CN102331410A - Surface plasma resonance sensor module and sensor-based system with this module - Google Patents
Surface plasma resonance sensor module and sensor-based system with this module Download PDFInfo
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- CN102331410A CN102331410A CN2011101849322A CN201110184932A CN102331410A CN 102331410 A CN102331410 A CN 102331410A CN 2011101849322 A CN2011101849322 A CN 2011101849322A CN 201110184932 A CN201110184932 A CN 201110184932A CN 102331410 A CN102331410 A CN 102331410A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N2021/258—Surface plasmon spectroscopy, e.g. micro- or nanoparticles in suspension
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Abstract
Surface plasma resonance (SPR) sensor assembly comprises sensor chip and fixed part.Sensor chip comprises prism and metallic film.Prism has first surface and second surface.Metallic film is formed on the first surface of prism.Fixed part is holding sensor chip.
Description
Technical field
Embodiments of the invention relate to surface plasma resonance (SPR) sensor assembly and the sensor-based system with spr sensor module.More specifically, embodiments of the invention relate to a kind of spr sensor module and a kind of sensor-based system with this spr sensor module with the metallic film that is formed on the prism.
Background technology
Surface plasma is a kind of through the for example quantization vibration of the free electron of the surface propagation of metallic film of medium.Surface plasma is by exciting through electric Jie's media (like prism) and with the incident light of going into to inject metallic film greater than the angle of the critical angle of this electricity Jie media, and causes resonance, and this is called surface plasma resonance (SPR).The incident angle (it means resonance angle) that causes the incident light of SPR is to responsive with the change of refractive of the adjacent material of this metallic film.Spr sensor utilizes above-mentioned character, makes that spr sensor can be based on the material of metallic film adjacency---the change of refractive of film sample quantitatively and qualitatively analyze film sample and MEASUREMENTS OF THIN sample thickness.
In the prior art, surface plasmon resonance biosensor has KR (Kretschmann-Raether) structure.In the KR structure, incident light through having high index of refraction transparent dielectric prism and on metallic film reflection with the wave vector through increasing light or increase momentum and come the excitating surface plasma.Surface plasmon resonance biosensor makes from the light source generation through polarizer and has short wavelength's light polarization, and said light is incident to prism.At this moment, drive division moves light source and goes into to inject the angle of prism to change light, makes the surface plasmon resonance biosensor measurement be arranged on the effective reflectivity or the net thickness of the dielectric material on the metallic film.
But the carrier that above-mentioned existing surface plasmon resonance biosensor need add is to be pasted to metallic film the reflecting surface of prism.Mainly use the solid-state resilient transparent elastomer such as index-matching oil.In addition, when prism and metallic film were integrally formed, the prism with curved surface can cause prism is connected to the SPR device and shirks some problems the prism process from the SPR device.
Summary of the invention
Embodiments of the invention provide a kind of surface plasma resonance (SPR) sensor assembly, comprise sensor chip and are formed on the metallic film on the prism.
Embodiments of the invention also provide a kind of sensor-based system that comprises the spr sensor module.
According to embodiments of the invention, surface plasma resonance (SPR) sensor assembly has sensor chip and the fixed part that holds sensor chip.Said sensor chip comprises: the prism with first surface and second surface; With the metallic film on the first surface that is formed on said prism.
In one embodiment, said fixed part comprises: main frame, comprise bottom surface and the sidewall that extends from said bottom surface, and sub-frame is set in abutting connection with said spatial accommodation, and is fixed in the said main frame; And elastic component, be arranged between said main frame and the sub-frame, and change the size of said spatial accommodation.Said bottom surface and sidewall can form the spatial accommodation that holds said sensor chip.
In an embodiment, pass the said sidewall that faces one another and be formed with first opening and second opening respectively.
In an embodiment, the second surface of said prism is a plane of refraction, reflects at this plane of refraction from the light of external irradiation.Said sensor chip is received to making the lower surface of said plane of refraction towards said spatial accommodation.Said refractive surface exposes through the said first and second opening portion ground.
In an embodiment, be formed with jut on the said bottom surface of said main frame.Two side-walls at said main frame all are formed with groove.
According to another embodiment of the present invention, be a kind of sensor-based system, comprising: spr sensor module, illumination portion, acceptance division and test department.Said spr sensor module comprises sensor chip and the fixed part that holds said sensor chip.Said sensor chip comprises prism and metallic film.Said prism has first surface and second surface.Said metallic film is formed on the first surface of said prism.Into said metallic film is shone with light through said prism in illumination portion.Acceptance division is experienced on the said metallic film reflection and is excited the light through prism.Said spr sensor mould is installed on the test department.
In an embodiment, said fixed part comprises: main frame, sub-frame and elastic component.Main frame comprises bottom surface and the sidewall that extends from said bottom surface, to form the spatial accommodation that wherein holds said sensor chip.Sub-frame is set in abutting connection with said spatial accommodation and is fixed in the said main frame.Elastic component is arranged between said main frame and the said sub-frame, and changes the size of said spatial accommodation.
In an embodiment, pass the said sidewall that faces one another and be formed with first opening and second opening respectively.
In an embodiment, the second surface of said prism is a plane of refraction, reflects at this plane of refraction from the light of external irradiation.Said sensor chip is received to making the lower surface of said plane of refraction towards said spatial accommodation.And said plane of refraction exposes through the said first opening portion ground.Go into to inject said prism from the light of said illumination portion refraction through said first opening.The light that on said metallic film, reflects arrives said light receiver through said second opening.
In an embodiment, on the bottom surface of said main frame, be formed with first jut.Place, two side at said main frame all is formed with first groove.Be formed with second groove with corresponding at said test department with said first jut.Be formed with second jut with corresponding at said test department, make that said main frame and said test department are fastened to each other with said first groove.
According to the present invention, depositing metal films is forming sensor chip on prism, and the sensor sheet is used for substituting the coupling wet goods that existing apparatus uses, thus operator's control device more easily, and the noise that can avoid uneven surface to cause.
In addition, the sensor assembly with fixed part makes the operator control sensor chip more easily, and can more easily sensor chip be connected to sensing device and unload from sensing device.
Description of drawings
Through describing embodiment of the present invention in detail with reference to accompanying drawing, above-mentioned and other characteristics of the present invention will be clearer, wherein:
Fig. 1 shows surface plasma resonance (SPR) sensor assembly according to an embodiment of the invention for amplifying exploded perspective view;
Fig. 2 is the upward view that the bottom surface of fixed part among Fig. 1 is shown;
Fig. 3 illustrates the vertical view that decomposes sub-frame, in order to the structure of fixed part in the key drawing 1; And
Fig. 4 is a stereographic map, shows sensor-based system according to another embodiment of the present invention.
Embodiment
Set forth the present invention with reference to the accompanying drawings in detail.
Fig. 1 shows surface plasma resonance (SPR) sensor assembly according to an embodiment of the invention for amplifying exploded perspective view.Fig. 2 is the upward view that the bottom surface of fixed part among Fig. 1 is shown.Fig. 3 illustrates the vertical view that decomposes the sub-frame that comes out, in order to the structure of fixed part among explaination Fig. 1.
Referring to Fig. 1-Fig. 3, the spr sensor module of present embodiment of the present invention has sensor chip 100 and fixed part 200.
The real part of dielectric function is formed the thickness of tens nanometer (nm) for the metal of negative (-), thereby form metallic film 120.For example, can use gold (Au), silver (Ag), copper (Cu), aluminium (Al).In above-mentioned metal, usually use to have the silver (Ag) of sharp-pointed SPR resonance peak and gold (Au) with better surface stability.
Through forming metallic film 120 on the first surface 115 that deposits metal in prism 110.
Prism 110 can comprise the transparent material like glass or plastics and so on, for example silica (SiO
2), crown glass (BK7), with from light source (not shown) transmission light.
The first surface 115 of prism 110 forms flat shape, makes on first surface 115, to form metallic film.Second surface 114 forms the plane of refraction shape, and feasible light from the outside is reflected or scattering on second surface 114.
Light from external light source passes through prism 110, incorporates injecting metallic film 120 into, thereby excites the surface of metallic film 120.Then, the light of reflection passes through prism 110 once more on metallic film 120, and leaves to the outside.The cross sectional shape of prism 110 can be trapezoidal, semi-cylindrical, triangular prismatic type or diffraction grating shape, but is not limited to these.In Fig. 1, second surface is divided into first surface 111, second curved surface 113 and bottom surface 112 to explain the marriage relation between sensor chip 100 and the fixed part 200.
According to the shape of the plane of refraction of prism, the incident angle of incident light and refractive index can suitably change.In test, sample is placed on the metallic film 120, and measures the variation of effective refractive index or the variation of net thickness.The incident angle that therefore, can reach incident light per sample is the shape of selective refraction face rightly.
As stated, owing to used the sensor chip 100 that forms through depositing metal films on the first surface of prism, just needn't use in test additional coupling oil that prism is attached at metallic film.Therefore, can solve because of the caused problem of the uneven surface that uses additional coupling oil to cause like noise and so on.
Fixed part 200 comprises main frame 210, sub-frame 220 and elastic component 230.
Two sidewalls of the bottom surface 212 through spatial accommodation 217 are formed with first and second openings 214 and 216 respectively.Therefore, when sensor chip 100 was fixed in the fixed part 200, the first surface 111 of second surface 114 exposed through second opening 216, and second curved surface 113 of second surface 114 exposes through first opening 214.When the sensor-based system (referring to Fig. 4) that fixed part 200 is installed in the hereinafter description is middle, goes into to inject prism 110 from the light of sensor-based system light source through first opening 214 of spatial accommodation 217, and arrive metallic film 120.Also have, the light of reflection goes into to inject the light receiver (not shown) of sensor-based system through second opening 216 on metallic film 120.Can set the position of first and second openings 214 and 216 according to the incident direction of the shape of prism 110 and light rightly.Also have, can set the bottom shape of spatial accommodation 217 rightly according to the shape of the second surface 114 of prism 110.
Fixed part 200 has elastic component 230.For example, elastic component 230 can be a spring.Sub-frame 220 can parallel ground (this means along the direction of compression elastic piece 230) with the sidewall of main frame 210 basically and move preset distance.Sensor chip 100 is fixed by the elastic recovering force of elastic component 230.On sub-frame 220, be formed with jut 222, operator's this jut 222 capable of using is moving sets framework 220 easily.
For example, elastic component 230 is compressed when the direction that increases spatial accommodation 217 moves at sub-frame 220, and stretches when the direction that reduces spatial accommodation 217 moves at sub-frame 220.Therefore, when sub-frame 220 when the direction that increases spatial accommodations 217 moves and sensor chip 100 is installed, sensor chip 100 is fixed in the spatial accommodation 217 by the elastic recovering force of elastic component 230.In addition, when shirking sensor chip 100, sub-frame 220 moves along the direction that increases spatial accommodation 217, and sensor chip 100 is shirked, and sub-frame 220 is back to initial position.
Longer relatively side is formed with guide part 218 in 212 upper edges, bottom surface of main frame 210.The test department of sensor-based system have with fixed part 200 corresponding shape and with guide part 218 corresponding shape, thereby fixed part 200 can easily make up with sensor-based system.
On two sidewalls of main frame 210, be formed with groove 219.On two sidewalls of the test department of sensor-based system, be formed with the jut corresponding with groove 219, make fixed part 200 during with the sensor-based system combination fixed part 200 be fixed in the test department.
Fig. 4 illustrates the stereographic map of sensor-based system according to another embodiment of the present invention.Sensor assembly among Fig. 1 also is shown among Fig. 4.
According to this embodiment, sensor-based system 300 comprises sensor assembly, illumination portion 310, light receiver 320 and test department 330.
Use same Reference numeral represent with Fig. 1-Fig. 3 in the same or analogous parts described among the last embodiment, and omit repeat specification to above-mentioned parts.
According to present embodiment, sensor-based system 300 can use laser as incident light source.For example, laser diode (LD) or gas laser can be used as from the incident light of illumination portion 310 irradiations.Can have site shape or linear from the laser of illumination portion 310 irradiations, but be not limited thereto.In addition, the laser of wavelength between about 400nm and about 900nm is usually used in being optimized to the SPR that generates from metallic film.When Wavelength of Laser during, can not generate SPR rightly less than about 400nm.When Wavelength of Laser during, be difficult to analytic sample thereby in light receiver 320, be difficult to obtain image greater than about 900nm.
Also have; Because the surface plasma that generates from metallic film 120 is excited with the substantially parallel component of the plane of incidence as just whole incident light components; For example; (transverse magetic, TM) polarized light component can use the polarizer (not shown) will be from the laser polarization of illumination portion 310 irradiation to the TM polarized light to horizontal magnetic.
In the present embodiment, light receiver 320 keep watch on said image than dark-part, wherein in the image on metallic film 120 with the essentially identical angle intensity of light reflected of incident angle be minimum.Therefore, can measure the SPR angle in real time, be able to sample is analyzed.
According to present embodiment; For using sensor-based system 300 analytic samples; Sensor chip 100 is fixed in the fixed part 200 and with fixed part 200 is fixed in the test department 330; Then from the light of light source 310 through being arranged at the prism in the fixed part 200 that is contained on the test department 330, and go into to inject metal film 120, and therefore light receiver 320 is experienced the light of reflection on metallic film 120 with predetermined angle.When the light wave vector of the surface plasma that generates with the surperficial substantially parallel light wave vector component of sensor chip 100 and the interface between sensor chip 100 and sample was consistent, the energy major part of incident light was absorbed into surface plasma.At this moment, incident angle is known as resonance angle (θ).Owing to per sample thickness of SPR situation, refractive index, concentration etc. change, the variation that can measure the SPR situations through light receiver 320.
Along with the fixed part 200 with sensor installation sheet 100 is connected to or breaks away from the test department 300 of said sensor-based system 300, sensor chip 100 is easy to connect or shirk.Therefore, sensor-based system 300 uses and is more prone to, and the operator tests convenient.
According to present embodiment, depositing metal films is forming sensor chip on prism, and the sensor sheet is used for substituting the coupling wet goods that existing apparatus uses, thus operator's control device more easily, and the noise that can avoid uneven surface to cause.In addition, the sensor assembly with fixed part makes the operator control sensor chip more easily, and can more easily sensor chip be connected to sensing device and unload from sensing device.
The content of front is the restriction that should not be considered to elaboration of the present invention invention.Although only described a small amount of embodiment of the present invention, the easy understanding of those skilled in the art can be done many modifications to these embodiment under essence not breaks away from the situation of new teaching of the present invention and advantage.Therefore, all such modifications should be included in the scope of the invention that claims define.In claims, the clause that device adds function is used to contain the structure that plays the function of putting down in writing as herein described, is not only structural equivalents and also comprises equivalent structure.Therefore, the content that should understand the front is to elaboration of the present invention rather than to the restriction of disclosed embodiment, and should be included in the scope of claims modification and other embodiment of disclosed embodiment.The present invention is defined by claim and the equivalent that is included in claim wherein.
Claims (10)
1. a surface plasma resonance (SPR) sensor assembly comprises:
Sensor chip has:
Prism with first surface and second surface; With
Be formed on the metallic film on the first surface of said prism; And
Fixed part, it holds said sensor chip.
2. spr sensor module as claimed in claim 1, wherein said fixed part comprises:
Main frame comprises bottom surface and the sidewall that extends from said bottom surface, holds the spatial accommodation of said sensor chip with formation;
Sub-frame is set in abutting connection with said spatial accommodation, and is fixed in the said main frame;
Elastic component is arranged between said main frame and the sub-frame, and changes the size of said spatial accommodation.
3. spr sensor module as claimed in claim 2 is wherein passed the said sidewall that faces one another and is formed with first opening and second opening respectively.
4. spr sensor module as claimed in claim 3; The second surface of wherein said prism is a plane of refraction; Reflect at this plane of refraction from the light of external irradiation; Said sensor chip is received to making said plane of refraction towards the lower surface of said spatial accommodation, and said refractive surface is through the exposure of the said first and second opening portion ground.
5. spr sensor module as claimed in claim 2 is formed with jut on the said bottom surface of wherein said main frame, and all is formed with groove in two side-walls of said main frame.
6. sensor-based system comprises:
The spr sensor module comprises sensor chip and the fixed part that holds said sensor chip, and said sensor chip comprises prism and metallic film, and said prism has first surface and second surface, and said metallic film is formed on the first surface of said prism; With
Into said metallic film is shone with light through said prism in illumination portion;
Acceptance division is experienced on the said metallic film reflection and is excited the light through prism; With
Test department is equipped with said spr sensor module on it.
7. sensor-based system as claimed in claim 6, wherein said fixed part comprises:
Main frame comprises bottom surface and the sidewall that extends from said bottom surface, holds the spatial accommodation of said sensor chip with formation;
Sub-frame is set in abutting connection with said spatial accommodation, and is fixed in the said main frame; With
Elastic component is arranged between said main frame and the said sub-frame, and changes the size of said spatial accommodation.
8. sensor-based system as claimed in claim 6 wherein passes the said sidewall that faces one another and is formed with first opening and second opening respectively.
9. sensor-based system as claimed in claim 8; The second surface of wherein said prism is a plane of refraction; Reflect at this plane of refraction from the light of external irradiation; Said sensor chip is received to making said plane of refraction towards the lower surface of said spatial accommodation, and said plane of refraction is through the exposure of the said first opening portion ground, and
Go into to inject said prism from the light of said illumination portion irradiation through said first opening, and the light that on said metallic film, reflects arrives said light receiver through said second opening.
10. sensor-based system as claimed in claim 7; Wherein on the bottom surface of said main frame, be formed with first jut; Place, two side at said main frame all is formed with first groove; Be formed with second groove with corresponding at said test department, and be formed with second jut with corresponding, make that said main frame and said test department are fastened to each other with said first groove at said test department with said first jut.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2010-0058672 | 2010-06-21 | ||
| KR20100058672A KR20110138657A (en) | 2010-06-21 | 2010-06-21 | Surface plasmon resonance sensor module and sensing system having the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102331410A true CN102331410A (en) | 2012-01-25 |
Family
ID=45483261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011101849322A Pending CN102331410A (en) | 2010-06-21 | 2011-06-21 | Surface plasma resonance sensor module and sensor-based system with this module |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2012002817A (en) |
| KR (1) | KR20110138657A (en) |
| CN (1) | CN102331410A (en) |
| TW (1) | TW201207377A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110100171A (en) * | 2017-01-16 | 2019-08-06 | 矢崎总业株式会社 | Highly selective corrosion sensor system |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI552343B (en) * | 2014-11-05 | 2016-10-01 | 國立成功大學 | Electromechanical device with light gating and operational methods thereof |
| KR102544841B1 (en) * | 2021-01-28 | 2023-06-20 | (주)퀀텀테크 | Prism unit and liquid chemical concentration measurement device using this |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000065735A (en) * | 1998-08-24 | 2000-03-03 | Nippon Laser Denshi Kk | Surface plasmon resonance angle detection device and sample supply method |
| JP2006200931A (en) * | 2005-01-18 | 2006-08-03 | Fuji Photo Film Co Ltd | Sensor unit |
| CN101156228A (en) * | 2005-10-21 | 2008-04-02 | 韩国生命工学研究院 | A method for fabricating nanogap and nanogap sensor |
| JP2008209278A (en) * | 2007-02-27 | 2008-09-11 | Aisin Seiki Co Ltd | Sensor chip |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11183372A (en) * | 1997-12-19 | 1999-07-09 | Toto Ltd | Spr sensor device, analysis system and detecting method using it |
| JP2005017225A (en) * | 2003-06-27 | 2005-01-20 | Aisin Seiki Co Ltd | Sensor chip, sensor chip storing unit, and surface plasmon resonance measuring apparatus |
-
2010
- 2010-06-21 KR KR20100058672A patent/KR20110138657A/en not_active Application Discontinuation
-
2011
- 2011-06-20 TW TW100121513A patent/TW201207377A/en unknown
- 2011-06-21 JP JP2011137290A patent/JP2012002817A/en active Pending
- 2011-06-21 CN CN2011101849322A patent/CN102331410A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000065735A (en) * | 1998-08-24 | 2000-03-03 | Nippon Laser Denshi Kk | Surface plasmon resonance angle detection device and sample supply method |
| JP2006200931A (en) * | 2005-01-18 | 2006-08-03 | Fuji Photo Film Co Ltd | Sensor unit |
| CN101156228A (en) * | 2005-10-21 | 2008-04-02 | 韩国生命工学研究院 | A method for fabricating nanogap and nanogap sensor |
| JP2008209278A (en) * | 2007-02-27 | 2008-09-11 | Aisin Seiki Co Ltd | Sensor chip |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110100171A (en) * | 2017-01-16 | 2019-08-06 | 矢崎总业株式会社 | Highly selective corrosion sensor system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012002817A (en) | 2012-01-05 |
| KR20110138657A (en) | 2011-12-28 |
| TW201207377A (en) | 2012-02-16 |
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Application publication date: 20120125 |