201204452 六、發明說明： 【發明所屬之技術領域】 本發明關於一種過濾結構，尤指一種適用於一流體通道且其噱 網交錯設置之過濾結構。 ~ 【先前技術】 在許多機器設備中多有各種各樣的管路設計，以半導體製程設 備為例，通料衫幫雜反應室進他氣，以維持反魅内S 的組成穩定及純淨度。閱第丨圖，其為根據先前技術之一實施 例之-真空製程設備1之示意圖。真空製程設備丨包含—反應室 12、二氣源14、一抽氣管路16、一真空幫浦18及一濾網2〇: 一工 件2設置於反應室12内之載台上，製程所需氣體自氣源μ輸入至 12内。為了維持反應t 12内之氣體的組成穩定並排除存在 之雜f，氣源14將不斷地提供所需氣體，真空幫浦 18則不斷地_。真空幫浦18内射轉子，若過多或過大的 或異物捲入轉子間，則極可能造成 ’、、 垅风具工幫浦18的損壞，因此濾網 2〇。又置在抽㈣路16内，以渡除雜質或異物。 動的方向以精體= 201204452 .質22(以小圓圈誇張表示於圖中)便被濾網20篩出，此雜質22可倉t 是來自反應室中懸浮的顆粒，也可能是長時間附著於抽氣管: 16内壁上剝落下來的片狀雜質等。 -般而言，為達到完整的磁效果，渡網2〇之輪廊多設計成與 抽氣管路16之内壁輪廓相符。然而，當積存於據網2〇上的雜質^ 來不及清除，而阻塞住濾網20，致使整個抽氣管路16有效的抽氣 鲁口徑大幅縮減。真空幫浦1S因而無法有效抽氣，使得反應室^ 壓力上升、氣體純淨度下降，於此狀態下生產之工件2，其品質多 無法通過品檢。真空幫浦18無法有效減甚錢得減管：Μ中 入口 I62與出口 I64之壓差大增，極可能使積存於據網Μ上大量的 雜質22瞬間被吸入真空幫浦18，反而對真空幫浦18之轉子造成更 大的傷害。且，無論是更換新的真空幫浦18或是清除真空幫浦Μ 均對生產排程造成嚴重的影響。 ' • 雖然及時的更換遽網20有助於排除上述問，然而反應室u 通常供各種條件之製程使用，其產生雜f 22的量不易估算，並且自 抽氣管路I6内壁上剝落的雜質22係屬隨機剝落，而其造成阻総 網2〇的情形又屬嚴重’非以縮短更換濾網2〇時間間隔，益法有效 避免前述阻塞問題。因此，在先前技術中，前述及時更換減網20 的要求在不過度影響生產製程的條件下，實難實現。 【發明内容】 201204452 本發明的目的之一在於提供一種濾網交錯設置之過濾結構，該 過濾結構適用於一流體通道以濾除流體中之雜質’並且能避免因濾 網上積存過多的雜質而阻塞流體通道。 本發明之過濾結構適用於一流體通道。該流體通道具有一入口 及一出口，該過濾結構係設置於該流體通道内的該入口及該出口之 間。該過濾結構包含一第一濾網及一第二濾網。該第一濾網具有一 第一側邊及相對該第一側邊之一第二側邊，該第一遽網以該第一側 邊設置於該流體通道之内壁之上並朝向該入口傾斜延伸，該第二側 邊與該流體通道之内壁最遠相隔一第一間隙。該第二濾網係與該第 一濾網分離且相對設置，該第一濾網相較於該第二濾網更鄰近於該 入口’該第二濾網具有一第三側邊及相對該第三側邊之一第四側 邊，且以該第三側邊設置於該流體通道之内壁上並朝向該入口傾斜 延伸，該第四側邊與該流體通道之内壁最遠相隔一第二間隙。 相較於先前技術，由於該第一濾網及該第二濾網係傾斜設置， 因此積存於該第一濾網及該第二濾網上的雜質可自然向下滑落而收 集於該第一側及該第三側，該第一濾網及該第二濾網不易被積存的 雜質阻塞’且可增加雜質的收集量；又由於該第_間隙及該第二間 隙分別存在於該第一濾網及該第二濾網分別與該流體通道之内壁之 間，因此縱使當積存的雜質Ha塞該第—翻或該第二_，氣流仍 可經由《•亥第一間隙及戎第二間隙順暢流動，該流體通道於該入口及 该出口處之壓力差不會太A而產生赫馨真空幫浦吸 201204452 入，造成真空幫浦轉子更嚴重損壞的問題。 藉由以下的發嚼述及所附圖式 關於本發明之優點與精神可以 得到進一步的瞭解。 【實施方式】 請參閱第3圖，其為根據本發明之一較佳實施例之一過料構 3之不意圖。過餘構3適用於—流體通❹，。流體通道4具有一 入口 42及-出口 44，過滤結構3係設置於流體通道4内的入口犯 及出口 44之間。流體將自人σ 42進人，經過過渡結構3以滤除雜 質(以小圓，誇張表示於第3圖中），最後由出口 Μ流出，流體之流 動以影線箭頭表示’流體流動之動力可由與流體通道4連接之幫浦 產生壓力絲提供’也就是說，出σ 44處可通往幫浦^流體通道4 可由多段管路組成，過濾結構30可設置鄰近於某一段管路之入口 處，以便於更換。較佳地，於真空製程中，流體通道4可真空幫浦 # 本身前端的管路的一部分；但本發明不以此為限。 本發明之過濾結構3可包含一第一濾網34及一第二濾網36。 第一濾網34具有一第一側邊342及相對第一側邊342之一第二側邊 344，第一濾網34以第一側邊342設置於流體通道4之内壁之上並 朝向入口 42傾斜延伸，第二側邊344與流體通道4之内壁最遠相隔 一第一間隙346。第二濾網36係與第一濾網34分離且相對設置， 第一濾網34相較於第二濾網36更鄰近於入口 42，第二濾網36具 201204452 有一第三側邊362及相對第三側邊362之一第四側邊364，且以第 三側邊362設置於流體通道4之内壁上並朝向入口 42傾斜延伸，第 四側邊364與流體通道4之内壁最遠相隔一第二間隙366。 請併參閱第3圖、第4圖及第5圖，第4圖為第3圖之俯視圖， 第5圖為第一濾網34之平面示意圖。於本實施例中，流體通道4 係可呈圓管狀，具有一圓形截面，因此傾斜設置的第一滤網34具有 一不完整的橢圓輪廓以局部配合流體通道4之内壁；並且本實施例 之第一遽網34與第二渡網36係對稱設置，因此第二遽網％亦具有 一不元整的糖圓輪摩以局部配合流體通道4之内壁。盆中，第一側 邊342可呈一橢圓弧，而第二側邊344則可呈一直線，以與流體通 道4之内壁間形成第-間隙346,同樣地第三側邊362可呈一擴圓 弧’而第四側邊3 64則可呈一直線，以與流體通道4之内壁間形成 第二間隙366 ;但本發明不以此為限。 此外，第一濾網34之孔目尺寸係自第一側邊342至第二側邊 344漸增，同樣地第二滤網36之孔目尺寸係自第三側邊362至第四 側邊364漸增。由於第-遽網34及第二濾網％均係傾斜設置，被 第-滤網34及第二_ 36 _出之雜f可能因重力或氣流導引而滑 落至第-側邊342及第三側邊362，因此第一翻^接近第一側邊 撕處以及第二_36接近第三側邊362處使用較小的孔目尺寸以 能承載14些雜質；反之，第二側邊344及第四側邊364均接近流體 通道4之中心部分，第-_34接近第二側邊糾處及第二_ 201204452 36接近第四側邊364處的功能主要以過濾流體為主，因此第一濾網 34接近第二側邊344處及第二濾網36接近第四側邊364處使用較 大的孔目尺寸，以兼具過濾流體又容許流體流通之目的。 於本實施例中，第一濾網34之孔目尺寸係可介於1毫米至3 毫米，舉例來說第一濾網34之孔目尺寸自第一側邊342至第二側邊 344可以1毫米至3毫米漸增，同樣地第二濾網36之孔目尺寸係可 介於1毫米至3毫米，舉例來說第二濾網36之孔目尺寸自第三側邊 362至第四側邊364可以1毫米至3毫米漸增；但本發明不以此為 限。於實作上’第一濾網34及第二濾網36得分別以一邊框固定紗 網來製作，亦得以一板材並於其上鏤空成多個通孔製作；另第一濾 網34及第一濾'網36之孔目尺寸可依可能存在的雜質之特徵進行設 計；又第一濾網34及第二濾網36之孔目配置、幾何形態均不以實 施例所揭露者為限。另外，第一濾網34及第二濾網36傾斜設置之 角度將影響第一濾網34及第二濾網36收集雜質的效果。於本實施 • 例十，第一濾網34之延伸方向與流體通道4之内壁之失角348係實 質介於30度至60度之間，第二濾網36之延伸方向與流體通道* 之内壁之夾角368係實質介於30度至60度之間。 另外，請併參閱第3圖及第4圖。於本實施例中，流體通道4 具有-截面，即第4圖所示之圓形截面(另以雙虛線表示於第3圖 中），該截面大致垂直流體之流動方向。第一義34鄉(以虛線表 示於第3圖中)於流體通道4之域面上之投影面可超過該截面面積 201204452 的一半，第二濾網36投影(以虛線表示於第3圖中)於流體通道4之 該截面上之投影面亦可超過域面面躺—半，亦即此二投影面可 局部重疊’以能涵蓋整個越通道4之截面並有效猶。換言之， 經由第-離346流通之流體仍會被第二翻36過遽。各遽網34、 36之投影面可藉由設計間隙祕、366來控w，雖本實施例之第一 滤網34與第二遽網36對稱設計，但本發明不以此為限。於實作上， 第-間隙346與第二間隙366可依不同條件設計，又或第一遽網％ 與第二_ 36之傾斜設置角度亦可不同，上僅需達到二投影面 能局部重疊，以涵蓋整個流體通道4之截面即可。 此外，若第一濾網34被雜質佈滿而被阻塞時，因第一濾網％ 之第二側邊344與流體通道4之内壁間尚有第一間隙％存在，故 第-渡網34不會阻塞流！t通道4，流體仍能在流體通道4順暢流 動’同理’若第二翻36被雜質佈滿而被阻塞時，流體仍能在流體 通道4順暢流動。因此，先前技術中因濾網被雜質阻塞，使得管路 内滤網兩侧壓力差過大’造成積存的雜質瞬間被真空幫浦吸入，嚴 重損壞真空幫浦轉子的問題，不會發生^如第4圖所示，於本實施 例中，流體通道4具有-管壁内徑46,第一間隙346之長度係實質 介於管壁内徑46的0.1至0.4，同樣地第二間隙366之長度係實質 介於管壁内徑46的0.1至0.4 ;但本發明不以此為限，原則上，只 需有第-間隙346及第二間隙366存在，即有助於避免前述瞬間吸 入的問題。 201204452 前述實施例雖以過據結構3設置於具有圓形截面之流體通 為例’但本發明不以此為限。本發明之過遽結構可經由修改其輪 :得輕易地適用於其他具有異形截面之越通道，不待贅述。另: 别述實施例之過據結構3之第一渡網34與第二德網％係各別 於内壁上，於實作上得以多種方式實施，例如可在流體通道 壁上設有卡點或卡座以直接卡住第一滤網34與第二遽網％，或將 第-遽網34與第二據網36產生些微的彎曲以設置於流體通道4 内，前述彎曲使得第一滤網34與第二翻36產生彈性的回復力， 此回復力將施加於流體通道4之内壁，進而使該内壁對第一據網％ 與第二滤網36之邊緣產生摩擦力明定第—翻％與第二遽網 36。本發明均不以此為限。 一 當過濾結構3之第-遽網34與第二遽網％以一連接結構連接 時，可增加過遽結構3整體之強度，進而強化第一翻Μ與第二濾 網36之固定。請參閱第6圖，其為根據本發明之另一實施例之: 遽結構5之示賴。過遽結構5與·結構3不同之處在於過伊 構5更包含-圍壁32，圍壁32與流體通道4之内壁鄰接，第^1 網34及第二淚網36藉由配置於圍壁32上而設置於流體通道^内 壁上。此設計便於使用者迅速地取出或放置過渡結構5於流體通道 4内。流體通道4之入口 42之入口方向(可參照入口幻處之流體流 動箭頭)與出口 44之出口方向(可參照出口 44處之_流動箭頭^ 質垂直’因此圍壁32可具有-缺口 322，缺α 322對著出口糾，以 使流體的流動能順暢。若圍壁32直接以網結構製作，例如較大孔目 [S] 11 201204452 之鐵絲網，則前述缺口 322可不必製作，因具有網結構之圍壁32 即具有孔隙可供流體順暢流通，同時’具有網結構之圍壁％亦具有 過遽功能。 相較於先前技術，本發明利用交錯設置的第一濾網及第二濾網 以構成完整的過濾通道，並於流體通道之内壁與第一濾網及第二濾 網留有_ ’以避免_網被完全阻塞而使整個流體通道也因而被 阻塞的情形，亦即解決了先前技射_被阻塞造賴力差過大而 使積存於;i|網上的雜質瞬間被浦吸人*造成S浦損壞的問題。此 卜本發明利用第-滤網及第二;慮網的傾斜設置來自然地收集被過 遽出的雜質於相對較低_邊，可增加it喊除雜質的量，亦可延 遲整個渡糧完姐塞㈣間，解決了先前技術中若有突然大量的 雜質造成翻無法負擔而被阻塞的問題。因此，本發明之過據結構 解決了抽氣管路(或其他流體形態之抽取管路)被阻塞的問題並提升 ’慮網/慮除雜質的量，進硫護後端之幫浦祕，亦使整個生 條件得以穩定維持。 、 以上所述僅為本發明之較佳實施例，凡依本發明巾請專利範圍 斤做之均等變化與修郜，皆應屬本發明之涵蓋範圍。 【圖式簡單說明】 圖為根據先前技術之一實施例之一真空製程設備之示意圖。 2圖為第1圖巾減管路之局部放大示意圖。 201204452 第3圖為根據本發明之一較佳實施例之一過濾結構之示意圖。 第4圖為第3圖之俯視圖。 第5圖為該過濾結構之第一濾網之平面示意圖。 第6圖為根據本發明之另一實施例之一過濾結構之示意圖。 【主要元件符號說明】 1 真空製程設備 2 工件 3 ' 5 過滤結構 4 流體通道 • 12 反應室 14 氣體源 16 抽氣管路 18 真空幫浦 20 濾網 22 雜質 32 圍壁 34 第一濾網 36 第二濾網 42 入口 44 出口 46 管壁内徑 162 入口 164 出口 • 322 缺口 342 第一側邊 344 第二側邊 346 第一間隙 348 夾角 362 第三側邊 364 第四側邊 366 第二間隙 368 夾角 [S ] 13201204452 VI. Description of the Invention: [Technical Field] The present invention relates to a filter structure, and more particularly to a filter structure suitable for use in a fluid passage and having a cross-web arrangement. ~ [Prior Art] There are many kinds of pipeline design in many machines and equipment. Take the semiconductor process equipment as an example, the ventilation shirt helps the reaction chamber to enter the air to maintain the stability and purity of the anti-enchant S. . Referring to the drawings, which is a schematic diagram of a vacuum processing apparatus 1 according to an embodiment of the prior art. The vacuum process apparatus 丨 includes a reaction chamber 12, a two gas source 14, an evacuation line 16, a vacuum pump 18, and a screen 2: a workpiece 2 is disposed on the stage in the reaction chamber 12, and is required for the process. The gas is input from the gas source μ into 12. In order to maintain the composition of the gas in reaction t 12 stable and to eliminate the presence of impurities f, gas source 14 will continuously supply the desired gas, and vacuum pump 18 will continue to _. The vacuum pump 18 injects the rotor. If too much or too much or foreign matter is caught between the rotors, it is likely to cause damage to the hurricane pump 18, so the filter 2 is. It is placed in the pumping (four) road 16 to remove impurities or foreign matter. The direction of motion is in the form of sediment = 201204452. The mass 22 (expressed in a small circle in the figure) is screened out by the screen 20, which can be suspended from the reaction chamber or may be attached for a long time. In the suction pipe: 16 pieces of impurities peeled off on the inner wall of the 16th. In general, in order to achieve a complete magnetic effect, the wheeled gallery of the crossing network is designed to conform to the contour of the inner wall of the suction line 16. However, when the impurities accumulated on the net 2 are too late to be removed, the filter 20 is blocked, so that the effective pumping of the entire exhaust line 16 is greatly reduced. The vacuum pump 1S is therefore unable to effectively evacuate, so that the pressure in the reaction chamber is increased and the purity of the gas is lowered. The quality of the workpiece 2 produced in this state cannot be passed through the quality inspection. The vacuum pump 18 can not effectively reduce the amount of money: the pressure difference between the inlet I62 and the outlet I64 in the sputum is greatly increased, and it is highly probable that a large amount of impurities 22 accumulated in the sputum net are instantaneously sucked into the vacuum pump 18, but instead vacuum The rotor of the pump 18 caused more damage. Moreover, whether it is to replace the new vacuum pump 18 or to remove the vacuum pump 均 has a serious impact on the production schedule. ' • Although the timely replacement of the mesh 20 helps to rule out the above problem, the reaction chamber u is usually used in various conditions, and the amount of impurities f 22 is not easily estimated, and the impurities peeled off from the inner wall of the suction pipe I6 22 The system is randomly spalled, and the situation that causes the barrier net 2〇 is serious. It is not necessary to shorten the time interval of replacing the filter. The beneficial method effectively avoids the aforementioned blocking problem. Therefore, in the prior art, the aforementioned requirement of timely replacement of the net reduction 20 is difficult to achieve without excessively affecting the production process. SUMMARY OF THE INVENTION 201204452 One of the objects of the present invention is to provide a filter interlaced filter structure that is suitable for use in a fluid passage to filter out impurities in a fluid and to avoid accumulation of excessive impurities on the filter screen. Block the fluid channel. The filter structure of the present invention is suitable for use in a fluid passage. The fluid passage has an inlet and an outlet, the filtration structure being disposed between the inlet and the outlet in the fluid passage. The filter structure comprises a first filter screen and a second filter screen. The first screen has a first side and a second side opposite the first side, the first side is disposed on the inner wall of the fluid passage and inclined toward the inlet Extending, the second side is spaced apart from the inner wall of the fluid passage by a first gap. The second screen is separated from and opposite to the first screen, the first screen is closer to the inlet than the second screen. The second screen has a third side and opposite a fourth side of the third side, and the third side is disposed on the inner wall of the fluid passage and extends obliquely toward the inlet, the fourth side being spaced apart from the inner wall of the fluid passage by a second gap. Compared with the prior art, since the first filter screen and the second filter screen are disposed obliquely, impurities accumulated on the first filter screen and the second filter screen can be naturally slid down and collected in the first On the side and the third side, the first filter screen and the second filter screen are not easily blocked by the accumulated impurities and may increase the amount of impurities collected; and since the first gap and the second gap respectively exist in the first side The filter screen and the second filter screen are respectively separated from the inner wall of the fluid passage, so that even when the accumulated impurities Ha plug the first turn or the second _, the air flow can still pass through the first gap and the second The gap flows smoothly, and the pressure difference between the inlet and the outlet of the fluid passage is not too high, and the Hexin vacuum pump sucks 201204452, which causes the vacuum pump rotor to be more seriously damaged. Further understanding of the advantages and spirit of the present invention can be obtained by the following description of the present invention. [Embodiment] Please refer to Fig. 3, which is a schematic view of a structure 3 according to a preferred embodiment of the present invention. The excess structure 3 is suitable for fluid circulation. The fluid passage 4 has an inlet 42 and an outlet 44, and the filter structure 3 is disposed between the inlet and outlet 44 in the fluid passage 4. The fluid will enter the human σ 42 and pass through the transition structure 3 to filter out the impurities (in small circles, exaggerated in Figure 3), and finally flow out from the outlet ,. The flow of the fluid is indicated by the hatching arrow. The pressure wire can be supplied by a pump connected to the fluid passage 4, that is, the outlet σ 44 can be connected to the pump. The fluid passage 4 can be composed of a plurality of sections, and the filter structure 30 can be disposed adjacent to a section of the pipeline. For easy replacement. Preferably, in the vacuum process, the fluid passage 4 can be a part of the pipeline at the front end of the vacuum pump # itself; however, the invention is not limited thereto. The filter structure 3 of the present invention may include a first filter screen 34 and a second filter screen 36. The first screen 34 has a first side 342 and a second side 344 opposite the first side 342. The first screen 34 is disposed on the inner wall of the fluid passage 4 with the first side 342 facing the inlet. 42 extends obliquely, and the second side 344 is spaced apart from the inner wall of the fluid passage 4 by a first gap 346. The second screen 36 is separated from and opposite to the first screen 34. The first screen 34 is closer to the inlet 42 than the second screen 36. The second screen 36 has a third side 362 of 201204452 and The fourth side 364 is opposite to the fourth side 364 of the third side 362, and the third side 362 is disposed on the inner wall of the fluid passage 4 and extends obliquely toward the inlet 42. The fourth side 364 is farthest from the inner wall of the fluid passage 4. A second gap 366. Please refer to FIG. 3, FIG. 4 and FIG. 5, FIG. 4 is a plan view of FIG. 3, and FIG. 5 is a plan view of the first screen 34. In this embodiment, the fluid passage 4 can have a circular tubular shape with a circular cross section, so that the inclined first screen 34 has an incomplete elliptical contour to partially fit the inner wall of the fluid passage 4; and this embodiment The first mesh 34 and the second mesh 36 are symmetrically disposed, so the second mesh % also has an unconventional sugar round wheel to partially fit the inner wall of the fluid channel 4. In the basin, the first side 342 may have an elliptical arc, and the second side 344 may be in a straight line to form a first gap 346 with the inner wall of the fluid passage 4. Similarly, the third side 362 may be expanded. The second side 3 64 may be in a straight line to form a second gap 366 with the inner wall of the fluid passage 4; however, the invention is not limited thereto. In addition, the aperture size of the first screen 34 is gradually increased from the first side 342 to the second side 344, and likewise the aperture size of the second screen 36 is from the third side 362 to the fourth side. 364 is increasing. Since both the first mesh 34 and the second mesh are inclined, the first filter 34 and the second mesh may be slipped to the first side 342 and the first by the gravity or air flow guidance. The three sides 362, so that the first turn close to the first side tear and the second_36 close to the third side 362 use a smaller aperture size to carry 14 impurities; otherwise, the second side 344 And the fourth side 364 is close to the central portion of the fluid channel 4, the first -34 is close to the second side and the second _ 201204452 36 is close to the fourth side 364. The function is mainly based on filtering fluid, so the first The screen 34 is adjacent to the second side 344 and the second screen 36 is adjacent the fourth side 364 to use a larger aperture size to both filter the fluid and allow fluid to circulate. In this embodiment, the first mesh 34 may have a mesh size of 1 mm to 3 mm. For example, the first mesh 34 may have a hole size from the first side 342 to the second side 344. 1 mm to 3 mm is gradually increased, and similarly, the second mesh 36 has a hole size of 1 mm to 3 mm. For example, the second mesh 36 has a hole size from the third side 362 to the fourth. The side 364 may be gradually increased from 1 mm to 3 mm; however, the invention is not limited thereto. In practice, the first filter 34 and the second filter 36 are respectively made by fixing a gauze with a frame, and are also made of a plate and hollowed out to form a plurality of through holes; another first filter 34 and The size of the first filter 'net 36 can be designed according to the characteristics of impurities that may exist; and the arrangement and geometry of the first filter 34 and the second filter 36 are not limited to those disclosed in the embodiment. . In addition, the obliquely disposed angles of the first screen 34 and the second screen 36 will affect the effect of the first screen 34 and the second screen 36 collecting impurities. In the present embodiment, the extension direction of the first screen 34 and the inner wall of the fluid passage 4 are substantially between 30 degrees and 60 degrees, and the extension direction of the second screen 36 and the fluid passage * The angle 368 of the inner wall is substantially between 30 and 60 degrees. In addition, please refer to Figure 3 and Figure 4. In the present embodiment, the fluid passage 4 has a - section, i.e., a circular section shown in Fig. 4 (also shown by a double dashed line in Fig. 3) which is substantially perpendicular to the flow direction of the fluid. The projection surface of the first sense 34 (shown in phantom in Figure 3) on the domain surface of the fluid channel 4 may exceed half of the cross-sectional area 201204452, and the second filter 36 is projected (shown in phantom in Figure 3) The projection surface on the cross section of the fluid channel 4 may also be more than half of the domain surface, that is, the two projection surfaces may be partially overlapped to cover the entire cross section of the channel 4 and be effective. In other words, the fluid flowing through the first to the 346 will still be overturned by the second turn 36. The projection surface of each of the meshes 34 and 36 can be controlled by the design of the gap 366. Although the first filter 34 and the second mesh 36 of the embodiment are symmetrically designed, the present invention is not limited thereto. In practice, the first gap 346 and the second gap 366 can be designed according to different conditions, or the tilt angles of the first mesh % and the second _ 36 can be different, and only the two projection surfaces can be partially overlapped. To cover the entire cross section of the fluid passage 4. In addition, if the first screen 34 is blocked by the impurities, the first gap % exists between the second side 344 of the first screen % and the inner wall of the fluid passage 4, so the first network 34 Will not block the flow! With channel 4, the fluid can still flow smoothly in the fluid passage 4. Similarly, if the second turn 36 is blocked by the impurities, the fluid can still flow smoothly in the fluid passage 4. Therefore, in the prior art, because the filter screen is blocked by impurities, the pressure difference between the two sides of the filter screen is too large, so that the accumulated impurities are instantaneously sucked by the vacuum pump, which seriously damages the vacuum pump rotor and does not occur. 4, in the present embodiment, the fluid passage 4 has an inner diameter 46 of the tube wall, and the length of the first gap 346 is substantially 0.1 to 0.4 of the inner diameter 46 of the tube wall, and likewise the length of the second gap 366. The thickness is substantially between 0.1 and 0.4 of the inner diameter 46 of the tube wall; however, the invention is not limited thereto. In principle, only the first gap 346 and the second gap 366 are present, which helps to avoid the aforementioned instantaneous inhalation problem. . 201204452 The foregoing embodiment is exemplified by a fluid passage having a circular cross section according to the structure 3, but the invention is not limited thereto. The overlying structure of the present invention can be easily applied to other passages having a profiled cross section by modifying its wheel, and will not be described again. In addition, the first network 34 and the second network % of the structure 3 of the embodiment are different from the inner wall, and can be implemented in various ways, for example, a card point can be arranged on the wall of the fluid passage. Or the card holder directly catches the first filter 34 and the second mesh net %, or slightly bends the first mesh 34 and the second net 36 to be disposed in the fluid channel 4, the aforementioned bending makes the first filter The net 34 and the second turn 36 generate an elastic restoring force which will be applied to the inner wall of the fluid passage 4, thereby causing the inner wall to produce a frictional force against the edges of the first net and the second net 36. % with the second network 36. The invention is not limited thereto. When the first mesh 34 of the filter structure 3 and the second mesh are connected by a connecting structure, the strength of the entire structure 3 can be increased, thereby strengthening the fixing of the first turn and the second filter 36. Please refer to FIG. 6, which is a representation of the structure 5 according to another embodiment of the present invention. The over-twist structure 5 differs from the structure 3 in that the yoke 5 further includes a surrounding wall 32, and the surrounding wall 32 is adjacent to the inner wall of the fluid passage 4, and the first net 34 and the second tear net 36 are disposed by The wall 32 is disposed on the inner wall of the fluid passage. This design facilitates the user to quickly remove or place the transition structure 5 within the fluid passage 4. The inlet direction of the inlet 42 of the fluid passage 4 (refer to the fluid flow arrow of the inlet phantom) and the outlet direction of the outlet 44 (refer to the flow arrow at the outlet 44) so that the enclosure 32 may have a notch 322, The lack of α 322 is corrected against the exit to make the flow of the fluid smooth. If the surrounding wall 32 is directly made of a mesh structure, such as a wire mesh of a larger hole [S] 11 201204452, the aforementioned notch 322 may not be produced because of the mesh. The surrounding wall 32 of the structure has pores for fluid to circulate smoothly, and the % of the surrounding wall having the mesh structure also has an over-twisting function. Compared with the prior art, the present invention utilizes the first screen and the second screen which are staggered. In order to form a complete filtering channel, and the inner wall of the fluid channel and the first filter and the second filter are left with _ 'to avoid _ the net is completely blocked, so that the entire fluid channel is also blocked, that is, solved The previous technical _ _ blocked by the lag is too large to accumulate; i | online impurities are instantaneously caused by the sputum * caused by the S pump damage. This invention uses the first filter and the second; Tilt setting to naturally Collecting the impurities that have been removed from the relatively low side can increase the amount of impurities that can be removed, and can delay the whole meal to complete the room (4), which solves the problem that if there is a sudden large amount of impurities in the prior art, it cannot be burdened. The problem of being blocked. Therefore, the structure of the present invention solves the problem that the suction line (or other fluid-shaped extraction line) is blocked and improves the amount of the net/consideration impurity, and the sulfur-removing rear end The above-mentioned stipulations also ensure that the whole living conditions are stably maintained. The above description is only a preferred embodiment of the present invention, and the equal variation and repair of the patent scope of the invention according to the invention should belong to the present invention. BRIEF DESCRIPTION OF THE DRAWINGS [FIG. 3] FIG. 3 is a schematic view showing a vacuum processing apparatus according to an embodiment of the prior art. A schematic view of a filter structure of one of the preferred embodiments. Fig. 4 is a plan view of Fig. 3. Fig. 5 is a plan view of the first filter screen of the filter structure. Fig. 6 is another embodiment of the present invention. One of the examples Schematic diagram of the structure. [Main component symbol description] 1 Vacuum process equipment 2 Workpiece 3 ' 5 Filter structure 4 Fluid channel • 12 Reaction chamber 14 Gas source 16 Extraction line 18 Vacuum pump 20 Filter 22 Impurity 32 Wall 34 First Filter 36 Second screen 42 Inlet 44 Outlet 46 Tube inner diameter 162 Inlet 164 Outlet • 322 Notch 342 First side 344 Second side 346 First gap 348 Angle 362 Third side 364 Fourth side 366 Second gap 368 angle [S ] 13