201207170 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種可適用藉由電磁感應的連續鑄造 技術來製造石夕錠（silicon ingot)的石夕的電磁鑄造裝置，尤 其是有關於一種不會產生金屬帶來的污染而可效率良好地 製造用作太陽電池的基板材料的多晶矽矽的電磁鑄造裝 置。 【先前技術】 若使用安裝有於周方向上被分割的無底的冷卻模 (mould)的、藉由電磁感應的連續鑄造裝置（以下，稱 作「電磁鑄造裝置」），熔解後的物質（此處為熔融矽）與 模將幾乎不會接觸，因此可製造無雜質污染的鑄塊（矽 錠）。由於無來自模的污染，因此亦有無須使用高純度材料 來作為模的材質的優點，而且，由於可連續鑄造，因此可 大幅降低製造成本。因此，電磁鑄造裝置適用於先前以來 被用作太陽電池的基板材料的多晶矽的製造。 圖2是示意性地表示適合於多晶矽的製造的電磁鑄造 ，置的構成例的圖。如該圖2所示，於加熱用感應線圈 (ccnl) 2的内侧，以與感應線圈2的捲繞軸方向平行且於 感應線圈2内彼此絕緣陳態而排列著可對㈣進行水a 長的銅製的板狀片’由該板狀片所圍成的空間^ 亦即、’侧壁部進行水冷的無底的冷卻模）卜對於A 、 通常使用將板狀片設為銅片的水冷銅模。 於加熱用感應線圈2的下端位置（亦即，相當於冷卻 201207170201207170 VI. Description of the Invention: [Technical Field] The present invention relates to an electromagnetic casting apparatus applicable to the manufacture of silicon ingot by a continuous casting technique of electromagnetic induction, in particular An electromagnetic casting apparatus capable of efficiently producing a polycrystalline silicon used as a substrate material of a solar cell without causing contamination by metal. [Prior Art] When a continuous casting device (hereinafter referred to as an "electromagnetic casting device") by electromagnetic induction, which has a bottomless cooling mold divided in the circumferential direction, is used, the melted substance ( Here, the molten crucible) will hardly come into contact with the mold, so that an ingot (ingot) which is free from impurity contamination can be produced. Since there is no contamination from the mold, there is no need to use a high-purity material as a material of the mold, and since it can be continuously cast, the manufacturing cost can be drastically reduced. Therefore, the electromagnetic casting device is suitable for the manufacture of polycrystalline silicon which has been used as a substrate material for solar cells. Fig. 2 is a view schematically showing an example of a configuration of electromagnetic casting suitable for the production of polycrystalline silicon. As shown in FIG. 2, the inside of the heating induction coil (ccnl) 2 is arranged in parallel with the winding axis direction of the induction coil 2 and insulated from each other in the induction coil 2, and the water can be made to (4) long. The copper plate-shaped piece 'the space enclosed by the plate-shaped piece ^, that is, the water-cooled bottomless cooling mold of the side wall portion. For A, the water-cooling in which the plate-shaped piece is usually used as a copper piece is usually used. Copper mold. At the lower end position of the heating induction coil 2 (that is, equivalent to cooling 201207170
L t曰的底部的位置），設置著可向下方移動的支持台i卜 舰熱用感應線圈2的下侧，設置著用於對凝固的 保m 9)進彳τ加熱以防止急遽冷卻的保溫裝置3，於 =圖^側，安裝著均熱筒12。♦錠9由提拉褒置 c禾圖不）向下方提拉。 丨肉卻模1的上方’設置著可於炫解中將原料投入模 、原料投入機13。進而，於本例中，於、 Ο ο 安裝著用於對原料料行加熱的發熱體為 從Cl:置電襞炬(PlaSmat〇rCh)來娜熱體Μ， 從視而要來進行藉由電漿弧的加熱。 15以置被設置於密閉容器1G内，以使得熔融石夕 H二魏9不會與絲直接接觸，通常是以惰性 續鱗造M1G内進行置換，以在少許的加錄態下進行連 片座2曰曰石夕的製造時’若對模1填充石夕原料，並使高頻 i i内加熱用感應線圈2，則原料將發熱並溶解。 r 1二丨辟，石夕15因感應電流而與板狀片排斥，從而不盥 ^ 。在_碎15充分均勻化之後，只要蚊 物口隹1言向下方移動而遠離感應線圈2，便開始進行冷 盘= 内⑽㈣15的單向性顧而形成呈有 與模剖面相⑽狀的勤的雜9。 八有 的旦：支持台11朝向下方的移動量而熔融矽15 二石々目'2/ ’因此只要自原料投入機13供給相應量的 原科石夕’以確保炫融石夕15的上表面始終保持相同的高度位 201207170 準（level)，藉由持續進行加熱炫解、提拉 可連續製造多晶矽錠9。 便 n LI二3冷卻模1的側壁的下端外緣部與保溫裝 、王、端内緣部之間，形成有間隙（圖2中由声 線所包圍且標註有符號a的部分，以下，簡稱 ; 溫裝置的外框之__」）。這是由於模與保溫裝置的 1 ’隨著該間隔變寬，健效果的下降將 才同條件下的鑄仏而難以進行穩定的操作。因此，採用右 =由隔熱材料構成的保溫板（bGard)來覆蓋間隙等的對 為了縮小模與保溫裝置的外框之間的間隙，亦可將伴 溫板與保溫裝置的外框設為一體型，但u 化’因此通常採用鱼佯Ί ;二，劇烈劣 件構成。 用/、保/现裝置不同的、可谷易地更換的零 圖3 〇)圖3 (b)是示意性地表示模與保溫裝 夕==的間隙以及針對此間隙的對策例的圖，圖3 疋整f的立體圖，圖3㈤是圖的W箭頭剖面圖。 熱用感im:圖3 (b)所示，於模1的外侧安裝著加 、，的’於模1的下方設置著用於對錠9進行保 ΐ裝3。於該才莫1與保溫裝置3的外框6(其内側 熱材料5)之間形成有間隙（圖3 (b)中由卢線 二，的部分）’於圖示的例子中’於該間隙上安裳著Γ隔 ’、’、邛構成的保溫板8。作為隔熱材料，使用以氧化鋁 201207170 (alumina)以及二氧化矽（ 熱板。 llGa)融成一㈣熱的隔 然而’顧熱㈣的絲板_ =使用的過程中會變脆的缺點。保温板 存在易發生破損的_k⑽目此並不Μ拆除，從而 Ο Ο 對於該電磁鑄造裝置中的模與保溫 間隙對策，於專利練及其他文 ^框之間的 ί (c〇r t i 糊讀1巾揭村—種保溫 )裝置、、在具備於爐頂開口的鋼板插入/抽出 口的批次（batch)式加熱爐中，將保溫 於上述插人/Μ π並龍骑贿時 ===的毛_t)以阻斷爐内的= ^向紅中的祕。雖無_毛蹄_記載， 慮將纖維狀的耐火材料用作素材。 号 本文獻十揭示的毛魅於上述模與保溫裝置的外框 較㈣情況下’亦可考慮_的可能性 二 可認為在隔熱效果方面不夠充分目此難以適用’ [先前技術文獻] [專利文獻]The position of the bottom of the L t曰 is provided with a lower side of the support induction coil 2 which can be moved downward, and is provided for heating the solidification to prevent rapid cooling. In the heat insulating device 3, on the side of the figure, the heat equalizing cylinder 12 is mounted. ♦Ingot 9 is pulled by the lifting device. The upper part of the mold 1 is provided with a raw material input machine 13 in which the raw material can be put into the mold. Further, in the present example, the heating element for heating the raw material material is attached to the heating element from the Cl: the electric heating torch (PlaSmat〇rCh), and the heating element is taken from the viewpoint. Heating of the plasma arc. 15 is placed in the closed container 1G, so that the molten stone H 2 Wei 9 will not be in direct contact with the wire, usually replaced by inert continuous scale M1G, to be contiguous in a little added state. At the time of manufacture of the 曰曰 曰曰 夕 ' ' 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若r 1 二丨,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, After the mash 15 is sufficiently homogenized, as long as the mosquito mouth moves downward and moves away from the induction coil 2, the unidirectionality of the cold disk = inner (10) (four) 15 is started to form a diligent shape in the form of a pattern (10). Miscellaneous 9.八有旦: The amount of movement of the support table 11 toward the lower side is melted 矽15 々石々目 '2/ ' Therefore, as long as the corresponding amount of the original stone stalk is supplied from the raw material input machine 13 to ensure the smelting of the stone eve 15 The surface is always at the same height level 201207170. The polycrystalline iridium ingot 9 can be continuously produced by continuous heating and lifting. A gap is formed between the outer edge portion of the lower end of the side wall of the cooling mold 1 and the inner edge portion of the heat insulating device, the king, and the end portion (the portion surrounded by the sound ray in FIG. 2 and marked with a symbol a, below, Abbreviation; __" of the outer frame of the temperature device. This is because the 1'' of the mold and the heat retaining device becomes wider as the interval becomes wider, and the lowering of the health effect will make it difficult to perform stable operation under the same conditions. Therefore, the right side = bGard made of a heat insulating material is used to cover the gap, etc., in order to reduce the gap between the mold and the outer frame of the heat insulating device, the outer frame of the temperature maintaining plate and the heat insulating device may be set to It is a one-piece type, but it is usually 'fishing rods'; second, it is composed of severely inferior parts. FIG. 3(b) is a diagram schematically showing a gap between the mold and the heat preservation device and a countermeasure against the gap, and FIG. 3(b) is a view schematically showing a gap between the mold and the heat preservation device. Fig. 3 is a perspective view of the f, and Fig. 3 (f) is a cross-sectional view of the W arrow of the figure. The heat feeling im: as shown in Fig. 3 (b), the outer side of the mold 1 is attached, and the ingot 8 is placed under the mold 1. A gap (the portion of the ridge 2 in FIG. 3(b)) is formed between the frame 1 and the outer frame 6 of the heat retaining device 3 (the inner heat material 5 thereof) in the illustrated example. On the gap, there is a thermal insulation board 8 composed of ', ' and 邛. As a heat insulating material, the use of alumina 201207170 (alumina) and cerium oxide (hot plate. llGa) melts into one (four) hot partition. However, the heat (four) of the silk plate _ = the disadvantage of being brittle during use. _k(10), which is prone to breakage, is not removed, so Ο Ο For the mold and insulation gap in the electromagnetic casting device, between the patent practice and other texts (c〇rti 1 towel uncovering village-type heat preservation device, in a batch type heating furnace equipped with a steel plate insertion/extraction opening at the top of the furnace, the heat is added to the above-mentioned insertion/Μπ and the dragon is bribed == = hair _t) to block the secret in the furnace = ^ to the red. Although there is no _ hoof hoof, it is considered that a fibrous refractory material is used as a material. No. 10 disclosed in the document 10 is similar to the outer frame of the above-mentioned mold and the heat-insulating device. (4) The possibility of considering the _ can be considered as insufficient in terms of heat insulation effect. It is difficult to apply this [Previous Technical Literature] [ Patent literature]
[專利文獻1]日本專利實開平5_85839 【發明内容】 R 本發明是有鑒於上述狀況而完成，其目的在於提供— 201207170 種石夕的電磁鑄造裝置’該矽的電磁鑄造裝置藉由在模與保 溫裝置的外框之間的間隙内配置強度以及耐久性優異且安 裝拆除容易的保溫板’從而防止保溫裝置内的溫度環境的 變化而進行穩定的操作，並且可製造無金屬雜質帶來的污 杂而適合用作太陽電池的基板材料的多晶矽。 本發明者為了解決上述課題，考慮當前使用的由隔熱 材料構成的保溫板的增強。亦即，由於該隔熱材料存在因 使用而變脆的缺點，於更換時易破損，因此對於使用增強 材料，並於該增強材料上载置隔熱材料的方法進行研究。 作為由隔熱材料構成的保溫板的增強材料，要求具有 適當的強度、高耐熱性、且耐熱變形等。作為滿足該些要 求的材料，氧化銘、碳化石夕等的陶竞（cemmics)或^、 组、鶴等的高熔點金屬等存在可適用的可能性。該些材料 中，高溶點金屬由於可能會產生金屬污染，因而不理想。 而且’碳切等的喊存在成本會變高的困難點。 :此’作為保溫板的㈣材料，對可認為滿足 t的=狀隔熱材料（其中’耐高溫的無機質材）的適用 材料的隔熱性能高，多用作毛餘用 / 2狀等或用作嘴附材料、複合材料的埴充 廉俨；由故纖維材料成形為板狀的材料相對較 廉h，亦無龜裂4，且操作容易， ？又 於保持保溫板的增強n 適用作用 首先，於具有剖面尺寸為345 模的電磁鑄造裝置中，於厚mm的水冷鋼 厚度為5職左右的碳纖維材料 201207170 ^放置隔熱材料而製成環（dGnut)形的（方形環狀的）保 •板-並以覆蓋該模與保溫裝置的外框之間的間隙的方式 崎㈣置（即’彻健板來填埋間隙），以鑄造出長度 4000 的石夕錠。結果，已確認：隔熱材料未變脆’而其 下的碳纖維材料無任何異常，可將隔熱材料與碳纖維材料 作為一體而容易地拆除。 然而，另一方面，與隔熱材料一同構成保溫板的碳纖 〇 、維材料變得赤熱。而且，雖然這是在先前的僅由隔熱材料 構成的保溫板的使用中亦會發生的問題，但保溫裝置的外 框自身會發熱、熔損，而且已確認用於緊固外框的螺栓 (bolt)的赤熱。 如上述圖3 (a)、圖3 (b)所示，保溫裝置3具有加 熱機構4 (電熱式的加熱器）以及隔熱材料5，於其外周安 裝著用於對加熱機構4以及隔熱材料5進行支持固定的外 框6。=外框6是由4片（面）不鏽鋼製的板構成，彼此 鄰接的每2片包夾絕緣材料並以金屬製的螺栓7予以緊 〇 固。外框自身的熔損或外框緊固用螺栓的赤熱是來自加熱 用感應線圈的磁力所產生的感應電流流經用於增強隔熱材 料的碳纖維材料而使其赤熱，除了其影響會波及周邊的外 框或螺栓以外，考慮還存在自感應線圈對外框或螺栓的直 接影響。 外框的炼損在構成外框6的4片板材中位於感應線圈 2的支持部（圖3 (a)中標註有符號b的部分）的正下方 的面（以下亦將該面稱作「B面」）上尤其大。於外框6 9 201207170 上，安裝著加熱器的電極或用於對保溫裝置3内的溫产進 行測定的熱電偶（均未圖示），但安震在B面上的^ 的破損亦較多。而且，由於外框緊固用螺栓為金屬製，因 流會集中於螺栓而螺栓變得赤熱’進而有時還會 右保溫裝置的外框或螺栓發生赤熱、熔損，則金 染物質將被導人氣體環境中，從而錢會受到污染。金屬 雜，會使作為太陽電池的賴效率（可賴為電能而 的犯源相對於所入射的光的能源的比例）下降，因此，於 電池的基板材料的多晶㈣製造中，尤其需要嚴 會且，*僅外框的壽命會變短，而且保溫效果 穩定的操作处置_溫度魏發生變化，從_以進行 用纖維材料的赤熱或m置的外框、外框緊固 熱、熔損是因來自加熱用感應線圈的磁力所引 可防止外框的熔損·栓的^止^纖維材料的赤熱’而且， 隙進=溫=口保的間 構件，不會钱應糕_，些構偶為非導電性 本發明是基於如此之見解:二構件自身不會發熱。 見解而完成，其主旨在於下述的 10 201207170 矽的電磁鑄造裝置。 冷卻;莫、圍嘵:二造裝置’其具有導電性的無底 圍繞雜的感應線圈以及保溫 =的轴向的-部分於周方向上被分割為 2酉己置於上述模的下方，且對凝固[Patent Document 1] Japanese Patent Laid-Open No. Hei 5_85839 [Summary of the Invention] R The present invention has been made in view of the above circumstances, and an object thereof is to provide - 201207170 an electromagnetic casting device of the Shih-hs. In the gap between the outer frames of the heat insulating device, the heat insulating plate having excellent strength and durability and easy to remove and disassemble is disposed to prevent stable operation of the temperature environment in the heat insulating device, and dirt can be produced without metal impurities. Polycrystalline germanium suitable for use as a substrate material for solar cells. In order to solve the above problems, the inventors of the present invention considered the reinforcement of a heat insulating board made of a heat insulating material which is currently used. That is, since the heat insulating material has a drawback of being brittle due to use, it is easily broken at the time of replacement, and therefore, a method of using a reinforcing material and placing a heat insulating material on the reinforcing material has been studied. As the reinforcing material of the heat insulating sheet made of a heat insulating material, it is required to have appropriate strength, high heat resistance, heat deformation resistance, and the like. As a material that satisfies these requirements, it is possible to apply oxidization, cemmics such as carbon stone, or high-melting-point metals such as groups, cranes, and the like. Among these materials, high-melting point metals are not ideal because they may cause metal contamination. Moreover, the shouting of carbon cutting and the like has a difficulty in increasing the cost. : This is a material for the insulation board (4), and it has high heat insulation performance for a suitable material that can be considered to satisfy the t-type heat insulation material (in which the "high temperature resistant inorganic material"), and is often used as a hair balance / 2 shape or the like. The material of the mouth is attached to the material and the composite material is clean and sturdy; the material formed into the plate shape from the fiber material is relatively inexpensive, and there is no crack 4, and the operation is easy. In addition, in order to maintain the thermal insulation plate, the application of the insulation is first applied to the electromagnetic casting device having a section size of 345. In the thickness of the water-cooled steel, the thickness of the water-cooled steel is about 5, and the carbon fiber material is 201207170. dGnut) (square-ringed) plate - and in the form of a gap between the mold and the outer frame of the heat-insulating device (ie, the 'well plate to fill the gap') to cast the length 4000 Shi Xi ingots. As a result, it has been confirmed that the heat insulating material is not brittle and that the carbon fiber material is free from any abnormality, and the heat insulating material and the carbon fiber material can be easily removed as one. On the other hand, however, the carbon fiber and the dimensional material which together with the heat insulating material constitute the heat insulating plate become red hot. Moreover, although this is a problem that may occur in the use of the prior thermal insulation board composed only of the heat insulating material, the outer frame of the heat insulating device itself is heated and melted, and the bolt for fastening the outer frame has been confirmed. (bolt) red heat. As shown in Fig. 3 (a) and Fig. 3 (b) above, the heat insulating device 3 has a heating mechanism 4 (electrical heater) and a heat insulating material 5, and is mounted on the outer periphery thereof for the heating mechanism 4 and the heat insulating layer. Material 5 is used to support the fixed outer frame 6. The outer frame 6 is made of four sheets of stainless steel, and each of the two adjacent sheets is sandwiched with an insulating material and fastened by a metal bolt 7. The heat loss of the outer frame itself or the heat of the outer frame fastening bolt is that the induced current generated by the magnetic force from the heating induction coil flows through the carbon fiber material for reinforcing the heat insulating material to make it red hot, except that the influence thereof may affect the periphery. In addition to the outer frame or bolt, consider the direct effect of the self-inductive coil on the outer frame or bolt. The outer frame of the refining damage is located directly below the support portion of the induction coil 2 (the portion marked with the symbol b in Fig. 3(a)) among the four sheets constituting the outer frame 6 (hereinafter, this surface is also referred to as " B side") is especially large. On the outer frame 6 9 201207170, the heater electrode or the thermocouple for measuring the temperature production in the heat preservation device 3 (not shown) is mounted, but the damage of the vibration on the B surface is also higher. many. In addition, since the bolt for the outer frame is made of metal, the flow will concentrate on the bolt and the bolt will become red hot. In some cases, the outer frame or bolt of the right heat retaining device will be red-hot or melted, and the gold-dyed material will be Leading the gas environment, and thus the money will be polluted. Metal impurities can reduce the efficiency of the solar cell (the ratio of the source of the electric energy to the energy of the incident light), and therefore, in the polycrystalline (four) manufacturing of the substrate material of the battery, it is particularly necessary. In addition, *only the life of the outer frame will be shortened, and the operation of the heat preservation effect is stable _ the temperature Wei changes, from the _ to the heat of the fiber material, the outer frame, the outer frame fastening heat, the melt loss It is caused by the magnetic force from the induction coil for heating, which prevents the melting of the outer frame and the shackle of the fiber material. Moreover, the gap between the temperature and the temperature is not a part of the material. The configuration of the coupler is non-conductive. The present invention is based on the insight that the two members themselves do not generate heat. Completion of the insights, the main purpose of which is the electromagnetic casting device of 10 201207170 下述 below. Cooling; Mo, cofferdam: the second building device's electrically conductive bottomless surrounding induction coil and the axial portion of the thermal insulation = are divided into 2 周 in the circumferential direction and placed under the above-mentioned mold, and Solidification
應線圈的電磁感應加熱來使炫融的石夕:下^ 拉凝口，其特徵在於’於切保溫裝置的軸上 對上述模與保溫裝置的外框之間的的^ 板’=溫板是於碳纖維材料上載置著隔熱==保>皿 材料於至少1處被切斷，若如此，便可; 材料中的感應電流的產生。 丨刊喊纖维 於本發明的石夕的電磁鑄造裳置中，較為理想的是 上述礙纖維材料而使用碳切製或氧化㈣的構件，若^ 此，該碳化矽製或氧化鋁製的構件中便不會產生因來自加 熱用感應線圈的磁力引起的感應電流。 [發明的效果] 本發明的矽的電磁鑄造裝置是利用在碳纖維材料上 置有隔熱材料的保溫板來覆蓋模與保溫裝置的外框之間的 間隙的鑄造裝置。亦可取代碳纖維材料而使用碳化矽&或 氧化鋁製構件。 若使用本發明的電磁鑄造裝置’則即使保溫板的隔熱 材料在使用中變脆，亦可藉由碳纖維材料來予以保持/因' 此可容易地進行保溫板的拆除。可預先將隔熱材料分割為 11 201207170 因此可無浪費 數段以供使用，並僅更換劣化劇烈的部分 地有效使用隔熱材料。 而且 曰在至少1處，較為理想的是於2處切辦 狀的碳纖維材料’可防止保溫裝置的外框或外框的緊固^ 推㈣㈣μ 里裝内的溫度環境的變化而 進订穩疋的操作’㈣可製造適合作為 料的多晶石夕，其中無金屬雜質帶來的污染。…土 祕為上述和其他目的、特徵和優點能更明顯 明如下。、&佳實施例’並配合所附圖式，作詳細說 【實施方式】 本=的石夕的電磁鑄找置是以—種電磁鑄造装置> Ιίΐΐ軸向的—部分於周方向上被分割為多娜 ，I底冷賴、圍繞該模的感應_、以及配置於 述模的下方且對凝固的矽進行緩冷的保溫裝置。 以此種電磁鑄造t置為前提是為了：在製造用作太陽 ^基板材制多晶㈣’於翻進㈣造而使溶融碎 幾乎不接觸’從而可製造—種無來自模的金屬污染而 Ζ轉換麟維持為良好㈣錠。由於無須使用高純度材 料來作為㈣材質，而且可連續地鑄造，因此亦可大 低製造成太。 本發明的電磁鑄造裝置的特徵在於：於上述保溫裝置 的1 卜框上，配置有對上述模與保溫裝置的外框之間的間隙 進行填埋的保溫板，該保溫板是於碳纖維材料之上載置著 12 201207170 隔熱材料而成。 圖1是表示於本發明的電磁鑄造裝置中，為了對模與 保溫裝置的外框之間的間隙進行填埋而配置於保溫裝置的 外框上的保溫板的概略構成例以及使用狀態的縱剖面圖。 如圖1所示’於用於對錠9進行保溫的保溫裝置3的外框 6上，配置著對上述模1與保溫裝置3的外框6之間的間 隙進行填埋的保溫板8。該保溫板8由碳纖維材料8a以及 Ο ❹ 載置於該碳纖維材料8a上的隔熱材料8b構成。 保溫裝置3具有加熱機構4 (電熱式的加熱器）以及 隔熱材料5’於其外侧安裝著不鏽鋼製的外框6。保溫裝置 3的外觀如上述圖3 (a)、圖3 (b)所示，通常是與模i 的形狀一致而為方形，且安裝著4片不鏽鋼製的板材。 ―於圖1所示的例子中，加熱器為3段，於各段中，配 置著多個加熱ϋ。各加熱H可分職立地進行溫度控制， 以可高精度地控制保溫裝置3内的高度方向上的溫度。 於保溫裝置的外框上配置著對該模與保溫裝置的外框 之間的間隙進行填埋的保溫板是為了防止下述情況，即： 因通過間_放熱而導致保溫效果下降，保溫裝置内的溫 度環境發生變麵無法進行相同條件下輯造，從而難以 進行穩定的操作。 一：”炭纖維材料之上載置著隔熱材料而構成， k疋因為.若保溫板僅由隔熱材料構成， 過程中會變脆，從而在拆除日丰恭座谕护 ^ / 時發破#，或陳脆而無法 維持板的狀悲，仉而有時會變得極難拆除。藉由將碳纖維 13 201207170 材料置於隔熱材料之下，即使在因破損等而無法維持板的 狀態時亦可進行拆除。 較為理想的是，碳纖維材料上的隔熱材料並非設為一 體構造（亦即，無縫隙的角形環狀），而是預先分割為數段。 若將隔熱材料設為一體構造，則會因外側與内側的溫度差 而易產生龜裂，於拆除後，在下次鑄造時必須全部更換為 新品，但藉由分割為數段，可僅更換劣化劇烈的部分，因 此不會浪費隔熱材料，而可有效地使用隔熱材料整體。再 者，上述分割數可視隔熱材料的龜裂或脆化的狀態來 決定。 碳^維材料可使用成形為板狀者。厚度可設為5 mm 左右。若為此程度的厚度’則具有可保持隔熱材料的強度， 操作亦相對較容易。 於本發明的石夕的電磁鑄造裝置中，較為理想的是，上 述碳纖維材料於至少1處被切斷。 如前所述，當使用方形環狀的碳纖維材料時，碳纖維 材料會變得赤熱，並且m置的外框自身會發熱、炫損， 而且’外框緊_螺栓會變得赤熱。該外框自身的發熱、 溶損以及外框緊固用螺栓的赤熱於先前的配置有僅由隔熱 材料構成的保溫板的電磁鑄造裝置中亦會產生，但即便使 用將碳纖維材湘作增強材料的保溫板，該狀況（外框、 螺栓的發熱、熔損）亦未㈣改善。考慮其朋在於：來 自加熱用感應線圈的磁力所μ的感應電流流經碳纖維材 料而使其變得赤熱，其f彡響波及至周邊的外減螺检，並 201207170 且還存在自感應線圈對外框或螺栓的直接影響。 先切Γϋί將方形環狀的碳纖維材料的1處或2處預 應雷、Ρ制來自加熱用感應線圈的磁力所引起的残 =:二:止碳纖維材料的赤一 使用！二H圖4 (b)、圖4 (c)是示意性地表示對於 使用明的電磁鑄造裝置（水冷_的剖面尺寸：345 Ο Ο 二螺====== 中標注有斜線的部分表示赤熱。 隙的所不’當保溫板的碳纖維材料8a為無縫 =:域時’碳纖維材料8a的外周的整個面變得赤 ;、、亦變纖維材料8,内周亦變得赤熱。緊固崎 認碳=:= 得處;1切= 熱。 不變传赤熱。然而，緊固用螺栓7變得赤 &-另方面，虽碳纖維材料的2處被切斷時，如圖4(C) 7二巧㈣纖維材料8a未變得赤熱 。亦確認緊固θ用螺栓 支付、熱’、推測其原因在於：藉由在 2處切斷碳纖維 …加…、用感應線圈的磁場分布發生較大變化，感應電 15 201207170 流向螺栓的集中被阻止。 如圖 4(a)、圖 、 處亦有絲，值吏為理想的是於雖切斷處為1 預先切斷方形環狀的碳纖維：刀T。 及切斷部位並無特別限定。切剖面的^切剖面的間隔以 兩面間引起放電的程度，另一方面的，，必須空開不會在 保溫板時將無法穩定地载 1間隔太寬’構成 自行確定。而曰：材枓’因此適當的間隔將 目灯項疋而’由於無法準確地 線圈的磁場分布的變化，因 ^斷&成的感應 裝置的外框或螺栓的影響而適當確;。慮 ==左右對稱的部位予以切斷（參二圖理 於本發明的石夕的電磁鑄造裝置中，作為對模與保 置的外框之__進行填埋賴溫板的增強構件 代上，碳纖維材料而使用碳化矽製或氧化鋁製的構件。 碳化矽以及氧化鋁均為非導電性構件’不會產生因來 自加熱用感應線圈的磁力所引起的感應電流。因此，該增 強構件不會變得赤熱，其影響不會波及周邊的外框=虫^、 栓，碳化矽以及氧化鋁作為保溫板的增強構件較為理想。 尤其是碳化矽雖存在因高價而難以利用的問題，但碳化矽 以及氧化銘均能充分滿足作為保溫板的增強材料時所要求 的性能’因此可充分活用不會有因來自加熱用感應線圈的 磁力所引起的感應電流流動，因而該些材料自身不會發熱 的特徵。 ^ 16 201207170 如以上所說明，本發明的電磁鎊造裝置的特於： 使用碳纖維材料或碳化石夕或氧化紹，來作為由用 框之間的間隙進行填埋的隔熱材料構二 ==Γ。藉此，即使處於隔熱材料變脆或不成 η:可容易地進行保溫板的拆除，而且，於使 為二置於碳纖維材料等上的隔熱材料預先分割 …數，，可實現隔熱材料不被浪費的有效利用。The electromagnetic induction heating of the coil should be used to make the glazed stone eve: the lower 拉 凝 ,, which is characterized by 'the plate between the mold and the outer frame of the heat preservation device on the shaft of the heat-insulation device==warm plate The heat insulating material is placed on the carbon fiber material and the material is cut at at least one place. If so, the induced current in the material is generated. In the electromagnetic casting of the Shi Xi of the present invention, it is preferable to use a member which cuts or oxidizes (4) carbon, and if so, the tantalum or alumina. The induced current due to the magnetic force from the heating induction coil is not generated in the member. [Effects of the Invention] The crucible electromagnetic casting apparatus of the present invention is a casting apparatus that covers a gap between a mold and an outer frame of a heat retention device by using a heat insulating plate provided with a heat insulating material on the carbon fiber material. It is also possible to use a bismuth carbide & or alumina member instead of a carbon fiber material. According to the electromagnetic casting apparatus of the present invention, even if the heat insulating material of the heat insulating board becomes brittle in use, it can be held by the carbon fiber material, and the heat insulating board can be easily removed. The insulation can be divided into 11 201207170 in advance so that no waste can be used for several stages, and only the part with high deterioration can be used effectively. In addition, at least one place is required, and it is preferable that the carbon fiber material cut at two places can prevent the outer frame or the outer frame of the heat insulating device from being tightened (four) (four) and the temperature environment in the inner device is changed. The operation '(4) can produce polycrystalline as a material, which is free from contamination by metal impurities. ...the above and other objects, features and advantages are more apparent as follows. And the preferred embodiment 'in conjunction with the drawings, for details. [Embodiment] The electromagnetic casting of the Shi Xi is based on an electromagnetic casting device > ΐΐίΐΐ axial-partially in the circumferential direction It is divided into Dona, the bottom of the I, the induction around the mold, and the thermal insulation device disposed under the mold and slowly cooling the solidified crucible. The premise of this type of electromagnetic casting is to make the polycrystalline (4) in the manufacture of solar panels, and to make the melted crumbs hardly contact, so that it can be manufactured without any metal contamination from the mold. Ζ Conversion Lin is maintained as a good (four) ingot. Since it is not necessary to use high-purity materials as (4) materials and can be continuously cast, it can be manufactured to a large extent. The electromagnetic casting apparatus of the present invention is characterized in that: a heat insulating plate for filling a gap between the mold and the outer frame of the heat insulating device is disposed on the frame of the heat insulating device, and the heat insulating plate is made of carbon fiber material. It is made of 12 201207170 insulation material. 1 is a schematic configuration example of a heat insulating plate disposed on an outer frame of a heat insulating device for filling a gap between a die and a heat insulating device in the electromagnetic casting device of the present invention, and a longitudinal example of the use state. Sectional view. As shown in Fig. 1, the heat insulating plate 8 for filling the gap between the die 1 and the outer frame 6 of the heat retaining device 3 is disposed on the outer frame 6 of the heat insulating device 3 for holding the ingot 9. The heat insulating plate 8 is composed of a carbon fiber material 8a and a heat insulating material 8b on which the carbon fiber material 8a is placed. The heat insulating device 3 has a heating mechanism 4 (electrical heater) and a heat insulating material 5' to which an outer frame 6 made of stainless steel is attached. As shown in Fig. 3 (a) and Fig. 3 (b), the heat insulating device 3 has a rectangular shape and is attached to four sheets of stainless steel. ―In the example shown in Fig. 1, the heater has three stages, and in each stage, a plurality of heating crucibles are arranged. Each heating H can be temperature-controlled separately, so that the temperature in the height direction in the heat retention device 3 can be controlled with high precision. The heat insulating plate for burying the gap between the mold and the outer frame of the heat insulating device is disposed on the outer frame of the heat insulating device to prevent the following situation, that is, the heat insulating effect is lowered due to the heat transfer between the heat exchanger and the heat insulating device; The internal temperature environment cannot be changed under the same conditions, making it difficult to perform stable operation. One: "The carbon fiber material is placed on the surface of the insulation material, k疋 because. If the insulation board is only made of heat-insulating material, it will become brittle during the process, and it will be broken when the Nihon Toys Co., Ltd. is removed. #, or Crunchy and unable to maintain the shape of the board, sometimes it becomes extremely difficult to dismantle. By placing the carbon fiber 13 201207170 material under the heat insulating material, the state of the board cannot be maintained even due to damage or the like. It is also possible to remove it. It is preferable that the heat insulating material on the carbon fiber material is not integrated (that is, a ring-shaped angular ring shape), but is divided into several segments in advance. The structure is prone to cracking due to the temperature difference between the outer side and the inner side. After the removal, it must be completely replaced with a new product at the time of the next casting. However, by dividing into several segments, only the portion with severe deterioration can be replaced, so that no waste is caused. The heat insulating material can effectively use the entire heat insulating material. Further, the number of divisions can be determined by the state of cracking or embrittlement of the heat insulating material. The carbon material can be formed into a plate shape. 5 mm In the electromagnetic casting device of the present invention, it is preferable that the carbon fiber material is at least one place. As described above, when a square-shaped carbon fiber material is used, the carbon fiber material becomes red hot, and the outer frame of the m-set is heated and smeared, and the outer frame is tightened. The heat generation, the dissolution of the outer frame itself, and the red heat of the bolt for the outer frame fastening are also generated in the electromagnetic casting device in which the heat insulating plate composed of only the heat insulating material is disposed, but the carbon fiber material is enhanced even if it is used. In the case of the thermal insulation board of the material, the condition (heating of the outer frame, bolts, and melt loss) is not improved. (4) Considering that the inductive current from the magnetic force of the heating induction coil flows through the carbon fiber material to make it red hot. , its f彡 波 波 周边 周边 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 1 or 2 pre-drilling, smashing the residual force caused by the magnetic force from the heating induction coil =: 2: the use of the carbon fiber material for the red one! 2H Figure 4 (b), Figure 4 (c) is schematic The ground indicates that for the electromagnetic casting device using water (water cooling _ cross-sectional dimension: 345 Ο Ο 螺 = ====== the part marked with a diagonal line indicates red heat. The gap is not 'when the thermal insulation board carbon fiber material 8a is none When the seam =: domain, the entire surface of the outer periphery of the carbon fiber material 8a becomes red; and the fiber material 8 is also changed, and the inner circumference also becomes red hot. The fastening of the carbon is === where it is; 1 cutting = heat. The red heat is changed. However, the fastening bolt 7 becomes red & otherwise, although the carbon fiber material is cut at two places, as shown in Fig. 4(C), the second (four) fiber material 8a does not become red hot. It is confirmed that the tightening θ is paid by the bolt and the heat is determined by the fact that the carbon fiber is cut at two places, the magnetic field distribution of the induction coil is greatly changed, and the concentration of the induction current 15 201207170 to the bolt is prevented. As shown in Fig. 4(a), Fig. and Fig., the value 吏 is ideal because the cut-off is 1 and the square-shaped carbon fiber is cut in advance: the knife T. The cut portion is not particularly limited. The interval of the cut section of the cut section is such that the discharge is caused between the two faces, and on the other hand, it must be vacant and will not be stably carried out when the heat insulating plate is unsteady. However, the material 枓 因此 因此 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 适当 ’ ’ ’ ’ Considering == the left and right symmetrical parts are cut off (refer to the second embodiment of the electromagnetic casting device of Shi Xi of the present invention, as a reinforcing member for filling the temperature plate with the outer frame of the mold and the retaining frame) For the carbon fiber material, a member made of tantalum carbide or alumina is used. Both the tantalum carbide and the aluminum oxide are non-conductive members, and the induced current due to the magnetic force from the heating induction coil does not occur. Therefore, the reinforcing member does not. It will become red hot, and its influence will not affect the surrounding frame = insects, plugs, tantalum carbide and alumina as reinforcing members for the thermal insulation board. Especially, carbonized niobium is difficult to use due to high price, but carbonization Both niobium and oxidized can fully satisfy the performance required as a reinforcing material for the thermal insulation board. Therefore, it is possible to fully utilize the inductive current flow caused by the magnetic force from the heating induction coil, and thus the materials themselves do not generate heat. Characteristics: ^ 16 201207170 As explained above, the electromagnetic pound fabrication device of the present invention is characterized by: using carbon fiber material or carbon carbide or oxidation The heat insulating material which is filled by the gap between the frames is constructed as ==Γ. Thereby, even if the heat insulating material becomes brittle or does not become n: the heat insulating plate can be easily removed, and The heat insulating material on the carbon fiber material or the like is divided in advance, and the heat insulating material can be effectively utilized without being wasted.
::材料構成的保溫板:溫 螺㈣赤熱等便不會 二粗但藉由在至少1處、較為理想的是於2處切斷碳纖維 材枓，可防止上料框朗栓的赤熱、炼損。 [產業上之可利用性] 板的本發㈣電磁鑄造裝置，便可容祕進行保溫 ，的拆除’並且可實現隔熱材料不被浪費的有效使用。而 :可防止保溫裝置的外框或外框的緊_螺栓的赤熱、 作貝二防止保溫裝置内的溫度環境的變化而進行穩定的操 ^而可製造適合作為太陽電池的基板材料的多晶石夕， 其中無金屬雜質帶來的污染。 因此’本發明可有效地利用於太陽電池的製造領域 ，且可大為有助於自然能源利用技術的進展。 ^本發明已啸佳實施例揭露如上，然其並非用以 ^本發明，任何熟習此技藝者，在謂離本發明之 和關内’當可作些許之更動與潤飾，因此 17 201207170 範圍當視後附之申請糊範_界定者為準。 【圖式簡單說明】 圖！是表示本發明的電磁鱗造裝置 構成例以及使用狀態的縱剖面圖。 孜的概略 圖2是不意性地表示適合於多晶石夕 裝置的構成例的圖。 电磁知 圖3 (a)、圖3 (b)是示意性地表示模與保溫裝 外框之間的間隙以及針對此間隙的對策例的圖，圖3 是整體的立體圖，圖3(b)是圖3(a)的14箭頭剖面圖。 圖4(a)、圖4(b)、圖4(c)是示意性地表示董十於 使用本發明的電磁鑄造裝置來進行矽錠的鑄造時的碳纖維 材料以及外框緊固用螺栓有無赤熱的調查結果的圖圖'斗 (a)是保溫板的碳纖維材料為無縫隙的方形環狀的情况， 圖4 (b)是碳纖維材料的丨處被切斷的情況，圖4 (c) β 兔纖維材料的2處被切斷的情況。 【主要元件符號說明】 模 2 3 4 5 6 7 加熱用感應線圈 保溫裝置 加熱機構 隔熱材料 外框 螺栓 保溫板 18 201207170 :碳纖維材料 •隔熱材料 碎錠::Insulation board composed of materials: Warm snail (4) Red heat, etc. will not be coarse, but by cutting carbon fiber 枓 at at least one place, ideally at 2 places, it can prevent red heat and refining of the loading frame damage. [Industrial Applicability] The board of the present invention (4) Electromagnetic casting device can be used for the purpose of heat preservation and removal, and can effectively use the heat insulating material without being wasted. And: it can prevent the red heat of the outer frame or the outer frame of the heat insulating device, and prevent the temperature environment in the heat insulating device from being stable, and can manufacture a polycrystalline material suitable as a substrate material of the solar battery. Shi Xi, where there is no pollution caused by metal impurities. Therefore, the present invention can be effectively utilized in the field of manufacturing solar cells, and can greatly contribute to the progress of natural energy utilization technology. The present invention has been disclosed in the above, but it is not intended to be used in the present invention. Anyone skilled in the art, in the context of the present invention, can make some changes and refinements, so 17 201207170 The application is subject to the definition of the application. [Simple diagram of the diagram] Figure! It is a longitudinal cross-sectional view showing a configuration example and a state of use of the electromagnetic scale forming apparatus of the present invention. Outline of Fig. 2 Fig. 2 is a view showing an example of a configuration suitable for a polycrystalline stone apparatus. Electromagnetic diagrams 3 (a) and 3 (b) are diagrams schematically showing a gap between the mold and the heat insulating frame and a countermeasure against the gap, and Fig. 3 is a perspective view of the whole, Fig. 3 (b) It is a cross-sectional view of the arrow 14 of Fig. 3(a). 4(a), 4(b), and 4(c) are diagrams showing the presence or absence of the carbon fiber material and the outer frame fastening bolt when the bismuth ingot is cast using the electromagnetic casting apparatus of the present invention. The graph of the red heat survey results is a case where the carbon fiber material of the heat insulating board is a square ring shape without a gap, and Fig. 4 (b) is a case where the carbon fiber material is cut, Fig. 4 (c) Two cases where the β rabbit fiber material was cut. [Main component symbol description] Mold 2 3 4 5 6 7 Induction coil for heating Insulation device Heating mechanism Insulation material Frame Bolt Insulation board 18 201207170 : Carbon fiber material • Insulation material Ingot
G :密閉容器 :支持台 :均熱筒 •原料投入機 :發熱體 :溶融矽 間隙 支持部 19G : sealed container : support table : soaking tube • raw material input machine : heating element : melting 矽 gap support section 19