TW201207377A - Surface plasmon resonance sensor module and sensing system having the same - Google Patents

Abstract

A Surface plasmon resonance (SPR) sensor module includes a sensor chip and a fixing part. The sensor chip includes a prism and a thin metal film. The prism has a first surface and a second surface. The thin metal film is formed on the first surface of the prism. The fixing part receives the sensor chip.

Description

201207377

TW7917PA VI. Description of the Invention: [Technical Field of the Invention] The present invention is a sensing device having a surface electrospray resonance sensor group, and particularly relates to an eight-piece, including - thin metal film A plasmonic resonance sensor assembly is formed on the prism. ~I has a surface first [Prior Art] A sub-system-type free electron shuttles to the quantum shock of the surface of the medium. This read surface is, for example, the surface of a thin metal film. The surface plasmons are activated by (such as sharp) and are larger than the critical angle of the dielectric

Plas_ membrane, and causes resonance, called surface plasmon resonance (s-ce i, 2776, SPR). The incident angle of an incident light causes the surface of the surface to be more sensitive. The refractive index change of the material adjacent to the thin metal film has the characteristics of the Weizi resonance ❹m_, the surface amount is analyzed - the film sample, and according to The refractive index of the film sample: the 'thickness' film sample is adjacent to the material of the thin metal film. First, the surface plasmon resonance biosensor has a Kretschmann aeth^t ^K__Raether structure, and the incident light penetrates the high-refraction denier and is reflected on the thin metal film by increasing the light. Wave speed or moving, 1 number $ surface ^. Surface plasmon resonance biosensing 11 polarization polarization - the original emitted light 'borrowed _ plate polarized into a short wavelength, and this light is incident on the edge drive moving system to change the incidence of the light human mirror Angle, t-face electric tweezers resonance biosensor measures the change in effective reflectivity or dielectric material 201207377

TW7917PA is distributed over the effective thickness of a thin metal film. However, the above-mentioned conventional surface plasmon resonance biosensor requires an additional carrier to attach a thin metal film to the reflective surface of the crucible..._elastically transparent elastomer, such as index matching oil (indexmatching〇il) used. Further, when the prism and the thin metal film are integrally formed, the crucible has a curved surface, causing problems in attaching or removing the surface plasmonic resonance device. SUMMARY OF THE INVENTION According to the present invention, it is proposed that a surface electric material resonance (SPR) sensing assembly includes a thin metal film formed on a crucible. According to the present invention, it is further proposed that the sensing system comprises a surface electro-convex vibration (SPR) sensing component. According to an embodiment of the present invention, a surface plasmon iL vibration sensing component includes a sensing wafer and a gorge component, the fixing component is used for accommodating, and the sensing wafer includes a 稜鏡' having a - The surface and the second surface 'and the thin metal film' are formed on the first surface of the crucible. In one of the embodiments, the 'fixing member may include a main frame, including a bottom surface and a plurality of side walls extending from the bottom surface to form an accommodating space accommodating the sensing wafer'-sub-frame, adjacent to the accommodating space, 岐The main frame; and an elastic element 'between the main frame and the sub-frame, and change the size of one of the accommodating spaces. In one of the cases, a first opening and a second opening may be formed on the side walls and face each other. ~ The U surface of the 稜鏡 稜鏡 稜鏡 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二

TW7917PA: == the bottom surface of the space' and the refractive surface through the first opening and the second opening protrusion may be formed on the bottom of the main frame in one embodiment, a groove may be formed on the two side walls of the main frame according to In another embodiment of the present invention, the fixing member may include a main-side, a bottom surface, and a plurality of _-openings, and a space-storing sensing wafer. The sub-frame is adjacent to the accommodating extension == the dimorphic element is disposed between the main frame and the sub-frame, and in one embodiment, a first opening and a first opening are formed on the side walls and face each other. The spear can be opened separately... In the second, the second surface can be - the light from the outside is refracted by the riding surface, and the crystal surface is facing the bottom surface of the accommodating space, and the refracting surface is transmitted through The first opening and the first folding are partially exposed. The light-irradiating member knows that the light penetrates through the first opening and the reflected light is reflected on the thin metal film, and penetrates the second to reach the optical connection. In one embodiment, the first protruding portion is formed on the surface, The first groove is formed on the two side walls of the main frame, and the second groove is formed in the detecting portion, and the second protruding portion is read/convex corresponding to the first groove axis to fix the main frame and the detecting portion to each other. According to the present invention, the thin metal film is deposited on the metal ruthenium to form a sensing chip, and the alternative matching oil material is used for the lesson _ a and is more conveniently controlled, and the user of the state can be 201207377

The TW7917PA further has a fixed component for the user to more easily control the sensing wafer, and it is easier to attach the sensing wafer to a sensing device and to the self-sensing device. [Embodiment] The present invention will be described below with reference to the drawings: Fig. 1 is an enlarged and exploded perspective view showing a surface plasmon resonance sensing element assembly according to an embodiment of the present invention. Fig. 2 is a bottom plan view showing the bottom surface of the fixing member in the second drawing. Fig. 3 is a plan view showing the structure of the fixing member in the second drawing in an exploded bottom frame. Referring to Figures 1 through 3, a surface-plasma resonance sensor assembly according to an embodiment of the present invention includes a sensing wafer 100 and a fixing member 2 (10). The sensing wafer 100 includes a crucible 110 and a thin metal film 12, wherein the crucible 11 has a first surface 115 and a second surface 114, and a thin metal film 12 is formed on the first surface 115. A metal has a real portion having a negative dielectric function which is formed to a thickness of several tens of nanometers to form a thin metal film 120. For example, gold, silver, copper and aluminum can be used. Among the above metals, 'silver has the sharpest surface electropolymer resonance peak, and the metal has good surface stability, so it is widely used. The thin metal film 120 is formed by depositing the metal on the first surface of the crucible. The prism 110 may include a transparent material such as glass or plastic such as oxidized stone (Si02) and cr〇wn glass (BK?) for transmitting light from the light source (not drawn) Show). The first surface II5 of the prism 110 is -planar so that the thin metal boat 2 can be formed above the first surface 115. The second surface 114 is formed - a refractive surface profile, such that ^ 201207377

Light from the TW7917PA can be refracted or scattered on the second surface. The light penetrates the crucible 110 from an external light source and is incident on the thin metal crucible 12〇, so that the surface of the thin metal film 12G is activated, and then the light reflected by the thin metal film m penetrates the crucible 110 and outward. Shoot out. The cross section of the 稜鏡11〇 may be a trapezoidal shape, a semicircular shape, a tng0nal prism shape, or a diffraction grating (which is a shape of the grating), but is not limited thereto. In the figure i, the second surface is divided into a first curved surface m, a second curved surface 113 and a bottom surface 112 to explain the connection relationship between the sensing wafer ι and the fixing member 200. According to the shape of the refractive surface of the crucible, the angle of refraction and the refractive index of an incident light can be appropriately adjusted. In an experiment, the same was placed on the thin metal film 120, and the amount of change in effective refractive index or effective thickness was measured. Therefore, the shape of the refractive surface can be appropriately selected depending on the incident angle of the sample and the incident light. As described above, in the experiment, the sensing wafer 100 is formed by depositing a thin metal film on the first surface of the crucible, and the additional matching oil is not attached to the thin metal film. Required. As a result, the problems caused by the use of additional matching oils can be solved. The fixing member includes a main frame 210, a primary frame 220, and a resilient member. The main frame 210 includes a bottom surface 212 and a side wall extending from the bottom surface 212 to form an accommodation space 217. The sub-frame 220 is mounted and fixed to a portion of the accommodating space 217, and the sub-frame 220 is defined by the bottom surface 212 and the side wall. The sensing wafer 1 is placed in a portion of the accommodating space 217 which is outside a portion of the sub-frame 220. The sub-frame 22 is inserted into the accommodating space 217'. A fixing plate 224 may partially cover the sub-frame 220. The fixing plate 224 can cover the main frame 210 ′ to fix the sub-frame 220 to the accommodating space 217 and avoid self-accommodating space.

TW7917FA 217 is separated. The sensing wafer 100 is fixed by the main frame 210, the sub-frame 220, and the elastic member 230. The elastic member 230 has an elastic force that urges the sub-frame 220. The sensing wafer 100 is placed in the accommodating space 217. Thus, the first surface 115 formed with the thin metal film 120 faces the upper portion of the accommodating space 217, and the bottom surface 112 of the 面对n〇 faces the accommodating space 217. The bottom surface 212. The first and second openings 214 and 216 are formed from the two side walls of the bottom surface 212 of the accommodating space 217, respectively. Therefore, when the sensing wafer 100 is fixed to the fixing member 2, the first curved surface 111 of the second surface 114 can be exposed from the second opening 216, and the second curved surface 113 of the second surface 114 can be exposed from the first opening 214. Out. When the fixing component 2 is mounted on a sensing system (please refer to FIG. 4), the light source incident prism 110 of the light self-sensing system penetrates the first opening 214 of the valley space 271 to reach the thin metal film. 12〇. Further, the light reflected on the thin metal film 120 penetrates through a second opening 216 and is incident on one of the light receiving members of the sensing system (not shown). The first and second openings 214 and 216 can be appropriately adjusted in accordance with the shape of the crucible 110 and the incident direction of the light. In addition, the bottom surface of the accommodating space 217 can be appropriately adjusted according to the shape of the second surface I # of the 0. The fixing member 200 includes the elastic member 23 〇, for example, the elastic member 23 〇 can be a bomb meal. The sub-frame 220f can be moved parallel along the side walls of the main frame 21, meaning to rotate at a predetermined distance in the direction of the -elastic member 23〇. The sensing wafer 100 is fixed by the elastic restoring force of the elastic member 230. A projection 222 is formed in the sub-frame 220, and the user can conveniently use the projection 222 to move the sub-frame 22〇. For example, when the elastic member 230 is compressed, the secondary frame 22 is moved in one direction, 8 201207377

The TW7917PA increases the accommodating space 217; when the elastic member 230 is extended, the sub-frame 220 moves in one direction to reduce the accommodating space 217. Therefore, when the sub-frame 220 is moved in the direction, the accommodating space 217 and the sensing wafer 1 are mounted, and the sensing wafer is fixed to the accommodating space 217 by the elastic restoring force 1 of the elastic member. Further, the sub-frame 220 is moved in the direction, the accommodating space 217 is enlarged, the sensing wafer 100 is detached, and when the sensing wafer 100 is detached, the sub-frame 220 is returned to a starting position. A guide portion 218 may be formed on the bottom surface 212 along a relatively longer side of one of the main frames 21''. One of the sensing portions of the sensing system has a shape corresponding to the fixing member 2's and a shape corresponding to the guiding portion 218, so that the fixing member 2 can be easily combined with the sensing system. A groove 219 is formed between the side walls of the main frame 21〇. The projection corresponding to the groove 219 is formed on the side wall of the detecting portion of the sensing system, and when the fixing member 2 is fixed to the detecting portion, the fixing member 2 is coupled to the sensing system. - Figure 4 is a perspective view of another embodiment of the present invention. The sensing assembly of Figure 1 is also shown in Figure 4. In accordance with the present invention - The measuring system 3 (8) includes a sensing component, a light-irradiating component 310', a light-receiving component 320, and a detecting portion 33A. * Other identical or similar components as described in the first embodiment in Figures 1 to 3, ', I only use the same reference character|虎' because it has been explained in detail in the foregoing embodiment, so it will not be described again. The light-emitting component 310 emits light and is incident on the detecting portion 33, and the incident light is transmitted, U 1〇〇〇〇11〇 is incident on the thin metal film (10), and the sensing wafer is purchased from the edge of the fixing member 2〇〇 of the bonding detecting portion 330. According to an embodiment of the present invention, the sensing system The laser can be used as an incident light, and the laser can be turned over from the light-irradiating portion. The laser-irradiated portion 31G can have a mesh 201207377.

TW7917PA Point or line, but not limited to this. In addition, the wavelength of the laser can range from 4 nanometers to 9 nanometers, which is most suitable for surface electropolymer resonances emitted from thin metal films. When the wavelength of the laser is less than _ nanometer, the surface resonance is not able to be emitted. The wavelength of the laser is greater than 9 GG nm. It is difficult to obtain an image by the light receiving member 32 () and analyze the sample. - In addition 'because the surface electropolymer emitted from the thin metal film 12 只 is only activated as a component of a human face that is substantially parallel to all of the human light components, for example, a transverse magnetic (transverse magnetic) component A polarizer that is polarized from the light-irradiating member 310 to a transversely-polarized polarized light is polarized using a polarizer (not shown). The light receiving portion 32G can reflect light of the thin metal film 12G. Therefore, the light receiving portion 320 can measure a change in wavelength, such as a change in color or intensity, depending on the absorption of the surface electrocolloid on the component. In an embodiment of the invention, the light receiving component 32 monitors a relatively dark portion of an image, the light of the relatively dark portion being reflected by the thin metal film 12 at an angle substantially the same as the minimum incident angle. The strength is the smallest. Therefore, the surface plasmon resonance angle can be actually measured and the sample can be analyzed. The light receiving portion 321 may include a light receiving portion for detecting an image, such as a photodiode array 'charge coupled device' and a complementary metal oxide semiconductor. The shape of the detecting portion 330 corresponds to the shape of the fixing member 200, and the #200 is attached and fixed to the detecting portion 33A. The detecting portion 330 has a structure corresponding to the guiding portion 218, and the guiding portion 218 is formed on the bottom surface 212 of the fixing member 2, so that the fixing member 2 can be separated from the gap of the detecting portion 330. In addition, a projection (not shown) is inserted in the groove 219, and the groove 219 is formed on the side wall of the fixing member 2 to avoid the fixing member 201207377

TW7917PA 200 was peeled off in the experiment. The fixing member 200 is attached to the detecting portion 330 after the sensing wafer loo is placed in the fixing member 2''. According to an embodiment of the present invention, in order to analyze the sample using the sensing system 3, the sensing wafer 100 is fixed to the fixing member 2, and the fixing member 2 is fixed to the detecting portion 330, and then the light is pierced from the light source 31. The fixing member 200 is mounted on the detecting portion 330, and the light is incident on the thin metal film 120' at a predetermined angle. Therefore, the light receiving member 320 senses reflection on the thin metal film 12 The light of the light. § substantially parallel to the surface of the sensing wafer 1 wave velocity component is the same as the surface wave velocity of a surface plasmon emitted along a interface between the sensing wafer 100 and the sample, the energy of the incident light is mostly absorbed To the surface of the plasma. At this time, the incident angle is referred to as a resonance angle (Θ). When the surface plasmonic resonance state changes depending on the thickness, the refractive index, the sample/length, and the like, the change in the surface plasmon resonance state can be measured via the light receiving member 320. When the fixing member 200 of the sensing wafer 100 is mounted, it can be attached or detached from the detecting portion 33 of the sensing system 300, and the sensing wafer 1 can be easily attached or detached. Thus, the sensing system 300 can be easier to use and the user can more easily experiment. According to the present invention, the thin metal film is disposed on the crucible to form the sensing wafer, and the sensing wafer replaces a conventional device such as a matching oil material, and the user can conveniently control the device and avoid the non-uniform surface. The noise generated. In addition, the sensing component has a fixing component for the user to conveniently control the sensing chip, and the sensing chip can be more easily mounted to and detached from a sensing device. In summary, although the present case has been disclosed above by way of example, it is not intended to limit the case. Those who have the usual knowledge in the technical field of this case can make various changes and refinements in the spirit and scope of this case.

201207377 TW7917PA Therefore, the scope of protection of this case is subject to the latter. The scope of the patent application is defined as follows: BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing an enlarged and exploded perspective view of a sensor assembly according to the present invention. Fig. 2 is a bottom plan view showing the bottom surface of the fixing member in Fig. 1. FIG. 3 is a plan view showing the structure of the surface electro-electron resonance diagram of the fixed portion of the embodiment of the present invention. FIG. 4 is a diagram showing a system according to another embodiment of the present invention. Perspective [Major component symbol description] 100 sensing wafer 110 稜鏡 111 first curved surface 112 bottom surface 113 g two curved surface 114 second surface 115 first surface 120 thin metal film 200 fixing member 210 main frame 212 bottom surface 214 first opening 12 201207377

TW7917PA 216 : second opening 217 : accommodating space 218 : guiding portion 219 : groove 220 : secondary frame 222 : protruding portion 224 : fixing plate 230 : elastic member 300 : sensing system 310 : light illuminating member 320 : light Receiving part 330: detecting part

Claims (1)

201207377 TW7917PA VII. Patent Application Range: 1. A Surface Plasmon Resonance (SPR) sensing component, comprising: a sensing wafer, comprising: a crucible having a first surface and a second surface And a thin metal film formed on the first surface of the crucible; and a fixing member for accommodating the sensing wafer. 2. The surface plasmonic resonance sensing assembly of claim 1, wherein the fixing component comprises: a main frame comprising a bottom surface and a plurality of side walls extending from the bottom surface to form a cavity a receiving space for accommodating the sensing wafer; a primary frame adjacent to the accommodating space and fixed to the main frame; and a resilient element disposed between the main frame and the sub-frame and changing the accommodating space One size. 3. The surface plasmonic resonance sensing assembly of claim 2, wherein a first opening and a second opening are formed through the side walls and face each other. 4. The surface plasmonic resonance sensing assembly of claim 3, wherein the second surface of the prism is a refractive surface, and the externally illuminated light is refracted by the refractive surface. The sensing chip is received such that the refractive surface faces a bottom surface of the receiving space, and the refractive surface is partially exposed through the first opening and the second opening. 5. The surface plasmon resonance sense 201207377 TW7917PA measuring assembly according to claim 2, wherein a projection is formed on the bottom surface of the main frame, and a groove is formed on two side walls of the main frame. / 6. The sensing system comprises: a surface plasmon resonance sensing component, comprising: a sensing wafer, comprising: a crucible having a first surface and a second surface; and a thin metal film, Forming on the first surface of the crucible, a fixing member accommodating the sensing wafer; a light-illuminating member, irradiating a light incident on the thin metal film and penetrating the prism;" a receiving part, sensing reflection The light from the thin metal film is passed through the prism; and the detecting portion 's surface plasmon resonance sensing component is mounted on the detecting portion. 7. The sensing system according to claim 6 The fixing member includes: '~ a main frame, including a bottom surface and a plurality of side walls extending from the bottom surface to form an accommodating space for accommodating the sensing wafer; and a primary frame adjacent to the housing a space is fixed to the main frame; and a resilient element is disposed between the main frame and the sub-frame and changes the size of the accommodating space. 8. As described in claim 6 Sensing system An opening 15 and a second opening are respectively formed through the side walls and face each other. 9. The sensing system according to claim 8 wherein the The second surface is a refractive surface, and the light irradiated from the outside is refracted on the refractive surface, and the sensing wafer is received such that the refractive surface faces a bottom surface of the accommodating space, and the refracting surface passes through the first opening And the second opening is partially exposed; and the light from the light-irradiating member is incident on the cymbal through the first opening, and the light reflected on the thin metal film is transmitted through the second opening 10. The sensing system of claim 7, wherein a first protrusion is formed on the bottom surface of the main frame, and a first groove is formed on two side walls of the main frame. A second groove is formed in the detecting portion corresponding to the first protruding portion, and the second protruding portion is formed in the detecting portion corresponding to the first groove, so that the main frame and the detecting portion are fixed to each other. 16