TW201207355A - Device for 3-D profile measurement by longitudinal chromatic aberration - Google Patents

Device for 3-D profile measurement by longitudinal chromatic aberration Download PDF

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TW201207355A
TW201207355A TW99126113A TW99126113A TW201207355A TW 201207355 A TW201207355 A TW 201207355A TW 99126113 A TW99126113 A TW 99126113A TW 99126113 A TW99126113 A TW 99126113A TW 201207355 A TW201207355 A TW 201207355A
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Taiwan
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light
baffle
light source
chromatic aberration
color difference
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TW99126113A
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Chinese (zh)
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Chih-Chien Lu
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Hirose Tech Co Ltd
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  • Length Measuring Devices By Optical Means (AREA)

Abstract

A device of 3-D profile measurement is actualized by longitudinal chromatic aberration. This device makes use of the existing optical system. The existing optical system lens group is inserted by a longitudinal chromatic aberration generator. The longitudinal chromatic aberration generator lens magnifies the longitudinal chromatic aberration of the light, so that the different wavelengths of light focus at different focal planes. The light source emits the light to pass through a slit or the hole. This light either passes through measured object and then passes through a chromatic aberration generator; or passes through a chromatic aberration generator and then is reflected from the measured object.

Description

201207355 發明說明 【發明所屬之技術領域】 本發明係關於一種物體表面立體於 關於光源經過—狹缝,並將鏡頭紐法。特別是有 量測到物體物表面立體輪权方法—色差產生元件, 【先前技術】 像綠圖也順應著潮流蓬勃的發展其來了 立體影傻,右芏户士二〜@ m 董建個物體之3D 學..等方面仕夕媒體、模具業、醫 與便利,加—增科技的不斷突破與創新,虛擬“= 包含為一習知量測物體表面立體輪廓之方法。有-,’十碩之奴針F,具有X、γ、ζ三維移動能力 + 在_物G表面移動,該探針之χ、 ^針碩 錄,即可重建該待測物之表面立體輪靡。㈣傳回一笔腦紀 表面式#速度慢’而且有可能會造成待測物 動時的是若制物杨非_,可能在探針移 動_就軟化,造成量測不準確。 丁秒 立體ίΪίΪ置本發贿供—種轉姑差麟物體物表面 【發明内容】 之if發,2於—種以縱向色差量得物體物表面立體輪廓 ίΐίΐί方鏡頭組中置入—色差產生元件,此色差產生 缝Ϊ 鏡職像時的縱向色差,並使絲經過—狹 S] 不同波長之光線聚焦於不同的焦平面上,備測待測物 3 201207355 只需偵測待測物位於那一波長之焦平面上,便可得知待測物 輪廓。 本發明之一裝置包括一光源、一分光鏡、一包含一狹縫 之第一擔板、一色差產生元件、一物鏡、一包含一狹缝之第 二擋板及一光譜儀。該光源發出的光線透過該第一擋板上之 狹缝射入到該分光鏡上。入到該分光鏡上之光線,在該分光 鏡表面反射,穿過該色差產生元件,而後穿過該物鏡,達到 該待測物體表面。光線於該待測物體表面反射後返回該物201207355 DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a surface of an object which is three-dimensionally related to a light source passing through a slit, and a lens method. In particular, there is a method for measuring the surface stereoscopic rotation of objects on the surface of the object - the color difference generating component, [Prior Art] Like the green map, it also conforms to the development of the trend, and it comes to the stereoscopic silly, right-handed 二二二@@董建3D of objects.. etc. The media, the mold industry, the medical and convenience, the continuous breakthrough and innovation of the technology, the virtual "= contains a method for measuring the surface contour of the object. -, -, ' The ten-sentence needle F has X, γ, and ζ three-dimensional movement ability + moves on the surface of the object G, and the probe is χ ^, and the needle is recorded, and the surface stereo rim of the object to be tested can be reconstructed. Back to the brain surface type #speed is slow and there is a possibility that the object to be tested is moving if the product is not _, which may soften when the probe moves _, resulting in inaccurate measurement. The bribe of the present invention - the surface of the object of the singularity of the object of the invention [invention] The if hair, 2 in the longitudinal chromatic aberration of the surface of the object surface stereo 轮廓 ΐ 方 方 方 方 方 方 — — — — — — — 色 色 色 色 色 色 色 色 色The longitudinal chromatic aberration of the mirror image and the thread passing through Narrow S] Light of different wavelengths is focused on different focal planes, and the object to be tested is prepared. 201207355 It is only necessary to detect that the object to be tested is located at the focal plane of that wavelength, and the contour of the object to be tested can be known. A device includes a light source, a beam splitter, a first plate including a slit, a color difference generating element, an objective lens, a second baffle including a slit, and a spectrometer. a slit on the first baffle is incident on the beam splitter. The light entering the spectroscope is reflected on the surface of the spectroscope, passes through the color difference generating element, and then passes through the objective lens to reach the object to be tested. Surface. The light returns to the surface of the object to be tested and returns to the object.

鏡’然後穿過該色差產生元件與該分光鏡,到達該第二擋板, 進入該光譜儀進行光譜分析’而後計算出待測物體物表面立 體輪廓。 本發明之另-裝置包括—光源、—包含—狹縫之第一擔 $反"♦光鏡、一色差產生元件、一物鏡、一包含一狹縫之 第一擋板及一光譜儀。該光源發出的光線透過該擋板上之狹 縫射入到該聚光鏡上’並且進一步聚焦於該制物體上。該 聚焦於該侧物紅之猶,紐該侧物體,到賴物鏡。 到達ί物鏡之絲’穿驗物鏡,然後穿麟色差產生元件 與及第一擋板’接著穿過第二擋板之狹縫進人該光譜儀進行 光譜分析。 本^所採用的裝置,利用現有的光學儀器,加入色差 產生凡件件,即可量測物表面立體輪靡。 【實施方式】 理。在圖中1A二牛1β10,ί發明之色差產生元件工作原 為市面上所齡之知無色差絲物鏡,可能 11從左邊向右射入ϋ鏡版,一含有多種波長之平行光 置。 來…於鏡片或鏡片組10之右方Α點位 201207355The mirror' then passes through the color difference generating element and the beam splitter, reaches the second baffle, enters the spectrometer for spectral analysis' and then calculates the surface profile of the object to be tested. The other device of the present invention comprises a light source, a first light source comprising a slit, a light mirror, a color difference generating element, an objective lens, a first baffle including a slit, and a spectrometer. Light from the source is incident on the concentrating lens through the slits in the baffle and is further focused on the object. The focus is on the side of the red, the side of the object, to the objective lens. The wire reaching the ί objective lens is passed through the objective lens, and then the lining difference generating element and the first baffle' are then passed through the slit of the second baffle to enter the spectrometer for spectral analysis. The device used in this method can measure the surface rim of the object by using the existing optical instrument and adding the color difference to produce the piece. [Embodiment] In the figure, 1A two cows 1β10, ί invented the color difference generating element to work as a known colorless optical objective lens on the market, and it is possible to enter the ϋ mirror version from the left to the right, a parallel light containing multiple wavelengths. Come... on the right side of the lens or lens group 10 201207355

請參考圖IB ’元件14代表色差產生元件LCAG (Longitudinal Chromatic Aberration Generator ),無色 差光源13從左邊向右射入(不一定為平行光入射),經過色 差產生元件14後,如圖1B之15所示,將會因應光線波長 的不同而調整其出射角度。 調整後的光線,依波長的不同進入如同圖1A元件1〇 之無色差成像物鏡16,經過無色差鏡片丨6後其聚焦的焦點 位置便會因波長的不同而會在不同的位置B、c及D,此時 便會產生縱向色差((Longitudinal Chromatic Aberration) ° 請參考圖2A及2B,依據本發明之另一色差產生元件工 作原理。在圖2A中,元件20為一般習知無色差成像物鏡, 可能為市面上所販售之鏡片或鏡片組,一含有多種波長之平 行光21從左邊向右射入,聚焦於鏡片或鏡片組1〇之右方a 點位置。 請參考圖2B,元件26代表色差產生元件LCAg (Longitudinal Chromatic Aberration Generator ),將色 差產生元件26置於無色差成像鏡片組24之右,無色差成傻 鏡片24如同圖2A之無色差鏡片20。 無色差光源23從左邊向右射入(不一定為平:行光入 射)、,’經過無色差成像物鏡24後開始聚焦,而這些聚焦的無 色差光線進入色差產生元件26。色差產生元件26使進入該 元件之光線’因光線波長的不同而調整其出射角度經過色^ 產生元件LCAG 26後的光線成像聚焦時便會產生縱向色差。 ^圖1及圖2簡單地說明本發明的基本原理:在既有的光 學系統鏡頭組中,插入一色差產生元件LCAG於物鏡之前戋 之後,此色差產生元件放大鏡頭成像時的縱向色差。 請參考圖3A,依據上述之本發明基本原理,一量測物 體物表面立體輪廓之示意圖。量測架構如圖3A所示,二勺 含夕個波長之光源3〇發出光源’經過槽板31之孔洞再至八 光鏡32分光反射後’穿過色差產生元件lcag 33,產生& 201207355 向色差,再穿過物鏡34。亦可以將色差產生元件LCAG 33 及物鏡34上下位置互換,使光線先經過物鏡34再經過色差 產生it件LCAG 33,此後產生縱向色差。 、,光線再聚焦到待測物35上,不過此時光線具有縱向色 差,因t只有一波長可完全聚焦到物體表面,由於其餘波長 因無法完全聚焦關係,因此經物體主要地只反射聚焦於物體 表面波長之光線。 物體表面反射後的光線再經過物鏡34、色差產生元件 LCAG 33、分光鏡32到達檔板36之孔洞,成像的光斑點大 小會以聚朗物體表Φ之波長馳點最小,目此光線再經過 ,板36之孔洞,聚焦到物體表面之波長通過狹缝36的通過 罝會相較於其他波長多,因此進入光譜儀37後,所量測到 的光譜,會以聚焦到物體表面之波長的光強度最大,其餘波 長的光強度相對於該波長較低。 請參考圖3B,如同圖3A所示之原理,一量測物體物表 面立體輪廓之第一實施例。一包含多個波長之光源,經 過檔板311之孔洞再至分光鏡321分光後,經過色差產生 件LCAG 331,再經過物鏡341,產生縱向色差。 、,光線再聚焦到待測物351上’不過此時光線具有縱向色 差,因此只有一波長可完全聚焦到物體表面,由於其餘波長 因無法完全聚焦關係,因此經物體主要地只反射聚焦於物體 表,波長之光線。物體表面反射後的光線再經過物鏡341、 色差產生元件LCAG 331、分光鏡321、成像透鏡381到檔板 361之孔洞。成像的光斑點大小會以聚焦到物體表面之波長 的斑點最小,因此光線再經過狹縫361後,聚焦到物體表面 之波長通過狹縫361的通過量會相較於其他波長多,因此進 入光譜儀371後’所量測到的光譜,會以該波長的光強度最 大,其餘波長的光強度相對於聚焦到物體表面之波長較低。 經過光谱儀371量測到的資料再送到—3D計瞀電腦391, 即可分析光譜強度,計算受測物表面立體輪摩。 請參考圖3C,同圖3A所示之原理,一量測物體物表面 201207355 ,體,廓之第二實施例。圖3C與圖3β不同之處在於 ^件=物鏡上下位置互換,使光經過物鏡再經 產生兀件,此後產生縱向色差。 ι巴左 請參考圖3C,一包含多個波長之光源3〇2, 312 j洞再至分光鏡322分光後,經過物鏡⑽ ^ 色差產生元件LCAG 332,產生縱向色差。 ''Referring to FIG. 1B, the component 14 represents a longitudinal chroma generating element LCAG (Longitudinal Chromatic Aberration Generator), and the achromatic light source 13 is incident from the left to the right (not necessarily parallel light incident), and after passing through the color difference generating element 14, as shown in FIG. 1B. As shown, the exit angle will be adjusted depending on the wavelength of the light. The adjusted light enters the chromatic aberration-free imaging objective 16 like the component of FIG. 1A according to the wavelength. After passing through the achromatic lens 丨6, the focus position of the focus will be at different positions B and c depending on the wavelength. And D, at this time, longitudinal chromatic aberration ((Longitudinal Chromatic Aberration) °. Please refer to FIGS. 2A and 2B, another color difference generating element working principle according to the present invention. In FIG. 2A, the element 20 is a general conventional chromatic aberration imaging. The objective lens, which may be a commercially available lens or lens group, has a parallel light 21 of various wavelengths incident from the left to the right, focusing on the right side of the lens or lens group 1 point. Please refer to FIG. 2B. The element 26 represents a color difference generating element LCAg (Longitudinal Chromatic Aberration Generator), and the color difference generating element 26 is placed to the right of the achromatic imaging lens group 24, and the colorless aberration lens 24 is the same as the achromatic lens 20 of Fig. 2A. The left side is injected rightward (not necessarily flat: the incident light is incident), and 'the focus is obtained after the objective lens 24 is imageless, and the focused achromatic light enters the chromatic aberration. The color difference generating element 26 causes the light entering the element to adjust the exit angle of the light due to the difference in the wavelength of the light to form a longitudinal chromatic aberration when the light is focused by the color generating element LCAG 26. ^ Figure 1 and Figure 2 are simple The basic principle of the present invention is explained: in the existing optical system lens group, after the color difference generating element LCAG is inserted before the objective lens, the color difference generating element amplifies the longitudinal chromatic aberration when the lens is imaged. Referring to FIG. 3A, according to the above The basic principle of the invention is a schematic diagram for measuring the three-dimensional contour of the surface of the object. The measurement architecture is shown in Fig. 3A, and two light sources of the wavelength of the light source 3 emit a light source 'passing through the hole of the slot plate 31 to the eight-light mirror 32. After the spectroscopic reflection, 'passing through the chromatic aberration generating element lcag 33, generating & 201207355 chromatic aberration, and then passing through the objective lens 34. The upper and lower positions of the chromatic aberration generating element LCAG 33 and the objective lens 34 can also be interchanged, so that the light passes through the objective lens 34 and then undergoes chromatic aberration. The piece LCAG 33, after which the longitudinal chromatic aberration is generated, and the light is refocused on the object to be tested 35, but the light has a longitudinal chromatic aberration, since there is only one wave of t It can be completely focused on the surface of the object. Because the remaining wavelengths cannot be completely focused, the object mainly reflects only the light that is focused on the surface wavelength of the object. The reflected light from the surface of the object passes through the objective lens 34, the color difference generating element LCAG 33, and the beam splitter. 32 reaches the hole of the baffle 36, and the size of the imaged spot will be the smallest at the wavelength of the Φ object Φ. Therefore, the light passes through the hole of the plate 36, and the wavelength of the surface focused on the object passes through the slit 36. It will be more than other wavelengths, so after entering the spectrometer 37, the measured spectrum will have the highest intensity of light focusing on the wavelength of the object surface, and the light intensity of the remaining wavelengths is lower relative to the wavelength. Referring to Fig. 3B, as in the principle shown in Fig. 3A, a first embodiment of measuring the solid contour of the object surface is measured. A light source comprising a plurality of wavelengths is split by the aperture of the baffle 311 and then split into the beam splitter 321 and then passed through the objective lens 341 through the color difference generating element LCAG 331, to produce longitudinal chromatic aberration. Then, the light is refocused on the object to be tested 351. However, the light has a longitudinal chromatic aberration, so that only one wavelength can be completely focused on the surface of the object. Since the remaining wavelengths cannot be completely focused, the object mainly reflects only the object. Table, the wavelength of light. The light reflected from the surface of the object passes through the apertures of the objective lens 341, the color difference generating element LCAG 331, the beam splitter 321, and the imaging lens 381 to the shutter 361. The size of the imaged spot will be the smallest of the spots focused on the surface of the object. Therefore, after the light passes through the slit 361, the wavelength of the wavelength focused on the surface of the object passes through the slit 361 more than other wavelengths, so the spectrometer enters the spectrometer. After 371, the measured spectrum will have the highest light intensity at this wavelength, and the other wavelengths will have a lower light intensity relative to the wavelength focused on the surface of the object. The data measured by the spectrometer 371 is sent to the -3D computer 391 to analyze the spectral intensity and calculate the stereoscopic wheel surface of the object to be tested. Referring to FIG. 3C, with the principle shown in FIG. 3A, a second embodiment of the object surface 201207355, body and profile is measured. Fig. 3C differs from Fig. 3β in that the member = the upper and lower positions of the objective lens are interchanged, so that the light passes through the objective lens to generate a member, and thereafter a longitudinal chromatic aberration is generated. Referring to FIG. 3C, a light source 3〇2, 312 j hole including a plurality of wavelengths is split to the beam splitter 322, and then passed through the objective lens (10) and the color difference generating element LCAG 332 to generate longitudinal chromatic aberration. ''

、,光線再聚焦到待測物352上,不過此時光線具有縱向色 差因此/、有波長可完全聚焦到物體表面,由於其餘波長 因無法完全聚焦關係’因此經物體主要地只反射聚焦於物體 表面波長之光線。物體表面反射後的光線再經過色^產 件LCAG 332、物鏡342、分光鏡322、成像透鏡382到達檔 板362之孔洞。成像的光斑點大小會以聚焦到物體表面之波 長的斑點最小,因此光線再經過檔板362之孔洞後,聚焦到 物體表面之波長通過檔板362之孔洞的通過量會相較於其 他波長多,因此進入光譜儀372後,所量測到的^譜,會^ 該波長的光強度最大’其餘波長的光強度相對於聚焦到物體 表面之波長較低。經過光譜儀372量測到的資料g送到一 3D計算電腦392計算受測物表面立體輪廓。 請參考圖4,依據本發明基本原理,一量測物體物表面 立體輪廊之不思圖。量測架構如圖4所示,一包含多個波長 之光源40,經過檔板41之狹缝,再至分光鏡42分光後Γ 經過色差產生元件LCAG 43,再經過物鏡44,產生縱向色差。 亦可以將色差產生元件LCAG 43及物鏡44上下位置互換, 使光線先經過物鏡44再經過色差產生元件LCAG 43,此後 產生縱向色差。 光線再聚焦到待測物45上,在此實施例中,將接近光 源40及光譜儀47處檔板41及46之孔洞設置為狹長型的狹 缝,光經色差產生元件LCAG 43與物鏡44後會在待測物45 上投射一條長條形的光條。 此長條形的光條即為我們的觀察區,此觀察區的光線經 物體45反射後再經由物鏡44、LCAG 43與分光鏡42成像於 201207355 檔板46之狹缝上,此時的成像亦為長條形,而像面上的狹 缝,改成為狹長型的,在光譜儀47上分析觀察此長條光線 上母一點的頻譜,紀錄下每一點光譜上最強光強度的波長位 置’再經比對料後,便可以得知此光條上每一點的高度 值^再將每點貧訊連接起來,進而達成線型的測量,再經由 線掃描方式便可觀測面型的區域,進繪出二 請參考圖5,-量測物體物表面立體胃輪^^^圖。若 ^源50改成穿透光源’一包含多個波長之光源5〇經過槽 Ϊί1★之透光區域再至聚光鏡52後,聚光於細物55上並 測物55。光穿過物體的時候,受到物質的影響而 使光譜有所變化。光線穿透待測物55後再至物鏡54 差產生元件LCAG 53後便有縱向色差。絲時會因縱 =色差而在像空f种延著ζ軸(光前進方向〕,隨著波長而分 2 ’Ht空間中也會有相對於像點延著Ζ齡佈的虛擬物 :綱理崎細物的高度做欺。目此光線再經Then, the light is refocused on the object to be tested 352, but at this time, the light has a longitudinal chromatic aberration, so that the wavelength can be completely focused on the surface of the object, since the remaining wavelengths cannot be completely focused because of the object, so the object mainly reflects only the object. Light at the surface wavelength. The light reflected from the surface of the object passes through the color LCLC 332, the objective lens 342, the beam splitter 322, and the imaging lens 382 to reach the hole of the shutter 362. The size of the imaged spot will be the smallest of the spots focused on the surface of the object. Therefore, after the light passes through the hole of the baffle 362, the wavelength of the wavelength focused on the surface of the object passes through the hole of the baffle 362. Therefore, after entering the spectrometer 372, the measured spectrum will have the highest light intensity at that wavelength. The light intensity of the remaining wavelengths is lower relative to the wavelength focused on the surface of the object. The data g measured by the spectrometer 372 is sent to a 3D computing computer 392 to calculate the solid contour of the surface of the object to be tested. Referring to FIG. 4, in accordance with the basic principle of the present invention, a measurement of the surface of the object on the three-dimensional wheel corridor is not considered. As shown in FIG. 4, a measuring light source 40 comprising a plurality of wavelengths passes through the slit of the baffle 41, and after being split by the dichroic mirror 42, passes through the color difference generating element LCAG 43, and then passes through the objective lens 44 to generate longitudinal chromatic aberration. It is also possible to interchange the upper and lower positions of the color difference generating element LCAG 43 and the objective lens 44 so that the light passes through the objective lens 44 and passes through the color difference generating element LCAG 43, and then longitudinal chromatic aberration is generated. The light is refocused onto the object to be tested 45. In this embodiment, the holes close to the light source 40 and the baffles 41 and 46 at the spectrometer 47 are set as slits, and the light passes through the color difference generating element LCAG 43 and the objective lens 44. A long strip of light will be projected on the object to be tested 45. The strip of light is our observation area. The light of this observation area is reflected by the object 45 and then imaged on the slit of the 201207355 baffle 46 via the objective lens 44, the LCAG 43 and the beam splitter 42. It is also a long strip shape, and the slit on the image surface is changed into a narrow shape. The spectrum of the mother point on the long light is analyzed and analyzed on the spectrometer 47, and the wavelength position of the strongest light intensity at each point of the spectrum is recorded. After comparing the materials, you can know the height value of each point on the strip, and then connect each point of the poor, to achieve the line type measurement, and then observe the area of the surface by line scanning. Draw two, please refer to Figure 5, - measure the surface of the object on the surface of the three-dimensional stomach wheel ^ ^ ^ map. If the source 50 is changed to a penetrating light source, a light source 5 having a plurality of wavelengths passes through the light-transmitting region of the groove 再1, and then to the condensing mirror 52, it is condensed on the fine object 55 and the object 55 is measured. When light passes through an object, it is affected by matter and the spectrum changes. After the light passes through the object to be tested 55 and then the difference between the objective lens 54 and the element LCAG 53, there is a longitudinal chromatic aberration. In the case of the wire, the yaw axis (light advancing direction) is extended in the image space by the vertical color difference, and the virtual object corresponding to the image point is extended in the 2 'Ht space with the wavelength: The height of Rikosaki’s fine objects is bullying.

,域的通過#會她於其他波好,目 H 量酬的光譜,會以該二撇長的光強度m7 該波長便可得到待測物55之上下兩個面的高度。 的’若將槽板51及56之透光區域改成長條型,便The passage of the domain # will be better for other waves, and the spectrum of the weight of the target will be the height of the lower surface of the object to be tested 55 at the wavelength of the light intensity m7. If the light-transmissive areas of the slot plates 51 and 56 are changed to a strip shape,

It 5 〇 可以產生同樣效果件聽53及物鏡54位置互換, 如圖6,為圖邪之色差產生元件LCAG331之實施 ii盆ίΐ件在此實施例中由3片鏡片所組成,但亦可由單片 或其他多片鏡片所組成。 J J宙早片 明,然其並非用以限定本發 ^圍^精神與關崎作之修改,均應包含在下述申請專利 [S3 8 201207355 【圖式簡單說明】 藉由以下詳細之描述結合所附圖 及此項發明之諸多優點,其中:飞將了t易明瞭上述内容 圖1係為習知量測物體表面立體輪廓之方法。 圖Μ係為依據本發明之色差產生元件工作原理。 理 :理。It 5 〇 can produce the same effect piece 53 and the objective lens 54 position interchange, as shown in Fig. 6, is the implementation of the chromatic aberration generating element LCAG331. In this embodiment, it consists of 3 lenses, but can also be A piece of film or other multiple lenses. JJ Zhou Zao Ming Ming, however, is not intended to limit the modification of the spirit of the hair and the spirit of Guan Qi, and should be included in the following patent application [S3 8 201207355 [Simple description of the diagram] by the following detailed description The drawings and the many advantages of the invention, wherein: the fly is easy to understand the above content, Figure 1 is a conventional method of measuring the surface contour of an object. The figure is the working principle of the color difference generating element according to the present invention. Reason: Reason.

圖係為依據本發明之色差產生元件工作原 圖2A係為依據本發明之色差蓋生元件工作原 圖邪係為依據本發明之色差產生元件工作原理。 圖3A係為依據本發明之量測物體物表面立體輪廊之示意圖。 f係為依據本發明之量測物體物表面立體輪敦第一實施 二。係為依據本㈣之量_體物表面立體輪廓之第二實施 圖4係為依據本發明之量測物體物表面立體輪廓之示意圖。 圖5係為依據本發明 ^ 之里獅體物表面立體輪廓之示意圖。 圖6係為依據本發明之色差產生元件具體實施例。 201207355 【主要元件符號說明】 F探針 G被測物 10無色差鏡片組 11平行光 13平行光 13色差產生元件 15光線 16無色差鏡片組 20無色差鏡片組 21平行光 23光線 24無色差鏡片組 26色差產生元件 30光源 31檔板 32分光鏡 33色差產生元件 34物鏡 35待測物 36檔板 37光譜儀 301光源 311檔板 321光鏡 331色差產生元件 341物鏡 351待測物 361檔板 371光譜儀 [S] 10 201207355 381成像透鏡 391電腦 302光源 312檔板 322分光鏡 342物鏡 332色差產生元件 352待測物 362檔板 382成像透鏡 372光譜儀 392電腦 40光源 41檔板 42分光鏡 43色差產生元件 44物鏡 45待測物 46檔板 47光譜儀 50光源 51檔板 52聚光鏡 53色差產生元件 54物鏡 55待測物 56標板 57光譜儀Fig. 2A shows the working principle of the chromatic aberration generating element according to the present invention. 3A is a schematic view of a three-dimensional wheeled surface of an object according to the present invention. f is the first embodiment of the surface stereoscopic wheel of the object according to the invention. The second embodiment is based on the amount of the present invention (4). FIG. 4 is a schematic view showing the three-dimensional contour of the surface of the object according to the present invention. Fig. 5 is a schematic view showing the three-dimensional contour of the surface of a lion body according to the present invention. Figure 6 is a specific embodiment of a color difference generating element according to the present invention. 201207355 [Description of main component symbols] F probe G test object 10 no color difference lens group 11 parallel light 13 parallel light 13 color difference generating element 15 light 16 colorless lens group 20 colorless lens group 21 parallel light 23 light 24 color difference lens Group 26 color difference generating element 30 light source 31 baffle 32 beam splitter 33 color difference generating element 34 objective lens 35 object to be measured 36 baffle plate 37 spectrometer 301 light source 311 baffle plate 321 light mirror 331 color difference generating element 341 objective lens 351 object to be tested 361 baffle plate 371 Spectrometer [S] 10 201207355 381 imaging lens 391 computer 302 light source 312 baffle 322 beam splitter 342 objective lens 332 color difference generating element 352 object to be tested 362 baffle plate 382 imaging lens 372 spectrometer 392 computer 40 light source 41 baffle 42 splitter 43 color difference generation Component 44 objective lens 45 object to be tested 46 baffle 47 spectrometer 50 light source 51 baffle 52 concentrator 53 color difference generating element 54 objective lens 55 object to be measured 56 target plate 57 spectrometer

Claims (1)

201207355 七、申請專利範圍: 1· 一種以縱向色差量測一待測物體表面立體輪廓之裝置,該 裝置至少包含下列·· 一光源,其中該光源之波長為一範圍内之連續值; 一分光鏡; 一第擋板,j立於該光源與該分光鏡之間,該擋板包含 一透光區域於該第一擋板中’使得該光源發出的光線透過該 擔板上之透光區域射入到該分光鏡上; 一色差產生元件’使得穿過該色差產生元件之光線,因 光線波長的不同而對其出射角度做調整; 鲁 一物鏡,置於該待測物體與該色差產生元件之間,其中 該光源射入到該分光鏡上之光線,在該分光鏡表面反射,穿 過該色差產生元件’而後穿過該物鏡,達到該待測物體表面; 一光譜儀;及 一第二擋板,位於該分光鏡與該光譜儀之間,該擋板包 含一透光區域於該第二擋板中,其中上述由該物鏡達到該待 測物體表面之光線’於物體表面反射後返回該物鐘,缺尨空 過該色差產生元件與該分光鏡,到達該第二播 域,進入該光譜儀進行光譜分析。 鲁 2. 如申請專利範圍第1項之量測物體表面立體輪扉之裝置, 其_該第一指板及§亥弟一擔板之透光區域為圓形孔洞。 3. 如申請專利範圍第1項之量測物體表面立體輪廣之裝置, 其中該第一擔板及該弟二擔板之透光區域為狹長型狹縫。 4. 一種以縱向色差量測一待測物體表面立體輪摩之装置,兮 裝置至少包含下列: ~ 一光源,其中該光源之波長為一範圍内之連續值. 一分光鏡; 、 12 201207355 第擋板,位於該光源與該分光鏡之間,該擔板包含 一透光區域於該第一擋板中’使得該光源發出的 擋板上之透光區域射入到該分光鏡上; 一物鏡; 上一色差產生元件,置於該待測物體與該物鏡之間,其中 該光源射入到該分光鏡上之光線,在該分光鏡表面反射,穿 過該物鏡,而後穿過該色差產生元件,達到該待測物體表 面、,該色差產生元件使得穿過該色差產生元件之光線,因光 線波長的不同而對其出射角度做調整; 一光譜儀;及 鲁 一第二擋板,位於該分光鏡與該光譜儀之間,該擋板包 含一透光區域於該第二擋板中,其中上述由該色差產生元件 達到該待測物體表面之光線,於物體表面反射後返回該色差 產生兀件,然後穿過該物鏡與該分光鏡,到達該第二檔板之 透光區域,進入該光譜儀進行光譜分析。 5· 如申請專利範圍第4項之量測物體表面立體輪廓之裝置, 其t該第一擋板及該第二擋板之透光區域為圓形孔洞。 6' 如申請專利範圍第4項之量測物體表面立體輪廓之裝置, • 其中該第一擋板及該第二擋板之透光區域為狹長型狹缝。 7. 一種以縱向色差量測一待測物體表面立體輪廓之裝置,該 裝置至少包含下列: 一光源,其中該光源之波長為一範圍内之連續值; 一聚光鏡; 、一第一擋板,位於該光源與該聚光鏡之間,該擋板包含 二透光區域於該第-擔板巾,使得該光源發出的光線透過該 撞板上之透光區域射入到該聚光鏡上,並且進一步聚隹於兮 待測物體上; ° 色差產生元件,使得穿過該色差產生元件之光線,因 201207355 光線波長的不同而對其出射角度做調整; 一物鏡,其中上述該聚焦於該待測物體上之光 該待測物體,到達該物鏡’其中’該待測物件 二 待測物體上之先線是透明體; 光譜儀;及 一第二擋板,位於該色差產生元件與該光譜儀之 擋板包含一透光區域於該第二擋板中,其中上述到狐= 之光線’穿過該物鏡,然後穿過該色差產生=物^ =區域,穿過第二播板之透光區域進入該光⑵ 8. 其働廓之襄置 9. t申it利圍第,7項之量獅體表面立體輪廓之裝置, 其中該第一擋板及該第二擋板之透光區域為狹長型狹缝。201207355 VII. Patent application scope: 1. A device for measuring the stereoscopic contour of a surface of an object to be measured by longitudinal chromatic aberration, the device comprising at least one light source, wherein the wavelength of the light source is a continuous value within a range; a mirror; a baffle between the light source and the beam splitter, the baffle comprising a light transmissive region in the first baffle 'such that the light emitted by the light source passes through the light transmissive region of the plate Injecting into the beam splitter; a color difference generating component' causes light passing through the color difference generating component to be adjusted according to the wavelength of the light; and an objective lens is placed on the object to be tested and the color difference is generated. Between the components, wherein the light source is incident on the beam splitter, is reflected on the surface of the beam splitter, passes through the color difference generating element' and then passes through the objective lens to reach the surface of the object to be tested; a spectrometer; a second baffle between the spectroscope and the spectrometer, the baffle comprising a light transmissive region in the second baffle, wherein the object reaches the surface of the object to be tested Line 'to return to the rear surface of the reflective object thereof clock, lack of air through the striped color generating element and the beam splitter reaches the second multicast domain, enter the spectrometer for spectral analysis. Lu 2. For the device for measuring the surface stereo rim of the object in the first item of the patent scope, the light-transmissive area of the first fingerboard and the haiiper plate is a circular hole. 3. The device for measuring the surface of the object on the surface of the first aspect of the patent application, wherein the light transmission area of the first plate and the second plate is an elongated slit. 4. A device for measuring a surface stereoscopic wheel of a surface to be measured by longitudinal chromatic aberration, the device comprising at least the following: ~ a light source, wherein the wavelength of the light source is a continuous value within a range. A beam splitter; , 12 201207355 a baffle plate is disposed between the light source and the beam splitter, the support plate includes a light transmissive region in the first baffle, such that a light transmissive region on the baffle emitted by the light source is incident on the beam splitter; An objective lens; a color difference generating element disposed between the object to be tested and the objective lens, wherein the light source that is incident on the beam splitter is reflected on the surface of the beam splitter, passes through the objective lens, and then passes through the color difference Generating an element to reach a surface of the object to be tested, wherein the color difference generating element causes light passing through the color difference generating element to adjust an exit angle thereof due to a difference in wavelength of the light; a spectrometer; and a second baffle plate Between the spectroscope and the spectrometer, the baffle includes a light transmissive region in the second baffle, wherein the chromatic aberration generating element reaches the surface of the object to be tested, and the object The rear surface of the reflective color difference Wu return member, then through the objective lens and the beam splitter to reach the light-transmitting region of the second barrier, enter the spectrometer for spectral analysis. 5. The apparatus for measuring the three-dimensional contour of the surface of the object according to item 4 of the patent application, wherein the light-transmitting area of the first baffle and the second baffle is a circular hole. 6' The device for measuring the three-dimensional contour of the surface of the object according to the fourth item of the patent application, wherein the light-transmissive area of the first baffle and the second baffle is an elongated slit. 7. A device for measuring a stereoscopic profile of a surface of an object to be measured by longitudinal chromatic aberration, the device comprising at least the following: a light source, wherein the wavelength of the light source is a continuous value within a range; a concentrating mirror; a first baffle, Located between the light source and the concentrating mirror, the baffle includes two light-transmissive regions on the first-plate towel, such that light emitted by the light source is incident on the concentrating mirror through the light-transmitting region on the collision plate, and further gathers色 兮 on the object to be tested; ° chromatic aberration generating element, such that the light passing through the chromatic aberration generating element is adjusted according to the wavelength of the light of 201207355; an objective lens, wherein the above focus is on the object to be tested Light the object to be measured, reaching the objective lens 'where the first line on the object to be tested is a transparent body; a spectrometer; and a second baffle, located in the color difference generating element and the spectrometer baffle a light transmissive region is disposed in the second baffle, wherein the light ray to the fox = passes through the objective lens, and then passes through the chromatic aberration to generate a region = the region, passing through the second baffle The light-transmitting area enters the light (2) 8. The ridge of the ridge is 9. The device of the scorpion surface of the lion body, the first baffle and the second baffle are transparent. The light area is an elongated slit.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110857849A (en) * 2018-08-24 2020-03-03 台湾东电化股份有限公司 Modeling system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110857849A (en) * 2018-08-24 2020-03-03 台湾东电化股份有限公司 Modeling system

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