JP4327570B2 - Magnetic sensor unit - Google Patents

Description

The present invention relates to a magnetic sensor unit constituted by the magnet and the magnetic sensor, and more particularly, a rotatably axially supported by the magnet, the movement, the magnetic field generator as an object to be tilted or rotated by detecting the rotation of the suction force or repulsive force resulting Ru magnets acting between the movement of the magnetic field generator as an object, a magnetic sensor unit so as to detect a tilt or rotation.

  2. Description of the Related Art Conventionally, a configuration of a magnetic detection type pointing device is known as a position sensor using a magnet and a magnetic sensor (see, for example, Patent Document 1). Further, as a method for detecting rotation, a method of detecting rotation by attaching a magnet to a rotating body and detecting a change in magnetic flux density generated from the magnet is widely adopted (for example, see Patent Document 2). .

International Publication No. 02/86694 pamphlet JP 2003-214896 A

  However, the configuration described in Patent Document 1 requires a plurality of magnetic sensors to detect the position or inclination of the magnet, and basically the position of the magnet can be detected only by the distance between the magnetic sensors. Absent. In other words, if the distance between the magnetic sensors is 2 mm, the position of the magnet cannot be detected unless it is within the range of 2 mm.

  Also, just because the distance between the magnetic sensors is increased to 10 mm, the detection range does not simply extend to 10 mm. In order to extend the detection distance, it is necessary to increase the size of the magnet and also increase the distance between the magnet and the magnetic sensor. That is, in order to detect a long stroke distance, there is a problem that the size of the position sensor becomes very large as a result. In addition, in order to perform measurement with high accuracy using an inexpensive magnetic sensor, a magnetic flux density of several mT or more is required, and it is impossible to detect with high accuracy at a magnetic flux density equivalent to geomagnetism.

  Further, in the method of attaching a magnet to the rotating shaft of a rotating body and detecting the magnetic flux density as in the configuration described in Patent Document 2, it is naturally necessary to arrange a magnetic sensor in the vicinity of the rotating magnet. Specifically, unless the distance between the magnet and the sensor is within a few millimeters, the magnetic flux density cannot often be detected (to ensure a magnetic flux density of several mT or more as in the problem described above). Since it is near the rotation axis, there are problems in that it is very difficult to secure the location of arrangement of the magnetic sensor due to severe restrictions on location.

  The present invention has been made in view of such problems. The object of the present invention is to accurately detect the magnetic flux density at the geomagnetic level using a single magnetic sensor and to have a wide detection range. Another object of the present invention is to provide a magnetic sensor unit that detects the position or inclination of a magnet, and a magnetic sensor unit that can detect the magnetic flux density at the geomagnetic level with high accuracy and detects the rotation of the magnet without any restrictions on the location of the magnet.

The present invention has been made to achieve such an object. The invention according to claim 1 is directed to a bearing unit for relatively detecting movement or inclination of a magnetic field generator as an object. is supported, is mounted a Vickers hardness on the rotary shaft to Hv450～Hv650, rotatably provided, detection and magnetized magnets in a cylindrical shape in the circumferential direction, the magnetic flux density generated from the magnet and a magnetic sensor for, by causing relative movement or inclined with respect to the object before Ki磁 stone, before Ki磁 stone is rotated, the change in magnetic flux density due to the rotation of the magnet The movement or inclination of the object is detected by detecting with the magnetic sensor.

The invention according to claim 2 is a rotating shaft that is pivotally supported by a bearing unit and has a Vickers hardness of Hv450 to Hv650 in order to relatively detect the movement, inclination, or rotation of the magnetic field generator that is the object. A magnet provided rotatably on a pendulum body attached to the rotating shaft, and a magnetic sensor for detecting a magnetic flux density generated from the magnet. By moving, tilting or rotating relative to the magnet, the magnet rotates, and the magnetic sensor detects a change in magnetic flux density accompanying the rotation of the magnet. It is characterized by detecting tilt or rotation .

Further, the invention according to claim 3, in the invention of claim 1 or 2, before Ki磁 stone, is magnetized in the rotation axis direction perpendicular to N and S poles one each pole It is characterized by having.

The invention according to claim 5 is the invention according to any one of claims 1 to 4 , wherein the magnetic sensor is a Hall sensor.

  According to the magnetic sensor unit of the present invention, the magnetic flux density at the geomagnetic level can be detected with high accuracy by using one magnetic sensor, and the position or inclination of the magnet can be detected in a wide range. In addition, there is no restriction on the arrangement location, and the rotation of the magnet can be detected.

As the magnetic sensor, a Hall element in which the sign of the output voltage changes depending on the polarity of the magnetic pole, or a linear output type Hall IC is suitable. When it is not necessary to discriminate the magnetic pole, a magnetoresistive effect element (MR element), a magnetoresistive effect IC (MRIC), or the like may be used. In addition to the sensors described above, various magnetic sensors can be applied. If an analog output magnetic sensor is used, the position information and rotation angle of the magnetic field generator that is the object can be obtained, and if a digital output magnetic sensor such as a reed switch is used, a certain position or angle A position switch or a rotation angle switch whose output is turned ON / OFF can be configured.

Further, when the length of the press-fitting portion of the rotary shaft that is press-fitted and fixed in the press-fitting hole of the first magnet (magnet attached to the rotary shaft) is ¼ to ½ of the thickness of the first magnet. good. The press-fitting allowance between the press-fitting hole of the first magnet and the press-fitting part of the rotating shaft is preferably 5 to 10 μm. The shaft diameter of the pivot portion of the rotating shaft is preferably 50 to 200 μm. Furthermore, the Vickers hardness of the rotating shaft is preferably Hv450 to 650.

There are no particular restrictions on the first magnet and the second magnet (the magnetic field generator that is the object) , but various magnets such as ferrite, samarium-cobalt, and neody that are usually mass-produced are applicable. Is possible. In order to reduce the size of the magnetic sensor unit, it is essential to reduce the size of the magnet. Therefore, it is preferable to use a samarium-cobalt-based or neodi-based rare earth magnet that generates a strong magnetic field even if it is small. As for the first magnet, it is more preferable to use a magnet that is ring-shaped and magnetized in the circumferential direction.

  As for the housing, the bearing, the rotating shaft, and the pendulum body, it is preferable to use those made of a non-magnetic material. If a magnetic material is used, an unnecessary magnetic flux density may be generated in the magnetic sensor unit, and there is a possibility that the position or angle information of the second magnet comes from the magnetic flux density. In addition, an attractive force acts between the first magnet and the magnetic material, and the first magnet may not rotate to a desired angle.

As described above, according to the present invention, in order to relatively detect the movement or inclination of the magnetic field generator as an object, the rotary shaft is pivotally supported by the bearing unit and has a Vickers hardness of Hv450 to Hv650. attached is rotatably provided, and magnetized magnets in a cylindrical shape in the circumferential direction, and a magnetic sensor for detecting a magnetic flux density generated from the magnet, the object before Ki磁 stone by causing relative movement or inclined with respect to the previous Ki磁 stone is rotated, by detecting a change in magnetic flux density due to the rotation of the magnet by the magnetic sensor, the movement of the object or Since the inclination is detected, a magnetic sensor unit that can detect the magnetic flux density at the geomagnetic level with high accuracy and has a wide detection range by using one magnetic sensor and detects the position or inclination of the magnet. In addition, it is possible to realize a magnetic sensor unit that detects the rotation of a magnet that can accurately detect the magnetic flux density at the earth's magnetic level and has no restrictions on the location of the magnetic field, and can be conveniently adapted to various applications. It becomes.

  Further, by adjusting the length of the press-fitting portion of the rotating shaft, the rotating shaft can be press-fitted and fixed to a miniaturized magnet without using an adhesive or the like. Furthermore, by adjusting the press-fitting allowance between the press-fitting hole of the magnet and the press-fitting portion of the rotating shaft, it is possible to prevent a problem that the magnet slips and rotates relative to the rotating shaft.

  Further, by reducing the shaft diameter of the pivot portion of the rotating shaft, a precious stone for a watch can be used as a bearing. Furthermore, by making the rotating shaft hard, even if the shaft diameter of the pivot portion is reduced, it can slide well with the bearing and the impact resistance can be improved.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic front view (excluding a second magnet) for explaining one embodiment of a magnetic sensor unit of the present invention, FIG. 2 is a schematic sectional view taken along line AA in FIG. 1, and FIG. The schematic BB sectional drawing in FIG. 2 is shown.

1 to 3, the magnetic sensor unit 1 includes a left substrate 2 and a right substrate 3 as a housing, a pair of bearing units 4 mounted on both the left and right substrates 2 and 3, and a shaft mounted on the bearing unit 4. a rotary shaft 5 which is supported, the rotation shaft 5 and the first magnet 6 to be press-fitted fixing is a magnetic sensor 87 Toka et configured to detect the magnetic field from the first magnet 6. In the following description, the “second magnet” means a magnetic field generator (see FIG. 6) that is an object that moves, tilts, or rotates relative to the first magnet.

  The left substrate 2 and the right substrate 3 are molded products made of nonmagnetic resin, and have a substantially rectangular plate shape in which a recess 24 is formed in the upper center. In addition, the left board 2 and the right board 3 are formed with bearing mounting holes 21 having counterbore holes in which the bearing unit 4 is mounted at the substantially central portion on the outside.

  Further, a storage chamber 22 in which the first magnet 6 is rotatably stored is formed in the substantially central portion on the inner side. The storage chamber 22 has a shape in which the first magnet 6 pivotally supported by the bearing unit 4 via the rotating shaft 5 can rotate.

  As shown in FIG. 2, the bearing unit 4 includes a frame 41 fitted into the bearing mounting hole 21, a spiral spring 42 inserted into the frame 41, and a radial bearing connected to the central portion of the spiral spring 42. 43, the spiral spring 42 is pressed in the direction of the pendulum body 10, and the spring retainer 44 accommodated in the frame 41, the thrust bearing 45 mounted on the spring retainer 44, and the spring retainer 44 are attached to the first magnet 6. It comprises a retaining ring 46 that is held in a biased direction.

  In the bearing unit 4, a radial bearing 43 and a thrust bearing 45 slide with the rotating shaft 5, and the rotating shaft 5 is supported. When an impact is applied to the magnetic sensor unit 1, the spiral spring 42 absorbs and cushions the radial impact, and the retaining ring 46 absorbs and cushions the thrust impact. The bearing unit 4 is not limited to the above-described configuration, and may be a bearing unit having a configuration capable of absorbing the impact and supporting the rotating shaft 5 even when an impact is applied.

  4A and 4B are schematic views of the first magnet of the magnetic sensor unit according to the present invention, FIG. 4A is a side view, and FIG. 4B is a front view. The first magnet 6 is an NdFeB plastic magnet, and has a cylindrical shape with a press-fit hole 61 formed in the center of the side surface as shown in FIG.

  Moreover, although the 1st magnet 6 of this embodiment is an NdFeB plastic magnet, it is not limited to this, For example, permanent magnets, such as a ferrite magnet and a rare earth magnet, can be used. Further, as the shape, it is preferable that the magnetic sensor 8 part has a specific change in the magnetic flux density with respect to the rotation of the first magnet 6. In the embodiment of the present invention, the shape is cylindrical. On the other hand, it has a sine wave magnetic flux density change tendency. Of course, the shape may have a linear magnetic flux density change tendency with respect to the rotation angle. The permanent magnet 6 is magnetized so that both sides of the press-fit hole 61 are magnetic poles and the magnetization direction is perpendicular to the press-fit hole 61.

  FIG. 5 is a schematic enlarged front view of the rotating shaft of the magnetic sensor unit according to the present invention. In FIG. 5, the rotating shaft 5 includes a press-fit portion 51 that is press-fitted and fixed in the press-fit hole 61 of the first magnet 6, a wax portion 52 formed at both ends of the press-fit portion 51, and the wax portion 52. And a small-diameter pivot portion 53 projecting from the center. In addition, a shape change portion between the wax portion 52 and the pivot portion 53 is formed as an arcuate curved surface in order to reduce stress concentration.

  Here, the length t of the press-fit portion 51 is preferably t = T / 4 to T / 2 with respect to the thickness T of the permanent magnet 6, and in this way, the first is brittle and easily cracked. The rotary shaft 5 can be press-fitted and fixed to the magnet 6. This is because the first magnet 6 is reduced in size and weight. For example, when the outer diameter is about 1300 μm, the inner diameter is about 300 μm, and the thickness is about 600 μm, if t is longer than T / 2, the first magnet 6 is pressed. This is because one magnet 6 is broken, and when t is shorter than T / 4, a sufficient fixing force cannot be obtained.

  Preferably, the press-fitting allowance of the press-fitting portion 51 of the rotary shaft 5 with respect to the press-fitting hole 61 of the first magnet 6 is 5 μm to 10 μm. In this way, the first magnet 6 is firmly attached to the rotary shaft 5. It can be fixed to. This is because if the press-fitting allowance is smaller than 5 μm, a sufficient fixing force cannot be obtained, and if the press-fitting allowance is larger than 10 μm, there is a higher risk of the first magnet 6 being cracked during press-fitting. .

  In addition, although the method of fixing the rotating shaft 5 to the 1st magnet 6 using an adhesive agent is also assumed, when adhesion work is difficult and there is a gap between the press-fitting hole 61 and the press-fitting part 51, the first There is a concern that one magnet 6 is fixed to the rotating shaft 5 in an eccentric state.

  The rotary shaft 5 may have a pivot portion 53 having a shaft diameter of 50 μm to 200 μm. In this way, a wristwatch precious stone (generally having a shaft diameter of 50 μm to 200 μm) is used as a radial bearing 43 or a thrust bearing 45. Can be used as

  Further, the Vickers hardness of the rotating shaft 5 is preferably Hv450 to Hv650, and in this way, good sliding performance with the bearings 43 and 45 can be maintained even if the shaft diameter of the pivot portion 53 is reduced. Further, impact resistance can be improved. This is because if the Vickers hardness is lower than Hv450, the slidability and impact resistance are insufficient, and if the Vickers hardness is higher than Hv650, the elasticity is lowered and becomes too brittle. In order to realize the above-mentioned Vickers hardness, the material of the rotary shaft 5 may be hardened tool steel or martensitic stainless steel, such as SK material or SUS420.

  Each of the substrates 2 and 3 is joined by two set screws 31 in a state where the first magnet 6 is mounted. For this reason, the left substrate 2 is formed with a through hole 32 into which the set screw 31 is inserted, and the right substrate 3 is formed with a female screw (not shown) into which the set screw 31 is tightened.

  In the present embodiment, each of the substrates 2 and 3 is configured to be joined by the set screw 31, but is not limited to this configuration. For example, although not shown, a notch is protruded from one substrate 2 (3), a through hole into which the notch is inserted is formed in the other substrate 3 (2), and the substrates 2 and 3 are joined. And it is good also as a structure which melt | dissolves the notch front-end | tip protruded from the through-hole, and latches the board | substrate 3 (2) by this melt | dissolution part.

  By adopting such a configuration, the contact resistance between the rotating shaft 5 and the bearing 4 becomes very small, and even if the magnetic flux density generated in the first magnet 6 portion is on the order of the geomagnetic level, the first magnet 6 An attractive force or a repulsive force acts on the first magnet 6, and the first magnet 6 rotates to the most stable position in terms of energy. Specifically, the first magnet 6 rotates so that the magnetization direction of the first magnet 6 matches the direction of the lines of magnetic force generated in the first magnet 6 portion.

  The magnetic sensor 8 is fixed to the recesses 24 of the assembled substrates 2 and 3 with an adhesive. This magnetic sensor 8 detects the rotation of the first magnet 6. In this example, the magnetic sensor 8 is disposed above the magnetic sensor unit 1, but may be disposed below or on the side.

  The magnetic sensor 8 has a structure in which the Hall element 82 is embedded, and detects the rotation of the first magnet 6. In the present embodiment, the Hall element 82 is used, but the magnetic sensor 8 is not limited to the configuration using the Hall element 82.

  The magnetic sensor 8 includes four input / output terminals 81, and a control current is supplied to the hall element 82 via the two input / output terminals 81, and the other two input / output terminals 81 are used. The output voltage corresponding to the magnetic flux density is output. The Hall element 82 described above coincides with the central surface 64 of the first magnet 6. With this arrangement, the change in magnetic flux density at the Hall element 82 is maximized.

  The magnetic sensor 8 is configured to be bonded to the substrates 2 and 3, but is not limited to this configuration. For example, a locking portion (not shown) is provided on the substrates 2 and 3, and the magnetic sensor 8 It is good also as a structure which latches 8 to a latching | locking part.

  As described above, the magnetic sensor unit 1 is reduced in size and weight, and the first magnet 6 is accurately rotated to the most stable position in terms of energy even with a weak magnetic field such as geomagnetism, and the magnetic sensor 8 is used. The rotation can be detected.

  The most stable position in terms of energy in the first magnet 6 is approximately equal to the direction of the magnetic field lines of the external magnetic field. The external magnetic field can be controlled by the second magnet 7.

  FIGS. 6A to 6E are relationship diagrams between the direction of the lines of magnetic force that change with the movement of the second magnet having a rectangular parallelepiped shape and the energetically stable location of the first magnet. FIGS. 6A to 6E show how the first magnet 6 rotates when the second magnet 7 translates from the lower right portion to the lower left portion of the first magnet 6, respectively.

  It can be seen that the first magnet 6 rotates in a direction parallel to the lines of magnetic force generated from the second magnet 7. Thus, the 1st magnet 6 rotates so that a magnetization direction may turn to a direction parallel to a magnetic force line with the movement and inclination of the 2nd magnet 7. FIG. In this example, the second magnet 7 is moved with respect to the first magnet 6. However, the same characteristics can be obtained even when the first magnet 6 is moved with respect to the second magnet 7. Needless to say.

  FIGS. 7A to 7D are relationship diagrams between the direction of the lines of magnetic force changing with the rotation of the second magnet having a cylindrical shape and the energetically stable location of the first magnet. FIGS. 7A to 7D show how the first magnet 6 rotates when the second magnet 7 rotates around its central axis.

  It can be seen that the first magnet 6 rotates in a direction parallel to the lines of magnetic force generated from the second magnet 7. In this way, the first magnet 6 rotates so that the magnetization direction is in a direction parallel to the magnetic field lines as the second magnet 7 rotates. Further, by adjusting the length of the press-fitting portion 51 of the rotary shaft 5 and the press-fitting allowance, the rotary shaft 5 can be press-fitted and fixed to the first magnet 6 that is brittle and easily broken.

  The magnetic sensor unit of the present invention has been described with reference to a preferred embodiment, but the present invention is not limited to the above-described embodiment, and various modifications can be made within the scope of the present invention. Needless to say.

Next, specific examples will be described.
[Example 1]
An example in which the magnetic sensor unit 1 is manufactured with the configuration of the best mode for carrying out the present invention and the position of the second magnet 7 is detected will be described.

  As the magnetic sensor 8, a Hall element HQ302C (trade name) manufactured by Asahi Kasei Electronics was used. The distance from the center of the rotating shaft 5 to the magnetic sensitive part of the magnetic sensor 8 is 1.6 mm. The first magnet 6 was a NdFeB plastic mug. The size of the first magnet 6 is φ1.266 (outer diameter) × φ0.324 (inner diameter) × 0.566 t (unit: mm), and its coercive force is about 460 kA / m. The magnetization direction is circumferential magnetization, as shown in FIG. The second magnet 7 was a ferrite sintered magnet. The size of the second magnet 7 is 5 × 4 × 15 t (unit: mm), and the residual magnetic flux density is 410 mT. The magnetization direction is a direction parallel to a side of 15 mm (same configuration as FIG. 6).

  By adopting the configuration described above, an output voltage of approximately ± 30 mV is generated when the center of the N pole and the S pole of the first magnet 6 faces the Hall element (when the input voltage of the Hall element is 3 V). .

  As shown in FIG. 6C, the positional relationship between the center of the first magnet 6 and the center of the second magnet 7 is such that (y, z) is (23 mm, 7 mm). Further, assuming that x = 0 in the state of FIG. 6C, the second magnet 7 was moved so that x was changed from −16 mm to +16 mm, and the output voltage of the magnetic sensor 8 at that time was measured. The result is shown in the curve of arrangement 1 in FIG. Similarly, (y, z) is constant at (2.5 mm, 20 mm), the second magnet 7 is moved so that x becomes −16 mm to +16 mm, and the output voltage of the magnetic sensor 8 at that time is measured. . The results are shown in the curve of arrangement 2 in FIG.

  In the configuration of the arrangement 1 described above, it can be seen that when the second magnet 7 moves on the x-axis, the first magnet 6 rotates accordingly. Further, it can be seen that the tendency shows a change close to a sine wave with respect to the movement amount of the second magnet 7.

  Moreover, also in the structure of the arrangement | positioning 2 mentioned above, when the 2nd magnet 7 moves on an x-axis, it turns out that the 1st magnet 6 rotates with it. The tendency shows that the output change is small when the second magnet 7 is moving near the first magnet 6, and the output change is large when the second magnet 7 is separated from the first magnet 6.

  The reason for the change in the output voltage of the magnetic sensor 8 varies depending on the arrangement of the second magnet 7 because the direction of the lines of magnetic force in the first magnet 6 portion generated from the second magnet 7 is different. Conversely, by controlling the change in the direction of the lines of magnetic force with respect to the movement of the second magnet 7, a desired output voltage change (for example, a linear output change) is generated with respect to the movement of the second magnet 7. It is possible.

  In addition, the magnetic flux density of the 1st magnet 6 part generate | occur | produced from the 2nd magnet 7 shown in the present Example 1 is a magnetic flux density of a geomagnetic level. In the magnetic sensor unit 1 of the first embodiment, it can be seen that the first magnet 6 rotates in response to the magnetic flux density at the geomagnetic level.

  In the first embodiment, the output change of the magnetic sensor 8 accompanying the movement of the second magnet 7 has been described. However, the direction of the lines of magnetic force of the first magnet 6 portion also changes due to the inclination of the second magnet 7. It goes without saying that the situation can be detected using the magnetic sensor unit 1.

  As described above, when the magnetic sensor unit of the first embodiment is used, a desired analog output can be obtained with respect to a wide range of movement (a stroke of several tens of mm or more) or inclination of the second magnet. Therefore, it is possible to suitably cope with various applications.

[Example 2]
An example in which the rotation of the second magnet 7 is detected using the same magnetic sensor unit as in the first embodiment will be described. That is, only the second magnet 7 is different from the first embodiment.

  The second magnet used in Example 2 is a sintered magnet of NdFeB, and the size is φ10 (outer diameter) × φ6 (inner diameter) × 11 (height) (unit: mm). The residual magnetic flux density is about 1150 mT. As with the first magnet 6, magnetization is performed with one N pole and one S pole in the circumferential direction (the same configuration as FIG. 7).

  As shown in FIG. 7A, the positional relationship between the center of the first magnet 6 and the center of the second magnet 7 is (x, y, z) when the x, y, and z axes are taken. FIG. 9 shows the results of measuring the output voltage of the magnetic sensor 8 with an oscilloscope at this time by rotating the second magnet 7 as 0 mm, 82 mm, 33 mm). The second magnet 7 is rotated at a rotational speed of about 9000 rpm, and it can be seen that the first magnet 6 is also rotating at the same speed.

  In addition, the magnetic flux density of the 1st magnet 6 part generated from the 2nd magnet 7 shown in the present Example 2 is a value of a geomagnetic level. In the magnetic sensor unit 1 of Example 2, it can be seen that the first magnet 6 rotates in response to the magnetic flux density at the geomagnetic level.

  As described above, if the magnetic sensor unit according to the second embodiment is used, the rotation can be detected even if the magnetic sensor cannot be arranged in the vicinity of the rotation axis, and therefore, it is possible to suitably cope with various applications.

[Example 3]
In the first embodiment and the second embodiment described above, a ring-shaped magnet magnetized in the circumferential direction is used as the first magnet 6 of the magnetic sensor unit 1, but the arm 9 and the first magnet 6 having a rectangular parallelepiped shape are integrated. The constructed pendulum body 10 may be used.

  FIGS. 10A to 10C are schematic views showing another embodiment of the magnetic sensor unit according to the present invention. FIG. 10A is a diagram showing an example of the configuration of the pendulum body in a triangulation, and FIG. FIG. 10B is a side view, and FIG. 10C is a rear view.

  Further, the magnetic sensor 8 can also be changed in its location in order to easily detect the rotation of the first magnet 6. Components other than the above-described pendulum body 10 and magnetic sensor 8 can be the same as those in the first embodiment. With this configuration, other embodiments such as detection of the position and inclination of the second magnet can be performed in the same manner.

[Example 4]
In the first to third embodiments described above, the first magnet 6 of the magnetic sensor unit 1 is rotatably held using the rotating shaft 5. However, the same function can be achieved even in a configuration that does not use the rotating shaft 5. The magnetic sensor unit 1 can be constructed.

  11 (a) and 11 (b) are schematic views showing another embodiment of the magnetic sensor unit according to the present invention, FIG. 11 (a) is a top view, and FIG. 11 (b) is a side view. As shown in FIGS. 11A and 11B, the first magnet 6 can be rotated by being integrated with the floating object 11 floating in the liquid 12. The first magnet 6 rotates so that the direction of the lines of magnetic force generated from the second magnet (not shown) and the magnetization direction of the first magnet 6 coincide with each other. This is the same as the other embodiments.

  12A and 12B are schematic views showing still another embodiment of the magnetic sensor unit according to the present invention. FIG. 12A is a top view and FIG. 12B is FIG. It is a side view in the cc line cross section of). Means for floating the first magnet 6 in the liquid 13 having a high specific gravity is also effective for making the first magnet 6 rotatable. In the configuration in which the first magnet 6 is suspended in the liquid 13 having a high specific gravity, the first magnet 6 is formed in a spherical shape, and the magnetic sensor 8 is provided in each xyz plane, so that the position of the second magnet is 3. It becomes possible to detect in a dimension, and the application field can be made extremely large.

  It goes without saying that the position and inclination of the second magnet can be detected even if the first magnet 6 can be rotatably supported even in the configuration other than the present embodiment.

  The magnetic sensor unit of the present invention is suitable as a sensor for detecting the position, tilt, or rotation of an object (second magnet), and the advantage over the conventional similar sensor is generated from the second magnet. Even if the magnetic flux density is as small as a geomagnetic level, it can be detected with high accuracy. Therefore, the degree of freedom of the magnetic sensor unit arrangement location is greatly improved, and it is possible to cope with various applications conveniently.

It is a schematic front view (except for the 2nd magnet) for explaining one embodiment of the magnetic sensor unit of the present invention. It is outline AA expanded sectional drawing in FIG. FIG. 3 is a schematic BB cross-sectional view in FIG. 2. It is the schematic of the 1st magnet of the magnetic sensor unit which concerns on this invention, (a) is a side view, (b) is a front view. It is a general | schematic expanded front view of the rotating shaft of the magnetic sensor unit which concerns on this invention. (A)-(e) is a figure which shows an example which detects the position of a 2nd magnet using the magnetic sensor unit which concerns on this invention. (A)-(d) is a figure which shows an example which detects rotation of a 2nd magnet using the magnetic sensor unit which concerns on this invention. It is a figure which shows an example which performed the position detection of the 2nd magnet using the structure of Example 1 in the magnetic sensor unit which concerns on this invention. It is a figure which shows an example which performed rotation detection of the 2nd magnet using the structure of Example 2 in the magnetic sensor unit which concerns on this invention. It is the schematic which shows the other Example of the magnetic sensor unit which concerns on this invention, (a) is a front view, (b) is a side view, (c) is a rear view. It is the schematic which shows the other Example of the magnetic sensor unit based on this invention, (a) is a top view, (b) is a side view. It is the schematic which shows other Example of the magnetic sensor unit which concerns on this invention, (a) is a top view, (b) is a side view in the cc line cross section of (a).

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Magnetic sensor unit 2 Left board 3 Right board 4 Bearing unit 5 Rotating shaft 6 1st magnet 7 2nd magnet 8 Magnetic sensor 9 Arm 10 Pendulum body 11 Floating object 12 Liquid 13 Liquid with heavy specific gravity 21 Bearing mounting hole 22 Storage Chamber 24 Recess 31 Set screw 32 Through hole 41 Frame 42 Spiral spring 43 Radial bearing 44 Spring retainer 45 Thrust bearing 46 Retaining ring 51 Press fit part 52 Enamel part 53 Pivot part 61 Press fit hole 64 Central surface 81 I / O terminal 82 Hall element

Claims (5)

To relative detecting the movement or tilting of the magnetic field generator as an object, is supported by a bearing unit mounted Vickers hardness on the rotary shaft to Hv450～Hv650, rotatably mounted, cylindrical A magnet that is shaped and circumferentially magnetized ;
And a magnetic sensor for detecting a magnetic flux density generated from the magnet,
By causing relative movement or tilting the object with respect to the front Ki磁 stone, the front Ki磁 stone is rotated to detect a change in magnetic flux density due to the rotation of the magnet by the magnetic sensor Thus, the magnetic sensor unit detects the movement or inclination of the object . In order to relatively detect the movement, inclination or rotation of the magnetic field generator as an object, it is pivotally supported by a bearing unit and attached to a rotary shaft having a Vickers hardness of Hv450 to Hv650. A magnet provided on the pendulum body provided rotatably,
  A magnetic sensor for detecting a magnetic flux density generated from the magnet,
  By moving, tilting or rotating the object relative to the magnet, the magnet rotates, and the magnetic sensor detects a change in magnetic flux density accompanying the rotation of the magnet. A magnetic sensor unit for detecting movement, inclination or rotation of an object. Before Ki磁 stone, it is magnetized in the rotation axis direction perpendicular magnetic sensor unit according to claim 1 or 2 characterized by having a N-pole and S-pole one each pole. 4. The magnetic sensor unit according to claim 1, wherein an axis diameter of a pivot portion of the rotating shaft is 50 μm to 200 μm. It said magnetic sensor is a magnetic sensor unit according to any of claims 1 to 4, characterized in that a Hall sensor.

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