201137327 , » V f ^ t 4 ^ 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種裝置，且特別是有關於一種適用 於光譜儀之狹縫座之裝置。 【先前技術】 光譜儀大多具有系統複雜、體積過大、價格昂責等缺 點，因此目前市場上開始有以微型化的光譜儀為發展目 •標。光譜儀微型化後，光譜儀在接收光源部份，接收光源 進入光譜儀内部之孔洞必須更微小，且光源進入光譜儀/内 部後之入射角度必須更準確，些微入射角度之偏差即會造 成光譜儀顯示出的成像品質不佳或是造成雜散光之增力^。 為了避免上述之問題出現，組裝接收光源部份之零件 時所造成的組裝誤差要盡量地減少，才能維持光譜儀的精 準度。如何降低組裝時所造成的誤差，以符合現今光譜儀 微型化之趨勢’乃業界所致力的方向之一。 【發明内容】 本發明主要係提供一種適用於光譜儀之狹縫座模組 與光譜儀’其利用點狀接觸之方式，在不產生旋轉力矩的 條件下固定住狹縫座，使狹縫可以精準地被定位，以提高 光譜儀之精準度。 根據本發明之一方面，提出一種適用於光譜儀之狹縫 座模組，此狹縫座模組包括一底板、一狹縫座、一狹縫片、 一固定|置以及-球狀物。狹縫座設置於底板上。狹縫片 具有一狹縫，狹縫片係與狹縫座接合，使一光線可穿越狹 縫。球狀物設置於狹縫座與固定裝置之間，且球狀物與狹 縫座具有一接觸點，藉由固定裝置施加一外力於球狀物 上，使狹縫座固定於底板上。 根據本發明之一方面，提出一種光譜儀，此光譜儀包 括一底板、一狹縫座、一狹縫片、一固定裝置、一球狀物、 一影像擷取元件以及一光柵。狹縫座設置於底板上。狹縫 片具有一狹縫，狹縫片係與狹縫座接合，使一光學訊號可 穿越狹縫。球狀物設置於狹縫座與固定裝置之間，且球狀 物與狹縫座具有一接觸點，由固定裝置施加一外力於球狀 物上，使狹縫座固定於底板上。一波導裝置，位於底板上， 使光學訊號穿越狹縫後於波導裝置中傳送。光柵用以將於 波導裝置中傳送之光學訊號分離為複數個光譜分量，並使 此些光譜分量射向影像擷取元件。 為讓本發明之上述内容能更明顯易懂，下文特舉較佳 實施例，並配合所附圖式，作詳細說明如下： 【實施方式】 以下係提出實施例進行詳細說明，實施例僅用以作為 範例說明，並不會限縮本發明欲保護之範圍。此外，實施 例中之圖式係省略不必要之元件，以清楚顯示本發明之技 術特點。 以下說明請參照第1圖與第2圖，第1圖繪示本發明 之實施例適用於光譜儀之狹縫座模組之示意圖，第2圖繪 示第1圖中狹縫座模組之側視圖。此狹縫座模組10 0包括 一底板110、一狹縫座120、一狹縫片130、一固定裝置 14 0以及一球狀物15 0。狹縫座12 0設置於底板110上。 狹縫片130具有一狹縫131，狹縫片130可與狹縫座120 黏合或以其他適合方式接合，使光線可穿越狹縫131。球 狀物150設置於狹縫座120與固定裝置140之間，使球狀 物150與狹縫座120之間具有一接觸點151，藉由固定裝 置140施加一外力於球狀物150上，使狹縫座120固定於 φ 底板110上。 較佳地，如上所述之狹缝座模組10 0更包括一固定板 160(繪示於第2圖）。本實施例中之固定板160例如是具 有二孔洞161。固定裝置140之外側例如具有一螺紋。藉 由施加一旋轉外力於固定裝置140上，使固定裝置140於 孔洞161内轉動，並施加外力於球狀物150上。在本實施 中，如第1圖所示，固定裝置140之上方例如具有一六角 板孔141，例如是使用一六角板手轉動此六角板孔141， • 即可達到施加外力於球狀物150上之效果。 在本實施例中，固定裝置140係沿著實質上垂直於底 板110之方向施加外力於球狀物150上。其中，固定裝置 140例如是一螺絲或是一止付螺絲（set screw)。 若不使用球狀物150的話，固定裝置140與狹縫座 120之間的接觸將會是點接觸以外的接觸方式，例如是面 接觸。如此，當固定裝置140旋轉時，固定裝置140與狹 縫座120之間的摩擦力將會使狹縫座120受到旋轉力矩的 影響而轉動。偏移後的狹縫片130將使得光線射入之後， 201137327 麗▼ ▼ / VI ·/ i 1201137327, » V f ^ t 4 ^ VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to an apparatus, and more particularly to an apparatus suitable for a slit seat of a spectrometer. [Prior Art] Most of the spectrometers have disadvantages such as complicated system, large volume, and high price. Therefore, there is a development of miniaturized spectrometers on the market. After the spectrometer is miniaturized, the spectrometer receives the light source, and the hole that receives the light source into the spectrometer must be smaller. The incident angle of the light source after entering the spectrometer/internal must be more accurate. The deviation of the slight incident angle will cause the spectrometer to display the image. Poor quality or increase in stray light. In order to avoid the above problems, the assembly error caused by assembling the parts of the receiving light source part should be minimized to maintain the accuracy of the spectrometer. How to reduce the error caused by assembly to meet the trend of miniaturization of today's spectrometers is one of the direction of the industry. SUMMARY OF THE INVENTION The present invention mainly provides a slit seat module and a spectrometer suitable for a spectrometer, which use a point contact method to fix a slit seat without generating a rotational moment, so that the slit can be accurately Positioned to improve the accuracy of the spectrometer. According to an aspect of the present invention, a slit seat module suitable for use in a spectrometer is provided. The slit seat module includes a bottom plate, a slit seat, a slit piece, a fixing|and a ball. The slit seat is disposed on the bottom plate. The slit sheet has a slit, and the slit sheet is engaged with the slit seat so that a light can pass through the slit. The ball is disposed between the slit seat and the fixing device, and the ball has a contact point with the slit seat, and an external force is applied to the ball by the fixing device to fix the slit seat to the bottom plate. According to one aspect of the invention, a spectrometer is provided, the spectrometer comprising a bottom plate, a slit seat, a slit plate, a fixture, a ball, an image capture element, and a grating. The slit seat is disposed on the bottom plate. The slit sheet has a slit, and the slit sheet is engaged with the slit seat so that an optical signal can pass through the slit. The ball is disposed between the slit seat and the fixing device, and the ball has a contact point with the slit seat, and an external force is applied to the ball by the fixing device to fix the slit seat to the bottom plate. A waveguide device is located on the substrate such that the optical signal passes through the slot and is transmitted in the waveguide device. The grating is used to separate the optical signals transmitted in the waveguide into a plurality of spectral components and direct the spectral components toward the image capturing component. In order to make the above description of the present invention more comprehensible, the preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings. By way of example, it is not intended to limit the scope of the invention. In addition, the drawings in the embodiments are omitted to omit unnecessary features to clearly show the technical features of the present invention. Please refer to FIG. 1 and FIG. 2 for the following description. FIG. 1 is a schematic view of a slit seat module suitable for a spectrometer according to an embodiment of the present invention, and FIG. 2 is a side view of a slit seat module of FIG. view. The slit seat module 100 includes a bottom plate 110, a slit seat 120, a slit piece 130, a fixing device 140 and a ball 150. The slit seat 120 is disposed on the bottom plate 110. The slit sheet 130 has a slit 131 that can be bonded to the slit holder 120 or joined in other suitable manner so that light can pass through the slit 131. The ball 150 is disposed between the slit seat 120 and the fixing device 140, so that a contact point 151 is formed between the ball 150 and the slit seat 120, and an external force is applied to the ball 150 by the fixing device 140. The slit seat 120 is fixed to the φ base plate 110. Preferably, the slit seat module 10 as described above further includes a fixing plate 160 (shown in Fig. 2). The fixing plate 160 in this embodiment has, for example, two holes 161. The outer side of the fixture 140 has, for example, a thread. The fixing device 140 is rotated in the hole 161 by applying a rotating external force to the fixing device 140, and an external force is applied to the ball 150. In the present embodiment, as shown in FIG. 1, the upper portion of the fixing device 140 has, for example, a hexagonal plate hole 141, for example, a hexagonal plate is used to rotate the hexagonal plate hole 141, and an external force is applied to the spherical shape. The effect on the object 150. In the present embodiment, the fixture 140 applies an external force to the ball 150 in a direction substantially perpendicular to the base plate 110. The fixing device 140 is, for example, a screw or a set screw. If the ball 150 is not used, the contact between the fixture 140 and the slit seat 120 will be a contact other than point contact, such as a face contact. Thus, when the fixture 140 is rotated, the friction between the fixture 140 and the slot seat 120 will cause the slot seat 120 to be rotated by the rotational moment. The offset slit sheet 130 will cause the light to enter, 201137327 丽 ▼ ▼ / VI · / i 1
I I 將會偏移而不會沿著預設之光路徑前進。如此，將會使得 使用狹縫座模組100之光譜儀的影像品質變差或有效進光 量降低。 因此，於本實施例之在固定裝置140施加一外力於球 狀物150上’使狹縫座120固定於底板110上之的做法中， 固定裝置140藉由球狀物150以點接觸之方式來固定狹縫 座。相較於上述之以點接觸以外的接觸（例如面接觸）方式 固定狹縫座而造成一旋轉力矩於狹縫座上，而使此狹縫座 旋轉之技術相較，本實施例之技術在組裝時對狹縫座120 配置位置的精確度可大幅提高，進而得到正確的光路徑並 提高使用它之光譜儀的精準度。 請參照第3圖至第5圖，第3圖繪示使用第1圖之狹 縫座模組之光譜儀200的部份示意圖，第4圖繪示第3圖 之光譜儀200的分解圖，第5圖繪示第4圖之光譜儀200 的組合圖。光譜儀200除了具有狹縫座模組1〇〇之外’光 譜儀200更具有一影像擷取元件280以及一光栅290 ’較 佳而言，該光譜儀200更可包含一波導裝置270。其中’ 光柵290隨著光譜儀200之微型化，在設計上可例如是微 型繞射光柵。 波導裝置270位於底板110上，光學訊號52穿越狹 縫131進入光譜儀200内部後於波導裝置270中傳送。光 栅290用以將於波導裝置270中傳送之光學訊號52分離 為複數個光譜分量51，並使此些光譜分量51射向影像擷 取元件280。 更進一步來說，波導裝置270例如包括一第一波導板 201137327 271、一第二波導板272以及二側板273。其中，二側板 273係設置於第一波導板271與第二波導板272之間，以 形成一空腔式波導274。光學訊號52係於空腔式波導274 中傳送。 較仏地，光§普儀200更具有一前座300。其中，前座 300具有一開放區域，對應於狹縫〖Μ ,使光學訊號52可 穿越狹缝131進入到光譜儀200内部。 如第4圖所示，狹縫座120之上下側可分別由固定板 9 160與底板11 〇所固定，而其左側可利用在第一波導板2? 1 與第二波導板272預留之凹槽275加以抵住，其右侧則可 利用前座300予以抵住，如此則第一波導板271、第二波 導板272與前座300就共同定義了狹縫座12〇的水平位 置。另外，本實施例中，狹縫座12〇材質例如是一不鏽鋼。 為了使光譜儀微型化，光譜儀内部之零組件也必須跟 著縮小。如此，組裝之精確度要求上也大幅的提高。為達 小型化，狹縫片13 0之材質例如是由一石夕晶、一三五族半 _導體材料、或其他半導體晶片之基底材質而以姓刻製程來 達成，以矽為狹縫片130之材質為例，若配合以半導體廠 之濕蝕刻技術來貫穿狹縫片130上之狹縫131，則狹縫131 將具有非常平整而銳利之邊緣，其平整度可達矽晶格之等 級，如此光譜儀之影像品質將獲得更進一步的提昇。在本 實施例中，狹縫131之寬度例如約為25微米（，高度 例如約為150微米（//m)。 在本實施例中，由於固定裝置140係藉由球狀物15〇 來固定狹縫座120於底板1〇〇上，固定裝置14〇係不直接 201137327I I will shift without going along the preset light path. As a result, the image quality of the spectrometer using the slit holder module 100 is deteriorated or the effective amount of light entering is lowered. Therefore, in the embodiment in which the fixing device 140 applies an external force on the ball 150 to fix the slit seat 120 to the bottom plate 110, the fixing device 140 is in point contact by the ball 150. To fix the slit seat. Compared with the above-mentioned method of fixing the slit seat by contact other than point contact (for example, surface contact) to cause a rotational moment on the slit seat, the technique of the embodiment is compared with the technique of rotating the slit seat. The accuracy of the position of the slit holder 120 during assembly can be greatly improved, thereby obtaining a correct light path and improving the accuracy of the spectrometer using the same. Please refer to FIG. 3 to FIG. 5 , FIG. 3 is a partial schematic view of the spectrometer 200 using the slit holder module of FIG. 1 , and FIG. 4 is an exploded view of the spectrometer 200 of FIG. 3 , and FIG. The figure shows a combination of the spectrometer 200 of Figure 4. In addition to having a slit holder module 1', the spectrometer 200 preferably includes an image capture element 280 and a grating 290'. The spectrometer 200 may further include a waveguide device 270. Wherein the grating 290, with miniaturization of the spectrometer 200, may be designed, for example, as a micro-diffraction grating. The waveguide device 270 is located on the bottom plate 110, and the optical signal 52 passes through the slit 131 into the interior of the spectrometer 200 and is transmitted in the waveguide device 270. The grating 290 is used to separate the optical signal 52 transmitted in the waveguide device 270 into a plurality of spectral components 51 and direct the spectral components 51 toward the image capturing component 280. Furthermore, the waveguide device 270 includes, for example, a first waveguide plate 201137327 271, a second waveguide plate 272, and two side plates 273. The two side plates 273 are disposed between the first waveguide plate 271 and the second waveguide plate 272 to form a cavity waveguide 274. Optical signal 52 is transmitted in cavity waveguide 274. More ambiguously, the Light Detector 200 has a front seat 300. The front seat 300 has an open area corresponding to the slit 使 so that the optical signal 52 can enter the interior of the spectrometer 200 through the slit 131. As shown in Fig. 4, the upper side of the slit seat 120 can be fixed by the fixing plate 9160 and the bottom plate 11 respectively, and the left side thereof can be reserved for the first waveguide plate 2? 1 and the second waveguide plate 272. The groove 275 is abutted, and the right side thereof can be abutted by the front seat 300. Thus, the first waveguide plate 271, the second waveguide plate 272 and the front seat 300 collectively define the horizontal position of the slit seat 12A. In addition, in the embodiment, the material of the slit seat 12 is, for example, a stainless steel. In order to miniaturize the spectrometer, the components inside the spectrometer must also be scaled down. As such, the accuracy of assembly is also greatly increased. In order to achieve miniaturization, the material of the slit sheet 130 is achieved by, for example, a stone substrate, a tri-five-semi-conductor material, or a base material of another semiconductor wafer, and is formed by a process of a surname, which is a slit sheet 130. For example, if the slit 131 of the slit sheet 130 is penetrated by the semiconductor factory wet etching technique, the slit 131 will have a very flat and sharp edge, and the flatness can reach the level of the lattice. The image quality of such a spectrometer will be further improved. In the present embodiment, the width of the slit 131 is, for example, about 25 μm (the height is, for example, about 150 μm (//m). In the present embodiment, since the fixing device 140 is fixed by the ball 15〇 The slit seat 120 is on the bottom plate 1〇〇, and the fixing device 14 is not directly 201137327
I J 麗 ττ -y / u j 羼 / ι 施力於狹縫片130。如此，更可以保護狹縫片130不會於 固定裝置140鎖付於固定板160時因為受力而破碎。 參照第4圖可得知，因為狹縫131很微小，所以如果 在固定狹縫座120時造成此狹縫座120些微的旋轉偏移， 即會使得光學訊號52也跟著偏移，進而使得光學訊號52 之行進方向不正確。更進一步地，光學訊號52經過光柵 290後分離之多個光譜分量51，因為行經之距離更長故其 偏移會更加嚴重，而影響光譜儀200中光學訊號51與光 譜分量52行進路線之正確性。此外，因為光學訊號52之 偏移而使部份光學訊號52無法在預設之路徑下傳送，而 偏離變成雜散光，如此將使得背景雜訊提高，而影響影像 擷取元件280之成像的清晰度。本實施例中提出使用球狀 物15 0利用接觸點151固定狹縫座12 0之方式，由於是點 接觸，因此除非於固定裝置140上施加超越常理的外力來 固定狹縫座120，否則並不會有使狹縫座120旋轉之狀況 發生。因此，本實施例可以達到精確地定位狹縫座120及 狹縫131的位置，讓光學訊號51與光譜分量52得以沿著 預定之行進路線前進，以提高光譜儀的精準度。 綜上所述，雖然本發明已以較佳實施例揭露如上，然 其並非用以限定本發明。本發明所屬技術領域中具有通常 知識者，在不脫離本發明之精神和範圍内，當可作各種之 更動與潤飾。因此，本發明之保護範圍當視後附之申請專 利範圍所界定者為準。 201137327 • · 1 νν /-χ 【圖式簡單說明】 第1圖繪示本發明之實施例適用於光譜儀之狹縫座 模組之不意圖。 弟2圖繪示第1圖中狹縫座模組之側視圖。 第3圖繪示使用第1圖之狹缝座模組之光譜儀的部份 示意圖。 第4圖繪示第3圖之光譜儀的分解圖。 第5圖繪示第4圖之光譜儀的組合圖。 【主要元件符號說明】 51 :光譜分量 52 :光學訊號 10 0 :狹縫座模組 110 :底板 120 :狹縫座 13 0 :狹縫片 鲁 131 ··狹縫 140 :固定裝置 141 .六角板孔 150 :球狀物 151 :接觸點 160 :固定板 161 :孔洞 200 :光譜儀 270 :波導裝置 201137327 271 : 第一波導板 272 ： 第二波導板 273 : 二側板 274 : 空腔式波導 275 : 凹槽 280 ： 影像擷取元件 290 ： 光柵· 300 ： 前座I J 丽 ττ -y / u j 羼 / ι applies force to the slit sheet 130. In this way, it is possible to protect the slit sheet 130 from being broken by the force when the fixing device 140 is locked to the fixing plate 160. As can be seen from Fig. 4, since the slit 131 is very small, if the slit seat 120 is slightly rotated and displaced when the slit holder 120 is fixed, the optical signal 52 is also shifted, thereby making the optical The direction of travel of signal 52 is incorrect. Further, the optical signal 52 passes through the grating 290 and is separated by a plurality of spectral components 51. Since the distance traveled longer, the offset is more serious, and the correctness of the optical signal 51 and the spectral component 52 in the spectrometer 200 is affected. . In addition, because of the offset of the optical signal 52, part of the optical signal 52 cannot be transmitted in a predetermined path, and the deviation becomes stray light, which will improve the background noise and affect the imaging of the image capturing element 280. degree. In the present embodiment, the method of fixing the slit seat 120 by the contact point 151 using the ball 150 is proposed. Since it is a point contact, unless an external force exceeding the common force is applied to the fixing device 140 to fix the slit seat 120, There is no situation in which the slit seat 120 is rotated. Therefore, in this embodiment, the position of the slit seat 120 and the slit 131 can be accurately positioned, and the optical signal 51 and the spectral component 52 can be advanced along a predetermined traveling path to improve the accuracy of the spectrometer. In the above, the present invention has been disclosed in the above preferred embodiments, but it is not intended to limit the present invention. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims. 201137327 • · 1 νν /-χ [Simplified description of the drawings] Fig. 1 is a schematic view showing an embodiment of the present invention applied to a slit seat module of a spectrometer. Figure 2 shows a side view of the slit seat module of Figure 1. Figure 3 is a partial schematic view of a spectrometer using the slit holder module of Figure 1. Figure 4 is an exploded view of the spectrometer of Figure 3. Figure 5 is a combination diagram of the spectrometer of Figure 4. [Description of main component symbols] 51: Spectral component 52: Optical signal 10 0: Slit block module 110: Base plate 120: Slit block 13 0: Slit tab 131 · Slit 140: Fixing device 141. Hexagonal plate Hole 150: Ball 151: Contact Point 160: Fixing Plate 161: Hole 200: Spectrometer 270: Waveguide Device 201137327 271: First Waveguide Plate 272: Second Waveguide Plate 273: Two Side Plates 274: Cavity Waveguide 275: Concave Slot 280 : Image capture element 290 : Grating · 300 : Front seat