TW201144835A - Transferring mechanism for probe card, method for transferring probe card, and probe device - Google Patents

Transferring mechanism for probe card, method for transferring probe card, and probe device

Info

Publication number
TW201144835A
TW201144835A TW100104495A TW100104495A TW201144835A TW 201144835 A TW201144835 A TW 201144835A TW 100104495 A TW100104495 A TW 100104495A TW 100104495 A TW100104495 A TW 100104495A TW 201144835 A TW201144835 A TW 201144835A
Authority
TW
Taiwan
Prior art keywords
probe card
transferring
probe
card
head
Prior art date
Application number
TW100104495A
Other languages
Chinese (zh)
Other versions
TWI506287B (en
Inventor
Daisuke Inoue
Shuji Akiyama
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW201144835A publication Critical patent/TW201144835A/en
Application granted granted Critical
Publication of TWI506287B publication Critical patent/TWI506287B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

A transferring mechanism for a probe card, method for transferring the probe card, and a probe device are provided to the transfer leakage of a probe card by including a sensor detecting each probe card in a first card transfer mechanism, a first lifting unit and a second lifting unit. In a transferring mechanism for a probe card, method for transferring the probe card, and a probe device, a mounting unit movable in an X,Y,Z, and [theta] direction. An insertion ring(54) is fixed at the center of the hole of a head plate. A probe card(56) is supported to be detachable from a card holder through the insertion ring. A head pivotal driving unit(57) rotates the test head. The head pivotal driving unit includes a driving shaft connected to the test head and a driving motor driving the driving shaft.
TW100104495A 2010-02-12 2011-02-11 A probe card conveying mechanism, a probe card conveying method and a probe device TWI506287B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010028521A JP5517344B2 (en) 2010-02-12 2010-02-12 Probe card transport mechanism, probe card transport method, and probe apparatus

Publications (2)

Publication Number Publication Date
TW201144835A true TW201144835A (en) 2011-12-16
TWI506287B TWI506287B (en) 2015-11-01

Family

ID=44596307

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100104495A TWI506287B (en) 2010-02-12 2011-02-11 A probe card conveying mechanism, a probe card conveying method and a probe device

Country Status (4)

Country Link
JP (1) JP5517344B2 (en)
KR (1) KR101272449B1 (en)
CN (1) CN102193059B (en)
TW (1) TWI506287B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI576589B (en) * 2012-03-26 2017-04-01 Tokyo Electron Ltd Probe device
TWI756428B (en) * 2017-06-05 2022-03-01 日商東京威力科創股份有限公司 Inspection device, inspection system, and position alignment method

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102507996B (en) * 2011-09-27 2014-02-26 沈玉良 Probe card lifting mechanism
JP6054150B2 (en) 2012-11-22 2016-12-27 日本電子材料株式会社 Probe card case and probe card transport method
KR101503143B1 (en) * 2013-01-31 2015-03-18 세메스 주식회사 Apparatus for transferring a probe card and method of transferring a probe card
JP6220596B2 (en) * 2013-08-01 2017-10-25 東京エレクトロン株式会社 Prober
JP6271257B2 (en) * 2014-01-08 2018-01-31 東京エレクトロン株式会社 Substrate inspection apparatus and probe card transfer method
KR102335827B1 (en) 2014-12-24 2021-12-08 삼성전자주식회사 apparatus for loading a prove card and system for managing the prove card with the unit
JP6523838B2 (en) * 2015-07-15 2019-06-05 東京エレクトロン株式会社 Probe card transfer apparatus, probe card transfer method and probe apparatus
CN106873195B (en) * 2015-12-11 2020-10-30 De&T株式会社 Probe unit replacing device
JP7186647B2 (en) * 2019-03-22 2022-12-09 東京エレクトロン株式会社 Conveyor
KR102480726B1 (en) * 2020-12-31 2022-12-26 주식회사 쎄믹스 Prober system with probe card changer

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01161173A (en) * 1987-12-16 1989-06-23 Tokyo Electron Ltd Probe card automatic exchanging method for probe device
JP2575074B2 (en) * 1991-08-13 1997-01-22 東京エレクトロン株式会社 Wafer prober
JP2606554Y2 (en) * 1992-01-17 2000-11-27 株式会社東京精密 Probing equipment
JPH10308424A (en) * 1997-05-08 1998-11-17 Tokyo Electron Ltd Probe card clamp mechanism and probe device
JP4104099B2 (en) * 1999-07-09 2008-06-18 東京エレクトロン株式会社 Probe card transport mechanism
JP4798595B2 (en) * 2001-08-07 2011-10-19 東京エレクトロン株式会社 Probe card transfer device and probe card transfer method
JP4123408B2 (en) * 2001-12-13 2008-07-23 東京エレクトロン株式会社 Probe card changer
JP4875332B2 (en) * 2005-09-21 2012-02-15 東京エレクトロン株式会社 Probe card transfer assist device and inspection equipment
WO2007074509A1 (en) * 2005-12-27 2007-07-05 Advantest Corporation Tcp handler and method of aligning connector in tcp handler
US20080016676A1 (en) * 2006-07-18 2008-01-24 Jones Robert M Automatic winder for an inside brushless stator
KR100847577B1 (en) * 2006-12-27 2008-07-21 세크론 주식회사 Probe tester for wafer
JP5049419B2 (en) * 2007-07-25 2012-10-17 東京エレクトロン株式会社 Probe card carriage and probe card handling method using the carriage

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI576589B (en) * 2012-03-26 2017-04-01 Tokyo Electron Ltd Probe device
TWI756428B (en) * 2017-06-05 2022-03-01 日商東京威力科創股份有限公司 Inspection device, inspection system, and position alignment method

Also Published As

Publication number Publication date
JP5517344B2 (en) 2014-06-11
KR20110093712A (en) 2011-08-18
TWI506287B (en) 2015-11-01
JP2011165995A (en) 2011-08-25
CN102193059A (en) 2011-09-21
CN102193059B (en) 2015-03-25
KR101272449B1 (en) 2013-06-07

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