TW201139746A - Apparatus for anodization, treatment tank, method of manufacturing roll mold for imprinting, and method of manufacturing product having a plurality of protrusion on surface - Google Patents

Abstract

The present invention relates to a method of manufacturing a roll mold having a protrusion and recess portion on a syrface by anodizing by applying current to a column-shaped aluminium substrate comprised of aluminium immersed in an electrolyte in an anodizing tank using a current-carrying material, the method comprising a step of anodizing the aluminium substrate through the current-carrying material while rotating the aluminium substrate around a central axis of the aluminium substrate, wherein the current-carrying material makes contact with the aluminium substrate.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dust print for forming an anodized alumina having a plurality of pores formed on an outer peripheral surface of a roll-shaped aluminum substrate ( Imprint) A method of producing an article having a plurality of convex portions on the surface by using an anodizing treatment device for a light mold, a method for producing a roll-shaped mold for printing, and a roll mold for the above-described imprint. A processing tank for electrolytically treating a cylindrical substrate in an electrolytic solution, and an electrolytic treatment device for electrolytically treating a cylindrical substrate in an electrolytic solution. The Japanese patent special offer 2_·136227, 2_year 7 in Japan, which was filed in Japan on March 25th of the year of the year of the year. The month of the month of the month of the month, the Japanese patent special offer 2G11-〇18226 and March 2011 4 R / / proposed by the patent special offer 2〇1〇_170458, 2011, and 2011 ZB r η 丄 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 Treatment method, etc. _ treatment) f 〇 的 化 ( ( — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — 1L of the lower liquid is supplied to the processing tank 17 from the rectangular parallelepiped supply sound 171, and the flow of the processing liquid 1L in the processing tank no is adjusted by the perforated plate 172, and the processing liquid 1L is self-treated from the processing tank 170. In the upper portion, the cylindrical substrate 1A is immersed in the treatment liquid 1L in the treatment tank 17 to perform surface treatment. Further, Patent Document 1 discloses a plating treatment apparatus including: a rectangular parallelepiped plating. a tank; an overflow portion surrounding the plating tank; a reserve tank communicating with the overflow portion; and a fruit from the storage tank to the plating tank, and the electric ore liquid. The electric ore processing device is in the liquid discharge portion of the pump A U-shaped porous tube is provided, and a porous plate that vertically partitions the inside of the plating tank is provided on the upper portion of the porous tube, and the plated material (base material) is housed in the plating tank so as to be located at the upper portion of the porous plate. Medium. According to the electric forging apparatus, the plating solution is introduced into the electric ore tank by the pump, and is ejected from the discharge port of the porous tube to the upper side of the plating tank, so that the electric clock liquid in the plating tank flows, and can be porous The upper porous plate is used to uniformize the flow of the electric chain liquid. However, the surface of the substrate is treated by using the processing tank 170 shown in FIGS. 7A and 7B or the key groove described in Patent Document 1. In the case of 'the lower side of the porous plate 172', the flow of the treatment liquid 1L is likely to be uneven. As a result, the flow of the treatment liquid 1L that has moved upward from the lower portion of the treatment tank 170 and overflows, the treatment liquid 1L, local retention (production of the retention portion). If the retention portion is generated, it is difficult to uniformly treat the surface of the substrate 1A. As shown in Figs. 7A and 7B, such a tendency is long in the substrate 1A. In the case of a shape, it is easy to cause a long length in the longitudinal direction, and the reason is as follows. The reason for the reason is as follows: In general, the supply pipe 171 extends from the end surface of the treatment tank no toward the end surface facing the end surface. .therefore, The longer the material 1A is, the longer the shape of the processing tank 170 in which the substrate 1A is accommodated is, and the supply tube 171 is also extended in accordance with the length of the processing tank 170 in the longitudinal direction. The processing liquid 1L is supplied by the pump 173. The tube 171 is extruded to the treatment tank 170, and therefore, the pressure applied to the treatment liquid iLi is easily different depending on the distance from the spring 3. The longer the supply tube 171 is, the further away from the pump 173 is, so that it is closer to the pump 173. A pressure difference is likely to occur between the front side and the inner side of the pump 173. Therefore, it is considered that the flow state of the treatment liquid 1L' is more likely to be uneven, and the retention portion is likely to be generated. Further, if the base material 1A is long, the base is accommodated. The processing tank 170 of the material ία is also enlarged, so that the apparatus is enlarged, and the amount of the processing liquid is also increased. However, in recent years, an article such as an optical film having a fine uneven structure exhibiting an anti-reflection effect, a lotus effect, or the like in a period in which the surface has a wavelength of visible light or less has an interest in the article. It is known that the fine concavo-convex structure, especially called the moth-eye structure, exhibits an effective anti-reflection function because the refractive index is increased from the refractive index of the air to the refractive index of the material of the article. In the method for producing an article having a fine uneven structure on the surface, a transfer printing method of a fine uneven structure in which a surface of a transfer target such as a base film is formed into a surface of a mold is used. Regarding the above-described imprint method, for example, the following method is known (Patent Document 2) β 201139746 This method is a photoimprint method, that is, a roll shape of an anodized aluminum having a plurality of pores formed on the outer peripheral surface In a state in which an ultraviolet curable resin is interposed between a mold and a transparent base film, ultraviolet rays are applied to the ultraviolet curable resin to cure the ultraviolet curable resin, thereby forming a plurality of pores having anodized aluminum on the surface thereof. The hardened resin layer of the convex portion is peeled off from the roll mold together with the above-mentioned hardened resin layer. As a method of manufacturing the mold used in the imprint method, for example, a method is known in which a cylindrical (roll-shaped) aluminum substrate is anodized in an electrolytic solution to the periphery of an aluminum substrate. Anodized aluminum having a plurality of pores (concave portions) is formed (Patent Documents 2 and 3). However, in the case where the cylindrical aluminum substrate is anodized in the electrolytic solution using the treatment tank 170 shown in FIGS. 7A and 7B, if a retention portion is formed in the treatment tank 170, especially in the upper portion of the porous plate 172 In the treatment liquid (electrolyte) 1L1, temperature unevenness is likely to occur. The surface temperature of the substrate 1A is easily affected by the temperature unevenness of the treatment liquid il. If temperature unevenness occurs in the treatment liquid 1L', temperature unevenness is likely to occur on the surface of the substrate ία. The depth of the pores formed on the surface of the substrate by anodization is easily affected by the temperature during the treatment. Therefore, if the temperature of the electrolyte or the surface of the substrate is uneven, a mold having a difference in the depth of the pores depending on the portion may be obtained. When such a mold is used and the fine uneven structure formed on the surface of the mold is transferred by the imprint method, the height of the convex portions differs depending on the portion, that is, the article having a different reflectance. . The reason why the unevenness of the anodization is caused is considered to be the influence of the temperature, the current density, the electrolysis voltage, and the like of the electrolyte solution 201139746, and the electric conductivity of the electric field of the roll-shaped table is uneven or the supply current is supplied. Poor power generation due to close contact. [PRIOR ART DOCUMENT] [Patent Document 1] Japanese Laid-Open Patent Publication No. 2009-242878 (Patent Document 2) Japanese Patent Laid-Open Publication No. 2009-47-7 (Patent Document 3) International Publication No. 2006/059686 No. Manual [Disclosure] The present invention has been completed in the above-described circumstances, and the second aspect of the present invention provides that the manufacturing-species fine (four) depth difference can be suppressed. According to a second aspect of the present invention, there is provided a method of producing an article having a plurality of convex portions on the surface of which the difference in height of the convex portions is suppressed. According to a third aspect of the invention, there is provided an anodizing apparatus for a roll-shaped mold for imprinting in which the difference in depth of the pores is suppressed. According to a fourth aspect of the present invention, there is provided an electrolytic treatment apparatus which can prevent the retention of the electrolytic solution and further suppress the amount of the electrolytic solution even when the long substrate is treated. According to a fifth aspect of the invention, the electrolytic treatment treatment tank is suitably used. According to a first aspect of the present invention, in a method of producing a roll-shaped mold, a cylindrically-shaped base material composed of an impregnation bath impregnated in an anodizing bath is electrically connected and anodized. , 201139746 made a roll-shaped mold having a plurality of irregularities on the surface; the second aspect of the present invention relates to the roll-shaped mold described in the second aspect, the basin xb U: the male and the female Discuss t· » .

The method for manufacturing the roll-shaped mold includes an anode i-forming step, that is, in the state in which the energization member abuts on the aluminum substrate, on the one hand, the above-mentioned aluminum substrate is ... The substrate is energized by the energization member. The fourth aspect of the present invention relates to the light-point recognition of the third state

The fifth aspect of the present invention relates to the sulphur of the third (four) sulphur

A sixth aspect of the invention is the method of manufacturing a roll-shaped mold according to the fifth aspect, wherein the rotary jig stops the end of the aluminum base material. According to a seventh aspect of the invention, there is provided a method of producing a roll-shaped mold according to the first aspect, wherein a portion of the electrolytic solution is discharged from the anodizing tank, and an equal amount of the electrolytic solution is supplied to the anodizing tank. An eighth aspect of the present invention is directed to the method for producing a roll-shaped mold according to the seventh aspect, wherein the electrolytic solution is overflowed from the upper side of the aluminum substrate of the anodizing tank to discharge a part of the electrolytic solution, and The overflowed electrolyte solution is returned to the anode oxidation vessel from a supply port provided on the lower side than the aluminum substrate. According to a ninth aspect of the present invention, in the method of manufacturing a roll-shaped mold according to the seventh aspect, the shape of the anodizing tank is a semi-cylindrical shape, and the electrolyte is uniformly supplied from one side. The electrolyte overflows from the other side. According to a first aspect of the invention, there is provided a method of manufacturing a roll-shaped mold according to the ninth aspect, wherein the anodizing tank is in the shape of a strip for accommodating an electrolytic solution and impregnating the aluminum substrate, and includes The treatment tank main body that bends the bottom portion into an arc shape along the circumferential surface of the substrate that is immersed in the treatment tank body, supplies the electrolyte solution to the electrolyte supply portion of the treatment tank body, and the self-treatment tank The main body discharges the overflow portion of the electrolyte; the electrolyte supply portion is disposed along the longitudinal direction of the treatment tank body, and supplies the electrolyte from above one side of the treatment tank body, so as to be along the length of the treatment tank body The overflow portion provided on the upper portion of the other side surface of the treatment tank body is discharged in the direction of the electrolyte. According to an eleventh aspect of the present invention, the roll-shaped mold 201139746 according to the tenth aspect is opposite to a direction in which the electrolyte supplied from the electric button supply unit flows toward the overflow portion, so that the above-mentioned Suki The material is rotated. According to a twelfth aspect of the present invention, in the first aspect or the second aspect, the roll is formed in a green shape, and the electric conduction member of the towel is in surface contact with the end surface or both end faces of the inscription substrate. Powered components. The thirteenth aspect of the invention is the method of the first aspect, wherein the energizing member is disposed to abut against an end surface or both end faces of the aluminum substrate, and is sandwiched in the axial direction. In the above-described substrate, the energization structure is tilted, and the material is placed in contact with the upper shaft substrate. A fourteenth aspect of the invention is the method of manufacturing the roll-shaped mold according to the thirteenth aspect, wherein the rotating jig of the towel causes the end portion of the upper substrate to be stopped. According to a fifteenth aspect of the invention, the method of manufacturing the roll-shaped mold according to the twelfth aspect, wherein the energizing member is moved along an axial direction of the aluminum base material to cause the aluminum base material and the energizing member contact. A sixteenth aspect of the invention relates to the method of manufacturing a roll-shaped mold according to the twelfth aspect, wherein the first or both end faces of the aluminum base material include a first taper®' The second tapered surface that is in contact with the first tapered surface forms a contact between the first tapered surface and the second tapered surface to bring the aluminum base material into contact with the current-carrying member. According to another aspect of the invention, there is provided a method for producing a roll-shaped mold for embossing, which is characterized in that an anodic aluminum oxide having a plurality of fine pores is formed on an outer peripheral surface of a roll-shaped aluminum base material. A mold characterized in that an aluminum substrate is rotated when an aluminum 201139746 substrate is anodized in an electrolyte of an anodizing bath as an axis of rotation. ,, soil, points, ΐίΞ二: Jia is from the oxidizing tank electrolyte - the knife and the equivalent of the ritual tank to supply the same amount of Thunder. Review from the anodizing tank, and Further, the electrolyte which is also abbreviated is returned to the anode oxidation tank from the supply port provided on the lower side of the Bissau substrate. In the bracket / ^ aspect, the volume relative to the anodizing tank is preferably such that the number of cycles of the supply is: the number of cycles of the supply amount is one time in 3 minutes, and the liquid volume is updated frequently. And earn more efficiently into better life. For example, when the tank capacity is 1G5 L, 乂佳" L / 付 ~ 60 L / min ' is more preferably 41 L / _ for the positive anodic oxidation, it is better to make the substrate at least 1 The central axis of the block cathode oil substrate is substantially parallel, and the substrate is disposed opposite to the substrate. The seventeenth aspect of the invention relates to a method for manufacturing the above article, which is used for opening a plurality of concave and convex articles' and includes : a plurality of fine pores of the anodized aluminum surface of the embossing roll obtained by the embossing method and the smear method of the embossing method are transferred to the transferred An article having a plurality of convex portions having a shape in which the pores are reversed and transferred is obtained on the surface. The eighteenth aspect of the invention relates to a treatment tank in which a cylindrical base is performed in an electrolytic solution. The electrolytic treatment includes a processing unit for storing a long strip of the substrate in which the electrolyte wire is immersed, an electrolyte supply unit for supplying the electric power supply to the main body, and an electrolysis_overflow portion for discharging the self-treatment tank main body, 11 201139746 The inner surface of the bottom of the groove body is along the circumference of the substrate that is immersed in the body of the treatment tank The method is formed in an arc shape, and the electrolyte supply unit is disposed above one side surface of the treatment tank body along the longitudinal direction of the treatment tank body. The overflow portion is along the longitudinal direction of the treatment tank body. Further, in a nineteenth aspect of the present invention, in an electrolytic treatment apparatus, a cylindrical substrate is subjected to electrolytic treatment in an electrolytic solution, and includes: a treatment tank including a housing electrolysis a long processing tank body in which the liquid is immersed in the substrate, an electrolyte supply unit that supplies the electrolytic solution to the processing tank main body, and an overflow portion that discharges the electrolytic solution from the processing tank main body; and an electrode plate to sandwich the dip The inner surface of the bottom portion of the processing tank main body is curved in an arc shape so as to be immersed in the circumferential surface of the base material in the processing tank main body. The electrolyte supply unit is disposed above one side surface of the treatment tank body along the longitudinal direction of the treatment tank body, and the overflow portion is along the length of the treatment tank body. Preferably, the electrode plate is bent in a shape along an inner surface of a bottom portion of the processing tank body. Further, it is preferable to include the substrate. The rotation mechanism that rotates the base material is a center of rotation of the base material. Preferably, the rotation mechanism rotates the base material in a direction opposite to a direction in which the electrolyte supply unit supplies the overflow portion. The 帛2G g sample of the month is about an anodizing treatment device, which is oxidized by _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ In the case of the current-carrying member, the aluminum base material that has entered the surface with the central axis as the center of rotation is rotated in synchronization with the above-described current-carrying member, and the aluminum substrate is energized. The first aspect faces the above and the twentieth aspect of the present invention. The anodizing treatment consists of a rotary drive mechanism that rotates the aluminum substrate. Further, the anodic oxidation according to the twentieth aspect of the present invention is characterized in that the axial direction driving mechanism that has the above-described energizing member along the axis 1 of the upper substrate is driven to contact the energizing member by the axial direction driving member Or separate. The aluminum oxide substrate of the second aspect of the present invention is characterized in that the end surface of the wire material includes a second electric member having a surface formed in contact with the first tapered surface. According to a twenty-first aspect of the present invention, there is a roller-like structure in which an anodizing treatment is formed by a slab, and a substrate is oxidized in an electrolytic solution of an anodic oxidation tank. The probe rotates the substrate with the central axis of the substrate as a center of rotation, and rotates in synchronization with the aluminum material in a state in which the probe is brought into contact with the aluminum substrate. The substrate is energized. And an anodizing apparatus according to a twenty-first aspect of the present invention, comprising: a conductive rotating shaft that fixes the probe and extends along an axial direction of the aluminum base material, and abuts on the rotation The conductive power supply plate member that supplies power to the rotating shaft at the end of the shaft rotates the probe and the aluminum-based rotating shaft in synchronism with the aluminum base material by the rotation 13 201139746, and the material rotates in synchronization. The anodizing apparatus of the present invention is characterized in that the above-described lightning supply cup I_1 with the above-mentioned rotating shaft has a conical shape. The shape of the _±31 power supply plate member is connected to the _ part of the structure, and the 'the present invention _ anodizing treatment device is characterized in that the upper part is rotated by the center of the rotating jig fixed at the end, and the turn is rotated. The aluminum substrate is rotated synchronously by being fixed to the above rotating jig. Further, the anodizing apparatus according to the twenty-first aspect of the present invention is characterized in that it is a structure which can stop water and prevent the inside of the aluminum base material from entering. [Effects of the Invention] According to the method for producing a roll-shaped mold for imprinting of the present invention, it is possible to produce a roll-shaped mold for imprinting in which the difference in the depth of the pores is suppressed. According to the twentieth aspect of the present invention, the aluminum base material is brought into surface contact with the current-carrying member, and the aluminum base material is energized while rotating synchronously on the one hand, so that stable energization without conduction can be performed. Further, since the contact area is large, it is possible to suppress the contact of current values mainly due to the rotation of the friction between the rotation of the contact portion between the aluminum base material and the current-carrying member, and the yield of the roll-shaped mold can be further improved. According to the twenty-first aspect of the present invention, in the state in which the aluminum substrate is brought into contact with the probe, the substrate is rotated synchronously with the probe on the one hand, and the substrate is energized from the probe on the one hand. There is a yield of 201139746 between the base substrate and the probe, and the electric conduction failure can be suppressed, so that the roll mold can be further improved. According to the method of producing an article of the present invention, it is possible to manufacture an article having a plurality of convex portions on the surface of the difference in height of the convex portion. The treatment tank of the present invention is suitable as a treatment tank for an electrolytic treatment apparatus which can prevent the retention of the electrolytic solution and further suppress the amount of use even when the long substrate is treated. Moreover, the hair _ electrolysis wire is placed in the village to prevent electrolysis even in the case of a long substrate (4) _ and _ can inhibit electrolysis

For the other purposes of the tree, the other purpose, the ship and the superior = the preferred embodiment ‘with the drawing’

The substrate of the manufacturing method of the 16th-shaped mold is carried out in an electrolytic solution: the circular treatment of the 19th aspect of the columnar shape === as the electrolytic treatment device of the present invention Or, it is applied to an anodizing treatment apparatus using an electrolytic treatment sample. ~ or 21st state [ϋ'ίΓ图丝 detailed description of this aspect. In the case of the electrolytic solution supply unit 110, the example of the processing tank 110 of the present embodiment is shown in FIG. Side view. Figure 2 is a cross-sectional view taken along line 1 - 1 of Figure 1. Further, in Fig. 2, an outer groove 140 for accommodating the treatment tank no shown in Fig. 1 is added. Further, in the present invention, the shape of the substrate to be subjected to the electrolytic treatment is a columnar shape, but it may be a hollow shape (cylindrical shape) as shown in Figs. 1 and 2, and may not be hollow. The processing tank 110 shown in FIG. 1 and FIG. 2 includes the following members: a long processing tank body 111 that accommodates the electrolytic solution 1L and is immersed in the hollow cylindrical substrate 1A, and supplies the electrolytic solution 1L to the processing tank body. The electrolyte supply unit 112 of lu and the overflow portion 113 of the electrolytic solution 1L are discharged from the treatment tank main body in. The treatment tank 110 is housed in the outer tank 140 as shown in FIG. 2 . <Processing tank body> The treatment tank body 111 is a member that houses the electrolytic solution 1L, and the substrate 1A is impregnated in the electrolytic solution 1L. The inner surface of the bottom portion Ilia of the treatment tank body 111 is curved in an arc shape so as to be immersed in the circumferential surface (outer circumferential surface) 1A of the base material 1A in the treatment tank main body 111. The inner surface ma of the bottom portion Ula is curved in an arc shape. The electrolyte solution supplied from the electrolyte supply unit 112, which will be described later, can smoothly flow to the overflow portion 113. Further, in the present invention, the "arc shape" is not limited to the true circle (_ cirde) 201139746 -----χ--- Ili π坻 Shao 11U inner surface u-shaped, semi-shaped material without 'age age A semicircular shape in which a semicircular shape is more preferable. When the shape of the direction curved shape is a semicircular shape, the inner surface 1L of the electrolysis flows toward the overflow portion 113 while maintaining the electrolyte supplied along the inner surface ^p m of the bottom portion 11la. The flow of the lla' is smoother. Regarding the material of the treatment tank body 111, the σ quality is not particularly _, and is such as = G 琊 C polyVlnyl chloride ’ pVc ). The size of the treatment tank body 1U is not particularly limited. For example, in Fig. 2, -, ", the receivable soil material 1A is in the treatment tank body m, the treatment: upper = 'substrate It is preferably 1.25 times to 2 times of the configuration. Preferably, the radius of the substrate 1A is (1). In addition, in the case where the bottom portion 11aa is 1Ua, the shape is semicircular, and it is preferable to use the center and the ride on the straight line of the semicircle. In the case where the center axis P of ia is superimposed, the substrate 1A is disposed in the processing body (1). However, as described above, when the substrate is anodized to form pores on the peripheral surface, the fine (10) depth is easily affected by the electrolyte. Or the influence of the temperature unevenness of the surface of the substrate (outer peripheral surface), so it is necessary to reduce the temperature unevenness. The temperature unevenness of the surface of the electrolyte or the substrate is mainly caused by the retention of the electrolyte in the treatment tank 17 201139746, and When the distance between the material and the inner surface of the treatment tank is narrow, temperature unevenness may occur. This is considered to be because if the anodization is performed, the treatment tank is easily heated by the heat, and the heat of the treatment tank is used. Straight surface of the substrate near the processing tank And unevenly heated, resulting in temperature unevenness. It is considered that the closer the distance between the substrate and the inner surface of the treatment tank is, the easier it is to cause. However, from the central axis p of the substrate 1A to the inner surface of the bottom 11a The distance D from the 111a' is 1.25 times or more of the radius (r) of the substrate ία, and a sufficient gap is formed between the outer peripheral surface ι of the base material 1A and the inner surface 111a' of the bottom portion Ula of the treatment tank main body m. Thereby, since the electrolyte solution between the base material 1A and the treatment tank main body ill can sufficiently exert the action of the cushioning material, the treatment tank main body 111 can be heated even by the heat generated during the anodization. 1A is directly heated by the treatment tank body 111. Therefore, temperature unevenness of the outer peripheral surface 1A of the base material 1A can be more effectively prevented, and pores having a reduced depth difference can be formed on the outer peripheral surface of the base material. The distance D is preferably twice or less the radius (r) of the base material 1A. If the distance 1D exceeds twice the radius (r) of the base material 1A, not only the effect of preventing temperature unevenness is reached, but also the treatment tank body m is Become large, leading to electrolysis The amount of use of the liquid 1L is increased. <Electrolyte supply unit> The electrolyte supply unit 112 of the illustrated example is constituted by a supply pipe ii2a and a long discharge portion U2b connected to the supply pipe 112a. The electrolyte solution is fed into the supply pipe U2a, and the electrolyte solution is filled in the supply pipe 11a (10). The electrolyte solution is discharged from the discharge σ U2ia to the discharge portion 112b. The discharge port 1121a is continuous along the longitudinal direction of the supply pipe ma. The slit portion is formed in a slit shape, and may be intermittently formed. The tip end of the discharge portion 112b is immersed in the electrolytic solution 1L housed in the treatment tank body ,, and the electrolyte solution 1L is discharged from the discharge port 112 of the discharge portion n2b. It is supplied to the treatment tank body 1U. The discharge port 1121b can be continuously formed along the longitudinal direction of the discharge portion 112b, and can be formed intermittently. The electrolyte solution discharged from the discharge portion 112b is maintained in a uniform flow state with respect to the longitudinal direction of the main body of the treatment tank 111, and can be formed in the width direction as long as it is configured to maintain a positive pressure in the electrolyte supply portion. Uniform flow. In order to maintain the positive pressure, the area of the discharge port 1121a of the supply pipe U2a can be made larger than the opening area of the discharge port 112 of the discharge portion U2b. The material of the supply pipe 112a and the discharge portion U2b is not particularly limited as long as it is corroded by the electrolytic solution 1L, and is exemplified by stainless steel or polyethylene gas (PVC). (1) <Overflow portion> The overflow portion 113 构件 the member that discharges the electrolysis overflowing from the processing tank body Hi to the outside of the processing tank main body 111 is disposed in the processing tank so as to be along the longitudinal direction of the processing tank ^1L 111 The integral side of the body lu is 1 lie upper. The overflow portion 113 of the side example is formed by making the other side surface lllc lower than the side surface 111b by making the side surface of the processing tank body lu different from the height of the other side surface 1Uc. <Operation and Effect> The treatment tank 110 of the present invention described above supplies the electrolytic solution L from above the treatment tank, one side surface Ulb of 1 U, and exits from the upper portion of the other side surface 11c. At this time, since the inner surface UU of the bottom portion 111a of the treatment tank main body 111 is curled into a circular shape, the electrolytic solution 1L does not remain and can smoothly move to the overflow portion 113. In addition, when the electrolyte solution 1L is supplied to the electrolyte solution supply unit U2, a pump (not shown) or the like is used, but the electrolyte solution 1L is also sent out from the electrolyte supply unit 112 by gravity. Therefore, the treatment tank 110 of the present invention has the electrolyte 1L supplied from the lower supply pipe 171 of the treatment tank 17〇 as in the prior treatment tank 17 shown in Fig. 8 . It is less susceptible to the pressure of the chestnut than the case where the mouth of the treatment tank 17 is above (that is, opposite to gravity). Therefore, even if the substrate 1A subjected to the electrolytic treatment is changed, the length of the treatment tank main body 1U in the longitudinal direction or the electrolyte supply unit 2 is also long, and the electrolyte received from the pump at both ends of the electrolytic solution supply unit 112 The pressure difference is also small. Therefore, by using the treatment tank (10) of the present invention, it is possible to prevent the electroscope 1L from being partially retained in the treatment tank 111, so that the outer peripheral surface 1A' of the base material 1A can be uniformly subjected to electrolytic treatment. Especially in the case of anodizing the secret material, =Chengdian Junsi job_Temperature Ke, Lingling County treatment tank, it is not easy to produce electrolyte (10) in the treatment tank body (1) 201139746 Retention part 'is difficult to generate temperature Uneven. Thereby, the difference in the depth of the pores formed in the outer peripheral surface 1A' of the base material 1A is suppressed. Further, the processing tank 11 of the present invention has a curved shape due to the curved shape of the inner surface (1) of the bottom portion 111a of the processing tank main body m, so that it can be formed in a rectangular parallelepiped processing tank 17M as shown in FIG. . Thereby, the amount of the electrolyte used is also suppressed. Further, when the treatment tank 11 of the present invention is used, the electrolytic solution 1L smoothly flows in the treatment body ff. Therefore, it is not necessary to provide a member for adjusting the flow of the perforated plate or the like. <Another embodiment> The treatment tank of the present invention is not limited to the treatment tank 110 shown in Figs. 1 and 2 . For example, the electrolyte supply unit 112 of the treatment tank 110 shown in Fig. 1 and Fig. 2 may have a tubular structure in which the T is uniformly supplied in the longitudinal direction. Further, in the processing tank 110 of FIGS. 1 and 2, the overflow portion 113 is formed by making the other side surface 11c of the processing tank body 111 lower than the one side mb, but may be, for example, as shown in FIG. The side surface me is provided with a hole 113 extending in the longitudinal direction of the treatment tank body 111, and the hole 113' is used as the overflow portion 113. In this case, it is preferable to provide the hole 113 at a position higher than the substrate 1A which is immersed in the treatment tank body 1U. The holes 113' may be formed continuously as shown in Fig. 3, or may be formed intermittently. Further, in Fig. 3, only the treatment tank main body 111, the hole I, and the base material 1A are shown, and the electrolytic solution supply portion is omitted. [Electrolysis treatment apparatus] 21 201139746 The electrolytic treatment apparatus of the present invention is an apparatus which performs electrolytic treatment of a cylindrical substrate in an electrolytic solution.

Fig. 4 is a side cross-sectional view showing an example of the electrolytic treatment apparatus 1 of the embodiment, Fig. 5A is a cross-sectional view taken along line 1 - 1 of Fig. 4, and Fig. 5B is included in the electrolytic treatment apparatus shown in Fig. 4. A perspective view of the processing tank 110 and the electrode plate 120. The electrolytic treatment apparatus 11 of this example includes the treatment tank 110 filled with the electrolytic solution L, and the electrode plate 120 disposed so as to sandwich the substrate 1A that has been immersed in the treatment tank main body m of the treatment tank 11A, The rotating mechanism 13A that rotates the base material 1A with the center axis of the base material 1A as a center of rotation, and accommodates the processing tank 110 and receives the outer tank 140 of the electrolytic solution 1L overflowing from the processing tank 110, and temporarily accumulates the accumulation of the electrolytic solution 1L. The tank 150 is configured such that the electrolytic solution 1L received in the outer tank 14A flows into the downstream flow path 141 of the storage tank 150, and the electrolytic solution 1L of the storage tank 150 is returned to the supply and return portion 151 of the electrolytic solution supply unit 119 of the processing tank 110. And a device 152 disposed in the middle of the return flow path 151. Hereinafter, a case where the electrolytic treatment apparatus 11 of the present invention is used as an anodizing treatment apparatus will be specifically described. The electrolytic treatment apparatus 11 includes the above-described treatment tank 110 of the present invention, and as shown in Figs. 5A and 5B, the 'electrode plate 120 is shaped like the inner surface 11a of the bottom portion 111a of the treatment tank body 111 along the treatment tank 11'. And the shape of the bend. Since the electrode plate 120 has a curved shape, the flow of the electrolytic solution a is less likely to be hindered. Therefore, the electrolytic solution 1L does not stay and can move more smoothly to the overflow portion 113. 22 201139746 In addition, the outer groove 140 is omitted in Fig. 5A. Further, in Fig. 5B, only the treatment tank main body 111 and the overflow portion 113 of the tank 110, the electrode plate 120, and the base material 1A' are omitted, and the constituent members of the electrolytic treatment apparatus 11 other than the above are omitted. The end faces llld and 11ll of the treatment tank body 111 are U-shaped as shown in Fig. 5B. Therefore, in order to prevent the electrolyte from leaking out from the end faces md and me, a seal member (not shown) having a shape conforming to the shape of the end faces 111d and 1Ue is attached. Further, on the lower side of the end faces llld and 11le, as shown in Figs. 4 and 5A, the support shaft 131' of the support base material 1A is provided along the horizontal direction in the axial direction as the rotation mechanism 13A. As shown in FIG. 4 and FIG. 5A, the support shaft 131 is provided with a pair of end faces llld and me of the processing tank main body in the horizontal direction, and each of the support shafts 131 penetrates the end faces llld and llle of the cymbal main body 111 so as to be opposed to each other. The end faces md and Ule of the processing tank body lu are rotatably supported. A cylindrical elastic member 132 made of a resin material is inserted into an end portion of the processing tank main body 1U of each of the support shafts 131, and the base material 1A is placed on each of the elastic members 132 with the outer peripheral surfaces of both end portions thereof. The above method is supported on the support shaft 131. Each of the support shafts 131 is connected to a rotation drive unit (not shown) such as a motor, and the support shafts 131 are rotated in the same direction by the rotation drive unit to contact the elastic member 132 in the electrolytic treatment device 11 . The substrate 1 a is rotated. In particular, as shown in FIG. 5A, the rotating mechanism 130 preferably faces in a direction opposite to the direction in which the electric material U supplied from the local solution 23 201139746 = no (four) liquid supply unit 112 is supplied to the manifold portion 113. Base ^ turn. By the direction in which the flow of the electrolytic solution 1L is opposite to the rotation of the substrate, the pair of electrolyte enthalpy at the vicinity of the surface of the substrate _ is made faster, and the substrate U can be efficiently produced during the electrolytic treatment. mobile. When the flow direction of the electrolytic solution 1L is the same as the rotation direction of the substrate 1A, the electrolyte 匕 at the vicinity of the surface of the substrate 1A is relatively slow, and the heat transfer is poor in the no-speed state, thus causing treatment. The temperature of the electrolyte solution in the entire tank 110 rises. Above the support shaft 131, the energization of the axial direction in the horizontal direction is made = (Sha_3 is provided through the sealing material 114, and the sealing material ι 4 ^ 2 traces are called 'the energizing shaft (3) also penetrates the outer groove 140 = exposed The outer side electric shaft 133 is supported by a material having a guide wire for a long time, and is supported by the sealing material attached to the end faces Uld and Ule. The electric current shaft 133 may not be entirely made of a conductive material. The outer surface of the shaft 133 can be applied to the base material 11 via the energizing member 134 to be described later, and the outer portion of the shaft 133 can be coated with an insulating material, or the portion that is in contact with the sealing material attached to the end surface 1Ud and u. The disk-shaped current-carrying member m is provided in the processing tank body lu of the current-carrying shaft 133. The energizing member 134 forms a surface on both end faces of the columnar base material 1A. Here, the electrode plate 12A disposed so as to be placed on the substrate 1A and the power supply shaft (3) are electrically connected to the power source 121, so that a current can be applied. 24 201139746 The energization member 134 is set to be energized Gas is generated in the axial direction of the shaft 133 or the substrate 1A The driving portion (not shown) for moving forward and backward of the cylinder or the like can move forward and backward. After the base material 1A is placed on the support shaft 131, the energizing member 134 can be brought into contact with both end faces of the substrate ία. The material 1A is energized on both sides in the axial direction. In the example shown in Fig. 4, the energizing members 134 are provided on both end faces of the substrate 1A, but the energizing members 134 may be provided only on the substrate VIII. The other end member has the other energizing member 134 as a pressing member. Further, the energizing member 134 does not need to be in close contact with the substrate 1A at the end recognized by the substrate, and may be at other positions such as the inner peripheral surface recognized by the substrate. The structure is in contact with the substrate 1A. The energizing shaft 133 passes through the processing tank 110 and the outer tank 14〇 to move forward and backward. Therefore, between the energizing shaft (3) and the processing tank 11 and the crucible 14 And the sliding bearing 135 which can be used to support the ship in the field of (4). The inner diameter side corner portions of the both end portions of the base material 1A of the example are chamfered, and a tapered surface is formed on a part of both end faces of the coffin 1A W. The other two sides of the tapered surface 134a, preferably the inclination of the two sets the same The slope is gmchent. By making the tapered surface i & blood 3 = contact surface contact of the substrate i A, the two can be electrically in close contact, and the rotation is conveyed in the resistance, so that the rotation can be synchronously By making such a structure by contact, the influence of the contact surface or the wear of the wear and tear and the slip-on sound during rotation are reduced, so that a stable current of 25 201139746 can be supplied. Since the energizing shaft 133 connected to the energizing member 134 rotates in synchronization with the base material 1A, the energizing shaft 133 and the power source 121 are electrically contacted (connected) by a rotatably powered connector (not shown). As a rotatable power supply connector, there are rotary connectors, slip rings, etc., and the rotary connector rotates with better current stability. Further, the energization member may be energized only by being in surface contact with one end surface of the substrate 1A. The outer tank 140 is a member for accommodating the treatment tank 110, and as shown in Figs. 2 and 4, the electrolytic solution 1L in the treatment tank 110 is discharged from the overflow portion in and flows to the outer tank 140. The electrolytic solution 1L received in the outer tank 140 flows down the storage tank 150 by flowing down the flow path. The temperature adjusting mechanism 153 of the electrolytic solution 1L is disposed in the storage tank 150, and the electrolytic solution il which is tempered in the storage tank 150 is processed by the pump supply unit 112 from the electrolytic solution supply unit 112 of the processing tank 11 by the pump 152 and the return flow path 151. The tank body 111 is returned. Further, the temperature adjustment mechanism 153 provided in the storage tank 150 is exemplified by a heat medium (heat me (jium) heat exchanger, an electric heater, etc., which is water or oil. The electrolytic treatment apparatus U of the present invention includes the treatment tank 110 of the present invention. Therefore, the electrolytic solution 1L is less likely to remain in the treatment tank body lu of the treatment tank 110. Further, although the electrolytic solution is supplied to the electrolytic solution supply unit 112, A pump (not shown) or the like is used, but the electrolytic solution 1L is also sent out from the electrolyte supply unit 112 by gravity. Therefore, the treatment tank 11 of the present invention is the same as the previous one shown in Fig. 26, 2011 39746 7A, and Fig. 7B. In the processing tank 17 as compared with the case where the supply tube 17 provided in the lower portion of the processing tank 170 is ejected from the upper side of the processing tank 170 (that is, opposite to the gravity) by the system 173, Therefore, even if the base material 1A' subjected to the electrolytic treatment becomes long, the length of the treatment tank main body (1) in the longitudinal direction or the electrolyte supply portion 112 becomes long, and the electrolyte supply portion 112 is two. In the end, the pressure of the electrolyte received by the pump Therefore, according to the electrolytic treatment apparatus u of the present invention, it is possible to prevent the electrolytic solution B from partially remaining in the treatment tank main body 1U of the treatment tank 110, so that the outer peripheral surface of the base material 1A can be uniformly subjected to electrolytic treatment. When the anodic oxidation treatment is carried out, it is important to suppress the electrolyte wire _ temperature section. However, if the electrolytic treatment apparatus η of the present invention is used, the retention portion of the electrolytic solution 1L in the treatment tank body lu is not easily obtained. Therefore, the temperature unevenness is less likely to occur. Thereby, the difference in the depth of the pores formed on the outer peripheral surface of the substrate ία is suppressed. Further, the electrolytic treatment apparatus u of the present invention is bent into a circle by the bottom of the treatment tank body (1). Since it is a solitary shape, the volume can be reduced as compared with the rectangular processing tank m as shown in Figs. 7A and 7B. Thereby, the amount of the electrolytic solution used is also suppressed. Further, the electrolytic treatment apparatus η according to the present invention Since the electrolyte flows smoothly in the treatment tank main body m, it is not necessary to provide a member for adjusting the flow of the perforated plate or the like in the treatment tank. <Other embodiment> The present invention The electrolytic treatment of the agricultural device is not limited to the electrolytic treatment device 11 shown in Fig. 4, Fig. 5, and Fig. 5b 27 201139746. For example, the electrolytic treatment device 11 shown in Figs. 4, 5A, and 5B includes the support shaft 131 as a Although the rotation mechanism 130 in which the base material 1A rotates, the electric conduction shaft 133 connected to the electric conduction member 134 may be used as a rotation mechanism. In this case, the support shaft 131 may be a rotation drive unit that is not connected to the above description. The structure can be rotated with the base material 1A. Further, the current-carrying member 134 does not need to be entirely made of a material having conductivity as described above, and can be configured to electrically connect the base material A and the current-carrying shaft 133. Specifically, the configuration may be such that the tapered surface of the current-carrying member 134 is electrically connected to the current-carrying shaft 133. Further, the tapered portion 134a is electrically connectable to the energization member m, and the second portion is made of a conductive material. In the second embodiment, the inner diameter corners of the both end portions of the base material 1A are performed; the angle: = the tapered surface 1a' is returned to the outer diameter side of the energizing member 134. The tapered surface 134a is formed, but the outer diameter side corner portion of the portion is chamfered +, and both ends of the soil are chamfered (four). The inner diameter side corner portion of the member 134 is formed into a cone shape of each of the energizing members 134. The configuration of at least one of the hole-carrying members m. 4a is also a device formed in the chemical treatment 28 201139746, which is particularly suitable as an anode for anodizing an aluminum substrate. In the following, an example of a method of producing a mold by anodizing an aluminum substrate using the electrolytic treatment apparatus of the present invention will be described. First, as shown in FIG. 4, FIG. 5A, and FIG. The base material is provided on the support shaft 131. At this time, as shown in Fig. 2, a space S is formed between the outer peripheral surface 1A' of the base material 1A and the inner surface 111a' of the bottom portion U1a of the treatment tank body ill. The substrate ία is disposed on the support shaft 131. Specifically, it is preferably based on The distance D from the central axis p of 1A to the inner surface 11li of the bottom Ilia is 1.5 times the radius (r) of the base material 1A, and the base material 1A is provided. Further, the shape of the inner surface 111a' of the bottom portion 111a is In the case of a semicircular shape, it is preferable to provide the base material 1A so that the center of the diameter of the semicircle overlaps with the central axis P of the base material 1A. Then, the drive unit (not shown) that moves forward and backward is used. The energization shaft 133 is simultaneously moved from both sides to bring the energization member 134 into contact with the substrate 1A. Alternatively, the electrolyte 1L may be supplied to the treatment tank body m after the substrate 1A is brought into contact with the energization member 134, in the electrolyte a few

In the state of entering the treatment tank main body 1U, the energization member 134 is brought into contact with the substrate A. When the energizing member 134 is in contact with the substrate ία, the rotation driving unit (not shown) is driven to rotate the support shaft 131 to rotate the base material 1A. On the other hand, when the substrate 1A is rotated, a voltage is applied to the substrate 1A serving as the anode and the electrode plate 29 201139746 120 serving as the cathode via the energization shaft 133 and the energization member, and the substrate λ is anodized. When the energization member 134 is brought into contact with the substrate 1A, the pressing force for contact is preferably 0.2 MPa or more. Stable current supply is affected by slippage on the tapered surface that is in contact with the rotation or in close contact. However, if the pressing force is too large, the strain of the base material 1A is also caused, and the rotation cannot be stopped and stopped. Therefore, it is necessary to appropriately select according to the shape of the workpiece and the regulation of the rotational driving source. During the anodization of the substrate 1A, on the one hand, the substrate is rotated, and a part of the electrolyte 1]L is discharged from the treatment tank body m, and an equal amount of the electrolyte is supplied to the treatment tank body 111. Specifically, in the overflow portion 113 of the treatment tank 110, the electrolyte 1L is discharged from the treatment tank body 111 to the outer tank 14 , and the discharged electrolyte L flows from the outer tank 14 to the storage tank 15 in the storage tank 150. After the temperature of the electrolytic solution 1L is adjusted, the electrolytic solution 1L is returned to the electrolytic solution supply unit 112 provided on one side surface along the longitudinal direction of the processing tank main body 1U, and is supplied from the electrolytic solution supply unit 112 to Process the tank body η!. At this time, since the inner surface nia of the bottom portion 111a of the treatment tank main body is curved in an arc shape, a substantially uniform flow of the electrolytic solution 1L is formed, and the electrolytic solution 1L does not remain and can smoothly move to the overflow portion 113. Further, it is preferable that the substrate 1A is rotated in a direction in which the direction of the flow of the electric field liquid 1L is in the phase. The supply amount of the electrolytic solution from the electrolytic solution supply unit 112 to the treatment tank main body is preferably one or more times in one minute with respect to the volume of the treatment tank main body 1U. Thereby, the treatment tank body (1) can perform the liquid renewal of = 30 201139746, whereby heat removal can be performed efficiently, and the generated nitrogen can be removed. The circumferential velocity of the substrate 1A is preferably 0.1 m/min or more. As long as the peripheral speed of the substrate u is 〇] m/min or more, the concentration of the electrolyte mountain around the substrate /A or the temperature is not more effectively suppressed. The peripheral speed of the substrate 1A is preferably 25.1 m/min or less from the viewpoint of the force of the driving device. When the substrate 1A is anodized as described above, the oxide film 162 having the pores 161 is formed as shown in Fig. 6 (a) to Fig. 6 (b). . The purity of aluminum used as the substrate 1A is preferably 99% or more, more preferably 99.5% or more, still more preferably 99% or more. When the purity of aluminum is low, when the ruthenium is anodized, a concavo-convex structure of a size which scatters visible light by segregation* of the impurity f or a regularity of the pores 161 formed by anodization is lowered. As the electrolytic solution, oxalic acid, sulfuric acid, or the like is listed. In the case where oxalic acid is used as the electrolytic solution: the concentration of oxalic acid is preferably 0.7 Μ or less. If the concentration of oxalic acid exceeds 〇.7 Μ, the current value becomes too high and the surface of the oxide film becomes rough. In order to obtain an anodized aluminum having fine pores having a high regularity in a certain period, it is necessary to apply a formation voltage in accordance with a predetermined period. In the case of, for example, anodized aluminum having a period of 100 nm, the formation voltage is preferably from 30 V to 60 V. When the formation voltage corresponding to the predetermined period is not applied, there is a tendency that the regularity is lowered. The temperature of the electrolytic solution is preferably 60 ° C or lower, more preferably 45 ° C or lower. When the temperature of the electrolyte exceeds 6 (TC), a so-called "haze" phenomenon occurs, pores are broken, or the surface is dissolved and the pores are regularly disordered. 31 201139746 In the case where sulfuric acid is used as the electrolyte The concentration of sulfuric acid is preferably 0.7 M or less. If the concentration of sulfuric acid exceeds 0.7 Μ ', the current value becomes too high to maintain a constant voltage. 0 In order to obtain a pore having a regularity in a certain period. The anodic oxidation must be applied to a formation voltage in accordance with a prescribed period. In the case of, for example, anodized aluminum having a period of 63 nm, the formation voltage is preferably 25 V to 30 V ° in the case where no prescribed period is applied. In the case of a chemical conversion, there is a tendency for the regularity to decrease. The temperature of the electrolytic solution is preferably 3 Å or less, more preferably 2 〇〇 c or less. If the temperature of the electrolytic solution exceeds 3 〇 ° C, the so-called " The turbidity phenomenon, the pores are broken or the surface is dissolved and the regularity of the pores is disturbed. Moreover, 'the oxide film 162 having the pores 161 as shown in Fig. 6(b) is formed, and the latter is repeatedly used. Electricity The processing apparatus U is formed into a pole, and an anodizing step (a step of expanding the diameter of the pores (a pore diameter expanding treatment) having a plurality of pores is formed to thereby manufacture a roll-shaped mold. Π Ξ Ξ Ξ Ξ Ξ 细 细 细 细 细 细 细 细 细 细 细 细 细 细 细 细 细 细 细 细 细 细 细 细 细 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时 暂时The dissolution method is exemplified by a method of removing the solute liquid, for example, chromic acid removal. Such a solution 32 201139746 Moreover, if the substrate 1A from which the oxide film has been removed is anodized again, as shown in FIG. 6(d), The oxide film 162 having the columnar pores 161 is formed. The 11⁄4 pole oxidation is performed by the above-described electrolytic treatment apparatus 11. The conditions are the same as those in the case of forming the oxide film 162 shown in Fig. 6(b). The longer the oxidation time, the deeper the pores are obtained. Further, as shown in Fig. 6(e), the treatment for expanding the diameter of the pores 161 is performed. The pore diameter expansion treatment is to impregnate the dissolved oxide film. Obtained in the solution by anodization For the treatment of the pores, for example, a phosphoric acid aqueous solution of about 5 wt% (mass%) or the like is used. The longer the pore diameter enlargement treatment is, the larger the pore diameter is. As shown in Fig. 6 (f), the cylindrical pores 16 having a small diameter extending downward from the bottom of the cylindrical pores 161 are formed by anodization using the above-described electrolytic treatment apparatus U. The same conditions as above can be obtained. The longer the time for anodizing, the deeper the pores can be obtained. Further, if the above-described pore diameter expansion treatment and anodizing treatment are repeated, as shown in Fig. 6 (g) The roll-shaped mold 16 is formed, and the roll-shaped mold 160 is formed of an anodized aluminum (a porous oxide film of aluminum (aluminum oxide film) having pores 161 that directly control the shape continuously decreasing from the opening toward the depth direction. (alumite))). Preferably, it is finally finished by the pore diameter expansion treatment. ,. 33 201139746 The number of repetitions is preferably 3 or more times in total, more preferably 5 or more times. When the number of times of repetition is two or less, the diameter of the pores is discontinuously reduced. Therefore, the transfer of such pores and the reduction of the reflectance of the optical film are effected in relation to the shape of the pores 161, and the approximate conical shape and angle i are listed. Shape and so on. The average position between the fine holes 161 is below the visible light (four), that is, below 400 nm. The average period between the pores 161 is preferably nm or more. The aspect ratio of the pores 161 (the depth of the pores/the width of the opening of the pores) is preferably 1.5 or more and more preferably 2. Å or more. The depth of the pores 161 is preferably from 10 〇 nm to 5 〇〇 nm, more preferably from 15 〇 mn to 400 nm. The surface of the optical film produced by transferring the pores 161 shown in Figs. 6(a) to 6(g) is a so-called moth eye structure. In the electrolytic treatment apparatus u of the present embodiment, which has been described above, when the roll-shaped aluminum base material as the base material 1A is anodized in the electrolytic solution 1L of the treatment tank main body m, the electrolytic solution 1L is self-treated. The body is supplied above one side of the body iv and discharged from the upper portion of the other side. At this time, since the inner surface of the bottom portion of the processing tank main body 111 is curved in an arc shape, the electrolytic solution 1L does not stay and can smoothly move to the overflow portion. Therefore, the temperature unevenness of the surface of the electrolyte or the substrate can be suppressed, and the anodization can be performed substantially uniformly over the entire outer peripheral surface of the substrate 1A. As a result, the difference in the depth of the pores can be suppressed. Mold. In particular, when the substrate ία is rotated by the central axis of the substrate 1A as a rotation axis, the concentration of the electrolyte or the temperature unevenness around the substrate is suppressed, so that the substrate 1A can be anodized more uniformly. Thereby, a roll-shaped mold in which the difference in the depth of the pores is further suppressed can be produced. 34 201139746 Λ In addition, when the electrolytic solution 1L between the inner surfaces of the outer peripheral surface of the base material 1 is formed between the inner surfaces of the outer peripheral surface of the base material, the active material of the cushioning material can sufficiently exhibit heat generated even when the substrate is anodized. Processing the tank, . The heat can also suppress the temperature unevenness of the outer peripheral surface of the substrate by the substrate 1A due to the treatment of the tank body (1), so that the difference in the depth of the formation can be further suppressed. Mold. The outer peripheral surface of the affinity mold 160 can also be easily separated from the transfer target by the release agent. Regarding the de- _, 列 = = =, fluororesin, a compound, etc., the release property is excellent, and the adhesion to the enamel mold 16G is excellent, and she is a fluoro compound having a hydrolyzed stone. . For the commercial products of fluorine compounds, the "〇pt〇〇1" series manufactured by Daisuke and Daikin Industries. Bauxite Fig. 1A is a side view of the anodizing apparatus 21A of the present embodiment. Figure 11 is a cross-sectional view taken along line 2A-2A of Figure 10 . As shown in FIG. 10, the anodizing apparatus 21 includes an anodizing tank 21 filled with a liquid to be circulated, an outer tank 212 surrounding the anodizing tank 211 for receiving an electrolyte overflowing from the anodizing tank 211, and temporarily storing the electrolytic solution. The liquid storage tank 225 and the downflow flow path 229 for causing the external tank to apply the received electrolytic solution to the storage tank 225. In the anodizing bath 2, the roll-shaped |g substrate 220 is housed and impregnated in the electrolyte. The bottom portion of the anodizing bath 211 on the lower side of the Bissau substrate 220 forms a supply port 218, and the anodizing treatment device 21 further includes: sending the electrolyte solution of the storage tank 35 201139746 225 back to the anodized layer 211 The return path 228 is provided in the middle of the return flow path 228 and the rectifying plate 217 which adjusts the flow of the electrolytic solution discharged from the supply port 218. The temperature regulating mechanism 226 in which the electrolyte is disposed in the storage tank 225, the electrolyte which is temperature-regulated in the storage tank 225 forms a flow toward the anodizing tank 211 by the pump 227 and through the return flow path 228, and is supplied from the supply port 218. Squeeze out by applying pressure. Thereby, the flow of the electrolytic solution rising from the bottom of the anodizing bath 211 to the upper portion is formed. Further, the temperature control mechanism 226 provided in the storage tank 225 includes a heat exchanger using water, oil or the like as a heat medium, an electric actuator, and the like. The '% rectifying plate 217 is a plate-like member in which a plurality of through holes are formed, and the '〃 il action of the electrolytic solution is adjusted so that the thundering liquid ejected from the supply port 218 is substantially uniform from the entire bottom of the oxidizing tank 211. The ground rises. The flow regulating plate 217 is disposed between the aluminum base material and the supply port 218 so that the surface (surface direction) is substantially horizontal. Further, the two cathode plates 221 shown in Fig. u are metal plates in which "the aluminum substrate 220 is sandwiched from the horizontal direction with respect to the central axis of the aluminum substrate 22". The aluminum base material 22 is disposed opposite to each other with a gap therebetween. Referring to Fig. 10, on the lower side of the side wall 211 Β 211 相 facing each other in the anodizing bath 1 , a support shaft 215 supporting the base material 220 is disposed in the horizontal direction in the axial direction. As shown in FIG. U, the support shaft 215 is provided with a pair of side i 211 Α and 211 沿着 arranged in the horizontal direction, and each support shaft 215 penetrates the side wall 211A and is thin, and is rotatably supported with respect to the side walls 211A and 211B. . 36 The end of the inner part of 201139746 is inserted and the anodizing groove 211 of o is set, and the end is inserted and set.

The aluminum substrate 22 in contact with the elastic member 216 in the device 210 is rotated. 216 </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> The energizing shaft 214 in the horizontal direction is also exposed to the outside through the outer groove 212. The energizing shaft 214 is made of a material having a conductive property and is rotatably supported on each of the side walls. Further, the current-carrying shaft 214 may not be entirely made of a material having conductivity, and a current may be applied to the substrate j20 via the energizing member 213 to be described later. Specifically, the outer portion of the current-carrying shaft 214 may be coated with an insulating material, and the portion in contact with the side walls 211A and 211B may be coated with excellent wear resistance. A disk-shaped current-carrying member 213 is integrally provided at an end portion of the anode oxidation tank 211 of each of the current-carrying shafts 214. The energization member 213 is in surface contact with both end faces of the hollow cylindrical aluminum substrate 22A which is an anode. Here, the power source 224 is electrically connected to the two cathode plates 221 and the power supply shaft 214 which are disposed opposite to each other with the aluminum base material 220 interposed therebetween, so that a current can be applied. The energizing member 213 is provided to be movable forward and backward by a driving portion (not shown) that moves the cylinder or the like in the axial direction of the energizing shaft 214 or the aluminum base material 220. After the aluminum base material 220 is placed on the support shaft 215 37 201139746, the energization member 213 is brought into contact with both end faces of the aluminum base material 220 to be energized from both sides in the axial direction of the aluminum base material 220. Further, in the example shown in FIG. 1A, the energizing members 213 are provided on both end faces of the aluminum base material 220, but the energizing members 213 may be provided only on one end surface of the aluminum base material 220, and the other energizing members 213 may be provided. As a pressing member. Further, the current-carrying member 213 does not need to be in close contact with the inner surface of the inner surface of the inner substrate 220, and may be connected to the aluminum base material 22 at other positions such as the inner circumferential surface of the aluminum base material 220. Since the energizing shaft 214 passes through the anodizing tank 211 and the outer tank 212 to move forward and backward, the electric shaft 214 and the anodizing tank 211 and the outer tank 212 are rotatably and movably supported in the axial direction. The sliding bearing 219 of the shaft 214 is energized. The inner diameter side corner portions of both end portions of the aluminum base material 220 are chamfered, and a tapered surface 22A is formed on a part of both end faces of the aluminum base material 220, and the outer diameter side angle of the &amp; electrical member 213 is on the other hand. The portion is chamfered to form a tapered surface 213A that is in surface contact with the tapered surface 220A. Preferably, the inclination of the two sets the same oblique sound. By causing the tapered surface 2 of the domain material 22 to be in surface contact with the surface U3A of the energization member 213, the electrical close contact a between the two can be rotated by the side of the reduction 22 = the energization member 213 The resistance of the contact conveys the rotation 'so that it can rotate synchronously. The contact area is large, and the influence of the sliding at the time of the rotation or the ringing of the abrasion is not performed, so that a stable current supply can be performed. The angle of the y = 22 and the ( ii ) member 213 is preferably 15 for the axial direction (10). ~45. More preferably 22 5 . ~37 5. . 38 201139746 If the taper angle is small, the resistance of the contact surface is greatly restrained at the time of contact, and the aluminum substrate 220 is deformed. Further, if the taper angle is large, the contact surface is likely to slip when it is rotated by contact. Further, the surface roughness of the tapered surfaces 220A and 213 of the base material 220 and the current-carrying member 213 is preferably a finished surface of Ra32 or less, and more preferably a precision finished surface of Rai 6 or less. In the case where the surface roughness of the tapered surface is thick, when the aluminum base material 220 is brought into contact with the energizing member 213, the portion of the contact portion is floated, so that intimate contact is not possible, or the tapered surface 213A of the energizing member 213 is The floating portion forms anodized aluminum, thus affecting a stable current supply. Further, the energizing shaft 214 to which the energizing member 213 is connected is rotated in synchronization with the aluminum base material 220. Therefore, the energizing shaft 214 and the power source 224 are electrically contacted (connected) by a rotatably-powered connector (not shown). . As a rotatably powered connector, there are rotary connectors, slip rings, etc., and the rotary connector rotates with better current stability. Further, the energization member 213 may be brought into surface contact only with one end surface of the ?L base material 22 to be energized. Further, the mechanism "rotating the energizing member 213 in synchronization with the aluminum base material 220" not only supports the vehicle, but also the power transmitting member 214 connected to the rotating member 213 serves as a rotational driving source. In this case, the support shaft 215 is configured to be rotatable in synchronization with the base material 220 without being connected to the above-described _rotation drive portion. Further, in this embodiment, the inner diameter side corner portions of both end portions of the inner base material 22G are chamfered, and the tapered surface is formed twice, and the outer diameter side corner portion of the electrification member 213 is chamfered to form a miscellaneous portion. Surface 39 201139746 213A 'However, the outer diameter side corner portions of both end portions of the IS base material 22A can be chamfered, and the inner diameter side corner portions of the two members 2A can be chamfered to form a miscellaneous surface. Further, the current-carrying member 213 does not need to be entirely made of a material having conductivity as described above, and may be configured to electrically connect the aluminum base material 22〇 and the current-carrying shaft 214. Specifically, the current-carrying member may be used. The portion of the tapered surface 220A that is electrically connected to the current-carrying shaft 2H is coated with an insulating material. Further, as for the tapered portion 213A, as long as the base material 220 and the current-carrying member 213 are electrically connected to each other, a part of the surface thereof may be formed of a conductive material. Further, the tapered surfaces 213A formed in the respective energization members 213 do not need to have the same shape' or may have different shapes. Further, the tapered surface 213a may be formed in at least one of the energizing members 213. The anodic oxidation using the underlying substrate 22 of the anodizing apparatus 210 is carried out as follows. The aluminum substrate 220 is placed on the support shaft 215. Then, the energizing shaft 214 is simultaneously moved from both sides by the above-described driving portion (not shown) that performs the post-mortem movement so that the energizing member 213 comes into contact with the aluminum base material 220. In addition, the electrolyte may be applied to the anodized layer 211 after the aluminum substrate 220 is brought into contact with the current-carrying member 213, and the electrification member 213 is brought into contact with the aluminum substrate 220 in a state where the electrolyte has entered the anodized layer 211. . When the energizing member 213 is in contact with the surface substrate 220, the rotation driving portion (not shown) is driven to rotate the support shaft 215 to rotate the aluminum base material 22. On the other hand, by rotating the insulating substrate 220, a voltage is applied to the aluminum substrate 220 and the cathode plate 221 via the energizing shaft 214 and the energizing member 213, and anodization of the aluminum substrate 220 is performed at 201139746. When the energizing member 213 is brought into contact with the inner substrate 22, the pressing force for contact is preferably 0.2 MPa or more. Sliding on the tapered surface that is in contact with during rotation, or inability to be in close contact, can affect the stable current supply. However, if the right reduction force is too large, it will become the cause of the strain of the secret material 22Q. The rotation cannot be stopped and stopped. Therefore, it is necessary to appropriately select the shape of the workpiece and the specifications of the rotary drive source. While the anode substrate 220 is anodized, the material 220 is rotated on the one hand, and the electrolyte is discharged from the anodizing tank 211 on the one hand, and an equal amount of the electrolyte is supplied to the anodizing tank 211. Specifically, the electrolyte is overflowed from the anodizing tank 211, and the overflowed electrolyte solution tank 225 is allowed to flow down. After the temperature of the electrolyte solution is adjusted in the reservoir tank 225, the electrolyte solution is set to be lower than the material 22G. The supply port 218 is returned to the anodizing tank 211. At this time, the liquid is sprayed from the supply port 218 by the pump 227 to spray the electrolyte, and the flow of the electrolyte is adjusted by the flow regulating plate 2 to adjust the electrolyte discharged from the supply port 218 from the anodizing bath 211 (4). The bottom, the ground-to-ground rise 'is thus formed from the bottom of the anodizing bath 2 ι. A substantially uniform flow of the rising electrolyte. The supply amount of the electrolytic solution (from the supply port 218 = the discharge amount of the electrolytic solution) of the anodizing bath 211 is preferably 3 minutes or more with respect to the number of cycles of the anodizing bath 2 ι. As a result, the liquid in the anodizing bath 2 is renewed, so that heat removal can be efficiently performed, and wind generation can be removed. Specifically, it is preferable that when the tank capacity is 1 〇 7 ^, the flow rate for 201139746 is set to about 36 L/min. The circumferential speed of the aluminum base material 220 is preferably 〇"m/min or more. When the peripheral speed of the substrate 220 is 〇1 m/min or more, the concentration of the electrolyte or the temperature unevenness around the aluminum substrate is sufficiently suppressed. The peripheral speed of the aluminum base material 22 is preferably 25.1 m/min or less from the viewpoint of the capability of the driving device. The aluminum substrate 220 is anodized as described above to form an oxide film having a plurality of pores, and the substrate 1A is anodized as shown in FIGS. 6(a) to 6(g) to form a roll mold. The 16 〇 steps are performed in the same manner. In the anodizing apparatus of the present embodiment described above, when the roll-shaped aluminum base material 220 is subjected to the anode oxygen (10) in the electrolytic solution of the anodizing bath 211, the anode base shaft of the bristle base material 22 is closed. Since the aluminum base material 220 rotates, the concentration of the electrolytic solution around the aluminum base material 22〇 or the temperature unevenness is suppressed, and the entire outer peripheral surface of the aluminum base material 22〇 is anodized substantially uniformly, and as a result, A roll-shaped mold in which the difference in the depth of the pores is suppressed. Further, in the state in which the aluminum base material 220 and the energization member 213 are in the same state, the substrate 220 is electrically connected to the electrification member 213 on the one hand, and the base material 220 is supplied with power, so that the contact area is large and the rotation is large. Since the influence of the sliding or the influence of the abrasion is also absent, the electric conduction failure can be suppressed, and the yield of the roll mold can be further improved. As a manufacturing material of the embossing mold for embossing (the present specification), the outer peripheral surface of the woven earth material is formed into an anodized layer having a plurality of fine pores. Porous 42 201139746, a method of a film-shaped mold, characterized in that, when the soil material is anodized in the anion bath of the anodizing bath, the aluminum substrate is rotated by the central axis of the inscription substrate as a rotation axis. An example of the method for producing the light mold will be described in detail. The method for producing the mold is, for example, a method having the following steps (a) to (f): b (a) a hollow cylindrical aluminum substrate A step of forming an oxide film on the outer peripheral surface by anodizing in an electrolytic solution at a constant voltage. (b) a step of removing an oxide film to form an anode-oxidized pore formation point (Ο in the above step (b) Thereafter, in the electrolytic solution, the step of forming an oxide film having pores at the pore formation point is again anodized. (d) The step of expanding the diameter of the pores after the above step (c). After step (d), in the electrolyte Step (a) repeating the steps of the above steps (d) and (e). (Step (a)) Fig. 15 is a cross-sectional view showing an example of an anodizing apparatus. The upper cover 316' of the drain portion 314 which covers the upper portion of the anodizing bath 312 and which is filled with the electrolyte overflowing from the anodizing tank 312 is formed on the periphery of the anode oxidizing tank 312' filled with the electrolyte to temporarily accumulate the electrolyte. In the storage tank 318', the electrolyte solution received by the drain pipe portion 314 flows into the downflow channel 32 flowing down the storage tank 318, and the electrolyte solution in the storage tank 318 is formed on the lower side of the anode substrate bo to form an anode oxygen 43 201139746 The return flow path 324 sent back to the supply port 322 near the bottom of the reforming tank 312 is provided in the pump 326 in the middle of the return flow path 324, and the rectifying plate 328' that adjusts the flow of the electrolytic solution discharged from the supply port 322 is inserted into The hollow cylindrical aluminum substrate 330 that becomes the anode and horizontally maintains the axis 334 ' of the central axis 332 with the central axis 332 of the axial center 334 (that is, the central axis of the aluminum base material 330) as the rotational axis and the axis 334 And a driving device (not shown) in which the material 330 rotates, a two-position cathode plate 336 disposed opposite to each other with the aluminum base material 330 interposed therebetween, and a power source 338 electrically connected to the central axis 332 of the shaft center 334 and the two cathode plates 336. And a temperature adjustment mechanism 340 that adjusts the temperature of the electrolyte solution in the reservoir 318. The pump 326 forms a flow of the electrolyte from the reservoir 318 through the supply return passage 324 toward the anodizing tank 312, and pressurizes from the supply port 322. The electrolyte is ejected to form an electrolyte flowing upward from the bottom of the anodizing bath 312. The rectifying plate 328 is a plate-like member in which a plurality of through holes are formed to adjust the flow of the electrolyte. The electrolyte discharged from the supply 0 322 is substantially uniformly raised from the entire bottom of the anodizing bath 312, and is disposed between the aluminum substrate 330 and the supply port 322 so that the surface is substantially horizontal. The drive (not shown) is a motor or the like that is connected to the central axis 332 of the shaft center 334 by a ring-shaped chain or a tooth member (not shown). The two cathode plates 336 are metal plates which are arranged in parallel with respect to the central axis, and the substrate 33 is opened in a manner to sandwich the substrate 330 from the horizontal direction. Configured to. 201139746 The temperature adjustment mechanism 340 is a heat exchanger or an electric heater that uses water, oil, or the like as a heat medium. The anode of the aluminum substrate 33 of the anodizing apparatus 31 is used, for example, in the following manner. ▲When the aluminum substrate 330 is immersed in the electrolyte of the anodizing bath 312, the driving device (not shown) is driven to the central axis 332 of the axis 334 (that is, the central axis of the substrate 330) ) The 334 and the substrate 330 are rotated for the rotation axis. - Aspects of the secret material 33G are rotated '---the base material 33. A voltage is applied between the slabs 336, and the anodic oxidation of the substrate 33 is performed during the anodization of the substrate 33G, and the surface is etched from the anodizing bath 312. The electrolyte solution is supplied with an equal amount of electrolyte to the anodizing tank 312. Specifically, the second::::: the extreme oxidation tank 312 overflows, and the overflowed electrolyte is accumulated. The temperature of the electrolyte is solved in the storage tank 318: since it is disposed on the lower side of the substrate 33? The supply port M2 = back, in the pole oxidation tank 312. At this time, the self-supplied 使 使 使 使 使 使 使 电解液 电解液 电解液 电解液 电解液 电解液 电解液 电解液 电解液 电解液 电解液 电解液 电解液 电解液 电解液 328 328 328 328 328 328 328 328 328 328 328 328 328 328 328 328 328 328 328 328 328 328 328 328 328 Forming the self-positive, the average of the electrolyte rising upward at the bottom of the groove 312 = the amount of the electrolyte supplied to the anodizing tank 312 (the amount of the electrolyte from the supplied electrolyte), preferably relative to the anodizing bath; Capacity 45 201139746 Product, the number of cycles is more than three times in 3 minutes. By this, it is possible to efficiently perform the division = generation = division: for example, when the tank capacity is 1 〇 5 L, it is preferably % L oil 'more (four) 41 L/mm or more. As long as the supply amount of the electrolytic solution is 41 =, the entire electrolytic solution tank 312 is sufficiently ? From the viewpoint of the ability of the pump 326, the supply amount of the electrolytic solution is preferably 60 L/min or less, more preferably 55 L/min or less. The peripheral speed of the aluminum base material 330 is preferably 〇·1 m/min or more. As long as the circumferential speed of the material 330 is 〇! m/min or more, the concentration of the substrate, the concentration of the surroundings, or the temperature unevenness can be sufficiently suppressed from the viewpoint of the force of the driving device. The circumferential speed of the material MG is preferably 25.1 m/min or less. - as described above, the ?s substrate 33 is anodized to form an oxide skin having a plurality of pores, and the substrate 1A is anodized as shown in Fig. 6 (a) to Fig. 6 (g) (4) The step of forming the roll mold 16G is performed in the same manner. The method for producing a roll-shaped mold for dust printing according to the present invention described above is such that when the IS substrate 33 of the report is anodized in the electrolytic solution of the anodizing bath, the base of the base material 330 is rotated. The shaft 33 is rotated by the shaft. Therefore, the unevenness of the electrolyte or the temperature of the electrolyte around the base material 330 is suppressed, and the anode can be roughly performed over the entire outer peripheral surface of the aluminum base material 33 (). gasification. As a result, a roll-shaped mold in which the difference in the depth of the pores is suppressed can be produced. Further, a part of the electrolytic solution is discharged from the anodizing bath; 312, and an equal amount of the electrolytic solution is supplied to the 46201139746-JT-anodizing tank 312, so that the flow of the electrolytic solution is generated in the anodizing tank 312, and the aluminum substrate 330 is formed. The concentration of the surrounding electrolyte or the unevenness of the temperature is further suppressed. As a result, a roll-shaped mold in which the difference in the depth of the pores is further suppressed can be produced. 'In addition, if the electrolyte is overflowed from the anodizing tank 312, the overflowed electrolyte is returned from the supply port 322 disposed on the lower side than the aluminum substrate 330 to the anodizing tank 312, which is generated from the anodizing tank. The flow of the electrolyte rising upward at the bottom of 312 causes the concentration of the electrolyte or the temperature unevenness around the aluminum substrate 33〇 to be further suppressed. As a result, a roll-shaped mold in which the difference in the depth of the pores is further suppressed can be produced. Further, the two cathode plates 336 are disposed opposite to each other with respect to the central axis of the aluminum base material 330 and are interposed from the aluminum base material 330 so as to sandwich the aluminum base material 330 from the horizontal direction. Therefore, the cathode plate 336 is not disposed. The flow of the electrolyte generated in the anodizing bath 312 is hindered. As a result, the concentration of the electrolytic solution around the aluminum substrate 33〇 or the unevenness of the temperature is further suppressed, and a roll-shaped mold in which the difference in the depth of the pores is further suppressed can be produced. &lt;Production Method of Articles&gt; The method for producing an article of the present invention is an anodic oxidation of the outer peripheral surface of the roll-shaped mold for imprint obtained by the method for producing a roll-shaped mold for imprint according to the present invention. A plurality of fine pores of aluminum are transferred to the object to be transferred by an imprint method to obtain an article having a plurality of convex portions in which the pores are reversed on the surface. In the embossing method, a plurality of fine pores of the anodic oxygen 47 201139746 - aluminum alloy are exemplified by a photoimprint method to be described later or a roll-shaped mold which is heated by pressing a transfer body composed of a thermoplastic resin. The hot stamping method for printing onto the transfer target, and productivity, etc., is preferably a photoimprint method. The method for producing an article by photoimprinting will be described in detail below. With respect to the method for producing an article by photoimprinting, the following steps (1) to (111) are employed. u (I) a step of moving the base film along the surface of the rotating roll mold and sandwiching the active energy ray-curable resin composition between the surface of the roll mold. (II) irradiating the active energy ray-curable resin composition between the surface of the substrate film and the surface of the roll-shaped mold with an active energy ray to cure the upper 4 active energy ray-curable resin composition to form a surface The step of hardening the resin layer having a plurality of convex portions in which the pores of the anodized aluminum are reversed is formed. a (III) A step of peeling the base film together with the hardened resin layer from the roll mold. The base film ’ exemplifies a polyethylene terephthalate film, a polycarbonate (p〇iyCarb〇nate) film, a bismuth acrylate film, a triacetyl cellulose film, and the like. For the active energy ray-curable resin composition, for example, the active energy ray-curable composition described in paragraphs [〇〇46] to [0055] of JP-A-2009-174007 (Patent Document 1), Japanese Patent The active energy ray-curable resin composition described in the paragraphs [〇〇52] to [〇〇94] of JP-A-2009-2413 51. 48 201139746 Λ. In the case of producing an article by photoimprinting, for example, the manufacturing apparatus shown in Fig. 16 is used in the following manner. A roll-shaped mold having an anodized alumina having a plurality of pores formed on the outer peripheral surface and a strip-shaped base film 352 moving along the surface of the roll-shaped mold are supplied with active energy ray hardening from a tank 354. Resin composition 356. The base film 352 and the active energy ray-curable resin composition 356 are kneaded between the roll mold and the roll 360 whose axial pressure is adjusted by the pneumatic cylinder 358 to form the active energy ray-curable resin. The object 356 is uniformly advanced between the base film 352 and the roll mold 350 while being filled into the pores of the outer peripheral surface of the roll mold. In the state in which the active energy ray-curable resin composition 356 is interposed between the reticle mold and the base film 352, the active energy ray irradiation device 362 provided below the roll mold is used to align the activity from the base film 352 side. The energy ray-curable resin composition 356 is irradiated with an active energy ray, and the active energy ray-curable resin composition 356 is cured to form a plurality of fine pore-hardened resin layers 364 on the outer peripheral surface of the roll-shaped mold. The base film 352 having the surface of the hardened resin layer 364 formed thereon is peeled off from the roll mold by the peeling roller 366, whereby the article 368 is obtained. The active energy ray irradiation device 362 is preferably a high pressure mercury lamp, a metal, a bismuth lamp or the like, and the amount of light irradiation energy in this case is preferably ι 〇〇 mJ/cm 2 to 10000 mJ/cm 2 . As the article 368, an optical film (antireflection film or the like) or the like is listed. In the method for producing an article of the present invention described above, a section of the anodizing apparatus 410 in the form of FIG. 19 which is obtained by the method of 49 201139746, which has a depth of two different degrees of suppression, and a plurality of == convex portions is used. Fig. 2 is a cross-sectional view of the line A of Fig. 18. Fig. 2A is a cross-sectional view of the essential part for explaining the details of the member shown in Fig. 19. As shown in Fig. 18, the anodizing treatment apparatus 410 includes an anode filled with an electrolyte. The oxidation tank 412 covers an upper portion of the anodizing bath and is formed with an upper cover 416 of the drainage portion 414 for receiving the electrolytic solution overflowing from the anodizing tank 412, and temporarily accumulates the storage tank 418 of the electrolytic solution. The flow path of the electrolyte solution received by the drain pipe unit 414 to the storage tank 418 flows downward, and the electrolyte solution of the storage tank 418 is formed below the bottom of the anodizing tank 412 at a lower side than the |g substrate. The returned return flow path 424' is provided in the pump 426 in the middle of the return flow path 424, and the flow regulating plate 428 which adjusts the flow of the electrolytic solution discharged from the supply port 422. Referring also to Fig. 19, the anodizing treatment device 41 Including: insert separately a pair of rotating jigs 432A and 432B having a circular plate shape of openings 431A and 431B at both ends of the hollow cylindrical inscribed base material 430 of the anode; the rotation jigs 432A and 432B are rotatably supported, respectively, and Rotating the jigs 432A and 432B to support the pair of holding plates 433A and 433B of the aluminum base material 430 (see FIG. 19); the two cathode plates 436 disposed opposite to each other with the inscription substrate 430 interposed therebetween; and electrically connecting to the aluminum substrate The power supply 438 of the 430 and the two cathode plates 436; and the temperature regulation mechanism 440 for adjusting the temperature of the electrolyte of the storage tank 418. 50 201139746 -------- The pump 426 is formed from the storage tank 418 through the return flow path 424 flows toward the anodizing tank 412, and pressurizes from the supply port 422 to eject the electrolyte, thereby forming a flow of the electrolyte rising upward from the bottom of the anodizing bath 412. The rectifying plate 428 is The plate-like member in which a plurality of through holes are formed adjusts the flow of the electrolytic solution so that the electrolytic solution discharged from the supply port 422 rises substantially uniformly from the entire bottom portion of the anodizing tank 412, and is disposed so that the surface is substantially horizontal Aluminum substrate 430 and supply port 4 The two cathode plates 436 are metal plates which are disposed in parallel with respect to the central axis of the substrate 430 and sandwich the aluminum substrate 430 from the horizontal direction, from the aluminum substrate. The temperature adjustment mechanism 440 provided in the storage tank 418 is a heat exchanger, an electric heater, or the like that uses water, oil, or the like as a heat medium. Referring to Fig. 19, the holding plate 433A is attached. 433B is a metal plate that is disposed to face outward with a gap interposed therebetween by sandwiching the aluminum base material 430 in the axial direction 4C1, and has a rotation jig 432A rotatably inserted in the axial direction 4C1 of the aluminum base material 430. The opening of 432B is the bearing portions 434A and 434B. On the inner circumferential surface of the bearing portion d 43 , dry bearings 435A and 435B made of a resin material or a metal material are provided, and the rotation jigs 432A and 432B are opposed to the rotation jigs 432A and 432B by the dry bearings 435A and 435B. The retaining plates 433A, 433B are rotatably supported. On the upper portions of the holding plates 433A, 433B which are separated from each other, a plurality of bar members 441 (see also Fig. 18) which are traversed or the like are provided. The holding plates 433A and 433B are coupled to each other by the rod members 441 in a state in which they are parallel to each other so as to hang down from the rod members 441. Referring to Fig. 20, the rotating jigs 432, 432 are fitted into the openings 431A, 431 of the base material 430 or inserted in a lightly pressed state. At the same time, the water-stopping lining 470 is attached to both end faces of the opening of the aluminum base material 430, and the rotary dies 432A and 432B abut against the water-stopping gasket 470 by the flange portions 471a and 471B protruding in the outer diameter direction. The aluminum base material 430 is fixed to the end side. Thereby, the aluminum base material 43 is configured to be sealed inside by the water stopping pad 470 and the rotary jigs 432A and 432B. Further, the water stopping method for sealing may be a sealing member for a ring-shaped ring in addition to the gasket, and may be inserted into the rotary tooling tools 432A, 432B in addition to the both end faces of the opening portion of the inscription substrate 430. A pad or the like is provided on the circumference. The aluminum base material 430 is fixed by being sandwiched by the rotary dies 432A and 432B, whereby the knot base material 430 is supported by the rotation in a state where the rotation in the circumferential direction with respect to the rotary dies 432a and 432B is regulated. The metallurgical tools 432A and 432B, more specifically, the aluminum base material 43 is supported by a rotary tool in such a manner that its axial direction 4ci (Fig. 19) is horizontal. In other words, the chain substrate 430 is supported by the rotary tool 432 person or 4323 so as to be in a state parallel to the bottom portion of the anodizing bath 412. In FIG. 19, the rotation center region 'of the rotation jig 432A on the left side of the paper surface is formed with a through hole 442 penetrating in the axial direction 4C1 i of the !S base material. The through hole 442 is a rod-shaped body made of a conductive material. In the state of the energization member 443, the "through-hole 442 is inserted and held with respect to the through-hole 442 so as to be relatively fixed with respect to the rotation jig 52 201139746 432A, and the rotation jig 432A The rotation rotates in conjunction. Referring to Fig. 20, when the energizing member 443 is fixed to the rotating jig 432a, a beak ring 472 is provided to stop the water so that the electrolyte does not flow from the through hole 442. There is no inflow of the electrolyte from the through holes, and the inside of the underlying substrate 430 is completely sealed with the above-described water-stop liner 470. The O-ring 472 is fitted into the cleaning groove 473 formed around the through hole 442 of the rotation jig 432A so as to be covered by the flange 474 formed on the electric conduction member 443. In the method of fixing the rotation tool 432A to the energization member 443, a case where the flange portion is formed in the energization member 443 and tightened by a bolt is considered, but other aspects may be employed. In addition, the reason why the aluminum base material 430 is a sealed structure is that the probe 448 abuts when the energization member is inserted into the electrolytic solution and is brought into contact with the insulating base material 430 as described later. On the contact surface of the substrate 43A, oxidized fineness having poor conductivity is also formed, which affects the energization state and affects the formation of the oxide film. Further, since it is not a closed structure, the inside of the aluminum base material 43 is not subjected to an electrolytic solution, and it is not excessively long: it is left in the processing tank, and the like, and the electric power of the material 43〇(4) is light. People another - dealing with lions. By this, there is no change in the composition or concentration of the treatment liquid in the tank. Moreover, the use of the electrolyte is reduced, and the amount of electrolyte used in the anode deuteration treatment tank 412 is also reduced. How to reduce the cost of the ship or the electrolyte. The end of the abutment 443 is formed into a conical shape. The end portion 444 is formed by the lower end side of the power supply flat rod 445. The lower end side is formed by the 446. The rotation receiving portion 446 has a conical recess 53 201139746 447' and the front end of the conical end portion 444 abuts The lowermost portion of the recessed portion 447 is limited in position by surrounding the conical shape by the side surface region of the recessed portion 447. The energizing member is electrically connected via the power supply flat bar (t bar) 445 and the twist receiving portion 446. In the power source 438 (Fig. 18), a current is supplied from the power source 438. Further, the conical end member may be a body that is electrically connected to the energizing member 443, or may be detachably attached to the other member. On the side, the probe 448' probe 448, which is an energizing member made of a pair of conductive materials, which is protruded in the radial direction, is integrally fixed to the inner peripheral surface of the aluminum base material 43A so as to be electrically conductive. Way to size and shape By setting, the probe 448 is in contact with the aluminum base material 430, and an electric current can be supplied to the aluminum base material 43. In more detail, the probe 448 is bent at the front end side of the aluminum base material 430 side, and the curved portion is bent. The portion has a flat abutting surface 448A' that abuts against the inner circumferential surface of the inscription substrate 430, and the substrate 430 is energized therefrom. The anodizing device 41 configured as described above transmits a motor (not shown). When the aluminum base material 430 is rotated by the driving force, the rotation jig 432A on the opening 431A side rotates in conjunction with the aluminum base material 430 that is rotated by the rotation jig 432B. Therefore, the electric conduction member fixed to the rotation jig 432A 443 'rotates in synchronization with (or in conjunction with) the aluminum base material 430 in a state in which it is electrically contacted in a predetermined region of the inner peripheral surface of the aluminum base material 430. The anodizing treatment device 41 is used. The anodic oxidation of the aluminum base material 430 is performed as follows. 54 201139746 In a state in which the aluminum base material 430 is immersed in the electrolytic solution of the anodizing bath 412, a motor (not shown) is driven to rotate the rotary jig 432b. 'And the aluminum substrate 430 is 4C1 in its axial direction The rotation center rotates. On the one hand, the aluminum substrate 430 is rotated, and on the other hand, a voltage is applied between the aluminum substrate 43A and the cathode plate via the power supply rod 445, the rotation receiving portion 446, and the probe 448, and aluminum is applied. Anodization of the substrate 43. During the anodization of the aluminum substrate 430, on the one hand, the aluminum substrate 430 is rotated, and a part of the electrolyte is discharged from the anodizing bath 412, and the anodizing tank 412 is supplied. Specifically, the electrolyte is overflowed from the anodizing tank 412, the overflowed electrolyte is discharged to the storage tank 418, and the temperature of the electrolyte is adjusted in the storage tank 418, and then the electrolyte is set to be self-aligned. The substrate is fed back to the anodizing tank 412 at the lower side of the supply port a2. At this time, 'the pump 426* is applied from the supply port 422 to eject the electrolyte', and the flow of the electrolyte is adjusted by the rectifying plate 428 to cause the electrolyte ejected from the supply port 422 to be discharged from the anodizing bath. The 412 touches the bottom substantially uniformly - and thus rises, thereby forming a substantially uniform flow of the electrolyte rising from the bottom of the anodizing bath 412 to the upper portion. The supply amount of the electrolytic solution to the anodizing bath 412 (the amount of the electrolytic solution discharged from the supply port 422) is preferably a volume with respect to the anodizing bath, and the number of cycles is once or more in 3 minutes. Thereby, the anodizing bath 4 can be frequently renewed, and heat is removed from the crucible efficiently, and the generated hydrogen is removed. Specifically, it is preferable to set the supply flow rate to about 36 L/min when the tank capacity is 1 G7 L. ' 55 201139746 The circumferential speed of the aluminum substrate 430 is preferably 〇i m/min or more. When the peripheral speed of the Ilu substrate 430 is 〇.1 m/mjn or more, the concentration of the electrolytic solution around the surface substrate 430 or the temperature unevenness is sufficiently suppressed. The circumferential speed of the aluminum base material 43 is preferably 25.1 m/min or less from the viewpoint of the capability of the driving device. The aluminum substrate 430 is anodized as described above to form an oxide film having a plurality of pores, and the substrate 1A is anodized as shown in FIGS. 6(a) to 6(g) to form a roll mold. The 16 〇 steps are performed in the same manner. In the anodizing apparatus 41 of the present embodiment described above, when the roll-shaped aluminum base material 430 is anodized in the electrolytic solution of the anodizing bath 412, the central axis of the aluminum base material 430 is the rotation axis. When the aluminum base material 430 is rotated, the concentration of the electrolytic solution around the aluminum base material 430 or the temperature unevenness is suppressed, and the entire outer peripheral surface of the aluminum base material 430 is anodized substantially uniformly. As a result, fineness can be produced. A roll-shaped mold in which the difference in the depth of the hole is suppressed. Further, in a state in which the aluminum base material 430 is brought into contact with the probe 448, on the one hand, the surface substrate 430 is rotated in synchronization with the probe 448, and on the other hand, the surface substrate 430 is energized from the probe 448, and thus The abrasion between the aluminum base material 430 and the probe 448 can suppress the electric conduction failure, and the yield of the newspaper mold can be further improved. In other words, when the probe 448 is not synchronized with the aluminum base material 430, only the aluminum base material 430 is rotated (the probe 448 is fixed in a state of being in contact with the inner peripheral surface of the aluminum base material 430, and only When the aluminum substrate 430 is rotated, the probe 448 is slid on the one hand on the inner peripheral surface of the aluminum substrate 430 to perform energization on the one hand, 56 201139746 thereby causing contact wear between the probe 448 and the aluminum substrate 430. Therefore, the electrophoresis defect may be caused between the probe 448 and the substrate 430. In the present invention, the aluminum substrate 430 and the probe 448 are rotated synchronously in a state where the substrate 430 and the probe 448 are brought into contact with each other. This prevents the occurrence of such a power failure. Additionally, the probe 448 does not need to rotate completely with the aluminum substrate 430. For example, in the case where the probe 448 and the aluminum base material 430 are rotated by different power sources, it is difficult to rotate the members completely synchronously. Therefore, in the invention of the present application, the state in which the probe 448 and the aluminum base material 430 are interlocked and rotated in a substantially fixed state is also included in the synchronous rotation. Here, Fig. 21 shows an experimental example of actual measurement of the energization state of the aluminum base material 430 in the anodizing apparatus 41. In Fig. 21, the horizontal axis indicates that the time axis (seconds) indicates the current value of the current applied to the aluminum base material 430. (A is seen from Fig. 21, and it is confirmed that the current value is stable in the initial stage, and the fixed current value is stable for a long period of time. In the state of the aluminum substrate 43, the aluminum substrate 43 is energized. From this experimental example, the effect of suppressing the current failure of the present invention can be confirmed. Further, the dry shape of the electrode member 443 is dried (the conical end portion 444). The contact area with the rotation receiving portion 446 can be reduced, so that the powder limit generated by the contact can be limited, and the surface can be renewed. Therefore, the helmet needs to be lowered, and the heat is formed into electrical insulation. The high alumina layer can be kept energized. [Examples] The following is a detailed description of the invention by way of example. (Pore of anodized aluminum) Anode oxidation (four) - part of money" 57 201139746 Evaporation, using an electric field emission scanning electron microscope (JSM-7400F, manufactured by JEOL Ltd.), observing the profile at an accelerating voltage of 3 〇〇kV, and measuring the depth of the pores. σ 在 anodizing When the aluminum substrate is not rotated: After the final anodization is completed, the outer circumference of the roll-shaped mold 350 shown in FIG. 17 is equally divided into six positions from position i to position 6, and ten parts are measured. The depth of the pores is averaged. When the aluminum substrate is rotated during the anodization: ^ In the state where the rotation of the aluminum substrate is stopped immediately after the final anodization is completed, FIG. The outer circumference of the roll mold 35 is shown as a position 1 to 6 in which the circumference is equally divided into six, and the depth of the pores in one part is measured, and the average value is obtained. (Reflectance) Using a spectrophotometer (Manufactured by Hitachi, Ltd., UWOOO), the relative reflectance of the surface of the cured resin layer was measured at an incident angle of 5. and a wavelength of 380 nm to 780 nm. In the case where the aluminum substrate was not rotated during anodization: After the end of the last anodic oxime b, the outer circumference of the roll-shaped mold 350 shown in FIG. 17 is subjected to the surface of the cured resin layer corresponding to the position 1 to the position 6 which is equally divided into six, and the width direction of the film is measured. One end, central, another The reflectance of the three parts of the end. When the aluminum substrate is rotated during the anodization: The roll shape shown in Fig. 17 is stopped in the state where the rotation of the aluminum substrate is stopped immediately after the final anodization is completed. The outer circumference of the mold 350 is rounded 58 201139746 '&quot;--1—the surface of the cured resin layer corresponding to position 1 to position 6 on Saturday is measured, and one end, the center, and the other end of the width direction of the crucible are measured. Reflectance of three parts (active energy ray-curable resin composition A) 45 parts by mass of succinic acid / trihydroxy decyl ethane / acrylic acid molar ratio 1: 2 : 4 condensation reaction mixture, 45 mass 1,6-hexanediol dicapendate (manufactured by Osaka Organic Chemical Industry Co., Ltd.), 1 part by mass of radically polymerizable polyoxyxide oil (manufactured by Shin-Etsu Chemical Co., Ltd., 122-1602), 3 masses 1-hydroxycyclohexyl phenyl ketone (manufactured by Ciba Specialty Chemicals Co., Ltd. ' Irgacure (registered trademark) 184, having an absorption wavelength range above the absorption wavelength of 340 nm), and 0.2 parts by mass of bis (2, 4, 6-) Trimethyl phenyl styrene) phenyl phosphine oxide (Ciba Refinery) The active energy ray-curable resin composition A was obtained by manufacturing, lrgacure (registered trademark) 819 'having an absorption wavelength range at a wavelength of 340 nm or more). [Example 1] After performing a feathering treatment on a hollow cylindrical inscription substrate (purity: 99.99%, length: 280 mm, outer diameter: 2 〇 0 mm, inner diameter: (5)), it was subjected to perchloric acid. Electrolytic polishing was carried out in a /ethanol mixed solution (volume ratio = 1/4). Then, using the anodizing apparatus shown in Fig. 15, the substrate was placed in a 107 L electrolytic solution composed of an aqueous solution of 0. 3 oxalic acid, and the bath was kissed, DC: 40 V, and the supply amount of the electrolyte was used. : 41 L / min, the circumferential speed of the aluminum substrate was 3.8 m / min, and anodizing was performed for 3 minutes to form an oxide film (step (a)). 59 201139746 The formed oxide film is temporarily dissolved and removed in a mixed aqueous solution of 6 wt% phosphoric acid and is wt% of chromic acid (step (b)), and then again under the same conditions as in the step (a). The anodization is performed in seconds to form an oxide film (step (c)). Then, it was immersed in a 5 wt% phosphoric acid aqueous solution (31.7 ° (:) for 8 minutes to carry out a pore size expansion treatment for expanding pores of the oxide film (step (d)). Further, in the same manner as in the step (a) Under the conditions, anodization is performed for 45 seconds to form an oxide film (step (e)). Further, steps (d) and (e) are repeated, and step (d) is repeated 5 times in total. [Step (4) is totaled 4 (Step (1)). The roll-shaped mold A of the anodized aluminum having the pores of the nucleus was obtained. The depth of the pores of the anodized alumina was measured. The results are shown in Table 1. Next, the roll mold A was immersed in a 脱"wt% solution of a release agent ("optool DSX (trade name) manufactured by Daikin Industries, Inc.) for 1 minute, and air-dried for 24 hours, and then subjected to mold release treatment. An article having a plurality of convex portions on the surface is produced by the manufacturing apparatus shown in the drawing. The roll-shaped mold A is used as the roll-shaped mold 35 (the active energy ray-curable resin composition Μ is used as the active energy ray-curable resin composition 356). Using polyethylene terephthalate (manufactured by Toyobo Co., Ltd., trade name: A4300 'thickness · 75 μηι) as the base film 352. The active energy ray-curable resin composition a from the base film 352 side illuminates the ultraviolet light of 1100 mj/cm2 according to 201139746 The hardening of the Huai γ resin composition 。 The activity energy linearity was measured on the surface of the hardened resin layer of the obtained article. The results are shown in Table 2. The relative reflectance was entered [Comparative Example 1] In the case where the base material is not rotated, the outer surface of the secret material is obtained. (4) An anodized tantalum mold B is formed to form a hole having a shape of a crucible. Shape =: depth. The results are shown in Table 1. Examples of the pores = '= 1 The roll-shaped mold (four) mold release treatment was carried out in the same manner. The insect-like roll-shaped mold B was used as the roll-shaped mold 350, and the article having the plurality of convex portions on the surface was produced in the same manner as in the example 1. The hardened resin of the obtained article was measured. Table 3 of the layer. Relative reflectance of the surface. The results are shown in the depth of the pores in the [Table 1] position (nm)

201139746 [Table 2] Example 1 Relative reflectance (%) Position width direction 400 nm 580 nm 750 nm 1 One end 0.52 0.41 0.38 Center 0.5 0.39 0.36 The other end 0.54 0.35 0.33 2 One end 0.52 0.39 0.41 Center 0.53 0.38 0.4 The other end 0.57 0.36 0.4 3 One end 0.55 0.4 0.36 Center 0.59 0.42 0.38 The other end 0.59 0.43 0.39 4 One end 0.62 0.42 0.42 Center 0.65 0.41 0.41 The other end 0.6 0.39 0.43 5 One end 0.57 0.41 0.42 Center 0.56 0.39 0.39 The other end 0.57 0.39 0.4 6 One end 0.55 0.39 0.38 Center 0.57 0.43 0.38 The other end 0.61 0.39 0.37 62 201139746 [Table 3] Comparative Example 1 Relative reflectance (%) Position width direction 400 nm 580 nm 750 nm 1 End 1.38 0.72 1 Center 1.3 0.66 0.9 The other end 1.47 0.74 1.01 2 One end 1.89 0.74 1.16 Central 1.74 0.76 1.11 The other end 1.6 0.75 1.03 3 One end 1.23 0.69 0.88 Central 1.65 0.71 1.01 The other end 1.04 0.68 1.07 4 One end 0.83 0.66 0.75 Central 0.75 0.68 0.72 The other end 0.78 0.7 0.72 5 One end 1.6 0.8 1.03 Central 1.5 0.76 1.02 The other end 1.22 0.76 0.88 6 one end 1.66 0 .69 1.08 Center 1.35 0.63 1.07 The other end 1.43 0.67 1.07 On the one hand, the aluminum substrate is rotated on the one hand and anodized on the one hand. In the roll-shaped mold A of Example 1 manufactured, the difference in the depth of the pores is small. i As a result, even in the object having a plurality of convex portions on the surface, the difference in the $^ of the convex portion, that is, the reflectance is small. On the other hand, in the roll-shaped mold B of Comparative Example 1 produced by performing anode vaporization without rotating the substrate in the electrolytic solution, the difference in depth of the pores is large. As a result, in the article having a plurality of convex portions on the surface, the difference in the ancient portion of the convex portion, that is, the difference in reflectance also increases. [Example 2] In the present Example 2, specific conditions were set for the anodizing treatment apparatus 2 (7) shown in Fig. 10, and the operation was carried out, and the hollow cylindrical substrate was moved (purity: 99.99%, length: 280, outside) Both end faces of the diameter: 2 〇〇, internal pinch 155 mm) and the end faces of the energization member 213 are set to a taper angle 30 with respect to the axial direction. The rough surface of the respective tapered surfaces 22A, 213A was set to Ral.6. The aluminum base material 220 was placed in a 1 〇 6 L electrolytic solution composed of a mol.3 mol/L aqueous solution at a bath temperature of 15.7. (:, the supply amount of the electrolyte: 36 L/min, the pressing force of the two electrified members 213: 〇. 2 MPa, the circumferential speed of the aluminum substrate 22 .. 3.8 m/min, and the voltage: 4 〇 Fig. 12A shows an experimental example (curve) obtained by actually measuring the state of the current value when the current is turned on for 6 minutes in the anodizing apparatus 21, in the case of v. In Fig. 1j, The ordinate axis table does not accumulate time (seconds), and the vertical axis represents the floating range (A) of the current value. Further, Fig. 12b shows the measurement result of the floating range of the current value up to 1800 seconds in the measurement result shown in Fig. 12A (in addition, Figure 64 201139746 12B, detailing the scale of the floating range (A) of the current value.) In this example, 2 t, according to these figures, it can be confirmed that the long-term stable fixed current value does not greatly change, but for the aluminum base The material 22 was energized. The effect of suppressing the electrification failure of the present invention was also confirmed from the example 2. (Comparative Example 2) Hereinafter, the temperature at the time of electrolytic treatment in the treatment apparatus of the present invention and the rectangular parallelepiped treatment tank will be described. of In the substrate, a hollow cylindrical I-lu substrate (purity: 99 99%, length: 1000 mm, outer diameter: 2 mm, inner diameter: 155 _) is used in the treatment tank and cuboid processing of the present invention. In the treatment tank in which the anodizing treatment is performed in the tank, the distance from the central axis P to the inner surface Ilia of the bottom portion 111a is set to 4 mm in the distance D, and the amount of the treatment is circulated. The temperature has been adjusted to 耽, 8 # Fig. 9 is a curve obtained by comparing 2 = temperature at the time of anodizing in each treatment tank. Fig. 8 is the temperature of the electrolyte at a portion 50 mm away from the surface. The entire processing tank is measured as the number of points in the heat treatment and the oxidation reaction of the internal energization (10). However, it can be seen from Fig. 8 that the temperature rise of the treatment tank of the present invention is due to the 'cuboid shape. The processing of the kerchief produces a cycle = heat during heat, and thus the retention portion;:: phase 65 201139746 and 'Fig. 9 is a curve showing the maximum temperature difference of several points of the substrate length on the surface of the substrate. The temperature difference refers to the temperature effect on the surface of the substrate. As can be seen from Fig. 9, the temperature difference of the treatment tank of the present invention is small. The retention portion generated in the two rectangular processing tanks causes an increase in the temperature of the electrolyte on the surface of the substrate in the vicinity of the retention portion. In the treatment tank in which the secondary substrate is treated, the treatment tank of the present invention is u〇L with respect to the volume of the rectangular parallelepiped treatment tank of 25 μL. According to the above comparison, the retention of the electrolytic solution can be prevented in the treatment tank of the present invention. Therefore, it was confirmed that the amount of the electrolytic solution used was further suppressed. (Comparative Example 3) Hereinafter, as a comparative example 3, the current value when the energization member is brought into contact with the aluminum base material at a point will be described. Referring to Fig. 13, the comparison is made. In the anodizing apparatus used in Example 3, the sliding bearing 241 which is in contact with the inner surface of the both ends of the base material 22 (four) is provided, and the outer peripheral surface of the sliding bearing 241 is fixed to the aluminum base material 220 by the annular outer casing 240. And connected. The crucible base material 220 is rotated by an external rotating mechanism (not shown). The contact probe 242 extending from the current-carrying member 243 is brought into contact with the inner surface of the aluminum base material 22 to be energized. Further, in the state of Fig. 13, the result of actual measurement of the state in which the aluminum base material 220 is energized under the same conditions as in the above-described Example 2 is shown in Fig. 14 1 14 +, and the horizontal axis represents the integrated daily pin (second), vertical The axis represents the floating range (A) of the current value. In addition, in Fig. 14, the measurement results up to the integration time of 12 sec (20 minutes) are shown. 66 201139746 - Comparing the experimental examples in the anodizing apparatus of the present invention of Figs. 2A and 12B with Fig. 14, it is understood that in Comparative Example 3, there is always some floating in the current value. In addition, various parts with large current value variations occur. The reason for this is that the contact area of the aluminum base material 220 and the contact probe 242 in contact with the point is small, and when the aluminum base material 220 rotates, the contact surface due to the difference in the rotation period has a large ash motion and thus cannot be stably contacted; The substrate 220 and the contact probe 242 are worn or slipped on the contact surface, and there is a state in which the contact is not instantaneously made, and the current value largely fluctuates. [Industrial Applicability] The roll-shaped mold obtained by the production method of the present invention is useful for the production of an optical film having a fine uneven structure called a moth-eye structure on its surface. . While the present invention has been described in its preferred embodiments, the present invention is not intended to limit the invention, and the invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view showing an example of a treatment tank of the present invention. Figure 2 is a cross-sectional view along the line of Figure 1. Fig. 3 is a side view showing another example of the overflow portion. 4 is a cross-sectional view showing an example of an electrolytic treatment apparatus of the present invention. Fig. 5A is a cross-sectional view taken along line ln-m of Fig. 4. Fig. 5B is a perspective view of the treatment tank and the electrode plate included in the electrolytic treatment apparatus shown in Fig. 4.曰67 201139746 Process=/面&quot;i: Fig. 6(g) is a view showing the formation of the pores of the anodized aluminum side view showing an example of the prior processing apparatus, and Fig. 7A is a view showing the A diagram of i of the processing apparatus, and Fig. 7B is a cross-sectional view taken along line .1 of the figure.疋~ The curve of the maximum temperature at which the number of points near the wall of the tank rises. The temperature of the electrolyte at the time of electrolysis treatment in the treatment tank and the rectangular processing tank is η β ± — the maximum temperature difference of several points in the longitudinal direction of the surface 1 &amp; not the substrate surface Fig. 10 is A section 11 of the anodizing apparatus according to the embodiment of the present invention is a cross-sectional view taken along line Α 。 2 。. In the anodizing apparatus of the second embodiment, the anodizing apparatus of the second embodiment is shown in Fig. 12A, and the graph _ = is a schematic constituent material of the anodizing apparatus of the comparative example 3; === Anodization of Example 3 - Base Figure 15 is a cross-sectional view showing an example of an anodization. 68 201139746 ------- 16疋 A schematic diagram of an example of a manufacturing device for a non-article. Equalization: Position 17 indicates that the outer circumference of the roll mold is circumferentially illustrated. Fig. U is a cross-sectional view of the anodizing apparatus according to the embodiment of the present invention == 4Α_4Α line of Fig. 18. Figure. Fig. 2 is a cross-sectional view of the main portion of the detail of the member shown in Fig. 19, and Fig. 21A is a graph showing the state of the g-polar oxidation treatment. ~ [Description of main component symbols] la, 134a, 213A: tapered surface 1A · base material 1A': circumferential surface (outer peripheral surface) 1L: electrolyte/treatment liquid 1L': treatment liquid 4C1: axial direction II: electrolytic treatment device 110 : treatment tank III: treatment tank body 111a: bottom portion 111Y: inner surface 111b, 111c: side surface llld, Ule: end surface 69 201139746 112: electric field liquid supply portion 112a: supply pipe 112b: discharge portion 1121a, 1121b: discharge port 113: Overflow portion 113': hole 114: sealing material 120: electrode plates 121, 224, 338, 438: power supply 130: rotating mechanism 131: support shaft 132, 216: elastic members 133, 214: energizing shafts 134, 213, 243 Electric conduction members 135, 219, and 241: sliding bearings 140 and 212: outer grooves 141, 229, 320, and 420: flow paths 150, 225, 318, and 418: storage grooves 151, 228, 324, and 424: return flow path 152 173, 227, 326, 426: pump 153, 226, 340, 440: temperature adjustment mechanism 160: roll mold 161: fine hole 162: oxide film 70 201139746 163: pore occurrence point 170: treatment tank 171: supply tube 172: porous plate 210: anodizing device 211: anodizing grooves 211A, 211B: side wall 2 15: Support shaft (rotary drive mechanism) 217, 328, 428: rectifying plates 218, 322, 422: supply port 220: aluminum base material 220A: tapered surface 221, 336, 436: cathode plate 240: outer casing 242: contact probe 310 · Anodizing treatment device 312: Anodizing tanks 314, 414: Drain pipe portions 316, 416: Upper cover 330: Aluminum base material 332, P: Central axis 334: Axis 342: Fine hole 344: Oxide film (Anode Alumina) 71 201139746 350 : Roller mold 352 : base film (transferred body) 354 : storage tank 356 : active energy ray-curable resin composition 358 : pneumatic cylinder 360 : roll 362 : active energy ray irradiation device 364 : Hardened resin layer 366: peeling roll 368: article 410: anodizing device 412: anodizing bath 430: aluminum base material 431A, 431B: opening 432A, 432B: rotating jig 433A, 433B: holding plate 434A, 434B: bearing portion 435A 435B: dry bearing 441: rod member 442: through hole 443: energizing member (rotating shaft) 444: conical end portion 445: power supply flat rod 446: rotary receiving portion (rotation receiving portion) 72 201139746 447: concave portion 448: exploration Needle (energized member) 448A: abutment surface 470: Water pads 471A, 471B: flange portion 472: o-ring 473: a trench 474: flange D: distance r: radius S: voids 73

Claims (1)

201139746 VII. Patent application scope: 1. A method for manufacturing a roll-shaped mold, which is energized and anodized by using a cylindrical row of electric current configured in an electrolytic solution of an anodizing bath to be manufactured on the eve (2) a roll-shaped mold having a plurality of irregularities; the method for manufacturing the roll-shaped mold includes an anodizing step = the electric member abuts against the wire, and the central axis of the earth material is a center of rotation to make the aluminum The substrate is energized by rotating the substrate through the energization member. Method of manufacturing a light mold as described in 1 $ The aluminum base material is rotated in synchronization with the energization member. The electric conduction member for manufacturing the (four) one-two (four)-shaped mold includes a conductive shaft member and a probe fixed to the member and abutting against the wire; and the 'L-axis probe abuts on the cylindrical shape The inner peripheral surface of the substrate, the power supply =::;:;::= component method, i = the manufacturing method of the parent mold described in claim 3, at least one end portion of the shaft member along the above The axial direction θ of the substrate is located outside the aluminum substrate; the shape of the at least one end portion is a conical shape; 201139746: At least one end portion of the element is slid in the same manner as the power supply member. In the manufacturing method of the roll-shaped mold according to the third aspect, the county material is rotated about the central axis by rotating the (four) rotating jig of the reduced material; and the step ir member is attached to the above-mentioned Puji tool. The above-mentioned substrate is the same as the method described above, and the manufacturer of the comparative mold described in the fifth paragraph of the patent application is the above-mentioned rotary jig to stop the end of the aluminum substrate. The method of manufacturing a read mold according to the first aspect of the patent range is as follows: The anodizing bath discharges a portion of the electrolytic solution, and the % polar oxidation tank supplies an equal amount of an electrolytic solution. The method of the invention, the manufacturing method of the mold described in item 7 of the patent scope is as follows: ==?=oxidation_the substrate is overflowed on the upper side to be returned to the lower side of the supply substrate of the upper substrate The anodizing bath method, 9 the material of the dip material, the rhythm of the material, the shape of the anodizing tank is semi-cylindrical, and the electrolyte is uniformly supplied from one side 75 201139746, and the electrolyte is supplied separately. One side overflows. 10. The method of manufacturing a roll-shaped mold according to claim 9, wherein the anodizing bath is in the shape of a strip that accommodates an electrolyte and is impregnated with the aluminum substrate, and includes: The treatment tank main body in which the bottom portion f is curved into an arc shape so as to treat the circumferential surface of the base material in the tank main body, the electrolyte solution is supplied to the electrolysis portion of the bristle body, and the overflow portion of the electrolyte is discharged from the tank main body. And the electrolyte supply portion provided along the longitudinal direction of the treatment tank body, and supplying the electrolyte from above the side surface of the treatment tank body; / 13 from the treatment tank body The liquid is discharged from the overflow portion provided on the other side surface of the other side of the treatment tank body in the longitudinal direction. 11. The method of applying the roll-shaped mold according to the item 1G, wherein the material is formed in the same manner as the material of the above-mentioned overflow material supplied from the electrolyte supply unit, and the direction is 12. In the manufacturing method according to Item 1 or Item 2, the energizing member of the towel is an energizing member that is in contact with one end surface of the substrate. The roll-shaped mold method according to claim 12, wherein the energy-carrying member is disposed to abut against one end surface of the aluminum base material and sandwich the aluminum base material in the axial direction; 5 The electric conduction member is rotated and rotated in a state in which the energization structure substrate is brought into contact with each other. / The above-mentioned aluminum method, = the manufacturer of the affinity mold according to claim 13 of the patent application. The rotary jig is such that the end portion of the aluminum base material is stopped. In the manufacturing method of the parent mold according to item 12 of the patent application, the electric member is moved in the direction of the upper substrate _ to bring the aluminum substrate into contact with the energization member. In the method, the manufacturing method of the roll-shaped mold according to item 12 of the patent application scope is energized or the both end faces include the first tapered surface, and the first tapered surface of the upper first tapered surface is contacted by the second tapered surface. The method for manufacturing the above-mentioned article by contacting the above-mentioned second tapered surface with the above-mentioned second tapered surface is used to manufacture two articles having the surface on the surface and comprising: by using an imprint method to be formed in the use of The plurality of fine pores of the embossing roll die ## anodized obtained by the manufacturing method described in the above-mentioned Hs item 7 are transferred to the transfer target; the convex ridge 2 has the pores reversed and transferred Made of more than 77 shapes