201134628 六、發明說明： 【發明所屬之技術領域】 本發明之實施例是關於一種用於線銀裝置中的滑輪、 一種線鋸裝置、一種線鋸裝置的使用、以及一種用於操 作線鋸裝置的方法。更詳言之，這些實施例都關於經裝 設以用於線鋸裝置的滑輪，以及用於切割或切鋸堅硬材 料（諸如矽塊或石英塊）、用於切割矽晶圓、用於方塊切 鋸裝置（squarer)、用於截切器等的線鋸裝置。 【先前技術】 現存線鑛裝置是用於從諸如石夕的堅硬材料片切割塊體 或材料磚、薄片（例如半導體晶圓）。在此類裝置中，伸 直的鑛線從捲線軸饋送，且由滑輪導引並拉張，以在切 割區域中導引鑛線。用於切鑛的鑛線大體上設有磨料材 料。-個選項是m料做為磨料材料。其可在鑛線 接觸待切割的材料之前急速完成。因此，磨料被用於切 割材料的鋸線帶至切刻朴番 口 ^ ▼刀位置。另一個選項是，磨料可設 於具有塗層的鋸線上。舉例 ^ ^^ 牛例而§，鑽石粒子可設於例如 具有塗層的金屬線上，苴φ兮發 興尺工再肀該等鑽石粒子嵌在鋸線的塗 層中。因&，磨料緊緊地與鋸線相連。 大體而言，目前的趨熱县祜 势疋使用較細的鋸線以減少切割 厚度，而因此減少廢杳的奸 曆業的材枓。亦期望使用鑽石鋸線。 該等較細的鋸線與鑽石鋸線 挪深通㊉易受傷害，且在高應變 201134628 下該等鋸線更容易斷裂。進一 „ 、 步s之，期望增加切割速 度，以改善線鋸裝置的處理量。 ^將月材移動通過鋸線網 的最大速度以及給定量的時間内县士认士 ., 吁間内最大的有效切割面積是 受到以下述種因子限制：鋸線 將琛逮度、待切鋸材料之硬度、 擾動影響及期望的精確度等 曰速度增加時，愈難以停 止機器。因此，上述避免傷宝 光傷害鋸線、避免鋸線斷裂的問 題在更高的切鋸速度下更關鍵。 【發明内容】 根據上文所述，在此提供：根據獨立的請求項第^項 所述之一種滑輪，其經裝設以 用於具有形成鑛線網之鑛 線的線鋸裝置；一種根據請求項笛 項第14項所述之線鑛裝 置；以及一種根據獨立的請求項笛 月爪項第18項所述之操作線鋸 裝置的方法。進一步的優點、特 竹做、態樣與細節可根據 依附的請求項、說明書及圖式中而瞭解。 根據一個實施例，提供一種湣 ^ ^ 月輪’其經裝設以用於具 有形成雜線網之錯線的線鑛裝置。該滑輪包括：一輪部， 其位於該滑輪軸周圍’其中該輪部包含導電塑膝材料； 以及一鋸線導引部’其位在該輪 柯#的徑向外側，具有用 於導引該鋸線的一溝槽結構。 具有形成鋸線網之鋸 滑輪，該滑輪經裝設 一輪部，其位於該滑 根據進一步之實施例，提供一種 線的線鋸裝置。該線鋸裝置包括— 以用於該線鋸裝置。該滑輪包括： 201134628 輪轴周圍，其中該輪部包含導電塑膠材料；以及一鋸線 導引邓，其位在該輪部的徑向外側，具有用於導引該銀 線的一溝槽結構》 根據更進一步之實施例，提供一種操作線鋸裝置的方 法，該線鋸裝置具有形成鋸線網的鋸線。該方法包括以 下步驟：提供複數個滑輪，該等滑輪具有位於該滑輪輛 周圍的一輪部，其中該輪部包含導電塑膠材料；該鋸線 偏壓於一電位，以及在該鋸線接觸該輪部的期間，監視 該線鋸裝置中的電流之存在。 實施例亦導向用於執行所揭露的方法的設備以及包括 用於執行每一所述方法步驟的設備元件。該等方法步騍 可透過硬體部件之方式、以由適當的軟體程式化的電 腦、以任何該一者結合的方式執行，或以任何其他方式 執行。再者，根據本發明的實施例亦導向所述之設備操 作的方法。其包括用於執行設備之每一功能的方法步驟。 【實施方式】 現在請詳細地參考本發明之各實施例，一個或多個 例繪示於圖式中。在隨後的圖式之描述中，相同的元 符號是指相同的部件。大體而言，只針對個別實施例 述差異處。每一範例是以解释本發明的方式提供，而 非意圖限制本發明。進一步言之，所繪示或所描述為 個實施例之一部分的特徵可用於其他實施例或與其他 201134628 此欲本說明書涵 施例連結，以產生更淮_半 — 又运步的實施例 蓋修改型式與變化型式。 再者’在隨後的說明書内文中，可將鋸線管理單元理 解成操縱供給料至線蘇裝置（例如截切器、方塊切鑛 裝置或晶圓切割線鋸）的切割區域或工作區域的裝置。 一般而言’線鑛包括鑛線導件以在料移動方向上運輸 及導引鑛線，肖時㈣線管理單元提供料張力的控 制。再者’由錯線管理單元提供的鑛線在切割區域中形 成鋸線網。經常將鋸線網視為由單一鋸線管理單元形成 的網絡。應瞭解到，鋸線網可含有超過一個工作區域， 該工作區域是被界定為執行切鋸製程的區域。因此，根 據此述的一些實施例，鋸線網能具有由來自不同的鋸線 管理單元的鋸線所形成的多重區域。 對於當前的線鋸裝置（諸如例如截切器、方塊切鋸裝 置或線鑛）而言，期望能以高速切割諸如半導體材料（如 矽或石英等）之堅硬材料^鋸線速度（即鋸線移動穿過 線鋸裝置、鋸線管理單元與待切鋸的材料的速度）可為 例如10 m/s (公尺/秒）或更高。一般而言，鋸線速度可 在15至20 m/s之範圍内。然而，25 m/s至3〇 m/s之更 高的鋸線速度亦是受期望的，且能夠在某些條件下實現。 對於以期望的鋸線速度展開鋸線而言，捲線軸以最高 達每分鐘數千轉的速度旋轉。例如，可提供1〇〇〇至2〇〇〇 rpm展開雜線。 第1圖顯示線鋸裝置100。如由在鋸線網隔室11〇中 201134628 的形成鋸線網之鋸線10的圖案所見，第j圖所示之範例 為方塊切鋸裝置（SqUarerp線鋸裝置的外殼分隔成不同 區域，其如虛線所指。鋸線網形成於鋸線網隔室丨1()中。 進一步言之，設置一外殼部份！ 1〗以容置線鋸裝置】i 〇 更多的部件與設備。舉例而言，可設置鋸線操縱裝置隔 室112與電箱114〇在該進一步的外殼部份lu内，亦可 設置槽120與124以及個別的泵121與i 25。 根據一些實施例（其可與此述的其他實施例結合），第 槽12 0 . 了用於未使用的冷卻流體（例如在是以鑽石雜 線操作線鋸裝置的實例中），或者例如用於未使用（新鮮 的）漿料（在以需要額外磨料的鋸線操作線鋸裝置1〇〇 的實施例中）。泵121抽取冷卻流體（或聚料）使之朝向 切割區域中的期望位置。在第！圖中是以導管122所指 示。使用過的冷卻流體（或漿料）可透過導管126回流， 並且由泵125抽取進入第二槽124〇在用過冷卻流體或 漿料的彼等實例巾，—部分使用過料、消耗流體在重新 注入槽120中時能夠再度使用之。因此，根據不同實施 例，僅有一部份可消耗流體可再使用、或所有的可消耗 流體可再使用、或沒有任何可消耗流體能再使用，並且 因此該等流體重新注入槽12〇中。在一範例中，額外的 閥可设於導管126中，以供選擇性地挑選使用過的流體 被抽取送入的槽。根據另一範例，可設置介於槽1 24與 槽120之間的流體連接，以使一部分的使用過的流體重 新注入槽120中。根據不同實施例，如上文已然描述者， 201134628 可消耗的流體可為冷卻流體或漿料。大體而言，倘若使 用漿料，漿料亦接替冷卻該鋸線所切割材料的位置之功 能》 在鑛線操縱隔室11 2中，設置兩個處理區段，個別以 將鋸線1 0傳遞至切割區域，並且從切割區域接收鋸線。 根據一些實施例（其可與此述的其他實施例結合），鋸線 是設於捲線軸132上，該捲線軸132繞捲線軸的轴線132a 旋轉。鋸線在複數個滾子134上受到導引，而進入鋸線 網隔室110。進一步的滑輪134、136將鋸線10導引進 入切割區域以形成鋸線網。因此，需要進一步的滑輪（圖 中未示）將鋸線10從一個滑輪136導引至另一個滑輪 136。為了避免非必要的複雜度，這些進一步的滑輪未顯 示於第1圖。在切割後，鋸線是受進一步的滑輪丨34導 引而朝向鋸線操縱隔室112,並且被裝配在繞捲線軸的 軸線130a旋轉的捲線軸130上的滑輪134上方。 根據進一步之實施例（其可與此述的其他實施例結 合）。鋸線操縱系統可適於雙向使用，以致在一個方向 上，鋸線從捲線轴132饋送至捲線軸130，而在另一方 向上，鋸線從捲線轴130饋送至捲線轴132。因此，根 據一般的實施方法，對應捲線軸130與132的兩個單元 包括類似的部件（諸如滑輪等），以達成在兩個切鋸方向 上具相對應的鋸線操縱。雙向使用線鋸裝置在使用鑽石 鋸線時特別受到矚目。 一般而言，以1 〇 m/s以上的鋸線速度將鑛線從錯線操 201134628 作隔室導引至鋸線切割區域並且返回，該速度一般是在 ^至2〇 m/s的範圍，或甚至高達2〇 m/s或3〇 m/s。待 切割的材料定位在支撐件14〇上。支撐件140以及由滑 輪13 6界疋的鑛線網能相對於彼此移動，以致能實行切 割材料。根據一個實施例，滑輪136維持在固定的位置 而支撐件3 1 4將待切割的材料移動通過鋸線網同時鋸線 是處於約10 m/s以上的速度。為易於瞭解，在第丨圖中 支撐件140的移動垂直於圖式的平面。根據另一實施 例，滑輪136乃至於由鋸線10生成的鋸線網相對於支撐 件140移動而使鋸線切穿材料。根據進一步的實施例， 支撐件140與鋸線網二者可相對彼此移動。 如第1圖中虛線所指，電箱！ 14可用作控制不同部件 的操作。舉例而言’能夠控制支樓件i 4〇的移動、泵上2 i 與125的操作、捲線軸13〇及132的旋轉。再者以外 加的方式或以視情況任選的方式測量# 12〇肖124的填 充高度，並且將個別訊號饋送至控制單元。根據另一進 步的實施例，可將其他控制訊號與監視訊號饋送進出 電箱114。舉例而言，來自驅動捲線轴的馬達的訊號、 來自鑛線張力器的訊號、送至鑛線張力器的訊號、用於 饋送可/肖耗流體（諸如冷卻流體或I料）的壓力訊號或 鑛線斷裂㈣訊號可饋送進人電箱或從電箱送出。即使 電相114整合至線鋸裝置10〇 (如第1圖所示），熟習此 技藝者可清楚瞭解大體上能在線鋸裝置中不同位置設置 電箱或控制單元（例如線鋸裝置的外部），且因此能提供 201134628 相對應的送至控制單元與送出控制單元的控制訊號。 第2圖中顯示線鋸裝置2〇〇的進一步的範例。如由在 鑛線網隔室U0中的鑛線1()所形成的鑛線網所見，顯示 於第2圖中的系統可用於切片晶圓，即該系統為線鑛。 根據關於第2圖所緣示的實施例，設置兩個鑛線操縱隔 至212a與212b。鋸線操縱單元的各者將鋸線1〇朝鋸線 網饋送，且鋸線在滑輪134上方受到導引以形成鋸線 網。如第2圖所示，鋸線網是由兩個相鄰的區域形成， 其中來自各鑛線操縱單元的鑛線用於形成料網的一個 區域。如關於第1圖於上文所述，設置滑輪134以導引 鋸線。據此，在關於第丨圖所描述的實施例中，能相對 應地形成該等實施例以供第2圖的線鋸裝置所用。 根據不同的實施例，線鋸裝置可為截切器、方塊切鋸 裝置、線鋸或多重線鋸。因此，瞭解到截切器為一裝置， 其可用於從在方塊切鋸裝置中分成磚塊的磚塊或塊體切 鋸末端片材。方塊切鋸裝置是一種線鋸，其大體上將矽 熔塊切鋸成期望尺寸的方塊，以致線鋸或多重線鋸能在 晶圓製程中從磚塊切鋸晶圓。此述的鋸線管理單元特別 實用於為方塊切鑛裝置的線鋸裝置，但不限於方塊切鑛 裝置。 在使用細的鋸線或者具有塗層（例如鑽石塗層）的鑛 線時，上述系統特別實用。據此，在可與此述的其他實 施例結合的實施例中，此述的鋸線操縱區段與線鑛裝置 適於具有約400 μπι以下的直徑的細鋸線，諸如介於約 10 201134628 200 μπι至約4〇〇 μιη之間的直徑，更詳言之是介於約2〇〇 μιη至約3〇〇 μιη之間。然而，在其他實例中，實施例亦 可具有低如1〇〇 μη!或甚至8〇 μιη的鋸線直徑。進—步言 之，鋸線操縱區段以及此述的線鋸裝置適於塗佈的鋸 線，例如具有以鑽石粒子鑲嵌於其中的鎳塗層之鋸線。 此類鋸線一般可具有約300 μηι至約400 μιη的直徑，例 如310 μιη至340 μηι。對於彼等鋸線而言，扭轉鋸線可 能增加鑛線斷裂的風險，或者傷害塗層的風險，如此無 扭轉的操作是有利的。透過使用鑽石雜線，處理量可增 加2倍以上。在方塊切鑛裝置的實例中，以此方式可達 成刚MW以上的處理速率。當使用鑽石錯線時，線鑛 進一步的零件可適用於鐵石例如，機械零件、電 子零件及/或軟體可適用於鐵石鑛線。 一般而言’ Α述的滑輪之實施例適用於線鑛裝置，或 經設置以用於線«置，他們能用在制裝置中，及/或 能做為線鋸裝置的一部份。除 除了施用於使滑輪適於線鋸 裝置或經設置以用於線銀护番从枝 深鋸裝置的其他態樣之外，滑輪能 夠具有溝槽結構，該溝槽社槿 再馉、，。構用於導引具有厚度為4〇〇 ㈣以下的厚度的料，或者是上文提及的任何其他尺寸 ^厚度。㈣’已注__結構是制設計合乎錯線 直徑U及切割製程，而得以 ^ Α ικη 仃阿度精確的切割，例如 具積確度為250 μηι以下，弗戈 4 &至50 μηι以下。 在下文中’描述進—步之訾 ^ ^ ^ ^ ^ . &例，其元件可與此述的 其他實施例之任何元件社人。+ 仵、·° β。在下文的描述中，僅描述 201134628 與先前或其他已述的實施财元件有所不同的元件。應 瞭解到關於其他實施例所述的部件、態樣與細節能應用 到沒有描述所有部件、態樣或細節的實施例中。 第3圖顯示根據一些實施例（其可與此述的其他實施 例結合）的料管理單元之透視圖。第3圖的實施例中 包括安裝在捲線軸桿31〇上的捲線軸312,而滑輪32〇、 33〇與340被佈置成導引雜線，特別是以鑛線追縱系統 導引雜線。is線追蹤纟統的範彳m於歐洲專利申請號 〇9153051，9號文件中，其標題為「線IS裝置與用於操作 線鋸裝置的方法」’該案在2009年2月17日提出申請， 其全文在此併人本文做為參考，且與本發明所揭露之部 份無不-致之處。此外，可見到—凹部116。該凹部μ 設於主要框架部份中。調整凹部尺寸以及佈置凹部，以 至^ #份容納第一滑輪320。此凹部使第一滑#咖乃 至於捲線轴312置於更接近主要框架部份處，同時使得 第一滑輪320的運純跡涵蓋料搭載區域2Ua的全部 範圍或幾乎全部範圍。進一步而言’將滑輪搭載單元似 設置成可收回或伸縮式的棍桿。可收回或伸縮式的棍桿 可沿棍桿軸線做縱軸移動，該轴線平行於捲線軸之轴 線。該棍桿是以能縱轴移動的方式安裝至主要框架部份 的壁部份，例如凹部116的壁部份。 進一步言之，在第3圖的實施例中，主要框架部份包 =女裝構件314,第二及第三滑輪33〇、34〇安裝於其上。 女裝構件3 14疋主要框架部份的—部份，其剛硬地連接 12 201134628 線鋸裝置的底盤。在第3圖的特定實施例中亦可能有安 裝構件的其他設計，該安裝構件是一棍桿，更詳言之是 L形的棍柃’其具有第一腿部ma延伸至主要框架部份 的側表面（即平行X轴延伸），並且具有第二腿部114b 與第一腿部形成大略直角，並且延伸至主要框架部份的 頂表面（即平行2軸延伸）。獨立於所示的實施例，普遍 態樣是第-滑輪320與第二滑⑥33〇 (以及視情況任選 的其他滑輪，諸如第三滑輪及/或第四滑輪）安裝在共通 女裝構件上，特別是於一體成形的安裝構件上。 進一步言之，圖中顯示第四滑輪35〇，第四滑輪“Ο 接收來自第三滑輪340的鋸線，並且以第四轉向角使鋸 線轉向。第四滑輪350以可旋轉的方式安裝至框架，以 供繞第四滑輪軸旋轉。在此，第四轉向角大約是9〇度。 在其他實施例’第四轉向角可介於6〇度至12〇度之間。 第四滑輪轴基本上平行於捲線軸的軸線。進一步言之， 第四滑輪軸基本上垂直於第一滑輪軸、第二滑輪軸與第 二滑輪軸。在其他實施例中，第四滑輪軸可基本上平行 於這些軸線的至少一者。 第3圖的實施例進一步包括鋸線張力器，以控制鋸線 的張力。錯線張力器包括第五滑輪36〇以及第六滑輪 370’第五滑輪360以可旋轉式安裝至框架以繞第五滑輪 軸362旋轉，而第六滑輪370以可旋轉式安裝至可動構 件374以繞第六滑輪轴372旋轉。可動構件374是以可 移動式安裝於主要框架部份上。可動構件374的移動可 201134628 由馬達控制’或者可動構件374可預先受偏壓（例如藉 由彈簀施加）以控制鋸線張力。帛3圖中，可動構件二 顯示為預偏壓的轉動槓桿。線鋸張力器接收來自第四滑 輪350的鋸線10並且將鋸線1〇提供至鋸線網（至第3 圖中所示的鋸線管理單元的右邊）。更精確而言，第五滑 輪360接收來自第四滑輪35〇的鋸線1〇 ,並且以第五偏 轉角使鋸線偏轉，隨後第六滑輪36〇接收來自第四滑輪 350的鋸線1〇並且以第六偏轉角使鋸線偏轉。 根據上文所界定的x_y_z參考框架，如繪示在第3圖 的實施例的普遍態樣滿足下文所列的至少一種條件（以 及在一些實施例中，甚至所有條件）； 鋸線張力器位於捲線軸3 12的一側上，基本上相對於 第一滑輪320 ; 介於第四滑輪與鋸線張力器之間（詳言之是介於第四 滑輪與第五滑輪之間）的鋸線，主要沿z軸延伸； 介於第五滑輪與第六滑輪之間的鋸線主要沿y軸延 伸； 銀線以基本上平行y軸的方式離開第六滑輪； 第五與第六滑輪具有各別基本上以X方向延伸的轴 線； 第五轉向角是在60度至90度的範圍内，基本上是在 80度至90度的範圍内；及/或 第六轉向角約180度。 大體而言，在可與此述的其他實施例結合的實施例 14 201134628 中，該等滑輪具有至少一個以下半徑，而在一些實施例 中具有以下所有半徑：捲線轴桿310具有約150 mm的 直徑。第一滑輪320與第二滑輪33〇具有介於1〇〇 mm 至150 mm之間的直徑，特別是112mm (在此，直徑意 思是由鑛線觀察到的直徑，即在鋸線導引溝内的直徑）。 第三滑輪340具有介於14〇 mm至170 mm之間的直徑， 特別是158 mm。第四滑輪35〇具有類似於第一滑輪32〇 的直徑。第五滑輪360與第六滑輪370具有類似於第三 滑輪340的直徑》 繼續描述第3圖，除了鋸線操縱區段3〇〇 (在下文中 亦稱之為主要鋸線操縱區段300)外，第3圖中的鋸線 管理單元亦具有次要鋸線操縱區段3 〇〇b。在此，「主要」 與「次要」二詞僅是為了便於分辨，而非暗指該鋸線操 縱區段與捲線軸等的階級次序或功能次序。次要鋸線操 縱區段300b是以類似於主要鋸線操縱區段3〇〇的方式所 建構並且其元件對應主要鋸線操縱區段300的元件。次 要錫線操縱區段3 0Ob的元件被標注為「次要」元件，並 且指派元件符號310b、312b等，以對應主要鋸線操縱區 段300的「主要」元件310、320。因此，次要鑛線操縱 單元300b具有例如用於捲線軸312b的次要捲線軸桿 310b、次要第一滑輪320b、次要第二滑輪330b等。次 要第一滑輪320b以可旋轉式安裝至次要滑輪搭載單元 324b ’以繞次要第一滑輪軸322b旋轉，該次要滑輪搭載 單元可沿次要滑輪運動軌道在縱轴方向上移動》主要與 15 201134628 次要鋸線操縱區段300、30叽在y方向上彼此相鄰安置。 如一普遍態樣所述（但獨立於所示的實施例），主要與次 要鋸線操縱區段300、300b可安置在主要框架部份的共 通壁部份上。進一步言之，主要與次要鋸線操縱區段 300、300b可安置在線鋸裝置的共通隔室中。進一步而 吕’如由第3圖所見’主要捲線轴312是有別於次要捲 線轴312b的不同類型（可觀察到，在次要捲線轴3m 的前凸緣中缺少狹縫）。 大體而言’根據此述的任何實施例，次要鋸線操縱區 段3 00b是以相同於鋸線操縱區段300的相同方式形成。 主要鑛線操縱區段300的元件的描述因此亦可應用至相 對應的次要鑛線操縱區段300b的元件。 在操作的示範模式中（此後稱作主要對次要捲線軸切 鋸）’主要鑛線操縱區段提供來自主要第一捲線軸312至 鋸線網10的鋸線，以致鋸線可用於在鋸線網中切鋸。隨 後次要鋸線操縱區段300b接收來自鋸線網的鋸線丨〇。 因此’錄線10從鋸線網傳輸到次要鋸線張力器，更精確 而言，是到次要第六滑輪37〇b，且隨後到次要第五滑輪 360b，再到次要第四滑輪35〇b、再到次要第三滑輪 340b、再到次要第二滑輪33〇b、再到次要第一滑輪 320b，然後最後捲繞於捲線軸312b上。進一步言之，控 制器控制次要第一滑輪32〇b沿次要滑輪運動軌道的運 動’以致以受控制的方式將鋸線捲繞於次要捲線軸3 12b 的鋸線搭載區域上。 16 201134628 關於接收鋸線，次要第一滑輪控制器包括鋸線捲繞圖 案，並且經程式化以確定期望的鋸線捲繞位置以供在次 要捲線轴的据線搭載區域上捲繞雜線，且該控制器傳送 移動指令給次要第一滑輪運動裝置324b以引發次要第 一滑輪運動裝置324b將次要第一滑輪320b移動至期望 的鋸線捲繞位置。 次要第二滑輪3 3 Ob使鑛線以約1 8 0度轉向，而該次要 第一滑輪使鑛線以約90度轉向。由於該巨大的次要第二 滑輪33 0b轉向角之故’如上文所解釋，其避免了捲繞鋸 線期間劇烈的張力與振動，以致鋸線能夠牢固地捲繞， 且減少了損壞鋸線的風險。因此，次要滑輪3 3 〇b可使鋸 線轉向不低於60度，且次要第一滑輪32〇b使鋸線轉向 不超過120度。 大體而言’設置新鋸線的捲線轴的類型（稱之第一捲 線軸類型）有別於使用過的鋸線所捲繞的捲線轴之類型 (稱之第二捲線軸類型）。舉例而言，設置新鋸線的捲線 軸可為購自鋸線製造商的拋棄式捲線軸。另一方面，此 類捲線軸不適合用於接收使用過的鋸線，因為他們有時 不能耐受使用過的鋸線的高鋸線張力。為了在主要對次 要捲線軸切鋸期間支撐這些不同類型的捲線轴，主要捲 線轴样（即主要鑛線操縱區段的捲線轴桿）可適於搭栽 第類型的捲線#，而二欠要捲線轴桿（即次要鑛線操縱 區段之捲線轴桿）適於搭載第二類型的捲線軸，即第二 類型有別於第—類型。 17 201134628 人f然，在—些實施例中（其可與此述的其他實施例結 鋸線s理區段可支援雙向的切鋸。在此，可將雙向 鋸理解成-種切錯製程，在該毅程期間首先將錯線從 捲線轴傳輸到次要捲線轴，然後從次要捲線軸傳輸 回到主要捲線轴，再度從主要捲線軸傳輸到次要轉線轴 等因此’對於雙向切雜而言，（主要）捲線轴312適於 將鑛線供給至鑛線網，且亦適於從雜線網接收使用過的 鑛線。類似地，+並毯姑h 、 人要捲線軸3 1 2b可適於將鋸線提供至鋸 線網，並且亦適於從鑛線網接收使用過的鑛線。 對於雙向切銘而言，控制器適於發送致動指令給主要 捲線軸梓以及次要捲線軸桿，該致動指令在第一步驟中 引發第一捲線軸桿㈣鑛線給第二捲線肖，並且在第二 步驟中引發第：捲線轴桿展開雜線給第—捲線轴。 上述滑輪的佈置在使用細鋸線或具有塗層（例如鑽石 塗層）的料時特別有用。據此，在可與此述的其他實 施例結合的實施例中，鑛線操縱區段以及此述的線錯裝 置適於直徑在約4 0 〇 μ m以下的細鋸線，該直徑諸如介於 約200 μιη至約400 μπι之間，更詳言之是在約2〇〇 至約300 μηι之間。然*，在其他實例巾，實施例亦可具 有低如ΙΟΟμιη之鋸線直徑，或甚至8〇μ〇ι。進一步而言， 此述的鋸線操縱區段與線鋸裝置適於受塗布的鋸線，例 如具有嵌有鑽石粒子之鎳塗層的鋸線。此類鋸線一般可 具有約300 μηι至約400 μιη的直徑，例如31(^111製34〇 μηι。對於該等錄線而t•’鑛、線的扭射能增加鑛線斷裂 201134628 的風險或者是損壞塗層的風險，因此無扭轉的操作是有 利的。透過使用鑽石鋸線，處理量可增加2倍以上。在 方塊切錯裝置的實例中’以此方式可達成l〇〇Mw (甚至 超過100MW)的處理速率。 當使用鑽石鋸線時，線鋸另外的零件可適於鑽石鋸 線。例如，機械零件 '電子零件及/或軟體可適於鑽石雜 線的使用。 如上文所述’複數個滑輪用於此述的線鑛裝置中。因 此’已考慮在此期望更高的切割速度乃至於更高的鑛線 速度、期望更細的鋸線或不同類型的鋸線（諸如錯石鑛 線）以及在客戶的設施中具有改善的裝置控制。在切鑛 操作期間，滑輪大體上快速地繞其個別軸線旋轉。根據 一些實施例’透過能夠達成2000 rpm以上或甚至3〇〇〇 rpm以上（例如2000 rpm至4〇〇〇 rpm )的速度，滑輪適 於切線鋸裝置。舉例而言，在緊急停止期間，線鋸裝置 需要盡可能快速地停止。因此’無論如何，滑輪的慣性 (即滑輪的轉動慣量）造成滑輪旋轉無法立刻停止。此 進一步的滑輪旋轉可能對鋸線造成傷害性的張力，而導 致可能發生鋸線斷裂。 進一步言之，根據一些實施例（其可與此述的其他實 施例結合），可偵測到此類鋸線斷裂，其如下文所述❶以 具有絕對值約20 乂至丨20 V (諸如30 v至6〇 v)的位 能偏壓鋸線。因此，電壓在鋸線與其於線鋸裝置部件（諸 如外殼、框架、警備區、箱的外殼部份及門等）之間生 201134628 成。例如’該等進一步的部件可在電位上接地。倘若鋸 線斷裂，鋸線的鬆弛端會接觸線鋸裝置的部件之一。介 於鑛線與線鋸裝置之間的電壓會造成電流。據此’倘若 偵測到此類電流’銀線斷裂偵測系統能夠監視此類電流 的存在以及偵測鑛線的斷裂。 尚有一進一步的態樣’切割速度增加以及使用根據此 述之實施例的細鋸線和不同類型的鋸線（諸如鑽石鋸線） 會造成愈加期望避免線鋸裝置中甚小的振動。另一方 面，其可透過鋸線操縱單元完成。鋸線操縱單元的範例 描述於本申請人的同時待決的申請案，其於與本申請案 同曰提出申請’發明名稱為「WIRE HANDLING UNIT， WIRE SAW DEVICE AND METHOD FOR OPERATING SAME」’其全文在此併入作為參考，所引用處與本文無 不一致之處。另一方面，應減少滑輪的偏傾與其他透過 線鋸裝置將鋸線導至彎折或不穩定的方式。 用於透過線鋸裝置導引鋸線的共通滑輪是由例如鋁之 類的金屬製成，如此他們提供導電性以供鋸線斷裂偵測 系統所用。相較於其他金屬滑輪，銘滑輪具有優越的低 質量。針對更快速切割、更細的料、更快速的錄線斷 裂偵測以及新型的鋸線（例如鑽石鋸線）的更加增加的 需求使得這些期望獲得進一步改善。根據此述心施 例，滑輪是由導電性的塑膠材料製成。因此，質量乃2 於轉動慣量能夠進-步減少，而能提供用於鑛線斷^ 測的導電性，且維修及/或操作期間的鑛線變形亦能減 20 201134628 少。據此’能夠提供較低的轉動慣量以及更平滑的旋轉， 同時能夠使鋸線斷裂偵測電流流過滑輪。 第4Λ圖與第4B圖繪示一些根據此述之實施例的滑輪 之實施例。滑輪400具有輪部410以及胎部450，該胎 450设於輪部4 1 0徑向上的外部。因此，輪部或者至 少80%的輪部基本上是由導電性塑膠材料構成的材料製 成。根據尚一實施例（其可與此述的其他實施例結合）， 該外胎可為個別的部件，其與輪部輪部是以可拆卸的方 式連接。 如第4A圖所示，開口 412設於輪部41〇，以致在輪部 中設有例如輪輻結構。該結構能進—步增加重量，因而 曰加⑺輪400的轉動慣量。輪部410可進一步具有軸承 接收。卩伤414。因此’軸承接收部份414適於接收於 P X上（或甚至3000 rPm以上，例如2〇〇〇 rpm至400< ΓΑΡΠ〇使用的轴承。外胎450由絕緣材料製成，其設於輪 410徑向上的外部。一般而言，提供滑輪400的鑛绣 搭載部份的外胎包括一個以上的溝槽以導引鋸線。因為 0電絕緣’故受以—電位偏壓的IS、線1G與輪苟 電絕緣。倘右鑛線是以電源供應胃47〇偏壓（如筹 4A圓所示），且鑛線10在斷裂後其鬆弛端接觸滑輪料 如第从圖中所指電流可由測量裝置4 測到。 ^ 4B圖中顯示滑輪權的進—步實施例之剖面視圖。 B圖中，設置輪部410以繞轴線41〇a旋轉。輪部 21 201134628 具有外胎搭載部份420。外胎45〇安裝於輪部41〇上， 其位於輪部的徑向上的外側。如第4B圖所示，溝槽452 設於鋸線導引部（外胎450)中，使得鋸線在滑輪400 上受到導引。如第4B圖所指，溝槽452界定虛線所指的 平面462。滑輪旋轉期閭，鋸線在平面462中受到導引。 根據一些實施例（其可與此述的其他實施例結合），輪部 具有突出部422或凹部（圖中未示），以致就鎇線受導弓丨 時所處的平面462而言，滑輪41〇完全平衡。例如，突 出部422能夠互補外胎接收部份42〇。質心可位在鑛線 導引平面462中。第4B圖中，質心是以箭號彻所指示， 以重里刻度象徵之。因為質心是位於鋸線導引平面， 故受到樞轉點460 (第4B圖中所示）所支樓的滑輪4〇〇 是平衡的。 根據上文，平滑旋轉能夠進-步獲得改善，且振動的 可能性亦能夠減少。由塑膠材料（諸如形成於鑄模中的 塑膠材料）製造滑輪得以最佳化設計以及平衡滑輪，而 不至於嚴重增加製造成本。 根據可與此述的其他實施例結合的實施例，滑輪包括 導電性塑膠材料。例如，滑輪包括具有導電塑膠材料的 輪部’或者由導電塑膠材料製成的輪部。因此’根據一 些視情況任選的實施例，導電塑膠材❹冑2. 以下的密度，例如2.00 g/cm3以下。根據進一步之視产 :兄任選的:改型式，該密度可為““以下，例二 一至Μ一根據尚—視情況任選的修改型式 22 201134628 ( 声-~j~和 人、；與此述的其他實施例結合），塑膠材料是合成的聚 料其包括導電纖維。例如，聚合材料可為聚醯胺 /或導電纖維可為碳纖維。 如因此，碳纖維亦個別增加了滑輪或者輪部的硬度。例 相較於相對應的鋁滑輪之彎折力矩，在輪部周邊的 ，折力矩訑減少。就鋸線導弓丨平面而言，對輪部的進一 ,。以及所造成的輪部失衡能夠透過200至600 MPa (幻如300至500 MPa)的降伏強度而減少。 透過使輪部設有輪轄或輪部開口，導電塑膠材料的材 料性質得以進一步減少重量，以減少滑輪的整體重量。 根據不同的實施例’可在輪部中設置例如3至個開 口： -般是6至8個開口。因此，根據尚—進一步的視 情況任選的實施例’轉動慣量可為5.GxlG.4kg*m2以下， 例如3.5xl〇_4 kg*m2以下，铋 4 「堵如從 1X10 4 kg*m2 至 3·5χ 10·4 kg*m2。根據尚一進—击 步的實施例以及在經設置用於 線鋸裝置的滑輪直徑範圍内， θ η 此亦可描迷成每直徑的重 量’其為730 g/m以下，一舢 心為500 g/m以下，更一般 為 300 至 500 g/m。 根據上文’相較於鋁滑輪 沉輪’該等滑輪重量能例如減少 5%至20%。因此，導電性县太从 私任疋由諸如嵌於塑膠材料中的碳 纖維的導電纖維所給予。你 J如’能使用充以碳纖維的聚 醯胺。製造基本上完美平栴认π 十衡的滑輪（即該滑輪的質心在 鑛線導引平面上）的可能性 J汉善可進一步用於更平滑 的旋轉以及減少振動。例如奋 J斯田使外胎壓抵於輪部上或由 23 201134628 滑輪等墜落所造成的傷害時，此性質可進一步透過在維 修期間減少彎折與變形而改善。 如上文所述，根據此述之實施例的滑輪適於線鑛裝 置’或其經裝設以用於線鋸裝置。因此，可提供下文中 個以上的性質.滑輪適於以至少2000 rpm或甚至至少 3 000 rpm旋轉，滑輪包括軸承接收部份以接收軸承該 軸承適於以至少2〇〇〇 rpm或甚至至少3000 rpm旋轉； 滑輪的輪部具有外胎接收部份以接收具有導引鋸線之溝 槽結構的外胎；滑輪包括溝槽結構，該溝槽結構具有溝 槽，適於具有直徑在4〇〇 μπι以下的鋸線；設置具有一個 以上溝槽的外胎，其中一個溝槽（一般是中心溝槽）界 疋銀線導引平面；鋸線是平衡的，即質心位於錯線導引 平面上，滑輪的輪部之直徑在7〇至3〇〇 mm的 例如1。。至2〇〇_等。 第5 A圖與第5B圖繪示根據此述之實施例的滑輪之進 步貫施例。滑輪5 〇〇具有輪部4〗〇以及胎部4Μ，該 月。。部设於輪部410的徑向上的外部。因此，輪部或至少 80%的輪冑^基本上導電塑膠材料所構成的材料製 成。 如第5Α圖所示以及如已就第4圖所描述，開口 412(一 jin, w - 疋6到8個開口）可設於輪部41〇中，以致例如能設 置輪韓結構。此舉能進一步增加重量且因而增加滑輪5〇〇 :轉動慣量，部410可進一步具有軸承接收部份414。 而軸承接收部份414㉟於接收轴承，該軸承能用於 24 201134628 2000 rpm以上或甚至3000 rpm以上（例如2剛rpm至 4000 ΓΡη〇的旋轉速度。由絕緣材料製成的外胎450設 在輪4 410控向上的外部，位於外胎接收部份樣上。 一般而言’外胎能提供滑輪彻的鑛線導引部，且該外 月。。括㈤以上的溝槽（—般是一個溝槽）以導引鋸線。 第5Β圖中顯示滑輪5⑽的進—步之實施例的剖面側視 圖輪410具有外胎搭載部份420。外胎450安裝在 輪部4Η)上，即，鄰接於輪部。如第5β圖所示，溝槽 452設於滑輪的錯線導引部中。溝槽452界定平面462, 其如第5Β圖中所指示。滑輪旋轉期間’雜線在平面462 中受到導引。根據-些實施例（其可與此述的其他實施 ^结合）’輪部具有突出部似或㈣（圖中未示），使 得就錯線受導引的平面462而言滑輪4ig全然平衡。例 如’突出部422能夠與外胎接收部份420互補，以致質 心位於鑛線導引平面462中。 致質 Μ 2 I之貫施例（其可與此述的其他實施例結 ^月輪能夠具有固定開口’以將鑛線固定至轴承。因 4，可設置進—步的視情況任選的對準開口，諸如開口 川或416，。如第 諸如開口 絡固畀弟圖所不，開口 412的邊 ，' 、胎接收部份的邊緣與其他結構的邊缘^ & ，的突出物與凹部）能成圓…二邊緣（例如滑輪 數毫米的曲率半徑，例如至 此可進…，；如至^ lmm或2_至5_。 現。據此，；Γ重量且可能改善快速旋轉期間滑輪的表 目較於具有尖銳邊緣的相應形狀’漿料、冷 25 201134628 "p流體或其他來自製私的固體粒子無法沈降於此類滑輪 上。 根據進—步的實施例（其可與此述的其他實施例結 合）’滑輪所包括的塑膠材料能夠抗聚乙二醇、適於例如 以鑽石鋸線在線鋸裝置中切鋸的水類冷卻劑及/或其組 合0 在下文中，將總結本發明實施例之一些普遍態樣。每 一該等普遍態樣能夠與任何其他普遍態樣（在此述的任 何實施例之内）結合’以產生另一實施例。 根據一個實施例，提供經裝設用於具有形成鋸線網之 鋸線的線鋸裝置之滑輪《該滑輪包括：在該滑輪轴周圍 的一輪部，其中該輪部包含導電塑膠材料；以及一鋸線 導引部，其在該輪部的徑向外側，具有用於導引該鋸線 的一溝槽結構。 根據一個視情況任選的態樣（其能提供給用於線鋸裝 置的滑輪）以及此述的線鋸裝置，導電塑膠材料的密度 可在2.00g/cm3以下，一般是ug/cv以下更一般是 l.Og/cm3至1.5 g/cm3。據此，如進一步的替代性或視情 況任選的態樣’轉動慣量可為5·Οχ1〇-4 kg*m2以下，一 般是3.5X10-4 kg*m2以下及/或每直徑的重量可為73〇 g/m以下，一般為500 g/m以下，更—般為3〇〇至5〇〇 g/m。如上文所述，此舉能造成鋸線斷裂的可能性減少， 特別是在線鑛裝置停止或緊急停止期間，在該期間，滑 輪的慣性可能生成額外的張力於鋸線上。該等與其他，熊 26 201134628 樣可特別實用於此述的鑽石鋸線或細鋸線，在該等鋸線 中’需要有效減少鑛線斷裂。 因此’對於-些可與此述的其他實施例結合的實施例 而言，線鋸裝置及/或用於線鋸裝置的滑輪能適於鑽石鋸 線’而操作方法能以鑽石鑛線執行。例如，能夠透過使 溝槽結構配以適當的溝槽㈣、不同的溝槽深度及/戍不 同的溝槽形狀而完成之。透過使用鑽石料，—般而言 能夠增加切割速度例如2倍’而能夠減少線鑛裝置的能 量消耗’並且進-步（如另—範例），將料塊或晶圓石夕 切方的成本能夠大幅減少。 根據進-步視情況任選的態樣（其可與此述的其他實 施例結合），滑輪的降伏強度可為4〇〇 Mpa以上；及/或 相較於相對應的鋁滑輪’能夠減少彎折力矩。根據更進 -步的替代性或額外的實施方式，塑膝材料可為包括導 電纖維的合成的聚合材料，例如聚合材料可為聚酿胺， 而該滑輪能夠包括碳纖維；及/或塑膠材料可對聚乙二 醇、適於祕裝置的水類冷卻㈣體及其混合物且化學 穩定性。 根據尚-視情況任選的態樣（其可與此述的其他實施 例結合），料㈣料包括㈣，能夠個料成為一外 胎或具有㈣。-般而言，鋸線導引部可與輪部分離。 例如，外胎可設於輪部上。根據尚一進一步的實施例（盆 可與此述的其他實施例結合)，溝槽結構可為—個以上的 周圍溝槽，其中-個溝槽或該等溝槽之—界定㈣導引 27 201134628 平面。因此，舉例而言，滑輪的質心可位於鋸線導引平 面内。 根據尚一進一步的實施例’提供一種具有此述之任何 實施例的滑輪的線鋸裝置。因此’如一個視情況任選的 態樣，基本上所有滑輪都具有基本上相同的轉動慣量。 舉例而言，滑輪的轉動慣量彼此不會偏差超過1 〇 %或超 過5%。一般而言，根據不同的實施方式，線鑛裝置可為 選自由線鋸、多重線鋸、方塊切鋸裝置及截切器所構成 之群組的元件。根據尚一進一步的實施例（其可與此述 的其他實施例結合），線鋸裝置可進一步包括線鋸裝置的 主體、適於將鋸線偏壓一電位的電壓供應器以及從滑輪 輪部到主體的導電路徑。 根據尚一進一步的實施例，提供操作具有形成鋸線網 之錯線的線鋸裝置之方法。該方法包括提供複數個滑 輪’該等滑輪具有位於該滑輪軸周圍的一輪部，其中該 輪部包含導電塑膠材料；使該鋸線偏壓於一電位；以及 在該錄線接觸該輪部的期間，監視該線鋸裝置中的電流 之存在。因此，能夠根據此述此述的任何實施例提供根 门實施方式的滑輪。根據進一步的態樣（其可與此 述的龙7 、他實施例結合），該方法可進一步包括將雜線朝鑛 線網栽& 動以及從鑛線網移出，其中該鑛線是由複數個滑 輪導引. ’一旦電流存在的訊號被偵測到’即停止線鋸裝 置中鋸線的移動。 根據進—步之態樣，鋸線管理單元能包括第一滑輪鋸 28 201134628 線追蹤系統，該系統回應偵測到的鋸線位置而致動第_ 滑輪運動裝^根據進m ’第—滑油線追蹤 系統包括：第一滑輪運動裝置，其為選自由線性致動器、 線性馬達、氣動筒以及具有蝸桿驅動的馬達所構成之群 組中的至少―元件；鑛線位置偵測裝置，其適於偵測沿 移動路徑的方向上的鋸線位置；第一滑輪位置控制器， 其以可操作式連接鋸線位置偵測裝置，以接收所偵測到 的鋸線位置，及適於決定目標位置，並且以可操作式連 接第一滑輪運動裝置以傳送移動指令引發第一滑輪運動 裝置將第一滑輪移動至目標位置。 根據進一步之態樣，鋸線管理單元適於為鑽石鋸線的 鋸線即，包括鑽石。根據進一步之態樣，主要框架部 伤疋剛性的，並且可剛硬地連接或連接線鋸裝置的底 盤’或者與線鋸裝置的底盤一體成形。 根據進一步之態樣，捲線軸適於提供鋸線至鋸線網， 並且亦適於接收來自鋸線網的使用過的鋸線。根據進一 步之態樣，捲線軸具有鋸線搭載區域，而第一滑輪位置 控制器包括鋸線捲繞圖案，並且經程式化以決定目標位 置，且可操作式地連接第一滑輪運動裝置，以傳送移動 指令給第—滑輪運動裝置，而引發第一滑輪運動裝置將 第/輪移動到目標位置。根據進—步之態樣，鑛線操 縱區奴疋主要鋸線操縱區段，鋸線管理單元進一步包括 ^要鑛線操縱區段。根據進—步之態樣，主要鑛線操縱 區段具有捲線軸桿，其適於搭載第—類型的捲線轴，而 29 201134628 —類型的捲線軸的捲 次要鋸線操縱區段具有適於搭裁第 線轴桿。 根據進一步之態樣’提供-種線鑛裳置，該線鑛裝置 根據包括此述之任一實施例的鋸線管理單元，其中該主 要框架部份剛硬地連接線鑛裝置的底盤。根據進一步之 態樣’線鋸裝置是選自由選自由線鋸、多重線鋸、方塊 切鋸裝置及截切器所構成之群組的元件。本發明之滑 輪、鋸線管理單元以及鋸線操縱單元可特別實用於方塊 切鋸裝置。 前述者是導向本發明之實施例，其他及進一步之本發 明之貫施例可在不背離本發明之基本範嘴的情況下設 計’該範疇由下文的申請專利範圍所界定。 【圖式簡單說明】 藉由參照一些繪示於附加圖式中實施例，可獲得如上 文所簡短總結的本發明之更特定的描述，如此可得到詳 細瞭解本發明之前述特徵的方法。伴隨的圖式是關於本 發明的實施例，並且於下文中加以描述： 第1圖顯示根據此述之實施例的線鑛裝置之概略視 圖。 第2圖顯示根據此述之實施例的進一步之線鋸裝置的 概略視圖。 第3圖顯示据線管理單元的透視圖。 201134628 第4A圖與第4B圖顯示滑輪的概略視圖，其繪示根據 本發明之實施例的滑輪之實施例。 第5 A圖與第5 B圖顯示根據此述實施例之進一步的滑 輪概略視圖。 【主要元件符號說明】 10鋸線 200 線鋸裝置 100線鋸裝置 212a 、212b鋸線操縱 110鋸線網隔室 隔室 111外殼部份 213a 鋸線搭載區域 112鋸線操縱裝置隔 310 捲線軸桿 室 3 10b 次要捲線軸桿 114電箱 3 12 捲線轴 114a、114b 腿部 312b 次要捲線轴 115 凹部 3 14 支撐件 120 、 124 槽 320 ' 330 、 340 、 350 、 121 、 125 系 360、370 滑輪 122 ' 126 導管 320b 、330b 、 340b 、 130、132捲線軸 350b ' 360b、370b 次要 130a、132a捲線軸之 滑輪 軸線 324 滑輪搭載單元 134、136 滑輪 324b 次要滑輪搭載單 140支撐件 元 31 201134628 362、 374 400 410 410a 412 414 416、 372滑輪軸 422 突出部 可動構件 450 胎部 滑輪 452 溝槽 輪部 460 箭號 軸線 462 平面 開口 470 電源供應器 軸承接收部份 472 測量裝置 416，開口 500 滑輪 32201134628 VI. Description of the Invention: [Technical Field] The present invention relates to a pulley for use in a wire silver device, a wire saw device, a wire saw device, and a wire saw device for operating Methods. More specifically, these embodiments relate to pulleys that are installed for use in wire saw devices, as well as for cutting or sawing hard materials (such as lumps or quartz blocks), for cutting enamel wafers, for squares. A square saw, a wire saw device for a cutter, and the like. [Prior Art] An existing wire ore device is used for cutting a block or a material brick, a sheet (e.g., a semiconductor wafer) from a sheet of hard material such as Shi Xi. In such a device, the extended ore line is fed from the bobbin and guided and pulled by the pulley to guide the line in the cutting zone. The ore used for cutting is generally provided with an abrasive material. - One option is to use m material as the abrasive material. It can be done quickly before the mine contacts the material to be cut. Therefore, the abrasive is used to cut the material from the sawing belt to the cut-out mouth. Another option is that the abrasive can be placed on a coated wire. For example ^ ^^ Cattle and §, diamond particles can be placed on, for example, a coated metal wire, and the diamond particles are embedded in the coating of the saw wire. Because of &, the abrasive is tightly attached to the wire. In general, the current trending county is using a thinner wire to reduce the thickness of the cut, thus reducing the ruin of the deceased. It is also desirable to use diamond saw wires. These thinner sawing wires and diamond sawing wires are more susceptible to damage and are more susceptible to breakage under high strain 201134628. Into a „, step s, it is expected to increase the cutting speed to improve the processing capacity of the wire saw device. ^ Move the moon material through the maximum speed of the wire mesh and a given amount of time in the county. The effective cutting area is limited by the following factors: when the saw wire is increased in speed, the hardness of the material to be sawed, the disturbance effect, and the desired accuracy, the more difficult it is to stop the machine. Therefore, the above-mentioned avoidance of the Baoguang The problem of hurting the sawing wire and avoiding the breakage of the sawing wire is more critical at higher cutting speeds. [Invention] According to the above, there is provided a pulley according to the independent claim item, a wire saw device installed for use with a mine line forming a mine net; a wire ore device according to item 14 of the claim item; and an item 18 according to the independent request item The method of operating a wire saw device is described. Further advantages, specific features, details and details can be understood from the dependent claims, the description and the drawings. According to one embodiment, a method is provided. The wheel 'is installed for a wire ore device having a staggered line forming a wire mesh. The pulley includes: a wheel portion located around the pulley shaft 'where the wheel portion comprises a conductive plastic knee material; and a saw wire The guiding portion' is located radially outward of the wheel, having a groove structure for guiding the wire. There is a saw pulley forming a wire mesh, and the pulley is provided with a wheel portion located at the Sliding According to a further embodiment, a wire sawing device is provided. The wire saw device includes - for the wire saw device. The pulley comprises: 201134628 around the axle, wherein the wheel portion comprises a conductive plastic material; and a saw a wire guide Deng, located radially outward of the wheel, having a groove structure for guiding the silver wire. According to a further embodiment, a method of operating a wire saw device is provided, the wire saw device Having a saw wire forming a wire mesh. The method comprises the steps of: providing a plurality of pulleys having a wheel portion around the pulley, wherein the wheel portion comprises a conductive plastic material; the wire is biased to an electric And monitoring the presence of current in the wire saw device during the contact of the wire with the wheel. Embodiments also directed to an apparatus for performing the disclosed method and including for performing each of the method steps Device elements. The method steps can be performed by means of hardware components, by a computer programmed by a suitable software, by any combination of the ones, or by any other means. Further, according to the invention The embodiments are also directed to the method of operation of the apparatus described above, which includes method steps for performing each function of the apparatus. [Embodiment] Reference is now made in detail to the embodiments of the present invention, one or more In the following description of the drawings, the same reference numerals refer to the same parts. In general, the differences are only described for individual embodiments. Each example is provided in a manner to explain the present invention, instead It is intended to limit the invention. Further, features illustrated or described as part of one embodiment can be used in other embodiments or in conjunction with other 201134628 embodiments of the present specification to produce a more embossed embodiment. Modify the style and variation. Furthermore, in the following description, the wire management unit can be understood as a device for manipulating the feed or the working area of the wire feeding device (for example, a cutter, a square cutting device or a wafer cutting wire saw). . In general, the 'line mine includes a line guide to transport and guide the line in the direction of material movement, and the Shaw (four) line management unit provides control of the material tension. Further, the mine line provided by the wrong line management unit forms a wire mesh in the cutting area. The wire mesh is often viewed as a network formed by a single wire management unit. It should be appreciated that the wire mesh may contain more than one work area that is defined as the area in which the sawing process is performed. Thus, in accordance with some embodiments described herein, the wire mesh can have multiple zones formed by saw wires from different wire management units. For current wire saw devices, such as, for example, cutters, square saws, or wire mines, it is desirable to be able to cut hard materials such as semiconductor materials (such as tantalum or quartz) at high speeds. The speed of moving through the wire saw device, the wire management unit and the material to be sawed may be, for example, 10 m/s (meters per second) or higher. In general, the wire speed can range from 15 to 20 m/s. However, higher wire speeds from 25 m/s to 3 〇 m/s are also desirable and can be achieved under certain conditions. For unwinding the wire at the desired wire speed, the spool rotates at speeds of up to thousands of revolutions per minute. For example, it is possible to provide a 1 to 2 rpm unwrapping line. Figure 1 shows a wire saw device 100. As seen by the pattern of the saw wire 10 forming the saw wire in the saw wire mesh compartment 11 2011 201134628, the example shown in the figure j is a square sawing device (the outer casing of the SqUarerp wire saw device is divided into different regions, As indicated by the dotted line, the wire mesh is formed in the wire mesh compartment 丨 1 (). Further, a housing part is provided! 1 to accommodate the wire saw device] i 〇 more components and equipment. In this case, the wire handling device compartment 112 and the electrical box 114 can be disposed within the further housing portion lu, and the slots 120 and 124 and the individual pumps 121 and i 25 can also be provided. According to some embodiments (which may In combination with other embodiments described herein, the first tank 120 is used for unused cooling fluid (for example in the case of operating a wire saw device with a diamond miscellaneous wire), or for example for unused (fresh) Slurry (in an embodiment in which the wire saw device 1 is operated with a saw wire requiring additional abrasive). The pump 121 draws a cooling fluid (or polymer) toward a desired position in the cutting zone. Indicated by conduit 122. Used cooling fluid (or slurry) The material can be recirculated through the conduit 126 and pumped into the second tank 124 by the pump 125, and in the case of the used cooling fluid or slurry, the partially used and consumed fluid can be reused when refilled into the tank 120. Thus, according to various embodiments, only a portion of the consumable fluid can be reused, or all of the consumable fluid can be reused, or no consumable fluid can be reused, and thus the fluids are reinjected into the tank 12〇 In an example, an additional valve may be provided in the conduit 126 for selectively selecting a slot into which the used fluid is drawn. According to another example, it may be disposed between the slot 1 24 and the slot 120. The fluid connections are such that a portion of the used fluid is reinjected into the tank 120. According to various embodiments, as already described above, the 201134628 consumable fluid can be a cooling fluid or slurry. In general, if pulp is used The slurry also takes over the function of cooling the position of the material cut by the saw wire. In the mine control compartment 11 2, two treatment sections are provided, individually to transfer the saw wire 10 to Cutting the region and receiving the saw wire from the cutting region. According to some embodiments (which may be combined with other embodiments described herein), the saw wire is disposed on the bobbin 132 that rotates about the axis 132a of the bobbin. The wire is guided over a plurality of rollers 134 into the wire mesh compartment 110. Further pulleys 134, 136 guide the wire 10 into the cutting zone to form a wire mesh. Therefore, further pulleys are needed. (not shown) the saw wire 10 is guided from one pulley 136 to the other pulley 136. To avoid unnecessary complexity, these further pulleys are not shown in Figure 1. After cutting, the saw wire is further The pulley raft 34 guides toward the wire manipulation compartment 112 and is mounted over the pulley 134 on the bobbin 130 that rotates about the axis 130a of the spool. According to further embodiments (which may be combined with other embodiments described herein). The wire handling system can be adapted for bi-directional use such that in one direction the wire is fed from the bobbin 132 to the bobbin 130 and in the other direction the wire is fed from the bobbin 130 to the bobbin 132. Thus, according to a typical implementation, the two units corresponding to the spools 130 and 132 include similar components (such as pulleys, etc.) to achieve a corresponding wire manipulation in the two sawing directions. The use of a wire saw device in both directions is particularly noticeable when using diamond saw wires. In general, the line is guided from the wrong line 201134628 as a compartment to the sawing area and returned at a sawing speed of 1 〇m/s or more, which is generally in the range of ^2 〇m/s. , or even up to 2〇m/s or 3〇m/s. The material to be cut is positioned on the support member 14''. The support member 140 and the line network bounded by the pulleys 16 6 are movable relative to each other so that the cutting material can be carried out. According to one embodiment, the pulley 136 is maintained in a fixed position and the support member 314 moves the material to be cut through the wire mesh while the wire is at a speed above about 10 m/s. For ease of understanding, the movement of the support member 140 in the second diagram is perpendicular to the plane of the drawing. According to another embodiment, the pulley 136 is such that the wire mesh generated by the wire 10 moves relative to the support member 140 to cut the wire through the material. According to a further embodiment, both the support member 140 and the wire mesh are movable relative to one another. As indicated by the dotted line in Figure 1, the electric box! 14 can be used to control the operation of different components. For example, it is possible to control the movement of the branch member i 4 , the operation of the pumps 2 i and 125, and the rotation of the bobbins 13 〇 and 132. Further, the filling height of the #12〇肖124 is measured in an additional manner or in an optional manner, and the individual signals are fed to the control unit. According to another advanced embodiment, other control signals and monitoring signals can be fed into and out of the electrical box 114. For example, the signal from the motor that drives the spool, the signal from the mine tensioner, the signal sent to the mine tensioner, the pressure signal used to feed the fluid (such as cooling fluid or I) or The mine break (four) signal can be fed into the electrical box or sent out from the electrical box. Even though the electrical phase 114 is integrated into the wire saw device 10 (as shown in Figure 1), it will be apparent to those skilled in the art that the electrical box or control unit (e.g., the exterior of the wire saw device) can be generally disposed at different locations in the wire saw device. And thus can provide the control signals sent to the control unit and the delivery control unit corresponding to 201134628. A further example of a wire saw device 2〇〇 is shown in FIG. As seen by the mine network formed by the mine line 1 () in the mine network compartment U0, the system shown in Figure 2 can be used to slice wafers, i.e., the system is a line mine. According to the embodiment shown in relation to Fig. 2, two mine lines are provided to be manipulated to 212a and 212b. Each of the wire handling units feeds the wire 1 to the wire mesh and the wire is guided over the pulley 134 to form a wire mesh. As shown in Fig. 2, the wire mesh is formed by two adjacent regions, wherein the ore from each of the mine manipulating units is used to form an area of the web. As described above with respect to Figure 1, pulley 134 is provided to guide the wire. Accordingly, in the embodiments described with respect to the figures, the embodiments can be correspondingly formed for use with the wire saw device of Figure 2. According to various embodiments, the wire saw device can be a cutter, a square saw device, a wire saw or a multiple wire saw. Thus, it is understood that the cutter is a device that can be used to cut the end sheet from a brick or block that is divided into bricks in the square sawing device. The square sawing device is a wire saw that generally cuts the crucible frit into cubes of a desired size such that the wire saw or multi-wire saw can cut the wafer from the brick during the wafer process. The wire management unit described herein is particularly useful as a wire saw device for a square cutting device, but is not limited to a square cutting device. The above system is particularly useful when using fine saw wires or mines with a coating such as a diamond coating. Accordingly, in embodiments that may be combined with other embodiments described herein, the wire handling section and the wireline apparatus described herein are adapted to have a thin saw wire having a diameter of less than about 400 μπι, such as between about 10 201134628. The diameter between 200 μm and about 4 〇〇 μηη, more specifically between about 2 〇〇 μηη and about 3 〇〇 μιη. However, in other examples, embodiments may have a wire diameter as low as 1 〇〇 μη! or even 8 〇 μιη. Further, the wire handling section and the wire saw device described herein are suitable for coated saw wires, such as saw wires having a nickel coating with diamond particles embedded therein. Such saw wires can generally have a diameter of from about 300 μηη to about 400 μηη, such as 310 μηη to 340 μηι. For their saw wires, twisting the wire may increase the risk of breakage of the mine or the risk of damage to the coating, so that a twist-free operation is advantageous. Through the use of diamond clutter, the throughput can be increased by more than 2 times. In the example of a square cutting device, the processing rate above the MW can be reached in this way. When using diamond mis-wiring, further parts of the wire mine can be applied to the stone. For example, mechanical parts, electronic parts and/or software can be applied to the iron ore mine. In general, the embodiments of the pulleys described above are suitable for use in a line ore device, or are provided for use in a line, they can be used in a manufacturing device, and/or can be used as part of a wire saw device. In addition to being applied to other aspects that make the pulley suitable for a wire saw device or that is configured for use with a wire sawing device, the pulley can have a grooved structure that is re-supplied. The structure is used to guide a material having a thickness of 4 〇〇 (4) or less, or any other size mentioned above. (4) The structure of the __ structure is in accordance with the diameter U and the cutting process, and the precision is cut by ^ ι ικη 仃 A degree, for example, the accuracy of 250 μηι or less, Fogo 4 & to 50 μηι or less. In the following, the description of the steps of ^ ^ ^ ^ ^ . & + 仵, ·° β. In the following description, only elements of 201134628 that differ from previous or other implemented components are described. It should be understood that the components, aspects, and details described with respect to other embodiments can be applied to embodiments that do not describe all of the components, aspects, or details. Figure 3 shows a perspective view of a material management unit in accordance with some embodiments (which may be combined with other embodiments described herein). The embodiment of Fig. 3 includes a bobbin 312 mounted on the bobbin shaft 31, and the pulleys 32〇, 33〇 and 340 are arranged to guide the miscellaneous wires, particularly the mine tracking system to guide the miscellaneous wires. . Is line tracking system of the 纟 于 于 欧洲 欧洲 欧洲 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 The entire disclosure of this application is hereby incorporated by reference in its entirety herein in its entirety herein in its entirety herein. Furthermore, a recess 116 can be seen. The recess μ is provided in the main frame portion. The recess size is adjusted and the recess is arranged such that the first pulley 320 is accommodated. This recess allows the first slider to be placed closer to the main frame portion while allowing the pure track of the first pulley 320 to cover the entire range or almost the entire range of the material carrying region 2Ua. Further, the pulley-mounted unit is similarly arranged as a retractable or telescopic stick. The retractable or telescopic club can be moved longitudinally along the axis of the club axis, which is parallel to the axis of the spool. The club is mounted to the wall portion of the main frame portion, such as the wall portion of the recess 116, in such a manner as to be movable longitudinally. Further, in the embodiment of Fig. 3, the main frame portion package = women's wear member 314, on which the second and third pulleys 33, 34 are mounted. The women's component 3 is part of the main frame part, which is rigidly connected to the chassis of the 12,346,428 wire saw device. Other designs of mounting members are also possible in the particular embodiment of Fig. 3, which is a stick, more particularly an L-shaped stick having a first leg ma extending to the main frame portion The side surfaces (i.e., extending parallel to the X-axis) and having the second leg portion 114b form a substantially right angle with the first leg and extend to the top surface of the main frame portion (i.e., extend parallel to the 2 axes). Independent of the illustrated embodiment, the general aspect is that the first pulley 320 and the second sliding 633 〇 (and optionally other pulleys, such as the third pulley and/or the fourth pulley) are mounted on the common womenswear component. Especially on the integrally formed mounting member. Further, the figure shows a fourth pulley 35〇, the fourth pulley “Ο receives the saw wire from the third pulley 340, and turns the saw wire at a fourth steering angle. The fourth pulley 350 is rotatably mounted to a frame for rotation about the fourth pulley shaft. Here, the fourth steering angle is approximately 9 degrees. In other embodiments, the fourth steering angle may be between 6 degrees and 12 degrees. Substantially parallel to the axis of the spool. Further, the fourth pulley shaft is substantially perpendicular to the first pulley shaft, the second pulley shaft and the second pulley shaft. In other embodiments, the fourth pulley shaft can be substantially parallel At least one of the axes. The embodiment of Figure 3 further includes a wire tensioner to control the tension of the wire. The wire tensioner includes a fifth pulley 36〇 and a sixth pulley 370'the fifth pulley 360 to Rotary mounting to the frame to rotate about the fifth pulley shaft 362, and the sixth pulley 370 is rotatably mounted to the movable member 374 to rotate about the sixth pulley shaft 372. The movable member 374 is movably mounted to the main frame portion Movable component The movement of 374 can be controlled by the motor 201134628 or the movable member 374 can be pre-biased (e.g., by a magazine) to control the tension of the wire. In Figure 3, the movable member 2 is shown as a pre-biased rotating lever. The saw tensioner receives the wire 10 from the fourth pulley 350 and provides the wire 1 to the wire mesh (to the right of the wire management unit shown in Figure 3). More precisely, the fifth pulley 360 Receiving the saw wire 1〇 from the fourth pulley 35〇 and deflecting the saw wire at a fifth deflection angle, then the sixth pulley 36〇 receives the saw wire 1〇 from the fourth pulley 350 and makes the wire saw at the sixth deflection angle Deflection. According to the x_y_z reference frame defined above, the general aspect of the embodiment illustrated in Figure 3 satisfies at least one of the conditions listed below (and in some embodiments, even all conditions); Is located on one side of the spool 3 12 substantially opposite the first pulley 320; between the fourth pulley and the wire tensioner (in detail between the fourth pulley and the fifth pulley) Saw wire, extending mainly along the z-axis; The saw wire between the fifth pulley and the sixth pulley extends mainly along the y-axis; the silver wire leaves the sixth pulley in a substantially parallel y-axis; the fifth and sixth pulleys have respective axes extending substantially in the X direction The fifth steering angle is in the range of 60 degrees to 90 degrees, substantially in the range of 80 degrees to 90 degrees; and/or the sixth steering angle is about 180 degrees. In general, as can be described herein In a further embodiment, in combination with the embodiment 14 201134628, the pulleys have at least one of the following radii, and in some embodiments have all of the following radii: the bobbin shaft 310 has a diameter of about 150 mm. The first pulley 320 and the second pulley 33〇 has a diameter of between 1 mm and 150 mm, in particular 112 mm (here, the diameter means the diameter observed by the mine line, ie the diameter in the wire guiding groove). The third pulley 340 has a diameter of between 14 〇 mm and 170 mm, in particular 158 mm. The fourth pulley 35 has a diameter similar to that of the first pulley 32A. The fifth pulley 360 and the sixth pulley 370 have a diameter similar to that of the third pulley 340. Continuing to describe FIG. 3, except for the wire manipulation section 3 (hereinafter also referred to as the main wire manipulation section 300) The saw wire management unit in Fig. 3 also has a secondary wire operating section 3 〇〇b. Here, the terms "primary" and "secondary" are used for convenience only, and do not imply a class order or functional order of the sawing segment and the spool. The secondary wire sawing section 300b is constructed in a manner similar to the primary wire handling section 3〇〇 and its elements correspond to the main wire handling section 300. The elements of the secondary tin wire steering section 300 are labeled as "minor" components, and component symbols 310b, 312b, etc. are assigned to correspond to the "primary" components 310, 320 of the primary wire handling zone 300. Therefore, the secondary mine steering unit 300b has, for example, a secondary winding shaft 310b for the bobbin 312b, a secondary first pulley 320b, a secondary second pulley 330b, and the like. The secondary first pulley 320b is rotatably mounted to the secondary pulley mounting unit 324b' to rotate about the secondary first pulley shaft 322b, and the secondary pulley mounting unit is movable along the secondary pulley moving track in the longitudinal direction. Mainly with 15 201134628 secondary sawing manipulating sections 300, 30 安置 are placed adjacent to each other in the y direction. As described in a generalized form (but independent of the illustrated embodiment), the primary and secondary wire operating sections 300, 300b can be disposed on the common wall portion of the main frame portion. Further, primary and secondary wire handling sections 300, 300b can be placed in a common compartment of the wire saw device. Further, as seen from Fig. 3, the main bobbin 312 is of a different type than the secondary bobbin 312b (observation is missing in the front flange of the secondary bobbin 3m). In general, according to any of the embodiments described herein, the secondary wire handling section 300b is formed in the same manner as the wire handling section 300. The description of the elements of the main line manipulating section 300 can thus also be applied to the elements of the corresponding secondary line manipulating section 300b. In the exemplary mode of operation (hereinafter referred to as primary to secondary spool cutting) the main line maneuvering section provides a saw wire from the primary first spool 312 to the wire mesh 10 so that the wire can be used in the saw Cut the saw in the wire net. The secondary wire operating section 300b then receives the saw wire from the wire mesh. Therefore, the 'recording line 10 is transferred from the sawing wire mesh to the secondary wire tensioner, more precisely, to the secondary sixth pulley 37〇b, and then to the secondary fifth pulley 360b, and then to the secondary fourth. The pulley 35〇b, the secondary third pulley 340b, the secondary second pulley 33〇b, the secondary first pulley 320b, and finally the winding shaft 312b. Further, the controller controls the movement of the secondary first pulley 32〇b along the secondary pulley motion track so that the saw wire is wound in a controlled manner on the wire carrying area of the secondary winding shaft 3 12b. 16 201134628 With respect to receiving a saw wire, the secondary first pulley controller includes a wire winding pattern and is programmed to determine a desired wire winding position for winding the wire on the wire loading area of the secondary winding spool The line, and the controller transmits a move command to the secondary first pulley motion device 324b to cause the secondary first pulley motion device 324b to move the secondary first pulley 320b to the desired wire winding position. The secondary second pulley 3 3 Ob turns the mine at about 180 degrees, while the secondary first pulley turns the mine at about 90 degrees. Due to the large secondary second pulley 33 0b steering angle, as explained above, it avoids severe tension and vibration during winding of the saw wire, so that the saw wire can be wound securely and the saw wire is damaged risks of. Therefore, the secondary pulley 3 3 〇b can cause the saw wire to turn no less than 60 degrees, and the secondary first pulley 32 〇 b turns the saw wire to no more than 120 degrees. In general, the type of spool that sets the new wire (called the first spool type) is different from the type of spool that is wound by the used wire (called the second spool type). For example, the reel spool that sets the new saw wire can be a disposable reel spool purchased from the saw wire manufacturer. On the other hand, such spools are not suitable for receiving used saw wires because they sometimes cannot withstand the high wire tension of used saw wires. In order to support these different types of spools during the main sawing of the secondary spool, the main spool (ie, the spool of the main mine operating section) can be adapted to mate the first type of coil #, and the second The winding spool (i.e., the winding shaft of the secondary mine operating section) is adapted to carry a second type of spool, i.e., the second type is different from the first type. 17 201134628 A person, in some embodiments (which can be combined with other embodiments described herein, can support a two-way sawing. Here, the two-way saw can be understood as a type of cutting process During the period, the wrong line is first transferred from the spool to the secondary spool, and then transferred from the secondary spool to the main spool, and then transferred from the main spool to the secondary spool, etc. To be familiar, the (primary) spool 312 is adapted to supply the mine to the mine network and is also adapted to receive used mines from the hybrid network. Similarly, the + and the blankets are required to be spooled. 3 1 2b may be adapted to provide the saw wire to the wire mesh and is also adapted to receive the used mine wire from the mine wire network. For bidirectional cutting, the controller is adapted to send an actuation command to the main winding spool 梓And a secondary winding shaft, the actuation command in the first step triggering the first winding shaft (4) to the second winding line, and in the second step, initiating the first: winding the shaft to expand the miscellaneous line to the first winding The above pulleys are arranged using a fine saw wire or with a coating (eg drill The coating material is particularly useful. Accordingly, in embodiments that can be combined with other embodiments described herein, the mine manipulation section and the wire-wound device described herein are adapted to have a diameter of less than about 40 μm. a fine saw wire having a diameter of between about 200 μm and about 400 μm, more specifically between about 2 Torr and about 300 μm. However, in other examples, the embodiment may also have The wire diameter is as low as ΙΟΟμιη, or even 8〇μ〇ι. Further, the wire operating section and the wire saw device described herein are suitable for coated wire, for example with a nickel coating embedded with diamond particles. Such saw wires may generally have a diameter of from about 300 μηι to about 400 μηη, such as 31 (^111, 34〇μηι. For these recording lines, t•'mine, line twisting can increase the mine line The risk of breaking 201134628 is either a risk of damaging the coating, so a twist-free operation is advantageous. By using a diamond saw wire, the throughput can be increased by more than 2 times. In the case of a block-cutting device, this can be achieved in this way.处理Mw (even more than 100MW) processing rate. When used When the diamond is sawn, the other parts of the wire saw can be adapted to the diamond saw wire. For example, mechanical parts 'electronic parts and/or software can be used for the use of diamond wires. As mentioned above, 'a plurality of pulleys are used for this description. In line mine installations. Therefore 'considered to expect higher cutting speeds and even higher mine speeds, thinner saw wires or different types of saw wires (such as rock mines) and at customer's facilities There is improved device control. During the minering operation, the pulley rotates generally about its individual axis. According to some embodiments, the transmission can achieve 2000 rpm or more or even 3 rpm or more (for example, 2000 rpm to 4 〇). 〇〇 rpm ) speed, the pulley is suitable for the tangential saw device. For example, during an emergency stop, the wire saw device needs to stop as quickly as possible. Therefore, in any case, the inertia of the pulley (i.e., the moment of inertia of the pulley) causes the pulley to rotate and cannot be stopped immediately. This further pulley rotation may cause damaging tension on the wire, which may result in wire breakage. Further, according to some embodiments (which may be combined with other embodiments described herein), such saw wire breaks may be detected, as described below, to have an absolute value of about 20 乂 to 丨 20 V (such as The position of 30 v to 6 〇 v) can bias the wire. Therefore, the voltage is generated between the saw wire and its components of the wire saw device (such as the outer casing, the frame, the guard area, the outer casing portion of the box, and the door, etc.). For example, the further components can be grounded at an electrical potential. If the wire breaks, the slack end of the wire will contact one of the components of the wire saw device. The voltage between the mine and the wire saw device causes current. Accordingly, if such currents are detected, the silver wire breakage detection system can monitor the presence of such currents and detect the breakage of the mine. There is a further aspect that the increase in cutting speed and the use of fine saw wires and different types of saw wires (such as diamond saw wires) in accordance with embodiments as described herein may result in an increased desire to avoid very small vibrations in the wire saw device. On the other hand, it can be done through the wire manipulation unit. An example of a sawing manipulating unit is described in the applicant's co-pending application, which is filed in the same application as the present application, entitled "WIRE HANDLING UNIT, WIRE SAW DEVICE AND METHOD FOR OPERATING SAME" This is hereby incorporated by reference in its entirety in its entirety herein in its entirety herein in its entirety On the other hand, the deflection of the pulley and other ways of guiding the saw wire to bend or unstable through the wire saw device should be reduced. The common pulleys used to guide the wire through the wire saw device are made of metal such as aluminum so that they provide electrical conductivity for use in the wire breakage detection system. Compared to other metal pulleys, the Ming pulley has superior low quality. These expectations are further improved for more rapid cutting, finer materials, faster line break detection, and increased demand for new types of saw wires, such as diamond saw wires. According to this embodiment, the pulley is made of a conductive plastic material. Therefore, the mass is 2, the moment of inertia can be further reduced, and the conductivity for the mine break can be provided, and the deformation of the mine during maintenance and/or operation can be reduced by 20 201134628. According to this, it is possible to provide a lower moment of inertia and a smoother rotation, while at the same time enabling the wire breakage detection current to flow through the pulley. 4 and 4B illustrate embodiments of some of the pulleys in accordance with the embodiments described herein. The pulley 400 has a wheel portion 410 and a bead portion 450 which is provided on the outside in the radial direction of the wheel portion 410. Therefore, the wheel portion or at least 80% of the wheel portion is basically made of a material composed of a conductive plastic material. According to a still further embodiment (which may be combined with other embodiments described herein), the casing may be a separate component that is detachably coupled to the wheel portion. As shown in Fig. 4A, the opening 412 is provided in the wheel portion 41A so that a spoke structure is provided in the wheel portion, for example. This structure can further increase the weight and thus increase the moment of inertia of the wheel (400). The wheel portion 410 can further have bearing reception. Bruises 414. Thus the bearing receiving portion 414 is adapted to be received on P X (or even above 3000 rPm, such as 2 rpm to 400 < ΓΑΡΠ〇 used bearings. The tire casing 450 is made of an insulating material which is provided on the outside in the radial direction of the wheel 410. In general, the casing providing the portion of the mineral embroidery of the pulley 400 includes more than one groove to guide the wire. Because of the 0 electrical insulation, the IS, line 1G, which is biased with a potential, is electrically insulated from the rim. If the right ore line is biased by the power supply stomach 47 所示 (as indicated by the 4A circle), and the strand 10 contacts the pulley material after the break, the current indicated in the figure can be measured by the measuring device 4. ^ 4B is a cross-sectional view showing an embodiment of the pulley weight. In the figure B, the wheel portion 410 is provided to rotate about the axis 41〇a. The wheel portion 21 201134628 has a tire mounting portion 420. The tire casing 45 is attached to the wheel portion 41, which is located on the outer side in the radial direction of the wheel portion. As shown in Fig. 4B, the groove 452 is provided in the wire guide (tire 450) so that the wire is guided on the pulley 400. As indicated in Figure 4B, the groove 452 defines a plane 462 indicated by the dashed line. The saw wire is guided in the plane 462 during the rotation of the pulley. According to some embodiments (which may be combined with other embodiments described herein), the wheel portion has a projection 422 or a recess (not shown) such that the pulley 420 is in the plane 462 when the rifling is guided. 41〇 is completely balanced. For example, the projection 422 can complement the tire receiving portion 42A. The center of mass can be located in the line guiding plane 462. In Fig. 4B, the centroid is indicated by the arrow, and it is symbolized by the heavy scale. Since the center of mass is located on the guide plane of the saw wire, the pulley 4〇〇 of the building that is subjected to the pivot point 460 (shown in Fig. 4B) is balanced. According to the above, the smooth rotation can be improved further, and the possibility of vibration can be reduced. The manufacture of pulleys from plastic materials, such as plastic materials formed in the mold, optimizes the design and balances the pulleys without significantly increasing manufacturing costs. According to an embodiment which can be combined with other embodiments described herein, the pulley comprises a conductive plastic material. For example, the pulley includes a wheel portion having a conductive plastic material or a wheel portion made of a conductive plastic material. Therefore, according to some optional embodiments, the conductive plastic material ❹胄2 has the following density, for example, 2.00 g/cm3 or less. According to the further visual product: the brother chooses: the modified type, the density can be "" below, the case of the second one to the first one according to the still-optional modification type 22 201134628 (acoustic-~j~ and people,; In combination with other embodiments described herein, the plastic material is a synthetic polymer comprising electrically conductive fibers. For example, the polymeric material can be a polyamine/or the conductive fibers can be carbon fibers. For this reason, carbon fiber also individually increases the hardness of the pulley or the wheel. For example, the bending moment 在 is reduced at the periphery of the wheel portion compared to the bending moment of the corresponding aluminum pulley. As far as the sawing wire guides the bow plane, the wheel is advanced. And the resulting wheel imbalance can be reduced by a drop strength of 200 to 600 MPa (magicitude of 300 to 500 MPa). By providing the wheel with a wheel or wheel opening, the material properties of the conductive plastic material are further reduced in weight to reduce the overall weight of the pulley. According to various embodiments, for example, 3 to 8 openings may be provided in the wheel portion: - generally 6 to 8 openings. Therefore, according to the still further optional embodiment, the moment of inertia can be below 5.GxlG.4kg*m2, for example 3.5xl〇_4 kg*m2 or less, 铋4 "blocking from 1X10 4 kg*m2 Up to 3.5 χ 10·4 kg*m2. According to the embodiment of the prior-in-step and the diameter of the pulley provided for the wire saw device, θ η can also be described as the weight per diameter 'its It is below 730 g/m, and the center of the heart is 500 g/m or less, more generally 300 to 500 g/m. According to the above, the weight of the pulley can be reduced by 5% to 20, for example, compared to the aluminum pulley. Therefore, the conductive county is given from the private armor by the conductive fiber such as carbon fiber embedded in the plastic material. You can use the carbon fiber-filled polyamide to make it basically perfect. The possibility of a balanced pulley (ie the center of mass of the pulley on the ore guiding plane) J Hanshan can be further used for smoother rotation and reduced vibration. For example, FenJista presses the tire on the wheel or This property can be further reduced during maintenance by 23 201134628 injuries caused by falling of pulleys, etc. Bending and deformation are improved. As described above, the pulley according to the embodiment described herein is suitable for a wireline device' or it is equipped for use in a wire saw device. Therefore, more than one of the following properties can be provided. Suitable for rotation at at least 2000 rpm or even at least 3 000 rpm, the pulley comprises a bearing receiving portion for receiving a bearing which is adapted to rotate at at least 2 rpm or even at least 3000 rpm; the wheel portion of the pulley has a casing receiving portion To receive a tire casing having a groove structure with a guide wire; the pulley includes a groove structure having a groove adapted to have a wire having a diameter of 4 μm or less; and a tire having one or more grooves One of the grooves (generally the central groove) is bounded by the silver line guiding plane; the sawing line is balanced, that is, the center of mass is located on the wrong guiding plane, and the diameter of the wheel portion of the pulley is 7〇 to 3〇〇 The mm is, for example, 1 to 2 〇〇 _, etc. The 5A and 5B are diagrams showing the progressive embodiment of the pulley according to the embodiment described herein. The pulley 5 〇〇 has the wheel portion 4 〇 and the tire portion 4Μ, the month. The section is set at the wheel 410 The outer portion of the upper portion. Therefore, the wheel portion or at least 80% of the rim is made of a material consisting essentially of a conductive plastic material. As shown in Fig. 5 and as already described in Fig. 4, the opening 412 (a jin, w - 疋 6 to 8 openings) may be provided in the wheel portion 41 , so that, for example, the wheel han structure can be provided. This can further increase the weight and thus increase the pulley 5 〇〇: moment of inertia, and the portion 410 can further have bearing receiving Part 414. While the bearing receiving portion 41435 is in the receiving bearing, the bearing can be used for 24 201134628 2000 rpm or more or even 3000 rpm or more (for example, 2 rpm to 4000 ΓΡ 〇 旋转 rotation speed. A tire casing 450 made of an insulating material is provided on the outer side of the wheel 4 410, which is located on the receiving portion of the tire casing. In general, the 'tire can provide a full-line guide for the pulley, and the outer moon. . A groove (usually a groove) of (5) or more is included to guide the wire. The cross-sectional side view wheel 410 of the embodiment showing the further step of the pulley 5 (10) in Fig. 5 has a tire mounting portion 420. The tire casing 450 is mounted on the wheel portion 4, i.e., adjacent to the wheel portion. As shown in Fig. 5β, the groove 452 is provided in the misalignment guide of the pulley. The groove 452 defines a plane 462 as indicated in Figure 5 . The hysteresis is guided in plane 462 during rotation of the pulley. According to some embodiments (which may be combined with other implementations described herein), the wheel portion has a projection or (d) (not shown) such that the pulley 4ig is fully balanced with respect to the plane 462 that is guided by the misalignment. For example, the projection 422 can be complementary to the tire receiving portion 420 such that the center of mass is in the mine guiding plane 462. The embodiment of the quality Μ 2 I (which can be used with other embodiments described herein can have a fixed opening to fix the mine to the bearing. Because of 4, optional steps can be set as appropriate) Aligning the opening, such as the opening or the 416, such as the opening, the edge of the opening 412, the edge of the receiving portion of the tire and the edge of the other structure ^ & Can be rounded... two edges (for example, the radius of curvature of a few millimeters of the pulley, for example, can be entered here; for example, to ^ lmm or 2_ to 5_. According to this, Γ weight and possibly improve the head of the pulley during rapid rotation Compared to a corresponding shape with a sharp edge, 'slurry, cold 25 201134628 " p fluid or other solid particles from manufacturing can not settle on such pulleys. According to the further embodiment (which can be described with other Embodiments in combination) 'The plastic material included in the pulley can be resistant to polyethylene glycol, water coolant suitable for sawing in a wire sawing device such as a diamond saw wire, and/or combinations thereof. 0 Hereinafter, the implementation of the present invention will be summarized Some general aspects of the case. Each such general aspect can be combined with any other general aspect (within any of the embodiments described herein) to produce another embodiment. According to one embodiment, a provision is provided for having a saw wire mesh Pulley of the wire saw device of the saw wire "The pulley includes: a wheel portion around the pulley shaft, wherein the wheel portion includes a conductive plastic material; and a wire guide portion on a radially outer side of the wheel portion, Having a groove structure for guiding the wire. According to an optional aspect (which can be provided to a pulley for a wire saw device) and the wire saw device described herein, the density of the conductive plastic material can be Below 2.00 g/cm3, generally less than ug/cv is generally from 1.0 g/cm3 to 1.5 g/cm3. Accordingly, as a further alternative or optionally, the moment of inertia may be 5· Οχ1〇-4 kg*m2 or less, generally 3.5X10-4 kg*m2 or less and/or the weight per diameter may be 73〇g/m or less, generally 500 g/m or less, more generally 3〇〇 Up to 5〇〇g/m. As mentioned above, this can reduce the possibility of saw wire breakage, especially in During the stop or emergency stop of the mining device, during this period, the inertia of the pulley may generate additional tension on the saw line. These and other, bear 26 201134628 may be particularly useful for the diamond saw wire or fine saw wire described herein. In the sawing line, it is necessary to effectively reduce the break of the mine. Therefore, for embodiments that can be combined with other embodiments described herein, the wire saw device and/or the pulley for the wire saw device can be adapted to a diamond saw. The wire can be operated as a diamond ore. For example, it can be done by fitting the groove structure with appropriate grooves (4), different groove depths and/or different groove shapes. In general, it is possible to increase the cutting speed by, for example, 2 times 'to reduce the energy consumption of the line mining device' and to advance (as in another example), the cost of the block or wafer can be greatly reduced. Depending on the aspect of the step-by-step option (which may be combined with other embodiments described herein), the pulley may have a relief strength of 4 〇〇Mpa or more; and/or may be reduced compared to the corresponding aluminum pulley' Bending torque. According to a further advanced alternative or additional embodiment, the knee-forming material can be a synthetic polymeric material comprising electrically conductive fibers, for example the polymeric material can be a polylacide, and the pulley can comprise carbon fibers; and/or the plastic material can be For polyethylene glycol, water-cooled (tetra) bodies and mixtures thereof suitable for secret devices and chemically stable. According to an optional aspect, which may be combined with other embodiments described herein, the material (4) includes (4) and can be a single tire or have (4). In general, the wire guide can be separated from the wheel. For example, a tire casing can be provided on the wheel portion. According to a further embodiment (the basin can be combined with other embodiments described herein), the trench structure can be more than one surrounding trench, wherein - a trench or the trench - defines (d) a guide 27 201134628 Plane. Thus, for example, the center of mass of the pulley can be located within the wire guide plane. According to a still further embodiment, a wire saw device having a pulley of any of the embodiments described herein is provided. Thus, as with one optional aspect, substantially all of the pulleys have substantially the same moment of inertia. For example, the moments of inertia of the pulleys do not deviate from each other by more than 1 〇 % or more than 5%. In general, according to various embodiments, the wire ore device may be a component of a group consisting of a wire saw, a multiple wire saw, a square saw device, and a cutter. According to a further embodiment (which may be combined with other embodiments described herein), the wire saw device may further comprise a body of the wire saw device, a voltage supply adapted to bias the wire to a potential, and a pulley portion The conductive path to the body. According to still a further embodiment, a method of operating a wire saw device having a staggered line forming a wire mesh is provided. The method includes providing a plurality of pulleys having a wheel portion around the pulley shaft, wherein the wheel portion includes a conductive plastic material; biasing the wire to a potential; and contacting the wheel at the line During this time, the presence of current in the wire saw device is monitored. Accordingly, a pulley of a root door embodiment can be provided in accordance with any of the embodiments described herein. According to a further aspect (which may be combined with the dragon 7 described herein, the embodiment thereof), the method may further comprise moving the miscellaneous wire towards the mine net and moving it out of the mine net, wherein the mine is A plurality of pulley guides. 'Once the current is present, the signal is detected' stops the movement of the saw wire in the wire saw device. According to the aspect of the step, the saw line management unit can include the first pulley saw 28 201134628 line tracking system, the system responds to the detected position of the saw line and actuates the _ pulley movement assembly according to the m '--sliding The oil line tracking system includes: a first pulley moving device, which is at least an element selected from the group consisting of a linear actuator, a linear motor, a pneumatic cylinder, and a motor driven by a worm; a mine position detecting device, Suitable for detecting the position of the saw line in the direction along the moving path; the first pulley position controller is operatively connected to the wire position detecting device to receive the detected position of the saw wire, and is adapted to Determining the target position and operatively connecting the first pulley motion device to transmit a movement command causes the first pulley motion device to move the first pulley to the target position. According to a further aspect, the wire management unit is adapted to be a saw wire of a diamond saw wire, i.e. comprising a diamond. According to a further aspect, the main frame portion is rigid and can be rigidly attached or connected to the chassis of the wire saw device or integrally formed with the chassis of the wire saw device. According to a further aspect, the bobbin is adapted to provide a saw wire to the wire mesh and is also adapted to receive a used wire from the wire mesh. According to a further aspect, the spool has a wire carrying area, and the first pulley position controller includes a wire winding pattern and is programmed to determine a target position and operatively coupled to the first pulley motion device to A movement command is transmitted to the first pulley motion device, and the first pulley motion device is caused to move the fourth wheel to the target position. According to the aspect of the step, the main operation line of the slave line operation zone slaves, the saw line management unit further includes a line operation section. According to a further aspect, the main mine maneuvering section has a bobbin shaft adapted to carry a first type of bobbin, and 29 201134628 - a type of reel spool having a sub-winding manipulating section suitable for Set the first axis shaft. According to a further aspect, the present invention is directed to a wire management unit comprising any of the embodiments described herein, wherein the main frame portion rigidly joins the chassis of the wire mining device. According to a further aspect, the wire saw device is selected from the group consisting of a group selected from the group consisting of a wire saw, a multiple wire saw, a square saw device, and a cutter. The sliding wheel, the wire management unit and the wire handling unit of the present invention are particularly useful for a square sawing device. The foregoing is directed to the embodiments of the present invention, and other and further embodiments of the present invention may be devised without departing from the basic scope of the invention, which is defined by the scope of the following claims. BRIEF DESCRIPTION OF THE DRAWINGS A more particular description of the invention, which is briefly summarized as hereinbefore described, can be obtained by reference to the embodiments illustrated in the accompanying drawings. The accompanying drawings are an embodiment of the present invention and are described hereinafter: Fig. 1 shows a schematic view of a line ore apparatus according to the embodiment described herein. Figure 2 shows a schematic view of a further wire saw device in accordance with embodiments described herein. Figure 3 shows a perspective view of the line management unit. 201134628 Figures 4A and 4B show schematic views of a pulley showing an embodiment of a pulley in accordance with an embodiment of the present invention. Figures 5A and 5B show a schematic view of a further slider according to the embodiment described herein. [Main component symbol description] 10 saw wire 200 wire saw device 100 wire saw device 212a, 212b saw wire manipulation 110 wire mesh compartment compartment 111 outer casing portion 213a saw wire mounting area 112 saw wire manipulation device compartment 310 winding wire shaft Chamber 3 10b Secondary bobbin shaft 114 Electrical box 3 12 Reel spool 114a, 114b Leg 312b Secondary bobbin 115 Recess 3 14 Support 120, 124 Slot 320 '330, 340, 350, 121, 125 Series 360, 370 Pulley 122' 126 conduits 320b, 330b, 340b, 130, 132 bobbin 350b '360b, 370b secondary 130a, 132a spool axis 324 pulley mounting unit 134, 136 pulley 324b secondary pulley mounting single 140 support member 31 201134628 362, 374 400 410 410a 412 414 416, 372 Pulley shaft 422 Projection movable member 450 Fetal pulley 452 Groove wheel portion 460 Arrow axis 462 Plane opening 470 Power supply bearing receiving portion 472 Measuring device 416, opening 500 Pulley 32