TW201139999A - Magnetic flux detection sensor - Google Patents

Abstract

Disclosed is an inclination sensor (1) comprises a casing (2), a magneto-electric conversion element (8) and a movable body (12). The casing (2) forms a movable body housing space (6) with a recessed curved surface (5) that faces upwards. The magneto-electric conversion element (8) which detects magnetic flux density in the height direction of the casing (2) is provided in the casing (2) and disposed on the underside of the deepest section (5A) of the recessed curved surface (5). The movable body (12) is formed by a hemispherical magnet wherein a sliding surface (13), formed by a downwards facing hemispherical surface, and a flat upper surface (14) have mutually reversed polarity. The moving body (12) is housed in the movable body housing space (6) when the sliding surface (13) is in the state of being slidably placed in the recessed curved surface (5). This enables the magneto-electric conversion element (8) to apply a magnetic flux density corresponding to the inclination angle (?) of the casing (2).

Description

201139999 VI. Description of the Invention: [Technical Field] The present invention relates to a magnetic flux sensor which is preferably used for tilt detection such as posture. [Prior Art] As the magnetic flux detecting sensor of the prior art, a tilt sensor for detecting the tilt of the posture is known (for example, refer to Patent Document 12). Patent Document 1 discloses a magnet including a magnet having an inclined surface having a central portion recessed, a magnetic detecting element such as a Hall (integrated circuit) disposed obliquely facing the magnet, and a magnet. A spherical movable body made of a magnetic material and rotatably disposed between the magnetic detecting elements and the inclined surface of the magnet. In the tilt sensor of the patent document, the movable body is rotationally displaced on the inclined surface in response to the tilt of the magnet, and the change in the magnetic flux density accompanying the displacement of the movable body is detected by the magnetic detecting element. Further, Patent Document 2 discloses a configuration in which a magnet having a concave spherical surface, a thick disk-shaped magnet slidably provided on a concave spherical surface of the casing, and a concave spherical surface are provided. Three or more magnetic detecting elements are provided at the side edge portions. In the tilt sensor of Patent Document 2, the magnet is slidably displaced on the concave spherical surface in accordance with the inclination of the casing, and a plurality of magnetic detecting elements are used to detect a change in the magnetic flux density caused by the displacement of the magnet. [PRIOR ART DOCUMENT] [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. In the tilt sensor of the art, in order to reliably detect the displacement of the movable body or the magnet accompanying the tilt, it is necessary to ensure that the movable range of the movable body or the like is larger than the movable body or the like. Therefore, there is a problem that the entire sensor is easy to be large and it is difficult to form a small sensor. In the tilt sensor, the detection signal corresponding to the positional relationship between the output and the movable body or the positional relationship between the magnetic detecting element and the movable body is such that the detection signal tends to become nonlinear with respect to the tilt angle. The tendency of the detectable tilt angle range to be narrowed. The present invention has been developed in view of the problems of the prior art described above, and an object of the present invention is to provide a magnetic flux detecting sensor which can realize miniaturization and can improve the linearity of the detection signal of the inclination angle of the posture. [Means for Solving the Problem; | In order to solve the above problem, the invention of the first aspect of the invention is a magnetic flux detecting sensor having a movable body formed with a sliding surface formed by a convex curved surface facing downward on the bottom side A non-magnetic container having a movable body accommodating space for supporting a sliding surface of the movable body to be slidably oriented upward, and a magnetic flux generated by sliding the movable body The magnetic flux density detecting means for changing the density is characterized in that the sliding surface of the movable body is disposed opposite to the magnetic flux density (four) means, and the magnetic flux is applied to the magnetic flux density detecting means via the sliding, and And a chamfered portion of the set of magnetic flux density of the upper peripheral edge that is used to reduce the magnetic flux density of the upper peripheral edge of the movable body is returned to a horizontal state, and the curved surface returns when the non-magnetic container body returns to a horizontal state along the concave curved container of the non-magnetic container. To the normal position. When the horizontal state is inclined, the movable position is displaced from the normal position, and when the non-magnetic movable body is along the concave portion of the non-magnetic container, the magnetic flux measurement sensor has a bottom side formed with a downwardly facing hemisphere The hemispherical movable body constituting the sliding surface includes a non-magnetic container having a movable body accommodating space in which the sliding surface of the movable body is slidably supported to face upward, and is provided in the non-magnetic container 1 The magnetic flux density of the change in the magnetic flux density generated by the sliding of the body is a measuring hand [the fourth (4) is that the sliding surface of the movable body is disposed opposite to the magnetic flux density detecting means, and the magnetic flux is faced through the sliding The density detecting means applies a magnetic flux, and a decoupling portion for concentrating the concentration of the magnetic flux density of the upper peripheral edge is disposed on the upper periphery of the movable body. When the non-magnetic container is inclined from the horizontal state, the movable body is along the non-magnetic stolen The concave curved surface is displaced from the normal position, and when the non-magnetic container returns to the horizontal state, the movable body returns to the normal position along the concave curved surface of the non-magnetic containerIn the invention of the third and fourth aspects, the movable system is formed by using a magnetic material to be magnetized in a state in which the sliding surface and the upper surface are opposite to each other. In the invention of the fifth aspect, the concave curved surface of the movable body accommodating space is formed by a spherical surface having a radius of curvature larger than a sliding surface of the movable body. According to a sixth aspect of the invention, at least one of a sliding surface of the movable body and a concave curved surface of the movable body accommodating space of the 6201139999 is subjected to a smoothing process β. In the invention of the seventh aspect, the magnetic flux density is The detection means has an anisotropy, that is, when the magnetic flux is inclined toward the y-axis direction, compared with the detection signal when the magnetic flux is inclined toward the X-axis direction in the X-axis direction and the γ-axis direction orthogonal to each other in the horizontal plane. The signal becomes a large output level; to compensate for the anisotropy of the magnetic flux density detecting means, the concave curved surface of the movable body accommodating space is displaced by the γ-axis direction of the movable body larger than the χ-axis direction An anisotropic surface is formed. According to a sixth aspect of the invention, a magnetic flux detecting sensor includes a movable body having a sliding surface formed by a convex curved surface facing downward on a bottom side thereof, and the sliding surface of the movable body is slidably supported The non-magnetic container of the movable body accommodating space of the concave curved surface facing upward, and the magnetic flux density (four) means provided in the non-magnetic capacity H and the change of the magnetic flux density generated by sliding the movable body, characterized in that Disposing the sliding surface of the movable body opposite to the magnetic flux density detecting means, and when the non-magnetic container is inclined from the horizontal state, the movable body is displaced from the normal position along the concave curved surface of the non-magnetic container, when the non-magnetic container Upon returning to the horizontal state, the movable body returns to the normal position along the concave curved surface of the non-magnetic container. According to a ninth aspect of the invention, a magnetic flux detecting sensor includes a hemispherical movable body having a sliding surface formed by a downwardly facing hemispherical surface on a bottom side thereof, and the sliding surface of the movable body is supported to be slidable a non-magnetic container of a movable body accommodating space of a concave curved surface facing upward, and a magnetic flux density detecting means provided in the non-magnetic container for detecting a change in magnetic flux density caused by sliding of the movable J-shaped body Further characterized in that: the sliding surface of the movable 201139999 body is disposed opposite to the magnetic flux density measuring means, and when the non-magnetic container is inclined from the horizontal state, the movable body is displaced from the normal position along the concave curved surface of the non-magnetic container When the non-magnetic container returns to the horizontal state, the movable body returns to the normal position along the concave curved surface of the non-magnetic container. According to the invention of the first aspect of the invention, the bottom side of the movable body is formed as a sliding surface formed by a convex curved surface facing downward. Therefore, the thickness of the movable body gradually becomes smaller along the upper peripheral edge from the apex portion of the convex curved surface. Further, when a movable body is formed using a magnetic material, there is a tendency that magnetic flux concentrates on a thick portion of the movable body. Therefore, the magnetic flux density is high around the apex portion of the movable body, and the magnetic flux density is lowered at the portion of the movable body near the upper peripheral edge. Further, the movable system is disposed in the movable body of the non-magnetic container. The magnetic flux density detecting means is disposed in the non-magnetic container and disposed to face the sliding of the movable body. When the non-magnetic container is inclined from the horizontal state, the sliding surface of the movable body slides on the concave curved surface, and the apex portion of the movable body moves toward the lowest position of the concave curved surface. At this time, the relative position of the apex portion of the movable body and the magnetic flux density (four) means changes in accordance with the inclination angle of the non-magnetic container. This can correspond to the inclination angle of the non-magnetic container, and the magnetic flux density applied to the magnetic flux density detecting means changes. Further, since the apex portion of the movable body can be displaced with respect to the magnetic flux density detecting means, the movable space of the non-magnetic capacity H is sufficient as long as it has a volume at which the movable body can be rotationally displaced. Therefore, the volume of the movable body accommodating space can be made close to the volume of the movable body, and the entire 201139999 sensor can be miniaturized. Further, as a positional relationship between the sliding surface of the movable body and the magnetic flux density detecting means, for example, a magnetic flux density detecting means is disposed around the deepest portion of the concave curved surface when the non-magnetic container is in a horizontal state. When the inclination angle of the non-magnetic container is small, the displacement of the apex portion of the movable body and the magnetic flux density detecting means is small, and the magnetic flux density applied to the magnetic flux density detecting means becomes high. On the other hand, when the inclination angle of the non-magnetic container is large, the displacement of the apex portion of the movable body and the magnetic flux density detecting means is large, and the magnetic flux density applied to the magnetic flux density detecting means becomes low. Further, the magnetic flux density applied to the magnetic flux density detecting means varies depending on the thickness of the movable body portion opposed to the magnetic flux density detecting means. Therefore, compared with the case where the movable body is formed into, for example, a thick-walled circular plate shape or a small-diameter spherical shape, the linearity of the detection signal of the magnetic flux density detecting means for the inclination angle of the non-magnetic container can be improved, thereby The range of angles at which the tilt can be detected can be expanded. Further, for example, when the sliding surface of the movable body and the upper surface are magnetized to have opposite polarities, there is a tendency that the magnetic flux concentrates on the upper peripheral edge of the movable portion where the surfaces intersect at an acute angle. On the other hand, in the present invention, since the chamfer β ′ is provided on the outer periphery of the movable body, the concentration of the magnetic flux on the upper peripheral edge of the movable body can be alleviated by the chamfered portion. As a result, the magnetic flux density can be gradually lowered as the apex portion of the movable body approaches the upper periphery of the movable body, and the linearity of the change in the magnetic flux density due to the displacement of the movable body can be improved. According to the invention of the second aspect of the invention, since the sliding surface formed by the downward hemispherical surface is formed on the bottom side of the movable body, the thickness of the movable body gradually decreases from the apex portion of the hemispherical surface toward the upper peripheral edge. Therefore, the effect of 201139999 is substantially the same as that of the invention of the first technical solution. According to the invention of the third aspect and the fourth aspect, since the movable body is formed by using the magnetic material and the sliding surface and the upper surface are magnetized to have opposite polarities, the magnetic flux can be generated in the normal direction of the sliding surface. Further, the magnetic flux density detecting means is disposed to face the sliding of the movable body. Therefore, if the non-magnetic container is tilted from the horizontal state, the magnetic flux density detecting means is also inclined substantially in conformity with the normal direction of the sliding surface portion of the movable body which has been slid to the magnetic flux density detecting means. Further, the hemispherical movable body has a higher magnetic flux density at the apex portion thereof, and the magnetic flux density is lower at a portion close to the upper peripheral edge. Therefore, it is possible to shift the magnetic flux density applied from the movable body to the magnetic flux density detecting means by shifting the portion of the sliding surface of the movable body opposite to the magnetic flux density detecting means in accordance with the inclination angle of the non-magnetic container. The change, and the magnetic flux density detecting means can surely detect the magnetic flux density which varies depending on the tilt angle. As a result, the magnetic flux density detecting means can output a detection signal corresponding to the tilt angle. According to the invention of claim 5, since the concave curved surface of the movable body accommodating space is formed by a hemispherical surface having a larger radius of curvature than the hemispherical surface of the movable body, the movable body can be at the apex portion of the hemispherical surface thereof. The concave curved surface slides on the concave curved surface. According to the invention of the sixth aspect of the invention, since at least one of the sliding surface of the movable body and the concave curved surface of the movable body accommodating space is smoothed, it is possible to reduce the concave surface of the movable body and the concave portion of the movable body accommodating space. The frictional resistance between the curved surfaces allows the movable body to slide smoothly on the concave curved surface 10 201139999. According to the invention of claim 7, the magnetic flux density debt measuring means is configured to have an anisotropy, that is, when the magnetic flux is inclined toward the γ-axis direction, compared with the detection signal when the magnetic flux is inclined toward the X-axis direction. The detection signal becomes a large output level. Further, the concave curved surface of the movable body accommodating space is formed by an azimuthal curved surface in which the displacement of the movable body in the Y-axis direction is larger than the X-axis direction. Therefore, when the non-magnetic container is inclined in the Y-axis direction at the same inclination angle as when tilting in the X-axis direction, the displacement amount of the movable body in the γ-axis direction can be increased, and the magnetic flux density detecting means can be increased. The position of the apex portion of the movable body changes. Here, since the magnetic flux is generated toward the normal direction of the sliding surface of the movable body, it is applied to the magnetic flux density detecting means when inclined toward the γ-axis direction as compared with when the non-magnetic container is inclined toward the X-axis direction. The change in magnetic flux density is large. In other words, the magnetic flux density applied from the movable body to the magnetic flux density detecting means can be reduced when tilting toward the x-axis direction as compared with the case where the tilt angle is inclined toward the x-axis direction, thereby reducing the detection signal. Output level. As a result, the detection signal of the magnetic flux density detecting means when the non-magnetic container is inclined toward the X-axis direction and the detection signal of the magnetic flux density detecting means when the non-magnetic container is inclined toward the γ-axis direction are opposite to the tilt angle The output levels are approximately equal. According to the invention of the eighth aspect, since the sliding surface formed by the convex curved surface facing downward is formed on the bottom side of the movable body, the thickness of the movable body gradually changes from the apex portion of the convex curved surface to the upper peripheral edge. 】The magnetic flux density detection method is set in a non-magnetic container, and is arranged by the sliding surface of the movable body and the magnetic flux density (four) measuring means by 201139999, so the apex portion of the movable body and the magnetic flux density detection The relative position of the means will vary depending on the angle of inclination of the non-magnetic bar. Therefore, the magnetic flux density applied to the magnetic flux density detecting means can be changed in accordance with the inclination angle of the non-magnetic container. Further, in the invention of the eighth aspect, the sensor can be miniaturized in the same manner as the invention of the second aspect, and the magnetic flux density detection of the tilt angle of the non-magnetic container can be improved. The linearity of the detection signal of the means. According to the ninth aspect of the invention, the sliding surface formed by the downward hemispherical surface is formed on the bottom side of the movable body, so that the movable body can be formed to approach the upper peripheral edge with the thickness dimension around the apex portion of the hemispherical surface. Gradually smaller hemispheres. Therefore, substantially the same operational effects as those of the eighth aspect of the invention can be obtained. [Embodiment] Hereinafter, a case where a magnetic flux detecting sensor according to an embodiment of the present invention is applied to a tilt sensor will be described in detail with reference to the drawings. 1 to 5 show the tilt sensor 1 of the first embodiment. The tilt sensor 1 is composed of the sleeve 2, the magnetoelectric conversion element 8, and the movable body 12 described below. The sleeve 2 is a non-magnetic container formed of a non-magnetic material such as an insulating resin material. The sleeve 2 is composed of a sleeve body 3 which is formed into a substantially cylindrical shape having a bottom, and a lid body 4 which is provided on the upper side of the opening portion of the sleeve body 3. 12 201139999 The height of the slanting direction of the official body 3 is several mm (the case D 0 . , ~ such as about 9 mm), and the cross-sectional shape on the horizontal surface becomes the outer diameter of several mm (for example, about 9 claws). It is roughly circular. Further, a concave portion 3A that is recessed into a substantially hemispherical shape is formed on the upper side of the sleeve main body 3, and a cylindrical outer fitting portion is integrally formed upward toward the opening edge of the concave portion 3A. 3B. 〇 ° The surface (exposed surface) of the recessed portion 3A is a concave curved surface 5 that opens upward. The concave curved surface 5 is formed, for example, by a hemispherical surface, and has a curvature radius rl which is larger than a curvature half of the sliding surface 13 of the movable body 12 described below. The lid body 4 is formed in a substantially disk shape, and a cylindrical inner fitting portion is formed on the outer peripheral edge thereof so as to be downwardly and downwardly. The cover body 4 is mounted on the sleeve body 3 by the cannula portion 3B outside the sleeve body 3 and inserted into the inner fitting portion 4, and the sleeve body 3 and the cover body 4 are A substantially hemispherical movable body accommodating space 6 is formed therebetween. Further, a substantially cylindrical stem portion 7 extending downward from the deepest portion 5A of the concave curved surface 5 is provided at a central portion of the lid body 4. Further, the lower end portion of the rod portion 7 is formed into a substantially hemispherical elongate straw by the provision of the rod portion 7, and the movable body 12 is prevented from being separated from the concave curved surface 5, and the movable body 12 is prevented from being moved up and down in the movable body housing 6 Reverse and reverse. The magnetoelectric conversion element 8 composed of the magnetoresistive element and the Hall element 4 constitutes a magnetic flux density detecting means, and the rim material output corresponds to, for example, the magnetic flux density (magnetic field) of the height direction of the sleeve 2 V〇ut. The magnetoelectric conversion element 8 is also disposed inside the casing body 3 which is located on the lower concave side of the concave curved surface 5 < dare ice β 5A. Further, the minute size is set to be, for example, about 丨 丨 丨 数 数 数 。 。 。 。 。 。 。 。 。 。 。 。 。 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁The position of the body η / lunar surface 13 is opposite. Then, for the magnetoelectric conversion element 8, the magnetic flux 0 from the movable body 12 is applied via the sliding surface 13 of the movable body 12. Thereby, the magnetoelectric conversion element 8 detects the cause The change in the magnetic flux density generated by the sliding of the movable body 12. Further, the grounding terminal 9 for electrically connecting the external magnetic ground is electrically connected to the magnetoelectric conversion element 8', and is electrically connected to a driving voltage terminal for supplying the driving voltage vdd. Further, the magnetoelectric conversion element 8 is electrically connected to a signal output terminal such as an output voltage v〇ut such as an output voltage, and then the ground terminal 9, the driving voltage terminal 1 and the signal output terminal are connected by For example, it is formed of a conductive metal material, and is embedded in the sleeve body 3, and a part thereof protrudes downward from the lower surface side of the sleeve body 3. The movable body 12 is formed using a magnetic material such as ferrite iron. a magnet (permanent magnet) formed in a substantially hemispherical shape. The bottom side of the movable body 12 is formed with a sliding surface 13 formed by a convex curved surface facing downward, and the upper side of the movable body 12 is formed to be a flat surface. By this, the thickness of the movable body 12 at the apex portion 12a of the sliding surface 13 which becomes the substantially hemispherical surface becomes maximum 'and becomes closer to the upper peripheral edge portion 12B of the upper surface 14 from the apex portion 丨2a along the sliding surface 13 Further, the thickness of the movable body 12 is, for example, such that the sliding surface 13 is the N pole and the upper surface 14 is the S pole. The magnetization is such that the sliding surface 13 and the upper surface 14 are opposite to each other. In the normal direction of the sliding surface 13, a large amount of magnetic flux is generated. 14 201139999 Furthermore, the magnetic flux density at the apex portion i2A where the thickness of the movable body 丨 2 is the largest becomes high, and the upper peripheral portion is thinned toward the thickness; When the coffee is close, the magnetic flux density is gradually lowered. The movable body 12 accommodates the sliding surface 13 downward in the casing dynamic body accommodating space 6 so that the sleeve 2 d becomes the concave curved surface 5 of the S 2 and is movable. The sliding surface η of the body i2 can contact and slide Therefore, when the casing is tilted in a flat state, the movable body 12 is slidably displaced along the inside of the movable body accommodating space 6 along the shape 7 of the curved surface 5. In addition, since the movable body 12 is formed in a hemispherical shape that protrudes downward, the upper surface 14 is stationary in a state of being horizontal according to its weight balance. Therefore, the positional relationship between the vertex portion 12A of the movable body 12 and the magnetoelectric conversion element 8 is "variation" with respect to the inclination angle of the sleeve 2, and the direction of the magnetic flux $ applied from the movable body to the magnetoelectric conversion element 8 also changes. The tilt sensor of the present embodiment has the above-described constituents', and the operation thereof will be described next. First, when the sleeve 2 is in a horizontal state, the movable body 12 is coupled to the normal position. The deepest portion 5a (four) of the concave curved surface 5. Specifically, in a state where the vertex portion 12A of the movable body 12 is in contact with the deepest portion 5a of the concave curved portion 5, the movable body 12 is supported by the concave curved surface 5. The apex portion UA of the movable body 12 having a high magnetic flux density is disposed at a position immediately above the magnetoelectric conversion element # 8. Therefore, the magnetoelectric conversion element 8' is applied along the height direction of the sleeve 2. In the vertical direction, the magnetic flux from the movable body 12 is large. Therefore, the magnetoelectric conversion element 8 outputs the maximum detection signal v〇ut corresponding to the magnetic flux density in the z-axis direction. 15 201139999 The situation in which the horizontal state is tilted to the inclined state 5 Normal position displacement, to the movable body

Next, the sleeve 2 is moved from the movable body 12 to the lowest position of the concave space 6 along the inclination angle 0 of the magnetic flux density 2 in the concave curved movable body 12. Therefore, the upper vertex portion 12A corresponds to the deepest portion 5A' of the sleeve-like curved surface 5 and the upper peripheral portion 12B having a lower magnetic flux density is closer to the deepest portion 5? Therefore, the magnetic force applied from the movable body 12 to the magnetoelectric conversion element 8 The pass density is reduced corresponding to the tilt angle β. The magnetoelectric conversion element 8 detects the magnetic flux density in a direction inclined by the inclination angle 0 with respect to the vertical direction, and outputs a detection signal Vcnit corresponding to the magnetic flux density. As a result, the magnetoelectric conversion element 8 outputs a detection signal V〇ut corresponding to the tilt angle $, and the detection signal v〇ut becomes smaller as the tilt angle 0 becomes larger. In the case where the sleeve 2 is returned to the horizontal state, the movable body 2 is displaced along the concave curved surface 5 toward the deepest portion 5A side, and the vertex portion 12A is returned to the normal position in contact with the deepest portion 5A. Thereby, the magnetic flux density applied to the magnetoelectric conversion element 8 is again increased, and the magnetoelectric conversion element 8 outputs the maximum detection signal V0ut corresponding to the magnetic flux density in the vertical direction. In the present embodiment, the movable body 2 is formed in a hemispherical shape having a hemispherical sliding surface 13, and the sliding surface 13 is slidably supported by the concave curved surface 5 which is a hemispherical surface. Therefore, the magnetic flux density applied to the magnetoelectric conversion element 8 can be changed corresponding to the inclination angle <9 of the sleeve 2, and the linearity of the detection signal v〇ut with respect to the inclination angle 0 can be improved. Further, in order to confirm the effect of the linearity, the comparison of the 16 201139999 tilt sensor 1 of the present embodiment and the tilt sensor 2 i of the comparative example shown in Fig. 6 was performed. For the tilt sensors 1, 21, the relationship between the tilt angle 0 and the magnetic flux density in the tilt angle 0 direction was measured, and the comparison result is shown in Fig. 7. In the same manner as the tilt sensor 第 of the first embodiment, the sleeve 22 of the tilt sensor 2A of the comparative example shown in the figure is configured as follows: the sleeve body 23 and the lid body 24 are formed. The pipe body 23 is provided with a movable body accommodating space 26 having a concave curved surface 25. Further, in the same manner as in Patent Document 2, the movable body 27 is formed by a thick disk-shaped (cylindrical) magnet, and the lower surface 27Α and the upper surface 27Β of the circular shape are magnetized to be opposite to each other. The case of the tilt sensor 21 is as shown by a broken line in Fig. 7, and the magnetic flux density is 2 倾斜 at an inclination angle of 0. To 30. The large difference between the magnetic flux density and the inclination angle θ becomes nonlinear. The reason for this is that since the movable body 27 is formed in a thick disk shape, the magnetic flux density applied to the magnetoelectric conversion 7L member 8 when the magnetoelectric conversion element 8 is located near the center portion of the lower surface 27Α and when the magnetoelectric conversion element 8 is located at the center portion of the lower surface Great changes. On the other hand, the case of the tilt sensor 1 is as shown by the solid line in Fig. 7 at the tilt angle 〇〇 to 50. In the range from the left to the right, the magnetic flux density similarly decreases as the inclination angle Θ increases, and the magnetic flux density becomes close to linear with respect to the inclination angle 0. The reason for this is that the magnetic flux density is high around the apex 12 of the apex of the movable body I] by forming the swaying body 12 into a hemispherical shape, and the thickness is relatively thin. Ρ /7 12Β close, the magnetic flux density gradually decreases. Further, in the present embodiment, as the inclination angle 0 of the sleeve 2 becomes larger, the position of the sliding surface 13 17 201139999 which is opposed to the magnetoelectric conversion element 8 is displaced from the apex portion > 12A toward the upper peripheral portion 1 2B. Therefore, in the range in which the sliding surface 13 of the movable body 12 and the magnetoelectric conversion element 8 are opposed to each other, the magnetic flux density can be changed corresponding to the inclination angle 0, and the linearity of the detection signal Vout relative to the magnetic flux density can be improved. degree. Further, in the present embodiment, since the apex portion 丨2 A of the movable body 12 is displaced relative to the magnetoelectric conversion element 8, the movable body accommodating space 6 of the ferrule 2 has a degree of rotational displacement of the movable body 12. The volume is sufficient. Therefore, the volume of the movable body accommodating space 6 can be made close to the volume of the movable body 12, and the tilt sensor can be miniaturized. Next, Fig. 8 to Fig. 1 show a second embodiment of the present invention. Further, the present embodiment is characterized in that a chamfered portion is provided on a peripheral portion of the upper surface of the movable body. The tilt sensor 41 is substantially the same as the tilt sensor 1 of the first embodiment, and is constituted by a sleeve 42, a magnetoelectric conversion element 48, and a movable body 52. The sleeve 42 is a non-magnetic container formed of a non-magnetic material such as an insulating resin material. The sleeve 42 is composed of a sleeve body 43 which is formed into a substantially cylindrical shape having a bottom, and a lid body 44 which is provided to cover the upper portion side of the opening portion of the sleeve body 43. The sleeve body 43 and the lid body 44 are formed in substantially the same manner as the sleeve body 3 and the lid body 4 of the first embodiment. The height of the sleeve body 43 in the vertical direction is about several mm, and the cross-sectional shape on the horizontal surface is a substantially circular shape of the outer diameter of several mm. Further, a concave portion 43a which is recessed into a substantially hemispherical shape is formed on the upper side of the sleeve body 43, and a fitting portion 43B which is formed in a cylindrical shape is integrally formed at the opening edge of the concave portion 43A. . The surface (exposed surface) of the concave portion 43A is a concave curved surface 45_ that opens upward. A bottom surface portion 45A which is a circular flat surface which is parallel to the small diameter of the horizontal surface is formed on the deepest side of the concave curved surface 45. Further, the substantially hemispherical surface of the recessed portion A and the outer periphery of the bottom surface portion 45A are connected by the bottom surface connecting portion MB of the side surface shape of the truncated cone which is reduced in the downward direction. As a result, the entire concave curved surface 45 is formed into a substantially hemispherical shape. The bottom surface portion 45A and the bottom surface connecting portion (4) are supported while the sliding surface 53 of the movable body 52 described below is in close contact with the point. Therefore, when the inclination angle Θ is small, the frictional resistance between the concave curved surface 45 and the movable body 52 can be reduced, so that the movable body 52 can be easily slid. Further, since the bottom surface portion 45a which is a flat surface is provided on the deepest side of the concave curved surface 45, when the sleeve 42 is returned to the horizontal state, the movable body 52 can be surely returned to the bottom surface portion 45 which is the normal position. A. The lid body 44 is formed in a substantially disk shape, and a cylindrical inner fitting portion 44A is integrally formed toward the lower side at the outer peripheral edge thereof. By fitting the fitting portion 43B other than the sleeve body 43 into the inner fitting portion 44, the lid body 44 is attached to the sleeve body 43, and a substantially formed between the sleeve body 43 and the lid body 44 is formed. A hemispherical movable body accommodating space 46. Further, in the central portion of the lid body 44, the rod portion 47 which is substantially the same as the rod portion "7 of the first embodiment" is placed. The magnetoelectric conversion element 48 constitutes a magnetic flux density detecting means for outputting a detection signal v?ut corresponding to a magnetic flux density such as the height direction of the sleeve 42. The magnetoelectric conversion element 48 is disposed on the bottom surface portion 45 A of the concave curved surface 45 and is disposed on the inside of the sleeve body 43 at a distance of several hundred / / m to several mm on the side of the 2011 39999 side, and is disposed in the movable body The position of the movable body 52 of the accommodating space 46 is the position of the sliding surface 53 of the sister. Further, a magnetic flux from the movable body 52 is applied to the magnetoelectric conversion element 经由 via the sliding surface 53. Thereby, the magnetoelectric conversion element detects a change in the magnetic flux density due to the sliding of the movable body 52. Further, the conversion element 48 is electrically connected to the ground terminal 49, the drive voltage terminal 5A, and the terminal 51 of the sleeve body 43 in the same manner as in the first embodiment. The movable body 52 is formed of a magnetic material and is formed into a substantially hemispherical magnet (permanent magnet). In the same manner as the movable body 12 of the first embodiment, the movable body 52 has a sliding surface 53' formed by a convex curved surface facing downward on the bottom side and a flat surface on the upper side.

54. Thereby, the movable body 52 is formed to have a maximum thickness at the apex portion 52A of the sliding surface 53 of the A τ % attacking substantially spherical surface, and

J is the same as the upper peripheral portion of the upper portion 54 from the vertex portion 52A, and the file 52B is close to the sin, and the thickness is gradually thinned. Further, the movable body 5 2 is magnetized in such a manner that the sliding surface is $3 fish. Thereby, the movable element W generates a magnetic flux, for example, toward the normal direction of the sliding surface 53. Further, ι is around the apex portion 52 最大 where the thickness of the movable body 52 is the largest, and the magnetic flux density is only between, and the magnetic flux density becomes lower as the upper peripheral portion 52 is thinner toward the thickness. The movable body 52 is placed in the movable body accommodating space 46 of the sleeve 42 with the sliding surface 53 facing downward and the lower dam κ 3 facing downward, so as to estimate the sliding of the concave curved surface 45 of the sleeve 42 and the movable body 52. Face 5 3 can move, ν touch and β 仃 move. Therefore, if the sleeve 2 is tilted from the horizontal state, the movable v-belt and the concave curved surface 45 are slidably displaced inside the movable body 20 201139999 accommodating space 46. Further, since the movable body 52 is formed in a hemispherical shape that protrudes downward, the flat surface 54 is stationary in a state of being horizontal according to its weight. Therefore, the distance between the apex portion 52A of the movable body 52 and the magnetoelectric conversion element μ varies depending on the inclination angle Θ of the sleeve 42, and the direction of the magnetic flux applied from the movable body 52 to the magnetoelectric conversion element 48 also changes. . Further, the upper peripheral portion 52B of the movable body 52 is subjected to R chamfering to form an arc shape, thereby forming the chamfered portion 55. Thereby, the concentration of the magnetic flux Lu in the upper peripheral portion 52B around the corner portion is alleviated. Further, a recess 56 which is recessed into a substantially circular shape on the center side of the upper surface 54 is formed on the movable body 52. By providing the recessed portion 56, the position of the center of gravity of the movable body 52 is moved to the eight sides of the apex portion 52, thereby improving the stability of the movable body 52. As described above, in the second embodiment, the same operational effects as those of the first embodiment can be obtained, and in particular, the outer peripheral portion 52B of the movable body 52 is provided with the chamfered portion 55'. The concentration of the magnetic flux 0 of the upper peripheral portion 52B of the movable body 52 is relaxed, thereby increasing the range of the linearity of the detection signal of the magnetoelectric conversion element 48 at the inclination angle Θ. Further, in order to confirm the effect of improving the linearity, the comparison of the tilt sensors 1 and 4 of the first and second embodiments was performed. For the tilt sensors 1, 41, the relationship between the tilt angle 0 and the magnetic flux density in the tilt angle 0 direction is measured, and the comparison result is shown in Fig. 11. The case of the tilt sensor 1 of the first embodiment is as shown by the line 21 201139999 in Fig. 11. The angle of inclination Θ is, for example, less than 50. Within the range, as the tilt angle Θ increases, the magnetic flux density decreases. In the case of the inclination angle θ, for example, more than 5CT, even if the inclination angle is increased, the magnetic flux density is not further lowered, and the magnetic flux density is increased. In the movable body 12 of the first embodiment, the upper peripheral edge portion 12 of the sliding surface 13 intersecting the upper surface of the upper surface 锐 has a large concentration of magnetic flux. Therefore, in the third embodiment, if the inclination is increased, since the magnetic flux density is higher than the upper peripheral portion 12A close to the magnetoelectric conversion element 8, the magnetic flux density detected by the magnetoelectric conversion element 8 is increased, as opposed to The range of the inclination angle Θ nonlinearity is narrowed. In contrast, in the tilt sensor 41 of the second embodiment, since the chamfered portion 55 is provided on the upper peripheral portion 52 of the movable body 52, the movable portion can be relaxed by the chamfered portion 55. The magnetic flux of the peripheral portion 52β of the upper portion of 52 is concentrated. The palpitations, as the apex portion 52 is turned toward the upper peripheral portion 52, can cause the magnetic flux density to gradually decrease. As a result, in the second embodiment, as shown by the solid line in FIG. 11, even when the inclination angle 0 exceeds 5 ,, the magnetic flux density can be continuously reduced as the inclination angle Θ increases. Thereby, the range of the detectable tilt angle 0 is further expanded. Next, Fig. 12 shows a third embodiment of the present invention. Further, the present embodiment is characterized in that the outer diameter of the movable body is set to a value close to the inner diameter of the concave curved surface. In the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and their description will be omitted. The tilt sensor 61 is composed of a sleeve 62, a magnetoelectric conversion element 8, and a movable body 68 in the same manner as the tilt sensor 1 of the first embodiment. The sleeve 62 is constituted by the sleeve main body 63 and the lid body 64 in substantially the same manner as the sleeve 2 of the first embodiment. A concave portion 63A recessed in a hemispherical shape is formed on the upper side of the sleeve body 63, and a concave curved surface 65 formed by a hemispherical surface having an inner diameter D1 opening is formed on the surface of the concave portion 63A. Further, a cylindrical outer fitting portion 63B is formed on the opening edge of the concave curved surface 65, and the outer fitting portion 63B is fitted into the inner fitting portion 64α θ of the lid body 64. Thereby, a movable body accommodating space 66 is formed between the cover body 63 and the lid body 64. Further, a rod portion 67 substantially the same as the rod portion 7 of the first embodiment is provided at a central portion of the lid body 64. Further, on the sleeve body 63, a magnetoelectric conversion element 8 is disposed on the lower side of the deepest portion 65A of the concave curved surface 65, and a ground terminal 9 electrically connected to the magnetoelectric conversion element 8 and a driving voltage terminal 1 are mounted. And signal output terminal 1 1. The movable body 68 is formed of a magnetic material and is formed into a substantially hemispherical magnet (permanent magnet). This movable body 68 is formed in substantially the same manner as the movable body 52 of the second embodiment. Therefore, U forms a tantalum/moon moving surface 69 on the bottom side of the movable body 08 by a convex curved surface facing downward, and forms an upper surface 70 which becomes a flat surface on the upper portion. Further, the movable body 08 is magnetized so that the sliding lunar surface 69 and the upper surface 70 have opposite polarities with each other. The magnetic flux density around the apex portion 68A where the dryness of the movable body 68 is thicker becomes higher, and the magnetic flux density gradually decreases as it approaches the thicker solid. The upper peripheral portion of the β movable body 68 is subjected to R chamfering to form an arc shape of 23 201139999, thereby forming a chamfered portion 7丨. v The mountain shank is recessed into a substantially circular shape W a # 72 on the center side of the upper surface 70 of the movable body 68. Further, the outer diameter dimension D2 of the movable member 68 is set to 70 to 95 °/ of the inner diameter dimension D1 of 7n Λ 〇1 as a value close to the inner diameter of the movable surface 65. The value of the degree. Further, the movable body 68 is housed in the movable body accommodating space 66 of the sleeve 62 in a state where the sliding surface 69 is downward in the state of the thin a τ + . Thus, in the third embodiment, the same effect as that of the second embodiment can be obtained from the φ female (9) U, and in particular, the outer diameter of the movable body 68 can be set to be close to the concave curved surface 65. The inner diameter of the inner diameter + ni A# The size of the door L dimension D1, as shown in Fig. 13, can increase the amount of change in the magnetic flux density applied to the magnetoelectric group of the tilting angle Θ . Therefore, the output range of the detection signal Vout of the magnetic uranium-draft conversion element 8 can be expanded, thereby improving the detection sensitivity of the tilt angle 0. Further, since the outer diameter dimension D2 of the movable body 68 is set to be close to the inner diameter dimension D1 of the concave curved surface 65, the tilt sensor 61 can be made entirely by reducing the outer diameter dimension D2 of the movable body. In the third embodiment, the movable body 68 similar to the movable body 52 of the second embodiment is used. However, the same configuration as the movable body 12 of the first embodiment may be used. In the third embodiment, the concave curved surface 65 having the same shape as the concave curved surface 5 of the second embodiment is used. However, the second embodiment may be used. A configuration of a concave curved surface having the same shape of the concave curved surface 45. Next, Fig. 14 shows a fourth embodiment of the present invention. Further, the present embodiment is characterized in that a coating film as a smoothing process is formed on a concave curved surface. In the present embodiment, the same components as those in the second embodiment are denoted by the same reference numerals, and the description thereof will be omitted. The tilt sensor 8 1 and the tilt sensor 41 of the second embodiment.致 In the same way, by the casing 42, The magnetoelectric conversion element 48 and the movable body 52 are formed. However, on the surface of the concave curved surface 45, a thin coating film 82 is formed by a fluororesin or a sleek resin as a smoothing treatment. The coating film 82 includes, for example, lubrication. The surface of the smooth surface is reduced in contact with the contact resistance of the movable body 52. Thus, in the fourth embodiment, the same operational effects as those of the first and second embodiments can be obtained, and in particular, smoothing is performed. Since the coating film 82 is formed on the concave curved surface 45, the frictional resistance between the concave curved surface 45 and the movable body 52 can be reduced. Therefore, the responsiveness of the movable body 52 can be improved with respect to the change of the inclination angle 0, and In addition, in the fourth embodiment, the case of being applied to the second embodiment will be described as an example, but it can also be applied to the third embodiment. In the embodiment, the coating film 82 is formed on the surface of the concave curved surface 45. However, the coating film 82 may be formed on the sliding surface 53 of the movable body 52, or both the concave curved surface 45 and the sliding surface 53 may be formed. A coating film 82 is formed thereon. In the fourth embodiment, the resin coating film 8 2 is used as the flat β treatment. However, it is also possible to form a metal thin film by plating or the like, and it is also possible to reduce the unevenness of the surface as in the surface grinding treatment. Various surfaces are processed. Fig. 15 to Fig. 21 show a fifth embodiment of the present invention. Further, the present embodiment is characterized in that it is used in a horizontally orthogonal range, 25 201139999 Y-axis and Z-axis. In the case where the detection of the γ-axis direction of the direction is larger than the X-axis direction of the horizontal direction, the magnetoelectric conversion element having a larger anisotropy can obtain substantially the same detection output regardless of which direction is tilted, and the movable body orientation is used. The anisotropic curved surface whose displacement in the γ-axis direction is larger than the X-axis direction forms a concave curved surface of the movable body accommodating space. Similarly to the tilt sensor 41 of the second embodiment, the tilt sensor 91 is composed of a sleeve 92, a magnetoelectric conversion element 98, and a movable body 1〇2. The sleeve 92 is a non-magnetic container formed of a non-magnetic material such as an insulating resin material. The sleeve 92 is composed of a sleeve body 93 which is formed into a substantially cylindrical shape having a bottom, and a lid body 94 which is covered on the upper side of the opening portion which is the sleeve body %. The surface W / w double mm and the stone, and the cross-sectional shape of the j" is a substantially circular shape of the outer diameter of several mm. In addition, the upper body side is formed to be recessed into a substantially semi-elliptical shape. Similarly, on the opening side of the concave portion 93A, the fitting portion 93B is formed in a cylindrical shape toward the lower side. The surface (exposed surface) of the concave portion 93A is a concave curved surface 95 that opens upward. The concave curved surface 95 is formed by the cross-sectional shape in the x-axis direction and the Y-axis direction in the horizontal direction among the X-axis and the Y-axis orthogonal to each other, Λ 、 /, body Lü, concave curved surface 95 The 乂 axis becomes a short axis and the Υ axis direction is formed. The ellipsoidal surface of the semi-cut shape of the long axis of the horse is formed into a concave curved surface by an anisotropic curved surface. The shape of the sleeve 92 is independent of the horizontal plane (χγ plane). The conversion element 98 obtains the same output level detection signal Vout. The lid body 94 is formed in a substantially disk shape, and a cylindrical inner fitting portion 94A is integrally formed toward the lower side at the outer peripheral edge thereof. The fitting body 93B is fitted into the inner fitting portion 94a by fitting the fitting portion 93B, and the lid body 94 is attached to the sleeve body 93 to form a substantially half between the sleeve body 93 and the lid body 94. The ellipsoid movable body accommodating space 96. Further, a rod portion 97 substantially the same as the rod portion 7 of the first embodiment is provided at a central portion of the lid body 94 so as to extend downward toward the deepest portion 95A of the concave curved surface 95. Next, a case where a magnetoresistive element using a magnetic thin film is used as the magnetoelectric conversion element 98 serving as a magnetic flux density detecting means will be described. Further, in order to achieve miniaturization, the magnetoelectric conversion element 98 is an AMR-IC (Anisotropic Magneto Resistance Integrated Circuit) formed by integrating a magnetoresistive sensor 98A composed of a magnetic thin film magnetoresistive element and a differential amplifier 98B. , anisotropic magnetoresistive circuit). The magnetoresistive sensor 98A is composed of four magnetoresistive elements R1 to R4. The magnetoresistive elements R? to R4 are formed by means of vapor deposition of a magnetoresistive material such as indium antimonide (InSb) on the sensor substrate s. The magnetoresistive elements R1 to R4 are formed by connecting a plurality of extension patterns in a meandering shape. The magnetoresistive element R1 having the extending pattern on the upper and lower sides of the sensor substrate S is disposed on the upper left side of the sensor substrate S, and the magnetoresistive element R4 is disposed on the lower right side of the sensor substrate s. The magnetoresistive element R2 having the extension pattern aligned in the left-right direction of the sensor substrate S is disposed on the lower left side of the sensor substrate S, and the magnetoresistive element R3 is disposed on the upper right side of the 27201139999 sensor substrate s. The magnetoresistive elements R1 to R4 are bridge-connected, and the input terminals of the differential amplifier 98B are connected to the connection point between the connection point of the magnetoresistive element RhR2 and the magnetoresistive element R3' R4, respectively. The connection point between the magnetoresistive elements R2 and R4 is electrically connected to the ground terminal 99 for connection to the external ground GND. Further, the connection point between the magnetic resistance elements R1, R3 is electrically connected to supply the driving voltage terminal 1? of the driving voltage Vdd. Further, the output terminal of the differential amplifier 98B is electrically connected to a signal output terminal 1?1 of a detection signal V?ut such as an output voltage. The differential amplifier 98b differentially amplifies the potential generated between the two connection points, and outputs a detection signal Vout. Further, the sensor substrate S is configured in such a manner as to connect the magnetoresistive elements R1 and R2. The directions of (R3 and R4) coincide with the vertical direction (z-axis direction), and the directions of the magnetoresistive elements R1 and R3 (rM R4) are connected to the horizontal direction (x-axis direction). The magnetoresistive elements R1 and R4 have resistance values that vary in accordance with changes in the magnetic flux density in the horizontal direction (X-axis direction). The resistance values of the magnetoresistive elements R2 and R3' vary in accordance with changes in the magnetic flux density in the recording direction (z-axis direction). When the magnetic flux density parallel to the pupil plane is applied to the sensor substrate s, the resistance values of 4 = magnetoresistive elements #R1 to R4 change. Therefore, when the sleeve 92 is inclined toward the X-axis direction, the detection signal v〇ut changes within a range of positive and negative of the driving voltage Vdd (-VddSVoutSVdd), for example. When the magnetic flux density parallel to the χγ plane is applied to the sensor substrate S, the resistance values of the two magnetoresistive elements R2 and R3 will change, but the remaining 28 201139999 two magnetoresistive elements R1 and R4 The resistance value is almost unchanged. Therefore, when the sleeve 92 is tilted toward the Y-axis direction, the detection signal V〇ut changes within a range from the ground potential to the driving voltage Vdd (0$Vout guest Vdd). As a result, the magnetoresistive sensor 98A has a larger detection output than the detection signal Vout when the magnetic flux is inclined toward the X-axis direction, and the magnetic flux is directed toward the γ-axis. The anomalous ecstasy of the level. The magnetoelectric conversion element 98 is disposed inside the sleeve body 93 which is located on the lower side of the most tear portion 95A of the concave curved surface 95 by several hundred μm to several mm. In other words, the magnetoelectric conversion element 98 is disposed at a position facing the sliding surface 1〇3 of the movable body 102 housed in the movable body housing space 96. The movable body 102 is formed of a magnetic material and is formed into a substantially hemispherical magnet (permanent magnet). Similarly to the movable body 52 of the second embodiment, the bottom side of the movable body 102 is formed with a sliding surface 103 formed of a convex curved surface facing downward, and the upper side is formed with an upper surface 104 which is a flat surface. Thereby, the movable body 102 has a maximum thickness at the vertex portion 102A of the sliding surface which is a substantially hemispherical surface, and becomes thinner as it approaches the upper peripheral portion 1〇2B of the upper surface 104 from the apex portion. Further, the movable body 102 is magnetized so that the sliding direction is the opposite polarity from the upper surface 1〇4. Thereby, the magnetic yoke is generated toward the normal direction of the sliding surface of the movable body 1〇2. Further, the magnetic flux squeaks around the maximum apex portion 102 of the movable body 1 〇 2 and becomes 0, and the magnetic flux density becomes lower as the thickness becomes thinner and the peripheral portion 102B approaches. The movable body 102 is housed in the movable body accommodating space 96 of the sleeve 92 29 201139999 so that the sliding surface 1 〇 3 朝向 is facing downward, so that the concave curved surface 95 of the sleeve 92 and the movable body H) 2 are slid. Face 103 is capable of contacting and sliding movement. Therefore, if the sleeve 92 is inclined from the horizontal state, the movable jaw 2 is slidably displaced inside the movable body accommodating space 96 along the concave curved surface %. The upper peripheral portion "1" and 2B of the movable body 102 is formed into an arc shape by performing R chamfering to form the chamfered portion 1〇5. Further, the movable body 1〇2 is formed on the center side of the upper surface 104 and recessed into a substantially circular recessed portion 丄〇6. In the fifth embodiment, the detection signal vout when the tilt sensor is tilted toward the X-axis direction and tilted toward the γ-axis direction is used as a larger output level. Different types of magnetoelectric conversion components 98. On the other hand, the curved surface 95 of the movable body accommodating space % is formed by making the displacement of the movable body 1 〇 2 toward the ¥ axis direction larger than the ellipsoidal surface in the axial direction. Therefore, when the casing Μ is inclined in the X-axis direction, the displacement amount of the movable cymbal 102 with respect to the slanting angle 0 can be increased, and the magnetoelectric conversion element 9 can be made movable and movable. The positional change of the apex portion 102A of the body 102 is increased. Therefore, the change in the magnetic flux density applied to the magnetoelectric conversion element 98 when tilted toward the γ-axis direction is larger than the case where the sleeve 92 is tilted toward the y-axis direction: ::: is large: that is, the same as When the inclination angle θ is inclined toward the x-axis direction, the electric flux can be reduced in the direction of the γ-axis direction, and the magnetic flux density applied from the movable body 102 to the magnetic transducer 98 can be reduced, so that the detection level of the detection signal 〇Ut can be suppressed. As a result, the detection signal Vout of the magnetoelectric conversion 70 member 98 which is inclined by the sleeve 92 toward the X-axis direction and the detection signal v〇ut of the magnetoelectric conversion element 98 when the sleeve 92 is inclined toward the Y direction are inclined 30 201139999 The output levels of angle 0 are approximately equal. Further, in the fifth embodiment, the same operational effects as those of the first and second embodiments can be obtained. Fig. 22 to Fig. 24 show a sixth embodiment of the present invention

Further, the present embodiment is characterized in that the movable body accommodating space is formed by an ellipsoidal surface having a half-cut shape in which the X-axis direction is a short axis and a half-cut shape in the Y-axis direction, and an anisotropic curved surface combined with a hemispherical surface. Concave curved surface. Further, the ellipsoidal surface of the half-cut shape is combined with the hemispherical surface in a state where the central portion of the ellipsoidal surface is in contact with each other. In the present embodiment, the same components as those in the fifth embodiment are denoted by the same reference numerals and will not be described. The tilt sensing gain 111 is similar to the tilt sensor 91 of the fifth embodiment, and is composed of the sleeve 112, the magnetoelectric conversion element 98, and the movable body 1〇2. The sleeve s 112 is a non-magnetic container formed of a non-magnetic material such as an insulating resin material. The battalion n 9 and the station 丄Π 2 are formed by forming a substantially cylindrical casing body 113 having a bottom, a pair of helmets, or an upper portion of the opening of the casing body 113. The cover body 114 of the cover is constructed. The width of the vertical side of the sleeve body 113 is about several mm, and the cross-sectional shape on the horizontal surface is several mm outside! The size is roughly circular. Further, a concave portion 113A having a substantially semi-ellipsoidal shape is formed on the upper side of the sleeve body 113, and a cylindrical outer fitting portion 1 13B is integrally formed at the opening edge of the concave portion 113a aL ^ A. The concave shape toward the upper opening is different in cross-sectional shape in the γ-axis direction. The surface (exposed surface) of the concave portion 113A is curved and formed by an anisotropic curved surface of the X-axis direction and 31 201139999. Specifically, the concave curved surface 115 is an elliptical surface 11 5A having a half-cut shape in which the 轴-axis direction is the minor axis and the γ-axis direction is the long axis, and a length dimension smaller than the longitudinal direction of the ellipsoidal surface n5A and larger than the short direction. An anisotropic curved surface in which the hemispherical surface 115B of the diameter dimension D2b of the length dimension is combined is formed. At this time, the deepest portion of the ellipsoidal surface 115A and the deepest portion of the hemispherical surface 11 5 B are arranged so as to conform to the deepest portion 115C of the concave curved surface 丨丨5 formed. As a result, the ellipsoidal surface U5A and the hemispherical surface 115B are in contact with the deepest portion n5C of the concave curved surface 115 formed, and the concave portion 1 13A is formed to be plane-symmetrical with respect to the pupil plane and the γ-plane. Further, the major axis dimension D2a of the ellipsoidal surface 115A and the diameter dimension D2b of the hemispherical surface 115B are selected such that the sleeve 11 2 can be self-receiving regardless of which direction the XY plane is inclined. The magnetoelectric conversion element 98 on the lower side of the deepest portion 115C of the curved surface 11 5 obtains the detection signal vout of the same output level. The lid body 114 is formed in a substantially disk shape, and is formed in a cylindrical shape in a downwardly-body-like manner on the outer peripheral edge thereof. By fitting the fitting portion 113 of the sleeve body 113 into the inner fitting portion 114, the cover body 114 is formed on the sleeve body U3, and the sleeve body (1) and the lid body 114 are formed. The movable body accommodating space 116 is a combination of a half-cut shape and a substantially hemisphere. Further, a rod portion 117 which is substantially the same as the rod portion 7 of the first embodiment is provided at a central portion of the lid body 114. In the sixth embodiment, since the concave curved surface (1) is formed by combining an anisotropic curved surface in which the sugar circular surface 115A and the hemispherical surface U5B are combined, it is formed by an elliptical surface only by a half-cut shape. In this case, it is possible to reduce the contact area of the movable body 102 and the concave curved surface 325 by 32 201139999, thereby reducing the frictional resistance. Therefore, the responsiveness to the movable body 102 with the inclination angle of 0 can be improved, thereby improving the detection accuracy of the inclination angle 0. Further, in the sixth embodiment, the same effects as those of the first, second, and fifth embodiments can be obtained. In the fifth and sixth embodiments, the movable body 2 having the chamfered portion 105 is used. However, similarly to the movable body 1 2 of the i-th embodiment, the same can be used. By using the configuration of the movable body in which the corner portion is omitted, the concave curved surfaces 95 and 115 of the fifth and sixth embodiments can be smoothed in the same manner as in the fourth embodiment, and the movable body 102 can be slid. Smoothing is performed on face 1 〇3. Further, in the fifth and sixth embodiments, the bottom surface portion which is a flat surface may be formed in the deepest portion of the concave curved surface in the same manner as the concave curved surface of the second embodiment. Further, in the second to sixth embodiments, the upper peripheral peripheral portions 52B, 68B, and 102B of the movable bodies 52, 68, and 102 are provided with the chamfered portions 55, 71, and 1 〇 5 having a circular arc shape. . However, the present invention is not limited to, for example, a configuration in which the tilt sensor 1 21 of the first modification shown in Fig. 25 is applied to the upper peripheral portion i 22B of the movable body i 22 . The corner and the rectilinear portion j 2 5 are also arranged in a straight line. In this case, the movable body 1 22 has a sliding surface ^ which protrudes to the lower side from the vertex portion 1 22 a and a flat surface 124 of the flat surface. Further, the chamfered portion 125 of the movable body 122 is formed so as to be close to the upper side of the movable body 22 and inclined toward the inner side from the radially outer side of the movable body 122, but may be formed parallel to the movable body (2), for example. 33 201139999 The circumferential surface in the height direction. In the above-described first to sixth embodiments, the movable bodies 12, 52' 68, and (10) are configured to have a thickness dimension close to the radius of curvature of the sliding surface 构成 and the '69 two 103 formed by the hemispherical surface. The present invention is not limited thereto. For example, the tilting (four) measuring 131' of the second modification shown in Fig. 于 can be obtained within a range in which the distribution of the required magnetic flux density can be obtained. The movable jaw 132 has a thickness dimension smaller than a curvature half of the sliding surface (3) formed by the hemispherical surface (for example, about one-half of the radius of curvature). In the case of the It shape, the movable body i 32 has a sliding portion in which the vertex portion t32a protrudes downward. The surface 133 and the upper surface 134 of the flat surface are adjacent to the upper peripheral portion 132B, and the thickness thereof gradually becomes smaller. Further, the configuration may be as follows. The movable body has a thickness larger than the radius of curvature of the sliding surface. Further, in the second to sixth embodiments, the movable body 52, 68, and 102 are provided on the upper surface 54, 7〇, 1〇4. The central portion is recessed into a cylindrical recess The present invention is not limited to this. For example, the present invention may be configured such that the tilt sensor 141 of the third modification shown in Fig. 27 is provided on the movable body 142. The central portion of the upper surface 144 is recessed into a bowl-shaped recess i 45. In this case, the movable body 142 preferably has a sliding surface 143 composed of a hemispherical surface, and is closer to the upper peripheral portion 142B from the apex portion 142A. Further, in the above embodiments, the movable bodies 12, 52, and 68 are formed of magnets. However, the present invention is not limited thereto, and may be 34 201139999. In the same manner as the tilt sensor of the fourth modification shown in Fig. 24, a magnet 155 which is a source of a large amount of magnetic flux is provided on the sleeve 2, in addition to the movable body 152. In this case, the movable body 152 is formed of a magnetic material 'but does not need to be magnetized. Further, the movable body 152 has a sliding surface 153 composed of a hemispherical surface and a flat upper surface 154, and with the outer peripheral edge from the apex portion 152a Part i 52B is close, and its thickness gradually becomes smaller Further, the magnet 155 is disposed on the cover 4 of the sleeve 2, and is provided with a magnetic flux density applied to the magnetoelectric conversion element 8 via the sliding surface 153 of the movable body 152, and is disposed, for example, via the movable body 152. The magnetoelectric conversion element 8 is located at the opposite side. In the above embodiments, the movable bodies 12, 52, 68, and 1 are formed by using a magnetic material as a whole. However, the present invention In addition, for example, it may be configured such that the movable system is formed of a non-magnetic resin material and formed into a hemispherical shape in a state in which the magnetic material is embedded. Further, in each of the above embodiments, the magnetic flux detecting sensor is applied to the tilt sensors 1, 41, 61, 8 1 of the tilt angle 0 of the detecting sleeves 2, 42, 62, 92, 112. The case of 91, 111 is exemplified as an example. However, for example, when the bushing is inclined at a desired tilt angle, it can also be applied to a tilt switch that switches the switch on and off. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is an exploded perspective view showing a tilt sensor according to a third embodiment of the present invention. Fig. 2 is a cross-sectional view of the tilt sensor taken from the direction of the arrow π_π in Fig. 3; Fig. 3 is a plan view showing the tilt sensor of Fig. 1 in a state in which the cover is omitted. Fig. 4 is an explanatory view showing a positional relationship between a movable body and a magnetoelectric conversion element when the tilt sensor of the first embodiment is in a horizontal state. Fig. 5 is an explanatory view showing a positional relationship between a movable body and a magnetoelectric conversion element when the tilt sensor of the first embodiment is in an inclined state. Fig. 6 is an explanatory view similar to Fig. 4 showing a tilt sensor of a comparative example. Fig. 7 is a characteristic line diagram showing the relationship between the tilt angle and the magnetic flux density corresponding to the detection signal in the first embodiment and the comparative example. Fig. 8 is an exploded perspective view showing the tilt sensor of the second embodiment. Figure 9 is a cross-sectional view of the tilt sensor as seen from the direction of the arrow ιχ_ιχ in Figure 1〇. Fig. 10 is a plan view showing the tilt sensor of Fig. 8 in a state where the cover is omitted. Fig. 11 is a characteristic line diagram showing the relationship between the tilt angle and the magnetic flux density corresponding to the detection signal in the first and second embodiments. Fig. 1 is a cross-sectional view showing the same position as that of Fig. 2 of the tilt sensor of the third embodiment. Fig. 13 is a characteristic line diagram showing the relationship between the tilt angle and the magnetic flux density corresponding to the detection signal in the second and third embodiments. Fig. 14 is a cross-sectional view showing the same position as that of Fig. 9 of the tilt sensor of the fourth embodiment. 36 201139999 Fig. 1 is an exploded perspective view showing the tilt sensor of the fifth embodiment. Figure 16 is a cross-sectional view of the tilt sensor as seen from the direction of arrows XVI-XVI in Figure 18. Figure 17 is a cross-sectional view of the tilt sensor as seen from the direction of arrows XVII-XVII in Figure 16 . Fig. 18 is a plan view showing the tilt sensor of Fig. 15 in a state in which the cover is omitted. Fig. 19 is an explanatory view showing the positional relationship between the movable body and the magnetoelectric conversion element in Fig. 15; Figure 20 is a front view showing a magnetoresistive sensor of a magnetoelectric conversion element. Figure 21 is an equivalent circuit diagram showing a magnetoelectric conversion element. Fig. 22 is a cross-sectional view showing the same position of the tilt sensor of the sixth embodiment as Fig. 16; Fig. 23 is a cross-sectional view showing the inclination feeling from the direction of the arrow ΧΧΙΙΙ-ΧΧΙΠ in Fig. 22. Fig. 24 is a plan view showing the tilt sensor of Fig. 22 in a state in which the cover is omitted. Fig. 25 is a cross-sectional view showing the same position as that of Fig. 2 of the tilt sensor of the first modification. Fig. 26 is a cross-sectional view showing the same position as that of Fig. 2 of the tilt sensor of the second modification. Fig. 27 is a cross-sectional view showing the same position as that of Fig. 2 of the tilt sensor of the third modification. 37 201139999 Fig. 28 is a cross-sectional view showing the same position as that of Fig. 2 of the tilt sensor of the fourth modification. [Description of main component symbols] 1, 41, 61, 81, 91, 111, 121, 131, 141, 151 Tilt sensor (magnetic flux 4 sensor) 2, 42, 62, 92, 1 12, 2, casing (non-magnetic container) 5, 45, 65, 95, 1 15 concave curved surface 6, 46, 66, 96, 1 16 movable body accommodating space 8, 48, 98 magnetoelectric conversion element (flux density detection means)

12, 52, 68, 102, 122, 132, 142, 152 movable bodies 12A, 52A, 68A, 102A, 122A, 132A, 142A, 152A

Vertex portions 12B, 52B, 68B, 102B, 122B, 132B, 142B, 152B upper peripheral portion 13, 53, 53, 103, 123, 133' 143, 153 sliding surface 14, '54, '70, 104, 124, 134, 144, 154 above 55, • 71, 105, 125 to the corner 82 coating film 38

Claims (1)

201139999 VII. Patent application scope: 1. A magnetic flux detecting sensor having a movable body formed on a bottom side with a sliding surface formed by a convex curved surface facing downward, and having a sliding surface supporting the movable body a non-magnetic container that slidably moves toward a movable surface of a concave curved surface, and a magnetic flux density detecting means for detecting a change in magnetic flux density caused by sliding of the movable body in the non-magnetic container The sliding surface of the movable body is disposed opposite to the magnetic flux density detecting means, and the magnetic flux is applied to the magnetic flux density detecting means via the sliding, and the upper surface of the movable body is disposed to relax the upper surface a corner portion of the concentrated magnetic flux density, when the non-magnetic container is inclined from a horizontal state, the movable body is displaced from a normal position along a concave curved surface of the non-magnetic container, and when the non-magnetic container returns to a horizontal state, the movable portion is movable The body returns to the normal position along the concave curved surface of the non-magnetic container. 2. A magnetic flux detecting sensor having a hemispherical movable body having a sliding surface formed by a hemispherical surface facing downward on a bottom side, and having a moving surface supported by the (7) moving surface of the movable body a non-magnetic container for the movable body of the concave curved surface, and a magnetic flux density detecting means for detecting a change in the magnetic flux density generated by the sliding of the movable body, and the magnetic flux density detecting means : arranging the sliding surface of the movable body opposite to the magnetic flux density detecting means, applying a magnetic flux to the magnetic flux density detecting means via the sliding, and disposing the upper peripheral edge on the upper periphery of the movable body Magnetic flux 39 201139999 The corner portion of the density concentration, when the non-magnetic container is inclined from the horizontal state, the movable body is displaced from the normal position along the concave curved surface of the non-magnetic container, and when the non-magnetic container returns to the horizontal state, the movable The body returns to the normal position along the concave curved surface of the non-magnetic container. . 3. The magnetic flux detecting sensor according to claim </RTI> wherein the movable system is formed using a magnetic material and configured to be magnetized in a state in which the sliding surface and the upper surface are opposite to each other. The magnetic flux detecting sensor according to claim 2, wherein the movable system is formed using a magnetic material and is configured to be magnetized in a state in which the sliding surface and the upper surface are opposite to each other. 5: The magnetic flux sampling sensor of claim 2, wherein the concave surface of the moving body receiving space has a spherical surface larger than the radius of curvature of the movable 'moon moving surface> form. The magnetic flux sensing sensing curve of any of the first to fifth aspects of the invention is smoothed by at least one of a sliding surface of the movable body and a concave curved surface of the movable body receiving space. deal with. 7. If the bar s of the patent scopes 1 to 6 is used, the flux detection of any of the items in the M ^ term has an anisotropy of the L-degree detection means, that is, the X-axis orthogonal to the horizontal plane. When the direction and the γ-axis are tilted, 1 th . , when the magnetic flux is tilted toward the γ-axis direction toward the X-axis direction, J π is a large output level; 1~ you: the movable body is accommodated The concave curved surface which is different from the X-axis side for compensating the magnetic flux density detecting means is formed by the anisotropic curved surface which shifts the movable body to γ 40 201139999 to a larger displacement. 8. A magnetic flux detecting sensor having a movable body formed with a sliding surface formed by a convex curved surface facing downward on a bottom side, and having a concave surface facing the sliding surface of the movable body so as to be slidable upward a non-magnetic container of a movable body accommodating space of a curved surface, and a magnetic flux density detecting means provided in the non-magnetic container for detecting a change in magnetic flux density caused by sliding of the movable body, characterized in that: The sliding surface of the body is disposed opposite to the magnetic flux density detecting means. When the non-magnetic container is inclined from the horizontal state, the moving body is displaced from the normal position along the concave curved surface of the non-magnetic container, and the non-magnetic grain is restored to the horizontal level. In the state, the movable body returns to the normal position along the concave curved surface of the non-magnetic container. _ . . , · = ... 半 负 负 负 负 负 负 负 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半a non-magnetic container, and a magnetic flux density detecting means provided on the non-magnetic container for measuring a change in magnetic flux density generated by the movable stagnation, which is characterized by: The sliding surface of the movable body and the magnetic flux density detecting means are aligned with the movable body along the non-movable body, and the non-magnetic container is recessed from the normal position of the magnetic container from the horizontal state. The magnetic container returns to a horizontal odor 41 201139999 The concave surface of the magnetic container returns to the normal position. Eight, the pattern: (such as the next page) 42