resin composition layer, and when the amount of sliding is too large, the drill may be broken. Regarding the reduction of the amount of sliding and the accuracy of the position of the lifting hole, it has not been solved by the prior art. The fourth problem is irrelevant to the diameter of the drill bit, and there is a market demand for productivity improvement and cost reduction. The background is to consider the intense competition caused by globalization, 100121203 5 201208793 plus the need for emerging countries, and the need to reduce the size of inventory. In addition, the increase in the number of holes by the high density, the long processing time of the opening, and the competition with the laser opening technology are the driving forces for promoting productivity improvement and cost reduction. For example, because of globalization, problems that can be cheaply produced in countries with different cost structures can cause serious competition, and it is a very cheap cost to consider the needs of emerging countries where income levels are very low. That is to say, the market demand for productivity improvement and cost reduction is not strong compared with the previous ones. It is necessary to further improve the hole position accuracy and increase the number of overlaps of the laminated sheets and the multilayer boards of the secondary openings. , : To obtain productivity improvement, _ hole material preparation investment amount, cost reduction. ^ The more stringent cost and the number of overlapping pieces are not solved by the technology. In addition, the addition of the number of overlapping sheets means that the positions of the uppermost and lowermost holes of the multi-layered plate are accurately and well maintained, and the copper laminate and the multilayer board are attached in the range allowed by the length of the drilling insert. In order to solve the above problems, the object of the present invention is to provide a drilling cover plate which is superior to the prior art, which is capable of preventing the drill bit from being folded, and the hole position is excellent in accuracy, and the resin is difficult to adhere to the drill hole. The cover of the present invention (the means for solving the problem) The inventors of the present invention have made it important to solve the above problems (4) to continue the inspection of the material into the surface: it is the knot of the water-soluble silk-age-time average _=; 6 201208793 ^, the surface roughness of the drill entry surface of the tree raft (the average interval of the unevenness). Then, by specifying the cooling conditions at the time of manufacture, the crystallinity of the water-soluble resin composition can be controlled. As a result, it was found that dense crystals having a small crystal grain size and a small standard deviation were mostly formed, and the surface roughness was coarse.

Sm亦小。其结果係可提高鑽頭之求&性,而可思及能以高 位置精確度進行開孔、可減少點附在鑽頭上之樹脂、可減少 鑽頭之折損的極小徑之鑽頭。 本發明係根據上述知識而完成者,其主旨係如下所述。 ⑴種鑽孔用蓋板,係在金屬支樓落之至少單面上,形成 有由結晶性之水溶性樹脂組成物所構成之厚度為 0.02 0.3mm之層者’其特徵為’上述水溶性樹脂組成物之 結晶粒係平均粒徑在5〜7一之範圍内,其標準偏差在 以下’由±述水溶性樹脂組成物所構成之層於鑽頭進入面之 表面粗縫度Sm為8μιη以下,上述由水溶性樹脂組成物所 構成之層係在上述金屬支標箱上,於直接塗佈上述水溶性樹 月曰組成物之熱融解物後,或於將含有上述水溶性樹脂組成物 之溶液予以塗佈並使乾燥後,以说/秒鐘以上之冷卻速度 在60秒鐘以内,從12〇ΐ〜16〇ϊ:之溫度冷卻至25。〇〜4〇1 之溫度而形成。 ⑺如(1)中所記载之鑽孔用蓋板,其中,上述水溶性樹脂組 成物之結晶粒係平均粒徑在5〜4〇/im之範圍内,且其標準偏 差在17μιη以下,由上述水溶性樹脂組成物所構成之層於鑽 100121203 201208793 頭進入面之表面粗縫度Sm為7juni以下。 (3) 如(1)中所記載之鑽孔用蓋板其中,上述水溶性樹脂組 成物係含有水溶性樹脂(A),並進一步含有由疏水性物質 (B1)、融點高於上述水溶性樹脂之物質(B2)及可提高與 上述水溶性樹脂(A)之相溶性之物質(B3)所選出之至少一 種。 (4) 如(1)中所記載之鑽孔用蓋板,其中,含有上述水溶性樹 脂組成物之溶液係進一步含有水及沸點低於水之溶媒。 (5) 如(1)中所記載之鑽孔用蓋板,其中,上述金屬支擇箔之 厚度在0.05〜0.5mm之範圍内。 (6) 如(1)中所記載之鑽孔用蓋板,其係使用於貼銅積層板之 加工。 (發明效果) 本發明之鑽孔用蓋板係因為可使水溶性樹脂組成物層之 結晶粒小,且標準偏差小之緻密性結晶多數生成,表面粗糙 度Sm亦小,故而可提高鑽頭之求芯性而位置精確度優良地 進行開孔,可減少黏附在鑽頭上之樹脂,其結果為可以大幅 降低開孔加工時之鑽頭的折損。藉此,能以高品質進行生產 性優異之開孔加工。 【實施方式】 本發明之鑽孔用蓋板係於金屬支撐板之至少單面上,形成 由具有結晶性之水溶性樹脂組成物所構成之層(以下,稱為 100121203 201208793 「水溶性樹缝成物層」)的觀用蓋板。 接著,關於本發明之鑽孔 ^ 物方面,具有特定_之粒㈣在水雜樹脂組成 之表==::鑽一具有特_ ㈣la成物之結晶粒之平均粒徑就鑽孔加工 時用以提升孔位置精確度方面而言,係以5〜卿⑺之範圍為 必要’較佳為5〜5〇_之範圍,更佳為之範圍,再 更佳為5〜30卿之範圍,難為5〜2〇卿之範圍,而最佳則 為5 ΙΟμιη之範圍。在結晶粒之平均粒徑未滿$从以之情形 下由貝驗可以發現到上述水溶性樹脂組成物表面會變得過 於均勻,而上述鑽頭前端之刀片滑動,會使對蓋板表面之抓 緊性降低,有損於求芯性,其結果為結晶粒變小,而未能得 到使孔位置精確度提升之效果。另一方面,於超過7〇/mi之 情形下’由實驗可以發現到鑽頭朝蓋板表面之進入會影響到 結晶粒之凹凸而有損於求芯性’其結果為會有孔位置精確度 惡化之疑慮。 此處’圖2傣示意性表示使用先前技術之鑽孔用蓋板來進 行開孔加工時之狀態的圖,圖3係示意性表示使用本發明之 鑽孔用蓋板來進行開孔加工時之狀態的圖。在使用本發明之 水溶性樹脂組成物層2之情形下,如圖3所示般,因為可以 S. 100121203 9 201208793 對應於鑽頭前端1之大小而謀求構成水溶性樹脂組成物層2 之結晶粒2a〜2g之平均粒徑的最佳化,故而鑽頭前端1與上 述水溶性樹脂組成物層2之抓緊性良好,使孔位置精確度之 提升成為可能。另一方面,在使用先前技術之樹脂組成物層 20之情形下,如圖2所示般,相較於鑽頭前端丨之大小, 因為構成樹脂組成物層20之各結晶粒2〇a〜2〇c變大,所以 會有上述鑽頭前端1於各結晶粒2〇a〜2〇c之表面上引起滑動 等之疑慮,有相於求芯性,且孔位置精確度惡化。 此處,本發明之所謂水溶性樹脂組成物之結晶粒的粒徑 (以下,有時會稱為「結晶粒徑」)係指由蓋板之垂直上方進 行觀察時,在存在於水溶性樹脂組成物層表面之結晶粒中, 為最大直徑者。 又’作為測量上述水溶性樹脂組成物之結晶粒徑之平均值 的方法’係採用V-LASER顯微鏡(型號νκ·9700,KEYENCE CORPORATION)以200倍的視野對於鑽孔用蓋板之樹脂組 成物層的表面進行觀察,針對任意選擇之5〇個結晶粒之各 個最大直徑以相同顯微鏡進行實際測量,而將該平均值(個 數平均)當作為上述水溶性樹脂組成物之平均粒徑。另外, 在本發明中,結晶粒徑未滿1μπι者係將之去除掉而進行計 算。 又,為了提升鑽孔加工時之孔位置精確度,除了針對上述 水溶性樹脂組成物之結晶粒的粒徑謀求最佳化之外,亦有上 100121203 10 201208793 述結晶粒之平均粒徑的標準偏差在25/lm以下之必要’較孩 為20/mi以下,更佳為17μιη以下,再更佳為15#m以下, 特佳為l〇^m以下,最佳則為5μπι以下。作為限定上述禕 準偏差之理由,係因為在實驗中發現到臨界處,於即便是結 晶粒之平均粒徑值偏小而其標準偏差超過25^m之情形下, 大直徑之粒子分散存在,凹凸偏大,而會有孔位置精確度惡 化之疑慮。 關於上述水溶性樹脂組成物之結晶粒之平均粒徑的標準 偏差之計算方法,係採用V_LASER顯微鏡(型號νκ_97〇〇, KEYENCE CORPORATION)以200倍的視野對於鑽孔用蓋 板之樹脂組成物層的表面進行觀察,針對任意選擇之5〇個 結晶粒之各個最大直徑以相同顯微鏡進行實際測量,而計算 出其平均值。並可進一步計算出所量測之5〇個結晶粒之各 個最大直徑之標準偏差。 又,由上述水溶性樹脂組成物所構成之層係鑽頭進入面之 表面粗糙度(更詳言之,為由JIS-B0601-1994所規定之凹凸 之平均間隔)Sm必須在8μηι以下,較佳為7μιη以下,更佳 為6μιη以下,再更佳為5μηι以下,最佳則為4gm以下。因 為在實驗中發現到臨界處,於超過8卿之情形下,鑽頭朝 蓋板表面之進入會影響到表面凹凸而有損於求芯性,故可知 會有孔位置精確度惡化之疑慮。 關於上述水溶性樹脂組成物層之表面粗糙度Sm之取得方 100121203 ,, 201208793Sm is also small. As a result, the drill bit can be improved and the drill can be made with a high positional accuracy, a resin which can be attached to the drill bit, and a drill having a very small diameter which can reduce the breakage of the drill bit. The present invention has been completed based on the above knowledge, and the gist thereof is as follows. (1) A cover plate for drilling is formed on at least one side of a metal branch, and a layer having a thickness of 0.02 0.3 mm composed of a crystalline water-soluble resin composition is formed, which is characterized by the above-mentioned water solubility. The average grain size of the crystal grain of the resin composition is in the range of 5 to 7 and the standard deviation is as follows: the layer having the water-soluble resin composition of ± is formed on the surface of the drill entering surface, and the roughness Sm is 8 μm or less. The layer composed of the water-soluble resin composition is applied to the metal branching box, and after directly applying the hot melt of the water-soluble tree sorghum composition, or containing the water-soluble resin composition After the solution is applied and dried, it is cooled to 25 at a temperature of from 12 Torr to 16 Torr in a cooling rate of / sec or more. It is formed by the temperature of 〇~4〇1. (7) The cover sheet for drilling according to the above aspect, wherein the water-soluble resin composition has a crystal grain size average particle diameter of 5 to 4 Å/im, and a standard deviation of 17 μm or less. The layer composed of the above water-soluble resin composition has a surface roughness Sm of 7 Juni or less on the surface of the head of the drill 100121203 201208793. (3) The water-repellent resin composition according to (1), wherein the water-soluble resin composition contains a water-soluble resin (A), and further contains a hydrophobic substance (B1), and a melting point higher than the water-soluble one The substance (B2) of the resin and at least one selected from the substance (B3) which improves the compatibility with the water-soluble resin (A). (4) The drilling cover according to (1), wherein the solution containing the water-soluble resin composition further contains water and a solvent having a boiling point lower than that of water. (5) The cover plate for drilling according to (1), wherein the thickness of the metal-removing foil is in the range of 0.05 to 0.5 mm. (6) The drilling cover plate according to (1), which is used for processing a copper laminated board. (Effect of the Invention) The hole for the drilling of the present invention is such that the crystal grains of the water-soluble resin composition layer are small, and the dense crystals having a small standard deviation are mostly formed, and the surface roughness Sm is also small, so that the drill bit can be improved. The core is excellent in positional accuracy, and the resin adhered to the drill can be reduced. As a result, the breakage of the drill during the drilling process can be greatly reduced. Thereby, it is possible to perform the drilling process with excellent productivity with high quality. [Embodiment] The cover plate for drilling according to the present invention is formed on at least one surface of a metal support plate to form a layer composed of a water-soluble resin composition having crystallinity (hereinafter referred to as 100121203 201208793 "Water-soluble tree slit" The cover for the "layer"). Next, regarding the drilling material of the present invention, the particle having the specific content (4) in the composition of the water-resin resin ==:: drilling the average particle diameter of the crystal grain having the special _ (tetra) la product for drilling processing In terms of the accuracy of the position of the lifting hole, it is necessary to use a range of 5 to qing (7), preferably a range of 5 to 5 〇, more preferably a range, and even more preferably a range of 5 to 30 qing. The range of 5~2〇清, and the best is the range of 5ΙΟμιη. When the average particle diameter of the crystal grains is less than $, it can be found that the surface of the above water-soluble resin composition becomes too uniform, and the blade of the front end of the drill bit slides, which will grasp the surface of the cover plate. The decrease in properties is detrimental to the core property, and as a result, the crystal grains become small, and the effect of improving the hole position accuracy cannot be obtained. On the other hand, in the case of more than 7 〇/mi, it can be found from the experiment that the entry of the drill bit toward the surface of the cover plate affects the unevenness of the crystal grain and detracts from the core-seeking property. As a result, the hole position accuracy is obtained. Debating doubts. Here, FIG. 2A is a view schematically showing a state in which the drilling cover plate of the prior art is used for the drilling process, and FIG. 3 is a view schematically showing the use of the drilling cover plate of the present invention for the hole drilling process. The map of the state. In the case of using the water-soluble resin composition layer 2 of the present invention, as shown in Fig. 3, it is possible to form crystal grains constituting the water-soluble resin composition layer 2 in accordance with the size of the drill tip end 1 by S. 100121203 9 201208793. Since the average particle diameter of 2a to 2g is optimized, the grasping property of the drill tip 1 and the water-soluble resin composition layer 2 is good, and the hole position accuracy can be improved. On the other hand, in the case of using the resin composition layer 20 of the prior art, as shown in Fig. 2, the crystal grains 2a to 2 constituting the resin composition layer 20 are compared with the size of the front end of the drill. Since 〇c becomes large, there is a concern that the tip end 1 of the drill causes sliding on the surface of each of the crystal grains 2〇a to 2〇c, and the phase is inferior to the core, and the hole position accuracy is deteriorated. Here, the particle diameter of the crystal grain of the so-called water-soluble resin composition of the present invention (hereinafter, referred to as "crystal grain size") means that it is present in the water-soluble resin when viewed from the upper side of the cover plate. Among the crystal grains on the surface of the composition layer, it is the largest diameter. Further, 'the method of measuring the average value of the crystal grain size of the above-mentioned water-soluble resin composition' is a resin composition for a drilling cover plate using a V-LASER microscope (model number νκ·9700, KEYENCE CORPORATION) with a field of view of 200 times. The surface of the layer was observed, and the maximum diameter of each of the arbitrarily selected crystal grains was measured by the same microscope, and the average value (number average) was taken as the average particle diameter of the water-soluble resin composition. Further, in the present invention, the crystal grain size is less than 1 μm and is removed and calculated. Further, in order to improve the hole position accuracy during the drilling process, in addition to optimizing the particle size of the crystal particles of the water-soluble resin composition, there is also a standard of the average particle size of the crystal grains of 100121203 10 201208793 The deviation of 25/lm or less is less than 20/mi, more preferably 17 μm or less, still more preferably 15 #m or less, particularly preferably l〇^m or less, and most preferably 5 μm or less. The reason for limiting the above-mentioned deviation is because the critical point is found in the experiment, and even if the average particle diameter of the crystal grain is small and the standard deviation exceeds 25 μm, the large-diameter particles are dispersed, The bump is too large, and there is a doubt that the accuracy of the hole position is deteriorated. The method for calculating the standard deviation of the average particle diameter of the crystal grains of the above water-soluble resin composition is a resin composition layer for a drilling cover plate using a V_LASER microscope (model νκ_97〇〇, KEYENCE CORPORATION) with a field of view of 200 times. The surface was observed, and the average diameter of each of the 5 结晶 crystal grains of any selection was measured by the same microscope, and the average value was calculated. The standard deviation of each of the largest diameters of the measured 5 crystal grains can be further calculated. Further, the surface roughness of the entry point of the layer-based drill comprising the water-soluble resin composition (in more detail, the average interval of the irregularities defined by JIS-B0601-1994) Sm must be 8 μm or less, preferably It is 7 μm or less, more preferably 6 μm or less, still more preferably 5 μηι or less, and most preferably 4 gm or less. Because the critical point was found in the experiment, in the case of more than 8 qing, the entry of the drill bit toward the surface of the cover plate will affect the surface irregularities and detract from the core property, so that there is a concern that the accuracy of the hole position is deteriorated. The acquisition of the surface roughness Sm of the above water-soluble resin composition layer 100121203 , , 201208793

法,係採用V-LASER顯微鏡(型號VK-9700,KEYENCE CORPORATION)以200倍的視野對於樹脂組成物層之表面 進行觀察,去除雜訊,進行傾斜修正(面傾斜修正且高度範 圍自動修正),測量觀察影像中之任意方向之500Mm評估長 度的表面粗糙度(JIS-B0601 : 1994之線粗糙度)。可於相同 的觀察影像中進行同樣的測量,並測量5次,將其平均值設 為上述Sm。 本發明之鑽孔用蓋板中所使用之水溶性樹脂組成物層係 藉由在上述金屬支撐箔上,於直接塗佈水溶性樹脂組成物之 熱融解物後,使之冷卻之方法,或於將含有上述水溶性樹脂 組成物之溶液利用塗佈法等予以塗佈並使乾燥、冷卻之方法 而形成。 本發明之鑽孔用蓋板中所使用之水溶性樹脂組成物係含 有水溶性樹脂(A)之組成物,具有結晶性。具體而言,可例 示水溶性樹脂(A)與其他物質之混合物等。此處之其他物質 係可列舉有各種的無機化合物、有機化合物、混合物、複合 物、錯合體、低分子物、單體、募聚體、冑分子物、聚合物°、 天然樹脂、纖維、礦物、疏水性物f、親水性物質等。 上述水溶性樹脂⑷之種類係若為具有結晶性之水溶性樹 脂,則沒有特別限定,以結晶性高之水溶性樹脂為佳,例如, 以由聚環氧化物、聚丙烯酸鈉、聚丙_胺、竣甲基纖維素、 聚丁二醇及聚伸減二醇之㈣所構成之群組中選擇之一 100121203 12 201208793 種以上為佳。 作為上述聚環氧化物之例,較佳的是聚環氧乙烷、聚環氧 丙烷等。此外,更佳的是在分子構造中不會產生立體障礙之 聚%氧乙烷。所謂聚伸烷基二醇之聚酯係指使聚伸烷基二醇 與一元酸進行反應所獲得之縮合物。作為聚伸烷基二醇之 例,較佳的是可以聚乙二醇、聚丙二醇、聚丁二醇或該等之 共聚合物形式所例示之二醇類等。又,作為二元酸,係以由 鄰苯二甲酸、間苯二曱酸、對笨二曱酸、癸二酸及焦蜜石酸 等多元醆之局部酯、酸酐等所選擇者為佳。此外,更佳的是 將在分子構造中不會產生立體障礙之聚乙二醇當作為主鏈 的縮合物。 又本發明之水溶性樹脂組成物係以由水溶性樹脂(a)與 疏水性物質(B1)、融點高於上述水溶性樹脂(A)之物質(B2) 及可提高上述水溶性樹脂(A)與溶媒之相溶性之物質(B3)中 之至少一種所構成之組成物為佳。 在將疏水性物質(B1)調配至上述水溶性樹脂組成物中,而 力l夂丨生物貝(B1)分散於水溶性樹脂組成物中,並將該水溶性 樹脂組成物冷卻以進行固化之p祭,疏水性物質(B1)因為疏水 性而作為結晶生成之核發揮作用,可使上述水溶性樹脂組成 物之結晶粒偏小且多數析出。 藉由將融點高於上述水溶性樹脂(A)之物質(B2)調配至上 述水溶性樹脂組成物中,則可使該水溶性樹脂組成物冷卻以 100121203 _ 201208793 進灯固化時之固化速度產生差異。亦即,融點高之物質㈣ 以偏早之時間點進行固化之作料t作為結晶生成之核而 發揮作用’可使上述水溶性樹脂組成物之結晶粒偏小且多數 析出。在融點高於上述水溶性樹脂(A)之物質(B2)之中,不 僅是將結晶_小,料可進―錢上述水溶性樹脂組成物 層之表面粗糙度Sm降低之效果偏高之物質。 藉由將可提同上述水溶性樹脂(A)與溶媒之相溶性之物質 (B3)調配至上逑水溶性樹脂組絲中,則因⑻)之分子構造 中所3有之超基使該水溶性樹脂(A)均勻分散於溶媒中,故 而在水冷性樹脂組成物以乾燥、冷卻而進行固化時,可使結 曰曰粒偏小且多數生成。又,於可提高上述水溶性樹脂(A)與 溶媒之相溶性之物質(B3)之中,不僅是將結晶粒縮小,亦為 可使上述水溶性樹脂組成物層之表面粗糙度3爪降低之效果 偏高之物質。 此外,關於疏水性物質(B1)、融點高於水溶性樹脂(A)之 物質(B2)及可提高水溶性樹脂(A)與溶媒之相溶性之物質 (B3),均可由單獨物質而構成,亦可以兩種以上物質之混合 物形式而構成。另外,關於疏水性物質(B1)、融點高於水溶 性樹脂(A)之物質(B2)及可提高水溶性樹脂(A)與溶媒之相 溶性之物質(B3),均可以合併使用。 又,疏水性物質(B1)、融點高於水溶性樹脂(A)之物質(B2) 及可提高水溶性樹脂(A)與溶媒之相溶性之物質(b 3 )係相對 100121203 ,, 201208793 會旦二水讀難(A_重量份,以合計轉,有調配〇 ι 5重量份之必要,較佳的是調配0.Γ重量份〜3重量 =佳的是0.2重量份〜3重量份,特佳則為〇2重量份〜2 於未滿(M重量份時,會有難以顯現緻密性結晶生 ^果的情形’另一方面’若超過5重量份時,則經濟上不 B?、B:理的是選擇以少量即可顯現出效果之物質(B1、 二匕處’關於上述疏水性物質㈣,係只要為疏水性者,則 :性,Γ定。例如,可採用疏水性聚合物、長鏈醇類、疏 、夕頁及無機化合鱗。具體而言,係可列舉有作為熱 物之胺基甲酸,系,系、丙烯酸系等之聚合物 烯二:物、㈣亞胺、聚醯亞胺、聚氯乙烯-醋酸乙 丙稀醜胺、粉末_^、聚醋酸乙刺旨、聚谓、聚甲基 樹脂、乙稀乙料纖維素衍生物、聚乙歸基鱗、苯氧 醇共聚合樹脂、聚四氟乙粉末和 触子;可列舉有作為熱硬化性聚合 杯^ 脂、笨酚樹脂、尿素—… 减樹脂、矽樹 丙烯酸酉旨樹脂、雙項^丙烯聚乙二醇二甲基 啡樹脂、氰酸軸旨、::醯:胺樹脂、雙順丁埽隨亞胺三 列舉有作為長鏈本絲胺樹脂等之粉末和微粒子;可 it - a 知類之月桂基醇、鯨壤醇、硬脂烏r· n 知、方香醇等;可歹幃… *月曰基醇、油基 鉬酸鋅、石墨、二辟作為無機化合物之滑石、二硫化钥、 __ —,、氣化碳、氮化料之物質;係可 15 201208793 使用該等之-種或適當混合兩種以 發明之效果的上述疏水性物質 °x’ °高本 鋅、石墨、_為較佳。二心硬脂基醇'翻酸 ,.^ ” “口為該等具有相對於水溶 性㈣组成物溶液之分散性高的優點所致。 合 一關於上述融點高於水溶性樹脂(A)之物華),亦是融點 尚於上述樹脂(A)的話,則 ·〃 射5 h 寺別限疋。例如,可使用胺基 酸類、有機酸類、有機酸_吨 痛…去 有機鹽類、有機磷鹽類、多 醣類、松香類及無機化合物等。且 Iϋ # 八體而吕,可列舉有作為胺 基酸類之楚酿胺酸納等;可列嚴 幻+有作為有機酸類之蘋果酸、 丙二酉文、號贈、反丁烯二酸、順丁稀二酸、三聚氰酸等. :列:有作為有機酸鹽類之韻果酸、丙二酸、琥賴、反丁 稀二酉夂、順丁烯二酸、甲酸、醋酸、丙酸、硬脂酸、三聚氛 酸等之有機酸類的金屬鹽類等;可列舉有作為有機鹽類之三 聚氰胺三聚氰酸酯等;可縣有作為有機魏鹽 磷酸鈉鹽等,·可列舉有作為多糖類 夕了頰之纖維素、幾丁質、澱粉、 肝糖、洋餘、果料;可聽有作為松麵之浮油松香、 浮油脂肪酸等;可列舉有作為無機化合物之氣化納、硫酸 納、硫_等。又,作為提高本發明之效果的上述融點高於 水溶性樹脂(Α)之物質(Β2)係以麩醯胺酸鈉、琥珀酸、曱酸 鈉、甲酸鈣、硬脂酸鈉、硬脂酸鈣、纖維素等為佳。 作為上述可提高水溶性樹脂(Α)與溶媒之相溶性之物質 (Β3),例如,可列舉有在其分子構造令具有羥基之多元醇 100121203 16 201208793 類、糖醇類、胺基酸衍生物醇等。作為多元醇,係去掉包含 於水溶性難⑷中之聚乙二醇等之聚合物,㈣為聚:物 以外之多元si’係可列舉有三經甲基城、季戊四醇、新戍 二醇、三經曱基乙烧等;可列舉有作為糖醇之山梨糖醇、木 ,醇、環己六醇等;可列舉有作為胺基酸衍生物醇類之氧基 苯胺、氧基曱苯胺、酪胺酸、胺基去氧糖等。又,作為提高 本發明之效果的可提高水溶性樹雖)與溶叙相溶性之物 質(B3)’係以季戊四醇、山梨糖醇、木糖醇、環己六醇等為 較佳。 關於上述水溶性樹驗成物層之厚度,係根據鑽孔加工時 所使用之獅齡所要加卫之蘭積層板❹層板之構成 等而有所不同’通,為〇 〇2〜〇 3mm之範圍,較佳為 〇.〇2〜0.2mm之範圍。當水溶性樹脂組成物層之厚度未滿 〇.〇2_,則無法得到充分的潤滑效果,使得對於鑽頭之負 擔變大’而會有發生鑽騎損之疑慮。另—方面,當水溶性 樹脂組成物狀厚度超過Q 3mm冑,會增加樹脂黏附在鑽 頭上之情形。 此外’在當採用藉由塗佈法等將含有上述水溶性樹脂組成 物之溶液直接塗佈於金屬支撑箱上之方法的情形下,所使用 之溶液仙含有讀沸點低於水(較佳為低15。(:以上)之溶 媒的溶液為佳。關於彿點低於水之溶媒的鶴,並沒有特別 限又’例如’可列舉有醇類等之乙醇、甲醇和異丙醇,也可The V-LASER microscope (model VK-9700, KEYENCE CORPORATION) was used to observe the surface of the resin composition layer with a field of view of 200 times, to remove noise, and to perform tilt correction (face tilt correction and automatic correction of height range). The surface roughness of the 500 Mm evaluation length in any direction in the observed image was measured (JIS-B0601: Line roughness of 1994). The same measurement can be performed in the same observation image, and measured 5 times, and the average value thereof is set to the above Sm. The water-soluble resin composition layer used in the drilling cover sheet of the present invention is obtained by directly coating a hot melt of a water-soluble resin composition on the metal supporting foil, or cooling the layer The solution containing the water-soluble resin composition described above is applied by a coating method or the like, and dried and cooled. The water-soluble resin composition used in the drilling cover sheet of the present invention contains a composition of a water-soluble resin (A) and has crystallinity. Specifically, a mixture of a water-soluble resin (A) and another substance or the like can be exemplified. Other substances herein include various inorganic compounds, organic compounds, mixtures, complexes, complexes, low molecular weights, monomers, polymerizers, ruthenium molecules, polymers, natural resins, fibers, minerals. Hydrophobic substance f, hydrophilic substance, and the like. The type of the water-soluble resin (4) is not particularly limited as long as it is a water-soluble resin having crystallinity, and is preferably a water-soluble resin having high crystallinity, for example, polyepoxide, sodium polyacrylate, or polyacrylamide. One of the groups consisting of 竣methylcellulose, polytetramethylene glycol, and polycondensation diol (4) is preferably selected from the group consisting of 100121203 12 201208793 or more. As an example of the above polyepoxide, polyethylene oxide, polypropylene oxide or the like is preferred. Further, it is more preferable that poly-oxygen ethane which does not cause steric hindrance in the molecular structure. The polyester of the polyalkylene glycol refers to a condensate obtained by reacting a polyalkylene glycol with a monobasic acid. As the polyalkylene glycol, preferred are polyethylene glycol, polypropylene glycol, polytetramethylene glycol or glycols exemplified in the form of such copolymers. Further, as the dibasic acid, those selected from the group consisting of phthalic acid, isophthalic acid, p-dibenzoic acid, sebacic acid, and pyrogallic acid, such as a partial ester or an acid anhydride, are preferred. Further, it is more preferable to use polyethylene glycol which does not cause steric hindrance in the molecular structure as a condensate of the main chain. Further, the water-soluble resin composition of the present invention is such that the water-soluble resin (a) and the hydrophobic substance (B1) have a higher melting point than the water-soluble resin (A) (B2) and the water-soluble resin can be improved ( A) A composition comprising at least one of a substance (B3) compatible with a solvent is preferred. The hydrophobic substance (B1) is formulated into the above water-soluble resin composition, and the force B (B1) is dispersed in the water-soluble resin composition, and the water-soluble resin composition is cooled to be cured. In the p-sac, the hydrophobic substance (B1) acts as a nucleus formed by crystals due to hydrophobicity, and the crystal particles of the water-soluble resin composition are small and precipitated a lot. By formulating the substance (B2) having a higher melting point than the water-soluble resin (A) to the water-soluble resin composition, the water-soluble resin composition can be cooled to a curing speed of 100121203 _ 201208793 when the lamp is cured. Make a difference. That is, the substance having a high melting point (4) acts as a core for crystal formation by solidifying the material t at an earlier time point. The crystal grains of the water-soluble resin composition may be made small and precipitated in a large amount. In the substance (B2) having a higher melting point than the water-soluble resin (A), the effect of lowering the surface roughness Sm of the water-soluble resin composition layer is higher than that of the above-mentioned water-soluble resin composition layer. substance. By blending the substance (B3) which is compatible with the above-mentioned water-soluble resin (A) and the solvent into the upper water-soluble resin group yarn, the water-soluble one of the molecular structures of (8)) Since the resin (A) is uniformly dispersed in the solvent, when the water-cooling resin composition is cured by drying and cooling, the crucible particles are small and are mostly produced. Further, in the substance (B3) which improves the compatibility of the water-soluble resin (A) and the solvent, not only the crystal grains are reduced, but also the surface roughness of the water-soluble resin composition layer is lowered by 3 claws. A substance with a high effect. Further, the hydrophobic substance (B1), the substance (B2) having a higher melting point than the water-soluble resin (A), and the substance (B3) capable of improving the compatibility of the water-soluble resin (A) with the solvent may be composed of a single substance. The composition may also be composed of a mixture of two or more substances. Further, the hydrophobic substance (B1), the substance (B2) having a higher melting point than the water-soluble resin (A), and the substance (B3) which can improve the compatibility of the water-soluble resin (A) and the solvent can be used in combination. Further, the hydrophobic substance (B1), the substance (B2) having a higher melting point than the water-soluble resin (A), and the substance (b3) capable of improving the compatibility of the water-soluble resin (A) with the solvent are relative to 100121203, 201208793 It is difficult to read the water in the second day (A_ parts by weight, in total, it is necessary to mix 5 parts by weight, preferably 0. Γ parts by weight ~ 3 weight = preferably 0.2 parts by weight to 3 parts by weight) In the case of less than 2 parts by weight, it is difficult to develop a dense crystalline raw material. On the other hand, if it exceeds 5 parts by weight, it is economically not B? B: It is reasonable to select a substance which exhibits an effect in a small amount (B1, a second place) with respect to the above-mentioned hydrophobic substance (four), as long as it is hydrophobic, then: properties, determination. For example, hydrophobic polymerization may be employed. Examples of the compound, the long-chain alcohol, the sulfonium, the cerium, and the inorganic scaly. Specific examples thereof include a carboxylic acid such as a carboxylic acid, a system, an acrylic acid, or the like, and (i) an imine. , Polyimine, Polyvinyl Chloride-Ethyl Acetate Ethylamine, Powder_^, Polyacetic Acid Ethyl, Poly, Polymethyl Resin, B Ethylene cellulose derivative, polyethyl condensate scale, phenoxy alcohol copolymer resin, polytetrafluoroethylene powder and contact; can be cited as thermosetting polymerized cup, phenol resin, urea -... , eucalyptus acrylic resin, double item propylene polyethylene glycol dimethyl phenol resin, cyanate axis, :: 醯: amine resin, dicis butyl hydrazine with imine three listed as long-chain Bensamine Powders and fine particles of resin; etc.; can be a - known of lauryl alcohol, whale algaol, stearin, argon, galenol, etc.; 歹帏 ... * thiol alcohol, oil-based zinc molybdate, Graphite, the second diabase as an inorganic compound, a disulfide key, a __-, a gasified carbon, a nitrided material; the system can be used in the 2012-20793 to use the above-mentioned species or a suitable mixture of the above-mentioned hydrophobic effects of the invention Sexual substance °x' ° high zinc, graphite, _ is preferred. Dicentric stearyl alcohol 'acid acid, .^ 』 "The mouth has the advantage of high dispersibility relative to the water-soluble (four) composition solution The result is that the above melting point is higher than that of the water-soluble resin (A), and the melting point is still above the above tree. (A), then 〃 Shoot 5 h Temple is limited to. For example, you can use amino acids, organic acids, organic acids _ tons of pain ... to organic salts, organic phosphorus salts, polysaccharides, rosins and Inorganic compounds, etc., and Iϋ# 八体和吕, may be listed as amino acids, such as Chuan Amino acid, etc.; can be listed as strict + + as an organic acid malic acid, propylene dihydrazine, No. Alkenedioic acid, cis-butane diacid, cyanuric acid, etc. : Column: There are aromatic acid salts, malonic acid, amber, anti-butadiene dioxime, maleic acid, a metal salt of an organic acid such as formic acid, acetic acid, propionic acid, stearic acid or trimeric acid; and examples thereof include melamine cyanurate as an organic salt; and Kexian as an organic Wei salt sodium phosphate Salt, etc., may be mentioned as cellulose, chitin, starch, glycogen, yoghurt, and fruit as polysaccharides; slick oil, slick oil, etc. There are gasification sodium, sodium sulphate, sulfur _ and the like as inorganic compounds. Further, as a substance (Β2) having a higher melting point than the water-soluble resin (Β2), which is an effect of the present invention, sodium branamide, succinic acid, sodium citrate, calcium formate, sodium stearate, and stearic acid are used. Calcium acid, cellulose, etc. are preferred. The above-mentioned substance (Β3) which can improve the compatibility of the water-soluble resin (Α) with the solvent, for example, may be a polyol having a molecular structure such as a polyol having a hydroxyl group, 100121203 16 201208793, a sugar alcohol, an amino acid derivative. Alcohol, etc. The polyhydric alcohol is a polymer obtained by removing polyethylene glycol or the like which is contained in the water-soluble refractory (4), and (4) is a poly-Si-series other than poly-methane, and may be exemplified by trimethyl ketone, pentaerythritol, neodecanediol, and the like. Examples of the mercaptoacetone and the like include sorbitol, wood, alcohol, and cyclohexanol as sugar alcohols; and anilide, oxyaniline, and ketone which are alcohols of amino acid derivatives; Amine acid, amino deoxy sugar, and the like. Further, as the substance (B3) which enhances the solubility of the water-soluble tree and which improves the effect of the present invention, pentaerythritol, sorbitol, xylitol, cyclohexanol or the like is preferable. The thickness of the water-soluble tree test layer is different depending on the composition of the blue-layered slab layer to be reinforced by the lion age used in the drilling process, and is 〇〇2 to 〇3 mm. The range is preferably in the range of 〇.〇2 to 0.2 mm. When the thickness of the water-soluble resin composition layer is less than 〇.〇2_, a sufficient lubricating effect cannot be obtained, and the burden on the drill bit becomes large, and there is a fear that the drilling loss occurs. On the other hand, when the thickness of the water-soluble resin is more than Q 3 mm, the resin adheres to the drill. Further, in the case where a solution containing the above water-soluble resin composition is directly applied to a metal support tank by a coating method or the like, the solution used has a read boiling point lower than water (preferably A solution of a solvent having a low temperature of 15 (above) is preferable. A crane having a solvent lower than that of water is not particularly limited, and examples thereof include ethanol, methanol, and isopropyl alcohol such as alcohols.

S 100121203 17 201208793 以採用甲基乙基酮和丙酮等低沸點溶劑。 透過含有上述沸點低於水之溶媒,則會有對於結晶粒之粒 徑減少、表面粗糙度Sm之降低有所#獻,並有使孔位置精 確度提升之效果。依溶媒之不同,各有其優點,乙醇係對於 結曰曰粒之粒徑減少方面有所貢獻,而甲基乙基酮則對於表面 粗糙度Sm之降低有所貢獻。乙醇係孔位置精確度之提升效 果尚。作為低沸點溶媒,係以乙醇及丙酮為較佳。一般之增 加低沸點溶媒之調配量,係對於結晶粒之粒徑減少、表面粗 糙度Sm之降低、結晶粒之標準偏差之減少有所貢獻。然而, 虽持續增加低沸點溶媒之調配量時,孔位置精確度之改善效 果會逐漸飽和。又,低沸點溶媒係於與水之沸點差未滿15。〇 時,將難以顯現出效果。 關於上述水、沸點低於水之溶媒的調配比,係有在 90/10〜50/50之範圍的必要,較佳為8〇/2〇〜5〇/5〇之範圍,最 佳則為70/30〜50/50之範圍。當沸點低於水之溶媒的調配比 未滿10時,會有難以顯現出緻密性結晶生成效果之情形。 當沸點低於水之溶媒的調配比超過5〇時,經濟方面不合 理,且在Ji業性生產安定性方面會有產生障礙之疑慮。 於採用將上述水溶性樹脂組成物之熱融解物直接塗佈在 金屬支撐訂並冷卻之方法的情形下,上述蓋板之製造方法 並沒有特別限定。 將上述水溶性樹脂組成物予以混練之方法係可使用一般 100121203 201208793 的混練手段’例如,較佳的是使用雙軸輥、混合器、雙腕式 捏合機、柱塞壓出機等。又,在混練水溶性樹脂組成物之際, 為了抑制水溶性樹脂組成物的分解’而以在氮環境下進行混 練為佳。此外,為了使上述水溶性樹脂組成物均勻分散,係 乂於120 C〜160 ◦之溫度將水溶性樹脂組成物予以混練為 佳。在混練溫度未滿120艽時,水溶性樹脂組成物會變得不 均勻,會有對外觀及孔位置精確度等特性有不良影響的可能 性,而在超過16〇。〇時,會引起水溶性樹脂組成物之分解, 而會有對孔位置精確度等特性有不良影響的可能性。 又將上述水溶性樹脂組成物直接塗佈於金屬支標箔上之 方法,亦沒有特別限定。 、可使用Μ的塗佈裝置,例如,以使用到刀塗佈機、壓出 塗佈機、模具塗佈機、簾式塗佈機等為佳。在水溶性樹脂組 成物層之厚度不均㈣情形下,因為會有對孔位置精確度等 特=有不良影響的可能性,故以使用上述塗佈機來將水溶性 樹脂組成物之熱融解物均勻塗佈為佳。 曰知用藉由上述塗佈法等’使上述含有水溶性樹脂組成物 ^容液直接於金屬支撐訂進行㈣、賴 '冷卻之方法 時’上述蓋板之塗佈方法並沒有特別限定,亦可以使用一般 的塗佈裝置。例如’作為將水溶性樹脂組成物層之厚度作成 均句之塗佈手段,係以使用屬於—般塗佈手段之凹版印刷塗 佈機、輥塗佈機、刮刀塗佈機、壓出塗佈機、模具塗佈機、 100121203 201208793 簾式塗佈卿為佳。在水溶性樹脂組祕層之厚度不均句的 情形下,會有對孔位置精確度等特性有不良影響的可能性, 故較佳的是使用上述方法使水溶性樹脂組成物之溶液均句 塗佈。 又’在將上述水雜樹驗成物之溶液直接塗佈於金屬支 撐訂之後,作為使上述水溶性樹脂組成物之溶液乾燥的條 件係以根據上述水溶性樹脂組成物層之厚度及水量而予以 最佳化為佳。 具體來說,係需要使之在溫度120°C〜16(TC保持10秒鐘 〜600私知以進行乾燥’較佳的是使之在12代〜湖。。保持 10秒鐘〜500秒鐘以進行乾燥,更佳的是使之在12代〜⑽。c 保持15秒鐘〜_秒鐘以進行乾燥,特佳的是使之在 120O15GC保持20秒鐘〜秒鐘以進行乾燥。在乾燥溫 度未滿赋時’或在乾燥溫度下之保持時間未滿10秒鐘 時會有在水浴性樹脂經成物層之内部殘留溶媒之可能性, 或者疋因為使水,谷性樹脂組成物進行熔融所必要的熱量不 足’而會有變成不均勻的水溶性樹脂組成物層之可能性。另 一方面,於乾躁溫度超過2⑻。C時,或於保持時間超過_ 私鐘時’會有產生上述水溶性樹脂組成物之分解,而在外觀 上產生問題之虞。 另外’在將水溶性樹月旨組成物之溶液塗佈至金屬支撐箱上 並進行乾燥時,乾燥後所獲得之水溶性樹脂組成物層中所殘 100121203 20 201208793 留之溶媒濃度係以未滿5%為佳。 其中’為了在樹脂組成物層中生成緻密性結晶,亦可在乾 燥時合併使用超音波振動或減壓乾燥。 又’關於進行上述水溶性樹脂組成物之冷卻的條件,係因 為先前技術之冷卻逮度為未滿1 2。〇/秒鐘,故而結晶粒之粒 徑大,會有其標準偏差、表面粗糖度Sm變大的疑慮,會有 孔位置精確度、樹脂之黏附等問題。因此,作為本發明之冷 卻條件’較佳的是以1 5ΐ/秒鐘以上之冷卻速度,在6〇秒 鐘以内’從冷卻開始溫度i20〇c〜160。匸至冷卻結束溫度 25 C〜40°C為必要。 在上述冷卻結束溫度超過4CTC之情形下,係無法達成屬 於本發明特徵之結晶粒的小徑化及均勻化。同樣地,在上述 冷部時間超過60秒鐘之情形下,也是無法達成屬於本發明 特徵之結晶粒的小徑化及均勻化。另一方面,於上述冷卻結 束溫度超過抑而偏低之情形下,會在上述蓋板上產生反 趣’且在後續步驟中成為結露之原因,故不佳。在上述冷卻 速度未滿秒鐘時,會因為冷卻時間增加而有超^6〇 秒鐘之虞,故不佳。 就得到結晶粒之小徑化及均勻化之更高效果方面而古,上 述冷卻條件較佳的是以2ΐ/秒鐘以上之冷卻速度,在^秒 鐘以内,從溫度赋〜峨冷仰至溫度25ΐ:〜4〇ΐ,更佳 的是以2.5t/秒鐘以上之冷卻迷度,在㈣、鐘以内,從田 100121203 201208793 度12(TC〜160¾冷卻至溫度坑〜赋,再更佳的是以似 秒鐘以上之冷卻速度,在3G祕以内,從溫度12(TC〜ι60ΐ 冷卻至溫度25Ϊ〜贼,特佳的是以4.rc/秒鐘以上之冷卻 速度,在20秒鐘以内,從溫度12〇。〇〜16〇它冷卻至溫度 25。(:〜4(TC ’最佳的是以6。〇/秒鐘以上之冷卻速度,在= 秒鐘以内,從溫度12CTC〜160°C冷卻至溫度25°C〜4〇。(:。 關於本發明之鑽孔用蓋板所使用之金屬支撐箔,若為與上 述水溶性樹脂組成物之密接性高,可耐得住因鑽頭所造成之 衝擊的金屬材料的話,則沒有特別限定。作為金屬支撐箔之 金屬種類,係可使用例如鋁,金屬支撐箔之厚度通常為 0.05〜0.5mm’較佳為〇 〇5〜〇 3臟。當該鋁箔之厚度未滿〇 〇5 時,在鑽頭加工時會容易產生積層板的毛邊,而當超過 0.5mm時’則在鑽頭加工時會有所產生之切削粉屑排出困難 之虞。上述銘箔之材質係以.純度95%以上之鋁為佳,具體來 說’可例示如由JIS-H4100、H4160及H4170所規定之5052、 3004、3003、1N30、1N99、1050、1070、1085、11〇〇、8021 等。藉由使用高純度鋁箔作為金屬支撐箔,則可提升對於鑽 頭之衝擊緩和或與鑽頭前端部之咬合性’伴隨著上述水溶性 樹脂組成物所造成之潤滑效果,還可提高加工孔之孔位置精 確度。 又,從與水溶性樹脂組成物之密接性觀點而言,較佳為預 先使用表面上形成有厚度0.001〜〇.〇2mm之樹脂皮膜的& 100121203 22 201208793 箔’該樹脂皮膜之厚度係以〇·〇〇1〜〇.15mm為更佳,以 0.001〜0.1mm為特佳。關於在該樹脂皮膜中所使用之樹脂, 右為可提ifj與水溶性樹脂組成物之密接性的話,則沒有特別 _ 限定,亦可以使用熱可塑性樹脂、熱硬化性樹脂之任一者。 例如,作為熱可塑性樹脂係可例示如胺基甲酸酯系、醋酸乙 烯酯系、氯化乙烯系、聚酯系及該等之共聚合物。作為熱硬 化性樹脂,則可例示如環氧系、氰酸酯系等之樹脂。另外, 在本發明中,關於上述金屬支撐箔,亦可以使用在市售金屬 箔上預先以公知方法將樹脂予以塗佈者。 本發明之鑽孔用蓋板係被使用於將印刷佈線材料(例如, 貼銅積層板或多層板)予以鑽孔加工時。具體來說,係在將 貼銅積層板或多層板重疊一片或複數片的最上面,以上述金 屬支撐箔側接觸到印刷佈線材料之方式進行配置,而可從鑽 孔用蓋板之水溶性樹脂組成物層之面,進行鑽孔加工。 (實施例) •以下,示出實施例、比較例’並具體說明本發明。另外, -下述實施例係僅為例示本案發明之實施形態之一例,而非限 定於此。又’在本實施例中,係將「聚乙二醇」簡記為「PEG」, 將「聚環氧乙烷」簡記為「PEO」。 表1中係顯示實施例及比較例之鑽孔用蓋板之製造所使 用之樹脂、溶媒、添加劑及金屬支撐箔規格,以及冷卻條件, 此外’亦顯示使用在鑽孔時之鑽頭的鑽頭徑條件。 100121203 23 201208793 [表l] 區分 (a) 或條伴 聚環氧乙烷 商品名 Altop MG150 薇商 明成化學工業 股份有限公司 備註 Mn=l 50,000 (b) __^環氧乙烷 Alkox Lll 明成化學工業 股份有限公司 Mn=l 10,000 樹脂系 (c) 聚乙二醇 PEG 20000 三洋化成股份 有限公司 Mn=20,000 (d) 聚乙二醇 ------- PEG 4000 三净化成股份 有限公司 Mn=4,000 (e) 聚乙二醇對苯 二甲酸二甲酯 聚缩合物 Biogen PP-15 第一工業製藥 股份有限公司 Mn=100,000 ⑴ 水 離子交換水 bp=100°C (g) MeOH 和汜純藥工業 股份有限公司 b.p.=64.7〇C ,純度99.9% (h) MEK 才口无純藥工業 股份有限公司 b.p.=79.5°C ,純度99.9% 溶媒 (0 IPA 和无純祭工業 股份有限公S1 b.p.=83〇C ,純度99.9% 0 EtOH 柞无純藥工業 股份有1^公^1 b.p=78.4〇C ,純度99.9% (k) 丙酮 柞无純藥工業 股份有限公§1 b.p=56.1〇C ,純度99.9% (Β1)疏水 性物質 (1) 丙烤酸系熱可 塑性聚合物 BYK-011 BYK股份有 限公司 ㈣ 矽系熱可塑性 蚨合物 BYK-349 «ΥΚ股份有_ 限公司 — 添 劑 (Β2)高融 點物質 ⑹ 曱酸鈉 二曼氣體化學 股份有限公引 一 (〇) 氯化納 布口无純藥工業 股份有限公司 — (Β3)提高 相容性之 物質 (P) 季戊四醇 和光純藥工業 股份有限公司 — 金屬支 (t) 紹70μ Γ二烫鋁股份有 限公司 JIS規格*銘 会全總號1100 撐箔 ⑼ 鋁 100μ 二交鋁股份有 限公司 JIS規格,鋁 合金編號11⑻ (q) 急冷H '鐘 (120°〇乾燥3分鐘~>25。〇合§卩奶狄 冷卻速度 (r) 急冷2.2 C/秒鐘 (160°C乾燥3分鐘—30eC冷卻fin幹待、 ⑻ 。 慢冷l.l (J/秒鐘 -(lg〇_C乾燥3分鐘—25°C冷卻90細 (v) 0.08mm φ KMVJ948 0.08x12 哪甘工具股; 份有限公 鑽頭徑 (w) 0.105mm 0 KMCL518A 0.105x1.8 响甘工具股 份有限公ϋ ⑻ 〇.15mm0 NEU L004 0.15x2.5 份有限公q <實施例1> 以樹脂固形分成為30%之方式,使數量平均分子量 24 100121203 201208793 15〇,〇〇〇之聚環氧乙烷(AltopMcM5〇,明成化學工業股份有 限公司製)8G重量份與數量平均分子量2G,嶋之聚乙二醇 (PEG20000,三洋化成工業股份有限公司製)2〇 ^量份溶解 在水中。接著,添加相對於該水溶性樹脂混合物之固形分為 0.5重量%之甲酸納(三菱氣體化學股份有限公司),並使完全 溶解。以乾炼後之水溶性樹脂組成物層成為〇.〇3mm之方 式’採用棒㈣㈣此水溶性樹脂組成物之紐於單面形成 有厚度0.01mm環氧樹脂皮膜的紹落(使用鋁猪:贈,(厚 度0.07匪)’三菱喊份有限公司製)上,利用乾燥機使於 12CTC乾燥3分鐘,接下來以3·1ΐ/#、鐘之冷卻速度進行冷 卻,藉以製作鑽孔用蓋板(參照表2)。 將所獲得之鑽孔用蓋板於重疊6片厚度Q lmm之貼銅積 層板(CCL-HL832HS,鋼領兩面5/πη,三菱氣體化學股份有 限公司製)之後,以水溶性樹脂組成物之層為上之方式進行 配置’於經重疊之貼銅積層板下側’配置抵接板(烘乾板), 以鑽頭:0.105mm抓MC L518A,〇 1〇5χ18 ,聯合工具股 份有限公司製)、旋轉數:330,_rpm、輸送速度:8叫/跳 之條件,對每一根鑽頭以3,000hits進行鑽孔加工2〇根(參 照表2)。 然後,表3係顯示水溶性樹脂組成物之結晶粒之平均粒徑 (μιη)、結日日日粒徑之標準偏差㈣、蓋板之表面粗财&(㈣ 之結果。 100121203 201208793 〈實施例2〜20 ’比較例1〜36> 關於貫施例2〜20及比較例1〜36,係以實施例1為基準, 調製表1及表2所示之水溶性樹脂組成物,並將之塗佈於鋁 箔上,進行乾燥、冷卻,製作鑽孔用蓋板,並進行鑽孔加工。 例如,在實施例2中,以樹脂固形分成為3〇%之方式,使 數量平均分子量150,000之聚環氧乙烷(Alt〇p MG_15〇,明 成化學工業股份有限公司製)8〇重量份與數量平均分子量 20,000之聚乙二醇(PEG20000,三洋化成工業股份有限公司 製)20重量份溶解在水/MeOH(甲醇)混合溶液中。此時之水 與MeOH之比例係設為90重量份/1〇重量份。如此,而亦 有採用沸點低於水之低沸點溶媒的例子。 另外’比較例26係採用市售的Sang-A Flontec Co.,Ltd 製「LXl2〇」,比較例27係採用市售的Y〇ng u chuan Industrial Co.,Ltd製「AL-100040」,比較例29係採用市售 的 Uniplus Electronics Co., Ltd 製「LAE-1007」。 然後,表3係顯示水溶性樹脂組成物之結晶粒之平均粒徑 〇im)、結晶粒徑之標準偏差(μπι)、蓋板之表面粗糙度sm(gm) 之結果。又,圖1係擴大顯示特定樣本(實施例2、3、1〇、 12及19,以及比較例2、10、20、26及28)之水溶性樹脂 組成物層之表面狀態。 100121203 26 20 s___I_I______I_20! 11 錢頭徑 、 ____ 0.15 mm0 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 0.105 πκηφ 〇 〇 〇 〇 〇 〇 〇 〇 〇 $ 0.08 τταηφ 〇 金屬支樓箔 S 鋁 1 ΙΟΟμτη 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 β 鋁 70μτη 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 ® 慢冷 l.rc mt S 急冷 2.TC 1 /機 〇 〇 〇 〇 s 急冷 3.I°C i mi 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 添加劑 /*·< S <姓 p p q g ο ο g ρ ο ρ ρ ρ ρ ο ρ Q ο ρ ο ο ρ ρ ρ g Q o o Q g p p o o © $ 额 ♦1 o p q ο W-) ρ ίη ρ ρ ρ ρ ρ ό ρ ρ ο ρ Ό ο ο ο ο ο ο Q o o p o o o o W) $ 甲_ 1_ g ΓΛ 寸 ΓΛ 寸 5 ρ γΛ ΓΛ ΓΛ S 寸 ρ ο rn ρ ρ 5 ρ ρ ρ g 5 p p p p p p o /—S β 1 p p o ρ ρ ρ ρ ο g ρ ρ ο ο ρ ο ο ο ρ ρ g ο ο ο ο ο ο g g p p p o Q o o 0 BYK- 011 1_ p p q ο g ο ρ ρ ρ ο ρ ρ ρ ο ρ ο 5 ο ο ρ ο ρ Q ρ ρ ρ o p p q Q r*) g 1 s 丙明 沸點 56.rc o o o ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο 宕 ο ο o o o o o o o o o EtOH 沸點 78.4°C o o o ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο 异 ο o o o o o o o o o o o o 沄 ο ο 沄 ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο o o s o o o o o o MEK 沸點 79.5°C o o o ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο o o o o o o o o o @ MeOH 沸點 64.TC o o o ο ο ο ο ο ο ο ο ο ο ? ο ο ο ο ? ο ο 导 ο ο ο 筘 o o o o o R o o o © s s s ο 冢 R S g S S S S g S 冢 S S S 8 g s, s g s s g s s s 樹脂系 s Biogoi PP-15 o o o 异 ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο o o o o o o o o o §1 o o o S ο ο S ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο o o o o o o o o o s PEG 20000 1_ 异 s 异 异 异 异 8 S 异 g 异 异 宕 异 R s 异 异 R R s 宕 R s @ Alkox Lll 1_ o o o ο ο ο ο ο S ο ο ο ο ο ο S ο ο ο ο S ο ο S s o o g o o o o o Altop MG-150 g g g ο g g ο g ο g g g g ο § g ο g ο g S ο ο o s s o s s s s 8 I 1實施例2 | 1 1實施例4 1 IT) 1 <〇 I 1實施例7 1 οο 1 1實施例9 1 丨實施例Η) 1 1 CN I cn I 21 I I 1實施例16 1 1實施例17 1 00 1 +«? σ\ I 1實施例20 1 1 ttfe例 ι 1 1 tbfe例 2 1 1 tbfe例 3 ! 1她例4 ί 1 tbfe例 5 ! 1 tbft例 6 1 1味例7 1 1 tbfe例 8 I tbfe例 9 0 1 1 tbfe例 11 ! 1 tbfe例 12 i 1 fcbfe例 13 i 1罐列14 jn 1 iS 100121203 17 201208793 A low boiling point solvent such as methyl ethyl ketone or acetone is used. When the solvent having a boiling point lower than water is contained, the particle diameter of the crystal grain is reduced and the surface roughness Sm is lowered, and the hole position accuracy is improved. Depending on the solvent, each has its own advantages. Ethanol contributes to the reduction of the particle size of the crucible, while methyl ethyl ketone contributes to the reduction of the surface roughness Sm. The efficiency of the ethanol hole position is improved. As the low boiling point solvent, ethanol and acetone are preferred. Generally, the amount of the low-boiling solvent is increased in that the particle size of the crystal grain is reduced, the surface roughness Sm is lowered, and the standard deviation of the crystal grain is reduced. However, while the amount of low-boiling solvent is continuously increased, the effect of improving the hole position accuracy is gradually saturated. Further, the low-boiling solvent is less than 15 at a difference from the boiling point of water. 〇 When it is difficult, it will be difficult to show the effect. The mixing ratio of the above water and the solvent having a boiling point lower than water is necessary in the range of 90/10 to 50/50, preferably in the range of 8 〇 / 2 〇 to 5 〇 / 5 Torr, and the best is Range of 70/30 to 50/50. When the mixing ratio of the solvent having a boiling point lower than water is less than 10, it may be difficult to exhibit a dense crystal formation effect. When the blending ratio of the solvent having a boiling point lower than water exceeds 5 ,, the economic aspect is unreasonable, and there is a concern that there is a hindrance in the stability of Ji industrial production. In the case where the hot melt of the above water-soluble resin composition is directly applied to a method of metal support bonding and cooling, the method for producing the cover is not particularly limited. The method of kneading the above water-soluble resin composition can be carried out by a kneading method of generally 100121203 201208793. For example, a twin-shaft roll, a mixer, a double-winch kneader, a plunger press, or the like is preferably used. Further, when the water-soluble resin composition is kneaded, it is preferred to carry out the kneading in a nitrogen atmosphere in order to suppress decomposition of the water-soluble resin composition. Further, in order to uniformly disperse the above water-soluble resin composition, it is preferred to knead the water-soluble resin composition at a temperature of from 120 C to 160 Torr. When the kneading temperature is less than 120 ,, the water-soluble resin composition becomes uneven, and there is a possibility that the appearance and the hole position accuracy are adversely affected, and it is more than 16 〇. When it is ruined, it causes decomposition of the water-soluble resin composition, and there is a possibility that the characteristics such as the hole position accuracy are adversely affected. Further, the method of directly applying the water-soluble resin composition to the metal-supported foil is not particularly limited. A coating device of ruthenium may be used, and for example, a knife coater, an extrusion coater, a die coater, a curtain coater or the like is preferably used. In the case where the thickness of the water-soluble resin composition layer is uneven (four), since there is a possibility that the hole position accuracy or the like is adversely affected, the above coating machine is used to thermally melt the water-soluble resin composition. Uniform coating is preferred. It is to be understood that the coating method of the above-mentioned cover sheet is not particularly limited by the above-mentioned coating method or the like, in which the above-mentioned water-soluble resin composition containing liquid is directly applied to the metal support (4), and the method of cooling is performed. A general coating device can be used. For example, 'as a coating means for making the thickness of the water-soluble resin composition layer into a uniform sentence, a gravure coater, a roll coater, a knife coater, and an extrusion coating using a general coating means are used. Machine, mold coating machine, 100121203 201208793 curtain coating is better. In the case where the thickness of the water-soluble resin group is not uniform, there is a possibility that the characteristics such as the hole position accuracy are adversely affected. Therefore, it is preferred to use the above method to make the solution of the water-soluble resin composition uniform. Coating. Further, after the solution of the water-hybrid assay is directly applied to the metal support, the condition for drying the solution of the water-soluble resin composition is based on the thickness and the amount of water of the water-soluble resin composition layer. It is better to optimize it. Specifically, it is necessary to make it at a temperature of 120 ° C ~ 16 (TC hold 10 seconds ~ 600 privately known to dry ' preferably is made in 12 generations ~ lake.. Hold 10 seconds ~ 500 seconds For drying, it is more preferable to keep it in the 12th generation to (10). c for 15 seconds to _ seconds for drying, and it is particularly preferable to keep it at 120O15GC for 20 seconds to 2 seconds for drying. When the temperature is not full or when the holding time at the drying temperature is less than 10 seconds, there is a possibility that the solvent remains in the water-soluble resin through the layer of the resin, or 使 because the water and the gluten resin composition are subjected to The amount of heat necessary for melting is insufficient, and there is a possibility that the layer of the water-soluble resin composition becomes uneven. On the other hand, when the dry temperature exceeds 2 (8) C, or when the holding time exceeds _ private clock, there will be The decomposition of the water-soluble resin composition described above causes a problem in appearance. In addition, when the solution of the water-soluble resin composition is applied to a metal support box and dried, the water obtained after drying is dissolved. Residue in the resin composition layer 100121203 20 2012087 93 The concentration of the solvent to be retained is preferably less than 5%. Among them, in order to form dense crystals in the resin composition layer, ultrasonic vibration or vacuum drying may be used in combination at the time of drying. The cooling condition of the resin composition is because the cooling arrest of the prior art is less than 12. 〇 / sec. Therefore, the particle size of the crystal granule is large, and there is a concern that the standard deviation and the surface roughness Sm become large. There is a problem of the accuracy of the hole position, the adhesion of the resin, etc. Therefore, as the cooling condition of the present invention, it is preferable to use a cooling rate of 15 ΐ / sec or more, within 6 〇 seconds 'from the cooling start temperature i20 〇 In the case where the cooling end temperature exceeds 4 CTC, the diameter of the crystal grains belonging to the present invention cannot be reduced and uniformized. In the case where the cold portion time exceeds 60 seconds, the diameter of the crystal grains belonging to the present invention cannot be reduced and the uniformity is achieved. On the other hand, in the case where the cooling end temperature is excessively low or low. It may cause reversal on the above-mentioned cover plate and become the cause of condensation in the subsequent steps, so it is not good. When the above cooling rate is less than 2 seconds, there will be more than 6 seconds after the cooling time increases. Therefore, it is not preferable. In terms of obtaining a higher effect of reducing the diameter and homogenization of the crystal grains, the above cooling condition is preferably a cooling rate of 2 Torr/sec or more, within 2 seconds, from the temperature.峨 cold to the temperature of 25 ΐ: ~ 4 〇ΐ, more preferably 2.5t / sec or more cooling fan, in (four), clock, from the field 100121203 201208793 degrees 12 (TC ~ 1603⁄4 cooling to temperature More preferably, it is a cooling rate of more than two seconds, within 3G secret, from temperature 12 (TC ~ ι60 冷却 cooling to temperature 25 Ϊ ~ thief, especially good cooling rate of 4.rc / second or more, Within 20 seconds, the temperature is 12 〇. 〇~16〇 It cools to a temperature of 25. (:~4 (TC' is best at a cooling rate of 6. 〇/sec or more, within = seconds, from a temperature of 12CTC to 160 °C to a temperature of 25 °C ~ 4 〇. (:. About The metal supporting foil used for the drilling cover plate of the present invention is not particularly limited as long as it has high adhesion to the water-soluble resin composition and can withstand the impact of the impact caused by the drill. For the metal type of the metal supporting foil, for example, aluminum may be used, and the thickness of the metal supporting foil is usually 0.05 to 0.5 mm', preferably 〇〇5 to 〇3. When the thickness of the aluminum foil is less than 〇〇5, the drill bit is When processing, it is easy to produce the burrs of the laminate, and when it exceeds 0.5 mm, it will be difficult to discharge the cutting dust during the processing of the drill. The material of the above-mentioned Ming foil is made of aluminum with a purity of 95% or more. Preferably, it is exemplified as 5052, 3004, 3003, 1N30, 1N99, 1050, 1070, 1085, 11A, 8021, etc. as defined by JIS-H4100, H4160, and H4170. By using high-purity aluminum foil as a Metal support foil for improved impact relief or drilling with drill bits The occlusion property of the tip end portion of the head is accompanied by the lubricating effect by the water-soluble resin composition, and the hole position accuracy of the processing hole can be improved. Further, from the viewpoint of the adhesion property with the water-soluble resin composition, it is preferable. For the pre-use of a resin film having a thickness of 0.001 to 〇.〇2 mm formed on the surface, & 100121203 22 201208793 foil' thickness of the resin film is preferably 〇·〇〇1~〇.15mm, preferably 0.001~0.1mm It is particularly preferable that the resin used in the resin film is not particularly limited as long as it can be used as a water-soluble resin composition, and a thermoplastic resin or a thermosetting resin can be used. For example, examples of the thermoplastic resin include urethane-based, vinyl acetate-based, vinyl chloride-based, and polyester-based copolymers. Examples of the thermosetting resin include a thermosetting resin. In the present invention, the metal supporting foil may be coated on a commercially available metal foil by a known method in advance. The drilling cover plate is used for drilling a printed wiring material (for example, a copper laminated board or a multilayer board). Specifically, the copper laminated board or the multilayer board is overlapped by one or a plurality of sheets. The uppermost portion is disposed so that the metal supporting foil side contacts the printed wiring material, and can be drilled from the surface of the water-soluble resin composition layer of the drilling cover sheet. (Example) • The present invention is described with reference to the embodiments and the comparative examples. The following embodiments are merely illustrative of one embodiment of the present invention, and are not limited thereto. In the present embodiment, Polyethylene glycol is abbreviated as "PEG", and "polyethylene oxide" is abbreviated as "PEO". Table 1 shows the specifications of the resin, solvent, additive, and metal supporting foil used in the manufacture of the drilling cover sheets of the examples and the comparative examples, and the cooling conditions, and also shows the diameter of the drill bit used in the drilling. condition. 100121203 23 201208793 [Table l] Distinguish between (a) or strip with polyethylene oxide trade name Altop MG150 Weishang Mingcheng Chemical Industry Co., Ltd. Remarks Mn=l 50,000 (b) __^Ethylene oxide Alkox Lll Mingcheng Chemical Industry Co., Ltd. Mn=l 10,000 Resin (c) Polyethylene glycol PEG 20000 Sanyo Chemical Co., Ltd. Mn=20,000 (d) Polyethylene glycol------- PEG 4000 San purification into a company Mn= 4,000 (e) Polyethylene glycol terephthalate dimethyl condensate Biogen PP-15 First Industrial Pharmaceutical Co., Ltd. Mn=100,000 (1) Water ion exchange water bp=100°C (g) MeOH and 汜 pure medicine Industrial Co., Ltd. bp=64.7〇C, purity 99.9% (h) MEK 才口无纯药工业股份有限公司 bp=79.5°C, purity 99.9% Solvent (0 IPA and No Pure Festival Industrial Co., Ltd. S1 bp= 83〇C, purity 99.9% 0 EtOH 柞 No pure pharmaceutical industry shares have 1 ^ public ^ 1 bp = 78.4 〇 C, purity 99.9% (k) Acetone 柞 no pure pharmaceutical industry shares limited § 1 bp = 56.1 〇 C, Purity 99.9% (Β1) Hydrophobic substance (1) Propionic acid-based thermoplastic polymerization BYK-011 BYK Co., Ltd. (4) Tantalum Thermoplastic Compound BYK-349 «ΥΚ股份有_ Limited company - Additive (Β2) High melting point substance (6) Sodium citrate Diman Gas Chemical Co., Ltd. 〇) Nabukou Nippon Pure Chemical Industry Co., Ltd. — (Β3) Substance to improve compatibility (P) Pentaerythritol and Kokon Pure Chemical Industries Co., Ltd. — Metal Branch (t) Shou 70μ Γ二烫铝股份有限公司JIS specification * Ming will total number 1100 foil (9) Aluminum 100μ II Aluminum Co., Ltd. JIS specification, aluminum alloy number 11 (8) (q) Quenching H 'clock (120 ° 〇 dry 3 minutes ~> 25. 卩 § 卩Milk cooling rate (r) quenching 2.2 C / sec (160 ° C drying for 3 minutes - 30eC cooling fin dry, (8). Slow cooling ll (J / sec - (lg 〇 _ dry 3 minutes - 25 ° C Cooling 90 fine (v) 0.08mm φ KMVJ948 0.08x12 gangan tool stock; finite male drill diameter (w) 0.105mm 0 KMCL518A 0.105x1.8 Xianggan Tools Co., Ltd. (8) 〇.15mm0 NEU L004 0.15x2.5 Limited PCT q <Example 1> In such a manner that the resin solid content becomes 30%, The number average molecular weight is 24 100121203 201208793 15〇, and the polyethylene oxide (AltopMcM5〇, manufactured by Mingcheng Chemical Industry Co., Ltd.) is 8g parts by weight and the number average molecular weight is 2G, and the polyethylene glycol (PEG20000, Sanyo) Chemical Industry Co., Ltd.) 2 〇 ^ parts are dissolved in water. Next, sodium formate (Mitsubishi Gas Chemical Co., Ltd.) having a solid content of 0.5% by weight with respect to the water-soluble resin mixture was added, and completely dissolved. The dry water-soluble resin composition layer is formed into a crucible (4) (4). The water-soluble resin composition is formed by forming a resin film having a thickness of 0.01 mm on one side (using aluminum pigs: Gift, (thickness 0.07 匪) on the Mitsubishi Shout Co., Ltd.), dried at 12CTC for 3 minutes using a dryer, and then cooled at a cooling rate of 3·1ΐ/# and the clock to make a cover for drilling. (Refer to Table 2). The obtained drilled cover plate was formed by laminating six copper-clad laminates (CCL-HL832HS, both sides of the steel ring 5/πη, manufactured by Mitsubishi Gas Chemical Co., Ltd.) having a thickness of Q lmm, and then a water-soluble resin composition. The layer is configured in the above way. 'The lower side of the laminated copper-clad laminate is equipped with abutment plate (drying plate), and the drill bit: 0.105mm is used to grasp MC L518A, 〇1〇5χ18, manufactured by United Tools Co., Ltd.) The number of rotations: 330, _rpm, conveying speed: 8 calls/jump conditions, and drilling 2 roots for each drill bit at 3,000 hits (refer to Table 2). Then, Table 3 shows the average particle diameter (μιη) of the crystal grain of the water-soluble resin composition, the standard deviation of the day-to-day particle diameter (4), and the surface roughness of the cover plate ((4). 100121203 201208793 Examples 2 to 20 'Comparative Examples 1 to 36> With respect to the examples 2 to 20 and the comparative examples 1 to 36, the water-soluble resin compositions shown in Tables 1 and 2 were prepared on the basis of Example 1, and It is applied to an aluminum foil, dried, and cooled to prepare a drilling cover plate, and is drilled. For example, in Example 2, the number average molecular weight is 150,000 in such a manner that the resin solid content is 3% by mass. 20 parts by weight of polyethylene oxide (Alt〇p MG_15〇, manufactured by Mingcheng Chemical Industry Co., Ltd.) and 20 parts by weight of polyethylene glycol (PEG 20000, manufactured by Sanyo Chemical Industry Co., Ltd.) having a number average molecular weight of 20,000 are dissolved in In a water/MeOH (methanol) mixed solution, the ratio of water to MeOH is set to 90 parts by weight per 1 part by weight. Thus, there are also examples in which a low boiling point solvent having a boiling point lower than that of water is used. Example 26 uses the commercially available Sang-A Flontec Co "LXl2〇" manufactured by Ltd., Comparative Example 27 is a commercially available product "AL-100040" manufactured by Y〇ng u chuan Industrial Co., Ltd., and Comparative Example 29 is manufactured by a commercially available Uniplus Electronics Co., Ltd. LAE-1007. Then, Table 3 shows the results of the average particle diameter 〇im) of the crystal particles of the water-soluble resin composition, the standard deviation (μπι) of the crystal grain size, and the surface roughness sm (gm) of the cover sheet. Further, Fig. 1 is an enlarged view showing the surface state of the water-soluble resin composition layer of the specific samples (Examples 2, 3, 1 and 12, and Comparative Examples 2, 10, 20, 26 and 28). 100121203 26 20 s___I_I______I_20! 11 Money head diameter, ____ 0.15 mm0 〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇0.105 πκηφ 〇〇〇〇〇〇〇〇〇$ 0.08 τταηφ 〇Metal branch foil S Aluminium 1 ΙΟΟμτη 〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇β Aluminium 70μτη 〇〇〇〇〇〇〇〇〇〇® Slow cold l.rc mt S quenching 2.TC 1 / machine 〇〇〇〇 s cold 3.I °C i mi 〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇 〇〇〇〇〇〇〇〇Additives/*·< S <single ppqg ο ο g ρ ο ρ ρ ρ ρ ρ Q ο ρ ο ο ρ ρ ρ g Q oo Q gppoo © $ Amount ♦1 opq ο W-) ρ ίη ρ ρ ρ ρ ρ ό ρ ρ ο ρ ο ο ο ο ο ο Q oopoooo W) $ A _ 1_ g ΓΛ ΓΛ ΓΛ 5 ρ γ Λ ΓΛ S ρ ρ ο rn ρ ρ 5 ρ ρ ρ g 5 ppppppo / -S β 1 ppo ρ ρ ρ ρ ο g ρ ρ ο ο ρ ο ο ο ρ ρ ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο Oppq Q r*) g 1 s BM boiling point 56.rc ooo ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο 筘ooooo R ooo © sss ο 冢RS g SSSS g S 冢SSS 8 gs, sgssgsss resin s Biogoi PP-15 ooo ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ooooooooos PEG 20000 1_ 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异 异ο ο ο ο S ο ο S soogooooo Altop MG-150 ggg ο gg ο g ο gggg ο § g ο g ο g S ο ο ossossss 8 I 1 embodiment 2 | 1 1 embodiment 4 1 IT) 1 <〇 I 1 embodiment 7 1 οο 1 1 embodiment 9 1 丨 embodiment Η) 1 1 CN I cn I 21 II 1 embodiment 16 1 1 embodiment 17 1 00 1 + «? σ \ I 1 embodiment 20 1 1 Ttfe example ι 1 1 tbfe example 2 1 1 tbfe example 3 ! 1 her case 4 ί 1 tbfe example 5 ! 1 tbft example 6 1 1 flavor example 7 1 1 tbfe example 8 I tbfe example 9 0 1 1 tbfe example 11 ! 1 Tbfe example 12 i 1 fcbfe example 13 i 1 can column 14 jn 1 i

Li εοζ-Ιοοι 20 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 1 1 1 1 1 1 〇 〇 〇 〇 〇 〇 〇 1 1 〇 1 〇 〇 〇 〇 〇 〇 〇 p p ρ ρ Ρ ρ ρ ρ ρ ρ 1 1 ρ 1 ο ρ ρ Q p p ο o p s ο ο V) w-> ρ ρ ρ 1 1 ο 1 ο ο ο ρ ο ρ ο o § p ρ Ρ 2 ρ ρ ρ 1 1 ρ 1 ρ ρ ρ ο ο ρ ρ ρ p p ο ο ρ ο ρ ρ ρ 1 1 ρ 1 ρ ρ ρ ο ρ ρ ρ p cn o ρ ο ο ρ ρ ρ ρ 1 1 ο 1 ο Q ο ρ ρ ρ ο o o o ο ο ο ο ο ο ο 1 1 ο 1 ο ο ο ο ο ο ο o o o 穿 筘 ο ο ο 穿 宕 1 1 ο I ο ο ο ο ο ο o o o ο ο ο ο ο ο ο 1 1 ο 1 ο ο ο ο ο ο ο o o o ο ο ο ο ο ο ο 1 1 ο 1 ο ο ο ο ο ο ο o o o ο ο ο ο ο ο ο 1 1 ο 1 ο ο ο ο ο ο ο s s s S S S S g 1 1 S 1 8 8 S 8 8 8 g o o o ο ο ο ο ο ο ο 1 1 ο 1 ο ο ο ο ο ο ο o o o ο ο ο ο ο ο ο 1 1 ο 1 ο ο ο ο ο ο ο 异 宕 异 宕 宕 筘 宕 8 1 1 ο 1 ο ο 沄 宕 泻 ο 异 o o o ο ο ο ο ο ο ο 1 1 ο 1 ο ο ο ο ο ο ο s s S S 安 8 1 1 8 1 § g 8 g 1比較例16 I 1峨例π 1 1峨例18 1 1味例19 1 1比較例20 1 丨tbfe例21 1 1比較例22 1 1 fcbfe例 23 1 1比較例24 1 「比較例25 1 1比較例26 1 「tb|交例 27] 1比較例28 1 「比較例29 1 1比較例30 1 1 tbi交例 31 1 「tbl交例 32] 比較例33 1比較例34 ] 1 tb♦交例 35 1 「比較例36 1 snnool 201208793 <評估方法> 針對實施例及比較例所製作之鑽孔用蓋板之各樣本進行 下述評估。 (鑽孔加工) 針對所獲得之各樣本進行評估,而以下述條件進行鑽孔加 工。 鑽頭徑0.15 之鑽孔加工係於重疊4片厚度0.2mm 之貼銅積層板(CCL-HL832,銅箔兩面12μιη,三菱氣體化學 股份有限公司製)之後,以各樣本之水溶性樹脂組成物之層 為上之方式進行配置,於經重疊之貼銅積層板下側,配置抵 接板(供乾板),以鑽頭:O.15mm0(NEU L004,0.15x2.5, 耳外合工具股份有限公司製)、旋轉數:200,000rpm、輸送速 度:20pm/rev.之條件,對每一根鑽頭以3,〇〇〇hits進行鑽孔 加工20根。 鑽頭徑0.105 mm0之鑽孔加工係於重疊6片厚度0.1mm 之貼銅積層板(CCL-HL832HS,銅箔兩面5μηι,三菱氣體化 學股份有限公司製)之後,以水溶性樹脂組成物之層為上之 方式進行配置,於經重疊之貼銅積層板下側,配置抵接板(烘 乾板)’以鑽頭:〇 1〇5mm0(KMCL518A,0.105x1.8,聯合 工具股份有限公司製)、旋轉數:330,000rpm、輸送速度: 8μιη/·之條件,對每一根鑽頭以3,000hits進行鑽孔加工 20根。 100121203 29 201208793 鑽頭徑0.08 mm</>之鑽孔加工係於重疊4片厚度O.lmm 之貼銅積層板(CCL-HL832HS ’銅箔兩面5μιη,三菱氣體化 學股份有限公司製)之後,以水溶性樹脂組成物之層為上之 方式進行配置’於經重疊之貼銅積層板下側,配置抵接板(烘 乾板),以鑽頭:〇.〇8mm0(KMV J948,0.08x1.2,聯合工具 股份有限公司製)、旋轉數:330,000rpm、輸送速度:6μπι/Γβν 之條件,對每一根鑽頭以3,〇〇〇hits進行鑽孔加工20根。 (評估1)孔位置精確度 採用孔位置座標測量器(型號HA-1AM,曰立Via Mechanics股份有限公司製)測量在重疊的貼銅積層板之最 下層板的背面之3,000hits孔位置與指定座標之偏離量,計 算鑽頭每一根之平均值及標準偏差(σ),並算出平均值+3σ。 然後,針對鑽孔加工2〇次之“平均值+3σ,,的平均值進行計 算。 表3係示出孔位置精確度之評估結果。又,圖4、圖5及 圖6中係为別表示結晶粒之平均粒徑結晶平均粒徑之標準 偏差及表面粗糙度Sm和與孔位置精確度之關係的圖表。 (評估2)樹脂之黏附量 採用倍率25倍之顯微鏡(型號VHK-100,KEYENCE股份 有限公司製)針對經3,00〇hits之鑽孔加工後之鑽頭2〇根, 分別觀察對於鑽頭徑之樹脂的黏附量。針對所觀察到之結 果,根據下述基準進行評估,評估結果示於表3。 100121203 201208793 〇:黏附樹脂之最大直徑係未滿鑽頭直徑之15倍 △:黏附樹脂之最大直徑係在鑽頭直徑之15倍以上 .黏附在鑽頭上之樹脂於鑽孔加工中落下至蓋板表面 (評估3)鑽頭之折損數 使用鑽頭20根進行鑽孔加工,計數鑽頭之折損數。將鑽 頭折損數之結果示於表3。 根據上述評估1〜3之内容,依下述基準進行綜合判定。 ◎:於結晶粒之平均粒徑40/mi以下/結晶粒之平均粒徑之 標準偏差Πμιη以下/表面粗糙度Sm47Mm以下之狀態, 孔位置精確度為23_以下,沒有鑽頭折損,沒有樹脂黏附 〇:於結晶粒之平均粒徑卿m以下/結晶粒之平均粒徑之 標準偏差25/rni以下/表面粗糙度如纟⑽以下之狀態, 孔位置精確度為25陶以下,沒有鑽頭折損,沒有樹脂黏附 △ •於結晶粒之平均粒#/結晶粒之平均粒徑之標準偏差/表 =糖度S4滿足申請專利範圍之要件之狀態,孔位置精 確度為25μιη以下,沒有鑽鹿 有鑽頭折知,沒有樹脂黏附 X .於結晶粒之平均粒經/蛛曰 、、D日日粒之平均粒徑之標準偏差/表 面粗糙度Sm未滿足申請真 ^ _ j軏圍之要件之狀態,孔位置精 峄度超過25/rni,沒有鑽頭 曰 彻貝,沒有樹脂黏附 ^結晶粒之平均粒徑/結 表面粗輪度Sm未滿足申,心"十冰位之‘準偏差/ 折損或有樹雜附 4利關之要件之狀態,有鑽頭 100121203 s 201208793 [表3]Li εοζ-Ιοοι 20 〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇 1 1 1 1 1 1 〇〇〇〇〇〇〇1 1 〇1 〇〇〇〇〇〇〇pp ρ ρ Ρ ρ ρ ρ ρ ρ 1 1 ρ 1 ο ρ ρ Q pp ο ops ο ο V) w- > ρ ρ ρ 1 1 ο 1 ο ο ο ρ ο ρ ο o § p ρ Ρ 2 ρ ρ ρ 1 1 ρ 1 ρ ρ ρ ο ο ρ ρ ρ pp ο ο ρ ρ ρ ρ ρ 1 1 ρ 1 ρ ρ ρ ο ρ ρ ρ p cn o ρ ο ο ρ ρ ρ ρ 1 1 ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο 宕 1 1 ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ooo ο ο ο ο ο ο ο 1 1 ο 1 ο ο ο ο ο ο ο sss SSSS g 1 1 S 1 8 8 S 8 8 8 gooo ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο 1 1 ο 1 ο ο 沄宕 ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο π 1 1 18 Example 18 1 1 味 Example 19 1 1 Comparative Example 20 1 丨tbfe Example 21 1 1 Comparative Example 22 1 1 fcbfe Example 23 1 1 Comparative Example 24 1 "Comparative Example 25 1 1 Comparative Example 26 1 "tb| Example 27] 1 Comparative Example 28 1 "Comparative Example 29 1 1 Comparative Example 30 1 1 tbi Intersection 31 1 "tbl Intersection 32] Comparative Example 33 1 Comparative Example 34 1 tb♦ Intersection 35 1 "Comparative Example 36 1 snnool 201208793 <Evaluation method> The following evaluations were performed for each sample of the drilling cover sheets produced in the examples and the comparative examples. (Drilling processing) Each sample obtained was evaluated, and drilling was performed under the following conditions. The drilling process with a drill diameter of 0.15 is based on a four-layer copper-clad laminate (CCL-HL832, two-sided copper foil 12 μm, manufactured by Mitsubishi Gas Chemical Co., Ltd.) having a thickness of 0.2 mm, and the water-soluble resin composition of each sample is used. The layer is configured in the above manner, and the abutting plate (for the dry plate) is disposed on the lower side of the overlapped copper laminated plate, and the drill bit: O.15mm0 (NEU L004, 0.15x2.5, ear outer tool Co., Ltd. The system has a rotation number of 200,000 rpm and a conveying speed of 20 pm/rev. For each drill bit, 20 holes are drilled with 3, 〇〇〇hits. The drilling process with a drill diameter of 0.105 mm0 is performed by laminating six copper-clad laminates of 0.1 mm thickness (CCL-HL832HS, 5μηι on both sides of the copper foil, manufactured by Mitsubishi Gas Chemical Co., Ltd.), and the layer of the water-soluble resin composition is The above method is configured to arrange the abutting plate (drying plate) on the lower side of the overlapped copper laminated board to drill: 〇1〇5mm0 (KMCL518A, 0.105x1.8, manufactured by United Tools Co., Ltd.) Rotation number: 330,000 rpm, conveying speed: 8 μm η / · conditions, drilling 20 holes for each drill bit at 3,000 hits. 100121203 29 201208793 Drilling process with a drill diameter of 0.08 mm</> is carried out after overlapping four sheets of O.lmm copper-clad laminate (CCL-HL832HS 'copper foil on both sides 5μιη, manufactured by Mitsubishi Gas Chemical Co., Ltd.) The layer of the water-soluble resin composition is disposed on the lower side of the laminated copper-clad laminate, and the abutting plate (drying plate) is arranged to drill: 〇.〇8mm0 (KMV J948, 0.08x1.2 , Co., Ltd.), rotation number: 330,000 rpm, conveying speed: 6 μπι / Γβν, and drilling 20 holes for each drill with 3, 〇〇〇hits. (Evaluation 1) Hole Position Accuracy The 3,000hits hole position and designation on the back side of the lowermost layer of the overlapping copper-clad laminates were measured using a hole position coordinate measuring device (model HA-1AM, manufactured by Via Mechanics Co., Ltd.). The deviation of the coordinates, the average value and standard deviation (σ) of each bit of the drill are calculated, and the average value +3σ is calculated. Then, the average value of the average value +3σ, which is 2 times of the drilling process is calculated. Table 3 shows the evaluation results of the hole position accuracy. In addition, in FIG. 4, FIG. 5 and FIG. A graph showing the standard deviation of the average particle diameter of the crystal grain and the surface roughness Sm and the relationship with the hole position accuracy. (Evaluation 2) The adhesion amount of the resin is a microscope with a magnification of 25 times (model VHK-100, KEYENCE Co., Ltd.) The amount of adhesion to the resin of the drill diameter was observed for the drill bit after the drilling of 3,00 〇hits. The observed results were evaluated according to the following criteria. The results are shown in Table 3. 100121203 201208793 〇: The maximum diameter of the adhesive resin is less than 15 times the diameter of the drill △: The maximum diameter of the adhesive resin is more than 15 times the diameter of the drill. The resin adhered to the drill is drilled. Dropped to the surface of the cover (Evaluation 3) The number of breaks of the drill bit is drilled using 20 drill bits, and the number of breaks of the drill is counted. The results of the number of drill breaks are shown in Table 3. According to the above evaluations 1 to 3, ○: The average particle diameter of the crystal grains is 40/mi or less / the standard deviation of the average particle diameter of the crystal grains is less than or equal to the surface roughness Sm47Mm, and the hole position accuracy is 23_ or less. Drill bit damage, no resin adhesion 〇: the average particle size of the crystal grain is less than the m / the standard deviation of the average grain size of the crystal grain is less than 25 / rni / the surface roughness is below 纟 (10), the hole position accuracy is 25 In the following, there is no bit breakage and no resin adhesion. △ • The average deviation of the average grain size of the crystal grain #/the average grain size of the crystal grain / Table = the sugar content S4 satisfies the requirements of the patent application, and the hole position accuracy is 25 μm or less. No drill deer has a drill bit to know, no resin sticking X. The average particle diameter of the crystal grain / spider hopper, D standard particle size deviation / surface roughness Sm does not meet the application true ^ _ j軏The state of the required parts, the hole position fineness exceeds 25/rni, there is no drill bit, and there is no resin adhesion. The average particle size of the crystal grain / the coarse surface of the knot surface Sm does not satisfy the application, the heart " ten ice position' quasi- Difference / tree breakage or 4 heteroatoms attached state of the elements of interest off, there is a drill 100121203 s 201208793 [Table 3]

No. 結果 評估 “合 判定 結晶粒之 平均粒徑 (μτη) 結晶粒之平均 粒徑之標準偏差 (m) 表面粗較 度^!m 〇um) ⑴ (2) (3) 孔位置精確度平 均+3(7之平均值 fwm) 鑽頭 折損 樹脂 黏附 實動 -1 28.5 9.85 3.2 21.2 〇 〇 ◎ 實施令 | 2 18.2 3.92 3.6 19.5 〇 〇 ◎ 實施令 '3 20.1 5.00 3.9 20.6 〇 〇 ◎ 實施令 4 37.9 7.66 4.0 22.5 〇 〇 ◎ 實施令 丨5 18.7 5.93 4.1 18.8 〇 〇 ◎ rm ! 6 18.5 4.55 4.3 21.4 〇 〇 ◎ #施合 丨' 7 39.6 8.64 4.6 22.1 〇 〇 ◎ 實施令 丨' 8 14.4 4.06 5.1 24.5 〇 〇 〇 實施令 丨9 58.3 23.05 5.1 24.9 〇 〇 〇 10 34.4 8.19 5.2 20.3 〇 〇 ◎ 實施众 11 21.3 6.00 5.9 21.1 〇 〇 ◎ 實施介 12 39.4 7.86 5.9 21.4 〇 〇 ◎ 實施众 13 17.3 4.14 6.2 18.9 〇 〇 ◎ 實施伤 14 66.9 15.67 6.6 20.9 〇 〇 〇 實施众 15 58.4 17.04 6.7 20.4 〇 〇 〇 實施侥 16 19.6 7.52 6.8 20.3 〇 〇 ◎ 實施你 17 55.1 19.28 6.8 21.3 〇 〇 〇 實施彳歹 18 40.1 12.25 6.9 23.7 〇 〇 〇 實施侥 19 61.1 12.08 7.3 20.6 〇 〇 〇 實施你 20 18.5 4.55 4.3 14.2 〇 〇 ◎ 比較合 1 69.2 28.05 4.1 24.6 〇 〇 △ 比較彳歹 2 70.9 29.52 4.3 26.5 〇 〇 X 3 61.7 26.11 5.4 27.9 〇 〇 比較众 4 67.2 28.00 5.9 24.6 〇 〇 Δ 比較令 5 62.1 26.83 6.2 23.8 〇 〇 Δ 比板分 6 88.2 32.40 6.2 23.3 〇 〇 Δ 比ί交你 7 79.1 30.57 6.3 22.2 〇 〇 Δ 比歹 8 69.7 27.13 6.8 20.9 〇 〇 Δ 比如 9 75.6 30.64 7.8 25.6 〇 〇 X 比較你 10 90.2 34.68 8.1 25.1 〇 〇 X 比較你 11 52.2 23.04 8.2 25.2 〇 〇 tbte 12 80.9 21.57 8.7 26.5 〇 〇 比較你 13 53.0 15.18 8.8 26.8 〇 〇 比較你 14 52.5 13.54 9.3 26.5 〇 〇 X 比較你 15 32.1 12.90 9.5 21.4 〇 〇 Δ 16 54.8 19.36 9.6 24.5 〇 〇 Δ 比較你 17 65.4 18.91 9.6 22.1 〇 〇 Δ 比較彳歹! 18 37.9 12.59 9.8 27.1 〇 〇 X 比fe' 19 61.4 21.24 10.5 26.8 〇 〇 X 比抑' 20 83.1 29.53 13.7 27.7 〇 〇 X 比齡丨 21 37.7 10.97 8.8 15.8 〇 Δ XX 比較你 22 37.7 10.97 8.8 25.5 〇 Δ XX 比較你 23 170.3 53.28 9.7 27.9 〇 Δ XX 比细! 24 61.4 21.24 10.5 17.7 〇 Δ XX 比較你 25 199.6 51.09 11.4 25.2 〇 △ ior 比較你 26 87.9 30.88 11.5 21.2 〇 Δ 比你 27 69.9 19.33 11.9 26.8 〇 △ 比較你 28 135.7 54.44 12.3 28.6 〇 Δ 比·! 29 243.2 86.60 17.6 25.7 〇 Δ ior 比較你. 30 274.0 101.94 18.2 31.9 〇 Δ 比較你 31 285.0 101.87 19.1 29.2 〇 Δ 比較你 32 330.3 117.41 21.2 29.9 〇 Δ 比初歹' 33 155.8 34.00 36.2 27.6 〇 △ 比齡丨. 34 409.4 134.41 10.3 29.6 〇 X 7<x 比較#. 35 185.0 47.83 12.6 29.8 〇 ior 比齡丨 36 83.1 29.53 13.7 一 X Ί<χ· 100121203 32 201208793 由表3可知,關於屬於市售之先前技術製品之比較例26、 比車又例27、比較例29,結晶粒之平均粒徑、結晶粒之平均 粒徑之標準偏差、表面粗糙度如全部均非偏小。 另外由表3、1]4、115及圖6之結果可知,相較於比 較例1〜36’貫施你n〜2〇之樣本的水溶性樹脂組成物之結晶 粒之平均粒fe、結晶粒之平均粒徑之標準偏差及上述水溶性 樹脂組成物層之表面祕度Sm和與孔位置精確度之關係係 顯示出明確料處。料,實齡丨之樣本之水溶性樹 脂組成物她於_例1〜36,餘樹轉附㈣頭折損方 面均獲得優異之結果。 了头C於上述水溶性樹脂組成物之結晶粒之 徑及其標準偏差較奴情形下,隸置精確度有優良傾向, 而在上述蓋板之表面粗财Sm較小之情形下,具有減少樹 脂黏附之傾向。 另外表4係表不從表2及表3僅顯示以鑽頭徑0.08mm 進灯鑽孔加工之實施例2G及比較例21者,由表4之結果可 知’在進行鑽頭#⑽8mm之加工時,藉由於製造由上述水 溶性樹驗成物所構成之層時的急冷效果,而使結晶粒之平 均粒仅與其;準偏差、表面粗链度Sm、孔位置精確度及樹 脂黏附均顯示出優異的結果。No. Evaluation of results "Average particle size of the determined crystal grains (μτη) Standard deviation of the average particle size of the crystal grains (m) Surface roughness ratio ^!m 〇um) (1) (2) (3) Hole position accuracy average +3 (average value of 7 fwm) Bit damage resin adhesion actual -1 28.5 9.85 3.2 21.2 〇〇◎ Implementation order | 2 18.2 3.92 3.6 19.5 〇〇◎ Implementation order '3 20.1 5.00 3.9 20.6 〇〇◎ Implementation order 4 37.9 7.66 4.0 22.5 〇〇◎ Implementation Order 18.5 18.7 5.93 4.1 18.8 〇〇◎ rm ! 6 18.5 4.55 4.3 21.4 〇〇◎ #施合丨' 7 39.6 8.64 4.6 22.1 〇〇◎ Implementation Order 8 8 14.4 4.06 5.1 24.5 〇 〇〇Implementation order丨 9 58.3 23.05 5.1 24.9 〇〇〇10 34.4 8.19 5.2 20.3 〇〇◎ Implementation of the crowd 11 21.3 6.00 5.9 21.1 〇〇 ◎ Implementation of the package 12 39.4 7.86 5.9 21.4 〇〇 ◎ Implementation of the public 13 17.3 4.14 6.2 18.9 〇〇 ◎ Injury 14 66.9 15.67 6.6 20.9 〇〇〇Implementation 15 58.4 17.04 6.7 20.4 〇〇〇Implementation 19.16 19.6 7.52 6.8 20.3 〇〇◎ Implementation 17 55.1 19.28 6.8 21.3 〇〇〇Implementation彳18 40.1 12.25 6.9 23.7 〇〇〇Implementation 侥 19 61.1 12.08 7.3 20.6 〇〇〇Implementation 20 20.5 4.55 4.3 14.2 〇〇 ◎ Comparison 1 69.2 28.05 4.1 24.6 〇〇△ Comparison 彳歹2 70.9 29.52 4.3 26.5 〇〇X 3 61.7 26.11 5.4 27.9 〇〇Comparative 4 67.2 28.00 5.9 24.6 〇〇Δ Comparison Order 5 62.1 26.83 6.2 23.8 〇〇Δ Ratio Board 6 88.2 32.40 6.2 23.3 〇〇Δ Ratio ίYou 7 79.1 30.57 6.3 22.2 〇〇Δ Ratio歹8 69.7 27.13 6.8 20.9 〇〇Δ For example 9 75.6 30.64 7.8 25.6 〇〇X Compare you 10 90.2 34.68 8.1 25.1 〇〇X Compare you 11 52.2 23.04 8.2 25.2 〇〇tbte 12 80.9 21.57 8.7 26.5 〇〇 Compare you 13 53.0 15.18 8.8 26.8 〇〇Compare you 14 52.5 13.54 9.3 26.5 〇〇X Compare you 15 32.1 12.90 9.5 21.4 〇〇Δ 16 54.8 19.36 9.6 24.5 〇〇Δ Compare you 17 65.4 18.91 9.6 22.1 〇〇Δ Compare 彳歹! 18 37.9 12.59 9.8 27.1 〇〇X than fe' 19 61.4 21.24 10.5 26.8 〇〇X ratio ' 20 203.1 29.53 13.7 27.7 〇〇X 丨 丨 21 37. 7 10.97 8.8 15.8 〇 Δ XX Compare you 22 37.7 10.97 8.8 25.5 〇 Δ XX Compare you 23 170.3 53.28 9.7 27.9 〇 Δ XX is finer! 24 61.4 21.24 10.5 17.7 〇Δ XX Compare you 25 199.6 51.09 11.4 25.2 〇△ ior Compare you 26 87.9 30.88 11.5 21.2 〇Δ than you 27 69.9 19.33 11.9 26.8 〇△ Compare you 28 135.7 54.44 12.3 28.6 〇Δ ratio·! 29 243.2 86.60 17.6 25.7 〇Δ ior Compare you. 30 274.0 101.94 18.2 31.9 〇Δ Compare you 31 285.0 101.87 19.1 29.2 〇Δ Compare you 32 330.3 117.41 21.2 29.9 〇Δ than the initial '33 155.8 34.00 36.2 27.6 〇△ 丨 丨. 34 409.4 134.41 10.3 29.6 〇X 7<x Comparison#. 35 185.0 47.83 12.6 29.8 〇ior Age 丨36 83.1 29.53 13.7 One X Ί<χ· 100121203 32 201208793 It can be seen from Table 3 about the comparison of commercially available prior art products In Example 26, in comparison with the vehicle, Example 27 and Comparative Example 29, the average particle diameter of the crystal grains, the standard deviation of the average particle diameter of the crystal grains, and the surface roughness were all not small. Further, from the results of Tables 3, 1], 4, and 115, and Fig. 6, it is understood that the average particle size and crystal of the crystal grain of the water-soluble resin composition of the sample of n~2〇 are compared with those of Comparative Examples 1 to 36'. The standard deviation of the average particle diameter of the particles and the surface confidentiality Sm of the above water-soluble resin composition layer and the relationship with the hole position accuracy show a clear material. The water-soluble resin composition of the sample of the age-old cockroach was excellent in the results of _1 to 36, and Yushu transferred (4) head loss. The diameter of the crystal grain of the above-mentioned water-soluble resin composition of the head C and the standard deviation thereof are superior to those of the slave, and the accuracy of the placement is excellent, and in the case where the surface of the cover sheet is small, the Sm is small. The tendency of the resin to adhere. In addition, in Table 2 and Table 3, only Example 2G and Comparative Example 21 in which the drill diameter of 0.08 mm was drilled into the lamp was not shown in Table 2, and as a result of Table 4, it was found that when the drill #(10) 8 mm was processed, By making the quenching effect when the layer composed of the water-soluble tree test substance is produced, the average grain of the crystal grain is only the same; the quasi-deviation, the surface roughness Sm, the hole position accuracy, and the resin adhesion are excellent. the result of.

S 100121203 33 201208793 鬥寸尨 综合 判定 ◎ 特性評估結果 g 1 j 樹脂 黏附 〇 < V_^ 1 ! 鑽頭 折損 〇 〇 § 甸ίΓ ^ V 1 δΗ t> ^ <N CO id 物性評估結果 g 表面粗 ^^.Sm (/mi) cn 00 od 3 iti P $ 寸* Cs o V—✓ 丨 結晶粒之 平均粒徑 ㈣ IT) od 卜 鑽頭徑 2 0.08 mm0 〇 〇 金屬支 撐箔 β is 70μηι 〇 〇 冷卻般 s 慢冷 i.rc/ mi 〇 急冷 3.1°C/ 機 〇 1添加劑 β s Ou糾吃 VS3 ^ 寸 〇 寸 d S EtOH 沸點 78.4 °C o o MeOH 沸點 64.7 °C o o s 樹月旨系 © PEG 20000 Altop MG150 8 8 實施例 20 比幸交例 21 snzlool 201208793 又,表5係表示從表2及表3僅顯示以鑽頭徑0.105mm 進行鑽孔加工之實施例5、6及比較例22者,由表5之結果 可知,在進行鑽頭徑0.105mm之加工時,藉由於製造由上 述水溶性樹脂組成物所構成之層時的急冷效果,而使結晶粒 之平均粒徑與其標準偏差、表面粗糙度Sm、孔位置精確度 及樹脂黏附均顯示出優異的結果。 100121203 35 201208793 IS ◎ ◎ \ 1 特圆古結果 S 〇 〇 0 S 矮I 〇 〇 〇 § Λ贫 I街f 6H D iV ξ 寸 Μ W-) 物( 生靠結果 $ 表面梱链 度Sm (μπι) 1_ ψ < ΓΛ 〇〇 00* g $ ^ 1|1 wS 寸· 〇 結晶粒之 平均4¾呈 ㈣ g «Ο οο 卜· 鑽頭徑 1 0.105 ΐϊκηφ 〇 〇 〇 金屬支 :撐箔 1_ © 鋁 70μιη 〇 〇 〇 冷卻敏 1 慢冷 i.rc /機 1_ 〇 僉P f 4) ^ ^ 〇 〇 添加劑 B ir\ ®潜簽 O 〇 1 ΒΟΗ 沸點 78.4 V o ο 〇 3 MeOH 沸點 64.7 °C o 2 〇 S 樹脂系 PEG 20000 异 3 Ahq) MG150 1 實施例5 實施例ό tb$交例22 9£ snolool 201208793 (產業上之可利用性) 若根據本發明,則可以提供相較於先前技術之鑽孔用蓋板 之其孔位置精確度優異、黏附在鑽頭上之樹脂少、鑽頭折損 減少之鑽孔用蓋板。然後,在截至目前為止之屬於雷射開孔 領域之極小徑領域中,因為可以位置精確度優良地進行鑽 孔’可減少黏附於鑽頭上之樹脂,並減低鑽頭折損而對成本 降低及生產性提升方面有所貢獻,故在產業上之利用價值極 大。 【圖式簡單說明】 圖1係針對各實施例及比較例之水溶性樹脂組成物層之 表面狀態,予以放大顯示之照片。 圖2係顯示使用先前技術之鑽孔用蓋板來進行開孔加工 時之狀態的示意剖面圖。 圖3係顯示使用本發明之鑽孔用蓋板來進行開孔加工時 之狀態的示意剖面圖。 圖4係針對各實施例及比較例,顯示水溶性樹脂組成物層 之結晶粒之平均粒徑與孔位置精確度之關係的圖。 圖5係針對各實施例及比較例,顯示水溶性樹脂組成物層 之結晶粒徑之標準偏差與孔位置精確度之關係的圖。 圖6係針對各實施例及比較例’顯示水溶性樹脂組成物層 之表面粗糙度Sin與孔位置精確度之關係的圖。 【主要元件符號說明】 100121203 37 201208793 1 鑽頭之前端 2 ' 20 樹脂組成物層 2a〜2g 結晶粒 3 金屬支撑箔 20a〜20c 結晶粒 100121203 38S 100121203 33 201208793 尨 尨 comprehensive judgment ◎ characteristic evaluation result g 1 j resin adhesion 〇 < V_^ 1 ! bit damage 〇〇 § Γ Γ Γ ^ V 1 δΗ t> ^ <N CO id physical property evaluation result g surface rough ^^.Sm (/mi) cn 00 od 3 iti P $ inch * Cs o V-✓ 平均 average grain size of 丨 crystal grains (4) IT) od bit diameter 2 0.08 mm0 〇〇 metal support foil β is 70μηι 〇〇 cooling General s slow cold i.rc/ mi 〇 〇 3.1 ° C / machine 〇 1 additive β s Ou 纠 VS3 ^ inch inch d S EtOH boiling point 78.4 °C oo MeOH boiling point 64.7 °C oos tree month system © PEG 20000 Altop MG150 8 8 Example 20 Comparative Example 21 snzlool 201208793 In addition, Table 5 shows that Examples 5 and 6 and Comparative Example 22 which are drilled with a drill diameter of 0.105 mm are shown in Tables 2 and 3, respectively. As a result of the results of Table 5, when the drill diameter is 0.105 mm, the average particle diameter of the crystal grains and the standard deviation and surface roughness thereof are obtained by the rapid cooling effect when the layer composed of the water-soluble resin composition is produced. Sm, hole position is accurate Both the degree of adhesion and resin adhesion showed excellent results. 100121203 35 201208793 IS ◎ ◎ \ 1 Special round results S 〇〇0 S Short I 〇〇〇§ Λ poor I street f 6H D iV ξ inch Μ W-) (born by result $ surface 梱 chain degree Sm (μπι 1_ ψ < ΓΛ 〇〇00* g $ ^ 1|1 wS inch · 平均 crystal grain average 43⁄4 is (4) g «Ο οο 卜 · bit diameter 1 0.105 ΐϊκηφ 〇〇〇 metal branch: support foil 1_ © aluminum 70μιη 〇〇〇Cooling sensitivity 1 Slow cooling i.rc / Machine 1_ 〇佥P f 4) ^ ^ 〇〇 Additive B ir\ ®potential O 〇1 ΒΟΗ Boiling point 78.4 V o ο 〇3 MeOH Boiling point 64.7 °C o 2 〇 S resin PEG 20000 x 3 Ahq) MG150 1 Example 5 Example ό tb$ 交例 22 9 £ snolool 201208793 (industrial availability) According to the present invention, it is possible to provide a drill hole compared to the prior art A cover plate for drilling holes having excellent hole position accuracy, less resin adhering to the drill bit, and reduced drill bit damage. Then, in the field of extremely small diameters in the field of laser opening up to now, drilling can be performed with excellent positional accuracy, which can reduce the resin adhering to the drill bit and reduce the breakage of the drill bit, resulting in cost reduction and productivity. It has contributed to the improvement, so it has great value in the industry. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a photograph showing an enlarged view of the surface state of a water-soluble resin composition layer of each of Examples and Comparative Examples. Fig. 2 is a schematic cross-sectional view showing a state in which the drilling cover plate of the prior art is used for the drilling process. Fig. 3 is a schematic cross-sectional view showing a state in which the drilling cover plate of the present invention is used for the drilling process. Fig. 4 is a graph showing the relationship between the average particle diameter of crystal grains of the water-soluble resin composition layer and the hole position accuracy for each of Examples and Comparative Examples. Fig. 5 is a graph showing the relationship between the standard deviation of the crystal grain size of the water-soluble resin composition layer and the hole position accuracy for each of Examples and Comparative Examples. Fig. 6 is a graph showing the relationship between the surface roughness Sin of the water-soluble resin composition layer and the hole position accuracy for each of Examples and Comparative Examples'. [Description of main components] 100121203 37 201208793 1 Front end of drill bit 2 ' 20 Resin composition layer 2a~2g Crystal grain 3 Metal support foil 20a~20c Crystal grain 100121203 38

Claims (1)

201208793 七、申請專利範圍·· 1.-種鑽額蓋板’係在金屬支撐箱之至少單面上,形成 有由結晶性之水溶性樹脂組成物所構成之厚度為 0.02〜0.3mm之層者,其特徵為, 上述水溶性樹脂組成物之結晶粒係平均粒彳以5〜 之範圍内,其標準偏差在25μηι以下, 由上述水溶性樹脂組成物所構成之層於鑽頭進入面之表 面粗糙度Sm為8μιη以下, 上述由水溶性樹脂組成物所構成之層係在上述金屬支撐 箔上,於直接塗佈上述水溶性樹脂組成物之熱融解物後,或 於將含有上述水溶性樹脂組成物之溶液予以塗佈並使其乾 燥後,以1_5°C/秒鐘以上之冷卻速度,在6〇秒鐘以内從 120C〜160C之溫度冷卻至25。(:〜40°C之溫度而形成。 2. 如申請專利範圍第1項之鑽孔用蓋板,其中,上述水溶 性樹脂組成物之結晶粒係平均粒徑在5〜4〇^m之範圍内,且 其標準偏差在17μηι以下, 由上述水溶性樹脂組成物所構成之層於鑽頭進入面之表 面粗糙度Sm為7μιη以下。 3. 如申請專利範圍第1項之鑽孔用蓋板,其中,上述水溶 性樹脂組成物係含有水溶性樹脂(Α),並進一步含有由疏水 性物質(Β1)、融點高於上述水溶性樹脂(Α)之物質(Β2)及可 而與上述水溶性樹脂(Α)之相溶性之物質(Β3)所選出之至 100121203 39 201208793 少—種。 4. 如申請專利範圍第1項之鑽孔用蓋板,其中,含有上述 水溶性樹脂組成物之溶液係進一步含有水及沸點低於水之 溶媒。 5. 如申請專利範圍第1項之鑽孔用蓋板,其中,上述金屬 支撐箔之厚度在0.05〜0.5mm之範圍内。 6. 如申請專利範圍第1項之鑽孔用蓋板,其係使用於貼銅 積層板之加工。 100121203 40201208793 VII. Patent application scope 1. The seeding cover plate is formed on at least one side of the metal support box, and a layer having a thickness of 0.02 to 0.3 mm formed of a crystalline water-soluble resin composition is formed. The water-soluble resin composition has a crystal grain average particle size of 5 to 5, and a standard deviation of 25 μm or less, and the layer composed of the water-soluble resin composition is on the surface of the drill entering the surface. The roughness Sm is 8 μm or less, and the layer composed of the water-soluble resin composition is on the metal supporting foil, and after directly applying the hot melt of the water-soluble resin composition, or containing the water-soluble resin After the solution of the composition is applied and dried, it is cooled from 25 C to 160 C to 25 at a cooling rate of 1 to 5 ° C /sec or more in 6 seconds. 2. The method for forming a hole for drilling according to the first aspect of the invention, wherein the water-soluble resin composition has a crystal grain size average particle diameter of 5 to 4 〇 ^m. In the range, the standard deviation is 17 μm or less, and the surface roughness Sm of the layer formed of the water-soluble resin composition on the drill entry surface is 7 μm or less. 3. The drilling cover plate according to claim 1 The water-soluble resin composition contains a water-soluble resin (Α), and further contains a substance (Β2) having a water-soluble resin (Α1) and a melting point higher than the water-soluble resin (Β2), and The water-soluble resin (Α) compatible substance (Β3) is selected to be 100121203 39 201208793. The drilling cover plate according to the first aspect of the patent application contains the above water-soluble resin composition. The solution further comprises water and a solvent having a boiling point lower than that of water. 5. The casing for drilling according to the first aspect of the invention, wherein the thickness of the metal supporting foil is in the range of 0.05 to 0.5 mm. Apply for patent item 1 Cover hole, which based on the use of copper-clad laminates processing. 10012120340
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