TW201131138A - Surface measure device, surface measure method thereof and correction method thereof - Google Patents

Abstract

A surface measure device, a surface measure method thereof and a correction method thereof are provided. The surface measure method includes the following steps. Firstly, a light is emitted by a light source. The light passes through a plurality of optical fiber inside a fiber tube, a first lens assembly, a splitter and a second lens assembly to a to-be measured surface in order, then is reflected to pass through the second lens assembly to the splitter and then is reflected to an image capturing unit. Wherein, the first lens assembly is used for focusing and decomposing the light. Then, a measure image is captured by the image capturing unit. Then, the light intensity of each of a plurality of image point in the measure image is calculated. Then, the light intensity of each image point in the measure image is compared with a relationship line between deep and light intensity ratio for obtaining the deep of each image point.

Description

201131138

TW5966PA VI. Description of the Invention: ^ Technical Field of the Invention The present invention relates to a surface measuring device, a measuring method thereof, and a method for correcting the surface, and in particular to a surface measuring method capable of generating a multi-point light source The device and its measuring method and calibration method. [Prior Art] / Please refer to Fig. 1 (Conventional Art), which shows a diagram of a conventional optical inspection system. The light field projected by the light source 3 is concentrated by the beam splitting lens at different focus positions 13a, 13b and 13c. The line projected on the surface to be measured is reflected to the beam splitter 14 and then divided into green filter members 15, thereby measuring the height of the same point on the surface to be measured. However, since the light source 8 is a point source, each time only the energy is measured at a point of the point to be measured, only the light incident on the surface to be tested and the surface to be tested, ^: the relative displacement can be measured to be measured When the line wheel of the measuring surface measures the surface contour of the surface to be tested, the relative displacement between the light surfaces incident on the surface to be tested must be in two different directions. In this way, the surface topography of the surface to be tested is not only time-consuming but also reduces the process [invention] and the surface measuring device and the measuring method of the measuring device (four) face wheel/measuring device can generate multi-point light source, which can be fast ^ According to the power surface, a surface measuring device 201131138 1 » » »/ ✓ vyv/ 1/4' surface measuring device is used to measure a surface to be measured. The surface measuring device comprises a light source, a fiber tube, a first lens group, a second lens group, an image sensing unit, a beam splitter and a processing unit. The light source is used to emit a light. The fiber optic tube has a plurality of fiber bundles for transmitting light. The first lens group is used to focus and split the light. The second lens group is used to focus the light and to have the focus of the light substantially at the surface to be measured. The image sensing unit measures the image by one of the captured light. The beam splitter is used to reflect the light reflected from the surface to be measured to the image sensing unit. The processing unit is configured to calculate a light intensity ratio of the plurality of image points of the image and compare the light intensity ratio of each image point with a depth-light intensity ratio relationship line to obtain a depth corresponding to each image point. . The light is sequentially passed through the fiber bundle, the first lens group, the beam splitter and the second lens group to the surface to be tested, and then reflected through the second lens group to the beam splitter and then reflected to the image sensing unit. According to a second aspect of the invention, a method of measuring a surface measuring device is presented. The surface measurement method includes the following steps. A light source emits a ray of light passing through a plurality of fiber bundles, a first lens group, a minute lens, a second lens group and a second lens group to a surface to be measured, and then reflected through the second lens group to the beam splitter. Reflected to an image sensing unit. The first lens group is used for focusing and splitting the light; the image sensing unit takes one of the light reflected from the beam splitter to measure the image; and calculates the light intensity ratio of the plurality of image points of the measured image; and, each image is The point light intensity ratio is compared with a depth-light intensity ratio relationship line to obtain the depth corresponding to each image point. According to a third aspect of the invention, a method of correcting a surface measuring device is provided. The method of correcting the surface measurement includes the following steps. a light source emits a light ray sequentially passes through a plurality of fiber bundles, a first lens group, 5 201131138

After the TW5966PA splitter mirror and a second lens group are on the same side, the reflection is reflected by the second lens group to the beam splitter and then reflected to an image sensing unit. The first lens group is used to focus and split the light; the image sensing unit captures a sample image of the light reflected from the beam splitter, and 'calculates the light intensity ratio of the image points of the sample image to obtain a depth-light Intensity ratio relationship line. In order to make the above description of the present invention more comprehensible, the following detailed description of the embodiments of the present invention will be described in detail as follows: [Embodiment] The following is a description of the embodiments of the present invention. The matters presented are for illustrative purposes only, and the drawings are for illustrative purposes and are not intended to limit the scope of the invention. Further, the illustration of the embodiments also omits unnecessary elements to clearly show the technical features of the present invention. Referring to Figure 2, there is shown a schematic diagram of a surface measuring device in accordance with an embodiment of the present invention. The surface measuring device 100 is configured to measure the surface to be tested 120. The surface measuring device 100 includes a light source 102, a fiber tube 104, a first lens group 106', a second lens group 108, and an image sensing unit 110. A beam splitter 112 and a processing unit 122. The first lens group 106 includes a third lens group 116 and a plano-convex lens 118. The image sensing unit 110 and the processing unit 122 are disposed in the controller 126, and the image sensing unit 110 is electrically connected to the processing unit 122. The light source 102 is configured to emit light L. The fiber optic tube 104 has a plurality of fiber bundles 132 for transmitting light L. The first lens group 106 uses 201131138 I wj^uurrt- to focus and split the light L. The second lens group 1 〇 8 is used to focus the light L and the focus of the light L is substantially on the surface 1 to be tested. In detail, the third lens group ι 16 in the second lens group 108 is used to focus the light L, and the plano-convex lens 118 is used to split the light L. The image sensing unit 11 is used to capture light L! Measured image 114 (not shown in Figure 2). The beam splitter 112 is configured to reflect the light L reflected from the surface to be tested 120 to the image sensing unit u〇e processing unit 7L 122 for calculating the light intensity ratio of the plurality of image points of the measurement image 114 and each image point The light intensity ratio is compared with the depth_light intensity ratio ♦ line C1 (not shown in Fig. 2) to obtain the depth corresponding to each image point. Further, the light L is emitted from the light source 丨〇2 and sequentially passes through the fiber bundles 132, the third lens group 116, the plano-convex lens 118, the mirror 112 and the second lens group 108 in the fiber tube 104 to be tested. After the surface is 12 ,, the second lens group (10) is returned to the beam splitter 112 and then reflected to the image sensing unit 110. The focus of the light passing through the second lens group 1 〇 8 is substantially on the surface to be tested 12 〇. #,, refer to FIG. 3 to FIG. 4, and FIG. 3 is a schematic diagram showing the measurement image of the surface to be tested captured by the image sensing unit of FIG. 2, and FIG. 4 shows the depth of the embodiment— Light intensity ratio relationship line. When the image sensing unit 110 # takes the measurement image m of the light reflected from the surface to be tested J 2 ( (the quantity = the image 114 is shown in FIG. 3), the processing unit 122 calculates the number of the measurement images 114. The light intensity ratio of the image points is compared with the depth-light intensity ratio relationship line C1 of FIG. 4 to obtain the depth of each image point, that is, the surface 120 to be tested is in the z direction. Height value. By passing through the direction 5_5 in the third figure, (ie, the direction of the )) several ^ 201131138

The TW5966PA image point W is taken as an example. The image points M1 correspond to the depth system of the 1 measuring point of the surface to be measured i2〇 (4) in Fig. 5, and the image points corresponding to the direction 5-5' in the third figure are corresponding. A schematic representation of the depth of the measured point. Since the fiber bundles 132 have the fiber bundles 132, the light rays 1 pass through the fiber bundles 132 to generate a plurality of point light sources, and the point light sources are incident on the surface to be tested 120 and cover the surface area of the surface to be tested 12〇. Therefore, a two-dimensional (2D) measurement image 114 can be obtained at one time. That is to say, the surface of the surface to be tested 12(4) can be measured without any relative displacement between the light projected onto the surface to be tested 120 and the surface to be tested 12, and the surface of the surface to be tested 120 can be quickly established. Save time and increase the productivity of the process. Light source 102 can produce light L having a wavelength ranging from 4 nanometers (nm) to 7 〇〇 nm, such as white light. Further, the light source 102 of the present embodiment is a multi-wavelength light source. In an embodiment, the light source 1 〇 2 can be generated at a rate greater than 120 watts (the light ray L of Watt, where the light source 1 〇 2 is, for example, a halogen light source. In addition, the fiber tube 1 〇 4 is flexible. According to the pipeline, the optical path between the light source 102 and the first lens group 106 can be bent arbitrarily. The incident area of the light L passing through the bundles 132 to the third lens group 116 is substantially equal to or less than the third. The area of the incident surface 128 of the lens group 116. Further, the light passing through the bundles 132 is completely incident on the third lens unit ,6, thus retaining the complete light intensity. In an embodiment, The magnification of the three lens group 116 is 4 times, but not limited thereto. The focus F1 of the light L after passing through the third lens group 116 is located between the third lens group 丨16 and the plano-convex lens 118, and the light ray l After 201131138 f » » ^ W1 i » The focus of the plano-convex lens 118 is located between the plano-convex lens U8 and the dichroic mirror 112. ~ Special - mention is 'Please refer to Figure 6, which shows Figure 2 A spectroscopic diagram of the light L passing through the plano-convex lens 118. The light L of the lens 118 produces a good graded fruit to increase the chromatic aberration in the axial direction. That is, the light L passes through the plano-convex lens 118 to cause a dispersion phenomenon 'the focus FR of the red light R, the focus FG of the green light G, and the blue light. The focal point FB of B is enlarged along the distance of the traveling direction D of the light, so that the range of the z direction in the to-be-measured surface 120 is also large. Returning to Fig. 2, the light L is incident on the spectroscope 112 and then incident. The area of the second lens group 108 is equal to or smaller than the area of the light incident surface 130 of the second lens group 108. Further, the light passing through the beam splitter u2 is completely incident on the second lens group (10), (4) The complete light intensity. In one embodiment, the magnification of the second lens group 108 is 60 times, but not limited thereto. The following describes the measurement method and the correction method of the surface measuring device 1〇〇 Before explaining the measurement method of the surface measuring device 1A, the method of correcting the method of obtaining the depth-light intensity ratio relationship as shown in Fig. 4 will be described. Please refer to Fig. 7, which is based on this. Method for correcting surface measuring device of one embodiment of the invention In step S102, the surface measuring device 1 of FIG. 2 is used to measure sample points of a plurality of known depths in the same plane (not shown). That is, the light source 102 emits light L' rays. The fiber bundles 132, the first lens group 106, the beam splitter 112, and the second lens group 108 of the fiber tube 1 through 4 are sequentially passed to the sample points in the sample surface, and then reflected through the second lens group ι 8 201131138

The TW5966PA Μ 11' is reflected to the image sensing unit 11A after being split into the beam splitter 112. Next, in step S104, the image sensing unit no captures the same image (not shown) of the light reflected from the beam splitter 112. Then, in step S106, the processing unit 122 calculates the light intensity ratios of the plurality of image points of the sample image, and matches the sample points of the known depth to obtain the depth-light intensity ratio relationship line C1 of FIG. 5 sheep fine 5, please refer to Fig. 8, which shows the depth-light intensity curve of several image points of the sample image of the embodiment. Since the image points of the sample image correspond to the sample points of the known depth in the sample face, the depth_light intensity curve shown in Fig. 8 can be obtained. In one embodiment, the light intensity of each of the image points of the sample image can be normalized (that is, the light intensity curves Bs, Gs, and Bs in the depth_light intensity curve). It is a curve obtained by normalization. Then, the light intensity ratio of each image point of the sample image is calculated by the following equations (1) and (2).

Rs(A)/Gs(A).....................................(1)

Gs(A)/Bs(A)................................(2) in the above formula In (1) and (2), RS (A) refers to the red light intensity of image point A, Gs (A) refers to the green light intensity of image point A, and Bs (A) refers to the blue light intensity of image point A. The light intensity here is, for example, a gray scale value. In addition, for the first depth range 0V1 in which the red light intensity curve Rs and the green light intensity curve Gs overlap in the depth-light intensity curve, the corresponding depth-light intensity ratio relationship line can be calculated by using equation (1). For the depth _ light intensity curve, the green light intensity curve Gs overlaps with the blue light intensity curve bs, the second depth range 〇V2, 201131138 (2) calculates the corresponding 妓-money degree =: _) divided by the green light intensity heart = '? / For example, the name A1's Fu Bub, w pairs the image point A2; the:= point A2 is taken as an example, and the corresponding green light intensity Gs(A2) can be divided by the blue light intensity<2) 'To obtain the light intensity ratio of the image point A2. According to this, the light intensity ratio of all the image points of the sample ~ image 2 is calculated. Then, the least squares is made.

The method or its b value method calculates a linear regression curve of the light intensity ratios of the image points of the sample image, such as the depth-light intensity ratio line C1 shown in FIG. Although the first depth range 0V1 and the second depth range ο V 2 of the embodiment are illustrated by way of example in FIG. 8, this embodiment is not limited, as long as the light intensity value can correspond to a unique depth. The value may be, the first depth range 0V1 and the second depth range 0V2 may be any other range. Since the light L passes through the plano-convex lens 118 of FIG. 2, the focus FR of the red light R, the focus FG of the green light G, and the focus FB of the blue light B are enlarged along the distance D of the light traveling direction (as shown in FIG. 6). Therefore, the depth-light intensity ratio relationship line C1 shown in FIG. 4 has a wide z-axis range, and the range of the z-direction in the surface 120 to be measured can be measured to be large. That is, even the surface to be measured The distance between the wave and the trough of the surface of the 120 is large, and the surface measurement device 1 of the present embodiment can still obtain accurate and complete peak/valley measurement results. After the depth-light intensity ratio relationship line C1 is obtained, the surface profile of the surface to be tested 120 can be measured. The following describes the measurement method of the surface measuring device 1 。. Please refer to FIG. 9 , which illustrates one of the inventions according to the present invention. «« I ' 201131138

Flow chart of the measuring method of the surface measuring device of the TW5966PA example. In step S202, the surface to be measured 120 is measured using the surface measuring device 1 of Fig. 2. That is, the light source 102 emits light L, which sequentially passes through the fiber bundles 132 of the fiber tube 104, the first lens group 1〇6, the beam splitter 112, and the second lens group 108 to the surface to be tested 12 The second lens group 108 1 is then reflected by the beam splitter 112 to the image sensing unit 110. Then, in step S204, the image sensing unit 11 captures the measurement image 114 of the light reflected from the beam splitter 112, such as the third. The figure shows. Further, in step S206, the processing unit 122 calculates the light intensity ratio of the plurality of image points of the measurement shadow 114. Then, in step S208, the processing unit 122 compares the light intensity ratio of the mother image points of the measurement image 114 with the depth-light intensity ratio line C1 to obtain the depth of each image point. In detail, the processing unit 122 divides the red light intensity Rs (A) of the image point of the measurement image 114 by the green light intensity Gs (A) and the green light intensity Gs (a) by the blue light intensity Bs (A). One of the two light intensity ratios calculated above will coincide with the depth-light intensity ratio relationship line C1 of FIG. 4 within the error range, and thus the corresponding depth is obtained. 2. Since the surface measuring device 100 of the present embodiment and the measuring method thereof obtain the light intensity ratio of the image point of the measurement image 114, the corresponding depth can be quickly compared. The feature of quickly measuring the surface profile of the surface to be tested is suitable for the production line. For example, the surface measuring device 100 and its measuring method can be applied to the production line to quickly and = detect the quality of each product. 201131138 i w jy\j\jrr\ In addition (4) The device is just suitable for dynamic measurement. Further, as long as the surface measuring device (10) of the machine of the production line is known, the oscillating image 114 of the object to be tested (for example, a product) can be captured every time the vibration is reduced and the reference is made. Thus, the measurement images 14 of the surface to be tested of each object to be tested are compared under the vibration reference, and the surface condition of the surface to be tested per copper = can be objectively detected. 

The surface measuring device (10) of the present embodiment, and the measuring method and the correcting method thereof are non-contact optical measuring mechanisms, and the very precise surface profile can be measured. As shown in Fig. 5, the surface measuring device 1〇〇 and its measurement; ; the height _ peak to wave judgment height P about 1 « (叩) and the visibility W about 2μπι surface coarse roundness. The surface measuring device and the measuring method and the correcting method thereof disclosed in the above embodiments of the present invention, the surface measuring device can generate a multi-point light source, and can quickly measure the surface contour of the surface to be tested, which not only saves time but also improves the process. Production efficiency. In addition, the light passes through the plano-convex lens to produce a dispersion phenomenon, which causes the focus of the red light, the focus of the green light, and the focus of the blue light to be enlarged along the direction of the light traveling direction. Thus, the range of the depth direction in the surface to be tested is also measured. Big. In conclusion, the present invention has been disclosed above by way of example, and is not intended to limit the invention. It will be apparent to those skilled in the art that various changes and modifications can be made without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention is defined by the scope of the patent application appended hereto. [Simple description of the schema] 201131138

TW5966PA Figure 1 (Prior Art) illustrates the schematic of a conventional optical inspection system. Figure 2 is a schematic representation of a surface measurement of a surface measurement in accordance with an embodiment of the present invention. FIG. 3 is a schematic diagram showing the measurement image of the to-be-measured surface captured by the image sensing unit of FIG. 2 . Figure 4 is a diagram showing the depth-light intensity ratio relationship line of this embodiment. Fig. 5 is a schematic view showing the depth of the measurement point corresponding to the image point passing through the direction 5_5' in Fig. 3. Fig. 6 is a view showing the intention of the light of Fig. 2 after passing through the plano-convex lens. Figure 7 is a flow chart showing a method of correcting the surface measuring device according to an embodiment of the present invention. Figure 8 is a graph showing the depth-light intensity of a plurality of image points of the sample image of the present embodiment. Figure 9 is a flow chart showing a method of measuring a surface measuring device according to an embodiment of the present invention. [Main component symbol description]: Spectroscopic lens 13a, 13b, 13c: Focus position 14, 112: Beam splitter 15: Filter element 100: Surface measuring device 102, S: Light source 104: Fiber tube 201131138

TW5966PA 106: first lens group 108 · second lens group - 110: image sensing unit 114: measurement image 116: third lens group 118: plano-convex lens 120: surface to be tested 122: processing unit • 126: controller 128, 130: light-in plane 132: fiber bundles A1, A2, Ml: image point B: blue light

Bs, Gs, Rs: light intensity curve C1: depth-light intensity ratio relationship line D: light travel direction • F Bu F2, FR, FG, FB: focus G: green light L: light OV1: first depth range OV2: Second depth range P: height R: red light S102 - S106, S202 - S208: step W: width

Claims (1)

201131138 TW5966PA .* - VII. Patent application scope: 1. A surface measuring device for measuring a surface to be measured, the surface measuring device comprising: a light source for emitting a light; a fiber tube having a plurality of a bundle of fibers for transmitting the light; a first lens group for focusing and splitting the light; and a second lens group for focusing the light and focusing the light on the surface to be tested; An image sensing unit for capturing one of the light to measure the image; and a beam splitter for reflecting the light reflected from the surface to be tested to the image sensing unit; and a processing unit for calculating Measure the light intensity ratio of the plurality of image points of the image and compare the light intensity ratio of each of the image points with a depth-light intensity ratio relationship line to obtain a depth corresponding to each of the image points; wherein The light passes through the fiber bundles, the first lens group, the beam splitter and the second lens group to the surface to be tested, and then reflects through the second lens group to the beam splitter and then reflects the image sensing. unit2. The surface measuring device according to claim 1, wherein the first lens group comprises: a third lens group; for focusing the light; and a plano-convex lens for splitting light The light passes through the third lens group and is focused between the third lens group and the plano-convex lens, and the light passes through the plano-convex lens and is concentrated between the plano-convex lens and the beam splitter. . 3. The surface measuring apparatus according to claim 1, wherein the light rays incident on the first light transmissive area are substantially equal to or smaller than an area of the first lens group. The surface measuring device according to claim 1, wherein an incident area of the light incident through the beam splitter and incident on the second lens group is substantially equal to or smaller than a light incident surface of the second lens group. area. 5. The surface measuring device according to claim 1, wherein the ratio of the brightness of each of the image points is the value of the red light intensity of each of the image points and the value of the corresponding green light intensity. 6. A surface measurement method comprising: a light source emitting a light beam sequentially passing through a plurality of fiber bundles: a first lens group, a beam splitter, and a second lens group to a surface to be measured, and reflecting After passing through the second lens group to the beam splitter, it is reflected to an image sensing sheet 7L', and the first lens (4) is used to collect the light and split the light; the image sensing unit operates the reflection self-splitting mirror One of the light measures the image; the light intensity ratio of the plurality of image points of the measured image is measured; and the ratio of the light intensity ratio of the secret points of the image to the depth-light intensity is The comparison is performed to obtain the depth corresponding to each of the image points. 7. The method of surface measurement according to item 6 of the patent application, wherein the surface is light, and (4) the focus behind the second lens group is substantially located at the surface to be tested. 8. The surface of the first aspect of the patent application. The measuring method, the 201131138 TW5966PA - 'the first lens group includes: a third lens group; for focusing the light; and a plano-convex lens for splitting the light; wherein the light passes through the third lens group Focusing between the third lens group and the plano-convex lens, and the light passes through the plano-convex lens and is focused between the plano-convex lens and the beam splitter. 9. The method of surface measurement according to claim 6, wherein the incident area of the light incident on the first lens group after the light beam passes through is substantially equal to or smaller than the light entering the first lens group. The area of the face. 10. The surface measurement method according to claim 6, wherein the incident area of the light incident through the beam splitter and incident on the second lens group is substantially equal to or smaller than the light incident surface of the second lens group. Area. 11. The surface measurement method according to claim 6, wherein calculating the light intensity ratio of the image points of the measurement image further comprises: illuminating the red light intensity of each of the image points Dividing the corresponding green light intensity to obtain the light intensity ratio of each of the image points. 12. A method for correcting a surface measurement, comprising: a light source emitting a light beam sequentially passing through a plurality of fiber bundles, a first lens group, a beam splitter mirror and a second lens group to the same surface; Reflecting through the second lens group to the beam splitter and then reflecting to an image sensing unit, wherein the first lens group is used to focus and split the light; the image sensing unit extracts the light reflected from the beam splitter One of the 201131138 I w^y〇〇PA sample images; and calculating the light intensity ratio of the plurality of image points of the sample image to obtain a depth-light intensity ratio relationship line. 13. The method according to claim a, wherein the calculating the light intensity ratio of the image points of the sample image further comprises: calculating the images of the sample image by using a least square method The depth-light intensity ratio line of points. The method of claim 12, wherein the calculating the light intensity ratio of the image points of the sample image further comprises: normalizing each of the image points of the sample image brightness. The method of claim 12, wherein the calculating the light intensity ratio of the image points of the sample image further comprises: performing each of the images in the range of - depth-depth The red intensity of the point is divided by the corresponding green light intensity to obtain the portion of the depth-light intensity ratio line; and the green light intensity of each of the image points in the second depth range is divided by Corresponding to the intensity of the blue light, the other is to be combined with the 冰 丨 to the farthest ice-light intensity ratio line.