201139085 六、發明說明： 【發明所屬之技術領域】 並 本發明係關於一種裝置，其係 可抵消由-移動件移動所產生之反作用力。專輸糸、.4 【先前技術】 於—平板顯示器（如液晶顯示器）的製程中 =傳輸系統如機械手臂、，臂等，來傳輸一標的物: 基板、液體喷灑噴嘴、或噴嘴傳輸模組等。 上述之傳輸系統包括一框架、一支 =!件設置於框架上，移動件設置於支撐件== 的q私動。傳輸系統係可使移動件移動而達到一預設目 ^傳輸級的操作過財，傳輸純仙為移 並且—一 為了有效降低此震動現象，業者將 置應用於傳輸系統中，如…利 2_·〇〇〇3426號（案名為反作用力傳輸系統）所揭露的 反作用力抵銷裝置。 ，八：而，由於上述習知之反作用力抵消裝置與傳輪系統 置，因此’若傳輸系統之移動方向與傳輸系統之 於:傳動方向不同時'反作用力抵消裝置則無法應用 4 201139085 此外，由於反作用力抵銷裝置與傳輸系統係分離設 置，所以其配置及安裝非常複雜。 【發明内容】 有鑒於上述課題，本發明之一目的在於提供一種反作 用力抵消裝置，其中，由一傳輸系統之移動件之移動所產 生之反作用力係傳送至與傳輸系統連接之一質量體，藉此 將反作用力轉換為質量體之移動動能而消除反作用力，並 因而簡化反作用力抵消裝置。此外，即使當傳輸系統沿與 移動件之移動方向不同之方向移動時，由移動件之移動而 產生之反作用力仍可被抵消。 本發明之另一目的在於提供一種點膠機，其係具有上 述之反作用力抵消裝置。 為達上述目的，本發明提供一種反作用力抵消裝置， 其係設置於一傳輸系統，傳輸系統包含一支撐件、一移動 件以及一框架，移動件可在支撐件上移動，框架係可滑動 地支撐該支撐件。反作用力抵消裝置包含一質量體，其係 連接於支撐件，並藉由移動件之移動而產生之反作用力， 而沿與支撐件之一移動方向垂直之方向移動。 於此，為將由移動件之移動而產生並傳送至支撐件之 反作用力傳送至質量體，使其沿與支撐件之移動方向垂直 之方向移動，反作用力抵消裝置可更包含一旋轉件，其係 可旋轉地連接於框架，旋轉件之一第一端係依據一旋轉中 心而連接於支撐件，旋轉件之一第二端係連接於質量體。 201139085 旋轉件之旋轉中心至旋轉件連接於支撐件之一接觸 點之一距離係小於旋轉件之旋轉中心至旋轉件連接於質 量體之一接觸點之一距離。 另外，在質量體藉由移動件之移動而產生之反作用 力，而沿與支撐件之移動方向垂直之一方向移動之後，質 量體可藉由其自身重量回復至其原來位置。為使質量體能 夠快速且精準地回復至其原來位置，反作用力抵消裝置可 更包含一回復元件，其係提供沿質量體回復至其原來位置 之方向之一輔助力給質量體。 此外，一抗摩擦機構可設置於質量體與框架之間，其 係使質量體可滑動地連接於框架，並可避免反作用力從質 量體傳送至框架。 為達上述目的，本發明提供一種點膠機，其係包含一 點膠頭單元支樓元件、一點膠頭單元、一頭移動單元以及 一反作用力抵消裝置。點膠頭單元係可移動地設置於點膠 頭單元支撐元件。頭移動單元包含一支樓件以及一移動 件，支撐件係可滑動地連接於點膠頭單元支撐元件，移動 件係設置於點膠頭單元，使得頭移動單元驅動點膠頭單元 沿點膠頭單元支撐元件之一長軸方向移動。反作用力抵消 裝置包含一質量體，其係連接於支撐件，並藉由點膠頭單 元以及移動件之移動而產生之反作用力，而沿與支撐件之 一移動方向垂直之方向移動。 於此，為將由點膠頭單元以及移動件之移動而產生並 傳送至支撐件之反作用力傳送至質量體，使其沿與支撐件 6 201139085 之移動方向 -旋轉件，其反作用力抵消裳置可更包含 轉件之了㈣專地連接於點膠頭單元支樓元件，r 件之1二心:依據一旋轉中心而連接於支撑件，旋 點之轉t心至旋轉件連接於支樓件之-接觸 量體之1觸於％^件之&轉中心至旋轉件連接於質 質量體與點膠_ ηπ -距離此外，一抗摩擦機構可設置於 地連接於S)^單元支樓元件之間’其係使質量體f滑動 體傳送至點元支禮元件’並可避免反作用力從質量 此外修碩早元支撐元件。 重量從〜移=更叹置一回復元件以幫助質量體藉由其自身 此外位置回復至其原來位置。 架、-支撐^^共一種點膠機，其係包含-支撐框 係支撐〜點兀1 —反作用力抵消裝置。支撐框架 膠頭單元去/_、早兀支撐元件，—點膠頭單元係連接於點 動件，支撐移動單元包含一切件以紅移 於點膠頭單元支撐元件 ，彳吏ή导: · 、 元切元件沿支撐框架之—長=移動單元驅動點膠頭單 裝置包含-質量體，其係連^向移動。反作用力抵消 單元支撐元件以及移動件之㈣4撑件，並藉由點朦頭 與一動方向:直^ 於此，為將由點膠頭單元支 而產生並傳送至支撐件之反广件以及移動件之移動 乃傳送至質量體，使其沿 201139085 與支撐件之移動方向垂直之方向移動，反作用力抵消裝置 可更包含一旋轉件，其係可旋轉地連接於支撐框架，旋轉 件之一第一端係依據一旋轉中心而連接於支樓件，旋轉件 之一第二端係連接於質量體。 旋轉件之旋轉中心至旋轉件連接於支撐件之一接觸 點之一距離係小於旋轉件之旋轉中心至旋轉件連接於質 量體之一接觸點之一距離。 此外，一抗摩擦機構可設置於質量體與點支撐框架之 間，其係使質量體可滑動地連接於支樓框架，並可避免反 作用力從質量體傳送至支撐框架。 另外，可更設置一回復元件以幫助質量體藉由其自身 重量從一移動位置回復至其原來位置。 【實施方式】 以下將參照相關圖式，說明依據本發明較佳實施例之 一種反作用力抵消裝置與具有反作用力抵消裝置之點膠 機，其中相同的元件將以相同的參照符號加以說明。 請參照圖1至圖3所示，本發明第一實施例之一種反 作用力抵消裝置80包含一反作用力抵消單元81，其係固 設於一傳輸系統90，並且一移動件93係可移動地設置於 傳輸系統90以達到一預設目的，藉此可抵消由移動件93 之移動而產生之反作用力。於此，傳輸系統90可包含一 支撐件92以及一框架91，支撐件92係支撐移動件93並 可移動，框架91係可滑動地支撐支撐件92。移動件93係 201139085 由支撐件92所支撐，使 軸方向移動。支撐件92夕動件93可沿支撐件92之寻 反作用力雨沿框架91由移動件93之移動所產生之 之移動方向與移動件93由方向私動，藉此，支撐件92 反作用力抵料元8l ^方向係相反。 量體812。旋轉件δ11係可包含—旋轉件8n以及—質 93之移動所產生的反作用;於支料92並可藉由移動件 旋轉件，並可藉由旋而㈣了量體δ12係連結於 方向垂直之方向移動。 而沿與支撐件 92之移動 :耦接構件82可更設置於支撐件92與旋轉件8 間，並耦接於支撐件92與旋轉件811。 移動件93之移動所產生之反作用力係傳輸至支 92,而旋轉件811係用以將此反作用力傳輪至質量坪=牛 旋轉件811係可旋轉地連結於框架91。為達此目的&框3° 91可具有一樞軸單元94，其係連結於旋轉件 卞 中〜。於此，樞軸單元94可包含一支撐構件95以及— 樞軸96，支撐構件95係從框架91凸設，樞軸％係可: 設於旋轉件8U或從旋轉件811凸設，而固定於支撐構= 95另外，在本實施例中，旋轉件811係直接連結於框穴 91亚可旋轉，但本發明不限制於此態樣。也就是，旋轉= 811可由非框架91之元件支撐並旋轉，並同樣可使得移動 件93,移動所產生並傳輸矣支撐件92之反作用力能夠傳 輸至負夏體812。當比較旋轉件811直接連結於框架91之 態樣以及旋轉件811連結於非.框架91之元件之態樣時， 201139085 前者係提供較簡單之結構。 另外，依據本發明之實施例，旋轉件811係可旋轉地 支撐於框架91，而使得由移動件93之移動所產生並傳輸 至支撐件92之反作用力改變方向，並使得反作用力傳輸 至質量體812，其中質量體812之移動方向係與支撐件92 之移動方向垂直。然而，本發明不限於此，本發明亦可應 用多種結構，例如複數鏈結（link)，來改變反作用力之傳 輸方向，使得反作用力從支撐件92傳輸至質量體812，其 中質量體812之移動方向係與支撐件92之移動方向垂直。 質量體812藉由移動件93移動所產生之反作用力， 而沿與重力方向相反之方向移動，且質量體812之移動方 向係與支撐件92之移動方向垂直，藉此可抵消反作用力。 質量體812之動舉可大於支撐件92及/或移動件93。當然， 本發明不限於此態樣。假使質量體812之重量大於支撐件 92及/或移動件93,當移動件93之移動而產生之反作用力 經由支撐件92與旋轉件811而傳輸至質量812而使質量 812移動時，反作用力可藉由質量體812之一小程度的移 動而得到有效率的抵消。 一抗摩擦機構97可設置於質量體812與框架91之 間，並可滑動地連接質量體812與框架91，用以避免反作 用力從質量體812傳輸至框架91。抗摩擦機構97可為滾 珠軸承、滾柱軸承、滾筒、或内含潤滑劑之殼體、或其他 構件，用以避免質量體812與框架91之間之震動與摩擦 力的傳輸。另外，依據本實施例，質量體812係可滑動地 10 201139085 連結於框㈣。然而，本發明不限於此 之私動所產生之反作用力而移動。 π夕勒1千 藉此，當移動件93在支撐件 力係沿與移動件93之移動方向相反之方夕=，y反作用 用力之-部分係傳輸至支標件％，並轉 ^而= 輸至旋轉件m，並轉換德^刀係經由支撐件92傳 h 轉件811旋轉的能量而被抵 哲 彳用力的其他部分係經由旋轉件811傳幹至 質量細，並轉換為質量體812移動的能量而被至 其中，質1體812藉由移動件93 " *，而、⑽击丄 料93之移動所產生之反作用 ==與重力方向相反之方向以及與支擇件 =垂直之方向移動。在移動件％ 力錯由質量體812抵消之後，質量體 反作用 量的關係而回復到其原來位置。 °猎”自身重 係被ί:::例:反作用力抵消裝置80中’旋轉件811 =純轉’因而在反作用力傳輸至質量體812之前， ^受“動件93移動所產生之反作用力之方向，並且質 沿與支擇件92之移動方向垂直之方向 二:用力。藉此’反作用力系統之結構可 二外，由移動件93移動所產生之反作 轉換為支撐件92移動之鈐旦而说k、丄 822旋轉之#〜、“之月匕里而被抵消’可轉換為旋轉件 处旦^'月b里而破抵消，並可轉換為質量體812移動之 此里而被抵’肖。承上’本實施例提供多種反作用力抵消機 201139085 制而此有效地抵消反作用力。此外，當旋轉件與質量 體812皆連結於框架91時，即使與反作用力抵消單元81 搞接之傳輸系統90之移動方向與移動件％之移動方向不 同私動件93移動所產生之反作用力#可被抵消。此外， 在反作用力藉由質量體δ12之移動而抵消之後，由於質量 體812可藉由其自身重量而回復到其原來位置，因此，本 貫施例就不需要額外用以使質量體δ12歸位之構件。结 果，反作用力抵消裝置80之結構可被簡化。 以下請參照圖4並說明本發明第二實施例之一種反作 二=抵4裝置’其中與上述實施例相同之構件係使用同樣 才示號，且其細節不再贅述。 在本發明第二實施例之反作用力抵消裝置δ〇中，旋 一件811之旋轉中心c至旋轉件8ιι連接於支撐件％之 =觸點之距離D1係小於旋轉件811之旋射心c至旋 2 811連接於質量體812之一接觸點之距離D2。亦即， Z槓桿料··旋轉件811與支料％之躺點係 旋轉件811與質量體812之接觸點係作為負荷，而 ^件8U之旋射心C係作為—支點。於此，由於支點 j何之㈣Μ係切施力財社輯m，傳輪至質 置體812之及作用*技丄 貝 傳幹至古Μ 動件93之移動所產生並 傅輸至支樓件92之反作用力。 另外，若旋轉件811之旋轉中心, 於支撐件92之技總卧 旋^件811連接 如Λ ,^ 輯D1 _以大於旋轉件 8 Π之方疋轉中心C至旋镇杜87、由 得1千 疋心件811連接於質量體812之-接 12 201139085 距離，，則質量體δ12之移動量會減少。藉此，傳 輪系統90 ^供給質量體81 卿 致可減少傳輪系統9 〇的高度。夕肢、距雄就不需太多，以 反作㈣三實施例之—種 用同、⑽，其巾與上14實施助同之構件係使 同H號，且其細節不再贅述。 ，入如圖5所示，第三實施例之反作用力抵消裝置80可 时4 813，其係鄰設於f量體812並連結於質 812 ’且可使質量體812回復至原來位置。其中 f體812係藉由移動件83之移動所產生之反作用力而移 動0 虽貝里體812係藉由移動件83之移動所產生之反作 用力而移動時，回復元件813係、用以使質量體812回復至 其原來位置。賴元件813可以多種方式實施而提供—預 設大小之回復力給質量體812，例如，回復元件813可包 含-彈性線圈彈簣、—彈t片、m氣壓阻尼器、或 具有電磁鐵之線性馬達，上述元件係連結於質量體812。 “當質量體812在移動中並藉由其自身重量而回到其原 ，位置的過程中’回復元件813係可提供—辅助力量給質 量體812，且輔助力量係沿著質量體812回復其原來位置 之方向。由於反作用力抵消裝置更包含回復元件813，因 此反作用力抵消裝置可使質量體812更快速且精確地回到 其原來位置。 以下請參照圖6所示並說明本發明第四實施例之一種 13 201139085 :=:;=:°二其中與上述實施例相同之構件係使 j保知減；，且其細節不再贅述。 包八=:希6所7」第四實施例之反作用力抵消裝置80係 匕3 震動隔離單元9 9，立总a 士入★ 、 97之問，计可，、係位於框采91與抗摩擦機構 8 、’可避免由質量體812之移動而產生之雳叙π + 抗摩擦機構產生之錢經由 ^之震動隔離單元99可實施為多種結構， if置體812之移動所產生並經由抗摩擦機構97傳輸之 ，。例如’震動隔離單元99可包含防 内含流體之密封管體、真空管體、具有彈菁= ί"生構件或液虔阻尼器等。 由於本實施例之反作用力抵消裝置8〇之震動隔離單 兀係设置於框架91與抗摩擦機構97之間，因而可使 由移動件93之移動所產生之反作用力得到最佳的抵消效 果’亚且可避免由質量體812之移動所產生之震動傳輸至 框架91。 ^本實施例之反作用力抵消裝置80可應用於多種傳輸 ^:，例如，傳輸系統可包含吊臂、機械手臂、平板顯示 器製造裝置、或液晶顯示器製造及/或測試裝置。以下說明 本發明之一種應用於點膠機之反作用力抵消裝置80。 如圖7所示，依據本發明之點膠機包含一基本框架 10 平口 U、複數支#框架40、一點膠頭單元支撐元 件50、複數點膠頭單元60、一頭移動單元7〇以及一控制 單元（圖未顯示）。平台u係固定於基本框架1〇，使得一 14 201139085 基板20可置放於平台11上。該等支撐框架40係設置於 平台11之相對兩側，並各自沿一 Y軸方向延伸。點膠頭 單元支撐元件50係由支撐框架40所支撐，並沿一 X轴方 向延伸。該等點膠頭單元60係連結於點膠頭單元支撐元 件50。各頭移動單元70係將各點膠頭單元60連結於點膠 頭單元支撑元件5 0，並且頭移動單元7 0係可使點膠頭單 元60在水平方向上沿X軸方向移動。控制單元係可控制 點膠頭革元60與頭移動單元70之作動。 基本框架10可與一平台驅動單元（圖未顯示）配合 使用，平台驅動單元可使平台11相對於基本框架10前、 後移動（沿Y軸方向）。支撐移動單元30可使點膠頭單元 支撐元件50沿支撐框架40移動。假使基板20為大尺寸 基板，可設置複數點膠頭單元支撐元件50以提升形成膠 圖案之效能。 如圖8所示，各點膠頭單元60包含一注射器61、一 喷嘴62、一雷射距離感測器63、一 Y轴驅動單元64以及 一 Z軸驅動單元65。注射器61内含有膠體。喷嘴62與注 射器61相連通並可排出膠體。雷射距離感測器63係鄰設 於喷嘴62並可測量喷嘴62與基板20之間距。Y軸驅動單 元64係使喷嘴62與雷射距離感測器63沿Y軸方向移動。 Z軸驅動單元65係使喷嘴62與雷射距離感測器63沿Z 軸方向移動。於此，雷射距離感測器63包含一發射元件 631以及一接收元件632。發射元件631係發出一雷射光， 接收元件632與發射元件631相距一預設距離，並可接收 201139085 從基板20反射回來之雷射光。雷射距離感測器63係輸出 一電子訊號至控制單元，其中，電子訊號係對應雷射光之 一影像生成位置，藉此可測量基板20與喷嘴62之間距。 此外，點膠頭單元60可更包含一截面積感測器66， 其係量測基板上之一膠體圖案P之截面積。截面積感測器 66係連續地發射一雷射光束至基板20並掃描膠體圖案 P，藉此量測膠體圖案P之截面積。截面積感測器66所量 測之膠體圖案P之截面積之資訊係用以判斷膠體圖案P是 否有缺陷。 以下係說明本發明之一實施例之反作用力抵消裝置 80應用於點膠機之點膠頭單元支撐元件50。 圖9及圖10為本發明之點膠機之點膠頭單元支撐元 件50的剖面示意圖，其中，反作用力抵消裝置80應用於 點膠頭單元支撐元件50。 如圖9所示，各點膠頭單元60係經由頭移動單元70 而連結至點膠頭單元支撐元件50。頭移動單元70包含一 支撐件71以及一移動件72,支撐件71係沿點膠頭單元支 撐元件50之一長軸方向延伸，移動件72係固設於點膠頭 單元60。藉此，由於支撐件71與移動件72的交互作用力， 使得點膠頭單元60可沿X軸方向移動，意即沿點膠頭單 元支撐元件50之長轴方向移動。於此，頭移動單元70可 包含一線性馬達。於此，支撐件71包含一定子，而移動 件72包含一動子，並且點膠頭單元60係藉由支撐件71 .與移動件72之間的電磁交互作用力而沿X軸方向移動。 16 201139085 ^甘碩移動單元7〇可包含―滾珠螺桿（baii 構 h ft;、中’支樓件71係包含—滾珠螺桿軸（ball screw S/休而移動件72包含一滾珠螺桿帽（baU screw慮）。 ’八碩移動單元70可包含一傳輸構件，其中，支樓件 一 ^ 液壓缸或氣壓缸，以使移動件72移動。當然， γ::早凡7〇可包含多種變化結構來使點膠頭單元60沿 X軸方向移動。 j作用力抵消裝置8Q可設置於點膠頭單元支樓元件 件50 端之其中—端、或是設置於卿頭料支樓元 件50之相對兩端。 作用含反作用力抵消單元81。反 並施加於=，60以及移動件72之移動而產生 作用力^件71上，而反作用力抵消單元^係改變反 體一舍輸至f量體812 ’使得質量 反作用h 之移動方向垂直之方向移動，藉此， 移動動早70 81係將反作用力轉換為質量體m之 二:：而消除反作用力。反作用力抵消單… 標件二8^以及質量體812。旋轉件⑴係麵接於支 ，猎由點廢頭單元60與移動件72之移動所產生 旋轉件^:轉°質量體係搞接於旋轉件811，並藉由 即、與重力方向相反之方向移動，意 σ者與支私件71之移動方向垂直之方向移動。201139085 VI. Description of the Invention: [Technical Field to Which the Invention pertains] The present invention relates to a device that counteracts the reaction force generated by the movement of the moving member. Specialized transmission, .4 [Prior technology] In the process of flat panel display (such as liquid crystal display) = transmission system such as robot arm, arm, etc. to transmit a target: substrate, liquid spray nozzle, or nozzle transfer mode Group, etc. The above transmission system comprises a frame, a =! member is arranged on the frame, and the moving member is arranged on the q-transport of the support member ==. The transmission system can move the moving parts to achieve a preset operation of the transmission level, and the transmission is purely immovable and - in order to effectively reduce the vibration phenomenon, the operator will apply to the transmission system, such as ... 2_ · The reaction force cancellation device disclosed in No. 3426 (the case name is the reaction force transmission system). 8: However, due to the above-mentioned reaction counteracting device and the transmission system, the 'reaction force cancellation device cannot be applied if the transmission direction of the transmission system is different from the transmission system: the transmission direction is different. 4 201139085 The reaction force cancellation device is separated from the transmission system, so its configuration and installation are very complicated. SUMMARY OF THE INVENTION In view of the above problems, it is an object of the present invention to provide a reaction force canceling device in which a reaction force generated by movement of a moving member of a transport system is transmitted to a mass body connected to a transport system, Thereby, the reaction force is converted into the moving kinetic energy of the mass body to eliminate the reaction force, and thus the reaction force canceling device is simplified. Further, even when the transport system moves in a direction different from the moving direction of the moving member, the reaction force generated by the movement of the moving member can be canceled. Another object of the present invention is to provide a dispenser having the above-described reaction force canceling means. In order to achieve the above object, the present invention provides a reaction force canceling device which is disposed in a transport system, the transport system includes a support member, a moving member and a frame, the movable member is movable on the support member, and the frame is slidably Support the support. The reaction force canceling means includes a mass body which is coupled to the support member and which is moved in a direction perpendicular to the moving direction of one of the support members by the reaction force generated by the movement of the moving member. Here, in order to transmit the reaction force generated by the movement of the moving member and transmitted to the support member to the mass body to be moved in a direction perpendicular to the moving direction of the support member, the reaction force canceling device may further include a rotating member. The first end of the rotating member is coupled to the support according to a center of rotation, and the second end of the rotating member is coupled to the mass. 201139085 The center of rotation of the rotating member to one of the contact points of the rotating member connected to the support member is less than the distance from the center of rotation of the rotating member to one of the contact points of the rotating member to the mass. Further, the mass body can be returned to its original position by its own weight after moving in the direction perpendicular to the moving direction of the support member by the reaction force generated by the movement of the moving member. In order for the mass body to return to its original position quickly and accurately, the reaction force canceling device may further comprise a returning element that provides an assisting force to the mass body in the direction of returning the mass body to its original position. Further, an anti-friction mechanism may be disposed between the mass body and the frame to slidably connect the mass body to the frame and to prevent the reaction force from being transmitted from the mass body to the frame. In order to achieve the above object, the present invention provides a dispenser comprising a dispensing head unit branch member, a dot head unit, a head moving unit, and a reaction force canceling means. The dispensing head unit is movably disposed on the dispensing head unit support member. The head moving unit comprises a floor member and a moving member, the support member is slidably connected to the dispensing head unit supporting member, and the moving member is disposed on the dispensing head unit, so that the head moving unit drives the dispensing head unit along the dispensing One of the head unit support members moves in the longitudinal direction. The reaction force canceling device includes a mass body that is coupled to the support member and that moves in a direction perpendicular to a moving direction of the support member by a reaction force generated by the movement of the dispensing head unit and the moving member. Herein, in order to transmit the reaction force generated by the movement of the dispensing head unit and the moving member to the supporting member to the mass body, the rotating force is rotated along the direction of movement of the supporting member 6201139085, and the reaction force is offset. (4) Specially connected to the component of the dispensing head unit, the 1st core of the r piece: connected to the support according to a center of rotation, the rotation of the point of rotation to the rotating part is connected to the branch The contact quantity body 1 touches the %^piece& center to the rotary member is connected to the mass body and the dispensing _ ηπ - distance. In addition, the anti-friction mechanism can be disposed at the ground connection to the S) unit Between the floor elements 'the system enables the mass body f to be transferred to the point element of the point element' and the reaction force can be avoided to repair the element from the quality. The weight is shifted from ~ to = a sigh is placed to help the mass return to its original position by its own position. A type of dispenser, a support, includes a support frame support - point 兀 1 - a reaction force canceling device. The support frame rubber head unit goes to /_, the early support member, the dispensing head unit is connected to the jog member, and the supporting mobile unit includes everything to red shift to the dispensing head unit supporting member, and: The element cutting element along the support frame - the length = the mobile unit drives the dispensing head unit to include the - mass body, which is moved in a continuous direction. The reaction force cancels the unit supporting member and the (4) 4 struts of the moving member, and by means of the boring head and the moving direction: directly, the counter-propagating member and the moving member which are generated by the dispensing head unit and transmitted to the supporting member The movement is transmitted to the mass body to move in a direction perpendicular to the moving direction of the support member in 201139085, and the reaction force canceling device may further comprise a rotating member rotatably coupled to the support frame, one of the rotating members first The end is connected to the branch member according to a center of rotation, and the second end of the rotating member is connected to the mass body. The center of rotation of the rotating member to one of the contact points of the rotating member connected to the support member is less than the distance from the center of rotation of the rotating member to one of the contact points of the rotating member to the mass. Further, an anti-friction mechanism may be disposed between the mass body and the point support frame to slidably connect the mass body to the branch frame and to prevent the reaction force from being transmitted from the mass body to the support frame. Alternatively, a return element can be provided to assist the mass to return from its moving position to its original position by its own weight. [Embodiment] Hereinafter, a reaction force canceling device and a dispenser having a reaction force canceling device according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings, wherein the same elements will be described with the same reference numerals. Referring to FIG. 1 to FIG. 3, a reaction force canceling device 80 according to a first embodiment of the present invention includes a reaction force canceling unit 81 fixed to a transport system 90, and a moving member 93 is movably It is disposed in the transport system 90 for a predetermined purpose whereby the reaction force generated by the movement of the moving member 93 can be cancelled. Here, the transport system 90 can include a support member 92 that supports the movable member 93 and is movable, and a frame 91 that slidably supports the support member 92. The moving member 93 is supported by the support member 92 to move in the axial direction. The support member 92 can be moved along the direction of movement of the moving member 93 along the frame member 91 by the reaction force of the support member 92. The moving member 93 is in a direction of movement from the moving member 93, whereby the support member 92 reacts against the force. The material element 8l ^ direction is opposite. Volume 812. The rotating member δ11 may include a reaction caused by the movement of the rotating member 8n and the mass 93; and the rotating member may be rotated by the moving member, and may be rotated by the rotating body (4). Move in the direction. The movement of the support member 92 can be further disposed between the support member 92 and the rotary member 8 and coupled to the support member 92 and the rotary member 811. The reaction force generated by the movement of the moving member 93 is transmitted to the branch 92, and the rotating member 811 is used to transfer the reaction force to the mass plate = the cow rotating member 811 is rotatably coupled to the frame 91. To achieve this, the frame 3° 91 can have a pivot unit 94 that is coupled to the rotating member 〜. Here, the pivot unit 94 can include a support member 95 and a pivot 96. The support member 95 is protruded from the frame 91. The pivot % can be: disposed on the rotary member 8U or protruded from the rotary member 811, and fixed. In addition, in the present embodiment, the rotating member 811 is directly coupled to the frame 91 to be sub-rotatable, but the present invention is not limited to this aspect. That is, the rotation = 811 can be supported and rotated by the elements of the non-frame 91, and the reaction force generated by the moving member 93, which is generated by the movement and transmitted, can be transmitted to the negative summer body 812. When the comparative rotating member 811 is directly coupled to the frame 91 and the rotating member 811 is coupled to the element of the non-frame 91, the former provides a simpler structure. Further, according to the embodiment of the present invention, the rotary member 811 is rotatably supported to the frame 91 such that the reaction force generated by the movement of the moving member 93 and transmitted to the support member 92 changes direction, and the reaction force is transmitted to the mass. The body 812, wherein the moving direction of the mass body 812 is perpendicular to the moving direction of the support member 92. However, the present invention is not limited thereto, and the present invention can also apply various structures, such as a plurality of links, to change the transmission direction of the reaction force, so that the reaction force is transmitted from the support member 92 to the mass body 812, wherein the mass body 812 The direction of movement is perpendicular to the direction of movement of the support member 92. The mass body 812 moves in a direction opposite to the direction of gravity by the reaction force generated by the movement of the moving member 93, and the moving direction of the mass body 812 is perpendicular to the moving direction of the support member 92, whereby the reaction force can be counteracted. The motion of the mass body 812 can be greater than the support member 92 and/or the moving member 93. Of course, the invention is not limited to this aspect. If the weight of the mass body 812 is greater than the support member 92 and/or the moving member 93, when the reaction force generated by the movement of the moving member 93 is transmitted to the mass 812 via the support member 92 and the rotating member 811 to move the mass 812, the reaction force Efficient cancellation can be achieved by a small degree of movement of the mass 812. An anti-friction mechanism 97 may be disposed between the mass body 812 and the frame 91 and slidably connect the mass body 812 and the frame 91 to avoid the reaction force from being transmitted from the mass body 812 to the frame 91. The anti-friction mechanism 97 may be a ball bearing, a roller bearing, a roller, or a housing containing a lubricant, or other member to avoid transmission of vibration and friction between the mass body 812 and the frame 91. Further, according to the present embodiment, the mass body 812 is slidably coupled to the frame (4) slidably 10 201139085. However, the present invention is not limited to the reaction force generated by the private motion. π 勒 1 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千 千The other part that is transferred to the rotating member m and converted to the knives by the energy of the rotation of the rotating member 811 via the support member 92 is transmitted to the mass through the rotating member 811, and is converted into the mass body 812. The moving energy is taken into it, and the reaction of the mass 1 body 812 by the movement of the moving piece 93 " *, and (10) the hitting material 93 == the direction opposite to the direction of gravity and the perpendicular to the support member = Move in direction. After the moving part % force is cancelled by the mass body 812, the mass body reaction amount returns to its original position. ° Hunting itself is ί::: Example: 'Rotating member 811 = pure rotation' in the reaction force canceling device 80, and thus before the reaction force is transmitted to the mass body 812, ^ is reacted by the movement of the moving member 93 The direction is the same as the direction perpendicular to the direction of movement of the support member 92: force. Thereby, the structure of the 'reaction force system can be doubled, and the reverse generated by the movement of the moving member 93 is converted into the movement of the support member 92, and the k, 丄822 rotation ##, "the moon is offset" 'It can be converted into a rotating part at the end of the month ^ b and breaks off, and can be converted into a mass body 812 to move here and is smashed into the 'Shaw. The present embodiment provides a variety of reaction force counterping machine 201139085 system and this In addition, when the rotating member and the mass body 812 are both coupled to the frame 91, even if the moving direction of the transport system 90 that is engaged with the reaction force canceling unit 81 is different from the moving direction of the moving member %, the private member 93 The reaction force # generated by the movement can be canceled. Further, after the reaction force is cancelled by the movement of the mass body δ12, since the mass body 812 can return to its original position by its own weight, the present embodiment There is no need for additional means for homing the mass body δ 12. As a result, the structure of the reaction force canceling device 80 can be simplified. Referring now to Figure 4, a second embodiment of the present invention will be described. The same components as those of the above-described embodiment are denoted by the same reference numerals, and the details thereof will not be described again. In the reaction force canceling device δ〇 of the second embodiment of the present invention, the rotation center c of the one piece 811 is rotated to the rotary member. 8 ι 连接 支撑 = = = = = = = = = = = = = = = = = = = = = = = = 触点 触点 触点 触点 触点 触点 触点 触点 触点 触点 触点 触点 触点 触点 触点 触点 触点 触点 触点 触点 触点 触点 触点 触点 触点811 and the support material % of the point of contact between the rotating member 811 and the mass body 812 are used as the load, and the screw core C of the 8U is used as the fulcrum. Here, because of the fulcrum j (4) Series m, the transfer to the mass body 812 and the function * technology 丄 传 传 至 至 至 至 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 , the total horizontal rotating member 811 of the supporting member 92 is connected to the mass body, and the D1 _ is connected to the mass body by the center of the rotating member 8 to the spin center D 87. 812 - connected to 12 201139085 distance, the movement of the mass body δ12 will be reduced. Thereby, the transmission system 90 ^Supply quality body 81 Qing Zhi can reduce the height of the transmission system 9 。. Xi Xia, Xiong Xiong does not need too much, to counter (4) three examples - the same kind, (10), its towel and the upper 14 implementation The components of the same structure are the same as the H number, and the details thereof will not be described again. As shown in FIG. 5, the reaction force canceling device 80 of the third embodiment can be set at 4 813, which is adjacent to the f-body 812 and It is coupled to the mass 812' and can return the mass body 812 to the original position. The f body 812 is moved by the reaction force generated by the movement of the moving member 83. Although the Belli body 812 is moved by the moving member 83. The return element 813 is used to return the mass 812 to its original position when the reaction force is generated to move. The ray element 813 can be implemented in a variety of ways to provide a predetermined magnitude of restoring force to the mass body 812. For example, the return element 813 can comprise - an elastic coil magazine, a bomb t-piece, an m-pressure damper, or a linear with an electromagnet. In the motor, the above components are coupled to the mass body 812. "When the mass 812 is moving and returning to its original position by its own weight, the 'recovery element 813 can provide - an auxiliary force to the mass 812 during the position, and the auxiliary force is returned along the mass 812. The direction of the original position. Since the reaction force canceling device further includes the returning member 813, the reaction force canceling device can return the mass body 812 to its original position more quickly and accurately. Referring now to Figure 6, the fourth aspect of the present invention will be described. One of the embodiments 13 201139085 :=:;=: ° 2 wherein the same components as the above embodiment are made to reduce the meaning of j; and the details thereof will not be described again. Package eight =: Greek 6 7" Fourth embodiment The reaction force canceling device 80 is 匕3 the vibration isolating unit 9 9, the total a is entered into the ★, 97, can be, is located in the frame 91 and the anti-friction mechanism 8, 'can avoid the movement of the mass 812 The generated money generated by the anti-friction mechanism can be implemented as a plurality of structures via the vibration isolation unit 99, and the movement of the if-body 812 is generated and transmitted via the anti-friction mechanism 97. For example, the 'vibration isolation unit 99 may include a sealed tube body that prevents fluids, a vacuum tube body, a body member, a green member, or a liquid helium damper. Since the vibration isolation unit of the reaction force canceling device 8 of the present embodiment is disposed between the frame 91 and the anti-friction mechanism 97, the reaction force generated by the movement of the moving member 93 can be optimally offset. The vibration generated by the movement of the mass body 812 can be prevented from being transmitted to the frame 91. The reaction force canceling device 80 of the present embodiment can be applied to a variety of transmissions. For example, the transmission system can include a boom, a robot arm, a flat panel display manufacturing device, or a liquid crystal display manufacturing and/or testing device. DETAILED DESCRIPTION OF THE INVENTION A reaction force canceling device 80 for use in a dispenser of the present invention will now be described. As shown in FIG. 7, the dispenser according to the present invention comprises a basic frame 10 flat mouth U, a plurality of frames #40, a dot head unit supporting member 50, a plurality of dispensing head units 60, a head moving unit 7A, and a Control unit (not shown). The platform u is fixed to the basic frame 1 so that a 14 201139085 substrate 20 can be placed on the platform 11. The support frames 40 are disposed on opposite sides of the platform 11 and each extend in a Y-axis direction. Dispensing Head The unit supporting member 50 is supported by the support frame 40 and extends in an X-axis direction. The dispensing head unit 60 is coupled to the dispensing head unit support member 50. Each of the head moving units 70 connects the respective dispensing head units 60 to the dispensing head unit supporting member 50, and the head moving unit 70 moves the dispensing head unit 60 in the horizontal direction in the X-axis direction. The control unit controls the actuation of the dispensing head element 60 and the head moving unit 70. The base frame 10 can be used in conjunction with a platform drive unit (not shown) that can move the platform 11 forward and backward relative to the base frame 10 (in the Y-axis direction). The support moving unit 30 allows the dispensing head unit support member 50 to move along the support frame 40. In the case where the substrate 20 is a large-sized substrate, a plurality of dispensing head unit supporting members 50 may be provided to enhance the performance of forming a rubber pattern. As shown in Fig. 8, each dispensing head unit 60 includes a syringe 61, a nozzle 62, a laser distance sensor 63, a Y-axis driving unit 64, and a Z-axis driving unit 65. The syringe 61 contains a gel. The nozzle 62 is in communication with the injector 61 and can discharge the colloid. The laser distance sensor 63 is disposed adjacent to the nozzle 62 and can measure the distance between the nozzle 62 and the substrate 20. The Y-axis driving unit 64 moves the nozzle 62 and the laser distance sensor 63 in the Y-axis direction. The Z-axis drive unit 65 moves the nozzle 62 and the laser distance sensor 63 in the Z-axis direction. Here, the laser distance sensor 63 includes a transmitting element 631 and a receiving element 632. The transmitting element 631 emits a laser light, and the receiving element 632 is spaced apart from the transmitting element 631 by a predetermined distance, and can receive the laser light reflected back from the substrate 20 by 201139085. The laser distance sensor 63 outputs an electronic signal to the control unit, wherein the electronic signal corresponds to an image generation position of the laser light, whereby the distance between the substrate 20 and the nozzle 62 can be measured. In addition, the dispensing head unit 60 can further include a cross-sectional area sensor 66 that measures the cross-sectional area of one of the colloid patterns P on the substrate. The cross-sectional area sensor 66 continuously emits a laser beam to the substrate 20 and scans the colloid pattern P, thereby measuring the cross-sectional area of the colloid pattern P. The information on the cross-sectional area of the colloid pattern P measured by the cross-sectional area sensor 66 is used to judge whether or not the colloid pattern P is defective. Hereinafter, the reaction force canceling device 80 of one embodiment of the present invention is applied to the dispensing head unit supporting member 50 of the dispenser. 9 and 10 are schematic cross-sectional views of the dispensing head unit supporting member 50 of the dispenser of the present invention, wherein the reaction force canceling device 80 is applied to the dispensing head unit supporting member 50. As shown in FIG. 9, each of the dispensing head units 60 is coupled to the dispensing head unit supporting member 50 via the head moving unit 70. The head moving unit 70 includes a support member 71 and a moving member 72. The support member 71 extends in the longitudinal direction of one of the dispensing head unit supporting members 50, and the moving member 72 is fixed to the dispensing head unit 60. Thereby, due to the interaction force between the support member 71 and the moving member 72, the dispensing head unit 60 is movable in the X-axis direction, that is, in the long-axis direction of the dispensing head unit supporting member 50. Here, the head moving unit 70 can include a linear motor. Here, the support member 71 includes a stator, and the moving member 72 includes a mover, and the dispensing head unit 60 is moved in the X-axis direction by the electromagnetic interaction force between the support member 71 and the moving member 72. 16 201139085 ^Ganshuo mobile unit 7〇 can include “ball screw” (baii structure h ft;, medium′ branch unit 71 series – ball screw shaft (ball screw S/heave moving piece 72 includes a ball screw cap (baU [8] The eight-story mobile unit 70 may include a transmission member, wherein the support member is a hydraulic cylinder or a pneumatic cylinder to move the moving member 72. Of course, the γ:: 7 〇 can include a variety of varying structures. The dispensing head unit 60 is moved in the X-axis direction. The j-force canceling device 8Q can be disposed at the end of the 50-end of the dispensing head unit branch member or at the opposite end of the assembly member 50. The action includes a reaction force canceling unit 81. The reverse force is applied to the =, 60 and the movement of the moving member 72 to generate the force member 71, and the reaction force canceling unit is for changing the body to the body. 812 'Move the direction of movement of the mass reaction h to be perpendicular, thereby moving the movement 70 81 to convert the reaction force into the mass body m:: and eliminate the reaction force. The reaction force cancels the single... The standard 2 8^ And the mass body 812. Rotating member (1) In the support, the rotary member generated by the movement of the point waste head unit 60 and the moving member 72 is connected to the rotating member 811, and is moved by the direction opposite to the direction of gravity. The moving direction of the smuggling member 71 moves in the direction perpendicular to the direction.
之於此了5'置—-接構件82於支撐件71與旋轉件811 之間接切件71以及婦件如。、件8U 17 201139085 旋轉件m之旋轉中心係與—樞車由單元％連接。枢 軸單兀94設置於點膠頭支樓元件5〇，使得旋轉件川可 旋轉地連接於點膠頭單元支撐元件5Q。於此，樞轴單元 94包含-支撐構件95以及一柩軸％，支撐構件％係從 點膠頭單元支樓元件50妓’ _ %係固定於支樓構件 95，並穿過或突設於旋轉件811。於此，由於旋轉件8ιι 係直接地連接於點膠頭單元支撐元件5〇並可旋轉，因而 讦使結構得到簡化的效果。依據本實施例，旋轉件811係 町旋轉地連接於點膠頭單元支撙元件5〇，然而，這並非用 以限制本發明，本發明之旋轉件811亦能夠可旋轉地連接 於韩點膠頭單元支撐元件50之構件，同樣使得支撐件7ι 之反作用力在旋轉件811旋轉時，能傳輸至質量體812。 較隹者，旋轉件811之旋轉中心c至旋轉件81丨連接 於支撐件71之一接觸點之距離D1係小於旋轉件811之旋 轉中心C至旋轉件811連接於質量體812之一接觸點之= 離P2。上述情況相較於距離D1等於或大於距離D2的情 況，前者可使質量體812之移動量減少。 月 質量體§12之質量係較點膠頭單元6〇、支撐件 移動件72之質量大得多。因此，當由於點膠頭單元6〇、 及移動件72之移動而產生之反作用力經由支撐件71與旋 轉件811傳送至質量體812以致質量體812移動時，移^ 件72之移動所產生之反作用力可藉由質量體812進行小 量的移動而得到顯著的抵消。 抗摩擦機構97係設置於質量體812與點膠頭單亓支 18 201139085 得兀仵50之間 、一〜一“ 和胗頌皁元爻 撐元件50滑動，藉此可避免反作用力從質量體8丨2傳送 至點膠頭單元支撐元件5〇。抗摩擦機構97可為滾珠軸承、 滾柱軸承、滾筒、或内含潤滑劑之殼體、或其他構件，用 以避免質量體812與點膠頭單元支撐元件5〇之間之震動 與摩擦力的傳輸。另外，依據本實施例，質量體812係可 滑動地連結於點膠頭單元支樓元件50。然而，本發明不限 於此，質量體812係可滑動地支撐於非點膠頭單元支撐元 件5〇之70件’並同樣可藉由點膠頭單元6G與移動件72 =動所產生之反作用力而移動。此外，依據本實施例， 貝置體812係設置於點膠頭單元支#元件50之—側；然 而’質量體812亦可財 稽元件50之内。° ; 置，例如點膠頭單元支 :移動件72與點膠頭單元6〇在支撐件7 為支撐件η之I動傳送到支樓件71，並轉換 一部分係絲由能而被消除。反作用力之另 杜川件71傳送至旋轉件如，並轉換為旌鏟 件8] 1之旋轉所雲 •換為知轉 係經由旋轉件2 =而被消除。反作用力之购 質量體们2之移動戶/^ 至#量體812 ’並轉換為 於質量體812之二㈣能而被消除。在此情況中，由 元6〇之質量大二支樓件71、移動件72或點膠頭單 另外，在質量&二因而移動物之移動量可較小。 8]2由於傳送至質量體奶之反作用力而 19 201139085 移動之後，質量體812可藉由其自身重量而回復到其原來 位置。 另外，如同在本發明之第三實施例中，反作用力抵消 裝置可更包含一回復元件813，其係連結於質量體812， 用以幫助質量體812藉由其自身重量而回復到原來位置。 回復元件813可包含多種結構以提供一預設的回復力給質 量體812，例如回復元件813可包含一彈性線圈彈簧、一 彈簀片、一液壓或氣壓阻尼器，上述元件係連結於質量體 812。 此外，如圖10所示，本發明第四實施例之震動隔離 單元99可設置於點膠頭單元支撐元件50與抗摩擦機構97 之間，藉此可避免由質量體812之移動所產生之震動傳送 至點膠頭單元支撐元件50。 依據本發明之點膠機，點膠頭單元支撐元件50係可 移動地支撐各點膠頭單元60，反作用力抵消裝置80係使 旋轉件811旋轉，藉此可在由點膠頭單元60與移動件72 之移動所產生之反作用力傳送至質量體812之前，改變反 作用力之方向，使得質量體812沿著與支撐件71之移動 方向相反之方向移動，因而抵消反作用力。因此，即使當 點膠頭單元支撐元件50沿Y軸方向移動時，本發明亦可 簡化點膠機之結構並抵消由於點膠頭單元60與移動件72 之移動所產生的反作用力。此外，由於點膠頭單元60與 移動件72之移動所產生的反作用力可被轉換為支撐件71 的移動動能而被消除，並可被轉換為旋轉件811之旋轉的 20 201139085 動能而被消除，並可被轉換為質量體812之移動動能而被 消除。因此，本發明藉由使用多種抵消反作用力之機制而 顯著改善反作用力之抵消效能。 依據本發明之點膠機，反作用力抵消裝置80可設置 於點膠頭單元支撐元件50之相對兩端之至少一端、或是 設置於點膠頭單元支撐元件50之相對兩端。 以下係說明本發明之反作用力抵消裝置80應用於點 膠機之支撐框架40的實施例。 圖11及圖12為本發明之點膠機之支撐框架40的剖 面示意圖，其中顯示反作用力抵消裝置80應用於支撐框 架40。 如圖11所示，點膠頭單元支撐元件50係經由支撐移 動單元30而連接於支撐框架40。支撐移動單元30包含一 支撐件31以及一移動件32。支撐件31係沿支撐框架40 之長軸方向延伸，移動件32係固設於點膠頭單元支撐元 件50。因此，藉由支撐件31與移動件32之間的作用力， 可使點膠頭單元支撐元件50沿Y軸方向移動，亦即沿支 撐框架40之長軸方向移動。於此，支撐移動單元30可包 含一線性馬達。在本實施例中，支撐件31包含一定子， 而移動件32包含一動子，並且點膠頭單元支撐元件50係 藉由支撐件31與移動件32之間的電磁交互作用力而沿Y 軸方向移動。此外，支撐移動單元30可包含一滚珠螺桿 (ball screw)構件，其中，支樓件31係包含一滾珠螺桿 軸（ball screw shaft )，而移動件32包含一滾珠螺桿帽（ball 21 201139085 screw nut)。此外，支撐移動單元％ -p a 一 夕刀早凡30可包含一傳輸構件， 其中，支撐件31包各一液壓缸或氣·，以使移動件32 移動。當然，支樓移動單元7〇可包含多種變化結構來使 點膠頭單元支撐元件50沿γ軸方向移動。 反作用，力抵消裝置⑽可包含反作^抵消單元Μ。 反Γ力係由於點膠頭單元支撐㈣心及移動件32之 移動而產生並施加於支樓件31卜 / 而反作用力抵消單元 81係改變反作用力之方向並將 一 81? ^ - ^ ^ 〇 反作用力傳輸至質量體 支㈣Μ ^動方向齡Μ 作用力抵消單★81係將反作用力轉換 因而消除反作用力。反作用力 m係耦接於支撐件31m卧質董體812。旋轉件 场仟η亚藉由點勝 與移動件32之移動所產生之 凡支撐兀件 係搞接於旋轉件811，並藉㈣質量= 重力方向相反之方向移動，意之轉動m 方向垂直之方向移動。者與支樓件3!之移動 接構:：’ I更在支撐件31與旋轉件811之間設置-耦 接構件=接構件82係輕接支撐件31與旋轉件811。 可減係連結於旋轉件811之旋轉中心C，並 \σ I 1木40上’使得旋轉件811可旋轉地連接 =::4°。於此，枢軸單元94包含-支撑構件95以 96 固定於/撐構件％係從支撐框架4Q凸設，枢車由 '、、切構件％，並可穿設於旋轉件811或從旋 22 201139085 轉件811凸設。另外，在本實施例中，由於旋轉件811係 直接連結於支撐框架40並可旋轉，因而整體結構可得到 簡化的效果。另外，依據本實施例，旋轉件811係可旋轉 地連接於支撐框架40，但本發明不限制於此態樣。也就 是，旋轉件811可由非支撐框架40之元件支撐並旋轉， 並同樣可使得當旋轉件811旋轉時，反作用力傳輸至質量 體 812。 較佳者，旋轉件811之旋轉中心C至旋轉件811連接 於支撐件31之一接觸點之距離D1係小於旋轉件811之旋 轉中心C至旋轉件811連接於質量體812之一接觸點之距 離D2。藉此，上述情況與距離D1係等於或大於距離D2 之情況相較，前者可較減少質量體812之移動量。 質量體812之質量係較點膠頭單元支撐元件50、支撐 件31或移動件32之質量大得多。因此，當由於點膠頭單 元支撐元件50以及移動件72之移動而產生之反作用力經 由支撐件31與旋轉件811傳送至質量體812以致質量體 812移動時，移動件32之移動所產生之反作用力可藉由質 量體812進行小量的移動而得到顯著的抵消。 抗摩擦機構97可設置於質量體812與點支撐框架40 之間，並可使質量體812相對於支撐框架40滑動，藉此 可避免反作用力從質量體812傳送至支撐框架40。抗摩擦 機構97可為滾珠軸承、滾柱軸承、滾筒、或内含潤滑劑 之殼體、或其他構件，可避免質量體812與支撐框架40 之間之震動與擘擦力的傳輸。另外，依據本實施例，質量 201139085 =12 :、了滑動地連結於支撐框架4〇。然而，本發明不限 #此:貝讀812係、可滑動地支標於非支樓框架4〇之構 :動可藉由點膠頭單元支擇元件5。與_^ 量作用力而移動。此外，依據本實施例，質 亦二】：設置於支樓框架4。之一側;然而，質量細 :置於其他位置，例如支撐框架40内。 上移重件32與轉鮮元支料件5g在支撐件η 相反作用力係產生於與移動件32之移動方向 31:其中，一部分之反作用力係傳送到支標件 轉換由支撐件31傳送至旋轉_，並 轉換柄轉件811之旋轉所需之動能而被消除。反作用力 之剩餘部分係經由旋轉件81 8 —為質量…移動所 ===體 在此情況中’由於質量體812之質量較支標件3卜_ 32或點膠頭單元支禮元件5〇 ^之移動量可較小。另外，在質 之反作用力而移動之後，質量體“a可藉 身重1而回復到其原來位置。 、目 另外，如同在本發明之第三實施例中，反 裝置可更包含一回復元件813，其 Η /k 用以幫助質量體812藉由其自身重量4質置體Sl2’ 回復元㈣3可包含多種結構以提^ ^到原來位置。 量體们2，例如回復元件δ13 、叹之回後力給質 G s —彈性線圈彈簧、— 24 201139085 彈簧片、一液壓或氣壓阻尼器，上述元件係連結於質量體 812。 此外，如圖12所示，本發明第四實施例之震動隔離 單元99可設置於支撐框架40與抗摩擦機構97之間，藉 此可避免由質量體812之移動所產生之震動傳送至支撐框 架40。 依據本發明之點膠機，支撐框架40係可移動地支撐 點膠頭單元支撐元件50，反作用力抵消裝置80係使旋轉 件811旋轉，藉此可在由點膠頭單元支撐元件50與移動 件32之移動所產生之反作用力傳送至質量體812之前， 改變反作用力之方向，使得質量體812沿著與支撐件31 之移動方向相反之方向移動，因而抵消反作用力。藉由上 述之結構特徵可簡化點膠機之結構。此外，由於點膠頭單 元支撐元件50與移動件32之移動所產生之反作用力可被 轉換為支撐件3 1之移動動能而被消除，並可被轉換為旋 轉件811之旋轉的動能而被消除，並可被轉換為質量體812 之移動動能而被消除。因此，本發明藉由使用多種抵消反 作用力之機制而顯著改善反作用力之抵消效能。 依據本發明之點膠機，反作用力抵消裝置80可設置 於支撐框架40之相對兩端之至少一端、或是設置於支撐 框架40之相對兩端。 上述所有實施例之技術特徵可單獨實施、或組合實 施。 此外，依據本發明之反作用力抵消裝置80，其可應用 25 201139085 二多=上以使點膠機内之元件移動，例如其可應用於 十口驅動早兀以使平台u移動。 反作二Π，本發明係提供一種反作用力抵消裝置，在 並可質量體係設置於-_統上， 輪糸、充之私動件之移動所產生之反作用 ’猎此可簡化反作用力抵消裝置之結構。 此外，由於移動件之移動所產生之反作用力可藉由下 被㈣，藉由反作用力轉換為—支樓件之移動動 :猎&仙力轉換為—旋轉件之旋轉之 ㈣她⑻增種反作^ 可使本發明之反作用力抵消之效能大大提 框加純轉件、質量體以及—回復元件皆輕接於一 木的情況下，即使當一傳輸系統沿與移 :::::移動時’由移動件之移動而產生之反作用力： —此外，本發明係提供一種反作用力抵消裝置，其中， 猎由-移動件之移動所產生之反作用力可使—支 動:而支據件之移動方向係與重力方向垂直，並且—質旦 f係沿與重力方向相反之方向移動，並且可藉由其自身= 夏回復到原來位置。藉此，本發明可不需額外設置 體回後至其原來位置之構件，進而可簡化反作用力抵消= 置之結構。 _ β。此外，當反作用力抵消裝置應用於一點膠機之—點膠 碩單元支樓元件時，由轉頭單元以及移動件之移動而^ 26 201139085 生之反作用力係傳送至質量體，使得質量體沿與一支撐件 之移動方向垂直之方向移動，進而使反作用力轉換為質量 體之移動動能而消除反作用力，藉此可簡化點膠機之結 構。此外，即使當點膠頭單元支撐元件沿與點膠頭單元之 移動方向垂直之方向移動時，由點膠頭單元之移動而產生 之反作用力仍可被抵消。此外，藉由將反作用力轉換為旋 轉件之旋轉之動能以及將反作用力轉換為質量體之移動 動能，能夠抵消由點膠頭單元以及移動件之移動而產生之 反作用力。藉由上述多種反作用力抵消機制，可大大提升 反作用力抵消之效能。 此外，當反作用力抵消裝置應用於一點膠機之一支撐 框架時，由一點膠頭單元支撐元件以及一移動件之移動而 產生之反作用力係傳送至一質量體，使得質量體沿與一支 撐件之移動方向垂直之方向移動。藉此使反作用力轉換為 質量體之移動動能，使得本發明之點膠機在簡化結構的情 況下能夠抵消反作用力。此外，藉由將反作用力轉換為旋 轉件之旋轉的動能以及將反作用力轉換為質量體之移動 動能，能夠抵消由點膠頭單元支撐元件以及移動件之移動 而產生之反作用力。藉由上述多種反作用力抵消機制，可 大大提升反作用力抵消之效能。 以上所述僅為舉例性，而非為限制性者。任何未脫離 本發明之精神與範疇，而對其進行之等效修改或變更，均 應包含於後附之申請專利範圍中。 27 201139085 【圖式簡單說明】 圖1為依據本發明第一實施例之一種反作用力抵消裝 置的示意圖； 圖2及圖3為圖1之反作用力抵消裝置之作動的示专、 圖； 〜 圖4為依據本發明第二實施例之一種反作用力抵消裴 置的示意圖； 圖5為依據本發明第三實施例之一種反作用力抵消裝 置的示意圖； ^ 圖6為依據本發明第四實施例之一種反作用力抵消裝 置的示意圖； 圖7為依據本發明之一種裝設有反作用力抵消裝置之 點耀·機的示意圖； 圖8為圖7之點膠機之一種點膠頭單元的示意圖； 一圖9及圖10為依據本發明之一種裝設有反作用力抵 ’肖裝置之點膠機之點膠頭單元支禮元件的剖面示意圖，·以 及 …圖11及圖12為依據本發明之一種裝設有反作用力抵 4裝置之點膠機之支撐框架的剖面示意圖。 【主要元件符號說明】 I 〇 .基本框架 II :平台 20 :基板 201139085 30 :支撐移動單元 31 ·支樓件 32 :移動件 40 :支撐框架 50 :點膠頭單元支撐元件 60 :點膠頭單元 61 :注射器 62 :喷嘴 63 :雷射距離感測器 631 :發射元件 632 :接收元件 64 : Y轴驅動單元 6 5 ·· Z軸驅動單元 66 :截面積感測器 70 :頭移動單元 71 :支撐件 72 :移動件 80 :反作用抵消裝置 81 :反作用力抵消單元 811 :旋轉件 812 :質量體 813 :回復元件 82 :耦接構件 9 0 "·傳輸糸統 29 201139085 91 :框架 92 :支撐件 93 :移動件 94 :極軸單元 95 :支撐構件 9 6 :枢軸 97 :抗摩擦機構 99 :震動隔離單元 C:旋轉中心 Dl、D2 :距離 P:膠體圖案 30Here, the 5'-connecting member 82 is connected between the supporting member 71 and the rotating member 811, and the female member. , 8U 17 201139085 The rotating center of the rotating member m is connected to the pivoting unit by the unit %. The pivot pin 94 is disposed on the dispensing head branch member 5'' so that the rotating member is rotatably coupled to the dispensing head unit supporting member 5Q. Here, the pivot unit 94 includes a support member 95 and a shaft %, and the support member % is fixed from the dispensing head unit branch member 50妓'_% to the branch member 95, and passes through or protrudes from Rotating member 811. Here, since the rotary member 8 ι is directly coupled to the dispensing head unit supporting member 5 〇 and rotatable, the structure is simplified. According to the embodiment, the rotating member 811 is rotatably connected to the dispensing head unit supporting member 5A. However, this is not intended to limit the present invention, and the rotating member 811 of the present invention can also be rotatably coupled to the Korean dispensing. The members of the head unit support member 50 also enable the reaction force of the support member 7i to be transmitted to the mass body 812 as the rotary member 811 rotates. More preferably, the distance D1 from the center of rotation c of the rotating member 811 to the contact point of the rotating member 81 to the support member 71 is smaller than the center of rotation C of the rotating member 811 to the point of contact of the rotating member 811 with the one of the mass bodies 812. = from P2. The above case can reduce the amount of movement of the mass body 812 as compared with the case where the distance D1 is equal to or larger than the distance D2. The quality of the quality body §12 is much higher than that of the dispensing head unit 6〇 and the support moving member 72. Therefore, when the reaction force generated by the movement of the dispensing head unit 6〇 and the moving member 72 is transmitted to the mass body 812 via the support member 71 and the rotating member 811 so that the mass body 812 moves, the movement of the moving member 72 is generated. The reaction force can be significantly offset by a small amount of movement of the mass body 812. The anti-friction mechanism 97 is disposed between the mass body 812 and the dispensing head unit 18 18 201139085 、 50, and the ～ 一 胗颂 胗颂 胗颂 胗颂 胗颂 胗颂 胗颂 , , , 可 可 可 可 可 可 可 可 可 可 可 可8丨2 is transferred to the dispensing head unit supporting member 5〇. The anti-friction mechanism 97 may be a ball bearing, a roller bearing, a roller, or a housing containing a lubricant, or other members to avoid the mass body 812 and the point. In addition, according to the present embodiment, the mass body 812 is slidably coupled to the dispensing head unit branch member 50. However, the present invention is not limited thereto. The mass body 812 is slidably supported by the 70 pieces of the non-dispensing head unit supporting member 5' and can also be moved by the reaction force generated by the dispensing head unit 6G and the moving member 72. In the embodiment, the housing 812 is disposed on the side of the dispensing head unit #50; however, the 'mass 812 can also be within the component 50. For example, the dispensing head unit: the moving member 72 With the dispensing head unit 6 〇 in the support member 7 is the support member η I The movement is transmitted to the branch member 71, and a part of the wire is converted by the energy. The other force of the Dujiangchuan 71 is transmitted to the rotating member, for example, and converted into a rotating shovel. The transfer system is eliminated via the rotary member 2 =. The reaction force purchases the mass of the user 2 / to the # measure 812 ' and converts to the mass body 812 bis (four) can be eliminated. In this case, In addition to the quality of the mass of the second floor 71, the moving part 72 or the dispensing head, in addition to the mass & 2, the amount of movement of the moving object can be small. 8] 2 due to the reaction to the mass body milk And after the movement of 19 201139085, the mass 812 can be restored to its original position by its own weight. In addition, as in the third embodiment of the present invention, the reaction force canceling device may further include a returning element 813, which is connected The mass body 812 is used to help the mass body 812 return to its original position by its own weight. The return element 813 can include various structures to provide a predetermined restoring force to the mass body 812. For example, the return element 813 can include an elasticity. Coil spring, a spring clip a hydraulic or pneumatic damper, the above components are coupled to the mass body 812. Further, as shown in FIG. 10, the vibration isolation unit 99 of the fourth embodiment of the present invention may be disposed on the dispensing head unit supporting member 50 and the anti-friction mechanism. Between 97, thereby, vibration generated by the movement of the mass body 812 can be prevented from being transmitted to the dispensing head unit supporting member 50. According to the dispensing machine of the present invention, the dispensing head unit supporting member 50 movably supports each point. The rubber head unit 60, the reaction force canceling device 80 rotates the rotary member 811, whereby the direction of the reaction force can be changed before the reaction force generated by the movement of the dispensing head unit 60 and the moving member 72 is transmitted to the mass body 812. The mass body 812 is moved in a direction opposite to the moving direction of the support member 71, thereby counteracting the reaction force. Therefore, even when the dispensing head unit supporting member 50 is moved in the Y-axis direction, the present invention can simplify the structure of the dispenser and counteract the reaction force generated by the movement of the dispensing head unit 60 and the moving member 72. Further, since the reaction force generated by the movement of the dispensing head unit 60 and the moving member 72 can be converted into the kinetic energy of the movement of the support member 71, it can be eliminated and can be converted into the kinetic energy of the rotation of the rotating member 811. And can be converted to the moving kinetic energy of the mass body 812 to be eliminated. Therefore, the present invention significantly improves the counteracting power of the reaction force by using a variety of mechanisms for counteracting the reaction force. According to the dispenser of the present invention, the reaction force canceling means 80 may be disposed at at least one end of the opposite ends of the dispensing head unit supporting member 50 or at opposite ends of the dispensing head unit supporting member 50. The following is an explanation of an embodiment in which the reaction force canceling device 80 of the present invention is applied to the support frame 40 of the dispenser. 11 and 12 are schematic cross-sectional views showing the support frame 40 of the dispenser of the present invention, in which the reaction force canceling device 80 is shown applied to the support frame 40. As shown in Fig. 11, the dispensing head unit supporting member 50 is coupled to the support frame 40 via the supporting moving unit 30. The support moving unit 30 includes a support member 31 and a moving member 32. The support member 31 extends in the longitudinal direction of the support frame 40, and the movable member 32 is fixed to the dispensing head unit supporting member 50. Therefore, by the urging force between the support member 31 and the moving member 32, the dispensing head unit supporting member 50 can be moved in the Y-axis direction, that is, in the longitudinal direction of the supporting frame 40. Here, the support moving unit 30 may include a linear motor. In the present embodiment, the support member 31 includes a stator, and the moving member 32 includes a mover, and the dispensing head unit support member 50 is along the Y-axis by an electromagnetic interaction force between the support member 31 and the movable member 32. Move in direction. In addition, the support moving unit 30 may include a ball screw member, wherein the branch member 31 includes a ball screw shaft, and the moving member 32 includes a ball screw cap (ball 21 201139085 screw nut) ). Further, the support moving unit % - p a may include a transport member, wherein the support member 31 includes a hydraulic cylinder or a gas to move the movable member 32. Of course, the branch moving unit 7 can include a variety of varying structures to move the dispensing head unit support member 50 in the y-axis direction. In response, the force cancellation device (10) can include a counter-offset unit Μ. The anti-twist force is generated by the movement of the dispensing head unit support (4) heart and moving member 32 and is applied to the branch member 31/ and the reaction force canceling unit 81 changes the direction of the reaction force and will be 81? ^ - ^ ^ 〇Reaction force is transmitted to the mass body (4) Μ directional direction Μ Force cancels the single ★81 system to convert the reaction force and thus eliminate the reaction force. The reaction force m is coupled to the support member 31m. The rotating member field 亚 亚 搞 亚 亚 亚 亚 亚 亚 亚 亚 亚 凡 凡 凡 凡 凡 凡 凡 凡 凡 凡 凡 凡 凡 亚 凡 凡 亚 亚 811 811 811 811 811 811 811 811 811 811 811 811 811 811 811 811 811 811 811 811 811 811 811 Move in direction. The movement of the member and the branch member 3!:: 'I is further disposed between the support member 31 and the rotary member 811-coupling member=the joint member 82 is a lightly connected support member 31 and the rotary member 811. The shackle is coupled to the center of rotation C of the rotating member 811, and the \σ I 1 wood 40' is such that the rotating member 811 is rotatably coupled =:: 4°. Herein, the pivot unit 94 includes a support member 95 that is fixed to the /support member by a 96. The base member is protruded from the support frame 4Q, the pivot is made of ', the cut member %, and can be worn through the rotary member 811 or from the rotary 22 201139085 The rotating member 811 is convex. Further, in the present embodiment, since the rotary member 811 is directly coupled to the support frame 40 and rotatable, the overall structure can be simplified. Further, according to the present embodiment, the rotary member 811 is rotatably coupled to the support frame 40, but the present invention is not limited to this aspect. That is, the rotating member 811 can be supported and rotated by the elements of the unsupporting frame 40, and can also cause the reaction force to be transmitted to the mass body 812 when the rotating member 811 is rotated. Preferably, the distance D1 from the center of rotation C of the rotating member 811 to the contact point of the rotating member 811 to the support member 31 is smaller than the center of rotation C of the rotating member 811 to the point of contact of the rotating member 811 with one of the mass bodies 812. Distance D2. Thereby, the above case can reduce the amount of movement of the mass body 812 as compared with the case where the distance D1 is equal to or larger than the distance D2. The mass of the mass body 812 is much greater than the mass of the dispensing head unit support member 50, the support member 31 or the moving member 32. Therefore, when the reaction force generated by the movement of the dispensing head unit supporting member 50 and the moving member 72 is transmitted to the mass body 812 via the support member 31 and the rotating member 811 so that the mass body 812 moves, the movement of the moving member 32 is generated. The reaction force can be significantly offset by a small amount of movement of the mass body 812. The anti-friction mechanism 97 can be disposed between the mass body 812 and the point support frame 40 and can slide the mass body 812 relative to the support frame 40, whereby the reaction force can be prevented from being transmitted from the mass body 812 to the support frame 40. The anti-friction mechanism 97 may be a ball bearing, a roller bearing, a drum, or a housing containing a lubricant, or other member, to avoid transmission of vibration and friction between the mass body 812 and the support frame 40. Further, according to the present embodiment, the mass 201139085 = 12: is slidably coupled to the support frame 4A. However, the present invention is not limited to this: the READ 812 is slidably supported by the non-support frame 4: the movable element can be selected by the dispensing head unit. Move with _^ force. Further, according to the present embodiment, the quality is also set to the branch frame 4. One side; however, the quality is fine: placed in other positions, such as within the support frame 40. The opposing force of the upper moving weight member 32 and the rotating fresh material feeding member 5g in the supporting member η is generated in the moving direction 31 with the moving member 32: wherein a part of the reaction force is transmitted to the branch member to be transferred by the support member 31. The kinetic energy required for the rotation of the handle 811 is eliminated by rotating _. The remainder of the reaction force is via the rotating member 81 8 - for mass ... moving == = body in this case 'because the quality of the mass body 812 is better than the standard 3 _ 32 or the dispensing head unit ritual element 5 〇 ^ The amount of movement can be small. In addition, after moving under the reaction of the mass, the mass body "a can return to its original position by weight 1. In addition, as in the third embodiment of the present invention, the counter device may further include a replying element 813. , Η / k is used to help the mass body 812 to recover the element (4) 3 by its own weight 4 mass body Sl2'. 3 can contain various structures to improve the original position. The volume 2, for example, the recovery element δ13, sigh back After the force is applied to the mass G s - the elastic coil spring, - 24 201139085 spring piece, a hydraulic or pneumatic damper, the above components are coupled to the mass body 812. Further, as shown in Fig. 12, the vibration isolation of the fourth embodiment of the present invention The unit 99 can be disposed between the support frame 40 and the anti-friction mechanism 97, whereby vibration generated by the movement of the mass body 812 can be prevented from being transmitted to the support frame 40. According to the dispenser of the present invention, the support frame 40 can be moved. Supporting the dispensing head unit supporting member 50, the reaction force canceling device 80 rotates the rotating member 811, whereby the reaction force generated by the movement of the dispensing head unit supporting member 50 and the moving member 32 can be transmitted to Before the measuring body 812, the direction of the reaction force is changed so that the mass body 812 moves in a direction opposite to the moving direction of the support member 31, thereby canceling the reaction force. The above-described structural features simplify the structure of the dispenser. Since the reaction force generated by the movement of the dispensing head unit supporting member 50 and the moving member 32 can be converted into the moving kinetic energy of the supporting member 31, it can be eliminated, and can be converted into the kinetic energy of the rotation of the rotating member 811 to be eliminated. It can be eliminated by being converted into the moving kinetic energy of the mass body 812. Therefore, the present invention significantly improves the counteracting power counteracting power by using various mechanisms for counteracting the reaction force. According to the dispenser of the present invention, the reaction force canceling device 80 It may be disposed at least one end of the opposite ends of the support frame 40 or at opposite ends of the support frame 40. The technical features of all the above embodiments may be implemented separately or in combination. Furthermore, the reaction force according to the present invention is offset. Device 80, which can be applied to 25 201139085 two times to move the components in the dispenser, for example, it can be applied to ten drives Early in order to move the platform u. In contrast, the present invention provides a reaction force canceling device, in which the quality system is set on the -_ system, and the reaction of the movement of the rim and the charging of the moving parts is ' Hunting this simplifies the structure of the reaction force canceling device. In addition, the reaction force generated by the movement of the moving member can be converted into the movement of the branch member by the reaction force (4) by the lower force (4): hunting & For the rotation of the rotating member, (4) she (8) adds the reverse action ^ to make the reaction force of the present invention cancel the effect greatly, and the pure rotating member, the mass body and the recovery element are all lightly connected to a wooden case, even if The reaction force generated by the movement of the moving member when a transmission system moves along the shift:::::: In addition, the present invention provides a reaction force canceling device in which the hunting is generated by the movement of the moving member The reaction force can be - support: the moving direction of the supporting member is perpendicular to the direction of gravity, and the quality f is moving in the opposite direction to the direction of gravity, and can be restored to its original position by itself = summer. Thereby, the present invention can eliminate the need to additionally set the member to the original position after the body is returned, thereby simplifying the structure of the reaction force cancellation. _ β. In addition, when the reaction force canceling device is applied to the glue dispensing unit of the one-point glue machine, the reaction force generated by the movement of the rotor unit and the moving member is transmitted to the mass body, so that the mass body Moving in a direction perpendicular to the moving direction of a support member converts the reaction force into the moving kinetic energy of the mass body to eliminate the reaction force, thereby simplifying the structure of the dispenser. Further, even when the dispensing head unit supporting member moves in a direction perpendicular to the moving direction of the dispensing head unit, the reaction force generated by the movement of the dispensing head unit can be canceled. Further, by converting the reaction force into the kinetic energy of the rotation of the rotating member and converting the reaction force into the moving kinetic energy of the mass body, the reaction force generated by the movement of the dispensing head unit and the moving member can be cancelled. Through the above various reaction force cancellation mechanisms, the effectiveness of the reaction cancellation can be greatly improved. In addition, when the reaction force canceling device is applied to one of the support frames of the one-point glue machine, the reaction force generated by the movement of the one-point rubber head support member and a moving member is transmitted to a mass body, so that the mass body is along The direction of movement of a support member moves in a direction perpendicular to the direction. Thereby, the reaction force is converted into the moving kinetic energy of the mass body, so that the dispenser of the present invention can counteract the reaction force in the case of simplifying the structure. Further, by converting the reaction force into the kinetic energy of the rotation of the rotating member and converting the reaction force into the moving kinetic energy of the mass body, the reaction force generated by the movement of the dispensing head unit supporting member and the moving member can be canceled. Through the above various reaction force cancellation mechanisms, the effectiveness of the reaction force cancellation can be greatly improved. The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the present invention are intended to be included in the scope of the appended claims. 27 201139085 BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a reaction force canceling device according to a first embodiment of the present invention; FIGS. 2 and 3 are diagrams showing the operation of the reaction force canceling device of FIG. 1; 4 is a schematic diagram of a reaction force canceling device according to a second embodiment of the present invention; FIG. 5 is a schematic diagram of a reaction force canceling device according to a third embodiment of the present invention; FIG. 6 is a fourth embodiment of the present invention. Figure 7 is a schematic view of a spotting machine equipped with a reaction force canceling device according to the present invention; Figure 8 is a schematic view of a dispensing head unit of the dispensing machine of Figure 7; 9 and FIG. 10 are schematic cross-sectional views showing a dispensing head unit of a dispensing machine equipped with a reaction force against a 'Shaw device, according to the present invention, and FIGS. 11 and 12 are diagrams according to the present invention. A schematic cross-sectional view of a support frame of a dispenser equipped with a reaction force against the device. [Main component symbol description] I 〇. Basic frame II: Platform 20: Substrate 201139085 30: Supporting mobile unit 31 • Branch member 32: Moving member 40: Support frame 50: Dispensing head unit Supporting member 60: Dispensing head unit 61: injector 62: nozzle 63: laser distance sensor 631: transmitting element 632: receiving element 64: Y-axis driving unit 6 5 · · Z-axis driving unit 66: sectional area sensor 70: head moving unit 71: Support member 72: moving member 80: reaction canceling device 81: reaction force canceling unit 811: rotating member 812: mass body 813: returning member 82: coupling member 9 0 "·transmission system 29 201139085 91: frame 92: support Member 93: Moving member 94: Polar axis unit 95: Support member 9 6 : Pivot 97: Anti-friction mechanism 99: Vibration isolation unit C: Center of rotation D1, D2: Distance P: Colloid pattern 30