201204564 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種印刷方法及其裝置’該印刷方法係針 對被印刷物，經由具有特定開口圖案之印刷遮罩並使用到 漿板將黏性印刷材料網版印刷至被印刷物。 【先前技術】 所謂網版印刷’係藉由到漿（利用刮漿板擠出膏劑（印刷 劑））使墨水等膏劑（印刷劑）通過具有開口圖案之網版以將 所期望之圖案轉印至被印刷物之孔版印刷方式之一種，且 用於1C基板之電路配線形成或FDP(Flat Display Panel，平 板顯示器）之圖案形成（電極形成或螢光體填充）等各種用 途0 網版印刷例如亦用於先於在印刷電路板上安裝電子零件 之女裝作業而進行之焊錫膏之印刷。焊錫膏係將焊錫合金 粉末與高黏度液狀助焊劑混合成乳狀者，並經由具有特定 開口圖案之印刷遮罩而轉移至基板上。於該網版印刷中， 廣泛使用有在機械強度等方面優異之金屬製印刷遮罩及金 屬刮漿板。 以下’對於現行之焊錫印刷，將印刷遮罩稱作金屬網 版，將到漿板稱作金屬刮漿板而進行說明。 金屬到漿板係在使其前端部相對於金屬網版之網版面而 傾斜為特定之攻角（angle of attack)(例如70度）之狀態下， 面對表面供給有焊錫膏之網版面施加壓力（印壓）一面沿 印刷方向滑動，藉此經由金屬網版上形成之開口圖案而將 155088.doc 201204564 由焊錫膏構成之圖案轉印至被印刷物上。 於導入焊錫膏印刷步驟中之印刷電路板之印刷面上，存 在由在其前步驟中施用之阻焊劑或電極配線等構成之2〇 μιη〜80 μπι左右之凹凸，因此包含不鏽鋼之厚度約1〇〇 μιη 之金屬網版在印刷時會被該等印刷電路板之凹凸而局部地 上推向上方，從而於金屬遮罩與印刷電路板之間形成間 隙。因此，當金屬刮漿板通過因印刷電路板之印刷面之凸 部而突起之金屬網版之凸部時，將在兩者之間產生縫隙， 從而成為引起印刷不良之原因。 為防止此現象，藉由一面對金屬刮漿板施加較大之印壓 一面進行印刷，以將上述縫隙抑制得較小。因此，先前之 金屬刮漿板係由耐磨損性優異之特種鋼（超硬合金）製造， 以提高其耐久性。又，作為該等問題之解決方案，於曰本 專利特開平10-100374號公報（專利文獻丨）中記述有：於金 屬刮漿板之與印刷方向為相反側之前端部，藉由蝕刻而形 成錐面，以使其易彈性變形，藉此即使進行較小之印壓亦 可進行穩定之印刷’從而降低對金屬網版之網版面之 傷。 、 於日本專利特開平6·210829號公報（專利文獻2)中揭示有 一種金屬刮漿板，其為使與網版面之滑動時之摩擦成為最 小限度，藉由使刮漿板前端部形成為圓狀（剖面圓狐狀）而 減小與網版面之接觸面積，以進行穩定之印刷，並且可防 止網版面易被劃傷。然而，於上述公報中並未揭示其製作 方法’但-般認為該縣板前端部係藉由後加工進行機械 I55088.doc 201204564 研磨等而形成為圓狀。 作為因被印刷物之階差造成的印刷不良之解決方案及金 屬網版之損傷降低方案，係採用使用樹脂製到漿板取代金 屬刮漿板來進行印刷之方法。 以下，對於使用樹脂製刮漿板之網版印刷，將印刷遮罩 稱為網眼網版，將刮漿板稱為胺基甲酸酯刮漿板而進行說 明。 先前之胺基甲酸酯刮漿板有平刮漿板、方刮漿板、劍到 漿板等。例如，作為先前例，可列舉日本專利特公平^ 019275號公報（專利文獻3)中揭示之由橡膠質彈性體形成為 劍狀者。 ~ 作為使平到漿板中成問題之攻角穩定化之方法如日本 專利實開平3-055230號公報（專利文獻4)所揭示般，提出有 一種將玻璃環氧樹脂作為支持體之包含胺基甲酸酯製橡膠 之到漿板。該刮漿板包含：支持體，其基端部安裝於固持 器上；及#漿板冑，其於該支持冑之與基端部對向之前端 部以覆蓋該前端部之方式而—體地㈣。上述支持體之材 質係設為具有彈性恢復力之玻璃環氧樹脂製，並且將其形 狀设為平板狀。 又，刮漿板部係將其材質設為胺基曱酸酯橡膠製，於與 進行刮浆之雜板前端部對向之㈣板另—端部遍及寬度 方向而叹有槽部，纟以夾持支持體之前端部之方式而一體 地固著。 根據該先前例’藉由使用此種構成之载板，並以其基 155088.doc 201204564 2部側固定於輯器上，可於網版面上進行舰。此時， 若長時間地進行到漿，則即使刮漿板部之前端部因墨水之 办劑而發生變化（膨潤），由於將支持體之材質設為玻璃環 氧樹月曰製，因此刮漿板整體之腰力亦不會發生變化，而可 穩定地進行到漿。 又，作為以玻璃環氧樹脂為支持體之包含胺基甲酸酯製 橡膠之刮漿板之改善方案，於曰本專利特開2〇〇5 319816 號Α報（專利文獻5)中提出有一種刮漿板，其可藉由使到漿 板部具備充分之厚度而遍及刮漿板部之側面及底部形成錐 部0 根據該先前例，為設定目標攻角，可藉由遍及刮漿板部 之側面及底部實施角度研磨加工，而形成錐部。因此，無 須藉由刮漿板對印刷裝置之安裝進行角度調節，而可實現 所期望之攻角。 進而，於Microtek股份有限公司首頁（非專利文獻丨）上， 揭不有一種刮漿板（Micro-Squeegee :註冊商標），其遍及 到漿板部之側面及底部而實施有尺形狀之研磨加工。雖刮201204564 VI. Description of the Invention: [Technical Field] The present invention relates to a printing method and apparatus therefor. The printing method is directed to a printed matter, which is viscous printed via a printing mask having a specific opening pattern and used to a pulp sheet. The material is screen printed onto the printed matter. [Prior Art] The so-called screen printing 'transfers a desired pattern by passing a paste (printing agent) such as ink through a screen having an opening pattern by slurry (using a squeegee extrusion paste (printing agent)). Various types of stencil printing methods, such as circuit wiring formation for 1C substrates, pattern formation (electrode formation or phosphor filling) of FDP (Flat Display Panel), etc. Solder paste printing for women's work prior to the installation of electronic components on printed circuit boards. Solder paste is a product in which a solder alloy powder is mixed with a high-viscosity liquid flux into a milky form and transferred to a substrate via a printing mask having a specific opening pattern. In this screen printing, a metal printing mask and a metal squeegee which are excellent in mechanical strength and the like are widely used. In the following, for the current solder printing, the printing mask is referred to as a metal screen, and the pulp sheet is referred to as a metal squeegee. The metal-to-plasma board is applied with a surface of the surface of the metal screen which is inclined at a specific angle of attack (for example, 70 degrees) with respect to the screen surface of the metal screen. The pressure (printing pressure) is slid in the printing direction, whereby the pattern of the solder paste formed by the 155088.doc 201204564 is transferred onto the object to be printed via the opening pattern formed on the metal screen. In the printed surface of the printed circuit board in the step of introducing the solder paste printing, there are irregularities of about 2 μm to 80 μπm which are formed by the solder resist or the electrode wiring applied in the preceding step, and therefore the thickness of the stainless steel is about 1 The metal screen of 〇〇μιη is partially pushed upward by the unevenness of the printed circuit boards during printing, thereby forming a gap between the metal mask and the printed circuit board. Therefore, when the metal squeegee passes through the convex portion of the metallic screen which is protruded by the convex portion of the printed surface of the printed circuit board, a gap is formed therebetween, which causes a printing failure. To prevent this, printing is performed while applying a large printing pressure to the metal squeegee to suppress the gap. Therefore, the prior metal squeegee is made of a special steel (superhard alloy) excellent in abrasion resistance to improve its durability. In the case of the metal squeegee, the end portion opposite to the printing direction is etched by the end of the metal squeegee. The tapered surface is formed so as to be elastically deformed, whereby stable printing can be performed even with a small printing pressure, thereby reducing the damage to the screen surface of the metal screen. A metal squeegee is disclosed in Japanese Laid-Open Patent Publication No. Hei 06.210829 (Patent Document 2), which minimizes friction when sliding against a screen surface by forming the front end portion of the squeegee plate as It is round (cross-sectional rounded fox shape) and reduces the contact area with the screen surface for stable printing and prevents the screen surface from being scratched. However, the method for producing the same is not disclosed in the above publication, but it is generally considered that the front end portion of the county plate is formed into a circular shape by grinding the machine I50088.doc 201204564 or the like by post-processing. As a solution to the printing failure caused by the step difference of the printed matter and the damage reduction scheme of the metal screen, a method of printing using a resin-to-slurry board instead of a metal squeegee is used. Hereinafter, for screen printing using a resin squeegee, the printing mask will be referred to as a mesh screen, and the squeegee will be referred to as a urethane squeegee. Previous urethane squeegees have flat squeegees, square squeegees, swords to slabs, and the like. For example, as a prior art, a rubbery elastomer is formed into a sword shape as disclosed in Japanese Patent Publication No. 019275 (Patent Document 3). As a method of stabilizing the angle of attack which is a problem in the flat sheet, as disclosed in Japanese Laid-Open Patent Publication No. Hei-3-055230 (Patent Document 4), there is proposed an amine containing a glass epoxy resin as a support. The rubber of the urethane is applied to the pulp board. The squeegee plate comprises: a support body, the base end portion of which is mounted on the holder; and a # pulp plate 胄, the body end portion of the support 胄 opposite the base end portion covers the front end portion Ground (4). The material of the above-mentioned support is made of a glass epoxy resin having an elastic restoring force, and its shape is a flat plate shape. Further, the squeegee portion is made of an amino phthalate rubber, and the groove portion is slid in the width direction of the other end portion of the (four) plate opposite to the tip end portion of the squeegee. The front end of the support body is clamped and integrally fixed. According to this prior example, the ship can be carried out on the screen surface by using the carrier plate of such a configuration and fixing it to the assembler with its base 155088.doc 201204564. In this case, if the slurry is applied to the slurry for a long period of time, even if the front end portion of the squeegee portion is changed (swelled) by the ink agent, the material of the support is made of glass epoxy tree, so scrape The overall waist strength of the pulp board does not change, but can be stably carried out to the pulp. Further, as an improvement of a squeegee comprising a urethane rubber using a glass epoxy resin as a support, it is proposed in Japanese Patent Application Laid-Open No. Hei. A squeegee plate capable of forming a taper portion over a side surface and a bottom portion of a squeegee portion by having a sufficient thickness to the slab portion. According to the previous example, the target angle of attack can be set by squeezing the squeegee. The side and the bottom of the part are subjected to angle grinding to form a tapered portion. Therefore, the desired angle of attack can be achieved without angular adjustment of the mounting of the printing unit by the squeegee. Further, on the top page of Microtek Co., Ltd. (Non-Patent Document 丨), there is no squeegee (Micro-Squeegee: registered trademark) which is subjected to the grinding process of the ruler shape over the side and bottom of the pulp plate portion. . Although scraping
漿板與印刷面之攻角相同，但藉由將到漿板前端加工成R 形狀，可期待防止印刷時之膏劑向刮漿板側面之凸起之效 果。 作為用於網版印刷之金屬遮罩，有組合網型者，其於印 刷遮罩版框内之空間配置金屬板，使上述金屬板經由在該 金屬板與上述印刷遮罩版框之間遍及其全周而設置之張力 網而以緊繃狀態支持於上述印刷遮罩版框。 1550S8,doc 201204564 該印刷遮罩係對在上述金屬板上，於與在其上移動之刮 漿板之移動區域對應之印刷有效區域内形成有特定圖案之 開口的印刷遮罩進行製版而用於網版印刷。 上述印刷遮罩係用於藉由使被印刷物之上表面對向於金 屬遮罩之下表面，使刮漿板於金屬遮罩之上表面滑動，而 向金屬遮罩上所設置的開口部内填充膏劑之後，使被印刷 物離開金屬遮罩，藉此使印刷材料轉印至被印刷物上。 於上述金屬板上’在印刷有效區域内利用雷射加工、鍍 敷法、飯刻法等而形成特定圖案乏開口。 例如’於姓刻法中’藉由於上述金屬板之整個區域，對 兩面塗佈光阻劑，並使用特定圖案之曝光遮罩對該光阻劑 膜進行曝光處理之後進行蝕刻處理而形成。 再者，網版印刷法例如用於電極配線於電子元件、印刷 電路板上之印刷，框狀密封材於液晶顯示器用基板上之印 刷，介電質層、像素間隔壁或電極配線及螢光材料於電漿 顯示器用基板上之印刷等各種印刷，上述網狀遮罩之大 小、即絲網（screen mesh)之面積或印刷遮罩版框之尺寸及 張力網之寬度等係視其用途而設計。 .、、;、而隨著近年來的表面安裝零件之小型化，印刷電路 板之焊墊之面積變小，伴隨於此，印刷遮罩之開口部之面 積亦變小。 如此，相對於開口面積較小之開口部，於專利文獻1所 揭不之刮衆板’即’藉由㈣而形成有錐面之金屬刮漿板 中將焊錫膏擠入印刷遮罩之開口部内之力不足，因此印 155088.doc 201204564 刷電路板之焊墊與開口部内之焊錫膏之接著性變得不夠充 分’其結果’有時會產生焊錫膏殘留於印刷遮罩之開口部 内’焊錫膏無法印刷（轉印）至印刷電路板之焊墊，或者印 刷之膏劑之量不足之缺陷。 一般認為，金屬刮漿板與胺基甲酸酯製之橡膠到漿板相 比，其將焊錫膏擠入印刷遮罩之開口部内之力較弱，從而 會產生上述缺陷。 又’一般而言，對於金屬刮漿板之前端部要求高精度之 平坦度、平面度，但上述先前之金屬刮漿板於其生產時， 亦包括素材（原材料）在内，須利用放電加工等來進行刮漿 板前端部之微細加工，因此存在成本變得非常高之問題。 進而，對於刮漿板前端部，為減小摩擦阻力，進行穩定的 印刷，而實施以鐵氟龍（註冊商標）被廣為知曉之聚四氟乙 烯等之塗佈處理，但其亦會成為使金屬刮漿板變為高成本 之原因。 進而，於由超硬合金製之金屬刮漿板進行較高之印壓而 受到滑動接觸作用之金屬網版之網版面，其劃痕較大，尤 其於自如上所述之印刷電路板側突起之突部處較為顯著。 即’使用先前之金厲刮漿板進行穩定之印刷時，存在金屬 網版側之損傷較大之問題。 一般而言，刮漿板包含刮漿板部及安裝於到漿板固持器 上之固持器安裝部。到聚板固持器係藉由安裝刮毁板之固 持器安裝部而固定刮漿板。職㈣持器相對於印刷面而 具備特；t之角度。該㈣板固持器安裝於印表機底座之安 155088.doc -10· 201204564 裝角度可調整為所期望之角度。 到漿板部係控制成一面對絲網給予適合於網版印刷之印 壓’ 一面以適合於網版印刷之速度沿絲網之表面移動。於 到浆板部與絲網抵接之處承受印壓。於刮漿板部與絲網抵 接之處’將絲網朝向被印刷物之表面下壓而使網版上形成 之開口圖案之圖像印刷至被印刷物之表面。因此，要進行 馬品質之印刷’關鍵在於絲網被網版框均等且平衡良好地 拉伸，且與銷繃緊。又，刮漿板與網版較為理想的是形成 線接觸。進而’接觸線較為理想的是直線。 刮漿板以固定之角度抵接於印刷面，對印刷面給予印 壓。因此’會因刮漿板之前端部撓曲而存在刮漿板與印刷 面之角度（稱為攻角）無法保持固定角度之不良。即，於先 前之平到漿板中’存在於印刷過程中攻角會發生變化之問 通。然而，於被印刷物（例如，上述之印刷電路板）具有凹 凸之情形時，存在藉由平刮漿板之撓曲而追隨該凹凸之優 點。 於先前之平刮漿板中，由於到漿板部整體具備一樣之彈 性而無腰力，因此對安裝於印刷裝置之固持器安裝部使用 金屬以使刮漿板之形狀穩定，從而確保腰力或硬度。又， 由於刮漿板部整體具備一樣之彈性，因此存在難以保持攻 角固定之缺點。 又，於先則之方刮漿板或劍到漿板中，存在無法進行機 械研磨，難以獲得印刷面與刮漿板之抵接面之直線性之問 題。 155088.doc -11- 201204564 又’於專利文獻4及專利文獻5中揭示之刮漿板，即，以 玻璃環氧樹脂為支持體之包含胺基曱酸酯製橡膠之刮漿板 中’可抑制平刮漿板中成為問題之整體撓曲，但在印刷時 焊錫膏會在刮漿板之侧面凸起，因此將焊錫膏擠入印刷遮 罩之開口部内之力不足，印刷電路板之焊墊與開口部内之 焊錫膏之接著性變得不夠充分，其結果，有時會產生焊錫 膏殘留於印刷遮罩之開口部内，焊錫膏無法印刷（轉印）至 印刷電路板之焊塾，或者所印刷之膏劑之量不足之不良。 一般而言，使用網狀遮罩之網版印刷係與使用金屬遮罩 之網版印刷不同，於藉由刮漿板之印刷之前，必須在印刷 遮罩上（網版面側）藉由刮刀來塗佈膏劑。即，當塗佈膏劑 並利用印刷遮罩（網狀遮罩）之開口部内存在之網來保持膏 劑，且藉由刮漿板進行印刷時，可增多膏劑之喷出量。相 反地，金屬遮罩由於不存在圖案開口部内保持之構件，因 此無法於印刷遮罩上塗佈膏劑。 於使用金屬遮罩之情形時，係以一個方向之動作完成印 刷，因此印刷所耗之時間與必須塗佈膏劑之網狀遮罩相比 可縮短。 網狀遮罩係於印刷遮罩與被印刷物之間設置間隙 (clearance) ’從而可與印刷大致同時地進行脫版。 另一方面，金屬遮罩係使印刷遮罩與被印刷物密接而未 5又置間隙（clearance)，因此必須在印刷後進行脫版步驟（分 離印刷遮罩與被印刷物之步驟）。 因此，關鍵在於即使使用網狀遮罩，亦與金屬遮罩同樣 155088.doc 201204564 7一個方向之動作完成印刷n ...^ 於^尚對印刷遮罩之開口圖案之填充性的 之“佈與進行自印刷遮罩向被印刷物之轉印之印刷功 能之構造成為課題。 般而。’膏劑藉由施加剪切力（shear f。叫而流 動性變好’因此藉由滾動可降低黏度，提高流動性。在使 用刮衆板進行印刷的同時，《高膏劑之滾動性，提高印刷 性(填充性、轉印性)亦成為課題。 進而*使用到漿板印刷膏劑時，膏劑會沿與印刷遮罩 :’、才反側之刮漿板側面凸起’因此膏劑對印刷遮罩之填充 不足亦成為課題。 找出兼具可解決此種課題之特長之刮漿板前端之構造成 為課題。 又’膏劑係II由刮漿板之前端部而填充至印刷遮罩上形 成之開口圖案内，因此刮漿板前端部之形狀會影響膏劑向 印刷遮罩之填充性，因此，可較先前之刮漿板進—步提高 填充性之刮漿板前端構造成為課題。尤其，因到漿板之前 端與被印刷物之印刷面之攻角，施加至膏劑之力之方向會 發生變化，因此，自大致垂直方向朝向印刷遮罩上形成之 開口圖案内填充膏劑成為課題。 另一方面’由於對刮漿板施加因印壓造成的負載，因此 前端部會發生變形。如上所述，由於胺基曱酸酯製之平刮 名板整體上產生撓曲，因此刮聚板前端之攻角會變得非常 小’且會因被印刷物之階差而導致其攻角發生變動。當攻 155088.doc •13· 201204564 角發生變動時，則向印刷遮罩之開口部之填充性會發生變 化，因此降低填充性之不均成為課題。 有時需根據印刷對象物而對印刷遮軍區分使用金屬遮 罩周狀遮罩等。製成對於任何印刷遮罩均可對應之印刷 裝置成為課題。又，作為印刷遮罩，將膏劑以所期望之量 穩定地轉印至被印刷物成為課題。 、進而’視印刷對象物而❹之㈣不同。㈣係將固體 成刀與液體成》混合而成之高黏性物質，從而製成可視目 的而使用其固體成分將焊錫組成之粒子、銀粒子、鱗片狀 銀粒子、以鎳為主成分之粒子、由金屬被覆之樹脂粒子、 ㈣粒子'玻⑽子+之至少—種材料作為主成分之膏劑 的印刷裝置成為課題。 【發明内容】 本發明係有ϋ於上述問題而完成，其提供—種可搭載無 論印刷遮罩之開Π部之開口面積之大小如何，均可精度良 好且穩定地將焊錫膏印刷至印刷電路板之焊塾之到浆板的 印刷裝置。即，本發明提供一種印刷方法及其裝置，其對 具有所期望之開σ部之印刷遮罩填充、轉印膏劑時，促進 膏劑之滾動，並促進膏劑向印刷遮罩之開口部之填充性， 並且對刮漿板前端部進行加工，以沿相對於印刷遮罩之開 口 4而垂直之方向對膏劑施加力，且可搭載該到漿板。 對本案所揭示之發明中之代表性的概要簡單說明如下。 於到漿板之安裝時，有使到漿板向與印刷方向相反方向 4貝斜之情形與使到漿板向印刷方向傾斜之情形。於使刮漿 I55088.doc -14· 201204564 板向與tp刷方向相反方向傾斜之情形時，膏劑所接觸之到 聚板面之方向與刮策板之安裝角度實質上垂直。另一方 面，於使到漿板向印刷方向傾斜之情形時，膏劑所接觸之 W漿板面之方向與到漿板之安裝角度實質上相同。 於刮立板之安裝方法為任—者之情形時，於使用到浆板 自於特定位置具有開σ部之印刷遮罩將膏劑轉印至固定於 載台上的被印刷物之特定位置的印刷裝置中，均具有以下 特徵·刮漿板前端之一個角具有圓弧狀之凹形狀，並使到 漿板與上述被印刷物之印刷面之攻角小於刮裝板之安裝角 度。 "藉此，將膏劑封入到漿板前端之圓弧狀之凹形狀部内， 從而可於藉由刮漿（刮漿板一面對印刷遮罩之網版面施加 壓印壓）一面沿印刷方向滑動）之步驟中，使膏劑沿刮漿 板前端之圓狐狀之凹形狀滾動。 若為了減小攻角而減小刮漿板之安裝角度，則施加印壓 之刮漿板頭之殼體與到漿板前端接觸印刷遮罩之部位會產 生相對的位置偏移，從而無法有效地對刮锻板前端部施加 印壓。即’若力點產生相對的位置偏移，則旋轉力矩將發 揮作用，此時，印壓越高，於刮漿板前端越成為與印壓為 相反方向的力。 因此，對到漿板頭施加印壓之方向與刮漿板前端部之印 刷遮罩之接觸點較為理想的是相同方向。 具有以下特徵，即，在刮漿板前端圓弧狀之凹形狀之一 方接觸印刷遮罩之狀態下，刮漿板前端之圓弧狀之凹形狀 155088.doc •15· 201204564 之另一方與印刷遮罩之間隙為所使用之膏劑之平均粒徑之 ίο倍以上且丨mm以下。到漿板前端之圓弧狀之凹形狀之另 方係扣刮漿板前端之加工成圓弧狀的凹形狀中未接觸印 刷遮罩之前端部。 、該前端部與印刷遮罩之間隙係與所用膏劑中含有之固體 成分之粒子之大小相關。若刮t板接觸印刷遮罩，則不僅 會於P刷遮罩之開σ部内填充膏劑，而且有可能會向印刷 遮罩之被印刷物側喷出。隨後，原本有助於印刷之刮漿板 之前端將到達印刷遮罩之開口部，因此會發生二次印刷之 狀況。 與膏劑向印刷遮罩之開口圖案部内之填充同樣地，相對 於膏劑中之固體成分之粒徑，開口圖案部必需為至少10倍 、上之大小。於開口圖案部較其小之情形時，將會阻礙膏 劑之流動性’於開口圖案部產生因膏财之粒子造成之堵 塞從而無法良好地使膏劑透過。因此，刮漿板與印刷遮 罩之間隙必須至少空出所用膏劑之平均粒徑之1G倍以上的 另一方面，若將到漿板與印刷遮罩之間隙空出丨以 上，則無法使膏劑封入刮漿板前端之圓弧狀之凹形狀部 内，從而成為對膏劑施加之壓力開放，向印刷遮罩之開口 圖案部填充之力變弱的原0。目此，到漿板與印刷遮罩之 間隙較為理想的是1 mm以下。 刮漿板與印刷遮罩之間隙越小，施加至膏劑之力越大， 對印刷遮罩之開口圖案部之填充性越提高。 155088.doc • 16- 201204564 如此，藉由將與印刷遮罩接觸之刮漿板前端部分加工成 特殊形狀，可具有將膏劑於印刷遮罩上塗佈成特定量之厚 度之功能、使膏劑滚動之功能、及將膏劑填充至印刷遮罩 之開口部之功能。 此處’特徵在於’所用刮漿板之材質係以胺基曱酸醋為 主成分之樹脂’其硬度為80度以上。若硬度較低，則即使 使用抑制刮漿板變形之支持體作為支撐，刮漿板前端亦會 因印刷時之印壓而發生變形，從而刮漿板與印刷面之攻角 變得不穩定。 若為金屬刮漿板，則可製作硬度非常高者，但於印刷電 路板之印刷面存在由其前步驟中實施之阻輝劑或電極配線 等所形成之凹凸，因而對刮漿板之前端要求柔軟性。 又’於本發明之印刷方法及其裝置中’作為印刷遮罩， 可使用以包含具有特定開口部之金屬板為特徵之印刷遮罩 (金屬遮罩）’進而，可使用以於該金屬板之被印刷物面側 包含有機物層為特徵之印刷遮罩。 於本發明之印刷方法及其裝置中 .作為印刷遮 罩’可使用以圖案形点F # E1A篇 •Ί ^ ^ °°域至〉'由金屬網及包含有機物之 狀遮罩）。 八特疋開口部為特徵之印刷遮罩（網 明：印刷方法及其裝置中所使用之印刷遮罩 、不限疋於此處說明之金屬遮罩、網狀遮罩等。 根據本發明之印刷方 部之開口面積之大小如打裝置，無細印刷遮罩之開 AJ如何，均可精度良好且穩定地印刷, 155088.doc 201204564 劑。 本發明之此等特徵及優勢將自如在隨附圖式中所說明之 本發明較佳實施例之以下更特定描述而顯而易見。 【實施方式】 於以下之實施形態中，在方便性上有其必要時分割成複 數個部分或實施形態來進行說明，但除了特別明示之情形 以外’其等並非彼此無關聯者’而處於一者為另一者之一 部分或全部之變形例、詳細、補充說明等之關係。 又，於以下之實施形態中，於言及要素之數等（包括個 數、數值、量、範圍等）之情形時，除了特別明示之情形 及原理上明確限定為特定數之情形等以外，並不限定於該 特定數，既可為特定數以上亦可為特定數以下。 於用於說明本實施形態之所有圖中，具有相同功能者標 註相同之符號，原則上省略其重複說明。以下，根據圖式 而詳細說明本發明之實施形態。 [實施例1] 使用圖1說明實施例丨之印刷裝置100之構成。圖丨係本實 施例1之印刷裝置100之正視圖。圖丨令為了簡化而省略了 裝置之基座及側壁、支柱、支持構件等之表示。 印刷裝置100具備印刷遮罩部11〇、被印刷物支持台部 23、1對到漿板部120L及120R、刮漿板驅動機構部13〇及控 制部21。 印刷遮罩部110係具備設有對應於被印刷物（例如印刷電 板）6之所期望之電路圖案而穿設之圖案開口部的金屬遮 155088.doc 201204564 罩11、包圍金屬遮罩11之以張力網保持緊端狀態之俯視矩 形狀之版框22、及支持該版框之支持構件lu而構成。被 印刷物支持台部23具備載置被印刷物6之載台23 i、固定載 台23 1上所載置之被印刷物6之夹盤部232及上下驅動載 台231之上下驅動部233。 到漿板部120L具備刮漿板1L、刮漿板固持器几、刮漿 板固持器固定夾具16L、刮漿板頭15L及氣缸24L。刮漿板 部120R亦同樣地具備刮漿板1R、刮漿板固持器3R、刮漿 板固持器固定夾具16R、刮漿板頭15R及氣缸24R。將氣缸 24L及24R固定於支持構件25，對與氣缸2礼及24R分別連 接之到漿板部120L及刮漿板部120R進行上下驅動。又，支 持構件25係由與驅動軸27卡合之軸承部26L及26R支持。 驅動軸2 7係由滾珠螺桿構成，藉由利用馬達3 〇進行旋轉 驅動，而與驅動轴27卡合之軸承部26L及26R於圖中之左右 方向上移動，且到漿板部120L及刮漿板部12〇尺沿導引轴28 於圖中之左右方向上移動。驅動軸27與導引軸28係由左右 1對固定板29L及29R支持。 控制部21控制印刷裝置100之各部分之動作。首先，利 用來自控制部21之控制信號’控制對1對氣缸24L及24R進 行驅動之氣缸驅動部31，藉此分別驅動1對氣缸24L及 24R。又，利用來自控制部21之控制信號，控制馬達3〇之 驅動部32而使馬達30向正反方向旋轉。進而，利用來自控 制部21之控制信號，控制對被印刷物支持台部23之夾盤部 232進行驅動之夾盤驅動部34而進行固定载台231上所載置 155088.doc -19- 201204564 之被印刷物6之夾盤部232之開閉動作β進而，利用來自控 制部21之控制信號，控制對被印刷物支持台部23之上下驅 動部233進行驅動之載台驅動部33，而使載台231上下移 動。進而，利用來自控制部21之控制信號，控制被印刷物 支持台部23之夾盤232之驅動部34，而進行夾盤232之開 閉。 使用圖2之流程圖說明具備以上構成之印刷裝置之動 作。首先’藉由未圖不之搬送機構搬送被印刷物6以載置 於被印刷物支持台23上（S201) ’利用夾盤部232將被印刷 物6固定並保持於被印刷物支持台23上。繼而，由載台驅 動部32驅動上下驅動部233而使載台231上升（S202)，使被 印刷物6密接於印刷遮罩部11〇之金屬遮罩丨丨。繼而，由氣 缸驅動部31驅動氣缸24L而使刮漿板頭15L下降（S203)，使 刮楽·板1L密接於金屬遮罩11(S204)°此時，1對刮裝板部 120L及120R位於圖1之左端之部分。 繼而，在此狀態下，藉由未圖示之焊錫膏供給機構將焊 錫膏供給至刮漿板1L之附近（S205) ^供給焊錫膏後控制驅 動部32來驅動馬達30，使由滾珠螺桿構成之驅動軸”旋 轉’藉此將1對刮浆板部l2〇LA120R及安裝於其前端之刮 聚板1L在按壓至金屬遮罩U之狀態下沿金屬遮罩丨丨自圖丄 之左側朝向右側移動’藉此將由焊錫膏構成之金屬遮罩^ 之圖案印刷至被印刷物6上（S206)。 於刮聚板1L移動特定距離之後，驅動部“停止馬達3〇之 驅動而使刮漿板1L之移動停止。繼而，士 # 由虱缸驅動部31驅 155088.doc -20- 201204564 動氣缸24L而使刮漿板頭15L上升（S207)，使刮漿板il自金 屬遮罩11離開。繼而’由載台驅動部3 3控制上下驅動部 233而使載台231下降（S208)，自金屬遮罩η剝離由夾盤部 232所保持之被印刷物6。 當載台23 1到達下降端後，停止上下驅動部233對載台 231之加工’控制夹盤驅動部34開放保持被印刷物6之夾盤 部232 ’藉由未圖示之操作機構自載台231取出被印刷物 6(S209)。判定該取出之基板是否為處理之最後的基板 (S210)，若為最後則結束處理。 另一方面’於有接下來要處理之基板之情形時，再次執 行自S2〇l開始之處理流程。然而，於此情形時，係進行於 S203中使刮衆板頭15R下降，於S204、S206、S207中將刮 漿板1L替換為1R之處理。又，使密接於金屬遮罩丨丨之到漿 板1R自圖1之右側朝向左側移動而進行網版印刷。如此， 交替使用刮漿板1L及1R進行網版印刷，藉此所供給之焊錫 膏始終相對於與金屬遮罩密接之到漿板之行進方向而位於 前方’藉此，可有效地使用焊錫膏。 繼而’對於1對刮漿板部120L及120R之構成，說明若干 個具體例。 首先，使用圖3A對刮漿板部120L之構造之第1例進行說 明。再者’到漿板部120R之構造僅與刮漿板部12〇L為對 象’且為基本上相同之構造。到漿板丨L係以相對於印刷方 向2而向反方向傾斜之方式藉由刮漿板固持器按壓板礼而 固定於刮漿板固持器3L。於刮漿板固持器3L上，設有到漿 155088.doc •21- 201204564 板安裝面7L，該刮漿板安裝面7L係用於將刮漿板1L相對 於印刷遮罩表面5、被印刷物6之印刷面或被印刷物支持台 (圖1之231)之被印刷物支持面（上表面）傾斜為特定角度而 支持。於刮漿板1L上，在其前端部之與印刷遮罩（金屬遮 罩）11接觸之角上形成有圓弧狀之凹形狀部8L。 於進行印刷時，焊錫膏9最先接觸與刮漿板1L之安裝面 7L之角度本質上垂直的刮漿板之膏劑初始接觸面丨〇l，於 金屬遮罩11上塗佈焊錫膏9的同時，向金屬遮罩11上形成 之印刷遮罩開口部12内插入焊錫膏9 »進而，焊錫膏9於刮 毁板前端之圓弧狀之凹形狀部8L内滾動，且焊錫膏9經由 金屬遮罩11上形成之印刷遮罩之圖案開口部丨2而填充至到 達被印刷物6上之電極焊墊13為止。於被印刷物6上，由阻 焊劑14覆蓋電極焊墊13之特定圖案開口以外之部分。 使用圖3B及C ’對焊錫膏9於刮漿板1L前端之圓弧狀之 凹形狀部8L内滾動，並經由印刷遮罩之圖案開口部丨2而到 達被印刷物6上之電極焊墊14進行詳細說明。 首先’使用圖3B，將於使刮漿板1L 一面抵壓至金屬遮 罩11 一面沿箭頭2之方向移動時’焊錫膏9自刮漿板前端之 圓弧狀之凹形狀部8L經由金屬遮罩11上形成之印刷遮罩之 圖案開口部12而填充至被印刷物6上之電極焊墊13上的情 形依照（a)〜(e)之時間序列進行排列並模式性地進行說明。 (a)表示到漿板1L前端之圓弧狀之凹形狀部几尚未到達 金屬遮罩11上形成之印刷遮罩之圖案開口部12之狀態。若 刮榮板1L前端之角部81L在抵壓至金屬遮罩^之表面5之狀 lSS088.doc •22· 201204564 態下沿箭頭2之方向移動，則供給至刮漿板1L之行進方向 刖面的知錫膏9被刮漿板i L之膏劑初始接觸面i 〇L擠壓而沿 與刮漿板1L相同之方向移動，且一部分自刮漿板iL前端之 圓弧狀之凹形狀部8L前端之角部82L與金屬遮罩u之間的 間隙G進入圓弧狀之凹形狀部扎之内側（一），碰觸於金屬 遮罩11之表面5所抵壓之到漿板匕之前端的角部8lL而向上 方退避（二），進而沿圓弧狀之凹形狀部扎之上表面自間隙 G向到漿板1L之膏劑初始接觸面1〇L之侧被擠出（三）。 若刮漿板1L沿箭頭方向進一步行進而如（b)所示般，刮 漿板1L前端之圓弧狀之凹形狀部8L前端之角部8几到達金 屬遮罩11上形成之印刷遮罩之圖案開口部12上方，則沿圓 弧狀之凹形狀部8L之上表面自間隙（^向刮漿板兀之膏劑初 始接觸面10L之側擠出的焊錫膏之一部分被擠入印刷遮罩 之圖案開口部12(四）。 若刮漿板1L沿箭頭方向進一步行進而如（c)所示般，刮 漿板1L前端之圓弧狀之凹形狀部8L到達金屬遮罩u上形成 之印刷遮罩之圖案開口部12上方，則將焊錫膏擠入印刷遮 罩之圖案開口部12内之力不再起作用，從而如與（&)之狀態 相同般，自到漿板1L前端之圓弧狀之凹形狀部儿前端之角 部82L與金屬遮罩11之間的間隙〇進入圓弧狀之凹形狀部 8L之内側的焊錫膏9會沿圓弧狀之凹形狀部礼之上表面自 間隙G向刮漿板1L之膏劑初始接觸面1〇L之側被擠出（三）。 若刮漿板1L沿箭頭方向進一步行進而如（句所示般，按 壓至金屬遮罩11之刮漿板1L前端之圓弧狀之凹形狀部化的 155088.doc -23- 201204564 則於圆弧 角部8 1L到達印刷遮罩之圖案開口部丨2之上方 狀之凹形狀部8L之内部碰觸角部81L之焊錫膏之一部分被 擠入印刷遮罩之圖案開口部12内（五），剩餘部分向上方退 避（二），並沿圓弧狀之凹形狀部乩之上表面自間隙G向到 漿板1L之膏劑初始接觸面之側被擠出（三）。 若刮漿板1L沿箭頭方向進一步行進而如（e)所示般，刮 漿板1L前端之圓弧狀之凹形狀部8L之角部81L通過印刷遮 罩之圖案開口部12，則藉由圆案開口部12之網版印刷結 束0 此處，使用圖3C進一步詳細說明於圖38之（}3)中焊錫膏 於圓弧狀之凹形狀部8L之内部滾動而其一部分被擠入印刷 遮罩之圖案開口部12之内部的狀態。 於圖3C中，以箭頭表示到漿板1L前端之圓弧狀之凹形 狀部8L中之焊錫膏9的與刮漿板1 l之相對位置之變化。再 者，於圖3C中標註於表示焊錫膏9之運動之箭頭的 (一）〜（七）與圖3B中記載之（一）〜（五）並無直接關聯。 於刮漿板1L之下端之邊緣部giL在按壓至金屬遮罩11之 狀態下，由刮漿板驅動機構13〇驅動而向箭頭2之方向行進 時’供給至刮漿板1L前方之焊錫膏9自（一）之位置起，自 刮漿板1L上形成之凹部8L之與金屬遮罩丨丨接觸之側的相反 側之端部82L與金屬遮罩11之間之間隙〇進入凹部8L内部 若刮楽板1L進一步沿箭頭2之方向行進，則進入凹部8L 内部之焊錫膏9由於凹部8L之端部81L與金屬遮罩11接觸而 155088.doc -24· 201204564 被端部81L向上方上壓（三），從而被逆向擠回（四）。若到漿 板1L進一步沿箭頭2之方向行進，則焊錫膏9沿凹部8L之壁 面朝向端部82L之方向而向下流動（五），並於端部82L之前 端部進一步向下流動’而其一部分被擠入金屬遮罩丨丨上形 成之開口部12之内部（六），從而以焊錫膏9填充開口部12之 内部，並與被印刷物6上之電極焊墊13連接。 未進入開口部12内之焊錫膏9自端部82L與金屬遮罩11之 間隙G向刮漿板之膏劑初始接觸面1〇L之侧被排出（七）。 即，進入凹部8L内部之焊錫膏9於凹部扎之内部滾動並再 次排出至凹部8L外部。 如此，於刮漿板1L沿箭頭2之方向行進時，自刮漿板i L 上形成之凹部8L之端部82L與金屬遮罩π之間之間隙〇進 入凹部8L内部的焊錫膏9於凹部8L内部滾動並自端部82L 與金屬遮罩11之間之間隙G排出至凹部8L外側時，其一部 分被擠入金屬遮罩11上形成之開口部丨2内部，藉此將焊錫 膏確實地填充至開口部12内部。 用於印刷之印刷遮罩110係於印刷遮罩版框22内之空間 配置金屬板11，並使上述金屬板丨丨經由在該金屬板丨丨與上 述印刷遮罩版框22之間遍及其全周而設置的張力網（未圖 示）以緊繃狀態支持於上述印刷遮罩版框22的組合網型 者。 該印刷遮罩110係於上述金屬板丨丨上，在與於其上移動 之刮漿板1L之移動區域對應之印刷有效區域内形成特定圖 案之開口 12而進行製版並用於印刷者。 155088.doc -25- 201204564 使用圖4對本實施例1之印刷裝置1 〇〇上搭載之刮漿板機 構進行說明。如圖3A中所說明般，固定有刮漿板1L之刮 聚板固持器3L係固定於到漿板頭15L且以與獨立移動之成 對之另一刮漿板頭15R對向之方式而設置。刮漿板頭15L與 15R係使用刮漿板固持器安裝角度設定夾具2〇L及2〇R來設 疋角度’並藉由刮漿板固持器固定夾具丨6L及i 6R固定到漿 板固持器3L及3R，以獲得金屬遮罩u之表面5與到漿板1L 及1R之特定之攻角》 對於本實施例1之印刷裝置1〇〇上搭載之刮漿板前端構 造，舉刮漿板1L為例使用圖5進行說明。刮漿板…係以安 裝角17(相對於水平方向之角度）安裝於刮漿板固持器3L(參 照圖3 )。本實施例1中，刮漿板1 l對到漿板固持器3 L之安 裝角17為35。。於刮漿板1L之前端部，在與印刷遮罩η接 觸之角部81形成有圆弧狀之凹形狀部8L。該圓弧狀之凹形 狀部8L係形成為在刮漿板1L以安裝角17L安裝於刮漿板固 持器3L之狀態下使角部81與印刷遮罩11接觸時，於圓狐狀 之凹形狀部8L之另一端82L與印刷遮罩11之表面5之間產生 縫隙G。 如使用圖3B及C所說明般’為了於圓弧狀之凹形狀部几 内部滾動之焊錫膏9通過圓弧狀之凹形狀部8L之另一端82L 與印刷遮罩11之表面5之間之縫隙G而向刮漿板匕之焊錫膏 初始接觸面10L之侧排出時使刮漿板1L產生按壓之力，必 須於通過縫隙G時使焊錫膏9形成朝下之流動。因此，作為 圓弧狀之凹形狀部8L之另一端82L之條件，只要以圖58所 155088.doc -26- 201204564 示之另一端82L的圓弧狀之凹形狀部8L之切線相對於金屬 遮罩11之表面5之角度GL為5度至80度之範圍之值的方式形 成圓弧狀之凹形狀部8L即可。 與到漿板1L對到漿板固持器3l之安裝角17L之角度本質 上垂直的刮漿板之膏劑初始接觸面i 〇L與印刷遮罩表面 5(刮漿板接觸面）、被印刷物6之印刷面或被印刷物支持台 231之被印刷物6支持面之角度為膏劑初始接觸面角18L。 本實施例1中，膏劑初始接觸面角18L為55。。 另一方面’於到漿板1L與印刷遮罩η接觸之位置81L， 刮漿板1L與印刷遮罩表面5之刮漿板接觸面之角度為攻角 19L。本實施例1中’改變攻角丨9L來驗證印刷狀況。 於使用膏劑初始接觸面角18L於印刷遮罩11之表面5上塗 佈焊錫膏9之同時，可向印刷遮罩丨丨上形成之圖案開口部 12内插入焊錫膏9。進而，焊錫膏9於刮漿板匕前端之圓弧 狀之凹形狀部8L之内側強制性地滾動，沿相對於印刷遮罩 11上形成之圖案開口部12而垂直之方向對焊錫膏9施加 力，從而能以攻角19L將焊錫膏9經由印刷遮罩1丨上形成之 圖案開口部而填充至到達被印刷物6上之電極焊墊13為 止。 本實施例之刮漿板1L之特徵在於，於到漿板匕之前端具 有圓弧狀之凹形狀部8L，與膏劑初始接觸面角i 8L相比， 攻角19L較小《再者，對於刮漿板1R，亦於前端設置圓弧 狀之凹形狀部8R，藉此可獲得與刮漿板^之情形同樣之效 果。 155088.doc •27· 201204564 作為實施例1之驗證實驗中使用之焊錫膏，使用（A): LF-204-15(TAMURA KAKEN股份有限公司製造，焊錫粒 子之粒徑：1〜12 μιη)及（B) : M705-BPS7-T1J(千住金屬工 業股份有限公司製造’焊錫粒子之粒徑：1〜6 μιη)，並使 用以胺基甲酸酯為主成分之樹脂之到漿板，對於印刷遮罩 11使用於厚度70 μιη之金屬板上形成有直徑5〇 μιη〜2〇〇 μιη 之圖案開口部12的金屬遮罩而進行網版印刷。 使刮漿板1向與印刷方向相反之方向傾斜，刮漿板1之到 漿板固持器安裝角設為35。，赍劑初始接觸面角18(刮漿板 先接觸膏劑之刮漿板面之方向之角度）設為55。。 又，作為用於驗證之刮漿板，使用以胺基甲酸酯為主成 分之樹脂。 於圖案開口部12中，圖案開口部12之壁面之面積除以圖 案開口部之面積所得之值為印刷指標。即，以該印刷指標 為2.8以上可實現焊錫膏之良好之轉印為目標。 實驗結果為，於使用（Α)作為焊錫膏之情形時，若未與 印刷遮罩11接觸之刮衆板前端部8 2 L與印刷遮罩表面5之間 隙G窄於0.12 mm，則會阻礙烊錫膏9流動至刮漿板前端形 成之圓弧狀之凹形狀部8内，從而轉印之辉錫膏量將變 少。 又’於使用（B)作為焊錫膏之情形時，若未與印刷遮罩 11接觸之到漿板前端部82與印刷遮罩表面5之間隙G窄於 〇.〇6随，則會阻礙焊錫膏9流動至刮聚板前端形成之圓弧 狀之凹形狀部8内，從而轉印之焊錫膏量將變少。 155088.doc -28- 201204564 另一方面，若未與印刷遮罩11接觸之刮漿板前端部8 2L 與印刷遮罩表面5之間隙G寬於1 mm，則於印刷時無法將 焊錫膏封入於刮漿板前端形成之圓弧狀之凹形狀部8内， 而會自圓弧狀之凹形狀部8内漏出，對填充至印刷遮罩i i 之圖案開口部12内的焊錫膏9施加之力將變弱，因此填充 量及轉印量不足》 由該實驗之結果可知，在刮毁板前端形成之圓弧_狀之凹 形狀部8L之一方81L接觸印刷遮罩表面5之狀態下，刮漿板 前端之圓弧狀之凹形狀部8L之另一方82L與印刷遮罩表面5 之間隙G必須為所用膏劑之平均粒徑之10倍以上且1 mm以 下。刮漿板前端之圓弧狀之凹形狀部8L之另一方係指刮聚 板前端之加工成圓弧狀之凹形狀中未接觸印刷遮罩表面5 之前端部82L。 又，作為比較例，亦進行使用圖6所示之未對到漿板前 端進行加工之刮漿板及實施有直線狀之傾斜研磨加工之到 漿板時的印刷實驗》 其結果，於使用圖6之（b)所示之未實施前端部分之加工 之刮漿板時，若圖案之開口部12之直徑不為15〇 pm以上， 則無法實現良好之圖案印刷。又，於如圖6之（^所示般使 用對前端部進行有加工之到漿板時，若圖案之開口部丨之之 直徑不為120 μιη以上，則無法實現良好之圖案印刷。 另一方面，於如圖6(d)般使用由複數個面形成凹形狀之 刮槳板進行印刷時，獲得與使闕6⑷之剖面由圓弧形成 凹形狀之刮聚板進行印刷時大致同等之結果，可對金屬遮 155088.doc -29- 201204564 罩上形成之直徑50 μηι〜200 良好地進行網版印刷。 之圖案開口部12之所有圖案 如此，本實施形態1之印刷裝置可搭載無論印刷遮罩u 之開口部之開口面積之大小如何，均可精度良好且穩定地 印刷膏劑之刮漿板。因此，藉由將到漿板前端部加工成特 殊之形狀’而於膏劑向具有所期望之開口部之印刷遮罩“ 之圖案開口部12之填充、膏劑向被印刷物之轉印時，可促 進膏劑之滾動，促進膏劑向印刷遮罩11之開口部^内之填 充性，並且可於與印刷遮罩丨丨之開口部12大致垂直之方向 上對膏劑附加填充之力。 [實施例2] 本實施例2除了對印刷遮罩u使用網狀遮罩以外，與上 述實施例1同樣。 本實施形態2中，對印刷遮罩u使用網。作為網，使用 利用線徑1 6 μηι、紗厚35 μηι之高強度線材之#325平紋織 物對於該網，使用藉由厚度35 μηι及厚度5 5 μηι之乳劑而 形成有直徑50 μιη〜2〇〇 μιη之圖案開口部之網狀遮罩。 為使用網張力進行印刷遮罩11與被印刷物ό之脫版，將 印刷遮罩之張力設為0.2 mm以下（以PROTEK股份有限公司 製造之張力計STG-80NA進行測定）。 用於本實施形態2中所用之印刷遮罩u的金屬網具有 40%以上之開口率，金屬網中使用之線徑必須小於金屬網 之開口寬度之一半。 於網狀遮罩上形成之圖案開口部12中，圖案開口部12之 155088.doc •30· 201204564 壁面之面積除以圖案開口部之面積所得之值為印刷指標。 即’作為本實施形態2之目標，設為該印刷指標為Η以上 可實現焊錫膏之良好之轉印。 實施例2中，存在網狀遮罩與被印刷物6之間隙，因此與 使用實施例1中所用之金屬遮罩的接觸印刷不@，在到漿 板前端形成之BJ弧狀之凹形狀料之—方吼接觸印刷遮 ㈣之表面5之狀態下，網狀遮罩並非水平而成為傾斜狀 態。因此’到漿板1L前端之圓弧狀之凹形狀部扎之另一方 82L與印刷遮罩表面5之間隙〇變小。 刮漿板前端之圓弧狀之凹形狀部扎之另一方82l與印刷 遮罩表面5之間隙G必須為所用膏劑之平均粒徑之⑺倍以上 且1 mm以下。刮漿板前端之圓弧狀之凹形狀部8之另一方 係指刮漿板1L前端之加工成圓弧狀之凹形狀部乩中未接觸 網狀遮罩之前端部82L。 本實施例2中使用之焊錫膏9之焊錫粒子之粒徑與實施例 1之情形同樣為12 μηι以下，因此未與網狀遮罩接觸之到漿 板前端部82與印刷遮罩表面5之間隙G設為〇 6 。若刮漿 板接觸網狀遮罩，則不僅會於網狀遮罩之開口部内填充膏 劑，亦會向網狀遮罩之被印刷物側喷出，隨後，於原本有 助於印刷之到漿板之前端到達網狀遮罩之開口部時，成為 二次印刷之狀況。因此，膏劑將滲出至網狀遮罩與被印刷 物之間’從而產生污跡。 於使用（A)之LF-204-15作為焊錫膏時，若未與網狀遮罩 接觸之刮漿板1L之前端部82L與印刷遮罩之間隙窄於〇12 155088.doc •31- 201204564 mm，則會阻礙焊錫膏9流動至刮漿板il前端形成之圓弧狀 之凹形狀部8L内，從而轉印之焊錫膏量將變少。 又’於使用（B)之M705-BPS7-T1J時，若未與網狀遮罩接 觸之刮槳板前端部82L與印刷遮罩表面5之間隙G窄於〇.〇6 mm ’則會阻礙焊錫膏流動至刮漿板匕前端形成之圓弧狀 之凹形狀部8内，從而轉印之焊錫膏量將變少。 另一方面’若未與網狀遮罩接觸之刮漿板1L之前端部82 與印刷遮罩表面5之間隙G寬於1 mm，則於印刷時無法將 焊錫膏封入於刮漿板1L前端形成之圓弧狀之凹形狀部几 内，而會自圓弧狀之凹形狀部8内漏出，對填充至網狀遮 罩之圖案開口部12内的焊錫膏施加之力將變弱，因此填充 量及轉印量不足。 本實施例2中驗證印刷狀況之結果為，獲得與實施例丄中 驗扭印刷狀況之結果同樣之結果。即，可對網狀遮罩上形 成之直徑50 μπι〜200 μιη之圖案開口部12之所有圖案良好地 進行網版印刷。 如此，本實施形態2之印刷裝置可搭載無論印刷遮罩t i 之開口部12之開口面積之大小如何，均可精度良好且穩定 地印刷膏劑9之到漿板。因此，藉由將刮漿板前端部加工 成特殊之形狀，而於膏劑向具有所期望之開口部之印刷遮 罩11之圖案開口部12之填充、膏劑向被印刷物之轉印時， 可促進膏劑9之滾動，促進膏劑向印刷遮罩u之開口部12 内之填充性，並且可於與印刷遮罩“之開口部12大致垂直 之方向上對膏劑9附加填充之力。 155088.doc •32- 201204564 [實施例3] 使用圖7對本實施例3之印刷裝置中搭載之刮漿板構造進 行說明。本實施例3中使用之到漿板係使用平到漿板、將 玻璃環氧樹脂板727作為支持體而插入到漿板中 心之刮漿 板71 〇 本實施例3令使用之到漿板71之前端形狀之概略圖如圖8 所示。於圖8 _，為了說明刮漿板71之前端形狀，以平到 漿板為例，表示有刮漿板構造之主要部分放大圖。 本實施例3中，將到漿板71之安裝方向設為與實施例1之 情形相反之方向’並使到漿板1朝向與印刷方向2相同之方 向傾斜。除了改變刮漿板71之形狀以外，與上述實施例1 同樣。實施例3中使用之印刷裝置之構成基本上與圖丨中說 明之構成相同，且將圖1之到漿板部12〇L&12〇R替換為圖7 所示之構成及與其成對之構成者，因此省略整體構成圖之 說明。 於刮漿板之安裝中，有如實施例丨及2般使到漿板丨向與 印刷方向2相反之方向傾斜之情形、與如本實施例3般使到 衆板71向印刷方向2傾斜之情形。於如實施例⑴般使到 漿板1向與印刷方向2相反之方向傾斜時，膏劑9所接觸之 刮漿板1之面10與刮漿板1之安裝角度17實質上垂直。另一 方面’於本實施例3中，於使到漿板71向印刷方向2傾斜 時，膏劑9所接觸之到聚板71之面71〇之方向與刮漿板71之 安裝角度717實質上相同。 於本實施例中亦為—種印刷裝置，其使用刮漿㈣自於 155088.doc •33- 201204564 特定位置具有開口部12之印刷遮罩丨1將膏劑9轉印至載台 23 1上固定之被印刷物6之特定位置，其特徵在於：刮漿板 71之前端之一個角具有圓弧狀之凹形狀78，且使刮漿板71 與上述被印刷物6之印刷面之攻角719小於到漿板71之安裝 角度718。 藉此，於刮漿板71前端之圓弧狀之凹形狀78之内部封入 有膏劑，可利用藉由刮漿（刮漿板71 —面對印刷遮罩11之 網版面施加壓力（印壓）一面沿印刷方向滑動）之步驟，使膏 劑9沿刮漿板71前端之圓弧狀之凹形狀部78滾動。 本實施例3中使用之刮漿板係使用以胺基甲酸酯為主成 分之樹脂。 如圖9所示’若為了減小攻角719而減小刮漿板71之安裝 角度717，則施加印壓之到漿板頭715與刮漿板”前端接觸 印刷遮罩表面5之部位78丨會產生相對的位置偏移，因此無 法有效地對刮漿板71之前端部施加印壓。即，若力點產生 相對的位置偏移，則旋轉力矩將發揮作用，此時，施加的 印壓越高，於到漿板前端越成為與印壓為相反方向之力。 因此，將對刮漿板頭715施加印壓之方向與到漿板71前 知部接觸印刷遮罩表面5之接觸點781調整成大致相同方 向。 例3中，在到漿板71前端形成之圓弧狀之凹形狀 P之方781接觸印刷遮罩11之狀態下，刮漿板71前端 圓5狀之凹形狀部78之另一方782與印刷遮罩表面5之間 _須為所用膏劑9之平均粒徑之ι〇倍以上且i疆以 15S088.doc ，34- 201204564 下。刮漿板71前端之圓弧狀之凹形狀部78之另一方係指刮 漿板71前端之加工成圓弧狀之凹形狀部78中未接觸印刷遮 罩表面5之前端部782。 本實施例3中使用之烊錫膏9之焊錫粒子之粒徑為12 μηι 以下’因此未與印刷遮罩11接觸之刮漿板前端部782與印 刷遮罩表面5之間隙G設為0.3 mm。若刮漿板71接觸印刷遮 罩11，則不僅會於印刷遮罩11之開口部12内填充膏劑，亦 會向印刷遮罩11之被印刷物6側喷出，隨後，於原本有助 於印刷之刮漿板之前端到達印刷遮罩丨〗之開口部12時，成 為二次印刷之狀況。因此，膏劑將滲出至印刷遮罩丨丨與被 印刷物6之間，從而產生汙跡。 於使用A作為谭錫膏時，若未與印刷遮罩11接觸之到聚 板前端部782與印刷遮罩表面5之間隙〇窄於0.12 mm，則會 阻礙焊錫膏流動至刮漿板前端形成之圓弧狀之凹形狀部78 内，從而轉印之焊錫膏量將變少。 又’於使用B作為焊錫膏時，若未與印刷遮罩11接觸之 刮聚板前端部782與印刷遮罩表面5之間隙G窄於0.06 mm， 則會阻礙焊錫膏9流動至刮漿板前端形成之圓弧狀之凹形 狀部78内，從而轉印之焊錫膏量將變少。 另一方面’若未與印刷遮罩11接觸之刮漿板71之前端部 782與印刷遮罩表面5之間隙〇寬於1 mm，則於印刷時無法 將焊錫膏封入刮漿板前端形成之圓弧狀之凹形狀部78内， 而會自圓弧狀之凹形狀部78内漏出，對填充至印刷遮罩【i 之圖案開口部12内的焊錫膏9施加之力將變弱，因此填充 155088.doc •35- 201204564 量及轉印量不足。 本實施例3中，與實施例〗同樣地，對於印刷遮罩丨丨，使 用於厚度70 μηι之金屬板上形成有直徑5〇 μιη〜2〇〇 之圖 案開口部12之印刷遮罩丨！。 本實施例3中，使刮漿板71向與印刷方向2相同之方向傾 斜，到漿板71對刮漿板固持器73之安裝角717設為7〇。，膏 劑初始接觸面角718(刮漿板71先接觸膏劑9之刮漿板71面 之方白之角度）設為與對刮漿板固持器73之安裝角717實質 上相同的70。。關於到漿板71與印刷遮罩u之到漿板接觸 面之角度，改變攻角719而進行研究。關於印刷狀況，驗 證對印刷遮罩Μ圖案開口部12之填充性、對被印刷物之 轉印性。 本實施例3中驗證印刷狀況之結果為，獲得與實施例1中 驗證印刷狀況之結果同樣之結果。 如此本實施形態3之印刷裝置可搭載無論印刷遮罩i j 之開口部12之開口面積之大小如何，均可精度良好且穩定 地印刷膏劑之刮漿板。因此，藉由將刮漿板71前端部加工 成特殊之形狀，而於膏劑向具有所期望之開口部12之印刷 遮罩η之開口圖案部12之填充、資劑向被印刷物之轉印 時可促進膏劑之滾動，促進膏劑向印刷遮罩i i之開口部 12内之填充性，並且可於與印刷遮罩丨丨之開口部以大致垂 直之方向上對赍劑附加填充之力。 [實施例4] 本實施例4中，將刮衆板安裝方向設為與實施例i相反之 155088.doc •36· 201204564 方向’㈣衆板向與印刷方向2相同之方向傾斜。改變刮 漿板之形狀，除此以外與上述實施例2同樣。 本實施例4中驗證印刷狀況之結果為，獲得與實施例2中 驗證印刷狀況之結果同樣之結果。 如此，本實施形態4之印刷裝置可搭載無論印刷遮罩u 之開口部12之開σ面積之大小如何，均可精度良好且穩定 地印刷骨劑之到談板i。因&，藉由將刮疑板前端部加工 成特殊之形狀，而於膏劑向具有所期望之開口部之印刷遮 罩11之開口圖案部12之填充、膏劑向被印刷物之轉印時， 可促進膏劑之滾動，促進膏劑向印刷遮罩i i之開口部12内 之填充性，並且可於與印刷遮罩π之開口部12大致垂直之 方向上對膏劑附加填充之力。 [實施例5] 本實施例5除了對使用之膏劑進行各種改變以外，與上 述實施例1〜4同樣。 於本發明之印刷裝置中，所使用之膏劑為固體成分與液 體成分混合而成之高黏性物質，可使用其固體成分以焊錫 組成之粒子、銀粒子、鱗片狀銀粒子、以鎳為主成分之粒 子、由金屬被覆之球狀樹脂粒子、陶瓷粒子、玻璃粒子中 之至少1種材料為主成分者，對於適用該等膏劑之對象 物’將其特徵及印刷結果表示如下。 使用焊錫組成之粒子作為固體成分之膏劑係用於印刷電 路板之焊墊凸塊等之表面安裝技術、半導體晶圓之焊墊凸 塊等之焊錫連接端子形成等。所使用之焊錫組成之粒子之 155088.doc -37- 201204564 形狀為大致球形。 焊錫組成之粒子之粒徑可在丨μιη左右至3〇 μηι左右之範 圍内根據所使用之圖案來選定。此時，考慮到開口部之膏 劑之流動性，將印刷遮罩η上形成之開口圖案12之大小設 為焊錫組成之粒子之粒徑之10倍以上，藉此於本實施形態 中’亦可進行與實施形態1〜4同樣之良好之印刷。 即，於焊錫組成之粒子為丨μιη之粒徑時，必須將開口圖 案之尺寸設為ίο μϊη以上，於焊錫組成之粒子為3〇 μιη之粒 徑時，必須將開口圓案之尺寸設為3〇〇 μηι以上。為形成微 細之圖案’必須使用微細粒徑之焊錫組成之粒子。 又，使用銀粒子作為固體成分之膏劑係用於低溫般燒陶 瓷之配線圖案形成、太陽電池之電極形成等。所使用之銀 粒子之形狀為大致球形。 銀粒子之粒徑為2 nm左右至10 μιη左右，於形成微細之 配線圖案時，必須使用微細粒徑之粒子。 另一方面，關於太陽電池之電極形成中使用之銀膏劑， 由於必須減小電極之配線電阻，故而要求使配線圖案之膜 厚形成得較厚及以低溫進行煅燒，因此必須使用數μηι以 上之粒彳空之粒子與數nm之粒徑之粒子混合而成之膏劑。若 配線寬度為5 0 μιη ’則所使用之銀粒子之粒徑為5 μιη以下 有效。於本實施形態中，由於提高了轉印性，因此可獲得 配線圖案形狀為高縱橫比且亦可對應於微細配線之良好之 印刷結果。 又’使用鱗片狀銀粒子作為固體成分之膏劑係對印刷電 155088.doc -38 · 201204564 路板之零件搭載時使用之導電性接著劑，隨著電子零件之 小型化，用於向具有突起電極之基板之搭载等。鱗片狀銀 粒子係對銀粒子施加壓力而加工成箔狀者，為異形之粒 子。該膏劑的特徵在於，由於要利用接觸阻力確保導電 性，因此不太要求印刷圖案之轉印尺寸精度，但於本實施 形態中，由於可改善喷出性，因此不會發生局部性的塗佈 不良’而可確實地進行印刷。 又，使用以鎳為主成分之粒子作為固體成分之膏劑係用 於必須形成超薄膜之導電體之電容器等。其特徵在於，以 鎳為主成分之粒子之粒徑為10 nm左右至1〇〇 nm左右且 降低膏劑之黏度而具有流動性。 若紗厚變薄，則保持膏劑之量將變少。於增多噴出量 時’較為理想的是加厚紗厚m對於微細之電極 配線圖案形成或電容器之薄膜電極形成，較為理想的是紗 厚較薄。於必須較織造後之紗厚更薄時，使用藉由以輥對 網進行壓延而具有所期望之紗厚之網。可根據適用之元件 來選定網之種類（網目數、開口率、線徑、紗厚等）。 於本實施形態5中，由於可改善喷出性，因此可實現均 勻且非常薄的膜之圖案形成，從而可獲得良好之印刷紝 果。 、口 另一方面，使用由金屬被覆之球狀樹脂粒子作為固體成 分之膏劑係異向性導電膏，用於顯示II之端子、即使電阻 高於金屬接合亦容許電性連接之對印刷電路板之零件搭載 等。其特徵在於，由金屬被覆之樹脂粒子之粒徑為10叩 155088.doc -39- 201204564 左右，印刷圖案係塗佈於所搭載之零件之焊塾部之整個 面。於本實施形態中，由於可改善喷出性，因此不會發生 局部性的塗佈不良，可獲得良好之印刷結果。 使用陶瓷粒子作為固體成分之膏劑係用於低溫煅燒陶瓷 之介電質圖案形成、電子電路之絕緣性圖案形成、對於銅 箔聚醯亞胺膜之蝕刻用抗蝕劑之圖案形成、太陽電池之絕 緣層劃線用圖案形成等。於本實施形態中，由於具有確實 的轉印性能，因此不會發生局部性的斷線不良，可獲得良 好之印刷結果。 使用玻璃粒子作為固體成分之膏劑係用於作為煅燒助劑 而向銀膏劑内之添加、低溫煅燒陶瓷之介電質圖案形成、 電子電路之絕緣性圖案形成等。 陶瓷粒子及玻璃粒子係藉由粉碎而製造，因此為破碎形 狀。於該等情形時，必須將所使用之印刷遮罩之開口圖案 設為平均粒徑之1 〇倍以上。 本實施形態5中使用之刮漿板丨中，刮漿板前端之一個角 具有圆弧狀之凹形狀部8，且使刮漿板與上述被印刷物之 印刷面之攻角小於刮漿板1先接觸膏劑之刮漿板面之方向 之角度18(使刮漿板向與印刷方向相反之方向傾斜時）或者 刮漿板之安裝角度（使刮漿板向與印刷方向相同之方向傾 斜時），藉此可製成對於該等所有膏劑，無論印刷遮罩" 之圖案開口部12之開口面積之大小.如何，均可精度良好且 穩定地進行印刷之印刷裝置。 如上所述，對本發明之實施態樣進行了說明，但業者可 I55088.doc •40· 201204564 根據上述說明實施各種代替例、修正或變形，本發明於不 脫離其主旨之範圍内包括上述之各種代替例、修正或變 形。 如此，本實施形態5之印刷裝置可搭載無論印刷遮罩u 之圖案開口部12之開口面積之大小如何，均可精度良好且 穩定地印刷膏劑之刮漿板丨。因此，藉由將刮漿板前端部 加工成特殊之形狀，而於膏劑向具有所期望之開口部之印 刷遮罩11之開口圖案部12之填充、膏劑向被印刷物之轉印 時，可促進膏劑之滾動，促進膏劑向印刷遮罩丨〖之開口部 12内之填充性，並且可於與印刷遮罩丨丨之開口部12大致垂 直之方向上對膏劑附加填充之力。 本發明可以其他特定形式體現，而不偏離其精神或本質 特性。應認為本發明之實施例在所有方面為說明性而非限 制性，本發明之範疇由附加申請專利範圍，而非由以上描 述指示，且因此希望屬於申請專利範圍等效物之含義及範 圍内的所有改變涵蓋於申請專利範圍中。 【圖式簡單說明】 圖1係表示實施例1之印刷裝置之概略構成之方塊圖。 圖2係表示利用實施例1之印刷裝置進行網版印刷之處理 流程之流程圖。 圖3 A係表示搭載於實施例1之印刷裝置中之刮漿板機構 之概略構成之刮漿板機構的側視圖。 圖3B(a)〜(e)係對利用實施例1之印刷裝置中搭載之刮漿 板機構進行網版印刷時之刮漿板相對於遮罩之運動與刮漿 155088.doc -41- 201204564 板前端部分之焊錫膏之流動狀態進行說明的圖。 圖3C係對利用實施例1之印刷裝置中搭載之到漿板機構 進行網版印刷時之刮漿板前端部分之焊錫膏之流動狀態進 行說明的圖》 圖4係表示實施例i中使用之i對刮漿板機構之概略構成 之刮漿板機構的側視圖。 圖5(a)、（b)係實施例1中使用之到漿板機構之前端部分 之放大圖。 圖6(a)〜(d)係於實施例1中用於評價實驗之各種刮漿板前 端形狀之概略圖。 圖7係表示實施例3中使用之到聚板機構之概略構成之刮 漿板機構的側視圖，且係對前端形狀進行說明之刮漿板構 造之主要部分放大圖。 圖8⑷〜⑷係於實施例3中用於評價實驗之各種到浆板前 端形狀之概略圖。 圖9係實施例3中使用之到漿柘拗糂 瓦板機構之前端部分之放大 圖。 【主要元件符號說明】 1、1L、1R、71 刮漿板 2 印刷方向 3、3L、3R、73 到漿板固持器 4L 刮漿板固持器按壓板 5 印刷遮罩表面 6 被印刷物 155088.doc -42· 201204564 7L 刮漿板安裝面 8、8L、78 刮漿板前端之圓弧狀之凹形狀部 9 焊錫膏 10L 膏劑初始接觸面 11 印刷遮罩 12 開口部 13 電極焊墊 14 阻焊劑 15L、15R、715 刮漿板頭 16L、16R 刮漿板固持器固定夾具 17L、717 安裝角 18L、718 膏劑初始接觸面角 19L、719 攻角 20L、20R 刮漿板固持器安裝角度設定夾具 21 控制板 22 版框 23 被印刷物支持台部 24L、24R 氣缸 25 支持構件 26L、26R 軸承部 27 驅動軸 28 導引軸 29L、29R 固定板 30 馬達 155088.doc •43- 201204564 31 氣缸驅動部 32 馬達之驅動部 33 載台驅動部 34 夾盤驅動部 81L、 82L 端部 100 印刷裝置 110 印刷遮罩部 111 支持構件 120L 、120R 刮漿板部 130 刮漿板驅動機構部 231 載台 232 夾盤部 233 上下驅動部 710 刮漿板之面 727 玻璃環氧樹脂板 781 接觸點 782 前端部 G 間隙 S201- -S210 步驟 0L 角度 -44- I55088.docThe angle of attack of the pulp sheet is the same as that of the printing surface, but by processing the front end of the pulp sheet into an R shape, it is expected to prevent the effect of the paste on the side of the squeegee during printing. As a metal mask for screen printing, there is a combination net type in which a metal plate is disposed in a space in a printed mask frame, and the metal plate is passed between the metal plate and the printed mask frame. The tension mesh is provided throughout the circumference to support the above-mentioned printed mask frame in a tight state. 1550S8, doc 201204564 The printing mask is used for making a printing mask on the metal plate which is formed with an opening of a specific pattern in a printing effective area corresponding to a moving area of the squeegee moving thereon. Screen printing. The printing mask is used for filling the opening portion of the metal mask by sliding the upper surface of the printed object toward the lower surface of the metal mask to slide the squeegee on the upper surface of the metal mask. After the paste, the printed matter is caused to leave the metal mask, thereby transferring the printed material onto the printed matter. On the metal plate, a specific pattern lack opening is formed by laser processing, plating, rice carving, or the like in the printing effective area. For example, in the case of the above-mentioned metal plate, a photoresist is applied to both surfaces of the metal plate, and the photoresist film is exposed to light using an exposure mask of a specific pattern, followed by etching treatment. Further, the screen printing method is used, for example, for printing electrode wiring on electronic components and printed circuit boards, printing of frame-shaped sealing materials on substrates for liquid crystal displays, dielectric layers, pixel partition walls or electrode wiring, and fluorescent light. Various types of printing such as printing on a substrate for a plasma display, the size of the mesh mask, that is, the area of a screen mesh, the size of a printed mask frame, and the width of a tension mesh are used depending on the purpose. design. . With the miniaturization of surface mount components in recent years, the area of the pad of the printed circuit board is reduced, and as a result, the area of the opening of the printed mask is also reduced. As described above, with respect to the opening portion having a small opening area, the scratch panel which is not disclosed in Patent Document 1 is an opening in which a solder paste is extruded into a printing mask in a metal squeegee having a tapered surface formed by (4) The power inside the department is not enough, so it is printed 155088. Doc 201204564 The adhesion between the solder pads of the brush board and the solder paste in the opening becomes insufficient. [The result is that solder paste remains in the opening of the print mask. Solder paste cannot be printed (transferred) to printing. The solder pad of the board, or the defect of the amount of the printed paste. It is considered that the metal squeegee has a weaker force to squeeze the solder paste into the opening of the printing mask than the rubber made of urethane to the slab, thereby causing the above defects. In addition, in general, high precision flatness and flatness are required for the front end of the metal squeegee, but the above-mentioned metal squeegee must also use electric discharge machining in its production, including materials (raw materials). Since the micromachining of the tip end portion of the squeegee is performed, there is a problem that the cost becomes extremely high. Further, in order to reduce the frictional resistance and to perform stable printing, the front end portion of the squeegee is subjected to a coating treatment such as Teflon which is widely known as Teflon (registered trademark), but it also becomes The reason why the metal squeegee becomes a high cost. Further, in the screen surface of the metal screen which is subjected to the sliding contact by the metal squeegee made of the super-hard alloy, the scratch is large, especially from the side of the printed circuit board as described above. The protrusion is more prominent. That is, when the stable printing is performed using the previous gold squeegee, there is a problem that the damage on the metal screen side is large. In general, the squeegee plate includes a squeegee portion and a holder mounting portion that is mounted to the pad holder. The squeegee is attached to the slab retainer by mounting the retainer mounting portion of the scraping plate. The position (4) holder has a special angle with respect to the printing surface; The (four) board holder is mounted on the base of the printer 155088. Doc -10· 201204564 The angle of attachment can be adjusted to the desired angle. The blade section is controlled to face the screen to give a print suitable for screen printing' one side moving along the surface of the screen at a speed suitable for screen printing. The printing is carried out where the pulp plate portion abuts the screen. At the point where the squeegee portion abuts against the screen, the screen is pressed toward the surface of the printed matter to print an image of the opening pattern formed on the screen onto the surface of the object to be printed. Therefore, it is important to perform the printing of the horse quality. The key is that the screen is stretched evenly and in a well-balanced manner by the screen frame, and is tight with the pin. Further, it is preferable that the squeegee and the screen are in line contact. Further, the contact line is preferably a straight line. The squeegee abuts against the printing surface at a fixed angle, and the printing surface is pressed. Therefore, there is a possibility that the angle between the squeegee and the printing surface (referred to as the angle of attack) cannot be maintained at a fixed angle due to the deflection of the front end portion of the squeegee. That is, there is a problem in that the angle of attack changes during the printing process. However, when the printed matter (e.g., the above-mentioned printed circuit board) has a convex or convex shape, there is an advantage that the unevenness is followed by the deflection of the flat squeegee. In the conventional flat squeegee, since the entire blade portion has the same elasticity and no waist force, metal is used for the holder mounting portion mounted on the printing device to stabilize the shape of the squeegee plate, thereby ensuring the waist force. Or hardness. Further, since the entire squeegee portion has the same elasticity, it is difficult to maintain the angle of attack fixed. Further, in the case of the first squeegee or the sword to the slab, there is a problem that mechanical grinding cannot be performed, and it is difficult to obtain the linearity of the abutting surface of the printing surface and the squeegee. 155088. Doc -11-201204564 Further, the squeegee disclosed in Patent Document 4 and Patent Document 5, that is, a squeegee comprising a metal phthalate rubber made of a glass epoxy resin as a support can be suppressed in the squeegee The overall deflection of the squeegee is a problem, but the solder paste will bulge on the side of the squeegee during printing, so the force of squeezing the solder paste into the opening of the printing mask is insufficient, and the solder pads of the printed circuit board are The adhesion of the solder paste in the opening portion is insufficient, and as a result, the solder paste may remain in the opening of the printing mask, the solder paste may not be printed (transferred) to the soldering pad of the printed circuit board, or printed. The amount of the ointment is insufficient. In general, the screen printing system using a mesh mask is different from the screen printing using a metal mask. Before printing by the squeegee, it is necessary to use a doctor blade on the printing mask (the screen side). Apply a paste. That is, when the paste is applied and the paste is held by the net in the opening of the printing mask (mesh mask), and the printing is performed by the squeegee, the amount of the paste can be increased. Conversely, since the metal mask does not have a member held in the pattern opening portion, the paste cannot be applied to the printing mask. In the case of using a metal mask, the printing is completed in one direction, so that the printing takes a shorter time than the mesh mask to which the paste must be applied. The mesh mask is provided with a clearance between the printing mask and the object to be printed so that the film can be released at substantially the same time as the printing. On the other hand, the metal mask is such that the printing mask is in close contact with the object to be printed, and the clearance is not performed. Therefore, it is necessary to perform a stripping step (step of separating the printing mask from the object to be printed) after printing. Therefore, the key is that even with a mesh mask, it is the same as a metal mask 155088. Doc 201204564 7 The action of one direction is completed printing n. . . ^ The structure of the printing function of the printing of the opening pattern of the printing mask and the printing function from the printing mask to the printed matter is a problem. Generally, the paste is applied by applying a shearing force ( Shear f. The fluidity is improved. Therefore, the viscosity can be lowered by rolling, and the fluidity can be improved. The printing property of the high-paste agent can be improved while the printing property is used (filling property, transferability). It is also a problem. Further, when a paste-printing paste is used, the paste will protrude along the side of the printing mask: ', and the side of the squeegee on the opposite side. Therefore, the filling of the printing mask by the paste is also insufficient. The structure of the front end of the squeegee having the advantages of solving such a problem is a problem. The 'paste system II is filled in the opening pattern formed on the printing mask from the front end portion of the squeegee, so the front end portion of the squeegee The shape affects the filling of the paste into the printing mask. Therefore, the front end structure of the squeegee which can improve the filling property more than the previous squeegee is a problem. In particular, the printing of the front end of the slab and the printed matter is caused. At the angle of attack, the direction of the force applied to the paste changes. Therefore, filling the paste into the opening pattern formed on the printing mask from a substantially vertical direction becomes a problem. On the other hand, the application of the squeegee to the squeegee is caused by the printing pressure. The load is deformed at the front end portion. As described above, since the flat scratch plate made of the amine phthalate is deflected as a whole, the angle of attack of the front end of the scraping plate becomes very small' and The difference in the printed matter caused the angle of attack to change. When attacking 155088. Doc •13· 201204564 When the angle changes, the filling property of the opening of the printing mask changes. Therefore, it is a problem to reduce the unevenness of the filling property. In some cases, it is necessary to use a metal mask, a peripheral mask, etc., depending on the object to be printed. It has become a problem to produce a printing apparatus that can correspond to any printing mask. Further, as a printing mask, it is a problem to stably transfer the paste to a to-be-printed object in a desired amount. Furthermore, (four) is different depending on the object to be printed. (4) A highly viscous substance obtained by mixing a solid into a knife and a liquid to form particles, silver particles, scaly silver particles, and particles mainly composed of nickel using a solid component thereof for visual purposes. A printing apparatus comprising a metal-coated resin particle and (4) at least one of the particles 'glass (10) + as a main component paste has been a problem. SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and provides a high-precision and stable printing of solder paste to a printed circuit regardless of the size of the opening area of the opening portion of the printed mask. The printing device for the welding of the board to the pulp board. That is, the present invention provides a printing method and apparatus therefor which, when filling a transfer mask having a desired opening σ portion, transfers a paste, promotes rolling of the paste, and promotes filling of the paste into the opening of the printing mask. And the front end portion of the squeegee is processed to apply a force to the paste in a direction perpendicular to the opening 4 of the printing mask, and the slab can be mounted. A summary of the representativeness of the invention disclosed in the present invention is briefly described below. When the pulp sheet is mounted, there is a case where the pulp sheet is inclined in the opposite direction to the printing direction and the sheet is inclined in the printing direction. To make the squeegee I55088. Doc -14· 201204564 When the plate is inclined in the opposite direction to the tp brush direction, the direction in which the paste contacts the plate surface is substantially perpendicular to the mounting angle of the blade. On the other hand, in the case where the pulp sheet is inclined in the printing direction, the direction of the surface of the pulp sheet which the paste contacts is substantially the same as the mounting angle to the pulp sheet. In the case where the mounting method of the screed plate is any, the printing is applied to a specific position of the printed matter fixed on the stage by using a printing mask having a σ-opening portion from a specific position to the slab. Each of the devices has the following features: One corner of the front end of the squeegee has an arcuate concave shape, and the angle of attack between the pulp sheet and the printed surface of the printed matter is smaller than the mounting angle of the squeegee. " Thereby, the paste is sealed into the arc-shaped concave shape portion at the front end of the pulp plate, so that the squeegee (the squeegee plate is applied with the embossing pressure facing the screen surface of the printing mask) along the printing direction In the step of sliding, the paste is rolled along the concave shape of the rounded fox in the front end of the squeegee. If the installation angle of the squeegee is reduced in order to reduce the angle of attack, the housing of the squeegee head to which the stamping is applied and the portion of the front end of the slab that contacts the printing mask may be displaced relative to each other, thereby failing to be effective. The ground pressure is applied to the front end portion of the scraping plate. That is, if the force point has a relative positional deviation, the rotational moment will act. At this time, the higher the printing pressure, the more the force is opposite to the printing pressure at the front end of the squeegee. Therefore, it is preferable that the contact point to the printing head to the head of the squeegee is in the same direction. The utility model has the following features, that is, in a state in which one of the arc-shaped concave shapes at the front end of the squeegee plate contacts the printing mask, the arc-shaped concave shape of the front end of the squeegee plate is 155088. Doc •15· 201204564 The gap between the other side and the print mask is ίο times or more and 丨mm or less of the average particle size of the paste used. The front end portion of the other end of the printing mask which is formed into an arc shape in the arc-shaped concave shape of the arc-shaped concave shape at the front end of the pulp plate is not in contact with the front end portion of the printing mask. The gap between the front end portion and the printing mask is related to the size of the particles of the solid component contained in the paste used. If the wiper plate contacts the print mask, the paste is not only filled in the σ portion of the P brush mask, but also may be ejected toward the side of the printed matter of the print mask. Subsequently, the front end of the squeegee which originally helped the printing will reach the opening of the printing mask, so that the secondary printing will occur. Similarly to the filling of the paste into the opening pattern portion of the printing mask, the opening pattern portion must be at least 10 times and larger than the particle diameter of the solid component in the paste. When the opening pattern portion is smaller, the flowability of the paste is inhibited. The plug pattern is blocked by the particles of the paste, and the paste cannot be satisfactorily transmitted. Therefore, the gap between the squeegee and the printing mask must be at least 1G times larger than the average particle size of the used paste. If the gap between the squeegee and the printing mask is vacant, the paste cannot be obtained. The arc-shaped concave portion at the tip end of the squeegee is sealed, and the pressure applied to the paste is opened, and the force applied to the opening pattern portion of the printing mask is weakened. Therefore, it is preferable that the gap between the pulp sheet and the printing mask is 1 mm or less. The smaller the gap between the squeegee and the printing mask, the greater the force applied to the paste, and the greater the filling of the opening pattern portion of the printing mask. 155088. Doc • 16- 201204564 Thus, by processing the front end portion of the squeegee that is in contact with the printing mask into a special shape, it is possible to apply the paste to the printing mask to a specific amount of thickness, and to roll the paste. Function, and the function of filling the paste into the opening of the printing mask. Here, the material of the squeegee used is a resin having a main component of amino citrate, which has a hardness of 80 degrees or more. If the hardness is low, even if the support which suppresses deformation of the squeegee is used as a support, the front end of the squeegee is deformed by the printing pressure at the time of printing, and the angle of attack of the squeegee and the printing surface becomes unstable. If it is a metal squeegee, it can be made to have a very high hardness. However, on the printed surface of the printed circuit board, there are irregularities formed by the anti-gluer or electrode wiring which are implemented in the previous step, and thus the front end of the squeegee Softness is required. Further, in the printing method and apparatus of the present invention, 'as a printing mask, a printing mask (metal mask) characterized by including a metal plate having a specific opening portion can be used, and further, a metal plate can be used. The printed object side includes a printed mask featuring an organic layer. In the printing method and device of the invention. As a printed mask, a pattern point F # E1A can be used. • Ί ^ ^ °° field to > 'from a metal mesh and a mask containing organic matter). A printing mask characterized by an opening of the eight special opening (mesh: a printing mask used in the printing method and the device thereof, not limited to the metal mask, the mesh mask, etc. described herein. According to the present invention The size of the opening area of the printing part is as good as the device, and the AJ without the fine printing mask can be printed with high precision and stability, 155088. Doc 201204564 agent. The features and advantages of the present invention are apparent from the following description of the preferred embodiments of the invention. [Embodiment] In the following embodiments, the convenience is divided into a plurality of parts or embodiments as necessary, but in the case where they are not specifically related to each other, they are in a The relationship between some or all of the other variants, details, supplementary explanations, and the like. In addition, in the case of the following embodiments, the number of elements, including the number, the numerical value, the quantity, the range, and the like, are specifically limited to a specific number unless otherwise specified. The number is not limited to the specific number, and may be a specific number or more or a specific number or less. In all the drawings for explaining the present embodiment, the same functions are denoted by the same reference numerals, and the repeated description thereof will be omitted in principle. Hereinafter, embodiments of the present invention will be described in detail based on the drawings. [Embodiment 1] A configuration of a printing apparatus 100 of an embodiment will be described with reference to Fig. 1 . Figure 2 is a front elevational view of the printing apparatus 100 of the embodiment 1. The illustrations have omitted the representation of the base and side walls of the device, the struts, the support members, and the like for simplicity. The printing apparatus 100 includes a printing mask portion 11A, a workpiece supporting table portion 23, a pair of the pulp sheet portions 120L and 120R, a squeegee driving mechanism portion 13A, and a control portion 21. The print mask portion 110 is provided with a metal cover 155088 provided with a pattern opening portion which is provided corresponding to a desired circuit pattern of a printed matter (for example, a printed board) 6. Doc 201204564 The cover 11 is formed by a frame 22 surrounding the metal mask 11 and having a rectangular shape in a state in which the tension mesh is held in a tight end state, and a support member lu supporting the frame. The to-be-printed object supporting table portion 23 includes a stage 23i on which the to-be-printed object 6 is placed, a chuck portion 232 on which the to-be-printed object 6 is placed on the fixed stage 23, and an upper and lower driving stage 231 upper and lower driving portions 233. The squeegee portion 120L is provided with a squeegee portion 1L, a squeegee holder, a squeegee holder fixing jig 16L, a squeegee head 15L, and a cylinder 24L. Similarly, the squeegee portion 120R includes a squeegee 1R, a squeegee holder 3R, a squeegee holder fixing jig 16R, a squeegee head 15R, and a cylinder 24R. The cylinders 24L and 24R are fixed to the support member 25, and the pulp plate portion 120L and the squeegee portion 120R which are connected to the cylinders 2 and 24R, respectively, are driven up and down. Further, the supporting member 25 is supported by the bearing portions 26L and 26R that are engaged with the drive shaft 27. The drive shaft 27 is composed of a ball screw, and is driven to rotate by the motor 3, and the bearing portions 26L and 26R that are engaged with the drive shaft 27 are moved in the left-right direction in the drawing, and are applied to the pulp plate portion 120L and the scraper. The pulp plate portion 12 is moved along the guide shaft 28 in the left-right direction in the drawing. The drive shaft 27 and the guide shaft 28 are supported by a pair of right and left fixed plates 29L and 29R. The control unit 21 controls the operation of each part of the printing apparatus 100. First, the cylinder drive unit 31 that drives the pair of cylinders 24L and 24R is controlled by the control signal ' from the control unit 21, thereby driving the pair of cylinders 24L and 24R, respectively. Further, the drive unit 32 of the motor 3 is controlled by the control signal from the control unit 21 to rotate the motor 30 in the forward and reverse directions. Further, the chuck drive unit 34 for driving the chuck portion 232 of the workpiece support table portion 23 is controlled by the control signal from the control unit 21, and the fixed stage 231 is placed on the fixed stage 231. Doc -19-201204564 The opening and closing operation β of the chuck unit 232 of the to-be-printed object 6 further controls the stage driving unit 33 that drives the upper and lower driving units 233 of the object support unit 23 by the control signal from the control unit 21. The stage 231 is moved up and down. Further, the drive unit 34 of the chuck 232 of the object support table unit 23 is controlled by the control signal from the control unit 21, and the chuck 232 is opened and closed. The operation of the printing apparatus having the above configuration will be described using the flowchart of Fig. 2 . First, the printed matter 6 is transported by the transport mechanism (not shown) to be placed on the to-be-printed object support table 23 (S201). The printed matter 6 is fixed and held by the chuck support portion 23 by the chuck portion 232. Then, the stage driving unit 233 drives the upper and lower driving units 233 to raise the stage 231 (S202), and the printed matter 6 is in close contact with the metal mask 印刷 of the printing mask unit 11A. Then, the cylinder drive unit 31 drives the air cylinder 24L to lower the squeegee head 15L (S203), and the squeegee plate 1L is in close contact with the metal cover 11 (S204). At this time, the pair of squeegee portions 120L and 120R Located at the left end of Figure 1. Then, in this state, the solder paste is supplied to the vicinity of the squeegee 1L by a solder paste supply mechanism (not shown) (S205). After the solder paste is supplied, the drive unit 32 is controlled to drive the motor 30 to form a ball screw. The drive shaft is "rotated" by which the pair of squeegee portions l2 〇 LA120R and the squeegee plate 1L attached to the front end thereof are pressed toward the metal mask U toward the left side of the metal mask 丨丨 from the left side of the figure The right side moves 'by this, the pattern of the metal mask formed by the solder paste is printed on the object to be printed 6 (S206). After the scraping plate 1L is moved by a certain distance, the driving portion "stops driving of the motor 3〇 to make the squeegee The movement of 1L stops. Then, the gentleman # is driven by the cylinder drive unit 31 155088. Doc -20- 201204564 The moving cylinder 24L raises the squeegee head 15L (S207), and the squeegee il is separated from the metal mask 11. Then, the stage driving unit 233 controls the upper and lower driving units 233 to lower the stage 231 (S208), and the printed matter 6 held by the chuck unit 232 is peeled off from the metal mask η. When the stage 23 1 reaches the lower end, the vertical drive unit 233 stops the processing of the stage 231. The control chuck drive unit 34 opens and holds the chuck unit 232' of the printed matter 6 by an operating mechanism (not shown). 231 takes out the printed matter 6 (S209). It is determined whether or not the substrate to be taken out is the last substrate to be processed (S210), and if it is the last, the processing is terminated. On the other hand, when there is a substrate to be processed next, the processing flow from S2〇1 is executed again. However, in this case, the process of lowering the scratch-off head 15R in S203 and replacing the squeegee 1L with 1R in S204, S206, and S207 is performed. Further, the paste plate 1R which is in close contact with the metal mask is moved from the right side to the left side of Fig. 1 to perform screen printing. In this manner, the squeegees 1L and 1R are alternately used for screen printing, whereby the supplied solder paste is always located in front of the direction in which the metal mask is in close contact with the metal sheet, thereby effectively using the solder paste. . Next, a number of specific examples will be described for the configuration of the pair of squeegee portions 120L and 120R. First, a first example of the structure of the squeegee portion 120L will be described with reference to Fig. 3A. Further, the configuration of the blade portion 120R is only the same as the structure of the squeegee portion 12A and is substantially the same. The squeegee 丨L is fixed to the squeegee holder 3L by the squeegee holder pressing plate so as to be inclined in the opposite direction with respect to the printing direction 2. On the squeegee holder 3L, provided to the slurry 155088. Doc • 21-201204564 Plate mounting surface 7L for squeegee 1L with respect to printing mask surface 5, printed surface of printed matter 6 or printed object support (231 of Figure 1) The printed support surface (upper surface) is tilted to a specific angle to support. On the squeegee 1L, an arcuate concave portion 8L is formed at an angle at which the front end portion is in contact with the printing mask (metal cover) 11. When printing, the solder paste 9 first contacts the initial contact surface 膏1 of the squeegee substantially perpendicular to the mounting surface 7L of the squeegee 1L, and the solder paste 9 is applied to the metal mask 11. At the same time, the solder paste 9 is inserted into the printing mask opening portion 12 formed on the metal mask 11. Further, the solder paste 9 rolls in the arc-shaped concave portion 8L at the tip end of the blade, and the solder paste 9 passes through the metal. The pattern opening portion 2 of the printing mask formed on the mask 11 is filled until reaching the electrode pad 13 on the object 6 to be printed. On the object to be printed 6, a portion other than the opening of the specific pattern of the electrode pad 13 is covered by the solder resist 14. 3B and C', the solder paste 9 is rolled in the arc-shaped concave portion 8L at the tip end of the squeegee plate 1L, and reaches the electrode pad 14 on the to-be-printed object 6 via the pattern opening portion 印刷2 of the printing mask. Detailed instructions are given. First, using FIG. 3B, when the side of the squeegee 1L is pressed against the metal mask 11 and moved in the direction of the arrow 2, the solder paste 9 is covered by the arc-shaped concave portion 8L from the front end of the squeegee. The pattern opening portion 12 of the printing mask formed on the cover 11 is filled in the electrode pad 13 on the object 6 to be printed, and the arrangement is schematically illustrated in the time series of (a) to (e). (a) shows a state in which the arc-shaped concave portion to the tip end of the pulp sheet 1L has not reached the pattern opening portion 12 of the printing mask formed on the metal mask 11. If the corner 81L of the front end of the scraping plate 1L is pressed against the surface 5 of the metal mask ^SS088. Doc •22· 201204564 When moving in the direction of arrow 2, the solder paste 9 supplied to the crucible surface of the squeegee 1L is pressed by the initial contact surface i 〇L of the squeegee i L The squeegee 1L moves in the same direction, and a part of the gap G between the corner 82L of the front end of the arc-shaped concave portion 8L of the tip end of the squeegee iL and the metal mask u enters an arc-shaped concave portion. The inner side (1) touches the corner portion 8lL of the front end of the pulp sheet 碰 which is pressed against the surface of the metal mask 11 and is retracted upward (2), and then the upper surface is folded along the arc-shaped concave shape. The side of the initial contact surface 1〇L of the paste from the gap G to the pulp sheet 1L is extruded (3). If the squeegee 1L further travels in the direction of the arrow, as shown in (b), the corner portion 8 of the front end of the arc-shaped concave portion 8L at the front end of the squeegee 1L reaches the printing mask formed on the metal mask 11 Above the pattern opening portion 12, a portion of the solder paste extruded from the upper surface of the arc-shaped concave portion 8L from the gap to the side of the initial contact surface 10L of the blade of the squeegee is extruded into the printing mask. The pattern opening portion 12 (four). If the squeegee plate 1L further travels in the direction of the arrow, as shown in (c), the arc-shaped concave portion 8L at the tip end of the squeegee plate 1L reaches the metal mask u. Above the pattern opening portion 12 of the printing mask, the force of pressing the solder paste into the pattern opening portion 12 of the printing mask no longer functions, so as in the same state as (&), from the front end of the pulp sheet 1L The solder paste 9 that enters the inner side of the arc-shaped concave portion 8L with the gap between the corner portion 82L at the tip end of the arc-shaped concave portion and the metal mask 11 is formed along the arc-shaped concave shape portion. The surface is extruded from the gap G to the side of the initial contact surface 1 〇L of the squeegee 1L (3). The pulp sheet 1L further travels in the direction of the arrow and, as shown in the sentence, presses the arcuate concave portion of the front end of the squeegee 1L of the metal mask 11 to 155088. Doc -23- 201204564 Then, one of the solder pastes of the inner contact corner portion 81L of the concave shape portion 8L which reaches the upper portion of the concave portion 8L of the pattern opening portion 印刷2 of the printing mask is extruded into the pattern of the printing mask. In the opening 12 (5), the remaining portion is retracted upward (2), and is extruded along the upper surface of the arc-shaped concave portion from the gap G to the side of the initial contact surface of the paste of the pulp sheet 1L (three) ). When the squeegee plate 1L further travels in the direction of the arrow, as shown in (e), the corner portion 81L of the arc-shaped concave portion 8L at the tip end of the squeegee 1L passes through the pattern opening portion 12 of the printing mask, by The screen printing end of the circular opening portion 12 is completed. Here, the solder paste is rolled in the arc-shaped concave portion 8L and the portion thereof is pushed into the printing in FIG. 38 (}3). The state of the inside of the pattern opening portion 12 of the mask. In Fig. 3C, the change in the position of the solder paste 9 in the arcuate concave portion 8L at the tip end of the pulp sheet 1L with respect to the squeegee 11 is indicated by an arrow. Further, (a) to (7) indicated by arrows indicating the movement of the solder paste 9 in Fig. 3C are not directly related to (a) to (f) described in Fig. 3B. The edge portion giL of the lower end of the squeegee plate 1L is supplied to the solder paste in front of the squeegee 1L when driven by the squeegee driving mechanism 13 而 in the state of being pressed to the metal mask 11 while traveling in the direction of the arrow 2 9 from the position of (1), the gap between the end portion 82L on the opposite side from the side of the recess 8L formed on the squeegee 1L and the metal mask 与 and the metal mask 11 enters the inside of the recess 8L. If the scraping plate 1L further travels in the direction of the arrow 2, the solder paste 9 entering the inside of the recess 8L is in contact with the metal mask 11 by the end portion 81L of the recess 8L 155088. Doc -24· 201204564 The upper end 81L is pressed upward (3), and is pushed back (4). When the pulp sheet 1L further travels in the direction of the arrow 2, the solder paste 9 flows downward (5) in the direction of the wall surface of the recess 8L toward the end portion 82L, and flows further downward at the end portion of the end portion 82L. A part thereof is extruded into the inside (6) of the opening portion 12 formed in the metal mask, so that the inside of the opening portion 12 is filled with the solder paste 9, and is connected to the electrode pad 13 on the object 6 to be printed. The solder paste 9 that has not entered the opening portion 12 is discharged from the gap G between the end portion 82L and the metal mask 11 toward the side of the paste initial contact surface 1〇L of the squeegee (7). That is, the solder paste 9 that has entered the inside of the concave portion 8L rolls inside the concave portion and is discharged again to the outside of the concave portion 8L. Thus, when the squeegee 1L travels in the direction of the arrow 2, the gap between the end portion 82L of the recess 8L formed from the squeegee i L and the metal mask π enters the solder paste 9 inside the recess 8L in the recess When 8L is internally rolled and the gap G between the end portion 82L and the metal cover 11 is discharged to the outside of the recessed portion 8L, a part thereof is pushed into the opening portion 2 formed in the metal mask 11, whereby the solder paste is surely The inside of the opening portion 12 is filled. The printing mask 110 for printing is disposed in the space arranging the metal plate 11 in the printing mask frame 22, and the metal plate 丨丨 is passed between the metal plate 丨丨 and the printing mask frame 22 A tension mesh (not shown) provided throughout the circumference is supported in a tight state by the combined mesh type of the above-described printed mask frame 22. The printing mask 110 is attached to the metal plate rim, and forms a specific pattern opening 12 in the printing effective area corresponding to the moving area of the squeegee 1L on which it is moved to perform plate making and is used for the printer. 155088. Doc-25-201204564 A squeegee mechanism mounted on the printing apparatus 1 of the first embodiment will be described with reference to Fig. 4 . As illustrated in Fig. 3A, the scraper plate holder 3L to which the squeegee plate 1L is fixed is fixed to the blade head 15L and opposed to the other squeegee head 15R which is paired with the independent movement. Settings. The squeegee heads 15L and 15R are set at the angle ' using the squeegee holder mounting angle setting fixtures 2〇L and 2〇R and fixed to the pulp board by the squeegee holder fixing clamps 丨6L and i 6R. The 3L and 3R are used to obtain the surface 5 of the metal mask u and the specific angle of attack to the pulp sheets 1L and 1R. The squeegee front end structure mounted on the printing apparatus 1 of the first embodiment is squeegee The board 1L is described as an example using FIG. 5. The squeegee plate is attached to the squeegee holder 3L at an installation angle 17 (angle with respect to the horizontal direction) (refer to Fig. 3). In the first embodiment, the mounting angle 17 of the squeegee 1 l to the blade holder 3 L is 35. . At the end portion of the squeegee 1L, a concave portion 8L having an arc shape is formed at a corner portion 81 that is in contact with the printing mask η. The arc-shaped concave shaped portion 8L is formed in a circular fox-like recess when the blade portion 81 is brought into contact with the printing mask 11 in a state where the squeegee plate 1L is attached to the squeegee holder 3L at the mounting angle 17L. A gap G is formed between the other end 82L of the shape portion 8L and the surface 5 of the printing mask 11. As described with reference to FIGS. 3B and C, the solder paste 9 for internal scrolling in the arc-shaped concave portion passes between the other end 82L of the arc-shaped concave portion 8L and the surface 5 of the printing mask 11. When the slit G is discharged to the side of the initial contact surface 10L of the paste squeegee, the squeegee 1L is pressed, and it is necessary to cause the solder paste 9 to flow downward when passing through the slit G. Therefore, the condition of the other end 82L of the arc-shaped concave shaped portion 8L is as shown in Fig. 58 155088. Doc -26- 201204564 The tangential line of the arc-shaped concave portion 8L at the other end 82L is formed in an arc shape with respect to the angle GL of the surface 5 of the metal mask 11 in the range of 5 to 80 degrees. The concave shape portion 8L may be used. The initial contact surface i 〇L of the squeegee and the printed mask surface 5 (scraper contact surface) and the printed matter 6 are substantially perpendicular to the angle from the pulp plate 1L to the mounting angle 17L of the pulp sheet holder 31. The angle of the printed surface of the printed surface or the printed matter support 231 of the printed matter support table 231 is the initial contact surface angle 18L of the paste. In the first embodiment, the initial contact surface angle 18L of the paste was 55. . On the other hand, the angle of the contact surface of the squeegee 1L with the squeegee of the printing mask surface 5 is the angle of attack 19L at the position 81L where the pulp sheet 1L is in contact with the printing mask η. In the first embodiment, the angle of attack 丨 9L is changed to verify the printing condition. The solder paste 9 can be applied to the pattern opening 12 formed on the printing mask while the solder paste 9 is applied to the surface 5 of the printing mask 11 by using the initial contact surface angle 18L of the paste. Further, the solder paste 9 is forcibly rolled inside the arc-shaped concave portion 8L at the tip end of the squeegee cymbal, and is applied to the solder paste 9 in a direction perpendicular to the pattern opening portion 12 formed on the printing mask 11. With force, the solder paste 9 can be filled to the electrode pad 13 reaching the object 6 by the pattern opening formed on the printing mask 1 at an angle of attack 19L. The squeegee 1L of the present embodiment is characterized in that it has an arc-shaped concave portion 8L at the front end of the pulp sheet, and the angle of attack 19L is smaller than the initial contact angle i 8L of the paste. The squeegee 1R is also provided with an arc-shaped concave portion 8R at the front end, whereby the same effect as in the case of the squeegee can be obtained. 155088. Doc •27· 201204564 As the solder paste used in the verification experiment of Example 1, (A): LF-204-15 (manufactured by TAMURA KAKEN Co., Ltd., particle size of solder particles: 1 to 12 μm) and (B) ) : M705-BPS7-T1J (William Metal Industry Co., Ltd. manufactures 'particle size of solder particles: 1~6 μιη), and uses a resin containing urethane as a main component to the pulp board for printing masks 11 Screen printing is performed by forming a metal mask having a pattern opening portion 12 having a diameter of 5 μm to 2 μm on a metal plate having a thickness of 70 μm. The squeegee 1 was inclined in the opposite direction to the printing direction, and the squeegee 1 to the blade holder mounting angle was set to 35. The initial contact angle of the sputum 18 (the angle at which the squeegee first contacts the squeegee surface of the paste) is set to 55. . Further, as a squeegee for verification, a resin containing a urethane-based component was used. In the pattern opening portion 12, the area of the wall surface of the pattern opening portion 12 divided by the area of the pattern opening portion is a printing index. That is, the printing index is 2. 8 or more can achieve good transfer of solder paste as a target. As a result of the experiment, when the (Α) is used as the solder paste, the gap G between the front end portion 8 2 L of the scratch panel and the printed mask surface 5 which is not in contact with the printing mask 11 is narrower than 0. When 12 mm is formed, the solder paste 9 is prevented from flowing into the arc-shaped concave portion 8 formed at the tip end of the squeegee, so that the amount of the transferred solder paste is reduced. Further, when (B) is used as the solder paste, the gap G between the front end portion 82 of the pulp sheet and the surface of the printing mask 5 is not narrower than that of the printing mask 11 . When the 〇6 is followed, the solder paste 9 is prevented from flowing into the arcuate concave portion 8 formed at the tip end of the squeegee, so that the amount of solder paste transferred is reduced. 155088. Doc -28- 201204564 On the other hand, if the gap G between the front end portion 8 2L of the squeegee not in contact with the printing mask 11 and the surface of the printing mask 5 is wider than 1 mm, the solder paste cannot be sealed in the printing at the time of printing. The arc-shaped concave portion 8 formed at the tip end of the pulp plate leaks from the arc-shaped concave portion 8, and the force applied to the solder paste 9 filled in the pattern opening portion 12 of the printing mask ii will be As a result of the experiment, it is known that the one side 81L of the arc-shaped concave portion 8L formed at the tip end of the scraping plate contacts the surface of the printing mask 5, and the squeegee is squeezed. The gap G between the other 82L of the arc-shaped concave portion 8L at the tip end of the plate and the printed mask surface 5 must be 10 times or more and 1 mm or less of the average particle diameter of the paste to be used. The other of the arc-shaped concave portions 8L at the tip end of the squeegee plate refers to the end portion 82L which is not in contact with the front surface 5 of the printed mask surface in the concave shape which is formed in an arc shape at the tip end of the squeegee. Moreover, as a comparative example, the printing experiment which used the squeegee which does not process the front-end|tip of the s In the case of the squeegee which is not subjected to the processing of the tip end portion shown in (b), if the diameter of the opening portion 12 of the pattern is not 15 pm or more, good pattern printing cannot be achieved. Further, when the front end portion is processed to the pulp sheet as shown in Fig. 6, if the diameter of the opening portion of the pattern is not 120 μm or more, good pattern printing cannot be achieved. On the other hand, when printing is performed using a blade having a concave shape formed on a plurality of faces as shown in Fig. 6(d), substantially the same result as when the tape having the concave shape of the 阙6(4) is formed by a circular arc having a concave shape is obtained. Can cover the metal 155088. Doc -29- 201204564 The diameter of the cover is 50 μηι~200. Screen printing is performed well. In the printing apparatus of the first embodiment, the squeegee of the paste can be printed accurately and stably regardless of the size of the opening area of the opening of the printing mask u. Therefore, by processing the tip end portion of the pulp sheet into a special shape ′, the filling of the pattern opening portion 12 of the printing mask having the desired opening portion and the transfer of the paste to the printed matter can be promoted. The rolling of the paste promotes the filling property of the paste into the opening portion of the printing mask 11, and the filling force can be added to the paste in a direction substantially perpendicular to the opening portion 12 of the printing mask. [Embodiment 2] In the second embodiment, a mesh mask is used for the printing mask u, and the same as in the first embodiment. In the second embodiment, a mesh is used for the printing mask u. As the net, a wire diameter of 16 μm is used. A #325 plain weave having a high-strength wire of 35 μηι thick is used for the mesh, and a mesh mask having a pattern opening of 50 μm to 2 μm in diameter is formed by using an emulsion having a thickness of 35 μm and a thickness of 5 5 μm. In order to use the web tension to print off the printed mask 11 and the printed matter, the tension of the printing mask is set to 0. 2 mm or less (measured by a tensiometer STG-80NA manufactured by PROTEK Co., Ltd.). The metal mesh used for the printing mask u used in the second embodiment has an aperture ratio of 40% or more, and the wire diameter used in the metal mesh must be smaller than one half of the opening width of the metal mesh. In the pattern opening portion 12 formed on the mesh mask, the pattern opening portion 12 is 155088. Doc •30· 201204564 The area of the wall surface divided by the area of the pattern opening is the printing index. That is, as the object of the second embodiment, it is possible to achieve good transfer of the solder paste by setting the printing index to Η or more. In the second embodiment, there is a gap between the mesh mask and the object to be printed 6, so that the contact printing with the metal mask used in the first embodiment is not performed, and the BJ arc-shaped concave shape formed at the front end of the pulp sheet is formed. When the square is in contact with the surface 5 of the printed cover (4), the mesh mask is not horizontal and becomes inclined. Therefore, the gap 另一 between the other side 82L of the arc-shaped concave portion which is formed at the tip end of the pulp sheet 1L and the surface of the printing mask 5 becomes small. The gap G between the other side 821 of the arc-shaped concave portion of the tip end of the squeegee and the surface of the printing mask 5 must be (7) times or more and 1 mm or less of the average particle diameter of the paste to be used. The other of the arc-shaped concave portions 8 at the tip end of the squeegee plate refers to the front end portion 82L of the concave portion of the squeegee 1L which is formed into an arc shape and which is not in contact with the mesh mask. The particle size of the solder particles of the solder paste 9 used in the second embodiment is 12 μm or less as in the case of the first embodiment, so that the front end portion 82 of the pulp sheet and the surface of the printing mask 5 are not in contact with the mesh mask. The gap G is set to 〇6. If the squeegee is in contact with the mesh mask, not only the paste is filled in the opening of the mesh mask, but also the side of the mesh mask is ejected, and then the printing sheet is originally facilitated. When the front end reaches the opening of the mesh mask, it becomes a state of secondary printing. Therefore, the paste will ooze out between the mesh mask and the printed matter to cause stains. When the LF-204-15 of (A) is used as the solder paste, the gap between the front end portion 82L of the squeegee plate 1L and the printing mask which is not in contact with the mesh mask is narrower than 〇12 155088. Doc • 31 - 201204564 mm, the solder paste 9 is prevented from flowing into the arc-shaped concave portion 8L formed at the tip end of the squeegee il, so that the amount of solder paste transferred is reduced. Further, when the M705-BPS7-T1J of (B) is used, if the gap G between the blade front end portion 82L and the printing mask surface 5 which is not in contact with the mesh mask is narrower than 〇. When 〇6 mm', the solder paste is prevented from flowing into the arc-shaped concave portion 8 formed at the tip end of the squeegee, so that the amount of solder paste transferred is reduced. On the other hand, if the gap G between the front end portion 82 of the squeegee plate 1L and the printing mask surface 5 which is not in contact with the mesh mask is wider than 1 mm, the solder paste cannot be sealed at the front end of the squeegee 1L at the time of printing. The concave arc-shaped concave portion formed therein leaks from the arc-shaped concave portion 8 and weakens the force applied to the solder paste filled in the pattern opening portion 12 of the mesh mask. The filling amount and the amount of transfer are insufficient. As a result of verifying the printing condition in the second embodiment, the same results as those in the example of the tactile printing condition in the example were obtained. That is, all patterns of the pattern opening portion 12 having a diameter of 50 μm to 200 μm formed on the mesh mask can be satisfactorily screen-printed. As described above, the printing apparatus of the second embodiment can mount the paste 9 to the pulp sheet with high precision and stability regardless of the size of the opening area of the opening portion 12 of the printing mask t i . Therefore, by processing the tip end portion of the squeegee plate into a special shape, it is possible to promote the filling of the pattern opening portion 12 of the printing mask 11 having the desired opening portion and the transfer of the paste to the object to be printed. The rolling of the paste 9 promotes the filling property of the paste into the opening portion 12 of the printing mask u, and can add a filling force to the paste 9 in a direction substantially perpendicular to the opening portion 12 of the printing mask. 155088. Doc • 32-201204564 [Embodiment 3] A squeegee structure mounted in the printing apparatus of the third embodiment will be described with reference to Fig. 7 . The squeegee plate 71 used in the embodiment 3 is inserted into the squeegee plate of the center of the slab using the flat epoxy resin plate 727 as a support, and the slab 71 is used in this embodiment. An outline of the shape of the front end is shown in Figure 8. In Fig. 8 _, in order to explain the shape of the front end of the squeegee 71, a flat portion of the squeegee structure is shown as an example of a flat slab. In the third embodiment, the mounting direction to the blade 71 is set to the direction opposite to the case of the first embodiment, and the blade 1 is inclined in the same direction as the printing direction 2. The same as the above-described first embodiment except that the shape of the squeegee 71 is changed. The configuration of the printing apparatus used in Embodiment 3 is basically the same as that described in the drawings, and the composition of the pulp sheet portion 12〇L&12〇R of Fig. 1 is replaced with the composition shown in Fig. 7 and its paired pair. Since it is a constructor, the description of the overall configuration diagram is omitted. In the mounting of the squeegee, as in the embodiment 丨2, the slab is tilted in a direction opposite to the printing direction 2, and the panel 71 is tilted toward the printing direction 2 as in the third embodiment. situation. When the pulp sheet 1 is inclined in the direction opposite to the printing direction 2 as in the embodiment (1), the surface 10 of the squeegee 1 which the paste 9 contacts is substantially perpendicular to the mounting angle 17 of the squeegee 1. On the other hand, in the third embodiment, when the pulp sheet 71 is inclined in the printing direction 2, the direction in which the paste 9 contacts the surface 71 of the collecting plate 71 and the mounting angle 717 of the squeegee 71 is substantially the same. Also in this embodiment is a printing device that uses a squeegee (four) from 155088. Doc • 33- 201204564 A printing mask having an opening 12 at a specific position transfers the paste 9 to a specific position of the printed matter 6 fixed on the stage 23 1 , characterized in that a corner of the front end of the squeegee 71 The arcuate concave shape 78 has an angle of attack 719 between the squeegee 71 and the printed surface of the object 6 to be printed, which is smaller than the mounting angle 718 of the slab 71. Thereby, the paste is sealed inside the arc-shaped concave shape 78 at the front end of the squeegee 71, and the pressure can be applied by the squeegee (the squeegee 71 facing the screen surface of the printing mask 11) The step of sliding in the printing direction causes the paste 9 to roll along the arcuate concave portion 78 at the front end of the squeegee 71. The squeegee used in the third embodiment used a resin having a urethane-based component. As shown in Fig. 9, if the mounting angle 717 of the squeegee 71 is reduced in order to reduce the angle of attack 719, a portion 78 where the printing head is applied to the front end of the squeegee head 715 and the squeegee "contacting the print mask surface 5 is applied. The 丨 will produce a relative positional offset, so that it is not possible to effectively apply a stamping to the front end of the squeegee 71. That is, if the force point produces a relative positional shift, the rotational moment will function, and at this time, the applied impression The higher the pressure, the more the force is opposite to the printing pressure at the front end of the pulp plate. Therefore, the direction in which the printing head is applied to the squeegee head 715 is in contact with the front surface of the pulp sheet 71 in contact with the printing mask surface 5. The point 781 is adjusted to be substantially the same direction. In the example 3, in a state where the square 781 of the arc-shaped concave shape P formed at the front end of the pulp plate 71 contacts the printing mask 11, the front end of the squeegee 71 has a concave shape of a 5-shaped shape. The other side 782 of the portion 78 and the surface of the printing mask 5 must be more than 10 times the average particle size of the used paste 9 and 15S088. Doc, 34-201204564. The other of the arc-shaped concave portions 78 at the front end of the squeegee 71 refers to the end portion 782 of the concave portion 78 which is formed in an arc shape at the tip end of the squeegee 71 and which is not in contact with the printing mask surface 5. The solder particles of the solder paste 9 used in the third embodiment have a particle diameter of 12 μm or less. Therefore, the gap G between the front end portion 782 of the squeegee and the surface of the printing mask 5 which is not in contact with the printing mask 11 is set to 0. 3 mm. When the squeegee 71 is in contact with the printing mask 11, not only the paste is filled in the opening portion 12 of the printing mask 11, but also the side of the printed matter 6 of the printing mask 11 is ejected, and then it is originally useful for printing. When the front end of the squeegee reaches the opening portion 12 of the printing mask, it becomes a state of secondary printing. Therefore, the paste will ooze out between the printing mask 丨丨 and the to-be-printed object 6, thereby causing stains. When A is used as the tan solder paste, if it is not in contact with the printing mask 11, the gap between the front end portion 782 of the poly sheet and the surface of the printing mask 5 is narrower than 0. When 12 mm is formed, the solder paste is prevented from flowing into the arc-shaped concave portion 78 formed at the front end of the squeegee, so that the amount of solder paste transferred is reduced. Further, when B is used as the solder paste, the gap G between the front end portion 782 of the squeegee plate and the surface of the printing mask 5 which is not in contact with the printing mask 11 is narrower than 0. At 06 mm, the solder paste 9 is prevented from flowing into the arcuate concave portion 78 formed at the front end of the squeegee, so that the amount of solder paste transferred is reduced. On the other hand, if the gap between the front end portion 782 and the printing mask surface 5 of the squeegee plate 71 which is not in contact with the printing mask 11 is wider than 1 mm, the solder paste cannot be sealed at the front end of the squeegee plate during printing. In the arc-shaped concave portion 78, the concave portion 78 is leaked from the arc-shaped concave portion 78, and the force applied to the solder paste 9 filled in the pattern opening portion 12 of the printing mask [i] is weakened. Filled 155088. Doc •35- 201204564 Insufficient volume and transfer. In the third embodiment, as in the case of the printing mask, a printing mask for forming the pattern opening portion 12 having a diameter of 5 〇 μη 2 to 2 形成 is formed on a metal plate having a thickness of 70 μm for the printing mask 丨! . In the third embodiment, the squeegee 71 is inclined in the same direction as the printing direction 2, and the mounting angle 717 of the squeegee 71 to the squeegee holder 73 is set to 7 。. The initial contact angle 718 of the paste (the angle at which the squeegee 71 first contacts the face of the squeegee 71 of the paste 9) is set to substantially the same 70 as the mounting angle 717 of the squeegee holder 73. . Regarding the angle to the interface between the pulp sheet 71 and the printing mask u to the pulp sheet, the angle of attack 719 was changed to conduct research. Regarding the printing condition, the filling property to the printed mask Μ pattern opening portion 12 and the transfer property to the printed matter were verified. As a result of verifying the printing condition in the third embodiment, the same results as those in the verification of the printing condition in the first embodiment were obtained. As described above, the printing apparatus of the third embodiment can mount the squeegee of the paste accurately and stably regardless of the size of the opening area of the opening portion 12 of the printing mask i j . Therefore, by processing the tip end portion of the squeegee 71 into a special shape, the filling of the paste into the opening pattern portion 12 of the printing mask η having the desired opening portion 12, and the transfer of the drug to the object to be printed are performed. The rolling of the paste can be promoted, the filling property of the paste into the opening portion 12 of the printing mask ii can be promoted, and the filling force can be added to the sputum agent in a direction substantially perpendicular to the opening portion of the printing mask 丨丨. [Embodiment 4] In Embodiment 4, the direction in which the scratchpad is mounted is set to be opposite to that of Embodiment i, 155088. Doc •36· 201204564 Direction '(4) The board is tilted in the same direction as the printing direction 2. The shape of the squeegee was changed, and the same as in the above-described second embodiment. As a result of verifying the printing condition in the fourth embodiment, the same results as those in the verification of the printing condition in the second embodiment were obtained. As described above, the printing apparatus of the fourth embodiment can mount the slab of the bone agent accurately and stably regardless of the size of the opening σ of the opening 12 of the printing mask u. When the tip end portion of the scratch panel is processed into a special shape, the paste is transferred to the opening pattern portion 12 of the printing mask 11 having the desired opening portion, and the paste is transferred to the object to be printed. The rolling of the paste can be promoted, and the filling property of the paste into the opening portion 12 of the printing mask ii can be promoted, and the filling force can be added to the paste in a direction substantially perpendicular to the opening portion 12 of the printing mask π. [Example 5] This Example 5 is the same as the above Examples 1 to 4 except that various changes were made to the paste to be used. In the printing apparatus of the present invention, the paste to be used is a highly viscous substance obtained by mixing a solid component and a liquid component, and a solid component thereof may be used, which is composed of solder particles, silver particles, scaly silver particles, and nickel. The particles of the component, at least one of the spherical resin particles coated with the metal, the ceramic particles, and the glass particles are main components, and the characteristics and printing results of the object to which the paste is applied are shown below. A paste using a composition of solder as a solid component is used for surface mounting technology such as pad bumps of printed circuit boards, solder terminal formation of solder bumps such as semiconductor wafers, and the like. The particles of the solder used are 155088. Doc -37- 201204564 The shape is roughly spherical. The particle size of the solder composition particles can be selected in the range from about 丨μηη to about 3〇 μηι depending on the pattern used. In this case, in consideration of the fluidity of the paste in the opening portion, the size of the opening pattern 12 formed on the printing mask η is set to be 10 times or more the particle diameter of the particles of the solder composition, whereby in the present embodiment, The same printing as in the first to fourth embodiments was performed. In other words, when the particle size of the solder composition is 丨μιη, the size of the opening pattern must be λομηη or more, and when the particle size of the solder composition is 3 〇μηη, the size of the open case must be set to 3〇〇μηι or more. In order to form a fine pattern, it is necessary to use particles of a fine particle size solder. Further, a paste using silver particles as a solid component is used for wiring pattern formation of ceramics for low-temperature burning, electrode formation of solar cells, and the like. The shape of the silver particles used is substantially spherical. The particle size of the silver particles is about 2 nm to about 10 μm, and it is necessary to use particles having a fine particle size when forming a fine wiring pattern. On the other hand, in the silver paste used for forming the electrode of the solar cell, since it is necessary to reduce the wiring resistance of the electrode, it is required to form the thickness of the wiring pattern to be thick and to be calcined at a low temperature. Therefore, it is necessary to use a number of μηι or more. A paste obtained by mixing particles of hollow particles with particles having a particle diameter of several nm. If the wiring width is 50 μm η ', the particle size of the silver particles used is 5 μmη or less. In the present embodiment, since the transfer property is improved, it is possible to obtain a printing result having a high aspect ratio of the wiring pattern and a fine printing result corresponding to the fine wiring. In addition, the use of scaly silver particles as a solid component of the paste system for printing electricity 155088. Doc -38 - 201204564 The conductive adhesive used for the mounting of the components of the board is used for mounting on a substrate having a bump electrode as the size of the electronic component is reduced. The scaly silver particles are processed into a foil shape by applying pressure to the silver particles, and are irregular shaped particles. This paste is characterized in that the transfer resistance is required to ensure conductivity, and therefore the transfer dimensional accuracy of the printed pattern is less required. However, in the present embodiment, since the discharge property can be improved, local coating does not occur. Bad 'can be printed reliably. Further, a paste containing particles mainly composed of nickel as a solid component is used for a capacitor or the like which is required to form an electric conductor of an ultrathin film. It is characterized in that the particle diameter of the nickel-based particles is from about 10 nm to about 1 〇〇 nm and the viscosity of the paste is lowered to have fluidity. If the yarn thickness becomes thinner, the amount of the paste is kept small. When the amount of discharge is increased, it is preferable that the thickened yarn thickness m is formed for the formation of a fine electrode wiring pattern or a thin film electrode of a capacitor, and it is preferable that the thickness of the yarn is thin. When it is necessary to make the yarn thickness thinner after weaving, a web having a desired yarn thickness by calendering the web with a roll is used. The type of mesh (number of meshes, aperture ratio, wire diameter, yarn thickness, etc.) can be selected according to the applicable components. In the fifth embodiment, since the discharge property can be improved, a pattern of a uniform and very thin film can be formed, and a good printing result can be obtained. On the other hand, a paste-based anisotropic conductive paste using a metal-coated spherical resin particle as a solid component is used for the terminal of the display II, and the printed circuit board is allowed to be electrically connected even if the electrical resistance is higher than the metal joint. The parts are mounted. It is characterized in that the particle size of the resin coated metal particles is 10叩 155088. Doc -39- 201204564 The printed pattern is applied to the entire surface of the soldered portion of the mounted component. In the present embodiment, since the discharge property can be improved, local coating failure does not occur, and a good printing result can be obtained. A paste using ceramic particles as a solid component is used for dielectric pattern formation of a low-temperature calcined ceramic, insulating pattern formation of an electronic circuit, pattern formation of a resist for etching a copper foil polyimide film, and solar cell The insulating layer is scribed by a pattern or the like. In the present embodiment, since it has a reliable transfer performance, local disconnection failure does not occur, and a good printing result can be obtained. A paste using glass particles as a solid component is used for addition to a silver paste as a calcining aid, formation of a dielectric pattern of a low-temperature calcined ceramic, formation of an insulating pattern of an electronic circuit, and the like. Since the ceramic particles and the glass particles are produced by pulverization, they are in a fractured shape. In such cases, the opening pattern of the printing mask to be used must be set to 1 or more times the average particle size. In the squeegee sheet used in the fifth embodiment, one corner of the front end of the squeegee has an arc-shaped concave portion 8, and the angle of attack between the squeegee and the printed surface of the object to be printed is smaller than that of the squeegee 1. First contact the angle 18 of the direction of the squeegee surface of the paste (when the squeegee is inclined in the opposite direction to the printing direction) or the mounting angle of the squeegee (when the squeegee is inclined in the same direction as the printing direction) Thereby, the opening area of the pattern opening portion 12 of all the pastes, regardless of the print mask, can be made. In any case, a printing apparatus that can perform printing with high precision and stability can be used. As described above, the embodiment of the present invention has been described, but the operator can I55088. Doc • 40· 201204564 Various alternatives, modifications, or variations are possible in the above-described description, and the present invention includes various alternatives, modifications, and variations as described above without departing from the spirit thereof. As described above, the printing apparatus of the fifth embodiment can mount the squeegee sheet of the paste accurately and stably regardless of the size of the opening area of the pattern opening 12 of the printing mask u. Therefore, by processing the tip end portion of the squeegee plate into a special shape, it is possible to promote the filling of the paste into the opening pattern portion 12 of the printing mask 11 having the desired opening portion and the transfer of the paste to the object to be printed. The rolling of the paste promotes the filling property of the paste into the opening portion 12 of the printing mask, and the filling force can be added to the paste in a direction substantially perpendicular to the opening portion 12 of the printing mask. The invention may be embodied in other specific forms without departing from the spirit or essential characteristics. The present invention is to be considered in all respects as illustrative and not restrictive, and the scope of the invention is defined by the scope of the appended claims. All changes are covered by the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a block diagram showing a schematic configuration of a printing apparatus of a first embodiment. Fig. 2 is a flow chart showing the flow of processing for screen printing by the printing apparatus of the first embodiment. Fig. 3A is a side view showing a squeegee mechanism of a schematic configuration of a squeegee mechanism mounted in the printing apparatus of the first embodiment. 3B(a) to (e) show the movement and squeegee of the squeegee relative to the mask when screen printing is performed by the squeegee mechanism mounted in the printing apparatus of the first embodiment. Doc -41- 201204564 Diagram showing the flow state of the solder paste at the front end of the board. 3C is a view for explaining a flow state of the solder paste at the tip end portion of the squeegee plate when screen printing is performed by the slab mechanism mounted in the printing apparatus of the first embodiment. FIG. 4 is a view showing the use of the embodiment i. i Side view of the squeegee mechanism of the squeegee mechanism. Fig. 5 (a) and (b) are enlarged views of the front end portion of the pulp sheet mechanism used in the embodiment 1. Fig. 6 (a) to (d) are schematic views showing the shapes of the front end faces of various squeegees used in the evaluation experiment in the first embodiment. Fig. 7 is a side elevational view showing the main part of the squeegee structure which is a schematic configuration of the squeegee mechanism used in the third embodiment, and is a squeegee structure for explaining the shape of the front end. Fig. 8 (4) to (4) are schematic views showing various shapes of the leading end of the pulp sheet used in the evaluation experiment in the third embodiment. Figure 9 is an enlarged view of the front end portion of the pulp tile mechanism used in the embodiment 3. [Main component symbol description] 1, 1L, 1R, 71 squeegee 2 Printing direction 3, 3L, 3R, 73 to the pulp board holder 4L squeegee holder holding plate 5 Printed mask surface 6 Printed matter 155088. Doc -42· 201204564 7L Scraper mounting surface 8, 8L, 78 Arc-shaped concave shape at the front end of the squeegee plate 9 Solder paste 10L Paste initial contact surface 11 Printed mask 12 Opening 13 Electrode pad 14 Solder resist 15L, 15R, 715 squeegee head 16L, 16R squeegee holder fixing fixture 17L, 717 mounting angle 18L, 718 paste initial contact surface angle 19L, 719 angle of attack 20L, 20R squeegee holder mounting angle setting fixture 21 Control panel 22 frame 23 printed object support table 24L, 24R cylinder 25 support member 26L, 26R bearing portion 27 drive shaft 28 guide shaft 29L, 29R fixed plate 30 motor 155088. Doc •43- 201204564 31 Cylinder drive unit 32 Motor drive unit 33 Stage drive unit 34 Chuck drive unit 81L, 82L End 100 Printing unit 110 Print mask unit 111 Support member 120L, 120R Scraper unit 130 Scraper Plate drive mechanism portion 231 Stage 232 Clamp portion 233 Upper and lower drive portion 710 Scraper surface 727 Glass epoxy board 781 Contact point 782 Front end G Gap S201--S210 Step 0L Angle -44- I55088. Doc