TW201144753A - Micro-lens array surface profile detection system and detection method thereof - Google Patents

Abstract

The present invention provides a micro-lens array surface profile detection system and detection method, the system includes fine-tuning type placement positioning unit, optical image grabbing module, optical interference module, central control unit and image processing operating module; wherein the image processing module applies plural image processing operations to image data; characterized in that the image processing operating module, through image segmentation and area recognition, identifies the center position of each ring, and the micro-lens array image substrate is determined according to graphical segmentation and area recognition methods to automatically identify the background of the micro-lens array interference image. Based on the ratio of the actual center ring area and the ideal center ring area, the phase angle variation of the center ring of said interference fringes is determined. Based on the ratio of actual brightness variation of the first segment ring stripe and the ideal brightness variation of the first segment ring stripe, phase angle variation in the ring interference fringe at the outermost substrate is determined. Area ratio method and brightness ratio method are freely interchangeable for choosing the method with higher precision. Maximum and minimum of every segment brightness curve are picked to correspond respectively to the brightness change in the segment phase angle from 0 to 180 degrees, and then the corresponding micro-lens surface height differences between pixels on the segment are found. The present invention can accurately find the micro-lens interference fringe, and accurately determine the phase angle of innermost and outermost rings of the interference fringe, thereby improving significantly accuracy and quality of micro-lens array surface profile detection.

Description

201144753 VI. Description of the Invention: [Technical Field] The present invention relates to a detection system and a detection method, and more particularly to an innovative design of a system and method for detecting the surface profile of a microlens array. [Prior Art] The surface profile detection method of the non-contact measurement microlens array is divided into interference and non-interference. If it is measured by interference, optical profiler method, computer holographic interference Lufa, shearing interference method, etc.; instead of interference measurement method, it includes transmission knife method, line measurement method, and I?〇nchi method. The conventional technique related to the present case is the optical profiler method, which is based on the white light interference theory, and records the contour surface by direct interference, and the composition mechanism includes a microscopic image capturing system. The phase shifting system and the interferometer system are composed, and the measuring principle is to measure the phase difference between the wavefront of the device to be tested and the reference wavefront by the interferometer, and the wavefront of the device to be tested is reflected by the contour of the surface to be tested. The reference wavefront is generated by the reference surface reflection of the reference plate; the interference fringes are generated due to the phase difference between the reference wave fronts, and the stripe can reflect the difference between the surface height and the surface, and then the surface porch is analyzed by the CCD image. . The optical path of the wheel temple instrument uses the phase shifting technique to obtain the phase difference and uses the phase reconstruction technique to reconstruct the three-dimensional surface rim structure. This instrument is used in many applications such as surface structure, aspherical microarray structure, film thickness measurement, etc. However, the optical profilometry method can search for the interference fringes of all the lenses, but the innermost and outermost ring of the interference fringes, the f-method still cannot touch the phase angle, and the cover phase, the phase angles of the two parts are not - It is the state in which the twist changes to 18 degrees. In addition, the remaining ring phase angle changes from the twist to 180 degrees, so the change from the dark is - a complete (10) degree. The change of γ' leads to the lack of deficiencies and shortcomings in the conventional micro-transparent list, and it is still necessary to improve the evolution. In view of the problems in the above-mentioned conventional microlens array surface contour detection systems and methods, how to develop a mine design with an ideal and secret key, it is awaiting the industry and the people who are interested in 201144753 to think about breakthroughs. Goal and direction. In this case, the inventor has been engaged in the manufacturing development and design experience of side products for many years. After the above, after the design and prudent evaluation of Pingjia, the invention has finally become practical. SUMMARY OF THE INVENTION The object of the present invention is to provide a microlens array surface profile detection system and its detection force method, and the problem to be solved is to aim at how to develop an array detection system and its detection method. Thinking about breakthrough; ^, Li ~ real money micro lens 4 ♦ Feng Hu title technical features, in terms of system, the system includes a fine-tunable positioning position, ΪΪ, Α, silk dry noodle group, towel central control And the image processing operation module _ composition; its ~, the complex _' outer ring interference fringe and wheel temple analysis, operation; the core design of the present invention is mainly that the image processing operation module is identified by the circular knife reading area The method finds the center position of each ring, and the method of bottom segmentation and area recognition of the microlens array image automatically finds the entire microlens array image, according to the actual central ring area and the ideal central ring area. The ratio of the interference == ring phase angle change amount, and the amount of change in the brightness value of the ring stripe of the first section and the change amount of the brightness value of the ring stripe of the first section of the first section proportion, To judge the amount of the mysterious pattern, the area earned and the brightness _ method can be freely cut, the method of selecting the accuracy is better to use the method, then find the maximum and minimum values of the brightness curve of each section, respectively The brightness of the segment phase angle changes from 0 degrees to 18 degrees, and then the surface height difference of the micro-ships of the area 2 is obtained; thereby, the design of the touch is used to make the prior art of the present invention: It will check the interference of the looking mirror, and the scale will judge the interference phase (4), and the system will carry out the county-level wheel alignment. [Implementation] Please refer to the figures in Figures 1 and 2 for the comparison of the invention. A preferred embodiment, but these embodiments are for illustrative purposes only. 201144753 is not limited by this structure; the detection system is used to detect the surface profile of a micro-lens array. The detection system A includes the following components: - a finely tunable positioning portion 1G having a placement surface u for positioning the microlens array Q5 and a finely tunable positioning portion 1G capable of At least χ, γ axis, two horizontal axial displacement adjustment, the fine-tunable The placement positioning portion 10 can be configured by a χ γ-axis number-making platform (XY_TaMe), and the XY-axis numerical control platform is used to perform precise displacement of the microlens array 〇5, so that the entire microlens array 05 can be completely scanned. And can perform the action of positioning the microlens _ Q5;

The optical image capturing module 20 is disposed at a space above the fine-adjustable positioning portion 1 and disposed above the mounting surface u. The optical image capturing module 20 includes an image capturing device 21 (a CCD camera can be used) and a The microscope group 22 is configured to be in a relative position with the image manipulation device 21; the optical interference module 30 is a Fischer interferometer architecture, including a laser emitter 3 - an optical fiber 32, a vibrator and a polarizer 33, a half reflector 34, and a reference plate 35, wherein 'the vibrator and the polarizer 33 are placed in front of the transmitting end of the laser emitter 31, and the optical fiber (four) is placed In the case of shocking the polarized light >i 33, the Leixian w is exported, and the reflection plate % is set between the fiber-splitting group 22 of the optical pick-up device 2D of the optical access group 2, and the light derived from the optical fiber 32 is finely extracted. The light beam W is reflected and guided to the microscope group 22, and the reference plate 35 is disposed between the micromirror group 22 and the placement surface U provided by the fine-tunable positioning portion 1G to utilize the laser light $ to the second side of the reference plate milk. Partially reflected light 'as a reference wavefront for detecting the surface profile of the microlens array; - central control unit 40, For the "computer," and the fine-tunable positioning positioning unit 1G image module 20, fresh interference Hua 3G three links "borrow (10) job control function; - image processing operations · 50, set _ towel central control Qing 4G, using the image data taken by 郷 包括 包括 包括 包括 包括 包括 去除 去除 去除 去除 、 、 、 、 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找The logical operation is f; ^ where the image processing operation module 5 选择 selects the phase angle of the center of the interference fringe according to the ratio of the area of the central circle of the actual central torus, and The ratio of the change in the luminance value of the ring stripe of the segment to the ring stripe of the ideal i-th segment is greater than the amount of change in the phase angle of the ring stripe at the outermost base of the interference fringe.里 201144753 The detection method of the detection system A described in 'Please cooperate with the first and second diagrams' includes the following steps. (A), the micro-adjustable positioning part 1 开启, the optical imaging module is turned on. 2) image stripping device 21 and laser emitter 31 of optical interference module 30; (B), through-threading, the image capturing device is finely adjusted to set the wiring of the miscellaneous portion y (〇) And setting the moving distance of the fine-adjustable positioning portion 1G. For example, if the size of the microlens array to be used is 86眶86 and the array form, the amount of each shift can be set to 〇. imm; (8), using step (6) The set moving distance is shifted in the χ axis direction; (Ε), ^ ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( Lens _ °5 interference bar _, through the = case;, read processing to remove noise, miscellaneous and easy to analyze the image (6), ί touch 50 turn image to find the township, then according to == =:;=County_June, "Looking on the surface contour: like == searching for all the interference fringes to calculate the entire lens radius Judging the amount of the inner and outer 0 ring fringe phase of the two stripes, the angular variation, the brightness of the ring strip of the ring of the ring of the outer ring weave at the outermost weave bottom The amount of change is compared with the ratio of the amount of change in the ideal area of the first area to determine the phase angle change (this part is accommodated in the 1G) (1) for the fortune (10), after the Wei (such as recommended), the X-axis direction Displacement (for example, 100 work times, and then let the fine-tunable placement positioning portion 10 continue to enter (1) repeat steps (E) to (8) until the full-body microlens array is detected. 201144753 wherein the detection method The principle of interfering with the reflected light generated by the optical interference is to form a ring-shaped interference fringe (ie, Newton's ring), and the ring-shaped interference fringe=turn number is used to obtain each of the lens f-curls The height of the shape; and the brightness of each ring of the annular interference fringes is not processed, so that the surface wheel of each lens is obtained according to the light of the microlens array j, and the complex circular interference is difficult. The arithmetic processing of the arithmetic module can simultaneously obtain the Coordinate position of the center point of the annular interference fringe. The following details of the detection of the present invention are further explained: Image processing: (please refer to the picture shown in Fig. 2) The image-aged Wei sister from the side of the film side _ 3 Figure _), this image processing is to separate a microlens _, read can be individually processed for a single microlens. Image pre-processing: in the ^ ^ 理 理 / can use the tilt and open operation 'through these two The item is processed to eliminate the image color, and the lung image binarization operation is performed, and the image is converted into black and white under the —_, and the circular interference fringe of each microlens can be clearly seen at this time. Image feature points: 1. Line image segmentation, the most pixels are judged to ride the scene, and the image segmentation process is used to facilitate the subsequent steps to find the center of the early microlens and its center circle; 2. = whether each image segmented is _, Starting from the center of each image, Yu Yu. , type;, 9G,,. Extend to 'analyze whether the four sides of the radius are the same, if the same, then determine the circle ^ will determine the image of the Lai type, analyze its size, the area is the smallest to deceive it as the center circle; Find the center circle, and find the center The center of the circle. Object segmentation: First, a closed pixel is divided into several objects, and each object can be divided into n objects. Among the n objects, = 2 = Pixels number can be obtained. The object with the largest area will be defined as the background, that is, the portion of the bottom of the microlens array base 201144753. Center search: The center search is to find the central axis of the divided object) and the coordinates of the vertical direction (y-axis) are added separately. The bottom: the heart, the horizontal direction of the white pixel in the object (χ and the total pixels of the object, Reference formula such as the center (X pumping) 卬抒--there is a 斤 coordinate phase force 〒 total pixel center (y-axis) ---all y coordinates phase 9ta. Total pixel circle judgment:

To confirm whether the divided objects are all fine, if in this shadow (4) (the interference ring is curved or semi-circular, such as 微 荃 荃 荃 ❾ ❾ ❾ , , , , , , , , , , , , , , , (Recognition), after ", -.. f extends out, encounters the first black pixel to stop, four stretched ^, left thin W pole", hired object __ = right = limit: get the object _Dimension of the diameter. Towel, read the right limit towel two distance radius distance L towel · Jane Wei 1 distance ^, towel heart and left pole fine" dry money away ~; the radius distance between the center and the lower limit point, where:

DCR = Pr - Xc

Dcl= Xc- PL ^cr ~YC— PT Dcb = Pb - Yc The radius of the positive circle is the same, so the maximum and minimum values of the four radial distances are subtracted, and the right distance is greater than a set tolerance τ ( If the value is less than the distance, and ~ τ Ρ ), the closed area is judged to be non-peripheral. If the 忍 忍 Τ 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜8 201144753 Microlens Center Circle Search: Λ When the background and non-circular have been excluded, then the center circle of the microlens can be searched. In the foregoing segmentation method, 'a microlens can be divided into several objects and each object is concentric. If the center of the object is found to extend to the background, the object corresponding to the microlens can be known, and then the corresponding object is The object area is the center circle of the microlens compared to the object with the smallest area and closest to the center of the circle. Microlens Positioning: After obtaining the center circle of the microlens, the center of the microlens is obtained. By extending the center of the circle to the background of the interference image, the position of each microlens and the radius and contour of the entire lens can be obtained. The method is ❿ from the center of the circle to 0, -180, 90. -90. Extending out, the extension in the four directions is the right limit ~, the left limit A, the upper limit, and the lower limit h. Through these four extreme coordinates, you can use (9), outside), (h, h), (\, Α), (~, outside) to frame a single microlens (as shown in Figure 1) to locate And a single microlens structure diagram is as shown in Figure 9. Analysis of Fizeau interferometer and lens array: The principle of Fizeau interferometer can be used in Guanggan County. The distance between the partial mirror of the Fizeau interferometer and the air wedge of the object reflection surface is d, because the light reflected by the object reflection surface will Compared with the action surface of the partial mirror, the optical path difference is 2d, so the phase difference required for the interference of the two lights is formed, and the interference fringe is formed. Obtained by CCD, the distance of the air wedge spacing can be calculated from the number of black interference fringes. The formula of black interference fringe is as follows: 2d=(n+l/2) λ η = is the number of stripes d: air wedge interval λ · inter-air light wave The wavelength of 201144753 formed the 7F 'Hegan Lai is the reflection of the light reflected by the __ solution surface = Chengcheng strip _ some interference _ 贞 鳞 咖 咖 咖, s ~). Use (^), (^), (two two, wide) to frame a single microlens after 'reducing the grayscale value of the image, together with the _ another "' bribe lens in the "), 4, (~ force) box Miscellaneous, along the curve through a single micro-transparent: =:= to its grayscale value, please refer to Figure 8, from left to right, according to the value of the Μ and the second section,... The brightness curve. Find the maximum 2 minimum value of the 7th, section brightness curve Α, say the brightness value of the brightness _ prime (9)... The maximum value of the section bright 7 curve line and the maximum brightness of the 7·_] section One point factory (4): The minimum value of the brightness curve of the 7th section is the same as the minimum brightness value of the Chuan section; in each section, the ^ stripe green value / with the first - sister light woven 1 second sister degree _ 成 成 丨 1 I 1 ε, · ε2 where / / 厶, core relationship is as follows: / OC exhaust • do = five / + β earthy table tennis C (W0 / for the first light and the second light The interference fringe brightness must be the first reflected light intensity

The core is the second reflected light intensity. It is known that the brightness of the interference fringes in the segment exhibits a distribution of the cosine curve. The phase angle of the interference fringe changes from twist to 360 degrees, showing a change from light to dark to bright, representing the undulation of the microlens surface contour λ/2, the innermost and outermost ring of the interference fringe. The method is that there is no way to judge the phase angle. That is to say, the phase angles of the two parts do not necessarily change to the degree of twist. In addition, whether it is bright or dark, it is a ring. The lower ring phase ^ changes from twist to 180 degrees, and the change from bright to dark is a complete 180 degree change. The phase angle changes from twist to ^刖, which means that the surface roughness of the microlens is λ/ 4 'So we develop an innovative party, to judge 201144753, the ring _ turn _, and _ dirty _ stripes of her (four) into a complete change, we can use the innovative methods we developed to judge The amount of change. Judging the change of the phase angle of the ring stripe of the center ring (α), please refer to the actual situation, the ring area and the ideal center ring area are the same as the actual center ring area. . Assuming that the center ring is the third segment, the ideal central ring area can be calculated by multiplying the area of the second ring (5) of the outer periphery by the coefficient:

a is the center ring area / the area of the ring of the section τι is the area ratio coefficient to determine the amount of change in the angle of the ring stripe at the outermost base (the first section) (..., please refer to the 12th. The phase angle change amount (0) is determined by the ratio of the change amount of the luminance value of the ring stripe of the first segment to the change amount of the shell value of the ring stripe of the ideal first segment. The value change amount can be obtained by multiplying the change in the luminance value of the ring stripe of the two segments by the coefficient, or by the heterodyne of the change in the luminance value of the second and third segments: β where

Ag is the change amount of the luminance value of the ring stripe of the first section. The amount of change in the luminance value of the ring stripe of the second section is τ2, which is the ratio of the change value of the luminance value. 201144753 Let △ be the first! In the section, she changes the brightness from the Q system (10) degrees.

When / = 1, △, JlizE^L β When j* = /7, △, = a 嚷i < λ is the difference between the maximum value and the minimum value of the brightness curve, Δ=|υ,| The brightness value when the phase angle of the second segment is 9 degrees

When / = 1, child = 7; - A 2

When 1<J· = 77, the brother A 2 exempts the curve, _; / _; and (4), the difference between her brother, the cos'1 g(x, y)-At 1 Δ ,./2" cos [Δ, + /2 w · JL —I » ^ Let the segment where the center circle (A) is the nth segment, then the segment from the second segment to the fourth segment is less δά (χ): λ' cos-1 g{x,y)-A~ -cos*1 g(x + l,3;)-X.)1 _4π_ L V2" L V2" is accumulated from the first segment to The height difference of the surface of the microlens for each adjacent pixel of the segment where the center circle of the microlens is located is calculated by Lens SagUcO ~ △d = geisha / (χ) 1 Please cooperate with the mail For the interference of the residual gongs, the cake counts green _, assuming that U is the translucent 12 201144753 _ the most quotient of the mirror', then take the two points JOo / small to, w ", the body can be the two ends of the surface Point), the suspected slope of the segment of the line segment is m2 X2 ~Xt hzh. For the line segment M and the line segment π, the vertical line L and the heart are respectively m, = *-- wi m2% then l, 厶The equations are A: y~ mx' x + cx 厶2: less = W2'JC + C2 Using the simultaneous equation of L h, the intersection of the two linear equations can be obtained.

X =-a=£L. Wj '-m' Calculate the county of Wan, /^阙 to obtain the interference of the alcohol radius of the factory. The rectification of the r=smoke flat pattern (4) 'Do not mean to go to Caina or The reference point, if the light bends on it, produces __表尔-α, 六阿度. We can arbitrarily make a certain point on the surface of the workpiece as the reference point, and the air wedge height of the whole surface of the surface of the workpiece (please refer to the figure shown in Figure 15), the most trick 13 201144753 to buckle off the tilt height of the optical plate, that is, The surface of the workpiece is undulating. At this time, Thai #—仏1 is given, that is: 〇 = r1-2/?c/ +, d is small', the quadratic term can be ignored, and the person 2_ is rf = —

2R assumes that the gap of the m-th order of the m-th circle is & dn-m A /2

2

2R =m λ/2 After simplification, the wavelength of the dark line of the first loss interference fringe towel can be obtained; the relationship of I is as follows: a and the radius of the spherical microlens 疋 1 rm = 4 mRX R τ λ λ The radius of the ship mirror county of this embodiment··] Array size: io_0ramxl.2mine The invention is the image of the stagnation interference county hardware _ _ yu image, the new can be Qian Lei shot length 632 Jane, and the 4 to The image is as shown in the 4th circle, and then the curved wheel temple of the lens is analyzed as 9. 9 h _ ' and the mathematical formula is used to verify that the height of the rim of the lens is 】 The contact system of the measuring lens _ the detection system, by the image capture device ^ 201144753 to remove the micro-transparent difficulty, and then (four) f 彡 再 再 菲 菲 菲 菲 菲 菲 菲 菲 菲 菲 菲 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四«News, Lens Yu Lai' is calculated to reduce the difference by less than 1%, and the error of material height is less than 1%. The advantages of the invention: the gas placement of the wheel of the wheel of the righteousness of the 'lack of money and wealth law' can be fine-tuned (four), wire transfer amount, silk dry frequency group, towel center (four) do miscellaneous processing operation mode •, =, m its optical interference According to the actual central ring area and the ideal center_area, the interference zone's roundness phase angle change is determined according to the actual center ring area and the ideal center_area, and the outermost area is selected according to the actual circle. The ratio of the change in the brightness value of the ring stripe to the change in the redundancy value of the inner ring stripe determines the unique series of the ring stripe phase angle change at the outermost base of the interference fringe. Both methods can be freely selected to improve the full precision. The invention can accurately search for the revelation of the job mirror, and accurately touch the innermost and outermost ring phase angles of the moiré, so as to achieve the advantages and progress of the large surface S to enhance the freshness and quality of the surface contour of the microlens array. The invention disclosed in the above embodiments is intended to be illustrative of the invention, and is not intended to limit the scope of the invention. The spirit and principles are subject to change and modification to achieve equivalent purposes, and such changes and modifications shall be covered by the scope of the patent application as described later. 201144753 [Circular Simple Description] Fig. 1: A schematic diagram of the detection system architecture of the present invention. Figure 2 is a block diagram showing the flow of the local detection method of the detection system of the present invention. Figure 3: Schematic representation of the microlens array of the present invention. Fig. 4 is a diagram showing the judgment of the divided object of the present invention (arc or semicircle is judged to be non-circular). Figure 5: Schematic diagram of the four radius distances of the articles of the invention. Figure 6: Schematic diagram of the Fizeau interferometer of the present invention. Figure 7 is a schematic view of the annular interference fringes of the present invention. Fig. 8 is a schematic view showing a gray scale value change curve of the present invention. Fig. 9 is a view showing the structure of a single microlens of the present invention. Figure 10 is a schematic view of a single microlens image of the present invention. Fig. 11 Fig. 12 Fig. 13 Fig. 14 Fig. 15 Schematic diagram of the amount of the product of the ring of the invention. The present invention determines a curve of the change in the phase angle of the annular stripe at the outermost base. FIG. Schematic diagram of calculation of radius of curvature of the present invention The present invention is related to the overall appearance of the Philippine traitor. 201144753 [Explanation of main component symbols] Microlens array 0 5

Detection system A 10 11 2 0 2 1 2 2 3 0 3 1 3 2 3 3 3 4 3 5 40 5 0 Fine-tunable placement positioning part placement tabletop optical imaging module image capture device microscope group optical interference mode Group laser emitter vibrator and polarizer semi-reflector reference plate central control unit image processing operation module 17

Claims (1)

201144753 VII. Application scope of the patent: The micro-lens _ surface wheel is used to detect the surface contour of the microlens array. The detection system includes a fine-adjustable positioning part and an optical image capturing module. An optical interference module central control unit and an image processing operation module; wherein the image processing operation module is disposed in the central control unit to include the image data captured by the scene manipulation device The image processing operation module is removed from the image processing operation by removing the miscellaneous point, finding the image feature point, generating the interference fringe with the center ring and the complex outer ring, and contour analysis and tabulation; The method of segmentation and area recognition can find the position of the u in the circular, and the judgment of the image base of the microlens array can automatically find the background of the interference image of the whole microlens array according to the method of pattern segmentation and Lu area recognition. (ie, the base portion of the microlens array), according to the area ratio method and the brightness ratio method to determine the phase angle change of the first segment and the central segment, The product proportional method judges the change of the phase angle of the interference fringe ring according to the ratio of the actual ring area to the ideal ring area. The brightness ratio law is based on the actual value of the ring stripe and the ideal ring stripe. The brightness value change ratio, the area ratio method and the brightness ratio method can be freely switched. The method of selecting a higher precision is used to determine the amount of the ring stripe at the outermost base of the interference strip, and then find The maximum value and the minimum value of the curve of each segment are respectively corresponding to the measurement of the phase angle of the segment from 〇 to 18〇, and then the corresponding microlens surface between the elements in the segment is obtained. The height difference. 2. The microlens array surface wheel gallery detecting system according to claim 1, wherein the finely tunable positioning portion is provided with a mounting surface for positioning the microlens array, and the The fine-adjustable positioning positioning portion is capable of performing at least X and two horizontal axial displacement adjustments; the optical image capturing module is disposed at an interval above the fine-adjustable positioning positioning portion, and includes an image capturing device and A microscope group is formed 'the microscope group is opposite to the image capturing device; the optical interference module is applied with a Fizeau interferometer architecture' including a laser emitter, an optical fiber, a vibrator and a polarizer, and a half reflection a plate and a reference plate, wherein the vibrator and the polarizer are placed in front of the emitter of the laser emitter 201144753. The fiber is placed outside the vibrator and the polarizer to direct the laser light, the semi-reflection The plate is disposed between the image-aged device of the optical image-taking age and the button group, and is guided by the laser light derived from the fiber to the microscope group, and the reference plate is placed in the microscope group and the fine-tunable positioning position is set. Between the placement surfaces, the laser light is diffused into two or more light beams to serve as a surface of the microlens array; the towel is placed on the side of the micro-removable mosquito position, and the optical imaging module The optical interference module is electrically connected to achieve the function of integrated control actuation. 3. The microlens array surface porch detection system according to item yi of the patent application, wherein the fine-adjustable positioning position is an -XY axis numerical control platform (XY_Table), and the side button axis numerical control platform is performed. The precise displacement of the microlens array enables complete scanning of the entire microlens array and positioning of the microlens array. (If you apply for the first part of the micro-parent _ surface wheel _ measuring button, the central control department of the towel is a computer. 5. If you apply for the full-length 丨 丨 之 微 微 微 微 微The image manipulation device is a high-magnification CCD camera. 6. A method for detecting a surface contour of a microlens array according to a detection method of the detection system described in the patent application section Chen's detection method includes: • (1), opening The micro-adjustable positioning portion, the image-age device of the optical image capturing module, and the laser emitter of the optical interference module; (8), through the -Weiqi ride, Lai Qiji, the fine-tuning type of the setting of the connection (C), set the movement distance of the fine-adjustable positioning position; (9), use the moving distance set in step (c) to perform the X-axis direction displacement; (8), =〇)) every x-axis setting · The image processing device performs the image capturing operation; (8) the image capturing processing device obtains the interference fringe image of the microlens array through the image processing computing module, and removes the noise and the noise by the image processing method to obtain the easy analysis. Image, image, illustration 201144753 (G), borrowing = the image processing computing module searches for image feature points by image processing, and separates all ring patterns to confirm whether the segmented objects are circular, and thereby find the center circle, and then according to the Looking for the image feature points of the outgoing image, the generation of the interference fringe thief with the towel riding and the complex (four) and the outer ring is analyzed, and the result of the traverse analysis is plotted as a graph; and wherein: The 'v image processing computing module searches for all the interference fringes to calculate the radius and contour of the entire lens, and turns off the singularity of the outermost _ ring 敝 her angle change, which determines the circle of the center ring The variation of the phase angle of the ring stripe is judged according to the actual central ring area and the ideal circle of the towel ring _ _: the amount of change in the phase angle of the ring stripe at the outermost base is turned off, according to the circle of the actual section] The amount of change in the brightness value of the ring stripe is determined by the ratio of the change in the brightness value of the ring stripe in the first region and the ring stripe; (H) The field is placed in the X-axis direction. After moving the set number of times, let the The γ-axis direction displacement can be set by the fine-tuning positioning unit to set the distance, so as to transform into the sub-column image taking path, and then the fine-tunable positioning is placed in the displacement of the profit direction; (I) Repeating steps (8) to (8) until detecting a full-body microlens array; such as the microlens array surface profile detecting method described in the above-mentioned Japanese Patent Application No. 6, wherein the detecting method is based on the principle of the Fizeau interferometer, The interference light generated by the optical interference module interferes with each other to form a hetero-interference enthalpy, and the interfering interference strip is brewed, and the lens is bent by 3 degrees of the rim; and the paste-shaped interfering limbs are characterized by the same brightness* The point is subjected to an arithmetic process 'to obtain a thin surface wheel of each lens; and the arithmetic processing of the complex image processing operation module generated by the complex interference fringe generated on the microlens array optical image can be simultaneously obtained. The coordinates of the center point of the annular interference fringes. For example, the method of applying the microlens array surface wheel miscellaneous method of the sixth aspect of the invention, the ideal central annular area of the towel is calculated by multiplying the area of the second ring of the center periphery by a coefficient, or by 201144753 The outer and outer rings of the heart are surrounded by the outer dimensions of the ring. 9. The microlens array surface profile detecting method according to claim 6, wherein the ideal first segment ring luminance value change amount is multiplied by a luminance variation of the ring segment of the two segments. The coefficient is derived or obtained by the difference in the amount of change in the luminance values of the second and third segments. twenty one