TW201140237A - Alkaline developing photosensitive resin composition, barrier for display element using the same, and display element - Google Patents

Alkaline developing photosensitive resin composition, barrier for display element using the same, and display element Download PDF

Info

Publication number
TW201140237A
TW201140237A TW100105791A TW100105791A TW201140237A TW 201140237 A TW201140237 A TW 201140237A TW 100105791 A TW100105791 A TW 100105791A TW 100105791 A TW100105791 A TW 100105791A TW 201140237 A TW201140237 A TW 201140237A
Authority
TW
Taiwan
Prior art keywords
group
fluorine
resin composition
photosensitive resin
alkali
Prior art date
Application number
TW100105791A
Other languages
Chinese (zh)
Other versions
TWI516866B (en
Inventor
Takahiro Yoshioka
Koichi Fujishiro
Tetsuya Yanagimoto
Original Assignee
Nippon Steel Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Chemical Co filed Critical Nippon Steel Chemical Co
Publication of TW201140237A publication Critical patent/TW201140237A/en
Application granted granted Critical
Publication of TWI516866B publication Critical patent/TWI516866B/en

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0046Photosensitive materials with perfluoro compounds, e.g. for dry lithography
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/201Filters in the form of arrays
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Epoxy Resins (AREA)
  • Macromonomer-Based Addition Polymer (AREA)

Abstract

The present invention provides an alkaline developing photosensitive resin composition, which has excellent compatibility with ink dispersing agent and shows excellent surface appearance and pattern after film making, has excellent surface ink repellency, and on the other hand, is capable of maintaining the surface ink repellency even after frequent washing or lapse of time. The alkaline developing photosensitive resin composition of the present invention comprises fluorine-contained resin (A) to serve as ink repellent agent and photosensitive component that is alkaline developable with reaction with ultraviolet light of wavelength of 300-450nm and is characterized by comprising fluorine-contained resin (A), which is predetermined random or block copolymers and has an average molecular weight within the range of 2000 to 200000 and the ratio of fluorine-contained resin in 100 parts of solvent removed mass is 0.05-1 mass part.

Description

201140237 六、發明說明: 【發明所屬之技術領域】 本發明,係關於鹼顯像性感光性樹 其所形成之隔壁、以及顯示元件,詳而 噴墨印刷法中之顯示元件之隔壁形成的 脂組成物、及使用其所形成之隔壁、以 【先前技術】 濾色器,通常係於玻璃、塑膠片等 成黑色之基質,接著,依序以帶狀写 (color pattern),形成紅、綠、藍等3 。圖型尺寸係隨濾色器之用途及各顏色 700 μιη左右。又,疊合之位置精度爲數 以尺寸精度高之微細加工技術來製造。 濾色器之代表性之製造方法,有染 料分散法、電鎪法等。該等之中,特別 光聚合型組成物塗佈於透明基板上,藉 光、顯像、視需要之硬化,以形成濾色 法’由於濾色器像素之位置、膜厚等之 耐熱性等耐久性優異,針孔等缺陷少, 另一方面,黑色基質一般係於紅、 配置成格子狀、帶狀或鑲嵌狀,具有各 致之對比提升、或防止漏光所致之TFT 因此,對黑色基質要求高遮光性。以往 脂組成物、及使用 言之,係關於適於 鹼顯像性感光性樹 及顯示元件。 透明基板之表面形 它鑲嵌狀等之色譜 種以上之不同色相 而不同,但爲5〜 μηι〜數十 μηι,係 色法、印刷法、顏 是,將含色材料之 由反覆進行影像曝 器影像之顏料分散 精度高,耐光性、 故廣泛地被採用。 綠、藍之色譜間, 色間之混色抑制所 之誤動作的效果。 ,黑色基質係以鉻 -5- 201140237 等金屬膜來形成,而一般係使用含有遮光材之感光性樹脂 以光微影法來形成。 然而,若使用上述方法形成色譜,則必須各色分別進 行曝光與顯像之步驟,故至少需要3次之光步驟,花費高 。因此,一種能以低成本提供濾色器之噴墨法被提出。其 係於像素所構成之區域,將紅、綠、藍之墨水分別同時地 僅噴射塗佈比必須之像素使其硬化以形成像素的方法,而 事先以光步驟形成隔壁,而將墨水噴出至其之像素部的方 法亦被提出。然而,於該方法,會產生各色區域之滲透或 相鄰區域間之混色。因此,對於構成該隔壁之材料,要求 能抑制著色劑擴散至著色目的區域外的特性。例如,於專 利文獻2例示:若墨水與隔壁表面之靜態接觸角爲40〜55° 即可有效地避免混色。另一方面,當考慮動態接觸角時, 該墨水與隔壁表面之前進角以愈大愈佳。 又,當由噴墨頭所噴出之墨水於像素內同時重疊於與 隔壁上時,要求該隔壁表面之墨水,會因表面撥墨性而回 到像素內之自我修復作用。特別是,當像素微細化而要求 高精細化時,由噴墨所噴出之液滴重疊於黑色基質的頻度 增高,於各色區域中之角部爲了補足墨水之展開性而疊印 (overprint)於隔壁部的情形亦被提出來探討(參照專利文獻 7)。當重疊於隔壁部之墨水回到像素內時,預測墨水之接 觸角愈小愈佳。同樣的當使用塗佈型有機EL材料形成顯 示元件時,於以光步驟形成隔壁之後,將塗佈型有機EL 材料以噴墨塗佈法塗佈於隔壁內的手段亦被提出。 -6 - 201140237 如此目的下之可提供隔壁材料之光阻組成物,有混合 作爲賦予撥墨性之成分之氟系或聚矽氧系之化合物的方法 被提出。例如,於專利文獻1,揭示一種光阻組成物,其 含有含氟烷基之(甲基)丙烯酸酯單體與含聚矽氧鏈之乙烯 性不飽和單體的共聚物。然而,該共聚物之添加量,相對 於光阻組成物固形分爲0.001〜0.05質量% ’以如此之低 含量撥墨性並不足夠。 於專利文獻2,例示一種六氟丙烯與不飽和羧酸及/或 不飽和羧酸酐之共聚物、與氟有機化合物的組成物。然而 ,爲了得到六氟丙烯之聚合物必須於高壓下聚合,其之分 子量亦爲小的2000以下。又,輔助其之氟有機化合物亦 屬界面活性劑系,而於其之撥墨性持續上有問題。 於專利文獻3,例示一種光阻組成物,其特徵係,爲 以(:112 = (:(111)(:00乂1^(1^表示碳數4〜6之全氟烷基)爲單 體之氟原子含有率爲7〜35質量%的含氟樹脂。於該場合 ,R1基,限定爲Η、CH3或CF3。又,於專利文獻4,記 述一種負型感光性樹脂組成物,其含有下述之撥墨劑:由 將具有酸性基及分子內具3個以上乙烯性雙鍵之鹼可溶之 感光性樹脂、具有氫原子之至少1個被取代成氟原子之碳 數20以下之烷基之聚合單位、及具有乙烯性雙鍵之聚合 單位共聚合之聚合物所構成的撥墨劑。該撥墨劑中之含氟 之聚合單位亦與上述專利文獻3者相同。於任何情況下, 若光阻固形分中之含氟化合物之比例增加,則對支持基板 之密合性降低且造成表面平滑性的惡化。 201140237 於專利文獻5,記述一種表面撥墨性黑色基質之製造 方法,其係使用含有與黑色基質所含之樹脂的親合性小之 矽及/或氟的撥墨劑,於顯像後將黑色基質以150〜230 °C 進行燒成,藉此使撥墨劑移行至表面,而將與著色墨水的 接觸角控制爲30〜60° »其中,撥墨劑之具體例,可例示 爲與於主鏈或側鏈具有有機聚矽氧之二氟亞乙烯等含氟單 體之共聚合所得之氟樹脂。然而,界面活性劑等含聚矽氧 寡聚物及氟系寡聚物,即使於燒成後移行至表面,其之撥 墨性,亦隨之後的洗淨或時間的經過而降低,是其問題》 於專利文獻8,例示一種聚氟醚構造所構成之含Rf基及酸 性基(羧基、酚性羥基、磺酸基)之撥墨劑,於專利文獻9 ,例示一種含有以CH2 = C(Rn)COOYRf(Rn爲碳數2以上之 有機基或氯)爲單體之撥墨劑之光阻組成物。該兩例係鹼 顯像性佳、圖型化性良好,故可見伴隨顯像之撥墨性的降 低。因此,爲了具有充分之撥墨性需要一定量以上的添加 ,故無法避免於像素開口部之撥墨劑所造成之污染。 又,適於形成遮光性樹脂基質之光阻,於專利文獻6 報告:含有含不飽和基之化合物(將特定之芳香族環氧化 合物與(甲基)丙烯酸之反應物再與多元酸羧酸或其之酸酐 反應所得)作爲樹脂主成分之黑色光阻,具有高遮光性, 以光微影法容易進行精細圖型的形成,並且,可成爲絕緣 性、耐熱性、密合性、室溫保存安定性優異之遮光性薄膜 形成用組成物。然而,於該專利文獻6,並無觸及其之撥 墨特性,亦未提及相溶性。 -8 - 201140237 專利文獻1:日本特開平9-54432號公報 專利文獻2:日本特開平n_281815號公報 專利文獻3:日本特開2005。315984號公報 專利文獻4 : WO2004-42474號公報 專利文獻5:日本特開2006-251433號公報 專利文獻6:日本特開平8-278629號公報 專利文獻7:日本特開2006-343518號公報 專利文獻8:日本特開2009-35745號公報 專利文獻9:日本特開2009-37233號公報 【發明內容】 [發明欲解決之課題] 因此’本發明之目的在於解決上述之問題,亦即,提 供一種適於顯示元件用隔壁形成之感光性樹脂組成物,其 係含有於紫外光(300nm〜450nm)反應之感光性成分之光阻 組成物(感光性樹脂組成物),其中之撥墨劑的相溶性優異 ’製膜後之表面外觀以及圖型形狀良好,且,表面撥墨性 優異’另一方面,即使經通常之洗淨及時間的經過亦可維 持表面撥墨性。 [解決課題之手段] 亦即,本發明係如下所述。 (1)一種鹼顯像性感光性樹脂組成物,其係含有作爲撥 墨劑之含氟樹脂(A)、與於波長3 00〜45 Onm之紫外光反應 201140237 之可鹼顯像之感光性成分,其特徵係,含氟樹脂(A),係 下述通式(2)所表示之無規或嵌段共聚物,且平均分子量 Mw爲2000〜20000之範圍,相對於除去溶劑之合計成分 1 00質量份之含氟樹脂(A)的比例,爲〇.〇5〜1質量份。 【化1】[Technical Field] The present invention relates to a partition formed by an alkali-developing photosensitive light-sensitive tree and a display element, and a grease formed on a partition wall of a display element in an inkjet printing method. The composition, and the partition wall formed by using the same, [previously] color filter, usually in a black matrix such as glass or plastic sheet, and then sequentially formed in a color pattern to form red and green. , blue, etc. 3 . The size of the pattern is about 700 μιη with the color filter and each color. Further, the positional accuracy of the lamination is manufactured by a microfabrication technique with high dimensional accuracy. Representative production methods of the color filter include a dye dispersion method, an electrophoresis method, and the like. Among these, a special photopolymerizable composition is applied onto a transparent substrate, and is cured by light, development, and, if necessary, to form a color filter method, such as heat resistance of the position of the color filter pixel, film thickness, and the like. Excellent durability and few defects such as pinholes. On the other hand, the black matrix is generally red, arranged in a lattice shape, a strip shape or a mosaic shape, and has a contrast-enhancing contrast or a TFT which prevents light leakage. Therefore, black The substrate requires high light blocking properties. Conventional lipid compositions and their use are suitable for alkaline imaging of light-sensitive trees and display elements. The surface of the transparent substrate is different from the different hue of the chromatographic species such as mosaic, but is 5~μηι~ tens of μηι, the color method, the printing method, the color is, and the coloring material is repeatedly subjected to the image exposing device. Image pigments are widely used because of their high dispersion accuracy and light fastness. In the green and blue chromatograms, the color mixture between colors suppresses the effect of malfunction. The black matrix is formed of a metal film such as chromium-5-201140237, and is generally formed by photolithography using a photosensitive resin containing a light-shielding material. However, if the chromatogram is formed by the above method, it is necessary to separately perform the steps of exposure and development for each color, so that at least three light steps are required, which is expensive. Therefore, an ink jet method capable of providing a color filter at low cost has been proposed. In the region formed by the pixels, the red, green, and blue inks are simultaneously sprayed and coated only by the necessary pixels to form a pixel, and the partition wall is formed in a light step in advance, and the ink is ejected to the ink. A method of the pixel portion thereof has also been proposed. However, in this method, the penetration of the respective color regions or the color mixture between adjacent regions is caused. Therefore, it is required for the material constituting the partition wall to suppress the property of the coloring agent to diffuse outside the coloring target region. For example, Patent Document 2 exemplifies that if the static contact angle of the ink with the surface of the partition wall is 40 to 55°, color mixing can be effectively avoided. On the other hand, when considering the dynamic contact angle, it is preferable that the ink advances toward the front surface of the partition wall. Further, when the ink ejected from the ink jet head is simultaneously superposed on the partition wall in the pixel, the ink on the surface of the partition wall is required to return to the self-repairing action in the pixel due to the surface ink repellency. In particular, when the pixel is miniaturized and high definition is required, the frequency of the droplets ejected by the ink jet superimposed on the black matrix is increased, and the corners in the respective color regions are overprinted in the partition wall in order to complement the spreadability of the ink. The case of the Ministry is also proposed (see Patent Document 7). When the ink overlapping the partition portion is returned to the pixel, it is predicted that the contact angle of the ink is smaller as possible. Similarly, when a display element is formed using a coating type organic EL material, a means for applying a coating type organic EL material to a partition wall by an inkjet coating method after forming a partition wall in a light step is also proposed. -6 - 201140237 A method of providing a photoresist composition of a partition material under such a purpose, and a method of mixing a fluorine-based or polyoxane-based compound as a component imparting ink repellent property has been proposed. For example, Patent Document 1 discloses a photoresist composition comprising a copolymer of a fluorine-containing alkyl (meth) acrylate monomer and a polyoxyxylene-containing ethylenically unsaturated monomer. However, the amount of the copolymer added is 0.001 to 0.05% by mass relative to the solid content of the photoresist composition, and such low ink repellency is not sufficient. Patent Document 2 exemplifies a composition of a copolymer of hexafluoropropylene and an unsaturated carboxylic acid and/or an unsaturated carboxylic anhydride, and a composition of a fluorine organic compound. However, in order to obtain a polymer of hexafluoropropylene which must be polymerized under high pressure, the molecular weight thereof is also as small as 2,000 or less. Further, the fluoroorganic compound which assists it is also a surfactant system, and there is a problem in the ink repellency thereof. Patent Document 3 exemplifies a photoresist composition characterized by (:112 = (:(111)(:00乂1^(1^ represents a perfluoroalkyl group having a carbon number of 4 to 6). In the case of the fluorine-containing resin having a fluorine atom content of 7 to 35% by mass, the R1 group is limited to ruthenium, CH3 or CF3. Further, Patent Document 4 describes a negative photosensitive resin composition. The ink repellent containing a photosensitive resin having an acidic group and an alkali having three or more ethylenic double bonds in the molecule, and at least one having a hydrogen atom substituted with a fluorine atom and having a carbon number of 20 or less An ink-repellent agent composed of a polymerized unit of an alkyl group and a polymer copolymerized with a polymer unit having an ethylenic double bond. The polymerization unit of fluorine in the ink-repellent agent is also the same as that of the above Patent Document 3. In the case where the ratio of the fluorine-containing compound in the photo-resistance component is increased, the adhesion to the support substrate is lowered and the surface smoothness is deteriorated. 201140237 Patent Document 5 describes the manufacture of a surface-repellent black matrix. a method of using a resin contained in a black matrix A low affinity ink and/or fluorine ink repellency, after the development, the black matrix is fired at 150~230 ° C, thereby allowing the ink to be transferred to the surface, and the contact angle with the colored ink The control is 30 to 60°. The specific example of the ink-repellent agent can be exemplified by a fluororesin obtained by copolymerization with a fluorine-containing monomer such as difluoroethylene vinyl having an organic polyfluorene oxide in a main chain or a side chain. The polyoxo-oligomer and the fluorine-based oligomer containing a surfactant, etc., even if it migrates to the surface after firing, its ink repellency is lowered with the subsequent washing or time, which is a problem. Patent Document 8 exemplifies an ink-repellent containing an Rf group and an acidic group (carboxyl group, phenolic hydroxyl group, or sulfonic acid group) composed of a polyfluoroether structure, and Patent Document 9 exemplifies a case containing CH2 = C ( Rn)COOYRf (Rn is an organic group or chlorine having a carbon number of 2 or more) is a photoresist composition of a monomer ink-repellent agent. The two examples have good alkali developability and good patterning property, so that accompanying imaging is observed. The ink repellency is lowered. Therefore, in order to have sufficient ink repellency, a certain amount or more of addition is required, so it is impossible to avoid It is free from the contamination caused by the ink-repellent agent in the opening portion of the pixel. Further, it is suitable for forming a photoresist of a light-shielding resin substrate, and Patent Document 6 reports: a compound containing an unsaturated group (specific aromatic epoxy compound and a black photoresist which is a main component of a resin obtained by reacting a reaction product of (meth)acrylic acid with a polybasic acid carboxylic acid or an anhydride thereof, has high light-shielding property, and is easy to form a fine pattern by photolithography, and It is a composition for forming a light-shielding film which is excellent in insulation property, heat resistance, adhesion, and room temperature storage stability. However, in Patent Document 6, there is no ink-repellent property that is touched, and compatibility is not mentioned. _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. [Problem to be Solved by the Invention] Therefore, the object of the present invention is to solve the above problems, that is, to provide a photosensitive property suitable for forming a partition wall for a display element. a resin composition containing a photoresist composition (photosensitive resin composition) of a photosensitive component which is reacted with ultraviolet light (300 nm to 450 nm), wherein the ink-repellent has excellent compatibility; the surface appearance after film formation and The shape of the pattern is good and the surface is excellent in ink repellency. On the other hand, the surface ink repellency can be maintained even after usual washing and time lapse. [Means for Solving the Problem] That is, the present invention is as follows. (1) An alkali-developing photosensitive resin composition containing a fluorine-containing resin (A) as an ink-repellent agent and a photosensitivity of an alkali-developable image of an ultraviolet light reaction at a wavelength of 300 to 45 Onm 201140237 The component is characterized in that the fluorine-containing resin (A) is a random or block copolymer represented by the following formula (2), and the average molecular weight Mw is in the range of from 2,000 to 20,000, and the total amount of the solvent is removed. The ratio of the 00 parts by mass of the fluorine-containing resin (A) is 〜.〇 5 to 1 part by mass. 【化1】

r λ —u \ r \ r r \ 0X1 2 CH 2 Cvlvli/ CH CiRn) (j:=0 f R Z X Φ Rf i i V J P L J Q L ) r V J (2) [式中,R表示具有醇性羥基或酚性羥基之有機基’ Rn表 示氫或甲基,Y表示未含氟原子之2價之有機基,Rf表示 下述式(1)所示之含氟基’ Ar表示芳香族環,X及Z表示 氫原子、芳香族基、烷基、烯基、或未含氟原子之酯基, 可互爲相同或相異,P、q、r及S分別爲各共聚單位之總 數,其中,p、q及s爲0〜30之數’ P及q之口6十爲1以 上,r爲1〜40之數。又,通式(2)之共聚物中所含之式(1) 之含氟基的比例,以質量換算計爲1 5〜50質量%]。 -10- 201140237 【化2】r λ —u \ r \ rr \ 0X1 2 CH 2 Cvlvli/ CH CiRn) (j:=0 f RZX Φ Rf ii VJPLJQL ) r VJ (2) [wherein R represents an alcoholic hydroxyl group or a phenolic hydroxyl group The organic group 'Rn represents hydrogen or a methyl group, Y represents a divalent organic group having no fluorine atom, and Rf represents a fluorine-containing group represented by the following formula (1): Ar represents an aromatic ring, and X and Z represent a hydrogen atom. An aromatic group, an alkyl group, an alkenyl group or an ester group having no fluorine atom may be the same or different from each other, and P, q, r and S are respectively the total number of copolymerized units, wherein p, q and s The number of 0 to 30 'P and q mouth 6 is 1 or more, and r is 1 to 40. In addition, the ratio of the fluorine-containing group of the formula (1) contained in the copolymer of the formula (2) is from 15 to 50% by mass in terms of mass. -10- 201140237 【化2】

(CF3)2CF(CF3) 2CF

(cf3)2cf (2)如上述(1)所記載之鹼顯像性感光性樹脂組成物’ 其含有該含氟樹脂(A)、(B)於1分子中具有酸性基與2個 以上之乙烯性雙鍵之鹼顯像性寡聚物、(C)於1分子中具 有3個以上之乙烯性雙鍵之光聚合性單體、與(D)光聚合 起始劑。 (3 )如上述(2)所記載之鹼顯像性感光性樹脂組成物, 其中,該(B)成分,係將下述通式(4)所表示之由雙酚類所 衍生之具有2個環氧丙基醚之環氧化合物與(甲基)丙烯酸 酯之反應物,再與多元酸羧酸或其之酸酐反應所得之鹼顯 像性之含不飽和基之寡聚物。 【化3】(cf3) 2cf (2) The alkali-developing photosensitive resin composition as described in the above (1), wherein the fluorine-containing resin (A) and (B) have an acidic group and two or more in one molecule. An alkali-developing oligomer having an ethylenic double bond, (C) a photopolymerizable monomer having three or more ethylenic double bonds in one molecule, and (D) a photopolymerization initiator. (3) The alkali-developing photosensitive resin composition according to the above (2), wherein the component (B) is derived from a bisphenol represented by the following formula (4). An alkali-developing unsaturated group-containing oligomer obtained by reacting a reaction of an epoxy compound of a glycidyl ether with a (meth) acrylate and further reacting with a polybasic acid carboxylic acid or an anhydride thereof. [化3]

-11 - 201140237 [其中,式中,尺1及R2爲氫原子、碳數1〜5之烷基或鹵 素原子,可爲相同或相異,X表示-0:〇-、-3〇2-、-<:(€?3)2-、-Si(CH3)2-、-ch2-、-C(CH3)2-、-〇-、下述式所表示之 9,9-莽基、或不存在,η爲1〜10之整數]。 【化4】 〇ώ〇 (4) 一種遮光性之鹼顯像性感光性樹脂組成物,其特徵 係’相對於上述(1 )〜(3 )中任一項所記載之鹼顯像性感光 性樹脂組成物,添加分散有選自(Ε)黑色有機顏料、混色 有機顏料及遮光材所構成群中之至少1種所成之遮光性分 散液,並且,相對於總固形分100質量份,係以25〜60 質量份之比例配合該(Ε)成分。 (5) 如上述(4)所記載之感光性樹脂組成物,其係顯示 元件用隔壁形成用。 (6) 如上述(5)所記載之感光性樹脂組成物,其係濾色 器隔壁形成用。 (7 ) —種顯示元件用隔壁’其係將上述(5 )或(6)所記載 之感光性樹脂組成物塗佈於基板上,乾燥後,必須經(a)以 紫外線曝光裝置進行曝光、(b)以鹼水溶液進行顯像、及 (Ο熱燒成之各步驟所得之隔壁,其特徵係,膜厚爲1.5〜 -12- 201140237 3 μιη 〇 (8)—種顯示元件’其特徵係,於上述(7)所記載之隔 壁內’以噴墨印刷法形成像素。 [發明的效果] 藉由本發明’可提供一種適於顯示元件用隔壁形成之 感光性樹脂組成物’其係含有於紫外光(30〇nm〜45 0nm)反 應之感光性成分之光阻組成物,其中之撥墨劑的相溶性優 異,製膜後之表面外觀以及圖型形狀良好,且,表面撥墨 性優異’因此’例如,於藉噴墨製程之顯示元件的製造法 中’可提供一種不需要藉大氣壓電漿之表面撥墨處理之設 備而可達成低成本化、且對於提升製品良率有貢獻的材料 。特別是,可使用於噴墨印刷法所製作之液晶顯示裝置用 及有機EL用濾光器中,另外,亦可使用於流體驅動電子 紙用途中。 【實施方式】 以下,詳細說明本發明。 本發明之感光性樹脂組成物中之含氟樹脂(A),係g 墨劑,係具有下述式(1)構造之取代基之含氟樹脂(A)。 -13- 201140237 【化5 (CF3)2CF\ /CF3 C=C ( 1 )-11 - 201140237 [wherein, the ruler 1 and R2 are a hydrogen atom, an alkyl group having 1 to 5 carbon atoms or a halogen atom, which may be the same or different, and X represents -0: 〇-, -3〇2- , -<:(€?3)2-, -Si(CH3)2-, -ch2-, -C(CH3)2-, -〇-, 9,9-fluorenyl represented by the following formula, Or does not exist, η is an integer of 1 to 10]. (4) A light-shielding alkali-sensing photosensitive resin composition characterized by the alkali-sensing light described in any one of the above (1) to (3) a light-shielding dispersion liquid obtained by dispersing at least one selected from the group consisting of a black organic pigment, a mixed color organic pigment, and a light-shielding material, and a total of 100 parts by mass based on the total solid content. The (Ε) component is blended in a ratio of 25 to 60 parts by mass. (5) The photosensitive resin composition according to the above (4), which is used for forming a partition wall for a display element. (6) The photosensitive resin composition according to the above (5), which is used for forming a color filter partition. (7) A partition wall for a display element, wherein the photosensitive resin composition described in the above (5) or (6) is applied onto a substrate, and after drying, it is necessary to perform exposure by (a) an ultraviolet exposure apparatus. (b) development by an aqueous alkali solution and (a partition wall obtained by each step of hot calcination, characterized in that the film thickness is 1.5 to -12-201140237 3 μιη 〇 (8) - a display element' characteristic system In the partition wall described in the above (7), a pixel is formed by an inkjet printing method. [Effect of the Invention] The present invention provides a photosensitive resin composition suitable for forming a partition wall for a display element. A photoresist composition of a photosensitive component which is reacted by ultraviolet light (30 〇 nm to 45 nm), wherein the ink repellency agent is excellent in compatibility, and the surface appearance and pattern shape after film formation are good, and the surface ink repellency is excellent. For example, in the manufacturing method of a display element by an inkjet process, it is possible to provide a device that does not require the surface ink treatment of the atmospheric piezoelectric slurry to achieve cost reduction and contribute to improving the yield of the article. Material. In particular, It can be used for a liquid crystal display device and an organic EL filter produced by an inkjet printing method, and can also be used for a fluid-driven electronic paper application. [Embodiment] Hereinafter, the present invention will be described in detail. The fluorine-containing resin (A) in the resin composition is a fluorine-containing resin (A) having a substituent of the following formula (1). -13- 201140237 [Chemical 5 (CF3) 2CF\ /CF3 C=C ( 1 )

(CF3)2CF 式(1)所示之取代基之導入方法可利用周知之手段’具 體而言,可使用下述式(5)所示之手段° 【化6(CF3) 2CF The method of introducing the substituent represented by the formula (1) can be carried out by a known means. Specifically, a means represented by the following formula (5) can be used.

(CF3)2CF CF, (cf3)2cf CF, C=C + p-OH / \ (cf3)2cf f c=c / \ (cf3)2cf o-p (5 通常’於上述式(5)所示之含氟生成物,含有以下之異 構物骨架(lb),而與式(〇所示構造之取代基顯示同樣的效 果,故作爲相同之含氟基,以本發明之含量即可發揮效果 【化7】 (CF3)2CF (cf3)2c(CF3)2CF CF, (cf3)2cf CF, C=C + p-OH / \ (cf3)2cf fc=c / \ (cf3)2cf op (5 usually 'fluorine as shown in the above formula (5) The product contains the following isomer skeleton (lb), and exhibits the same effect as the substituent of the formula (the structure shown by 〇), so that the same fluorine-containing group can exert the effect of the present invention. 】 (CF3)2CF (cf3)2c

(lb) -14- 201140237 上述之式(5)中之P-OH,係具有一級羥基或酚基之化 合物。因此,爲了得到目的物之含氟樹脂(A),可舉例如 。方法(i):將於側鏈具有一級羥基或酚基之聚合物作爲前 驅物,對其以式(5)所示之手段導入目的之含氟取代基之方 法;或者,方法(Π):將具有式(1)所示之含氟取代基之單 體與其他單體共聚合的方法。其中,方法(Π),較方法(i) 可將氟基定量地導入分子鏈中,故較佳。 方法(i)之具體例’可例示如’將與甲基丙烯酸2 -羥基 乙酯、甲基丙烯酸4-羥基丁酯、甲基丙烯酸6-羥基丁酯等 (甲基)丙烯酸酯衍生物之共聚物作爲前驅物之方法;與對 羥基苯乙烯等具有酚基之乙烯化合物之共聚物。 方法(Π)之具體例,可舉例如,對於對羥基苯乙烯事 先以式(5)導入氟基後與其他單體共聚合之方法;或將由下 述通式(3)所表示之(甲基)丙烯酸酯單體所形成之單體單位 與其他單體共聚合之方法。 CH2 = C(Rn)-C00-Y-0-Rf (3) [式中,Rn表示氫或甲基,Y表示未含氟原子之2價之有 機基,Rf爲式(1)之含氟基]。 通式(3)所表示之單體,係Rf藉具有間隔物之功能之 有機基Y連結於具有α位取代基(Rn)之聚合物主鏈者。有 機基Y可例示如伸烷基、聚乙二醇基、伸苯基等》可舉例 -15- 201140237 如’具有可將(甲基)丙烯酸等羧基與上述式(5)所得之含氟 生成物之官能基的基。再者,藉由將如此之含氟單體與非 含氟單體共聚合,調製含氟樹脂(A)。 藉由使用方法(i)或(ii),例如,可得下述通式(2)所表 示之無規或嵌段共聚物所構成之含氟樹脂(A)。 【化8】 CH2C(Rn) ?( i Ο CH2 jXRn) Rf(lb) -14- 201140237 P-OH in the above formula (5) is a compound having a primary hydroxyl group or a phenol group. Therefore, in order to obtain the fluorine-containing resin (A) of the object, for example, it is mentioned. Process (i): a method in which a polymer having a primary hydroxyl group or a phenol group in a side chain is used as a precursor to introduce a fluorine-containing substituent of interest by a means represented by the formula (5); or, a method (Π): A method of copolymerizing a monomer having a fluorine-containing substituent represented by the formula (1) with another monomer. Among them, the method (Π) is preferable because the method (i) can quantitatively introduce a fluorine group into a molecular chain. The specific example of the method (i) can be exemplified by a (meth) acrylate derivative such as 2-hydroxyethyl methacrylate, 4-hydroxybutyl methacrylate or 6-hydroxybutyl methacrylate. A method in which a copolymer is used as a precursor; a copolymer of a vinyl compound having a phenol group such as p-hydroxystyrene. Specific examples of the method (Π) include, for example, a method of copolymerizing a p-hydroxystyrene with a fluorine group in the formula (5) and copolymerizing with another monomer; or a method represented by the following formula (3) (A) A method in which a monomer unit formed of an acrylate monomer is copolymerized with another monomer. CH2 = C(Rn)-C00-Y-0-Rf (3) [wherein, Rn represents hydrogen or a methyl group, Y represents a divalent organic group having no fluorine atom, and Rf is a fluorine of the formula (1) base]. The monomer represented by the formula (3) is a group in which Rf is bonded to a polymer backbone having an α-position substituent (Rn) by an organic group Y having a function of a spacer. The organic group Y can be exemplified by an alkyl group, a polyethylene glycol group, a phenyl group, etc., and can be exemplified by -15-201140237, such as having a fluorine group such as (meth)acrylic acid and a fluorine-containing product obtained by the above formula (5) The base of the functional group of the substance. Further, the fluorine-containing resin (A) is prepared by copolymerizing such a fluorine-containing monomer with a non-fluorine-containing monomer. By using the method (i) or (ii), for example, a fluorine-containing resin (A) composed of a random or block copolymer represented by the following formula (2) can be obtained. [Chemical 8] CH2C(Rn) ?( i Ο CH2 jXRn) Rf

CH2f(Rn) RCH2f(Rn) R

_n Z X (Rn)'_n Z X (Rn)'

JJ

[式中,R表示具有醇性羥基或酚性羥基之有機基,Rn表 示氫或甲基’ Y表示未含氟原子之2價之有機基,Rf表示 下述式(1)所示之含氟基,Ar表示芳香環,X及z表示氫 原子、芳香族基、烷基、烯基、或未含氟原子之酯基,可 互爲相同或相異,p、q、r及s分別爲各共聚單位之總數 ,其中,_P、q及s爲0〜30之數,p及q之合計爲1以上 ,r爲1〜4 0之數]。 於含氟樹脂(A)中,必須以1 5〜5 0質量%之範圍含有 式(1)構造之取代基。若未滿1 5質量%,則於鹼顯像感光 性樹脂組成物硬化後亦無法得到足夠之撥墨作用,而若想 -16- 201140237 得到所欲之到足夠之撥墨作用,則必須增多(A)成分添加 量而會損及組成物之鹼顯像性。 含氟樹脂(A),具有作爲必須成分之羥基。藉由具有 羥基,會些許提升與含氟樹脂(A)本身之鹼顯像液的相溶 性,而可減少顯像基板上之殘渣。導入羥基之手法,一般 係將甲基丙烯酸2-羥基乙酯、甲基丙烯酸4-羥基丁酯、甲 基丙烯酸6-羥基丁酯等(甲基)丙烯酸酯衍生物作爲單體使 用,但並不限於該方法。 再者,於含氟樹脂(A)之分子鏈中,亦可視需要存在 有可導入乙烯基之官能基,例如可存在羥基或羧基。藉由 導入乙烯基,以光微影法形成隔壁時,有助於維持顯像後 之曝光部表面的撥墨性,特別以使用強顯像液的情形爲佳 。具體之導入手段,可例示如,將具有異氰酸酯基、環氧 乙烷基等鍵結基之丙烯酸酯、甲基丙烯酸酯化合物與上述 含氟樹脂中之羥基或羧基反應之周知的手段。例如,當將 異氰酸酯基作爲鍵結基時,相對於事先所得之含氟樹脂 (A)中之羥基爲同當量未滿。其之理由係,殘存之鍵結基 有損及組成物之保存安定性的可能性。當將環氧乙烷基作 爲鍵結基時’係對事先所得之含氟樹脂(A)中之羧基進行 反應,故含氟樹脂(A)之酸價係調整爲1〇〜i〇〇mg。 又’非含氟單體’亦可藉由將一般之(甲基)丙烯酸酯 、苯乙烯衍生物、馬來酸酯等共聚合來調整含氟樹脂(A) 。由與鹼顯像性樹脂之相溶性及維持撥墨性的觀點考量, 以與甲基丙烯酸之共聚合較佳,而側鏈之醇殘基,以苄基 -17- 201140237 、異冰片基、金剛烷基等體積大者爲佳。含氟樹脂(A)中 含氟質量所佔之比例以30質量%以上爲佳。若未滿30質 量%,則無法發揮充分的撥墨性,且於黑色基質形成時及 噴墨塗佈前爲止其之撥墨性會有消失的情形。又,若超過 8 〇質量%,則所得之共聚物,與於光阻調製所使用之溶劑 、或(B)、(C)成分得相溶性差,而成爲凝膠物產生的原因 〇 該含氟樹脂(A)成分之重量平均分子量,以凝膠滲透 層析(GPC)法所求得之聚乙二醇換算重量平均分子量(Mw) 係2000〜20000之範圍內。該分子量若爲2000以下,則 於隔壁形成製程中撥墨作用降低,使撥墨作用難以持續。 若分子量(Mw)超過20000,則對鹼顯像液溶解延遲,故不 佳。 又,相對於除去溶劑之鹼顯像性感光性樹脂組成物之 總固形分100質量份之含氟樹脂(A)的比例,爲0.05〜1質 量份。若含氟樹脂(A)的比例少於0.05質量份,則撥墨性 不足,相反的若超過1質量份,則有對鹼顯像性感光性樹 脂組成物原本所具有之圖型造成影響之虞。 接著,敘述含於紫外光(3 00nm〜450nm)反應之感光性 成分之感光性樹脂組成物(負型光阻組成物)所使用之(B)〜 (E)成分。 (B)成分之於一分子中具有酸性基與2個以上之乙烯 性雙鍵之鹼顯像性寡聚物之例,可舉例如,將由雙酚類所 衍生之具有2個環氧丙基醚之環氧化合物與(甲基)丙烯酸 -18 - 201140237 酯之反應物,再與多元酸羧酸或其之酸酐反應所得之鹼顯 像性之含不飽和基之寡聚物。 此處,由雙酚類所衍生之具有2個環氧丙基醚之環氧 化合物,較佳可舉例如下述通式(4)所表示之環氧化合物。 【化9】Wherein R represents an organic group having an alcoholic hydroxyl group or a phenolic hydroxyl group, Rn represents hydrogen or methyl 'Y represents a divalent organic group having no fluorine atom, and Rf represents a compound represented by the following formula (1) Fluorine group, Ar represents an aromatic ring, and X and z represent a hydrogen atom, an aromatic group, an alkyl group, an alkenyl group, or an ester group having no fluorine atom, which may be the same or different from each other, and p, q, r and s respectively The total number of each copolymerized unit, wherein _P, q, and s are 0 to 30, and the total of p and q is 1 or more, and r is 1 to 4 0]. In the fluorine-containing resin (A), it is necessary to contain a substituent of the formula (1) in a range of from 15 to 50% by mass. If it is less than 15% by mass, it is not possible to obtain sufficient ink-repelling effect after the alkali-developing photosensitive resin composition is hardened, and if it is desired to have sufficient ink-removing effect, it must be increased. (A) The amount of the component added may impair the alkali developability of the composition. The fluorine-containing resin (A) has a hydroxyl group as an essential component. By having a hydroxyl group, the compatibility with the alkali developing solution of the fluorine-containing resin (A) itself is slightly increased, and the residue on the developing substrate can be reduced. The method of introducing a hydroxyl group generally uses a (meth) acrylate derivative such as 2-hydroxyethyl methacrylate, 4-hydroxybutyl methacrylate or 6-hydroxybutyl methacrylate as a monomer, but Not limited to this method. Further, in the molecular chain of the fluorine-containing resin (A), a functional group capable of introducing a vinyl group may be optionally present, and for example, a hydroxyl group or a carboxyl group may be present. When the partition wall is formed by photolithography by introducing a vinyl group, it contributes to maintaining the ink repellency of the surface of the exposed portion after development, and it is particularly preferable to use a strong developing liquid. Specific means for introducing the acrylate or methacrylate compound having a bonding group such as an isocyanate group or an oxirane group with a hydroxyl group or a carboxyl group in the above fluorine-containing resin can be exemplified. For example, when an isocyanate group is used as a bonding group, it is less than the same equivalent amount as the hydroxyl group in the fluorine-containing resin (A) obtained in advance. The reason for this is that the remaining bond groups are detrimental to the possibility of preservation stability of the composition. When the oxirane group is used as a bonding group, the carboxyl group in the fluorine-containing resin (A) obtained in advance is reacted, so that the acid value of the fluorine-containing resin (A) is adjusted to 1 〇 to i 〇〇 mg. . Further, the non-fluorinated monomer can be adjusted by copolymerizing a general (meth) acrylate, a styrene derivative, a maleic acid ester or the like to adjust the fluororesin (A). The copolymerization with methacrylic acid is preferred from the viewpoint of compatibility with the alkali-developing resin and maintaining ink repellent property, and the alcohol residue of the side chain is benzyl-17-201140237, isobornyl, It is preferred that the adamantyl group is larger in volume. The proportion of the fluorine-containing resin in the fluorine-containing resin (A) is preferably 30% by mass or more. If the amount is less than 30% by mass, sufficient ink repellency cannot be exhibited, and the ink repellency of the black matrix may be lost during the formation of the black matrix and before the inkjet coating. Moreover, when it exceeds 8% by mass, the obtained copolymer is inferior in compatibility with the solvent used for the photoresist preparation or the components (B) and (C), and causes the gel to be produced. The weight average molecular weight of the fluororesin (A) component is in the range of from 2,000 to 20,000 in terms of polyethylene glycol equivalent weight average molecular weight (Mw) determined by a gel permeation chromatography (GPC) method. When the molecular weight is 2,000 or less, the ink-repelling action is lowered in the partition forming process, and the ink-repelling action is hard to continue. When the molecular weight (Mw) exceeds 20,000, the dissolution of the alkali developing solution is delayed, which is not preferable. In addition, the ratio of the fluorine-containing resin (A) to 100 parts by mass of the total solid content of the alkali-developing photosensitive resin composition of the solvent is 0.05 to 1 part by mass. When the proportion of the fluorine-containing resin (A) is less than 0.05 parts by mass, the ink repellency is insufficient, and if it exceeds 1 part by mass, the pattern of the alkali-developing photosensitive resin composition originally has an influence. Hey. Next, the components (B) to (E) used for the photosensitive resin composition (negative photoresist composition) containing the photosensitive component of the reaction of ultraviolet light (300 nm to 450 nm) will be described. (B) An example of an alkali-developing oligomer having an acidic group and two or more ethylenic double bonds in one molecule, and for example, two propylene-propylene groups derived from bisphenols An alkali-developing unsaturated group-containing oligomer obtained by reacting an ether epoxy compound with a (meth)acrylic acid-18 - 201140237 ester, and then reacting with a polybasic acid carboxylic acid or an anhydride thereof. Here, the epoxy compound having two epoxypropyl ethers derived from bisphenols is preferably an epoxy compound represented by the following formula (4). 【化9】

(4) [其中’式中,1^及112爲氫原子、碳數1〜5之烷基或鹵素 原子’可互爲相同或相異,X表示-(:0-、-3 02-、-(:(€?3)2-、-Si(CH3)2-、_cH2_、_(:(〇:ίί3)2-、_〇-、下述式所表示之 9,9-荛基、或不存在,η爲1〜10之整數]。 【化1 0】 c^o 於該等之由雙酚類所衍生之具有2個環氧丙基醚之環 -19· 201140237 氧化合物,使(甲基)丙烯酸(其爲丙烯酸及/或甲基丙烯酸 之意)反應,對所得之具羥基化合物,使多元酸羧酸或其 之酸酐反應而得(甲基)丙烯酸環氧酯酸加成物,而可將該( 甲基)丙烯酸環氧酯酸加成物作爲本發明之(B)成分之鹼顯 像性之含不飽和基之寡聚物使用。 (B)成分之具有乙烯性雙鍵之鹼顯像性寡聚物,一倂 具有有乙烯性不飽和雙鍵、與羧基、羥基、磺酸基、磷酸 基等酸性基,故例如當作爲濾光器隔壁形成用使用時,可 賦予感光性樹脂組成物優異之光硬化性、良顯像性、圖型 化特性,並造成遮光性隔壁之物性提升。 (B)成分之具有乙烯性雙鍵之鹼顯像性寡聚物,較佳 爲,由上述式(4)所表示之環氧化合物所衍生。該環氧化合 物係由雙酚類所衍生。因此,藉由說明雙酚類,可理解鹼 顯像性之含不飽和基之寡聚物,故以雙酚類來說明較佳之 具體例。 可提供較佳之鹼顯像性之含不飽和基之寡聚物的雙酚 類,可舉例如以下所述者。可舉例如含雙(4-羥基苯基)酮 、雙(4-羥基-3,5-二甲基苯基)酮、雙(4-羥基-3,5-二氯苯基 )酮、雙(4-羥基苯基)颯、雙(4-羥基-3,5-二甲基苯基)颯' 雙(4-羥基-3,5-二氯苯基)颯、雙(4-羥基苯基)六氟丙烷、 雙(4-羥基-3,5·二甲基苯基)六氟丙烷、雙(4-羥基-3,5-二氯 苯基)六氟丙烷、雙(4-羥基苯基)二甲矽烷、雙(4-羥基-3, 5-二甲基苯基)二甲矽烷、雙(4-羥基-3,5-二氯苯基)二甲 矽烷、雙(4-羥基苯基)甲烷、雙(4-羥基-3,5-二氯苯基)甲 -20- 201140237 烷、雙(4-羥基-3,5-二溴苯基)甲烷、2,2-雙(4-羥基苯基)丙 烷、2,2-雙(4-羥基-3,5-二甲基苯基)丙烷、2,2-雙(4-羥基-3,5-二氯苯基)丙烷、2,2-雙(4-羥基_3·甲基苯基)丙烷、 2,2-雙(4-羥基-3-氯苯基)丙烷、雙(4-羥基苯基)醚、雙(4-羥基-3,5_二甲基苯基)醚、雙(4-羥基-3,5-二氯苯基)醚等之 化合物、或式(4)中之X爲上述之9,9-蕗基之9,9-雙(4-羥 基苯基)蕗、9,9-雙(4-羥基-3-甲基苯基)蒹、9,9-雙(4-羥 基-3-氯苯基)苐、9,9-雙(4-羥基-3-溴苯基)莽、9,9-雙(4-羥基-3-氟苯基)蕗、9,9-雙(4_羥基-3-甲氧基苯基)苐、9,9-雙(4-羥基-3,5-二甲基苯基)蒹、9,9-雙(4-羥基-3,5·二氯苯 基)蕗、9,9-雙(4-羥基-3,5-二溴苯基)弗等、及4,4’-聯苯酚 、3,3’-聯苯酚等化合物。 (B)成分之具有乙烯性雙鍵之鹼顯像性寡聚物,可由 如上述之雙酚類所衍生之環氧化合物製得,除相關之環氧 化合物之外,只要爲蓄意地含有酚醛清漆型環氧化合物、 或甲酚清漆型環氧化合物等具有2個環氧丙基醚之化合物 者即可使用。又,將雙酚類環氧丙基醚化之際,係混入寡 聚物單位而成,而通式(4)中之η若爲0〜10、較佳爲0〜2 之範圍,則不會對本樹脂組成物的性能造成問題。 又,可與如此之環氧化合物與(甲基)丙烯酸反應所得 之(甲基)丙烯酸環氧酯分子中之羥基反應之多元酸羧酸或 其之酸酐,可舉例如,馬來酸、琥珀酸、衣康酸、苯二甲 酸、四氫酞酸、六氫酞酸、甲基內亞甲基四氫酞酸、氯橋 酸、甲基四氫酞酸、偏苯三酸、焦蜜石酸等或其之酸酐、 -21 - 201140237 以及二苯基酮四羧酸、聯苯四羧酸、聯苯醚四羧酸等芳香 族多元羧酸或其之酸二酐等。而關於酸酐與酸二酐之使用 比例,可視曝光、鹼顯像操作選擇適於形成微細圖型的比 例。 關於(B)成分之具有乙烯性雙鍵之鹼顯像性寡聚物’ 可僅使用其之1種、亦可使用2種以上之混合物。又,環 氧化合物與(甲基)丙烯酸之反應、該反應所得之(甲基)丙 烯酸環氧酯與多元酸或其之酸酐之反應,可採用上述專利 文獻6等之周知之方法,但無特別限定。 又,用以製得(B)成分之其他方法,亦可:將含有1) 具有1個以上羧基之乙烯性不飽和單體、2)於側鏈具有於 聚合後可導入不飽和基之羥基、酸酐基、環氧丙基等之乙 烯性不飽和單體、及3)其他之乙烯性不飽和單體之單體, 於共存有過氧化物及鏈轉移劑之溶劑中,以自由基共聚合 得到共聚物後,再於可加成於上述2)之側鏈之官能基加成 一不飽和化合物作成黏結樹脂,藉此,亦可作成具有乙烯 性雙鍵之鹼顯像性寡聚物。 可作爲上述單體混合物使用之1)具有1個以上羧基之 乙烯性不飽和單體,可舉例如丙烯酸、甲基丙烯酸、巴豆 酸、α -氯丙烯酸、2-乙基丙烯酸、桂皮酸等不飽和單羧酸 類;馬來酸、馬來酸酐、富馬酸、衣康酸、衣康酸酐、檸 康酸、檸康酸酐、甲基反丁烯二酸等不飽和二羧酸(酐)類 :3價以上之不飽和多元羧酸(酐)類等。其中,以丙烯酸 、甲基丙烯酸較佳。該等含有羧基之乙烯性不飽和單體, -22- 201140237 可單獨使用、亦可倂用2種以上。 單體混合物之另一成分之3)其他之乙烯性不飽和單體 ’可舉例如,苯乙烯、α -甲基苯乙烯、乙烯基甲苯、氯 苯乙烯、甲氧基苯乙烯等芳香族乙烯基化合物;丙烯酸甲 酯、甲基丙烯酸甲酯、丙烯酸乙酯、甲基丙烯酸乙酯、丙 烯酸丙酯、甲基丙烯酸丙酯、丙烯酸丁酯、甲基丙烯酸丁 酯、丙烯酸2-羥基乙酯、甲基丙烯酸2-羥基乙酯、丙烯酸 苄酯、甲基丙烯酸苄酯、甲基丙烯酸月桂酯、甲基丙烯酸 十四酯、甲基丙烯酸十六酯、甲基丙烯酸硬脂醯酯、甲基 丙烯酸十八酯、甲基丙烯酸二十二酯、甲基丙烯酸二十酯 等不飽和羧酸酯類;丙烯酸胺基乙酯、甲基丙烯酸胺基乙 酯、丙烯酸胺基丙酯、甲基丙烯酸胺基丙酯等不飽和羧酸 胺基烷基酯類;丙烯酸環氧丙酯、甲基丙烯酸環氧丙酯等 不飽和羧酸環氧丙酯類;乙酸乙烯酯、丙酸乙烯酯、丁酸 乙烯酯、苯甲酸乙烯酯等羧酸乙烯酯類;乙烯基甲醚、乙 烯基乙醚、丙烯基環氧丙醚、甲基丙烯基環氧丙醚等不飽 和醚類;丙烯腈、甲基丙烯腈、α-氯丙烯腈、氰化亞乙 烯等氰化乙烯化合物;丙烯醯胺、甲基丙烯醯胺、α-氯 丙烯醯胺、Ν-羥基乙基丙烯醯胺、Ν-羥基乙基甲基丙烯醯 胺、馬來醯胺等不飽和醯胺或不飽和亞醯胺類;1 , 3 · 丁二 烯、異戊二烯、氯丁二烯等脂肪族共軛二烯類等。其中, 較佳爲丙烯酸甲酯、甲基丙烯酸甲酯、丙烯酸乙酯、甲基 丙烯酸乙酯、丙烯酸2-羥基乙酯、甲基丙烯酸2-羥基乙酯 、丙烯酸苄酯、甲基丙烯酸苄酯。該等之其他不飽和單體 -23- 201140237 ,可單獨使用或倂用2種以上》 又,該(B)成分之酸價,係以欲將樹脂lg中之羧基中 和時所必須之K0H的mg數來表示’而由影像圖型形成時 之顯像處理時間或圖型形狀、硬化膜之密合性的觀點考量 ,以50〜1 50(KOHmg/g)爲佳。若低於50則無法藉鹼顯像 液形成圖型,又,當使用交聯劑時’與作爲交聯劑之環氧 樹脂的交聯會不足’且會產生耐熱性的降低、於有機溶劑 中之密合性不佳等。而酸價若超過1 50,則鹼顯像時之表 面粗糙、細線圖型之顯像密合不良以及硬化膜之耐濕性會 成爲問題。 (C) 成分之於1分子中至少具有3個以上之乙烯性雙 鍵之光聚合性單體,可舉例如三羥甲基丙烷三(甲基)丙烯 酸酯、三羥甲基乙烷三(甲基)丙烯酸酯、新戊四醇三(甲基 )丙烯酸酯、新戊四醇四(甲基)丙烯酸酯、二新戊四醇四( 甲基)丙烯酸酯、二新戊四醇六(甲基)丙烯酸酯等(甲基)丙 烯酸酯類,該等之化合物,可僅使用其之1種、亦可倂用 2種以上使用。 於本發明之鹼顯像感光性樹脂組成物,係含有(B)成 分、(C)成分等光聚合性之化合物者,爲了使其光硬化, 以含有(D)成分之光聚合起始劑爲佳。(D)成分係藉紫外光 照射、特別是300〜450nm之紫外線照射而產生自由基, 加成於光聚合性之化合物而使自由基聚合開始,使樹脂組 成物硬化。 (D) 成分之光聚合起始劑,可舉例如二苯基酮、米其 -24 - 201140237 勒酮、N,N’-四甲基-4,4,-二胺基二苯基酮、4-甲氧基-4’-二甲基胺基二苯基酮、4,4’-二乙基胺基二苯基酮、2-乙基 蒽醌、菲等芳香族酮、安息香甲醚、安息香乙醚、安息香 苯醚等安息香醚類、甲基安息香、乙基安息香等安息香、 2-(鄰氯苯基)-4,5-苯基咪唑2聚物、2-(鄰氯苯基)-4,5-二( 間甲氧基苯基)咪唑2聚物、2-(鄰氟苯基)-4,5-二苯基咪唑 2聚物、2-(鄰甲氧基苯基)_4,5-二苯基咪唑2聚物、2,4,5-三芳基咪唑2聚物、2 -苄基-2 -二甲基胺基-1-(4 -味啉苯基 )-丁酮、2-三氯甲基-5-苯乙烯基-1,3,4-噚二唑、2-三氯甲 基-5-(對氰基苯乙烯基)-l,3,4-嗶二唑、2-三氯甲基-5-(對 甲氧基苯乙烯基)-1,3,4-噚二唑等鹵甲基噻唑化合物、 2.4.6- 三(三氯甲基)-i,3,5-三嗪、2-甲基-4,6-雙(三氯甲基 )-1,3,5-三嗪、2-苯基-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-氯苯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基苯基)- 4.6- 雙(三氯甲基)-l,3,5-三嗪、2-(4-甲氧基萘基)·4,6-雙( 三氯R甲基)-1,3,5-三嗪、2-(4-甲氧基苯乙烯基)-4,6-雙( 二氯甲基)-1,3,5-三嗦、2-(3,4,5-二甲氧基苯乙稀基)-4,6_ 雙(三氯甲基)-1,3,5-三嗪、2-(4-甲基硫代苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪等鹵甲基-S-三嗪系化合物、2,2-二甲氧基-1,2-二苯基乙-1-酮、2-甲基-1-[4·(甲基硫代)苯 基]-2-味啉丙烷、2-苄基·2-二甲基胺基味啉苯基]-丁 烷-1,1-羥基-環己基-苯基酮等。 該等光聚合起始劑,可單獨使用或混合2種以上使用 。又,亦可添加其本身並不發揮作爲光聚合起始劑或增感 -25- 201140237 劑之作用,而藉由與上述之化合物組合使用,能增大光聚 合起始劑或增感劑之化合物。如此之化合物,若與二苯基 酮組合,則可使用例如具效果之三乙醇胺等3級胺》 (D) 成分之光聚合起始劑之使用量,以(A)、(B)及(C) 各成分之合計1〇〇質量份爲基準時,以5〜40質量份爲宜 。當(0)成分之配合比例未滿5質量份時,光聚合的速度 變慢、感度降低,另一方面,當超過40質量份時,感度 過強,圖型線寬相對於圖型光罩成爲變粗的狀態,無法忠 實地呈現相對於光罩的線寬,又,圖型邊緣有產生鋸齒狀 、無法成銳利邊緣的問題之虞。 藉由對含有以上之(A)〜(D)成分之鹼顯像感光性樹脂 組成物’視目的添加顏料等,可作成顯示元件用之隔壁形 成用感光性樹脂組成物。特別是當爲濾光器用隔壁時,以 TFT元件之遮光爲目的下’較佳可使用遮光性分散液(E成 分)。 (E) 成分之遮光性分散液所含之黑色有機顔料、混色 有機顏料及遮光材’以耐熱性、耐光性及耐溶劑性優異者 爲佳。此處,黑色有機顏料,可舉例如二萘嵌苯黑、花青 黑等。混色有機顏料,可舉例如混合選自紅、藍、綠、紫 、黃色、花青、品紅等之至少2種以上之顏料而擬黑色化 者。遮光材’可舉例如碳黑、氧化鉻、氧化鐵、鈦黑、苯 胺黑、花青黑,亦可適當地選擇2種以上使用,由遮光性 、表面平滑性、分散安定性、與樹脂之相溶性良好的觀點 ’特別以碳黑爲佳。藉由將選自該等顏料或遮光材之1種 -26- 201140237 以上,視需要與分散劑、分散助劑一同分散於有機溶劑中 ,可作成遮光性分散液。 關於(E)成分之配合比例,(E)成分所含之顏料或遮光 材的比例,相對於感光性樹脂組成物之總固形分1 00質量 份,以配合25〜60質量份爲佳。若少於25質量份,則遮 光性會不足。若超過60質量份,則由於成爲原本之圖型 的感光性樹脂之含量減少,而產生損及顯像特性並損害膜 形成能力等不良之問題。 於本發明之顯示元件隔壁形成用感光性樹脂組成物中 ’除上述(A)〜(D)成分所含之溶劑之外,亦可使用其他之 溶劑。此處所謂之其他溶劑,可舉例如甲醇 '乙醇、正丙 醇、異丙醇、乙二醇 '丙二醇等醇類、或/3-萜品醇等 萜類等、丙酮、甲乙酮、環己酮、Ν-甲基-2-吡咯烷酮等 酮類、甲苯、二甲苯、四甲基苯等芳香族烴類、賽璐蘇、 甲基賽璐蘇、乙基賽璐蘇、卡必醇、甲基卡必醇、乙基卡 必醇、丁基卡必醇、丙二醇單甲醚、丙二醇單乙醚、二丙 二醇單甲醚、二丙二醇單乙醚、三乙二醇單甲醚、三乙二 醇單乙醚等二醇醚類、乙酸乙酯、乙酸丁酯、乙酸賽璐蘇 、乙酸乙賽璐蘇、乙酸丁賽璐蘇、卡必醇乙酸酯、乙卡必 醇乙酸酯、丁卡必醇乙酸酯、丙二醇單甲醚乙酸酯、丙二 醇單乙醚乙酸酯等乙酸酯類等,使用該等藉由溶解、混合 ,可作成均勻之溶液狀之組成物。 又,於本發明之顯示元件隔壁形成用感光性樹脂組成 物,亦可視需要配合硬化促進劑、熱聚合禁止劑、可塑劑 -27- 201140237 、充塡材、整平劑、消泡劑等添加劑。其中,熱聚合禁止 劑,可舉例如氫醌、氫醌單甲醚、五倍子酚、三級丁基兒 茶酚、吩噻嗪等,可塑劑,可舉例如酞酸二丁酯、酞酸二 辛酯、三甲苯等,充塡材,可舉例如玻璃纖維、二氧化矽 、雲母、氧化鋁等,又,消泡劑或整平劑,可舉例如聚矽 氧系、氟系、丙烯酸系之化合物。 特別是,於添加表面特性改善所使用之整平劑、消泡 劑等具有界面活性作用之材料之際,必須以不損及硬化後 之表面撥墨性的程度來添加,較佳爲,以相對於組成物中 總固形分之濃度計,以較撥墨劑少之含量來添加。 本發明之顯示元件用之隔壁形成用感光性樹脂組成物 ,含有上述(A)〜(E)成分或該等與溶劑作爲主成分。除去 溶劑之固形分(於固形分含有硬化後成爲故形分之單體)中 ,較佳爲,含有(A)〜(E)成分合計爲70質量%以上、更佳 爲80質量%、又更佳爲90質量%以上。溶劑之量,係依 存於塗佈方式隨目標之黏度而變化,而以30〜90質量%之 範圍爲佳。 爲了形成本發明之顯示元件用隔壁或濾光器隔壁等, 係使用上述之本發明之鹼顯像感光性樹脂組成物以光微影 法來形成。其之製造步驟,可舉例如下述方法:首先,將 感光性樹脂組成物作成溶液塗佈於基板表面,接著使溶劑 乾燥(預烘烤)後,於如此所得之皮膜上覆蓋光罩,照射紫 外線使曝光部硬化,再使用鹼水溶液使未曝光部溶出進行 顯像而形成圖型,再進行後烘烤作爲後乾燥。 -28- 201140237 塗佈感光性樹脂組成物之溶液的基板,可使用於玻璃 、透明薄膜(例如’聚碳酸酯、聚對苯二甲酸乙二醇酯、 聚醚颯等)上蒸鍍或濺鍍ITO、金等透明電極者等。 將該感光性樹脂組成物之溶液塗佈於基板的方法,可 採用周知之溶液浸漬法、噴霧法、及使用輥塗機、墊塗機 或旋轉機之方法等任一方法。藉由該等方法,塗佈成所欲 之厚度後,除去溶劑(預烘烤),藉此形成皮膜。預烘烤可 藉由以烘箱、加熱板等加熱來進行。預烘烤中之加熱溫度 及加熱時間係視所使用之溶劑來加以適當地選擇,例如, 以60〜120 °c之溫度進行1〜1〇分鐘β 預烘烤後所進行之曝光,係以曝光機進行,藉由透過 光罩進行曝光而僅使對應於圖型之部分的光阻感光》曝光 機及其之曝光條件係經適當選擇,而使用超高壓水銀燈、 高壓水銀燈、金屬鹵素燈、遠紫外線燈等之光源進行曝光 ,使感光性樹脂組成物光硬化。 曝光後之鹼顯像,係以除去未曝光部分之光阻爲目的 所進行’藉由該顯像形成所欲之圖型。適於該鹼顯像之顯 像液,可舉例如,鹼金屬或鹼土類金屬之碳酸鹽的水溶液 、鹼金屬之氫氧化物的水溶液等,特別是,以使用含有碳 酸鈉、碳酸鉀 '碳酸鋰等碳酸鹽0.05〜3質量%之弱鹼性 水溶液’以20〜3 0°C之溫度顯像爲佳,可使用市售之顯像 機或超音波洗淨機等精密地形成微細的影像。 如此進行顯像後,以1 6 0〜2 5 0 °C之溫度、及2 0〜1 00 分鐘之條件進行熱處理(後烘烤)。該後烘烤,係以提高圖 -29 - 201140237 型化後之遮光膜與基板之密合性等爲目的而進行。其與預 烘烤同樣的,可藉由以烘箱、加熱板等加熱來進行。本發 明之圖型化後之遮光膜(隔壁),係依以上之光微影法經各 步驟而形成。 又,本發明之隔壁形成用感光性樹脂組成物,例如, 以上述之方法等作成遮光性濾光器隔壁後,若以各種手段 設定像素而形成既定之色圖型,則可製得濾光器。特別是 ,使用本發明之感光性樹脂組成物所形成之濾光器隔壁, 對基板之密合性優異且撥墨性優異,故較佳爲,於所得之 遮光性濾光器隔壁內以噴墨印刷法形成像素而製得濾光器 [實施例] 以下,根據實施例及比較例,具體地說明本發明之實 施形態。又,本發明並不僅限於該等實施例。 &lt;合成例A-1〜A-6、比較合成例a-l、a-2&gt; 於具備攪拌機之內容積1公升的反應器,裝塡表1所 示之單體、聚合起始劑、及鏈轉移劑,再以使固形分濃度 爲40質量%之方式加入丙二醇單甲基乙酸酯(PGMEA),於 氮環境氣氛下攪拌之下,以90°C聚合14小時。降溫後, 以PGMEA稀釋使固形分濃度爲20質量%,製得含氟樹脂 A-1〜A-6、a-Ι、及a_2之溶液。重量平均分子量,係以四 氫呋喃爲展開溶劑以GPC求得(聚乙二醇換算)。又,表1 -30- 201140237 所示之各成分之欄所記述之數値的單位爲「g」。又,含 氟基重量(%),係由平均分子量以裝塡比計算出一分子中 所含之氟原子之理論重量所求得之値。再者,表1中之簡 寫之意係如下所述。 CF9BuMA : CH2 = C(CH3)COOCH2CH2CH2CH2OC9F17 CF9PEMA : CH2 = C(CH3)COOCH2CH2OCOC6H4OC9F17 2-HEMA: 2-甲基丙烯酸羥基丁酯 4-HEMA: 4-甲基丙烯酸羥基丁酯 MMA :甲基丙烯酸甲酯 IBMA :甲基丙烯酸異冰片酯 4-HBAGE:丙烯酸4-羥基丁酯環氧丙醚 AIBN:偶氮—異丁睛 LM :月桂硫醇 [表1] A-1 A-2 A-3 A-4 A-5 A-6 a-1 a-2 單體 CF9BuMA 60 60 CF9PEMA 60 60 60 60 25 85 2-HEMA 30 4-HBMA 30 30 30 15 15 25 10 MMA 10 10 10 10 IBMA 10 10 35 5 4-HBAGE 15 15 15 聚合赌劑及鏈轉移劑 AIBN 0.91 0.83 0.8 0.67 0.62 0.76 0.89 0.43 LM 2.18 1.98 1.92 1.59 1.5 1.82 2.12 1.04 重量平均分子量 8800 8200 7600 8000 7400 8100 6900 (測定不能) 溶解性(20°C) 〇 〇 〇 〇 0 . 〇 〇 X 含氟基重量(%) 42.7 42.8 37 37.2 37.2 37.1 15.4 53.1 &lt;合成例A-ls〜A-6s、比較合成例a-ls、a-2s&gt;(雙鍵的導入) -31 - 201140237 針對上述「合成例A-l〜A-6、比較合成例a-l、a_2」 所準備之含氟樹脂(A),分別對於20質量%PGMEA溶液 100g,將2-丙烯醯氧基乙基異氰酸酯(Mw=141.12),以使 異氰酸酯基/含氟樹脂(A)中之羥基=0.5mol/mol的方式添 加,再者,混合1,4-二氮雙環[2,2,2]辛烷〇.〇3g,以50°C 攪拌12小時,冷卻至室溫。所得之各聚合物溶液A-l s〜 A-6s、a-ls、及 a-3s,以 IR 確認到 NCO 吸收(273001^1) 的消失。 &lt;實施例1〜1 4、及比較例1〜2 &gt; 首先,將除去含氟樹脂(A)之(B)〜(F)成分以及YX-4000H(昭和協鹵製;四甲基二苯基環氧樹脂)以表2及表3 所記載之比例(重量份)混合,加入丙二醇單甲醚乙酸酯以 使固形分濃度爲20質量%。接著,以表2及表3所記載之 重量份加入(A)成分溶液。接著,使用2μηι之聚丙烯製膜 濾器以0.2kg/crn2加壓過濾,調製成鹼顯像感光性樹脂組 成物。於表2及表3中,(B)成分之()內,係將相對於總固 形分之配合比例以質量%表示。又,關於(E)成分之配合比 例,係以對於總固形分之(顏料/總固形分)質量%表示於別 欄。再者,表2及表3中之簡寫之意係如下所述。 (B)-l:具有蕗骨架之丙烯酸環氧酯之酸酐縮聚物之丙 二醇單甲醚乙酸酯溶液(樹脂固形分濃度=56.1重量%,新 日鐵化學公司製,商品名V25 9ME) (B)-2:重量平均分子量30000、酸價l〇〇(KOHmg/g) -32- 201140237 之N -乙基馬來醯胺/甲基丙烯酸/甲基丙烯酸苄酯共聚物之 丙二醇單甲醚乙酸酯溶液(樹脂固形分濃度=3 6.7重量 %)(N-乙基馬來醯胺:甲基丙烯酸:甲基丙烯酸苄酯=29: 2 0 : 5 1 m ο 1 %) (C) -l :二新戊四醇六丙烯酸酯與二新戊四醇五丙烯酸 酯之混合物(日本化藥公司製,商品名DPHA) (D) -l : IRGACURE OXE-02(汽巴特殊化藥公司製) (D)-2 : IRGACURE OXE-01(汽巴特殊化藥公司製) (Ε)·1 :碳黑濃度20重量%、高分子分散劑濃度5重 量%之丙二醇單甲醚乙酸酯分散液(固形分25%) (F)-l :矽烷耦合劑S-510(吉松(股)製) [表2] 實® Ε例 1 2 3 4 5 6 7 8 9 10 A成分 (2〇%溶液) 成分名 A-1 Α·1 s A-2s A-2s A-3s A-3s A-4s A-5s A-6s A-6s 添加量 0.25 0.25 0.25 0.15 0.25 0.15 0.25 0.25 0.25 0.15 8成分 B-1 (56.5%) 11.8 11.8 11.8 11.8 11.8 11.8 11.8 11.8 11.8 11.8 B-2(36.7%) 4.2 4.2 4.2 4.2 4.2 4.2 4.2 4.2 4.2 4.2 c成分 C-1 2.1 2.1 2.1 2.1 2.1 2.1 2.1 2.1 2.1 2.1 D成分 D-1 1.26 1.26 1.26 1.26 1.26 1.26 1.26 1.26 1.26 1.26 D-2 E成分 E-1 33 33 33 33 33 33 33 33 33 33 F成分 F-1 0.23 0.23 0.23 0.23 0.23 〇 23 〇 23 0,23 0.23 0.23 5^._ YX-4000H 總固形分(%) 33 33 33 33 33 33 33 33 33 33 〇 〇 〇 〇 ο Ο Ο ο ο 〇 顯像性 0 〇 〇 〇 ο Ο Ο ο ο 〇 表面粗度 0 〇 〇 〇 0 Ο Ο ο ο 〇 合性 0 0 ο 0 ο ο 〇 ο ο 0 合性 〇 ο ο ο ο ο 〇 ο ο 0 2.3 2.3 2.3 2.3 2.3 2.3 2.3 2.3 2.3 2.3 〇 〇 〇 〇 ο 〇 〇 ο ο 0 油墨展開性 〇 〇 〇 〇 ο 〇 〇 ο ο 0 描繪條件2 ---- 油墨殘存 〇 ο ο ο ο ο ο ο ο 0 漏液 0 ο ο ο 〇 ο ο ο ο 0 -33- 201140237 [表3] 比較例 實» _ 1 2 11 12 13 14 A成分 (20%溶液) 成分名 A-3s a-1s Α-1 s A-3s A-5s Α-5 添加a 2 2 0.25 0.25 0.25 0.25 B成分 B-1 (56.5%) 11,8 11.8 23.6 23.6 23.6 23.6 B-2(36.7%) 4.2 4.2 C成分 C-1 2.1 2.1 5,71 5.71 5.71 5.71 D成分 D-1 1.26 1.26 D-2 0.6 0.6 0.6 0.6 E成分 E-1 33 33 F成分 F-1 0.23 0.23 0.2 0.2 0.2 0.2 其它 YX-4000H 1 1 1 1 顏料/總固形分(%) 33 33 塗佈異物 X 〇 〇 〇 〇 〇 顯像性 X 〇 ο 〇 〇 〇 表面粗度 〇 ο 〇 〇 〇 〇 圖型密合性 〇 ο 〇 〇 ο 〇 PCT密合性 〇 〇 0 〇 ο 0 OD/ β m 2.3 2,3 - - - - 接觸角[。]、BCA 〇 X 〇 〇 〇 〇 IJ特性 描繪條件1 油墨展開性 X 0 〇 ο ο ο 描繪條件2 油墨殘存 X ο ο ο ο ο 漏液 〇 X ο 〇 ο ο 將上述實施例及比較例所得之鹼顯像感光性樹脂組成 物,使用旋塗機,以使後烘烤後之膜厚爲2.1 μιη的方式塗 佈於125mmxl25mm的玻璃基板上,以80°C乾燥1分鐘。 之後,將曝光間隙調整爲150μηι,於乾燥皮膜上,覆蓋負 型光罩,以I線照度30mW/cm2之超高壓水銀燈照射100 mJ/cm2之紫外線,進行感光部分之光硬化反應。所使用之 光罩,係形成X方向50μπι線+ 3 5 0μιη開口、y方向20μπι 線+180μπι開口之基質者。接著,將該曝光結束之塗板, 於0.05%氫氧化鈉水溶液中,以23°C進行60秒鐘或80秒 鐘之1 kgf/cm2壓力之淋浴顯像及5kgf/cm2壓力之噴霧水 -34- 201140237 洗,以除去塗膜之未曝光部而於玻璃基板上形成像素圖型 ,之後,使用熱風乾燥機以23 0°C進行30分鐘熱後烘烤。 實施例及比較例中之評價項目與方法係如以下所述,各項 目之評價結果示於表2及表3。 膜厚:使用觸針式膜厚計(東京精密公司製,商品名 撒夫寇母)進行測定。 塗佈異物:當於旋塗後之塗膜觀察到放射狀之條紋時 爲x&lt;不良 &gt;,未觀察到時爲〇&lt;良好&gt;。 顯像性:以顯微鏡觀察顯像後之像素圖型,未確認到 對基板之剝離或圖型邊緣部分之鋸齒狀者評價爲〇&lt;良好&gt; ,確認到者評價爲X〈不良&gt;。 塗膜表面粗度:顯像、熱燒成後之塗膜之表面粗度 (Ra)之値,未滿150A評價爲〇&lt;良好&gt;,150A以上評價爲 X〈不良〉。 圖型密合性:於剝離測試未確認到20μπι圖型之剝離 者評價爲〇&lt;良好&gt;,確認到者評價爲χ&lt;不良&gt;。 PCT密合性:將實施後烘烤結束之圖型形成基板,以 12 1°C、100%RH、2atm、及24時間之條件實施pct(加壓 蒸煮器)試驗後,於20μιη圖型部貼附透明膠帶進行剝離試 驗,藉此評價圖型密合性。 OD測定:當混合黑色顏料作爲(Ε)成分時,使用後烘 烤後2 · 1 μπι之塗膜’使用大塚電子公司製〇d計進行測定 ,記載每1 μιη之OD値。 接觸角測定:藉由與上述相同之方法,顯像後於玻璃 -35- 201140237 基板上形成10nimxl0mmx2.1pm之四角圖型。使用丁基卡 必醇乙酸酯(BCA)測定該塗膜上之靜態接觸角。當該靜態 接觸角爲40°以上時評價爲〇&lt;良好 &gt;,未滿40°時評價爲x&lt; 不良&gt;。 IJ(噴墨)油墨塗佈特性:朝如此所得之基質中,使用 東芝科技製噴墨噴頭,將黏度10mPa· sec、固形分濃度 20%之濾光器用綠色油墨以以下之方式噴入,以80°C乾燥 1分鐘後,再以23 0°C進行後烘烤,以光學顯微鏡觀察塗 佈狀態。 描繪條件1 :於350χ180μιη像素玻璃上之中央部,滴 下42pl之綠色油墨。此時,當與未添加撥墨劑之比較例 顯示同等之玻璃面上之液體展開性者評價爲〇。 描繪條件2 :以使後烘烤後平均膜後爲1 . 8 μιη的方式 將綠色油墨滴下至基質中,於後烘烤後,觀察基質附近有 無漏光的產生,或於基質上有無油墨乾燥殘存的痕跡。 由上述之結果,實施例之任一者皆滿足作爲濾光器隔 壁之諸特性,且靜態接觸角於丁基卡必醇乙酸酯(BCA)中 亦顯示40°以上。另一方面,於比較例1顯像後於基板上 可見殘渣,Π塗佈時可見油墨展開性的課題》於比較例2 ’未得足夠之接觸角,又,於U塗佈時可見由隔壁之油 墨漏出的現象。 -36-(4) [wherein, where 1^ and 112 are a hydrogen atom, an alkyl group having 1 to 5 carbon atoms or a halogen atom' may be the same or different from each other, and X represents -(:0-, -3 02-, -(:(€?3)2-, -Si(CH3)2-, _cH2_, _(:(〇:ίί3)2-, _〇-, 9,9-fluorenyl represented by the following formula, or Does not exist, η is an integer from 1 to 10]. [Chemical 1 0] c^o is a ring of two epoxidized propyl ethers derived from bisphenols - 19.40237 Oxygen compound, a reaction of a methyl methacrylate (which is an acrylic acid and/or a methacrylic acid), and a hydroxy compound obtained by reacting a polybasic acid carboxylic acid or an anhydride thereof to obtain a (meth)acrylic acid epoxy ester acid adduct Further, the (meth)acrylic epoxy ester acid addition product can be used as the alkali-developing unsaturated group-containing oligomer of the component (B) of the present invention. (B) The component has an ethylenic double The base-developing oligomer of the bond has an acidic group such as an ethylenically unsaturated double bond and a carboxyl group, a hydroxyl group, a sulfonic acid group or a phosphoric acid group, and thus, for example, when used as a filter partition wall, Excellent for photosensitive resin composition The light-curing property, the good image-forming property, and the patterning property are improved, and the physical properties of the light-shielding barrier are improved. (B) The alkali-developing oligomer having an ethylenic double bond is preferably composed of the above formula. (4) Derived from the epoxy compound represented by the epoxy compound. The epoxy compound is derived from a bisphenol. Therefore, by describing the bisphenol, an alkali-developing oligomer containing an unsaturated group can be understood. Preferred examples of the bisphenols are preferred. The bisphenols which provide a preferred alkali-developing unsaturated group-containing oligomer may be mentioned, for example, as described below. Phenyl) ketone, bis(4-hydroxy-3,5-dimethylphenyl) ketone, bis(4-hydroxy-3,5-dichlorophenyl) ketone, bis(4-hydroxyphenyl)anthracene, Bis(4-hydroxy-3,5-dimethylphenyl)anthracene bis(4-hydroxy-3,5-dichlorophenyl)anthracene, bis(4-hydroxyphenyl)hexafluoropropane, double (4 -hydroxy-3,5·dimethylphenyl)hexafluoropropane, bis(4-hydroxy-3,5-dichlorophenyl)hexafluoropropane, bis(4-hydroxyphenyl)dimethyl decane, bis ( 4-hydroxy-3, 5-dimethylphenyl)dioxane, bis(4-hydroxy-3,5 -dichlorophenyl)dimethyloxane, bis(4-hydroxyphenyl)methane, bis(4-hydroxy-3,5-dichlorophenyl)methyl-20- 201140237 alkane, bis(4-hydroxy-3, 5-dibromophenyl)methane, 2,2-bis(4-hydroxyphenyl)propane, 2,2-bis(4-hydroxy-3,5-dimethylphenyl)propane, 2,2-double (4-hydroxy-3,5-dichlorophenyl)propane, 2,2-bis(4-hydroxy-3-methylphenyl)propane, 2,2-bis(4-hydroxy-3-chlorophenyl) a compound such as propane, bis(4-hydroxyphenyl)ether, bis(4-hydroxy-3,5-dimethylphenyl)ether or bis(4-hydroxy-3,5-dichlorophenyl)ether Or X in the formula (4) is 9,9-bis(4-hydroxyphenyl)anthracene, 9,9-bis(4-hydroxy-3-methylphenyl) of the 9,9-fluorenyl group described above. Indole, 9,9-bis(4-hydroxy-3-chlorophenyl)indole, 9,9-bis(4-hydroxy-3-bromophenyl)anthracene, 9,9-bis(4-hydroxy-3- Fluorophenyl)fluorene, 9,9-bis(4-hydroxy-3-methoxyphenyl)anthracene, 9,9-bis(4-hydroxy-3,5-dimethylphenyl)anthracene, 9, 9-bis(4-hydroxy-3,5.dichlorophenyl)anthracene, 9,9-bis(4-hydroxy-3,5-dibromophenyl)fusone, and 4,4'-biphenol, A compound such as 3,3'-biphenol. An alkali-developing oligomer having an ethylenic double bond of the component (B), which can be obtained from an epoxy compound derived from the above-mentioned bisphenols, except for the related epoxy compound, as long as it is deliberately contained in the phenolic aldehyde A compound having two epoxypropyl ethers such as a varnish-type epoxy compound or a cresol-type epoxy compound can be used. Further, when the bisphenol-based epoxy propyl group is etherified, the oligo unit is mixed, and if η in the formula (4) is in the range of 0 to 10, preferably 0 to 2, This can cause problems in the performance of the resin composition. Further, a polybasic acid carboxylic acid or an anhydride thereof which can react with a hydroxyl group in a (meth)acrylic acid epoxy ester molecule obtained by reacting such an epoxy compound with (meth)acrylic acid, for example, maleic acid or amber Acid, itaconic acid, phthalic acid, tetrahydrofurfuric acid, hexahydrofurfuric acid, methyl endomethylenetetrahydrofurfuric acid, chlorobridge acid, methyltetrahydrofurfuric acid, trimellitic acid, pyromellite An acid or the like or an acid anhydride thereof, -21 - 201140237, an aromatic polycarboxylic acid such as diphenyl ketone tetracarboxylic acid, biphenyltetracarboxylic acid or diphenyl ether tetracarboxylic acid or an acid dianhydride thereof. Regarding the ratio of use of the acid anhydride to the acid dianhydride, the ratio of the visible pattern and the alkali development operation is suitable for forming a fine pattern. The alkali-developing oligomer ′ having an ethylenic double bond as the component (B) may be used alone or in combination of two or more. Further, the reaction of the epoxy compound with (meth)acrylic acid, the reaction of the (meth)acrylic acid epoxy ester obtained by the reaction with the polybasic acid or the anhydride thereof may be carried out by a method known in the above Patent Document 6 or the like, but no Specially limited. Further, in another method for producing the component (B), an ethylenically unsaturated monomer having 1 or more carboxyl groups may be contained, and 2) a hydroxyl group having an unsaturated group introduced into the side chain after polymerization may be contained. An ethylenically unsaturated monomer such as an acid anhydride group or an epoxy propyl group, and 3) a monomer of another ethylenically unsaturated monomer, which is a solvent in a solvent in which a peroxide and a chain transfer agent coexist. After the copolymer is obtained by polymerization, an unsaturated compound is added to a functional group which can be added to the side chain of the above 2) to form a binder resin, whereby an alkali-developing oligomer having an ethylenic double bond can also be obtained. The ethylenically unsaturated monomer having one or more carboxyl groups may be used as the monomer mixture, and examples thereof include acrylic acid, methacrylic acid, crotonic acid, α-chloroacrylic acid, 2-ethylacrylic acid, and cinnamic acid. Saturated monocarboxylic acids; unsaturated dicarboxylic acids (anhydrides) such as maleic acid, maleic anhydride, fumaric acid, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, methyl fumaric acid : an unsaturated polycarboxylic acid (anhydride) having a valence of three or more. Among them, acrylic acid and methacrylic acid are preferred. These carboxyl group-containing ethylenically unsaturated monomers may be used singly or in combination of two or more kinds as -22 to 201140237. Another component of the monomer mixture, 3) other ethylenically unsaturated monomer, may, for example, be an aromatic vinyl such as styrene, α-methylstyrene, vinyltoluene, chlorostyrene or methoxystyrene. Base compound; methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate, propyl acrylate, propyl methacrylate, butyl acrylate, butyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, benzyl acrylate, benzyl methacrylate, lauryl methacrylate, tetradecyl methacrylate, hexadecyl methacrylate, stearyl methacrylate, methacrylic acid Unsaturated carboxylic acid esters such as octadecyl ester, behenyl methacrylate and octadecyl methacrylate; aminoethyl acrylate, aminoethyl methacrylate, aminopropyl acrylate, methacrylic acid amine Alkyl alkyl esters of unsaturated carboxylic acids such as propyl acrylate; unsaturated carboxylic acid glycidyl esters such as glycidyl acrylate and glycidyl methacrylate; vinyl acetate, vinyl propionate, butyric acid Vinyl ester, benzoic acid Vinyl carboxylates such as olefin esters; unsaturated ethers such as vinyl methyl ether, vinyl ethyl ether, propylene propylene propylene ether, methacryl epoxidized propyl ether; acrylonitrile, methacrylonitrile, α-chloride A vinyl cyanide compound such as acrylonitrile or vinyl cyanide; acrylamide, methacrylamide, α-chloropropenylamine, hydrazine-hydroxyethyl acrylamide, hydrazine-hydroxyethyl methacrylamide, An unsaturated decylamine such as maleic amine or an unsaturated sulfoxide; an aliphatic conjugated diene such as butadiene, isoprene or chloroprene; Among them, preferred are methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, benzyl acrylate, benzyl methacrylate. . These other unsaturated monomers -23- 201140237 may be used alone or in combination of two or more. Further, the acid value of the component (B) is K0H necessary for neutralizing the carboxyl group in the resin lg. The number of mg is expressed by the viewpoint of the development processing time, the pattern shape, and the adhesion of the cured film when the image pattern is formed, and is preferably 50 to 150 (KOH mg/g). If it is less than 50, it is impossible to form a pattern by an alkali developing solution, and when a crosslinking agent is used, 'cross-linking with an epoxy resin as a crosslinking agent may be insufficient', and heat resistance may be lowered, and an organic solvent may be produced. Poor adhesion and so on. When the acid value exceeds 1,500, the surface roughness during alkali development, the poor image adhesion of the fine line pattern, and the moisture resistance of the cured film may become a problem. (C) The photopolymerizable monomer having at least three or more ethylenic double bonds in one molecule, and examples thereof include trimethylolpropane tri(meth)acrylate and trishydroxymethylethane tris( Methyl) acrylate, neopentyl alcohol tri(meth) acrylate, neopentyl alcohol tetra (meth) acrylate, dipentaerythritol tetra (meth) acrylate, dipentaerythritol hexa A (meth) acrylate such as a methyl acrylate may be used alone or in combination of two or more. In the alkali-developing photosensitive resin composition of the present invention, a photopolymerizable compound such as the component (B) or the component (C) is contained, and a photopolymerization initiator containing the component (D) is used for photohardening. It is better. The component (D) is generated by ultraviolet light irradiation, particularly ultraviolet irradiation of 300 to 450 nm, and is added to a photopolymerizable compound to initiate radical polymerization to harden the resin composition. The photopolymerization initiator of the component (D) may, for example, be diphenyl ketone, miche-24 - 201140237 ketone, N, N'-tetramethyl-4,4,-diaminodiphenyl ketone, 4-methoxy-4'-dimethylaminodiphenyl ketone, 4,4'-diethylaminodiphenyl ketone, 2-ethyl fluorene, phenanthrene and other aromatic ketones, benzoin methyl ether Benzoin, benzoin ether, benzoin, ethyl benzoin and other benzoin, 2-(o-chlorophenyl)-4,5-phenylimidazole 2, 2-(o-chlorophenyl) -4,5-bis(m-methoxyphenyl)imidazole 2 polymer, 2-(o-fluorophenyl)-4,5-diphenylimidazole 2 polymer, 2-(o-methoxyphenyl) _4,5-diphenylimidazole 2 polymer, 2,4,5-triarylimidazole 2 polymer, 2-benzyl-2-dimethylamino-1-(4-carboline phenyl)-butyl Ketone, 2-trichloromethyl-5-styryl-1,3,4-oxadiazole, 2-trichloromethyl-5-(p-cyanostyryl)-l,3,4-indole Halogenomethylthiazole compound such as oxadiazole or 2-trichloromethyl-5-(p-methoxystyryl)-1,3,4-oxadiazole, 2.4.6-tris(trichloromethyl)- i,3,5-triazine, 2-methyl-4,6-bis(trichloromethyl)-1,3,5-triazine, 2 -phenyl-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4-chlorophenyl)-4,6-bis(trichloromethyl)-1,3 ,5-triazine, 2-(4-methoxyphenyl)-4.6-bis(trichloromethyl)-l,3,5-triazine, 2-(4-methoxynaphthyl)·4 ,6-bis(trichloro-R-methyl)-1,3,5-triazine, 2-(4-methoxystyryl)-4,6-bis(dichloromethyl)-1,3, 5-trimium, 2-(3,4,5-dimethoxyphenylethyl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4-methyl Halomethyl-S-triazine compounds, 2,2-dimethoxy-1, such as thiophenylstyrene)-4,6-bis(trichloromethyl)-1,3,5-triazine ,2-diphenylethan-1-one, 2-methyl-1-[4·(methylthio)phenyl]-2-morpholinepropane, 2-benzyl·2-dimethylamino Phenolic phenyl]-butane-1,1-hydroxy-cyclohexyl-phenyl ketone, and the like. These photopolymerization initiators may be used singly or in combination of two or more. Further, it may be added such that it does not function as a photopolymerization initiator or a sensitizing agent -25-201140237, and by using it in combination with the above-mentioned compound, it is possible to increase the photopolymerization initiator or the sensitizer. Compound. When such a compound is used in combination with diphenyl ketone, the use amount of a photopolymerization initiator such as a tertiary amine (D) component such as an effective triethanolamine can be used, with (A), (B) and ( C) When the total amount of each component is 1 part by mass, it is preferably 5 to 40 parts by mass. When the compounding ratio of the component (0) is less than 5 parts by mass, the speed of photopolymerization becomes slow and the sensitivity is lowered. On the other hand, when it exceeds 40 parts by mass, the sensitivity is too strong, and the pattern line width is relative to the pattern mask. It becomes a thickened state, and the line width with respect to the reticle cannot be faithfully presented. Moreover, the edge of the pattern has a problem of being jagged and unable to form a sharp edge. By adding a pigment or the like to the alkali-developing photosensitive resin composition containing the above components (A) to (D), it is possible to form a photosensitive resin composition for partition wall formation for a display element. In particular, when it is a partition for a filter, it is preferable to use a light-shielding dispersion (E component) for the purpose of shielding the TFT element. The black organic pigment, the mixed color organic pigment, and the light-shielding material contained in the light-shielding dispersion of the component (E) are preferably excellent in heat resistance, light resistance, and solvent resistance. Here, examples of the black organic pigment include perylene black, cyanine black, and the like. The mixed color organic pigment may be, for example, a mixture of at least two kinds of pigments selected from the group consisting of red, blue, green, purple, yellow, cyanine, and magenta. The light-shielding material may, for example, be carbon black, chromium oxide, iron oxide, titanium black, aniline black or cyanine black, or may be appropriately selected from two or more types, and may have light-shielding property, surface smoothness, dispersion stability, and resin. The viewpoint of good compatibility is particularly preferable to carbon black. A light-shielding dispersion liquid can be prepared by dispersing one or more of the pigments or light-shielding materials, -26 to 201140237, as needed, together with a dispersing agent or a dispersing aid in an organic solvent. With respect to the blending ratio of the component (E), the ratio of the pigment or the light-shielding material contained in the component (E) is preferably 100 parts by mass to 60 parts by mass based on 100 parts by mass of the total solid content of the photosensitive resin composition. If it is less than 25 parts by mass, the light shielding property will be insufficient. When the amount is more than 60 parts by mass, the content of the photosensitive resin which is the original pattern is reduced, which causes a problem that the development characteristics are impaired and the film forming ability is impaired. In the photosensitive resin composition for forming a partition wall of the display device of the present invention, other solvents may be used in addition to the solvents contained in the components (A) to (D). The other solvent used herein may, for example, be an alcohol such as methanol 'ethanol, n-propanol, isopropanol or ethylene glycol 'propylene glycol, or an anthracene such as /3-terpineol, acetone, methyl ethyl ketone or cyclohexanone. , ketones such as Ν-methyl-2-pyrrolidone, aromatic hydrocarbons such as toluene, xylene, tetramethylbenzene, celecoxime, methyl cyanidin, ethyl cyanidin, carbitol, methyl Carbitol, ethyl carbitol, butyl carbitol, propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether Ethylene glycol ethers, ethyl acetate, butyl acetate, ceramide acetate, acesulfame acetate, butyl acesulfame acetate, carbitol acetate, carbitol acetate, butyl carbitol acetic acid Acetate such as ester, propylene glycol monomethyl ether acetate or propylene glycol monoethyl ether acetate can be used as a homogeneous solution by dissolving and mixing. Further, in the photosensitive resin composition for forming a partition wall of the display device of the present invention, a curing accelerator, a thermal polymerization inhibiting agent, a plasticizer -27-201140237, a filler, a leveling agent, an antifoaming agent, and the like may be added as needed. . The thermal polymerization inhibiting agent may, for example, be hydroquinone, hydroquinone monomethyl ether, gallic phenol, tertiary butyl catechol, phenothiazine or the like, and a plasticizer, for example, dibutyl phthalate or citric acid Examples of the octyl ester, the trimethylbenzene, and the like include a glass fiber, a cerium oxide, a mica, an alumina, and the like, and an antifoaming agent or a leveling agent, for example, a polyfluorene type, a fluorine type, or an acrylic type. Compound. In particular, when adding a material having an interfacial activity such as a leveling agent or an antifoaming agent used for improving the surface property, it is necessary to add it so as not to impair the surface ink repellency after hardening, and preferably It is added in a smaller amount than the ink-repellent agent with respect to the concentration of the total solid content in the composition. In the photosensitive resin composition for forming a partition wall for a display element of the present invention, the components (A) to (E) or the solvent and the solvent are contained as a main component. In the case where the solid component of the solvent is removed (the monomer having a solid component after curing), the total amount of the components (A) to (E) is preferably 70% by mass or more, more preferably 80% by mass, and further More preferably, it is 90% by mass or more. The amount of the solvent varies depending on the viscosity of the target depending on the coating method, and is preferably in the range of 30 to 90% by mass. In order to form the partition wall for a display element or the filter partition of the present invention, the above-described alkali-developing photosensitive resin composition of the present invention is formed by photolithography. The manufacturing process may be, for example, a method in which a photosensitive resin composition is applied as a solution onto a surface of a substrate, and then the solvent is dried (prebaked), and then the film thus obtained is covered with a mask to irradiate ultraviolet rays. The exposed portion is cured, and the unexposed portion is eluted by using an aqueous alkali solution to develop a pattern, and then post-baking is performed as post-drying. -28- 201140237 A substrate coated with a solution of a photosensitive resin composition, which can be used for vapor deposition or sputtering on glass, transparent films (for example, 'polycarbonate, polyethylene terephthalate, polyether oxime, etc.) Plating ITO, gold and other transparent electrodes. The method of applying the solution of the photosensitive resin composition to the substrate can be carried out by any known method such as a solution dipping method, a spray method, or a roll coater, a pad coater or a rotary machine. By applying these methods to a desired thickness, the solvent is removed (prebaking) to form a film. The prebaking can be carried out by heating in an oven, a hot plate or the like. The heating temperature and the heating time in the prebaking are appropriately selected depending on the solvent to be used, for example, exposure at a temperature of 60 to 120 ° C for 1 to 1 minute after the β prebaking is performed. The exposure machine performs, by exposing through the reticle, only the photoresist photosensitive exposure device corresponding to the pattern portion and the exposure conditions thereof are appropriately selected, and an ultrahigh pressure mercury lamp, a high pressure mercury lamp, a metal halide lamp, A light source such as a far-ultraviolet lamp is exposed to light to cure the photosensitive resin composition. The alkali image after exposure is carried out for the purpose of removing the photoresist of the unexposed portion, and the desired pattern is formed by the development. The developing solution suitable for the alkali development may, for example, be an aqueous solution of a carbonate of an alkali metal or an alkaline earth metal, an aqueous solution of a hydroxide of an alkali metal, or the like, and in particular, a sodium carbonate or potassium carbonate containing carbonic acid is used. A weakly alkaline aqueous solution of 0.05 to 3% by mass of a carbonate such as lithium is preferably formed at a temperature of 20 to 30 ° C, and a fine image can be precisely formed using a commercially available image forming machine or an ultrasonic cleaning machine. . After the development as described above, heat treatment (post-baking) was carried out at a temperature of 1600 to 250 ° C and a temperature of 20 to 100 minutes. This post-baking is carried out for the purpose of improving the adhesion between the light-shielding film and the substrate after the drawing of -29 - 201140237. The same as the prebaking, it can be carried out by heating in an oven, a hot plate or the like. The light-shielding film (partition wall) after the patterning of the present invention is formed by the above-described photolithography method. Further, the photosensitive resin composition for forming a partition wall of the present invention can be obtained by, for example, forming a light-shielding filter partition wall by the above-described method or the like, and setting a pixel by various means to form a predetermined color pattern. Device. In particular, the filter partition formed by using the photosensitive resin composition of the present invention is excellent in adhesion to the substrate and excellent in ink repellency, and therefore it is preferred to spray it in the obtained partition wall of the light-shielding filter. In the ink printing method, a pixel is formed to obtain a filter. [Embodiment] Hereinafter, embodiments of the present invention will be specifically described based on examples and comparative examples. Moreover, the invention is not limited to the embodiments. &lt;Synthesis Examples A-1 to A-6, Comparative Synthesis Examples a1, a-2&gt; A reactor having a volume of 1 liter in an internal volume of a stirrer, and a monomer, a polymerization initiator, and a chain shown in Table 1 were attached. The transfer agent was further added to propylene glycol monomethyl acetate (PGMEA) so that the solid content concentration was 40% by mass, and the mixture was polymerized at 90 ° C for 14 hours while stirring under a nitrogen atmosphere. After the temperature was lowered, the solid content concentration was 20% by mass by PGMEA, and a solution of the fluorine-containing resins A-1 to A-6, a-Ι, and a_2 was obtained. The weight average molecular weight was determined by GPC using tetrahydrofuran as a developing solvent (in terms of polyethylene glycol). Further, the unit of the number described in the column of each component shown in Table 1-30-201140237 is "g". Further, the weight (%) of the fluorine-containing group is determined by calculating the theoretical weight of the fluorine atom contained in one molecule from the average molecular weight in terms of the mounting ratio. Furthermore, the abbreviations in Table 1 are as follows. CF9BuMA : CH2 = C(CH3)COOCH2CH2CH2CH2OC9F17 CF9PEMA : CH2 = C(CH3)COOCH2CH2OCOC6H4OC9F17 2-HEMA: 2-hydroxybutyl methacrylate 4-HEMA: 4-hydroxybutyl methacrylate MMA: methyl methacrylate IBMA : isobornyl methacrylate 4-HBAGE: 4-hydroxybutyl acrylate propylene glycol AIBN: azo-isobutyl LM: lauryl mercaptan [Table 1] A-1 A-2 A-3 A-4 A-5 A-6 a-1 a-2 Monomer CF9BuMA 60 60 CF9PEMA 60 60 60 60 85 2-HEMA 30 4-HBMA 30 30 30 15 15 25 10 MMA 10 10 10 10 IBMA 10 10 35 5 4- HBAGE 15 15 15 Polymeric gambling agent and chain transfer agent AIBN 0.91 0.83 0.8 0.67 0.62 0.76 0.89 0.43 LM 2.18 1.98 1.92 1.59 1.5 1.82 2.12 1.04 Weight average molecular weight 8800 8200 7600 8000 7400 8100 6900 (cannot be measured) Solubility (20 ° C) 〇〇〇〇0. 〇〇X fluorinated base weight (%) 42.7 42.8 37 37.2 37.2 37.1 15.4 53.1 &lt;Synthesis Example A-ls~A-6s, Comparative Synthesis Example a-ls, a-2s&gt; (Double Bond -31 - 201140237 Fluorine-containing fluorine prepared for the above "Synthesis Examples A1 to A-6, Comparative Synthesis Examples a1, a_2" Fat (A), respectively, for 100 g of a 20% by mass PGMEA solution, 2-propenylmethoxyethyl isocyanate (Mw = 141.12) so that the hydroxyl group in the isocyanate group / fluorine-containing resin (A) = 0.5 mol / mol The mixture was added, and further, 1,4-diazabicyclo[2,2,2]octane〇.3g was mixed, stirred at 50 ° C for 12 hours, and cooled to room temperature. The obtained polymer solutions A-l s~A-6s, a-ls, and a-3s were confirmed by IR to disappear from NCO absorption (273001^1). &lt;Examples 1 to 14 and Comparative Examples 1 to 2 &gt; First, the components (B) to (F) of the fluorine-containing resin (A) and YX-4000H (manufactured by Showa Co-halogen; tetramethyldiphenyl) were removed. The base epoxy resin was mixed in the ratio (parts by weight) shown in Table 2 and Table 3, and propylene glycol monomethyl ether acetate was added so that the solid content concentration was 20% by mass. Next, the component (A) solution was added in parts by weight as shown in Tables 2 and 3. Subsequently, it was filtered under pressure with 0.2 kg/crn 2 using a 2 μηι polypropylene membrane filter to prepare an alkali-developing photosensitive resin composition. In Tables 2 and 3, in the component (B), the blending ratio with respect to the total solid fraction is expressed by mass%. Further, the compounding ratio of the component (E) is shown in the column for the total solid content (pigment/total solid content). Furthermore, the abbreviations in Tables 2 and 3 are as follows. (B)-l: a propylene glycol monomethyl ether acetate solution of an acid anhydride polycondensate of an oxime skeleton (resin solid concentration = 56.1% by weight, manufactured by Nippon Steel Chemical Co., Ltd., trade name V25 9ME) B)-2: propylene glycol monomethyl ether of weight average molecular weight 30,000, acid value l〇〇(KOHmg/g) -32- 201140237 of N-ethylmaleamide/methacrylic acid/benzyl methacrylate copolymer Acetate solution (resin solid concentration = 36.7 wt%) (N-ethyl maleamide: methacrylic acid: benzyl methacrylate = 29: 2 0 : 5 1 m ο 1 %) (C) -l : a mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate (manufactured by Nippon Kayaku Co., Ltd., trade name DPHA) (D) -l : IRGACURE OXE-02 (Ciba Special Chemicals Co., Ltd. (D)-2 : IRGACURE OXE-01 (manufactured by Ciba Specialty Chemicals Co., Ltd.) (Ε)·1: propylene glycol monomethyl ether acetate having a carbon black concentration of 20% by weight and a polymer dispersant concentration of 5% by weight Dispersion (solid content 25%) (F)-l : decane coupling agent S-510 (made by Gisson (stock)) [Table 2] Real® Example 1 2 3 4 5 6 7 8 9 10 A composition (2〇 % solution) Ingredient name A-1 Α·1 s A-2s A-2s A-3s A-3s A-4s A-5s A-6s A-6s Addition 0.25 0.25 0.25 0.15 0.25 0.15 0.25 0.25 0.25 0.15 8 component B-1 (56.5%) 11.8 11.8 11.8 11.8 11.8 11.8 11.8 11.8 11.8 11.8 B-2 (36.7%) 4.2 4.2 4.2 4.2 4.2 4.2 4.2 4.2 4.2 4.2 c component C-1 2.1 2.1 2.1 2.1 2.1 2.1 2.1 2.1 2.1 D component D-1 1.26 1.26 1.26 1.26 1.26 1.26 1.26 1.26 1.26 1.26 D -2 E component E-1 33 33 33 33 33 33 33 33 33 33 F component F-1 0.23 0.23 0.23 0.23 0.23 〇23 〇23 0,23 0.23 0.23 5^._ YX-4000H Total solid fraction (%) 33 33 33 33 33 33 33 33 33 33 〇〇〇〇ο Ο Ο ο ο 〇 Visualization 0 〇〇〇ο Ο Ο ο ο 〇 Surface roughness 0 〇〇〇0 Ο Ο ο ο 0合性 0 0 ο 0 ο ο 〇ο ο 0 〇 〇 ο ο ο ο 〇 ο 0 2.3 2.3 2.3 2.3 2.3 2.3 2.3 2.3 2.3 2.3 〇〇〇〇ο 〇〇ο ο 0 Ink 展开ο 〇〇ο ο 0 Depicting condition 2 ---- Ink residual 〇ο ο ο ο ο ο ο ο 0 Leaking 0 ο ο ο 〇ο ο ο ο 0 -33- 201140237 [Table 3] Comparison Example» _ 1 2 11 12 13 14 A component (20% solution) Ingredient name A-3s a-1s Α-1 s A-3s A-5s Α-5 Add a 2 2 0.25 0.25 0.25 0.25 B component B- 1 (56.5%) 11,8 11.8 23.6 23.6 23.6 23.6 B-2 (36.7%) 4.2 4.2 C component C-1 2.1 2.1 5,71 5.71 5.71 5.71 D component D-1 1.26 1.26 D-2 0.6 0.6 0.6 0.6 E Component E-1 33 33 F component F-1 0.23 0.23 0.2 0.2 0.2 0.2 Other YX-4000H 1 1 1 1 Pigment/Total solids (%) 33 33 Coating foreign matter X 〇〇〇〇〇 Imaging X 〇ο 〇〇〇 Surface roughness 〇ο 〇〇〇〇 pattern adhesion 〇ο 〇〇ο 〇 PCT adhesion 〇〇0 〇ο 0 OD/ β m 2.3 2,3 - - - - Contact angle [. ], BCA 〇X 〇〇〇〇IJ characteristic drawing condition 1 Ink spreadability X 0 〇ο ο ο Drawing condition 2 Ink residual X ο ο ο ο ο 漏 〇 X ο 〇 ο ο The results of the above examples and comparative examples The alkali-developing photosensitive resin composition was applied onto a glass substrate of 125 mm x 25 mm so that the film thickness after post-baking was 2.1 μm, and dried at 80 ° C for 1 minute using a spin coater. Thereafter, the exposure gap was adjusted to 150 μm, and the negative film was covered on the dried film, and an ultraviolet ray of 100 mJ/cm 2 was irradiated with an ultrahigh pressure mercury lamp having an I illuminance of 30 mW/cm 2 to carry out a photohardening reaction of the photosensitive portion. The reticle used is a substrate in which an opening of 50 μπι line + 3 50 μm in the X direction and a line of 20 μπι line + 180 μπι in the y direction are formed. Next, the exposed coated plate was subjected to a shower of 1 kgf/cm 2 pressure and a spray water of 5 kgf/cm 2 pressure in a 0.05% aqueous sodium hydroxide solution at 23 ° C for 60 seconds or 80 seconds. - 201140237 Washing to remove the unexposed portions of the coating film to form a pixel pattern on the glass substrate, followed by hot post-baking at 230 ° C for 30 minutes using a hot air dryer. The evaluation items and methods in the examples and comparative examples are as follows, and the evaluation results of the respective items are shown in Tables 2 and 3. Film thickness: Measurement was carried out using a stylus type film thickness meter (manufactured by Tokyo Seimitsu Co., Ltd., trade name: Safir). Coating foreign matter: When the film was observed after spin coating, the radial streaks were observed as x &lt;bad &gt; and when not observed, it was 〇 &lt;good&gt;. Imaging property: The pixel pattern after image observation was observed by a microscope, and it was not confirmed that the peeling of the substrate or the jaggedness of the edge portion of the pattern was evaluated as 〇 &lt;good&gt;, and it was confirmed that X was judged as "bad". The surface roughness of the coating film: after the development and the surface roughness (Ra) of the coating film after the thermal firing, the evaluation was 〇 &lt;good&gt; after less than 150 A, and X <bad> was evaluated at 150 A or more. Pattern adhesion: The peeling test did not confirm that the peel of the 20 μm pattern was evaluated as 〇 &lt;good&gt;, and the confirmed person was evaluated as &lt;bad&gt;. PCT Adhesiveness: The pattern is formed after the baking is completed, and the pct (pressure digester) test is carried out at 12 1 ° C, 100% RH, 2 atm, and 24 times, and then in the 20 μιη pattern portion. A peeling test was performed by attaching a transparent tape to evaluate the pattern adhesion. OD measurement: When a black pigment was mixed as a (Ε) component, a coating film of 2 · 1 μm after baking was measured using a 〇d meter manufactured by Otsuka Electronics Co., Ltd., and an OD 每 per 1 μm was described. Contact angle measurement: A four-neck pattern of 10 nmim x 10 mm x 2.1 pm was formed on the glass -35-201140237 substrate by the same method as above. The static contact angle on the coating film was measured using butyl carbitol acetate (BCA). When the static contact angle was 40 or more, it was evaluated as 〇 &lt;good &gt;, and when it was less than 40, it was evaluated as x &lt; bad &gt; IJ (inkjet) ink coating characteristics: Into the thus obtained substrate, a filter having a viscosity of 10 mPa·sec and a solid concentration of 20% was sprayed with green ink in the following manner using an inkjet head manufactured by Toshiba Corporation. After drying at 80 ° C for 1 minute, post-baking was carried out at 23 ° C, and the coating state was observed under an optical microscope. Drawing condition 1: On the center of the 350 χ 180 μm pixel glass, 42 pl of green ink was dropped. At this time, the liquid spreadability on the glass surface which is the same as that of the comparative example in which no ink-repellent was added was evaluated as 〇. Condition 2: The green ink was dropped into the matrix after the post-baking average film was 1.8 μm, and after the post-baking, the presence or absence of light leakage near the substrate was observed, or the ink remained on the substrate. Mark of. From the above results, any of the examples satisfies the characteristics as the filter partition, and the static contact angle is also 40° or more in butyl carbitol acetate (BCA). On the other hand, after the development of Comparative Example 1, the residue was observed on the substrate, and the problem of the ink spreadability at the time of coating was observed. In Comparative Example 2, the contact angle was not sufficiently obtained, and the U-coating was observed by the partition wall. The phenomenon of ink leakage. -36-

Claims (1)

201140237 七、申請專利範圍: 1. 一種鹼顯像性感光性樹脂組成物,其係含有作爲撥 墨劑之含氟樹脂(A)、與於波長3 00〜45 0nm之紫外光反應 之可鹼顯像之感光性成分,其特徵係, 含氟樹脂(A) ’係下述通式(2)所表示之無規或嵌段共 聚物,且平均分子量Mw爲2000〜20000之範圍,相對於 除去溶劑之合計成分1 00質量份之含氟樹脂(A)的比例, 爲0.05〜1質量份; 【化1】 CH2C(Rn) ?&lt; i 0 CH2C(Rn) Rf r 、 CH2Q(Rn) ?( R r 、 m C(Rn)· Z X [式中,R表示具有醇性羥基或酚性羥基之有機基,Rn表 示氫或甲基,Y表示未含氟原子之2價之有機基,Rf表示 下述式(1)所示之含氟基,Ar表示芳香族環,X及Z表示 氫原子、芳香族基、烷基、烯基、或未含氟原子之酯基, 可互爲相同或相異,P、q、r及s分別爲各共聚單位之總 數,其中,p、q及s爲〇〜30之數,P及q之合計爲1以 上,r爲1〜40之數;又,通式(2)之共聚物中所含之式(1) -37- 201140237 之含氟基的比例,以質量換算計爲1 5〜50質量%], 【化2】 (CF3)2CF201140237 VII. Patent application scope: 1. An alkali-developing photosensitive resin composition containing a fluorine-containing resin (A) as an ink-repellent agent and a base which reacts with ultraviolet light having a wavelength of 300 to 45 nm. The photosensitive component to be developed is characterized in that the fluorine-containing resin (A) is a random or block copolymer represented by the following formula (2), and the average molecular weight Mw is in the range of 2,000 to 20,000, as opposed to The proportion of the fluororesin (A) in which 100 parts by mass of the total of the solvent is removed is 0.05 to 1 part by mass; [Chemical 1] CH2C(Rn) ? &lt; i 0 CH2C(Rn) Rf r , CH2Q(Rn) (R r , m C(Rn)· ZX [wherein R represents an organic group having an alcoholic hydroxyl group or a phenolic hydroxyl group, Rn represents hydrogen or a methyl group, and Y represents a divalent organic group having no fluorine atom, Rf represents a fluorine-containing group represented by the following formula (1), Ar represents an aromatic ring, and X and Z represent a hydrogen atom, an aromatic group, an alkyl group, an alkenyl group or an ester group having no fluorine atom; The same or different, P, q, r and s are the total number of each copolymerized unit, wherein p, q and s are 〇~30, and the total of P and q is 1 or more. r is a number of 1 to 40; and the ratio of the fluorine-containing group of the formula (1) -37 to 201140237 contained in the copolymer of the formula (2) is 15 to 50% by mass in terms of mass, [Chemical 2] (CF3) 2CF C=CC=C (cf3)2cf 2.如申請專利範圍第1項之鹼顯像性感光性樹脂組成 物,其含有:該含氟樹脂(A)、(B)於1分子中具有酸性基 與2個以上之乙烯性雙鍵之鹼顯像性寡聚物、(C)於1分 子中具有3個以上之乙烯性雙鍵之光聚合性單體、與(D) 光聚合起始劑。 3 .如申請專利範圍第2項之鹼顯像性感光性樹脂組成 物,其中,該(B)成分,係將下述通式(4)所表示之由雙酚 類所衍生之具有2個環氧丙基醚之環氧化合物與(甲基)丙 烯酸酯之反應物,再與多元酸羧酸或其之酸酐反應所得之 鹼顯像性之含不飽和基之寡聚物; -38- 201140237 【化3】(cf3) 2 cf. The alkali-developing photosensitive resin composition according to the first aspect of the invention, wherein the fluorine-containing resin (A) or (B) has an acidic group and two or more in one molecule. An alkali-developing oligomer of an ethylenic double bond, (C) a photopolymerizable monomer having three or more ethylenic double bonds in one molecule, and (D) a photopolymerization initiator. 3. The alkali-developing photosensitive resin composition according to the second aspect of the invention, wherein the component (B) has two phenols derived from the following formula (4). An alkali-developing unsaturated group-containing oligomer obtained by reacting an epoxy compound of a epoxidized propyl ether with a (meth) acrylate and reacting with a polybasic acid carboxylic acid or an anhydride thereof; -38- 201140237 【化3】 [其中’式中’ Rl及汉2爲氫原子、碳數1〜5之烷基或鹵素 原子’可爲相间或相異,X表示-CO-、-so2-、-c(cf3)2- 、-Si(CH3)2-、_ch2_、c(CH3)2_、_〇_、下述式所表示之 9,9_莽基、或不存在,n爲1〜10之整數], 【化4】[wherein 'Rl and Han 2 are a hydrogen atom, an alkyl group having a carbon number of 1 to 5 or a halogen atom' may be phased or different, and X represents -CO-, -so2-, -c(cf3)2- , -Si(CH3)2-, _ch2_, c(CH3)2_, _〇_, 9,9-fluorenyl represented by the following formula, or absent, n is an integer from 1 to 10], [Chemical 4 】 4.一種遮光性之鹼顯像性感光性樹脂組成物,其特徵 係’相對於如申請專利範圍第1〜3項中任一項之鹼顯像 性感光性樹脂組成物,添加分散有選自(E)黑色有機顏料 、混色有機顏料及遮光材所構成群中之至少1_所成之遮 光性分散液,並且,相對於總固形分1 0 0質量份,係以2 5 〜60質量份之比例配合該(E)成分。 5 .如申請專利範圍第4項之感光性樹脂組成物,其係 -39- 201140237 顯示元件用隔壁形成用。 6.如申請專利範圍第5項之感光性樹脂組成物,其係 濾色器隔壁形成用。 7 . —種顯示元件用隔壁,其係將如申請專利範圍第5 或6項之感光性樹脂組成物塗佈於基板上,乾燥後,必須 經(a)以紫外線曝光裝置進行曝光、(b)以鹼水溶液進行顯 像、及(c)熱燒成之各步驟所得之隔壁,其特徵係,膜厚爲 1 · 5 〜3 μπι 〇 8.-種顯示元件,其特徵係’於如申請專利範圍第7 項之隔壁內,以噴墨印刷法形成像素。 201140237 四、指定代表圖: (一) 本案指定代表圖為:無 (二) 本代表圖之元件符號簡單說明:無 201140237 五 本案若有化學式時,請揭示最能顯示發明特徵的化學 式:無4. A light-shielding alkali-developing photosensitive resin composition characterized by being added to the alkali-developing photosensitive resin composition according to any one of claims 1 to 3 of the patent application. a light-shielding dispersion of at least 1% of the group consisting of (E) a black organic pigment, a mixed color organic pigment, and a light-shielding material, and a mass of 2 5 to 60 with respect to the total solid content of 100 parts by mass The proportion of the portion is matched with the component (E). 5. The photosensitive resin composition of claim 4, wherein the display element is formed by a partition wall of -39-201140237. 6. The photosensitive resin composition of claim 5, which is formed by a color filter partition. A partition wall for a display element, which is coated on a substrate with a photosensitive resin composition as disclosed in claim 5 or 6, and after drying, must be exposed by (a) an ultraviolet exposure device, (b) a partition wall obtained by performing an aqueous alkali solution and (c) each step of thermal firing, characterized in that the film thickness is 1 · 5 〜 3 μπι 〇 8. - a display element, the characteristics of which are as applied In the partition of item 7 of the patent range, pixels are formed by inkjet printing. 201140237 IV. Designated representative map: (1) The representative representative of the case is: None (2) The symbol of the representative figure is simple: No 201140237 5. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention: None
TW100105791A 2010-03-29 2011-02-22 An alkali-developable photosensitive resin composition, and a spacer for a display element formed TWI516866B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010075758A JP5431225B2 (en) 2010-03-29 2010-03-29 Alkali-developable photosensitive resin composition, partition wall for display element formed using the same, and display element

Publications (2)

Publication Number Publication Date
TW201140237A true TW201140237A (en) 2011-11-16
TWI516866B TWI516866B (en) 2016-01-11

Family

ID=44696585

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100105791A TWI516866B (en) 2010-03-29 2011-02-22 An alkali-developable photosensitive resin composition, and a spacer for a display element formed

Country Status (4)

Country Link
JP (1) JP5431225B2 (en)
KR (1) KR101787651B1 (en)
CN (1) CN102207681B (en)
TW (1) TWI516866B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11939459B2 (en) 2018-11-26 2024-03-26 Central Glass Company, Limited Photosensitive resin composition, method for producing cured product of fluororesin, fluororesin, fluororesin film, bank and display element

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103946747B (en) * 2011-11-11 2018-06-05 旭硝子株式会社 Negative light-sensitive resin combination, partition wall, black matrix" and optical element
JP5853807B2 (en) * 2012-03-26 2016-02-09 東洋インキScホールディングス株式会社 Active energy ray-curable ink composition and printed matter thereof
US9341946B2 (en) 2012-05-25 2016-05-17 Lg Chem, Ltd. Photosensitive resin composition, pattern formed using same and display panel comprising same
KR20140065351A (en) * 2012-11-21 2014-05-29 신닛테츠 수미킨 가가쿠 가부시키가이샤 Treating agent for inkjet substrate
JP6139894B2 (en) * 2013-01-28 2017-05-31 新日鉄住金化学株式会社 Black photosensitive composition for touch panel and touch panel
KR101635441B1 (en) 2013-03-04 2016-07-01 가부시키가이샤 니데크 Method for manufacturing touch panel, touch panel, method for manufacturing molded article, molded article, and laminated film
WO2015046178A1 (en) * 2013-09-25 2015-04-02 三菱化学株式会社 Photosensitive coloring composition, black matrix, coloring spacer, image display device, and pigment dispersion
KR102372956B1 (en) * 2013-12-17 2022-03-10 에이지씨 가부시키가이샤 Negative photosensitive resin composition, resin cured film, partition wall, and optical element
JP6905339B2 (en) * 2014-10-24 2021-07-21 Agc株式会社 How to manufacture bulkheads and how to repair bulkheads
CN108732874A (en) * 2017-04-19 2018-11-02 蓝思科技(长沙)有限公司 The cleaning method of uv-curable glue is remained after a kind of nano impression
JP7480484B2 (en) 2019-09-26 2024-05-10 東ソー株式会社 Resin composition
CN112731765B (en) * 2020-12-30 2024-03-26 西安瑞联新材料股份有限公司 Fluorine-containing resin composition, preparation method thereof and preparation method of cured film containing fluorine-containing resin composition

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3421511A1 (en) * 1984-06-08 1985-12-12 Hoechst Ag, 6230 Frankfurt POLYMERIZABLE COMPOUNDS HAVING PERFLUORALKYL GROUPS, REPRODUCTION LAYERS CONTAINING THEM AND THEIR USE FOR WATERLESS OFFSET PRINTING
JPS6110534A (en) * 1984-06-26 1986-01-18 Neos Co Ltd 2-(perfluoroalkenyloxy)ethyl acrylate or methacrylate
JPS62156108A (en) * 1985-12-28 1987-07-11 Mitsui Toatsu Chem Inc Polymer containing perfluoroalkenyloxy group
JPH0728230A (en) * 1993-07-07 1995-01-31 Japan Synthetic Rubber Co Ltd Radiation sensitive resist composition
JP5177933B2 (en) * 2003-08-12 2013-04-10 東洋インキScホールディングス株式会社 Partition wall composition, pixel forming substrate using the same, and pixel forming method
TW200722795A (en) * 2005-11-02 2007-06-16 Fujifilm Corp Substrate with dividing walls for an inkjet color filter, method for manufacturing the substrate, color filter including the substrate with dividing walls for an inkjet color filter and method of menufacturing the color filter, and liquid crystal display
JP4930378B2 (en) * 2005-11-28 2012-05-16 旭硝子株式会社 Partition wall, color filter, organic EL manufacturing method
JP2007171767A (en) * 2005-12-26 2007-07-05 Chisso Corp Photosetting polymer composition and display element using the same
JP5031578B2 (en) * 2006-03-29 2012-09-19 太陽ホールディングス株式会社 Photocurable / thermosetting resin composition, cured product thereof, and printed wiring board obtained using the same
CN101529333A (en) * 2006-10-24 2009-09-09 日立化成工业株式会社 Photosensitive resin composition and photosensitive element using the same
JP4949810B2 (en) * 2006-11-14 2012-06-13 東京応化工業株式会社 Colored photosensitive resin composition
JP2008202006A (en) * 2007-02-22 2008-09-04 Fujifilm Corp Fluorine-containing compound, resin composition, photosensitive transfer material, partition wall and its forming method, color filter and its manufacturing method, and display device
JP2008250102A (en) * 2007-03-30 2008-10-16 Fujifilm Corp Photosensitive resin composition, photosensitive transfer material, pixel barrier and method for forming the same, substrate with pixel barrier, color filter and method for producing the same, and display device
JP5346508B2 (en) * 2007-07-10 2013-11-20 新日鉄住金化学株式会社 Photosensitive resin composition for forming color filter partition walls, light-shielding color filter partition walls and color filters formed using the same
JP4684264B2 (en) * 2007-07-23 2011-05-18 岡本化学工業株式会社 Photosensitive composition and lithographic printing plate precursor using the same
KR101000360B1 (en) * 2008-09-22 2010-12-13 롬엔드하스전자재료코리아유한회사 Alkaline Developable Super-Hydrophobic Photosensitive Materials
JP5180765B2 (en) * 2008-10-02 2013-04-10 新日鉄住金化学株式会社 Alkali-developable photosensitive resin composition, display element partition and display element formed using the same
JP5329192B2 (en) * 2008-11-27 2013-10-30 東京応化工業株式会社 Photosensitive resin composition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11939459B2 (en) 2018-11-26 2024-03-26 Central Glass Company, Limited Photosensitive resin composition, method for producing cured product of fluororesin, fluororesin, fluororesin film, bank and display element

Also Published As

Publication number Publication date
TWI516866B (en) 2016-01-11
CN102207681B (en) 2015-10-14
KR20110109915A (en) 2011-10-06
JP2011209443A (en) 2011-10-20
CN102207681A (en) 2011-10-05
JP5431225B2 (en) 2014-03-05
KR101787651B1 (en) 2017-10-18

Similar Documents

Publication Publication Date Title
TWI516866B (en) An alkali-developable photosensitive resin composition, and a spacer for a display element formed
KR101499566B1 (en) Photosensitive resin composition for black resist, and light shielding film and color filter formed by using the same
TWI447523B (en) Photosensitive resin composition and color filter using the same
TWI506366B (en) Photosensitive resin composition for black resist and color filter shielding film
TWI449724B (en) Alkali-soluble resin and method for producing the same, and a photosensitive resin composition using an alkali-soluble resin
JP4290483B2 (en) Photosensitive resin composition for black resist and light-shielding film formed using the same
TW201841983A (en) Photosensitive resin composition, cured film, element equipped with cured film, organic el display device equipped with cured film, cured film production method, and organic el display device production method
WO2018084149A1 (en) Resin composition, resin sheet, cured film, organic el display device, semiconductor electronic component, semiconductor device, and method for producing organic el display device
JP5180765B2 (en) Alkali-developable photosensitive resin composition, display element partition and display element formed using the same
JP5346509B2 (en) Photosensitive resin composition for forming color filter partition walls, light-shielding color filter partition walls and color filters formed using the same
TW201435490A (en) Black photosensitive composition for touch panel and touch panel
TWI397769B (en) Alkali-soluble resin and method for producing the same, and a photosensitive resin composition, a hardened product and a color filter using an alkali-soluble resin
TWI416174B (en) Resit composition for color filter, method for making such composition and color filter using such composition
JP2016040577A (en) Positive photosensitive resin composition and cured film
TW201807488A (en) Photosensitive resin composition for light-sielding film, display substrate and manufacturing method thereof
JP7352176B2 (en) Photosensitive resin composition, cured film, and display device using the cured film
KR101740229B1 (en) Photosensitive resin composition for black resist, and light shielding film of color filter
JP5346508B2 (en) Photosensitive resin composition for forming color filter partition walls, light-shielding color filter partition walls and color filters formed using the same
JP4508924B2 (en) Photosensitive resin composition and color filter using the same
TWI440903B (en) Photosensitive resin composition for forming partition of color filter and partition of color filter formed by using the same as well as color filter and manufacturing method for color filter
JP2021056509A (en) Photosensitive resin composition for black resist, method for producing the same, light-shielding film obtained by curing the same, color filter and touch panel having the light-shielding film, and display device having the color filter and touch panel
JP4833324B2 (en) Photosensitive resin composition and color filter using the same
JP2009053415A (en) Method for manufacturing color filter by ink-jet printing method, and color filter