WO2012029375A1

WO2012029375A1 - Magnetic flux detection sensor

Info

Publication number: WO2012029375A1
Application number: PCT/JP2011/063838
Authority: WO
Inventors: 昌弥田村; 雅也植田; 信二天池; 富雄柴野; 雅彦鷲平; 俊樹西脇
Original assignee: 株式会社村田製作所
Priority date: 2010-08-30
Filing date: 2011-06-16
Publication date: 2012-03-08

Abstract

An inclination sensor (1) is configured by a casing (2), a magnetoelectric conversion element (8), and a movable object (12). The casing (2) forms a movable object housing space (6) having an upward-facing concave curved surface (5). The magnetoelectric conversion element (8) is provided in the casing (2) so as to be located beneath the deepest point (5A) of the concave curved surface (5). The movable object (12) is formed by a hemispherical magnet, and a sliding surface (13) formed from a downward-facing hemispherical surface and a flat top surface (14) have reverse polarities to each other. The movable object (12) is housed in the movable object housing space (6) of the casing (2) with the sliding surface (13) being slidable on the concave curved surface (5). Antistatic coating films (15A, 15B) are respectively formed on the surfaces of the concave curved surface (5) and the movable object (12), and an antistatic means (15) is configured by the antistatic coating films (15A, 15B).

Description

Magnetic flux detection sensor

The present invention relates to a magnetic flux detection sensor suitable for use in, for example, detection of posture inclination.

As a conventional magnetic flux detection sensor, an inclination sensor that detects an inclination of an attitude is known (for example, refer to Patent Documents 1 and 2). In Patent Document 1, a magnet having an inclined surface with a depressed central portion, a magnetic detection element such as a Hall IC disposed to face the inclined surface of the magnet, and the magnet and the magnetic detection element are located. A configuration including a spherical movable body made of a magnetic material provided on a tilted surface of a magnet so as to be able to roll is disclosed. In the tilt sensor of Patent Document 1, the movable body rolls and displaces on the tilted surface according to the tilt of the magnet, and the change in the magnetic flux density accompanying the displacement of the movable body is detected by the magnetic detection element.

Patent Document 2 discloses a case having a concave spherical surface, a thick disk-shaped magnet slidably provided on the concave spherical surface of the case, and three or more at the side edge of the concave spherical surface. A configuration including a magnetic detection element is disclosed. In the tilt sensor of Patent Document 2, the magnet slides and displaces on the concave spherical surface according to the tilt of the case, and a change in magnetic flux density due to the displacement of the magnet is detected using a plurality of magnetic detection elements.

JP 2003-185430 A JP-A-8-261758

By the way, in the tilt sensor according to the prior art, it is necessary to secure a sufficiently large movable range of the movable body or the like compared to the outer shape of the movable body or the like in order to reliably detect the displacement of the movable body or the magnet accompanying the tilt. For this reason, there exists a problem that the whole sensor is easy to enlarge and it is difficult to form a small sensor. Further, when the magnet is provided so as to be slidable within the case as in the tilt sensor of Patent Document 2, frictional charging may occur between the magnets as the magnets slide. Due to this frictional charging, the movement of the magnet becomes dull and the detection accuracy and detection sensitivity tend to be lowered. Particularly, when the entire sensor is downsized, the mass of the magnet is reduced, so that the slidability of the magnet tends to be lowered, and the problem due to charging becomes significant.

The present invention has been made in view of the above-described problems of the prior art, and an object of the present invention is to provide a magnetic flux detection sensor that can be reduced in size and can maintain the slidability of a movable body.

(1). In order to solve the above-described problems, the present invention provides a movable body including a sliding surface formed of a downward convex curved surface formed on the bottom side and an upper surface formed of a horizontal surface formed on the upper side of the sliding surface. A nonmagnetic container having a movable body accommodating space having an upward concave curved surface that slidably supports the sliding surface of the movable body, and a change in magnetic flux density provided by the sliding of the movable body provided in the nonmagnetic container A magnetic flux density detection sensor comprising: an antistatic means for preventing charging caused by contact between the movable body and the nonmagnetic container; and a sliding surface of the movable body, the magnetic flux density detection means, Are arranged opposite to each other, and a magnetic flux is applied to the magnetic flux density detection means via the sliding surface, and a magnetic flux at the upper surface periphery is provided at an upper surface periphery of the movable body where the sliding surface intersects the upper surface. When the nonmagnetic container is inclined from a horizontal state, the movable body is displaced from a steady position along the concave curved surface of the nonmagnetic container, and the nonmagnetic container is in a horizontal state. The movable body is configured to return to a steady position along the concave curved surface of the non-magnetic container when returning to step S2.

According to the present invention, the movable body is configured to include a sliding surface made of a downward convex curved surface formed on the bottom side and an upper surface made of a horizontal surface formed on the upper side of the sliding surface. For this reason, the thickness of the movable body gradually decreases from the apex portion of the convex curved surface along the periphery of the upper surface. When a movable body is formed using a magnetic material, magnetic flux tends to concentrate on a thick portion of the movable body. For this reason, the magnetic flux density is high around the apex portion of the movable body, and the magnetic flux density is reduced in a portion near the upper surface periphery of the movable body.

Further, the movable body is provided in the movable body accommodation space of the non-magnetic container. The magnetic flux density detection means is provided in the non-magnetic container and is disposed opposite to the sliding surface of the movable body. When the nonmagnetic container is tilted from the horizontal state, the sliding surface of the movable body slides on the concave curved surface, and the vertex portion of the movable body moves toward the lowest position of the concave curved surface. At this time, the relative position of the apex portion of the movable body and the magnetic flux density detection means changes according to the inclination angle of the nonmagnetic container. For this reason, the magnetic flux density applied to the magnetic flux density detecting means can be changed according to the inclination angle of the non-magnetic container.

Further, since the vertex portion of the movable body only needs to be displaced with respect to the magnetic flux density detection means, the movable body accommodation space of the nonmagnetic container only needs to have a volume that allows the movable body to be rotationally displaced. For this reason, the volume of the movable body accommodation space can be brought close to the volume of the movable body, and the entire sensor can be reduced in size.

Furthermore, since the antistatic means for preventing the movable body and the nonmagnetic container from being charged is provided, when the movable body is slid on the concave curved surface, the contact between the sliding surface of the movable body and the concave curved surface of the nonmagnetic container No charge is accumulated due to friction. For this reason, even when a small movable body is slid on the concave curved surface, the movable body can be kept slidable without being affected by the accumulated electric charge, and a decrease in detection accuracy and detection sensitivity can be prevented. Can do.

In addition to this, when the magnetic flux density detecting means is arranged around the deepest part of the concave curved surface when the nonmagnetic container is in a horizontal state, for example, as the facing positional relationship between the sliding surface of the movable body and the magnetic flux density detecting means, When the tilt angle of the magnetic container is small, the displacement between the apex portion of the movable body and the magnetic flux density detecting means is small, and the magnetic flux density applied to the magnetic flux density detecting means is high. On the other hand, when the inclination angle of the non-magnetic container is large, the displacement between the apex portion of the movable body and the magnetic flux density detection means is large, and the magnetic flux density applied to the magnetic flux density detection means is low. Note that the magnetic flux density applied to the magnetic flux density detecting means changes according to the thickness of the movable body portion facing the magnetic flux density detecting means. For this reason, the linearity of the detection signal of the magnetic flux density detection means with respect to the inclination angle of the non-magnetic container can be improved compared to the case where the movable body is made of, for example, a thick disk shape or a small-diameter spherical shape, and can be detected. The angle range of various inclinations can be expanded.

Also, for example, when the sliding surface and the upper surface of the movable body are magnetized in opposite polarities, the magnetic flux tends to concentrate on the periphery of the upper surface of the movable portion where the surfaces intersect at an acute angle. On the other hand, in the present invention, since the chamfered portion is provided on the periphery of the upper surface of the movable body, the concentration of magnetic flux at the periphery of the upper surface of the movable body can be reduced by the chamfered portion. As a result, the magnetic flux density can be gradually decreased from the apex portion of the movable body toward the upper surface periphery, and the linearity of the change in the magnetic flux density caused by the displacement of the movable body can be enhanced.

(2). The present invention includes a hemispherical movable body having a sliding surface composed of a downward hemispherical surface on the bottom side, and a movable body accommodating space having an upward concave curved surface that slidably supports the sliding surface of the movable body. A magnetic flux detection sensor comprising: a nonmagnetic container; and a magnetic flux density detecting means provided on the nonmagnetic container and detecting a change in magnetic flux density caused by sliding of the movable body, wherein the movable body and the nonmagnetic container touch each other. An anti-static means for preventing charging caused by the above-described structure, the sliding surface of the movable body and the magnetic flux density detecting means are arranged to face each other, and a magnetic flux is applied to the magnetic flux density detecting means through the sliding surface, and the movable A chamfered portion that relaxes the concentration of magnetic flux density at the upper surface periphery is provided at the upper surface periphery of the body, and when the nonmagnetic container is tilted from a horizontal state, the movable body becomes a concave curved surface of the nonmagnetic container. Displaced from the normal position I, the when the nonmagnetic container is returned to the horizontal state, the movable body is configured so as to return to the normal position along the concave curved surface of the nonmagnetic container.

According to the present invention, the movable body is formed in a hemispherical shape, and a sliding surface composed of a downward hemispherical surface is formed on the bottom side thereof. Gradually smaller. In addition, an antistatic means for preventing electrification that occurs when the movable body and the nonmagnetic container come into contact with each other is provided. For this reason, even when a small movable body is slid on the concave curved surface, the slidability of the movable body can be maintained without being affected by the accumulated electric charge.

(3). The present invention includes a movable body having a sliding surface formed of a downward convex curved surface formed on the bottom side and an upper surface formed of a horizontal surface formed on the upper side of the sliding surface, and sliding the sliding surface of the movable body Magnetic flux having a non-magnetic container having a movable body accommodating space having an upward concave curved surface that is freely supported, and a magnetic flux density detecting means that is provided in the non-magnetic container and detects a change in magnetic flux density caused by sliding of the movable body. A detection sensor comprising antistatic means for preventing electrification caused by contact between the movable body and the nonmagnetic container, wherein the sliding surface of the movable body and the magnetic flux density detection means are arranged to face each other, and the nonmagnetic container When the movable body is tilted from the horizontal state, the movable body is displaced from a steady position along the concave curved surface of the nonmagnetic container, and when the nonmagnetic container returns to the horizontal state, the movable body is recessed from the nonmagnetic container. It is configured to return to the normal position along the curved surface.

According to the present invention, the movable body is configured to include a sliding surface made of a downward convex curved surface formed on the bottom side and an upper surface made of a horizontal surface formed on the upper side of the sliding surface. For this reason, as for a movable body, the thickness of a movable body becomes small gradually along the upper surface periphery from the vertex part of a convex-shaped curved surface. In addition, the magnetic flux density detection means is provided in the non-magnetic container, and the sliding surface of the movable body and the magnetic flux density detection means are arranged to face each other, so that the apex portion of the movable body and the magnetic flux density detection according to the inclination angle of the non-magnetic container. The relative position with the means changes. For this reason, the magnetic flux density applied to the magnetic flux density detecting means can be changed according to the inclination angle of the non-magnetic container.

In addition to this, the structure is provided with antistatic means for preventing the movable body and the nonmagnetic container from being charged. For this reason, even when a small movable body is slid on the concave curved surface, the slidability of the movable body can be maintained without being affected by the accumulated electric charge.

(4). The present invention includes a hemispherical movable body having a sliding surface composed of a downward hemispherical surface on the bottom side, and a movable body accommodating space having an upward concave curved surface that slidably supports the sliding surface of the movable body. A magnetic flux detection sensor comprising: a nonmagnetic container; and a magnetic flux density detecting means provided on the nonmagnetic container and detecting a change in magnetic flux density caused by sliding of the movable body, wherein the movable body and the nonmagnetic container touch each other. Anti-static means for preventing charging caused by the above-mentioned structure, the sliding surface of the movable body and the magnetic flux density detecting means are arranged to face each other, and when the non-magnetic container is tilted from a horizontal state, the movable body is the non-magnetic container. When the non-magnetic container is displaced from the steady position along the concave curved surface and returns to the horizontal state, the movable body returns to the steady position along the concave curved surface of the non-magnetic container.

According to the present invention, the movable body is formed in a hemispherical shape, and a sliding surface composed of a downward hemispherical surface is formed on the bottom side of the movable body. It can be formed in a hemispherical shape in which the thickness dimension gradually decreases. In addition, an antistatic means for preventing electrification that occurs when the movable body and the nonmagnetic container come into contact with each other is provided. For this reason, even when a small movable body is slid on the concave curved surface, the slidability of the movable body can be maintained without being affected by the accumulated electric charge.

(5). The present invention relates to a nonmagnetic container including a movable body having a sliding surface formed on the bottom side, a movable body containing space having an upward concave curved surface that slidably supports the sliding surface of the movable body, and the nonmagnetic container And a magnetic flux detection sensor having a magnetic flux density detection means for detecting a change in magnetic flux density caused by the sliding of the movable body, wherein the electrostatic charge prevention means prevents the charging that occurs when the movable body and the non-magnetic container come into contact with each other. When the non-magnetic container is tilted from the horizontal state, the movable body is displaced from a steady position along the concave curved surface of the non-magnetic container, and when the non-magnetic container returns to the horizontal state, the movable body Is configured to return to a steady position along the concave curved surface of the non-magnetic container.

According to the present invention, the movable body is provided in the movable body accommodation space of the non-magnetic container. When the non-magnetic container is tilted from the horizontal state, the sliding surface of the movable body slides on the concave curved surface, and the movable body moves toward the lowest position of the concave curved surface. At this time, the relative position of the movable body and the magnetic flux density detection means can be changed according to the inclination angle of the nonmagnetic container. For this reason, the magnetic flux density applied to the magnetic flux density detecting means can be changed according to the inclination angle of the non-magnetic container.

In addition, an antistatic means for preventing electrification that occurs when the movable body and the nonmagnetic container touch each other is provided. For this reason, even when a small movable body is slid on the concave curved surface, the slidability of the movable body can be maintained without being affected by the accumulated electric charge.

(6). In the present invention, the antistatic means is that an antistatic coating film made of a surfactant or a conductive material is formed on the sliding surface of the movable body and the concave curved surface of the nonmagnetic container.

According to the present invention, since the antistatic means is configured to form the antistatic coating film on the sliding surface of the movable body and the concave curved surface of the nonmagnetic container, for example, when the antistatic coating film is composed of a surfactant, Due to the hydrophilicity of the agent, moisture in the air can be taken into the antistatic coating film. As a result, the surface of the antistatic coating film can be brought into a low resistance state, so that static electricity generated by touching the movable body and the non-magnetic container can be quickly released into the air, and the movable body and the non-magnetic container. Can be prevented.

Also, for example, when the antistatic coating film is made of a conductive material, not only the same effect as the surfactant is obtained but also the effect is exhibited when the humidity is low. Furthermore, since the movable body and the non-magnetic container come into contact with each other, both have the same potential, so that the electrostatic force due to static electricity does not work.

(7). In the present invention, the portion including the concave curved surface of the nonmagnetic container and the movable body are formed of a low resistance material.

According to the present invention, charging can be prevented by the low resistance material, and even if it is temporarily charged, it can be immediately discharged.

(8). In the present invention, the magnetic flux density detection means includes a ground terminal, a drive voltage terminal, and a signal output terminal, and is formed of an insulating material except for a portion including a concave curved surface formed of a low resistance material of the nonmagnetic container. The ground terminal is embedded in the insulating material and the low-resistance material to electrically connect the ground terminal and the low-resistance material, and the magnetic flux density detecting means and the drive are included in the insulating material. A voltage terminal and the signal output terminal are embedded, and the drive voltage terminal, the signal output terminal, and the ground terminal are electrically insulated.

According to the present invention, since the ground terminal of the magnetic flux density detecting means is embedded in the low resistance material of the nonmagnetic container and the ground terminal and the low resistance material are electrically connected, the low resistance of the nonmagnetic container is passed through the ground terminal. The material part can be connected to an external ground. For this reason, the movable body and the nonmagnetic container can be held at the ground potential, and the effect of charging and discharging can be enhanced.

(9). In the present invention, the antistatic means is that the movable body and the non-magnetic container are formed of materials having substantially the same charge train.

摩擦 Frictional charge occurs between materials with different charge trains. On the other hand, according to the present invention, since the movable body and the non-magnetic container are formed of materials having substantially the same charge train, frictional charging is almost eliminated.

(10). In the present invention, the movable body is formed using a magnetic material and magnetized in a state where the sliding surface and the upper surface have opposite polarities.

According to the present invention, magnetic flux can be generated in the normal direction of the sliding surface. Further, the magnetic flux density detection means is arranged to face the sliding surface of the movable body. For this reason, when the non-magnetic container is tilted from the horizontal state, the magnetic flux density detecting means also tilts substantially in line with the normal direction of the sliding surface portion of the sliding movable body facing the magnetic flux density detecting means.

Also, the hemispherical movable body has a high magnetic flux density at the apex portion and a low magnetic flux density near the upper surface periphery. For this reason, according to the inclination angle of the non-magnetic container, the portion of the sliding surface of the movable body facing the magnetic flux density detection means can be displaced to change the magnetic flux density applied from the movable body to the magnetic flux density detection means. In addition, the magnetic flux density detector can reliably detect the magnetic flux density according to the tilt angle. As a result, the magnetic flux density detection means can output a detection signal corresponding to the tilt angle.

(11). In the present invention, when used in the northern hemisphere, the sliding surface of the movable body is magnetized to the north pole and the upper surface is magnetized to the south pole, and when used in the southern hemisphere, the sliding surface of the movable body is magnetized to the south pole. In addition, the upper surface is magnetized to the north pole.

According to the present invention, the magnetic force that tries to turn over the movable body by geomagnetism does not act on the movable body. As a result, when the tilted magnetic flux detection sensor is returned to the horizontal state, it is possible to prevent the movable body from being caught in the movable body housing space and not returning to the horizontal state.

(12). In the present invention, the magnetic flux density detecting means inclines the magnetic flux in the Y-axis direction in the X-axis direction and the Y-axis direction perpendicular to each other in comparison with the detection signal when the magnetic flux is inclined in the X-axis direction. And the concave curved surface of the movable body accommodating space has a Y-axis direction compared to the X-axis direction in order to compensate for the anisotropy of the magnetic flux density detecting means. It is formed by the anisotropic curved surface which displaces the said movable body large toward.

According to the present invention, when the nonmagnetic container is tilted in the Y-axis direction by the same tilt angle as when tilted in the X-axis direction, the amount of displacement of the movable body in the Y-axis direction increases, and the magnetic flux density detection means and the movable body It is possible to increase the positional change with the apex portion. Here, since the magnetic flux is generated in the normal direction of the sliding surface of the movable body, the magnetic flux density is detected when the non-magnetic container is tilted in the Y-axis direction compared to when the non-magnetic container is tilted in the X-axis direction. The change in the magnetic flux density applied to the means increases. That is, the magnetic flux density applied from the movable body to the magnetic flux density detecting means is lower when tilted in the Y-axis direction than when tilted in the X-axis direction at the same tilt angle, and the output level of the detection signal is reduced. Can be small. As a result, the detection signal of the magnetic flux density detection means when the nonmagnetic container is tilted in the X-axis direction and the detection signal of the magnetic flux density detection means when the nonmagnetic container is tilted in the Y-axis direction are output with respect to the tilt angle. Levels can be made approximately equal.

It is a disassembled perspective view which shows the inclination sensor by the 1st Embodiment of this invention. FIG. 4 is a cross-sectional view of the tilt sensor as seen from the direction of arrows II-II in FIG. 3. It is a top view which shows the inclination sensor in FIG. 1 in the state which excluded the cover body. It is explanatory drawing which shows the positional relationship of a movable body and a magnetoelectric conversion element when the inclination sensor by 1st Embodiment is made into a horizontal state. It is explanatory drawing which shows the positional relationship of a movable body and a magnetoelectric conversion element when the inclination sensor by 1st Embodiment is made into an inclination state. It is explanatory drawing similar to FIG. 4 which shows the inclination sensor by a comparative example. In 1st Embodiment and a comparative example, it is a characteristic diagram which shows the relationship between an inclination angle and the magnetic flux density corresponding to a detection signal. It is sectional drawing of the same position as FIG. 2 which shows the inclination sensor by 2nd Embodiment. It is sectional drawing of the position similar to FIG. 2 which shows the inclination sensor by 3rd Embodiment. It is a disassembled perspective view which shows the inclination sensor by 4th Embodiment. It is sectional drawing which looked at the inclination sensor from the arrow XI-XI direction in FIG. It is a top view which shows the inclination sensor in FIG. 10 in the state which excluded the cover body. In 1st, 4th embodiment, it is a characteristic diagram which shows the relationship between an inclination angle and the magnetic flux density corresponding to a detection signal. It is sectional drawing of the same position as FIG. 2 which shows the inclination sensor by 5th Embodiment. In the 4th and 5th embodiment, it is a characteristic line figure showing the relation between a tilt angle and magnetic flux density corresponding to a detection signal. It is a disassembled perspective view which shows the inclination sensor by 6th Embodiment. FIG. 20 is a cross-sectional view of the tilt sensor as seen from the direction of arrows XVII-XVII in FIG. 19. It is sectional drawing which looked at the inclination sensor from the arrow XVIII-XVIII direction in FIG. It is a top view which shows the inclination sensor in FIG. 16 in the state which excluded the cover body. It is explanatory drawing which shows the positional relationship of the movable body in FIG. 16, and a magnetoelectric conversion element. It is a front view which shows the magnetoresistive sensor of a magnetoelectric conversion element. It is an equivalent circuit diagram which shows a magnetoelectric conversion element. It is sectional drawing of the position similar to FIG. 17 which shows the inclination sensor by 7th Embodiment. FIG. 24 is a cross-sectional view of the tilt sensor as seen from the direction of arrows XXIV-XXIV in FIG. FIG. 24 is a plan view showing the tilt sensor in FIG. 23 in a state where a lid is omitted. It is sectional drawing of the same position as FIG. 11 which shows the inclination sensor by 8th Embodiment. It is explanatory drawing which shows a geomagnetic vector, Comprising: (a) shows the geomagnetic vector of the whole earth, (b) shows the geomagnetic vector near the earth surface of the northern hemisphere side. It is explanatory drawing which shows the rotational torque by the geomagnetism which acts on a movable body in the inclination sensor by 8th Embodiment. In the tilt sensor according to the fourth embodiment, when the magnetization in the movable body is reversed in polarity from the eighth embodiment, it is an explanatory diagram showing the rotational torque due to geomagnetism acting on the movable body. It is sectional drawing of the position similar to FIG. 2 which shows the inclination sensor by a 1st modification. It is sectional drawing of the position similar to FIG. 2 which shows the inclination sensor by a 2nd modification. It is sectional drawing of the position similar to FIG. 2 which shows the inclination sensor by a 3rd modification. It is sectional drawing of the same position as FIG. 2 which shows the inclination sensor by a 4th modification.

Hereinafter, an example in which the magnetic flux detection sensor according to the embodiment of the present invention is applied to a tilt sensor will be described in detail with reference to the accompanying drawings.

1 to 5 show a tilt sensor 1 according to the first embodiment. The tilt sensor 1 is composed of a casing 2, a magnetoelectric conversion element 8, and a movable body 12, which will be described later.

The casing 2 is a nonmagnetic container formed using a nonmagnetic material such as an insulating resin material. The casing 2 includes a casing main body 3 formed in a substantially cylindrical shape with a bottom, and a lid body 4 that covers an upper side that serves as an opening of the casing main body 3.

The height of the casing body 3 in the vertical direction is several mm (for example, about 9 mm), and the cross-sectional shape in the horizontal plane is a substantially circular shape with an outer diameter of several mm (for example, about 9 mm). In addition, a concave portion 3A that is recessed in a substantially hemispherical shape (bowl shape) is formed on the upper side of the casing body 3, and a cylindrical male fitting portion 3B is integrated upward at the opening edge of the concave portion 3A. Is formed.

The surface (exposed surface) of the recess 3A is a concave curved surface 5 that opens upward. The concave curved surface 5 is formed of, for example, a hemispherical surface, and the radius of curvature r1 is larger than the radius of curvature r2 of the sliding surface 13 of the movable body 12 described later.

The lid body 4 is formed in a substantially disc shape, and a cylindrical female fitting portion 4A is integrally formed on the outer peripheral edge thereof downward. By fitting and inserting the male fitting portion 3B of the casing body 3 into the female fitting portion 4A, the lid body 4 is attached to the casing body 3, and the substantially hemispherical shape is provided between the casing body 3 and the lid body 4. The movable body accommodating space 6 is formed.

Further, a substantially cylindrical rod portion 7 extending downward toward the deepest portion 5A of the concave curved surface 5 is provided at the center portion of the lid body 4. In addition, the lower end part of the rod part 7 is formed in the substantially hemispherical shape. By providing the rod portion 7, it is possible to prevent a movable body 12, which will be described later, from being separated from the concave curved surface 5, and to prevent the movable body 12 from being reversed upside down in the movable body accommodating space 6.

The magnetoelectric conversion element 8 composed of a magnetoresistive element, a Hall element, etc. constitutes a magnetic flux density detection means, and outputs a detection signal Vout corresponding to the magnetic flux density (magnetic field) in the height direction of the casing 2, for example. The magnetoelectric conversion element 8 is provided inside the casing body 3 positioned below the deepest part 5A of the concave curved surface 5 by a minute dimension δ. The minute dimension δ is set in the range of several hundred μm to several mm, for example, about δ = 1 mm. In addition, the magnetoelectric conversion element 8 is disposed at a position facing the sliding surface 13 of the movable body 12 accommodated in the movable body accommodating space 6. A magnetic flux φ from the movable body 12 is applied to the magnetoelectric conversion element 8 via the sliding surface 13 of the movable body 12. Thereby, the magnetoelectric conversion element 8 detects a change in magnetic flux density caused by the sliding of the movable body 12.

The magnetoelectric transducer 8 is electrically connected to a ground terminal 9 for connection to an external ground, and is electrically connected to a drive voltage terminal 10 for supplying a drive voltage Vdd. Furthermore, a signal output terminal 11 for outputting a detection signal Vout such as a voltage is electrically connected to the magnetoelectric conversion element 8. The ground terminal 9, the drive voltage terminal 10, and the signal output terminal 11 are formed of, for example, a conductive metal material, embedded in the casing body 3, and part of the ground terminal 9, projecting downward from the lower surface side of the casing body 3. Yes.

The movable body 12 is formed using a magnetic material such as ferrite, for example, and is formed into a substantially hemispherical magnet (permanent magnet). A sliding surface 13 made of a downward convex curved surface is formed on the bottom side of the movable body 12, and a flat upper surface 14 is formed on the upper side of the movable body 12. As a result, the movable body 12 has a maximum thickness at the apex portion 12A of the sliding surface 13 that is substantially hemispherical, and approaches the upper surface peripheral portion 12B of the upper surface 14 from the apex portion 12A along the sliding surface 13. The thickness gradually decreases.

The movable body 12 is magnetized so that the sliding surface 13 and the upper surface 14 have opposite polarities, for example, the sliding surface 13 is an N pole and the upper surface 14 is an S pole. As a result, a magnetic flux φ is generated in the normal direction of the sliding surface 13 of the movable body 12. The magnetic flux density around the apex portion 12A where the thickness of the movable body 12 is maximum increases, and the magnetic flux density gradually decreases as it approaches the upper peripheral portion 12B where the thickness becomes thinner.

The movable body 12 is accommodated in the movable body accommodation space 6 of the casing 2 with the sliding surface 13 facing downward so that the concave curved surface 5 of the casing 2 and the sliding surface 13 of the movable body 12 come into contact with each other and can slide. For this reason, when the casing 2 is tilted from the horizontal state, the movable body 12 slides and displaces inside the movable body accommodating space 6 along the concave curved surface 5.

Further, since the movable body 12 has a hemispherical shape protruding downward, the upper surface 14 is stationary in a horizontal state based on its weight balance. Therefore, the positional relationship between the apex portion 12A of the movable body 12 and the magnetoelectric conversion element 8 changes according to the inclination angle θ of the casing 2, and the magnetic flux φ applied from the movable body 12 to the magnetoelectric conversion element 8 The direction of is also changing.

The antistatic means 15 prevents the charging that occurs when the casing 2 and the movable body 12 come into contact with each other. The antistatic means 15 is formed by an antistatic coating film 15A formed on the concave curved surface 5 of the casing 2, and an antistatic coating film 15B formed on the entire surface of the movable body 12 including the sliding surface 13 and the upper surface 14. ing. These

antistatic coating films

15A and 15B are formed of a thin film made of a surfactant. Examples of the surfactant include an anionic (anionic surfactant), a cationic (cationic surfactant), a zwitterionic (anionic and cationic amphoteric type), and a nonionic (nonionic surfactant). ) Etc. are used.

The

antistatic coating films

15A and 15B can take in moisture in the air due to the hydrophilicity of the surfactant. As a result, the surfaces of the

antistatic coating films

15A and 15B can be brought into a low resistance state, so that static electricity generated by contact can be quickly released into the air, and charging of the casing 2 and the movable body 12 is prevented. be able to. In addition, in order to reduce the contact resistance between the concave curved surface 5 of the casing 2 and the sliding surface 13 of the movable body 12, the antistatic coating films 15 </ b> A and 15 </ b> B are formed on a smooth surface subjected to a smoothing process. preferable.

The tilt sensor 1 according to the present embodiment has the above-described configuration, and the operation thereof will be described next.

First, when the casing 2 is in a horizontal state, the movable body 12 is disposed on the deepest part 5A side of the concave curved surface 5 as a steady position. Specifically, the movable body 12 is supported by the concave curved surface 5 in a state where the apex portion 12A of the movable body 12 is in contact with the deepest portion 5A of the concave curved surface 5. At this time, the apex portion 12 </ b> A having a high magnetic flux density in the movable body 12 is disposed at a position directly above the magnetoelectric conversion element 8. Therefore, a magnetic flux φ is applied to the magnetoelectric conversion element 8 by the movable body 12 along the vertical direction that is the height direction of the casing 2. For this reason, the magnetoelectric transducer 8 outputs the largest detection signal Vout according to the magnetic flux density in the Z-axis direction.

Next, when the casing 2 is tilted and tilted from the horizontal state, the movable body 12 is displaced from the steady position along the concave curved surface 5 and moves toward the lowest position of the movable body accommodating space 6. . Therefore, the apex portion 12A having a high magnetic flux density in the movable body 12 is separated from the deepest portion 5A of the concave curved surface 5 in accordance with the inclination angle θ of the casing 2, and the uppermost peripheral portion having a low magnetic flux density is included in the deepest portion 5A. 12B approaches. Therefore, the magnetic flux density applied from the movable body 12 to the magnetoelectric conversion element 8 decreases according to the inclination angle θ.

The magnetoelectric conversion element 8 detects the magnetic flux density in the direction inclined by the inclination angle θ with respect to the vertical direction, and outputs a detection signal Vout corresponding to the magnetic flux density. As a result, the magnetoelectric transducer 8 outputs the detection signal Vout corresponding to the inclination angle θ, and the detection signal Vout gradually decreases as the inclination angle θ increases.

Next, when the casing 2 is returned to the horizontal state, the movable body 12 is displaced toward the deepest part 5A along the concave curved surface 5, and the apex part 12A returns to the steady position where it contacts the deepest part 5A. To do. Thereby, the magnetic flux density applied to the magnetoelectric conversion element 8 increases again, and the magnetoelectric conversion element 8 outputs the largest detection signal Vout corresponding to the magnetic flux density in the vertical direction.

In the present embodiment, the movable body 12 is formed in a hemispherical shape having a hemispherical sliding surface 13, and the sliding surface 13 is slidably supported by the concave curved surface 5 having a hemispherical surface. For this reason, the magnetic flux density applied to the magnetoelectric conversion element 8 can be changed according to the inclination angle θ of the casing 2, and the linearity of the detection signal Vout with respect to the inclination angle θ can be enhanced.

In order to confirm the effect of improving linearity, the inclination sensor 1 according to the present embodiment was compared with the inclination sensor 21 as a comparative example shown in FIG. For the

tilt sensors

1 and 21, the relationship between the tilt angle θ and the magnetic flux density in the tilt angle θ direction was measured, and the comparison result is shown in FIG.

A casing 22 of a tilt sensor 21 as a comparative example shown in FIG. 6 includes a casing body 23 and a lid body 24 as in the tilt sensor 1 of the first embodiment, and the casing body 23 has a concave curved surface 25. It was set as the structure provided with the movable body accommodation space 26 which has. The movable body 27 is formed of a thick disk-shaped (columnar) magnet as in Patent Document 2, and the circular lower surface 27A and upper surface 27B are magnetized in opposite polarities. .

In the case of the tilt sensor 21, as indicated by a broken line in FIG. 7, the magnetic flux density changes greatly when the tilt angle θ is between 20 ° and 30 °, and the magnetic flux density has a non-linear characteristic with respect to the tilt angle θ. This is because the movable body 27 is formed in a thick disk shape, so that the magnetoelectric conversion element 8 is in the case where the magnetoelectric conversion element 8 is located near the center portion of the lower surface 27A and in the case where it is located away from the center portion. This is because the magnetic flux density applied to is greatly changed.

On the other hand, in the case of the tilt sensor 1, as shown by the solid line in FIG. 7, when the tilt angle θ is in the range from 0 ° to about 50 °, the magnetic flux density decreases uniformly as the tilt angle θ increases. The magnetic flux density has a characteristic close to linear with respect to the tilt angle θ. This is because the movable body 12 is formed in a hemispherical shape, so that the magnetic flux density is high around the apex portion 12A where the thickness of the movable body 12 is maximum, and the magnetic flux density becomes closer to the upper peripheral portion 12B where the thickness is thin. This is because is gradually reduced. In the present embodiment, as the inclination angle θ of the casing 2 increases, the position of the sliding surface 13 facing the magnetoelectric conversion element 8 is displaced from the apex portion 12A toward the upper peripheral portion 12B. For this reason, the magnetic flux density can be changed according to the inclination angle θ within the angle range where the sliding surface 13 of the movable body 12 and the magnetoelectric conversion element 8 face each other, and the linearity of the detection signal Vout corresponding to the magnetic flux density is increased. Can be increased.

In the present embodiment, the apex portion 12A of the movable body 12 only needs to be displaced with respect to the magnetoelectric conversion element 8. Therefore, the movable body accommodating space 6 of the casing 2 has a volume that allows the movable body 12 to be rotationally displaced. If there is enough. For this reason, the volume of the movable body accommodation space 6 can be brought close to the volume of the movable body 12, and the inclination sensor 1 can be reduced in size.

Furthermore, since the antistatic means 15 for preventing charging of the casing 2 and the movable body 12 is provided, when the movable body 12 is slid on the concave curved surface 5, the concave curved surface 5 of the casing 2 and the sliding surface 13 of the movable body 12 are provided. Charges are not accumulated by contact or friction. For this reason, even when the small movable body 12 is slid on the concave curved surface 5, the slidability of the movable body 12 can be maintained without being affected by the accumulated electric charge, and the detection accuracy and sensitivity can be reduced. Can be prevented.

In the first embodiment, the

antistatic coating films

15A and 15B are formed using a surfactant. However, the present invention is not limited to this, and the antistatic coating film may be formed using, for example, a conductive material. As the conductive material, a resin material such as sicoxane or polymer may be used, or a conductive paint type or conductive metal may be used. When using a conductive metal, a metal thin film may be formed by vapor deposition, plating, or the like, and the metal thin film may be used as an antistatic coating film.

When an antistatic coating film is formed using a conductive material, charging can be prevented by this conductive material, and even if it is charged, it can be immediately discharged by the antistatic coating film. While the surfactant does not function when the humidity is low, the antistatic coating film made of a conductive material can exhibit an antistatic effect even in such a situation. Furthermore, since the movable body and the non-magnetic container come into contact with each other, both have the same potential, so that the electrostatic force due to static electricity does not work.

Next, FIG. 8 shows a second embodiment of the present invention. The feature of this embodiment is that the casing and the movable body are formed of a low resistance material as an antistatic means. In the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

The inclination sensor 31 includes a casing 32, a magnetoelectric conversion element 8, and a movable body 40 in substantially the same manner as the inclination sensor 1 according to the first embodiment.

The casing 32 is formed in substantially the same manner as the casing 2 according to the first embodiment, and includes a casing main body 33 and a lid body 34. A concave portion 33A recessed in a hemispherical shape is formed on the upper side of the casing body 33, and a concave curved surface 35 formed of a hemispherical surface opened upward is formed on the surface of the concave portion 33A. A cylindrical male fitting portion 33B is formed at the opening edge of the concave curved surface 35, and the male fitting portion 33B is fitted and inserted into the female fitting portion 34A of the lid 34. Thereby, a movable body accommodating space 36 is formed between the casing body 33 and the lid body 34. Further, a rod portion 37 that is substantially the same as the rod portion 7 according to the first embodiment is provided at the central portion of the lid 34.

Further, the casing body 33 is provided with a magnetoelectric conversion element 8 positioned below the deepest portion 35A of the concave curved surface 35, and a ground terminal 9 and a drive voltage terminal electrically connected to the magnetoelectric conversion element 8 are provided. 10 and a signal output terminal 11 are attached.

The casing body 33 includes a low resistance portion 38 including a concave curved surface 35 and an insulating portion 39 that covers the periphery of the magnetoelectric conversion element 8, the drive voltage terminal 10, and the signal output terminal 11 as a portion other than the low resistance portion 38. ing. The low resistance portion 38 is formed using, as a low resistance material, for example, a conductive resin material made of polyphenylene sulfide resin (PPS), polyamide resin, or tetrafluoroethylene resin containing a conductive carbon filler or the like. . As this conductive resin material, for example, a material having a resistivity of 10 ¹² Ωcm or less, preferably 10 ¹⁰ Ωcm or less is used. In addition, a ground terminal 9 is implanted in the low resistance portion 38, and both are electrically connected.

On the other hand, the insulating portion 39 is formed of an insulating resin material such as polyphenylene sulfide resin in which, for example, a carbon filler is omitted as an insulating material. A magnetoelectric conversion element 8, a drive voltage terminal 10, and a signal output terminal 11 are embedded in the insulating portion 39. The insulating portion 39 electrically insulates the drive voltage terminal 10 and the signal output terminal 11 from the ground terminal 9.

The movable body 40 is formed using a magnetic material, and is formed into a substantially hemispherical magnet (permanent magnet). The movable body 40 is formed using a low resistance material having a resistivity of 10 ¹² Ωcm or less, preferably 10 ¹⁰ Ωcm or less.

The movable body 40 is formed in substantially the same manner as the movable body 12 according to the first embodiment. For this reason, a sliding surface 41 formed of a downward convex curved surface is formed on the bottom side of the movable body 40, and a flat upper surface 42 is formed on the upper side.

Further, in the movable body 40, the sliding surface 41 and the upper surface 42 are magnetized in opposite polarities. The magnetic flux density around the apex portion 40A where the thickness of the movable body 40 is thicker increases, and the magnetic flux density gradually decreases as it approaches the thin upper surface peripheral portion 40B.

The antistatic means 43 prevents charging that occurs when the casing 32 and the movable body 40 come into contact with each other. In the antistatic means 43, the low resistance portion 38 and the movable body 40 of the casing body 33 are formed using a low resistance material. As a result, the antistatic means 43 can prevent the casing 32 and the movable body 40 from being charged by the low resistance material, and can immediately remove the charge even if it is temporarily charged.

Thus, in the second embodiment, the same operational effects as those in the first embodiment can be obtained. In particular, in the second embodiment, the antistatic means 43 is configured by forming the low resistance portion 38 and the movable body 40 of the casing body 33 using a low resistance material. For this reason, compared with 1st Embodiment, the formation process of a coating film can be skipped and productivity can be improved.

Further, since the ground terminal 9 of the magnetoelectric transducer 8 is embedded in the low resistance portion 38 of the casing 32 and the ground terminal 9 and the low resistance portion 38 are electrically connected, the low resistance portion 38 of the casing 32 is connected through the ground terminal 9. Can be connected to an external ground. For this reason, the casing 32 and the movable body 40 can be held at the ground potential, and the effects of charging and discharging can be enhanced.

Next, FIG. 9 shows a third embodiment of the present invention. The feature of this embodiment is that the casing and the movable body are made of substantially the same material in the charge train as the antistatic means. In the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

The tilt sensor 51 is configured by a casing 52, a magnetoelectric conversion element 8, and a movable body 58 in substantially the same manner as the tilt sensor 1 according to the first embodiment.

The casing 52 is formed in substantially the same manner as the casing 2 according to the first embodiment, and includes a casing body 53 and a lid body 54. The casing 52 is formed using an insulating resin material such as polyphenylene sulfide resin (PPS), polyamide resin, or tetrafluoroethylene resin as a nonmagnetic material.

On the upper side of the casing body 53, a concave portion 53A recessed in a hemispherical shape is formed, and a concave curved surface 55 made of a hemispherical surface opened upward is formed on the surface of the concave portion 53A. A cylindrical male fitting portion 53B is formed at the opening edge of the concave curved surface 55, and the male fitting portion 53B is fitted and inserted into the female fitting portion 54A of the lid 54. Thereby, a movable body accommodating space 56 is formed between the casing main body 53 and the lid body 54. Further, a rod portion 57 that is substantially the same as the rod portion 7 according to the first embodiment is provided at the central portion of the lid 54.

Further, the casing main body 53 is provided with a magnetoelectric conversion element 8 positioned below the deepest portion 55A of the concave curved surface 55, and a ground terminal 9 and a drive voltage terminal electrically connected to the magnetoelectric conversion element 8. 10 and a signal output terminal 11 are attached.

The movable body 58 is formed using a material in which the casing 52 and the charge train are substantially the same. Specifically, the movable body 58 is formed of a bond magnet (plastic magnet) in which a magnetic material powder such as ferrite is mixed with the same resin material as the casing 52 (for example, polyphenylene sulfide resin).

At this time, the content of the magnetic powder is determined according to the magnetization strength of the movable body 58. On the other hand, from the viewpoint of antistatic, it is preferable that the magnetic powder is not deposited on the surface of the movable body 58 as much as possible. For this reason, the content of the magnetic powder is set to a value as small as possible within a range where the strength of magnetization is acceptable.

The movable body 58 is formed in substantially the same manner as the movable body 12 according to the first embodiment. For this reason, a sliding surface 59 made of a downward convex curved surface is formed on the bottom side of the movable body 58, and a flat upper surface 60 is formed on the upper side.

In the movable body 58, the sliding surface 59 and the upper surface 60 are magnetized in opposite polarities. The magnetic flux density around the apex portion 58A where the thickness of the movable body 58 is thick increases, and the magnetic flux density gradually decreases as the thickness approaches the thin upper surface peripheral portion 58B.

The antistatic means 61 prevents charging that occurs when the casing 52 and the movable body 58 come into contact with each other. In the antistatic means 61, the casing 52 and the movable body 58 are formed using materials having substantially the same charge train. As a result, the antistatic means 61 can prevent the casing 52 and the movable body 58 from being charged, and can immediately remove the charge even if it is temporarily charged.

Thus, in the third embodiment, the same operation and effect as in the first embodiment can be obtained. In particular, in the third embodiment, as the antistatic means 61, the casing 52 and the movable body 58 are formed of substantially the same material in the charge train, so that frictional charging can be almost eliminated.

Next, FIGS. 10 to 12 show a fourth embodiment of the present invention. The feature of the present embodiment is that a chamfered portion is provided at the peripheral portion of the upper surface of the movable body.

The inclination sensor 71 is configured by a casing 72, a magnetoelectric conversion element 78, and a movable body 84 in substantially the same manner as the inclination sensor 1 according to the first embodiment.

The casing 72 is a nonmagnetic container formed using a nonmagnetic material such as a resin material. The casing 72 includes a casing main body 73 formed in a substantially cylindrical shape with a bottom, and a lid body 74 that covers the upper side serving as an opening of the casing main body 73. The casing main body 73 and the lid 74 are formed in substantially the same manner as the casing main body 3 and the lid 4 according to the first embodiment.

The height of the casing body 73 in the vertical direction is about several mm, and the cross-sectional shape in the horizontal plane is a substantially circular shape with an outer diameter of several mm. A concave portion 73A that is recessed in a substantially hemispherical shape is formed on the upper side of the casing body 73, and a cylindrical male fitting portion 73B is integrally formed at the opening edge of the concave portion 73A.

The surface (exposed surface) of the recess 73A is a concave curved surface 75 that opens upward. On the deepest side of the concave curved surface 75, a bottom surface portion 75A that is a small circular flat surface parallel to the horizontal surface is formed. Further, the substantially hemispherical surface of the recess 73A and the outer periphery of the bottom surface portion 75A are connected by a bottom surface connection portion 75B having a truncated conical shape whose diameter is reduced in the downward direction. As a result, the concave curved surface 75 is formed in a substantially hemispherical shape as a whole.

These bottom surface portion 75A and bottom surface connection portion 75B support a sliding surface 85 of a movable body 84, which will be described later, in a state close to point contact. For this reason, even when the inclination angle θ is small, the frictional resistance between the concave curved surface 75 and the movable body 84 can be reduced and the movable body 84 can be easily slid. Further, since the bottom surface portion 75A that is a flat surface is provided on the deepest side of the concave curved surface 75, when the casing 72 is returned to the horizontal state, the movable body 84 is reliably returned to the bottom surface portion 75A that is in the steady position. Can do.

The lid body 74 is formed in a substantially disc shape, and a cylindrical female fitting portion 74A is integrally formed on the outer peripheral edge thereof downward. By fitting and inserting the male fitting portion 73B of the casing body 73 into the female fitting portion 74A, the lid body 74 is attached to the casing body 73, and the substantially hemispherical shape is formed between the casing body 73 and the lid body 74. The movable body accommodating space 76 is formed. In addition, a rod portion 77 substantially the same as the rod portion 7 according to the first embodiment is provided at the central portion of the lid 74.

The magnetoelectric conversion element 78 constitutes a magnetic flux density detector, and outputs a detection signal Vout corresponding to the magnetic flux density in the height direction of the casing 72, for example. The magnetoelectric conversion element 78 is provided in the casing body 73 so as to be several hundred μm to several mm below the bottom surface portion 75 A of the concave curved surface 75, and the sliding of the movable body 84 in the movable body accommodating space 76. It is disposed at a position facing the surface 85. Then, the magnetic flux φ from the movable body 84 is applied to the magnetoelectric conversion element 78 through the sliding surface 85. Thereby, the magnetoelectric conversion element 78 detects a change in magnetic flux density caused by the sliding of the movable body 84. The magnetoelectric conversion element 78 is electrically connected to a ground terminal 79, a drive voltage terminal 80, and a signal output terminal 81 attached to the casing main body 73, as in the first embodiment.

The casing main body 73 includes a low resistance portion 82 including a concave curved surface 75, a magnetoelectric conversion element 78, and a drive voltage terminal 80 as portions other than the low resistance portion 82, similarly to the casing main body 33 according to the second embodiment. And an insulating portion 83 that covers the periphery of the signal output terminal 81. The low resistance portion 82 is formed using, for example, a conductive resin material as a low resistance material. A ground terminal 79 is implanted in the low resistance portion 82 and both are electrically connected. On the other hand, the insulating part 83 is formed of an insulating resin material as an insulating material. A magnetoelectric conversion element 8, a drive voltage terminal 10, and a signal output terminal 11 are embedded in the insulating portion 83. The insulating portion 83 electrically insulates the drive voltage terminal 80 and the signal output terminal 81 from the ground terminal 79.

The movable body 84 is formed using a low-resistance magnetic material, like the movable body 40 according to the second embodiment, and is formed into a substantially hemispherical magnet (permanent magnet). In the movable body 84, a sliding surface 85 made of a downward convex curved surface is formed on the bottom side, and the upper surface 86 is a flat surface on the upper side, almost like the movable body 12 according to the first embodiment. Is formed. As a result, the movable body 84 has a maximum thickness at the apex portion 84A of the sliding surface 85 that is substantially hemispherical, and gradually decreases in thickness as it approaches the upper surface peripheral portion 84B of the upper surface 86 from the apex portion 84A. ing.

The movable body 84 is magnetized so that the sliding surface 85 and the upper surface 86 have opposite polarities. Thereby, the movable body 84 generates the magnetic flux φ in the normal direction of the sliding surface 85, for example. In addition, the magnetic flux density increases around the apex portion 84A where the thickness of the movable body 84 is maximum, and the magnetic flux density gradually decreases as it approaches the upper peripheral portion 84B where the thickness is reduced.

The movable body 84 is accommodated in the movable body accommodating space 76 of the casing 72 with the sliding surface 85 facing downward so that the concave curved surface 75 of the casing 72 and the sliding surface 85 of the movable body 84 can contact and slide. . For this reason, when the casing 72 is tilted from the horizontal state, the movable body 84 slides and displaces inside the movable body accommodation space 76 along the concave curved surface 75.

Further, since the movable body 84 has a hemispherical shape protruding downward, the upper surface 86 is stationary in a horizontal state based on its weight balance. Therefore, the distance between the apex portion 84A of the movable body 84 and the magnetoelectric conversion element 78 changes according to the inclination angle θ of the casing 72, and the magnetic flux φ applied from the movable body 84 to the magnetoelectric conversion element 78 is changed. The direction also changes.

Also, the upper surface peripheral edge portion 84B of the movable body 84 is rounded in an arc shape to form a chamfered portion 87. As a result, the concentration of the magnetic flux φ at the upper peripheral edge portion 84B around the chamfered portion 87 is alleviated.

Furthermore, the movable body 84 is formed with a recessed portion 88 that is located in the center of the upper surface 86 and is recessed in a substantially circular shape. By providing the recess 88, the center of gravity of the movable body 84 moves to the apex portion 84A side, and the stability of the movable body 84 is enhanced.

Antistatic means 89 prevents charging that occurs when casing 72 and movable body 84 touch each other. In the antistatic means 89, the low resistance portion 82 and the movable body 84 of the casing body 73 are formed using a low resistance material. Thereby, the antistatic means 89 can prevent the casing 72 and the movable body 84 from being charged by the low resistance material, and can immediately remove the charge even if it is temporarily charged.

Thus, in the fourth embodiment, it is possible to obtain the same effects as those in the first and second embodiments. In particular, since the chamfered portion 87 is provided on the upper surface peripheral portion 84B of the movable body 84, the chamfered portion 87 alleviates the concentration of the magnetic flux φ at the upper surface peripheral portion 84B of the movable body 84, and the magnetoelectric conversion with respect to the tilt angle θ The range of linearity of the detection signal of the element 78 can be increased.

In addition, in order to confirm the effect of improving linearity, a comparison was made with the

tilt sensors

1 and 71 according to the first and fourth embodiments. For the

tilt sensors

1 and 71, the relationship between the tilt angle θ and the magnetic flux density in the tilt angle θ direction was measured, and the comparison result is shown in FIG.

In the case of the tilt sensor 1 of the first embodiment, as indicated by a broken line in FIG. 13, the magnetic flux density decreases as the tilt angle θ increases in the range where the tilt angle θ is smaller than 50 °, for example. On the other hand, in the range where the tilt angle θ is larger than 50 °, for example, the magnetic flux density does not decrease even if the tilt angle θ increases, and the magnetic flux density increases.

In the movable body 12 according to the first embodiment, the magnetic flux φ is concentrated at the upper peripheral portion 12B where the sliding surface 13 and the upper surface 14 intersect at an acute angle. Therefore, in the first embodiment, when the inclination angle θ increases, the upper surface peripheral portion 12B having a high magnetic flux density approaches the magnetoelectric conversion element 8, and therefore the magnetic flux density detected by the magnetoelectric conversion element 8 increases, and the inclination angle θ However, the non-linear range becomes narrower.

On the other hand, in the tilt sensor 71 of the fourth embodiment, the chamfered portion 87 is provided on the upper surface peripheral portion 84B of the movable body 84. Can be relaxed. For this reason, the magnetic flux density can be gradually reduced as the apex portion 84A approaches the upper surface peripheral portion 84B. As a result, in the case of the fourth embodiment, as indicated by a solid line in FIG. 13, even when the tilt angle θ exceeds 50 °, the magnetic flux density continues to decrease uniformly as the tilt angle θ increases, The range of the detectable tilt angle θ can be further expanded.

Next, FIG. 14 shows a fifth embodiment of the present invention. The feature of this embodiment is that the outer diameter of the movable body is set to a value close to the inner diameter of the concave curved surface. In the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

The tilt sensor 91 is configured by a casing 92, a magnetoelectric conversion element 8, and a movable body 100, almost the same as the tilt sensor 1 according to the first embodiment.

The casing 92 is composed of a casing main body 93 and a lid body 94 in substantially the same manner as the casing 2 according to the first embodiment. A concave portion 93A that is recessed in a hemispherical shape is formed on the upper side of the casing main body 93, and a concave curved surface 95 that is a hemispherical surface having an inner diameter dimension D1 is formed on the surface of the concave portion 93A. A cylindrical male fitting portion 93B is formed at the opening edge of the concave curved surface 95, and this male fitting portion 93B is fitted and inserted into the female fitting portion 94A of the lid 94. Thereby, a movable body accommodating space 96 is formed between the casing main body 93 and the lid 94. Further, a rod portion 97 that is substantially the same as the rod portion 7 according to the first embodiment is provided at the central portion of the lid 94.

Further, the casing main body 93 is provided with a magnetoelectric conversion element 8 positioned below the deepest portion 95A of the concave curved surface 95, and a ground terminal 9 and a drive voltage terminal electrically connected to the magnetoelectric conversion element 8. 10 and a signal output terminal 11 are attached.

The casing body 93 includes a low resistance portion 98 including a concave curved surface 95, and the magnetoelectric conversion element 8 and the drive voltage terminal 10 as portions other than the low resistance portion 98, similarly to the casing body 33 according to the second embodiment. And an insulating portion 99 that covers the periphery of the signal output terminal 11. The low resistance portion 98 is formed using, for example, a conductive resin material as a low resistance material. A ground terminal 9 is implanted in the low resistance portion 98 and both are electrically connected. On the other hand, the insulating part 99 is formed of an insulating resin material as an insulating material. A magnetoelectric conversion element 8, a drive voltage terminal 10 and a signal output terminal 11 are embedded in the insulating portion 99. The insulating portion 99 electrically insulates the drive voltage terminal 10 and the signal output terminal 11 from the ground terminal 9.

The movable body 100 is formed using a low-resistance magnetic material, and is formed into a substantially hemispherical magnet (permanent magnet). The movable body 100 is formed in substantially the same manner as the movable body 84 according to the fourth embodiment. For this reason, a sliding surface 101 made of a downward convex curved surface is formed on the bottom side of the movable body 100, and a flat upper surface 102 is formed on the upper side.

Further, in the movable body 100, the sliding surface 101 and the upper surface 102 are magnetized in opposite polarities. The magnetic flux density around the apex portion 100A where the thickness of the movable body 100 is thicker increases, and the magnetic flux density gradually decreases as it approaches the thin upper surface peripheral portion 100B.

The upper surface peripheral portion 100B of the movable body 100 is rounded in an arc shape to form a chamfered portion 103. In addition, a recessed portion 104 that is recessed in a substantially circular shape is formed on the center side of the upper surface 102 of the movable body 100. Further, the outer diameter D2 of the movable body 100 is set to a value close to the inner diameter D1 of the concave curved surface 95, for example, about 70 to 95% of the inner diameter D1. The movable body 100 is accommodated in the movable body accommodating space 96 of the casing 92 with the sliding surface 101 facing downward.

Antistatic means 105 prevents charging that occurs when casing 92 and movable body 100 come into contact with each other. In the antistatic means 105, the low resistance portion 98 of the casing body 93 and the movable body 100 are formed using a low resistance material. Thereby, the antistatic means 105 can prevent the casing 92 and the movable body 100 from being charged by the low resistance material, and can immediately remove the charge even if it is temporarily charged.

Thus, the fifth embodiment can provide the same effects as those of the first, second, and fourth embodiments. In particular, the outer diameter D2 of the movable body 100 is changed to the inner diameter D1 of the concave curved surface 95. Therefore, as shown in FIG. 15, the change amount of the magnetic flux density applied to the magnetoelectric transducer 8 with respect to the tilt angle θ can be increased. For this reason, the output range of the detection signal Vout of the magnetoelectric conversion element 8 can be expanded, and the detection sensitivity of the inclination angle θ can be increased.

In addition, since the outer diameter D2 of the movable body 100 is set to a value close to the inner diameter D1 of the concave curved surface 95, the entire inclination sensor 91 can be downsized by reducing the outer diameter D2 of the movable body 100. it can.

In the fifth embodiment, a movable body 100 similar to the movable body 84 according to the fourth embodiment is used. However, a movable body similar to the movable body 40 according to the second embodiment is used. It is good also as a structure. In the fifth embodiment, the concave curved surface 95 having the same shape as the concave curved surface 5 according to the first embodiment is used. However, the concave curved surface 75 according to the fourth embodiment has the same shape. A configuration using a concave curved surface may be adopted.

Next, FIG. 16 to FIG. 22 show a sixth embodiment of the present invention. The feature of this embodiment is anisotropy in which the detection output in the horizontal Y-axis direction is larger than the horizontal X-axis direction among the X-axis, Y-axis, and Z-axis that are orthogonal to each other. When using a magnetoelectric transducer, in order to obtain substantially the same detection output regardless of the direction, the concave curved surface of the movable body housing space is directed toward the Y axis direction compared to the X axis direction. It is formed by an anisotropic curved surface that is largely displaced.

The inclination sensor 111 is configured by a casing 112, a magnetoelectric conversion element 118, and a movable body 124 in substantially the same manner as the inclination sensor 71 according to the fourth embodiment.

The casing 112 is a nonmagnetic container formed using a nonmagnetic material such as a resin material. The casing 112 includes a casing main body 113 formed in a substantially cylindrical shape with a bottom, and a lid body 114 that covers the upper side serving as an opening of the casing main body 113.

The height of the casing body 113 in the vertical direction is about several mm, and the cross-sectional shape in a horizontal plane is a substantially circular shape with an outer diameter of several mm. In addition, a concave portion 113A that is recessed in a substantially semi-ellipsoidal shape is formed on the upper side of the casing main body 113, and a cylindrical male fitting portion 113B is integrally formed downward on the opening side of the concave portion 113A. Has been.

The surface (exposed surface) of the recess 113A is a concave curved surface 115 opened upward. The concave curved surface 115 is formed by an anisotropic curved surface having different cross-sectional shapes in the horizontal X-axis direction and the Y-axis direction among the X-axis, Y-axis, and Z-axis orthogonal to each other. Specifically, the concave curved surface 115 is formed by a half-shaped ellipsoidal surface in which the X-axis direction is a short axis and the Y-axis direction is a long axis.

By forming the concave curved surface 115 by an anisotropic curved surface, the casing 112 is formed in a shape in which the detection signal Vout having the same output level can be obtained from the magnetoelectric conversion element 118 when the casing 112 is inclined in any direction of the horizontal plane (XY plane). Has been.

The lid body 114 is formed in a substantially disc shape, and a cylindrical female fitting portion 114A is integrally formed on the outer peripheral edge thereof downward. By fitting and inserting the male fitting portion 113B of the casing main body 113 into the female fitting portion 114A, the lid body 114 is attached to the casing main body 113, and a substantially semi-elliptical shape is provided between the casing main body 113 and the lid body 114. A body-like movable body accommodating space 116 is formed. In addition, a rod portion 117 that is substantially the same as the rod portion 7 according to the first embodiment extending downward toward the deepest portion 115 </ b> A of the concave curved surface 115 is provided at the center portion of the lid body 114.

The casing main body 113 is provided with a magnetoelectric conversion element 118 positioned below the deepest portion 115A of the concave curved surface 115, and a ground terminal 119, a drive voltage terminal 120, and the like electrically connected to the magnetoelectric conversion element 118, and A signal output terminal 121 is attached.

The casing body 113 includes a low resistance portion 122 including a concave curved surface 115, a magnetoelectric conversion element 118, and a driving voltage terminal 120 as portions other than the low resistance portion 122, as in the casing body 33 according to the second embodiment. And an insulating part 123 that covers the periphery of the signal output terminal 121. The low resistance portion 122 is formed using, for example, a conductive resin material as a low resistance material. A ground terminal 119 is implanted in the low resistance portion 122, and both are electrically connected. On the other hand, the insulating part 123 is formed of an insulating resin material as an insulating material. A magnetoelectric conversion element 118, a drive voltage terminal 120, and a signal output terminal 121 are embedded in the insulating portion 123. The insulating portion 123 electrically insulates the drive voltage terminal 120 and the signal output terminal 121 from the ground terminal 119.

Next, a case where a magnetic thin film magnetoresistive element is used as the magnetoelectric conversion element 118 serving as a magnetic flux density detection means will be described. In order to reduce the size, the magnetoelectric conversion element 118 is composed of an AMR-IC (Anisotropic Magneto Resistance Integrated Circuit) in which a magnetoresistive sensor 118A composed of a magnetic thin film magnetoresistive element and a differential amplifier 118B are integrated. ing. The magnetoresistive sensor 118A is composed of four magnetoresistive elements R1 to R4. The magnetoresistive elements R1 to R4 are formed using means such as vapor deposition of a magnetoresistive material such as indium antimony (InSb) on the sensor substrate S. The magnetoresistive elements R1 to R4 are formed by connecting and arranging a plurality of elongated patterns in a meander shape. The magnetoresistive element R1 is arranged on the upper left side of the sensor substrate S and the magnetoresistive element R4 is arranged on the lower right side of the sensor substrate S. The magnetoresistive element R2 is arranged at the lower left side of the sensor substrate S and the magnetoresistive element R3 is arranged at the upper right side of the sensor substrate S.

The magnetoresistive elements R1 to R4 are bridge-connected, and the input terminal of the differential amplifier 118B is connected to a connection point between the magnetoresistive elements R1 and R2 and a connection point between the magnetoresistive elements R3 and R4. A connection point between the magnetoresistive elements R2 and R4 is electrically connected to a ground terminal 119 for connection to an external ground GND. A driving voltage terminal 120 for supplying a driving voltage Vdd is electrically connected to a connection point between the magnetoresistive elements R1 and R3. Further, the output terminal of the differential amplifier 118B is electrically connected to a signal output terminal 121 that outputs a detection signal Vout such as a voltage. The differential amplifier 118B differentially amplifies the potential difference generated between the two input terminals and outputs the detection signal Vout.

In the sensor substrate S, the direction connecting the magnetoresistive elements R1 and R2 (R3 and R4) coincides with the vertical direction (Z-axis direction), and the magnetoresistive elements R1 and R3 (R2 and R4) are connected. The direction is arranged so as to coincide with the horizontal direction (X-axis direction). The resistance values of the magnetoresistive elements R1 and R4 change according to the change in the magnetic flux density in the horizontal direction (X-axis direction). The resistance values of the magnetoresistive elements R2 and R3 change according to the change in the magnetic flux density in the vertical direction (Z-axis direction).

When the magnetic flux density parallel to the XZ plane is applied to the sensor substrate S, the resistance values of the four magnetoresistive elements R1 to R4 all change. For this reason, when the casing 112 is tilted in the X-axis direction, the detection signal Vout changes, for example, in a positive / negative range of the drive voltage Vdd (−Vdd ≦ Vout ≦ Vdd).

On the other hand, when a magnetic flux density parallel to the XY plane is applied to the sensor substrate S, the resistance values of the remaining two magnetoresistive elements R1, R4 change, although the resistance values of the two magnetoresistive elements R2, R3 change. Hardly changes. For this reason, when the casing 112 is tilted in the Y-axis direction, the detection signal Vout changes within the range from the ground potential to the drive voltage Vdd (0 ≦ Vout ≦ Vdd).

As a result, the magnetoresistive sensor 118A has anisotropy in which the detection signal Vout when the magnetic flux is tilted in the Y-axis direction has a higher output level than the detection signal Vout when the magnetic flux φ is tilted in the X-axis direction. Output characteristics.

The magnetoelectric conversion element 118 is provided inside the casing main body 113 located several hundred μm to several mm below the deepest part 115A of the concave curved surface 115. That is, the magnetoelectric conversion element 118 is disposed at a position facing the sliding surface 125 of the movable body 124 accommodated in the movable body accommodating space 116.

The movable body 124 is formed using a low-resistance magnetic material, and is formed into a substantially hemispherical magnet (permanent magnet). In substantially the same manner as the movable body 84 according to the fourth embodiment, a sliding surface 125 having a downward convex curved surface is formed on the bottom side of the movable body 124, and an upper surface 126 having a flat surface on the upper side. Is formed. As a result, the movable body 124 has a maximum thickness at the apex portion 124A of the sliding surface 125 that is substantially hemispherical, and gradually decreases in thickness as it approaches the upper surface peripheral portion 124B of the upper surface 126 from the apex portion 124A. ing.

The movable body 124 is magnetized so that the sliding surface 125 and the upper surface 126 have opposite polarities. As a result, the magnetic flux φ is generated in the normal direction of the sliding surface 125 of the movable body 124. Note that the magnetic flux density increases around the apex portion 124A where the thickness of the movable body 124 is the maximum, and the magnetic flux density gradually decreases as it approaches the upper peripheral portion 124B where the thickness becomes thinner.

The movable body 124 is accommodated in the movable body accommodation space 116 of the casing 112 with the sliding surface 125 facing downward so that the concave curved surface 115 of the casing 112 and the sliding surface 125 of the movable body 124 can contact and slide. Yes. For this reason, when the casing 112 is tilted from the horizontal state, the movable body 124 slides and displaces inside the movable body accommodation space 116 along the concave curved surface 115.

The upper peripheral edge portion 124B of the movable body 124 is rounded in an arc shape to form a chamfered portion 127. In addition, the movable body 124 is formed with a recessed portion 128 that is located in the center of the upper surface 126 and is recessed in a substantially circular shape.

Antistatic means 129 prevents charging that occurs when casing 112 and movable body 124 come into contact with each other. In the antistatic means 129, the low resistance portion 122 and the movable body 124 of the casing body 113 are formed using a low resistance material. As a result, the antistatic means 129 can prevent the casing 112 and the movable body 124 from being charged by the low resistance material, and can immediately remove the charge even if it is temporarily charged.

In the sixth embodiment, the magnetoelectric transducer has anisotropy in which the detection signal Vout when the tilt sensor is tilted in the Y-axis direction has a higher output level than the detection signal Vout when tilted in the X-axis direction. 118 was used. On the other hand, the concave curved surface 115 of the movable body accommodating space 116 is formed by an ellipsoidal surface that largely displaces the movable body 124 in the Y-axis direction compared to the X-axis direction. Therefore, when the casing 112 is tilted in the X-axis direction, the displacement amount of the movable body 124 with respect to the tilt angle θ is increased when the casing 112 is tilted in the Y-axis direction, and the magnetoelectric conversion element 118 and the movable body. The positional change with the apex portion 124A of 124 can be increased.

For this reason, the change in the magnetic flux density applied to the magnetoelectric conversion element 118 is greater when the casing 112 is tilted in the Y-axis direction than when the casing 112 is tilted in the X-axis direction. That is, the magnetic flux density applied to the magnetoelectric transducer 118 from the movable body 124 is lowered when tilted in the Y-axis direction compared to when tilted in the X-axis direction at the same tilt angle θ, and the detection signal Vout The output level can be suppressed. As a result, the detection signal Vout of the magnetoelectric conversion element 118 when the casing 112 is inclined in the X-axis direction and the detection signal Vout of the magnetoelectric conversion element 118 when the casing 112 is inclined in the Y-axis direction are relative to the inclination angle θ. The output level can be made substantially equal. In the sixth embodiment, the same effects as those of the first, second, and fourth embodiments can be obtained.

Next, FIG. 23 to FIG. 25 show a seventh embodiment of the present invention. The feature of this embodiment is that the concave curved surface of the movable body accommodating space is a combination of a half-shaped ellipsoidal surface in which the X-axis direction is the short axis and the Y-axis direction is the long axis, and a hemispherical surface. This is because it is formed by an isotropic curved surface. Note that the half-shaped ellipsoidal surface and the hemispherical surface are combined while being in contact with each other at the center of the ellipsoidal surface. In the present embodiment, the same components as those in the sixth embodiment are denoted by the same reference numerals, and the description thereof is omitted.

The inclination sensor 131 is configured by a casing 132, a magnetoelectric conversion element 118, and a movable body 124 in substantially the same manner as the inclination sensor 111 according to the sixth embodiment.

The casing 132 is a nonmagnetic container formed using a nonmagnetic material such as a resin material. The casing 132 includes a casing main body 133 that is formed in a substantially cylindrical shape with a bottom, and a lid body 134 that covers an upper portion that is an opening of the casing main body 133.

The height of the casing body 133 in the vertical direction is about several mm, and the cross-sectional shape in a horizontal plane is a substantially circular shape with an outer diameter of several mm. In addition, a concave portion 133A that is recessed in a substantially semi-ellipsoidal shape is formed on the upper side of the casing body 133, and a cylindrical male fitting portion 133B is integrally formed at the opening edge of the concave portion 133A.

The surface (exposed surface) of the recess 133A is a concave curved surface 135 that opens upward, and is formed by an anisotropic curved surface having different cross-sectional shapes in the X-axis direction and the Y-axis direction. Specifically, the concave curved surface 135 is shorter than the length in the longitudinal direction of the halved ellipsoidal surface 135A in which the X-axis direction is the minor axis and the Y-axis direction is the major axis, and the ellipsoidal surface 135A. It is formed by an anisotropic curved surface combined with a hemispherical surface 135B having a diameter dimension D2b larger than the length dimension in the hand direction. At this time, the deepest part of the ellipsoidal surface 135A and the deepest part of the hemispherical surface 135B are arranged and formed so as to coincide with the deepest part 135C of the concave curved surface 135 to be formed. As a result, the ellipsoidal surface 135A and the hemispherical surface 135B are in contact with each other at the deepest portion 135C of the concave curved surface 135 to be formed, and the concave portion 133A is formed symmetrically with respect to the XZ plane and the YZ plane.

The major axis dimension D2a of the ellipsoidal surface 135A and the diameter dimension D2b of the hemispherical surface 135B are such that the magnetoelectric conversion is located below the deepest portion 135C of the concave curved surface 135 when the casing 132 is inclined in any direction of the XY plane. The elements 118 are selected so as to obtain a detection signal Vout having the same output level.

The lid 134 is formed in a substantially disc shape, and a cylindrical female fitting portion 134A is integrally formed on the outer peripheral edge thereof downward. By fitting and inserting the male fitting portion 133B of the casing main body 133 into the female fitting portion 134A, the lid body 134 is attached to the casing main body 133, and the half shape is formed between the casing main body 133 and the lid body 134. A movable body accommodating space 136 is formed by combining the ellipsoid and the substantially hemisphere. In addition, a rod portion 137 that is substantially the same as the rod portion 7 according to the first embodiment is provided at the central portion of the lid 134.

The casing main body 133 is provided with a magnetoelectric conversion element 118 positioned below the deepest part 135C of the concave curved surface 135, and a ground terminal 119, a drive voltage terminal 120, and A signal output terminal 121 is attached.

The casing main body 133 includes a low resistance portion 138 including a concave curved surface 135, a magnetoelectric conversion element 118, and a drive voltage terminal 120 as portions other than the low resistance portion 138, as in the casing main body 33 according to the second embodiment. And an insulating portion 139 that covers the periphery of the signal output terminal 121. The low resistance portion 138 is formed using, for example, a conductive resin material as a low resistance material. A ground terminal 119 is implanted in the low resistance portion 138, and both are electrically connected. On the other hand, the insulating part 139 is formed of an insulating resin material as an insulating material. A magnetoelectric conversion element 118, a drive voltage terminal 120, and a signal output terminal 121 are embedded in the insulating portion 139. The insulating portion 139 electrically insulates the drive voltage terminal 120 and the signal output terminal 121 from the ground terminal 119.

Antistatic means 140 prevents charging that occurs when casing 132 and movable body 124 come into contact with each other. In the antistatic means 140, the low resistance portion 138 and the movable body 124 of the casing body 133 are formed using a low resistance material. Thereby, the antistatic means 140 can prevent the casing 132 and the movable body 124 from being charged by the low resistance material, and can immediately remove the charge even if it is temporarily charged.

In the seventh embodiment, the concave curved surface 135 is formed by an anisotropic curved surface combining the ellipsoidal surface 135A and the hemispherical surface 135B. And the concave curved surface 135 can be reduced to reduce the frictional resistance. For this reason, the responsiveness of the movable body 124 with respect to the inclination angle θ can be improved, and the detection accuracy of the inclination angle θ can be improved. In the seventh embodiment, the same operational effects as those of the first, second, fourth, and sixth embodiments can be obtained.

In the sixth and seventh embodiments, the movable body 124 having the chamfered portion 127 is used. However, like the movable body 40 according to the second embodiment, the movable body without the chamfered portion is used. It is good also as a structure using a body. Also, in the sixth and seventh embodiments, similarly to the concave curved surface according to the fourth embodiment, a bottom surface portion that is a flat surface may be formed at the deepest portion of the concave curved surface.

Next, FIG. 26 shows an eighth embodiment of the present invention. The feature of the present embodiment is that when the movable body is in a steady position, when used in the northern hemisphere, the sliding surface of the movable body is magnetized to the N pole and the upper surface is magnetized to the S pole. In use, the sliding surface of the movable body is magnetized to the south pole and the upper surface is magnetized to the north pole. In the present embodiment, the same components as those in the fourth embodiment are denoted by the same reference numerals, and the description thereof is omitted.

The inclination sensor 151 is configured by a casing 72, a magnetoelectric conversion element 78, and a movable body 152 in substantially the same manner as the inclination sensor 71 according to the fourth embodiment.

The movable body 152 is formed using a low-resistance magnetic material, and is formed into a substantially hemispherical magnet (permanent magnet). The movable body 152 has a sliding surface 153 formed of a downward convex curved surface on the bottom side and an upper surface 154 that is a flat surface on the upper side.

Also, the upper surface peripheral portion 152B of the movable body 152 is rounded in an arc shape to form a chamfered portion 155. Further, the movable body 152 is formed with a recessed portion 156 that is located on the center side of the upper surface 154 and is recessed in a substantially circular shape.

The movable body 152 is accommodated in the movable body accommodating space 76 of the casing 72 with the sliding surface 153 facing downward. At this time, since the movable body 152 has a hemispherical shape protruding downward, the upper surface 154 is stationary in a horizontal state based on the weight balance.

Note that a geomagnetic vector from the south side to the north side is generated on the earth as shown in FIG. Except for the vicinity of the equator, the geomagnetic vectors are not parallel to the ground surface (horizontal plane), but are oblique to the ground surface. Specifically, as shown in FIG. 27B, the geomagnetic vector is a direction that pierces the ground surface on the northern hemisphere side, and a direction that exits from the ground surface on the southern hemisphere side (not shown). The angle between the ground surface and the geomagnetic vector is called the dip angle. The dip angle α is defined as positive when the geomagnetic vector is pierced toward the ground surface and negative when it is the direction leaving the ground surface. Therefore, the dip angle α is positive on the northern hemisphere side, and approaches + 90 ° as it approaches the north magnetic pole. It is negative on the southern hemisphere side and approaches -90 ° as it approaches the south magnetic pole.

In the magnetic flux detection sensor used on the northern hemisphere side, the movable body 152 is configured such that the sliding surface 153 is the north pole and the upper surface 154 is the south pole, and in the magnetic flux detection sensor used on the southern hemisphere side, the sliding surface 153 is. Are magnetized so that the sliding surface 153 and the upper surface 154 have opposite polarities so that the upper surface 154 becomes the N pole.

Also, the magnetic flux density around the apex portion 152A where the thickness of the movable body 152 is thicker increases, and the magnetic flux density gradually decreases as the thickness approaches the thin upper surface peripheral portion 152B.

As shown in FIG. 26, the antistatic means 157 prevents electrification that occurs when the casing 72 and the movable body 152 come into contact with each other. In the antistatic means 157, the low resistance portion 82 and the movable body 152 of the casing body 73 are formed using a low resistance material. As a result, the antistatic means 157 can prevent the casing 72 and the movable body 152 from being charged by the low resistance material, and can immediately remove the charge even if it is temporarily charged.

Next, on the assumption that it is used on the northern hemisphere side, an inclination sensor 151 using a movable body 152 in which the sliding surface 153 is magnetized to the N pole and the upper surface 154 is magnetized to the S pole, and the sliding surface 163 shown in FIG. The inclination sensor 161 using the movable body 162 having the upper surface 164 magnetized to the N pole will be compared. FIG. 29 shows a tilt sensor 161 in the fourth embodiment, in which the magnetization of the movable body 162 is opposite in polarity to that of the eighth embodiment. That is, the inclination sensor 151 and the inclination sensor 161 are exactly the same except for the polarity of magnetization in the movable body. For this reason, in FIG. 29, “a” is given to the reference numerals of the constituent elements corresponding to the eighth embodiment, and the description thereof is omitted.

The polarity of magnetization in the movable body 152 is the same as the vertical component of the geomagnetic vector, but the polarity of magnetization in the movable body 162 is opposite to the vertical component of the geomagnetic vector.

In general, when a magnet is placed in a magnetic field such that the azimuth needle rotates freely and the north pole of the azimuth needle points to magnetic north and the south pole faces southward, the magnetic field and the polarity of the magnet are matched. Magnetic force is generated. Therefore, as shown in FIG. 29, a magnetic force F2 that tries to turn over the movable body 162 acts on the movable body 162 that is magnetized in the direction opposite to the vertical component of the geomagnetic vector. On the other hand, the magnetic force F1 due to the geomagnetic vector also acts on the movable body 152 that is magnetized in the same direction as the vertical component of the geomagnetic vector. However, as shown in FIG. 28, the magnetic force F1 does not act in a direction in which the movable body 152 is turned over.

When the

inclination sensors

151 and 161 are to be reduced in size, the movable

body accommodating spaces

76 and 76a of the

movable bodies

152 and 162 are reduced accordingly. As a result, when the

tilt sensors

151 and 161 once tilted are returned to the horizontal state (steady state) and the

movable bodies

152 and 162 are returned to their steady positions, the movable body 162 is moved to the movable body 162. The acting magnetic force F2 may be inclined inside the movable body accommodating space 76a and caught by the movable body accommodating space 76a, and a state may not occur that does not return to the steady state. On the other hand, in the case of the movable body 152, since the magnetic force F2 to be turned over does not act on the movable body 152, even if the movable body accommodating space 76 is formed narrow, it is caught in the movable body accommodating space 76, and is in a steady state. It is unlikely that the situation will not return.

Although the eighth embodiment has been described by taking the case where it is applied to the fourth embodiment as an example, it may be applied to the first to third embodiments, and the fifth to seventh embodiments. It may be applied to the embodiment.

In the fourth to eighth embodiments, the antistatic means 89, 105, 129, 140, and 157 substantially the same as the antistatic means 43 according to the second embodiment are provided. The antistatic means 15 and 61 according to the third embodiment may be provided.

In the fourth to eighth embodiments, chamfered

portions

87, 103, 127, and 155 having arcuate cross sections are provided on the upper surface

peripheral portions

84B, 100B, 124B, and 152B of the

movable bodies

84, 100, 124, and 152, respectively. The configuration. However, the present invention is not limited to this. For example, like the inclination sensor 171 according to the first modification shown in FIG. 30, the upper peripheral portion 172B of the movable body 172 is chamfered to provide a chamfered portion 175 having a linear cross section. It is good also as a structure which provides. In this case, the movable body 172 includes a sliding surface 173 having a vertex portion 172A protruding downward and a flat upper surface 174.

Further, the chamfered portion 175 of the movable body 172 is configured to form a conical side surface that is inclined inward from the radially outer side of the movable body 172 toward the upper side of the movable body 172. A circumferential surface parallel to the vertical direction may be formed.

Further, in each of the above embodiments, the

movable bodies

12, 40, 58, 84, 100, 124, 152 have a thickness close to the radius of curvature of the sliding

surfaces

13, 41, 59, 85, 101, 125, 153 made of a hemispherical surface. It was set as the structure which has a size. However, the present invention is not limited to this, and the movable body 182 is made of a hemispherical surface within a range in which a desired magnetic flux density distribution can be obtained, such as the tilt sensor 181 according to the second modification shown in FIG. The surface 183 may have a thickness dimension smaller than the radius of curvature (for example, about half of the radius of curvature). In this case, the movable body 182 includes a sliding surface 183 having a vertex portion 182A protruding downward and a flat upper surface 184, and the thickness dimension thereof gradually decreases as the vertex portion 182A approaches the upper surface peripheral portion 182B. It is. Further, the movable body may have a thickness dimension larger than the radius of curvature of the sliding surface within a range in which rolling can be prevented.

In the fourth to eighth embodiments, the

movable bodies

84, 100, 124, 152 are located in the central part of the

upper surfaces

86, 102, 126, 154 and are recessed in the form of

cylinders

88, 104. 128, 156 are provided. However, the present invention is not limited to this. For example, like the tilt sensor 191 according to the third modification shown in FIG. 32, the movable body 192 is located at the center of the upper surface 194 and is recessed in a bowl shape. It is good also as a structure which provides. Even in this case, it is preferable that the movable body 192 includes the sliding surface 193 formed of a hemispherical surface, and the thickness dimension gradually decreases as the apex portion 192A approaches the upper surface peripheral portion 192B.

In the first to seventh embodiments, the

movable bodies

12, 40, 58, 84, 100, and 124 are configured by magnets. However, the present invention is not limited to this, and a configuration in which a magnet 205 serving as a generation source of the magnetic flux φ is provided in the casing 32 ′ separately from the movable body 202, as in the tilt sensor 201 according to the fourth modification shown in FIG. 33. It is good. In this case, the movable body 202 is formed of a magnetic material, but does not need to be magnetized. The movable body 202 includes a sliding surface 203 formed of a hemispherical surface and a flat upper surface 204, and the thickness dimension gradually decreases as the apex portion 202A approaches the upper surface peripheral edge portion 202B. Further, the magnet 205 is provided on the lid 34 ′ of the casing 32 ′, and in order to apply a magnetic flux density to the magnetoelectric conversion element 8 via the sliding surface 203 of the movable body 202, for example, the magnetoelectric conversion is sandwiched between the movable body 202. It is arranged at a position opposite to the element 8.

Further, in each of the above embodiments, the

movable bodies

12, 40, 58, 84, 100, 124, and 152 are all formed using a magnetic material. However, the present invention is not limited to this, and the movable body may be configured such that, for example, a hemispherical outer shape is formed using a non-magnetic resin material with a magnetic material inserted.

Further, in each of the above embodiments, the magnetic flux detection sensors are

tilt sensors

1, 31, 51, 71, 91, 111, 131, which detect the tilt angle θ of the

casings

2, 32, 52, 72, 92, 112, 132. However, the present invention may be applied to a tilt switch that switches on / off of the switch when the casing is tilted by a desired tilt angle, for example.

1, 31, 51, 71, 91, 111, 131, 151, 161, 171, 181, 191, 201 Tilt sensor (magnetic flux detection sensor)
2,32,52,72,92,112,132,32 'casing (non-magnetic container)
5, 35, 55, 75, 95, 115, 135 Concave

curved surface

6, 36, 56, 76, 76a, 96, 116, 136 Movable

body accommodating space

8, 78, 118 Magnetoelectric conversion element (magnetic flux density detecting means)
12, 40, 58, 84, 100, 124, 152, 162, 172, 182, 192, 202

Movable body

12A, 40A, 58A, 84A, 100A, 124A, 152A, 172A, 182A, 192A,

202A Vertex portion

12B, 40B, 58B, 84B, 100B, 124B, 152B, 172B, 182B, 192B, 202B Upper surface

peripheral portion

13, 41, 59, 85, 101, 125, 153, 163, 173, 183, 193, 203 Sliding

surface

14, 42 , 60, 86, 102, 126, 154, 164, 174, 184, 194, 204

Upper surface

15, 43, 61, 89, 105, 129, 140, 157 Antistatic means 15A, 15B

Antistatic coating film

38, 82, 98, 122, 138

Low resistance part

87, 103, 127 , 155,175 Chamfer

Claims

A movable body having a sliding surface formed of a downward convex curved surface formed on the bottom side and a top surface formed of a horizontal surface formed on the upper side of the sliding surface, and slidably supports the sliding surface of the movable body A magnetic flux detection sensor comprising a non-magnetic container having a movable body accommodating space having an upward concave curved surface, and a magnetic flux density detection means provided in the non-magnetic container for detecting a change in magnetic flux density caused by sliding of the movable body. And
Comprising an antistatic means for preventing electrification caused by contact between the movable body and the non-magnetic container,
The sliding surface of the movable body and the magnetic flux density detection means are arranged to face each other, and a magnetic flux is applied to the magnetic flux density detection means through the sliding surface,
A chamfered portion that relaxes the concentration of magnetic flux density at the periphery of the upper surface is provided on the periphery of the upper surface where the sliding surface and the upper surface intersect in the movable body,
When the nonmagnetic container is tilted from a horizontal state, the movable body is displaced from a steady position along the concave curved surface of the nonmagnetic container,
When the nonmagnetic container returns to a horizontal state, the movable body is configured to return to a steady position along the concave curved surface of the nonmagnetic container.
A non-magnetic container comprising a hemispherical movable body having a sliding surface composed of a downward-facing hemispherical surface on the bottom side, and a movable body accommodating space having an upward concave curved surface that slidably supports the sliding surface of the movable body And a magnetic flux detection sensor provided in the nonmagnetic container and detecting a change in magnetic flux density caused by sliding of the movable body,
Comprising an antistatic means for preventing electrification caused by contact between the movable body and the non-magnetic container,
The sliding surface of the movable body and the magnetic flux density detection means are arranged to face each other, and a magnetic flux is applied to the magnetic flux density detection means through the sliding surface,
A chamfered portion for relaxing the concentration of magnetic flux density at the upper surface periphery is provided on the upper surface periphery of the movable body,
When the nonmagnetic container is tilted from a horizontal state, the movable body is displaced from a steady position along the concave curved surface of the nonmagnetic container,
When the nonmagnetic container returns to a horizontal state, the movable body is configured to return to a steady position along the concave curved surface of the nonmagnetic container.
A movable body having a sliding surface formed of a downward convex curved surface formed on the bottom side and a top surface formed of a horizontal surface formed on the upper side of the sliding surface, and slidably supports the sliding surface of the movable body A magnetic flux detection sensor comprising a non-magnetic container having a movable body accommodating space having an upward concave curved surface, and a magnetic flux density detection means provided in the non-magnetic container for detecting a change in magnetic flux density caused by sliding of the movable body. And
Comprising an antistatic means for preventing charging that occurs when the movable body and the non-magnetic container touch each other;
The sliding surface of the movable body and the magnetic flux density detecting means are arranged to face each other.
When the nonmagnetic container is tilted from a horizontal state, the movable body is displaced from a steady position along the concave curved surface of the nonmagnetic container,
When the nonmagnetic container returns to a horizontal state, the movable body is configured to return to a steady position along the concave curved surface of the nonmagnetic container.
A non-magnetic container comprising a hemispherical movable body having a sliding surface composed of a downward-facing hemispherical surface on the bottom side, and a movable body accommodating space having an upward concave curved surface that slidably supports the sliding surface of the movable body And a magnetic flux detection sensor provided in the nonmagnetic container and detecting a change in magnetic flux density caused by sliding of the movable body,
Comprising an antistatic means for preventing charging that occurs when the movable body and the non-magnetic container touch each other;
The sliding surface of the movable body and the magnetic flux density detecting means are arranged to face each other.
When the nonmagnetic container is tilted from a horizontal state, the movable body is displaced from a steady position along the concave curved surface of the nonmagnetic container,
When the nonmagnetic container returns to a horizontal state, the movable body is configured to return to a steady position along the concave curved surface of the nonmagnetic container.
A movable body having a sliding surface formed on the bottom side; a nonmagnetic container having a movable body containing space having an upward concave curved surface that slidably supports the sliding surface of the movable body; A magnetic flux detection sensor having magnetic flux density detection means for detecting a change in magnetic flux density caused by sliding of the movable body,
Comprising an antistatic means for preventing charging that occurs when the movable body and the non-magnetic container touch each other;
When the nonmagnetic container is tilted from a horizontal state, the movable body is displaced from a steady position along the concave curved surface of the nonmagnetic container,
When the nonmagnetic container returns to a horizontal state, the movable body is configured to return to a steady position along the concave curved surface of the nonmagnetic container.
6. The antistatic means according to claim 1, wherein an antistatic coating film made of a surfactant or a conductive material is formed on the sliding surface of the movable body and the concave curved surface of the nonmagnetic container. Magnetic flux detection sensor.
6. The magnetic flux detection sensor according to claim 1, wherein the antistatic means is formed by forming a portion including the concave curved surface of the non-magnetic container and the movable body from a low resistance material.
The magnetic flux density detection means has a ground terminal, a drive voltage terminal and a signal output terminal,
The nonmagnetic container is formed of an insulating material except for a portion including a concave curved surface formed of a low resistance material,
The ground terminal is embedded in the insulating material and the low-resistance material to electrically connect the ground terminal and the low-resistance material,
8. The magnetic flux density detection means, the drive voltage terminal, and the signal output terminal are embedded in the insulating material to electrically insulate the drive voltage terminal, the signal output terminal, and the ground terminal. The magnetic flux detection sensor described in 1.
The magnetic flux detection sensor according to any one of claims 1 to 5, wherein the antistatic means comprises the movable body and the nonmagnetic container made of a material having substantially the same charge train.
6. The magnetic flux detection sensor according to claim 1, wherein the movable body is formed using a magnetic material and is magnetized in a state in which the sliding surface and the upper surface have opposite polarities.
When used in the Northern Hemisphere, the sliding surface of the movable body is magnetized to the N pole and the upper surface is magnetized to the S pole. When used in the Southern Hemisphere, the sliding surface of the movable body is magnetized to the S pole and the upper surface is magnetized. The magnetic flux detection sensor according to claim 10, which is magnetized to the N pole.
The magnetic flux density detecting means is a detection signal when the magnetic flux is tilted in the Y-axis direction compared to a detection signal when the magnetic flux is tilted in the X-axis direction in the X-axis direction and the Y-axis direction orthogonal to each other on the horizontal plane. Has anisotropy that results in a large output level,
The concave curved surface of the movable body accommodating space is formed by an anisotropic curved surface that greatly displaces the movable body in the Y-axis direction compared to the X-axis direction in order to compensate for the anisotropy of the magnetic flux density detecting means. The magnetic flux detection sensor according to any one of claims 1 to 5.