CN102192704B - Measurement method for interference system - Google Patents

Measurement method for interference system Download PDF

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CN102192704B
CN102192704B CN 201010134521 CN201010134521A CN102192704B CN 102192704 B CN102192704 B CN 102192704B CN 201010134521 CN201010134521 CN 201010134521 CN 201010134521 A CN201010134521 A CN 201010134521A CN 102192704 B CN102192704 B CN 102192704B
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interference
height
image
corresponding
area
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CN 201010134521
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CN102192704A (en )
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廖界程
张维哲
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致茂电子(苏州)有限公司
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Abstract

The invention relates to a measurement method for an interference system. By the method, objects to be measured are vertically scanned in the interference system, and after a plurality of interference images are sequentially generated on a plurality of scanning heights respectively, a two-dimensional feature image is generated by using the interference images. The method comprises the following steps of: sampling each pixel point in each interference image to obtain an interference region area in the interference image, and establishing height-interference area corresponding ratio informationby using the scanning height and the interference region area which correspond to the interference image; capturing a relative peak value in the interference region areas corresponding to the interference images and defining the scanning height corresponding to the relative peak value as characteristic height; and capturing the characteristic height, and superposing the characteristic height and first interference images with the preset number up and down so as to generate the two-dimensional feature image, which does not contain an interference phenomenon, of the object to be measured.

Description

干涉系统的测量方法 System interferometric method

技术领域 FIELD

[0001] 本发明涉及一种测量方法,特别是一种干涉系统的测量方法。 [0001] The present invention relates to a measuring method, in particular, it is a measure of the interference system.

背景技术 Background technique

[0002] 在测量技术的领域中,有非常多的测量方法被广泛的运用,干涉系统即为其中一种,一般来说,干涉系统可以被运用来测量待测物的二维与三维表面形貌。 [0002] In the field of measurement technology, there are many measuring methods are widely used, that is one of the interference system, in general, interferometric systems can be utilized to measure the three-dimensional surface of a two-dimensional shape of the analyte appearance.

[0003] 请参阅图1,图I为待测物的示意图。 [0003] Please refer to FIG. 1, a schematic diagram of analyte FIG. I. 白光干涉系统应用光干涉原理,先以白光照明系统透过准直透镜发射平行光,并经过45度分光镜反射后进入干涉显微物镜,而显微物镜会将入射光分成两道光,一道经由参考镜面反射,另一道则经由置放于扫描平台上的待测物100反射,最后二道反射光再度重合并因光程差不同产生干涉,干涉影像再经45度分光镜、成像物镜聚焦而成像于影像感测装置。 White light interferometry system application interferometry, white light illumination system to emit parallel light transmitted through the collimator lens, beam splitter and reflected through 45 degrees into the interference microscope objective, and the incident light into two microscope objectives will dynasty, via a Referring specular reflection, and the other channel 100 through the reflective scanning platform disposed on the analyte, the final two reflected light again combined weight difference due to the different optical path interference, the interference image and then the beam splitter 45 degrees, the imaging objective and focus an image on image sensing device.

[0004] 通过干涉显微物镜或扫描平台沿垂直扫描路径Dl的移动,使影像感测装置能接收到一系列由不同光程差所产生的干涉影像,而计算机即可对所有的干涉影像中的每一像素点进行分析,以得到待测物100的表面形貌。 [0004] or by interference microscope objective scanning platform moves along a vertical scanning path Dl of the image sensing device can receive a series of images of the interference optical path difference generated by different, and the computer can all images of interference analyzing each pixel, to obtain the surface topography of the 100 analytes.

[0005] 请参阅图2,图2为具有干涉条纹的二维形貌图像。 [0005] Please refer to FIG. 2, FIG. 2 is a two-dimensional morphology image of the interference fringes. 虽然白光干涉系统在测量待测物100时,可以经由上述的分析方式得到待测物100的表面形貌高度信息,并通过高度信息得到待测物100的三维形貌图像,然而,由于干涉显微物镜在聚焦时会产生干涉现象,造成影像感测装置所接收到的二维形貌图像IO含有干涉条纹S,无法清楚的分辨待测物100的形貌边界。 Although the white light interference in the measurement system under test 100, the surface height information obtained topography analytes 100 via the above-described type of analysis, and the topography obtained image was measured by the height information 100, however, since significant interference micro objective lens upon focusing interference phenomena occur, resulting in an image sensing apparatus of the received two-dimensional morphology image of interference fringes comprising IO S, the morphology can not clearly distinguish the boundary 100 of the analyte.

[0006] 而现有技术为了解决二维形貌图像IO含有干涉条纹S的问题,发展出了两种方式,其中一种方式是在干涉系统通过垂直扫描获得多张干涉影像,并由多张干涉影像得到待测物100的三维形貌图像后,再通过调整影像感测装置的位置到二道反射光不会产生光干涉之处,以避免二维形貌图像IO中含有干涉条纹S,然而此一测量方法待测物100的三维形貌图像与二维形貌图像IO通过不同的扫描过程分别取得,因此此一测量方法较传统的测量方法来的复杂。 [0006] In order to solve the prior art two-dimensional morphology image of interference fringes S IO containing problems, the development of the two ways, one way is to obtain multiple interference images by the vertical scanning interferometer system, by a plurality of after the interference image to obtain three-dimensional topography of the image under test 100, then the two reflection by adjusting the position of the image sensing device does not generate optical interference of light at the two-dimensional topography to avoid image interference fringe contained IO S, However, this method of measurement analytes and the two-dimensional image of the topography morphological image acquired IO 100 respectively different scanning process, so this measurement method than the traditional method of measuring complex.

[0007] 另一种测量方法于干涉系统通过垂直扫描获得多张干涉影像,并由多张干涉影像得到待测物100的三维形貌图像后,再将干涉显微物镜更换为非干涉的显微物镜,以避免光干涉的产生,并藉以避免二维形貌图像IO中含有干涉条纹S,然而此一测量方法相较于传统的测量方法不仅需要多余的扫描流程,且需要多制备一组非干涉的显微物镜,亦增加了硬件的成本。 After [0007] Another method for measuring the interference system interference images obtained by a plurality of vertical scanning by a plurality of interference images to obtain the topography of the image under test 100, then the interference microscope objective was to replace the non-interference micro objective lens, in order to avoid interference of light, and so as to avoid the two-dimensional morphology image of the interference fringe contained in the IO S, however, this conventional method of measuring a measurement compared to the scanning process requires not only superfluous, and requires the preparation of a set of multiple non-interference microscope objective, but also increases the cost of the hardware.

发明内容 SUMMARY

[0008] 本发明的一目的在于提供一种干涉系统的测量方法,此测量方法的目的在于不增加硬件成本与撷取待测物影像流程的情况之下,得到清晰的待测物的二维形貌图像。 Under [0008] an object of the present invention is to provide a method for interferometric measurement system, the purpose of this measurement method is that no additional hardware costs and process images captured analytes, the clear two dimensional analyte topography image.

[0009] 为了实现上述目的,本发明提供一种干涉系统的测量方法,用以于一干涉系统沿一垂直扫描路径对一待测物进行一垂直扫描,并在该垂直扫描路径的多个扫描高度依序分别产生多张干涉影像后,藉以利用这些干涉影像以产生一二维形貌图像,其特征在于,该方法包括以下步骤: [0009] To achieve the above object, the present invention provides a method of measuring an interference system for interferometric system in a direction perpendicular to a scan path test was a vertical scanning and vertical scanning of the plurality of scanning path after the height of the plurality of sequential interference images are generated, whereby using the two-dimensional interference image to produce a morphological image, characterized in that the method comprises the steps of:

[0010] (a)对各干涉影像中的每一个像素点取样,以得到该干涉影像的一干涉区域面积,并利用该干涉影像所对应的该扫描高度与该干涉区域面积建立一高度-干涉面积对应比信息; [0010] (a) for each pixel in each of the interference image of the sample, to obtain the interference image an interference region area, and using the interference image corresponding to the scan height to the interference area of ​​the establishment of a height - Interference ratio information corresponding to the area;

[0011] (b)利用该高度-干涉面积对应比信息,在这些干涉影像所对应的这些干涉区域面积中撷取一相对峰值,藉以撷取该相对峰值所对应的该扫描高度,并将其定义为一特征高度;以及 [0011] (b) by using the height - interference ratio corresponding to the area information, to retrieve such a relative peak in the interference area of ​​the image corresponding to the interference, thereby capturing the scanning of the relative height corresponding to the peak, and It is defined as a feature height; and

[0012] (C)撷取该特征高度与邻近该特征高度上下各一第一预定张数的干涉影像进行一数值处理,以产生该二维形貌图像。 [0012] (C) retrieving the characteristic feature height adjacent the vertical height of each of the interference image a predetermined number of first performing a numerical processing, to generate the two-dimensional image topography.

[0013] 所述的干涉系统的测量方法,其中,该数值处理为一影像叠加处理。 The method of measuring the interference system according to [0013], wherein the numerical processing is an image superimposing process. [0014] 所述的干涉系统的测量方法,其中,该高度-干涉面积对应比信息用以记载于各扫描高度下,所对应的干涉影像中的该干涉区域面积所占的面积百分比。 The method of measuring the interference system according to [0014], wherein the height of the - interference information corresponding to the area ratio of the percentage of the area used to record the height at each scan, the image corresponding to the interference in the occupied area of ​​the interference.

[0015] 所述的干涉系统的测量方法,其中,当该干涉系统沿该垂直扫描路径对该待测物进行该垂直扫描时,于该垂直扫描路径的一干涉波包的范围内产生一第二预定张数的干涉影像。 The method of measuring the interference system according to [0015], wherein, when the vertical scanning interferometer system the vertical scanning path along which the analyte, generating a first interference in the range of a wave packet of the vertical scanning path interference image predefined number two.

[0016] 所述的干涉系统的测量方法,其中,该第一预定张数相等于一半的该第二预定张数。 The method of measuring the interference system according to [0016], wherein the first predetermined number of sheets equal to the second half of the predetermined number of sheets.

[0017] 为了实现上述目的,本发明还提供一种干涉系统的测量方法,用以于一干涉系统沿一垂直扫描路径对一待测物进行一垂直扫描,并在该垂直扫描路径的多个扫描高度依序分别产生多张干涉影像后,藉以利用这些干涉影像以产生一二维形貌图像,其特征在于,该方法包括以下步骤: [0017] To achieve the above object, the present invention further provides a method for measuring interferometer system for an interferometer system in a direction perpendicular to a scan path test was a vertical scanning and the vertical scanning path in a plurality of after scanning the height of a plurality of sequential interference images are generated, whereby using the two-dimensional interference image to produce a morphological image, characterized in that the method comprises the steps of:

[0018] (d)对各干涉影像中的每一个像素点取样,以得到该干涉影像的一干涉区域面积,并利用该干涉影像所对应的该扫描高度与该干涉区域面积建立一高度-干涉面积对应比信息; [0018] (d) for each pixel in each of the interference image of the sample, to obtain the interference image an interference region area, and using the interference image corresponding to the scan height to the interference area of ​​the establishment of a height - Interference ratio information corresponding to the area;

[0019] (e)利用该高度-干涉面积对应比信息,在这些干涉影像所对应的这些干涉区域面积中撷取至少二相对峰值,藉以撷取这些相对峰值所对应的这些扫描高度,并将其定义为至少二特征高度;以及 [0019] (e) using the height - interference ratio information corresponding to the area, capturing at least two of these relative peak in the interference area of ​​the image corresponding to the interference, thereby capturing the scanning relative peak heights of the corresponding, and which is defined as at least two feature height; and

[0020] (f)撷取这些特征高度与邻近这些特征高度上下各一第一预定张数的干涉影像进行叠加,以产生该二维形貌图像。 [0020] (f) capturing the feature height adjacent the vertical height of the features of each of the interference image a predetermined number of first superimposed, to generate the two-dimensional image topography.

[0021] 本发明对照现有技术的功效: [0021] The present invention controls the effectiveness of the prior art:

[0022] 相较于现有的干涉系统测量方法,本发明于干涉系统通过垂直扫描获得多张干涉影像后,可以直接通过这些干涉影像获得不含干涉条纹的待测物的二维形貌图像,不需要增加硬件成本或者进行额外的撷取待测物影像流程,不仅节省成本,且测量过程亦较为简便。 After [0022] Compared to conventional interferometric measurement system, the present invention is to obtain a system of interference by a plurality of vertical scanning interferometry images can be obtained free of the two-dimensional morphology image of the interference fringe was measured directly through these interference images without adding additional hardware costs or analytes image capturing process, not only the cost, and also the measurement process is simple.

[0023] 本发明所采用的具体实施例,将通过以下的实施例及图式作进一步的说明。 DETAILED employed [0023] Example embodiments of the present invention will be further illustrated by the following examples and drawings.

附图说明 BRIEF DESCRIPTION

[0024] 图I为待测物的示意图;[0025] 图2为具有干涉条纹的二维形貌图像; [0024] FIG. I is a schematic view of the analyte; [0025] Figure 2 is a two-dimensional morphology image of the interference fringes;

[0026] 图3为高度-干涉面积对应比信息; [0026] FIG. 3 is a highly - interference ratio information corresponding to the area;

[0027] 图4为干涉系统于一个干涉波包范围中的扫描取样点示意图; [0027] FIG. 4 is a interferometer system to scan the interference wave packet schematic sampling point range;

[0028] 图5为自所有干涉影像中撷取部份干涉影像进行叠加的示意图;以及[0029] 图6为不含干涉条纹的二维形貌图像示意图。 [0028] FIG. 5 is a partially schematic view of an image to be superimposed interference retrieved from all interference image; a two-dimensional topographic image free from interference fringes and the schematic [0029] FIG. 6 is a.

[0030] 其中,附图标记: [0030] wherein reference numerals:

[0031] 待测物 100 [0031] 100 analyte

[0032] 顶面 11 [0032] The top surface 11

[0033] 垂直扫描路径Dl [0033] Dl vertical scanning path

[0034] 二维形貌图像IO [0034] The two-dimensional morphology image IO

[0035] 干涉影像 Ibase [0035] Interference images Ibase

[0036] 干涉影像 Il〜IlO [0036] Interference images Il~IlO

[0037] 二维形貌图像Ieng [0037] The two-dimensional morphology image Ieng

[0038] 干涉条纹 S [0038] The interference fringe S

[0039] 特征高度 H1、H2 [0039] wherein the height H1, H2

具体实施方式 detailed description

[0040] 本发明关于一种测量方法,尤指一种干涉系统的测量方法。 [0040] The present invention relates to a measuring method, more particularly to a measuring method of an interference system. 以下兹列举一较佳实施例以说明本发明,然熟习此项技艺者皆知此仅为一举例,而并非用以限定发明本身。 Hereby include the following embodiment a preferred embodiment to illustrate the present invention, then this is well known by those skilled in the art is merely an example, and are not intended to limit the invention itself. 有关此较佳实施例的内容详述如下。 In relation to the preferred embodiment are detailed below.

[0041] 请先参阅图1,图I为待测物的示意图。 [0041] Please refer to FIG. 1, it is a schematic diagram of analyte I. 本发明的干涉系统的测量方法用以于干涉系统沿垂直扫描路径Dl对待测物100进行垂直扫描,并在垂直扫描路径Dl的多个扫描高度依序分别产生多张干涉影像后,藉以利用这些干涉影像以产生二维形貌图像;其中,干涉系统的种类对于本发明的测量方法并没有影响,干涉系统可以是Mirau白光干涉仪、Michelson白光干涉仪、Linnik光干涉仪或者其它常见的干涉仪。 After the interferometric measurement system according to the present invention is used in the vertical scanning path interference systems Dl to analytes 100 is scanned vertically, and sequentially generates a plurality of interference images at a plurality of scanning path of vertical scanning height Dl, respectively, whereby the use of these interference image to produce a two-dimensional morphology image; wherein the type of interference systems for the measurement method of the present invention does not affect, Mirau interferometer system may be a white light interferometer, a Michelson white light interferometer, the Linnik interferometer or other common optical interferometers .

[0042] 请继续参阅图3,图3为高度-干涉面积对应比信息。 [0042] Please continue to refer to FIG. 3, FIG. 3 is a highly - interference information corresponding to the area ratio. 本发明的干涉系统的测量方法包括数个步骤,首先,必须先对各干涉影像中的每一个像素点取样,以得到每一干涉影像的干涉区域面积,并利用每一干涉影像所对应的扫描高度与干涉区域面积建立出高度-干涉面积对应比信息,以图I的待测物100为例,由于待测物100的顶面11占了俯视图的大部分面积,因此于高度-干涉面积对应比信息中,顶面11所对应的扫描高度及邻近扫描高度处就会显示占了相当大的面积,而本实施例中为了方便操作者观察,可以将每一扫描高度所对应的干涉区域面积显示为百分比状态。 Interferometric measurement system of the invention comprises several steps, first of all, for each pixel must first interference image points in each sample, the area of ​​each region to obtain an interference image of the interference and using the interference image corresponding to each scan height and area of ​​the establishment of a high degree of interference - interference ratio information corresponding to the area, the analyte to FIG. 100 Example I, since the upper surface 11 of the analyte 100 accounted for most of the area of ​​the plan view, thus the height - the area corresponding to the interference ratio information, the top surface 11 adjacent the scanning height and the scan will be displayed at a height corresponding to the account for a large area, and the area of ​​the interference present embodiment embodiment for convenience operator observes, each scan may be corresponding to the height state shown as a percentage.

[0043] 接着,利用高度-干涉面积对应比信息,在这些干涉影像所对应的这些干涉区域面积中撷取一个相对峰值,藉以得到此相对峰值所对应的扫描高度,并将其定义为特征高度H1。 [0043] Next, the height - interference ratio corresponding to the area information, to retrieve such a relative peak in the interference area of ​​the image corresponding to the interference, thereby to obtain contrast corresponding to the peak height of the scan, and wherein the height is defined as H1.

[0044] 请参阅图4与图5,图4为干涉系统于一个干涉波包范围中的扫描取样点示意图,图5为自所有干涉影像中撷取部份干涉影像进行叠加的示意图。 [0044] Please refer to FIG. 4 and FIG. 5, FIG. 4 is an interferometric system, FIG 5 is a partially schematic view of an image to be superimposed interference retrieved from all interference in a schematic image scan range of sample points of the interference wave packet. 在判断出特征高度Hl之后,即可自所有干涉影像中撷取特征高度Hl与邻近特征高度Hl上下各一第一预定张数的干涉影像进行数值处理,以产生二维形貌图像,而于本实施例中的较佳者,所述的数值处理为一影像叠加处理;此外,于本实施例中的较佳者,若干涉系统沿垂直扫描路径Dl对待测物100进行垂直扫描时,于垂直扫描路径Dl的一个干涉波包的范围内产生了第二预定张数的干涉影像,换以言之,即是在一个干涉波包的范围内进行了第二预定张数的取样,那么上述的第一预定张数可以是相等于一半的第二预定张数。 After determining the feature height Hl, all the interference can be pulled from the interference image a predetermined number of image height characteristics wherein the height Hl and Hl adjacent the upper and lower value for a first processed to generate a two-dimensional topography image, while in in the preferred embodiment by the present embodiment, the numerical processing is an image superimposition processing; Furthermore, in the present preferred embodiment, if they interfere with the system in the vertical scanning path of vertical scanning Dl 100 test was treated in a range of vertical interference wave packet of the scan path Dl produces an interference image of the second predetermined number of sheets, in other words to that of the samples is a second predetermined number of sheets within a range of the interference wave packet, then the above a first predetermined number of sheets may be equal to the second half of the predetermined number of sheets. [0045] 请同时参考图6,图6为不含干涉条纹的二维形貌图像示意图。 [0045] Please refer to FIG. 6, a schematic view of a two-dimensional morphology image of the interference fringe in FIG. 6 is free. 举例而言,当干涉系统在一个干涉波包内对11个扫描高度做取样,并产生11张干涉影像,那么在得到特征高度Hl后,即可自所有干涉影像中撷取特征高度Hl所对应的干涉影像Ibase,并将干涉影像Ibase与邻近特征高度Hl上下各5张的干涉影像Il〜IlO进行叠加,以得到清晰的二维形貌图像Ieng,此处清晰是指二维形貌图像Ieng不含有干涉条纹。 For example, when an interference system in an interference wave packet of the scan height to make sample 11, and generates interference images 11, characterized in that after obtaining the height Hl, it can be pulled from all feature height Hl corresponding to the interference image Ibase image interference, and interference from adjacent image Ibase wherein each of the vertical height Hl 5 Il~IlO interference images are superimposed to give a clear two-dimensional morphology image Ieng, here refers to a two-dimensional morphology image clarity Ieng It does not contain interference fringes.

[0046] 此外,于本实施例中的较佳者,将干涉影像Ibase与干涉影像Il〜IlO进行叠加的过程,其主要目的在于将每一干涉影像Il〜IlO与干涉影像Ibase在每一个像素点的灰阶值差异,叠加至二维形貌图像Ieng相对应的像素点,并将二维形貌图像Ieng像素点的灰阶值除以一个干涉波包内的取样点数,在本实施例中即是除以11,来使二维形貌图像Ieng的灰阶范围正规化,即可利用多张干涉影像制作出清晰的二维形貌图像Ieng,此处清晰是指二维形貌图像Ieng不含有干涉条纹。 [0046] Further, in the present preferred embodiment, they will interfere with the interference image Ibase superimposed image Il~IlO the process, a main object of the interference image of each image Il~IlO Ibase and the interference in each pixel gray level value difference point, superimposed to the pixel corresponding to the two-dimensional morphology image Ieng, and divides the two-dimensional morphology image Ieng grayscale value of a pixel in the interference wave packet of sampling points, the present embodiment ie, divided by 11, to make the two-dimensional morphology image Ieng grayscale range normalized, the interference images can be produced using a plurality of two-dimensional morphology image Ieng clear, clear herein refers to a two-dimensional morphology image Ieng not contain interference fringes.

[0047] 综合以上所述,相较于现有的干涉系统测量方法,本发明于干涉系统通过垂直扫描获得多张干涉影像后,可以直接通过这些干涉影像获得不含干涉条纹的待测物的二维形貌图像Ieng,并不需要增加硬件成本或者进行额外的撷取待测物影像流程,不仅节省成本,且测量过程亦较为简便。 [0047] After the above synthesis, as compared to conventional interferometric measurement system, the present invention is to obtain a system of interference by a plurality of vertical scanning interferometry images can be obtained free of interference fringes analyte directly through these interference images Ieng dimensional topography image, does not require additional hardware costs or additional image capturing analytes process, not only the cost, and also the measurement process is simple.

[0048] 此外,本发明的干涉系统的测量方法并不局限于对一特征高度Hl进行干涉影像的叠加动作,以上述实施例而言,待测物100具有一个凹槽,因此在图3的高度-干涉面积对应比信息中可以清楚发现,在另一扫描高度处亦具有相对峰值,因此该相对峰值亦对应了一个特征高度H2,本测量方法可以对特征高度H2所对应的干涉影像与对特征高度H2上下各一第一预定张数的干涉影像进行叠加,即可获得待测物于特征高度H2处的不含干涉条纹的二维形貌图像;更进一步来说,当待测物100具有二个以上的特征高度Hl与H2时,亦可将特征高度Hl与H2所对应的干涉影像以及所有特征高度Hl与H2上下各一第一预定张数的干涉影像进行叠加,以获得另一清晰的二维形貌图像,此处清晰是指二维形貌图像不含有干涉条纹。 [0048] In addition, the interference measurement system according to the present invention is not limited to the operation of a superimposition characteristic height Hl interference image, the above-described embodiment, the analyte has a recess 100, thus in FIG. 3 height - interference ratio information corresponding to the area can be clearly found also has another scan in relative peak height, peak also corresponds to a feature so that the relative height H2, the height H2 may be present measuring method corresponding to the interference image and the feature pairs wherein the predetermined number of the interference image height H2 of a first upper and lower superimposed, to a two-dimensional topographic image free of interference fringes in the analyte wherein at the height H2; Furthermore, when the analyte 100 when two or more features having a height Hl and H2, may interfere with the predetermined number of sheets of the image feature height Hl and H2 corresponding to the interference image and all the features of the upper and lower height Hl and H2 a superimposed first, to obtain another dimensional topography image clear, clear herein refers to a two-dimensional morphology image does not contain interference fringes.

[0049]当然,本发明还可有其它多种实施例,在不背离本发明精神及其实质的情况下,熟悉本领域的技术人员当可根据本发明做出各种相应的改变和变形,但这些相应的改变和变形都应属于本发明所附的权利要求的保护范围。 [0049] Of course, the present invention may have a variety of other embodiments, without departing from the spirit and essence of the present invention, those skilled in the art can be made when various corresponding modifications and variations according to the present invention, these corresponding modifications and variations shall fall within the scope of the appended claims.

Claims (6)

  1. 1. 一种干涉系统的测量方法,用以于一干涉系统沿一垂直扫描路径对一待测物进行一垂直扫描,并在该垂直扫描路径的多个扫描高度依序分别产生多张干涉影像后,藉以利用这些干涉影像以产生一二维形貌图像,其特征在于,该方法包括以下步骤: (a)对各干涉影像中的每一个像素点取样,以得到该干涉影像的一干涉区域面积,并利用该干涉影像所对应的该扫描高度与该干涉区域面积建立一高度-干涉面积对应比信息; (b)利用该高度-干涉面积对应比信息,在这些干涉影像所对应的这些干涉区域面积中撷取一相对峰值,藉以撷取该相对峰值所对应的该扫描高度,并将其定义为一特征高度;以及(C)撷取该特征高度与邻近该特征高度上下各一第一预定张数的干涉影像进行一数值处理,以产生该二维形貌图像。 CLAIMS 1. A method of measuring an interference system for interferometric system in a direction perpendicular to a scan path test was a vertical scan, and sequentially generates a plurality of interference images of the plurality of scanning the height of the vertical scanning path, respectively after using these interferometric images thereby to produce a two-dimensional topography image, characterized in that the method comprises the steps of: (a) for each pixel in each of the interference image of the sample, to obtain an interference image of the interference region area, and using the interference image corresponding to the scan height to the interference area of ​​the establishment of a height - interference corresponding to the area ratio information; (b) by using the height - interference corresponding to the area ratio information, the interference of these interferometric images corresponding capturing a relative peak area of ​​the region, thereby retrieve the relative height of the scan corresponding to the peak, and the height is defined as a feature; and (C) adjacent to retrieve the feature height of the vertical height of each of a first feature the interference image a predetermined number of sheets for numerical processing, to generate the two-dimensional image topography.
  2. 2.根据权利要求I所述的干涉系统的测量方法,其特征在于,该数值处理为一影像叠加处理。 The interferometric measurement system according to claim I, wherein the numerical processing is an image superimposing process.
  3. 3.根据权利要求I所述的干涉系统的测量方法,其特征在于,该高度-干涉面积对应比信息用以记载于各扫描高度下,所对应的干涉影像中的该干涉区域面积所占的面积百分比。 The interferometric measurement system according to claim I, wherein the height of the - interference ratio information corresponding to the area used to record the height at each scan, the interference of the interference area of ​​the image corresponding to the occupied The percentage area.
  4. 4.根据权利要求I所述的干涉系统的测量方法,其特征在于,当该干涉系统沿该垂直扫描路径对该待测物进行该垂直扫描时,于该垂直扫描路径的一干涉波包的范围内产生一第二预定张数的干涉影像。 The interferometric measurement system according to claim I, wherein, when the interference of the vertical scanning system of the analyte in the vertical scanning path at a vertical scanning path of the interference wave packet a second interference image within a predetermined range of number of sheets.
  5. 5.根据权利要求4所述的干涉系统的测量方法,其特征在于,该第一预定张数相等于一半的该第二预定张数。 5. The method according to the interference measurement system according to claim, wherein the first predetermined number of sheets equal to the second half of the predetermined number of sheets.
  6. 6. 一种干涉系统的测量方法,用以于一干涉系统沿一垂直扫描路径对一待测物进行一垂直扫描,并在该垂直扫描路径的多个扫描高度依序分别产生多张干涉影像后,藉以利用这些干涉影像以产生一二维形貌图像,其特征在于,该方法包括以下步骤: (d)对各干涉影像中的每一个像素点取样,以得到该干涉影像的一干涉区域面积,并利用该干涉影像所对应的该扫描高度与该干涉区域面积建立一高度-干涉面积对应比信息; (e)利用该高度-干涉面积对应比信息,在这些干涉影像所对应的这些干涉区域面积中撷取至少二相对峰值,藉以撷取这些相对峰值所对应的这些扫描高度,并将其定义为至少二特征高度;以及(f)撷取这些特征高度与邻近这些特征高度上下各一第一预定张数的干涉影像进行叠力口,以产生该二维形貌图像。 A method for measuring interference system for an interferometer system in a direction perpendicular to a scan path test was a vertical scan, and sequentially generates a plurality of interference images of the plurality of scanning the height of the vertical scanning path, respectively after using these interferometric images thereby to produce a two-dimensional topography image, characterized in that the method comprises the steps of: (d) for each pixel in each of the interference image of the sample, to obtain an interference image of the interference region area, and using the interference image corresponding to the scan height to the interference area of ​​the establishment of a height - interference corresponding to the area ratio information; (e) using the height - interference corresponding to the area ratio information, the interference of these interferometric images corresponding capturing a peak area of ​​the at least two opposite, thereby capturing the scanning relative peak heights of the corresponding, and defined as the height of the at least two characteristic; and (f) capturing the feature height adjacent a respective vertical height of the features the interference image for a first predetermined number of sheets stacked opening force, to generate the two-dimensional image topography.
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Citations (4)

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CN1786810A (en) 2005-12-01 2006-06-14 上海交通大学 Method for realizing high resolution degree three-dimensional imaging by projector producing translation surface fringe
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CN101308011A (en) 2007-05-18 2008-11-19 中茂电子(深圳)有限公司 Integration scanning type optical measurement method
US7605925B1 (en) 2006-06-23 2009-10-20 Veeco Instruments, Inc. High-definition vertical-scan interferometry

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200831850A
CN1786810A (en) 2005-12-01 2006-06-14 上海交通大学 Method for realizing high resolution degree three-dimensional imaging by projector producing translation surface fringe
US7605925B1 (en) 2006-06-23 2009-10-20 Veeco Instruments, Inc. High-definition vertical-scan interferometry
CN101308011A (en) 2007-05-18 2008-11-19 中茂电子(深圳)有限公司 Integration scanning type optical measurement method

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